Clean room system, clean room controller, and clean room control method

Abstract

To suitably control a flow rate of air to be discharged, according to a condition in a clean room.SOLUTION: A clean room system 100 is provided with: an air flow rate calculation part 140 calculating air flow rate data D34, D36 so that a flow rate of air discharged from a fan filter unit 240 becomes larger as acceleration occurring in a worker 250 in a clean room 200 becomes larger, on the basis of video data D12, D14; and an air flow rate control part 150 controlling the fan filter unit 240 on the basis of the air flow rate data D34, D36.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a clean room system, a control device for a clean room, and a method for controlling a clean room. [Background technology]

[0002] In the manufacturing process of semiconductor devices, pharmaceuticals, etc., clean rooms equipped with fan filter units (hereinafter referred to as FFUs) are used. Here, when a person enters the clean room, the dust concentration in the clean room increases, so measures are taken. As an example, paragraph 0031 of the specification of the following Patent Document 1 states that "... if the clean room 200 is, for example, a research facility and an operator is in the room 190 during working hours, when the human presence sensor 130 detects the operator in the room 190 (step 300), in order to maintain the cleanliness in the room 190, the control device 180 commands all the FFUs 10a to 10n to temporarily operate the fans of all the FFUs 10a to 10n at the maximum rotation speed (100% rotation speed) (step 310)." [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-149787 A Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, when a person enters the clean room or when another event occurs that increases the dust concentration in the clean room, the dust concentration in the clean room is considered to vary depending on the content of the event. As described above, Patent Document 1 describes that "the fans of all FFUs 10a to 10n are once operated at the maximum rotation speed (100% rotation speed)," but depending on the content of the event, it is considered that it is not necessarily necessary to operate at that speed. Therefore, if a uniform control is performed regardless of the content of the event, as in Patent Document 1, a problem occurs in that energy loss becomes large. The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide a clean room system, a control device for a clean room, and a control method for a clean room that can appropriately control the amount of air released according to the conditions inside the clean room. [Means for solving the problem]

[0005] In order to solve the above problems, the clean room system of the present invention is characterized in that it comprises a fan filter unit that is installed in a clean room and releases purified air into the clean room; an imaging unit that captures images of the inside of the clean room and outputs video data; an air volume calculation unit that calculates air volume data based on the video data so that the amount of air released by the fan filter unit increases as the acceleration acting on a worker in the clean room increases; and an air volume control unit that controls the fan filter unit based on the air volume data. Effect of the Invention

[0006] According to the present invention, the amount of air discharged can be appropriately controlled according to the conditions inside the clean room. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a diagram showing an example of a floor layout of a clean room applied to the first embodiment. [Diagram 2] FIG. 1 is a block diagram of a clean room system 100 according to a first embodiment. [Diagram 3] FIG. 13 is a diagram showing an example of a table of dust generation amount by a worker. [Figure 4] FIG. 2 is a schematic side view of a main part of a clean room. [Diagram 5] 4 is a flowchart of an FFU control routine executed in the control device. [Figure 6] FIG. 1 is a block diagram of a computer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] [First embodiment] Configuration of the First Embodiment FIG. 1 is a diagram showing an example of a floor layout of a clean room 200 applied to the first embodiment. 1, a clean room 200 is assumed to have a plurality of areas 210-1 to 210-12 ("12" in the illustrated example). These areas correspond to the imaging range of an imaging unit 230, which will be described later, and do not actually divide the clean room 200. In the illustrated example, each of the areas 210-1 to 210-n has a rectangular shape of the same size. In each area, one manufacturing apparatus 220-1 to 220-12 (apparatus) for manufacturing semiconductors or the like is disposed.

[0009] In the following description, multiple components or information having the same or similar functions or meanings may be expressed by adding "-" and alphanumeric characters to the same reference numeral, for example, "manufacturing equipment 220-1, 220-2". However, when there is no need to distinguish between multiple components, the "-" and alphanumeric characters may be omitted, for example, "manufacturing equipment 220". One or more workers 250 enter the clean room 200 to perform work as necessary. Instead of the manufacturing equipment 220, an inspection device for semiconductors or the like may be placed.

[0010] Imaging units 230-1 to 230-12 are disposed above the manufacturing devices 220-1 to 220-12 to capture images of the corresponding areas 210 and their surrounding areas. Each imaging unit 230 includes a camera (not shown) that captures two-dimensional video data, and a three-dimensional sensor (not shown) such as a LiDAR (Light Detection and Ranging) that acquires three-dimensional point cloud data.

[0011] Here, the three-dimensional point cloud data is a set of three-dimensional coordinates of a plurality of points on the surfaces of objects in the area 210, such as the manufacturing equipment 220 and workers, and is data that is updated at a predetermined frame period (preferably the same frame period as the two-dimensional video data). In each area 210, four FFUs 240 (fan filter units) are arranged adjacent to the imaging unit 230 in the front-rear and left-right directions.

[0012] Although not shown, the FFU 240 includes a filter unit, a fan, and a motor that rotates the fan. The FFU 240 is installed in a ceiling chamber 270 (see FIG. 4) provided on the ceiling of the clean room 200. When the motor in the FFU 240 rotates the fan, the air in the ceiling chamber 270 is purified by the filter unit and released into the clean room 200.

[0013] FIG. 2 is a block diagram of a clean room system 100 according to the first embodiment. 2, the clean room system 100 includes a control device 120 (clean room control device), a database unit 170, and the clean room 200 shown in Fig. 1. The control device 120 includes an image / motion analysis unit 130, an air volume calculation unit 140, and an air volume control unit 150.

[0014] Moreover, air volume calculation section 140 includes dust volume calculation section 142, target area air volume calculation section 144, and surrounding area air volume calculation section 146. The operations of these sections will be described later. Moreover, the database unit 170 stores a worker dust amount table 172, a manufacturing equipment required environment table 174, and airflow model data 176.

[0015] Each of the above-mentioned manufacturing apparatuses 220 is generally housed in a casing 222 having an air filter or the like, which prevents surrounding dust from entering the manufacturing apparatus 220. However, there are cases where the casing 222 is removed, such as when the manufacturing apparatus 220 is undergoing maintenance. In such cases, it may become necessary to increase the amount of air discharged from the FFU 240 to lower the dust concentration around the manufacturing apparatus 220. The manufacturing apparatus required environment table 174 is a table that specifies the allowable dust concentration of each manufacturing apparatus 220 when the casing 222 is removed, that is, the allowable surrounding dust concentration.

[0016] The airflow model data 176 is data that models the internal structure of the clean room 200 including the manufacturing equipment 220. By applying the air volume emitted from each FFU 240 to this airflow model data 176, it is possible to predict the state of the airflow in each part of the clean room 200, i.e., the wind speed and wind direction.

[0017] FIG. 3 is a diagram showing an example of the worker dust generation amount table 172. As shown in FIG. The worker dust amount table 172 is a table that specifies a standard dust amount corresponding to the "posture / motion state" of the worker 250 and the "clothing" of the worker 250. The standard dust amount indicates an estimated value of the amount of dust having a particle size of "0.3 μm" or more generated per minute by one worker 250.

[0018] Among the "postures and motion states," "standing" and "sitting" indicate that the worker 250 is stationary in that posture. "Postures and motion states" other than "standing" and "sitting" are states in which the worker 250 is repeating a certain motion. For example, "bending the upper body forward" refers to a state in which the worker 250 is repeating "bending the upper body forward" and "standing up." In addition, three types of "clothing" for the worker 250 are assumed: "ordinary work clothes," "white coat-type clean clothing," and "overall-type clean clothing."

[0019] As described above, "standing" and "sitting" indicate that the worker 250 is stationary in those postures, so it can be considered that the absolute acceleration (absolute value of acceleration) occurring in the body of the worker 250 is always close to "0." In the other "postures / motion states," the worker 250 is repeating a certain motion, so the absolute acceleration fluctuates with significant amplitude.

[0020] In this embodiment, a typical peak value of absolute acceleration is assumed for each "posture-motion state." This is called the "reference peak value αs" (not shown). The reference peak value αs differs for each type of "posture-motion state." The reference amount of dust generation shown in the worker dust amount table 172 is an estimated value of the amount of dust generation predicted when the peak value of the absolute acceleration appearing in the worker 250 is the reference peak value αs.

[0021] FIG. 4 is a schematic side view of a main part of the clean room 200. As shown in FIG. An area 210 where at least one worker 250 is present, or an area 210 where a "casing-free" manufacturing device 220 is present, is referred to as a "target area." A target area where at least one worker 250 is present is likely to have a higher dust concentration than other areas. Also, a target area where a "casing-free" manufacturing device 220 is present needs to have a lower dust concentration than other areas. Also, areas 210 other than the target area that are adjacent to the target area in the front, back, left, right, and diagonal directions are referred to as "surrounding areas." Also, areas 210 other than the target area and surrounding areas are referred to as "general areas."

[0022] 4, peripheral areas 210-b and 210-c are arranged on the left and right of target area 210-a. Gratings 260 are arranged over almost the entire floor surface of the clean room 200. A ceiling chamber 270 is provided above the clean room 200, and the FFU 240 is provided in the ceiling chamber 270.

[0023] Air discharged downward from the FFU 240 ideally flows vertically and passes through the grating 260. The air that passes through the grating 260 returns to the ceiling chamber 270 via a ventilation path (not shown). Here, if the air volume of the FFU 240 is increased only in the target area 210-a, an airflow is generated from the target area 210-a toward the peripheral areas 210-b and 210-c, and dust in the target area 210-a is diffused to the peripheral areas 210-b and 210-c. For this reason, it is preferable to control the airflow in the peripheral areas 210-b and 210-c and suppress the diffusion of dust to the peripheral areas.

[0024] Returning to Figure 2, the image / motion analysis unit 130 analyzes the state of objects (manufacturing equipment 220, workers 250, etc.) belonging to each area 210 based on the two-dimensional video data D12 (video data) and the three-dimensional point cloud data D14 (video data) supplied from the imaging unit 230.

[0025] More specifically, the image and motion analysis unit 130 detects the positions and number of workers 250, and analyzes the posture, motion state, clothing, speed and absolute acceleration of each body part of each worker 250. Such a history of analysis results regarding the workers 250 is called worker status data D22 (worker status data regarding the worker). Furthermore, the image and motion analysis unit 130 determines the presence or absence of a casing 222 for each manufacturing device 220, and outputs the determination result as casing status data D24.

[0026] The dust amount calculation unit 142 of the air volume operation unit 140 calculates estimated dust amount data D32, which is an estimation result of the dust amount, based on the worker status data D22, for the area 210 in which at least one worker 250 is present.

[0027] That is, since the worker status data D22 includes the "posture / motion state" and "clothing" of each worker 250, the dust amount calculation unit 142 acquires the "reference amount of dust generation" based on the worker dust amount table 172 (see FIG. 3). As described above, the reference amount of dust generation is an estimate of the amount of dust generation predicted when the peak value of the absolute acceleration appearing in the worker 250 is a predetermined reference peak value αs.

[0028] Since the worker status data D22 includes a history of the acceleration actually caused to the worker 250, the dust amount calculation unit 142 calculates a peak value αr (not shown) of the absolute acceleration actually caused to the worker 250. The estimated value of the amount of dust generated by a certain worker 250 is calculated, for example, as "reference amount of dust generated×(αr / αs)" using the reference amount of dust generated, the acceleration peak value αr, and the reference acceleration peak value αs. 2 Although the method of calculating the estimated value of the amount of dust generated is not limited to this, it is preferable to increase the estimated value of the amount of dust generated as the peak value αr of the absolute acceleration generated by the worker 250 increases.

[0029] Furthermore, when the casing state data D24 for the target area is "casing not present," the target area air volume calculation unit 144 reads out the allowable dust concentration of the manufacturing equipment 220 belonging to the target area from the manufacturing equipment required environment table 174. Then, the target area air volume calculation unit 144 calculates the required air volume for the target area so that a dust concentration equal to or lower than the allowable dust concentration is achieved even for the dust amount based on the estimated dust amount data D32, and outputs the result as the target area air volume data D34 (air volume data).

[0030] That is, the target area air volume calculation unit 144 calculates target area air volume data D34 that increases as the estimated dust volume data D32 increases. As described above, the dust volume calculation unit 142 increases the estimated dust volume data D32 as the peak value of the absolute acceleration seen by the worker 250 increases. Therefore, the air volume calculation unit 140 increases the target area air volume data D34 as the acceleration seen by the worker 250 (peak value of absolute acceleration) increases.

[0031] 4, when increasing the air volume in the target area 210-a, it is preferable to control the airflow in the surrounding areas 210-b and 210-c to suppress the diffusion of dust to the surrounding areas. The surrounding area air volume calculation unit 146 calculates the air volumes in the surrounding areas 210-b and 210-c to achieve this, and outputs the result as the surrounding area air volume data D36 (air volume data).

[0032] More specifically, the surrounding area air volume calculation unit 146 determines various assumed values ​​D36a (not shown) of the surrounding area air volume data D36, and applies the target area air volume data D34 and the assumed values ​​D36a to the airflow model data 176. This predicts the airflow in the clean room 200, and calculates the amount of dust diffused to the surrounding areas 210-b, 210-c, etc. Then, the surrounding area air volume calculation unit 146 may select the assumed value D36a that provides the smallest amount of dust diffused to the surrounding areas 210-b, 210-c, etc. as the surrounding area air volume data D36.

[0033] Furthermore, as the clean room system 100 continues to operate, combinations of the target area air volume data D34 and the surrounding area air volume data D36 are accumulated. Then, it becomes possible to create a correlation coefficient or an approximation formula that represents the relationship between the target area air volume data D34 and the surrounding area air volume data D36. In this case, the surrounding area air volume calculation unit 146 may calculate the surrounding area air volume data D36 based on the correlation coefficient or the approximation formula and the target area air volume data D34.

[0034] The air volume control unit 150 commands the motor rotation speed of each FFU 240 to realize the target area air volume data D34 for the target area, the surrounding area air volume data D36 for the surrounding area, and the predetermined standard air volume data for other general areas. In other words, the air volume calculation unit 140 calculates the target area air volume data D34 and the surrounding area air volume data D36 so that the amount of dust actually diffused to the surrounding area is suppressed compared to the "amount of dust diffused to the surrounding area when it is assumed that the air volume in the general area and the air volume in the surrounding area are equal."

[0035] Operation of the First Embodiment FIG. 5 is a flowchart of an FFU control routine executed in the control device 120. 5, when the process proceeds to step S2, the image / motion analysis unit 130 generates worker status data D22 based on the two-dimensional video data D12 and the three-dimensional point group data D14 supplied from the imaging unit 230. That is, the positions and number of workers 250 are detected, and the posture / motion state, speed and absolute acceleration of each body part, etc. of each worker 250 are analyzed.

[0036] Next, when the process proceeds to step S4, the image / motion analysis unit 130 generates casing state data D24 by determining the presence or absence of a casing 222 of each manufacturing apparatus 220. Next, when the process proceeds to step S6, the dust amount calculation unit 142 generates estimated dust amount data D32 for each target area based on the worker state data D22 for each target area and the worker dust amount table 172 (see FIG. 3).

[0037] Next, when the process proceeds to step S8, the target area air volume calculation unit 144 calculates the target area air volume data D34 based on the estimated dust amount data D32 in the target area and the casing state data D24. Next, when the process proceeds to step S10, the surrounding area air volume calculation unit 146 calculates the surrounding area air volume data D36.

[0038] Next, when the process proceeds to step S12, the air volume control unit 150 commands the FFU 240 to set the motor rotation speed so as to realize the target area air volume data D34 and the surrounding area air volume data D36. As a result, each FFU 240 rotates the motor and the fan at the specified rotation speed. Thereafter, the processes of steps S2 to S12 are repeated.

[0039] [Computer Configuration] 6 is a block diagram of a computer 980. Each of the control device 120 and the database unit 170 shown in FIG. 2 includes one or more computers 980 shown in FIG. 6, a computer 980 includes a CPU 981, a storage unit 982, a communication I / F (interface) 983, an input / output I / F 984, and a media I / F 985. Here, the storage unit 982 includes a RAM 982a, a ROM 982b, and an SSD (Solid State Drive) 982c.

[0040] The communication I / F 983 is connected to a communication circuit 986. The input / output I / F 984 is connected to an input / output device 987. The media I / F 985 reads and writes data from a recording medium 988. The ROM 982b stores an IPL (Initial Program Loader) executed by the CPU, etc. The SSD 982c stores control programs, various data, etc. The CPU 981 executes the control programs, etc. loaded from the SSD 982c to the RAM 982a to realize various functions. The inside of the control device 120 shown in FIG. 2 above is mainly shown as a block of functions realized by the control programs, etc.

[0041] [Effects of the embodiment] As described above, according to the embodiment, the clean room system 100 includes an air volume calculation unit 140 that calculates air volume data (D34, D36) based on the video data (D12, D14) so ​​that the air volume emitted by the fan filter unit (240) increases as the peak value of the absolute acceleration acting on the worker 250 in the clean room 200 increases, and an air volume control unit 150 that controls the fan filter unit (240) based on the air volume data (D34, D36).

[0042] Generally, the amount of dust generated by the worker 250 increases as the worker 250 moves more vigorously, i.e., the greater the acceleration. According to the above-described embodiment, the air volume calculation unit 140 calculates the air volume data (D34, D36) so that the air volume discharged from the fan filter unit (240) increases as the acceleration increases. This makes it possible to appropriately control the discharged air volume according to the conditions in the clean room.

[0043] Moreover, the worker status data D22 includes the motion state of the worker 250, and the air volume calculation unit 140 is more preferably provided with a function of reading out a standard amount of dust generation corresponding to the motion state included in the worker status data D22 from a worker dust volume table 172 that stores the relationship between a plurality of types of motion states and a standard amount of dust generation, a function of calculating estimated dust volume data D32 based on the standard amount of dust generation and the peak value of absolute acceleration included in the worker status data D22, and a function of calculating air volume data (D34, D36) so that the larger the estimated dust volume data D32 is, the larger the air volume data (D34, D36) is. For example, the amount of dust generation generally differs depending on the motion state of the worker 250, such as "up and down arms," ​​"bending forward of the upper body," and "walking." Therefore, by reading out the standard amount of dust generation corresponding to the motion state included in the worker status data D22 from the worker dust volume table 172, the released air volume can be more appropriately controlled.

[0044] Moreover, the worker status data D22 includes the clothing of the worker 250, and it is more preferable that the air volume calculation unit 140 reads out the standard amount of dust generation corresponding to the operating state and clothing included in the worker status data D22 from a worker dust volume table 172 that stores the relationship between a plurality of types of operating states and the standard amount of dust generation. For example, the amount of dust generation generally differs depending on the clothing of the worker 250, such as "ordinary work clothes," "lab coat-type dust-free clothing," and "overall-type dust-free clothing." Therefore, by reading out the standard amount of dust generation corresponding to the operating state and clothing included in the worker status data D22 from the worker dust volume table 172, the released air volume can be more appropriately controlled.

[0045] Moreover, the clean room 200 includes the device (220) that can be housed in the casing 222, and it is more preferable that the air volume calculation unit 140 calculates the air volume data (D34, D36) so that the air volume discharged by the fan filter unit (240) is larger when the device (220) is not housed in the casing 222 compared to when the device (220) is housed in the casing 222. In general, the allowable dust concentration of the device (220) that can be housed in the casing 222 differs depending on whether or not the device (220) is housed in the casing 222. Therefore, when the device (220) is not housed in the casing 222, the air volume data (D34, D36) is calculated so that the air volume is larger compared to when the device (220) is housed, thereby making it possible to more appropriately control the discharged air volume.

[0046] Furthermore, it is even more preferable that the clean room 200 has a plurality of areas 210, and an area 210 in which at least one worker 250 is present or in which equipment (220) not housed in a casing 222 is present is defined as a target area 210-a, areas 210 adjacent to the target area 210-a are defined as surrounding areas 210-b, 210-c, and an area 210 which is neither the target area 210-a nor the surrounding areas 210-b, 210-c is defined as a general area, and the air volume data (D34, D36) specifies the air volume in the surrounding areas (210-b, 210-c) so that the amount of dust diffused to the surrounding areas 210-b, 210-c is reduced compared to the amount of dust diffused to the surrounding areas 210-b, 210-c when it is assumed that the air volume in the general area is equal to the air volume in the surrounding areas 210-b, 210-c. As a result, even if the airflow volume in the target area 210-a is increased, the amount of dust diffusing from the target area 210-a to the peripheral areas 210-b, 210-c, etc. can be suppressed.

[0047] [Variations] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. The above-mentioned embodiment is exemplified to explain the present invention in an easy-to-understand manner, and is not necessarily limited to those having all the configurations described. In addition, other configurations may be added to the configuration of the above-mentioned embodiment, and it is also possible to replace a part of the configuration with another configuration. In addition, the control lines and information lines shown in the figure show those that are considered necessary for explanation, and do not necessarily show all the control lines and information lines necessary on the product. In reality, it may be considered that almost all the configurations are connected to each other. Possible modifications of the above-mentioned embodiment are, for example, as follows.

[0048] (1) In the above embodiment, a plurality of manufacturing apparatuses 220, imaging units 230, and FFUs 240 are provided in the clean room 200, but these do not necessarily need to be multiple. For example, one each of the manufacturing apparatuses 220, imaging units 230, and FFUs 240 may be provided in the clean room 200. In this case, the entire clean room 200 may be considered to be one area 210.

[0049] (2) In the above embodiment, the imaging section 230 outputs both the two-dimensional video data D12 and the three-dimensional point group data D14, but it may output only one of them.

[0050] (3) Since the hardware of the control device 120 in the above embodiment can be realized by a general-purpose computer, the processes corresponding to the above-mentioned block diagrams and flowcharts, as well as programs for executing the various processes described above, may be stored on a storage medium (a computer-readable recording medium on which a program is recorded) or distributed via a transmission line.

[0051] (4) In the above-described embodiment, the processes corresponding to the block diagrams and flowcharts, as well as the various other processes described above, have been described as software-based processes using a program. However, some or all of them may be replaced with hardware-based processes using an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array), etc.

[0052] (5) The various processes executed in the above-described embodiments may be executed by a server computer via a network (not shown), and the various data stored in the above-described embodiments may also be stored in the server computer. [Explanation of symbols]

[0053] 100 Clean Room System 120 Control device (clean room control device) 140 Air volume calculation section 150 Air volume control unit 172 Worker dust amount table 200 Clean Room 210 Area 210-a Target area 210-b, 210-c Surrounding area 220 Manufacturing equipment (equipment) 222 Casing 230 Imaging unit 240 FFU (Fan Filter Unit) 250 workers D12 2D video data (video data) D14 3D point cloud data (video data) D22 Worker status data D24 Casing Condition Data D32 Estimated dust amount data D34 Target area wind volume data (wind volume data) D36 Surrounding area wind volume data (wind volume data)

Claims

1. a fan filter unit provided in the clean room and configured to discharge purified air into the clean room; an imaging unit that captures images of the inside of the clean room and outputs video data; an air volume calculation unit that calculates air volume data based on the video data so that the air volume discharged from the fan filter unit increases as the acceleration acting on the worker in the clean room increases; and an air volume control unit that controls the fan filter unit based on the air volume data; A clean room system comprising:

2. The worker status data regarding the worker includes a motion status of the worker, The motion state includes, as the acceleration, a peak value of absolute acceleration occurring to the worker, The air volume calculation unit is a function of reading out the reference amount of dust generation corresponding to the operating state included in the worker status data from a worker dust generation amount table that stores a relationship between a plurality of types of the operating state and a reference amount of dust generation; A function of calculating estimated dust amount data based on the reference dust amount and the peak value of the absolute acceleration included in the worker status data; and a function of calculating the air volume data so that the air volume data is increased as the estimated dust amount data is increased.

2. The clean room system according to claim 1.

3. The worker status data includes clothing of the worker, The air volume calculation unit is The standard amount of dust generated corresponding to the action state and the clothing included in the worker status data is read out from a worker dust amount table that stores the relationship between a plurality of types of the action state and the standard amount of dust generated.

3. The clean room system according to claim 2.

4. The clean room includes an apparatus that can be housed in a casing, The air volume calculation unit calculates air volume data when the device is not housed in the casing so that the amount of air discharged from the fan filter unit is larger than when the device is housed in the casing.

4. The clean room system according to claim 3.

5. The clean room has a plurality of areas, the area in which at least one of the workers is present or the device not housed in the casing is present is defined as a target area, the area adjacent to the target area is defined as a peripheral area, and the area which is neither the target area nor the peripheral area is defined as a general area, The air volume data specifies an air volume in the surrounding area so that the amount of dust diffused to the surrounding area is reduced compared to the amount of dust that would be diffused to the surrounding area if the air volume in the general area and the air volume in the surrounding area were assumed to be equal.

5. The clean room system according to claim 4.

6. an air volume calculation unit that calculates air volume data based on video data captured inside a clean room having a fan filter unit that emits purified air, such that the air volume emitted by the fan filter unit increases as the peak value of absolute acceleration acting on a worker in the clean room increases; an air volume control unit that controls the fan filter unit based on the air volume data; A clean room control device comprising:

7. calculating air volume data based on video data captured inside a clean room including a fan filter unit that emits purified air, such that the air volume emitted by the fan filter unit increases as the peak value of absolute acceleration acting on a worker in the clean room increases; and controlling the fan filter unit based on the air volume data. A method for controlling a clean room.

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