Tilt adjusting device

Abstract

To provide a tilt adjusting device capable of adjusting a reference surface and a first crimping tool end face parallel without generating a load on the reference surface during the operation of adjusting the reference surface parallel to the first crimping tool end face.SOLUTION: A control device 70 has an actuator control unit 71 that drives a first bellows actuator A1 to a fourth bellows actuator A4. The control device 70 drives the first bellows actuator A1 to the fourth bellows actuator A4 by the actuator control unit 71 so that a reference surface and a first crimping tool end surface are parallel based on the results measured by an inclination detection sensor 80.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to an inclination adjustment device. [Background technology]

[0002] 2. Description of the Related Art Conventionally, in semiconductor manufacturing equipment, a bonding device that bonds a workpiece to a reference stage includes a copying device that adjusts a tool having a pressure bonding tool end face and the reference stage so that they are parallel to each other. For example, Patent Document 1 discloses a copying device including a device base having a concave hemispherical surface, and a copying member consisting of a tool and an oscillator having a convex hemispherical surface with the same radius of curvature as the concave hemispherical surface of the device base. The copying device disclosed in Patent Document 1 also includes a holding member that engages with the copying member, and an actuator that presses the copying member against the device base via the holding member. The copying member is assembled to the device base so that the convex hemispherical surface and the concave hemispherical surface overlap and are rotatable along the concave hemispherical surface. The copying device presses the tip surface of the tool, which is the end surface of the crimping tool, against the upper surface of the reference stage, and rotates the copying member along the concave hemispherical surface of the device base, thereby copying the copying member so that it is parallel to the reference stage. The copying device also maintains the copying state of the copying member by pressing the copying member, which is parallel to the reference stage, against the device base via the holding member using the actuator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4081247 Summary of the Invention [Problem to be solved by the invention]

[0004] In a conventional copying device, there is a risk of a load being generated on the reference stage during a copying operation for adjusting the tip surface of the tool and the reference stage to be parallel. The present invention has been made in view of such circumstances, and an object of the present invention is to provide an inclination adjustment device that can adjust the reference surface and the end surface of the first crimping tool to be parallel without generating a load on the reference surface during an operation for adjusting the reference surface and the end surface of the first crimping tool to be parallel. [Means for solving the problem]

[0005] [Aspect 1] A crimping tool includes a first rocking body end face and a second rocking body end face that is a convex spherical surface, a drive shaft that protrudes from the second rocking body end face, a second crimping tool end face that is attached to the first rocking body end face and has an end face different from the second crimping tool end face as the first crimping tool end face, and a first base end face that is a concave spherical surface that engages with the second rocking body end face and has an end face different from the first base end face as the first crimping tool end face. and an apparatus base having a base inner peripheral surface that defines an insertion hole through which the drive shaft is inserted and connects the second base end surface and the first base end surface, and the tilt adjustment device adjusts the tilt of the oscillator so that a reference plane and the first crimping tool end surface are parallel to each other while swinging the second oscillator end surface along the first base end surface, wherein the tilt adjustment device includes an axial end of the drive shaft that is different from a first drive shaft end surface on the oscillator side. a tip spherical portion provided at a second drive shaft end which is an end portion of a first base end face and protruding from the second base end face, a positioning mechanism provided on the second base end face side and positioning the tip spherical portion, a tilt detection sensor measuring the inclination of the first crimping tool end face relative to the reference plane, and a control device controlling the positioning mechanism, wherein the positioning mechanism changes the position of the tip spherical portion in a plane parallel to the second base end face and comprises a plurality of actuators arranged to surround the tip spherical portion along the second base end face, and the control device comprises an actuator control unit which drives the plurality of actuators, and the actuator control unit drives the plurality of actuators so that the reference plane and the first crimping tool end face are parallel based on the results measured by the tilt detection sensor.

[0006] [Aspect 2] A tilt adjustment device as described in [Aspect 1], comprising a driver having an inner surface against which the tip spherical portion slides while defining an insertion hole into which the tip spherical portion is inserted, and the multiple actuators are arranged to surround the driver along the second base end face and change the position of the tip spherical portion in a plane parallel to the second base end face via the driver.

[0007] [Aspect 3] The tilt adjustment device described in [Aspect 2], wherein the driving body comprises a cylindrical bearing that defines the insertion hole and a bearing holding portion that holds the cylindrical bearing, and the central axis of the cylindrical bearing extends in the axial direction of the device base.

[0008] [Aspect 4] The cylindrical bearing has an inner diameter smaller than the diameter of the tip spherical portion, and has a gap extending in the axial direction of the cylindrical bearing so that the inner diameter of the cylindrical bearing can be expanded.

[0009] [Aspect 5] A tilt adjustment device described in any one of [Aspect 1] to [Aspect 4], comprising an air bearing port and an air bearing that supplies and exhausts air from the air bearing port, the first base end surface being an air bearing surface of the air bearing, and the device base supporting the oscillating body so that it can oscillate away from the air bearing surface, and fixing the inclined posture of the oscillating body by vacuum suction through the air bearing port.

[0010] [Aspect 6] A tilt adjustment device described in any one of [Aspect 2] to [Aspect 5], wherein the driving body is connected to the multiple actuators via multiple linear slide mechanisms, and the positioning mechanism moves the driving body by pushing and pulling the driving body via each of the multiple linear slide mechanisms using each of the multiple actuators.

[0011] [Aspect 7] A tilt adjustment device described in any one of [Aspect 2] to [Aspect 6], wherein the multiple actuators include four bellows actuators, and the four bellows actuators form two bellows actuator pairs each consisting of two opposing bellows actuators, and each of the two bellows actuator pairs holds the driving body in between.

[0012] [Aspect 8] A tilt adjustment device as described in [Aspect 7], comprising a housing portion that is attached to an end surface of the second base and houses the four bellows actuators, and is polygonal when viewed in the axial direction of the device base, and both ends of each of the two bellows actuator pairs are fixed to each corner of the housing portion.

[0013] [Aspect 9] The tilt adjustment device according to [Aspect 7] or [Aspect 8], wherein the four bellows actuators are arranged so that the two straight lines formed by each of the two bellows actuator pairs are perpendicular to each other.

[0014] [Aspect 10] The control device is provided with a drive amount calculation unit that calculates the value of pressure to be supplied to each of the four bellows actuators required to make the reference plane and the first crimping tool end face parallel based on the inclination of the first crimping tool end face relative to the reference plane measured by the inclination detection sensor, and the actuator control unit drives the four bellows actuators based on the result of the drive amount calculation unit.A tilt adjustment device described in any one of [Aspect 7] to [Aspect 9].

[0015] [Aspect 11] A tilt adjustment device described in any one of [Aspect 1] to [Aspect 10], comprising a locking mechanism including: an intermediate spherical portion provided on the drive shaft between the oscillator and the tip spherical portion; a locking member provided along the inner surface of the base so as to be capable of reciprocating in the axial direction of the device base and spaced apart from the outer surface of the drive shaft, the locking member having an inner peripheral surface that surrounds the drive shaft; and a retaining portion through which the drive shaft passes and having an inner surface that engages with the intermediate spherical portion.

[0016] [Aspect 12] The inclination adjustment device described in [Aspect 11] includes a support member located between an inner surface of the locking member and an outer surface of the drive shaft, and having an inner surface of the support member spaced from the drive shaft and surrounding the drive shaft, a first seal that seals between the support member and the locking member, a second seal that seals between the locking member and the device base, a locking air supply and exhaust chamber defined by the locking member, the device base, and the support member, and a locking port that supplies and exhausts air to and from the locking air supply and exhaust chamber.

[0017] [Aspect 13] a lock chamber formed by an inner circumferential surface of the locking member and an inner circumferential surface of the support member and communicating with the storage space via a gap between the locking member and the retaining portion; and a ventilation port provided on the device base and communicating with the storage space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, wherein the first base end surface is an air bearing surface of the air bearing, the device base supports the oscillating body so that it can oscillate away from the air bearing surface, and the ventilation port communicates with the gap formed by the oscillating body and the air bearing via the lock chamber, and communicates with the outside of the tilt adjustment device via the storage space.

[0018] [Aspect 14] a lock chamber formed by an inner circumferential surface of the locking member and an inner circumferential surface of the support member and communicating with the storage space via a gap between the locking member and the retaining portion; and a ventilation port provided on the device base and communicating with the storage space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, wherein the first base end surface is an air bearing surface of the air bearing, the device base supports the oscillator so that it can oscillate at a distance from the air bearing surface, and the storage space communicates with the outside of the device base via the ventilation port and communicates with the air bearing port via the lock chamber. Effect of the Invention

[0019] According to the present invention, during the operation of adjusting the reference surface and the end face of the first crimping tool so that they are parallel to each other, the reference surface and the end face of the first crimping tool can be adjusted so that they are parallel to each other without generating a load on the reference surface. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a perspective view showing an inclination adjustment device. [Diagram 2] FIG. 2 is a vertical cross-sectional view showing the inclination adjustment device. [Diagram 3] FIG. 3 is an exploded view showing the positioning mechanism. [Figure 4] FIG. 4 is an exploded view showing the drive shaft and the driver. [Diagram 5] FIG. 5 is a block diagram showing the relationship between the control device, the tilt detection sensor, and the first to fourth bellows actuators. [Figure 6] FIG. 6 is a horizontal cross-sectional view showing the positioning mechanism. [Figure 7] FIG. 7 is a horizontal cross-sectional view showing the positioning mechanism. [Figure 8] FIG. 8 is a vertical cross-sectional view showing the inclination adjustment device. [Figure 9] FIG. 9 is an enlarged vertical cross-sectional view showing the locking mechanism. [Figure 10] FIG. 10 is a vertical sectional view illustrating the operation of the inclination adjustment device. [Figure 11] FIG. 11 is a horizontal sectional view of a positioning mechanism in a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, a specific embodiment of the tilt adjustment device will be described with reference to FIGS. <Overall view of the tilt adjustment device> As shown in FIGS. 1 to 5, the inclination adjustment device 100 includes a pressure-bonding-part rocking body 20, a device base 30, a locking mechanism 40, a positioning mechanism 50, a control device 70, and an inclination detection sensor 80. As shown in FIG.

[0022] <Crimping part rocker> 2, 4 and 9, the crimping part rocking body 20 is integrally formed with the crimping tool 10 that crimps the workpiece, the rocking body 21, the drive shaft 22, and the tip spherical part 23. The direction in which the crimping part axis LP of the crimping part rocking body 20 extends coincides with the direction in which the crimping tool 10, the rocking body 21, the drive shaft 22, and the tip spherical part 23 are aligned.

[0023] The crimping tool 10 is columnar and has a first crimping tool end face 10a and a second crimping tool end face 10b as end faces. The first crimping tool end face 10a is the opposite face to the second crimping tool end face 10b in the axial direction of the crimping tool 10. Therefore, the crimping tool 10 has the second crimping tool end face 10b and has an end face different from the second crimping tool end face 10b as the first crimping tool end face 10a. The crimping tool 10 is attached to the oscillator 21 so that the first crimping tool end face 10a faces a reference plane S described later, and the second crimping tool end face 10b faces a first oscillator end face 21a described later. That is, the crimping tool 10 has a second crimping tool end face 10b attached to the first oscillator end face 21a, and also has an end face different from the second crimping tool end face 10b as a first crimping tool end face 10a.

[0024] The rocking body 21 has a first rocking body end face 21a to which the crimping tool 10 is attached, and is cylindrical with a second rocking body end face 21b that is a convex spherical surface. The rocking body 21 has a rocking body insertion hole 21d defined by a rocking body inner circumferential surface 21c on the second rocking body end face 21b. A female screw is formed on the rocking body inner circumferential surface 21c, and a male screw formed on a first drive shaft end portion 22a of a drive shaft 22 described later is screwed into the rocking body 21. As a result, the drive shaft 22 is protruding from the second rocking body end face 21b of the rocking body 21. The axial direction of the rocking body 21 coincides with the direction in which the crimping part axis LP extends. The axial direction of the rocking body insertion hole 21d coincides with the axial direction of the rocking body 21. The first rocking body end face 21a and the second rocking body end face 21b are end faces located on opposite sides of the rocking body 21 in the axial direction.

[0025] The drive shaft 22 is cylindrical and extends from the first drive shaft end 22a to the second drive shaft end 22b. The axial direction of the drive shaft 22 coincides with the direction in which the crimping portion axis LP extends. The drive shaft 22 has an intermediate spherical portion 22d between the first drive shaft end 22a and the second drive shaft end 22b. The intermediate spherical portion 22d is formed by bulging a part of the drive shaft outer circumferential surface 22c in the radial direction of the drive shaft 22. The intermediate spherical portion 22d has a convex semi-spherical surface that decreases in diameter in the direction from the second drive shaft end 22b to the first drive shaft end 22a.

[0026] The second drive shaft end 22b of the drive shaft 22 is provided with a tip spherical portion 23. That is, the tip spherical portion 23 is provided at the second drive shaft end 22b, which is an end of the axial direction of the drive shaft 22 different from the first drive shaft end 22a on the rocker 21 side. The intermediate spherical portion 22d is provided on the drive shaft 22 between the rocker 21 and the tip spherical portion 23. The tip spherical portion 23 is spherical. The axial direction of the tip spherical portion 23 coincides with the direction in which the crimping portion axis LP extends. The tip spherical portion 23 has an insertion hole defined by the tip spherical portion inner circumferential surface 23a. The insertion hole extends in the direction of the crimping portion axis LP. The second drive shaft end 22b of the drive shaft 22 is inserted into the insertion hole.

[0027] <Equipment base> As shown in FIG. 2, FIG. 3 and FIG. 9, the device base 30 is a columnar shape with the first base end face 30a as a first end face in the axial direction and the second base end face 30b as a second end face in the axial direction. Therefore, the device base 30 has a second base end face 30b as an end face different from the first base end face 30a. The device base 30 has an extension part 30e for enlarging the area of ​​the second base end face 30b to be larger than the area of ​​the first base end face 30a. The extension part 30e is a part of the device base 30 that extends outward in a flat plate shape from the first base end face 30a side. The base axis LB of the device base 30 is perpendicular to the first base end face 30a and the second base end face 30b. In the following description, the direction in which the base axis LB extends is described as the axial direction of the device base 30. The device base 30 has a base inner peripheral surface 30c that defines a base insertion hole 30d that extends in the axial direction of the device base 30. The base inner peripheral surface 30c connects the second base end face 30b and the first base end face 30a. As described below, the drive shaft 22 is inserted through the base insertion hole 30d. In other words, the device base 30 has a base inner peripheral surface 30c that defines the base insertion hole 30d through which the drive shaft 22 is inserted and connects the second base end face 30b and the first base end face 30a.

[0028] The first base end face 30a is a concave spherical surface. The radius of curvature of the first base end face 30a is the same as the radius of curvature of the second oscillator end face 21b, which is a convex spherical surface. The first base end face 30a engages with the second oscillator end face 21b. In other words, the device base 30 has the first base end face 30a, which is a concave spherical surface that engages with the second oscillator end face 21b. Almost the entire first base end face 30a is formed of an annular porous material 37 as an air bearing. Therefore, the first base end face 30a is an air bearing surface of the air bearing.

[0029] The second base end surface 30b is a flat surface. The second base end surface 30b is formed by using an extension portion 30e. The device base 30 has an air bearing air supply / discharge chamber 32. The air bearing air supply / discharge chamber 32 communicates with the outside of the device base 30 via a plurality of holes that the annular porous material 37 has.

[0030] As shown in FIG. 9, the base inner peripheral surface 30c is formed by the first base inner peripheral surface 301c and the second base inner peripheral surface 302c. The first base inner peripheral surface 301c is located on the first base end surface 30a side of the base inner peripheral surface 30c. The second base inner peripheral surface 302c is located on the second base end surface 30b side of the base inner peripheral surface 30c. The inner diameter of the second base inner peripheral surface 302c is larger than the inner diameter of the first base inner peripheral surface 301c. The first base inner peripheral surface 301c and the second base inner peripheral surface 302c are connected by the base step surface 303c. The base step surface 303c is perpendicular to the first base inner peripheral surface 301c and the second base inner peripheral surface 302c, and is parallel to the second base end surface 30b. In other words, the base step surface 303c faces away from the first base end surface 30a and faces the same direction as the second base end surface 30b.

[0031] The device base 30 includes a locking port 33 and an air bearing port 34. The locking port 33 communicates with a portion of the base insertion hole 30d that is defined by the second base inner peripheral surface 302c. The air bearing port 34 communicates with the air supply / discharge chamber 32 for the air bearing.

[0032] 6, the device base 30 includes first to fourth driving base ports 351 to 354 that supply air to first to fourth bellows actuators A1 to A4, which will be described later. The first to fourth driving base ports 351 to 354 are provided on the extending portion 30e.

[0033] 2, the device base 30 is provided with a ventilation port 36 in the extension portion 30e of the device base 30. The ventilation port 36 communicates with an actuator accommodating space 54, which will be described later. <Lock mechanism> 2 and 9, the locking mechanism 40 includes a support member 42, a locking member 43, and a holding portion 44. The locking mechanism 40 may also include a magnet 41, a first seal 42e, and a second seal 43d.

[0034] The axial direction of the support member 42 coincides with the axial direction of the device base 30. The support member 42 is housed in the base insertion hole 30d and fixed to the device base 30. A support member inner circumferential surface 42a of the support member 42 defines a support member insertion hole 42d extending in the axial direction of the support member 42. The support member inner circumferential surface 42a has a recessed portion 421a.

[0035] The support member 42 has a protruding portion 42c protruding in the radial direction of the support member insertion hole 42d on the support member outer peripheral surface 42b. The support member outer peripheral surface 42b is formed by a first support member outer peripheral surface 421b facing the first base inner peripheral surface 301c, and a second support member outer peripheral surface 422b facing the second base inner peripheral surface 302c and including the protruding portion 42c. The second support member outer peripheral surface 422b has a support member concave portion 423b. Of the ends of the support member 42, the end of the support member 42 located on the first support member outer peripheral surface 421b side holds a magnet 41. The magnet 41 is fixed to the support member 42.

[0036] The support member 42 is fixed to the device base 30 in the base insertion hole 30d by the abutment between the first base inner peripheral surface 301c and the first support member outer peripheral surface 421b. The axial direction of the locking member 43 coincides with the axial direction of the device base 30. The locking member 43 is housed in the base insertion hole 30d. The locking member 43 is provided so as to be reciprocable in the axial direction of the device base 30 along the base inner peripheral surface 30c.

[0037] The locking member inner peripheral surface 43a of the locking member 43 defines a locking member insertion hole 43c. The locking member inner peripheral surface 43a is formed by a first locking member inner peripheral surface 431a and a second locking member inner peripheral surface 432a. The first locking member inner peripheral surface 431a is located on the first base end surface 30a side of the locking member inner peripheral surface 43a. The second locking member inner peripheral surface 432a is located on the second base end surface 30b side of the locking member inner peripheral surface 43a. The inner diameter of the first locking member inner peripheral surface 431a is smaller than the inner diameter of the second locking member inner peripheral surface 432a. The first locking member inner peripheral surface 431a and the second locking member inner peripheral surface 432a are connected by a locking member step surface 433a. The locking member step surface 433a faces away from the first base end surface 30a and faces the same direction as the base step surface 303c and the second base end surface 30b.

[0038] The locking member 43 has a locking member outer peripheral surface 43b. The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The locking member 43 has a locking member concave portion 431b on the locking member outer peripheral surface 43b.

[0039] A portion of the first locking member inner peripheral surface 431a faces the second support member outer peripheral surface 422b and the support member concave portion 423b. The first seal 42e is provided in the support member concave portion 423b and provides a seal between the first locking member inner peripheral surface 431a and the second support member outer peripheral surface 422b. The first seal 42e provides a seal between the support member 42 and the locking member 43. Thus, the locking mechanism 40 has the first seal 42e that provides a seal between the support member 42 and the locking member 43.

[0040] The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The second seal 43d is provided in the locking member concave portion 431b and seals between the locking member outer peripheral surface 43b and the second base inner peripheral surface 302c. Thus, the locking mechanism 40 has the second seal 43d that seals between the locking member 43 and the device base 30.

[0041] The protrusion 42c of the support member outer peripheral surface 42b is located between the base step surface 303c and the locking member 43 in the axial direction of the device base 30. In other words, the protrusion 42c limits the movement of the locking member 43 in the base insertion hole 30d and prevents contact between the locking member 43 and the base step surface 303c.

[0042] The locking member 43 forms a locking air supply / discharge chamber 46 with the second base inner peripheral surface 302c, the base step surface 303c, and the second support member outer peripheral surface 422b. The locking air supply / discharge chamber 46 communicates with the outside of the device base 30 via the locking port 33. That is, by connecting to a pressure supply source (not shown) described below, the locking port 33 supplies and discharges air to the locking air supply / discharge chamber 46. Thus, the locking air supply / discharge chamber 46 is defined by the locking member 43, the device base 30, and the support member 42. The above-mentioned locking mechanism 40 includes the locking air supply / discharge chamber 46 and the locking port 33.

[0043] The axial direction of the holding portion 44 coincides with the axial direction of the device base 30. The holding portion 44 is housed inside the locking member 43. The holding portion 44 has a holding portion inner circumferential surface 44a that engages with a spherical surface formed by the intermediate spherical portion 22d of the drive shaft 22. The holding portion inner circumferential surface 44a defines a holding portion insertion hole 44c that extends in the axial direction of the holding portion 44. The drive shaft 22 is inserted into the holding portion insertion hole 44c. In other words, the holding portion 44 has a holding portion inner circumferential surface 44a through which the drive shaft 22 is inserted and which engages with the intermediate spherical portion 22d.

[0044] The holding portion outer peripheral surface 44b is formed by a first holding portion outer peripheral surface 441b and a second holding portion outer peripheral surface 442b. The first holding portion outer peripheral surface 441b is located on the first base end surface 30a side of the holding portion outer peripheral surface 44b. The second holding portion outer peripheral surface 442b is located on the second base end surface 30b side of the holding portion outer peripheral surface 44b. The first holding portion outer peripheral surface 441b has a smaller outer diameter than the second holding portion outer peripheral surface 442b. The first holding portion outer peripheral surface 441b and the second holding portion outer peripheral surface 442b are connected by a holding portion step surface 443b.

[0045] The holding portion 44 is provided at a position where the first holding portion outer peripheral surface 441b faces the first locking member inner peripheral surface 431a, and where the second holding portion outer peripheral surface 442b faces the second locking member inner peripheral surface 432a. The holding portion step surface 443b of the holding portion 44 faces the locking member step surface 433a. The locking member step surface 433a can come into contact with the holding portion step surface 443b of the holding portion 44. When the locking member step surface 433a comes into contact with the holding portion step surface 443b of the holding portion 44, the holding portion 44 is supported by the locking member 43.

[0046] The first locking member inner circumferential surface 431a and the second locking member inner circumferential surface 432a, and the support member inner circumferential surface 42a form a lock chamber 47. In other words, the lock chamber 47 is formed by the first locking member inner circumferential surface 431a and the second locking member inner circumferential surface 432a, and the support member inner circumferential surface 42a, and communicates with the actuator accommodating space 54 through a gap between the locking member 43 and the retaining portion 44.

[0047] <Positioning mechanism and linear slide mechanism> 1 to 3 and 6, the positioning mechanism 50 includes a positioning mechanism housing 51 as a housing portion and an actuator accommodating top plate 51a. The positioning mechanism 50 also includes first to fourth bellows actuators A1 to A4 as a plurality of actuators, first to fourth linear slide mechanisms 61 to 64 as a plurality of linear slide mechanisms, and a driver 55. The driver 55 is composed of a cylindrical bearing 52 and a bearing holder 53.

[0048] 2 to 4 and 6, the axial direction of the positioning mechanism housing 51 coincides with the axial direction of the device base 30. The positioning mechanism housing 51 has a polygonal shape when viewed from the axial direction of the device base 30. In this embodiment, the positioning mechanism housing 51 has a substantially rectangular shape formed by four long sides and four short sides arranged alternately in the circumferential direction when viewed from the axial direction of the device base 30. The positioning mechanism housing 51 is attached to the second base end surface 30b of the device base 30.

[0049] The positioning mechanism housing 51 is a prismatic column having an end face facing the second base end face 30b. A cross section of the positioning mechanism housing 51 perpendicular to the axial direction is a substantially rectangular shape having four sets of opposing sides. The positioning mechanism housing 51 also has a positioning mechanism housing end face as an end face different from the end face facing the second base end face 30b. The positioning mechanism housing 51 has first to eighth side walls W1 to W8 as eight side faces.

[0050] The positioning mechanism housing 51 has first to fourth isosceles trapezoidal portions T1 to T4. The first to fourth isosceles trapezoidal portions T1 to T4 are trapezoidal columns whose cross sections perpendicular to the axial direction of the positioning mechanism housing 51 have an isosceles trapezoidal shape.

[0051] The first isosceles trapezoid portion T1 is an isosceles trapezoid whose bottom base is along the first side wall W1 and whose two legs extending from the bottom base are each perpendicular to the eighth side wall W8 and the second side wall W2. The second isosceles trapezoid portion T2 is an isosceles trapezoid whose bottom base is along the third side wall W3 and whose two legs extending from the bottom base are each perpendicular to the second side wall W2 and the fourth side wall W4.

[0052] The third isosceles trapezoid portion T3 is an isosceles trapezoid whose bottom base is along the fifth side wall W5 and whose two legs extending from the bottom base are each perpendicular to the fourth side wall W4 and the sixth side wall W6. The fourth isosceles trapezoid portion T4 is an isosceles trapezoid whose bottom base is along the seventh side wall W7 and whose two legs extending from the bottom base are each perpendicular to the sixth side wall W6 and the eighth side wall W8.

[0053] The height of the isosceles trapezoid, which is the cross section of each of the first to fourth isosceles trapezoidal portions T1 to T4, is set so as to be able to accommodate the bearing holder 53, which will be described later. The side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4, which are the inner surfaces of the positioning mechanism housing 51, together with the second base end face 30b, define an actuator accommodating space 54 as an accommodating space. Therefore, the inclination adjustment device 100 has the actuator accommodating space 54 defined by the side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4 and the second base end face 30b. The actuator accommodating top plate 51a closes the actuator accommodating space 54 from the axial direction of the device base 30. The actuator accommodating space 54 accommodates the first to fourth bellows actuators A1 to A4, the first to fourth linear slide mechanisms 61 to 64, the cylindrical bearing 52, the bearing holder 53, the second drive shaft end portion 22b, and the tip spherical portion 23.

[0054] The axial direction of each of the first to fourth bellows actuators A1 to A4 is perpendicular to the base axis LB. Each of the first to fourth bellows actuators A1 to A4 has first to fourth drive ports A11 to A14 at one end and first to fourth connection parts A21, A22, A23, A24 at the other end. Each of the first to fourth drive ports A11 to A14 communicates with first to fourth drive base ports 351 to 354 provided on the extension part 30e of the device base 30. Each of the first to fourth bellows actuators A1 to A4 has a bellows part formed by a plurality of grooves between the corresponding first to fourth drive ports A11 to A14 and the first to fourth connection parts A21 to A24.

[0055] In each of the first to fourth bellows actuators A1 to A4, the internal pressure increases or decreases when the pressure of the air supplied from the first to fourth drive ports A11 to A14 is increased or decreased. In each of the first to fourth bellows actuators A1 to A4, when the internal pressure is increased, the bellows portion expands in the axial direction. In addition, in each of the first to fourth bellows actuators A1 to A4, when the internal pressure is reduced, the grooves formed in the bellows portion deepen and the actuator contracts in the axial direction.

[0056] The first bellows actuator A1 and the third bellows actuator A3 form a first bellows actuator pair AA1 consisting of opposing bellows actuators. The second bellows actuator A2 and the fourth bellows actuator A4 form a second bellows actuator pair AA2 consisting of opposing bellows actuators. In other words, the first to fourth bellows actuators A1 to A4 form first and second bellows actuator pairs AA1, AA2 consisting of two opposing bellows actuators.

[0057] Of the ends of the first bellows actuator A1, an end having the first drive port A11 is fixed to the second side wall W2. The first bellows actuator A1 expands and contracts along a passage formed by the side surface of the first isosceles trapezoidal portion T1 and the side surface of the second isosceles trapezoidal portion T2 in the actuator accommodating space 54 in response to an increase or decrease in the pressure of the air supplied from the first drive port A11, toward or away from the sixth side wall W6.

[0058] Of the ends of the second bellows actuator A2, the end having the second drive port A12 is fixed to the fourth side wall W4. That is, the second bellows actuator A2 expands and contracts along a passage formed by the side surface of the second isosceles trapezoidal portion T2 and the side surface of the third isosceles trapezoidal portion T3 in the actuator accommodating space 54 in response to an increase or decrease in the pressure of the air supplied from the second drive port A12, in a direction toward or away from the eighth side wall W8.

[0059] Of the ends of the third bellows actuator A3, the end having the third drive port A13 is fixed to the sixth side wall W6. That is, the third bellows actuator A3 expands and contracts along the passage formed by the third isosceles trapezoidal portion T3 and the fourth isosceles trapezoidal portion T4 in the actuator accommodating space 54 in response to an increase or decrease in the pressure of the air supplied from the third drive port A13, in a direction toward or away from the second side wall W2.

[0060] Of the ends of the fourth bellows actuator A4, the end having the fourth drive port A14 is fixed to the eighth side wall W8. That is, the fourth bellows actuator A4 expands and contracts in the direction toward or away from the fourth side wall W4 along the passage formed by the fourth isosceles trapezoidal portion T4 and the first isosceles trapezoidal portion T1 in the actuator accommodating space 54 in response to an increase or decrease in the pressure of the air supplied from the fourth drive port A14.

[0061] The first bellows actuator pair AA1 has both ends fixed to the second side wall W2 and the sixth side wall W6. The axial direction of the first bellows actuator pair AA1 coincides with the expansion and contraction directions of the first and third bellows actuators A1 and A3. The second bellows actuator pair AA2 has both ends fixed to the fourth side wall W4 and the eighth side wall W8. The axial direction of the second bellows actuator pair AA2 coincides with the expansion and contraction directions of the second and fourth bellows actuators A2 and A4. That is, the positioning mechanism 50 is attached to the second base end surface 30b and houses the first to fourth bellows actuators A1 to A4. The positioning mechanism 50 further includes a polygonal positioning mechanism housing 51 when viewed from the axial direction of the device base 30. The both ends of the first and second bellows actuator pairs AA1 and AA2 are fixed to the corners of the positioning mechanism housing 51.

[0062] A straight line extending in the axial direction of the first bellows actuator pair AA1 and a straight line extending in the axial direction of the second bellows actuator pair AA2 intersect at right angles at the position of a bearing holder 53, which will be described later. In other words, the first to fourth bellows actuators A1 to A4 are disposed so that the two straight lines formed by the first and second bellows actuator pairs AA1, AA2 are perpendicular to each other.

[0063] The bearing holder 53 is in the shape of a quadrangular prism having a bearing holder inner circumferential surface 53a that holds the cylindrical bearing 52. The axial direction of the bearing holder 53 coincides with the axial direction of the device base 30. The bearing holder 53 has four flat side walls K.

[0064] Each of the first to fourth linear slide mechanisms 61 to 64 includes a linear guide portion S1 and a rectangular parallelepiped slide connection portion S11. Each linear guide portion S1 includes a slide plate 661 and a slide portion 662. The slide plate 661 can move relative to the slide portion 662. The slide plate 661 moves linearly. The slide portion 662 includes a slide surface 651 as a surface facing away from the slide plate 661.

[0065] Of the surfaces of each slide portion 662, the slide surface 651 is connected to an end of the first to fourth bellows actuators A1 to A4 that is different from the end connected to the positioning mechanism housing 51. Each slide portion 662 is attached to the first to fourth bellows actuators A1 to A4 such that each slide plate 661 is movable in a direction perpendicular to the extension / contraction direction of the first to fourth bellows actuators A1 to A4 and perpendicular to the axial direction of the bearing holder 53.

[0066] Further, each slide portion 662 is attached to each side wall K of the bearing holder 53 via a slide connection portion S11 attached to the slide plate 661. That is, the driver 55 is surrounded by the first to fourth bellows actuators A1 to A4 in a plane perpendicular to the base axis LB. In other words, the first to fourth bellows actuators A1 to A4 are arranged so as to surround the driver 55 along the second base end face 30b. The driver 55 is also connected to the first to fourth bellows actuators A1 to A4 via the first to fourth linear slide mechanisms 61 to 64. The first and second bellows actuator pairs AA1 and AA2 each hold the driver 55 between them.

[0067] In the driver 55, the bearing holder 53 holds the cylindrical bearing 52. Specifically, the cylindrical bearing 52 is inserted into the inside of the bearing holder 53. The bearing holder inner peripheral surface 53a faces a cylindrical bearing outer peripheral surface 52b described later.

[0068] The axial direction of the cylindrical bearing 52 coincides with the axial direction of the device base 30. The cylindrical bearing 52 has a cylindrical bearing inner circumferential surface 52a that defines a cylindrical bearing insertion hole 52d that extends in the axial direction of the cylindrical bearing 52. Therefore, the driver 55 includes the cylindrical bearing 52 that defines the cylindrical bearing insertion hole 52d as an insertion hole, and a bearing holder 53 that holds the cylindrical bearing 52. In addition, the central axis LC of the cylindrical bearing 52 extends in the axial direction of the device base 30.

[0069] The inner diameter of cylindrical bearing inner circumferential surface 52a of cylindrical bearing 52 before being inserted into bearing holder 53 is smaller than the diameter of tip spherical portion 23. Cylindrical bearing 52 has cylindrical bearing outer circumferential surface 52b.

[0070] Before being inserted into the bearing holder 53, the cylindrical bearing 52 has a gap 52c extending in the axial direction of the cylindrical bearing 52 between the cylindrical bearing inner circumferential surface 52a and the cylindrical bearing outer circumferential surface 52b so that the inner diameter of the cylindrical bearing 52 can be expanded. In other words, the cylindrical bearing 52 before being inserted into the bearing holder 53 has an inner diameter smaller than the diameter of the tip spherical portion 23, and has a gap 52c extending in the axial direction of the cylindrical bearing 52 so that the inner diameter of the cylindrical bearing 52 can be expanded.

[0071] The cylindrical bearing 52 inserted into the bearing holder 53 is expanded in diameter by the gap 52c, and the tip spherical portion 23 is accommodated in the cylindrical bearing insertion hole 52d. The outer surface of the tip spherical portion 23 is in sliding contact with the cylindrical bearing inner peripheral surface 52a. Therefore, the inclination adjustment device 100 includes a driver 55 having a cylindrical bearing inner peripheral surface 52a with which the tip spherical portion 23 is in sliding contact while defining the cylindrical bearing insertion hole 52d into which the tip spherical portion 23 is inserted. The bearing holder 53 is interlocked with the drive shaft 22 via the cylindrical bearing 52 and the tip spherical portion 23. Therefore, the positioning mechanism 50 drives each of the first to fourth bellows actuators A1 to A4 to drive the oscillating body 21 via the corresponding first to fourth linear slide mechanisms 61 to 64, the driver 55, and the drive shaft 22. That is, the positioning mechanism 50 is provided on the second base end surface 30b and determines the position of the tip spherical portion 23.

[0072] <Positional relationship between the crimping unit oscillator, device base, and positioning mechanism> The relationship between the pressure-bonding-portion rocking body 20, the device base 30, and the positioning mechanism 50 will be described with reference to FIGS. 2 to 5 and 9. FIG.

[0073] The drive shaft 22 of the crimping part rocking body 20 is inserted into the base insertion hole 30d so that the tip spherical part 23 protrudes from the second base end face 30b. That is, the tip spherical part 23 is provided at the second drive shaft end 22b, which is an end of the drive shaft 22 in the axial direction different from the first drive shaft end 22a on the rocking body 21 side, and protrudes from the second base end face 30b. Therefore, the device base 30 defines the base insertion hole 30d as an insertion hole through which the drive shaft 22 is inserted. In addition, the rocking body 21 of the crimping part rocking body 20 has the second rocking body end face 21b, which is a convex spherical surface, facing the first base end face 30a, which is a concave spherical surface. The second rocking body end face 21b has the same radius of curvature as the first base end face 30a, and can rock along the first base end face 30a. The drive shaft 22 is inserted through a support member 42, a lock member 43, and a holding portion 44 in a base insertion hole 30d defined by the base inner peripheral surface 30c.

[0074] The locking member inner peripheral surface 43a faces the drive shaft outer peripheral surface 22c and is radially spaced from the drive shaft outer peripheral surface 22c. Thus, the locking member 43 has the locking member inner peripheral surface 43a that surrounds the drive shaft 22. The support member 42 is located between the locking member inner peripheral surface 43a and the drive shaft outer peripheral surface 22c. Furthermore, the support member 42 has a support member inner peripheral surface 42a that is spaced from the drive shaft 22 and surrounds the drive shaft 22.

[0075] A packing 45 is provided in the recessed portion 421a of the support member 42 to seal between the drive shaft outer peripheral surface 22c and the support member 42. The packing 45 is expandable in the radial direction of the base inner peripheral surface 30c. The packing 45 allows the drive shaft 22 to swing, allows air to flow from the first base end surface 30a to the second base end surface 30b, and seals between the drive shaft outer peripheral surface 22c and the support member 42.

[0076] The tip spherical portion 23 protrudes from the second base end face 30b and is housed in a cylindrical bearing insertion hole 52d defined by a cylindrical bearing 52 provided in the positioning mechanism 50. The tip spherical portion 23 expands the gap 52c in the circumferential direction of the cylindrical bearing 52, thereby expanding the diameter of the cylindrical bearing insertion hole 52d. The cylindrical bearing 52 is inserted into a bearing holder 53 and forms a driver 55 together with the bearing holder 53. In other words, the tip spherical portion 23 is inserted into the driver 55.

[0077] The driver 55 is accommodated in the actuator accommodating space 54. Air is supplied to and exhausted from the actuator accommodating space 54 by a ventilation port 36 provided in the extension portion 30e of the device base 30. The ventilation port 36 communicates with the actuator accommodating space 54, the space formed by the locking member inner circumferential surface 43a and the holding portion outer circumferential surface 44b, and the space formed by the drive shaft outer circumferential surface 22c and the support member inner circumferential surface 42a. In other words, the ventilation port 36 is provided in the device base 30 and communicates with the actuator accommodating space 54.

[0078] Further, the ventilation port 36 communicates with the outside of the tilt adjustment device 100 via the gap between the actuator accommodating space 54 and the positioning mechanism housing 51 and the actuator accommodating top plate 51a.

[0079] Each of the first to fourth drive base ports 351 to 354 is connected to a pressure supply source (not shown). Each of the first to fourth drive base ports 351 to 354 supplies air supplied from the pressure supply source to each of the first to fourth bellows actuators A1 to A4 via each of the first to fourth drive ports A11 to A14. Each of the first to fourth bellows actuators A1 to A4 expands and contracts in response to an increase or decrease in the pressure of the supplied air, thereby positioning the tip spherical portion 23 via each of the first to fourth linear slide mechanisms 61 to 64 and the driver 55. In other words, the positioning mechanism 50 uses the first to fourth bellows actuators A1 to A4 to position the tip spherical portion 23 in a plane parallel to the second base end surface 30b. In other words, the positioning mechanism 50 changes the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b via the driver 55, and is equipped with first to fourth bellows actuators A1 to A4 that are arranged to surround the driver 55 and the tip spherical portion 23 along the second base end face 30b.

[0080] The change in the position of the tip spherical portion 23 by the positioning mechanism 50 in a plane parallel to the second base end face 30b induces movement of the tip spherical portion 23 in a direction along the central axis LC inside the cylindrical bearing insertion hole 52d. This movement occurs because the change in the position of the tip spherical portion 23 by the positioning mechanism 50 induces the oscillation of the oscillator 21, which is guided by the first base end face 30a, and the tip spherical portion 23 moves in conjunction with the oscillation via the drive shaft 22.

[0081] <Control device and tilt detection sensor> The control device 70 controls the positioning mechanism 50 . As shown in FIG. 5, the control device 70 includes an actuator control section 71 that drives the first to fourth bellows actuators A1 to A4, a drive amount calculation section 72, and first to fourth electropneumatic regulators E1 to E4.

[0082] The control device 70 includes a processor and a storage unit (not shown). The processor included in the control device 70 is, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The storage unit included in the control device 70 is, for example, a ROM (Read-Only Memory) or a RAM (Random Access Memory). The processor included in the control device 70 executes instructions included in a program stored in the storage unit, thereby functioning as an actuator control unit 71 and a drive amount calculation unit 72. Thus, the control device 70 includes the actuator control unit 71 and the drive amount calculation unit 72.

[0083] Based on the parallelism information transmitted by the tilt detection sensor 80 described later, the drive amount calculation unit 72 determines the angle at which the crimping unit rocking body 20 is tilted with respect to the device base 30 so that the first crimping tool end face 10a and the reference plane S become parallel as a target value. The parallelism information includes the tilt angle at the time of measuring the first crimping tool end face 10a and the reference plane S. In other words, the tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a with respect to the reference plane S. Based on the parallelism information and the target value, the drive amount calculation unit 72 calculates the pressure of the air to be supplied to the first to fourth bellows actuators A1 to A4. The pressure of the air to be supplied is found as a pressure value to be supplied to each of the first to fourth bellows actuators A1 to A4 using the following equations (1) to (4).

[0084]

number

[0085]

number

[0086]

number

[0087]

number

[0088] As shown in Figs. 6 to 8, α1 is the angle between the crimping portion axis LP and the base axis LB measured by the tilt sensor 80. θ1 is the tilt direction of the crimping portion axis LP in a plane perpendicular to the base axis LB measured by the tilt sensor 80. The tilt direction is an azimuth angle when the base axis LB is set as the origin and the first azimuth axis LA1, which is a line that bisects the angle between the first bellows actuator A1 and the fourth bellows actuator A4, is set as the reference axis. The line that bisects the angle between the second bellows actuator A2 and the third bellows actuator A3 is set as the second azimuth axis LA2. α2 is the target value of the angle between the crimping portion axis LP and the base axis LB. θ2 is the target value of the tilt direction of the crimping portion axis LP in a plane perpendicular to the base axis LB. K is a proportional gain value, which is a proportional constant given in advance. C is a proportional constant determined by the rigidity and cross-sectional area of ​​each of the first to fourth bellows actuators A1 to A4. Note that C may be different for each of the first to fourth bellows actuators A1 to A4. L is the distance from the center of oscillation of the oscillator 21 to the center of the tip spherical portion 23. φ is the angle between a line extending in the axial direction of the first bellows actuator pair AA1 and a line extending in the axial direction of the second bellows actuator pair AA2. Each of FIG. 6 and FIG. 7 shows the directions of the first azimuth axis LA1 and the second azimuth axis LA2, as well as the tilt direction θ. Each of the first azimuth axis LA1 and the second azimuth axis LA2 is perpendicular to the base axis LB. In addition, the first azimuth axis LA1 is perpendicular to the second azimuth axis LA2 and is parallel to the third side wall W3 and the seventh side wall W7.

[0089] Therefore, the drive amount calculation unit 72 calculates the value of pressure to be supplied to each of the first to fourth bellows actuators A1 to A4 required for the reference plane S and the first crimping tool end face 10a to be parallel, based on the inclination of the first crimping tool end face 10a relative to the reference plane S measured by the inclination detection sensor 80.

[0090] The actuator control section 71 included in the control device 70 supplies air at an appropriate pressure to the first to fourth bellows actuators A1 to A4 by driving the first to fourth electropneumatic regulators E1 to E4 based on the calculation results of the drive amount calculation section 72. In other words, the actuator control section 71 drives the first to fourth bellows actuators A1 to A4 based on the results of the drive amount calculation section 72.

[0091] The inclination detection sensor 80 is a sensor that detects the parallelism between the first crimping tool end face 10a and the reference plane S. The inclination detection sensor 80 is, for example, a plurality of laser sensors attached to a plurality of locations on the crimping portion oscillator 20. The inclination detection sensor 80 measures the inclination of the first crimping tool end face 10a with respect to the reference plane S by measuring the distance between the first crimping tool end face 10a and the reference plane S at a plurality of locations using the laser sensors.

[0092] The tilt detection sensor 80 is electrically connected to the control device 70, detects the parallelism between the first crimping tool end face 10a and the reference plane S, and transmits parallelism information relating to the parallelism to the control device 70. In other words, the control device 70 includes an actuator control unit 71, and drives the first to fourth bellows actuators A1 to A4 using the actuator control unit 71 based on the result of measurement by the tilt detection sensor 80 so that the reference plane S and the first crimping tool end face 10a are parallel to each other.

[0093] <Operation and Function of Tilt Adjustment Device> The operation of the inclination adjustment device 100 will be described with reference to FIG. 2 and FIG. 6 to FIG. The inclination adjustment device 100 takes an initial position as shown in FIG. 2. The inclination adjustment device 100 is attached to, for example, a conveying device not shown. The inclination adjustment device 100 is in a position where the first crimping tool end surface 10a faces the reference plane S, and the crimping tool 10 is in a position away from the reference plane S. In the initial position, the crimping part axis LP of the crimping part rocking body 20 and the base axis LB of the device base 30 coincide. In addition, the reference plane axis LS extending in a direction perpendicular to the reference plane S is not parallel to the crimping part axis LP and the base axis LB. FIG. 6 shows the positioning mechanism 50 viewed in the axial direction of the device base 30 in the initial position. In the initial position, the centers of the positioning mechanism 50 and the driver 55 coincide when viewed in the axial direction of the device base 30.

[0094] At the initial position, each of the first to fourth bellows actuators A1 to A4 is supplied with air from a pressure supply source (not shown). The air is supplied via each of the first to fourth driving base ports 351 to 354 and each of the first to fourth driving ports A11 to A14. When the inclination adjustment device 100 is at the initial position, each of the first to fourth bellows actuators A1 to A4 is supplied with air of the same pressure from the pressure supply source. That is, at the initial position, the pressures with which the first bellows actuator A1 and the third bellows actuator A3 press the driving body 55 are the same. Also, the pressures with which the second bellows actuator A2 and the fourth bellows actuator A4 press the driving body 55 are the same.

[0095] The tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a relative to the reference plane S. The tilt detection sensor 80 transmits the tilt of the first crimping tool end face 10a relative to the reference plane S to the control device 70 as current angle information. The control device 70 receives the current angle information transmitted from the tilt detection sensor 80. The control device 70 determines, by the drive amount calculation unit 72, the tilt of the crimping part rocking body 20 relative to the device base 30 in an attitude in which the reference plane S and the first crimping tool end face 10a are parallel to each other, as a target value. The drive amount calculation unit 72 of the control device 70 also determines the increase or decrease in air pressure required in each of the first to fourth bellows actuators A1 to A4, in order to realize the target value, using equations (1) to (4).

[0096] When the increase or decrease of the air pressure is determined, a pressure supply source (not shown) supplies air to the air bearing port 34. The supplied air is supplied between the first base end face 30a and the second oscillator end face 21b through the air bearing air supply / discharge chamber 32 and a plurality of holes in the annular porous material 37. Thus, the annular porous material 37 receives air supply from the air bearing port 34. The air supply pressurizes the gap between the second oscillator end face 21b and the first base end face 30a. As a result, the second oscillator end face 21b is separated from the first base end face 30a. At the same time, the oscillator 21 is attracted toward the first base end face 30a by the magnetic attraction force of the magnet 41. As a result, a small gap is formed between the second oscillator end face 21b and the first base end face 30a, and the gap is maintained. Therefore, the device base 30 supports the rocking body 21 so as to be rockable, separated from the first base end surface 30a.

[0097] Based on this determination, the actuator control section 71 of the control device 70 supplies air at an appropriate pressure required to increase or decrease the air pressure to the first to fourth bellows actuators A1 to A4 provided in the positioning mechanism 50. The actuator control section 71 supplies air at an appropriate pressure to the first to fourth bellows actuators A1 to A4 by driving a pressure supply source and first to fourth electropneumatic regulators E1 to E4 (not shown).

[0098] The first to fourth bellows actuators A1 to A4 are supplied with air from a pressure supply source via the first to fourth drive base ports 351 to 354 and the first to fourth drive ports A11 to A14. The first to fourth bellows actuators A1 to A4 expand and contract along the second base end surface 30b in response to an increase or decrease in the pressure of the supplied air. The first to fourth bellows actuators A1 to A4 expand and contract to push and pull the drive body 55. In other words, the first to fourth bellows actuators A1 to A4 expand and contract to move the drive body 55 in a direction along the second base end surface 30b.

[0099] For example, assume that the positioning mechanism 50 moves the driver 55 in the axial direction of the first bellows actuator pair AA1 from the first bellows actuator A1 to the third bellows actuator A3. In this case, the pressure supply source increases the pressure of the air supplied to the first bellows actuator A1 and reduces the pressure of the air supplied to the third bellows actuator A3. The amount of reduction in pressure due to the reduction is equal to the amount of increase in the pressure increased to the first bellows actuator A1. In other words, the first bellows actuator A1 expands due to the increase or decrease in the air pressure from the pressure supply source, and the third bellows actuator A3 contracts by the same distance as the expansion. As a result, the driver 55 is moved by the first bellows actuator pair AA1 by the distance of the expansion of the first bellows actuator A1 and the contraction of the third bellows actuator A3. The driver 55 can also be moved by the second bellows actuator pair AA2 in the same manner as the first bellows actuator pair AA1. In other words, by combining the first bellows actuator pair AA1 and the second bellows actuator pair AA2, the positioning mechanism 50 can move the driver 55 along the second base end face 30b, even in a direction different from the axial direction of the first bellows actuator pair AA1 and the second bellows actuator pair AA2.

[0100] 3, 6 and 7, as the driver 55 moves along the second base end surface 30b, the slide plates 661 of the first to fourth linear guide portions S1 to S4 move relative to the corresponding slide portions 662. The positioning mechanism 50 moves the driver 55 by pushing and pulling the driver 55 via the first to fourth linear slide mechanisms 61 to 64, respectively, using the first to fourth actuators A1 to A4.

[0101] As shown in Figures 2, 8 and 9, the driver 55 moves in a direction along the second base end face 30b and changes the position of the tip spherical part 23 in a plane parallel to the second base end face 30b. As the position of the tip spherical part 23 changes in a plane parallel to the second base end face 30b, the oscillating body 21 oscillates along the first base end face 30a via the drive shaft 22. The oscillation induces the movement of the tip spherical part 23 in a direction along the central axis LC within the cylindrical bearing insertion hole 52d via the drive shaft 22. In other words, the movement of the driver 55 by the positioning mechanism 50 induces the movement of the tip spherical part 23 in a direction along the second base end face 30b and in a direction along the central axis LC within the cylindrical bearing 52. Therefore, the cylindrical bearing 52 absorbs the displacement of the tip spherical part 23 in the direction of the central axis LC relative to each of the first to fourth bellows actuators A1 to A4 so that the tip spherical part 23 does not interfere with each of the first to fourth bellows actuators A1 to A4 in the direction of the central axis LC. During the swing, air is supplied from the air bearing port 34. By supplying air from the air bearing port 34, the swing body 21 is swingably supported by the device base 30 so as to have a desired inclination without sliding the second swing body end face 21b against the first base end face 30a. Furthermore, at this time, the pressure supply source (not shown) sucks air from the lock air supply and discharge chamber 46 through the lock port 33, thereby making the supply pressure to the lock air supply and discharge chamber 46 negative. As a result of making the supply pressure negative, the lock member 43 abuts against the protrusion 42c and is separated from the holding part 44. Furthermore, the inner peripheral surface 44a of the retaining portion 44 is not strongly pressed against the spherical surface formed by the intermediate spherical portion 22d. Therefore, the retaining portion 44 is pivotally engaged with the drive shaft 22 at the intermediate spherical portion 22d, and has the inner peripheral surface 44a that enables the retaining portion 44 to pivot.

[0102] Since the first base end face 30a is a concave spherical surface that engages with the second oscillator end face 21b, which is a convex spherical surface, a change in the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b leads to the oscillation of the oscillator 21 relative to the first base end face 30a. As a result of this oscillation, a parallel posture of the first crimping tool end face 10a and the reference plane S is realized. Therefore, the inclination adjustment device 100 drives the positioning mechanism 50 based on a target value determined by the control device 70, and tilts the oscillator 21 relative to the device base 30, thereby realizing a parallel posture of the first crimping tool end face 10a and the reference plane S. Therefore, the inclination adjustment device 100 adjusts the inclination of the oscillator 21 so that the reference plane S and the first crimping tool end face 10a are parallel to each other while oscillating the second oscillator end face 21b along the first base end face 30a.

[0103] Next, the operation of the inclination adjusting device 100 for maintaining the position in which the first pressure bonding tool end surface 10a and the reference plane S are parallel to each other will be described with reference to FIGS. After the first pressure bonding tool end face 10a becomes parallel to the reference plane S, the pressure supply source (not shown) stops the supply of air to the air bearing port 34 and sucks air from the air bearing port 34. Thus, the annular porous material 37 receives the discharge of air from the air bearing port 34. That is, the pressure supply source creates a negative pressure in the air bearing air supply and exhaust chamber 32 by vacuum suction through the air bearing port 34. Due to the reduced pressure, the second oscillator end face 21b of the oscillator 21 abuts against and is attracted to the first base end face 30a of the device base 30 while maintaining the parallel position of the first pressure bonding tool end face 10a to the reference plane S. As a result of the reduced pressure, the inclination adjustment device 100 performs a temporary lock that maintains the parallel position of the first pressure bonding tool end face 10a to the reference plane S. That is, the inclination adjustment device 100 fixes the inclined position of the oscillator 21 by vacuum suction through the air bearing port 34.

[0104] As shown in FIG. 10, in the process of provisional locking, the crimping part rocking body 20 moves along the base axis LB of the device base 30 in the direction from the first base end face 30a to the second base end face 30b by the gap between the second rocking body end face 21b and the first base end face 30a. In the process of the crimping part rocking body 20 moving in the axial direction of the device base 30, the second drive shaft end 22b and the tip spherical part 23 are guided by the cylindrical bearing inner peripheral surface 52a. As a result, the tip spherical part 23 does not change its position in a plane parallel to the second base end face 30b. In other words, in the process of provisional locking, the crimping part rocking body 20 moves in the axial direction of the device base 30 while maintaining the angle α between the crimping part axis LP and the base axis LB, so that the parallelism between the reference plane S and the first crimping tool end face 10a is maintained.

[0105] After the air bearing air supply / discharge chamber 32 is depressurized to temporarily lock the air, the pressure supply source switches the pressure of the air supplied to the locking port 33 from negative to positive. This supply leads to pressurization of the locking air supply / discharge chamber 46 with which the locking port 33 communicates. When the locking air supply / discharge chamber 46 is pressurized, the locking member 43 moves in a direction from the first base end face 30a toward the second base end face 30b, as shown by the two-dot chain line in FIG. 9. This movement causes the locking member 43 to come into contact with the holding portion 44 that is separated from the locking member 43. Then, when the locking member step surface 433a of the locking member 43 is pressed against the holding portion step surface 443b of the holding portion 44, the holding portion inner peripheral surface 44a of the holding portion 44 tightly engages with the spherical surface formed by the intermediate spherical portion 22d. As a result, the crimping part rocking body 20 is pressed in a direction from the first base end face 30a to the second base end face 30b. The rocking body 21 of the crimping part rocking body 20 is in contact with the first base end face 30a at the second rocking body end face 21b due to the provisional lock. That is, the pressurization generates a normal force against the pressing force at the contact surface between the second rocking body end face 21b and the first base end face 30a. The normal force induces a static friction force at the contact surface that prevents the rocking body 21 from rocking relative to the device base 30. This limits the rocking of the crimping part rocking body 20 relative to the device base 30. As a result of the pressurization, the inclination adjustment device 100 performs a permanent lock that maintains the parallel posture of the first crimping tool end face 10a relative to the reference plane S in addition to the provisional lock.

[0106] Therefore, the tilt adjustment device 100 adjusts the parallelism of the first crimping tool end face 10a and the reference plane S and maintains the parallel posture by temporary locking and final locking by driving the positioning mechanism 50 based on the control device 70 and the tilt detection sensor 80. In other words, the control device 70 drives the first to fourth bellows actuators A1 to A4 so that the reference plane S and the first crimping tool end face 10a are parallel to each other based on the result of measurement by the tilt detection sensor 80 that measures the tilt of the first crimping tool end face 10a with respect to the reference plane S.

[0107] The ventilation port 36 of the inclination adjustment device 100 is connected to a pressure supply source (not shown) and communicates with the actuator housing space 54 and the lock chamber 47. That is, the ventilation port 36 communicates with the gap formed by the oscillator 21 and the annular porous material 37 through the lock chamber 47, and with the air bearing port 34 through the annular porous material 37. The ventilation port 36 also communicates with the actuator housing space 54 and the outside of the inclination adjustment device 100 through a gap formed by the positioning mechanism housing 51 and the actuator housing top plate 51a. That is, the particles in the actuator housing space 54 and the lock chamber 47 are discharged to the outside of the inclination adjustment device 100 by discharging air from the ventilation port 36 by the pressure supply source. Also, the particles in the gap formed by the oscillator 21 and the annular porous material 37 are discharged to the outside of the inclination adjustment device 100 by discharging air from the ventilation port 36 by the pressure supply source.

[0108] [Effects of this embodiment] The effects of this embodiment will be described. (1) The tilt adjustment device 100 changes the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b by the first to fourth bellows actuators A1 to A4 provided in the positioning mechanism 50. This change in the position of the tip spherical portion 23 leads to a tilt of the pressure-bonding portion oscillator 20 with respect to the base axis LB.

[0109] Furthermore, the control device 70 controls the actuator control section 71 to drive the first to fourth bellows actuators A1 to A4 based on the result of measurement by the tilt detection sensor 80. This driving realizes a posture of the crimping portion rocking body 20 in which the reference plane S and the first crimping tool end face 10a are parallel to each other.

[0110] Therefore, the inclination adjustment device 100 realizes the parallel posture of the crimping part rocking body 20 with respect to the reference surface S by using the positioning mechanism 50, the control device 70, and the inclination detection sensor 80. As a result, the inclination adjustment device 100 can realize the parallelism of the reference surface S and the first crimping tool end surface 10a without contacting the reference surface S with the first crimping tool end surface 10a. Therefore, when adjusting the reference surface S and the first crimping tool end surface 10a to be parallel, the inclination adjustment device 100 can adjust the reference surface S and the first crimping tool end surface 10a to be parallel without generating a load on the reference surface S. From the above, the inclination adjustment device 100 can adjust the inclination without restrictions on the nature, physical properties, shape, and dimensions of the object to be crimped.

[0111] (2) The driver 55 is composed of a cylindrical bearing 52 and a bearing holder 53. The driver 55 holds the tip spherical portion 23 by the cylindrical bearing 52 so that the tip spherical portion 23 can reciprocate and slide in the cylindrical bearing insertion hole 52d. That is, the crimping part rocker 20, which has been set in a desired position by the positioning mechanism 50 via the tip spherical portion 23, is attracted to the device base 30 by the provisional lock while maintaining the inclination of the crimping part axis LP relative to the base axis LB. Therefore, the inclination adjustment device 100 can move the crimping part rocker 20, which has been adjusted to a desired inclination, in the axial direction of the cylindrical bearing 52 while maintaining the inclination, and fix it to the device base 30. As a result, the inclination adjustment device 100 can maintain the inclination of the rocker 21 with high accuracy and fix the inclination by the provisional lock, compared to when the driver 55 does not include the cylindrical bearing 52.

[0112] (3) A gap 52c is formed in the cylindrical bearing 52. The tip spherical portion 23, which has a diameter larger than the inner diameter of the cylindrical bearing inner peripheral surface 52a, is inserted into the cylindrical bearing insertion hole 52d, and the cylindrical bearing 52 is expanded in diameter by the gap 52c. The cylindrical bearing 52 into which the tip spherical portion 23 is inserted while expanding in diameter applies a preload to the tip spherical portion 23. In other words, the cylindrical bearing 52 in which the gap 52c is formed can accommodate the tip spherical portion 23 in the cylindrical bearing insertion hole 52d while being accompanied by a preload. As a result, the inclination adjustment device 100 can reduce the rattling of the tip spherical portion 23 relative to the cylindrical bearing 52. Therefore, the inclination adjustment device 100 can perform highly accurate positioning and parallel adjustment of the crimping portion rocking body 20 compared to a case in which the cylindrical bearing 52 does not form the gap 52c.

[0113] (4) The first base end face 30a is formed almost entirely of the annular porous material 37, and forms an air bearing by air supplied from the air bearing port 34. That is, the inclination adjustment device 100 can oscillate the pressure-bonding part oscillating body 20 while separating the second oscillating body end face 21b from the first base end face 30a by the air bearing. The inclination adjustment device 100 can perform parallel adjustment of the pressure-bonding part oscillating body 20 with high accuracy compared to the case where the oscillating body 21 and the device base 30 are brought into sliding contact with each other while the pressure-bonding part oscillating body 20 is oscillated. In addition, the inclination adjustment device 100 can reduce particles generated between the second oscillating body end face 21b and the first base end face 30a when the pressure-bonding part oscillating body 20 is oscillated.

[0114] (5) When the driver 55 moves along the second base end surface 30b, the relative positions of the driver 55 and each of the first to fourth bellows actuators A1 to A4 change with the movement of the driver 55. Each of the first to fourth linear guide sections S1 to S4 moves the slide plate 661 with respect to the slide section 662 by a distance corresponding to the change in the relative position of the driver 55 with respect to each of the first to fourth bellows actuators A1 to A4. That is, each of the first to fourth linear slide mechanisms 61 to 64 eliminates distortions that occur in each of the first to fourth bellows actuators A1 to A4 with the movement of the driver 55. In addition, by eliminating the distortions, the first to fourth linear slide mechanisms 61 to 64 prevent each of the first to fourth bellows actuators A1 to A4 from affecting each other via the driver 55. As a result, the inclination adjustment device 100 can adjust the inclination of the pressure-bonding portion oscillator 20 with higher accuracy than when the positioning mechanism 50 does not include the first to fourth linear slide mechanisms 61 to 64. In addition, the first to fourth linear slide mechanisms 61 to 64 can reduce the load generated in the first to fourth bellows actuators A1 to A4 as the driver 55 moves.

[0115] (6) The inclination adjustment device 100 adjusts the inclination of the pressure-bonding portion rocking body 20 by using the first to fourth bellows actuators A1 to A4, respectively. The first to fourth bellows actuators A1 to A4 have a higher thrust force than an electric actuator when compared with the same volume. Therefore, by using the first to fourth bellows actuators A1 to A4 in the positioning mechanism 50, the inclination adjustment device 100 can perform positioning of the driver 55 with high efficiency.

[0116] Furthermore, the positioning mechanism 50 includes a first bellows actuator pair AA1 and a second bellows actuator pair AA2. The positioning mechanism 50 can position the driver 55 and adjust the inclination of the pressure-bonding portion rocking body 20 with high accuracy, compared to a case in which the first to fourth bellows actuators A1 to A4 surround the tip spherical portion 23 without forming pairs facing each other.

[0117] (7) The positioning mechanism 50 is attached to the second base end surface 30b and includes a positioning mechanism housing 51 that houses the first to fourth bellows actuators A1 to A4. In addition, both ends of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 are fixed to the respective corners of the positioning mechanism housing 51. With this, the shape of the cross section of the positioning mechanism housing 51 as seen from the base axis LB can be changed by changing the angle formed by the first bellows actuator pair AA1 and the second bellows actuator pair AA2. In other words, the shape of the cross section of the inclination adjustment device 100 as seen from the base axis LB can be selected depending on the situation in which the inclination adjustment device 100 is applied.

[0118] In particular, the angle between the first bellows actuator pair AA1 and the second bellows actuator pair AA2 in the positioning mechanism 50 is 90 degrees. That is, the directions of movement of the driver 55 caused by the first bellows actuator pair AA1 and the second bellows actuator pair AA2 are independent of each other. This improves the braking performance of the driver 55 caused by the first bellows actuator pair AA1 and the second bellows actuator pair AA2, and improves the positioning accuracy of the positioning mechanism 50.

[0119] (8) The control device 70 drives each of the first to fourth bellows actuators A1 to A4 so that the reference plane S and the first crimping tool end face 10a are parallel to each other based on the measurement result by the tilt detection sensor 80. Therefore, the tilt adjustment device 100 can automatically adjust the parallelism of the first crimping tool end face 10a with respect to the reference plane S.

[0120] (9) The first base end face 30a is formed almost entirely of the annular porous material 37, and can adsorb the second oscillator end face 21b by sucking air through the air bearing port 34. This adsorption realizes a provisional lock that limits the oscillation of the oscillator 21 relative to the device base 30. Therefore, the first base end face 30a performs provisional locking by this adsorption, and can maintain the inclined posture of the crimping portion oscillator 20 relative to the base axis LB.

[0121] (10) The locking mechanism 40 can maintain the inclination of the crimping portion rocking body 20 with respect to the base axis LB by moving the locking member 43 by pressurizing the locking air supply / discharge chamber 46 via the locking port 33.

[0122] (11) The actuator accommodating space 54 and the lock chamber 47 communicate with the outside of the inclination adjustment device 100 via the ventilation port 36. In addition, the ventilation port 36 communicates with the outside of the inclination adjustment device 100 via the gap formed by the positioning mechanism housing 51 and the actuator accommodating top plate 51a, and the actuator accommodating space 54. As a result, the inclination adjustment device 100 can discharge particles generated in the actuator accommodating space 54 and the lock chamber 47 to the outside of the inclination adjustment device 100 by discharging air from the ventilation port 36.

[0123] (12) The ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a through the lock chamber 47. The ventilation port 36 also communicates with the air bearing air supply / discharge chamber 32 through the gap and the annular porous material 37. That is, when air is supplied from the air bearing port 34, the ventilation port 36 can discharge particles generated in the gap and the lock chamber 47 to the outside of the inclination adjustment device 100. When air is supplied from the air bearing port 34, the ventilation port 36 can discharge particles generated in the actuator accommodating space 54 to the outside of the inclination adjustment device 100.

[0124] [Example of change] The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other to the extent that no technical contradiction occurs.

[0125] The inclination adjustment device 100 does not need to include the packing 45. In this case, the ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a through the lock chamber 47. The ventilation port 36 also communicates with the air bearing air supply / discharge chamber 32 through the gap and the annular porous material 37. That is, air is supplied from the air bearing port 34, and the supplied air is discharged from the ventilation port 36 to the outside of the inclination adjustment device 100 through the gap and the lock chamber 47. Therefore, even in this case, the ventilation port 36 can discharge particles generated in the actuator housing space 54 to the outside of the inclination adjustment device 100.

[0126] The tilt adjustment device 100 does not have to include the ventilation port 36. In addition, the actuator accommodating space 54 may be sealed. The inclination adjustment device 100 does not need to include the lock mechanism 40. In this case, the pressure-bonding portion rocking body 20 is held relative to the device base 30 by the driver 55 holding the tip spherical portion 23.

[0127] The control device 70 does not have to include the drive amount calculation unit 72. In this case, the control device 70 may store a map that determines an increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 based on the result of measurement by the tilt detection sensor 80. The control device 70 may compare the result of measurement by the tilt detection sensor 80 with the map to derive the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4.

[0128] The line extending in the axial direction of the first bellows actuator pair AA1 and the line extending in the axial direction of the second bellows actuator pair AA2 do not have to be perpendicular to each other. In this case, φ in equations (1) to (4) is changed according to the angle between a line extending in the axial direction of the first bellows actuator pair AA1 and a line extending in the axial direction of the second bellows actuator pair AA2. The cross section of the positioning mechanism housing 51 as viewed from the base axis LB does not have to be substantially rectangular.

[0129] Both ends of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 do not have to be provided at the corners of the positioning mechanism housing 51. Both ends of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 may be provided at positions spaced apart from a side wall of the positioning mechanism housing 51. In other words, each of the first to fourth driving ports A11 to A14 may be provided at positions spaced apart from a side wall of the positioning mechanism housing 51. In this case, each of the first to fourth driving base ports 351 to 354 communicates with each of the first to fourth driving ports A11 to A14 through the inside of the device base 30.

[0130] The first and third bellows actuators A1 and A3 do not have to form the first bellows actuator pair AA1. The second and fourth bellows actuators A2 and A4 do not have to form the second bellows actuator pair AA2. That is, the first bellows actuator A1 does not have to be located opposite the third bellows actuator A3. The second bellows actuator A2 does not have to be located opposite the fourth bellows actuator A4.

[0131] The positioning mechanism 50 may use two bellows actuators as the multiple actuators. For example, the positioning mechanism 50 may only include a first bellows actuator A1 and a second bellows actuator A2 as the multiple actuators, and may not include an actuator at a position opposite to the first bellows actuator A1 and the second bellows actuator A2. In this case, the positioning mechanism 50 includes a first linear slide mechanism 61 and a second linear slide mechanism 62 as the multiple linear slide mechanisms. In this case, the positioning mechanism 50 positions the driver 55 in the direction in which each of the two bellows actuators expands and contracts. The two bellows actuators are preferably arranged so that the axes of the two bellows actuators are perpendicular to each other.

[0132] The positioning mechanism 50 does not have to use a plurality of bellows actuators as the plurality of actuators. For example, an electric actuator may be used as the actuator.

[0133] The positioning mechanism 50 may use three bellows actuators as the multiple actuators. In this case, for example, it is preferable that the three bellows actuators are provided at equal intervals so as to surround the driver 55.

[0134] The positioning mechanism 50 may include two ball screw actuators B as the multiple actuators. For example, two linear motors, two ultrasonic linear motors, or two voice coil motors may be used as the multiple actuators.

[0135] As shown in FIG. 11, the ball screw positioning mechanism B50 is attached to the second base end surface 30b. Each of the two ball screw actuators B is composed of a ball screw shaft B11a, B11b, a ball screw motor B12a, B12b, and a ball screw nut B13a, B13b. Each of the two ball screw actuators B is inserted into two mutually orthogonal ball screw side walls B51 among the side walls of the ball screw positioning mechanism B50. That is, the ball screw shafts B11a, B11b are mutually orthogonal. Each of the two ball screw shafts B11a, B11b rotates by driving each of the ball screw motors B12a, B12b. Each of the ball screw nuts B13a, B13b is screwed to each of the ball screw shafts B11a, B11b. The two ball screw nuts B13a, B13b move along the rotating ball screw shafts B11a, B11b. The ball screw nuts B13a, B13b each include a connection plate B14a, B14b. The ball screw shafts B11a, B11b are inserted into the two connection plates B14a, B14b, and linear guides B15a, B15b extend from the insertion points. The linear guide B15a is provided so as to be movable in the direction in which the ball screw shaft B11b extends. The linear guide B15b is provided so as to be movable in the direction in which the ball screw shaft B11a extends. The connection plates B14a, B14b are connected to the driver B60 via the linear guides B15a, B15b. That is, each of the connection plates B14a, B14b is connected to each of the ball screw nuts B13a, B13b and the corresponding side surface of the driver B60 at a surface facing away from each of the ball screw side walls B51.

[0136] The direction in which the ball screw nut B13a moves coincides with the direction in which the linear guide B15b moves relative to the driver B60. The direction in which the ball screw nut B13b moves coincides with the direction in which the linear guide B15a moves relative to the driver B60. Therefore, each of the linear guides B15a and B15b reduces the influence that one of the ball screw nuts B13a and B13b has on the other via the driver B60.

[0137] With the above configuration, each of the two ball screw actuators B moves the driver B60 via each of the connection plates B14a, B14b. As a result, the ball screw positioning mechanism B50 positions the driver B60 in a plane perpendicular to the two ball screw side walls B51.

[0138] The cylindrical bearing 52 does not need to have a gap 52c extending in the axial direction of the cylindrical bearing 52 between the cylindrical bearing inner surface 52a and the cylindrical bearing outer surface 52b. In this case, the tip spherical portion 23 has an outer diameter that matches the inner diameter of the cylindrical bearing 52.

[0139] The driver 55 does not have to include the cylindrical bearing 52 and the bearing holder 53 as separate bodies. In this case, the driver 55 is formed such that the cylindrical bearing 52 and the bearing holder 53 are integral with each other.

[0140] The driver 55 may be formed only of a cylindrical body that defines an insertion hole into which the tip spherical portion 23 is inserted. Here, the cylindrical body is a column that defines an insertion hole into which the tip spherical portion 23 is inserted and held. The insertion hole defined by the cylindrical body is not limited to a circular shape. In this case, the driver 55 is formed only of a bearing holder 53 that can hold the tip spherical portion 23, and does not include a cylindrical bearing 52. In other words, the tip spherical portion 23 is inserted into the bearing holder 53 and held by the bearing holder 53.

[0141] The inclination adjustment device 100 does not have to include the driver 55. In this case, the first to fourth bellows actuators A1 to A4 included in the positioning mechanism 50 are directly connected to the tip spherical portion . [Explanation of symbols]

[0142] 10... Crimping tool, 10a... First crimping tool end surface, 10b... Second crimping tool end surface, 21... Oscillator, 21a... First oscillator end surface, 21b... Second oscillator end surface, 22... Drive shaft, 22a... First drive shaft end surface, 22b... Second drive shaft end surface, 22d... Middle sphere portion, 23... Tip sphere portion, 30... Apparatus base, 30a... First base end surface, 30b... Second base end surface, 30c... Inner peripheral surface of base, 30d...base insertion hole as insertion hole, 33...locking port, 34...air bearing port, 36...ventilation port, 37...annular porous material as air bearing, 40...locking mechanism, 42...support member, 42e...first seal, 43...locking member, 43a...locking member inner peripheral surface, 43d...second seal, 44...holding portion, 46...air supply / discharge chamber for locking, 47...lock chamber, 50...positioning mechanism, 51...positioning mechanism housing as housing part, 52...cylindrical bearing, 52c...gap, 52d...cylindrical bearing insertion hole as insertion hole, 53...bearing retaining part, 54...actuator accommodating space as accommodating space, 55...driver, 61-64...first to fourth linear slide mechanisms as multiple linear slide mechanisms, 70...control device, 71...actuator control part, 72...drive amount calculation part, 80...tilt detection sensor, A1-A4...first to fourth bellows actuators as multiple actuators, AA1-AA2...first bellows actuator pair and second bellows actuator pair as two bellows actuator pairs, LC...central axis, S...reference surface.

Claims

1. a oscillator having a first oscillator end surface and a second oscillator end surface which is a convex spherical surface; a drive shaft protruding from an end surface of the second rocker; a crimping tool having a second crimping tool end face attached to the first oscillator end face and having a first crimping tool end face different from the second crimping tool end face; an apparatus base having a first base end face that is a concave spherical surface and engages with the second oscillator end face, and a second base end face that is different from the first base end face, and having a base inner circumferential surface that defines an insertion hole through which the drive shaft is inserted and connects the second base end face and the first base end face; A tilt adjustment device that adjusts the tilt of the oscillator so that a reference plane and the first crimping tool end surface are parallel to each other while oscillating the second oscillator end surface along the first base end surface, a spherical tip portion provided at a second drive shaft end portion, which is an axial end portion of the drive shaft and is different from the first drive shaft end portion on the swing body side, and protruding from an end surface of the second base; a positioning mechanism provided on an end surface side of the second base for positioning the tip spherical portion; an inclination detection sensor for measuring an inclination of the end surface of the first crimping tool relative to the reference surface; A control device that controls the positioning mechanism, the positioning mechanism includes a plurality of actuators arranged to change the position of the spherical tip portion in a plane parallel to the end surface of the second base and to surround the spherical tip portion along the end surface of the second base, The control device is provided with an actuator control unit that drives the multiple actuators, and the actuator control unit drives the multiple actuators so that the reference plane and the end face of the first crimping tool are parallel based on the results measured by the tilt detection sensor.

2. 2. The tilt adjustment device of claim 1, further comprising a driver having an inner surface against which the tip spherical portion slides while defining an insertion hole into which the tip spherical portion is inserted, and the plurality of actuators are arranged to surround the driver along the second base end face and change the position of the tip spherical portion in a plane parallel to the second base end face via the driver.

3. The tilt adjustment device according to claim 2 , wherein the driving body comprises a cylindrical bearing that defines the insertion hole and a bearing holder that holds the cylindrical bearing, and a central axis of the cylindrical bearing extends in an axial direction of the device base.

4. 4. The tilt adjustment device according to claim 3, wherein the cylindrical bearing has an inner diameter smaller than a diameter of the tip spherical portion, and has a gap extending in an axial direction of the cylindrical bearing so that the inner diameter of the cylindrical bearing can be expanded.

5. an air bearing port; an air bearing that receives air supply and exhaust from the air bearing port, The tilt adjustment device according to any one of claims 1 to 4, wherein the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillating body so that it can oscillate at a distance from the air bearing surface, and fixes the inclined posture of the oscillating body by vacuum suction through the air bearing port.

6. 4. The tilt adjustment device according to claim 2 or 3, wherein the driving body is connected to the plurality of actuators via a plurality of linear slide mechanisms, and the positioning mechanism moves the driving body by pushing and pulling the driving body via each of the plurality of linear slide mechanisms with each of the plurality of actuators.

7. 4. The tilt adjustment device according to claim 2 or 3, wherein the plurality of actuators include four bellows actuators, the four bellows actuators form two bellows actuator pairs each consisting of two opposing bellows actuators, and each of the two bellows actuator pairs holds the driving body therebetween.

8. 8. The tilt adjustment device according to claim 7, further comprising a housing portion that is attached to an end surface of the second base and that houses the four bellows actuators and is polygonal when viewed in the axial direction of the device base, and both ends of each of the two pairs of bellows actuators are fixed to each corner of the housing portion.

9. 9. The tilt adjustment device according to claim 8, wherein the four bellows actuators are arranged so that two straight lines formed by each of the two bellows actuator pairs are perpendicular to each other.

10. The control device includes a drive amount calculation unit that calculates a value of pressure to be supplied to each of the four bellows actuators required for the reference plane and the first crimping tool end face to be parallel based on the inclination of the first crimping tool end face relative to the reference plane measured by the inclination detection sensor, and the actuator control unit drives the four bellows actuators based on the result of the drive amount calculation unit.

11. an intermediate spherical portion provided on the drive shaft between the swing body and the tip spherical portion; a locking member provided along an inner peripheral surface of the base so as to be reciprocable in an axial direction of the device base and spaced apart from an outer surface of the drive shaft, the locking member having an inner peripheral surface surrounding the drive shaft; The tilt adjustment device according to any one of claims 1 to 4, further comprising a locking mechanism including a holding portion through which the drive shaft passes and which has an inner surface that engages with the intermediate spherical portion.

12. the locking mechanism includes a support member having an inner circumferential surface that is located between an inner circumferential surface of the locking member and an outer surface of the drive shaft and that is spaced apart from the drive shaft and surrounds the drive shaft; a first seal for sealing between the support member and the locking member; a second seal for sealing between the locking member and the device base; a locking air supply / discharge chamber defined by the locking member, the device base, and the support member, The inclination adjustment device according to claim 11, further comprising: a lock port for supplying and discharging air to and from the lock air supply and discharge chamber.

13. an accommodation space that accommodates the plurality of actuators; a lock chamber defined by an inner peripheral surface of the lock member and an inner peripheral surface of the support member, the lock chamber communicating with the accommodation space via a gap between the lock member and the retaining portion; a ventilation port provided on the device base and communicating with the accommodation space, an air bearing port, and an air bearing for supplying and discharging air through the air bearing port, the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillator so as to be able to oscillate at a distance from the air bearing surface; 13. The inclination adjustment device according to claim 12, wherein the ventilation port communicates with a gap formed by the oscillator and the air bearing through the lock chamber, and communicates with the outside of the inclination adjustment device through the accommodation space.

14. an accommodation space that accommodates the plurality of actuators; a lock chamber defined by an inner peripheral surface of the lock member and an inner peripheral surface of the support member, the lock chamber communicating with the accommodation space via a gap between the lock member and the retaining portion; a ventilation port provided on the device base and communicating with the accommodation space, an air bearing port, and an air bearing for supplying and discharging air through the air bearing port, the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillator so as to be able to oscillate at a distance from the air bearing surface; 13. The tilt adjustment device according to claim 12, wherein the accommodation space communicates with the outside of the device base through the ventilation port, and communicates with the air bearing port through the lock chamber.

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