Sensor, sensor system, and electronic apparatus
Patent Information
- Application Number
- JP2023139067
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-08-29
- Publication Date
- 2025-07-30
- Estimated Expiration
- 2043-08-29
Smart Images
Figure 00000000_0000_ABST
Abstract
Description
[Technical field]
[0001] SUMMARY OF THE DISCLOSURE FIELD OF THE DISCLOSURE Embodiments of the invention relate to sensors, sensor systems and electronic devices. [Background technology]
[0002] For example, there is a sensor having a MEMS (Micro Electro Mechanical Systems) structure. In some cases, electronic devices are controlled by the force obtained by the sensor. It is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]
[0003] [Patent Document 1] Chinese Patent No. 104976996 Summary of the Invention [Problem to be solved by the invention]
[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors, sensor systems and electronic devices that allow for improved performance. [Means for solving the problem]
[0005] According to an embodiment, the sensor includes a base including a first surface, a fixed portion fixed to the first surface, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. A first gap is provided between the first surface and the movable portion. The fixed portion includes a first center in a first plane parallel to the first surface. The movable portion includes a first annular portion and a second annular portion. The first fixed electrode includes a first region and a second region. The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region. A first region width of the first region in a radial direction parallel to the first plane and passing through the first center is different from a second region width of the second region in the radial direction. A first opposing region width of the first opposing region in the radial direction is different from a second opposing region width of the second opposing region in the radial direction. [Brief description of the drawings]
[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 8]FIG. 8 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 10] FIG. 10 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 11] FIG. 11 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 12] 12(a) to 12(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 13] 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0007] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 2 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 3 to 6 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 3 is a cross-sectional view taken along line A1-A2 in Fig. 2. Fig. 4 is a cross-sectional view taken along line A3-A4 in Fig. 2. Fig. 5 is a cross-sectional view taken along line A5-A6 in Fig. 2. Fig. 6 is a cross-sectional view taken along line A7-A8 in Fig. 2.
[0008] As shown in FIGS. 1 to 6, a sensor 110 according to the embodiment includes a base 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B.
[0009] The base body 50s includes a first surface 50a. The fixed portion 10F is fixed to the first surface 50a. The movable portion 10M is supported by the fixed portion 10F.
[0010] 3 to 6, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. The fixed part 10F is provided on the insulating member 55. No insulating member 55 is provided between the first surface 50a and the movable part 10M.
[0011] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide.
[0012] As shown in FIG. 1, the fixed portion 10F includes a first center 10C in a first plane PL1 that is parallel to the first surface 50a.
[0013] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the XY plane.
[0014] The movable portion 10M includes a first annular portion 11 and a second annular portion 12. In this example, the second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The first annular portion 11 may be provided between the fixed portion 10F and the second annular portion 12.
[0015] As shown in FIG. 2, the first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular portion 12 and the first annular portion 11. The first opposing region s1 is provided between the second annular portion 12 and the first region r1. The second region r2 is provided between the second annular portion 12 and the first annular portion 11. The second opposing region s2 is provided between the second annular portion 12 and the second region r2.
[0016] 2, the width (length) of the first region r1 in the radial direction Dr that is parallel to the first plane PL1 and passes through the first center 10C is defined as a first region width wr1. The width (length) of the second region r2 in the radial direction Dr is defined as a second region width wr2. The first region width wr1 is different from the second region width wr2.
[0017] 2, the width (length) of the first facing region s1 in the radial direction Dr is defined as a first facing region width ws1. The width (length) of the second facing region s2 in the radial direction Dr is defined as a second facing region width ws2. The first facing region width ws1 is different from the second facing region width ws2.
[0018] In this example, the first region width wr1 is wider than the second region width wr2, and the first facing region width ws1 is narrower than the second facing region width ws2.
[0019] For example, a plurality of fixed electrodes 30 are provided in the sensor 110. The plurality of fixed electrodes 30 are fixed to, for example, the first surface 50a. The plurality of fixed electrodes 30 include a first fixed electrode 31A and a first opposing fixed electrode 31B.
[0020] For example, a signal including an AC component is applied between a part of the multiple fixed electrodes 30 and the movable part 10M. This causes the movable part 10M to vibrate. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in capacitance. The change in the vibration state due to the external force is caused, for example, by Coriolis force. The change in the vibration state can be detected, for example, by another part of the multiple fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The change in the vibration state may be detected, for example, by the control unit 70.
[0021] In the sensor 110, the first fixed electrode 31A faces the first annular portion 11. The first opposing fixed electrode 31B faces the second annular portion 12. By providing these electrodes in a narrow region between the second annular portion 12 and the first annular portion 11, the desired vibration can be obtained even if the size of the sensor 110 is reduced. Changes in the vibration state can be detected with high accuracy.
[0022] In the sensor 110, the first fixed electrode 31A and the first opposing fixed electrode 31B are each provided with a wide region and a narrow region. For example, a connection member (e.g., a bonding wire) can be stably connected to the wide region. For example, even when the size of the sensor 110 is small, a stable electrical connection can be obtained. For example, the stable electrical connection enables highly accurate detection with suppressed noise. According to the embodiment, a sensor with improved characteristics can be provided.
[0023] For example, the first region r1 and the second region r2 may be interchanged. For example, in this case, a wide region and a narrow region are provided. For example, even if the size of the sensor 110 is small, a stable electrical connection can be obtained. In the embodiment, the first annular portion 11 may be inside the second annular portion 12.
[0024] For example, in the sensor 110, one of the first condition and the second condition may be satisfied. In the first condition, the first region width wr1 is wider than the second region width wr2, and the first facing region width ws1 is narrower than the second facing region width ws2. In the second condition, the first region width wr1 is narrower than the second region width wr2, and the first facing region width ws1 is wider than the second facing region width ws2.
[0025] The second region r2 is continuous with the first region r1. The second opposing region s2 may be continuous with the first opposing region s1.
[0026] The direction from the second opposing region s2 to the first region r1 is along a circumferential direction Dc centered on the first center 10C. In the circumferential direction Dc, the second opposing region s2 opposes the first region r1.
[0027] As shown in FIG. 2, the first fixed electrode 31A may further include a third region r3. The first opposing fixed electrode 31B may further include a third opposing region s3. The third region r3 is provided between the second annular portion 12 and the first annular portion 11. At least a portion of the third opposing region s3 is provided between the second annular portion 12 and the third region r3. The first opposing region s1 is between the second opposing region s2 and the third opposing region s3. The first region width wr1 is different from the third region width wr3 of the third region r3 in the radial direction Dr. The first opposing region width ws1 is different from the third opposing region width ws3 of the third opposing region s3 in the radial direction Dr.
[0028] In this example, the first region width wr1 is wider than the second region width wr2. The first facing region width ws1 is narrower than the second facing region width ws2. The first region width wr1 is wider than the third region width wr3. The first facing region width ws1 is narrower than the third facing region width ws3.
[0029] The first region width wr1 may be narrower than the second region width wr2, and the first opposing region width ws1 may be wider than the second opposing region width ws2. In this case, the first region width wr1 is narrower than the third region width wr3, and the first opposing region width ws1 is wider than the third opposing region width ws3.
[0030] For example, in the circumferential direction Dc about the first center 10C, at least a portion of the first region r1 is provided between the second region r2 and the third region r3. In the circumferential direction Dc, at least a portion of the first opposing region s1 is provided between the second opposing region s2 and the third opposing region s3.
[0031] For example, a first ratio of a first absolute value of a difference between the first region width wr1 and the second region width wr2 to the first region width wr1 may be 0.9 or more and 30 or less. A second ratio of a second absolute value of a difference between the first opposing region width ws1 and the second opposing region width ws2 to the first opposing region width ws1 may be 0.9 or more and 30 or less.
[0032] The second region width wr2 may be 0.05 to 30 times the first region width wr1, and the third region width wr3 may be 0.8 to 1.2 times the second region width wr2.
[0033] The second facing region width ws2 may be 0.05 to 30 times the first facing region width ws1, and the third facing region width ws3 may be 0.8 to 1.2 times the second facing region width ws2.
[0034] FIG. 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. As shown in FIG. 7, in the sensor 110, the length of the second facing region s2 in the circumferential direction Dc centered on the first center 10C is defined as the second facing region length Ls2. The length of the third facing region s3 in the circumferential direction Dc is defined as the third facing region length Ls3. The second facing region length Ls2 may be, for example, 0.8 times or more and 1.2 times or less the third facing region length Ls3. For example, the second facing region length Ls2 may be, for example, substantially the same as the third facing region length Ls3. Vibrations with good symmetry are obtained. For example, noise is suppressed. High-precision detection is facilitated.
[0035] The length of the first region r1 in the circumferential direction Dc is defined as the first region length Lr1. The first region length Lr1 may be, for example, 0.1 to 10 times the second opposing region length Ls2. The first region length Lr1 may be, for example, 0.8 to 1.2 times the second opposing region length Ls2.
[0036] As shown in FIG. 2, the movable portion 10M may include a plurality of first connection portions 21. The plurality of first connection portions 21 extend along the radial direction Dr. The plurality of first connection portions 21 connect the first annular portion 11 and the second annular portion 12. The first fixed electrode 31A and the first opposing fixed electrode 31B are provided between one of the plurality of first connection portions 21 and another of the plurality of first connection portions 21. The other one of the plurality of first connection portions 21 is adjacent to one of the plurality of first connection portions 21 in the circumferential direction Dc.
[0037] 2, the sensor 110 may further include a second fixed electrode 32A and a second opposing fixed electrode 32B. The movable portion 10M may further include a third annular portion 13. The second annular portion 12 is provided between the third annular portion 13 and the first annular portion 11. In this example, the third annular portion 13 is between the fixed portion 10F and the second annular portion 12.
[0038] As shown in FIG. 2, the second fixed electrode 32A includes a fourth region r4 and a fifth region r5. The second opposing fixed electrode 32B includes a fourth opposing region s4 and a fifth opposing region s5. The fourth region r4 is provided between the third annular portion 13 and the second annular portion 12. The fourth opposing region s4 is provided between the third annular portion 13 and the fourth region r4. The fifth region r5 is provided between the third annular portion 13 and the second annular portion 12. The fifth opposing region s5 is provided between the third annular portion 13 and the fifth region r5.
[0039] A fourth region width wr4 of the fourth region r4 in the radial direction Dr is different from a fifth region width wr5 of the fifth region r5 in the radial direction Dr. A fourth opposing region width ws4 of the fourth opposing region s4 in the radial direction Dr is different from a fifth opposing region width ws5 of the fifth opposing region s5 in the radial direction Dr.
[0040] The second fixed electrode 32A and the second opposing fixed electrode 32B each have a wide region and a narrow region. This facilitates electrical connection. Noise is suppressed, enabling highly accurate detection.
[0041] In this example, the first region width wr1 is wider than the second region width wr2. The first opposing region width ws1 is narrower than the second opposing region width ws2. The fourth region width wr4 is narrower than the fifth region width wr5. The fourth opposing region width ws4 is wider than the fifth opposing region width ws5.
[0042] 2, the second fixed electrode 32A may further include a sixth region r6. The second opposing fixed electrode 32B may further include a sixth opposing region s6. The sixth region r6 is provided between the third annular portion 13 and the second annular portion 12. At least a portion of the sixth opposing region s6 is provided between the third annular portion 13 and the sixth region r6. At least a portion of the fourth region r4 is between the fifth region r5 and the sixth region r6.
[0043] The fourth region width wr4 is different from a sixth region width wr6 of the sixth region r6 in the radial direction Dr. The fourth opposing region width ws4 is different from a sixth opposing region width ws6 of the sixth opposing region s6 in the radial direction Dr.
[0044] In this example, the first region width wr1 is wider than the second region width wr2. The first opposing region width ws1 is narrower than the second opposing region width ws2. The fourth region width wr4 is narrower than the fifth region width wr5. The fourth opposing region width ws4 is wider than the fifth opposing region width ws5. The fourth region width wr4 is narrower than the fifth region width wr5. The fourth opposing region width ws4 is wider than the fifth opposing region width ws5. The fourth region width wr4 is narrower than the sixth region width wr6. The fourth opposing region width ws4 is wider than the sixth opposing region width ws6.
[0045] For example, the fifth region r5 is provided between the fifth opposing region s5 and the second region r2. For example, the second opposing region s2 is provided between the fifth region r5 and the second region r2.
[0046] FIG. 8 is a schematic plan view illustrating the sensor according to the first embodiment. 8, in the sensor 111 according to the embodiment, the configurations of the first fixed electrode 31A and the first opposing fixed electrode 31B are different from those in the sensor 110. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.
[0047] The sensor 111 also includes a base body 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B. A first gap G1 is provided between a first surface 50a of the base body 50s and the movable part 10M (see FIGS. 3 to 6). As shown in FIG. 8, the fixed part 10F includes a first center 10C in a first plane PL1 parallel to the first surface 50a.
[0048] The movable portion 10M includes a plurality of annular portions 10 and a plurality of connecting portions 20. The plurality of annular portions 10 are provided around the fixed portion 10F with the first center 10C as the center. The plurality of annular portions 10 include a first annular portion 11, a second annular portion 12, and a third annular portion 13. The second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The third annular portion 13 is provided between the fixed portion 10F and the second annular portion 12.
[0049] The multiple connection parts 20 include a first connection part 21, a second connection part 22, and a third connection part 23. The first connection part 21 is provided between the second annular part 12 and the first annular part 11, and connects the second annular part 12 and the first annular part 11. The first connection part 21 is along a first radial direction Dr1. The first radial direction Dr1 passes through the first center 10C and is along a first plane PL1. The second connection part 22 is provided between the third annular part 13 and the second annular part 12, and connects the third annular part 13 and the second annular part 12. The second connection part 22 is along a second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C and is along the first plane PL1. The third connection part 23 is provided between the second annular part 12 and the first annular part 11, and connects the second annular part 12 and the first annular part 11. The third connection portion 23 has a third radial direction Dr3 that passes through the first center 10C and is aligned with the first plane PL1.
[0050] The second radiation direction Dr2 intersects with the first radiation direction Dr1. The third radiation direction Dr3 intersects with the first radiation direction Dr1 and the second radiation direction Dr2. The angle between the second radiation direction Dr2 and the first radiation direction Dr1 (first angle) is smaller than the angle between the third radiation direction Dr3 and the first radiation direction Dr1 (second angle). In this example, the first angle is substantially 1 / 2 of the second angle.
[0051] The first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular portion 12 and the first annular portion 11. The first opposing region s1 is provided between the second annular portion 12 and the first region r1. The second region r2 is provided between the second annular portion 12 and the first annular portion 11. The second opposing region s2 is provided between the second annular portion 12 and the second region r2.
[0052] The first annular portion 11 includes a first intersecting position p1 that intersects with the second radial direction Dr2. The second annular portion 12 includes a second intersecting position p2 that intersects with the second radial direction Dr2. First radial gaps g1 are provided between the first intersecting position p1 and the second intersecting position p2, between the first region r1 and the second region r2, and between the first opposing region s1 and the second opposing region s2.
[0053] In the sensor 111, four independent electrode regions (first region r1, second region r2, first opposing region s1, and second opposing region s2) are provided in a region surrounded by the first connecting portion 21, the third connecting portion 23, the second annular portion 12, and the first annular portion 11. These electrode regions can cause the second annular portion 12 and the first annular portion 11 to generate a desired vibration. Alternatively, the vibration state of the second annular portion 12 and the first annular portion 11 can be accurately detected. By using the four independent electrode regions, for example, noise can be suppressed. Highly accurate detection is possible. A sensor with improved characteristics can be provided. For example, the influence of noise contained in the electrical signal applied to the fixed electrode 30 can be suppressed.
[0054] The first region r1 and the second region r2 are on one circumferential direction Dc. The first opposing region s1 and the second opposing region s2 are on one circumferential direction Dc. The first opposing region s1 and the first region r1 are on one radial direction Dr. The second opposing region s2 and the second region r2 are on one radial direction Dr. Such four independent electrode regions form one set. Multiple sets may be lined up along the circumferential direction Dc. The first region r1, the second region r2, the first opposing region s1, and the second opposing region s2 are arc-shaped extending along the circumferential direction Dc.
[0055] In the sensor 111, the connection portion 20 is not provided between the first intersecting position p1 and the second intersecting position p2. The movable portion 10M has high flexibility. Vibrations can be generated effectively.
[0056] In the sensor 111, the multiple connection portions 20 extend along the radial direction Dr.
[0057] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. 9, in a sensor 112 according to the embodiment, the configurations of a first fixed electrode 31A and a first opposing fixed electrode 31B are different from those in the sensor 110. Except for this, the configuration of the sensor 112 may be similar to the configuration of the sensor 110.
[0058] The sensor 112 also includes a base body 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B. A first gap G1 is provided between a first surface 50a of the base body 50s and the movable part 10M (see FIGS. 3 to 6). As shown in FIG. 9, the fixed part 10F includes a first center 10C in a first plane PL1 parallel to the first surface 50a.
[0059] In the sensor 112, the movable portion 10M includes a plurality of annular portions 10 and a plurality of connecting portions 20. The plurality of annular portions 10 are provided around the fixed portion 10F with the first center 10C as the center. The plurality of annular portions 10 include a first annular portion 11, a second annular portion 12, and a third annular portion 13. The second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The third annular portion 13 is provided between the fixed portion 10F and the second annular portion 12. The second annular portion 12 is adjacent to the first annular portion 11. The third annular portion 13 is adjacent to the second annular portion 12.
[0060] The multiple connection portions 20 include a first connection portion 21 and a second connection portion 22. The first connection portion 21 and the second connection portion 22 are provided between the third annular portion 13 and the first annular portion 11. The first connection portion 21 and the second connection portion 22 connect the third annular portion 13, the second annular portion 12, and the first annular portion 11.
[0061] The first connection portion 21 is aligned along a first radial direction Dr1. The first radial direction Dr1 passes through the first center 10C and is aligned along the first plane PL1. The second connection portion 22 is aligned along a second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C and is aligned along the first plane PL1. The second radial direction Dr2 intersects with the first radial direction Dr1. For example, the second radial direction Dr2 is inclined with respect to the first radial direction Dr1.
[0062] The first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular portion 12 and the first annular portion 11. The first opposing region s1 is provided between the second annular portion 12 and the first region r1. The second region r2 is provided between the second annular portion 12 and the first annular portion 11. The second opposing region s2 is provided between the second annular portion 12 and the second region r2. The second connection portion 22 passes between the first region r1 and the second region r2 and between the first opposing region s1 and the second opposing region s2.
[0063] In the sensor 112, the three annular portions 10 are continuously connected by the first connecting portion 21. The three annular portions 10 are continuously connected by the second connecting portion 22. For example, a high-intensity signal is easily obtained. The high-intensity signal can suppress noise. In the sensor 112, a sensor with improved characteristics can be provided.
[0064] The first region r1, the second region r2, the first opposing region s1 and the second opposing region s2 are arc-shaped and extend along the circumferential direction Dc.
[0065] In the sensor 112, the multiple connection portions 20 may further include a third connection portion 23. The third connection portion 23 is provided between the third annular portion 13 and the first annular portion 11, and connects the third annular portion 13, the second annular portion 12, and the first annular portion 11. The third connection portion 23 is along a third radial direction Dr3. The third radial direction Dr3 passes through the first center 10C and is along the first plane PL1. The third radial direction Dr3 intersects with the first radial direction Dr1 and the second radial direction Dr2. The angle (first angle) between the second radial direction Dr2 and the first radial direction Dr1 is smaller than the angle (second angle) between the third radial direction Dr3 and the first radial direction Dr1. In this example, the first angle is substantially 1 / 2 of the second angle.
[0066] In the circumferential direction Dc, the first region r1 and the first opposing region s1 are provided between the first connection portion 21 and the second connection portion 22. The second region r2 and the second opposing region s2 are provided between the second connection portion 22 and the third connection portion 23.
[0067] In the sensor 112, the first region r1 and the second region r2 are located on one circumferential direction Dc. The first opposing region s1 and the second opposing region s2 are located on one circumferential direction Dc. The first opposing region s1 and the first region r1 are located on one radial direction Dr. The second opposing region s2 and the second region r2 are located on one radial direction Dr. Such four independent electrode regions form one set. Multiple sets may be arranged along the circumferential direction Dc.
[0068] FIG. 10 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 10 illustrates the fixed part 10F and the movable part 10M. In the sensor 120 according to the embodiment, the movable part 10M includes a first structure 41. For example, the first structure 41 is connected to the first annular part 11. The first annular part 11 is provided between the fixed part 10F and the first structure 41. The first structure 41 functions as, for example, a weight. Stable vibration is easily obtained. For example, noise can be suppressed.
[0069] The movable portion 10M may include a second structure 42. The second structure 42 is provided between the fixed portion 10F and the first annular portion 11. The second structure 42 is connected to the first annular portion 11, for example. The second structure 42 may be connected to one of the multiple connection portions 20. The second structure 42 functions as, for example, a weight. Noise is suppressed.
[0070] As shown in FIG. 10, the movable part 10M may further include a first radiating structure 28p. The first radiating structure 28p is connected to one of the plurality of annular parts 10. In this example, the first radiating structure 28p is connected to the fourth annular part 14. The first radiating structure 28p extends from one of the plurality of annular parts 10 along a first radial direction Dr1. The first radiating structure 28p is separated from another one of the plurality of annular parts 10 in the first radial direction Dr1. In this example, the first radiating structure 28p is separated from the fifth annular part 15 in the first radial direction Dr1. The other one of the plurality of annular parts 10 is adjacent to the one of the plurality of annular parts 10 among the plurality of annular parts 10. The other one of the plurality of annular parts 10 is closest to the one of the plurality of annular parts 10 among the plurality of annular parts 10.
[0071] The movable part 10M may further include a second radiating structure 28q. The second radiating structure 28q is connected to the one of the plurality of annular parts 10. The second radiating structure 28q is connected to the fifth annular part 15. The second radiating structure 28q extends from the other one of the plurality of annular parts 10 toward the one of the plurality of annular parts 10 along a first radial direction Dr1. The second radiating structure 28q extends from the fifth annular part 15 toward the fourth annular part 14 along the first radial direction Dr1. The second radiating structure 28q is separated from the first radiating structure 28p in the first radial direction Dr1.
[0072] By providing such a radiation structure, the distribution of the entire mass can be made uniform without connecting parts of the adjacent annular portions 10. It becomes easier to obtain higher characteristics. For example, the movable portion 10M can vibrate with a moderate degree of freedom. It can vibrate in a stable state. The signal strength based on the vibration is high. High sensitivity detection becomes possible.
[0073] As shown in FIG. 10, the sensor 120 may include an inner structure 48. The inner structure 48 is fixed to the first surface 50a. A fixed portion 10F is provided around the inner structure 48. Electrical connection may be made through the inner structure 48. In this example, the inner structure 48 includes a first inner structure 48a and a second inner structure 48b. The inner structure 48 (e.g., the first inner structure 48a and the second inner structure 48b, etc.) may be electrically insulated from the fixed portion 10F and the movable portion 10M. At least a part of the inner structure 48 (e.g., the first inner structure 48a and the second inner structure 48b, etc.) may be electrically connected to the fixed portion 10F or the movable portion 10M by wiring for electrical connection or the like.
[0074] In the sensor 120, the multiple annular portions 10 include a first annular portion 11, a second annular portion 12, a third annular portion 13, a fourth annular portion 14, and a fifth annular portion 15. The number of the multiple annular portions 10 is arbitrary.
[0075] Second embodiment The second embodiment relates to an electronic device. FIG. 11 is a schematic view illustrating an electronic device according to the second embodiment. 11, an electronic device 310 according to an embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high accuracy.
[0076] 11, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.
[0077] 12(a) to 12(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 12(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 12(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing plant or the like. As shown in FIG. 12(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 12(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 12(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 12(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 12(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 12(h), the electronic device 310 may be at least a part of a car. The electronic device 310 may include, for example, at least one of a robot and a moving object.
[0078] 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in FIG. 13(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example of FIG. 13(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit a signal obtained from the sensor 110, for example, by at least one of a wireless and a wired method. The sensor 430 is provided, for example, on a slope surface 410 of a road 400 or the like. The sensor 430 can monitor, for example, the state of a facility (for example, infrastructure) or the like. The sensor 430 may be, for example, a state monitoring device.
[0079] For example, the sensor 430 detects a change in the condition of the slope surface 410 of the road 400 with high accuracy. The change in the condition of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. A signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.
[0080] As shown in FIG. 13(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided on a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the pier 440 may change. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.
[0081] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A first fixed electrode; A first opposing fixed electrode; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion includes a first center in a first plane parallel to the first surface, The movable portion includes a first annular portion and a second annular portion, the first fixed electrode includes a first region and a second region; the first opposing fixed electrode includes a first opposing region and a second opposing region, The first region is provided between the second annular portion and the first annular portion, the first opposing region is provided between the second annular portion and the first region, The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, a first region width of the first region in a radial direction parallel to the first plane and passing through the first center is different from a second region width of the second region in the radial direction; A sensor, wherein a first facing area width of the first facing area in the radial direction is different from a second facing area width of the second facing area in the radial direction.
[0082] (Technical proposal 2) Either the first condition or the second condition is satisfied, In the first condition, the first region width is wider than the second region width, and the first opposing region width is narrower than the second opposing region width. The sensor described in Technical Proposal 1, wherein, in the second condition, the first region width is narrower than the second region width, and the first opposing region width is wider than the second opposing region width.
[0083] (Technical proposal 3) The second region is continuous with the first region, The sensor described in Technical Solution 1 or 2, wherein the second facing area is continuous with the first facing area.
[0084] (Technical proposal 4) The sensor according to any one of Technical Solutions 1 to 3, wherein a direction from the second facing region to the first region is along a circumferential direction centered on the first center.
[0085] (Technical proposal 5) the first fixed electrode further includes a third region; the first opposing fixed electrode further includes a third opposing region, the third region is provided between the second annular portion and the first annular portion, At least a portion of the third opposing region is provided between the second annular portion and the third region, the first opposing region is between the second opposing region and the third opposing region, the first region width is different from a third region width of the third region in the radial direction, The sensor described in technical proposal 1, wherein the first facing area width is different from the third facing area width of the third facing area in the radial direction.
[0086] (Technical proposal 6) The first region width is wider than the second region width, The first facing region width is narrower than the second facing region width, The first region width is wider than the third region width, The sensor described in Technical Proposal 5, wherein the first facing region width is narrower than the third facing region width.
[0087] (Technical proposal 7) At least a portion of the first region is provided between the second region and the third region in a circumferential direction about the first center, The sensor described in Technical Proposal 5 or 6, wherein in the circumferential direction, at least a portion of the first opposing region is provided between the second opposing region and the third opposing region.
[0088] (Technical proposal 8) The sensor described in Technical Proposal 5 or 6, wherein a second opposing region length of the second opposing region in a circumferential direction centered on the first center is 0.8 to 1.2 times a third opposing region length of the third opposing region in the circumferential direction.
[0089] (Technical proposal 9) The sensor described in Technical Proposal 8, wherein a first region length of the first region in the circumferential direction is 0.1 to 10 times the length of the second opposing region.
[0090] (Technical proposal 10) a first ratio of a first absolute value of a difference between the first region width and the second region width to the first region width is equal to or greater than 0.9 and equal to or less than 30; The sensor described in technical proposal 1, wherein a second ratio of a second absolute value of a difference between the first opposing region width and the second opposing region width to the first opposing region width is greater than or equal to 0.9 times and less than or equal to 30 times.
[0091] (Technical proposal 11) the movable portion includes a plurality of first connection portions extending along the radial direction, the plurality of first connection portions connect the first annular portion and the second annular portion, the first fixed electrode and the first opposing fixed electrode are provided between one of the plurality of first connection portions and another of the plurality of first connection portions, The sensor according to any one of Technical Solutions 1 to 10, wherein the other one of the plurality of first connection parts is adjacent to the one of the plurality of first connection parts.
[0092] (Technical proposal 12) A second fixed electrode; A second opposing fixed electrode; Further equipped with The movable portion further includes a third annular portion, The second annular portion is provided between the third annular portion and the first annular portion, the second fixed electrode includes a fourth region and a fifth region, the second opposing fixed electrode includes a fourth opposing region and a fifth opposing region, the fourth region is provided between the third annular portion and the second annular portion, the fourth opposing region is provided between the third annular portion and the fourth region, the fifth region is provided between the third annular portion and the second annular portion, the fifth opposing region is provided between the third annular portion and the fifth region, a fourth region width of the fourth region in the radial direction is different from a fifth region width of the fifth region in the radial direction, The sensor described in Technical Proposal 1, wherein a fourth opposing area width of the fourth opposing area in the radial direction is different from a fifth opposing area width of the fifth opposing area in the radial direction.
[0093] (Technical proposal 13) The first region width is wider than the second region width, The first facing region width is narrower than the second facing region width, The fourth region width is narrower than the fifth region width, The sensor described in Technical Proposal 12, wherein the width of the fourth opposing region is wider than the width of the fifth opposing region.
[0094] (Technical proposal 14) the second fixed electrode further includes a sixth region, the second opposing fixed electrode further includes a sixth opposing region, the sixth region is provided between the third annular portion and the second annular portion, At least a portion of the sixth opposing region is provided between the third annular portion and the sixth region, At least a portion of the fourth region is between the fifth region and the sixth region; the fourth region width is different from the sixth region width of the sixth region in the radial direction, The sensor described in technical proposal 12, wherein the width of the fourth opposing region is different from the width of the sixth opposing region in the radial direction.
[0095] (Technical proposal 15) The first region width is wider than the second region width, The first facing region width is narrower than the second facing region width, The fourth region width is narrower than the fifth region width, The fourth facing region width is wider than the fifth facing region width, The fourth region width is narrower than the fifth region width, The fourth facing region width is wider than the fifth facing region width, The fourth region width is narrower than the sixth region width, The sensor described in Technical Proposal 14, wherein the width of the fourth facing region is wider than the width of the sixth facing region.
[0096] (Technical proposal 16) The fifth region is provided between the fifth opposing region and the second region, The sensor described in Technical Proposal 15, wherein the second opposing region is provided between the fifth region and the second region.
[0097] (Technical proposal 17) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A first fixed electrode; A first opposing fixed electrode; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion includes a first center in a first plane parallel to the first surface, The movable portion includes a plurality of annular portions and a plurality of connection portions, The plurality of annular portions are provided around the fixed portion with the first center as a center, the plurality of annular portions include a first annular portion, a second annular portion between the fixing portion and the first annular portion, and a third annular portion between the fixing portion and the second annular portion, the plurality of connection portions include a first connection portion, a second connection portion, and a third connection portion; the first connection portion is provided between the second annular portion and the first annular portion and connects the second annular portion and the first annular portion; the first connection portion is aligned along a first radial direction that passes through the first center and is aligned along the first plane, the second connection portion is provided between the third annular portion and the second annular portion and connects the third annular portion and the second annular portion; the second connection portion is along a second radial direction passing through the first center and along the first plane, the third connection portion is provided between the second annular portion and the first annular portion and connects the second annular portion and the first annular portion; the third connection portion is along a third radial direction passing through the first center and along the first plane, the second radial direction intersects with the first radial direction, the third radial direction intersects with the first radial direction and the second radial direction, a first angle between the second radiation direction and the first radiation direction is smaller than a second angle between the third radiation direction and the first radiation direction; the first fixed electrode includes a first region and a second region; the first opposing fixed electrode includes a first opposing region and a second opposing region, The first region is provided between the second annular portion and the first annular portion, the first opposing region is provided between the second annular portion and the first region, The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, the first annular portion includes a first intersecting position intersecting the second radial direction, the second annular portion includes a second intersecting position intersecting the second radial direction, A sensor, comprising: a first radial gap provided between the first intersection position and the second intersection position, between the first region and the second region, and between the first opposing region and the second opposing region.
[0098] (Technical proposal 18) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A first fixed electrode; A first opposing fixed electrode; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion includes a first center in a first plane parallel to the first surface, The movable portion includes a plurality of annular portions and a plurality of connection portions, The plurality of annular portions are provided around the fixed portion with the first center as a center, the plurality of annular portions include a first annular portion, a second annular portion between the fixing portion and the first annular portion, and a third annular portion between the fixing portion and the second annular portion, the plurality of connection portions include a first connection portion and a second connection portion, the first connection portion and the second connection portion are provided between the third annular portion and the first annular portion and connect the third annular portion, the second annular portion, and the first annular portion; the first connection portion is aligned along a first radial direction that passes through the first center and is aligned along the first plane, the second connection portion is along a second radial direction passing through the first center and along the first plane, the second radial direction intersects with the first radial direction, the first fixed electrode includes a first region and a second region; the first opposing fixed electrode includes a first opposing region and a second opposing region, The first region is provided between the second annular portion and the first annular portion, the first opposing region is provided between the second annular portion and the first region, The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, The second connection portion passes between the first region and the second region and between the first opposing region and the second opposing region.
[0099] (Technical proposal 19) A sensor according to any one of technical proposals 1 to 18; a detection target member to which the sensor is fixed; A sensor system comprising:
[0100] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 18; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising:
[0101] According to the embodiments, it is possible to provide a sensor, a sensor system, and an electronic device that can improve characteristics.
[0102] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.
[0103] The above describes the embodiment of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the member, substrate, sensor unit, housing, sensor element, base, fixed unit, movable unit, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effect by appropriately selecting them from the known range.
[0104] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.
[0105] In addition, all sensors, sensor systems, and electronic devices that can be implemented by a person skilled in the art by appropriate design modifications based on the sensors, sensor systems, and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.
[0106] In addition, within the scope of the concept of the present invention, a person skilled in the art may think of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.
[0107] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]
[0108] 10: annular portion, 10C: first center, 10F: fixed portion, 10M: movable portion, 11-15: first to fifth annular portions, 20: connection portion, 21-23: first to third connection portions, 28p, 28q: first and second radiation structures, 30: fixed electrode, 31A, 32A: first and second fixed electrodes, 31B, 32B: first and second opposing fixed electrodes, 41, 42: first and second structures, 48: inner structure, 48a, 48b: first and second inner structures, 50a: first surface, 50s: base, 55: insulating member, 70: control unit, 81: detection target member, 110-112, 120: sensor, 170: circuit control unit, 180: circuit, 185: driving device, 210: sensor system, 310: electronic device, 400: road, 410: slope surface, 420: transmitter / receiver, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: river, Dc: circumferential direction, Dr: radial direction, Dr1-Dr3: first to third radial directions, G1: first gap, Lr1: first region length, Ls2, Ls3: second and third opposing region lengths, PL1: first plane, S1: signal, g1: first radial gap, p1, p2: first and second intersection positions, r1-r6: first to sixth regions, s1-s6: first to sixth opposing regions, wr1-wr6: first to sixth region widths, ws1-ws6: first to sixth opposing region widths
Claims
1. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A first fixed electrode; A first opposing fixed electrode; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion includes a first center in a first plane parallel to the first surface, The movable portion includes a first annular portion and a second annular portion, the first fixed electrode includes a first region and a second region; the first opposing fixed electrode includes a first opposing region and a second opposing region, The first region is provided between the second annular portion and the first annular portion, the first opposing region is provided between the second annular portion and the first region, The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, a first region width of the first region in a radial direction parallel to the first plane and passing through the first center is different from a second region width of the second region in the radial direction; A sensor, wherein a first facing area width of the first facing area in the radial direction is different from a second facing area width of the second facing area in the radial direction.
2. Either the first condition or the second condition is satisfied, In the first condition, the first region width is wider than the second region width, and the first opposing region width is narrower than the second opposing region width. The sensor according to claim 1 , wherein, in the second condition, the first region width is narrower than the second region width, and the first facing region width is wider than the second facing region width.
3. the first fixed electrode further includes a third region; The first opposing fixed electrode further includes a third opposing region, The third region is provided between the second annular portion and the first annular portion, At least a portion of the third opposing region is provided between the second annular portion and the third region, the first opposing region is between the second opposing region and the third opposing region, the first region width is different from a third region width of the third region in the radial direction; The sensor according to claim 1 , wherein the first facing region width is different from a third facing region width of the third facing region in the radial direction.
4. The first region width is wider than the second region width, The first facing region width is narrower than the second facing region width, The first region width is wider than the third region width, The sensor according to claim 3 , wherein the first facing region width is narrower than the third facing region width.
5. In a circumferential direction about the first center, at least a portion of the first region is provided between the second region and the third region, The sensor according to claim 3 , wherein the at least a portion of the first opposing region is provided between the second opposing region and the third opposing region in the circumferential direction.
6. A second fixed electrode; A second opposing fixed electrode; Further equipped with The movable portion further includes a third annular portion, The second annular portion is provided between the third annular portion and the first annular portion, the second fixed electrode includes a fourth region and a fifth region, the second opposing fixed electrode includes a fourth opposing region and a fifth opposing region, the fourth region is provided between the third annular portion and the second annular portion, the fourth opposing region is provided between the third annular portion and the fourth region, The fifth region is provided between the third annular portion and the second annular portion, The fifth opposing region is provided between the third annular portion and the fifth region, a fourth region width of the fourth region in the radial direction is different from a fifth region width of the fifth region in the radial direction, The sensor according to claim 1 , wherein a fourth facing region width of the fourth facing region in the radial direction is different from a fifth facing region width of the fifth facing region in the radial direction.
7. The second fixed electrode further includes a sixth region, The second opposing fixed electrode further includes a sixth opposing region, The sixth region is provided between the third annular portion and the second annular portion, At least a portion of the sixth opposing region is provided between the third annular portion and the sixth region, At least a portion of the fourth region is between the fifth region and the sixth region, The fourth region width is different from a sixth region width of the sixth region in the radial direction, The sensor according to claim 6 , wherein the fourth facing region width is different from a sixth facing region width of the sixth facing region in the radial direction.
8. The first region width is wider than the second region width, The first facing region width is narrower than the second facing region width, The fourth region width is narrower than the fifth region width, The fourth opposing region width is wider than the fifth opposing region width, The fourth region width is narrower than the fifth region width, The fourth opposing region width is wider than the fifth opposing region width, The fourth region width is narrower than the sixth region width, The sensor according to claim 7 , wherein the fourth facing region width is wider than the sixth facing region width.
9. A sensor according to claim 1; a detection target member to which the sensor is fixed; A sensor system comprising:
10. A sensor according to claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising: