Fully decoupled three-axis MEMS gyroscope and electronic product

Abstract

Embodiments of the present disclosure provide a fully decoupled three-axis MEMS gyroscope and an electronic product. The gyroscope comprises: a substrate, and an X / Y proof mass, Z proof masses, driving structures and Z decoupling masses that are fixed on the substrate; the X / Y proof mass is arranged around outer sides of the Z proof masses, the driving structures and the Z decoupling masses; the Z proof masses are oppositely arranged in an x-axis direction; the driving structures are oppositely arranged at outer sides of the Z proof masses in the x-axis direction; and the Z decoupling masses are oppositely arranged at inner sides of the Z proof masses in the x-axis direction. The X / Y proof mass is elastically connected to the driving structures adjacent thereto, the Z proof masses are elastically connected to the driving structures adjacent thereto, and the Z decoupling masses are elastically connected to the Z proof masses adjacent thereto. The gyroscope improves the Coriolis conversion rate of the X / Y proof mass, maximizes the utilization of the chip area, reduces chip size and cost, and reduces coupling errors and quadrature errors, thereby improving sensing accuracy.

Description

Full decoupling three-axis MEMS gyroscope and electronic product TECHNICAL FIELD

[0001] The embodiment of the disclosure belongs to the technical field of gyroscope, and particularly relates to a full decoupling three-axis MEMS gyroscope and electronic product. BACKGROUND

[0002] The MEMS gyroscope is a kind of micro angular velocity sensor made by micro mechanical processing technology and microelectronic technology.

[0003] The MEMS out-of-plane swing gyroscope is a typical representative in the MEMS out-of-plane detection gyroscope. The driving mode of the MEMS swing gyroscope swings around the axis of the vertical mass block. When the angular velocity Omega is applied, due to the Coriolis effect, the gyroscope will transfer energy to the sensitive mode, so that the vibration disc swings out of plane relative to the driving. The size of Omega can be obtained by detecting the displacement of the out-of-plane swing.

[0004] In the prior art, the X / Y detection mass block is arranged in the center, and the Z detection mass block and the driving part are arranged outside the X / Y detection mass block, which results in low Coriolis force conversion efficiency of the X / Y mass block and low chip area utilization rate. In addition, the Z-axis detection is not decoupled, and the orthogonal error is large.

[0005] In view of the above problems, it is necessary to provide a full decoupling three-axis MEMS gyroscope and electronic product which is reasonable in design and can effectively improve the above problems. TECHNICAL PROBLEM

[0006] The embodiment of the disclosure aims to at least solve one of the technical problems existing in the prior art, and provides a full decoupling three-axis MEMS gyroscope and electronic product.

[0007] One aspect of the embodiment of the disclosure provides a full decoupling three-axis MEMS gyroscope, comprising: a substrate, an X / Y detection mass block fixed to the substrate, a plurality of Z detection mass blocks, a plurality of driving structures and a plurality of Z decoupling mass blocks, wherein the X / Y detection mass block is arranged outside the plurality of Z detection mass blocks, the plurality of driving structures and the plurality of Z decoupling mass blocks.

[0008] The plurality of Z detection mass blocks are arranged opposite to each other along the x-axis direction.

[0009] The plurality of driving structures are arranged opposite to each other along the x-axis direction outside the plurality of Z detection mass blocks.

[0010] The plurality of Z decoupling mass blocks are arranged opposite to each other along the x-axis direction inside the plurality of Z detection mass blocks; wherein

[0011] The X / Y detection mass is elastically connected with the driving structure adjacent thereto, each Z detection mass is elastically connected with the driving structure adjacent thereto, and the Z decoupling mass is elastically connected with the Z detection mass adjacent thereto.

[0012] Optionally, the X / Y detection mass is symmetrically distributed relative to the x-axis direction and the y-axis direction.

[0013] The plurality of Z detection masses arranged oppositely are symmetrically distributed relative to the y-axis direction, and each Z detection mass is symmetrically distributed relative to the x-axis direction.

[0014] The plurality of driving structures arranged oppositely are symmetrically distributed relative to the x-axis direction and the y-axis direction.

[0015] The plurality of Z decoupling masses arranged oppositely are symmetrically distributed relative to the x-axis direction and the y-axis direction.

[0016] Optionally, further comprising a plurality of X / Y detection out-of-plane electrodes, a plurality of Z detection in-plane electrodes, and a plurality of in-plane driving electrodes.

[0017] The plurality of X / Y detection out-of-plane electrodes are arranged on the side of the X / Y detection mass away from the substrate along the x-axis direction and the y-axis direction, respectively.

[0018] The Z detection in-plane electrode is arranged on the side of the corresponding Z decoupling mass away from the substrate.

[0019] The in-plane driving electrode is arranged on the side of the corresponding driving structure away from the substrate.

[0020] Optionally, further comprising a first coupling beam, a second coupling beam, and a first connecting beam.

[0021] The Z detection mass is elastically connected with the driving structure adjacent thereto through the first coupling beam.

[0022] The X / Y detection mass is elastically connected with the driving structure adjacent thereto through the second coupling beam.

[0023] The Z decoupling mass is elastically connected with the Z detection mass adjacent thereto through the first connecting beam.

[0024] Optionally, further comprising a plurality of coupling blocks, a plurality of third coupling beams, a plurality of fourth coupling beams, and a plurality of first anchor points fixed to the substrate.

[0025] The plurality of coupling blocks and the plurality of first anchor points are arranged on the inner side of the oppositely arranged Z decoupling masses.

[0026] The first end of the coupling block is elastically connected with the Z decoupling mass block adjacent thereto through the third coupling beam, and the second end of the coupling block is elastically connected with the first anchor point through the fourth coupling beam.

[0027] Optionally, the plurality of first anchor points are located at a central region of the substrate, and the plurality of coupling blocks are relatively distributed on two sides of the plurality of first anchor points along a y axis.

[0028] Optionally, the apparatus further comprises a plurality of second anchor points and a plurality of first guide beams.

[0029] The plurality of second anchor points are fixed to the substrate and arranged at corner ends of the substrate.

[0030] The second anchor points are elastically connected with the driving structures adjacent thereto through the corresponding first guide beams.

[0031] Optionally, the apparatus further comprises a plurality of second connecting beams and a plurality of third anchor points fixed to the substrate.

[0032] The third anchor points are elastically connected with the X / Y detection mass blocks adjacent thereto on a side facing the Z detection mass block through the corresponding second connecting beams.

[0033] The plurality of third anchor points and the plurality of second connecting beams are arranged in a ring on an outer side of the Z decoupling mass block.

[0034] Optionally, the apparatus further comprises a plurality of second guide beams and a plurality of fourth anchor points fixed to the substrate.

[0035] The fourth anchor points are elastically connected with the Z decoupling mass block through the second guide beams.

[0036] Another aspect of the embodiments of the present disclosure provides an electronic product comprising the fully decoupled triaxial MEMS gyroscope described above.

[0037] The fully decoupled triaxial MEMS gyroscope and electronic product of this disclosure, by circling the X / Y detection mass block around the Z detection mass block, the driving structure, and the Z decoupling mass block, ensures that for the Z detection mass block, both the detection mode and the driving mode are in-plane translations, without affecting its Coriolis effect conversion. For the X / Y detection mass block, the Z detection mass block is arranged where the Coriolis conversion rate of the XY detection mass block is low, improving the Coriolis conversion rate of the X / Y detection mass block, maximizing the utilization of chip area, reducing chip size and cost while maintaining the same performance. By setting the Z decoupling mass block, the displacement of the Z detection mass block can be eliminated in the driving mode, making the Z detection mode completely decoupled from the X / Y detection mode, effectively reducing coupling error. The decoupling of Z detection from the Z mass block ensures that Z detection only has displacement in the detection mode, effectively reducing orthogonality error and improving the detection accuracy of the gyroscope. The Z decoupling mass block can greatly reduce the displacement at the Z detection electrode in the driving mode, reducing interference terms in the detection value and improving the accuracy of gyroscope detection. The gyroscope in this embodiment has a high ratio of shared mass between drive and detection, which effectively improves the conversion of Coriolis force and enhances the sensitivity of the gyroscope. Attached Figure Description

[0038] Figure 1 is a schematic diagram of the structure of a fully decoupled three-axis MEMS gyroscope according to an embodiment of this disclosure;

[0039] Figure 2 is an enlarged view of point A in Figure 1;

[0040] Figure 3 is an enlarged view of point B in Figure 1;

[0041] Figure 4 is a schematic diagram of the structure of the fully decoupled triaxial MEMS gyroscope of this disclosure after adding an out-of-plane X / Y detection out-of-plane electrode, a Z detection in-plane electrode and an in-plane driving electrode.

[0042] Figure 5 is a side view of Figure 4;

[0043] Figure 6 is a schematic diagram of the fully decoupled three-axis MEMS gyroscope in the driving mode according to an embodiment of the present disclosure.

[0044] Figure 7 is a schematic diagram of the structure of the fully decoupled triaxial MEMS gyroscope in the x detection mode according to an embodiment of the present disclosure;

[0045] Figure 8 is a schematic diagram of the structure of a fully decoupled triaxial MEMS gyroscope in the y-detection mode according to an embodiment of the present disclosure.

[0046] Figure 9 is a schematic diagram of the structure of a fully decoupled three-axis MEMS gyroscope in the z-detection mode according to an embodiment of this disclosure. Detailed Implementation

[0047] In order for those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below with reference to the drawings and specific embodiments.

[0048] In order to facilitate the description of the full decoupling three-axis MEMS gyroscope of the embodiments of the present disclosure, a three-dimensional coordinate system of x-y-z axes is established, and the three directions are respectively the x-axis direction, the y-axis direction, and the z-axis direction (i.e. the out-of-plane direction) perpendicular to the x-axis and the y-axis, wherein the plane on which the x-axis and the y-axis are located is defined as the reference plane.

[0049] As shown in FIG. 1, an aspect of the embodiments of the present disclosure provides a full decoupling three-axis MEMS gyroscope, comprising a substrate (not shown in the figure), an X / Y detection mass 1, a plurality of Z detection masses 2, a plurality of driving structures 3 and a plurality of Z decoupling masses 4 fixed on the substrate respectively, wherein the X / Y detection mass 1 is annularly arranged outside the plurality of Z detection masses 2, the plurality of driving structures 3 and the plurality of Z decoupling masses 4. It should be noted that in the present embodiment, the X / Y detection mass is a one-piece structure, and the X / Y detection mass is annularly arranged outside the plurality of Z detection masses 2, the plurality of driving structures 3 and the plurality of Z decoupling masses 4 as a whole.

[0050] The plurality of Z detection masses 2 are arranged opposite to each other along the x-axis direction. The plurality of driving structures 3 are arranged opposite to each other along the x-axis direction outside the plurality of Z detection masses 2. The plurality of Z decoupling masses 4 are arranged opposite to each other along the x-axis direction inside the plurality of Z detection masses 2. Among them, the X / Y detection mass 1 is elastically connected with the driving structure 3 adjacent thereto, each Z detection mass 2 is elastically connected with the driving structure 3 adjacent thereto, and the Z decoupling mass 4 is elastically connected with the Z detection mass 2 adjacent thereto.

[0051] It should be noted that in the present embodiment, the X / Y detection mass is a one-piece structure, and the X / Y detection mass is annularly arranged outside the plurality of Z detection masses 2, the plurality of driving structures 3 and the plurality of Z decoupling masses 4 as a whole.

[0052] The full decoupling three-axis MEMS gyroscope of the present embodiment adopts an optimal arrangement, the X / Y detection mass 1 is annularly arranged at the outermost side, the driving structure 3 and the Z detection mass 2 are arranged inside the annulus, and the advantages are: for the Z detection mass 2, the detection mode and the driving mode are both in-plane translation, and the arrangement of the X / Y detection mass 1 inside or outside the annulus does not affect the Coriolis effect conversion. For the X / Y detection mass 1, the in-plane and out-of-plane rotation mode, the Coriolis force formula is , it can be seen from the formula that the larger the radius, the greater the Coriolis force, so the X / Y detection mass 1 has high Coriolis conversion rate on the outer side and low Coriolis conversion rate on the inner side. Based on this, the Z detection mass 2 is arranged at the low Coriolis conversion rate position of the X / Y detection mass 1, so as to maximize the use of the chip area, reduce the chip size under the same performance, and reduce the cost.

[0053] It needs to be further explained that in the embodiment, the number of the Z detection mass 2 is two, the two Z detection masses 2 are oppositely arranged along the x axis and located in the central region of the substrate. The number of the driving structure 3 is two, as shown in FIG. 1, the two driving structures 3 are oppositely arranged along the x axis and respectively located on the outer side of the Z detection mass 2. The number of the Z decoupling mass 4 is four, every two Z decoupling masses 4 are distributed as a group, and the two groups of Z decoupling masses 4 are oppositely arranged along the x axis and respectively located on the inner side of the Z detection mass 2.

[0054] Among them, the number of the Z detection mass 2, the driving structure 3 and the Z decoupling mass 4 is not specifically limited in the embodiment and can be selected according to actual needs.

[0055] Specifically, the fully decoupled three-axis MEMS gyroscope in the embodiment has four working modes, which are driving mode, x-axis detection mode, y-axis detection mode and z-axis detection mode.

[0056] Among them, when detecting angular velocity, the fully decoupled three-axis MEMS gyroscope will first make the gyroscope in the driving mode. As shown in FIG. 6, in the driving mode, one of the two driving structures 3 translates along the positive direction of the y axis, and the other driving structure 3 translates along the negative direction of the y axis, that is, the directions of motion of the two driving structures 3 are opposite (the directions of motion of the two driving structures 3 are shown by black arrows in FIG. 6). At this time, the two driving structures 3 will drive the two Z detection masses 2 adjacent thereto to move along the positive direction of the y axis and the negative direction of the y axis respectively in two opposite directions, and the two driving structures 3 will drive the X / Y detection mass 1 to rotate, wherein the directions of motion of the X / Y detection mass 1 and the Z detection mass 2 are shown by white arrows in FIG. 6.

[0057] In the driving mode, the Z detection mass 2 moves along the y axis direction with the driving structure 3, and the Z detection mass 2 is elastically connected with the Z decoupling mass 4 through the third coupling beam 12 and the second guide beam 19 in the shape of “U” respectively. The stiffness of the third coupling beam 12 and the second guide beam 19 in the y axis direction is much larger than that in the x axis direction, so the displacement of the Z decoupling mass 4 in the driving mode is much smaller than that of the Z detection mass 2. Therefore, by arranging the Z decoupling mass, the displacement of the Z detection mass can be eliminated in the driving mode.

[0058] As shown in FIG. 7, when the full decoupled tri-axis MEMS gyroscope is subjected to an angular velocity in the x-axis direction, the X / Y detection mass 1 is subjected to a Coriolis force in the Z-axis direction (as shown by the arrow in FIG. 7), which excites the x-axis detection mode, so that the X / Y detection mass 1 produces out-of-plane vibration displacement along the Z-axis (i.e., vibration displacement out of the reference plane) on the opposite sides of the X / Y detection mass 1 in the x-axis direction. By detecting the out-of-plane vibration displacement of the X / Y detection mass 1 in the z-axis direction on the opposite sides of the X / Y detection mass 1 in the x-axis direction, the angular velocity of the full decoupled tri-axis MEMS gyroscope around the x-axis can be obtained.

[0059] As shown in FIG. 8, when the full decoupled tri-axis MEMS gyroscope is subjected to an angular velocity in the y-axis direction, the X / Y detection mass 1 is subjected to a Coriolis force in the Z-axis direction (as shown by the arrow in FIG. 8), which excites the y-axis detection mode, so that the X / Y detection mass 1 produces out-of-plane vibration displacement along the Z-axis (i.e., vibration displacement out of the reference plane) on the opposite sides of the X / Y detection mass 1 in the y-axis direction. By detecting the out-of-plane vibration displacement of the X / Y detection mass 1 in the z-axis direction on the opposite sides of the X / Y detection mass 1 in the y-axis direction, the angular velocity of the full decoupled tri-axis MEMS gyroscope around the y-axis can be obtained.

[0060] As shown in FIG. 9, when the full decoupled tri-axis MEMS gyroscope is subjected to an angular velocity in the z-axis direction, the Z detection mass 2 is subjected to a Coriolis force in the X-axis direction (as shown by the arrow in FIG. 9), which excites the z-axis detection mode. Under the action of the Coriolis force in the x-axis direction, the Z detection mass 2 and the Z decoupling mass 4 produce in-plane vibration displacement along the X-axis (i.e., vibration displacement in the reference plane). By detecting the in-plane vibration displacement of the Z detection mass 2 and the Z decoupling mass 4 in the x-axis direction, the angular velocity of the full decoupled tri-axis MEMS gyroscope around the z-axis can be obtained.

[0061] The full decoupling three-axis MEMS gyroscope of the embodiment of the present disclosure, by arranging the X / Y detection mass block ring outside the Z detection mass block, the driving structure and the Z decoupling mass block, for the Z detection mass block, the detection mode and the driving mode are both in-plane translation, which does not affect the Coriolis effect conversion; for the X / Y detection mass block, the Z detection mass block is arranged at the place where the XY mass detection block has low Coriolis conversion rate, which improves the Coriolis conversion rate of the X / Y detection mass block, maximizes the use of chip area, reduces the chip size under the same performance, and reduces the cost. By setting the Z decoupling mass block, the displacement of the Z detection mass block under the driving mode can be eliminated, so that the Z detection mode and the X / Y detection mode are fully decoupled, and the coupling error is effectively reduced; the Z detection and the Z mass block decoupling are used to make the Z detection have displacement only under the detection mode, effectively reducing the orthogonal error and improving the detection accuracy of the gyroscope; the Z decoupling mass block can greatly reduce the displacement of the Z detection electrode under the driving mode, reduce the interference term of the detection value, and improve the accuracy of the gyroscope detection. The gyroscope of the embodiment has high common mass ratio of driving and detection, effectively improves the conversion of Coriolis force, and improves the sensitivity of the gyroscope.

[0062] For example, as shown in FIG. 1, the X / Y detection mass blocks are symmetrically distributed with respect to the x-axis direction and the y-axis direction. Specifically, the shapes of the upper and lower parts of the X / Y detection mass block are the same, and the shapes of the left and right parts of the X / Y detection mass block are also the same.

[0063] The plurality of Z detection mass blocks 2 arranged oppositely are symmetrically distributed with respect to the y-axis direction, and each Z detection mass block 2 is symmetrically distributed with respect to the x-axis direction. Specifically, in the embodiment, the two Z detection mass blocks 2 are symmetrically distributed with respect to the y-axis direction.

[0064] The plurality of driving structures 3 arranged oppositely are symmetrically distributed with respect to the x-axis direction and the y-axis direction. Specifically, as shown in FIG. 1, in the embodiment, two driving structures 3 are oppositely distributed along the x-axis direction, wherein each driving structure 3 includes two driving members 31, and the two driving members 31 are symmetrically distributed along the y-axis direction, that is, the four driving members 31 are symmetrically distributed with respect to the x-axis direction and the y-axis direction.

[0065] The plurality of Z decoupling mass blocks 4 arranged oppositely are symmetrically distributed with respect to the x-axis direction and the y-axis direction. Specifically, as shown in FIG. 1, the number of Z decoupling mass blocks 4 is four, and every two Z decoupling mass blocks 4 are distributed above and below as a group, and the two groups of Z decoupling mass blocks 4 are oppositely arranged along the x-axis direction, that is, the four Z decoupling mass blocks 4 are symmetrically distributed with respect to the x-axis direction and the y-axis direction.

[0066] The full decoupling three-axis MEMS gyroscope in the embodiment adopts symmetrical layout for the X / Y detection mass and the gyro sensitive mass, which facilitates differential detection. The gyroscope is differentially driven, which can effectively improve the stability and impact resistance of the gyroscope drive. The xyz three-axis detection modes of the gyroscope can realize anti-phase vibration, so that the differential detection of the gyroscope can be realized, and the influence of acceleration impact and orthogonal error can be effectively eliminated. In addition, the drive and detection share a mass with a high proportion, which effectively improves the conversion of Coriolis force and improves the sensitivity of the gyroscope.

[0067] As shown in FIGS. 4 and 5, the full decoupling three-axis MEMS gyroscope further includes a plurality of X / Y detection out-of-plane electrodes 5, a plurality of Z detection in-plane electrodes 6, and a plurality of in-plane drive electrodes 7.

[0068] The plurality of X / Y detection out-of-plane electrodes 5 are arranged on the side of the X / Y detection mass 1 away from the substrate along the x-axis direction and the y-axis direction. Specifically, in the embodiment, the number of X / Y detection out-of-plane electrodes 5 is four, which are arranged on the upper and lower sides and the left and right sides of the X / Y detection mass 1. The four X / Y detection out-of-plane electrodes are symmetrically distributed with respect to the x-axis direction and the y-axis direction.

[0069] The Z detection in-plane electrodes 6 are arranged on the side of the corresponding Z decoupling mass 4 away from the substrate. Specifically, in the embodiment, the number of Z detection in-plane electrodes 6 is four, which are arranged on the upper part of the corresponding Z decoupling mass 4. The four Z detection in-plane electrodes 6 are symmetrically distributed with respect to the x-axis direction and the y-axis direction.

[0070] The in-plane drive electrodes 7 are arranged on the side of the corresponding drive structure 3 away from the substrate. Specifically, in the embodiment, the number of in-plane drive electrodes 7 is four, which are arranged on the upper part of the corresponding drive member 31. The four in-plane drive electrodes 7 are symmetrically distributed with respect to the x-axis direction and the y-axis direction.

[0071] The full decoupling three-axis MEMS gyroscope of the embodiment adopts symmetrical distribution for the X / Y detection out-of-plane electrodes 5, the Z detection in-plane electrodes 6, and the in-plane drive electrodes 7, and the actual working state is opposite motion, which facilitates differential detection.

[0072] Specifically, as shown in FIG. 7, when the full decoupling three-axis MEMS gyroscope is subjected to angular velocity in the x-axis direction, the X / Y detection mass 1 is subjected to the action of the z-axis Coriolis force, which excites the x-axis detection mode, and the X / Y detection mass 1 generates vibration displacement along the z-axis. At this time, the X / Y detection out-of-plane electrodes 5 arranged on the upper side of the opposite two sides of the X / Y detection mass 1 along the x-axis direction detect the vibration displacement of the opposite two sides of the X / Y detection mass 1 in the z-axis direction, and then the angular velocity of the gyroscope around the x-axis is obtained.

[0073] As shown in FIG. 8, when the full decoupled triaxial MEMS gyroscope is subjected to an angular velocity in the y-axis direction, the X / Y detection mass 1 is subjected to a Coriolis force in the z-axis direction, exciting the y-axis detection mode, and the X / Y detection mass 1 generates a vibration displacement along the z-axis. At this time, the X / Y detection surface-outside electrodes 5 arranged above the relative two sides of the X / Y detection mass 1 in the y-axis direction detect the vibration displacement of the relative two sides of the X / Y detection mass 1 in the z-axis direction, and the angular velocity of the mechanical gyroscope around the y-axis is obtained.

[0074] As shown in FIG. 9, when the full decoupled triaxial MEMS gyroscope is subjected to an angular velocity in the z-axis direction, the Z detection mass 2 is subjected to a Coriolis force in the x-axis direction, exciting the z-axis detection mode, and the Z detection mass 2 generates a vibration displacement along the x-axis. At this time, the Z detection surface-inside electrodes 6 arranged above the Z decoupled mass 4 detect the vibration displacement of the Z detection mass 2 along the x-axis, and the angular velocity of the gyroscope around the z-axis is obtained.

[0075] For example, as shown in FIG. 1, the full decoupled triaxial MEMS gyroscope further comprises a first coupling beam 8, a second coupling beam 9, and a first connecting beam 10.

[0076] The Z detection mass 2 is elastically connected to the adjacent driving structure 3 through the first coupling beam 8, and the driving structure 3 can drive the Z detection mass 2 to move through the first coupling beam 8.

[0077] Specifically, in the embodiment, the number of the first coupling beams 8 is 4, which are respectively clamped between the Z detection mass 2 and the driving member 31. The four first coupling beams 8 are symmetrically distributed with respect to the x-axis direction and the y-axis direction, respectively. The number of the first coupling beams 8 can be selected according to actual needs, which is not specifically limited in the embodiment. The first coupling beam 8 is a flexible beam and has elasticity.

[0078] The X / Y detection mass 1 is elastically connected to the adjacent driving structure 3 through the second coupling beam 9, and the driving structure 3 can drive the X / Y detection mass 1 to move through the second coupling beam 9.

[0079] Specifically, as shown in FIG. 1, in the embodiment, the number of the second coupling beams 9 is 4, which are respectively clamped between the X / Y detection mass 1 and the driving member 31, and the four second coupling beams 9 are symmetrically distributed along the x-axis direction and the y-axis direction, respectively. The number of the second coupling beams 9 can be selected according to actual needs, which is not specifically limited in the embodiment. The second coupling beam 9 is a flexible beam and has elasticity.

[0080] The Z decoupled mass 4 is elastically connected to the adjacent Z detection mass 2 through the first connecting beam 10. The Z detection mass 2 can drive the Z decoupled mass 4 to move through the first connecting beam 10.

[0081] Specifically, as shown in FIG. 1, in the embodiment, the number of the first connecting beams 10 is 4, which are respectively clamped between the Z decoupling mass blocks 4 and the Z detection mass blocks 2, and the four first connecting beams 10 are symmetrically distributed with respect to the x-axis direction and the y-axis direction. Among them, the first connecting beam 10 is a flexible beam, which has elasticity.

[0082] Exemplarily, as shown in FIG. 1 and FIG. 3, the full-decoupling triaxial MEMS gyroscope further comprises a plurality of coupling blocks 11, a plurality of third coupling beams 12, a plurality of fourth coupling beams 13 and a plurality of first anchor points 14 fixed to the base.

[0083] The plurality of coupling blocks 11 and the plurality of first anchor points 14 are clamped on the inner side of the oppositely distributed Z decoupling mass blocks 4. The first end of the coupling block 11 is elastically connected to the adjacent Z decoupling mass block 4 through the third coupling beam 12, and the second end of the coupling block 11 is elastically connected to the first anchor point 14 through the fourth coupling beam 13.

[0084] Among them, the plurality of first anchor points 14 are located in the central region of the base, and the plurality of coupling blocks 11 are oppositely distributed on both sides of the plurality of first anchor points 14 along the y-axis.

[0085] Specifically, as shown in FIG. 1, in the embodiment, the number of the coupling blocks 11 is 4, two of which are symmetrically distributed along the y-axis in the positive direction of the x-axis, and the other two of which are symmetrically distributed along the y-axis in the negative direction of the x-axis. The number of the first anchor points 14 is 2, which are fixed to the central region of the base and clamped between the upper and lower coupling blocks 11. The number of the third coupling beams 12 is 2, which are respectively clamped between the Z decoupling mass blocks 4 and the coupling blocks 11 along the y-axis direction. The number of the fourth coupling beams 13 is 2, which are symmetrically distributed with respect to the x-axis and the y-axis, and a part of each fourth coupling beam 13 is bent and distributed between the two coupling blocks 11 oppositely distributed along the x-axis, and the remaining part of the fourth coupling beam 13 is clamped between the coupling block 11 and the first anchor point 14 along the y-axis.

[0086] In the embodiment, the Z decoupling mass blocks and the coupling blocks can be fixed to the base through the plurality of first anchor points, which plays a fixing role for the Z decoupling mass blocks and the coupling blocks.

[0087] Exemplarily, as shown in FIG. 1 and FIG. 2, the full-decoupling triaxial MEMS gyroscope further comprises a plurality of second anchor points 15 and a plurality of first guide beams 16. The second anchor point 15 is elastically connected to the adjacent driving structure 3 through the corresponding first guide beam 16.

[0088] Specifically, as shown in FIG. 1, a plurality of second anchors 15 are fixed to the substrate and arranged at the corner ends of the substrate. The number of the second anchors 15 is four, which are arranged at the four corner ends of the substrate respectively. The number of the first guide beams 16 is also four, one end of the first guide beam 16 is connected with the corresponding second anchor 15, and the other end of the first guide beam 16 is connected with the corresponding driving member 31. Among them, the first guide beam 16 is a flexible beam, which has elasticity.

[0089] In this embodiment, the driving structure is fixed to the substrate by the plurality of second anchors and the plurality of first guide beams, which plays a fixing role for the driving structure.

[0090] Specifically, as shown in FIG. 1 and FIG. 2, the full-decoupled three-axis MEMS gyroscope further comprises a plurality of second connecting beams 17 and a plurality of third anchors 18 fixed to the substrate. The third anchors 18 are elastically connected with the adjacent X / Y detection mass 1 on the side facing the Z detection mass 2 through the corresponding second connecting beams 17. Among them, the plurality of third anchors 18 and the plurality of second connecting beams 17 are arranged at intervals on the outside of the Z decoupling mass 4.

[0091] Specifically, as shown in FIG. 1, the number of the third anchors 18 is four, which are arranged on the x-axis and the y-axis respectively and symmetrically distributed with respect to the x-axis direction and the y-axis direction. The number of the second connecting beams 17 is also four, which are arranged and clamped between the X / Y detection mass 1 and the third anchor 18 respectively. Among them, the Z detection mass 2 is provided with two first accommodation spaces on the side facing the X / Y detection mass 1 along the x-axis direction, the coupling block 11 is provided with two second accommodation spaces on the side facing the X / Y detection mass 1 along the y-axis direction, and the four third anchors 18 are arranged in the first accommodation spaces and the second accommodation spaces respectively. Among them, the second connecting beam 17 is a flexible beam, which has elasticity.

[0092] In this embodiment, the X / Y detection mass can be fixed to the substrate by the plurality of second connecting beams and the plurality of third anchors, which plays a fixing role for the X / Y detection mass.

[0093] Specifically, as shown in FIG. 1 and FIG. 3, the full-decoupled three-axis MEMS gyroscope further comprises a plurality of second guide beams 19 and a plurality of fourth anchors 20 fixed to the substrate. The fourth anchors 20 are elastically connected with the Z decoupling mass 4 through the second guide beams 19.

[0094] Specifically, as shown in FIG. 1, the number of the fourth anchors 20 is four, which are arranged at the corner ends of each Z decoupling mass 4 and in a rectangular shape. Correspondingly, the number of the second guide beams 19 is also four, which are distributed along the y-axis direction and clamped between the Z decoupling mass 4 and the Z detection mass 2. Among them, the second guide beam 19 is a flexible beam, which has elasticity.

[0095] In the embodiment, the Z decoupling mass is fixed to the substrate by the plurality of second guide beams and the plurality of fourth anchor points, and the Z decoupling mass is fixed.

[0096] Another aspect of the embodiment of the present disclosure provides an electronic product comprising the fully decoupled tri-axis MEMS gyroscope described above, and the specific structure of the fully decoupled tri-axis MEMS gyroscope has been described in detail above, and thus will not be described again here.

[0097] In the process of working of the electronic product, the fully decoupled tri-axis MEMS gyroscope can calculate the angular velocity of the electronic product, so as to facilitate the control of the electronic product. The fully decoupled tri-axis MEMS gyroscope improves the Coriolis conversion rate of the X / Y detection mass, maximizes the utilization of the chip area, reduces the chip size under the same performance, and reduces the cost. The fully decoupled tri-axis MEMS gyroscope effectively reduces the coupling error and the orthogonal error, and improves the detection precision of the gyroscope. The gyroscope of the embodiment has a high proportion of common mass for driving and detection, effectively improves the conversion of the Coriolis force, and improves the sensitivity of the gyroscope.

[0098] It can be understood that the above embodiments are only exemplary embodiments adopted for illustrating the principles of the embodiment of the present disclosure, and the embodiment of the present disclosure is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and essence of the embodiment of the present disclosure, and these modifications and improvements are also considered as the protection scope of the embodiment of the present disclosure.

Claims

1. A fully decoupled three-axis MEMS gyroscope, characterized by, The application relates to a microelectromechanical system (MEMS) accelerometer, comprising: a substrate, X / Y detection mass blocks fixed to the substrate respectively, a plurality of Z detection mass blocks, a plurality of driving structures and a plurality of Z decoupling mass blocks, wherein the X / Y detection mass blocks are arranged on the outer side of the plurality of Z detection mass blocks, the plurality of driving structures and the plurality of Z decoupling mass blocks; the plurality of Z detection mass blocks are arranged oppositely along the x-axis direction; the plurality of driving structures are arranged oppositely on the outer side of the plurality of Z detection mass blocks along the x-axis direction; the plurality of Z decoupling mass blocks are arranged oppositely on the inner side of the plurality of Z detection mass blocks along the x-axis direction; wherein the X / Y detection mass blocks are elastically connected to the driving structures adjacent to the X / Y detection mass blocks respectively, each Z detection mass block is elastically connected to the driving structure adjacent to the Z detection mass block, and the Z decoupling mass block is elastically connected to the Z detection mass block adjacent to the Z decoupling mass block. The X / Y detection mass blocks are symmetrically distributed relative to the x-axis direction and the y-axis direction. The oppositely arranged plurality of Z detection mass blocks are symmetrically distributed relative to the y-axis direction, and each Z detection mass block is symmetrically distributed relative to the x-axis direction. The oppositely arranged plurality of driving structures are symmetrically distributed relative to the x-axis direction and the y-axis direction. The oppositely arranged plurality of Z decoupling mass blocks are symmetrically distributed relative to the x-axis direction and the y-axis direction. The application further comprises a plurality of X / Y detection out-of-plane electrodes, a plurality of Z detection in-plane electrodes and a plurality of in-plane driving electrodes.

2. The fully decoupled triaxial MEMS gyroscope according to claim 1, characterized in that The plurality of X / Y detection out-of-plane electrodes are arranged on the side, away from the substrate, of the X / Y detection mass blocks along the x-axis direction and the y-axis direction respectively. The Z detection in-plane electrodes are arranged on the side, away from the substrate, of the corresponding Z decoupling mass blocks. The in-plane driving electrodes are arranged on the side, away from the substrate, of the corresponding driving structures. The application further comprises a first coupling beam, a second coupling beam and a first connecting beam.

3. The fully decoupled triaxial MEMS gyroscope according to claim 2, characterized in that The Z detection mass blocks are elastically connected to the driving structures adjacent to the Z detection mass blocks through the first coupling beam. The X / Y detection mass blocks are elastically connected to the driving structures adjacent to the X / Y detection mass blocks through the second coupling beam. The Z decoupling mass blocks are elastically connected to the Z detection mass blocks adjacent to the Z decoupling mass blocks through the first connecting beam. The application further comprises a plurality of coupling blocks, a plurality of third coupling beams, a plurality of fourth coupling beams and a plurality of first anchor points fixed to the substrate.

4. The fully decoupled three-axis MEMS gyroscope according to any one of claims 1 to 3, characterized in that The plurality of coupling blocks and the plurality of first anchor points are arranged on the inner side of the oppositely arranged Z decoupling mass blocks. The first end of the coupling block is elastically connected to the Z decoupling mass block adjacent to the coupling block through the third coupling beam, and the second end of the coupling block is elastically connected to the first anchor point through the fourth coupling beam. The plurality of first anchor points are located in the central region of the substrate, and the plurality of coupling blocks are oppositely arranged on the two sides of the plurality of first anchor points along the y-axis. The application further comprises a plurality of second anchor points and a plurality of first guide beams.

5. The fully decoupled three-axis MEMS gyroscope according to any one of claims 1 to 3, characterized in that The plurality of second anchor points are fixed to the substrate and arranged at the corner ends of the substrate. The second anchor point is elastically connected to the driving structure adjacent to the second anchor point through the corresponding first guide beam. The application further comprises a plurality of second connecting beams and a plurality of third anchor points fixed to the substrate.

6. The fully decoupled three-axis MEMS gyroscope of claim 5, wherein, ​ 7. The fully decoupled three-axis MEMS gyroscope according to any one of claims 1 to 3, characterized in that ​ ​ ​ 8. The fully decoupled three-axis MEMS gyroscope according to any one of claims 1 to 3, characterized in that ​ The third anchor points are elastically connected to the side of the X / Y proof mass adjacent to the Z proof mass through the corresponding second connecting beams. The plurality of third anchor points and the plurality of second connecting beams are arranged in a spaced ring on the outer side of the Z decoupling mass.

9. The fully decoupled three-axis MEMS gyroscope according to any one of claims 1 to 3, characterized in that, Further comprising a plurality of second guide beams and a plurality of fourth anchor points fixed to the substrate. The fourth anchor points are elastically connected to the Z decoupling mass through the second guide beams.

10. An electronic product, characterized by comprising: The full decoupled three-axis MEMS gyroscope according to any one of claims 1 to 9.

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