Heat treatment device

Abstract

To provide a heat treatment device which can remove a foreign matter, and can suppress elongation of a manufacturing time.SOLUTION: A heat treatment device includes: a treatment part for subjecting a workpiece to heat treatment; a stacking part for temporarily storing the workpiece subjected to the heat treatment; a conveyance part which is provided between the treatment part and the stacking part, and delivers the workpiece therebetween; and a dust cooling part which is provided in a region between the treatment pat and the stacking part, and removes a foreign matter attached to the workpiece subjected to the heat treatment and cools the workpiece.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] An embodiment of the present invention relates to a heat treatment apparatus. [Background technology]

[0002] 2. Description of the Related Art There are heat treatment devices that heat a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece. Here, foreign matter such as particles may be attached to the surface of the workpiece that has been subjected to the heat treatment. If foreign matter is attached to the surface of the workpiece, there is a risk that the quality of the film formed on the workpiece or the treated portion may be reduced.

[0003] In general, foreign matter adhering to a workpiece is removed using a liquid cleaning device or the like. However, when foreign matter is removed using a liquid cleaning device or the like, the manufacturing time is increased because the workpiece needs to be transferred between the heat treatment device and the liquid cleaning device. In addition, the need for a heat treatment device and a liquid cleaning device increases the installation space and costs of the equipment. Therefore, there has been a demand for the development of a heat treatment apparatus capable of removing foreign matter and suppressing an increase in the manufacturing time. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-184229 A Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide a heat treatment apparatus capable of removing foreign matter and suppressing an increase in the manufacturing time. [Means for solving the problem]

[0006] The heat treatment apparatus according to the embodiment includes a processing section which heat treats a workpiece, an accumulation section which temporarily stores the workpiece after the heat treatment, a transport section which is provided between the processing section and the accumulation section and which transfers the workpiece, and a dust collection and cooling section which is provided in the area between the processing section and the accumulation section and which removes foreign matter adhering to the workpiece after the heat treatment and cools the workpiece. Effect of the Invention

[0007] According to an embodiment of the present invention, a heat treatment apparatus capable of removing foreign matter and suppressing an increase in manufacturing time is provided. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic plan view illustrating a heat treatment apparatus according to an embodiment of the present invention; [Diagram 2] FIG. 2 is a schematic side view of the heat treatment apparatus shown in FIG. [Diagram 3] 2 is a schematic diagram of a processing section in FIG. 1 as viewed from the direction of line AA. [Figure 4] 4 is a schematic cross-sectional view of the processing portion in FIG. 3 taken along line BB. [Diagram 5] 3 is a schematic diagram of the accumulation section and the dust-collection / cooling section in FIG. 2 as viewed from the CC line direction. [Figure 6] 4 is a schematic cross-sectional view illustrating a dust collection and cooling section. FIG. [Figure 7] 10 is a schematic diagram illustrating a case in which a dust collection / cooling unit is provided in a housing of an accumulation unit. FIG. [Figure 8] FIG. 13 is a schematic diagram illustrating a case where a dust-collection / cooling unit is provided on an opening / closing door of an accumulation unit (housing). [Figure 9] FIG. 13 is a schematic diagram illustrating a case where a dust-collection / cooling unit is provided on an opening / closing door of a processing unit (chamber). [Figure 10] 13 is a schematic cross-sectional view illustrating a dust collection / cooling section according to another embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate. In the following, as an example, a heat treatment apparatus for heating a workpiece in an atmosphere reduced in pressure below atmospheric pressure to form an organic film on the surface of the workpiece will be described. However, the present invention is not limited to this. For example, the present invention can also be applied to a heat treatment apparatus for heating a workpiece to form an inorganic film or the like on the surface of the workpiece or to treat the surface of the workpiece.

[0010] In addition, the work before the heat treatment may have, for example, a substrate and a solution applied to the surface of the substrate, or may be only a substrate. In the following, as an example, a case where the work before the heat treatment has a substrate and a solution applied to the surface of the substrate will be described.

[0011] The workpiece 100 before being subjected to heat treatment by the heat treatment device 1 according to this embodiment has a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the exemplified ones. The solution contains, for example, an organic material and a solvent. The organic material is not particularly limited as long as it can be dissolved by the solvent. The solution can be, for example, a varnish containing polyamic acid. However, the solution is not limited to the exemplified ones. The solution may also be a liquid that has been provisionally baked to be in a semi-hardened state (non-flowing state).

[0012] FIG. 1 is a schematic plan view illustrating a heat treatment apparatus 1 according to the present embodiment. FIG. 2 is a schematic side view of the heat treatment apparatus 1 shown in FIG. As shown in FIGS. 1 and 2, the heat treatment apparatus 1 includes, for example, a processing section 2, an accumulation section 3, a transport section 4, a carry-in / carry-out section 5, a transport section 6, a dust collection / cooling section 7, and a controller 8.

[0013] The controller 8 includes, for example, a calculation unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The controller 8 is, for example, a computer. The controller 8 controls the operation of each element provided in the heat treatment device 1 based on, for example, a control program stored in the storage unit.

[0014] The processing section 2 heat-treats the workpiece 100. For example, the processing section 2 heats the workpiece 100 to form an organic film on the surface of the workpiece 100. Note that, although the case where four processing sections 2 are provided is illustrated in Fig. 1, the number of processing sections 2 can be changed as appropriate. It is sufficient that at least one processing section 2 is provided.

[0015] FIG. 3 is a schematic diagram of the processing section 2 in FIG. 1 as viewed from the direction of line AA. In order to avoid complication, the opening / closing door 21a (corresponding to an example of a second opening / closing door) is omitted in Fig. 3. Also, only one cassette 25 is illustrated. FIG. 4 is a schematic cross-sectional view of the processing section 2 in FIG. 3 taken along the line BB.

[0016] As shown in FIGS. 3 and 4, the processing section 2 includes, for example, a chamber 21, an exhaust section 22, a heating section 23, a cassette rack 24, and a cassette 25.

[0017] The chamber 21 in which the workpiece 100 is heat-treated is box-shaped. The chamber 21 has an airtight structure capable of maintaining an atmosphere at a reduced pressure lower than atmospheric pressure. There is no particular limitation on the external shape of the chamber 21. The external shape of the chamber 21 may be, for example, a rectangular parallelepiped or a cylinder. The chamber 21 is formed from a metal such as stainless steel.

[0018] The end of the chamber 21 facing the transport unit 4 is open. The opening of the chamber 21 is opened and closed by the opening door 21a. For example, the opening door 21a may be provided at the opening of the chamber 21 and may be movable up and down. The opening door 21a may also be provided at the opening of the chamber 21 and may be movable to the side of the chamber 21. When the opening door 21a is opened, the workpiece 100 can be carried in or out of the cassette 25 through the opening of the chamber 21. When the opening door 21a is closed, the opening of the chamber 21 is closed so as to be airtight by a sealing material such as an O-ring. The opening of the chamber 21 on the opposite side to the opening door 21a is closed by a lid 21b. A cooling device such as a water jacket may also be provided on the outer wall of the chamber 21.

[0019] The exhaust unit 22 exhausts the inside of the chamber 21. As shown in Fig. 3, the exhaust unit 22 includes, for example, an exhaust pump 22a and an exhaust pump 22b. The exhaust pump 22a may be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure, and may be, for example, a dry vacuum pump.

[0020] The exhaust pump 22b exhausts the air to a lower predetermined pressure after the rough exhaust by the exhaust pump 22a. The exhaust pump 22b has an exhaust capacity capable of exhausting the air to a molecular flow region of a high vacuum. For example, the exhaust pump 22b can be a turbo molecular pump (TMP).

[0021] Each of the exhaust pumps 22a and 22b is connected to an exhaust port 21c provided on the bottom surface of the chamber 21 via a pressure control unit 22c such as an APC (Auto Pressure Controller).

[0022] The heating unit 23 includes, for example, a first heating unit 23a and a second heating unit 23b. The first heating unit 23a and the second heating unit 23b are provided inside the chamber 21. The first heating unit 23 a is provided above the cassette 25 . The second heating section 23b is provided below the cassette 25. The second heating section 23b faces the first heating section 23a.

[0023] As described below, the workpiece 100 is supported inside the cassette 25. Therefore, the first heating unit 23a heats the front surface (upper surface) of the workpiece 100 supported inside the cassette 25. The second heating unit 23b heats the back surface (lower surface) of the workpiece 100 supported inside the cassette 25.

[0024] For example, a plurality of cassettes 25 may be provided vertically lined up inside the chamber 21. In this case, the second heating unit 23b provided below the upper cassette 25 may serve as the first heating unit 23a provided above the lower cassette 25. In other words, the first heating unit 23a or the second heating unit 23b provided between the cassettes 25 may be shared.

[0025] The first heating section 23a and the second heating section 23b each include, for example, a heater 23c, a support section 23d, and a holder section 23e. At least one heater 23c is provided. For example, one support portion 23d is provided for one heater 23c or one support portion 23d is provided for multiple heaters 23c. For example, one holder 23e is provided for one heater 23c or one support portion 23e is provided for multiple heaters 23c.

[0026] Each of the first heating section 23a and the second heating section 23b illustrated in FIG. 3 and FIG. 4 has a plurality of heaters 23c. The plurality of heaters 23c are arranged, for example, in a direction intersecting the central axis of the heater 23c. In this case, the plurality of heaters 23c may be arranged at equal intervals, or the intervals may be changed according to the temperature variation in the surface of the workpiece 100. In addition, the specifications, number, intervals, etc. of the heaters 23c provided in the second heating section 23b may be the same as or different from the specifications, number, intervals, etc. of the heaters 23c provided in the first heating section 23a. The specifications, number, intervals, etc. of the heaters 23c can be appropriately changed according to the composition of the solution to be heated (heating temperature of the solution), the size of the workpiece 100, etc. The specifications, number, intervals, etc. of the heaters 23c can be appropriately determined by performing simulations, experiments, etc.

[0027] The heater 23c may be a rod-shaped heater extending in one direction. The heater 23c is not particularly limited as long as it is a rod-shaped heater. The heater 23c may be, for example, a sheath heater, a ceramic heater, a cartridge heater, or the like. The heater 23c may have, for example, a quartz cover.

[0028] The cassette rack 24 is provided inside the chamber 21. The cassette rack 24 holds the heater 23c and the cassette 25 at predetermined positions inside the chamber 21. The cassette rack 24 includes a frame 24a, a receiving member 24b, and a reflecting plate 24c. The frame 24a is, for example, a framework structure formed by using elongated members. The external shape of the frame 24a is not particularly limited. The external shape of the frame 24a can be, for example, a rectangular parallelepiped or a cylinder.

[0029] At least a pair of receiving members 24b are provided inside the frame 24a. The pair of receiving members 24b are provided, for example, on inner walls of the frame 24a facing each other. The pair of receiving members 24b support the cassette support portion 25g of the cassette 25 inside the chamber 21. For example, the pair of receiving members 24b are provided between the first heating unit 23a and the second heating unit 23b in the vertical direction. One cassette 25 is placed on the pair of receiving members 24b. Therefore, a pair of receiving members 24b is provided for each cassette 25.

[0030] The reflector 24c reflects the heat incident from the heater 23c side to the cassette 25 side. The provision of the reflector 24c can improve the heat storage in the internal space (processing space) of the cassette 25. The reflector 24c has a plate shape and is provided on the outer surface of the frame 24a.

[0031] The cassette 25 is detachably mounted on a pair of receiving members 24b of a cassette rack 24 provided inside the chamber 21. In this case, the cassette 25 is detachably mounted between the first heating unit 23a and the second heating unit 23b. It is also possible to omit the cassette 25. In the case where the cassette 25 is omitted, a workpiece support portion 25f, which will be described later, is provided inside the chamber 21.

[0032] The cassette 25 is box-shaped and has a processing space therein in which the workpiece 100 is supported.

[0033] The cassette 25 has, for example, a cassette frame (not shown) having a rectangular parallelepiped outer shape, a heat equalizing plate arranged to cover five outer surfaces of the cassette frame except for the outer surface facing the opening / closing door 21a, a plurality of work support parts for supporting the work 100 within the cassette frame, and a cassette support part 25g.

[0034] The cassette support parts 25g are provided on each of a pair of opposing side surfaces of the cassette 25 adjacent to the outer surface facing the opening and closing door 21a. The cassette support parts 25g are supported by the receiving members 24b of the cassette rack 24. That is, the cassette 25 is detachably provided inside the chamber 21 (cassette rack 24) by the cassette support parts 25g and the receiving members 24b. If the cassette 25 is detachably provided inside the chamber 21, maintenance of the cassette 25 can be facilitated.

[0035] The workpiece 100 is carried into or out of the cassette 25 through an opening provided on the outer surface of the cassette frame where the heat equalizing plate is not provided.

[0036] The heat spreader plate can be made of a metal such as aluminum, copper, or stainless steel.

[0037] The accumulating unit 3 temporarily stores the workpieces 100 before the heat treatment and the workpieces 100 after the heat treatment. The accumulating unit 3 may further include a function of cooling the workpieces 100 after the heat treatment. The accumulating unit 3 is provided, for example, at a position separated from the processing unit 2.

[0038] FIG. 5 is a schematic diagram of the accumulation section 3 and the dust-collection / cooling section 7 in FIG. 2 as viewed from the direction of line CC. As shown in FIGS. 1, 2, and 5, the accumulation unit 3 includes, for example, a housing 31, a filter 32, and an exhaust unit 33. The housing 31 is box-shaped, and temporarily houses the workpiece 100 before the heat treatment and the workpiece 100 after the heat treatment. The housing 31 has, for example, an airtight structure that prevents particles from entering. There is no particular limitation on the external shape of the housing 31. The external shape of the housing 31 can be, for example, a rectangular parallelepiped or a cylinder. The housing 31 is formed of a metal such as stainless steel.

[0039] An end of the housing 31 facing the transport unit 4 and an end of the housing 31 facing the transport unit 6 are open. An opening door 31a (corresponding to an example of a first opening door) is provided at the opening of the housing 31. The opening of the housing 31 is opened and closed by the opening door 31a. For example, the opening door 31a can be made movable up and down. The opening door 31a can also be made movable to the side of the housing 31. When the opening door 31a is opened, the workpiece 100 can be carried in or out through the opening of the housing 31. When the opening door 31a is closed, the opening of the housing 31 is closed.

[0040] A pair of receiving members 31b are provided inside the housing 31 to support the vicinity of the periphery of the workpiece 100. The pair of receiving members 31b are provided, for example, on the inner wall of the housing 31 at an end intersecting with the end where the opening / closing door 31a is provided. A pair of receiving members 31b is provided for each workpiece 100 stored inside the housing 31. For example, a plurality of pairs of receiving members 31b are provided lined up in the vertical direction with a predetermined interval between them. In place of the receiving member 31b, a rod-shaped receiving member like the work support portion 25f provided on the cassette 25 described above may be provided.

[0041] 2 and 5, the inside of the housing 31 is divided vertically into an area 31c and an area 31d. For example, each of the area 31c and the area 31d is provided with a plurality of pairs of receiving members 31b.

[0042] For example, the area 31c temporarily stores the workpiece 100 before the heat treatment. The area 31c is provided, for example, in order to improve the efficiency of the workpiece 100 loading operation in the processing section 2.

[0043] For example, area 31d temporarily stores the workpiece 100 that has been subjected to heat treatment. Here, since the temperature of the workpiece 100 that has been subjected to heat treatment is high, it is necessary to cool it down to a predetermined temperature. Therefore, area 31d is provided mainly for waiting until the temperature of the workpiece 100 reaches a predetermined value. For example, in area 31d, the workpiece 100 waits until the temperature of the workpiece 100 that has been carried out from the processing unit 2 drops from about 100°C to 70°C to about 40°C to 70°C.

[0044] Generally, the waiting time in area 31d is longer than the waiting time in area 31c. Therefore, the number of workpieces 100 stored in area 31d is greater than the number of workpieces 100 stored in area 31c. In this case, the number of workpieces 100 stored in area 31d can be, for example, approximately the same as the number of workpieces 100 processed at one time in one processing unit 2. The number of workpieces 100 stored in area 31c and the number of workpieces 100 stored in area 31d can be appropriately determined by conducting experiments and simulations.

[0045] Moreover, it is preferable that the workpieces 100 are removed from the areas 31c and 31d in order starting from the workpieces 100 stored in the lower part. It is preferable that the workpieces 100 are stored in the areas 31c and 31d in order starting from the upper part. In this way, it is possible to prevent foreign matter such as particles from adhering to other workpieces 100 inside the accumulation section 3 when the workpieces 100 are removed and stored.

[0046] The filter 32 and the exhaust section 33 are provided to cool the workpiece 100 stored in the area 31d. The filter 32 is provided, for example, on one of the side walls of the housing 31. The filter 32 is provided, for example, at a position facing the area 31d. The filter 32 is, for example, a HEPA filter (High Efficiency Particulate Air Filter).

[0047] The exhaust unit 33 is provided on the other side wall of the housing 31. The exhaust unit 33 is provided, for example, at a position facing the area 31d. The exhaust unit 33 is, for example, an air blowing device such as a blower.

[0048] If the filter 32 and the exhaust unit 33 are provided, an air flow G can be formed inside the area 31d. Therefore, the cooling time of the workpiece 100 stored inside the area 31d can be shortened. That is, the accumulation section 3 has an exhaust section 33 that introduces outside air into the area 31d.

[0049] As shown in FIG. 1 and FIG. 2, the conveying unit 4 is provided between the processing unit 2 and the accumulating unit 3. The conveying unit 4 transfers the workpiece 100 between the processing unit 2 and the accumulating unit 3. The conveying unit 4 has, for example, a horizontal articulated robot 4a and a moving unit 4b. The horizontal articulated robot 4a is provided, for example, on the moving unit 4b. The horizontal articulated robot 4a has, for example, a hand that holds the workpiece 100. In addition, the horizontal articulated robot 4a can rotate the hand and move the hand in a horizontal direction. The moving unit 4b moves, for example, linearly on a rail. The moving unit 4b moves the horizontal articulated robot 4a in the horizontal direction between the processing unit 2 and the accumulating unit 3. In addition, the moving unit 4b can also move the horizontal articulated robot 4a in the vertical direction.

[0050] For example, the moving unit 4b moves the horizontal articulated robot 4a horizontally to a position facing the processing unit 2. The moving unit 4b also moves the horizontal articulated robot 4a vertically to the position of a desired cassette 25. The horizontal articulated robot 4a moves its hand to carry the workpiece 100 before heat treatment into the cassette 25, or carry the workpiece 100 after heat treatment out of the cassette 25.

[0051] For example, the moving unit 4b moves the horizontal articulated robot 4a horizontally to a position facing the stacking unit 3. The moving unit 4b also moves the horizontal articulated robot 4a vertically to the position of a desired receiving member 31b. The horizontal articulated robot 4a moves its hand to carry out the workpiece 100 before the heat treatment from the area 31c inside the housing 31, or carry the workpiece 100 after the heat treatment into the area 31d inside the housing 31.

[0052] 1 and 2, the loading / unloading section 5 is provided at a position separated from the stacking section 3. The loading / unloading section 5 is provided on the opposite side of the stacking section 3 to the processing section 2 side. The loading / unloading section 5 has, for example, a base section 5a and a plurality of carriers 5b.

[0053] The multiple carriers 5b are arranged side by side on the base 5a. Multiple slots for storing the workpieces 100 are provided vertically inside the carriers 5b. In this case, the carriers 5b can be divided into carriers 5b that store multiple workpieces 100 before heat treatment and carriers 5b that store multiple workpieces 100 that have been heat treated. The carriers 5b storing the workpieces 100 before heat treatment are carried from a previous process to the heat treatment device 1 (carry-in / carry-out section 5) by a transport device (not shown). The carriers 5b storing the workpieces 100 that have been heat treated are carried out from the heat treatment device 1 (carry-in / carry-out section 5) to a subsequent process by a transport device (not shown).

[0054] As shown in Figs. 1 and 2, the transport unit 6 is provided between the accumulation unit 3 and the load / unload unit 5. The transport unit 6 delivers the workpieces 100 between the accumulation unit 3 and the load / unload unit 5. The transport unit 6 has, for example, a horizontal articulated robot 6a and a moving unit 6b. For example, the horizontal articulated robot 6a can be the same as the horizontal articulated robot 4a described above. The moving unit 6b can be the same as the moving unit 4b described above.

[0055] For example, the moving unit 6b moves the horizontal articulated robot 6a horizontally to a position facing a desired carrier 5b in the loading / unloading unit 5. The moving unit 6b also moves the horizontal articulated robot 6a vertically to the position of a desired slot in the carrier 5b. The horizontal articulated robot 6a moves its hand to carry the workpiece 100 that has been subjected to heat treatment into the inside of the carrier 5b, or to carry the workpiece 100 that has not yet been subjected to heat treatment out of the inside of the carrier 5b.

[0056] For example, the moving unit 6b moves the horizontal articulated robot 6a horizontally to a position facing the stacking unit 3. The moving unit 6b also moves the horizontal articulated robot 6a vertically to the position of a desired receiving member 31b. The horizontal articulated robot 6a moves its hand to carry the workpiece 100 before the heat treatment into the area 31c inside the housing 31, or carry the workpiece 100 after the heat treatment out of the area 31d inside the housing 31.

[0057] Here, when the heat treatment is performed in the processing section 2, foreign matter such as particles inside the chamber 21 may adhere to the surface of the workpiece 100. In this case, for example, if foreign matter adheres to the surface of the workpiece 100 on which an organic film is formed, the quality of the organic film may be degraded. For this reason, the surface of the workpiece 100 is generally cleaned using a liquid cleaning device or the like in a post-process. However, doing so complicates the manufacturing process, which creates a new problem of longer manufacturing time. In addition, since a liquid cleaning device or the like is required, the installation space for the equipment becomes larger and the cost of the equipment also increases.

[0058] Therefore, the heat treatment device 1 is provided with a dust collection and cooling unit 7. The dust collection and cooling unit 7 removes foreign matter such as particles adhering to the work 100 that has been subjected to the heat treatment, and cools the work 100 that has been subjected to the heat treatment. If the dust collection and cooling unit 7 is provided, the foreign matter adhering to the work 100 can be removed, so that the quality of the organic film formed on the work 100 can be improved. In addition, if the dust collection and cooling unit 7 is provided, the work 100 can be cooled by supplying a gas to be described later, so that the waiting time for cooling in the area 31d of the accumulation unit 3 can be shortened. Therefore, it is possible to prevent the manufacturing time from becoming longer.

[0059] FIG. 6 is a schematic cross-sectional view illustrating the dust-collection / cooling unit 7. As shown in FIG. As shown in FIG. 6, the dust collection and cooling unit 7 has, for example, a hood 71, a gas supply unit 72, and a suction unit 73. For example, the hood 71 has a box shape having a length sufficient to cover the entire width of the work 100, and has an opening 71a on one side (the side facing the work 100). The width direction of the work 100 refers to a direction perpendicular to the direction of movement of the work 100 when the work 100 is carried into or carried out of the processing section 2 or the accumulation section 3. When the work 100 is processed by the dust collection and cooling section 7, a predetermined gap L is provided between the opening 71a of the hood 71 and the work 100. The gap L can be appropriately changed depending on the flow rate and flow speed of the gas supplied by the gas supply section 72, and the suction amount and suction pressure by the suction section 73. The gap L can be appropriately determined, for example, by performing an experiment or a simulation. Of the four faces of the hood 71 extending from each side of the face 71c facing the opening 71a to the side where the opening 71a is located, one face 71b that intersects with the width direction of the workpiece 100 is inclined with respect to the surface of the workpiece 100.

[0060] The gas supply unit 72 includes, for example, a nozzle 72a, a gas control unit 72b, and a gas source 72c. The nozzle 72a is provided on the surface 71b of the hood 71. The nozzle 72a supplies gas toward the surface of the workpiece 100. Since the surface 71b of the hood 71 is inclined with respect to the surface of the workpiece 100, if the nozzle 72a is provided in a direction perpendicular to the surface 71b of the hood 71, the gas can be supplied to the surface of the workpiece 100 from the direction inclined with respect to the surface of the workpiece 100. In this way, an air flow that hits the side of the foreign matter 101 attached to the workpiece 100 can be formed on the surface of the workpiece 100. Therefore, the foreign matter 101 can be easily separated from the surface of the workpiece 100, and the removal rate can be improved. The nozzle 72a is a slit-shaped nozzle having approximately the same length as the hood 71, and can spray gas over the entire width of the workpiece 100. However, as long as the gas can be sprayed over the entire width of the workpiece 100, it does not have to be slit-shaped, and for example, a plurality of cylindrical nozzles may be arranged in a row. In such a case, the individual nozzles may be in contact with each other when adjacent to each other, or may be spaced apart to a certain extent.

[0061] The gas control unit 72b is provided between the nozzle 72a and the gas source 72c. The gas control unit 72b controls, for example, at least one of the flow rate, flow velocity, and pressure of the gas supplied to the nozzle 72a. The gas control unit 72b can also control the start and stop of the gas supply. The gas control unit 72b can be, for example, a flow rate adjustment valve.

[0062] The gas source 72c may be a gas cylinder containing a predetermined gas, or a factory pipe that supplies a predetermined gas. There are no particular limitations on the gas as long as it is not easily reactive with the workpiece 100 that has been subjected to the heat treatment. The gas may be, for example, an inert gas such as nitrogen gas, or clean dry air.

[0063] The suction section 73 includes, for example, a suction nozzle 73a, a filter 73b, and a suction device 73c. The suction nozzle 73a is provided, for example, on a surface 71c facing the opening 71a of the hood 71. In this manner, the foreign matter 101 that has been separated from the surface of the workpiece 100 and is floating inside the hood 71 can be efficiently captured. The suction nozzle 73a, like the nozzle 72a, is shaped like a slit having approximately the same length as the hood 71. In this case, too, the suction nozzle 73a is not limited to a slit shape, and may be configured by arranging a plurality of nozzles, such as cylindrical nozzles.

[0064] The filter 73b is provided between the suction nozzle 73a and the suction device 73c. ​​The filter 73b captures the foreign matter 101 sucked by the suction nozzle 73a. There are no particular limitations on the suction device 73c as long as it is capable of sucking gas inside the hood 71. The suction device 73c may be, for example, a blower.

[0065] As shown in Fig. 1, the dust collection and cooling section 7 can be provided in the area between the processing section 2 and the accumulating section 3. For example, the dust collection and cooling section 7 can be provided in the accumulating section 3. Also, the dust collection and cooling section 7 can be provided in a position before the accumulating section 3 through which the workpieces 100 stored in the dust collection section 3 pass. Also, the dust collection and cooling section 7 can be provided in a position before each processing section 2 through which the workpieces 100 removed from the processing section 2 pass, or in the opening and closing door 21a. Each example will be specifically described below.

[0066] FIG. 7 is a schematic diagram for illustrating a case where the dust-collection / cooling unit 7 is provided in the housing 31 of the accumulation unit 3. As shown in FIG. As shown in FIG. 5 and FIG. 7, the dust collecting and cooling unit 7 is provided at the end of the housing 31 where the opening and closing door 31a is provided. A space 31e is provided below the area 31d of the housing 31 where the heat-treated workpiece 100 is stored. That is, the space 31e is provided inside the accumulation unit 3, into which the heat-treated workpiece 100 held by the conveying unit 4 can enter. The dust collecting and cooling unit 7 is provided, for example, above the space 31e, more specifically, along the upper end of the opening connected to the space 31e. In this case, the dust collecting and cooling unit 7 may be provided outside the accumulation unit 3 (housing 31) or inside the accumulation unit 3 (housing 31).

[0067] The horizontal articulated robot 4a of the transport unit 4 inserts the workpiece 100 held by the hand into the space 31e. At this time, the operation of the transport unit 4 is controlled so that a gap L is formed between the workpiece 100 and the hood 71 (opening 71a) of the dust collection and cooling unit 7. In this way, the workpiece 100 passes under the dust collection and cooling unit 7, so that the foreign matter 101 can be removed and the workpiece 100 can be cooled. In addition, the horizontal articulated robot 4a of the transport unit 4 pulls out the workpiece 100 held by the hand from the inside of the space 31e. At this time, as in the case of insertion (entry), the horizontal articulated robot 4a is controlled so that a gap L is formed between the workpiece 100 and the hood 71. Similarly, the workpiece 100 passes under the dust collection and cooling unit 7, so that the foreign matter 101 can be removed and the workpiece 100 can be cooled.

[0068] For example, the dust collection and cooling section 3 can remove foreign matter and cool the workpiece 100 by the transport section 4 at least when the heat-treated workpiece 100 enters the space 31e and when the heat-treated workpiece 100 exits the space 31e. In this case, if the foreign matter 101 is removed and the workpiece 100 is cooled when the workpiece 100 enters and exits, the removal of the foreign matter 101 and the cooling of the workpiece 100 can be performed even more effectively.

[0069] Moreover, the horizontal articulated robot 4a can be moved vertically by the moving part 4b of the transfer part 4 to adjust the above-mentioned gap L. In this way, the foreign matter 101 can be removed efficiently.

[0070] FIG. 8 is a schematic diagram for illustrating a case where the dust-collection / cooling section 7 is provided on the opening / closing door 31a of the accumulation section 3 (housing 31). The opening and closing door 31a of the housing 31 may move up and down. In such a case, for example, as shown in FIG. 8, the dust collection and cooling unit 7 may be provided on the outer surface of the lower end of the opening and closing door 31a of the housing 31. The horizontal articulated robot 4a of the transport unit 4 inserts the workpiece 100 that has been subjected to the heat treatment into the area 31d inside the housing. At this time, the lifting position of the opening and closing door 31a is controlled to position the lower end of the opening and closing door 31a, i.e., the dust collection and cooling unit 7, at the height of the position in the area 31d where the workpiece 100 is to be inserted. In this way, the workpiece 100 passes under the dust collection and cooling unit 7, so that the foreign matter 101 can be removed and the workpiece 100 can be cooled. The above-mentioned adjustment of the gap L can be performed by the opening and closing door 31a, or can be performed by the moving part 4b of the conveying part 4.

[0071] In this way, there is no need to provide the space 31e described above, and therefore it is possible to prevent the height of the accumulating section 3 (housing 31) from becoming too high.

[0072] FIG. 9 is a schematic diagram for illustrating a case where the dust collection / cooling section 7 is provided on the opening / closing door 21a of the processing section 2 (chamber 21). The opening and closing door 21a of the chamber 21 may move in the vertical direction (open upward). In such a case, for example, as shown in FIG. 9, the dust collection and cooling unit 7 may be provided on the outer surface of the lower end of the opening and closing door 21a of the chamber 21. The horizontal articulated robot 4a of the transport unit 4 carries out the workpiece 100 that has been subjected to the heat treatment from inside the chamber 21 (cassette 25). At this time, the lifting and lowering operation of the opening and closing door 21a is controlled to stop the dust collection and cooling unit 7 at a height position where a gap L is formed between the workpiece 100 to be carried out this time and the hood 71 (opening 71a). In this state, the workpiece 100 passes under the dust collection and cooling unit 7, so that the foreign matter 101 can be removed and the workpiece 100 can be cooled. The above-mentioned gap L can be adjusted by the moving part 4b of the transport part 4 after the dust-collection / cooling part 7 is stopped by the opening / closing door 21a at the height position of the workpiece 100 to be transported out this time.

[0073] 1, the dust collecting and cooling unit 7 can also be provided on the transport path of the transport unit 4 when transporting the workpiece 100 from the processing unit 2 to the accumulation unit 3. In this case, the dust collecting and cooling unit 7 can be provided above the workpiece 100 held by the hand of the horizontal articulated robot 4a. In this way, when the workpiece 100 that has been subjected to heat treatment and is held by the hand of the horizontal articulated robot 4a passes under the dust collecting and cooling unit 7, the foreign matter 101 can be removed and the workpiece 100 can be cooled. At this time, the above-mentioned gap L can be adjusted by the moving part 4b of the transport part 4. Moreover, the dust collection / cooling section 7 may be provided at any one of the above-mentioned installation locations, or at some or all of the installation locations. In addition, instead of providing the dust collection and cooling section 7 on the opening and closing doors 21a, 31a, a lifting mechanism having a gate-shaped frame structure for raising and lowering the dust collection and cooling section 7 may be provided adjacent to the opening and closing doors 21a, 31a, and the dust collection and cooling section 7 may be positioned in accordance with the removal or insertion position of the workpiece 100.

[0074] FIG. 10 is a schematic cross-sectional view illustrating a dust-collection / cooling unit 7a according to another embodiment. 10, like the above-described dust collection and cooling unit 7, the dust collection and cooling unit 7a has a hood 71, a gas supply unit 72, and a suction unit 73. In addition, the dust collection and cooling unit 7a further has at least one of an ultrasonic oscillator 74, an electrostatic attractor 75, and a magnetic attractor 76.

[0075] The ultrasonic oscillator 74 applies ultrasonic vibration to the gas supplied from the nozzle 72a. When the gas to which the ultrasonic vibration has been applied hits the foreign matter 101 adhering to the workpiece 100, the foreign matter 101 can be easily separated from the workpiece 100.

[0076] The electrostatic attractor 75 can generate static electricity. There are cases where the foreign object 101 attached to the workpiece 100 is charged. If the electrostatic attractor 75 generates static electricity having a polarity opposite to the polarity of the charge of the foreign object 101, it becomes easy to separate the foreign object 101 from the workpiece 100.

[0077] The magnetic attractor 76 can generate magnetic lines of force. The magnetic attractor 76 can be, for example, an electromagnet. There are cases where the foreign object 101 attached to the workpiece 100 contains a magnetic material such as a metal. If the magnetic attractor 76 generates magnetic lines of force, the foreign object 101 can be easily separated from the workpiece 100.

[0078] Although the embodiments have been described above, the present invention is not limited to these descriptions. Any modifications to the above-described embodiments made by those skilled in the art are also encompassed within the scope of the present invention as long as they incorporate the features of the present invention. For example, the shape, size, arrangement, and the like of each element included in the heat treatment device 1 are not limited to those exemplified, and can be changed as appropriate.

[0079] Furthermore, the elements of each of the above-described embodiments can be combined to the greatest extent possible, and combinations of these are also included within the scope of the present invention as long as they include the features of the present invention. [Explanation of symbols]

[0080] 1 heat treatment device, 2 treatment section, 3 accumulation section, 4 transport section, 4a horizontal articulated robot, 4b moving section, 7 dust collection and cooling section, 7a dust collection and cooling section, 21 chamber, 21a opening and closing door, 31 housing, 31a opening and closing door, 31c area, 31d area, 31e space, 32 filter, 33 exhaust section, 71 hood, 72 gas supply section, 72a nozzle, 73 suction section, 73a suction nozzle, 73b filter, 73c suction device, 100 workpiece, 101 foreign matter

Claims

1. A processing section for heat-treating a workpiece; an accumulation unit for temporarily storing the workpieces that have been subjected to the heat treatment; A conveying unit that is provided between the processing unit and the stacking unit and transfers the workpiece; A dust collection and cooling unit is provided in a region between the processing unit and the accumulation unit, and removes foreign matter adhering to the workpiece that has been subjected to the heat treatment and cools the workpiece. A heat treatment device comprising:

2. A space is provided inside the stacking section into which the workpiece that has been subjected to the heat treatment and that is held in the transport section can enter, The heat treatment apparatus according to claim 1 , wherein the dust collection and cooling unit is provided above the space.

3. An area for temporarily storing the workpiece that has been subjected to the heat treatment is provided inside the stacking section, The heat treatment apparatus according to claim 2 , wherein the space is located below the area.

4. 4. The heat treatment device according to claim 2 or 3, wherein the dust collection and cooling unit removes the foreign matter and cools the workpiece at least when the workpiece that has been subjected to the heat treatment enters the space by the transport unit and when the workpiece that has been subjected to the heat treatment exits the space.

5. The heat treatment apparatus according to claim 3 , wherein the accumulation section has an exhaust section for introducing outside air into the area.

6. The accumulation section is a housing in which the workpiece that has been subjected to the heat treatment is temporarily stored; a first opening / closing door provided at an opening of the housing and capable of ascending and descending; having The heat treatment apparatus according to claim 1 , wherein the dust collecting / cooling section is provided on an outer surface of the first opening / closing door.

7. The processing unit includes: a chamber in which the workpiece is heat-treated; a second opening / closing door provided at an opening of the chamber and capable of ascending and descending; having The heat treatment apparatus according to claim 1 , wherein the dust collecting / cooling section is provided on an outer surface of a lower end of the second opening / closing door.

8. The heat treatment apparatus according to claim 1 , wherein the dust collecting / cooling section is disposed on a path along which the workpiece is transported by the transport section from the processing section to the accumulation section.

9. The heat treatment apparatus according to claim 8 , wherein the dust collecting / cooling section is disposed at least in one of a position before the processing section and a position before the accumulation section.

10. The heat treatment apparatus according to claim 9 , further comprising an elevation unit for raising and lowering the dust-collection / cooling unit.

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