Level adjusting device and level adjusting method

Abstract

To provide a level adjusting device that makes it possible to confirm the inclination of an adjusted object at a position apart from the adjusted object while made compact.SOLUTION: A level adjusting device 300 comprises an analog sprit level 10 for visually confirming an inclination of an EFEM 205 to a horizontal plane, an image pickup part 30 which picks up an image of the sprit level 10, and an output part 301 which outputs the image of the sprit level 10 picked up by the image pickup part 30.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a level adjustment device and a method for controlling the level adjustment method. [Background technology]

[0002] Conventionally, a level adjustment device for setting an object to be adjusted horizontally on a floor surface has been disclosed. Patent Document 1 discloses a horizontal installation support device that supports an operator when adjusting the level of a semiconductor manufacturing device as an object to be adjusted. The horizontal installation support device of Patent Document 1 includes a level measuring instrument, a data processing unit, and a display unit. In the horizontal installation support device of Patent Document 1, a digital level measuring instrument is placed on the semiconductor manufacturing device, and the digital level measuring instrument detects the inclination of the semiconductor manufacturing device. The data of the inclination detected by the digital level measuring instrument is wirelessly transmitted to a data processing unit that is disposed at a position separated from the semiconductor manufacturing device. In addition, a plurality of legs are disposed on the underside of the semiconductor manufacturing device. The legs include adjusters, and the height of the legs is changed by rotating the adjusters by an operator. The data processing unit calculates the number of rotations of the adjusters of the legs for the semiconductor manufacturing device to be horizontal based on the data of the inclination of the semiconductor manufacturing device detected by the digital level measuring instrument. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6724622 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the digital level measuring instrument disclosed in Patent Document 1 has a relatively complex structure and is therefore large in size. Therefore, it is desirable to reduce the size of the level adjustment device.

[0005] This disclosure has been made to solve the problems described above, and one object of this disclosure is to provide a level adjustment device and a level adjustment method that enable the miniaturization of the level adjustment device. [Means for solving the problem]

[0006] A level adjustment device according to a first aspect of this disclosure includes an analog level gauge that allows the inclination of the object to be adjusted relative to a horizontal plane to be visually confirmed, an imaging unit that images the level gauge, and an output unit that outputs the image of the level gauge imaged by the imaging unit.

[0007] As described above, the level adjustment device according to the first aspect of the disclosure includes an analog level gauge that visually checks the inclination of the object to be adjusted relative to a horizontal plane. As a result, the analog level gauge has a relatively simple structure compared to a digital level gauge, and is therefore smaller than a digital level gauge. As a result, the level adjustment device can be made more compact. In addition, the level adjustment device according to the first aspect includes an imaging unit that captures the level gauge and an output unit that outputs the image of the level gauge captured by the imaging unit, so that an operator can easily check the inclination of the object to be adjusted at a position separated from the object to be adjusted by checking the image of the level gauge output to a display unit or the like. In addition, the analog level gauge is easier to handle than a digital level gauge. In addition, the analog level gauge does not need to be calibrated like the digital level gauge.

[0008] A level adjustment method according to a second aspect of this disclosure is a level adjustment method for a level adjustment device including an analog level, an imaging unit, and an output unit, the imaging unit capturing an image of the analog level, which allows the inclination of the object to be adjusted relative to a horizontal plane to be visually confirmed, and the output unit outputting an image of the level captured by the imaging unit.

[0009] In the level adjustment method according to the second aspect of the disclosure, as described above, an analog level is used in which the inclination of the object to be adjusted relative to the horizontal plane is visually confirmed. As a result, the analog level has a relatively simple structure compared to a digital level, and is therefore smaller than a digital level. As a result, a level adjustment method capable of miniaturizing a level adjustment device can be provided. In addition, the level adjustment method according to the second aspect includes an output unit that outputs an image of the level captured by the imaging unit, so that an operator can easily check the inclination of the object to be adjusted at a position separated from the object to be adjusted by checking the image of the level output to a display unit or the like. In addition, the analog level is easier to handle than a digital level. In addition, the analog level does not need to be calibrated like the digital level. Effect of the Invention

[0010] According to the present disclosure, it is possible to check the inclination of the object to be adjusted at a position separated from the object to be adjusted while achieving a miniaturization of the level adjustment device. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a diagram showing a level adjustment device according to a first embodiment. [Diagram 2] FIG. 1 is a diagram showing a configuration of a substrate processing system. [Diagram 3] FIG. 1 is a diagram showing a spirit level according to a first embodiment. [Figure 4] 1 is a block diagram of a level adjustment device according to a first embodiment. [Diagram 5] FIG. 4 is a flow chart for explaining a level adjustment method according to the first embodiment. [Figure 6] FIG. 13 is a diagram showing a level adjustment device and an EFEM according to a second embodiment. [Figure 7] FIG. 11 is a block diagram of a level adjustment device according to a second embodiment. [Figure 8] 13 is a diagram for explaining a learning model for estimating the adjustment amount of the level adjustment mechanism according to the second embodiment. FIG. [Figure 9] FIG. 13 is a diagram showing a state in which the EFEM is bent. [Figure 10] FIG. 13 shows a spirit level placed on the EFEM. [Figure 11] FIG. 11 is a diagram showing a spirit level placed at a position different from that shown in FIG. 10. [Figure 12] FIG. 11 is a flow chart for explaining a level adjustment method according to a second embodiment. [Figure 13] FIG. 13 is a diagram showing a level adjustment device and an EFEM according to a third embodiment. [Figure 14] FIG. 11 is a block diagram of a level adjustment device according to a third embodiment. [Figure 15] FIG. 11 is a flow chart for explaining a level adjustment method according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0013] [First embodiment] A level adjustment device 300 according to the first embodiment will be described. As shown in Fig. 1, the level adjustment device 300 is a device for assisting an operator in leveling an EFEM (Equipment Front End Module) 205 with respect to a floor surface 1. The EFEM 205 is an example of an object to be adjusted and a semiconductor manufacturing device.

[0014] (Substrate Processing System) The configuration of a substrate processing system 200 including an EFEM 205 will be described. As shown in FIG. 2, the substrate processing system 200 includes a substrate transfer robot 201, a load lock unit 202, a plurality of processing module units 203, a transfer chamber 204, and an EFEM 205. The substrate transfer robot 201 is a horizontal articulated robot. The load lock unit 202 is a room for loading and unloading a substrate 210. In the processing module unit 203, processing such as resist coating and etching is performed on the substrate 210. The substrate transfer robot 201 is disposed in the transfer chamber 204. A robot 205a that transfers the substrate 210 is disposed in the EFEM 205.

[0015] (Level adjustment device) The following describes the configuration of the level adjustment device 300. As shown in FIG.

[0016] The structure of the level 10 will be described. The level 10 is placed on the EFEM 205 and detects the inclination of the EFEM 205 with respect to the horizontal plane. The level 10 is an analog level 10 in which the inclination of the EFEM 205 with respect to the horizontal plane is visually confirmed. As shown in FIG. 3, in the first embodiment, the level 10 has a liquid 12 contained in a container 11 and an air bubble 13 contained in the liquid 12. When the level 10 is placed on a horizontal surface, the air bubble 13 is located in the center of the container 11. Specifically, the surface of the container 11 of the level 10 is made of a transparent material that allows the air bubble 13 inside to be seen, and the inside is a spherical surface with a very large curvature. For this reason, when the level 10 is placed on a horizontal surface, the air bubble 13 moves to the center of the highest point of the sphere. On the other hand, when the level 10 is placed on an inclined surface, the air bubble 13 moves to a position shifted from the center of the highest point of the sphere, and the air bubble 13 is located in a position shifted from the center of the container 11.

[0017] The configuration of the level adjustment mechanism 20 will be described. As shown in FIG. 1, the level adjustment mechanism 20 is, for example, an electric hydraulic jack, a manual jack, or an adjuster whose height is manually adjusted. In the electric hydraulic jack, the height of the electric hydraulic jack is adjusted by the amount of oil pumped out from the electric pump. For example, by turning on a switch, oil is pumped out from the electric pump, and the height of the electric hydraulic jack is adjusted. In the manual jack, the height of the manual jack is adjusted by the amount of oil pumped out by manually moving the handle up and down. In the adjuster, the height of the adjuster is adjusted by manually rotating a nut part screwed into a bolt part of the adjuster. In addition, a plurality of level adjustment mechanisms 20 are arranged below the EFEM 205. For example, the level adjustment mechanisms 20 are arranged at the four corners below the EFEM 205.

[0018] The configuration of the imaging unit 30 will be described. The imaging unit 30 is, for example, a two-dimensional camera. The imaging unit 30 images the spirit level 10 arranged in the EFEM 205. Specifically, the imaging unit 30 images the container 11, the liquid 12, and the air bubbles 13 of the spirit level 10. The imaging unit 30 may be disposed in a position where it can photograph the spirit level 10. For example, the imaging unit 30 is disposed on the ceiling above the spirit level 10. The imaging unit 30 may also be disposed on a support member such as a stand that supports the imaging unit 30.

[0019] The configuration of the output unit 301 will be described. The output unit 301 outputs the image of the level 10 captured by the imaging unit 30 to the display unit 302. For example, the output unit 301 is disposed in the imaging unit 30. The output unit 301 is also connected to the display unit 302 by a wiring 303, for example, and outputs the image of the level 10 captured by the imaging unit 30 to the display unit 302 via the wiring 303. The output unit 301 may also wirelessly output the image of the level 10 captured by the imaging unit 30 to the display unit 302. The image captured by the imaging unit 30 may be a still image or a video.

[0020] The configuration of the display unit 302 will be described. As shown in FIG. 4, the display unit 302 is disposed separately from the level adjustment device 300. The display unit 302 may be included in the level adjustment device 300. The display unit 302 is, for example, a liquid crystal display. The display unit 302 may be disposed near the EFEM 205, or may be disposed far from the EFEM 205.

[0021] Next, the level adjustment method of the first embodiment will be described with reference to Fig. 5. The level adjustment method is performed using a level adjustment device 300 including the above-mentioned imaging unit 30 and output unit 301. The spirit level 10 is placed on the upper surface of the EFEM 205 in advance by an operator. Also, the imaging unit 30 is placed in advance by an operator in a position where the spirit level 10 can be photographed.

[0022] In step S21, the level adjustment device 300 receives an instruction from an operator to start imaging by the imaging unit 30.

[0023] In step S22, the imaging unit 30 captures an image of the analog level 10, which allows the inclination of the EFEM 205 with respect to the horizontal plane to be visually confirmed.

[0024] In step S23, the output unit 301 outputs the image of the spirit level 10 captured by the imaging unit 30 to the display unit 302. When the imaging unit 30 captures a still image, the operations of steps S21 to S23 are repeated. When the imaging unit 30 captures a video image, the operations of steps S22 and S23 are repeated until an instruction to stop imaging by the imaging unit 30 is received by the level adjustment device 300. While visually checking the image of the spirit level 10 displayed on the display unit 302, the operator manually adjusts the level adjustment mechanism 20 so that the EFEM 205 is horizontal.

[0025] [Effects of the first embodiment] The level adjustment device 300 includes an analog level 10 that allows the inclination of the EFEM 205 relative to the horizontal plane to be visually confirmed. As a result, the analog level 10 has a relatively simple structure compared to a digital level, and is therefore smaller than a digital level. As a result, the level adjustment device 300 can be made smaller. The level adjustment device 300 also includes an imaging unit 30 that captures the level 10, and an output unit 301 that outputs the image of the level 10 captured by the imaging unit 30 to a display unit 302. Therefore, the worker can easily visually confirm the inclination of the EFEM 205 at a position separated from the EFEM 205 by checking the image of the level 10 displayed on the display unit 302. The analog level 10 does not need to be calibrated like the digital level 10. The analog level 10 is also easier to handle than a digital level.

[0026] The spirit level 10 has a liquid 12 contained in a container 11 and an air bubble 13 contained in the liquid 12, and the imaging unit 30 images the container 11, the liquid 12, and the air bubble 13 of the spirit level 10. This allows the operator to easily check the inclination of the EFEM 205 with respect to the horizontal plane based on the position of the air bubble 13 in the container 11 of the spirit level 10 displayed on the display unit 302.

[0027] The spirit level 10 is disposed in the EFEM 205. This allows the size of the level adjustment device 300 for leveling the EFEM 205 to be reduced.

[0028] [Second embodiment] A level adjustment device 100 according to the second embodiment will be described. As shown in Fig. 6, the level adjustment device 100 is a device for assisting an operator in leveling an EFEM (Equipment Front End Module) 205 with respect to a floor surface 1.

[0029] (Level adjustment device) The configuration of the level adjustment device 100 will be described. As shown in FIG. 7, the level adjustment device 100 includes a spirit level 10, a plurality of level adjustment mechanisms 20, an imaging unit 30, a control unit 40, and a display unit 50. The level adjustment device 100 is a device including an imaging unit 30, a display unit 50, and a control unit 40, such as a tablet terminal. The display unit 50 is an example of an adjustment amount display unit. The display unit 50 may also function as the display unit 302 on which the image of the spirit level 10 captured by the imaging unit 30 of the first embodiment is displayed, or a display unit 302 on which the image of the spirit level 10 captured by the imaging unit 30 is displayed may be disposed separately from the display unit 50.

[0030] The configuration of the imaging unit 30 will be described. In the second embodiment, an image captured by the imaging unit 30 is transmitted to the control unit 40. The imaging unit 30 also captures an image of the level 10 as well as the EFEM 205. The control unit 40 then recognizes, for example, by image processing, based on the image captured by the imaging unit 30, the level 10, the position of the bubble 13 in the level 10, the EFEM 205, and the position of the FEM 205 in which the level 10 is located.

[0031] The configuration of the control unit 40 will be described. As shown in FIG. 7, the control unit 40 includes, for example, a CPU (Central Processing Unit). The control unit 40 also includes memories such as RAM and ROM, and a storage unit such as a hard disk. The control unit 40 also includes a machine learning unit 41. The machine learning unit 41 generates a trained model 43 by machine learning based on input learning data 42. The machine learning unit 41 also generates the trained model 43 by using, for example, deep learning.

[0032] A method for generating the trained model 43 will be described in detail. As shown in FIG. 8, in the second embodiment, the trained model 43 is generated by machine learning an image of the level 10 arranged in the EFEM 205. The trained model 43 is also generated by machine learning an image of the level 10 when the adjustment amount of at least one of the multiple level adjustment mechanisms 20 is changed. Specifically, the image of the level 10 arranged in the EFEM 205 is captured by the imaging unit 30 while changing the adjustment amount of the multiple level adjustment mechanisms 20 in various ways. Each captured image is linked to the adjustment amount of the level adjustment mechanism 20 at the time of capturing the image. For example, when four level adjustment mechanisms 20 are arranged in the EFEM 205, most of the weight of the EFEM 205 is supported by three level adjustment mechanisms 20, and there may be a state in which almost no weight is applied to one level adjustment mechanism 20. At this time, the change in the level of the EFEM 205 is not the same when one of the three level adjustment mechanisms 20 that support most of the weight of the EFEM 205 is changed as when one level adjustment mechanism 20 on which no weight is applied is changed. For this reason, it is necessary to learn images of the spirit level 10 when the adjustment amount of at least one of the multiple level adjustment mechanisms 20 is changed. Then, multiple images are input to the machine learning unit 41 as learning data 42 when the adjustment amounts of the multiple level adjustment mechanisms 20 are variously changed. The machine learning unit 41 generates a trained model 43 by machine learning the learning data 42. In the trained model 43 generated in this way, it is learned where the air bubble 13 of the spirit level 10 placed on the EFEM 205 is located in the spirit level 10 with respect to the adjustment amount of the level adjustment mechanism 20.

[0033] As shown in FIG. 9, in the second embodiment, the trained model 43 is generated by machine learning an image of the level 10 placed on the EFEM 205 in a bent state. That is, the image of the level 10 placed on the EFEM 205 in a bent state is captured by the imaging unit 30 while changing the adjustment amount of the multiple level adjustment mechanisms 20 in various ways. That is, by changing the adjustment amount of the level adjustment mechanisms 20, the weight balance of the EFEM 205 changes, and the bent state of the EFEM 205 changes. Therefore, the adjustment amount of the level adjustment mechanisms 20 and the inclination of the level 10 do not have a simple proportional relationship. Therefore, it is necessary to train the EFEM 205 in a bent state.

[0034] The operation of the control unit 40 for acquiring the adjustment amount of the level adjustment mechanism 20 will be described. As shown in FIG. 8, in the second embodiment, the control unit 40 acquires the adjustment amount of each of the multiple level adjustment mechanisms 20 based on the image of the level 10 by using the trained model 43 generated by machine learning. Specifically, the control unit 40 acquires the adjustment amount of each of the multiple level adjustment mechanisms 20 based on the image of the level 10 captured by the imaging unit 30 by using the trained model 43. For example, as shown in FIG. 10 and FIG. 11, the level 10 arranged on the upper surface of the EFEM 205 is imaged by the imaging unit 30. In addition, the imaging unit 30 captures not only the level 10 but also the EFEM 205. Then, the captured image is input to the trained model 43. The trained model 43 estimates the adjustment amount of each of the multiple level adjustment mechanisms 20 for leveling the EFEM 205 based on the input image. The adjustment amount of the level adjustment mechanism 20 is estimated for each of the multiple level adjustment mechanisms 20. The control unit 40 acquires the adjustment amount of the level adjustment mechanism 20 from the trained model 43. If the level adjustment mechanism 20 is an electric hydraulic jack, the time or number of times that a switch for adjusting the amount of oil pumped from the electric pump is turned on is acquired as the adjustment amount. If the level adjustment mechanism 20 is a manual jack, the number of times that the handle is moved up and down is acquired as the adjustment amount. If the level adjustment mechanism 20 is an adjuster, the number of rotations of the nut part of the adjuster is acquired as the adjustment amount.

[0035] The configuration of the display unit 50 will be described. As shown in FIG. 6, the display unit 50 is, for example, a liquid crystal display. The display unit 50 may be attached to the housing of the level adjustment device 100, or may be disposed separately from the housing of the level adjustment device 100. In the second embodiment, the display unit 50 displays the adjustment amount of each of the multiple level adjustment mechanisms 20 acquired by the control unit 40. That is, the control unit 40 executes a process of displaying the acquired adjustment amount of each of the multiple level adjustment mechanisms 20 on the display unit 50. Then, the operator adjusts the multiple level adjustment mechanisms 20 based on the adjustment amount of each of the multiple level adjustment mechanisms 20 displayed on the display unit 50.

[0036] Next, a level adjustment method according to the second embodiment will be described with reference to Fig. 12. The level adjustment method is a method for leveling the EFEM 205 by adjusting a plurality of level adjustment mechanisms 20. In the second embodiment, the adjustment of the level adjustment mechanisms 20 is performed by an operator.

[0037] In step S1, a trained model 43 is generated. In the second embodiment, the trained model 43 is generated by machine learning data related to the inclination of the EFEM 205 detected by the level 10 in a state in which the level 10 is placed on the EFEM 205. Specifically, training data 42 for generating the trained model 43 is prepared. The training data 42 is a plurality of images capturing the level 10 and the EFEM 205, captured by the imaging unit 30 when the adjustment amounts of the plurality of level adjustment mechanisms 20 are changed in various ways. Then, the training data 42 is input to the machine learning unit 41 by the operator, and the machine learning unit 41 generates the trained model 43.

[0038] A case where the level adjustment mechanism 20 is floating above the floor surface 1 will be described. When the level adjustment mechanisms 20 are arranged at the four corners of the EFEM 205, the EFEM 205 may be leveled by the level adjustment mechanisms 20 arranged at three corners, and the level adjustment mechanism 20 arranged at the remaining corner may be floating above the floor surface 1. In this case, the trained model 43 also learns the adjustment amount of the level adjustment mechanism 20 in a state where the EFEM 205 is leveled by the level adjustment mechanisms 20 arranged at three corners, and the level adjustment mechanism 20 arranged at the remaining corner is floating above the floor surface 1. This prevents the trained model 43 from estimating the adjustment amount of the level adjustment mechanism 20 such that the EFEM 205 is leveled by the level adjustment mechanisms 20 arranged at three corners, and the level adjustment mechanism 20 arranged at the remaining corner is floating above the floor surface 1.

[0039] In step S2, the control unit 40 acquires data regarding the inclination of the EFEM 205 with respect to the horizontal plane from the level 10 placed on the EFEM 205. Specifically, an operator places the level 10 on the EFEM 205. Then, the imaging unit 30 captures an image of the level 10 together with the EFEM 205. The control unit 40 acquires an image of the level 10 and the EFEM 205 from the imaging unit 30 as data regarding the inclination of the EFEM 205 with respect to the horizontal plane.

[0040] In step S3, the control unit 40 uses the trained model 43 generated by machine learning to acquire the adjustment amount of each of the multiple level adjustment mechanisms 20 based on the data related to the tilt of the EFEM 205 detected by the level 10. Specifically, the control unit 40 inputs the images of the level 10 and the EFEM 205 acquired in step S2 to the trained model 43. Then, the trained model 43 estimates the adjustment amount of each of the multiple level adjustment mechanisms 20 for leveling the EFEM 205 based on the input images, and the control unit 40 acquires the estimated adjustment amount of each of the multiple level adjustment mechanisms 20.

[0041] In step S4, the control unit 40 executes a process of displaying the acquired adjustment amounts of each of the multiple level adjustment mechanisms 20 on the display unit 50. The worker adjusts the multiple level adjustment mechanisms 20 based on the adjustment amounts of each of the multiple level adjustment mechanisms 20 displayed on the display unit 50. If the EFEM 205 is not level even after adjusting the multiple level adjustment mechanisms 20, the operations from steps S2 to S4 are repeated. For example, the worker operates the level adjustment device 100 so as to repeat the operations from steps S2 to S4 while checking the spirit level 10.

[0042] [Effects of the second embodiment] A plurality of level adjustment mechanisms 20 are disposed below the EFEM 205. The level adjustment device 100 includes a control unit 40 that acquires the adjustment amount of each of the plurality of level adjustment mechanisms 20 based on an image of the spirit level 10 disposed on the EFEM 205 captured by the imaging unit 30. The display unit 50 displays the adjustment amount of each of the plurality of level adjustment mechanisms 20 acquired by the control unit 40. This allows an operator to easily adjust the plurality of level adjustment mechanisms 20 based on the adjustment amount of each of the plurality of level adjustment mechanisms 20 displayed on the display unit 50. Furthermore, unlike a case in which an operator visually checks the spirit level 10 and another operator adjusts the plurality of level adjustment mechanisms 20, the EFEM 205 can be leveled by one operator.

[0043] The control unit 40 uses the trained model 43 generated by machine learning to acquire the adjustment amount of each of the multiple level adjustment mechanisms 20 based on the image of the spirit level 10 captured by the imaging unit 30. In this way, machine learning can learn the actual state of the EFEM 205, such as a state in which the EFEM 205 is bent, in association with the adjustment amounts of the multiple level adjustment mechanisms 20, and therefore, by using the trained model 43 trained in this way, it is possible to accurately acquire the adjustment amount for horizontally disposing the EFEM 205, taking into account the actual state of the EFEM 205.

[0044] The trained model 43 is generated by machine learning an image of the level 10 placed in the EFEM 205. As a result, an image of the level 10 in a state in which the level 10 is actually placed in the EFEM 205 is trained, so that the trained model 43 is a trained model 43 that takes into account the actual state of the EFEM 205. In other words, by simply placing the level 10 actually in the EFEM 205, it is possible to easily generate a trained model 43 that takes into account the actual state of the EFEM 205.

[0045] The trained model 43 is generated by machine learning an image of the spirit level 10 placed on the EFEM 205 in a deflected state. This makes it possible to generate a trained model 43 that takes into account changes in the deflection of the EFEM 205 caused by changes in the adjustment amount of the level adjustment mechanism 20.

[0046] The trained model 43 is generated by machine learning images of the level 10 captured by the imaging unit 30 when the adjustment amount of at least one of the multiple level adjustment mechanisms 20 is changed. As a result, images of the level 10 when the level adjustment mechanisms 20 are adjusted when the weights of the EFEM 205 applied to the multiple level adjustment mechanisms 20 are not uniform are also trained, so that the adjustment amount of the EFEM 205 can be learned with high accuracy.

[0047] [Third embodiment] A level adjustment device 110 according to the third embodiment will be described. In the third embodiment, an electric hydraulic jack 111 serving as a level adjustment mechanism is controlled by a control unit 112.

[0048] The configuration of a level adjustment device 110 according to the third embodiment will be described. As shown in Fig. 13, in the level adjustment device 110, a plurality of electric hydraulic jacks 111 are arranged as a level adjustment mechanism. Also, as shown in Fig. 14, an output unit 301 of the level adjustment device 110 outputs an image of the spirit level 10 captured by the imaging unit 30 to a display unit 302 via a wiring 303. The display unit 302 may be included in the level adjustment device 110.

[0049] Next, a level adjustment method according to the third embodiment will be described with reference to Fig. 15. Note that the operations of steps S1, S2, and S3 are similar to the operations of S1, S2, and S3 in the second embodiment.

[0050] In step S14, the control unit 40 operates the multiple electric hydraulic jacks 111 based on the acquired adjustment amounts of each of the multiple electric hydraulic jacks 111, thereby adjusting the inclination of the EFEM 205 so that the EFEM 205 is aligned with the horizontal plane.

[0051] In step S15, the control unit 40 judges whether or not the EFEM 205 is level. Specifically, after adjusting the multiple electric hydraulic jacks 111, the control unit 40 causes the imaging unit 30 to capture an image of the spirit level 10, and judges whether or not the EFEM 205 is level based on the image captured by the imaging unit 30. If the answer is no in step S15, the process returns to step S3. If the answer is yes in step S15, the level adjustment operation by the control unit 40 ends.

[0052] [Effects of the third embodiment] The control unit 112 adjusts the inclination of the EFEM 205 so that the EFEM 205 is aligned with the horizontal plane by operating the multiple electric hydraulic jacks 111 based on the acquired adjustment amounts of each of the multiple electric hydraulic jacks 111. This eliminates the need for an operator to manually adjust the multiple electric hydraulic jacks 111, thereby reducing the operator's workload.

[0053] [Variations] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0054] In the above first, second and third embodiments, an example has been shown in which the analog level 10 having the container 11, the liquid 12 and the air bubble 13 is applied to the present disclosure, but the present disclosure is not limited thereto. For example, an analog level 10 other than the analog level 10 having the container 11, the liquid 12 and the air bubble 13 may be applied to the present disclosure.

[0055] In the above first, second and third embodiments, an example in which the EFEM 205 is applied as the object to be adjusted of the present disclosure has been described, but the present disclosure is not limited thereto. The present disclosure may be applied to an object to be adjusted other than the EFEM 205. For example, the level adjustment device 300 may be a device for assisting an operator in leveling the transport chamber 204 with respect to the floor surface 1.

[0056] In the above-described second embodiment, an example has been described in which the trained model 43 is generated based on an image of one level gauge 10 arranged in the EFEM 205, but the present disclosure is not limited to this. For example, a plurality of level gauges 10 may be arranged in the EFEM 205, and the trained model 43 may be generated based on images of the plurality of level gauges 10. The same applies to the third embodiment.

[0057] In the above-described second embodiment, an example has been described in which the level adjustment device 100 includes the machine learning unit 41, but the present disclosure is not limited to this. For example, the trained model 43 may be generated by a machine learning unit 41 arranged in an external device other than the level adjustment device 100. The same applies to the third embodiment.

[0058] In the second and third embodiments described above, an example was shown in which an image of the spirit level 10 placed on the EFEM 205 in a bent state was learned, but the present disclosure is not limited to this. For example, if the EFEM 205 is of a size that does not bend, it is not necessary to learn an image of the spirit level 10 placed on the EFEM 205 in a bent state.

[0059] In the above second embodiment, an example has been shown in which the control unit 40 acquires the adjustment amount of each of the multiple level adjustment mechanisms 20 based on the image of the spirit level 10 by using the trained model 43 generated by machine learning, but the present disclosure is not limited to this. For example, the control unit 40 may acquire the adjustment amount of each of the multiple level adjustment mechanisms 20 by image processing of the image of the spirit level 10 without using the trained model 43.

[0060] In the above first and second embodiments, the level adjustment mechanisms 20 are disposed at the four corners of the lower part of the EFEM 205, respectively, but the present disclosure is not limited to this. For example, the level adjustment mechanisms 20 may be disposed at the center of the lower part of the EFEM 205 in addition to the four corners. The number of level adjustment mechanisms 20 may be one, two, or three. The same applies to the third embodiment.

[0061] In the above first embodiment, an example has been described in which the output unit 301 outputs the image of the level 10 captured by the imaging unit 30 to the display unit 302, but the present disclosure is not limited to this. For example, the output unit 301 may output the image of the level 10 to a device other than the display unit 302.

[0062] Furthermore, when the electric hydraulic jacks 111 are controlled by the control unit 112 as in the third embodiment, it is possible to determine whether or not the electric hydraulic jacks 111 are floating above the floor surface 1. Specifically, when the electric hydraulic jacks 111 are arranged at the four corners below the EFEM 205, the EFEM 205 can be made horizontal by three of the electric hydraulic jacks 111 arranged at the four corners. In this case, the remaining electric hydraulic jack 111 may be floating above the floor surface 1. Therefore, with the EFEM 205 being horizontal, the control unit 40 increases the height of the electric hydraulic jacks 111 arranged at the four corners one by one, and the imaging unit 30 images the level 10. When the control unit 40 determines, based on the image captured by the imaging unit 30, that the horizontal state of the EFEM 205 is maintained even if the height of the electric hydraulic jack 111 is increased, the control unit 40 can determine that the electric hydraulic jack 111 is floating above the floor surface 1. This makes it possible to prevent the EFEM 205 from being placed in an unstable state in which the electric hydraulic jack 111 placed at one corner is floating above the floor surface 1.

[0063] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, Application Specific Integrated Circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0064] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0065] (Aspect 1) An analog level that visually checks the inclination of the object to be adjusted relative to a horizontal plane; An imaging unit that images the level; and an output unit that outputs an image of the spirit level captured by the imaging unit.

[0066] (Aspect 2) The level includes a liquid contained in a container and an air bubble contained in the liquid, 2. The level adjustment device according to claim 1, wherein the imaging unit images the container, the liquid, and the air bubbles in the level.

[0067] (Aspect 3) A level adjustment mechanism is disposed on the object to be adjusted, a control unit that acquires an adjustment amount of the level adjustment mechanism based on an image of the spirit level placed on the object to be adjusted captured by the imaging unit.

[0068] (Aspect 4) 4. The level adjustment device according to aspect 3, further comprising an adjustment amount display unit that displays the adjustment amount of the level adjustment mechanism acquired by the control unit.

[0069] (Aspect 5) A level adjustment device as described in aspect 3 or aspect 4, wherein the control unit acquires the adjustment amount of the level adjustment mechanism by using a trained model that inputs an image of the spirit level placed on the object to be adjusted captured by the imaging unit and outputs the adjustment amount of the level adjustment mechanism.

[0070] (Aspect 6) The level adjustment device of claim 5, wherein the trained model is generated by machine learning an image of the spirit level placed on the object to be adjusted in a bent state.

[0071] (Aspect 7) The level adjustment mechanism is provided in plurality, A level adjustment device as described in aspect 5 or aspect 6, wherein the trained model is generated by machine learning of an image of the spirit level captured by the imaging unit when the adjustment amount of at least one of the multiple level adjustment mechanisms is changed.

[0072] (Aspect 8) The plurality of level adjustment mechanisms are disposed at four corners below the object to be adjusted, The control unit of the level adjustment device of claim 7 identifies a level adjustment mechanism that is floating above the floor surface based on an image of the spirit level captured by the imaging unit when the adjustment amount of the level adjustment mechanism located in one corner is changed.

[0073] (Aspect 9) The level adjustment mechanism includes an electric hydraulic jack, A level adjustment device as described in any one of aspects 3 to 8, wherein the control unit adjusts the inclination of the adjusted object so that the adjusted object is aligned with a horizontal plane by operating the electric hydraulic jack based on the adjustment amount of each of the acquired level adjustment mechanisms.

[0074] (Aspect 10) The level adjustment device according to any one of aspects 1 to 9, wherein the object to be adjusted includes a semiconductor manufacturing device.

[0075] (Aspect 11) The level adjustment device according to any one of aspects 1 to 10, wherein the output unit outputs the image of the level captured by the imaging unit to a display unit.

[0076] (Aspect 12) A level adjustment method for a level adjustment device including an analog level, an imaging unit, and an output unit, comprising: The imaging unit images the analog level gauge, which allows the inclination of the object to be adjusted relative to a horizontal plane to be visually confirmed; The output unit outputs an image of the spirit level captured by the imaging unit. [Explanation of symbols]

[0077] 1. Floor 10 Level 11 Container 12 liquid 13 Bubbles 20 Level adjustment mechanism 30 Imaging unit 40 Control section 43 Pre-trained models 50 Display section (adjustment amount display section) 100, 110, 300 leveling device 111 Electric hydraulic jack 205 EFEM (object to be adjusted, semiconductor manufacturing equipment) 301 Output section 302 Display section

Claims

1. An analog level that visually checks the inclination of the object to be adjusted relative to a horizontal plane; An imaging unit that images the level; and an output unit that outputs an image of the spirit level captured by the imaging unit.

2. The level includes a liquid contained in a container and an air bubble contained in the liquid, The level adjustment device according to claim 1 , wherein the imaging section images the container, the liquid, and the air bubble in the level.

3. A level adjustment mechanism is disposed on the object to be adjusted, 2. The level adjustment device according to claim 1, further comprising: a control unit that acquires an adjustment amount of the level adjustment mechanism based on an image of the spirit level placed on the object to be adjusted captured by the imaging unit.

4. The level adjustment device according to claim 3 , further comprising an adjustment amount display unit that displays the adjustment amount of the level adjustment mechanism acquired by the control unit.

5. The level adjustment device described in claim 3, wherein the control unit acquires the adjustment amount of the level adjustment mechanism by using a trained model that inputs an image of the spirit level placed on the object to be adjusted captured by the imaging unit and outputs the adjustment amount of the level adjustment mechanism.

6. The level adjustment device according to claim 5 , wherein the trained model is generated by machine learning an image of the spirit level placed on the object to be adjusted in a bent state.

7. The level adjustment mechanism is provided in plurality, The level adjustment device according to claim 5, wherein the trained model is generated by machine learning images of the spirit level captured by the imaging unit when an adjustment amount of at least one of the plurality of level adjustment mechanisms is changed.

8. the plurality of level adjustment mechanisms are disposed at four corners below the object to be adjusted, The level adjustment device according to claim 7, wherein the control unit identifies a level adjustment mechanism floating above a floor surface based on an image of the spirit level captured by the imaging unit when an adjustment amount of the level adjustment mechanism arranged at one corner is changed.

9. The level adjustment mechanism includes an electric hydraulic jack, The level adjustment device according to claim 3, wherein the control unit adjusts the inclination of the object to be adjusted so that the object is aligned with a horizontal plane by operating the electric hydraulic jack based on the acquired adjustment amount of each of the level adjustment mechanisms.

10. The level adjustment device according to claim 1 , wherein the object to be adjusted includes a semiconductor manufacturing device.

11. The level adjustment device according to claim 1 , wherein the output section outputs the image of the level captured by the imaging section to a display section.

12. A level adjustment method for a level adjustment device including an analog level, an imaging unit, and an output unit, comprising: The imaging unit images the analog level gauge, which allows the inclination of the object to be adjusted relative to a horizontal plane to be visually confirmed; The output unit outputs an image of the spirit level captured by the imaging unit.

Images