Non-contact measurement device

Abstract

To enable non-contact measurement without being affected by vibrations propagating from an object under measurement when making measurement by attaching a jig on the object under measurement and installing a non-contact measurement device such a laser Doppler vibrometer.SOLUTION: A non-contact measurement device is provided, comprising an installation jig having an installation plate 10 designed to allow an attachment tool 12 to be attached to an object under measurement, an anti-vibration rubber 20 disposed on the installation plate, an attachment plate 30 disposed on the anti-vibration rubber, and a non-contact measuring instrument 40 attached to the attachment plate and positioned inside or above the anti-vibration rubber.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a non-contact measuring device including a non-contact vibrometer such as a laser Doppler vibrometer or other non-contact measuring instrument. [Background technology]

[0002] Conventionally, contact-type vibrometers have been the norm for vibration measurement. However, contact-type vibrometers have had difficulties in measuring objects located far away, or in environments such as high temperatures, high magnetic fields, and explosion-proof areas. Furthermore, contact-type vibrometers have their own inherent frequency, making it difficult to accurately measure high-frequency vibrations on the order of kilohertz or higher.

[0003] On the other hand, the non-contact type does not have the above problems and has improved versatility of application and measurement accuracy compared to the contact type. Therefore, the non-contact type vibrometer is expected to be used for predictive maintenance of equipment in factories and plants and for inspection of infrastructure and structures. One example of a non-contact type vibrometer is the laser Doppler vibrometer (see, for example, Patent Documents 1 and 2).

[0004] A non-contact vibrometer is generally installed using a jig such as a clamp or a tripod. For the aforementioned predictive maintenance and inspection applications, it is important to measure the vibration trend of the object being measured, so fixed-point observation is desirable. Therefore, it is more suitable to use a jig that can be fixed rather than a tripod that can be freely moved. Also, if the distance between the non-contact vibrometer and the object being measured, that is, the measurement distance, is large, a slight deviation in the fixed position may cause a large deviation in the measurement position, or an obstacle may occur between the non-contact vibrometer and the object being measured, making measurement impossible. To avoid such a situation, it is better to keep the measurement distance as small as possible. Therefore, a method is being considered in which a jig is installed directly on the object being measured to achieve non-contact measurement from a close distance. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 4-249719 [Patent Document 2] JP 2001-159560 A Summary of the Invention [Problem to be solved by the invention]

[0006] If a non-contact vibrometer is installed by attaching a jig directly to the object to be measured, the vibrations of the object to be measured will be transmitted to the non-contact vibrometer via the jig, which may result in a deterioration of measurement performance.

[0007] The present invention has been made in view of the above problems, and an object of the present invention is to provide a non-contact measuring device that enables non-contact measurement without being affected by vibrations propagated from an object to be measured when a jig is attached to the object to be measured and a non-contact measuring instrument is installed thereon. [Means for solving the problem]

[0008] In order to achieve the above-mentioned objective, the non-contact measuring device of the present invention is configured to include an installation jig having an installation plate to which an attachment tool for an object to be measured can be attached, a vibration isolator arranged on the installation plate, a mounting plate arranged on the vibration isolator, and a non-contact measuring instrument attached to the mounting plate and arranged inside or on top of the vibration isolator.

[0009] According to a preferred embodiment of the non-contact measuring device of the present invention, the measuring device is the entire vibrometer or a sensor head portion of the vibrometer.

[0010] Here, the mounting plate has a horizontal portion which becomes a horizontal plane during measurement, and the vibration-isolating device is a cylindrical or columnar vibration-isolating rubber, and it is preferable that the vibration-isolating rubber is placed on the horizontal portion of the mounting jig so that its height axis is in the vertical direction during measurement.

[0011] In addition, the installation jig is provided with an attachment device for the object to be measured on the underside of the installation plate, an opening is formed in the horizontal part of the installation plate, the vibration-proof rubber is cylindrical in shape, and the measuring device is provided on the underside of the installation plate and is positioned vertically downward in the internal space of the cylinder, aligned with the opening.

[0012] Alternatively, the installation jig may have an installation plate having a horizontal portion and a vertical portion extending vertically, the vertical portion having an attachment device for the object to be measured on the surface of the vertical portion opposite the surface on which the horizontal portion is located, an opening being formed in the vertical portion of the installation plate, and the measuring device being provided on the upper surface of the installation plate and positioned horizontally in alignment with the opening.

[0013] The mounting device may be provided so that it can be attached to a cylindrical or columnar measurement object extending in a horizontal direction so that the horizontal portion is horizontal. The mounting device may be provided so that it can be attached to a cylindrical or columnar measurement object extending in a vertical direction so that the horizontal portion is horizontal. The mounting device may be switchable between a state in which it can be attached to a cylindrical or columnar measurement object extending in a horizontal direction so that the horizontal portion is horizontal, and a state in which it can be attached to a cylindrical or columnar measurement object extending in a vertical direction so that the horizontal portion is horizontal.

[0014] Furthermore, a detachable connecting member may be provided to fix the installation plate and the mounting plate to each other. Effect of the Invention

[0015] According to the non-contact type measuring device of the present invention, when a jig is attached to a measurement object and a non-contact type measuring instrument is installed to measure the object, the non-contact type measuring instrument can measure the object without being affected by vibrations transmitted from the measurement object. [Brief description of the drawings]

[0016] [Figure 1] FIG. 2 is a schematic diagram for explaining a first measuring device. [Diagram 2] FIG. 4 is a schematic diagram for explaining a second measuring device. [Diagram 3] FIG. 13 is a schematic diagram for explaining a third measuring device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the drawings, but the shape, size, and positional relationship of each component are merely shown in a schematic manner to allow the present invention to be understood. In addition, the following describes a preferred configuration example of the present invention, but the material and numerical conditions of each component are merely preferred examples. Therefore, the present invention is not limited to the following embodiment, and many changes or modifications can be made that can achieve the effects of the present invention without departing from the scope of the configuration of the present invention.

[0018] (1st measuring device) A non-contact type measuring device (hereinafter, also referred to as a first measuring device) according to a first embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is a schematic diagram for explaining the first measuring device. The first measuring device is used to measure vibrations in the vertical direction, with a measuring object 1000 having a cylindrical or columnar shape extending in the horizontal direction.

[0019] The first measuring device includes an installation jig, an anti-vibration tool, and a measuring instrument. Here, a laser Doppler vibrometer, which is a non-contact vibrometer, is described as an example of the measuring instrument, but is not limited thereto. As the measuring instrument, any suitable non-contact measuring instrument, such as a non-contact thermometer or a non-contact ammeter, can be used other than the laser Doppler vibrometer.

[0020] A laser Doppler vibrometer splits the laser light generated by a laser light source into two, illumination light and local light, and measures the vibration of the object to be measured by using an optical interferometer to detect phase fluctuations due to the Doppler effect contained in the measurement light from the measurement light and the local light generated when the illumination light is irradiated onto the object to be measured.

[0021] A laser Doppler vibrometer is configured to include, for example, a signal processing unit and a sensor head unit optically coupled by an optical fiber transmission line. The signal processing unit splits the laser light generated by a laser light source into two, an illumination light and a local light, and obtains information on the vibration of the measurement object by interfering with the measurement light reflected by the illumination light from the signal processing unit and the local light. The sensor head unit illuminates the measurement object with the illumination light propagated from the signal processing unit through the optical fiber transmission line, receives the measurement light reflected by the measurement object, propagates it through the optical fiber transmission line, and sends it to the signal processing unit.

[0022] Here, the sensor head of the laser Doppler vibrometer will be described as the measuring instrument 140. The signal processing unit and the optical fiber transmission line of the laser Doppler vibrometer are not shown in the figure. In addition, the configuration of the laser Doppler vibrometer can be any suitable conventionally known configuration, so the description will be omitted.

[0023] The entire laser Doppler vibrometer, including the signal processing unit and the optical fiber transmission line, may be provided in the first measuring device as measuring device 140. The same is true for measuring devices other than vibrometers, and when the device is composed of a sensor head unit arranged in the vicinity of the object to be measured and a signal processing unit, the entire device including the sensor head unit and the signal processing unit may be measuring device 140 of the first measuring device, or only the sensor head unit may be measuring device 140 of the first measuring device.

[0024] The installation jig has a mounting plate 10 to which a mounting tool 12 can be attached to the measurement object 1000. Here, the installation plate preferably includes a horizontal portion that becomes a horizontal plane during measurement. In this example, the installation plate 10 and the horizontal portion refer to the same thing. The underside of the installation plate 10 is provided with a mounting tool 12 for the cylindrical measurement object 1000 that extends in the horizontal direction, such as a hose band or a clamp. The first measuring device is installed on the measurement object 1000 by attaching the installation plate 10 to the measurement object 1000 using the mounting tool 12.

[0025] An opening 11 through which the irradiated light and the measurement light pass is formed in the installation plate 10. The installation jig can be made of any suitable metal such as aluminum or an alloy.

[0026] The vibration isolator is placed on the installation plate 10. The vibration isolator can be, for example, any suitable conventionally known vibration isolator rubber 20. The vibration isolator rubber 20 has a cylindrical shape and is preferably placed so that its height axis is in the vertical direction. At this time, the vibration isolator rubber 20 is placed so that the internal space 21 of the vibration isolator rubber 20 and the opening 11 of the installation plate 10 are aligned.

[0027] A mounting plate 30 made of, for example, metal is placed on the anti-vibration rubber 20. A sensor head of a laser Doppler vibrometer is attached as a measuring device 140 to the underside of the mounting plate 30, and the sensor head is placed in the internal space 21 of the anti-vibration rubber 20. Light emitted vertically downward from the sensor head 40 passes through the internal space 21 of the anti-vibration rubber 20 and the opening 11 of the installation plate 10, and is irradiated onto the measurement object 1000. Moreover, the measurement light that is the irradiated light reflected by the measurement object 1000 passes vertically upward through the opening 11 and the internal space 21 of the anti-vibration rubber 20, and is received by the sensor head 40.

[0028] With this configuration, the vibrations of the object to be measured 1000 are absorbed by the vibration-proof rubber 20, and are not transmitted to the sensor head portion of the measuring device 40. As a result, non-contact vibration measurement is possible without deteriorating the measurement performance.

[0029] Both the installation plate 10 and the mounting plate 30 are attached to vibration-isolating rubber 20, which is a vibration isolator, and the installation plate 10 and the mounting plate 30 are connected via the vibration-isolating rubber 20 when in use.

[0030] Here, in order to prevent the vibration-proof rubber 20 from being deformed due to vibration during transportation of the first measuring device, and to prevent damage to the measuring device 40 such as the sensor head, the installation plate 10 and the attachment plate 30 are preferably connected by a detachable metal connecting member 50. The connecting member 50 is formed, for example, in the shape of a metal rod having threads on both ends. The connecting member 50 is fixed to each of the installation plate 10 and the attachment plate 30 by screwing during transportation and storage. On the other hand, during measurement, the connecting member 50 is unscrewed from at least one of the installation plate 10 and the attachment plate 30 and separated from them. This makes it possible to prevent vibration of the installation plate 10 from being transmitted to the attachment plate 30 via the connecting member 50. The shape of the connecting member 50 is not limited to a rod shape. Furthermore, the means for attaching the connecting member 50 to the installation plate 10 and the attachment plate 30 is not limited to screwing. The connecting member 50 can be any suitable means that can be removed during measurement and attached during transportation and storage.

[0031] (Second measuring device) A non-contact type measuring device (hereinafter also referred to as the second measuring device) according to a second embodiment of the present invention will be described with reference to Fig. 2. Fig. 2 is a schematic diagram for explaining the second measuring device. The second measuring device is used to measure horizontal vibrations of a measuring object 1000 having a cylindrical or columnar shape extending in the horizontal direction.

[0032] The installation plate 110 of the installation jig has a horizontal portion 114 extending horizontally and a vertical portion 116 extending vertically. An attachment tool 112 for attaching to a cylindrical measurement object 1000, such as a hose band, is provided on the surface of the vertical portion 116 opposite to the surface on which the horizontal portion 114 is disposed. An opening 111 through which the irradiation light and the measurement light pass is formed in the vertical portion 116 of the installation plate 110.

[0033] On the horizontal portion 114 of the installation plate 110, there is provided a vibration isolating rubber 120 having a cylindrical or columnar shape, and arranged so that its height axis is aligned vertically during measurement.

[0034] Mounting plate 130 is placed on vibration-proof rubber 120. A sensor head unit is attached and placed on the upper surface of mounting plate 130 as measuring device 140 using any suitable mounting member 142. At this time, light emitted from the sensor head unit passes through opening 111 and is irradiated onto measurement object 1000, and measurement light passes through opening 111 and is received by sensor head unit 140. For this reason, the sensor head unit is placed on the upper surface of mounting plate 130 in alignment with opening 111 so that it can irradiate light horizontally onto measurement object 1000 and receive light horizontally from measurement object 1000.

[0035] (Third measuring device) A non-contact type measuring device according to a third embodiment of the present invention (hereinafter also referred to as a third measuring device) will be described with reference to Fig. 3. Fig. 3 is a schematic diagram for explaining the third measuring device. The second measuring device is a cylindrical or cylinder meter in which a measuring object 1000 extends in the vertical direction, and is used to measure vibrations in the horizontal direction.

[0036] In the third measuring device, the shape and arrangement of the mounting plate 110 of the mounting jig, the vibration isolating rubber 120, and the sensor head portion as the measuring device 140 are the same as those of the second measuring device. Therefore, a duplicated description will be omitted. In the third measuring device, the orientation of the mounting fixture 212 is different from that of the second measuring device.

[0037] That is, the orientation of the hose band is set so that the second measuring device can be attached to a cylindrical measurement object 1000 extending in the horizontal direction, and the third measuring device can be attached to a cylindrical measurement object 1010 extending in the vertical direction.

[0038] Here, the second measuring device and the third measuring device have been described separately, but the mounting member 112 such as a hose band may be attached to the installation plate 110 of the installation jig in each of the orientations when the diameter of the circular hose band is on the horizontal plane and when it is on the vertical plane. With this configuration, it is possible to switch between a state in which the horizontal part 114 can be attached to a cylindrical or columnar measurement object 1000 extending in the horizontal direction so that it is horizontal, and a state in which the horizontal part 114 can be attached to a cylindrical or columnar measurement object 1010 extending in the vertical direction so that it is horizontal. As a result, by switching the orientation of the hose band, it is possible to measure the horizontal vibration of a measurement object extending in the vertical direction and a measurement object extending in the horizontal direction with one jig, and to measure the horizontal vibration of a measurement object extending in the horizontal direction with one measurement device, respectively, when the measurement object extends in the horizontal direction and when the measurement object extends in the vertical direction. [Explanation of symbols]

[0039] 10, 110 Installation board 12, 112, 212 Mounting fixtures 20, 120 Anti-vibration rubber 30, 130 Mounting plate 40, 140 measuring instruments 50, 150 Connecting member

Claims

1. An installation jig that is attached to the object to be measured and has an installation plate to which an installation tool for the object to be measured can be attached; A vibration isolator disposed on the installation plate; A mounting plate disposed on the vibration isolator; and A non-contact measuring device attached to the mounting plate and disposed inside or on the vibration isolator A non-contact measuring device comprising:

2. The measuring device is the entire vibrometer or a sensor head portion of the vibrometer.

2. The non-contact measuring device according to claim 1.

3. The installation plate has a horizontal portion that becomes a horizontal plane during measurement, The vibration isolator is a cylindrical or columnar vibration isolator rubber, During measurement, the vibration-proof rubber is placed on the horizontal part of the installation jig so that its height axis is vertical.

3. The non-contact measuring device according to claim 1 or 2.

4. The installation jig is provided with an attachment tool for attaching to a measurement object on a lower surface of the installation plate, An opening is formed in the horizontal portion of the installation plate, The vibration-proof rubber is cylindrical in shape, The measuring device is provided on the lower surface of the mounting plate and is disposed vertically downward in the internal space of the cylinder so as to be aligned with the opening. The non-contact measuring device according to claim 3.

5. The installation jig includes an attachment tool for attaching the measurement object to the vertical portion of the installation plate, the attachment tool being provided on a surface of the vertical portion opposite to a surface on which the horizontal portion is disposed, the vertical portion having a horizontal portion and a vertical portion extending in a vertical direction. An opening is formed in the vertical portion of the installation plate, The measuring device is provided on an upper surface of the mounting plate and is horizontally aligned with the opening. The non-contact measuring device according to claim 3.

6. The mounting device is provided so as to be mountable to a cylindrical or columnar measurement object extending in a horizontal direction such that the horizontal portion is horizontal during measurement.

6. The non-contact measuring device according to claim 5.

7. The mounting device is provided so as to be mountable to a cylindrical or columnar measurement object extending in a vertical direction so that the horizontal portion is horizontal during measurement.

6. The non-contact measuring device according to claim 5.

8. The mounting device includes: A state in which the horizontal portion can be attached to a cylindrical or columnar measurement object extending in a horizontal direction so that the horizontal portion is horizontal; A state in which the horizontal portion can be attached to a cylindrical or columnar measurement object extending in a vertical direction so that the horizontal portion is horizontal; It is possible to switch between 6. The non-contact measuring device according to claim 5.

9. A detachable connecting member is provided to fix the installation plate and the mounting plate to each other.

3. The non-contact measuring device according to claim 1 or 2.

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