Part structure, interposer, and semiconductor device

Abstract

To prevent a short circuit between upper and lower conductive layers in a substrate including a through electrode.SOLUTION: A through electrode substrate includes a substrate 11 having a first surface 11a and a second surface opposite to the first surface, a plurality of through electrodes penetrating the substrate, and a first capacitor 100 arranged on the first surface side of the substrate and electrically connected to at least one of the plurality of through electrodes, the first capacitor includes a first conductive layer 12 arranged on the first surface side of the substrate and electrically connected to the through electrodes, an insulating layer 13 arranged on the first conductive layer, and a second conductive layer 14 arranged on the insulating layer, the insulating layer includes a first portion 13a arranged between the first conductive layer and the second conductive layer, and a second portion 13b covering at least a portion of a side surface of the first conductive layer.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a through electrode substrate, a semiconductor device, and a method for manufacturing a through electrode substrate. [Background technology]

[0002] In recent electronic devices, wiring is provided on both sides of a substrate. Patent Document 1 discloses a substrate in which wiring on both sides of the substrate is connected by electrodes penetrating a glass substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] WO2005 / 034594 Summary of the Invention [Problem to be solved by the invention]

[0004] In order to increase the functionality of the above-mentioned wiring board, it is required to form elements having various functions. However, when forming such elements on a board having a through electrode, unexpected problems may occur. When forming a configuration in which conductive layers are arranged in a vertical relationship on this board, for example, a capacitor, a short circuit between the conductive layers may occur depending on the structure of the two conductive layers.

[0005] One of the objects of the present disclosure is to prevent short circuits between conductive layers positioned above and below a substrate including a through electrode. [Means for solving the problem]

[0006] According to the present disclosure, there is provided a through electrode substrate comprising: a substrate having a first surface and a second surface opposite to the first surface; a plurality of through electrodes penetrating the substrate; and a first capacitor disposed on the first surface side of the substrate and electrically connected to at least one of the plurality of through electrodes, the first capacitor including: a first conductive layer disposed on the first surface side of the substrate and electrically connected to the through electrodes; an insulating layer disposed on the first conductive layer; and a second conductive layer disposed on the insulating layer, the insulating layer having a first portion disposed between the first conductive layer and the second conductive layer and a second portion covering at least a portion of a side surface of the first conductive layer.

[0007] According to another example of the present disclosure, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer electrically connected to the through electrode on the first surface of the substrate; forming a first insulating layer on an upper surface of the first conductive layer; forming a second insulating layer to cover at least a portion of a side surface of the first conductive layer and the first insulating layer; removing a portion of the second insulating layer located above the first conductive layer; and forming a second conductive layer in the portion of the second insulating layer from which the second insulating layer was removed.

[0008] According to another example of the present disclosure, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a first resist on the first surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer on the first surface of the substrate, the first conductive layer being electrically connected to the through electrode; forming an intermediate layer on the first conductive layer; removing the first resist by lift-off; forming a second resist around the first conductive layer; forming a first insulating layer on an upper surface and a side surface of the intermediate layer, a side surface of the first conductive layer, the first surface, and an upper surface and a side surface of the second resist; removing the second resist by lift-off so as to leave at least a portion of the first insulating layer formed on the side surface of the second resist; and forming a second conductive layer on the first insulating layer corresponding to the position of the intermediate layer.

[0009] According to another example, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a first resist on the first surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer on the first surface of the substrate, the first insulating layer being electrically connected to the through electrode; forming a first insulating layer on an upper surface and a side surface of the first conductive layer and the first surface; forming a second conductive layer on the first insulating layer corresponding to the position of the upper surface of the first conductive layer; forming a second resist layer to cover the second conductive layer and to cover a portion of the first insulating layer on the first surface; removing a portion of the first insulating layer that is not covered by the second resist layer; and removing the second resist layer.

[0010] The through electrode substrate can also be used as an interposer. Effect of the Invention

[0011] According to the present disclosure, in a substrate including a through electrode, it is possible to prevent short circuits between conductive layers located above and below the substrate. Further features related to the present disclosure will become apparent from the description of the present specification and the accompanying drawings. In addition, problems, configurations, and effects other than those described above will become apparent from the following description of the embodiments. [Brief description of the drawings]

[0012] [Figure 1] 1 is a schematic plan view showing an interposer according to a first embodiment of the present disclosure. [Diagram 2] 2 is a schematic cross-sectional view (cross-sectional view taken along line AA in FIG. 1) illustrating an interposer according to the first embodiment of the present disclosure. [Diagram 3] 1 is a schematic cross-sectional view (cross-sectional view taken along line BB in FIG. 1) illustrating a capacitor 100 included in an interposer according to a first embodiment of the present disclosure. [Figure 4A] 2A to 2C are diagrams illustrating a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Figure 4B] 2A to 2C are diagrams illustrating a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Figure 4C] 2A to 2C are diagrams illustrating a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Figure 4D] 2A to 2C are diagrams illustrating a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Figure 4E] 2A to 2C are diagrams illustrating a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Figure 4F] 6A to 6C are diagrams illustrating another example of a method for manufacturing an interposer according to the first embodiment of the present disclosure. [Diagram 5] FIG. 4 is a schematic cross-sectional view showing a capacitor according to a second embodiment of the present disclosure. [Figure 6] FIG. 11 is a schematic cross-sectional view showing a capacitor according to a third embodiment of the present disclosure. [Figure 7] FIG. 11 is a schematic cross-sectional view showing a capacitor according to a fourth embodiment of the present disclosure. [Figure 8]FIG. 11 is a schematic cross-sectional view showing a capacitor according to a fifth embodiment of the present disclosure. [Figure 9] FIG. 11 is a schematic cross-sectional view showing a capacitor according to a sixth embodiment of the present disclosure. [Figure 10] FIG. 13 is a schematic cross-sectional view showing a capacitor according to a seventh embodiment of the present disclosure. [Figure 11] FIG. 13 is a schematic cross-sectional view showing a capacitor according to an eighth embodiment of the present disclosure. [Figure 12] FIG. 13 is a schematic cross-sectional view showing a capacitor according to a ninth embodiment of the present disclosure. [Figure 13] FIG. 23 is a schematic cross-sectional view showing a capacitor according to a tenth embodiment of the present disclosure. [Figure 14] FIG. 21 is a schematic cross-sectional view showing a capacitor according to an eleventh embodiment of the present disclosure. [Figure 15A] 13A to 13D are diagrams illustrating a method for manufacturing a capacitor according to an eleventh embodiment of the present disclosure [Figure 15B] 13A to 13D are diagrams illustrating a method for manufacturing a capacitor according to an eleventh embodiment of the present disclosure [Figure 15C] 13A to 13D are diagrams illustrating a method for manufacturing a capacitor according to an eleventh embodiment of the present disclosure [Figure 16] FIG. 23 is a schematic cross-sectional view showing a capacitor according to a twelfth embodiment of the present disclosure. [Figure 17] FIG. 23 is a schematic cross-sectional view showing a capacitor according to a thirteenth embodiment of the present disclosure. [Figure 18A] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 18B] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 18C] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 18D] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 18E] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 18F] 23A to 23D are diagrams illustrating a method for manufacturing a capacitor according to a thirteenth embodiment of the present [Figure 19] FIG. 23 is a diagram illustrating the positional relationship of capacitors according to a thirteenth embodiment of the present disclosure. [Figure 20A] 5A to 5C are diagrams illustrating another method for manufacturing the capacitor according to the first embodiment of the present disclosure. [Figure 20B] 5A to 5C are diagrams illustrating another method for manufacturing the capacitor according to the first embodiment of the present disclosure. [Figure 20C] 5A to 5C are diagrams illustrating another method for manufacturing the capacitor according to the first embodiment of the present disclosure. [Figure 20D] 5A to 5C are diagrams illustrating another method for manufacturing the capacitor according to the first embodiment of the present disclosure. [Figure 20E] 5A to 5C are diagrams illustrating another method for manufacturing the capacitor according to the first embodiment of the present disclosure. [Figure 21A] FIG. 23 is a schematic plan view showing an interposer according to a fourteenth embodiment of the present disclosure. [Figure 21B] 21B is a schematic cross-sectional view (cross-sectional view taken along line CC in FIG. 21A) showing a ring-shaped conductive layer 29 included in an interposer according to a fourteenth embodiment of the present disclosure. FIG. [Figure 22A] FIG. 23 is a schematic plan view showing a capacitor according to a fifteenth embodiment of the present disclosure. [Figure 22B] FIG. 23 is a schematic plan view showing a capacitor according to a sixteenth embodiment of the present disclosure. [Diagram 23] FIG. 23 is a schematic plan view showing a capacitor according to a seventeenth embodiment of the present disclosure. [Figure 24A] FIG. 23 is a schematic plan view showing a capacitor according to an eighteenth embodiment of the present disclosure. [Figure 24B] FIG. 23 is a schematic plan view showing a capacitor according to a nineteenth embodiment of the present disclosure. [Figure 25A] FIG. 20 is a schematic plan view showing the positional relationship between a first conductive layer and a first insulating layer of a capacitor according to a twentieth embodiment of the present disclosure. [Figure 25B]FIG. 23 is a schematic plan view showing the positional relationship between a first conductive layer and a first insulating layer of a capacitor according to a twenty-first embodiment of the present disclosure. [Figure 25C] FIG. 22 is a schematic plan view showing the positional relationship between a first conductive layer and a first insulating layer of a capacitor according to a twenty-second embodiment of the present disclosure. [Figure 26A] 1 is a schematic cross-sectional view of a capacitor according to a first embodiment of the present disclosure arranged adjacent to each other. [Figure 26B] FIG. 20 is a schematic cross-sectional view illustrating an example of an arrangement of a second conductive layer of a capacitor according to a twentieth embodiment of the present disclosure. [Figure 26C] FIG. 23 is a schematic cross-sectional view illustrating another example of the arrangement of the second conductive layer of the capacitor according to the twentieth embodiment of the present disclosure. [Figure 27] A schematic cross-sectional view of a capacitor according to a twenty-third embodiment of the present disclosure. [Figure 28] A schematic plan view showing a capacitor and an inductor included in an interposer according to a twenty-fourth embodiment of the present disclosure. [Figure 29] FIG. 29 is a schematic cross-sectional view (cross-sectional view taken along line DD in FIG. 28) showing an interposer according to a twenty-fourth embodiment of the present disclosure. [Diagram 30] FIG. 25 is a schematic plan view showing a capacitor according to a twenty-fifth embodiment of the present disclosure. [Diagram 31] FIG. 26 is a diagram showing a semiconductor device according to a twenty-sixth embodiment of the present disclosure. [Diagram 32] FIG. 26 is a diagram showing another example of a semiconductor device according to the twenty-sixth embodiment of the present disclosure. [Diagram 33] FIG. 26 is a diagram showing yet another example of a semiconductor device according to the twenty-sixth embodiment of the present disclosure. [Diagram 34] FIG. 26 is a diagram illustrating an example of an electronic device using a semiconductor device according to a twenty-sixth embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. Note that each embodiment shown below is an example of an embodiment of the present invention, and the present invention is not limited to these embodiments. In the drawings referred to in this embodiment, the same parts or parts having similar functions are given the same or similar symbols (symbols with A, B, etc. added after the numbers), and repeated explanations may be omitted. In addition, the dimensional ratios of the drawings may differ from the actual ratios for convenience of explanation, and some of the configurations may be omitted from the drawings. In the drawings attached to this specification, for convenience of illustration and ease of understanding, the scale and the dimensional ratios of the length and width may be appropriately changed and exaggerated from those of the actual objects, and some of the configurations may be omitted from the drawings.

[0014] In this specification and the like, a numerical range expressed using "to" means that the range includes the numerical values ​​written before and after "to" as the lower limit and upper limit, respectively. For example, 10 to 30 means 10 or more and 30 or less.

[0015] First Embodiment An interposer according to an embodiment of the present disclosure has a structure in which an insulating layer is sandwiched between conductive layers containing metal or the like. FIG. 1 is a schematic plan view showing an interposer 10 according to a first embodiment of the present disclosure. FIG. 2 is a schematic cross-sectional view (cross-sectional view along line AA in FIG. 1) showing an interposer 10 according to the first embodiment of the present disclosure. FIG. 3 is a schematic cross-sectional view (cross-sectional view along line BB in FIG. 1) showing a capacitor 100 included in the interposer 10 according to the first embodiment of the present disclosure. Note that in FIG. 1 and FIG. 3, some configurations are omitted so that the positional relationship of the substrate 11, the first conductive layer 12, the first insulating layer 13, and the second conductive layer 14 can be easily understood. The interposer 10 has, for example, a MIM (Metal-Insulator-Metal) structure in which an insulating layer is sandwiched between metals. Hereinafter, the MIM structure will be described as a capacitor 100 in which an insulating layer, which is a dielectric layer, is sandwiched between an upper electrode and a lower electrode. In this case, the first conductive layer 12 is used as a lower electrode, the first insulating layer 13 is used as a dielectric layer, and the second conductive layer 14 is used as an upper electrode.

[0016] The interposer 10 includes a substrate 11 having a first surface 11a and a second surface 11b facing the first surface 11a, a first conductive layer 12 disposed on the first surface 11a of the substrate 11, a first insulating layer 13 disposed on the first conductive layer 12, and a second conductive layer 14 disposed on the first insulating layer 13. In this example, a base layer 17 is further disposed between the first conductive layer 12 and the substrate 11. The base layer 17 may be disposed directly on the first surface 11a of the substrate 11, or may be disposed on the first surface 11a of the substrate 11 via at least one conductive or insulating layer. For example, by disposing an insulating resin selected from epoxy, polyimide, polybenzoxazole, polyamide, etc. on the first surface 11a of the substrate 11, the stress generated by the difference in the thermal expansion coefficient between the first conductive layer 12 and the substrate 11 can be alleviated, and thus the occurrence of cracks in the substrate can be suppressed in a subsequent process including heating.

[0017] The substrate 11 has a through hole 15 penetrating the first surface 11a and the second surface 11b. The first conductive layer 12 is electrically connected to the third conductive layer 21 disposed on the second surface 11b via a through electrode 20 formed in the through hole 15. A base layer 17 is also disposed between the through electrode 20 and the substrate 11 and between the third conductive layer 21 and the substrate 11. The form of the through hole 15 is not limited to that shown in the figure, and the through hole 15 may have a shape in which the width decreases from the first surface 11a and the second surface 11b of the substrate 11 toward the center in the thickness direction of the substrate 11, and the side wall of the through hole 15 may be widened along the normal direction of the first surface 11a of the substrate 11 or may be narrowed along the normal direction of the first surface 11a of the substrate 11, or a part of the side wall may have a curved shape. The through holes 15 are formed in the substrate 11 by etching, laser processing, processing by a combination of laser processing and etching, sandblasting, electric discharge processing, drilling, or the like. The through electrodes 20 are not limited to a form in which a conductive material is arranged along the side of the through holes 15 as shown in FIG. 2, but may be a form in which a conductive material is filled in the through holes 15. The first conductive layer 12, the through electrodes 20, and the third conductive layer may be integrally formed. In the interposer 10 of FIG. 2, the first conductive layer 12, the through electrodes 20, and the third conductive layer 21 have the same configuration. An example of the same configuration is a configuration formed from the same material. The first conductive layer 12 on the first surface 11a of the substrate 11 and the third conductive layer 21 on the second surface 11b of the substrate 11 may be formed from the same material and have substantially the same thickness. In such a case, when electrically connected, a difference in resistance value is unlikely to occur at the connection portion, and signal transmission loss can be reduced.

[0018] The opening width of through hole 15 is preferably 40 μm to 110 μm. Here, the opening width of through hole 15 refers to the maximum distance between any two points on the outer edge of a figure formed by the outer edge of through hole 15 when first surface 11a or second surface 11b of substrate 11 is viewed in plan. When the figure formed by the outer edge is a circle, the above-mentioned width refers to the diameter of the circle.

[0019] An insulating resin layer 22 is formed on the first surface 11a side and the second surface 11b side of the substrate 11. In the resin layer 22, via holes 23 are formed at positions corresponding to the first conductive layer 12, the second conductive layer 14, and the third conductive layer 21. In each of the via holes 23, a connection portion 24 made of a conductive material is disposed. The connection portion 24 is electrically connected to the conductive layer disposed at the bottom of the via hole 23.

[0020] The interposer 10 is electrically connected to the semiconductor chip 50 via the connection portion 24. The interposer 10 is also connected to the wiring board 40 via the connection portion 24 and the solder balls 25. The semiconductor chip 50 may also be connected to the connection portion 24 via the solder balls 25. According to this configuration, a semiconductor device is provided that includes the interposer 10, the semiconductor chip 50 arranged on the first surface 11a side of the substrate 11 and electrically connected to the through electrode 20, and the wiring board 40 arranged on the second surface 11b side of the substrate 11 and electrically connected to the through electrode 20. According to the interposer 10 of this embodiment, mounting of the semiconductor chip 50 with a narrow terminal pitch on the large wiring board 40 is simplified. The wiring board 40 is, for example, a motherboard. The connection with the semiconductor chip 50 may be made via the large wiring board 40 instead of via the connection portion 42. In this case, the through electrode board of the present invention is positioned as a passive element rather than an interposer.

[0021] The substrate 11 may be a glass substrate, a glass ceramic substrate, a quartz substrate, a sapphire substrate, a resin substrate, a glass epoxy substrate, a silicon substrate, a SOI (Silicon on Insulator) substrate, a SOS (Silicon on Sapphire) substrate, a silicon carbide (SiC) substrate, a gallium arsenide (GaAs) substrate, an indium phosphide (InP) substrate, an alumina (Al 2 O 3 ) substrate, aluminum nitride (AlN) substrate, zirconium oxide (ZrO 2 ) substrate or a substrate in which these are laminated can be used. It is preferable that the insulating material has insulating properties, and at least the surface thereof has insulating properties.

[0022] Preferably, the substrate 11 is a glass substrate. In general, the closer to the edge of an interposer, the greater the displacement caused by thermal deformation. In the case of an interposer using a glass substrate, there is an advantage that this region can be treated to reduce the difference in thermal expansion coefficient between the semiconductor chip using a silicon substrate placed on the interposer. In addition, by using glass for the substrate 11, there is no need to worry about leakage current between conductive layers formed on the surface of the substrate 11 due to its high insulating properties.

[0023] More preferably, non-alkali glass is used as the substrate 11. Unlike soda glass, non-alkali glass does not contain alkaline components such as Na and K, so that no alkaline components are precipitated on the glass surface. Therefore, this embodiment has the advantage that, in principle, there is no reliability degradation factor that corrodes the terminals of the semiconductor chip to be connected to the interposer. In addition, non-alkali glass has a thermal expansion coefficient that is approximately the same as that of silicon, and is well matched in terms of thermal expansion coefficient with the semiconductor chip to be connected.

[0024] The thickness of the substrate 11 is preferably, for example, 50 μm to 700 μm. The surface roughness (arithmetic mean roughness Ra) of the first surface 11a of the substrate 11 is preferably small from the viewpoint of preventing transmission loss of high-frequency signals in the first conductive layer 12 formed on the first surface 11a of the substrate 11 and the third conductive layer 21 formed on the second surface 11b of the substrate 11, and is preferably 0.1 nm to 10 nm. The arithmetic mean roughness Ra here is defined according to the JIS standard JIS B 0601:2001.

[0025] As the material of the first conductive layer 12 and the second conductive layer 14, a conductive material such as gold (Au), silver (Ag), copper (Cu), iron (Fe), nickel (Ni), platinum (Pt), palladium (Pd), ruthenium (Ru), tungsten (W), etc. is used. Among them, it is preferable to use Cu, which has high conductivity and low material cost. The thickness of the first conductive layer 12 is preferably 0.5 μm to 20 μm, and the thickness of the second conductive layer 14 is preferably 0.5 μm to 5 μm. As for the wiring pattern, in addition to subtractive formation by etching of a metal foil, additive formation such as coating of a conductive paste or formation by plating can also be adopted. Here, the metal foil can be, for example, Cu, etc. Furthermore, the conductive paste can be, for example, a metal nanopaste, etc.

[0026] The underlayer 17 may include one or more layers. For example, the underlayer 17 includes at least one of an adhesion layer and a seed layer. In this example, an example in which the underlayer 17 is composed of an adhesion layer and a seed layer will be described. The adhesion layer is a layer for preventing the substrate 11 from peeling off the first conductive layer 12 and the second conductive layer 14, or the substrate 11 from the seed layer. The seed layer is a layer for passing current when forming the first conductive layer 12 and the second conductive layer 14 by electrolytic plating, and forming a plating film. Therefore, if the functions overlap, the adhesion layer and the seed layer may be the same. The adhesion layer is, for example, an adhesion layer containing zinc oxide (ZnO) or the like. The adhesion layer containing zinc oxide can be formed by, for example, a sol-gel method. The seed layer can be made of Ti, Cr, Cu, or the like. The seed layer containing Ti, Cr, or Cu can be formed by, for example, sputtering. In addition, when the first conductive layer 12 and the through electrode 20 are formed simultaneously, it is preferable from the viewpoint of adhesion that the underlayer 17 covers the entire surface of the through hole 15 having a depth in the thickness direction relative to the surface of the substrate 11. Therefore, the thickness of the underlayer 17 when it is formed is preferably 20 nm to 300 nm on the surface of the substrate 11. The underlayer 17 may be used with the thickness when it is formed, but as a result of the underlayer 17 being sufficiently covered on the surface of the through hole 15, the thickness of the underlayer 17 formed on the substrate 11 may become excessive. As a result, the underlayer 17 may be selectively damaged by a chemical solution, plasma, or the like in a later process, or the conductive layer formed on the underlayer may peel off due to the brittleness of the underlayer 17 itself. To prevent this, the thickness of the underlayer may be reduced by performing etching in advance after the formation of the underlayer. For example, the thickness of the underlayer may be reduced until a layer of about 1 to 10 nm remains on the substrate surface.

[0027] For example, an inorganic material may be used as the first insulating layer 13. More specifically, silicon nitride (Si x N y ), silicon dioxide (SiO 2 ), silicon oxynitride (SiO x N y ), tantalum pentoxide Ntal (Ta 2 O 5), aluminum oxide (Al 2 O 3 ), or aluminum nitride (AlN), hafnium oxide (HfO 2 ), or hafnium oxide doped with aluminum can be used. It is desirable that the first insulating layer 13 has a higher dielectric constant than the insulating layer (e.g., resin layer 22) present around the capacitor 100. The dielectric constant of the first insulating layer 13 is, for example, in the range of 2.0 to 9.0, and more preferably 5.0 to 8.0. Among these, silicon nitride (Si x N y ), silicon oxynitride (SiO x N y ) can be suitably used. The thickness of the first insulating layer 13 (T1 described below) may be 50 nm to 800 nm.

[0028] In the embodiment of the present disclosure, the deposition process of the first conductive layer 12, the second conductive layer 14, and the first insulating layer 13 can be chemical vapor deposition (CVD), physical vapor deposition (PVD), electroplating, or the like. Examples of chemical vapor deposition include plasma CVD and atomic layer deposition (ALD). Examples of physical vapor deposition include sputtering or evaporation. Photolithography can be used to form patterns of the conductive layer and the insulating layer. Examples of planarization processes of the conductive layer and the insulating layer include etch-back, chemical mechanical polishing (CMP), and the like.

[0029] Next, the structure of the capacitor 100 of this embodiment will be described. As shown in FIG. 1, the first insulating layer 13 is formed on the upper surface 12a of the first conductive layer 12 at a position where the second conductive layer 14 is to be disposed. As shown in FIG. 3, the first insulating layer 13 has a first portion 13a, a second portion 13b, and a third portion 13c. The first portion 13a is disposed between the first conductive layer 12 and the second conductive layer 14. The second portion 13b extends continuously from the first portion 13a to cover at least a part of the side surface 12b of the first conductive layer 12 and at least a part of the side surface 17a of the underlayer 17. The third portion 13c extends continuously from the second portion 13b to cover at least a part of the first surface 11a of the substrate 11. In this embodiment, the first portion 13a, the second portion 13b, and the third portion 13c are formed of the same material.

[0030] In this embodiment, the second portion 13b of the first insulating layer 13 covers the side surface 12b of the first conductive layer 12 and the side surface 17a of the underlayer 17, and the third portion 13c of the first insulating layer 13 covers a part of the first surface 11a of the substrate 11. For example, if the first insulating layer 13 is composed of only the first portion 13a, a short circuit is likely to occur between the first conductive layer 12 and the second conductive layer 14 at the position indicated by the dotted circle in FIG. 3. In addition, if the end of the first insulating layer 13 is located inside the end of the second conductive layer 14, a region where the first insulating layer 13 does not exist is generated between the first conductive layer 12 and the second conductive layer 14. If a space is formed in this region, the first conductive layer 12 and the second conductive layer 14 come into contact with each other due to pressure or the like, which causes a short circuit. Furthermore, if resin layer 22 flows into this space, resin layer 22, which has a lower relative dielectric constant than first insulating layer 13, becomes a factor in reducing the capacitance of capacitor 100.

[0031] In contrast, in this embodiment, the second portion 13b of the first insulating layer 13 extends continuously from the first portion 13a to cover the side surface 12b of the first conductive layer 12, so that a short circuit between the first conductive layer 12 and the second conductive layer 14 can be prevented. In addition, although the position of the second conductive layer 14 may shift left and right in FIG. 3 depending on the accuracy of patterning, the first insulating layer 13 covers the side surface 12b of the first conductive layer 12 and the side surface 17a of the base layer 17 with the second portion 13b, and covers up to the first surface 11a of the substrate 11 with the third portion 13c. Therefore, even if the position of the second conductive layer 14 shifts, the first conductive layer 12 and the base layer 17 can be prevented from shorting with the second conductive layer 14. In addition, the third portion 13c of the first insulating layer 13 is in contact with the first surface 11a of the substrate 11, so that the resistance of the first insulating layer 13 to peeling is increased.

[0032] In order to allow the second portion 13b of the first insulating layer 13 to effectively function as an insulating film, the thickness T2 of the second portion 13b of the first insulating layer 13 is preferably ¼ or more of the thickness T1 of the first portion 13a of the first insulating layer 13. The upper limit of the thickness T2 of the second portion 13b of the first insulating layer 13 is not particularly limited, but may be, for example, less than the thickness T1 of the first portion 13a of the first insulating layer 13, or less than ½ of the thickness T1. In addition, the thickness T2 of the second portion 13b of the first insulating layer 13 is preferably 25 nm or more. In consideration of the above, the thickness T1 of the first portion 13a of the first insulating layer 13 is preferably 50 nm to 400 nm, and the thickness T2 of the second portion 13b of the first insulating layer 13 is preferably 25 nm to 200 nm. Furthermore, the length L1 of the third portion 13c of the first insulating layer 13 (the distance from the first conductive layer 12 to the end of the third portion 13c) is preferably 10 μm to 200 μm, and the thickness T3 of the third portion 13c of the first insulating layer 13 is preferably 50 nm to 200 nm.

[0033] Moreover, the surface roughness (arithmetic mean roughness Ra) of the upper surface 12a of the first conductive layer 12 is preferably small from the viewpoint of the yield of the capacitor 100, and is preferably 0.5 nm to 100 nm. Furthermore, the side surface 12b of the first conductive layer 12 may be a rough surface having a certain degree of roughness as long as it is a portion that does not function as the capacitor 100, and for example, the surface roughness (arithmetic mean roughness Ra) of the side surface 12b of the first conductive layer 12 may be 20 nm to 200 nm. Such surface roughness enhances the adhesion between the first conductive layer 12 (side surface 12b) and the first insulating layer 13.

[0034] Next, a method for manufacturing the interposer 10, particularly an example of forming the capacitor 100 (first conductive layer 12, first insulating layer 13, and second conductive layer 14) will be described. Figures 4A to 4F are diagrams illustrating a method for manufacturing the interposer 10 according to the first embodiment of the present disclosure. Below, an example will be described in which a through electrode 20 electrically connected to the first conductive layer 12 and a third conductive layer 21 electrically connected to the first conductive layer 12 via the through electrode 20 are formed simultaneously with the first conductive layer 12.

[0035] A substrate 11 having a first surface 11a and a second surface 11b and a through hole 15 penetrating the first surface 11a and the second surface 11b is prepared. Then, as shown in FIG. 4A, an underlayer 17 is formed on the first surface 11a, the second surface 11b, and the sidewall 15a of the through hole 15 of the substrate 11. In the following, an example in which the underlayer 17 is composed of an adhesion layer and a seed layer will be described. First, the adhesion layer is formed by a physical film formation method such as a vapor deposition method or a sputtering method. Then, a seed layer is formed on the adhesion layer by the same physical film formation method. Then, a process of annealing the adhesion layer and the seed layer may be performed.

[0036] The method for forming the adhesion layer and the seed layer is not limited to the above-mentioned method. For example, an adhesion layer containing zinc oxide (ZnO) or the like may be formed, and then a seed layer may be formed on the adhesion layer by electroless plating. The adhesion layer containing zinc oxide may be formed by a sol-gel method, for example. As described above, both the adhesion layer and the seed layer may be formed by a physical film formation method such as a vapor deposition method or a sputtering method, or a sol-gel method, an electroless plating method, a physical film formation method, etc. may be combined.

[0037] Next, as shown in FIG. 4B, a first resist layer 31 is formed partially on the underlayer 17. Then, a plating layer is formed by electrolytic plating on the underlayer 17 that is not covered by the first resist layer 31. The plating layer can form the first conductive layer 12 on the first surface 11a of the substrate 11, the through electrode 20 of the through hole 15, and the third conductive layer 21 on the second surface 11b of the substrate 11. As described above, the underlayer 17 is disposed between the substrate 11 (first surface 11a) and the first conductive layer 12, between the substrate 11 (sidewall 15a of the through hole 15) and the through electrode 20, and between the substrate 11 (second surface 11b) and the third conductive layer 21.

[0038] Thereafter, as shown in FIG. 4C, the first resist layer 31 is removed. Furthermore, the portion of the underlayer 17 covered by the first resist layer 31 (the portion where the first conductive layer 12 is not formed) is removed by, for example, wet etching. As a result, an inductor including the first conductive layer 12 on the first surface 11a of the substrate 11, the through electrode 20 in the through hole 15, and the third conductive layer 21 on the second surface 11b of the substrate 11 can be configured. The inductor will be described in detail in the twenty-fourth embodiment. Note that a step of annealing the conductive layer may be performed. In addition, when forming a through electrode filled with a conductive material, electrolytic plating may be further performed to fill the through hole 15 with the conductive material.

[0039] Next, the surface of the first conductive layer 12 is treated with NH 3 Perform surface treatment processes that involve exposure to plasma, such as plasma This can remove oxides on the surface of the first conductive layer 12. This can increase the adhesion between the first conductive layer 12 and the first insulating layer 13.

[0040] Next, the first insulating layer 13 is formed. First, a resist layer (not shown) is partially formed on the first conductive layer 12 and the first surface 11a of the substrate 11. Next, the first insulating layer 13 is formed on the first conductive layer 12 and the first surface 11a of the substrate 11, in the portions not covered by the resist layer and in the portions covered by the resist layer. At this time, the first insulating layer 13 is formed so as to cover the upper surface 12a of the first conductive layer 12, the side surface 12b of the first conductive layer 12, the side surface 17a of the base layer 17, and the first surface 11a of the substrate 11. As a result, the first insulating layer 13 having the above-mentioned first portion 13a, second portion 13b, and third portion 13c is formed.

[0041] As a method for forming the first insulating layer 13, for example, plasma CVD, sputtering, etc. can be adopted. Since sputtering has high directional dependency, it may be difficult to form the first insulating layer 13 on the side surface 12b of the first conductive layer 12, so it is preferable to adopt plasma CVD. After forming the first insulating layer 13, the resist layer is removed by, for example, wet etching. At this time, the first insulating layer 13 formed on the resist layer is removed by lift-off. FIG. 4D shows the state after the resist layer is removed. Note that, before forming the resist layer, the first insulating layer 13 may be formed, and the resist layer may be formed only on the portion where the first insulating layer 13 is to be left, so that the first insulating layer 13 is etched. That is, the first insulating layer 13 may be formed by photolithography as shown in FIG. 4D.

[0042] Next, as shown in FIG. 4E, a second conductive layer 14 is formed on the first insulating layer 13. This makes it possible to configure a capacitor including the first conductive layer 12, the first insulating layer 13 on the first conductive layer 12, and the second conductive layer 14 on the first insulating layer 13. The process of forming the second conductive layer 14 is similar to the process of forming the first conductive layer 12, for example, a plating layer, and therefore the description is omitted. Here, when the second conductive layer 14 is formed of a plating layer, a seed layer or the like may be formed between the second conductive layer 14 and the first insulating layer 13. Note that the second conductive layer 14 may be formed by etching a metal foil or by applying a conductive paste, as described above.

[0043] After that, the resin layer 22 is formed, the via hole 23 is formed, and the connection portion 24 is formed, thereby realizing the configuration shown in FIG. 2. The thickness of the resin layer 22 (the distance from the first surface 11a of the substrate 11 to the surface of the resin layer 22 in the example of FIG. 2) is preferably in the range of not less than the total thickness of the underlayer 17, the first conductive layer 12, the first insulating layer 13, and the second conductive layer 14, and not more than twice the total thickness, in order to flatten the unevenness of the capacitor 100 and the like on the surface. In addition, a capacitance component occurs between the first conductive layer 12 and the connection portion 24 in the vicinity of the capacitor 100, but it is desired to reduce this as much as possible in terms of design. Therefore, it is desirable to form a thick resin layer 22 having a lower relative dielectric constant than the first insulating layer 13 between the first conductive layer 12 and the connection portion 24. When the thickness of the resin layer 22 is the distance from the surface of the first insulating layer 13 to the surface of the resin layer 22, it is desirable to have a thickness of not less than 10 times the thickness of the first insulating layer 13, for example.

[0044] FIG. 4F is a diagram showing another example of a method for manufacturing an interposer 10 according to the first embodiment of the present disclosure. FIG. 4E shows an example in which the first insulating layer 13 is not formed around the through hole 15, but the first insulating layer 13 may be formed so as to extend to the through electrode 20 of the through hole 15. As shown in FIG. 4F, the first insulating layer 13 may be formed so as to extend from the first surface 11a side of the substrate 11 and cover at least a part of the through electrode 20. In the example of FIG. 4F, the first insulating layer 13 has a part 13h that extends continuously from the first part 13a and covers at least a part of the through electrode 20. According to this configuration, for example, when the seed layer is removed by etching after the formation of the first insulating layer 13, a part of the through electrode 20 and the conductive layer at the corner of the through hole 15 (the part at the boundary between the first conductive layer 12 and the through electrode 20) are protected by the first insulating layer 13, and it is possible to prevent the influence of the through electrode 20 and the conductive layer around it becoming thinner by etching. The seed layer that is removed by etching after the formation of the first insulating layer 13 is, for example, the seed layer that was used when the second conductive layer 14 was formed from a plating layer.

[0045] <Second embodiment> 5 is a schematic cross-sectional view showing a capacitor 100A according to a second embodiment of the present disclosure. In this embodiment, the third portion 13Ac of the first insulating layer 13A does not extend over the first surface 11a of the substrate 11, but covers the side surface 17a of the underlayer 17. With this configuration, the second portion 13b of the first insulating layer 13A covers the side surface 12b of the first conductive layer 12 and the side surface 17a of the underlayer 17, and extends from the second portion 13b to the third portion 13Ac of the first insulating layer 13A until it comes into contact with the substrate 11. Therefore, it is possible to prevent the first conductive layer 12 and the underlayer 17 from being shorted with the second conductive layer 14.

[0046] <Third embodiment> FIG. 6 is a schematic cross-sectional view showing a capacitor 100B according to a third embodiment of the present disclosure. In this embodiment, the second portion 13Bb of the first insulating layer 13B extends from the first portion 13a to a position between the upper end 12c and the lower end 12d of the side surface 12b of the first conductive layer 12. In this manner, the second portion 13b of the first insulating layer 13B does not need to cover the entire surface of the side surface 12b of the first conductive layer 12, but only needs to cover at least a part of the side surface 12b of the first conductive layer 12. According to this configuration, the second portion 13Bb of the first insulating layer 13B extends continuously from the first portion 13a to cover a part of the side surface 12b of the first conductive layer 12. Therefore, it is possible to prevent the first conductive layer 12 from being shorted with the second conductive layer 14.

[0047] 6 can be formed by, for example, lift-off using a resist layer. For example, a resist layer thinner than the first conductive layer 12 is formed on a portion other than the first conductive layer 12, and the first insulating layer 13B is formed on the first conductive layer 12 and the resist layer. After that, when the resist layer is removed, the second portion 13Bb of the first insulating layer 13B that covers a portion of the side surface 12b is formed.

[0048] <Fourth embodiment> FIG. 7 is a schematic cross-sectional view showing a capacitor 100C according to a fourth embodiment of the present disclosure. In this embodiment, the planar size of the underlayer 17C is larger than the planar size of the first conductive layer 12. That is, the underlayer 17C extends outward from the side surface 12b of the first conductive layer 12 by a distance D1, and the side surface 17Ca of the underlayer 17C is present outside the side surface 12b of the first conductive layer 12. That is, at the end of the underlayer 17C, an upper surface 17Cf that is not covered by the first conductive layer 12 appears. The second portion 13Cb of the first insulating layer 13C covers the side surface 12b of the first conductive layer 12, the upper surface 17Cf and the side surface 17Ca of a part (end) of the underlayer 17, and extends from the second portion 12Cb to the third portion 13Cc of the first insulating layer 13C until it comes into contact with the substrate 11. Therefore, it is possible to prevent the first conductive layer 12 and the underlayer 17C from being shorted with the second conductive layer 14. The distance D1 is preferably 20 nm to 1000 nm.

[0049] <Fifth embodiment> FIG. 8 is a schematic cross-sectional view showing a capacitor 100D according to a fifth embodiment of the present disclosure. In this embodiment, the planar size of the underlayer 17D is smaller than the planar size of the first conductive layer 12. That is, the underlayer 17D has a side surface 17Da that is inward by a distance D2 from the side surface 12b of the first conductive layer 12. As a result, a recessed portion 17Db is formed by the first conductive layer 12, the substrate 11, and the underlayer 17D. A space 18 is formed below the first conductive layer 12 by the recessed portion 17Db and the first insulating layer 13. The second portion 13b and the third portion 13c of the first insulating layer 13 are arranged so as to leave at least a part of the space 18. In this way, even if at least a part of the space 18 remains as a gap, the insulating effect of the third portion 13c of the first insulating layer 13 can prevent the first conductive layer 12 and the underlayer 17 from shorting with the second conductive layer 14.

[0050] Sixth embodiment 9 is a schematic cross-sectional view showing a capacitor 100E according to a sixth embodiment of the present disclosure. In this embodiment, the second portion 13Eb and the third portion 13Ec of the first insulating layer 13E are arranged to fill the recessed portion 17Db (see FIG. 8). According to this configuration, the second portion 13Eb and the third portion 13Ec of the first insulating layer 13E fill the recessed portion 17Db below the first conductive layer 12. Therefore, compared to the configuration of FIG. 8, it is possible to more effectively prevent the first conductive layer 12 and the base layer 17D from shorting with the second conductive layer 14. In addition, since the first insulating layer 13E enters the recessed portion 17Db, the adhesion between the first conductive layer 12 and the base layer 17D is also improved. From the viewpoint of preventing such short circuits and improving adhesion, the size of the recessed portion 17Db of the underlayer 17D, that is, the distance D2 from the first insulating layer 13 to the side surface 17Da of the underlayer 17, is preferably 20 nm to 1000 nm.

[0051] Seventh embodiment 10 is a schematic cross-sectional view showing a capacitor 100F according to a seventh embodiment of the present disclosure. In this embodiment, in the configuration of FIG. 9, the second conductive layer 14F is disposed across the first portion 13a, the second portion 13Eb, and the third portion 13Ec of the first insulating layer 13E. With this configuration, the contact area between the second conductive layer 14F and the first insulating layer 13E is large, so that the adhesion is good. In addition, with this configuration, the distance between the second conductive layer 14F and the first conductive layer 12 and the base layer 17D is short, but since the second portion 13Eb and the third portion 13Ec of the first insulating layer 13E fill the recess portion 17Db below the first conductive layer 12, it is possible to prevent the first conductive layer 12 and the base layer 17D from being shorted with the second conductive layer 14F.

[0052] Eighth embodiment FIG. 11 is a schematic cross-sectional view showing a capacitor 100G according to an eighth embodiment of the present disclosure. This embodiment corresponds to the capacitor 100 according to the first embodiment shown in FIG. 3, in which the first conductive layer 12G is formed without using the underlayer 17. According to this configuration, the first insulating layer 13 covers the side surface 12Gb of the first conductive layer 12G with the second portion 13b, and also covers the first surface 11a of the substrate 11 with the third portion 13c. Therefore, even if the position of the second conductive layer 14 is shifted, the first conductive layer 12G can be prevented from shorting with the second conductive layer 14. In addition, since the third portion 13c of the first insulating layer 13 is in contact with the first surface 11a of the substrate 11, the resistance to peeling of the first insulating layer 13 is increased.

[0053] <Ninth embodiment> FIG. 12 is a schematic cross-sectional view showing a capacitor 100H according to a ninth embodiment of the present disclosure. This embodiment corresponds to the capacitor 100A according to the second embodiment shown in FIG. 5, in which the first conductive layer 12G is formed without using the underlayer 17. That is, the second portion 13b of the first insulating layer 13A covers the entire portion between the upper end 12Gc and the lower end 12Gd of the side surface 12Gb of the first conductive layer 12G. According to this configuration, the second portion 13b of the first insulating layer 13A extends continuously from the first portion 13a to entirely cover the side surface 12Gb of the first conductive layer 12G. Therefore, it is possible to prevent the first conductive layer 12G from being shorted with the second conductive layer 14.

[0054] Tenth embodiment FIG. 13 is a schematic cross-sectional view showing a capacitor 100I according to a tenth embodiment of the present disclosure. This embodiment corresponds to the capacitor 100B according to the third embodiment shown in FIG. 6, in which the first conductive layer 12G is formed without using the underlayer 17. That is, the second portion 13Bb of the first insulating layer 13B covers the side surface 12Gb of the first conductive layer 12G up to a position between the upper end 12Gc and the lower end 12Gd. According to this configuration, the second portion 13Bb of the first insulating layer 13B extends continuously from the first portion 13a to cover a part of the side surface 12Gb of the first conductive layer 12G. Therefore, it is possible to prevent the first conductive layer 12G from being shorted with the second conductive layer 14.

[0055] <Eleventh embodiment> FIG. 14 is a schematic cross-sectional view showing a capacitor 100J according to an eleventh embodiment of the present disclosure. As in the capacitor 100J, the insulating layer covering the side surface 12b of the first conductive layer 12 and the side surface 17a of the underlayer 17 may be formed of a second insulating layer 19 made of a material different from that of the first insulating layer 13. In this embodiment, the first insulating layer 13J is composed of a first portion 13a disposed between the first conductive layer 12 and the second conductive layer 14. That is, the first insulating layer 13J is disposed only on the upper surface 12a of the first conductive layer 12. The second insulating layer 19 has a first portion 19a, a second portion 19b, and a third portion 19c. The first portion 19a is disposed on the first insulating layer 13J. The second portion 19b extends continuously from the first portion 19a to cover the side surface 12b of the first conductive layer 12 and the side surface 17a of the underlayer 17. The third portion 19c extends continuously from the second portion 19b and covers at least a part of the first surface 11a of the substrate 11.

[0056] The second insulating layer 19 may be made of an organic material or an inorganic material. When the recessed portion 17Db exists as in the sixth embodiment shown in FIG. 9, the second insulating layer 19 may be made of a resin, and the deformation of the resin may be utilized to fill the recessed portion 17Db below the first conductive layer 12. More preferably, the second insulating layer 19 is a photosensitive resin that can be patterned by light, such as a photosensitive polyimide. The second insulating layer 19 may also be a resin that can form an opening by a laser, such as an epoxy resin. According to this configuration, the second insulating layer 19 covers the side surface 12b of the first conductive layer 12, the side surface 17a of the base layer 17, and the first surface 11a of the substrate 11, and therefore the first conductive layer 12 and the base layer 17 can be prevented from shorting with the second conductive layer 14. In this embodiment, the thickness of the second portion 19b of the second insulating layer 19 is T2, and the thickness of the third portion 19c is T3, and the contents of the above-mentioned embodiment regarding the thickness can be applied.

[0057] 15A to 15C are diagrams for explaining a method for manufacturing a capacitor according to the eleventh embodiment of the present disclosure. This method can be carried out in accordance with the process of FIG. 4D in the first embodiment. First, as shown in FIG. 15A, a first insulating layer 13J is formed on the upper surface 12a of the first conductive layer 12. Next, as shown in FIG. 15B, a dry film-like photosensitive resin is formed by vacuum lamination molding so as to cover the top of the first insulating layer 13J, the side surface 12b of the first conductive layer 12, and a part of the first surface 11a of the substrate 11. Here, the photosensitive resin may be, for example, a photosensitive polyimide. As a result, a second insulating layer 19 is formed having a first portion 19a arranged on the first insulating layer 13, a second portion 19b covering the side surface 12b of the first conductive layer 12, and a third portion 19c covering at least a part of the first surface 11a of the substrate 11. Thereafter, the laminated photosensitive resin is placed under atmospheric pressure. As a result, in the fifth embodiment in which the space 18 is formed as shown in FIG. 8, the internal pressure of the space 18 is the pressure at the time of lamination molding. Therefore, by placing it under atmospheric pressure, the space 18 is crushed by the effect of the pressure difference, and as a result, as in the sixth embodiment shown in FIG. 9, the photosensitive resin enters the recessed portion 17Db below the first conductive layer 12. Next, as shown in FIG. 15C, a part of the first portion 19a and a part of the third portion 19c of the second insulating layer 19 are removed by photolithography. The part of the first portion 19a is a part where the second conductive layer 14 is formed on the first insulating layer 13J. By removing this part, the first portion 13a of the first insulating layer 13J is exposed. The part of the third portion 19c is a part that is separated from the second portion 19b by a predetermined distance. Alternatively, a non-photosensitive resin in a dry film form may be formed by vacuum lamination so as to cover the first insulating layer 13, the side surface 12b of the first conductive layer 12, and a part of the first surface 11a of the substrate 11, and then a part of the first portion 19a and a part of the third portion 19c of the second insulating layer 19 may be removed by irradiating with a UV laser, a carbon dioxide laser, or an excimer laser. For example, an epoxy resin may be used as the non-photosensitive resin in a dry film form. Next, as shown in FIG. 14, a second conductive layer 14 is formed on the part where the first insulating layer 13J is exposed among the parts where the second insulating layer 19 has been removed.At this time, the second conductive layer 14 is also formed on a portion of the second insulating layer 19 .

[0058] The method shown in FIG. 15A to FIG. 15C is advantageous in the case of a configuration in which an insulating layer is disposed in the recessed portion 17Db formed below the first conductive layer 12, as in the sixth embodiment shown in FIG. 9 described above. After laminating the photosensitive or non-photosensitive resin under the first pressure, the second pressure is placed under a pressure higher than the first pressure during lamination, so that the photosensitive or non-photosensitive resin easily enters the recessed portion 17Db below the first conductive layer 12, and as a result, it becomes easy to fill the recessed portion 17Db with the resin. In the above example, the first pressure is a vacuum and the second pressure is atmospheric pressure, but this is not limited thereto. That is, it is sufficient that the second pressure is higher than the first pressure. In addition, if the recessed portion 17Db does not exist or the space 18 may remain in the recessed portion 17Db, the second pressure may be lower than the first pressure or may be the same as the first pressure.

[0059] <Twelfth embodiment> FIG. 16 is a schematic cross-sectional view showing a capacitor 100K according to a twelfth embodiment of the present disclosure. Like the capacitor 100K, it may be divided into a plurality of regions. For example, in FIG. 16, capacitors 100K-1, 100K-2, and 100K-3 are arranged on a substrate 11. Although FIG. 16 shows a case where the plurality of regions is three, the plurality of regions is not limited to three. A space SP1 is arranged between the capacitor 100K-1 and the capacitor 100K-2. A space SP2 is arranged between the capacitor 100K-2 and the capacitor 100K-3. That is, the capacitor 100K-2 is arranged between the capacitor 100K-1 and the capacitor 100K-3.

[0060] The capacitor 100K-1 has an underlayer 17K-1, a first conductive layer 12K-1, a first insulating layer 13K-1, and a second conductive layer 14K-1. The capacitor 100K-2 has an underlayer 17K-2, a first conductive layer 12K-2, a first insulating layer 13K-2, and a second conductive layer 14K-2. The capacitor 100K-3 has an underlayer 17K-3, a first conductive layer 12K-3, a first insulating layer 13K-3, and a second conductive layer 14K-3. The underlayers 17K-1, 17K-2, and 17K-3 do not necessarily have to be formed.

[0061] When the gap SP1 between the first conductive layer 12K-1 and the first conductive layer 12K-2 is narrow, that is, when the first conductive layer 12K-1 and the first conductive layer 12K-2 are close to each other, the insulating layer is not easily deposited in the region facing the gap SP1 when it is formed. As a result, the first insulating layers 13K-1 and 13K-2 are not formed on a part of the side faces of the first conductive layer 12K-1 and the first conductive layer 12K-2 facing the gap SP1. Similarly, the first insulating layers 13K-2 and 13K-3 are not formed on a part of the side faces of the first conductive layer 12K-2 and the first conductive layer 12K-3 facing the gap SP2. Even with this configuration, the second conductive layer is less likely to be formed in the gaps SP1 and SP2, and the first conductive layers 12K-1, 12K-2, and 12K-3 and the base layers 17K-1, 17K-2, and 17K-3 can be prevented from shorting out with the second conductive layers 14K-1, 14K-2, and 14K-3.

[0062] <Thirteenth embodiment> FIG. 17 is a schematic cross-sectional view showing a capacitor 100L according to a thirteenth embodiment of the present disclosure. The capacitor 100L of this embodiment further includes an intermediate layer 26 between the first conductive layer 12L and the first insulating layer 13L. The intermediate layer 26 is preferably a conductive material for increasing adhesion between the first conductive layer 12L and the first insulating layer 13L, and may be, for example, titanium (Ti), titanium nitride (TiN), nickel (Ni), or nickel-gold alloy (Ni-Au). The thickness of the intermediate layer 26 is preferably 20 nm to 200 nm. The intermediate layer 26 may be omitted. By using a conductive material for increasing adhesion as the intermediate layer 26, the first insulating layer 13L is less likely to peel off when the second resist layer 32 (see FIG. 18E) is removed by lift-off as described below.

[0063] In this embodiment, the first portion 13a of the first insulating layer 13L is disposed between the intermediate layer 26 and the first conductive layer 12L. The first portion 13a of the first insulating layer 13L covers the upper surface 26a of the intermediate layer 26, the second portion 13b of the first insulating layer 13L covers the side surface 26b of the intermediate layer 26 and the side surface 12b of the first conductive layer 12L, and further, the third portion 13c of the first insulating layer 13L covers the first surface 11a of the substrate 11. In this embodiment, the thickness T4 of the third portion 13c is preferably 50 nm to 200 nm.

[0064] The first insulating layer 13L has a fourth portion 13d connected to the third portion 13c and extending in a direction intersecting the first surface 11a of the substrate 11. In other words, the fourth portion 13d extends outward relative to the substrate 11. In the example of FIG. 17, the fourth portion 13d extends continuously from the third portion 13c and is formed to rise from the first surface 11a of the substrate 11. The fourth portion 13d has a tapered shape (thin-tipped shape) in which the width of its tip is smaller than the width of its bottom. The height H1 of the fourth portion 13d is preferably 25 μm or more. This embodiment has the following advantages. For example, in a structure such as the second conductive layer 14F of the seventh embodiment shown in FIG. 10, the second conductive layer 14F is blocked by the fourth portion 13d, so that the insulation against an adjacent MIM structure, for example, a capacitor, can be further improved.

[0065] In this embodiment, the length L2 of the third portion 13c (the distance from the first conductive layer 12L to the end of the third portion 13c) is preferably 20 μm or more. By setting the length L2 of the third portion 13c within the above range, the first insulating layer 13 is less likely to peel off when the second resist layer 32 (see FIG. 18E) is removed by lift-off described below.

[0066] 18A to 18F are views illustrating a method for manufacturing a capacitor 100L according to a thirteenth embodiment of the present disclosure. Fig. 18A to 18F show steps after a first conductive layer 12L is formed on a first surface 11a of a substrate 11. Fig. 18A is an enlarged view of the first surface 11a side in the state of Fig. 4B.

[0067] As shown in FIG. 18A, the first conductive layer 12L is formed on the first surface 11a of the substrate 11. Next, as shown in FIG. 18B, a layer of a conductive material such as titanium (corresponding to the intermediate layer 26) is formed by physical vapor deposition (PVD) or the like so as to cover the upper surface 12a of the first conductive layer 12L and the upper surface 31a of the first resist layer 31. Here, the physical vapor deposition may be, for example, sputtering or evaporation. Next, as shown in FIG. 18C, the first resist layer 31 is removed by lift-off. The lift-off is a method of peeling off the resist and leaving only the desired pattern. During this lift-off, the layer of the conductive material formed on the upper surface of the first resist layer 31 is removed together with the first resist layer 31. This results in a state in which the intermediate layer 26 is formed on the upper surface 12a of the first conductive layer 12L. Then, the portion of the underlayer 17 that was covered by the first resist layer 31 (the portion where the first conductive layer 12L is not formed) is removed by, for example, wet etching. After removing the first resist layer 31, a process for removing resist residue by dry surface treatment may be performed, which can improve the adhesion of the first insulating layer 13L to be formed in the next process.

[0068] Next, as shown in FIG. 18D, a second resist layer 32 is formed around the first conductive layer 12L at a predetermined distance (corresponding to the above-mentioned distance L2) from the first conductive layer 12L. Next, as shown in FIG. 18E, a first insulating layer 13L is formed so as to cover the upper surface 26a and the side surface 26b of the intermediate layer 26, the side surface 12b of the first conductive layer 12L, the first surface 11a of the substrate 11, and the upper surface 32a and the side surface 32b of the second resist layer 32. Next, as shown in FIG. 18F, the second resist layer 32 is removed by lift-off. In this embodiment, the second resist layer 32 is removed by lift-off so as to leave at least a part of the first insulating layer 13L formed on the side surface 32b of the second resist layer 32. During this lift-off, the first insulating layer 13L formed on the upper surface 32a of the second resist layer 32 is removed together with the second resist layer 32. During the wrist-off process, the second resist layer 32 is pulled upward and removed, forming a tapered (thin-tipped) fourth portion 13d. This forms a first insulating layer 13L having a first portion 13a disposed on the intermediate layer 26, a second portion 13b covering the side surface 26b of the intermediate layer 26 and the side surface 12b of the first conductive layer 12L, a third portion 13c covering at least a portion of the first surface 11a of the substrate 11, and a fourth portion 13d formed to rise from the first surface 11a of the substrate 11. Then, as shown in FIG. 17, a second conductive layer 14 is formed on the first insulating layer 13L at a position corresponding to the position of the intermediate layer 26.

[0069] 18A to 18F, the number of steps can be reduced by performing the conductive layer formation step and resist peeling (i.e., lift-off) without using etching as much as possible. In addition, when a transparent substrate such as a glass substrate is used as the substrate 11, the transparency of the glass substrate is maintained more than when etching is used extensively, which is advantageous when an optical element that is affected by the transparency of the glass substrate is disposed near an MIM structure such as a capacitor.

[0070] 19 is a diagram illustrating the positional relationship of a capacitor 100L according to a thirteenth embodiment of the present disclosure. In an MIM structure such as a capacitor manufactured using lift-off, the distance L3 between adjacent MIM structures (the distance from the end of the first insulating layer 13L of one MIM structure to the end of the first insulating layer 13L of the adjacent MIM structure) is preferably 10 μm to 1 mm. The above-mentioned range of L3 can be set by adjusting the width of the second resist layer 32 in FIG. 18D. By setting L3 within the above-mentioned range, the time required for the lift-off process can be shortened, resulting in a structure suitable for lift-off.

[0071] <Fourteenth embodiment> 20A to 20E are diagrams for explaining another method for manufacturing the capacitor 100 according to the first embodiment. Since the manufacturing method is different, this is shown as the fourteenth embodiment. FIG. 20A is an enlarged view of the first surface 11a side in the state of FIG. 4C. As shown in FIG. 20A, the first conductive layer 12 is formed on the first surface 11a of the substrate 11. Next, as shown in FIG. 20B, the first insulating layer 13 is formed on the upper surface 12a and the side surface 12b of the first conductive layer 12 and the first surface 11a of the substrate 11. Next, as shown in FIG. 20C, the second conductive layer 14 is formed on the portion of the first insulating layer 13 corresponding to the upper surface 12a of the first conductive layer 12. Next, as shown in FIG. 20D, a resist layer 33 is formed so as to cover the second conductive layer 14 and to cover a part of the third portion 13c extending from the second portion 13b of the first insulating layer 13 onto the first surface 11a of the substrate 11 (i.e., the base portion of the first insulating layer 13). Next, as shown in FIG. 20E, the first insulating layer 13 not covered with the resist layer 33 is removed by etching or milling. Thereafter, the resist layer 33 is removed. In this manner, the capacitor 100 shown in FIG. 3 can be manufactured. Here, the etching can be, for example, reactive ion etching (RIE). Also, the milling can be, for example, Ar milling.

[0072] FIG. 21A is a schematic plan view showing an interposer 10 according to a fourteenth embodiment of the present disclosure. More specifically, FIG. 21A is a schematic plan view of an interposer 10 including a capacitor 100 manufactured by the method of FIGS. 20A to 20E described above. In FIG. 21A, many components are omitted for ease of explanation, and only a part of the first insulating layer 13 and the second conductive layer 14 formed on the first surface 11a side of the substrate 11 is shown for the capacitor 100. A resin layer 22 is formed on the first surface 11a of the substrate 11 so as to cover the capacitor 100 (MIM structure). Around the area where the capacitor 100 is arranged, a ring-shaped conductive layer 29 and a first insulating layer 13 are formed along the end of the resin layer 22.

[0073] FIG. 21B is a schematic cross-sectional view (cross-sectional view of line CC in FIG. 21A) showing a ring-shaped conductive layer 29 included in an interposer in the fourteenth embodiment of the present disclosure. The conductive layer 29 is disposed on the first insulating layer 13, which is similarly formed in a ring shape. Preferably, the width of the first insulating layer 13 is greater than the width of the conductive layer 29. The conductive layer 29 can be formed during the manufacturing method of FIG. 20C. For example, the conductive layer 29 is formed simultaneously with the step of forming the second conductive layer 14. When forming the second conductive layer 14 in the step of FIG. 20C, the ring-shaped conductive layer 29 is also formed on the first insulating layer 13 along the position where the end of the resin layer 22 is to be formed. Thereafter, in the step of FIG. 20D, a resist layer 33 is formed with a width greater than the width of the conductive layer 29, as shown by the two-dot chain line in FIG. 21B. As a result, even if the step of removing the first insulating layer 13 is performed, the first insulating layer 13 wider than the conductive layer 29 remains. According to this configuration, a first insulating layer 13 that is wider than the conductive layer 29 is disposed between the conductive layer 29 and the substrate 11 at the end position of the resin layer 22, and thus the first insulating layer 13 improves adhesion at the end of the resin layer 22.

[0074] <Fifteenth to nineteenth embodiments> Next, the configurations of the capacitors (first conductive layer, first insulating layer, and second conductive layer) according to the fifteenth to nineteenth embodiments will be described with reference to Figures 22 to 24. The configurations described in these figures are applicable as the capacitor configurations in all of the above-mentioned embodiments.

[0075] FIG. 22A is a schematic plan view showing a capacitor 100M1 according to a fifteenth embodiment of the present disclosure. FIG. 22B is a schematic plan view showing a capacitor 100M2 according to a sixteenth embodiment of the present disclosure. These schematic plan views are plan views of the first surface 11a of the substrate 11 as viewed from above. At least one of the multiple corner portions 13e of the first insulating layer 13M may have a round shape. As shown in FIG. 22A, preferably, all of the four corner portions 13e of the first insulating layer 13M have a round shape. Preferably, the radius of curvature of the corner portion 13e is 5 μm or more. With this configuration, the concentration of stress on the corner portion 13e is alleviated, thereby preventing the first insulating layer 13M from peeling off.

[0076] As shown in FIG. 22B, at least one of the multiple corners 12e of the first conductive layer 12M may have a round shape. Preferably, all of the four corners 12e of the first conductive layer 12M have a round shape. At least one of the multiple corners 14e of the second conductive layer 14M may have a round shape. Preferably, all of the four corners 14e of the second conductive layer 14M have a round shape. According to this configuration, the stress on the corners of the first conductive layer 12M and the second conductive layer 14M can be relaxed, and the resistance to peeling can be improved in the entire capacitor (MIM structure). Note that if at least one of the corners of the first conductive layer 12M and the second conductive layer 14M is rounded, the above-mentioned effect of resistance to peeling can be obtained. The radius of curvature of the corners of the first conductive layer 12M and the second conductive layer 14M is preferably 5 μm or more.

[0077] FIG. 23 is a schematic plan view showing a capacitor 100N according to a seventeenth embodiment of the present disclosure. This schematic plan view is a plan view of the first surface 11a of the substrate 11 as viewed from above. The configuration for preventing peeling is not limited to a round shape. For example, a plurality of corner portions 13e of the first insulating layer 13N may have reinforcing portions 13f. In the example of FIG. 23, the corner portion 13e has reinforcing portions 13f that are rectangular in plan view. By reinforcing the corner portion 13e, which is usually sharp, with the wide reinforcing portion 13f, peeling from the corner portion 13e can be prevented. The shape of the reinforcing portion 13f is not limited to a square, and may be any other shape as long as it contributes to preventing peeling. For example, the other shape may be a shape that spreads from the corner portion 13e to the periphery, and may be a shape surrounded by straight lines as exemplified in this embodiment, a shape surrounded by curved lines such as a circle, or a shape surrounded by a combination of straight lines and curved lines.

[0078] FIG. 24A is a schematic plan view showing a capacitor 100P according to an eighteenth embodiment of the present disclosure. FIG. 24B is a schematic plan view showing a capacitor 100Q according to a nineteenth embodiment of the present disclosure. These schematic plan views are plan views of the first surface 11a of the substrate 11 as viewed from above. A plurality of second conductive layers 14P may be formed (patterned) independently of each other on the first insulating layer 13P. In the example of FIG. 24A, the second conductive layer 14P on the first insulating layer 13P is composed of four conductive portions. As shown in the figure, each corner of the four conductive portions may have a rounded shape.

[0079] 24B, the second conductive layer 14Q may have a slit portion 14g formed so as to extend inward from the corner portion 14e. As illustrated in the configurations of FIGS. 24A and 24B, the pattern of the second conductive layer 14 can be appropriately changed to improve the design freedom. For example, the design freedom is improved when the second conductive layer 14 is connected to a conductive layer of an adjacent capacitor (MIM structure) and when the second conductive layer 14 is connected to a semiconductor chip 50 or a wiring board 40.

[0080] <20th to 22nd embodiments> Next, a configuration in which a plurality of capacitors (MIM structures) are arranged adjacent to each other will be described. The configuration described below is applicable to all of the above-mentioned embodiments. FIG. 25A is a schematic plan view showing the positional relationship between the first conductive layers 12-1 and 12-2 and the first insulating layer 13R of the capacitor 100R according to the twentieth embodiment of the present disclosure. FIG. 25B is a schematic plan view showing the positional relationship between the first conductive layers 12-1 and 12-2 and the first insulating layer 13S of the capacitor 100S according to the twenty-first embodiment of the present disclosure. FIG. 25C is a schematic plan view showing the positional relationship between the first conductive layers 12-1 and 12-2 and the first insulating layer 13T of the capacitor 100T according to the twenty-second embodiment of the present disclosure. These schematic plan views are plan views of the first surface 11a of the substrate 11 as viewed from above. The second conductive layer 14 is omitted from FIGS. 25A to 25C.

[0081] As in the capacitor 100R shown in FIG. 25A, the first insulating layer 13R may be disposed across the adjacent first conductive layers 12-1 and 12-2. That is, the first insulating layer 13R has a portion covering a portion of each of the adjacent first conductive layers 12-1 and 12-2, and a third portion 13Rc connecting these portions on the first surface 11a of the substrate 11. In this manner, the third portion 13Rc is formed so as to connect between the adjacent first conductive layers 12-1 and 12-2. In this example, the first insulating layer 13R is rectangular in plan view. In the manufacturing process of the interposer 10, if the distance between the adjacent capacitors (MIM structure) (more specifically, the distance D3 between the first conductive layers 12-1 and 12-2) becomes small, the resolution limit of the resist may be reached, and the shape of the film may become unstable or foreign matter may be generated. These may be sources of film peeling. In particular, when the first conductive layers 12-1 and 12-2 are formed together with the through electrode 20, they are formed much thicker than the thickness required to realize the function of a capacitor. Therefore, when the distance D3 is small, the aspect ratio of the slit formed between the first conductive layers 12-1 and 12-2 becomes large, making it difficult to control the thickness of the resist in the slit. As a result, it becomes difficult to control the shape of the first insulating layer 13R.

[0082] By connecting the first insulating layer 13R between adjacent first conductive layers 12-1, 12-2 without separating them for each capacitor, the degree of freedom in design is improved without having to worry about the resolution limit of the resist. In addition, the shape of the film is stabilized and the generation of foreign matter can be prevented. In addition, since the problems in the manufacturing process described above can be solved, the distance between adjacent first conductive layers 12-1, 12-2 can be made smaller than when adjacent first conductive layers 12-1, 12-2 are covered with separate first insulating layers 13. Therefore, high density wiring is possible.

[0083] In the above-mentioned configuration, the distance D3 is preferably 10 μm to 100 μm.

[0084] Other shapes may be adopted as the shape of the first insulating layer 13R. As in the capacitor 100S shown in FIG. 25B, the first insulating layer 13S on the adjacent first conductive layers 12-1, 12-2 may be formed so as to be connected at a part. That is, the third portion 13Sc of the first insulating layer 13S on the first surface 11a of the substrate 11 may be formed so as to narrow its width between the adjacent first conductive layers 12-1, 12-2 and to be connected between the adjacent first conductive layers 12-1, 12-2. Also, as in the capacitor 100T shown in FIG. 25C, the third portion 13Tc of the first insulating layer 13 on the first surface 11a of the substrate 11 may have a slit portion 13g.

[0085] 25A to 25C show an example in which first insulating layers 13R, 13S, and 13T are formed across two adjacent first conductive layers 12-1 and 12-2, but first insulating layers 13R, 13S, and 13T may be disposed across three or more first conductive layers 12 in shapes similar to those in Fig. 25A to 25C (third portions 13Rc, 13Sc, and 13Tc between each first conductive layer). In addition, the first insulating layers 13R, 13S, and 13T are shaped such that the periphery in a plan view is formed of straight lines, but the periphery may be formed of curves in consideration of the degree of freedom in design, the resolution of the resist, and the adhesion to the first surface 11a.

[0086] FIG. 26A is a schematic cross-sectional view of the capacitor 100 according to the first embodiment of the present disclosure arranged adjacent to each other. FIG. 26B is a schematic cross-sectional view illustrating an example of the arrangement of the second conductive layer 14 of the capacitor 100R according to the twentieth embodiment of the present disclosure. FIG. 26C is a schematic cross-sectional view illustrating another example of the arrangement of the second conductive layer 14R of the capacitor 100R according to the twentieth embodiment of the present disclosure. These schematic cross-sectional views are schematic cross-sectional views of adjacent capacitors (MIM structure). FIG. 26A shows a configuration in which the capacitor 100 according to the first embodiment shown in FIG. 3 is arranged adjacent to each other. That is, a part of the first conductive layer 12-1 and a part of the first surface 11a of the substrate 11 are covered with a first insulating layer 13-1, and a second conductive layer 14-1 is formed on the first insulating layer 13-1. Also, a part of the first conductive layer 12-2 and a part of the first surface 11a of the substrate 11 are covered with a first insulating layer 13-2, and a second conductive layer 14-2 is formed on the first insulating layer 13-2.

[0087] FIG. 26B is an example of the configuration shown in FIG. 25A to FIG. 25C. Here, a case where FIG. 26B applies to the example of FIG. 25A will be described. As described above, the first insulating layer 13R is formed across the adjacent first conductive layers 12-1 and 12-2. The first insulating layer 13R is formed so that the third portion 13Rc is disposed on the first surface 11a of the substrate 11 between the adjacent first conductive layers 12-1 and 12-2, and connects the first insulating layer 13R on the first conductive layer 12-1 and the first insulating layer 13R on the first conductive layer 12-2. The second conductive layer 14-1 is formed on a portion of the first insulating layer 13R corresponding to the first conductive layer 12-1, and the second conductive layer 14-2 is formed on a portion of the first insulating layer 13R corresponding to the first conductive layer 12-2.

[0088] FIG. 26C is another example of the configuration shown in FIG. 25A to FIG. 25C. Here, a case where FIG. 26C applies to the example of FIG. 25A will be described. The first insulating layer 13R is formed across the adjacent first conductive layers 12-1 and 12-2. The second conductive layer 14R is formed similarly. Specifically, the second conductive layer 14R is formed across a portion of the first insulating layer 13R corresponding to the first conductive layer 12-1, a third portion 13Rc of the first insulating layer 13R between the adjacent first conductive layers 12-1 and 12-2, and a portion of the first insulating layer 13R corresponding to the first conductive layer 12-2.

[0089] <Twenty-third embodiment> FIG. 27 is a schematic cross-sectional view of a case where capacitors 100P according to the 23rd embodiment of the present disclosure are adjacently arranged. This example shows a modified example of the configuration of FIG. 24A. The second conductive layer 14P-1 on the first insulating layer 13P-1 may be composed of a plurality of conductive parts (first conductive part 14P-1a and second conductive part 14P-1b) separated from each other. Also, the second conductive layer 14P-2 on the first insulating layer 13P-2 may be composed of a plurality of conductive parts (first conductive part 14P-2a and second conductive part 14P-2b). In such a configuration, a part of the second conductive layer 14P-1 and a part of the second conductive layer 14P-2 may be electrically connected. In the example of FIG. 27, the second conductive part 14P-1b of the second conductive layer 14P-1 and the first conductive part 14P-2a of the second conductive layer 14P-2 are connected via a connection part 24.

[0090] <Twenty-fourth embodiment> Fig. 28 is a schematic plan view showing a capacitor 100U and an inductor 27 included in an interposer 10U according to a twenty-fourth embodiment of the present disclosure. This schematic plan view is a plan view showing a first conductive layer 12U on the first surface 11a side of a substrate 11. Some components such as a connection portion 24 are omitted in Fig. 28. Fig. 29 is a schematic cross-sectional view (cross-sectional view along line DD in Fig. 28) showing an interposer according to a twenty-fourth embodiment of the present disclosure.

[0091] 28, the interposer 10U may include at least an inductor 27 and a capacitor 100U. The interposer 10U may have at least a through electrode 20a electrically connected to the first conductive layer 12U, and a plurality of through electrodes 20b constituting the inductor 27. The through electrode 20a is formed in a through hole 15-1 between the inductor 27 and the capacitor 100U (the first conductive layer 12U, the first insulating layer 13U, and the second conductive layer 14U). Furthermore, the plurality of through electrodes 20b are formed in the plurality of through holes 15-2 within the area of ​​the inductor 27 surrounded by the dotted line.

[0092] 29, a part of the first conductive layer 12U on the first surface 11a side of the substrate 11 constitutes an inductor 27, and another part of the first conductive layer 12U constitutes a lower electrode of the capacitor 100U. On the first surface 11a side of the substrate 11, a thickness Th1 of the first conductive layer 12U constituting the inductor 27 may be substantially the same as a thickness Th2 of the first conductive layer 12U constituting the lower electrode of the capacitor 100U. Note that the two thicknesses can be considered to be substantially the same if they satisfy the following relationship. -10% ≦ (Th1-Th2) / Th1≦ +10%

[0093] The thickness of first conductive layer 12U may be 0.5 μm to 20 μm as described above, but more preferably 5 μm to 20 μm, because this improves the performance of inductor 27. The thickness of through electrodes 20a, 20b may be 50% to 100% of the thickness of first conductive layer 12U on first surface 11a of substrate 11.

[0094] <Twenty-fifth embodiment> FIG. 30 is a schematic plan view showing a capacitor 100V according to the twenty-fifth embodiment of the present disclosure. In this embodiment, an example is shown in which the second conductive layer 14 of the capacitor 100 in the first embodiment is shared with the connection portion 24. The via hole 23V formed in the resin layer 22 is provided separately from the via hole 23 for exposing a conductive layer such as the first conductive layer 12, for example, the via hole 23 in FIG. 2, and is formed so as to expose the first portion 13a of the first insulating layer 13. In this example, when the via hole 23 is formed, the via hole 23V is also formed. In addition, when the connection portion 24 is formed corresponding to the via hole 23, the connection portion 24V is also formed in the via hole 23V. Note that the via hole 23 and the via hole 23V may be formed separately. In addition, the connection portion 24 and the connection portion 24V may also be formed separately. With this structure, the lower portion 14V of the connection portion 24V functions in the same manner as the second conductive layer 14 in the first embodiment. Note that the lower portion 14V includes a portion in contact with the first insulating layer 13.

[0095] <Twenty-sixth embodiment> In the twenty-sixth embodiment, a semiconductor device manufactured using the interposer 10 in the first embodiment will be described.

[0096] FIG. 31 is a diagram showing a semiconductor device according to the twenty-sixth embodiment of the present disclosure. The semiconductor device 1000 has three stacked interposers 10 (10-1, 10-2, 10-3) and is connected to an LSI substrate 70. The interposer 10-1 has a semiconductor element such as a DRAM, and also has connection terminals 81-1 and 82-1 formed by a connection portion 24 or the like. These interposers 10 (10-1, 10-2, 10-3) do not have to use a glass substrate, and some of the interposers 10 may use a substrate made of a material different from that of the other interposers 10. The connection terminal 81-1 is connected to the connection terminal 80 of the LSI substrate 70 via a bump 90-1. The connection terminal 82-1 is connected to the connection terminal 81-2 of the interposer 10-2 via a bump 90-2. The connection terminal 82-2 of the interposer 10-2 and the connection terminal 83-1 of the interposer 10-3 are also connected via a bump 90-3. The bumps 90 (90-1, 90-2, 90-3) are made of a metal such as indium, copper, or gold.

[0097] When the interposer 10 is laminated, the number of layers is not limited to three, but may be two, or even four or more. The connection between the interposer 10 and the other substrate is not limited to using bumps, and other bonding techniques such as eutectic bonding may be used. The interposer 10 may be bonded to the other substrate by applying and baking polyimide, epoxy resin, or the like.

[0098] Fig. 32 is a diagram showing another example of the semiconductor device according to the twenty-sixth embodiment of the present disclosure. The semiconductor device 1000 shown in Fig. 32 has a stacked structure in which semiconductor circuit substrates (semiconductor chips) 71-1 and 71-2, such as a MEMS device, a CPU, and a memory, and an interposer 10 are stacked, and is connected to an LSI substrate 70.

[0099] The interposer 10 is disposed between the semiconductor circuit board 71-1 and the semiconductor circuit board 71-2, and is connected to each other via bumps 90-1 and 90-2. The semiconductor circuit board 71-1 is placed on the LSI board 70. The LSI board 70 and the semiconductor circuit board 71-2 are connected by wires 95. In this example, the interposer 10 is used as an interposer for stacking a plurality of semiconductor circuit boards for three-dimensional mounting. A multi-functional semiconductor device can be realized by connecting the interposer 10 to a plurality of semiconductor circuit boards each having a different function. For example, a semiconductor device in which a five-axis motion sensor is realized in one module can be realized by making the semiconductor circuit board 71-1 a three-axis acceleration sensor and the semiconductor circuit board 71-2 a two-axis magnetic sensor.

[0100] In the case where the semiconductor circuit substrate is a sensor formed by a MEMS device, the sensing result may be output as an analog signal. In this case, a low-pass filter, an amplifier, etc. may also be formed on the semiconductor circuit substrate or the interposer 10.

[0101] Fig. 33 is a diagram showing yet another example of the semiconductor device according to the twenty-sixth embodiment of the present disclosure. The above two examples (Figs. 31 and 32) were three-dimensional mounting, but this example is an example applied to 2.5-dimensional mounting. In the example shown in Fig. 33, six interposers 10 (10-1 to 10-6) are stacked and connected to an LSI substrate 70. However, not only are all the interposers 10 stacked, but they are also lined up in the in-plane direction of the substrate.

[0102] In the example of Fig. 33, interposers 10-1 and 10-5 are connected onto an LSI substrate 70, interposers 10-2 and 10-4 are connected onto interposer 10-1, interposer 10-3 is connected onto interposer 10-2, and interposer 10-6 is connected onto interposer 10-5. Note that, as in the example shown in Fig. 33, even if the interposer 10 is used as an interposer for connecting multiple semiconductor circuit substrates, such 2.5-dimensional mounting is possible. For example, interposers 10-3, 10-4, 10-6, etc. may be replaced with semiconductor circuit substrates.

[0103] The semiconductor device 1000 manufactured as described above is mounted on various electronic devices, such as mobile terminals, information processing devices, and home appliances. More specifically, the mobile terminals include mobile phones, smartphones, and notebook personal computers. More specifically, the information processing devices include desktop personal computers, servers, and car navigation systems. Examples of electronic devices may include wireless local area network (LAN) devices, set-top boxes, music players, video players, entertainment units, navigation devices, communication devices, personal digital assistants (PDAs), and fixed location data units.

[0104] FIG. 34 is a diagram illustrating an example of an electronic device using the semiconductor device according to the twenty-sixth embodiment of the present disclosure.

[0105] A smartphone 500 and a notebook personal computer 600 are shown as examples of electronic devices equipped with the semiconductor device 1000. These electronic devices have a control unit 1100 configured with a CPU or the like that executes application programs to realize various functions. The various functions include a function that uses an output signal from the semiconductor device 1000. Note that the semiconductor device 1000 may have the function of the control unit 1100.

[0106] <Modification> The present disclosure is not limited to the above-described embodiments, and includes various other modified examples. For example, the above-described embodiments have been described in detail to clearly explain the present disclosure, and are not necessarily limited to those having all of the configurations described. In addition, a part of the configuration of one embodiment may be replaced with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is possible to add, delete, or replace a part of the configuration of each embodiment with another configuration. Some modified examples will be described below.

[0107] (1) The substrate 11 on which the through electrode 20 is formed is described as being used as an interposer disposed between a wiring substrate and a semiconductor chip or the like, but is not limited thereto. That is, the substrate 11 on which the through electrode 20 is formed can be used as a through electrode substrate. Here, the through electrode substrate includes not only an interposer disposed between a wiring substrate and a semiconductor chip or the like, but also an IPD (Integrated Passive Device) on which a semiconductor chip or the like is not disposed. In this case, one of the upper and lower wiring substrates is present so as to be electrically connected to the through electrode. On the other hand, the semiconductor chip or the like may be disposed at a position different from the through electrode substrate on the wiring substrate and electrically connected to the wiring substrate.

[0108] (2) In the capacitors in the above-described embodiments, for example, in the capacitor 100, the first insulating layer 13 is arranged symmetrically on the side surface 12b of the first conductive layer 12, but the present invention is not limited thereto. For example, the left side surface 12b of the first conductive layer 12 and the first surface 11a of the substrate 11 are covered with the second portion 13b and the third portion 13c of the first insulating layer 13 as in the capacitor 100 of the first embodiment shown in FIG. 3. On the other hand, the right side surface 12b of the first conductive layer 12 may be covered with the first insulating layer 13A as in the second embodiment shown in FIG. 5, or may be covered with the first insulating layer 13B as in the third embodiment shown in FIG. 6.

[0109] (3) In the capacitors in each of the above-described embodiments, layers not shown may be formed between substrate 11 and first conductive layer 12, between first conductive layer 12 and first insulating layer 13, and between first insulating layer 13 and second conductive layer 14.

[0110] (4) According to the present disclosure, the following through electrode substrate can also be provided.

[0111] According to the present disclosure, there is provided a through electrode substrate comprising: a substrate having a first surface and a second surface opposite to the first surface; a through electrode penetrating the substrate; a first conductive layer disposed on the first surface of the substrate and electrically connected to the through electrode; an insulating layer disposed on the first conductive layer; and a second conductive layer disposed on the insulating layer, the insulating layer having a first portion disposed between the first conductive layer and the second conductive layer and a second portion covering at least a portion of a side surface of the first conductive layer.

[0112] According to the present disclosure, there is provided a through electrode substrate, in which the first portion of the insulating layer has a thickness of 200 nm to 400 nm, and the second portion of the insulating layer has a thickness of 50 nm to 100 nm.

[0113] According to the present disclosure, there is provided a through electrode substrate, wherein the insulating layer further has a third portion extending from the second portion and covering at least a portion of the first surface of the substrate.

[0114] According to the present disclosure, there is provided a through electrode substrate, wherein the third portion of the insulating layer has a thickness of 50 nm to 200 nm.

[0115] According to the present disclosure, a through electrode substrate is provided, further comprising an undercoat layer disposed between the substrate and the first conductive layer, the undercoat layer having a recessed portion extending inward beyond the side surface of the first conductive layer.

[0116] According to the present disclosure, there is provided a through electrode substrate, wherein the third portion of the insulating layer is disposed so as to fill the recessed portion.

[0117] According to the present disclosure, there is provided a through electrode substrate, in which the third portion of the insulating layer is disposed so as to leave a space in the recessed portion.

[0118] According to the present disclosure, there is provided a through electrode substrate, wherein the insulating layer further has a fourth portion connected to the third portion and extending in a direction intersecting the first surface of the substrate.

[0119] According to the present disclosure, there is provided a through electrode substrate further comprising an intermediate layer between the first conductive layer and the insulating layer.

[0120] According to the present disclosure, there is provided a through electrode substrate, wherein the third portion has a length of 20 μm or more.

[0121] According to the present disclosure, there is provided a through electrode substrate, wherein the height of the fourth portion is 25 μm or more.

[0122] According to the present disclosure, there is provided a through electrode substrate, in which at least one of the first conductive layer, the insulating layer, and the second conductive layer has a corner portion that is rounded in a plan view.

[0123] According to the present disclosure, there is provided a through electrode substrate, wherein the second portion of the insulating layer is formed of a material different from the first portion.

[0124] According to the present disclosure, there is provided a through electrode substrate, in which the material of the second portion is an insulating resin.

[0125] According to the present disclosure, there is provided a through electrode substrate, further comprising: a resin layer disposed on the first surface; an annular conductive layer formed along an end of the resin layer; and an annular insulating layer disposed between the annular conductive layer and the first surface, the annular conductive layer being wider than the annular conductive layer.

[0126] According to the present disclosure, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer electrically connected to the through electrode on the first surface of the substrate; forming a first insulating layer on an upper surface of the first conductive layer; forming a second insulating layer so as to cover at least a portion of a side surface of the first conductive layer and the first insulating layer; removing a portion of the second insulating layer located above the first conductive layer; and forming a second conductive layer in the portion of the second insulating layer from which the second insulating layer was removed.

[0127] According to the present disclosure, there is provided a method for manufacturing a through hole electrode substrate, in which the second insulating layer is a photosensitive resin, and the removing step is performed by photolithography.

[0128] According to the present disclosure, there is provided a method for manufacturing a through electrode substrate, the step of forming the second insulating layer including applying the second insulating layer under a first pressure and then placing the substrate under a second pressure higher than the first pressure.

[0129] According to the present disclosure, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a first resist on the first surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer on the first surface of the substrate, the first conductive layer being electrically connected to the through electrode; forming an intermediate layer on the first conductive layer; removing the first resist by lift-off; forming a second resist around the first conductive layer; forming a first insulating layer on an upper surface and a side surface of the intermediate layer, a side surface of the first conductive layer, the first surface, and an upper surface and a side surface of the second resist; removing the second resist by lift-off so as to leave at least a portion of the first insulating layer formed on the side surface of the second resist; and forming a second conductive layer on the first insulating layer corresponding to the position of the intermediate layer.

[0130] According to the present disclosure, there is provided a method for manufacturing a through electrode substrate, the method including the steps of: providing a substrate having a first surface and a second surface opposite to the first surface, the substrate having a through hole penetrating the first surface and the second surface; forming a first resist on the first surface; forming a through electrode in the through hole of the substrate, the through electrode connecting the first surface and the second surface, and a first conductive layer on the first surface of the substrate, the first conductive layer being electrically connected to the through electrode; forming a first insulating layer on an upper surface and a side surface of the first conductive layer and on the first surface; forming a second conductive layer on the first insulating layer corresponding to the position of the upper surface of the first conductive layer; forming a second resist layer to cover the second conductive layer and to cover a portion of the first insulating layer on the first surface; removing a portion of the first insulating layer that is not covered by the second resist layer; and removing the second resist layer.

[0131] According to the present disclosure, there is provided a method for manufacturing a through electrode substrate, further comprising the step of forming a resin layer on the first surface, wherein the step of forming the second conductive layer comprises forming an annular conductive layer on the first insulating layer along a position where an end of the resin layer is to be formed, and the step of forming the second resist layer comprises forming the second resist layer with a width wider than a width of the annular conductive layer.

[0132] The through electrode substrate can also be used as an interposer. [Explanation of symbols]

[0133] 10, 10U... interposer, 11... substrate, 12, 12G, 12K, 12L, 12M, 12U... first conductive layer, 13, 13A, 13B, 13C, 13E, 13J, 13K, 13L, 13M, 13N, 13P, 13R, 13S, 13T, 13U... first insulating layer, 14, 14F, 14K, 14M, 14P, 14Q, 14R, 14U... second conductive layer, 15... through hole, 17... base layer, 18... space, 19... second insulating layer, 20... through electrode, 21... third conductive layer, 22... resin layer, 23, 23V... via hole, 24, 24V... connection portion, 25... ball solder, 26... intermediate layer, 27... inductor, 29... conductive layer, 31... first le Resist layer, 32... second resist layer, 33... resist layer, 40... wiring board, 50... semiconductor chip, 70... substrate, 71... semiconductor circuit board, 80, 81, 82, 83... connection terminal, 90... bump, 95... wire, 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, 100I, 100J, 100K, 100L, 100M1, 100M2, 100N, 100P, 100Q, 100R, 100S, 100T, 100U... capacitor, 100V... capacitor, 500... smartphone, 600... notebook personal computer, 1000... semiconductor device, 1100... control unit

Claims

[Claim 1] a substrate having a first surface and a second surface opposite to the first surface; A plurality of through electrodes penetrating the substrate; a first capacitor disposed on the first surface side of the substrate and electrically connected to at least one of the plurality of through electrodes; The first capacitor is a first conductive layer disposed on the first surface side of the substrate and electrically connected to the through electrode; an insulating layer disposed over the first conductive layer; a second conductive layer disposed on the insulating layer; The insulating layer is a first portion disposed between the first conductive layer and the second conductive layer; a second portion covering at least a portion of a side surface of the first conductive layer; A through electrode substrate having

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