Method and system for coating co-deposited diamond-like carbon

Abstract

To provide a protective coating.SOLUTION: A protective coating includes a bottom layer substantially including a first material and a top layer substantially including diamond like carbon. A mixed layer including the first material and the diamond like carbon in various concentrations exists between the bottom layer and the top layer.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] This disclosure relates generally to methods and systems for codeposited diamond-like carbon coatings. [Background technology]

[0002]

[0002] Aspects of the present disclosure relate to methods and systems for codeposited diamond-like carbon coatings. Conventional solutions for diamond-like carbon coatings can have a variety of problems. In this regard, conventional systems and methods for diamond-like carbon coatings can be costly, cumbersome, and / or inefficient.

[0003]

[0003] The limitations and drawbacks of conventional systems and methods will become apparent to those skilled in the art by comparing such approaches with certain aspects of the present methods and systems described in the remainder of this disclosure with reference to the drawings. Summary of the Invention

[0004]

[0004] A method and system for co-deposited diamond-like carbon coatings is shown and / or described in connection with at least one of the drawings and as more fully described in the claims.

[0005]

[0005] These and other advantages, aspects and novel features of the present disclosure, as well as details of illustrated embodiments thereof, will become more fully understood from the following description and drawings. [Brief description of the drawings]

[0006]

[0006] The various features and advantages of the present disclosure may be more readily understood by reference to the following detailed description in conjunction with the accompanying drawings, in which like reference numerals indicate like structural elements and in which: [Figure 1]

[0007] FIG. 1 is an exemplary block diagram illustrating a protective coating according to an embodiment of the present patent disclosure. [Diagram 2]

[0008] FIG. 2 is a schematic diagram of a cross-section of a protective coating according to an embodiment of the present patent disclosure. [Diagram 3]

[0009] FIG. 3 is a flow chart illustrating an exemplary method of forming a protective coating according to an embodiment of the present patent disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007]

[0011] The following discussion provides various examples of methods and systems for co-deposited diamond-like carbon coatings. Such examples are non-limiting, and the appended claims should not be limited to the specific examples disclosed. In the following discussion, the terms "example" and "for example" are not limiting.

[0008]

[0012] The figures show general schemes of construction, and descriptions and details of known features and techniques may be omitted to avoid unnecessarily obscuring the present disclosure. In addition, elements in the figures are not necessarily drawn to scale. For example, the dimensions of some elements in the figures may be exaggerated relative to other elements to aid in understanding the examples discussed in this disclosure. The same reference numbers in different figures refer to the same elements.

[0009]

[0013] The term "or" means any one or more of the items in the list joined by "or." For example, "x or y" means any element of the three element set {(x),(y),(x,y)}. As another example, "x, y or z" means any element of the seven element set {(x),(y),(z),(x,y),(x,z),(y,z),(x,y,z)}.

[0010]

[0014] The terms "comprises," "comprising," "comprises," and / or "including" are "open-ended" terms and specify the presence of stated features but do not exclude the presence or addition of one or more other features.

[0011]

[0015] Terms such as "first", "second", etc. may be used herein to describe various elements, and these elements should not be limited by these terms. These terms are used only to distinguish one element from another. Thus, for example, a first element discussed in this disclosure can be referred to as a second element without departing from the teachings of this disclosure.

[0012]

[0016] Unless otherwise specified, the term "coupled" may be used to describe two elements that are in direct contact with each other or two elements that are indirectly connected by one or more other elements. For example, if element A is coupled to element B, element A may be in direct contact with element B or indirectly connected to element B by an intervening element C. Similarly, the terms "above" or "on" may be used to describe two elements that are in direct contact with each other or two elements that are indirectly connected by one or more other elements.

[0013]

[0017] This patent disclosure relates to the application of a material called diamond-like carbon (DLC) coating. The name "diamond-like carbon" can be used to illustrate some of its properties and structural similarity to natural diamond in terms of high hardness, low friction, and wear resistance. DLC can also be called "hard carbon". However, the key attribute that distinguishes DLC from natural diamond can be the amorphous nature of DLC, which leads to a combination of sp2 (graphite-like) bonded carbon atoms and sp3 (diamond-like) bonded carbon atoms.

[0014]

[0018] DLC coatings may comprise a form of amorphous carbon material that may exhibit some of the typical properties of diamond. Amorphous carbon materials may exhibit a combination of properties such as high hardness, low coefficient of friction, high wear resistance, high corrosion resistance, and good electrical insulation. Due to the aforementioned properties, DLC coatings may have applicability in a variety of applications.

[0015]

[0019] One application of DLC coatings may include their use in the automotive industry, where they are utilized to coat engine parts to reduce friction and wear. DLC's low friction and high wear resistance properties make it a good candidate for applications in the biomedical industry, particularly in artificial joint implants, cardiovascular devices, and surgical instruments. DLC coatings may also be desirable for solar panels.

[0016]

[0020] DLC coatings may also find applications in the data storage industry, as protective coatings for semiconductors in the electronics and optoelectronics sectors, and as anti-glare / anti-reflection coatings for various materials in the optical industry to reduce glare.

[0017]

[0021] However, DLC coatings generally may not adhere easily to other materials. DLC does not adhere to glass, for example. This can lead to poor adhesion, delamination, and coating / film damage. DLC coatings adhere to various carbides, carbon-metal compounds such as silicon carbide, and metalloids such as silicon and germanium. Therefore, to adhere DLC coatings to other coatings, a tacking or adhesive layer may be required in between. For example, a germanium layer may be used as an adhesive layer between a zinc selenide layer and a DLC coating. For example, the thickness of such an adhesive layer may be 2-10 nanometers. In general, the adhesive layer may be of any thickness desired to support the optical, physical, or mechanical properties of the item being manufactured. In some cases, the DLC coating may adhere to the layer on which it is deposited, so no additional adhesive layer may be required.

[0018]

[0022] Depending on the application, some properties of the adhesive layer may be undesirable, for example, germanium may be opaque to certain wavelengths in the visible light spectrum, which may be undesirable in some applications.

[0019]

[0023] Certain chemicals used in industrial manufacturing processes can attack the adhesive layer, causing the DLC coating to peel, delaminate, or break. Therefore, in some applications, it may be advantageous to adhere the DLC coating without the use of an adhesive layer.

[0020]

[0024] In the optical realm, DLC coatings are sometimes valued for their anti-reflective properties. Anti-reflective coatings can be essential in optical applications to increase the transmission of light through lenses and reduce glare and unwanted reflections. When used properly, DLC coatings can also be used to improve reflectivity.

[0021]

[0025] The application of DLC coatings to optical components such as lenses, prisms, windows, or semiconductors can reduce the amount of reflected light, thereby improving the optical performance of these components. The amorphous structure of DLC coatings, which may result from hybridization of sp2 and sp3 carbon bonds, can contribute to their anti-reflective properties by mitigating the phase shift of light waves passing through the optical component.

[0022]

[0026] Another advantage of DLC coatings in the optical industry could be their high durability. Unlike traditional anti-reflective coatings, which are easily scratched and damaged, DLC coatings boast high hardness and abrasion resistance, which significantly increases the lifespan of optical components. In addition, the high corrosion resistance of DLC coatings can also prevent damage to optical components due to environmental factors.

[0023]

[0027] Referring now to Figure 1, Figure 1 is a block diagram illustrating a protective coating 100 according to some embodiments of the present disclosure. The protective coating 100 may comprise a bottom layer 110 and a top layer 120. The protective coating 100 may also comprise a mixed layer 130 between the bottom layer 110 and the top layer 120.

[0024]

[0028] The bottom layer 110 may comprise substantially only the first material 112. As will be appreciated by one of ordinary skill in the art, while "only" may refer to the bottom layer 110 comprising substantially the first material, the bottom layer 110 may comprise certain contaminants, defects, material residues, and the like, as may be reasonably expected in industrial manufacturing processes, such as in the semiconductor and / or optical industries.

[0025]

[0029] The top layer 120 may comprise only diamond-like carbon 122. As will be appreciated by one of ordinary skill in the art, while "only" may refer to a top layer 120 comprising substantially diamond-like carbon 122, the top layer 120 may comprise certain contaminants, defects, material residues, and the like, as may be reasonably expected in industrial manufacturing processes, such as the semiconductor and / or optical industries.

[0026]

[0030] The mixed layer 130 may comprise a first material 112 and diamond-like carbon 122 in a mixed material 132. The ratio of the amount of first material 112 to the amount of diamond-like carbon 122 in the mixture 132 may decrease to zero in the mixed layer 130 as the separation distance from the bottom layer 110 increases.

[0027]

[0031] In some embodiments, the first material 112 may be a metal or a dielectric. In some embodiments, the first material 112 may be any coating material other than diamond-like carbon. In some embodiments, the first material 112 may be ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide. In some embodiments, the diamond-like carbon 122 may comprise sp2 bonded carbon atoms and sp3 bonded carbon atoms. In some embodiments, the ratio may decrease monotonically. In some embodiments, the ratio may decrease from about 20 / 1, 10 / 1, or 5 / 1.

[0028]

[0032] 2 shows an exemplary cross-section of a coating according to the present disclosure. A bottom layer 110 comprising a first material 112 (shown as a square) and a top layer 120 comprising diamond-like carbon 122 (shown as a circle) are shown. Additionally, a mixed layer 130 comprising exemplary layers 130a, 130b, and 130c are shown. The exemplary mixed layer 130 shows different ratios of the first material 112 to the diamond-like carbon 122. For example, 130a shows a ratio of the first material 112 to the diamond-like carbon 122 of 9 / 3=3:1, 130b shows a ratio of the first material 112 to the diamond-like carbon 122 of 6 / 6=1:1, and 130c shows a ratio of the first material 112 to the diamond-like carbon 122 of 3 / 9=1:3. 2 shows how the concentration of the first material 112 decreases and the concentration of diamond-like carbon 122 increases in the mixed layer 130 as the distance from the bottom layer 110 increases. The layers 130a, 130b, 130c may be associated with a varying mixture 132 (as a function of distance from the bottom layer 110) of the first material 112 and diamond-like carbon 122.

[0029]

[0033] As will be appreciated by those skilled in the art, Figure 2 is an exemplary schematic diagram: in practice the number of layers will not be discrete, and the layer dimensions and depicted ratios are merely illustrative of applicable concepts.

[0030]

[0034] Therefore, in the mixed layer 130, the first material 112 and the diamond-like carbon 122 are mixed in various proportions, similar to a diffusion process. By establishing such a structure, the top layer 120 and the bottom layer 110 can be bonded to each other through the mixed layer 130. In that sense, the mixed layer 130 is not a discrete layer like the top layer 120 and the bottom layer 110, but rather the top layer 120 and the bottom layer 110 are mixed or intertwined with each other. For example, in such a case, there is no need to add a third material, such as germanium, as an adhesion layer between the top layer 120 and the bottom layer 130.

[0031]

[0035] FIG. 3 is a flow chart illustrating a method according to some embodiments of the present disclosure. In some embodiments, at 210, the method may comprise depositing the bottom layer 110 with the first material 112. For example, the deposition of the bottom layer 110 may occur at an initial rate of, for example, 10 angstroms / second. It will be apparent to one skilled in the art that the deposition rate is merely exemplary and not limiting. After the bottom layer 110 reaches a desired thickness, at step 230, the co-deposition of diamond-like carbon 122 may commence, i.e., the diamond-like carbon 122 may be deposited simultaneously with the first material 112 to commence the formation of the mixed layer 130 including the mixture 132. For example, the diamond-like carbon 122 may be deposited at 2 angstroms / second. It will be apparent to one skilled in the art that the deposition rate is merely exemplary and not limiting.

[0032]

[0036] At 240, the deposition rate of the first material 112 may be decreased over time while the deposition rate of the diamond-like carbon 122 is held constant to reduce the amount of first material 112 as the codeposition occurs. Correspondingly, the ratio of deposited first material 112 to deposited diamond-like carbon 122 continues to decrease. When the deposition rate of the first material 112 eventually decreases to zero, only the diamond-like carbon 122, and therefore the DLC coating, may continue to deposit.

[0033]

[0037] As will be apparent to one skilled in the art, the deposition ratio of the first material 112 to the diamond-like carbon 122 may be varied by increasing, decreasing, or keeping constant the deposition rates of either or both of the first material 112 and the diamond-like carbon 122.

[0034]

[0038] In some embodiments, in step 240, the ratio of first material 112 to diamond-like material 122 may decrease monotonically. In some embodiments, the ratio may decrease from about 20 / 1, 10 / 1, or 5 / 1 to (eventually) zero. In some embodiments, the deposition may be atomic layer deposition (ALD) or chemical vapor deposition (CVD) or thin film deposition or physical vapor deposition (PVD) or plasma-assisted chemical vapor deposition (PACVD). In some embodiments, the deposition rate of first material 112 and / or diamond-like carbon 122 may be a deposition rate of 1 to 12 angstroms / second, but is not so limited.

[0035]

[0039] The present disclosure includes references to specific examples. However, those skilled in the art will recognize that various modifications can be made and equivalents can be substituted without departing from the scope of the present disclosure. Additionally, modifications can be made to the disclosed examples without departing from the scope of the present disclosure. Thus, the present disclosure is not limited to the disclosed examples, and the present disclosure is intended to include all examples that fall within the scope of the appended claims.

Claims

1. A protective coating, the protective coating comprising: a bottom layer comprising substantially only a first material; a top layer comprising substantially only diamond-like carbon; a mixed layer between the bottom layer and the top layer; The mixed layer comprises: First Material and Diamond-Like Carbon wherein the ratio of the amount of the first material to the amount of the diamond-like carbon decreases to zero in the mixed layer as the separation distance from the bottom layer increases. Protective coating.

2. The protective coating of claim 1 , wherein the first material is a metal or a dielectric.

3. 10. The protective coating of claim 1, wherein the first material is any coating material other than diamond-like carbon.

4. 10. The protective coating of claim 1, wherein the first material is ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide.

5. 10. The protective coating of claim 1, wherein the diamond-like carbon comprises sp2 bonded carbon atoms and sp3 bonded carbon atoms.

6. 10. The protective coating of claim 1, wherein the ratio is monotonically decreasing.

7. 10. The protective coating of claim 1, wherein the ratio is reduced from about 20 / 1, 10 / 1, or 5 / 1.

8. 1. A method of making a protective coating, the method comprising: depositing a bottom layer comprising substantially only a first material; depositing a top layer comprising substantially only diamond-like carbon; depositing a mixed layer between the bottom layer and the top layer; depositing a mixed layer between the bottom layer and the top layer comprises: Co-depositing a first material and diamond-like carbon wherein a ratio of the amount of the first material deposited to the amount of the diamond-like carbon deposited decreases to zero in the mixed layer as separation distance from the bottom layer increases. method.

9. The method of claim 8 , wherein the first material is a metal or a dielectric.

10. 9. The method of claim 8, wherein the first material is any coating material other than diamond-like carbon.

11. 9. The method of claim 8, wherein the first material is ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide.

12. 9. The method of claim 8, wherein the diamond-like carbon comprises sp2 bonded carbon atoms and sp3 bonded carbon atoms.

13. The method of claim 8 , wherein the ratio is monotonically decreasing.

14. 9. The method of claim 8, wherein the ratio is reduced from about 20 / 1, 10 / 1, or 5 / 1.

15. 9. The method of claim 8, wherein the deposition is atomic layer deposition (ALD), chemical vapor deposition (CVD), thin film deposition, physical vapor deposition (PVD), or plasma-assisted chemical vapor deposition (PACVD).

16. 16. The method of claim 15, wherein the deposition is at a deposition rate of 1 to 12 angstroms / second.

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