Information processing device, information processing method, and information processing program

Abstract

To provide a vibration propagation path.SOLUTION: An information processing device 10 according to an embodiment includes a processor 18. The processor serves to identify, as resonant frequency of components 22 of a structure 20, frequency of first-type peaks included in a first-type transfer function waveform representing relationship between amplitude and frequency of output vibration. The output vibration occurs in the components 22 of the structure 20 when the structure including the plurality of components 22 is subjected to sweep excitation. The processor serves to calculate a vibration propagation path along which input vibration having the resonant frequency propagates the structure 20 when applied to the structure 20. The vibration propagation path is calculated based on frequency and half width of second-type peaks included in a second-type transfer function waveform representing relationship between amplitude and frequency of output vibration. The output vibration occurs in at least part of the components 22 of the structure 20 when the input vibration having the resonant frequency is applied to the structure 20 for a predetermined vibration excitation duration.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] An embodiment of the present invention relates to an information processing device, an information processing method, and an information processing program. [Background technology]

[0002] A technique for identifying a vibration source of a structure consisting of multiple parts has been disclosed. For example, a vibration is input to the structure to forcibly vibrate the structure, and the vibration generated in the structure by the vibration is analyzed to identify a resonant frequency, thereby identifying the part having the resonant frequency as the vibration source. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2023-16097 A [Patent Document 2] JP 2001-337011 A Summary of the Invention [Problem to be solved by the invention]

[0004] In this case, when a certain part vibrates, the vibration may propagate to other parts, forming a vibration propagation path within the structure. With conventional technology, it has been difficult to identify such a vibration propagation path.

[0005] An object of the present disclosure is to provide an information processing device, an information processing method, and an information processing program capable of providing a vibration propagation path. [Means for solving the problem]

[0006] An information processing device according to an embodiment includes a processor, which identifies a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the component, as a resonant frequency of the component, and calculates a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on a frequency and a half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic diagram of an information processing system. [Diagram 2] An explanatory diagram of sweep excitation. [Diagram 3] Schematic diagram of a first transfer function waveform. [Figure 4A] FIG. 4 is an explanatory diagram of excitation by input vibration of a resonant frequency. [Figure 4B] FIG. 4 is an explanatory diagram of excitation by input vibration of a resonant frequency. [Diagram 5] Schematic diagram of the second transfer function waveform. [Figure 6] FIG. [Figure 7] 1 is a flowchart showing the flow of information processing. [Figure 8] Hardware configuration diagram. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] An information processing apparatus, an information processing method, and an information processing program according to embodiments will be described in detail below with reference to the accompanying drawings.

[0009] FIG. 1 is a schematic diagram showing an example of an information processing system 1 according to the present embodiment.

[0010] The information processing system 1 includes an information processing device 10, a vibration exciter 30, and an accelerometer 32.

[0011] The information processing device 10 executes information processing such as calculation of vibration propagation paths of the structure 20.

[0012] The structure 20 is a measured object for which a vibration propagation path is to be calculated by the information processing device 10. The structure 20 is configured to include a plurality of parts 22. The structure 20 is a device, structure, or the like that includes a plurality of parts 22, and at least some of the plurality of parts 22 are physically connected to each other directly or via support members 24 or the like.

[0013] Examples of the structure 20 include, but are not limited to, an electron beam drawing device for drawing a circuit pattern of an LSI (Large-Scale Integration) by laser irradiation, an exposure device for exposing and transferring an image of a mask pattern onto a photosensitive substrate, a vehicle, etc.

[0014] When the structure 20 is an exposure device, the components 22 constituting the structure 20 include a laser irradiation mechanism, a lens barrel holding optical members such as lenses, a table holding a mask or a photosensitive substrate, a stage device for moving the table, a housing, etc. When the structure 20 is a vehicle, the components 22 constituting the structure 20 include a chassis, suspension parts, drive system parts, panel parts, etc. that constitute the vehicle. Methods for attaching each component 22 included in the structure 20 include attachment methods using fastening such as screws, bolts and nuts, and rivets, attachment methods using welding, adhesion, fitting, etc.

[0015] 1 illustrates an example in which the structure 20 includes parts 22A to 22I. At least some of the parts 22 of these parts 22A to 22I are physically connected to each other directly or via a support member 24 or the like. Therefore, the parts 22A to 22I are connected to each other via the support member 24 or another part 22 so that vibration can be propagated.

[0016] A vibration exciter 30 and an accelerometer 32 are installed on the structure 20 .

[0017] The vibration exciter 30 is a device for vibrating the structure 20. The vibration exciter 30 and the information processing device 10 are connected to be able to communicate with each other. The vibration exciter 30 applies input vibration to the structure 20 with a frequency and amplitude strength according to the control by the information processing device 10. FIG. 1 shows an example of a form in which the vibration exciter 30 applies input vibration to the structure 20 by vibrating a vibration position P arranged in contact with a partial area of ​​the structure 20. However, a speaker may be used as the vibration exciter 30, and the input vibration may be applied to the structure 20 in a non-contact manner by sound waves. In this embodiment, an example of a form in which the vibration exciter 30 applies input vibration to the structure 20 by vibrating the vibration position P is shown.

[0018] The accelerometer 32 is an example of a vibration detector. The accelerometer 32 is a device that measures vibration acceleration occurring in the structure 20. The accelerometer 32 and the information processing device 10 are connected so as to be able to communicate with each other. The accelerometer 32 is arranged in contact with at least some of the components 22 that constitute the structure 20, and detects vibration acceleration occurring in the components 22 and sequentially transmits the detected vibration acceleration to the information processing device 10. FIG. 1 shows an example in which the accelerometer 32 is arranged in contact with a component 22A out of the multiple components 22 that constitute the structure 20.

[0019] The installation position of the accelerometer 32 can be changed by a user's operation, etc. Therefore, the accelerometer 32 is configured so that the installation position can be changed to a user-desired part 22 among the multiple parts 22 constituting the structure 20 by a user's operation, etc.

[0020] Next, the information processing device 10 will be described.

[0021] The information processing device 10 includes a communication unit 12, a UI (user interface) unit 14, a storage unit 16, and a processing unit 18. The communication unit 12, the UI unit 14, and the storage unit 16 are communicatively connected to the processing unit 18 via a bus or the like.

[0022] The communication unit 12 communicates with an external information processing device via a network or the like. The UI unit 14 has an input function for accepting operation input by a user and an output function for outputting various information. The input function is, for example, an input device such as a keyboard. The output function is, for example, a display for displaying various information, a speaker for outputting sound, etc. The storage unit 16 stores various information.

[0023] In this embodiment, the storage unit 16 stores a part DB (database) 16A.

[0024] The part DB 16A is a database in which part information, which is information about each of the multiple parts 22 that make up the structure 20, is registered. The part information includes data necessary for theoretically calculating the resonance frequency (natural frequency) of the part 22, such as the material and shape (dimensions of each part) of the part 22. When each part 22 included in the structure 20 is designed using a design support system such as a CAD (Computer Aided Design) system, design data (CAD data) can be used as the part information.

[0025] The processing unit 18 is a calculation unit that executes information processing. The processing unit 18 includes a sweep excitation control unit 18A, a first transfer function waveform calculation unit 18B, an identification unit 18C, a resonance frequency excitation control unit 18D, a second transfer function waveform calculation unit 18E, a vibration propagation path calculation unit 18F, and an output control unit 18G. At least one of the sweep excitation control unit 18A, the first transfer function waveform calculation unit 18B, the identification unit 18C, the resonance frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, the vibration propagation path calculation unit 18F, and the output control unit 18G is realized, for example, by one or more processors. For example, each of the above units may be realized by having a processor such as a CPU execute a program, that is, by software. Each of the above units may be realized by a processor such as a dedicated IC (Integrated Circuit), that is, by hardware. Each of the above units may be realized by using both software and hardware. When multiple processors are used, each processor may realize one of the units, or may realize two or more of the units.

[0026] At least one of the above-mentioned functional units included in the processing unit 18 and at least a portion of the various information stored in the memory unit 16 may be configured to be mounted on an external information processing device or the like communicatively connected to the information processing device 10.

[0027] The processing unit 18 may be realized by, for example, one or more processing circuits such as a CPU, a microprocessor, a GPU (Graphics Processing Unit), an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or an electronic circuit including these circuits, etc. The processing unit 18 may also be realized by an information processing device such as a computer, a computer system configured by multiple computers or servers communicating with each other via a network, or a PC cluster in which multiple computers cooperate to execute information processing.

[0028] The sweep vibration control unit 18A controls the vibration exciter 30 so as to apply a sweep vibration to the structure 20.

[0029] Fig. 2 is an explanatory diagram of an example of sweep excitation, in which the horizontal axis represents time and the vertical axis represents frequency.

[0030] The sweep excitation means applying an input vibration to the structure 20 while changing the frequency. In detail, the sweep excitation means applying an input vibration to the structure 20 while continuously changing the frequency of the vibration input to the structure 20 within a predetermined frequency range. The speed at which the frequency is continuously changed within the predetermined frequency range (frequency sweep speed) is preferably set so that the signal of each changing frequency includes 5 to 10 or more cycles.

[0031] For example, sweep vibration means applying an input vibration whose frequency is continuously increased over time to the structure 20. Note that, in the sweep vibration, it is sufficient to apply an input vibration whose frequency is changed over time, and it is also possible to apply an input vibration whose frequency is continuously decreased over time to the structure 20.

[0032] Returning to FIG. 1, the explanation will be continued. The sweep vibration control unit 18A controls the vibrator 30 so as to apply input vibration by sweep vibration to the structure 20. For example, the sweep vibration control unit 18A outputs frequency information representing a frequency that gradually increases or decreases over time and amplitude intensity information representing an amplitude intensity to the vibrator 30. The amplitude intensity information may be information representing an amplitude intensity that does not cause damage or loosening, which makes it difficult to maintain the function of the structure 20, to the structure 20 and the components 22 that constitute the structure 20. The vibrator 30 applies input vibration, which is an amplitude intensity represented by the amplitude intensity information received from the sweep vibration control unit 18A and has a frequency represented by the received frequency information, to the structure 20 via the vibration position P.

[0033] That is, the sweep vibration control unit 18A controls the vibration exciter 30 to vibrate the structure 20 while sweeping a frequency band of a predetermined range and gradually changing the vibration frequency from low to high or from high to low in the frequency band. The predetermined range of the frequency band is set to a range that includes the resonant frequency of the part 22 with the lowest resonant frequency included in the structure 20 and the resonant frequency of the part 22 with the highest resonant frequency.

[0034] Under the control of the sweep vibration control section 18A, the vibration exciter 30 applies to the structure 20 an input vibration whose frequency gradually changes over time.

[0035] The first transfer function waveform calculation section 18B calculates the first transfer function waveform.

[0036] The first transfer function waveform is a waveform that represents the relationship between the amplitude intensity and frequency of the output vibration generated in the part 22 included in the structure 20 when the sweep excitation is performed. In other words, the first transfer function waveform is a waveform that represents the frequency response function of the output vibration generated in the part 22 included in the structure 20 when the sweep excitation is performed. The amplitude intensity is represented by gain (dB).

[0037] The first transfer function waveform calculation unit 18B divides the time series data of the vibration acceleration for each time period detected sequentially over time by the accelerometer 32 during the sweep vibration of the structure 20 into a plurality of time intervals, and calculates the first transfer function waveform by performing a Fourier transform of the time series data of the vibration acceleration for each time interval.

[0038] FIG. 3 is a schematic diagram of an example of a first transfer function waveform 40. As shown in FIG.

[0039] The first transfer function waveform 40 includes a plurality of first peaks. The first peaks represent peaks included in the first transfer function waveform 40.

[0040] In FIG. 3, first peaks A to F and first peaks H to L occur at frequencies f1 to f6 and frequencies f8 to f12, respectively.

[0041] When the sweep excitation is performed, actual resonance frequency information of the part 22 included in the structure 20 is obtained. That is, the frequency corresponding to each first peak included in the first transfer function waveform 40 corresponds to the actual value of the resonance frequency of any of the parts 22 included in the structure 20. Therefore, in the case of the example shown in FIG. 3, the frequencies f1 to f6 and the frequencies f8 to f12 of each of the first peaks respectively match the resonance frequency of any of the parts 22 included in the structure 20.

[0042] Returning to Figure 1, we will continue with the explanation.

[0043] The identifying unit 18C identifies the frequency of the first peak included in the first transfer function waveform 40 as the resonant frequency of any of the parts 22 included in the structure 20. In the case of the example shown in FIG. 3, the identifying unit 18C identifies each of the frequencies f1 to f6 and the frequencies f8 to f12 as the resonant frequency of any of the parts 22 included in the structure 20.

[0044] Furthermore, the identifying unit 18C identifies which part 22 included in the structure 20 the frequency of the first peak included in the first transfer function waveform 40 corresponds to the resonant frequency of.

[0045] The identification unit 18C uses the component information of each of the components 22 registered in the component DB 16A to calculate a theoretical resonance frequency, which is a theoretical resonance frequency of each of the components 22. A known calculation method may be used to calculate the theoretical resonance frequency from the component information.

[0046] Then, the identification unit 18C identifies a component 22 whose theoretical resonant frequency matches each of the frequencies (actual resonant frequencies) of the multiple first peaks included in the first transfer function waveform 40, and thereby identifies which component 22 included in the structure 20 has the resonant frequency of the frequency of the first peak included in the first transfer function waveform 40.

[0047] In addition, there are cases where one component 22 has a plurality of theoretical resonant frequencies. In this case, the identifying unit 18C identifies one or a plurality of resonant frequencies for each of the components 22 that constitute the structure 20.

[0048] The resonant frequency vibration control unit 18D controls the vibrator 30 so as to apply input vibration of the resonant frequency identified by the identification unit 18C to the structure 20 for a predetermined vibration duration.

[0049] The resonance frequency excitation control unit 18D selects one resonance frequency to be tested from among the multiple resonance frequencies identified by the identification unit 18C.

[0050] The resonant frequency excitation control unit 18D displays a list of the resonant frequencies identified by the identification unit 18C on the UI unit 14, and selects one resonant frequency selected by a user's operation instruction on the UI unit 14 as one resonant frequency to be tested. The resonant frequency excitation control unit 18D may also select any one of the multiple resonant frequencies identified by the identification unit 18C as the test frequency.

[0051] Then, each time a resonant frequency to be tested is selected, the resonant frequency excitation control unit 18D controls the vibrator 30 to apply input vibration of the selected resonant frequency to the structure 20 with a predetermined amplitude intensity for a predetermined excitation duration.

[0052] In detail, the resonant frequency excitation control unit 18D outputs to the vibration exciter 30 resonant frequency information indicating the selected resonant frequency, amplitude intensity information indicating the amplitude intensity, and vibration duration information indicating the vibration duration.

[0053] The amplitude intensity information output to the vibrator 30 together with the resonant frequency information is preferably information representing an amplitude intensity less than an intensity that affects the function of the components 33 constituting the structure 20. In detail, the amplitude intensity information is preferably information representing an amplitude intensity that is less than an amplitude intensity at which damage, loosening, or the like that would make it difficult to maintain the function of the structure 20 begins to occur in the structure 20 and the components 22 constituting the structure 20, and is weak enough to obtain a transfer function waveform showing multiple peaks due to the input vibration of the resonant frequency.

[0054] The vibration duration information output to the vibration exciter 30 together with the resonant frequency information will be described in detail later.

[0055] 4A and 4B are explanatory diagrams of an example of excitation by input vibration of a resonant frequency. The horizontal axis of Fig. 4A indicates time, and the vertical axis indicates frequency. The horizontal axis of Fig. 4B indicates frequency, and the vertical axis indicates amplitude strength.

[0056] In excitation by input vibration of a resonant frequency, as shown in Fig. 4A, the structure 20 is excited by input vibration of a constant resonant frequency that does not change over time. As shown in Fig. 4B, the amplitude intensity of the input vibration by the resonant frequency may be any amplitude intensity that satisfies the above-mentioned conditions.

[0057] Returning to Figure 1, we will continue with the explanation.

[0058] The vibrator 30 continuously applies input vibration to the structure 20, the input vibration having a resonant frequency represented by the resonant frequency information received from the resonant frequency vibration control unit 18D and an amplitude intensity represented by the received amplitude intensity information, for a vibration duration represented by the vibration duration information received from the resonant frequency vibration control unit 18D.

[0059] That is, under the control of the resonant frequency vibration control unit 18D, the vibrator 30 applies input vibration of the selected resonant frequency and of a predetermined amplitude strength to the vibration position P of the structure 20 continuously for the vibration duration.

[0060] When an input vibration of a selected resonant frequency is applied to the structure 20, the part 22 of the structure 20 vibrates at the resonant frequency. Furthermore, when the input vibration of the resonant frequency is applied continuously for the duration of the vibration, the vibration of the part 22 at the resonant frequency causes other parts 22 other than the part 22 to resonate and start vibrating at a frequency different from the resonant frequency. The longer the duration from the start of the input vibration from the start of the vibration, the more parts 22 resonate with the other parts 22 other than the part 22, and the longer the duration, the more the number of parts 22 that resonate becomes saturated. The time when the number of parts 22 that start resonating begins to saturate varies depending on the amplitude strength of the input vibration of the resonant frequency.

[0061] For this reason, the processing unit 18 specifies the timing at which the number of parts 22 that start resonating over time from excitation by the input vibration starts to saturate for each of a plurality of patterns having different combinations of the resonant frequency and the amplitude strength of the input vibration, by measuring or predicting in advance. Then, the processing unit 18 may calculate in advance the period from the earliest timing, the latest timing, or the average timing among the specified timings to the timing at which excitation by the input vibration starts, as the excitation duration common to the above-mentioned plurality of patterns. The processing unit 18 may also calculate in advance the period from the timing at which the number of parts 22 that start resonating over time from excitation by the input vibration starts to saturate to the timing at which excitation by the input vibration starts, as the excitation duration, for each of a plurality of patterns having different combinations of the resonant frequency and the amplitude strength of the input vibration.

[0062] Through these processes, the processing unit 18 calculates in advance the vibration duration that satisfies the above conditions for each combination of the type of resonance frequency and the amplitude strength of the input vibration. Then, the resonance frequency vibration control unit 18D specifies the vibration duration corresponding to the resonance frequency and the amplitude strength to be applied to the structure 20 as the vibration duration of the input vibration of the resonance frequency and the vibration strength, and executes the above processes.

[0063] Returning to Figure 1, we will continue with the explanation.

[0064] The second transfer function waveform calculation section 18E calculates the second transfer function waveform.

[0065] The second transfer function waveform is a waveform that represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least a part 22 included in the structure 20 when an input vibration of a resonant frequency is applied to the structure 20 for a predetermined duration. In other words, the second transfer function waveform is a waveform that represents the frequency response function of the output vibration generated in the part 22 included in the structure 20 when an input vibration of a resonant frequency is applied to the structure 20 for a predetermined duration. The amplitude intensity is represented by gain (dB).

[0066] The second transfer function waveform calculation unit 18E divides into a plurality of time intervals the time series data of the vibration acceleration for each time, which is detected sequentially over time by the accelerometer 32 during the vibration duration of the structure 20 due to the input vibration of the resonant frequency, and calculates the second transfer function waveform by performing a Fourier transform of the time series data of the vibration acceleration for each time interval.

[0067] FIG. 5 is a schematic diagram of an example of the second transfer function waveform 42. As shown in FIG.

[0068] The second transfer function waveform 42 includes a plurality of second peaks. The second peaks represent peaks included in the second transfer function waveform 42.

[0069] Fig. 5 shows a second transfer function waveform 42 calculated based on the vibration acceleration detected by the accelerometer 32 when an input vibration of frequency f3, which is one of the resonant frequencies identified by the identification unit 18C, is applied to the structure 20 for a vibration duration. Fig. 5 also shows a first transfer function waveform 40 obtained by sweep vibration. In Fig. 5, the second transfer function waveform 42 is a waveform indicated by a solid line, and the first transfer function waveform 40 is a waveform indicated by a dotted line.

[0070] As shown in Fig. 5, when an input vibration of a selected resonant frequency is applied to the structure 20, a part 22 of the structure 20 vibrates at the resonant frequency. When the input vibration of the resonant frequency is applied continuously for the excitation duration, the vibration of the part 22 of the resonant frequency causes other parts 22 other than the part 22 to resonate, and the other parts 22 start to resonate at a frequency different from the resonant frequency, and the number of parts 22 that start to resonate is saturated by the continuous excitation by the input vibration for the excitation duration. In other words, the excitation duration may be a time equal to or longer than the time until the number of second peaks included in the second transfer function waveform 42 measured when the input vibration of the resonant frequency is applied to the structure 20 increases with the passage of the excitation time of the input vibration and starts to saturate.

[0071] In the example shown in FIG. 5, by applying an input vibration of resonance frequency f3 to structure 20 for a vibration duration, second peaks 2B to 2E and 2G to 2L are generated at frequencies f2 to f12, respectively.

[0072] When an input vibration of a resonant frequency is applied to the structure 20, a peak that did not appear during the sweep excitation may appear. Similarly, a peak that appeared during the sweep excitation may not appear when an input vibration of a resonant frequency is applied.

[0073] For example, a first peak does not appear at frequency f7 in the first transfer function waveform 40 shown in Fig. 3, but a second peak 2G appears at frequency f7 in the second transfer function waveform 42 shown in Fig. 5. Also, first peaks A and F appear at frequencies f1 and f6, respectively, in the first transfer function waveform 40 shown in Fig. 3, but a second peak does not appear at frequencies f1 and f6 in the second transfer function waveform 42 shown in Fig. 5.

[0074] In this way, when an input vibration of a certain frequency is continuously applied to the structure 20 for the duration of the excitation, a peak different from that obtained when the input vibration is applied for a short period of time is generated. Therefore, by analyzing the second transfer function waveform 42, it is possible to grasp a peak that could not be obtained by short-term excitation.

[0075] Returning to Figure 1, we will continue with the explanation.

[0076] The vibration propagation path calculation unit 18F calculates a vibration propagation path that propagates through the structure 20 when an input vibration of a resonant frequency is applied to the structure 20, based on the frequency and half-width of the second peak included in the second transfer function waveform 42. The vibration propagation path is a path through which vibration propagates in the structure 20.

[0077] That is, the vibration propagation path calculation unit 18F calculates the vibration propagation path based on the second transfer function waveform 42 calculated according to the vibration acceleration detected by the accelerometer 32 installed in the component 22.

[0078] The vibration propagation path calculation unit 18F specifies the half-width of each of the multiple second peaks represented by the second transfer function waveform 42. A known method for calculating the half-width of a peak may be used to specify the half-width.

[0079] Then, vibration propagation path calculation unit 18F determines that the propagation distance along the vibration propagation path from accelerometer 32 that detected the vibration acceleration used to calculate second transfer function waveform 42 is shorter for a part 22 having a resonant frequency that is the frequency of the second peak with a smaller half-width. Then, vibration propagation path calculation unit 18F calculates, as the vibration propagation path, a propagation path that sequentially connects part 22 having a resonant frequency that is the frequency of the second peak with a smaller half-width and another part 22 having a resonant frequency that is the frequency of the second peak with a larger half-width.

[0080] This will be explained with reference to Fig. 5. For example, assume that the second transfer function waveform 42 calculated according to the vibration acceleration measured when an input vibration of resonance frequency f3 is applied to the structure 20 for a predetermined vibration duration is the waveform shown by the solid line in Fig. 5.

[0081] In this case, the vibration propagation path calculation unit 18F identifies the half-value width of each of the second peaks 2B to 2E and 2G to 2L. In addition, the vibration propagation path calculation unit 18F identifies the part 22 having the frequency of each of the second peaks 2B to 2E and 2G to 2L as a resonant frequency from the part DB 16A.

[0082] Then, the vibration propagation path calculation unit 18F arranges the component information of the components 22 having the respective frequencies of the second peaks as resonant frequencies in the order of narrowest half-widths of the second peaks. Then, the vibration propagation path calculation unit 18F assumes that the component having the frequency of the second peak with a smaller (narrower) half-width as a resonant frequency has a shorter vibration propagation distance from the accelerometer 32 that detected the vibration acceleration used to calculate the second transfer function waveform 42. The vibration propagation distance is the distance required for vibration propagation, and is not the physically shortest distance but the distance along the vibration propagation path. Then, the vibration propagation path calculation unit 18F calculates a propagation path that connects the components 22 identified by each of the component information arranged in the order of narrowest half-widths in the order of narrowest half-widths as a vibration propagation path with the component 22 having the resonant frequency as an excitation source.

[0083] In addition, the vibration propagation path calculation unit 18F uses a part 22 in the vibration propagation path having the resonant frequency used for the input vibration as an excitation source, and calculates the direction along the vibration propagation path away from the part 22 that is the excitation source as the vibration propagation direction in the vibration propagation path.

[0084] FIG. 6 is an explanatory diagram of an example of a vibration propagation path R.

[0085] For example, assume that an accelerometer 32 is installed on the part 22A, and an input vibration of the resonant frequency of the part 22A is continuously applied to the structure 20 by the vibrator 30 for the above-mentioned excitation duration time, thereby obtaining a second transfer function waveform 42 calculated according to the vibration acceleration detected by the accelerometer 32. Also assume that, by analysis of the second transfer function waveform 42 by the vibration propagation path calculation unit 18F, the half-width of the second peak corresponding to the resonant frequency of the part 22A is the narrowest among the multiple second peaks included in the second transfer function waveform 42, and the half-widths of the second peaks corresponding to the resonant frequencies of the parts 22E and 22I are wide in this order.

[0086] In this situation, when input vibration of the resonant frequency of part 22A is applied to structure 20 for a continuous excitation period, vibration propagation path calculation unit 18F calculates the path from part 22A to part 22I via part 22E as vibration propagation path R. In this case, vibration propagation path R uses part 22A, which has the resonant frequency used for the input vibration, as the excitation source, and calculates the direction away from part 22A along vibration propagation path R as the vibration propagation direction (see the arrow direction of vibration propagation path R in FIG. 2).

[0087] As described above, the installation position of the accelerometer 32 can be changed by a user's operation, etc. For this reason, from the viewpoint of calculating the vibration propagation path R with higher accuracy, the accelerometer 32 is preferably installed on the part 22 whose resonant frequency is the frequency of the input vibration applied to the vibrator 30 by the resonant frequency vibration control unit 18D, or on another part 22 adjacent to or arranged in contact with the part 22.

[0088] For example, before the resonant frequency excitation control unit 18D applies input vibration of the resonant frequency, the processing unit 18 may display the resonant frequency selected as the measurement target and identification information of the part 22 of the resonant frequency on the UI unit 14. After confirming the identification information of the part 22 displayed on the UI unit 14, the user places the accelerometer 32 on the part 22 identified by the identification information and then operates the UI unit 14 to input a measurement start instruction signal. The resonant frequency excitation control unit 18D that has received the measurement start instruction signal may control the vibrator 30 to apply the input vibration of the resonant frequency for a predetermined excitation duration.

[0089] In addition, the resonant frequency vibration control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially change the installation position of the accelerometer 32 in the structure 20 for one resonant frequency selected as a test target by the resonant frequency vibration control unit 18D, and perform the above-mentioned processing each time the installation position of the accelerometer 32 is changed, to calculate the second transfer function waveform 42.

[0090] In this case, the vibration propagation path calculation unit 18F obtains multiple types of second transfer function waveforms 42 calculated based on the detection results of the vibration acceleration by each of the accelerometers 32 installed at different positions for one resonance frequency selected as a test target. The vibration propagation path calculation unit 18F may calculate the vibration propagation path R based on the multiple types of second transfer function waveforms 42 calculated according to the vibration acceleration detected by each of the multiple accelerometers 32 installed in the different components 22.

[0091] That is, in the same manner as described above, the vibration propagation path calculation unit 18F calculates, for each of the accelerometers 32 arranged at different positions, a path connecting the components 22 identified by each of the component information arranged in the order of narrowest half-widths using the half-widths of the second peaks specified from the second transfer function waveform 42, in the order of narrowest half-widths, as a vibration propagation path having the component 22 of the resonance frequency as the excitation source. Also, the vibration propagation path calculation unit 18F specifies the component 22 of the resonance frequency used for the input vibration in the vibration propagation path as the excitation source, and specifies the direction away from the component 22 along the vibration propagation path as the vibration propagation direction in the vibration propagation path.

[0092] Then, the vibration propagation path calculation unit 18F calculates, for one resonant frequency selected as a test target, the vibration propagation path that has the most overlapping paths with other vibration propagation paths among the vibration propagation paths calculated for each of the accelerometers 32 installed at different positions, as the vibration propagation path R for that resonant frequency.

[0093] In detail, for one resonance frequency selected as a test target, the vibration propagation path calculation unit 18F specifies the component 22 that is calculated most frequently in each order for a plurality of types of vibration propagation paths calculated for each of the accelerometers 32 installed at different positions, in order of proximity along each vibration propagation path from the component 22 that serves as the excitation source. Then, the vibration propagation path calculation unit 18F may calculate the vibration propagation path R for the resonance frequency by using a propagation path that connects the components 22 specified in each order in order of proximity to the component 22 that serves as the excitation source, in order from the component 22 that serves as the excitation source.

[0094] The vibration propagation path calculation unit 18F calculates the vibration propagation path R for each resonant frequency selected as a test target based on multiple second transfer function waveforms 42 with different installation positions of the accelerometer 32, thereby making it possible to calculate the vibration propagation path R with higher accuracy.

[0095] The structure 20 may be configured such that the accelerometer 32 is provided for each of two or more components 22 included in the structure 20. For example, the structure 20 may be configured such that the accelerometer 32 is provided for each of all components 22 included in the structure 20.

[0096] In this case, the vibration propagation path calculation unit 18F can obtain multiple second transfer function waveforms 42 in parallel based on the detection results of vibration acceleration detected approximately simultaneously by each of the multiple accelerometers 32 installed at different positions for one resonance frequency selected as a test target. Therefore, in this case, it is possible to shorten the time required for a user to change the placement position of the accelerometer 32, and it is possible to calculate the vibration propagation path R more quickly and with higher accuracy in a shorter time.

[0097] In addition, the vibration propagation path calculation unit 18F may control the input vibrations of each of multiple types of amplitude intensities with changed amplitude intensities to be applied to the structure 20 for the above-mentioned vibration duration, for one selected resonant frequency and one type of installation condition of the accelerometer 32.

[0098] In this case, the amplitude intensities may be different from each other as long as they are within a range below an intensity that affects the function of the component 33 that constitutes the structure 20 .

[0099] Then, the resonant frequency vibration control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F sequentially change the amplitude intensity of the input vibration within a range that satisfies the above condition for one resonant frequency selected by the resonant frequency vibration control unit 18D as a test target, and perform processing similar to that described above each time the amplitude intensity is changed, thereby calculating the second transfer function waveform 42.

[0100] In this case, the vibration propagation path calculation unit 18F obtains a plurality of types of second transfer function waveforms 42 with different amplitude intensities of the input vibration for one resonant frequency selected as a test target.

[0101] Then, in the same manner as described above, the vibration propagation path calculation unit 18F calculates, for each of the different amplitude intensities, a path connecting the components 22 identified by each of the component information arranged in the order of narrowest half-widths in the order of narrowest half-widths, as a vibration propagation path having the component 22 of the resonance frequency as an excitation source, using the half-widths of the second peaks identified from the second transfer function waveform 42. Also, the vibration propagation path calculation unit 18F specifies, as an excitation source, the component 22 of the resonance frequency used for the input vibration in the vibration propagation path, and defines the direction away from the component 22 along the vibration propagation path as the vibration propagation direction in the vibration propagation path.

[0102] Then, the vibration propagation path calculation unit 18F calculates, for one resonant frequency selected as a test target, the vibration propagation path that has the most overlapping paths with other vibration propagation paths from among the vibration propagation paths calculated for each of the different amplitude intensities, as the vibration propagation path R for that resonant frequency.

[0103] In detail, for one resonance frequency selected as a test target, the vibration propagation path calculation unit 18F specifies the component 22 that is calculated most frequently for each order of a plurality of types of vibration propagation paths calculated for each of different amplitude intensities, in order of proximity along each vibration propagation path from the component 22 that is the excitation source.The vibration propagation path calculation unit 18F then calculates the vibration propagation path R for the resonance frequency by connecting the components 22 specified in each order in order of proximity to the component 22 that is the excitation source, in order from the component 22 that is the excitation source.

[0104] In addition, the processing unit 18 may calculate multiple types of vibration propagation paths with different combinations of the installation position and amplitude strength of the accelerometer 32 for one resonant frequency selected as a test target in the same manner as described above, and use these multiple vibration propagation paths to calculate the vibration propagation path R for the resonant frequency in the same manner as described above.

[0105] In addition, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially select one of the multiple resonant frequencies identified by the identification unit 18C as a test target and perform processing similar to that described above.

[0106] In this case, the resonant frequency vibration control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F are able to calculate a vibration propagation path R for each of the resonant frequencies of the multiple parts 22 identified by the sweep vibration, with the part 22 having each resonant frequency serving as the excitation source.

[0107] The output control unit 18G outputs the vibration propagation path R calculated by the vibration propagation path calculation unit 18F. In detail, the output control unit 18G outputs the vibration propagation path R calculated by the vibration propagation path calculation unit 18F to at least one of the UI unit 14, the storage unit 16, and the external information processing device connected via the communication unit 12. The output control unit 18G may output the vibration propagation path R calculated by the vibration propagation path calculation unit 18F, and at least one of the identification information of the component 22 that is the excitation source of the vibration propagation path R and the resonance frequency of the input vibration used in the calculation of the vibration propagation path R.

[0108] Assume that the output control unit 18G outputs the vibration propagation path R, the identification information of the part 22 that is the excitation source of the vibration propagation path R, and the resonance frequency of the input vibration used to calculate the vibration propagation path R to the UI unit 14. In this case, a user who visually recognizes the vibration propagation path R displayed on the UI unit 14, the identification information of the part 22 that is the excitation source of the vibration propagation path R, and the resonance frequency of the input vibration used to calculate the vibration propagation path R can confirm the vibration propagation path R that is generated when the input vibration of the resonance frequency is applied to the structure 20. In addition, the user can confirm that the part 22 identified by the identification information becomes the excitation source when the vibration propagation path R is formed.

[0109] 1, an evaluation object ET may be provided in the structure 20. For example, the evaluation object ET is a portion of the structure 20 for which vibration is to be particularly suppressed. For example, when the structure 20 is an electron beam drawing device, the evaluation object ET is a part 22 that is a laser irradiator or a part 22 on which the laser irradiator is mounted.

[0110] In this case, the processing unit 18 calculates the vibration propagation path R for each of the multiple types of resonant frequencies identified, making it possible to identify the resonant frequency, the part 22 having the resonant frequency, and the vibration propagation path R that imparts vibration to the part 22 on which the evaluation object ET is mounted or the part 22 that is the evaluation object ET.

[0111] For example, the processing unit 18 specifies a vibration propagation path R that passes through the evaluation object ET or a component 22 (component 22G in FIG. 1 ) on which the evaluation object ET is mounted, among the calculated multiple vibration propagation paths R. Then, the processing unit 18 outputs the specified vibration propagation path R, the resonant frequency of the input vibration used in calculating the vibration propagation path R, and identification information of the component 22 of the excitation source in the vibration propagation path R, as information that affects the vibration of the evaluation object ET, to at least one of the UI unit 14, the storage unit 16, and an external information processing device.

[0112] A user who visually checks the information output to the UI unit 14 can easily confirm the resonant frequency that has the potential to cause vibrations in the evaluation target ET, the vibration propagation path R when an input vibration of that resonant frequency is applied to the structure 20, and the component 22 that serves as the excitation source.

[0113] Next, an example of the flow of information processing executed by the processing unit 18 of the information processing device 10 will be described.

[0114] FIG. 7 is a flowchart showing an example of the flow of information processing executed by the processing unit 18.

[0115] The sweep vibration control unit 18A executes sweep vibration and controls the vibration exciter 30 to apply sweep vibration to the structure 20 (step S100).

[0116] The first transfer function waveform calculation unit 18B calculates the first transfer function waveform 40 (step S102). The first transfer function waveform calculation unit 18B divides the time series data of the vibration acceleration for each time sequentially detected over time by the accelerometer 32 during the sweep excitation of the structure 20 in step S100 into a plurality of time intervals, and calculates the first transfer function waveform 40 by performing a Fourier transform on the time series data of the vibration acceleration for each time interval.

[0117] The identifying unit 18C identifies the frequency of each of the multiple first peaks included in the first transfer function waveform 40 calculated in step S102 as the resonant frequency of any of the parts 22 included in the structure 20 (step S104). In the case of the example shown in FIG. 2C, the identifying unit 18C identifies each of the frequencies f1 to f6 and the frequencies f8 to f12 as the resonant frequency of any of the parts 22 included in the structure 20. In addition, the identifying unit 18C may further identify which part 22 included in the structure 20 has the resonant frequency of the frequency of the first peak included in the first transfer function waveform 40.

[0118] The resonant frequency excitation control unit 18D selects one resonant frequency to be tested from among the multiple resonant frequencies identified in step S104 (step S106).

[0119] The resonant frequency vibration control unit 18D controls the vibrator 30 to apply input vibration of the resonant frequency of the test target selected in step S106 or step S118 described later to the structure 20 with a predetermined amplitude intensity for a predetermined vibration duration (step S108).

[0120] The second transfer function waveform calculation unit 18E calculates the second transfer function waveform 42 (step S110). The second transfer function waveform calculation unit 18E divides into a plurality of time intervals the time series data of the vibration acceleration for each time sequentially detected by the accelerometer 32 over time during the vibration of the structure 20 for the vibration duration due to the input vibration of the resonant frequency in step S108, and calculates the second transfer function waveform 42 by performing a Fourier transform on the time series data of the vibration acceleration for each time interval.

[0121] The vibration propagation path calculation unit 18F calculates the vibration propagation path R that propagates through the structure 20 when an input vibration of a resonant frequency is applied to the structure 20, based on the frequency and half-width of the second peak contained in the second transfer function waveform 42 calculated in step D110 (step S112).

[0122] As described above, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially change the installation position of the accelerometer 32 in the structure 20 for one resonant frequency selected as a test target by the resonant frequency excitation control unit 18D in step S108 or step S118, and perform the above process each time the installation position of the accelerometer 32 is changed to calculate multiple second transfer function waveforms 42. Furthermore, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may perform the above process using each of multiple types of input vibrations with different amplitude intensities for one resonant frequency selected as a test target by the resonant frequency excitation control unit 18D in step S108 or step S118, with the installation position of the accelerometer 32 fixed.

[0123] In this case, the vibration propagation path calculation unit 18F obtains a plurality of second transfer function waveforms 42 including at least one of a plurality of second transfer function waveforms 42 calculated based on each of the accelerometers 32 installed at different positions for one resonant frequency selected as a test target, and a plurality of second transfer function waveforms 42 with different amplitude intensities.

[0124] In this case, as described above, the vibration propagation path calculation unit 18F calculates a vibration propagation path for each of the multiple second transfer function waveforms 42, and calculates the vibration propagation path that has the most overlapping paths with other vibration propagation paths as the vibration propagation path R for the resonant frequency.

[0125] Next, the processing unit 18 judges whether or not to end the calculation process of the vibration propagation path R (step S114). For example, the processing unit 18 performs the judgment of step S114 by judging whether or not an input of an end signal representing an end instruction has been received by a user's operation instruction on the UI unit 14. Alternatively, the processing unit 18 may perform the judgment of step S114 by judging whether or not the processing of steps S108 to S112 has been executed for all the resonance frequencies identified in step S104.

[0126] If the result of the determination in step S114 is negative (step S114: No), the process proceeds to step S116. In step S116, the resonant frequency excitation control unit 18D selects one resonant frequency that has not been selected as a test target from among the resonant frequencies identified in step S104 (step S116), and the process proceeds to step S108. In step S116, the resonant frequency excitation control unit 18D may select one resonant frequency selected by a user's operation instruction on the UI unit 14 from among the resonant frequencies identified in step S104.

[0127] If the determination in step S114 is affirmative (step S114: Yes), the process proceeds to step S118. In step S118, the output control unit 18G outputs the vibration propagation path R calculated in step S112 (step S118). The output control unit 18G outputs, for example, the vibration propagation path R, identification information of the component 22 that is the excitation source of the vibration propagation path R, and the resonance frequency of the input vibration used in calculating the vibration propagation path R to the UI unit 14, etc. Then, this routine ends.

[0128] As described above, the processing unit 18 of the information processing device 10 of this embodiment identifies the frequency of the first peak included in the first transfer function waveform 40 representing the relationship between the amplitude intensity and frequency of the output vibration generated in the parts 22 included in the structure 20 when a sweep vibration is applied to the structure 20 including a plurality of parts 22 as the resonant frequency of the parts 22, and calculates the vibration propagation path R that propagates through the structure 20 when an input vibration of the resonant frequency is applied to the structure 20 based on the frequency and half-width of the second peak included in the second transfer function waveform 42 representing the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the parts 22 included in the structure 20 when an input vibration of the resonant frequency is applied to the structure 20 for a predetermined duration of vibration.

[0129] In this manner, the processing unit 18 of the information processing device 10 of this embodiment calculates the vibration propagation path R of the vibration propagating through the structure 20 using the frequency and half-width of the second peak included in the second transfer function waveform 42.

[0130] Therefore, the information processing device 10 of the present embodiment can provide a vibration propagation path R.

[0131] Next, an example of the hardware configuration of the information processing device 10 of the above embodiment will be described.

[0132] FIG. 8 is a diagram showing an example of a hardware configuration of the information processing device 10 according to the embodiment.

[0133] The information processing device 10 of the above embodiment has a hardware configuration utilizing a conventional computer, in which a CPU (Central Processing Unit) 81, a ROM (Read Only Memory) 82, a RAM (Random Access Memory) 83, a communication I / F 84, etc. are interconnected via a bus 85.

[0134] The CPU 81 is a calculation device that controls the information processing device 10 of the above embodiment. The ROM 82 stores programs and the like that realize various processes by the CPU 81. Although a CPU is used for the explanation here, a GPU (Graphics Processing Unit) may be used as the calculation device that controls the information processing device 10. The RAM 83 stores data necessary for various processes by the CPU 81. The communication I / F 84 is an interface for transmitting and receiving data.

[0135] In the information processing device 10 of the above embodiment, the CPU 81 reads a program from the ROM 82 onto the RAM 83 and executes it, thereby realizing each of the above functions on the computer.

[0136] The programs for executing the above-mentioned processes executed by the information processing device 10 of the embodiment may be stored in a HDD (hard disk drive). Also, the programs for executing the above-mentioned processes executed by the information processing device 10 of the embodiment may be provided by being pre-installed in the ROM 82.

[0137] The program for executing the above-mentioned processes executed by the information processing device 10 of the above-mentioned embodiment may be stored in a computer-readable storage medium such as a CD-ROM, CD-R, memory card, DVD (Digital Versatile Disk), or flexible disk (FD) in an installable or executable format file and provided as a computer program product. The program for executing the above-mentioned processes executed by the information processing device 10 of the above-mentioned embodiment may be stored on a computer connected to a network such as the Internet and provided by downloading the program via the network. The program for executing the above-mentioned processes executed by the information processing device 10 to information processing device 10E of the above-mentioned embodiment may be provided or distributed via a network such as the Internet.

[0138] Although the embodiment of the present invention has been described above, this embodiment is presented as an example and is not intended to limit the scope of the invention. This new embodiment can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. This embodiment and its modifications are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims.

[0139] The present technology can also be configured as follows. (1) identifying a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including a plurality of components, as a resonant frequency of the component; calculating a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Processing section, An information processing device comprising: (2) The processing unit includes: calculating the vibration propagation path based on the second transfer function waveform calculated in response to the vibration acceleration detected by a vibration detector installed on the component; An information processing device as described in (1). (3) The processing unit includes: The component having a resonant frequency that is the frequency of the second peak with a smaller half-width has a shorter propagation distance of vibration from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform, and the vibration propagation path is calculated as a propagation path that sequentially connects the component having a resonant frequency that is the frequency of the second peak with a smaller half-width and another component having a resonant frequency that is the frequency of the second peak with a larger half-width. An information processing device according to (1) or (2). (4) The vibration duration is the time is equal to or longer than the time until the number of the second peaks included in the second transfer function waveform measured when the input vibration having the resonant frequency is applied to the structure increases with the lapse of excitation time of the input vibration and begins to saturate. An information processing device according to any one of (1) to (3). (5) The processing unit includes: calculating the vibration propagation path based on a plurality of types of the second transfer function waveforms detected by a plurality of vibration detectors installed on the different components; An information processing device according to any one of (1) to (4). (6) The processing unit includes: calculating the vibration propagation path based on the second peak included in the second transfer function waveform when an input vibration of the resonant frequency having an amplitude intensity less than an intensity that affects a function of the component constituting the structure is applied to the structure for the vibration duration; An information processing device according to any one of (1) to (5). (7) The processing unit includes: calculating the vibration propagation path based on the second peak included in each of the plurality of types of second transfer function waveforms when input vibrations of the resonant frequency having a plurality of different types of amplitude intensities less than the intensity are applied for the vibration duration; An information processing device according to any one of (1) to (6). (8) An information processing method executed by an information processing device, identifying a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including a plurality of components, as a resonant frequency of the component; calculating a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Information processing methods. (9) On the computer, a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including the component is identified as a resonant frequency of the component; calculating a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Information processing program. [Explanation of symbols]

[0140] 1. Information Processing Systems 10. Information processing device 18 Processing section 18A Sweep vibration control section 18B 1st transfer function waveform calculation section 18C Specific part 18D Resonant frequency excitation control section 18E 2nd transfer function waveform calculation section 18F Vibration propagation path calculation section 18G Output Control Unit 20 Structures 22 parts 30 Shaker 32 Accelerometer

Claims

1. identifying a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including a plurality of components, as a resonant frequency of the component; calculating a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Processing section, An information processing device comprising:

2. The processing unit includes: calculating the vibration propagation path based on the second transfer function waveform calculated in response to a vibration acceleration detected by a vibration detector installed on the component; The information processing device according to claim 1 .

3. The processing unit includes: The component having a resonant frequency that is the frequency of the second peak with a smaller half-width has a shorter propagation distance of vibration from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform, and the vibration propagation path is calculated as a propagation path that sequentially connects the component having a resonant frequency that is the frequency of the second peak with a smaller half-width and another component having a resonant frequency that is the frequency of the second peak with a larger half-width. The information processing device according to claim 2 .

4. The vibration duration is the time is equal to or longer than the time until the number of the second peaks included in the second transfer function waveform measured when the input vibration of the resonant frequency is applied to the structure increases with the lapse of excitation time of the input vibration and begins to saturate. The information processing device according to claim 1 .

5. The processing unit includes: calculating the vibration propagation path based on a plurality of types of the second transfer function waveforms detected by a plurality of vibration detectors installed on the different components; The information processing device according to claim 1 .

6. The processing unit includes: calculating the vibration propagation path based on the second peak included in the second transfer function waveform when an input vibration of the resonant frequency having an amplitude intensity less than an intensity that affects a function of the component constituting the structure is applied to the structure for the vibration duration; The information processing device according to claim 1 .

7. The processing unit includes: calculating the vibration propagation path based on the second peak included in each of the plurality of types of second transfer function waveforms when input vibrations of the resonant frequency having a plurality of different types of amplitude intensities less than the intensity are applied for the vibration duration; The information processing device according to claim 6.

8. An information processing method executed by an information processing device, identifying a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including a plurality of components, as a resonant frequency of the component; calculating a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure, based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Information processing methods.

9. On the computer, a frequency of a first peak included in a first transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in a component included in a structure when a sweep vibration is applied to the structure including a plurality of components is identified as a resonant frequency of the component; a vibration propagation path that propagates through the structure when an input vibration of the resonant frequency is applied to the structure is calculated based on the frequency and half-width of a second peak included in a second transfer function waveform that represents a relationship between an amplitude intensity and a frequency of an output vibration generated in at least a part of the component included in the structure when an input vibration of the resonant frequency is applied to the structure for a predetermined vibration duration; Information processing program.

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