Chuck pin and substrate holding device

Abstract

To provide a chuck pin and a substrate holding device that enable easy replacement of a holding portion.SOLUTION: A chuck pin 100 has a holding portion 110 and a fixing portion 120, and holds a substrate. The holding portion 110 has an inner peripheral surface 114 and an outer peripheral surface 113 that can abut against the substrate. A protruding portion 115 that protrudes inward is formed on the inner peripheral surface 114 of the holding portion 110. The fixing portion 120 includes a pressing portion 10, a pressed portion 20, and a biasing portion 30, and detachably fixes the holding portion 110. The pressing portion 10 has a side wall portion 12 in which an opening portion 12a is formed. The pressed portion 20 has a side wall portion 22 in which an opening portion 22a is formed. The biasing portion 30 biases the pressing portion 10 against the pressed portion 20 in a rotational direction R1. The protruding portion 115 on the inner circumferential surface 114 of the holding portion 110 is interposed between the pressing portion 10 and the pressed portion 20 at the opening portion 12a and the opening portion 22a.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a chuck pin for holding a substrate and a substrate holding device. [Background technology]

[0002] Substrate processing apparatuses are used to perform various processes on semiconductor substrates. In the substrate processing apparatus, a plurality of chuck pins abut against the outer peripheral edge of the substrate, thereby holding the substrate to be processed in a horizontal position. When the chuck pins are used for a long period of time, the parts of the chuck pins that come into contact with the substrate wear out, making it impossible to accurately hold or release the substrate. For this reason, the chuck pins are periodically replaced before they wear out.

[0003] Patent Document 1 describes a retaining pin in which a pin member is supported by a pin support portion. The pin support portion is provided with a hole portion having a spiral groove formed on its inner circumferential surface. The pin member is formed with a protrusion portion that screws into the hole portion of the pin support portion. Therefore, the pin member is fixed to the pin support portion by being turned in one direction, and is removed from the pin support portion by being turned in the opposite direction. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2000-100706 A Summary of the Invention [Problem to be solved by the invention]

[0005] The holding pin of Patent Document 1 facilitates the replacement of the pin member. However, in order to prevent a decrease in productivity due to a decrease in the operating rate of the substrate holding device caused by part replacement and an increase in labor costs for replacement workers, a chuck pin that allows the replacement of the holding part to be performed more easily is desired.

[0006] An object of the present invention is to provide a chuck pin and a substrate holding device that enable easy replacement of the holding portion. [Means for solving the problem]

[0007] A chuck pin according to one aspect of the present invention is a chuck pin for holding a substrate, and includes a holding portion having an inner surface and an outer surface capable of abutting the substrate, and a fixing portion for removably fixing the holding portion, the fixing portion including a pressing portion having a first side wall portion having a first opening formed therein, a pressed portion having a second side wall portion having a second opening formed therein, and a biasing portion for biasing the pressing portion in a first rotational direction against the pressed portion, and a protrusion is formed on the inner surface of the holding portion that protrudes inward and is sandwiched between the pressing portion and the pressed portion at the first opening and the second opening.

[0008] A substrate holding device according to another aspect of the present invention includes the above-described chuck pin and a plate portion to which the fixing portion of the chuck pin is attached. Effect of the Invention

[0009] According to the present invention, the pin member can be easily replaced. [Brief description of the drawings]

[0010] [Figure 1] 1 is a schematic cross-sectional view of a substrate holding device according to an embodiment of the present invention. [Diagram 2] FIG. [Diagram 3] FIG. 4 is an enlarged vertical cross-sectional view of a portion of the chuck pin. [Figure 4] FIG. 4 is a perspective view of a fixing portion of the chuck pin. [Diagram 5] 13A and 13B are diagrams for explaining an attachment operation of the holding portion by the arm portion. [Figure 6] 13A and 13B are diagrams for explaining the operation of removing the holding part by the arm part. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] 1.Substrate holding device Hereinafter, a chuck pin and a substrate holding device according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a schematic cross-sectional view of a substrate holding device according to an embodiment of the present invention. As shown in Fig. 1, the substrate holding device 200 includes a plurality of chuck pins 100, a rotation drive unit 210, a plate unit 220, a plurality of support pins 230 (three in this example), a magnet support unit 240, and an arm unit 250.

[0012] In this example, the rotation drive unit 210 is provided at the bottom of the substrate holding device 200. The rotation drive unit 210 includes a spin motor having a rotation shaft 211 extending upward. The plate unit 220 has a disk shape and is disposed at an upper end of the rotation shaft 211 of the rotation drive unit 210 in a substantially horizontal position. When the rotation drive unit 210 rotates the rotation shaft 211, the plate unit 220 rotates around a vertical axis. A plurality of through holes 221 corresponding to the support pins 230 are formed in the plate unit 220. A plurality of chuck pins 100 are provided on the periphery of the plate unit 220 at substantially equal angular intervals with respect to the rotation shaft 211.

[0013] Each chuck pin 100 includes a holding portion 110, a fixed portion 120, an attachment portion 130, and a rotation drive portion 140. The holding portion 110 includes a pin member, and is detachably fixed to the fixed portion 120. The arm portion 250 operates when the holding portion 110 is attached or detached. Details of the chuck pin 100 and the arm portion 250 will be described later. The fixed portion 120 is attached to the plate portion 220 by the attachment portion 130. When the holding portion 110 is fixed to the fixed portion 120, it protrudes above the plate portion 220.

[0014] The rotation drive unit 140 includes a magnet, and is fixed to the fixed unit 120 below the plate unit 220. The rotation drive unit 140 rotates the corresponding holder 110 between a holding state and a non-holding state. The holding state is a state in which the outer circumferential surface of the holder 110 abuts against the outer circumferential end of the substrate W. In the holding state, the substrate W is held by the multiple holders 110. In the non-holding state, the holder 110 is not in contact with the substrate W and is separated from the substrate W. In the non-holding state, the holding of the substrate W by the multiple holders 110 is released.

[0015] The support pins 230 are provided so as to extend upward and surround the rotation shaft 211 of the rotation drive unit 210. Each support pin 230 is raised and lowered between a standby position and a transfer position by an actuator (not shown). At the standby position, the upper end of each support pin 230 is lower than the plate unit 220. At the transfer position, each support pin 230 is inserted into the corresponding through hole 221 of the plate unit 220, so that the upper end of each support pin 230 is at approximately the same height as the holding unit 110 of the chuck pin 100. Each support pin 230 rises to the transfer position when the substrate W is transferred between a substrate transport device (not shown) and the substrate holding device 200, and falls to the standby position at other times.

[0016] The magnet support part 240 has an annular shape and surrounds the rotating shaft 211 and the multiple support pins 230 of the substrate holding device 200. The magnet support part 240 supports a ring-shaped magnet 241 and is raised and lowered between a holding position and a non-holding position by an actuator (not shown). The holding position is at approximately the same height as the rotation drive part 140 of the chuck pin 100. The non-holding position is below the holding position. As shown by the dotted line in FIG. 1, when the magnet support part 240 rises to the holding position, the magnet 241 approaches the magnet of the rotation drive part 140, causing the holding part 110 to rotate to the holding state. When the magnet support part 240 descends to the non-holding position, the magnet 241 moves away from the magnet of the rotation drive part 140, causing the holding part 110 to rotate to the non-holding state.

[0017] 2.Chuck pin Fig. 2 is an exploded perspective view of the chuck pin 100. Fig. 3 is an enlarged longitudinal sectional view of a portion of the chuck pin 100. Fig. 4 is a perspective view of a fixed portion 120 of the chuck pin 100. As shown in Fig. 2, the chuck pin 100 includes a holding portion 110, a fixed portion 120, an attachment portion 130, and a rotation drive portion 140.

[0018] The holding portion 110 includes a pin member 111 and a base portion 112. The pin member 111 protrudes upward from an upper portion of the base portion 112. The pin member 111 has an outer peripheral surface 113 at its upper portion that can come into contact with the substrate W. The base portion 112 has a cylindrical shape with a closed upper portion. The base portion 112 is fixed to the fixing portion 120 so as to cover the fixing portion 120. An inner peripheral surface 114 of the base portion 112 is formed with a protrusion portion 115 that protrudes inward. In this example, three protrusion portions 115 are formed on the inner peripheral surface 114 of the base portion 112 at intervals of 120 degrees in the circumferential direction.

[0019] The fixing portion 120 includes a pressing portion 10, a pressed portion 20, a biasing portion 30, and a support member (not shown). The pressing portion 10 has a main surface portion 11 and a side wall portion 12. The main surface portion 11 has a disk shape. A circular opening portion 11a is formed in the center of the main surface portion 11. Furthermore, a hole portion 11b is formed in the main surface portion 11. In this example, the hole portion 11b is formed in a notch shape so as to be continuous with the opening portion 11a, but the embodiment is not limited to this.

[0020] The side wall portion 12 is bent so as to extend downward from the outer edge of the main surface portion 11. Openings 12a are formed in the side wall portion 12. In this example, three openings 12a are formed in the side wall portion 12 at intervals of 120 degrees in the circumferential direction. The openings 12a indicate portions recessed toward the center of the side wall portion 12 when the side wall portion 12 is viewed in a plan view. The three openings 12a in the side wall portion 12 correspond to the three protrusions 115 of the holding portion 110, respectively. In addition, the cut edge of the side wall portion 12 where each opening 12a is formed has a tapered surface 12b.

[0021] The pressed portion 20 has a main surface portion 21, a side wall portion 22, and a side wall portion 23 (FIG. 3). The main surface portion 21 has a disk shape. A screw hole 21a is formed in the center of the main surface portion 21. In addition, a slit 21b is formed in the main surface portion 21, extending parallel to a rotational direction R1 described later.

[0022] The side wall portion 22 is formed so as to extend downward from the outer edge of the main surface portion 21 and partially upward. An opening 22a is formed in the side wall portion 22. In this example, three openings 22a are formed in the side wall portion 22 at intervals of 120 degrees in the circumferential direction. The three openings 22a in the side wall portion 22 correspond to the three protrusions 115 of the holding portion 110, respectively. In addition, the cut edge of the side wall portion 22 where each opening 22a is formed has a recess 22b. As shown in FIG. 3, the side wall portion 23 extends downward from the main surface portion 21, inward of the side wall portion 22. A hole 23a is formed in the side wall portion 23.

[0023] 4, the pressing portion 10 is provided so as to cover the pressed portion 20. In this state, the side wall portion 22 of the pressed portion 20 is exposed from the opening 12a of the side wall portion 12 of the pressing portion 10. As a result, the cut edge of the side wall portion 12 where the opening 12a is formed faces the cut edge of the side wall portion 22 where the opening 22a is formed. The tapered surface 12b of the side wall portion 12 is formed so as to gradually approach the recessed portion 22b of the side wall portion 22 in the rotational direction R1.

[0024] As shown in FIG. 2, the urging unit 30 is, for example, a torsion spring wound around an axis parallel to the vertical direction, and has ends 31 and 32. The end 31 is located at the upper end of the urging unit 30 and is bent upward. The end 32 is located at the lower end of the urging unit 30 and is bent inward. The urging unit 30 generates a urging force in a predetermined rotational direction. Hereinafter, the direction in which the urging unit 30 generates a urging force is referred to as a rotational direction R1, and the opposite direction is referred to as a rotational direction R2. In FIG. 2 and FIG. 4, the rotational directions R1 and R2 are indicated by thick arrows. The rotational direction R1 may be the same as the rotational direction of the plate unit 220 by the rotation drive unit 210 in FIG. 1, or may be opposite to the rotational direction of the plate unit 220.

[0025] As shown in FIG. 3, the urging portion 30 is disposed between the side wall portion 22 and the side wall portion 23 of the pressed portion 20. In this example, the urging portion 30 is disposed between the side wall portion 22 and the side wall portion 23 in a state where a force is applied in the rotation direction R2, and the end portion 32 is fitted into the hole portion 23a of the side wall portion 23. Here, by releasing the force on the urging portion 30 in the rotation direction R2, the urging portion 30 is wound around the outer surface of the side wall portion 23 in a state where the end portion 32 is fitted into the hole portion 23a of the side wall portion 23. In addition, the end portion 31 of the urging portion 30 is fitted into the hole portion 11b of the main surface portion 11 of the pressing portion 10 in FIG. 2 in a state where the end portion 31 is inserted into the slit 21b of the main surface portion 21 of the pressed portion 20.

[0026] In this configuration, the pressing portion 10 is urged by the urging portion 30 against the pressed portion 20 in the rotation direction R1. Therefore, the fixed portion 120 is covered by the base portion 112 of the holding portion 110, and the protruding portion 115 of the base portion 112 is sandwiched between the pressing portion 10 and the pressed portion 20 at the openings 12a and 22a. This causes the holding portion 110 to be fixed to the fixing portion 120. In this example, each protruding portion 115 is guided along the tapered surface 12b of the pressing portion 10 to the corresponding recessed portion 22b of the pressed portion 20 and abuts against the recessed portion 22b. Therefore, the holding portion 110 is fixed more stably.

[0027] The support member (not shown) is disposed below the pressed portion 20. In this state, the bolt 101 is inserted into the support member from below. The tip of the bolt 101 protrudes from the support member and screws into the screw hole 21a in the main surface portion 21 of the pressed portion 20. This causes the pressed portion 20 to be supported by the support member. As shown in FIG. 4, the tip of the bolt 101 screwed into the screw hole 21a protrudes upward through the opening 11a of the pressing portion 10.

[0028] As shown in FIG. 2, the mounting portion 130 has a tube portion 131 and a base portion 132. The tube portion 131 has a substantially cylindrical shape and extends in the vertical direction so as to be inserted into the plate portion 220 of FIG. 1. The base portion 132 has a substantially oval shape and spreads outward from the lower end of the tube portion 131 below the plate portion 220. Two through holes 133 are formed in the base portion 132 so as to face each other with the tube portion 131 in between. A screw 102 is inserted from below into each through hole 133 and screwed into a screw hole (not shown) on the lower surface of the plate portion 220. In this way, the mounting portion 130 is fixed to the plate portion 220.

[0029] In this example, a ball bearing (not shown) having a plurality of rolling members, an inner ring, and an outer ring is provided. The plurality of rolling members are held between the inner ring and the outer ring by a retainer. The inner ring is fitted into the outer peripheral surface of a support member (not shown) of the fixed part 120. The outer ring is fitted into the inner peripheral surface of a tube part 131 of the mounting part 130. In this way, the fixed part 120 is attached to the mounting part 130 so as to be rotatable around the central axis of the ball bearing.

[0030] The rotation drive unit 140 is attached to the lower end of the support member of the fixed unit 120. The rotation drive unit 140 rotates the holding unit 110 together with the fixed unit 120 between a holding state and a non-holding state in accordance with the operation of the magnet support unit 240 in FIG.

[0031] 3. Arm section 5 is a diagram for explaining the mounting operation of the holding part 110 by the arm part 250. As shown in FIG. 5, the arm part 250 includes a pair of fingers 251, 252. When mounting the holding part 110, the arm part 250 moves above the fixed part 120 while gripping the holding part 110 with the fingers 251, 252. In this state, the arm part 250 descends as shown by the outlined arrow in FIG. 5. In this case, the holding part 110 held by the fingers 251, 252 is pushed into the fixed part 120.

[0032] 2 rotates in a rotation direction R2 against the biasing force of the biasing portion 30, and the protrusion 115 of the holding portion 110 enters the opening 12a of the pressing portion 10 and the opening 22a of the pressed portion 20. Next, when the fingers 251 and 252 release the grip of the holding portion 110, the pressing portion 10 is biased by the biasing portion 30 to rotate in the rotation direction R1, and the protrusion 115 of the holding portion 110 is sandwiched between the pressing portion 10 and the pressed portion 20 at the openings 12a and 22a. As a result, the holding portion 110 is attached to the fixed portion 120.

[0033] Thereafter, the arm unit 250 grips the other holding units 110 with the fingers 251, 252 and repeats the same attachment operation for the other fixed units 120. In this way, the holding units 110 are attached to all of the fixed units 120. In a series of attachment operations for the multiple holding units 110, the arm unit 250 may move sequentially above the multiple fixed units 120, or the plate unit 220 in FIG. 1 may be rotated so that the multiple fixed units 120 move sequentially below the arm unit 250.

[0034] 6 is a diagram for explaining the operation of removing the holding part 110 by the arm part 250. As shown in FIG. 6, when removing the holding part 110, the arm part 250 moves above the fixed part 120 and grips the holding part 110 fixed to the fixed part 120 with fingers 251, 252. In this state, the arm part 250 rotates in the rotation direction R2 and rises as shown by the outlined arrow in FIG. 6. In this case, the holding part 110 is pulled out from the fixed part 120 while being twisted in the rotation direction R2. As a result, the holding part 110 is removed from the fixed part 120.

[0035] Thereafter, the arm unit 250 grips the other holding units 110 with the fingers 251, 252 and repeats the same removal operation for the other fixed units 120. In this manner, the holding units 110 are removed from all of the fixed units 120. In a series of removal operations for the multiple holding units 110, the arm unit 250 may move sequentially above the multiple fixed units 120, or the plate unit 220 in FIG. 1 may be rotated so that the multiple fixed units 120 move sequentially below the arm unit 250.

[0036] 4.Effects In the chuck pin 100 according to the present embodiment, when the holding portion 110 is attached, the holding portion 110 is pressed into the fixed portion 120, whereby the pressing portion 10 of the fixed portion 120 rotates in the rotation direction R2 against the biasing force of the biasing portion 30, and the protrusion 115 of the holding portion 110 enters the opening 12a of the pressing portion 10 and the opening 22a of the pressed portion 20. In this state, the pressing portion 10 is biased by the biasing portion 30 to rotate in the rotation direction R1, whereby the protrusion 115 of the holding portion 110 is sandwiched between the pressing portion 10 and the pressed portion 20 at the openings 12a and 22a. This allows the holding portion 110 to be attached to the fixed portion 120.

[0037] On the other hand, when removing the holding part 110, the holding part 110 is pulled out from the fixed part 120 while being twisted in the rotational direction R2. This allows the holding part 110 to be removed from the fixed part 120. In this manner, the holding part 110 is attached to and detached from the fixed part 120 with a simple operation. This allows the holding part 110 to be easily replaced.

[0038] The side wall portion 22 of the pressed portion 20 is exposed from the opening 12a of the pressing portion 10. In this case, the holding portion 110 can be fixed to the fixing portion 120 with a simple structure without increasing the size of the chuck pin 100.

[0039] In the pressed portion 20, the cut edge of the side wall portion 22 where the opening 22a is formed has a recess 22b that abuts against the protrusion 115 of the holding portion 110. In this case, the holding portion 110 can be fixed more stably.

[0040] In the pressing part 10, the cut edge of the side wall part 12 where the opening 12a is formed has a tapered surface 12b that gradually approaches the recess 22b of the pressed part 20 in the rotation direction R1. In this case, when the holding part 110 is attached, it becomes easy to rotate the pressing part 10 in the rotation direction R2 and to guide the protrusion 115 of the holding part 110 into the recess 22b of the pressed part 20.

[0041] The urging portion 30 has an end portion 31. The pressing portion 10 has a main surface portion 11 in which a hole portion 11b into which the end portion 31 of the urging portion 30 is fitted is formed. The pressed portion 20 has a main surface portion 21 in which a slit 21b extending parallel to the rotation direction R1 and into which the end portion 31 of the urging portion 30 is inserted is formed. In this case, the pressing portion 10 can be easily rotated without rotating the pressed portion 20.

[0042] The pressed portion 20 has a side wall portion 23 formed inwardly of the side wall portion 22. The biasing portion 30 is disposed between the side wall portion 22 and the side wall portion 23 of the pressed portion 20. In this case, the biasing portion 30 can be stored compactly.

[0043] The urging portion 30 has an end portion 32. A hole portion 23a into which the end portion 32 of the urging portion 30 is fitted is formed in the side wall portion 23 of the pressed portion 20. In this case, the urging portion 30 can be easily fixed.

[0044] The chuck pin 100 includes a rotation drive unit 140 that rotates the holding unit 110 and the fixed unit 120 between a holding state in which the outer circumferential surface 113 of the holding unit 110 abuts against the substrate W to hold the substrate W, and a non-holding state in which the outer circumferential surface 113 of the holding unit 110 is separated from the substrate W to not hold the substrate W. In this case, the chuck pin 100 can be used as a rotary pin.

[0045] The substrate holding device 200 includes a chuck pin 100 and a plate portion 220 to which the fixing portion 120 of the chuck pin 100 is attached. In this case, since the above-mentioned chuck pin 100 is used, the holding portion 110 can be easily replaced. The substrate holding device 200 also includes a rotation drive portion 210 that rotates the plate portion 220. In this case, the substrate W can be processed while being rotated.

[0046] Furthermore, the substrate holding device 200 includes an arm unit 250 which, while holding the holding portion 110 of the chuck pin 100, pushes the holding portion 110 into the fixed portion 120, and, while holding the holding portion 110 of the chuck pin 100, twists the holding portion 110 in the rotation direction R2 and pulls it out from the fixed portion 120. In this case, the holding portion 110 is automatically attached to the fixed portion 120 by the arm unit 250. Also, the holding portion 110 is automatically detached from the fixed portion 120 by the arm unit 250. This allows for manpower savings when replacing the holding portion 110.

[0047] 5. Other embodiments (1) In the above embodiment, the chuck pin 100 is a rotary chuck pin in which the holding portion 110 rotates between a holding state and a non-holding state, but the embodiment is not limited to this. At least a part of the chuck pins 100 provided in the substrate holding device 200 may be fixed chuck pins. In this case, the holding portion 110 does not need to include the rotation drive portion 140.

[0048] (2) In the above embodiment, the substrate holding device 200 holds the outer peripheral edge of the substrate W from below, but the embodiment is not limited to this. The substrate holding device 200 may hold the outer peripheral edge of the substrate W from above. In this case, each chuck pin 100 is provided such that the holding portion 110 protrudes below the plate portion 220.

[0049] (3) In the above embodiment, the tapered surface 12b is formed on the side wall 12 of the pressing portion 10 and the recess 22b is formed on the side wall 22 of the pressed portion 20, but the embodiment is not limited to this. When the holding portion 110 is stably fixed to the fixing portion 120, the tapered surface 12b does not have to be formed on the side wall 12 of the pressing portion 10, and the recess 22b does not have to be formed on the side wall 22 of the pressed portion 20.

[0050] (4) In the above embodiment, the arm unit 250 performs both the attachment and removal of the holding unit 110, but the embodiment is not limited to this. The arm unit 250 may perform only one of the attachment and removal of the holding unit 110. Alternatively, the arm unit 250 that attaches the holding unit 110 and the arm unit 250 that removes the holding unit 110 may be provided separately.

[0051] (5) In the above embodiment, the substrate holding device 200 includes the rotation drive unit 210 and the arm unit 250, but the embodiment is not limited to this. When it is not necessary to rotate the plate unit 220, the substrate holding device 200 does not need to include the rotation drive unit 210. In addition, when the replacement of the holding unit 110 of the chuck pin 100 is performed manually by a user, the substrate holding device 200 does not need to include the arm unit 250.

[0052] 6. Correspondence between each component of the claims and each part of the embodiment Below, examples of the correspondence between each component of the claims and each element of the embodiment will be described, but the present invention is not limited to the following examples. Various other elements having the configuration or function described in the claims can also be used as each component of the claims.

[0053] In the above embodiment, substrate W is an example of a substrate, chuck pin 100 is an example of a chuck pin, inner circumferential surface 114 is an example of an inner circumferential surface, outer circumferential surface 113 is an example of an outer circumferential surface, holding portion 110 is an example of a holding portion, and fixing portion 120 is an example of a fixing portion. Openings 12a and 22a are examples of first and second openings, respectively, side wall portions 12, 22, and 23 are examples of first, second, and third side wall portions, respectively, pressing portion 10 is an example of a pressing portion, and pressed portion 20 is an example of a pressed portion.

[0054] The rotation directions R1 and R2 are examples of the first and second rotation directions, the biasing portion 30 is an example of a biasing portion, the protrusion 115 is an example of a protrusion, the recess 22b is an example of a recess, and the tapered surface 12b is an example of a tapered surface. The ends 31 and 32 are examples of the first and second ends, the holes 11b and 23a are examples of the first and second holes, the main surface portions 11 and 21 are examples of the first and second main surface portions, and the slit 21b is an example of a slit. The rotation drive portion 140 is an example of a rotation drive portion, the plate portion 220 is an example of a plate portion, the substrate holding device 200 is an example of a substrate holding device, the rotation drive portion 210 is an example of a rotation drive portion, and the arm portion 250 is an example of an arm portion.

[0055] 7. Summary of the embodiment (1) The chuck pin according to the first paragraph is A chuck pin for holding a substrate, a holder having an inner circumferential surface and an outer circumferential surface capable of contacting the substrate; a fixing portion that detachably fixes the holding portion, The fixing portion is a pressing portion having a first side wall portion in which a first opening is formed; a pressed portion having a second side wall portion in which a second opening is formed; a biasing portion that biases the pressing portion against the pressed portion in a first rotation direction, A protrusion is formed on the inner circumferential surface of the holding portion, protruding inwardly and sandwiched between the pressing portion and the pressed portion at the first opening and the second opening.

[0056] In this chuck pin, when the holding part is attached, the holding part is pressed against the fixed part, causing the pressing part of the fixed part to rotate in the opposite direction to the first rotation direction against the biasing force of the biasing part, and the protruding part of the holding part enters the first opening of the pressing part and the second opening of the pressed part. In this state, the pressing part is biased by the biasing part to rotate in the first rotation direction, causing the protruding part of the holding part to be sandwiched between the pressing part and the pressed part at the first opening and the second opening. This allows the holding part to be attached to the fixed part.

[0057] On the other hand, when removing the holding part, the holding part is pulled out from the fixed part while being twisted in the opposite direction to the first rotation direction. This allows the holding part to be removed from the fixed part. In this way, the holding part is attached to and detached from the fixed part with a simple operation. This allows the holding part to be easily replaced.

[0058] (2) In the chuck pin according to the first aspect, The second side wall portion of the pressed portion may be exposed from the first opening portion of the pressing portion.

[0059] In this case, the holding portion can be fixed to the fixed portion with a simple structure without increasing the size of the chuck pin.

[0060] (Item 3) In the chuck pin according to item 1 or 2, In the pressed portion, a cut edge of the second side wall portion where the second opening is formed may have a recess that abuts against the protrusion of the holding portion.

[0061] In this case, the protrusion of the holding portion abuts against the recess of the pressed portion, so that the holding portion can be fixed more stably.

[0062] (4) In the chuck pin according to the third aspect, In the pressing portion, a cut edge of the first side wall portion where the first opening is formed may have a tapered surface that gradually approaches the recess of the pressed portion in the first rotation direction.

[0063] In this case, when attaching the holding portion, it becomes easy to rotate the pressing portion in the direction opposite to the first rotation direction and to guide the protruding portion of the holding portion into the recessed portion of the pressed portion.

[0064] (Item 5) In the chuck pin according to any one of items 1 to 4, The biasing portion has a first end, the pressing portion further has a first main surface portion having a first hole portion formed therein into which the first end portion of the biasing portion is fitted, The pressed portion may further have a second main surface portion extending parallel to the first rotation direction and having a slit formed therein through which the first end portion of the biasing portion is inserted.

[0065] In this case, the pressing portion can be easily rotated without rotating the pressed portion.

[0066] (Item 6) In the chuck pin according to any one of items 1 to 5, The pressed portion further includes a third side wall portion formed inwardly of the second side wall portion, The biasing portion may be disposed between the second side wall portion and the third side wall portion of the pressed portion.

[0067] In this case, the biasing portion can be housed compactly.

[0068] (7) In the chuck pin according to the above (6), The biasing portion has a second end, The third side wall of the pressed portion may be formed with a second hole into which the second end of the biasing portion is fitted.

[0069] In this case, the biasing portion can be easily fixed.

[0070] (Item 8) The chuck pin according to any one of items 1 to 7, The substrate may further include a rotation drive unit that rotates the holding unit and the fixed unit between a holding state in which the outer peripheral surface of the holding unit abuts against the substrate and holds the substrate, and a non-holding state in which the outer peripheral surface of the holding unit moves away from the substrate and does not hold the substrate.

[0071] In this case, the chuck pin can be used as a rotary pin.

[0072] (Item 9) The substrate holding device according to item 9 includes: A chuck pin according to any one of items 1 to 8, and a plate portion to which the fixing portion of the chuck pin is attached.

[0073] In this case, since the above-mentioned chuck pin is used, the holding portion can be easily replaced.

[0074] (Item 10) The substrate holding device according to item 9, The device may further include a rotation drive unit that rotates the plate unit.

[0075] In this case, the substrate can be processed while being rotated.

[0076] (Item 11) The substrate holding device according to item 9 or 10, The chuck pin may further include a first arm portion that presses the holding portion into the fixed portion while gripping the holding portion of the chuck pin.

[0077] In this case, the holding part is automatically attached to the fixing part by the arm part, which reduces the number of people required to replace the holding part.

[0078] (Item 12) The substrate holding device according to any one of items 9 to 11, The chuck pin may further include a second arm portion that, while gripping the holding portion of the chuck pin, twists the holding portion in a second direction opposite to the first rotation direction and pulls the holding portion out from the fixed portion.

[0079] In this case, the holding part is automatically detached from the fixing part by the arm part, which reduces the number of people required to replace the holding part. [Explanation of symbols]

[0080] 10... pressing portion, 11, 21... main surface portion, 11a, 12a, 22a... opening portion, 11b, 23a... hole portion, 12, 22, 23... side wall portion, 12b... tapered surface, 20... pressed portion, 21a... screw hole, 21b... slit, 22b... recess, 30... biasing portion, 31, 32... end portion, 100... chuck pin, 101... bolt, 102... screw, 110... holding portion, 111... pin member, 112, 132... base portion, 1 13...outer peripheral surface, 114...inner peripheral surface, 115...projection portion, 120...fixed portion, 130...mounting portion, 131...tubular portion, 133...through hole, 140...rotation drive portion, 200...substrate holding device, 210...rotation drive portion, 211...rotation shaft, 220...plate portion, 221...through hole, 230...support pin, 240...magnet support portion, 241...magnet, 250...arm portion, 251, 252...fingers, R1, R2...rotation direction

Claims

1. A chuck pin for holding a substrate, a holder having an inner circumferential surface and an outer circumferential surface capable of contacting the substrate; a fixing portion that detachably fixes the holding portion, The fixing portion is a pressing portion having a first side wall portion in which a first opening is formed; a pressed portion having a second side wall portion in which a second opening is formed; a biasing portion that biases the pressing portion against the pressed portion in a first rotation direction, A chuck pin, wherein the inner circumferential surface of the holding portion is formed with a protrusion that protrudes inward and is sandwiched between the pressing portion and the pressed portion at the first opening and the second opening.

2. The chuck pin according to claim 1 , wherein the second side wall portion of the pressed portion is exposed from the first opening portion of the pressing portion.

3. 3. The chuck pin according to claim 1, wherein the cut edge of the second side wall portion, in which the second opening is formed, of the pressed portion has a recess that abuts against the protrusion of the holding portion.

4. 4. The chuck pin according to claim 3, wherein in the pressing portion, a cut edge of the first side wall portion where the first opening is formed has a tapered surface that gradually approaches the recess of the pressed portion toward the first rotation direction.

5. The biasing portion has a first end, the pressing portion further includes a first main surface portion having a first hole portion formed therein into which the first end portion of the biasing portion is fitted, 3. The chuck pin according to claim 1, wherein the pressed portion further includes a second main surface portion extending parallel to the first rotation direction and having a slit formed therein through which the first end portion of the biasing portion is inserted.

6. The pressed portion further includes a third side wall portion formed inwardly of the second side wall portion, 3. The chuck pin according to claim 1, wherein the biasing portion is disposed between the second side wall portion and the third side wall portion of the pressed portion.

7. The biasing portion has a second end, 7. The chuck pin according to claim 6, wherein the third side wall of the pressed portion has a second hole formed therein, into which the second end of the biasing portion is fitted.

8. 3. The chuck pin according to claim 1, further comprising a rotation drive unit that rotates the holding portion and the fixed portion between a holding state in which the outer circumferential surface of the holding portion abuts against the substrate and holds the substrate, and a non-holding state in which the outer circumferential surface of the holding portion is separated from the substrate and does not hold the substrate.

9. The chuck pin according to claim 1 or 2, and a plate portion to which the fixing portion of the chuck pin is attached.

10. The substrate holding device according to claim 9 , further comprising a rotation drive unit that rotates the plate unit.

11. The substrate holding device according to claim 9 , further comprising an arm portion that presses the holding portion of the chuck pin into the fixed portion while gripping the holding portion.

12. 10. The substrate holding device according to claim 9, further comprising an arm portion that, while gripping the holding portion of the chuck pin, twists the holding portion in a second direction opposite to the first rotation direction and pulls the holding portion out from the fixed portion.

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