Mass spectrometry equipment

Abstract

To provide mass spectrometry equipment in which a lens optical system and a field-through connector can be attached to / detached from each other in a simple manner.SOLUTION: Mass spectrometry equipment comprises: a vacuum container; an ion source; a sample introduction pipe; a lens optical system; and a field-through connector 700. A first unit of the lens optical system can be relatively moved with respect to the sample introduction pipe along a connection direction. Second and third units can be relatively moved to the first unit along an orthogonal direction. A first connection piece 411 includes a first energization portion 411b which comes in contact with a first terminal 701 while energizing the first terminal in the connection direction. A second connection piece 422 includes a second energization portion 422b which comes in contact with a second terminal while energizing the second terminal in the orthogonal direction. A third connection piece 433 includes a third energization portion 433b which comes in contact with a third terminal while energizing the third terminal in the orthogonal direction.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a mass spectrometer. [Background technology]

[0002] For example, a mass spectrometer as disclosed in Japanese Patent No. 4692627 is known. This mass spectrometer includes a vacuum vessel, an ion source, a lens optical system, a quadrupole mass filter, and an ion detector. A voltage is applied to the lens optical system from a voltage application unit provided outside the vacuum vessel. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4692627 Summary of the Invention [Problem to be solved by the invention]

[0004] In a mass spectrometer such as that described in Japanese Patent No. 4692627, a feed-through connector is usually attached to the vacuum vessel to electrically connect the voltage application unit and the lens optical system, and each terminal of the feed-through connector is connected to the lens optical system by wiring. In this case, for example, the wiring needs to be disconnected and reconnected when performing maintenance on the lens optical system.

[0005] An object of the present invention is to provide a mass spectrometer that can simplify the attachment and detachment of a lens optical system and a feed-through connector. [Means for solving the problem]

[0006] One aspect of the present invention comprises a vacuum vessel, an ion source disposed within the vacuum vessel for ionizing sample molecules contained in a sample gas, a sample introduction tube for introducing the sample gas into the ion source from outside the vacuum vessel, a lens optical system for extracting ions generated in the ion source to outside the ion source, a voltage application unit disposed outside the vacuum vessel for applying a voltage to the lens optical system, and a feed-through connector for connecting the lens optical system to each other, wherein the lens optical system includes a first lens and comprises a first unit connected to the sample introduction tube, a first connection piece connecting the first unit and the feed-through connector, a second unit including a second lens, a second connection piece connecting the second unit and the feed-through connector, a third unit including a third lens, and a third connection piece connecting the third unit and the feed-through connector. the first unit is movable relative to the sample introduction tube along a connection direction in which the ion source is connected to the sample introduction tube, the second unit and the third unit are movable relative to the first unit along an orthogonal direction that is orthogonal to the connection direction, the feed-through connector has a first terminal in contact with the first connection piece, a second terminal in contact with the second connection piece, and a third terminal in contact with the third connection piece, the first connection piece has a first biasing portion contacting the first terminal while biasing the first terminal at least in the connection direction, the second connection piece has a second biasing portion contacting the second terminal while biasing the second terminal at least in the orthogonal direction, and the third connection piece has a third biasing portion contacting the third terminal while biasing the third terminal at least in the orthogonal direction. Effect of the Invention

[0007] In this mass spectrometer, when each unit of the lens optical system is placed in the vacuum chamber, the first biasing portion of the first connecting piece contacts the first terminal while biasing the first terminal in the connection direction, the second biasing portion of the second connecting piece contacts the second terminal while biasing the second terminal in the orthogonal direction, and the third biasing portion of the third connecting piece contacts the third terminal while biasing the third terminal in the orthogonal direction. This makes it possible to omit wiring as in the past, and simplifies the attachment and detachment of the lens optical system and the feed-through connector. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention; [Diagram 2] FIG. 1 is a front view showing a schematic diagram of a mass spectrometer. [Diagram 3] FIG. 2 is a perspective view of each connection piece and a feed-through connector. [Figure 4] FIG. 2 is a perspective view of a first connecting piece. [Diagram 5] 10A to 10C are diagrams illustrating schematic changes in shape of a first connection piece when the first unit is installed. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding components are designated by the same reference numerals.

[0010] Fig. 1 is a schematic diagram of a mass spectrometer according to one embodiment of the present invention. Fig. 2 is a schematic front view of the mass spectrometer. The mass spectrometer 1 is a device that analyzes mass by ionizing sample molecules or atoms. The mass spectrometer 1 is preferably used in a gas chromatograph or the like.

[0011] As shown in Figures 1 and 2, the mass spectrometer 1 includes a vacuum vessel 100, an ion source 200, a sample introduction tube 300, a lens optical system 400, a quadrupole mass filter 500, an ion detector 600, a feed-through connector 700, and a voltage application unit 800.

[0012] The vacuum vessel 100 is provided with a vacuum pump 110 that draws a vacuum inside the vacuum vessel 100. Inside the vacuum vessel 100, an ion source 200, a lens optical system 400, a quadrupole mass filter 500, and an ion detector 600 are arranged along an ion optical axis C (see FIG. 1).

[0013] The ion source 200 ionizes sample molecules contained in a sample gas. The ion source 200 includes an ionization chamber 210, a filament 220, a trap electrode 230, etc. A sample introduction tube 300 that introduces a sample gas into the ionization chamber 210 from outside the vacuum vessel 100 (gas chromatograph) is connected to the ionization chamber 210.

[0014] The ions generated in the ionization chamber 210 are guided out of the ionization chamber 210 by the lens optical system 400, then separated according to their mass-to-charge ratio in a quadrupole mass filter 500 located downstream of the lens optical system 400, and detected by an ion detector 600.

[0015] The lens optical system 400 is disposed after the ion source 200, and draws ions generated in the ionization chamber 210 out of the ionization chamber 210. The lens optical system 400 has a first unit 410 including a first lens, a second unit 420 including a second lens, a third unit 430 including a third lens, a first connection piece 411, a second connection piece 422, and a third connection piece 433.

[0016] The first unit 410 is disposed after the ionization chamber 210, the second unit 420 is disposed after the first unit 410, and the third unit 430 is disposed after the second unit 420. The lenses in each of the units 410 to 430 define a passage path of the ions (ion optical axis C).

[0017] In order to prevent the first lens from being contaminated with dirt derived from the sample, the first unit 410 is fixed to the ionization chamber 210 and is temperature-regulated together with the ionization chamber 210. The first unit 410, together with the ionization chamber 210, is movable relative to the sample introduction tube 300 along the longitudinal direction of the sample introduction tube 300 (the left-right direction in FIG. 2).

[0018] The second unit 420 and the third unit 430 are fixed to each other. The second unit 420 and the third unit 430 are movable relative to the first unit 410 in an orthogonal direction (direction orthogonal to the paper surface in FIG. 2) that is orthogonal to the connection direction (left-right direction in FIG. 2) in which the first unit 410 is connected to the sample introduction tube 300. The quadrupole mass filter 500 has a partition wall 510 (see FIGS. 1 and 2) formed in a disk shape, and the second unit 420 and the third unit 430 are fitted into the center of the partition wall 510 so as to be coaxial with the central axis of the quadrupole mass filter 500. The quadrupole mass filter 500 is disposed on the back side of the paper surface in FIG. 2 (right side in FIG. 3).

[0019] A voltage is applied to each of the units 410 to 430 from a voltage application unit 800 provided outside the vacuum vessel 100. Specifically, a base voltage is applied to the first unit 410 and the third unit 430 from a base voltage generation unit 810 in the voltage application unit 800, and an adjustment voltage is applied to the second unit 420 from an adjustment voltage generation unit 820 in the voltage application unit 800. The base voltage is a voltage that attracts ions from the ionization chamber 210, and the adjustment voltage is a voltage that repels ions (a voltage of opposite polarity to the base voltage).

[0020] The first connection piece 411 is connected to the first unit 410 by welding or the like. The first connection piece 411 connects the first unit 410 and the feed-through connector 700 together.

[0021] The second connection piece 422 is connected to the second unit 420 by welding or the like. The second connection piece 422 connects the second unit 420 and the feed-through connector 700 together.

[0022] The third connection piece 433 is connected to the third unit 430 by welding or the like. The third connection piece 433 connects the third unit 430 and the feed-through connector 700 together.

[0023] The feed-through connector 700 connects the voltage application unit 800 and the lens optical system 400 to each other. The feed-through connector 700 is connected to the vacuum container 100. As shown in FIG. 3 , the feed-through connector 700 has a first terminal 701, a second terminal 702, and a third terminal 703.

[0024] The first terminal 701 is in contact with the first connection piece 411. The second terminal 702 is in contact with the second connection piece 422. The third terminal 703 is in contact with the third connection piece 433. The first terminal 701 and the third terminal 703 are connected to the base voltage generating unit 810, and the second terminal 702 is connected to the regulated voltage generating unit 820.

[0025] As shown in FIGS. 3 and 4, the first connection piece 411 has a first base end portion 411a, a first biasing portion 411b, and a first guide portion 411c.

[0026] The first base end portion 411a is a portion that is connected to the first unit 410. The first base end portion 411a is formed in a flat plate shape.

[0027] The first biasing portion 411b is connected to the first base end portion 411a. The first biasing portion 411b contacts the first terminal 701 while biasing the first terminal 701 at least in the connection direction. In other words, the first biasing portion 411b contacts the first terminal 701 while applying a biasing force to the first terminal 701 that includes a component that biases the first terminal 701 in the connection direction. In this embodiment, the first biasing portion 411b contacts the first terminal 701 while biasing the first terminal 701 in both the connection direction and the longitudinal direction of the first terminal 701 (the up-down direction in FIG. 2). The first biasing portion 411b is bent so as to be convex in the connection direction.

[0028] The first guide portion 411c is connected to the tip of the first biasing portion 411b. The first guide portion 411c guides the first terminal 701 when the first unit 410 is connected to the sample introduction tube 300. The first guide portion 411c is bent so as to be convex in the direction opposite to the direction in which the first biasing portion 411b is bent. A first slit S1 that receives the first terminal 701 is formed at the tip of the first guide portion 411c. The first slit S1 extends in the connection direction. As shown in FIG. 4, a first tapered portion 411d is formed at the tip of the first guide portion 411c. The first tapered portion 411d has a shape that gradually widens toward the tip of the first slit S1.

[0029] In this embodiment, the first connection piece 411, the second connection piece 422, and the third connection piece 433 are formed in the same shape. That is, the second connection piece 422 has a second base end portion 422a, a second urging portion 422b, and a second guide portion 422c, and the third connection piece 433 has a third base end portion 433a, a third urging portion 433b, and a third guide portion 433c.

[0030] 2 and 3, the bending direction of the second urging portion 422b and the bending direction of the third urging portion 433b are perpendicular to the bending direction of the first urging portion 411b. That is, the second urging portion 422b is in contact with the second terminal 702 while urging the second terminal 702 in both the orthogonal direction and the longitudinal direction of the second terminal 702, and the third urging portion 433b is in contact with the third terminal 703 while urging the third terminal 703 in both the orthogonal direction and the longitudinal direction of the third terminal 703. In addition, the extending direction of the second slit S2 formed in the second guide portion 422c and the extending direction of the third slit S3 formed in the third guide portion 433c are perpendicular to the extending direction of the first slit S1.

[0031] In the mass spectrometer 1 described above, when the lens optical system 400 is installed in the vacuum vessel 100, the first unit 410 can move independently of the second unit 420 and the third unit 430, which facilitates the task of air-tightly connecting the ion source 200, which moves integrally with the first unit 410, to the sample introduction tube 300.

[0032] 5, the first urging portion 411b comes into contact with the first terminal 701 while sliding relative to the first terminal 701. This causes the end of the first terminal 701 to clean the surface of the first urging portion 411b. This prevents poor contact between the first urging portion 411b and the first terminal 701 caused by foreign matter (dust, etc.). In FIG. 5, the first connecting piece 411 before installation is completed is shown by a dashed line.

[0033] As for the second unit 420 and the third unit 430, by pushing the second unit 420 and the third unit 430 toward the quadrupole mass filter 500 along the orthogonal direction, the second connecting piece 422 comes into contact with the second terminal 702 while the second biasing portion 422b biases the second terminal 702, and the third connecting piece 433 comes into contact with the third terminal 703 while the third biasing portion 433b biases the third terminal 703. At this time, a cleaning action is generated by the second terminal 702 and the third terminal 703, as in the case of the first terminal 701. The second unit 420 and the third unit 430 are fitted into the partition wall 510, and are arranged so as to be coaxial with the central axis of the quadrupole mass filter 500.

[0034] As described above, in the mass spectrometer 1 of this embodiment, when each unit 410-430 of the lens optical system 400 is disposed in the vacuum vessel 100, the first biasing portion 411b of the first connection piece 411 contacts the first terminal 701 while biasing the first terminal 701 in the connection direction, the second biasing portion 422b of the second connection piece 422 contacts the second terminal 702 while biasing the second terminal 702 in the orthogonal direction, and the third biasing portion 433b of the third connection piece 433 contacts the third terminal 703 while biasing the third terminal 703 in the orthogonal direction. This makes it possible to omit conventional wiring, and simplifies the attachment and detachment work of the lens optical system 400 and the feed-through connector 700.

[0035] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0036] (Item 1) The mass spectrometer according to one aspect comprises: A vacuum vessel; an ion source disposed within the vacuum vessel for ionizing sample molecules contained in the sample gas; a sample introduction tube for introducing the sample gas into the ion source from outside the vacuum vessel; a lens optical system that extracts ions generated in the ion source to outside the ion source; a voltage application unit provided outside the vacuum vessel and configured to apply a voltage to the lens optical system; and a feed-through connector configured to connect the lens optical system and the voltage application unit to each other, The lens optical system includes: a first unit including a first lens and connected to the sample introduction tube; a first connection piece that connects the first unit and the feed-through connector; a second unit including a second lens; a second connection piece that connects the second unit and the feed-through connector; a third unit including a third lens; a third connection piece that connects the third unit and the feed-through connector, the first unit is movable relative to the sample introduction tube along a connection direction in which the ion source is connected to the sample introduction tube, the second unit and the third unit are movable relative to the first unit along a direction perpendicular to the connection direction, The feed-through connector comprises: a first terminal in contact with the first connection piece; a second terminal in contact with the second connection piece; a third terminal in contact with the third connection piece, the first connection piece has a first biasing portion that contacts the first terminal while biasing the first terminal at least in the connection direction, the second connection piece has a second biasing portion that contacts the second terminal while biasing the second terminal at least in the orthogonal direction, The third connection piece has a third biasing portion that contacts the third terminal while biasing the third terminal at least in the orthogonal direction.

[0037] In this mass spectrometer, when each unit of the lens optical system is placed in the vacuum chamber, the first biasing portion of the first connecting piece contacts the first terminal while biasing the first terminal in the connection direction, the second biasing portion of the second connecting piece contacts the second terminal while biasing the second terminal in the orthogonal direction, and the third biasing portion of the third connecting piece contacts the third terminal while biasing the third terminal in the orthogonal direction. This makes it possible to omit wiring as in the past, and simplifies the attachment and detachment of the lens optical system and the feed-through connector.

[0038] Furthermore, since the first unit can be moved independently of the second and third units, it becomes easy to position each unit.

[0039] (Item 2) In the mass spectrometer 1 according to item 1, the first connecting piece further includes a first guide portion connected to a tip end of the first biasing portion, the first guide portion has a first slit extending in the connection direction, the second connection piece further includes a second guide portion connected to a tip end of the second biasing portion, The second guide portion has a second slit extending in the perpendicular direction, the third connection piece further includes a third guide portion connected to a tip end of the third biasing portion, The third guide portion preferably has a third slit extending in the perpendicular direction.

[0040] According to the mass spectrometer described in paragraph 2, when the first unit is installed in the connection direction, the first slit receives the first terminal, and when the second unit and the third unit are installed in the perpendicular direction, the second slit receives the second terminal and the third slit receives the third terminal, thereby effectively determining the position of each terminal and each connection piece.

[0041] (Item 3) In the mass spectrometer 1 according to item 1 or 2, a quadrupole mass filter disposed downstream of the lens optical system, The quadrupole mass filter has a partition wall, the first unit is fixed to the ion source and is temperature-controlled together with the ion source; It is preferable that the second unit and the third unit are fixed to each other and fitted into the partition so as to be coaxial with a central axis of the quadrupole mass filter.

[0042] According to the mass spectrometer described in the third aspect, adhesion of dirt derived from the sample to the first lens is suppressed, and the second lens and the third lens are arranged coaxially with the central axis of the quadrupole mass filter.

[0043] It should be noted that the embodiments disclosed herein are illustrative in all respects and should not be considered as limiting. The scope of the present disclosure is indicated by the claims, not by the description of the above embodiments, and further includes all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0044] 1 mass spectrometer, 100 vacuum vessel, 200 ion source, 300 sample introduction tube, 400 lens optical system, 410 first unit, 411 first connection piece, 411a first base end, 411b first biasing portion, 411c first guide portion, 411d first tapered portion, 420 second unit, 422 second connection piece, 430 third unit, 433 third connection piece, 500 quadrupole mass filter, 510 partition wall, 600 ion detector, 700 feed-through connector, 701 first terminal, 702 second terminal, 703 third terminal, 800 voltage application portion, S1 first slit, S2 second slit, S3 third slit.

Claims

1. A vacuum vessel; an ion source disposed within the vacuum vessel for ionizing sample molecules contained in the sample gas; a sample introduction tube for introducing the sample gas into the ion source from outside the vacuum vessel; a lens optical system that extracts ions generated in the ion source to outside the ion source; a voltage application unit provided outside the vacuum vessel and configured to apply a voltage to the lens optical system; and a feed-through connector configured to connect the lens optical system and the voltage application unit to each other, The lens optical system includes: a first unit including a first lens and connected to the sample introduction tube; a first connection piece that connects the first unit and the feed-through connector; a second unit including a second lens; a second connection piece that connects the second unit and the feed-through connector; a third unit including a third lens; a third connection piece that connects the third unit and the feed-through connector, the first unit is movable relative to the sample introduction tube along a connection direction in which the ion source is connected to the sample introduction tube, the second unit and the third unit are movable relative to the first unit along a direction perpendicular to the connection direction, The feed-through connector comprises: a first terminal in contact with the first connection piece; a second terminal in contact with the second connection piece; a third terminal in contact with the third connection piece, the first connection piece has a first biasing portion that contacts the first terminal while biasing the first terminal at least in the connection direction, the second connection piece has a second biasing portion that contacts the second terminal while biasing the second terminal at least in the orthogonal direction, the third connection piece has a third biasing portion that contacts the third terminal while biasing the third terminal at least in the orthogonal direction.

2. the first connecting piece further includes a first guide portion connected to a tip end of the first biasing portion, The first guide portion has a first slit extending in the connection direction, the second connection piece further includes a second guide portion connected to a tip end of the second biasing portion, The second guide portion has a second slit extending in the perpendicular direction, the third connection piece further includes a third guide portion connected to a tip end of the third biasing portion, The mass spectrometer according to claim 1 , wherein the third guide portion has a third slit extending in the perpendicular direction.

3. a quadrupole mass filter disposed downstream of the lens optical system, The quadrupole mass filter has a partition wall, the first unit is fixed to the ion source and is temperature-controlled together with the ion source; 3. The mass spectrometer according to claim 1, wherein the second unit and the third unit are fixed to each other and fitted into the partition so as to be coaxial with a central axis of the quadrupole mass filter.

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