Cleaning roller shaft core

Abstract

To provide a cleaning roller shaft core.SOLUTION: The present invention relates to a cleaning roller shaft core including a shaft body and a hollow inside flow passage located in the shaft body, an outer wall of the shaft body having a plurality of distributed through-holes leading to the hollow inside flow passage, and a surface of the outer wall of the shaft body being provided with a plurality of trench-like structures being set in a radial direction and extending in a circle and having a protrusion edge protruding from the surface of the outer wall of the shaft body.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cleaning roller shaft, and more particularly to a cleaning roller shaft of a foam brush roller for cleaning foreign matter and the like on the surface of a semiconductor wafer or a circuit board. [Background technology]

[0002] In order to efficiently and thoroughly remove the particles and debris generated by polishing the surface of the wafer or circuit board, the conventional cleaning method using a large amount of deionized water and chemical solutions, which is currently known in the industry, has been replaced by a cleaning method using a combination of cleaning rollers and brushing to increase efficiency and reduce water consumption. In order not to damage the surface of the object to be cleaned, the contact part between the cleaning roller and the surface of the object to be cleaned must adopt a soft foam material. In addition, in order to achieve a sufficient cleaning effect, the cleaning roller must have a hard core structure so as to withstand a certain strength of pressing force, water pressure and rotation speed applied to the cleaning roller and prevent the cleaning roller from being deformed.

[0003] However, as the size of the wafers to be cleaned increases and the process speed increases, the pressure of the cleaning roller, the cleaning water pressure, and the roller rotation speed must also increase. If the rotation speed of the cleaning roller is at least 500 rpm or more, the adhesive strength of the interface between the heterogeneous foam material and the axial structure cannot withstand, and relative sliding and twisting are likely to occur, making it impossible for the cleaning roller to adhere to the surface of the object to be cleaned, affecting the cleaning effect and even damaging the object to be cleaned.

[0004] The cleaning solution, such as deionized water, is often input from one end of the roller axle, and passes through the foam material so as to be uniformly distributed through the internal flow path of the roller axle and the through holes distributed on the surface of the roller axle, so that the roller axle structure needs to have a specific flow path design. In order to be combined with the conventional machine equipment, the overall size of the cleaning roller usually cannot be changed significantly, and adding a fixing structure for the foam material to the roller axle structure may increase the design and manufacturing difficulty of the entire roller axle. Summary of the Invention [Problem to be solved by the invention]

[0005] Therefore, a cleaning roller axle is required which can increase the adhesion strength between the foam material and the axle structure interface without affecting the main structure and design of the axle, and which does not cause any displacement between the foam material and the axle structure even when high pressing force, water pressure and rotation speed are used in the cleaning process, and which does not cause twisting of the soft foam material. [Means for solving the problem]

[0006] The present invention provides a cleaning roller core comprising a shaft and a hollow inner flow path located within the shaft, an outer wall surface of the shaft having a plurality of dispersed through holes communicating with the hollow inner flow path, and a plurality of groove structures disposed radially and extending in an annular manner on the outer wall surface of the shaft, the groove structures having protruding edges protruding from the outer wall surface of the shaft, the angle between the radial extension direction of these groove structures and one axial direction of the shaft being -80° to 80°, the developed area ratio (Sdr) of the outer wall surface of the shaft having these groove structures being 300% to 800%, and the arithmetic mean height (Sa) of the protruding edges being 70 μm to 300 μm.

[0007] In the cleaning roller shaft core of another embodiment, the maximum peak height (Sp) of the protruding edges of these groove-like structures is in the range of 500 μm to 900 μm.

[0008] In other embodiments of the cleaning roller shaft, these groove-like structures on the outer wall surface of the shaft extend in a parallel arrangement or in a staggered arrangement.

[0009] In another embodiment of the cleaning roller shaft, when the groove structures on the outer wall surface of the shaft body extend in a staggered arrangement, the included angle of the staggered arrangement is between 10° and 45°.

[0010] In another embodiment of the cleaning roller shaft, the cross-sectional shape of these groove-like structures on the outer wall surface of the shaft in the extension direction is a triangle, a rectangle, or a partial arc.

[0011] In another embodiment of the cleaning roller shaft, the opening width of these groove-like structures on the outer wall surface of the shaft is 0.1 mm to 0.9 mm.

[0012] In other embodiments of the cleaning roller shaft, the depth of these groove structures is between 0.35 mm and 1.2 mm.

[0013] In another embodiment of the cleaning roller shaft, these groove-like structures are distributed over the entire outer wall surface of said shaft.

[0014] In another embodiment of the cleaning roller shaft, the inner diameter of the hollow inner flow passage of the shaft is 9 mm to 22 mm.

[0015] In another embodiment of the cleaning roller shaft, the diameter of these through holes in the shaft is 2.5 mm to 6 mm.

[0016] In another embodiment of the cleaning roller axle, the hollow internal passage of the axle has oppositely disposed closed and inlet ends.

[0017] In the following, the above description will be explained in detail in the embodiments to further interpret the technical solution of the present disclosure. [Brief description of the drawings]

[0018] To make the above and other objects, features, advantages and embodiments of the present disclosure more clearly and comprehensibly, the drawings are described as follows. [Figure 1] 2 is a schematic diagram of an embodiment of a cleaning roller shaft of the present invention. [Diagram 2] 6 is a schematic diagram of another embodiment of a cleaning roller shaft core of the present invention. FIG. [Figure 3(a)] 2 is a schematic cross-sectional view in the extension direction of a groove-shaped structure of a shaft core of a cleaning roller according to an embodiment of the present invention. FIG. [Figure 3(b)] 2 is a schematic cross-sectional view in the extension direction of a groove-shaped structure of a shaft core of a cleaning roller according to an embodiment of the present invention. FIG. [Figure 3(c)] 2 is a schematic cross-sectional view in the extension direction of a groove-shaped structure of a shaft core of a cleaning roller according to an embodiment of the present invention. FIG. [Figure 4(a)] 6 is a schematic diagram of another embodiment of a cleaning roller shaft core of the present invention. FIG. [Figure 4(b)] 6 is a schematic diagram of another embodiment of a cleaning roller shaft core of the present invention. FIG. [Figure 4(c)] 6 is a schematic diagram of another embodiment of a cleaning roller shaft core of the present invention. FIG. [Figure 4(d)] 6 is a schematic diagram of another embodiment of a cleaning roller shaft core of the present invention. FIG. [Diagram 5] FIG. 5 is an enlarged view of the axis of the cleaning roller in FIG. [Figure 6] 6 is a cross-sectional view of the axis of the cleaning roller in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] As should be explained, in order to make the features, contents and advantages of the present invention and its achievable effects more easily understandable, the present invention will be described in detail below in the form of an embodiment in conjunction with the drawings. However, the drawings used are merely for illustration and to assist the specification, and are not drawn according to the actual proportion and precise configuration after the present invention is implemented, so the proportion and configuration relationship of the attached drawings should not be used to interpret or limit the actual scope of the present invention in practice.

[0020] Hereinafter, embodiments of the cleaning roller shaft core of the present invention will be described with reference to the related drawings. For ease of understanding, the same components are designated by the same reference numerals in the following embodiments.

[0021] The present invention provides a cleaning roller axle of a foam brush roller for cleaning foreign matter and the like on the surface of a semiconductor wafer or a circuit board, which can increase the adhesion strength between the foam material and the axle structure interface, and does not cause displacement between the foam material and the axle structure or twisting of the foam material even when high pressing force, water pressure, and rotation speed are applied in the cleaning process. As shown in FIG. 1, in one embodiment, the present invention provides a cleaning roller shaft core 100, which includes a shaft 110 and a hollow inner flow path 120, and the shaft outer wall 130 has a plurality of dispersed through holes 140 that are connected to the hollow inner flow path 120, and the surface of the shaft outer wall 130 has a plurality of groove structures 150 that are radially arranged and extend in an annular manner and have protruding edges 151 protruding from the surface of the shaft outer wall 130, wherein the included angle A2 between the radial extension direction D2 of these groove structures 150 and the axial direction D1 of the shaft 110 is -80° to 80°, the developed area ratio (Sdr) of the surface of the outer wall 130 having the groove structures 150 is 300% to 800%, and the arithmetic mean height (Sa) of the protruding edges 151 is 70 μm to 300 μm. In one embodiment, the shaft 110 has four rows of through holes 140 along the axial direction D1, the through holes 140 are equally spaced radially, and have a hole diameter r of 2.5 mm to 6 mm. In one embodiment (see FIG. 6), the hollow inner passage 120 has a closed end 120b and an inlet end 120a disposed opposite each other, and the inner diameter R of the hollow inner passage 120 of the shaft 110 is 9 mm to 22 mm.

[0022] In the cleaning roller shaft of the other embodiment, the maximum peak height (Sp) of the protruding edges 151 of these groove-like structures 150 is between 500 μm and 900 μm.

[0023] In this specification, "maximum peak height (Sp)", "arithmetic mean height (Sa)" and "developed area ratio (Sdr)" are parameters for evaluating surface roughness in general. The Sp and Sa values ​​are the absolute values ​​of the difference between the maximum peak height and the average height of the rough surface relative to the average surface of the surface, and the "developed area ratio (Sdr)" is the ratio of the increase in surface area due to the change in surface structure, where the developed area ratio (Sdr) represents the ratio of the increase in the total surface area (A1) due to the waviness of the surface structure to the projected area (A0) of the measured unit area in the measured unit area, and is obtained by calculation according to formula (1). The developed area ratio is measured by an instrument capable of obtaining the surface morphology, such as a confocal laser scanning microscope, a three-dimensional white light interferometer or a scanning electron microscope, according to the method specified in ISO25178.

[0024] Sdr(%)=[(A1 / A0)-1]x100% Formula (1)

[0025] In the present invention, the Sp and Sa values ​​respectively refer to the maximum peak height and arithmetic mean height of the protruding edges formed in the groove structure relative to the outer wall surface of the shaft when the groove structure is formed, and the Sdr value is the surface area of ​​the outer wall surface of the shaft increased by the groove structure and the protruding edges after the groove structure is formed.

[0026] In the present invention, the groove-like structures 150 can be formed on the outer wall 130 of the shaft body 110 by, for example, engraving with a cutting tool or laser as a structural forming method. When engraving with a cutting tool, the cutting tool feed depth and angle can be adjusted, or when engraving with a laser, the laser energy, angle, moving speed and focus control can be adjusted, so that when forming the groove-like structures 150, protruding edges 151 protruding from the surface of the outer wall 130 can be formed at the same time.

[0027] When the cleaning roller core 100 of the present invention is combined with a foam material (not shown), the foam material can infiltrate into these groove-like structures 150. The outer wall 130 of the shaft 110 has these groove-like structures 150 and protruding edges 151 protruding from the surface of the outer wall 130, and these microstructures greatly increase the surface area of ​​the shaft, improve the contact area between the foam material and the cleaning roller core 100, and strengthen the effective adhesion between the interface of the foam material and the cleaning roller core 100, and the soft foam material enhances factors such as the roller pressing pressure, water pressure, and rotation speed, thereby preventing defects such as uneven localized force twisting.

[0028] The radial extension direction D2 of these groove structures 150 and the axial direction D1 of the shaft body 110 have an included angle of -80° to 80°, so that these groove structures 150 can provide a component force for the cleaning roller to fix the foam material during rotation of the cleaning roller. Also, when the maximum peak height (Sp) of these protruding edges 151 of these groove structures 150 is 500 μm to 900 μm and the arithmetic mean height (Sa) is 70 μm to 300 μm, an acting force perpendicular to the surface tangent direction of the outer wall 130 of the shaft body 110 can be provided, and sliding of the foam material along the rotation direction can be prevented.

[0029] Please refer to FIG. 2. It is a cleaning roller shaft core 200 in another embodiment of the present invention. The multiple groove structures 250 on the surface of the outer wall 230 of the shaft body 210 of the cleaning roller shaft core 200 have the same radial extension direction arranged in parallel, or are arranged in a staggered arrangement having multiple different radial extension directions, and the included angles with the axial direction D1 may all be -80° to 80°, and the included angles (A2, A3) between the radial extension directions D2 and D3 in FIG. 2 and the axial direction D1 are all -80° to 80°. When these groove structures 250 are arranged in a staggered manner, the included angle between the radial extension directions D2 and D3 staggered (see included angle A4 in FIG. 5) is 10° to 45°, preferably 20° to 30°. On the surface of the shaft outer wall 230, the staggered arrangement design of the groove-like structure 250 further provides the cleaning roller shaft core 200 with better anchoring force when bonded to the foam material (not shown), and can bond the shaft 210 and the foam material more tightly.

[0030] 3(a) to 3(c) are schematic cross-sectional views of the grooved structure of the cleaning roller shaft core of the present invention in the extension direction. The protruding edge of the grooved structure 350 is not shown. The cleaning roller shaft core of the present invention provides a grooved structure 350 on the outer wall 330 of the shaft body 310, and the bottom shape of the cross section of the grooved structure 350 is not particularly limited and may be, for example, a triangle, a rectangle, or a partial arc shape, and may be determined according to the method of forming the grooved structure 350, for example, a structural forming method such as engraving with a cutting tool or a laser. In a preferred embodiment of the present invention, the opening width w1 of the multiple grooved structures 350 is 0.1 mm to 0.9 mm, which is advantageous for the infiltration and adhesion of a foam material (not shown). In addition, the depth h of the multiple grooved structures 350 is 0.35 mm to 1.2 mm. Since the depth h of these grooved structures 350 is much smaller than the conventional general wall thickness of the shaft body 310, it does not affect the strength of the entire shaft body 310.

[0031] 4(a)-4(d) are schematic diagrams illustrating an embodiment of the grooved structure of the cleaning roller shaft core of the present invention. Please refer to FIG. 4(a) and FIG. 4(b). They show that the multiple grooved structures 450a and 450b in the cleaning roller shaft cores 400a and 400b are uniformly and periodically distributed at intervals, and are arranged in a parallel or staggered manner on the surface of the outer wall 430 of the shaft body 410. As shown in FIG. 4(c) and FIG. 4(d), the multiple grooved structures 450c and 450d in the cleaning roller shaft cores 400c and 400d are arranged in a parallel or staggered manner and are distributed over the entire surface of the outer wall 430 of the shaft body 410. Each of the groove structures 450a-450d in the outer wall 430 of the shaft body 410 can provide a good and uniform adhesion interface between the outer wall 430 of the shaft body 410 and the foam material, and can achieve the effect of being tightly bonded to the foam material and preventing relative sliding or twisting.

[0032] Furthermore, when the outer edge of the through hole 440 in the outer wall 430 of the shaft body 410 is connected to the groove structures 450a-450d, the cleaning liquid in the hollow inner flow path flows out of the through hole 440 and then partially into the groove structures 450a-450d, and can flow more quickly from the side to the outer wall surface of the cleaning roller shaft due to the rotation of the cleaning roller shaft, achieving an overall uniform dispersion effect.

[0033] In another embodiment of the cleaning roller shaft of the present invention, the hollow inner flow passage has a closed end and an inlet end arranged opposite to each other, and the inner diameter of the hollow inner flow passage of the shaft is 9 mm to 22 mm. In addition, the distribution number, arrangement method and hole diameter of the through holes in the shaft of the cleaning roller shaft of the present invention can be designed according to the needs of actual applications. In a preferred embodiment of the cleaning roller shaft of the present invention, the through holes are distributed at equal intervals in the radial direction and arranged along the axial direction of the shaft. In a preferred embodiment of the present invention, the shaft has four rows of through holes along the axial direction, distributed at equal intervals in the radial direction, and having hole diameters of 2.5 mm to 6 mm.

[0034] The above-described embodiments are merely intended to explain the technical ideas and features of the present invention, and are intended to enable those skilled in the art to understand and practice the contents of the present invention based on the same, and should not limit the patent scope of the present invention. All equivalent changes or modifications made according to the spirit disclosed in the present invention should still be included in the patent scope of the present invention. [Explanation of symbols]

[0035] In order to make the above and other objects, features, advantages, and embodiments of the present disclosure more clearly and comprehensibly, the accompanying symbol descriptions are as follows: 100, 200, 400a, 400b, 400c, 400d: cleaning roller shaft center 110, 210, 310, 410: Shaft body 120: Hollow internal flow path 120a: Entrance end 120b: Closed end 130, 230, 330, 430: Exterior walls 140, 440: Through holes 150, 250, 350, 450a, 450b, 450c, 450d: Grooved structure 151:Protruding edge D1: Axial direction D2, D3: radial extension direction h:depth w1: opening width r: Hole diameter R: Inner diameter A2, A3, A4: Include angle

Claims

1. the shaft includes a shaft body and a hollow internal flow passage located within the shaft body, the shaft body having an outer wall surface with a plurality of through holes provided in a dispersed manner and communicating with the hollow internal flow passage, The outer wall surface of the shaft body has a plurality of groove-like structures disposed radially and extending annularly, the groove-like structures having protruding edges protruding from the outer wall surface of the shaft body; A cleaning roller shaft center, wherein the angle between the radial extension direction of the plurality of groove-like structures and the axial direction of the shaft is -80° to 80°, the developed area ratio (Sdr) of the outer wall surface of the shaft having the plurality of groove-like structures is 300% to 800%, and the arithmetic mean height (Sa) of the protruding edge is 70 μm to 300 μm.

2. 2. The cleaning roller shaft core according to claim 1, wherein a maximum peak height (Sp) of the protruding edges of the plurality of groove-like structures is in the range of 500 μm to 900 μm.

3. The cleaning roller shaft according to claim 1 , wherein the groove structures extend in a parallel arrangement or in a staggered arrangement.

4. 4. The cleaning roller shaft core according to claim 3, wherein when the plurality of groove structures extend in a staggered arrangement, an included angle of the staggered arrangement is in the range of 10 degrees to 45 degrees.

5. The cleaning roller shaft core according to claim 1 , wherein a cross-sectional shape of the plurality of groove structures in an extension direction is a triangle, a rectangle, or a partial arc shape.

6. The cleaning roller shaft core according to claim 5, wherein the opening width of the plurality of groove structures is in the range of 0.1 mm to 0.9 mm.

7. The cleaning roller shaft according to claim 1 , wherein the depth of the plurality of groove structures is in the range of 0.35 mm to 1.2 mm.

8. The cleaning roller shaft according to claim 1 , wherein the plurality of groove structures are distributed over the entire outer wall surface of the shaft body.

9. 2. The cleaning roller shaft according to claim 1, wherein the inner diameter of the hollow inner flow passage is in the range of 9 mm to 22 mm.

10. 2. The cleaning roller shaft core according to claim 1, wherein the diameter of the plurality of through holes in the shaft body is 2.5 mm to 6 mm.

11. The cleaning roller shaft of claim 1 , wherein the hollow internal passage has an oppositely disposed closed end and an inlet end.

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