Leak inspection method and leak inspection device for resin sheet-sealed article

Abstract

To provide a leak inspection device and a leak inspection method capable of performing quantitative leak evaluation and airtightness assurance for a resin sheet-sealed article in which a built-in article is tightly sealed with a resin sheet in a vacuum state by using a probing gas.SOLUTION: A built-in article 3 is packaged by two upper and lower resin sheets 4, 4 having a recessed part formed in a central part, and a flat part of a needle connecting jig 14 is sandwiched by protruding parts of the resin sheets 4, 4. In a first step of resin sheet bonding, a convex welding seal portion is formed on the outer periphery of the resin sheets 4, 4, which is composed of a first bonding seal portion 4a in which the inner peripheral surfaces are mutually bonded and a second bonding seal portion 4b in which the inner peripheral surfaces of the resin sheets 4, 4 and the outer peripheral surfaces of the flat portions are bonded. In a second step of resin sheet bonding, the opening portion of the resin sheet sandwiched between the two recessed corners of the first bonding seal portion 4a is bonding-sealed to form a linear third bonding seal portion 4c.SELECTED DRAWING: Figure 2

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