Method for supplying medical liquid and method for forming pattern

Abstract

To provide a method for supplying a medical liquid which can reduce the amount of content of impurities in a medical liquid more, and to provide a method for forming a pattern.SOLUTION: The method for supplying a medical liquid according to the present invention is supplying a medical liquid containing an organic solvent through a pipe of an apparatus for a semiconductor device. The method has a gas pressure-sending step of sending the medical liquid by pressing the medical liquid with gas. The content amount in the gas is 0.00001-1 mass ppm to the total mass of the gas.SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to a chemical solution supplying method and a pattern forming method. [Background technology]

[0002] During the manufacture of semiconductor devices by wiring formation processes including photolithography, chemicals containing solvents (typically organic solvents) are used as pre-wet liquids, resist liquids, developing liquids, rinsing liquids, stripping liquids, chemical mechanical polishing (CMP) slurries, and post-CMP cleaning liquids, etc. In recent years, the manufacture of semiconductor devices of 10 nm node or less has been considered, and chemicals with better defect suppression performance that are less likely to cause defects on wafers are required.

[0003] In order to obtain such a chemical solution, it is important to reduce the impurity content in the chemical solution by precision filtration, and furthermore, to suppress the elution of impurities into the chemical solution in the semiconductor device equipment. Patent Document 1 describes an invention relating to a method for manufacturing a semiconductor device, in which a resin solution is pressurized and supplied using helium gas when a resin film is formed by spin coating. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 11-162806 Summary of the Invention [Problem to be solved by the invention]

[0005] The present inventors, referring to the method described in Patent Document 1, have studied a supply method that has a gas pressure-feeding step in which the chemical solution is pressurized with gas to feed the chemical solution through a pipeline equipped in an apparatus for semiconductor devices, and have found that there is room for further improvement in the amount of impurities that dissolve into the chemical solution fed from the pipeline by the gas pressure-feeding step.

[0006] The present invention aims to provide a method for supplying a chemical solution, which can suppress the amount of impurities eluted from a pipeline into the chemical solution in a gas pressure delivery process in which the chemical solution is delivered using a gas. Another object of the present invention is to provide a pattern formation method. [Means for solving the problem]

[0007] As a result of intensive research into solving the above problems, the present inventors have found that the above problems can be solved by the following configuration.

[0008] [1] A method for supplying a chemical solution containing an organic solvent through a pipeline included in a semiconductor device apparatus, the method comprising a gas pressure-feeding step of pressurizing the chemical solution with a gas to deliver the chemical solution, wherein the gas contains moisture in an amount of 0.00001 to 1 ppm by mass relative to the total mass of the gas. [2] The method for supplying a chemical solution according to [1], wherein the purity of the gas is 99.9% by volume or more. [3] The method for supplying a chemical solution according to [1] or [2], wherein the gas contains water in an amount of 0.005 to 0.5 ppm by mass with respect to the total mass of the gas. [4] The method for supplying a chemical solution according to any one of [1] to [3], wherein the gas contains water in an amount of 0.01 to 0.03 ppm by mass with respect to the total mass of the gas. [5] The method for supplying a chemical solution according to any one of [1] to [4], wherein the purity of the gas is 99.999% by volume or more. [6] The method for supplying a chemical solution according to any one of [1] to [5], wherein the gas includes at least one selected from the group consisting of nitrogen and argon. [7] The method for supplying a chemical solution according to any one of [1] to [6], wherein the organic solvent is at least one selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, ethyl propionate, cyclopentanone, cyclohexanone, γ-butyrolactone, diisoamyl ether, butyl acetate, isoamyl acetate, isopropanol, 4-methyl-2-pentanol, 1-hexanol, dimethyl sulfoxide, n-methyl-2-pyrrolidone, diethylene glycol, ethylene glycol, dipropylene glycol, propylene glycol, ethylene carbonate, propylene carbonate, sulfolane, cycloheptanone, 2-heptanone, methyl ethyl ketone, hexane, and combinations thereof. [8] The method for supplying a chemical solution according to any one of [1] to [7], further comprising a chemical solution preparation step of preparing the chemical solution in a storage tank communicating with the pipeline, and the gas pressure transfer step is a step of introducing the gas into the storage tank and sending out the chemical solution from the storage tank through the pipeline. [9] The method for supplying a chemical liquid according to any one of [1] to [8], further comprising a purification step of filtering the chemical liquid delivered by the gas pressure delivery step using a filter.

[10] The method for supplying a chemical solution according to [9], wherein the total content of Fe, Cr, Ni and Al components in the chemical solution filtered in the purification step is 0.04 to 1200 ppt by mass with respect to the total mass of the chemical solution.

[11] The method for supplying a chemical solution according to [9] or

[10] , wherein the total content of an Fe component, a Cr component, a Ni component and an Al component in the chemical solution filtered in the purification step is 0.2 to 400 ppt by mass with respect to the total mass of the chemical solution.

[12] The method for supplying a chemical solution according to any one of [9] to

[11] , wherein the total content of Fe components, Cr components, Ni components and Al components in the chemical solution filtered in the purification step is 0.2 to 60 ppt by mass with respect to the total mass of the chemical solution.

[13] The method for supplying a chemical solution according to any one of [9] to

[12] , wherein the water content in the chemical solution filtered in the purification step is 0.0005 to 0.03 mass % based on the total mass of the chemical solution.

[14] The method for supplying a chemical solution according to any one of [9] to

[13] , wherein the water content in the chemical solution filtered in the purification step is 0.001 to 0.02 mass % based on the total mass of the chemical solution.

[15] The method for supplying a chemical solution according to any one of [9] to

[14] , wherein the water content in the chemical solution filtered in the purification step is 0.001 to 0.01 mass % based on the total mass of the chemical solution.

[16] The method for supplying a chemical solution according to any one of [9] to

[15] , wherein the content of dioctyl phthalate in the chemical solution filtered in the purification step is 0.001 to 10 ppb by mass with respect to the total mass of the chemical solution.

[17] The method for supplying a chemical solution according to any one of [9] to

[16] , wherein the content of dioctyl phthalate in the chemical solution filtered in the purification step is 0.01 to 5 ppb by mass with respect to the total mass of the chemical solution.

[18] The method for supplying a chemical solution according to any one of [9] to

[17] , wherein the content of dioctyl phthalate in the chemical solution filtered in the purification step is 0.01 to 1 ppb by mass with respect to the total mass of the chemical solution.

[19] The method for supplying a chemical solution according to any one of [1] to

[18] , further comprising a gas purification step of purifying a raw material gas using a gas filter, and using the gas purified in the gas purification step in the gas pumping step.

[20] A pattern formation method comprising: a prewetting step of contacting a substrate with a prewetting liquid; a resist film forming step of forming a resist film on the substrate using a resist composition; a step of exposing the resist film; a developing step of developing the exposed resist film using a developer to form a resist pattern; and a rinsing step of contacting the substrate on which the resist pattern has been formed with a rinsing liquid, wherein at least one selected from the group consisting of the prewetting liquid, the developer, and the rinsing liquid is a chemical liquid supplied by the supplying method according to any one of [1] to

[19] . Effect of the Invention

[0009] According to the present invention, there is provided a method for supplying a chemical liquid, which can suppress the amount of impurities eluted into the chemical liquid from a pipeline in a gas pressure delivery process in which a chemical liquid is delivered by using a gas. Also, according to the present invention, there is provided a method for forming a pattern. [Brief description of the drawings]

[0010] [Figure 1] FIG. 2 is a schematic diagram showing an example of an apparatus used in the method for supplying a chemical solution. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The present invention will be described in detail below. The following description of the components may be based on a representative embodiment of the present invention, but the present invention is not limited to such an embodiment.

[0012] In this specification, a numerical range expressed using "to" means a range that includes the numerical values ​​before and after "to" as the lower and upper limits. In this specification, when two or more types of a component are present, the "content" of the component means the total content of those two or more components. In this specification, the term "preparation" includes the meaning of synthesizing or compounding specific materials, as well as procuring predetermined items by purchasing or the like. In this specification, "ppm" stands for "parts-per-million (10 -6 ) and "ppb" stands for "parts-per-billion (10 -9 )" and "ppt" stands for "parts-per-trillion (10 -12 )". In this specification, "radiation" refers to, for example, far ultraviolet light, extreme ultraviolet light (EUV), X-rays, electron beams, etc. Furthermore, in this specification, light refers to actinic light rays or radiation. Unless otherwise specified, in this specification, "exposure" refers not only to exposure using far ultraviolet light, X-rays, EUV, etc., but also to drawing using particle beams such as electron beams or ion beams.

[0013] [Method of supplying chemicals] The method for supplying a chemical solution according to the present invention (hereinafter also simply referred to as "the present supplying method") is a method for supplying a chemical solution containing an organic solvent through a pipeline provided in an apparatus for semiconductor devices. The present supplying method includes a gas pressure-feeding step of sending the chemical solution through the pipeline by pressurizing it with a gas, and is characterized in that the moisture content of the gas is 0.01 to 1 ppm by mass relative to the total mass of the gas.

[0014] Although the details of the mechanism by which the above-mentioned chemical solution supply method reduces the amount of impurities eluting from the pipeline into the chemical solution during the gas pressure-feeding process are not clear, the inventors speculate that by carrying out the gas pressure-feeding process using a gas with a moisture content reduced to a specific range, the amount of moisture dissolving from the gas into the chemical solution is kept low, thereby reducing the elution and / or mixing of impurities into the chemical solution from the liquid-contacting parts of the pipeline and other components, while by setting the moisture content of the gas to a predetermined lower limit or above, a small amount of moisture will dissolve from the gas into the chemical solution, thereby reducing electrostatic damage that causes impurities to elute from the liquid-contacting parts of the pipeline and other components. Hereinafter, with respect to the present invention, an excellent effect of suppressing the amount of impurities eluted from the pipeline into the chemical solution during the gas pressure-transport process will also be described as "the present invention has an excellent effect."

[0015] First, the supplying device used in this supplying method will be described, and then each step of this supplying method will be described.

[0016] [Feeding device] The supplying apparatus used in the present supplying method (hereinafter, also simply referred to as "supplying apparatus") is an apparatus for semiconductor devices. In this specification, "for semiconductor devices" means that it is used in the manufacture of semiconductor devices. The supply device may be a device constituting part of a known semiconductor device manufacturing device or processing device, and is preferably a device incorporated in a coater developer.

[0017] The supply device will be described with reference to the drawings. Figure 1 is a schematic diagram showing an example of the configuration of the device. The supply device 10 shown in FIG. 1 is an apparatus for semiconductor devices, and includes a storage tank 11, a gas pipe 12, a pipeline 13, an intermediate tank 14, a pipeline 15, a discharge section 16, a pump 17 and a filter unit 20 arranged on the pipeline 15, and a gas filter 21 arranged on the gas pipe 12. In FIG. 1, F1 and F2 indicate the movement direction of the liquid (chemical liquid) in the supplying device 10, and G indicates the movement direction of the gas to be pumped in the supplying device 10.

[0018] The storage tank 11 is a container having a function of storing a chemical solution. A gas pipe 12 and a pipeline 13 are connected to the storage tank 11, which penetrate the top of the storage tank 11 and communicate with the inside of the storage tank 11. The storage tank 11 is also provided with a chemical solution inlet (not shown) for introducing the chemical solution. The gas pipe 12 is connected to a gas supply unit (not shown) and the storage tank 11. The gas sent from the gas supply unit passes through the inside of the gas pipe 12 as indicated by the arrow G, and is introduced into the storage tank 11 from a gas inlet 12a disposed near the top of the storage tank 11. The gas filter 21 is disposed on the gas pipe 12 and has a function of removing moisture and / or impurities contained in the gas flowing inside the gas pipe 12.

[0019] The pipe 13 is connected to the storage tank 11 and the intermediate tank 14. The upstream end of the pipe 13 passes through the top of the storage tank 11 and extends to near the bottom of the storage tank 11. The downstream end of the pipe 13 passes through the top of the intermediate tank 14 and extends to an upper portion of the intermediate tank 14. The liquid medicine stored in the storage tank 11 is transferred to the intermediate tank 14 through the pipeline 13 as indicated by the arrow F1. The liquid medicine is delivered by a gas pressure-feeding process in which a pressure-feeding gas is introduced into the storage tank 11 to pressurize the liquid medicine, as described below. In this specification, the term "pipe" refers to all parts between the storage tank 11 and the discharge part 16 in which the medicinal liquid may exist, unless otherwise specified.

[0020] The intermediate tank 14 is a container having a function of temporarily storing the chemical solution sent from the storage tank 11. A pipe 15 communicating with a discharge part 16 is connected to the bottom of the intermediate tank 14. The chemical solution stored in the intermediate tank 14 is discharged from the discharge part 16 through the pipeline 15 as shown by the arrow F2. Here, the pump 17 provided on the pipeline 15 has a function of sending the chemical solution stored in the intermediate tank 14 to the discharge part 16.

[0021] A filter cartridge having a filter is housed in the filter unit 20, and the filter unit 20 has a function of filtering the chemical liquid passing through the pipeline 15 using the filter. Known filters and filter cartridges can be used as the filters and filter cartridges constituting the filter unit 20. The filters of the filter unit will be described in detail in the refining process described later.

[0022] The chemical liquid supplied by the supply device 10 is discharged from the discharge part 16. The use of the discharged chemical liquid is not particularly limited, and when the discharge part 16 has a function of discharging the chemical liquid, the chemical liquid may be discharged from the discharge part 16 onto the wafer for various treatments, or a storage container for transporting and / or storing the chemical liquid may be connected to the discharge part 16 and the chemical liquid may be filled into the storage container.

[0023] The material constituting the storage tank 11 and intermediate tank 14 (hereinafter, both of these are also simply referred to as "containers") provided in the supply device 10 is not particularly limited, and may be an organic substance, an inorganic substance, or a combination of these. Specific examples include resin, glass, metal, and a composite of these (for example, a metal base with a glass lining or a resin lining). These can be selected arbitrarily depending on the type of chemical solution to be stored. In particular, it is preferable that at least a part of the liquid-contacting part of the container (more preferably, the entire liquid-contacting part, and even more preferably the entire container) contains a corrosion-resistant material described below as a component.

[0024] Examples of forms in which at least a portion of the liquid-contacting part of the container contains a corrosion-resistant material as a component include a case in which the container contains a corrosion-resistant material as a material component, a case in which the container is a lined container having a base and a coating layer (lining) arranged on the base, and the coating layer contains a corrosion-resistant material as a material component (in this case, the base may also contain a corrosion-resistant material as a material component), etc. More specifically, examples of such containers include stainless steel containers, polytetrafluoroethylene containers, and lined containers having a coating layer made of polytetrafluoroethylene on the inner wall surface of a stainless steel base, which will be described later. The term "liquid-contacting part" refers to a part of a container that may come into contact with the chemical solution contained in the container.

[0025] The corrosion-resistant material is at least one selected from the group consisting of non-metallic materials and metallic materials, and the metallic material is preferably an electrolytically polished metallic material.

[0026] The non-metallic material is not particularly limited, and any known material can be used. Examples of non-metallic materials include polyolefin resins such as polyethylene resin, polypropylene resin, and polyethylene-polypropylene resin; and fluorine-containing resins such as tetrafluoroethylene resin, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene-hexafluoropropylene copolymer resin, tetrafluoroethylene-ethylene copolymer resin, trifluorochloroethylene-ethylene copolymer resin, vinylidene fluoride resin, trifluorochloroethylene copolymer resin, and vinyl fluoride resin, with fluorine-containing resins being preferred, and polytetrafluoroethylene (PTFE) being more preferred.

[0027] The metal material is not particularly limited, and any known material can be used. The metal material may be, for example, a metal material in which the total content of chromium and nickel is more than 25 mass% based on the total mass of the metal material, and more preferably 30 mass% or more. The upper limit of the total content of chromium and nickel in the metal material is not particularly limited, but is preferably 90 mass% or less. Examples of the metal material include stainless steel, carbon steel, alloy steel, nickel-chromium-molybdenum steel, chromium steel, chromium-molybdenum steel, manganese steel, and nickel-chromium alloy, with stainless steel being preferred.

[0028] The stainless steel is not particularly limited, and known stainless steels can be used. Among them, an alloy containing 8% or more by mass of nickel is preferable, and an austenitic stainless steel containing 8% or more by mass of nickel is more preferable. Examples of austenitic stainless steel include SUS (Steel Use Stainless) 304 (Ni content 8% by mass, Cr content 18% by mass), SUS304L (Ni content 9% by mass, Cr content 18% by mass), SUS316 (Ni content 10% by mass, Cr content 16% by mass), and SUS316L (Ni content 12% by mass, Cr content 16% by mass).

[0029] The nickel-chromium alloy is not particularly limited, and any known nickel-chromium alloy can be used. Among them, a nickel-chromium alloy having a nickel content of 40 to 75 mass % and a chromium content of 1 to 30 mass % is preferable. Examples of nickel-chromium alloys include Hastelloy (trade name, the same applies below), Monel (trade name, the same applies below), and Inconel (trade name, the same applies below). More specifically, examples include Hastelloy C-276 (Ni content: 63 mass%, Cr content: 16 mass%), Hastelloy-C (Ni content: 60 mass%, Cr content: 17 mass%), and Hastelloy C-22 (Ni content: 61 mass%, Cr content: 22 mass%). Furthermore, the nickel-chromium alloy may further contain, in addition to the above-mentioned alloy, at least one element selected from the group consisting of boron, silicon, tungsten, molybdenum, copper, and cobalt, as necessary.

[0030] The method for electrolytically polishing a metal material is not particularly limited, and examples thereof include the methods described in JP-A-2015-227501, paragraphs 0011 to 0014, and JP-A-2008-264929, paragraphs 0036 to 0042.

[0031] It is presumed that the chromium content in the surface passive layer of the metal material becomes higher than the chromium content in the parent phase by electrolytic polishing, and therefore, it is presumed that a chemical solution with a reduced impurity content can be prepared because metal components containing metal atoms are less likely to flow out of the chemical solution from a device whose liquid-contacting part is formed from a metal material that has been electrolytically polished. The metal material may be buffed. The method of buffing is not particularly limited, and known methods can be used. The size of the polishing grains used for finishing the buffing is not particularly limited, but #400 or less is preferable because it tends to reduce the unevenness of the surface of the metal material. The buffing is preferably performed before the electrolytic polishing.

[0032] There is no particular limitation on the material constituting the pipeline 13 and pipeline 15 of the supply device 10, and known piping may be used. Examples of the piping include a pipe, a pump, and a valve. The wetted parts of lines 13 and 15 are preferably formed from the corrosion resistant materials described above.

[0033] The supply device that can be used in the present supply method is not limited to the supply device 10 having the configuration described above. The supply device that can be used in the present supply method may have a configuration other than the configuration described above. For example, although the supplying device 10 shown in Fig. 1 includes only one filter unit 20 on the pipeline 15, the supplying device may include multiple filters. In this case, the multiple filters included in the supplying device may be arranged in series or in parallel with respect to the transport direction of the drug solution.

[0034] 1 has a configuration in which the purified chemical solution flowing out from filter unit 20 is transferred to discharge section 16, but the supplying device may have a configuration in which the chemical solution flowing out from filter unit 20 is returned to intermediate tank 14 and passed through filter unit 20 again. This type of filtration method is called circulating filtration. From the viewpoint of productivity and from the viewpoint of preventing impurities captured by the filter from being mixed again into the chemical solution, it is preferable to pass the chemical solution through the filter only once without performing circulating filtration.

[0035] The filter unit 20 of the supply device 10 includes a filter and a filter cartridge, but a filter that is not housed in a filter cartridge may be used. The supply device may have a mode in which the chemical solution is passed through a filter formed in a flat plate shape, for example.

[0036] The supply device may also include one or more filters on the pipeline connecting the storage tank and the intermediate tank, and when multiple filters are included, the multiple filters may be arranged in series or in parallel with respect to the transfer direction of the chemical solution. The supply device may pass the chemical solution through a filter provided on the pipeline connecting the storage tank and the intermediate tank only once, or may provide a return path for returning the chemical solution from the downstream side of the filter to the storage tank and pass the chemical solution through the filter multiple times. The supplying device does not need to be equipped with a filter. In terms of further reducing the content of impurities in the chemical solution, it is preferable that the present supplying method performs the chemical solution purification step described below using a supplying device equipped with a filter.

[0037] Next, each step of the present supplying method will be described by taking as an example an embodiment in which the present supplying method is carried out using the supplying device 10 shown in FIG.

[0038] [Chemical solution preparation process] First, a chemical preparation step is performed in which the chemical to be supplied by this supply method is introduced into the storage tank 11.

[0039] <Chemical solution> The chemical liquid supplied by the present supplying method is not particularly limited as long as it contains an organic solvent, and any known chemical liquid used in processes such as the manufacture of semiconductor devices can be used.

[0040] (Organic solvent) The chemical solution contains an organic solvent. The content of the organic solvent in the chemical solution is not particularly limited, but is preferably 98% by mass or more, more preferably 99% by mass or more, and even more preferably 99.9% by mass or more, based on the total mass of the chemical solution. The upper limit is not particularly limited, but is preferably 99.999% by mass or less. The organic solvent may be used alone or in combination of two or more. When two or more organic solvents are used in combination, the total content is preferably within the above range.

[0041] In this specification, the organic solvent refers to a liquid organic compound contained in an amount exceeding 10,000 ppm by mass per component relative to the total mass of the chemical solution. In other words, in this specification, a liquid organic compound contained in an amount exceeding 10,000 ppm by mass relative to the total mass of the chemical solution corresponds to an organic solvent. In this specification, the term "liquid" refers to a state in which the substance is liquid at 25° C. and atmospheric pressure.

[0042] The type of the organic solvent is not particularly limited, and any known organic solvent can be used. Examples of the organic solvent include polar organic solvents such as alkylene glycol monoalkyl ether carboxylates, alkylene glycol monoalkyl ethers, alkyl lactates, alkyl alkoxypropionates, cyclic lactones (preferably having 4 to 10 carbon atoms), monoketone compounds which may have a ring (preferably having 4 to 10 carbon atoms), alkylene carbonates, alkyl alkoxyacetates, and alkyl pyruvates, as well as non-polar organic solvents such as liquid unsubstituted hydrocarbons. Examples of liquid unsubstituted hydrocarbons include linear, branched or cyclic substituted hydrocarbons having 5 to 12 carbon atoms. Preferred are n-pentane, n-hexane, n-heptane, n-octane, n-nonane, n-decane, n-undecane, n-dodecane, isopentane, neopentane, 5-ethyl-3-methyloctane, cyclopentane, cyclohexane, methylcyclopentane, 1-ethyl-3-methylcyclohexane, or combinations thereof, and more preferred is n-hexane. In addition, as the organic solvent, for example, those described in JP-A-2016-057614, JP-A-2014-219664, JP-A-2016-138219, and JP-A-2015-135379 may be used.

[0043] The organic solvents used were propylene glycol monomethyl ether (PGMM), propylene glycol monoethyl ether (PGME), propylene glycol monopropyl ether (PGMP), propylene glycol monomethyl ether acetate (PGMEA), ethyl lactate (EL), methyl methoxypropionate (MPM), ethyl propionate, cyclopentanone (CyPn), cyclohexanone (CyHe), γ-butyrolactone (γBL), diisoamyl ether (DIAE), butyl acetate (nBA), and isopropyl acetate. Preferred are aryl alcohol (iAA), isopropanol (IPA), 4-methyl-2-pentanol (MIBC), 1-hexanol, dimethyl sulfoxide (DMSO), n-methyl-2-pyrrolidone (NMP), diethylene glycol (DEG), ethylene glycol (EG), dipropylene glycol (DPG), propylene glycol (PG), ethylene carbonate (EC), propylene carbonate (PC), sulfolane, cycloheptanone, 2-heptanone (MAK), methyl ethyl ketone (MEK), hexane, or combinations thereof. Among these, PGMEA, ethyl propionate, CyPn, CyHe, nBA, iAA, MAK, MEK, propylene carbonate, hexane, or a combination thereof is more preferable.

[0044] The type and content of organic compounds (including organic solvents and organic impurities described later) contained in the chemical solution can be measured using a gas chromatography-mass spectrometer (GC-MS: Gas Chromatography-Mass Spectroscopy). The measurement conditions are as described in the Examples.

[0045] The chemical solution may contain other components in addition to those described above, such as organic impurities, water, and metal components.

[0046] (Organic impurities) The chemical solution may contain organic impurities. The content of organic impurities in the chemical solution is not particularly limited, but is preferably 10,000 mass ppm or less, more preferably 1,000 mass ppm or less, based on the total mass of the chemical solution. The lower limit is not particularly limited, but is preferably 0.1 mass ppm or more. In this specification, the organic impurity means an organic compound different from an organic solvent, and contained in an amount of 10,000 ppm by mass or less with respect to the total mass of the chemical solution. In other words, in this specification, an organic compound contained in an amount of 10,000 ppm by mass or less with respect to the total mass of the chemical solution corresponds to an organic impurity, but does not correspond to an organic solvent. In addition, when each of a plurality of organic compounds is contained in a chemical solution at a content of 10,000 mass ppm or less relative to the total mass of the chemical solution, each of them corresponds to an organic impurity.

[0047] Organic impurities are often mixed into or added to a chemical solution during the synthesis, purification, and / or transportation of the organic solvent contained in the chemical solution. Examples of such organic impurities include plasticizers, antioxidants, and compounds derived from these (e.g., decomposition products). During the synthesis and purification of organic solvents, plasticizers may dissolve into the organic solvent from the liquid-contacting parts of each unit (such as the reaction section, distillation column, and filter unit) of the apparatus used for purification (purification apparatus). Furthermore, antioxidants may be intentionally added to organic solvents, or may be mixed into commercially available organic solvents when they are purchased and used.

[0048] Among these organic impurities, those with high boiling points (hereinafter also referred to as "high-boiling-point organic impurities") are difficult to volatilize and therefore tend to remain as organic residue particles on the substrate surface, which can easily cause defects in semiconductor devices. Therefore, the content of high-boiling organic impurities (particularly, organic impurities having a boiling point of 250° C. or higher) in the chemical solution is preferably 1 mass ppm or less, more preferably 50 mass ppb or less, and even more preferably 10 mass ppb or less, based on the total mass of the chemical solution. The lower limit is not particularly limited, but is preferably 10 mass ppt or more. Examples of high-boiling organic impurities include dioctyl phthalate (DOP, boiling point 385°C), diisononyl phthalate (DINP, boiling point 403°C), dioctyl adipate (DOA, boiling point 335°C), dibutyl phthalate (DBP, boiling point 340°C), and ethylene propylene rubber (EPDM, boiling point 300 to 450°C).

[0049] In particular, the content of dioctyl phthalate (DOP) in the chemical solution is preferably 0.001 to 10 ppb by mass, more preferably 0.01 to 5 ppb by mass, and even more preferably 0.01 to 1 ppb by mass, relative to the total mass of the chemical solution, in order to provide a filter used in the purification step described below with better impurity removal performance.

[0050] (Metal Components) The chemical solution may contain a metal component. In this specification, the term "metal component" refers to metals that exist as particles in the chemical solution (i.e., "metal particles") and metals that exist as ions (i.e., "metal ions"). The metal particles refer to particles made of a simple metal or an alloy, as well as compounds in which a metal is combined with other nonmetallic elements, such as oxides and sulfides of simple metals or alloys. The metal ion means a metal ion and a complex ion (for example, an ammine complex, a cyano complex, a halogeno complex, a hydroxy complex, and the like).

[0051] In this specification, the "content of metal component" means the content of only the metal component containing a certain metal element M when a metal component (metal particles and metal ions) containing that metal element M is present. When a metal component contains two or more metal elements, the content of the metal component is calculated based on only the metal element with the largest content. That is, the content of a metal component containing two or more metal elements is not included in the content of two or more metal components. More specifically, the content of a metal component containing Fe and Cr is not included in both the content of the Fe component and the content of the Cr component.

[0052] In this specification, the "content of Fe component" refers to the total content of metal particles (Fe particles) having the highest Fe content among metal elements, and metal ions (Fe ions) having the highest Fe content among metal elements. The "content of Cr component" refers to the total content of metal particles (Cr particles) having the highest Cr content among metal elements, and metal ions (Cr ions) having the highest Cr content among metal elements. The "content of Ni component" refers to the total content of metal particles (Ni particles) having the highest Ni content among metal elements, and metal ions (Ni ions) having the highest Ni content among metal elements. The "content of Al component" refers to the total content of metal particles (Al particles) having the highest Al content among metal elements, and metal ions (Al ions) having the highest Al content among metal elements.

[0053] The total content of Fe, Cr, Ni and Al components (hereinafter, these components are also referred to as "specific metal components") in the chemical solution is preferably 0.04 to 1200 mass ppt, more preferably 0.2 to 400 mass ppt, and even more preferably 0.2 to 60 mass ppt, relative to the total mass of the chemical solution, in order to provide a filter used in the purification step described below with better impurity removal performance. It is presumed that when the total content of specific metal components in the chemical solution is below the above upper limit value, static electricity is more likely to accumulate in the filter, improving the removal performance of the filter, whereas when the total content of specific metal components is above the above lower limit value, electrostatic breakdown in the liquid-contacting parts of the filter is suppressed, improving the removal performance of the filter.

[0054] The total content of all metal components in the chemical solution is preferably 5000 mass ppt (5 mass ppb) or less, more preferably 500 mass ppt or less. The lower limit is not particularly limited, and may be below the detection limit. The content of each metal element of the metal components other than the specific metal components in the chemical solution is preferably 50 mass ppt or less, more preferably 10 mass ppt or less. The lower limit is not particularly limited, and may be below the detection limit, and is preferably 0.001 mass ppt or more.

[0055] The type and content of metal components in the chemical solution can be measured using the SP-ICP-MS method (Single Nano Particle Inductively Coupled Plasma Mass Spectrometry). Here, the SP-ICP-MS method uses the same equipment as the normal ICP-MS method (inductively coupled plasma mass spectrometry), and only the data analysis is different. Data analysis of the SP-ICP-MS method can be performed using commercially available software. In the ICP-MS method, the content of the metal component to be measured is measured regardless of the form in which it exists. Therefore, the total mass of the metal particles and metal ions to be measured is quantified as the content of the metal component.

[0056] As an apparatus for the SP-ICP-MS method, for example, Agilent 8800 triple quadrupole ICP-MS (inductively coupled plasma mass spectrometry, for semiconductor analysis, option #200) manufactured by Agilent Technologies can be used, and measurements can be performed according to the method described in the Examples.

[0057] (water) The chemical solution may contain water. The moisture content (water content) in the chemical solution is not particularly limited, but is preferably 0.0005 to 0.03 mass%, more preferably 0.001 to 0.02 mass%, and even more preferably 0.001 to 0.01 mass%, relative to the total mass of the chemical solution, in order to provide better removal performance for the filter used in the purification step described below. It is presumed that when the moisture content in the chemical solution is below the above upper limit, the amount of metal components eluted from components such as pipelines into the chemical solution is reduced, making it easier for static electricity to accumulate in the filter, and improving the removal performance of the filter, whereas when the moisture content is above the above lower limit, electrostatic breakdown in the liquid-contacting parts of the filter is suppressed, and the removal performance of the filter is improved.

[0058] The water content in the chemical solution means the water content measured using an apparatus that employs the Karl Fischer water content determination method as its measurement principle.

[0059] <Preparation of drug solution> The method for preparing the above-mentioned chemical solution is not particularly limited, but in order to prepare a chemical solution in which the contents of organic impurities, metal components, and water are within the desired ranges, it is preferable to perform the following purification process on a liquid to be purified that contains an organic solvent to prepare the chemical solution. The timing of carrying out the purification step is not particularly limited, and may be either before or after the production of the organic solvent contained in the chemical solution. In addition, when the chemical solution contains two or more organic solvents, each organic solvent may be purified and then mixed, or each organic solvent may be mixed and then purified. The purification step may be carried out before or after mixing two or more organic solvents, and may be carried out only once or two or more times.

[0060] An example of the purification process will be described below. In the following description, the term "liquid to be purified" refers to a target for purification in the purification process. Examples of purification processes include an ion exchange process that performs an ion exchange process on the liquid to be purified, a dehydration process that dehydrates the liquid to be purified, an organic impurity removal process that removes organic impurities from the liquid to be purified, and a filtering process that uses a metal ion adsorption member to remove metal ions.

[0061] By carrying out the ion exchange process, ionic components (eg, metal components, etc.) in the liquid to be purified can be removed. In the ion exchange treatment, an ion exchange means such as an ion exchange resin is used. The ion exchange resin may be any of a single bed of a cation exchange resin or an anion exchange resin, a double bed of a cation exchange resin and an anion exchange resin, and a mixed bed of a cation exchange resin and an anion exchange resin. In addition, it is preferable to use a dry resin that contains as little water as possible as an ion exchange resin in order to reduce water elution from the ion exchange resin. Commercially available dry resins of this type include Organo Corporation's 15JS-HG·DRY (trade name, dry cation exchange resin, water content 2% or less) and MSPS2-1·DRY (trade name, mixed bed resin, water content 10% or less).

[0062] The dehydration treatment can remove water from the liquid to be purified. In addition, when zeolite (particularly, molecular sieve (product name) manufactured by Union Showa Co., Ltd.) is used in the dehydration treatment, olefins can also be removed. Examples of dehydration means used in the dehydration treatment include a dehydration membrane, a water adsorbent that is insoluble in the liquid to be purified, an aeration replacement device using a dry inert gas, and a heating or vacuum heating device. When a dehydrating membrane is used, membrane dehydration is performed by pervaporation (PV) or vapor permeation (VP). The dehydrating membrane is configured as, for example, a water-permeable membrane module. As the dehydrating membrane, a membrane made of a polymeric material such as polyimide, cellulose, or polyvinyl alcohol, or an inorganic material such as zeolite can be used. The water adsorbent is added to the liquid to be purified. Examples of the water adsorbent include zeolite, diphosphorus pentoxide, silica gel, calcium chloride, sodium sulfate, magnesium sulfate, anhydrous zinc chloride, fuming sulfuric acid, and soda lime.

[0063] According to the organic impurity removal process, high boiling point organic impurities and the like (including organic substances with a boiling point of 300° C. or higher) contained in the liquid to be purified can be removed. The organic impurity removal means can be implemented, for example, by an organic impurity adsorption member equipped with an organic impurity adsorption filter capable of adsorbing organic impurities. The organic impurity adsorption member often includes the organic impurity adsorption filter and a substrate to which the impurity adsorption filter is fixed. From the viewpoint of improving the adsorption performance of organic impurities, it is preferable that the organic impurity adsorption filter has an organic skeleton capable of interacting with organic impurities on its surface (in other words, the surface is modified by an organic skeleton capable of interacting with organic impurities). Incidentally, having an organic skeleton capable of interacting with organic impurities on its surface is, for example, a form in which an organic skeleton capable of interacting with organic impurities is provided on the surface of a substrate constituting an organic impurity adsorption filter described later. Examples of organic skeletons that can interact with organic impurities include chemical structures that react with organic impurities to capture the organic impurities in an organic impurity adsorption filter. More specifically, when the organic impurities include dioctyl phthalate, diisononyl phthalate, dioctyl adipate, or dibutyl phthalate, the organic skeleton can be a benzene ring skeleton. When the organic impurities include ethylene propylene rubber, the organic skeleton can be an alkylene skeleton. When the organic impurities include n-long chain alkyl alcohol (a structural isomer when 1-long chain alkyl alcohol is used as a solvent), the organic skeleton can be an alkyl group. Examples of the substrate (material) constituting the organic impurity adsorption filter include cellulose carrying activated carbon, diatomaceous earth, nylon, polyethylene, polypropylene, polystyrene, and fluororesin. In addition, as the organic impurity removal filter, a filter in which activated carbon is fixed to a nonwoven fabric, as described in JP-A-2002-273123 and JP-A-2013-150979, can also be used.

[0064] The organic impurity removal process is not limited to the above-mentioned embodiment using an organic impurity adsorption filter capable of adsorbing organic impurities, but may be, for example, an embodiment in which the organic impurities are physically trapped. Organic impurities having a relatively high boiling point of 250° C. or higher are often coarse (e.g., compounds having 8 or more carbon atoms), and therefore it is possible to physically trap them using a filter with a pore size of about 1 nm. For example, the structure of dioctyl phthalate is larger than 10 Å (= 1 nm). Therefore, if an organic impurity removal filter with a pore size of 1 nm is used, dioctyl phthalate cannot pass through the filter pores and is physically captured by the filter and removed from the purified liquid. In this way, organic impurities can be removed not only by chemical interactions but also by physical removal methods. In this case, however, a filter with a pore size of 3 nm or more is used as the "filtering member," and a filter with a pore size of less than 3 nm is used as the "organic impurity removal filter."

[0065] An example of the filtering process using a metal ion adsorption member is filtering using a metal ion adsorption member equipped with a metal ion adsorption filter. The metal ion adsorption member includes at least one metal ion adsorption filter, and may have a configuration in which a plurality of metal ion adsorption filters are stacked depending on the target purification level. The metal ion adsorption member often includes the metal ion adsorption filter and a substrate to which the metal ion adsorption filter is fixed. The metal ion adsorption filter has a function of adsorbing metal ions in the liquid to be purified, and is preferably an ion-exchangeable filter. Here, the metal ions to be adsorbed are not particularly limited, but are preferably Fe, Cr, Ni, Pb or Al, from the viewpoint that they are likely to cause defects in semiconductor devices. From the viewpoint of improving the metal ion adsorption performance, the metal ion adsorption filter preferably has an acid group on the surface. Examples of the acid group include a sulfo group and a carboxyl group. Examples of the substrate (material) that constitutes the metal ion adsorption filter include cellulose, diatomaceous earth, nylon, polyethylene, polypropylene, polystyrene, and fluororesin.

[0066] The purification treatment carried out in the purification step is not limited to the above treatment. For example, a purification treatment selected from the group consisting of a distillation treatment using a distillation apparatus, a filtration treatment for removing coarse particles, and an adsorption purification treatment of metal components using silicon carbide as described in International Publication No. WO2012 / 043496 may be carried out. In addition, the purification step may involve performing each of the above treatments alone or in combination of two or more of the above treatments. In addition, each of the above treatments may be performed once or multiple times. In this supplying method, commercially available high-purity grade organic solvents (particularly those with low contents of organic impurities, metal components and water) may be used.

[0067] (Static charge removal treatment) Before use in the present supplying method, the chemical solution may be subjected to a static elimination treatment to reduce the charged potential of the chemical solution. The static electricity removal treatment is not particularly limited, and any known static electricity removal method can be used, for example, a method of contacting a chemical solution with a conductive material. The contact time for contacting the chemical solution with the conductive material is preferably 0.001 to 60 seconds, more preferably 0.001 to 1 second, and even more preferably 0.01 to 0.1 seconds. Examples of the conductive material include stainless steel, gold, platinum, diamond, and glassy carbon. As a method for bringing the chemical solution into contact with the conductive material, for example, a grounded mesh made of a conductive material is placed inside the pipeline, and the chemical solution is passed through the placed mesh.

[0068] The preparation of the chemical solution is preferably carried out in a sealed state and in an inert gas atmosphere in which there is little possibility of water being mixed into the chemical solution, and more preferably in an inert gas atmosphere with a dew point temperature of -70°C or lower in order to minimize the mixing of moisture. This is because in an inert gas atmosphere at -70°C or lower, the moisture concentration in the gas phase is 2 ppm by mass or less, so there is a low possibility of moisture being mixed into the chemical solution.

[0069] The above-mentioned chemical solution may be temporarily stored in a container until it is used in the present supplying method. The container for storing the above-mentioned chemical solution is not particularly limited, and any known container may be used. The container for storing the above-mentioned chemical solution is preferably one that is highly clean inside and has little elution of impurities for use in semiconductor device manufacturing. Specific examples of containers that can be used include the "Clean Bottle" series manufactured by Aicello Chemical Co., Ltd. and the "Pure Bottle" manufactured by Kodama Resin Industry Co., Ltd., but are not limited to these.

[0070] The inside of the container is preferably washed before storing the chemical solution. The liquid used for washing is preferably the chemical solution itself or a diluted version of the chemical solution. After preparation, the chemical solution may be bottled in a container such as a gallon bottle or a coated bottle, and transported and / or stored. The gallon bottle may be made of glass or other materials.

[0071] In order to prevent the components in the liquid from changing, the inside of the container may be replaced with an inert gas (such as nitrogen or argon) with a purity of 99.99995% by volume or more. In particular, a gas with a low moisture content is preferable. The temperature during transportation and storage may be room temperature (25°C), but may be controlled to a range of -20°C to 30°C to prevent deterioration.

[0072] [Gas pressure transfer process] This supply method includes a gas pressure-feeding step of pressurizing the drug solution with gas to deliver the drug solution. 1, by introducing gas into the storage tank 11 through the gas pipe 12, the air pressure of the gas accumulated in the head space at the top of the storage tank 11 increases, and the liquid medicine L stored in the storage tank 11 is pressurized. In this manner, the liquid medicine L is pressurized, and a pressure difference occurs between the inside of the storage tank 11 and the inside of the intermediate tank 14, so that the liquid medicine L stored in the storage tank 11 is sent (pumped) through the pipeline 13 to the intermediate tank 14. In addition, the position within the pipeline into which the pressurized gas is introduced may be a position other than inside the storage tank, for example, inside pipelines 13 and 15, as long as the liquid medicine can be pressurized and discharged from the pipeline.

[0073] The gas used in the gas pumping step of the present supply method (hereinafter also referred to as "pumping gas") has a moisture content of 0.00001 to 1 mass ppm relative to the total mass of the pumping gas. As described above, by using a gas with a moisture content reduced to a specific range, the content of impurities (particularly organic impurities) contained in the chemical liquid pumped by the gas pumping step can be reduced. In addition, by setting the moisture content of the gas to be pumped to 0.00001% by mass or more, the content of impurities (particularly organic impurities) contained in the liquid medicine pumped in the gas pumping process can be reduced. Although the details of the mechanism are not clear, the inventors speculate that this is because electrostatic breakdown of the liquid-contacting parts caused by static electricity accumulating in the liquid-contacting parts of components such as pipes can be suppressed. From the above viewpoints, the moisture content of the gas for pumping is preferably 0.005 to 0.5 ppm by mass, more preferably 0.01 to 0.3 ppm by mass, and further preferably 0.01 to 0.03 ppm by mass, relative to the total mass of the gas for pumping.

[0074] In addition, in order to achieve a better effect of the present invention and to further reduce the content of impurities in the chemical solution, the purity of the gas for pumping is preferably 99.9% by volume (3N) or more, and more preferably 99.999% by volume (5N) or more. The upper limit is not particularly limited, and may be equal to or higher than the detection limit.

[0075] The purity of the above-mentioned gas for pumping means the volume ratio (percentage) of the content of gases that are gaseous at 25°C and atmospheric pressure and that are contained in an amount of 99 volume% or more of the total volume of the gas for pumping (total content in the case of two or more types) relative to the content of components excluding water (water vapor) from the gas for pumping. In other words, in this specification, a component contained in an amount of less than 1% by volume relative to the total volume of the gas to be pumped corresponds to an impurity gas.

[0076] Examples of the gas to be pumped include inert gases such as nitrogen, argon, and helium, as well as dry air. In order to further suppress the elution of impurities from the pipeline, an inert gas is preferred, nitrogen or argon is more preferred, and argon is even more preferred. As the gas for pressure delivery, the above gases may be used alone or in combination of two or more.

[0077] The amount of moisture contained in the gas to be pumped, the purity of the gas to be pumped, and the type of the gas to be pumped can be measured using an atmospheric pressure ionization mass spectrometer (API-MS) (for example, manufactured by API Japan, Inc.).

[0078] <Gas purification process> The method for preparing the gas for pumping having a moisture content within the above range for use in this supply method is not particularly limited, but it is preferable to carry out a gas purification step in which water (water vapor) contained in the raw material gas is removed to prepare the gas for pumping. A more specific embodiment of the gas purification process is a gas supply device 10 shown in FIG. 1 in which a raw material gas is passed through a gas filter 21 arranged on a gas pipe 12 to prepare a gas to be pumped, and the prepared gas to be pumped is introduced into a storage tank 11. An example of a gas filter used in the gas purification process is an in-line gas filter such as Entegris' "Wafergard (registered trademark) III NF-750" in-line gas filter.

[0079] In addition, the gas to be pumped may be prepared by purifying the raw material gas in advance before supplying the gas to be pumped to the supply device. The method for purifying the raw material gas in advance is not particularly limited, and examples thereof include a method of treating the raw material gas with a known adsorbent such as a molecular sieve, alumina, silica gel, and silica alumina.

[0080] The supply pressure and flow rate of the gas in the gas pressure-feeding step are not particularly limited, and may be appropriately set depending on the liquid feeding conditions and the pressure resistance of each component such as the storage tank, gas pipe, and control valve. Regarding the supply pressure of the gas in the gas pressure-feeding step, the pressure of the gas pressurizing the chemical solution is preferably 0.01 to 0.34 MPa.

[0081] <Pump transfer process> The supplying device used in the present supplying method may have a section in which the chemical solution is transferred in the pipeline using a pump provided in the pipeline. That is, the present supplying method may include a pump transfer step in which the chemical solution is transferred using a pump. The section in the pipeline where the pumping step takes place (the pumping section) may overlap with or be different from the section in the pipeline where the gas pumping step takes place (the gas pumping section). In the example of the supply device 10 shown in FIG. 1, the pipeline 13 connecting the storage tank 11 to the intermediate tank 14 is the gas pressure transfer section, and the pipeline 15 connecting the intermediate tank 14 to the discharge port 16 is the pump transfer section.

[0082] When the supplying apparatus in which the present supplying method is carried out is a processing apparatus that discharges a chemical liquid onto a wafer to perform various processes, it is preferable that the section of the pipeline of the supplying apparatus that includes the downstream end of the pipeline connected to a discharge unit having a function of discharging the chemical liquid onto the wafer is the pump transfer section. That is, it is preferable that the discharge from the supplying apparatus is performed using a pump. By using a pump to transfer the chemical liquid, the amount of the chemical liquid discharged onto the wafer can be more accurately controlled. Examples of the types of pumps used in the pumping process include electric submersible pumps, diaphragm pumps, and centrifugal pumps (such as magnet pumps).

[0083] When a pump and a filter are provided on the pumping section, the position of the pump is not particularly limited and may be either upstream or downstream of the filter on the pipeline, but is preferably upstream. The number of pumps used in one pumping section may be one, or two or more pumps may be combined.

[0084] The supply pressure of the chemical solution in the pump transfer step is not particularly limited, but the pressure inside the pipeline upstream of the filter is preferably 0.00010 to 1.0 MPa, and more preferably 0.01 to 0.34 MPa. In addition, since the filtration pressure affects the filtration accuracy, it is preferable that the pulsation of the supply pressure of the chemical solution to the filter is as small as possible. Methods for reducing the pulsation of the supply pressure of the chemical solution include a method of using an adjustment valve and / or a damper arranged in the pipeline upstream of the filter.

[0085] <Purification process> 1 includes a filter unit 20 on a pipeline 15, the supplying device used in the present supplying method may include a filter on the pipeline having a function of filtering and purifying the liquid chemical. That is, the present supplying method may include a purification step of filtering the liquid chemical in the pipeline using a filter.

[0086] The present supply method preferably includes the above-mentioned purification step, because the present supply method is a method for supplying a chemical solution including the above-mentioned gas pumping step, and by passing the chemical solution pumped using a pumping gas having a specified moisture content through a filter to filter it, the impurity removal performance of the filter is improved, and the content of impurities in the purified chemical solution can be further reduced. Although the details of the mechanism by which the impurity removal performance of the filter is improved are not clear, the inventors speculate that by carrying out the gas pumping process using gas with a moisture content reduced to a specific range, the amount of moisture dissolving from the gas into the chemical solution is reduced, and the elution of impurities from the liquid-contacting parts of the pipelines and other components into the chemical solution is suppressed, making it easier for static electricity to accumulate in the filter and improving the impurity removal performance of the filter, while by setting the moisture content of the gas to a predetermined lower limit or above, a small amount of moisture dissolves from the gas into the chemical solution, suppressing electrostatic damage to the filter that causes impurities to elute and / or become mixed in. In particular, since the effect of improving the removal performance of the filter is more pronounced, it is more preferable that the present supply method includes a purification step of filtering the chemical liquid delivered by the gas pressure delivery step using a filter.

[0087] In the supply device 10, the purification process is carried out as follows. The chemical solution stored in the intermediate tank 14 is sent by a pump 17 through a pipeline 15 to a filter unit 20 having a filter. The chemical solution is filtered and refined as it passes through a filter of a filter cartridge housed in the filter unit 20. The refined chemical solution flowing out of the filter cartridge 20 passes through the pipeline 15 and is discharged from an outlet 16.

[0088] The number of filters used in the purification step may be one or more. When multiple filters are used, they may be arranged in series or in parallel with respect to the transport direction of the drug solution. In addition, the purified chemical solution that has passed through the filter may be returned to a storage tank or an intermediate tank, and circulating filtration may be performed by repeatedly passing the chemical solution through the filter. From the viewpoint of productivity and preventing the inclusion of impurities, circulating filtration may not be performed, and the chemical solution may be passed through the filter only once.

[0089] (filter) The filter used for refining (filtering) the chemical solution in the refining step will be described in detail below.

[0090] The pore size of the filter is not particularly limited, and may be any pore size that is normally used for filtering chemicals. The pore size of the filter is preferably 20 nm or less, more preferably 5 nm or less, and even more preferably 2 nm or less. The lower limit is not particularly limited, but is preferably 1 nm or more. When the supply device includes a plurality of filters, it is preferable that the pore size of at least one of the filters is within the above range. In this specification, the pore size of the filter means the pore size determined by the bubble point of isopropanol (IPA) or HFE-7200 ("Novec 7200", manufactured by 3M, hydrofluoroether, C4F9OC2H5).

[0091] The material constituting the filter is not particularly limited, but examples include polyolefins (including high density and ultra-high molecular weight) such as polyethylene (PE) and polypropylene (PP); polyamides such as nylon (including nylon 6 and nylon 66); polyimides; polyamideimides; polyesters such as polyethylene terephthalate; polyethersulfone; cellulose; fluororesins such as polytetrafluoroethylene (PTFE) and perfluoroalkoxyalkanes; and derivatives of the above polymers (or resins). Among these, a material consisting of at least one selected from the group consisting of polyolefin, polyamide, polyimide, polyamideimide, polyester, polysulfone, cellulose, fluororesin, and derivatives thereof is preferred, and polyethylene, polypropylene, nylon, or fluororesin is more preferred, with PTFE being even more preferred, in that the content of impurities in the chemical solution can be further reduced. Materials from which filters may be constructed also include diatomaceous earth and glass.

[0092] The material constituting the filter may be a derivative of the above-mentioned polymer, for example, a derivative obtained by introducing an ion exchange group into the above-mentioned polymer by chemical modification treatment. Examples of the ion exchange group include cation exchange groups such as sulfonic acid groups, carboxy groups, and phosphate groups, and anion exchange groups such as secondary, tertiary, and quaternary ammonium groups. The method for introducing the ion exchange group into the polymer is not particularly limited, and includes a method of reacting a compound having an ion exchange group and a polymerizable group with the polymer to graft the polymer.

[0093] For example, when polyolefin (polyethylene, polypropylene, etc.) is used, it is irradiated with ionizing radiation (α-rays, β-rays, γ-rays, X-rays, electron beams, etc.) to generate active moieties (radicals) in the molecular chain of the polyolefin. The irradiated polyolefin is immersed in a monomer-containing solution to graft polymerize the monomer. As a result, the monomer is bonded to the polyolefin as a graft-polymerized side chain. The polyolefin fiber having the monomer as a side chain is contacted with a compound having an anion exchange group or a cation exchange group, and the two are reacted to obtain a final product in which an ion exchange group is introduced into the monomer of the graft-polymerized side chain. In this final product, the ion exchange group is not introduced into the polyolefin fiber, which is the main chain, but the ion exchange group is introduced into the monomer of the side chain graft-polymerized to the main chain.

[0094] The filter may also be constructed by combining a woven fabric or nonwoven fabric on which ion exchange groups are formed by radiation-induced graft polymerization with a conventional glass wool, woven fabric, or nonwoven fabric.

[0095] The filter may be surface-treated other than chemically modified. The surface treatment method is not particularly limited, and any known method can be used. Examples of the surface treatment method include plasma treatment, hydrophobic treatment, coating, gas treatment, and sintering.

[0096] The plasma treatment is preferable because it makes the filter surface hydrophilic. The water contact angle on the filter surface that has been made hydrophilic by the plasma treatment is not particularly limited, but the static contact angle at 25°C measured with a contact angle meter is preferably 60° or less, more preferably 50° or less, and even more preferably 30° or less.

[0097] The pore structure of the filter is not particularly limited and may be appropriately selected depending on the form of impurities contained in the drug solution. The pore structure of the filter means the pore size distribution, the positional distribution of the pores in the filter, the shape of the pores, etc., which differ depending on the manufacturing method of the filter. For example, a porous membrane formed by sintering powder of resin or the like and a fibrous membrane formed by a method such as electrospinning, electroblowing, or meltblowing have different pore structures. The critical surface tension of the filter is not particularly limited and can be appropriately selected depending on the impurities to be removed.

[0098] In the purification step, the temperature of the chemical solution when it is passed through the filter is preferably 0 to 50°C, and more preferably 0 to 25°C.

[0099] In the purification process, the filtration rate of the chemical solution passing through the filter is 0.6 L / min / m, in terms of the flow rate per filtration area of ​​the filter (L / min). 2 More than 0.75 L / min / m is preferable. 2 More preferably, 1.0 L / min / m 2 The above is more preferable. Filters have a pressure tolerance that ensures filter performance (without breaking), and if this value is large, the filtration speed can be increased by increasing the filtration pressure. The upper limit of the filtration speed depends on the pressure tolerance of the filter, but it is generally no more than 10.0 L / min / m 2 The following is preferred:

[0100] <Cleaning process> The supply device used in the present supply method preferably has a cleaning step for cleaning the liquid-contacting parts of each member in the device before carrying out the present supply method. By cleaning each member (especially the filter), the content of impurities in the supplied chemical solution can be further reduced.

[0101] A specific example of the cleaning step is a method in which a cleaning liquid is used instead of a chemical solution and the cleaning liquid is transported through a pipeline according to the method described in the gas pressure transport step or pump transport step. The method for cleaning the filter may be, for example, a method of immersing the filter in a cleaning liquid, a method of passing the cleaning liquid through the filter, or a combination of these methods.

[0102] The cleaning liquid is not particularly limited, but an organic solvent is preferred. The organic solvent used as the cleaning liquid, including its preferred embodiments, is as described above as the organic solvent contained in the chemical solution. The cleaning liquid used in the cleaning step may be the same as or different from the chemical liquid delivered in the gas pressure delivery step, but is preferably the same as the chemical liquid in that a rinsing process using a chemical liquid is not required.

[0103] The method of transporting the cleaning liquid in the cleaning step is not particularly limited, and the cleaning liquid can be made to flow inside a pipeline or passed through a filter according to the methods described above for the gas pressure transfer step and / or pump transfer step. In the cleaning step, the supply pressure of the cleaning liquid when passing the cleaning liquid through the filter is not particularly limited, and for example, the pressure inside the pipeline upstream of the filter may be 0.0001 to 1.0 MPa. The flow rate of the cleaning solution passed through the filter in the cleaning process is 0.6 to 10.0 L / min / m per filtration area of ​​the filter (L / min). 2 is preferred. The temperature of the washing solution used in the washing step is preferably 0 to 50°C. The washing step may be performed once or twice or more.

[0104] It is preferable that the present supply method, purification of the drug solution, and the associated steps such as opening the container, cleaning the container and the device, storing the drug solution, and analysis are all performed in a clean room. The clean room preferably meets the clean room standard set forth in ISO (International Organization for Standardization) 14644-1, more preferably meets any of ISO class 1, ISO class 2, ISO class 3, and ISO class 4, further preferably meets ISO class 1 or ISO class 2, and particularly preferably meets ISO class 1.

[0105] [Chemical use] The chemical liquid supplied by the supply method is preferably used in the manufacture of a semiconductor device. The chemical liquid can be used in any process for manufacturing a semiconductor device, for example, in a wiring formation process including photolithography (including a lithography process, an etching process, an ion implantation process, and a stripping process, etc.) using an organic substance. Specific uses of the chemical liquid include a pre-wet liquid, a developer, a rinse liquid, a stripping liquid, a CMP slurry, and a rinse liquid after CMP (p-CMP rinse liquid).

[0106] The above-mentioned chemical solution may be used after diluting with other organic solvents and / or solvents such as water. When the above-mentioned chemical solution is used as a CMP slurry, for example, additives such as abrasive grains and an oxidizing agent may be added to the above-mentioned chemical solution. The above-mentioned chemical solution may also be used as a solvent for diluting the CMP slurry. The chemical solution may be used for only one of the above uses, or may be used for two or more uses.

[0107] [Pattern Forming Method] The chemical solution supplied by the present supplying method is preferably used as a treatment liquid in a pattern forming method having the following steps. (A) a pre-wetting step of contacting a pre-wetting liquid onto a substrate; (B) a resist film forming step of forming a resist film on the substrate after the prewetting step using a resist composition; (C) an exposure step of exposing the resist film to light; (D) a developing step of developing the exposed resist film using a developer; and (E) A rinsing step in which the substrate on which the resist pattern has been formed is brought into contact with a rinsing liquid. A pattern formation method having the above steps (A) to (E), in which at least one selected from the group consisting of the pre-wet liquid, the developer and the rinsing liquid is the above chemical liquid, is more preferred. Each step of the pattern forming method will be described below.

[0108] <(A) Pre-wetting process> The pre-wetting step is a step of contacting a pre-wetting liquid onto a substrate. The substrate is not particularly limited, and may be a known substrate used in semiconductor manufacturing. Examples of the substrate include inorganic substrates such as silicon, SiO2, or SiN, and inorganic substrates such as SOG (Spin On Glass). The substrate may be a substrate with an anti-reflection film, which may be a known organic or inorganic anti-reflection film.

[0109] The method for contacting the pre-wet liquid with the substrate is not particularly limited, and any known coating method can be used. Among them, spin coating is preferred as the coating method, since a uniform resist film can be formed with a smaller amount of resist composition in the resist film forming step described below.

[0110] The thickness of the pre-wet liquid layer formed on the substrate using the pre-wet liquid is preferably 0.001 to 10 μm, and more preferably 0.005 to 5 μm.

[0111] (Pre-wetting fluid) The pre-wet liquid is preferably a pre-wet liquid containing an organic solvent. The organic solvent contained in the pre-wet liquid is preferably at least one organic solvent selected from the group consisting of, for example, hydrocarbon-based solvents, ketone-based solvents, ester-based solvents, alcohol-based solvents, amide-based solvents, and ether-based solvents, more preferably a hydrocarbon-based solvent, an ether-based solvent, or a ketone-based solvent, and even more preferably a hydrocarbon-based solvent or an ether-based solvent. The chemical liquid supplied by this supplying method can be used as the pre-wet liquid described above. The surface tension of the pre-wet liquid is preferably higher than the surface tension of the resist composition to be applied.

[0112] In a typical method of supplying the pre-wet liquid to the wafer, a pre-wet nozzle moves to above the center of the wafer, and the pre-wet liquid is supplied to the wafer by opening and closing a valve. While the wafer is stationary, a predetermined amount of the pre-wet liquid is supplied from the pre-wet nozzle to the center of the wafer. The wafer is then rotated at a first speed V1 of, for example, about 500 rpm (rotations per minute), and the pre-wet liquid on the wafer is spread over the entire surface of the wafer, so that the entire surface of the wafer is wet with the pre-wet liquid. The upper limit of the first speed V1 is not particularly limited, but is preferably 3000 rpm or less.

[0113] Thereafter, the valve of the line connected to the resist composition is opened, and the resist composition starts to be discharged from the resist nozzle, so that the resist composition starts to be supplied to the center of the wafer. The resist composition may be a resist composition for ArF exposure, a resist composition for EUV exposure, or a resist composition for KrF exposure. In other words, the pre-wet liquid may be a pre-wet liquid that is applied to a substrate to which a resist composition for ArF exposure is applied, a pre-wet liquid that is applied to a substrate to which a resist composition for EUV exposure is applied, or a pre-wet liquid that is applied to a substrate to which a resist composition for KrF exposure is applied. Thus, (B) the resist film forming process (described later) is started. In this resist film forming process, the rotation speed of the wafer is increased from the first speed V1 to a second speed V2 of, for example, about 2000 to 4000 rpm. The rotation of the wafer, which was at the first speed V1 before the start of the resist film forming process, is gradually accelerated so that the speed varies continuously and smoothly thereafter. At this time, the acceleration of the wafer rotation gradually increases from, for example, zero. Then, at the end of the resist film forming process, the acceleration of the wafer rotation gradually decreases, and the wafer rotation speed smoothly converges to the second speed V2. Thus, during the resist film forming process, the wafer rotation speed varies from the first speed V1 to the second speed V2 in an S-shape. In the resist film forming process, the resist composition supplied to the center of the wafer is diffused over the entire surface of the wafer by centrifugal force, and the resist composition is applied to the surface of the wafer. Such a resist-saving technique using fluctuations in the wafer rotation speed during resist coating is described in detail in JP-A-2009-279476.

[0114] There are no particular limitations on the interval between the end of the (A) prewetting step and the start of application of the resist composition in the (B) resist film forming step, but it is preferably 7 seconds or less.

[0115] The pre-wet liquid may be reused, i.e., the pre-wet liquid used in the pre-wet step may be collected and used in the pre-wet step of another wafer. When reusing the pre-wet liquid, it is preferable to adjust the contents of impurity metals, organic impurities, water, etc. contained in the recovered pre-wet liquid. Note that the above-mentioned adjustment method is as already described as the manufacturing method of the pre-wet liquid.

[0116] <(B) Resist film formation process> The resist film forming step is a step of forming a resist film on the substrate after the prewetting step by using a resist composition (preferably by applying the resist composition). The substrate after the pre-wetting step is a substrate having a pre-wet liquid layer, and is also called a pre-wetted substrate. First, the form of the resist composition will be described below.

[0117] <Resist Composition> There are no particular limitations on the resist composition that can be used in the resist film forming step, and any known resist composition can be used. The resist composition may be, for example, for positive development or negative development. In addition, there is no limitation on the light to which the resist film formed using the resist composition is exposed. For example, the resist composition may be a resist composition for ArF exposure, a resist composition for EUV exposure, or a resist composition for KrF exposure. The resist composition preferably contains a resin containing a repeating unit that contains a group that is decomposed by the action of an acid to generate a polar group (such as a carboxyl group or a phenolic hydroxyl group) (hereinafter, also referred to as an "acid-decomposable resin" in this specification), and a compound that generates an acid when irradiated with actinic rays or radiation (hereinafter, also referred to as a "photoacid generator" in this specification). Among these, the following resist compositions are preferred. A resist composition containing a resin represented by formula (I) described below. A resist composition containing an acid-decomposable resin having a phenolic hydroxyl group, which will be described later. A resist composition containing a hydrophobic resin and an acid-decomposable resin, which will be described later. Each component of the resist composition will be described below.

[0118] (acid decomposable resin) In the acid-decomposable group, the polar group is protected by a group that is detached by an acid (acid-detachable group). Examples of the acid-detachable group include -C(R 36 )(R 37 )(R 38 ), -C(R 36 )(R 37 )(OR 39 ), and -C(R 01 )(R 02 )(OR39 ) etc. In the formula, R 36 ~R 39 R each independently represents an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group. 36 and R 37 may be bonded to each other to form a ring. R 01 and R 02 each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group.

[0119] The acid-decomposable resin may be a resin P having an acid-decomposable group represented by formula (AI).

[0120] [ka]

[0121] In formula (AI), Xa1 represents a hydrogen atom or an alkyl group which may have a substituent. T represents a single bond or a divalent linking group. Ra1 to Ra3 each independently represent an alkyl group (straight-chain or branched-chain) or a cycloalkyl group (monocyclic or polycyclic). Two of Ra1 to Ra3 may be bonded to form a cycloalkyl group (monocyclic or polycyclic).

[0122] Examples of the alkyl group represented by Xa1 which may have a substituent include a methyl group and -CH2-R 11 Examples of the group represented by R 11 represents a halogen atom (such as a fluorine atom), a hydroxyl group, or a monovalent organic group. Xa1 is preferably a hydrogen atom, a methyl group, a trifluoromethyl group or a hydroxymethyl group.

[0123] Examples of the divalent linking group for T include an alkylene group, a -COO-Rt- group, and a -O-Rt- group, in which Rt represents an alkylene group or a cycloalkylene group. T is preferably a single bond or a -COO-Rt- group. Rt is preferably an alkylene group having 1 to 5 carbon atoms, more preferably a -CH2- group, a -(CH2)2- group, or a -(CH2)3- group.

[0124] The alkyl groups Ra1 to Ra3 are preferably those having 1 to 4 carbon atoms.

[0125] The cycloalkyl group of Ra1 to Ra3 is preferably a monocyclic cycloalkyl group such as a cyclopentyl group or a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group. The cycloalkyl group formed by combining two of Ra1 to Ra3 is preferably a monocyclic cycloalkyl group such as a cyclopentyl group or a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, an adamantyl group, etc. A monocyclic cycloalkyl group having 5 to 6 carbon atoms is more preferable.

[0126] The cycloalkyl group formed by combining two of Ra1 to Ra3 may have, for example, one of the methylene groups constituting the ring replaced with a heteroatom such as an oxygen atom, or a group having a heteroatom such as a carbonyl group.

[0127] In the repeating unit represented by formula (AI), for example, Ra1 is a methyl group or an ethyl group, and Ra2 and Ra3 are bonded to form the above-mentioned cycloalkyl group.

[0128] Each of the above groups may have a substituent. Examples of the substituent include an alkyl group (having 1 to 4 carbon atoms), a halogen atom, a hydroxyl group, an alkoxy group (having 1 to 4 carbon atoms), a carboxy group, and an alkoxycarbonyl group (having 2 to 6 carbon atoms), and the like, preferably having 8 or less carbon atoms.

[0129] The total content of the repeating units represented by formula (AI) is preferably 20 to 90 mol %, more preferably 25 to 85 mol %, and even more preferably 30 to 80 mol %, based on all repeating units in resin P.

[0130] Specific examples of the repeating unit represented by formula (AI) are shown below, but the invention is not limited thereto.

[0131] In the specific examples, Rx and Xa1 each independently represent a hydrogen atom, CH3, CF3, or CH2OH. Rxa and Rxb each represent an alkyl group having 1 to 4 carbon atoms. Z represents a substituent containing a polar group, and when a plurality of Zs are present, each is independent. p represents 0 or a positive integer. Examples of the substituent containing a polar group represented by Z include a hydroxyl group, a cyano group, an amino group, an alkylamide group, a sulfonamide group, and a linear or branched alkyl group or cycloalkyl group having these groups.

[0132] [ka]

[0133] (Repeating unit having a lactone structure) In addition, the resin P preferably contains a repeating unit Q having a lactone structure.

[0134] The repeating unit Q having a lactone structure preferably has a lactone structure in the side chain, and is more preferably, for example, a repeating unit derived from a (meth)acrylic acid derivative monomer. The repeating unit Q having a lactone structure may be used alone or in combination of two or more kinds, but it is preferable to use one kind alone. The content of the repeating unit Q having a lactone structure relative to all repeating units in the resin P is, for example, from 3 to 80 mol %, and preferably from 3 to 60 mol %.

[0135] The lactone structure is preferably a 5- to 7-membered lactone structure, and more preferably a structure in which another ring structure is condensed with the 5- to 7-membered lactone structure to form a bicyclo structure or a spiro structure. The lactone structure preferably has a repeating unit having a lactone structure represented by any one of the following formulae (LC1-1) to (LC1-17). The lactone structure is more preferably a lactone structure represented by formula (LC1-1), (LC1-4), (LC1-5), or (LC1-8), and even more preferably a lactone structure represented by formula (LC1-4).

[0136] [ka]

[0137] The lactone structure portion may have a substituent (Rb2). Preferred examples of the substituent (Rb2) include an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 4 to 7 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkoxycarbonyl group having 2 to 8 carbon atoms, a carboxy group, a halogen atom, a hydroxyl group, a cyano group, and an acid-decomposable group. n2 represents an integer of 0 to 4. When n2 is 2 or more, the multiple substituents (Rb2) may be the same or different, and the multiple substituents (Rb2) may be bonded to each other to form a ring.

[0138] Resin P is preferably a resin consisting of a repeating unit selected from the group consisting of a repeating unit represented by formula (a), a repeating unit represented by formula (b), a repeating unit represented by formula (c), a repeating unit represented by formula (d), and a repeating unit represented by formula (e) (hereinafter, this resin is also referred to as "resin represented by formula (I)"). The resin represented by the following formula (I) is a resin whose solubility in a developer mainly composed of an organic solvent decreases due to the action of an acid, and contains an acid-decomposable group. The pre-wet liquid has excellent solubility in the resin represented by formula (I), so that a uniform resist film can be easily obtained using a smaller amount of resist composition. The resin represented by formula (I) will be described below. The resin represented by formula (I) may be any resin substantially consisting of the repeating units represented by formulas (a) to (e). For example, the resin represented by formula (I) may contain repeating units other than the repeating units represented by formulas (a) to (e) in an amount of 0 to 5 mol % (more preferably 0 to 1 mol %) based on the total repeating units of the resin.

[0139] Resin represented by formula (I)

[0140] [ka]

[0141] The above formula (I) is composed of repeating unit (a) (a repeating unit represented by formula (a)), repeating unit (b) (b repeating unit represented by formula (b)), repeating unit (c) (c repeating unit), repeating unit (d) (d repeating unit) and repeating unit (e) (e repeating unit represented by formula (e)). R x1 ~R x5 each independently represents a hydrogen atom or an alkyl group which may contain a substituent. R1 to R4 each independently represent a monovalent substituent, and p1 to p4 each independently represent 0 or a positive integer. R a represents a linear or branched alkyl group. T1 to T5 each independently represent a single bond or a divalent linking group. R5 represents a monovalent organic group. a to e represent mole % (the mole % of each repeating unit relative to 100 mole % in total of the repeating units (a) to (e) above), and each independently represents a number within the range of 0≦a≦100, 0≦b≦100, 0≦c<100, 0≦d<100, and 0≦e<100, provided that a+b+c+d+e=100 and a+b≠0. However, in formula (I), the repeating unit (e) has a structure different from any of the repeating units (a) to (d).

[0142] R x1 ~R x5 Examples of the alkyl group which may contain a substituent include a methyl group and -CH-R 11 Examples of the group represented by R 11 represents a halogen atom (such as a fluorine atom), a hydroxyl group, or a monovalent organic group. R x1 ~R x5 are each preferably independently a hydrogen atom, a methyl group, a trifluoromethyl group, or a hydroxymethyl group.

[0143] In formula (I), examples of the divalent linking groups represented by T1 to T5 include an alkylene group, a -COO-Rt- group, and a -O-Rt- group, etc. In the formula, Rt represents an alkylene group or a cycloalkylene group. Each of T1 to T5 is preferably independently a single bond or a -COO-Rt- group. Rt is preferably an alkylene group having 1 to 5 carbon atoms, more preferably a -CH2- group, a -(CH2)2- group, or a -(CH2)3- group.

[0144] In formula (I), R a represents a linear or branched alkyl group. Examples include a methyl group, an ethyl group, and a t-butyl group. Among these, a linear or branched alkyl group having 1 to 4 carbon atoms is preferred. In formula (I), R1 to R4 each independently represent a monovalent substituent. Examples of R1 to R4 include, but are not limited to, a hydroxyl group, a cyano group, and a linear or branched alkyl or cycloalkyl group having a hydroxyl or cyano group. In formula (I), p1 to p4 each independently represent 0 or a positive integer, and the upper limit of p1 to p4 corresponds to the number of hydrogen atoms that can be substituted in each repeating unit. In formula (I), R5 represents a monovalent organic group. R5 is not particularly limited, but examples thereof include monovalent organic groups having a sultone structure, and monovalent organic groups having a cyclic ether such as tetrahydrofuran, dioxane, 1,4-thioxane, dioxolane, and 2,4,6-trioxabicyclo[3.3.0]octane, or acid-decomposable groups (e.g., adamantyl groups in which the carbon bonded to the -COO group is substituted with an alkyl group to be quaternized).

[0145] In addition, in formula (I), the repeating unit (b) is also preferably formed from a monomer described in paragraphs 0014 to 0018 of JP2016-138219A.

[0146] In formula (I), a to e represent mole % (mol % of each repeating unit relative to 100 mole % of the total of the repeating units (a) to (e)), and each independently represents a number within the range of 0≦a≦100, 0≦b≦100, 0≦c<100, 0≦d<100, 0≦e<100, provided that a+b+c+d+e=100 and a+b≠0.

[0147] In formula (I), a+b is preferably from 20 to 90 mol %, more preferably from 25 to 85 mol %, and even more preferably from 30 to 80 mol %. In formula (I), the content of the repeating unit having an acid-decomposable group relative to all repeating units is preferably from 20 to 90 mol %, more preferably from 25 to 85 mol %, and even more preferably from 30 to 80 mol %. In addition, in formula (I), c+d (the content of repeating units having a lactone structure relative to all repeating units) is preferably from 3 to 80 mol %, more preferably from 3 to 60 mol %.

[0148] The repeating units (a) to (e) may each be used alone or in combination of two or more kinds of each repeating unit. When two or more kinds of each repeating unit are used in combination, it is preferable that the total content is within the above range.

[0149] The weight average molecular weight (Mw) of the resin represented by formula (I) is usually preferably 1,000 to 200,000, more preferably 2,000 to 20,000, and even more preferably 3,000 to 15,000. The weight average molecular weight is a polystyrene-equivalent value determined by gel permeation chromatography (GPC) using tetrahydrofuran (THF) as a developing solvent. Furthermore, in the resist composition, the content of the resin represented by formula (I) is usually preferably from 30 to 99 mass %, and more preferably from 50 to 95 mass %, based on the total solid content of the resist composition.

[0150] (Repeating unit having a phenolic hydroxyl group) Furthermore, the resin P may contain a repeating unit having a phenolic hydroxyl group. An example of the repeating unit having a phenolic hydroxyl group is a repeating unit represented by the following general formula (I).

[0151] [ka]

[0152] During the ceremony, R 41 , R 42 and R 43 each independently represents a hydrogen atom, an alkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. 42 may be bonded to Ar4 to form a ring, in which case R 42 represents a single bond or an alkylene group.

[0153] X4 is a single bond, -COO-, or -CONR 64 - represents R 64 represents a hydrogen atom or an alkyl group.

[0154] L4 represents a single bond or an alkylene group.

[0155] Ar4 represents an (n+1)-valent aromatic ring group; R 42 When it bonds with the ring, it represents an (n+2)-valent aromatic ring group.

[0156] n represents an integer of 1 to 5.

[0157] R in general formula (I) 41 , R 42 and R 43 The alkyl group may have a substituent, and is preferably an alkyl group having 20 or less carbon atoms, such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, or a dodecyl group, more preferably an alkyl group having 8 or less carbon atoms, and even more preferably an alkyl group having 3 or less carbon atoms.

[0158] R in general formula (I) 41 , R 42 and R 43 The cycloalkyl group may be a monocyclic or polycyclic cycloalkyl group. The cycloalkyl group is preferably a monocyclic cycloalkyl group having 3 to 8 carbon atoms, such as a cyclopropyl group, a cyclopentyl group, or a cyclohexyl group, which may have a substituent.

[0159] R in general formula (I) 41 , R 42 and R 43 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, with a fluorine atom being preferred.

[0160] R in general formula (I) 41 , R 42 and R 43 The alkyl group contained in the alkoxycarbonyl group of R 41 , R 42 and R 43 The same alkyl groups as those in the above are preferred.

[0161] Examples of the substituent in each of the above groups include an alkyl group, a cycloalkyl group, an aryl group, an amino group, an amido group, a ureido group, a urethane group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group, a thioether group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a cyano group, and a nitro group, and the number of carbon atoms of the substituent is preferably 8 or less.

[0162] Ar4 represents an aromatic ring group having a valence of (n+1). When n is 1, the divalent aromatic ring group may have a substituent, and examples thereof include arylene groups having 6 to 18 carbon atoms, such as a phenylene group, a tolylene group, a naphthylene group, and an anthracenylene group, and aromatic ring groups containing a heterocycle, such as thiophene, furan, pyrrole, benzothiophene, benzofuran, benzopyrrole, triazine, imidazole, benzimidazole, triazole, thiadiazole, and thiazole.

[0163] Specific examples of the (n+1)-valent aromatic ring group when n is an integer of 2 or more include groups obtained by removing any (n-1) hydrogen atoms from the above-mentioned specific examples of the divalent aromatic ring group.

[0164] The (n+1)-valent aromatic ring group may further have a substituent.

[0165] Examples of the substituent that the above-mentioned alkyl group, cycloalkyl group, alkoxycarbonyl group, alkylene group, and (n+1)-valent aromatic ring group may have include R 41 , R 42 and R 43 alkoxy groups such as a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, a hydroxypropoxy group, and a butoxy group; and aryl groups such as a phenyl group.

[0166] -CONR represented by X4 64 -(R 64 represents a hydrogen atom or an alkyl group) 64Examples of the alkyl group include alkyl groups having 20 or less carbon atoms, such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, and a dodecyl group, which may have a substituent, and an alkyl group having 8 or less carbon atoms is preferred.

[0167] X4 is preferably a single bond, -COO- or -CONH-, more preferably a single bond or -COO-.

[0168] The alkylene group in L4 is preferably an alkylene group having 1 to 8 carbon atoms, such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, or an octylene group, which may have a substituent.

[0169] Ar4 is preferably an aromatic ring group having 6 to 18 carbon atoms which may have a substituent, and more preferably a benzene ring group, a naphthalene ring group or a biphenylene ring group.

[0170] The repeating unit represented by formula (I) preferably has a hydroxystyrene structure, that is, Ar4 is preferably a benzene ring group.

[0171] The repeating unit having a phenolic hydroxyl group is preferably a repeating unit represented by the following general formula (p1).

[0172] [ka]

[0173] In the general formula (p1), R represents a hydrogen atom, a halogen atom, or a linear or branched alkyl group having 1 to 4 carbon atoms. Multiple R may be the same or different. R in the general formula (p1) is preferably a hydrogen atom.

[0174] In the general formula (p1), Ar represents an aromatic ring, and examples thereof include aromatic hydrocarbon rings having 6 to 18 carbon atoms, such as a benzene ring, a naphthalene ring, an anthracene ring, a fluorene ring, and a phenanthrene ring, which may have a substituent, and aromatic heterocycles including heterocycles such as a thiophene ring, a furan ring, a pyrrole ring, a benzothiophene ring, a benzofuran ring, a benzopyrrole ring, a triazine ring, an imidazole ring, a benzimidazole ring, a triazole ring, a thiadiazole ring, and a thiazole ring. Among these, a benzene ring is preferable.

[0175] In the general formula (p1), m represents an integer of 1 to 5, with 1 being preferred.

[0176] Specific examples of the repeating unit having a phenolic hydroxyl group are shown below, but the invention is not limited thereto.

[0177] [ka]

[0178] [ka]

[0179] [ka]

[0180] The content of the repeating unit having a phenolic hydroxyl group relative to all repeating units in the resin P is preferably from 0 to 50 mol %, more preferably from 0 to 45 mol %, and even more preferably from 0 to 40 mol %.

[0181] (Repeating unit containing an organic group having a polar group) Resin P may further contain a repeating unit containing an organic group having a polar group, in particular a repeating unit having an alicyclic hydrocarbon structure substituted with a polar group. This improves the adhesion to the substrate and affinity to the developer. The alicyclic hydrocarbon structure substituted with a polar group is preferably an adamantyl group, a diamantyl group, or a norbornane group. The polar group is preferably a hydroxyl group or a cyano group.

[0182] Specific examples of the repeating unit having a polar group include, but are not limited to, the following.

[0183] [ka]

[0184] When the resin P contains a repeating unit containing an organic group having a polar group, the content thereof is preferably 1 to 50 mol %, more preferably 1 to 30 mol %, still more preferably 5 to 25 mol %, and particularly preferably 5 to 20 mol %, based on the total repeating units in the resin P.

[0185] (Repeating unit having a group (photoacid generating group) that generates an acid upon exposure to actinic rays or radiation) Resin P may contain a repeating unit having a group that generates an acid when irradiated with actinic rays or radiation (photoacid generating group). An example of a repeating unit having a group that generates an acid upon irradiation with actinic rays or radiation (a photoacid generating group) is a repeating unit represented by the following formula (4).

[0186] [ka]

[0187] R 41 represents a hydrogen atom or a methyl group. 41 represents a single bond or a divalent linking group. 42 represents a divalent linking group. W represents a structural moiety that is decomposed by irradiation with actinic rays or radiation to generate an acid in a side chain.

[0188] Specific examples of the repeating unit represented by formula (4) are shown below, but the present invention is not limited thereto.

[0189] [ka]

[0190] Other examples of the repeating unit represented by formula (4) include the repeating units described in paragraphs

[0094] to

[0105] of JP2014-041327A.

[0191] When the resin P contains a repeating unit having a photoacid generating group, the content of the repeating unit having a photoacid generating group is preferably 1 to 40 mol %, more preferably 5 to 35 mol %, and even more preferably 5 to 30 mol %, based on the total repeating units in the resin P.

[0192] Resin P may contain a repeating unit represented by the following formula (VI).

[0193] [ka]

[0194] In formula (VI), R 61 , R 62 and R 63 each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. 62 may be bonded to Ar6 to form a ring, in which case R 62 represents a single bond or an alkylene group. X6 is a single bond, -COO-, or -CONR 64 - stands for R 64 represents a hydrogen atom or an alkyl group. L6 represents a single bond or an alkylene group. Ar6 represents an (n+1)-valent aromatic ring group; R 62 When it bonds with the ring, it represents an (n+2)-valent aromatic ring group. When n is 2 or more, each Y2 independently represents a hydrogen atom or a group which is eliminated by the action of an acid, provided that at least one Y2 represents a group which is eliminated by the action of an acid. n represents an integer of 1 to 4.

[0195] As the group Y2 which is eliminated by the action of an acid, a structure represented by the following formula (VI-A) is preferable.

[0196] [ka]

[0197] L1 and L2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or a group formed by combining an alkylene group with an aryl group.

[0198] M represents a single bond or a divalent linking group.

[0199] Q represents an alkyl group, a cycloalkyl group which may contain a heteroatom, an aryl group which may contain a heteroatom, an amino group, an ammonium group, a mercapto group, a cyano group, or an aldehyde group.

[0200] At least two of Q, M and L1 may be bonded to form a ring (preferably a 5- or 6-membered ring).

[0201] The repeating unit represented by the above formula (VI) is preferably a repeating unit represented by the following formula (3).

[0202] [ka]

[0203] In formula (3), Ar3 represents an aromatic ring group. R3 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group. M3 represents a single bond or a divalent linking group. Q3 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group. At least two of Q3, M3 and R3 may be combined to form a ring.

[0204] The aromatic ring group represented by Ar3 is the same as Ar6 in the above formula (VI) when n in the above formula (VI) is 1, and is more preferably a phenylene group or a naphthylene group, and further preferably a phenylene group.

[0205] Specific examples of the repeating unit represented by formula (VI) are shown below, but the repeating unit is not limited thereto.

[0206] [ka]

[0207] [ka]

[0208] Resin P may contain a repeating unit represented by the following formula (4).

[0209] [ka]

[0210] In formula (4), R 41 , R 42 and R 43 R each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. 42 may be bonded to L4 to form a ring, in which case R 42 represents an alkylene group. L4 represents a single bond or a divalent linking group; R 42 When it forms a ring with, it represents a trivalent linking group. R 44 and R45 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group. M4 represents a single bond or a divalent linking group. Q4 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group. Q4, M4 and R 44 At least two of these may be bonded to form a ring.

[0211] R 41 , R 42 and R 43 is R in the above formula (IA). 41 , R 42 and R 43 The same definition and preferred range are also the same. L4 has the same meaning as T in the above formula (AI), and the preferred range is also the same. R 44 and R 45 has the same definition as R3 in the above formula (3), and the preferred range is also the same. M4 has the same definition as M3 in the above formula (3), and the preferred range is also the same. Q4 has the same definition as Q3 in the above formula (3), and the preferred range is also the same.

[0212] Q4, M4 and R 44 Examples of the ring formed by combining at least two of the above include a ring formed by combining at least two of Q3, M3 and R3, and the preferred ranges are also the same.

[0213] Specific examples of the repeating unit represented by formula (4) are shown below, but the repeating unit is not limited thereto.

[0214] [ka]

[0215] Furthermore, the resin P may contain a repeating unit represented by the following formula (BZ).

[0216] [ka]

[0217] In formula (BZ), AR represents an aryl group. Rn represents an alkyl group, a cycloalkyl group, or an aryl group. Rn and AR may be bonded to each other to form a non-aromatic ring. R1 represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkyloxycarbonyl group.

[0218] Specific examples of the repeating unit represented by formula (BZ) are shown below, but the invention is not limited thereto.

[0219] [ka]

[0220] [ka]

[0221] The content of repeating units having an acid-decomposable group in the resin P (the total content when multiple types are contained) is preferably 5 to 80 mol %, more preferably 5 to 75 mol %, and even more preferably 10 to 65 mol %, based on all repeating units in the resin P.

[0222] Resin P may contain a repeating unit represented by the following formula (V) or (VI).

[0223] [ka]

[0224] During the ceremony, R6 and R7 each independently represent a hydrogen atom, a hydroxyl group, a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an alkoxy group or an acyloxy group, a cyano group, a nitro group, an amino group, a halogen atom, an ester group (-OCOR or -COOR: R is an alkyl group or a fluorinated alkyl group having 1 to 6 carbon atoms), or a carboxyl group. n3 represents an integer of 0 to 6. n4 represents an integer of 0 to 4. X 4 is a methylene group, an oxygen atom or a sulfur atom.

[0225] Specific examples of the repeating unit represented by formula (V) or formula (VI) are shown below, but are not limited thereto.

[0226] [ka]

[0227] The resin P may further contain a repeating unit having a silicon atom in the side chain. Examples of the repeating unit having a silicon atom in the side chain include a (meth)acrylate repeating unit having a silicon atom and a vinyl repeating unit having a silicon atom. The repeating unit having a silicon atom in the side chain is typically a repeating unit having a group having a silicon atom in the side chain, and examples of the group having a silicon atom include a trimethylsilyl group, a triethylsilyl group, a triphenylsilyl group, a tricyclohexylsilyl group, a tristrimethylsiloxysilyl group, a tristrimethylsilylsilyl group, a methylbistrimethylsilylsilyl group, a methylbistrimethylsiloxysilyl group, a dimethyltrimethylsilylsilyl group, a dimethyltrimethylsiloxysilyl group, and the following cyclic or linear polysiloxanes, or cage, ladder, or random silsesquioxane structures. In the formula, R and R 1 each independently represents a monovalent substituent. * represents a bond.

[0228] [ka]

[0229] Preferred examples of the repeating unit having the above group include a repeating unit derived from an acrylate or methacrylate compound having the above group, or a repeating unit derived from a compound having the above group and a vinyl group.

[0230] The repeating unit having a silicon atom is preferably a repeating unit having a silsesquioxane structure, which makes it possible to exhibit extremely excellent collapse performance in the formation of a pattern that is ultrafine (e.g., line width of 50 nm or less) and has a cross-sectional shape with a high aspect ratio (e.g., film thickness / line width of 3 or more).

[0231] Examples of the silsesquioxane structure include a cage silsesquioxane structure, a ladder silsesquioxane structure, and a random silsesquioxane structure. Among these, the cage silsesquioxane structure is preferred.

[0232] Here, the cage silsesquioxane structure is a silsesquioxane structure having a cage skeleton. The cage silsesquioxane structure may be a complete cage silsesquioxane structure or an incomplete cage silsesquioxane structure, but is preferably a complete cage silsesquioxane structure. The ladder-type silsesquioxane structure is a silsesquioxane structure having a ladder-like skeleton. The random silsesquioxane structure is a silsesquioxane structure whose skeleton is random.

[0233] The cage silsesquioxane structure is preferably a siloxane structure represented by the following formula (S).

[0234] [ka]

[0235] In the above formula (S), R represents a monovalent organic group. A plurality of R may be the same or different.

[0236] The organic group is not particularly limited, and specific examples include a hydroxy group, a nitro group, a carboxy group, an alkoxy group, an amino group, a mercapto group, a blocked mercapto group (for example, a mercapto group blocked (protected) with an acyl group), an acyl group, an imido group, a phosphino group, a phosphinyl group, a silyl group, a vinyl group, a hydrocarbon group which may have a heteroatom, a (meth)acrylic group-containing group, and an epoxy group-containing group.

[0237] Examples of the heteroatom of the hydrocarbon group which may have a heteroatom include an oxygen atom, a nitrogen atom, a sulfur atom, and a phosphorus atom.

[0238] Examples of the hydrocarbon group which may have a hetero atom include an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or a combination thereof.

[0239] The aliphatic hydrocarbon group may be linear, branched or cyclic. Specific examples of the aliphatic hydrocarbon group include linear or branched alkyl groups (particularly having 1 to 30 carbon atoms), linear or branched alkenyl groups (particularly having 2 to 30 carbon atoms), linear or branched alkynyl groups (particularly having 2 to 30 carbon atoms), etc.

[0240] Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups having 6 to 18 carbon atoms, such as a phenyl group, a tolyl group, a xylyl group, and a naphthyl group.

[0241] When the resin P has the repeating unit having a silicon atom in the side chain, the content thereof is preferably 1 to 30 mol %, more preferably 5 to 25 mol %, and even more preferably 5 to 20 mol %, based on the total repeating units in the resin P.

[0242] The weight average molecular weight of the resin P, as calculated as a polystyrene equivalent by GPC (gel permeation chromatography), is preferably 1,000 to 200,000, more preferably 3,000 to 20,000, and even more preferably 5,000 to 15,000. By setting the weight average molecular weight to 1,000 to 200,000, deterioration of heat resistance and dry etching resistance can be prevented, and deterioration of developability and deterioration of film formability due to an increase in viscosity can be prevented.

[0243] The dispersity (molecular weight distribution) is usually 1 to 5, preferably 1 to 3, more preferably 1.2 to 3.0, and even more preferably 1.2 to 2.0.

[0244] In the resist composition, the content of resin P is preferably from 50 to 99.9 mass % of the total solid content, and more preferably from 60 to 99.0 mass %. In the resist composition, the resin P may be used alone or in combination with a plurality of other resins.

[0245] (Photoacid generator) The resist composition preferably contains a photoacid generator. The photoacid generator is not particularly limited, and any known photoacid generator can be used. The content of the photoacid generator in the resist composition is not particularly limited, but is preferably 0.1 to 20 mass % relative to the total solid content of the resist composition, and more preferably 0.5 to 20 mass %. The photoacid generator may be used alone or in combination of two or more types. When two or more types of photoacid generators are used in combination, it is preferable that the total content is within the above range.

[0246] Examples of photoacid generators include those described in JP-A-2016-057614, JP-A-2014-219664, JP-A-2016-138219, and JP-A-2015-135379.

[0247] (Quencher) The resist composition may contain a quencher (acid diffusion controller). The quencher is not particularly limited, and any known quencher can be used. The quencher is, for example, a basic compound, and has the function of suppressing unintended decomposition of the acid-decomposable resin in the unexposed region due to acid diffused from the exposed region.

[0248] The content of the quencher in the resist composition is not particularly limited, but is preferably 0.1 to 15 mass % and more preferably 0.5 to 8 mass % based on the total solid content of the resist composition. The quencher may be used alone or in combination of two or more types. When two or more types of quenchers are used in combination, it is preferable that the total content is within the above range.

[0249] Examples of the quencher include those described in JP-A-2016-057614, JP-A-2014-219664, JP-A-2016-138219, and JP-A-2015-135379.

[0250] (Hydrophobic resin) The resist composition may contain a hydrophobic resin. The hydrophobic resin is preferably designed to be unevenly distributed on the surface of the resist film, but unlike a surfactant, it does not necessarily have to have a hydrophilic group in the molecule, and does not necessarily have to contribute to uniformly mixing polar and non-polar substances. The effects of adding a hydrophobic resin include control of the static and dynamic contact angle of the resist film surface with water, and suppression of outgassing.

[0251] From the viewpoint of uneven distribution on the membrane surface layer, the hydrophobic resin preferably has one or more of "fluorine atoms", "silicon atoms", and "CH3 partial structures contained in the side chain portion of the resin", and more preferably has two or more of them. In addition, the hydrophobic resin preferably has a hydrocarbon group having 5 or more carbon atoms. These groups may be present in the main chain of the resin or may be substituted on the side chain.

[0252] When the hydrophobic resin contains a fluorine atom and / or a silicon atom, the fluorine atom and / or the silicon atom in the hydrophobic resin may be contained in the main chain or in the side chain of the resin.

[0253] When the hydrophobic resin contains a fluorine atom, the partial structure having a fluorine atom is preferably an alkyl group having a fluorine atom, a cycloalkyl group having a fluorine atom, or an aryl group having a fluorine atom. The alkyl group having a fluorine atom (preferably having 1 to 10 carbon atoms, more preferably having 1 to 4 carbon atoms) is a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and may further have a substituent other than a fluorine atom. The cycloalkyl group having a fluorine atom is a monocyclic or polycyclic cycloalkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and may further have a substituent other than a fluorine atom. Examples of aryl groups having a fluorine atom include aryl groups such as a phenyl group and a naphthyl group in which at least one hydrogen atom is substituted with a fluorine atom, and the aryl group may further have a substituent other than a fluorine atom. Examples of the repeating unit having a fluorine atom or a silicon atom include those exemplified in paragraph

[0519] of US2012 / 0251948A1.

[0254] As described above, the hydrophobic resin also preferably contains a CH3 partial structure in the side chain portion. Here, the CH3 partial structure possessed by the side chain portion in the hydrophobic resin includes the CH3 partial structures possessed by an ethyl group, a propyl group, and the like. On the other hand, a methyl group directly bonded to the main chain of the hydrophobic resin (e.g., an α-methyl group of a repeating unit having a methacrylic acid structure) is not included in the above CH3 partial structure because it has little contribution to the surface uneven distribution of the hydrophobic resin due to the influence of the main chain.

[0255] For information regarding hydrophobic resins, please refer to the descriptions in paragraphs

[0348] to

[0415] of JP 2014-010245 A, the contents of which are incorporated herein by reference. As the hydrophobic resin, the resins described in JP-A-2011-248019, JP-A-2010-175859, and JP-A-2012-032544 can also be preferably used.

[0256] Examples of the hydrophobic resin include resins represented by the following formulas (1b) to (5b).

[0257] [ka]

[0258] When the resist composition contains a hydrophobic resin, the content of the hydrophobic resin is preferably from 0.01 to 20 mass %, and more preferably from 0.1 to 15 mass %, relative to the total solid content of the composition.

[0259] (solvent) The resist composition may contain a solvent. There are no particular limitations on the solvent, and any known solvent can be used. The solvent contained in the resist composition may be the same as or different from the organic solvent contained in the pre-wet liquid. The chemical solution supplied by this supplying method can be used as a solvent contained in a resist composition.

[0260] The content of the solvent in the resist composition is not particularly limited, but is preferably adjusted to 0.1 to 20 mass%, more preferably 0.5 to 10 mass%, of the total solid content of the resist composition. The solvent may be used alone or in combination of two or more. When two or more solvents are used in combination, the total content is preferably within the above range.

[0261] Examples of the solvent include those described in JP-A-2016-057614, JP-A-2014-219664, JP-A-2016-138219, and JP-A-2015-135379.

[0262] (Other additives) Furthermore, the resist composition may further contain, as necessary, a surfactant, an acid amplifier, a dye, a plasticizer, a photosensitizer, a light absorber, an alkali-soluble resin other than those mentioned above, and / or a dissolution inhibitor.

[0263] In order to form a resist film (resist composition film) on a substrate using the resist composition, the resist composition is prepared by dissolving each component as described above in a solvent, and then, if necessary, filtered and then applied onto a substrate (pre-wetted substrate). The pore size of the filter is preferably 0.1 microns or less, more preferably 0.05 microns or less, and even more preferably 0.03 microns or less. The filter is preferably made of polytetrafluoroethylene, polyethylene, or nylon.

[0264] The resist composition is applied onto a substrate by a suitable coating method such as spin coating, etc. The applied resist composition is then dried to form a resist film.

[0265] The drying method is a method of drying by heating. Heating can be performed by a means provided in a normal exposure developing machine or the like, or a hot plate or the like may be used. The heating temperature is preferably 80 to 180° C., more preferably 80 to 150° C., even more preferably 80 to 140° C., and particularly preferably 80 to 130° C. The heating time is preferably 30 to 1000 seconds, more preferably 60 to 800 seconds, and even more preferably 60 to 600 seconds.

[0266] The thickness of the resist film is, for example, 1 to 200 nm, and preferably 10 to 100 nm. In the resist film forming method and / or the pattern forming method, an upper layer film (topcoat film) may be formed on the upper layer of the resist film. The upper layer film can be formed using a composition for forming an upper layer film containing, for example, a hydrophobic resin, a photoacid generator, and a basic compound.

[0267] <(C) Exposure process> The exposure step is a step of exposing the resist film to light. The method for exposing the resist film is not particularly limited, and any known method can be used. The method of exposing the resist film includes, for example, a method of irradiating the resist film with actinic rays or radiation through a predetermined mask. In addition, in the case of a method of irradiating the resist film with an electron beam, irradiation may be performed without using a mask (this is also called "direct writing").

[0268] The actinic ray or radiation used for exposure is not particularly limited, but examples thereof include KrF excimer laser, ArF excimer laser, extreme ultraviolet ray (EUV: Extreme Ultra Violet), and electron beam (EB: Electron Beam), among which extreme ultraviolet ray or electron beam is preferred. Exposure may be immersion exposure.

[0269] (PEB process) The above pattern forming method preferably further includes a post-exposure bake (PEB) step of baking the exposed resist film before the exposure step and the development step. Baking promotes the reaction of the exposed area, improving the sensitivity and / or the pattern shape. The heating temperature is preferably from 80 to 150°C, more preferably from 80 to 140°C, and even more preferably from 80 to 130°C. The heating time is preferably from 30 to 1000 seconds, more preferably from 60 to 800 seconds, and further preferably from 60 to 600 seconds. Heating can be carried out by a means provided in a normal exposure / developing machine, and may also be carried out using a hot plate or the like.

[0270] <(D) Development process> The developing step is a step of developing the exposed resist film (hereinafter also referred to as "exposed resist film") with a developer. The developing method is not particularly limited, and any known developing method can be used, including, for example, a dip method, a paddle method, a spray method, and a dynamic dispense method. The pattern forming method may further include, after the developing step, a step of replacing the developer with another solvent to stop the development. The development time is not particularly limited, but is preferably 10 to 300 seconds, and more preferably 10 to 120 seconds. The temperature of the developer is preferably 0 to 50° C., and more preferably 15 to 35° C. The pattern formation method may include at least one development step, and may include multiple development steps.

[0271] (Developer) The developer is not particularly limited, and any known developer can be used. Examples of the developer include an alkaline developer and a developer containing an organic solvent (organic developer). The chemical solution supplied by this supplying method can be used as an organic solvent contained in an organic developer. In the development step, both development using a developer containing an organic solvent and development using an alkaline developer may be carried out (so-called double development may be carried out).

[0272] <(E) Rinse process> The above pattern forming method preferably further comprises a rinsing step after the developing step. The rinsing step is a step of cleaning the wafer having the developed resist film with a rinsing liquid. The cleaning method is not particularly limited, and any known cleaning method can be used, such as a rotary discharge method, a dipping method, a spray method, and the like. Among these, it is preferable to perform cleaning by the rotary discharging method, and after cleaning, rotate the wafer at a rotation speed of 2000 to 4000 rpm to remove the rinse liquid from the substrate. The rinsing time is preferably from 10 to 300 seconds, more preferably from 10 to 180 seconds, and even more preferably from 20 to 120 seconds. The temperature of the rinsing liquid is preferably from 0 to 50°C, and more preferably from 15 to 35°C.

[0273] (Rinse) When the wafer having the resist film is rinsed after development using an alkaline developer, the rinse liquid is preferably pure water, and may be pure water containing a surfactant. When the wafer with the resist film is rinsed after development using an organic developer, the rinse liquid is preferably a rinse liquid containing an organic solvent.The organic solvent contained in the rinse liquid is preferably at least one organic solvent selected from the group consisting of, for example, hydrocarbon solvents, ketone solvents, ester solvents, alcohol solvents, amide solvents, and ether solvents, more preferably at least one organic solvent selected from the group consisting of hydrocarbon solvents, ether solvents, and ketone solvents, and even more preferably at least one organic solvent selected from the group consisting of hydrocarbon solvents and ether solvents. A preferred embodiment uses the chemical solution supplied by the present supply method as the rinsing liquid.

[0274] When a developer containing an organic solvent is used in the developing step, the pattern forming method may include a rinsing step after the developing step, but may not include the rinsing step from the viewpoint of throughput (productivity). As a pattern formation method that does not have a rinsing step, for example, the description in paragraphs 0014 to 0086 of JP2015-216403A can be cited, and the above contents are incorporated into this specification.

[0275] As the rinsing liquid, MIBC (methyl isobutyl carbinol) or the same liquid as the developer (especially butyl acetate) is also preferred.

[0276] <Other processes> The pattern formation method may include other steps in addition to the steps already described, such as a cleaning step using a supercritical fluid and a heating step. The pattern forming method may also include a resist underlayer film forming step of forming a resist underlayer film on the substrate after the prewetting step using a composition for forming a resist underlayer film. The resist underlayer film forming step can be carried out in accordance with the method described in the resist film forming step (B) above. The prewetting step carried out before the resist underlayer film forming step can be carried out in accordance with the method described in the prewetting step (A) above.

[0277] (Supercritical fluid removal process) The removal step using a supercritical fluid is a step of removing the developer and / or the rinse liquid adhering to the pattern using a supercritical fluid after the development treatment and / or the rinse treatment.

[0278] (Heating process) The heating step is a step of heating the resist film to remove the solvent remaining in the pattern after the developing step, the rinsing step, or the removal step using a supercritical fluid. The heating temperature is not particularly limited, but is preferably from 40 to 160°C, more preferably from 50 to 150°C, and even more preferably from 50 to 110°C. The heating time is not particularly limited, but is preferably from 15 to 300 seconds, and more preferably from 15 to 180 seconds.

[0279] (BARC composition application process) The pattern formation method may include a step of applying a BARC (Bottom of Anti-Reflection Coating) composition onto the wafer prior to the resist film formation step (B). The BARC composition application step may further include a step of removing the BARC composition unintentionally applied to the edge portion (end portion) of the wafer.

[0280] The above-mentioned chemical solution can also be suitably used for applications other than the manufacture of semiconductor devices, and can be used as a developer for polyimide, resist for sensors, resist for lenses, etc., and as a rinse solution. The chemical liquid can also be used as a solvent for medical or cleaning purposes, and is particularly suitable for cleaning members such as containers, pipes, and substrates (e.g., wafers and glass). EXAMPLES

[0281] The present invention will be described in more detail below based on examples. The materials, amounts, ratios, processing contents, processing procedures, etc. shown in the following examples can be appropriately changed without departing from the spirit of the present invention. Therefore, the scope of the present invention should not be interpreted as being limited by the following examples. In addition, in various measurements, if the component to be measured was outside the measurable range of each measuring device (for example, if it was below the measurement limit), the component to be measured was concentrated or diluted using glassware that had been thoroughly washed with the component to be measured (chemical solution) and then measured.

[0282] As shown in Fig. 1, a supply device was prepared that included a storage tank 11, a gas pipe 12, a pipeline 13, an intermediate tank 14, a pipeline 15, a discharge section 16, and a pump 17 and a filter unit 20 disposed on the pipeline 15. In addition, a gas filter ("Wafergard III NF-750 in-line gas filter" manufactured by Entegris) was disposed on the upstream side of the storage tank 11 of the gas pipe 12.

[0283] [Raw materials] (Compressed gas) In each of the Examples and Comparative Examples, the gases shown below were used as the gases (pressure-feeding gases) used to deliver the chemical solutions. Argon (Ar) Nitrogen (N2) Helium (He)

[0284] (Organic solvent) In each of the Examples and Comparative Examples, the following organic solvents were used as the chemical solutions. Propylene glycol monomethyl ether acetate (PGMEA) Hexane 4-Methyl-2-pentanol (MIBC) 1-Hexanol Isopropanol (IPA) Propylene glycol monoethyl ether (PGME) Ethyl lactate (EL) Butyl acetate (nBA) Propylene carbonate Ethyl propionate Isoamyl acetate 2-Heptanone (MAK) Methyl ethyl ketone (MEK) Cyclohexanone Cyclopentanone

[0285] (Content of specific metal components) The content of each type of metal component (metal ion and metal particle) in the chemical solution was measured under the following conditions using ICP-MS (Agilent 8800 Triple Quadrupole ICP-MS (for semiconductor analysis, option #200)). The sample introduction system used was a quartz torch, a coaxial PFA (perfluoroalkoxyalkane) nebulizer (for self-absorption), and a platinum interface cone. The measurement parameters under cool plasma conditions were as follows: RF (Radio Frequency) Output (W): 600 Carrier gas flow rate (L / min): 0.7 Makeup gas flow rate (L / min): 1 Sampling depth (mm): 18

[0286] (moisture content) The water content in the liquid was measured using a Karl Fischer moisture meter (product name "MKC-710M", Kyoto Electronics Manufacturing Co., Ltd., Karl Fischer coulometric titration type).

[0287] (Dioctyl phthalate content) The content of dioctyl phthalate (DOP) in the chemical solution was measured under the following conditions using a gas chromatograph mass spectrometer (product name "GCMS-2020", manufactured by Shimadzu Corporation).

[0288] Capillary column: InertCap 5MS / NP 0.25mmI.D. x 30m df=0.25μm Sample introduction method: Split, 75kPa constant pressure Vaporization chamber temperature: 230℃ Column oven temperature: 80℃ (2 min) - 500℃ (13 min) Heating rate: 15℃ / min Carrier gas: Helium Septum purge flow rate: 5mL / min Split ratio: 25:1 Interface temperature: 250℃ Ion source temperature: 200℃ Measurement mode: Scan m / z=85~1000 Sample introduction volume: 1 μL

[0289] (filter) In each of the examples and comparative examples, filters made of the following materials were used. Polytetrafluoroethylene (PTFE) Polyethylene (PE) ·nylon

[0290] [Preparation of drug solution] A commercially available organic solvent was prepared and purified using the following purification apparatus to prepare chemical solutions used in each of the Examples and Comparative Examples. First, a purification device was prepared, which included a vessel, a discharge section, a pipe connecting the vessel and the discharge section, a filtration device arranged on the pipe, and a return pipe connecting the vessel and the pipe downstream of the filtration device. The filtration device was composed of a plurality of filter units arranged in series on the pipe, and did not have an adjustment valve. The filtration device included, for example, a filter unit having the following filters in order from the upstream side (primary side). Polypropylene filter (pore size: 200 nm, porous membrane) Polyfluorocarbon filter with ion exchange groups (pore size: 100 nm, fiber membrane made of a polymer of PTFE and PES (polyethylene sulfonic acid)) Nylon filter (pore size: 3 nm, fiber membrane) The return pipe also has the function of returning the organic solvent that has passed through the filtration device to the container. The liquid-contacting parts of the purification apparatus were thoroughly washed with an organic solvent, and the purified apparatus was then used to prepare the chemical solution.

[0291] After the organic solvent was filled into the container, a pump arranged on a pipe connecting the container and the filtration device was operated to send the organic solvent from the container to the filtration device. The organic solvent was filtered by a filter unit in the filtration device, and the filtered organic solvent was returned to the container through a return pipe. After repeating the filtration using the filter unit and the return of the filtered organic solvent, the filtered organic solvent was discharged from an outlet to obtain a chemical solution used in each Example and Comparative Example. In each Example and Comparative Example, the type and number of filters provided in the filtration device in the above filtration process, as well as the number of repetitions of the above filtration, were appropriately changed to prepare a chemical solution having the composition shown in Table 1.

[0292] [Example 1] A filter cartridge having a filter with a pore size of 2 nm was housed in the filter unit 20 arranged on the pipeline 15 of the supply device 10. The material (filter material) constituting the filter was polytetrafluoroethylene (PTFE). The contents of the specific metal components, water, and dioctyl phthalate in the chemical solution prepared by the above-mentioned preparation method were measured by the above-mentioned measurement methods, and the chemical solution was then stored in the storage tank 11.

[0293] Ar was sent into the gas pipe 12 as a raw material gas, and passed through a gas filter to prepare a gas for pressure feeding. The obtained gas for pressure feeding was introduced into the inside of the storage tank 11 from the top of the storage tank 11 to which the gas pipe 12 was connected. This increased the air pressure of the gas accumulated in the head space at the top of the storage tank 11, and pressurized the liquid level of the liquid chemical stored in the storage tank 11. Due to the pressure difference between the inside of the storage tank 11 and the inside of the intermediate tank 14 caused by the pressurization, the liquid chemical stored in the storage tank 11 was sent (pressurized) to the intermediate tank 14 through the pipe 13. Next, the pump 17 arranged on the pipe 15 connecting the intermediate tank 14 and the discharge part 16 was operated, and the liquid chemical stored in the intermediate tank 14 was discharged from the discharge part 16. At this time, the liquid chemical was filtered as a purification step by passing the liquid chemical through a filter unit 20 arranged in the pipe 15.

[0294] [Examples 2 to 65, Comparative Examples 1 to 5] The chemical solution was supplied and a purified chemical solution was obtained according to the method described in Example 1, except that the compressed gas, chemical solution, and filter shown in Table 1 were used. The chemical solutions obtained in each of the Examples and Comparative Examples were used to carry out the following evaluations.

[0295] [evaluation] (Evaluation of the amount of eluted impurities) For each of the supply methods in the Examples and Comparative Examples, the content of organic impurities in the chemical solution was measured by the following method, thereby measuring the amount of organic impurities dissolved into the chemical solution from the liquid-contacting parts, such as the pipelines of the supply device, in each supply method. First, a silicon oxide substrate with a diameter of 300 mm was prepared. Using a wafer surface inspection device (Surfscan SP5; manufactured by KLA Tencor), the number of organic residues with a diameter of 19 nm or more present on the substrate was counted (this was taken as the initial value). Next, the above substrate was set in a spin discharge device, and while the substrate was being rotated, the chemical solution before each supply method was discharged onto the surface of the substrate at a flow rate of 1 mL / s. The substrate was then spin-dried. Using the inspection device, the number of organic residues with a diameter of 19 nm or more present on the substrate after the chemical solution was applied was counted (this was taken as the measured value). The difference between the initial value and the measured value (measured value - initial value) was calculated to obtain the amount A1 of organic impurities derived from the chemical solution before each supply method was implemented. Based on the coordinate data calculated by the above inspection device, elemental analysis was performed by EDX (Energy dispersive X-ray spectrometry) using a defect analyzer (SEM Vision G6; manufactured by AMAT) for the defects that were newly increased after applying the chemical solution. This method confirmed that the particles measured as organic impurities did not contain metal components.

[0296] Samples for measuring the amount of leaching of each Example and Comparative Example were obtained in the same manner as the supply method of each Example and Comparative Example described above, except that a filter cartridge having a filter was not placed in the filter unit and the process of purifying the chemical solution using a filter was not performed. For each sample, the initial value and the measured value were measured according to the same method as above, and it was confirmed that the measured particles were organic impurities not containing metal components. The difference between the obtained initial value and the measured value (measured value - initial value) was calculated to obtain the amount of organic impurities A2 derived from each sample. The amount of organic impurities eluted (pieces / wafer) in the supplying method of each Example and Comparative Example was calculated using the formula (A1-A2) from the amount of organic impurities A1 derived from the chemical solution before supply and the amount of organic impurities A2 derived from the above sample. The calculated amount of eluted impurities is shown in Table 1. A smaller amount of eluted impurities means that the supplying method is one in which elution from liquid-contacting parts such as pipelines of the supplying device into the chemical solution is suppressed.

[0297] (Evaluation of filter removal performance) For each of the supply methods in the Examples and Comparative Examples, the removal performance of the filter in the purification step of filtering the chemical solution was evaluated by the following method.

[0298] For Examples 1 to 65 and Comparative Examples 1 to 5, the amount of organic impurities was measured in the same manner as in the evaluation test for the amount of eluted impurities described above, using the chemical liquid obtained by the above-mentioned supply method having a chemical liquid purification step using a filter. That is, for each of the chemical solutions of the Examples and Comparative Examples, the initial value and the measured value were measured according to the same method as described above, and it was confirmed that the measured particles were organic impurities not containing metal components. The difference between the obtained initial value and the measured value (measured value - initial value) was calculated to obtain the amount A3 of organic impurities derived from each chemical solution. The amount of organic impurities A2 derived from the above sample obtained by the supply method without a purification step, and the amount of organic impurities A3 derived from the above liquid drug obtained by the supply method with a purification step were used to calculate the impurity removal rate (%) by the purification step of each supply method using the formula ((A2-A3) / A2). The calculated impurity removal rates (filter removal rates) are shown in Table 1. A higher filter removal rate means that the purification process of the supply method has a higher organic impurity removal performance.

[0299] Table 1 shows the composition of the pumping gas, the composition of the chemical solution, and the filter used in each of the examples and comparative examples, as well as the above evaluation results. The "Type" column of "Pressure-feeding gas" in Table 1 indicates the type of pressure-feeding gas used in each Example and Comparative Example. The "Gas filter" column indicates whether or not a gas filter was present in the supply device used in each Example and Comparative Example. If the gas filter column is "present," this means that the gas was passed through a gas filter installed on the gas pipe to prepare (purify) the gas to be pumped, and if the gas filter column is "not present," this means that the gas to be pumped was not purified in the supply device, but was purified in advance to prepare the gas to be pumped shown in Table 1. The column "Moisture content (ppm)" indicates the moisture content (unit: mass ppm) contained in the pumping gas used in each Example and Comparative Example. The "Purity" column indicates the purity of the pumping gas used in each Example and Comparative Example. That is, the notations "2N", "3N", and "5N" in the "Purity" column mean that the purity of the pumping gas used was 99% by volume (2N), 99.9% by volume (3N), and 99.999% by volume (5N), respectively.

[0300] The "Organic solvent" column of "Chemical solution" in Table 1 indicates the type of organic solvent used in each Example and Comparative Example. The content of the organic solvent in the chemical solution in each Example and Comparative Example was 99.5 mass% or more. The column "Specific metal content (ppt)" indicates the total content (unit: mass ppt) of Fe components (Fe particles and Fe ions), Cr components (Cr particles and Cr ions), Ni components (Ni particles and Ni ions), and Al components (Al particles and Al ions) relative to the total mass of the chemical solution. The contents of metal components other than the specific metal components contained in the chemical solutions used in each Example were measured, and the results showed that the contents of the other metal components were 10 ppt by mass or less relative to the total mass of the chemical solutions. The column "Water content (%)" indicates the water content (unit: mass %) relative to the total mass of the chemical solution used in each Example and Comparative Example. The "DOP (ppb)" column indicates the content of dioctyl phthalate (unit: mass ppb) relative to the total mass of the chemical solution used in each Example and Comparative Example.

[0301] The "Material" column of "Filter" in Table 1 indicates the material of the filtering medium constituting the filter used in the purification process of the liquid chemical in the above-mentioned supply device, and the "Pore size" column indicates the pore size of each filter.

[0302] [Table 1]

[0303] [Table 2]

[0304] [Table 3]

[0305] As shown in Table 1, it was confirmed that the chemical solution supply methods of Examples 1 to 65 were more effective in suppressing the amount of organic impurities eluted from the pipeline into the chemical solution than the chemical solution supply methods of Comparative Examples 1 to 5. [Explanation of symbols]

[0306] 10 Feeding device 11 Reservoir 12 Gas Pipe 12a Gas inlet 13,15 Pipeline 14 Intermediate tank 16 Outlet 17 Pump 20 Filter unit 21 Gas Filter

Claims

1. A method for supplying a chemical solution containing an organic solvent through a pipe provided in a semiconductor device apparatus, comprising the steps of: a gas pressure delivery step of pressurizing the chemical solution with a gas and delivering the chemical solution; A purification step of filtering the liquid chemical sent out by the gas pressure sending step using a filter, The amount of moisture contained in the gas is 0.00001 to 1 ppm by mass based on the total mass of the gas, The water content in the chemical solution filtered in the purification step is 0.001 to 0.02% by mass based on the total mass of the chemical solution, The chemical liquid is at least one selected from the group consisting of a pre-wet liquid, a developer, and a rinse liquid; Method of supplying chemicals.

2. A method for supplying a chemical solution containing an organic solvent through a pipe provided in a semiconductor device apparatus, comprising the steps of: A gas pressure delivery step of pressurizing the chemical solution using a gas, The amount of moisture contained in the gas is 0.00001 to 1 ppm by mass based on the total mass of the gas, The chemical liquid is at least one selected from the group consisting of a pre-wet liquid and a rinse liquid; Method of supplying chemicals.

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