Capacitance sensor

Abstract

To provide a capacitance sensor for hardly causing a change in detection accuracy due to a material of an object to be detected.SOLUTION: A capacitance sensor 1 is provided with a substrate 10 having a first surface 11 and a second surface facing each other, and a ground portion 30 including a detection unit 20, a shield portion 40, and a first ground portion 31 disposed on the first surface 11 of the substrate 10. The shield portion 40 and the first ground portion 31 extend in a first direction D1. The detection unit 20 includes a first electrode group 21 having a plurality of first electrodes 23 arranged in a row in the first direction D1, and a second electrode 22. The second electrode 22 is arranged adjacent to the first electrode group 21 in the first direction D1 and a second direction D2 orthogonal to the normal direction of the substrate 10. In the second direction D2, the second electrode 22 is disposed between the first electrode group 21 and the first ground portion 31. In the second direction D2, the shield portion 40 is disposed between the first ground portion 31 and the second electrode 22.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a capacitance sensor, and more particularly to a capacitance sensor including a shield portion and a ground portion. [Background technology]

[0002] Patent Document 1 discloses a capacitance detection device (capacitance sensor). The capacitance detection device disclosed in Patent Document 1 has a base film, an electrode formed on the front surface of the base film, and a shield layer formed on the back surface of the base film. In the capacitance detection device disclosed in Patent Document 1, the shield layer is formed around the electrode not overlapping with the electrode when viewed in a plan view from the thickness direction of the base film. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-250706 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the capacitance detection device disclosed in Patent Document 1, the degree of change in capacitance of the electrodes varies depending on the material of the object to be detected. Therefore, in the capacitance detection device disclosed in Patent Document 1, the detection accuracy varies depending on the material of the object to be detected.

[0005] The present disclosure aims to provide a capacitance sensor in which the detection accuracy is less susceptible to change due to the material of the object to be detected. [Means for solving the problem]

[0006] A capacitive sensor according to an aspect of the present disclosure includes a substrate, a detection unit, a shield unit, and a ground unit. The substrate has a first surface and a second surface facing each other. The detection unit is disposed on the first surface of the substrate. The shield unit is disposed on the first surface of the substrate and extends in a first direction. The ground unit is disposed on the first surface of the substrate and includes a first ground unit. The first ground unit extends in the first direction. The detection unit includes a first electrode group and a second electrode. The first electrode group includes a plurality of first electrodes arranged in a row in the first direction. The second electrode is adjacent to the first electrode group in the second direction. The second direction is orthogonal to the first direction and a normal direction of the substrate. In the second direction, the second electrode is disposed between the first electrode group of the detection unit and the first ground unit. In the second direction, the shield unit is disposed between the first ground unit and the second electrode of the detection unit. Effect of the Invention

[0007] According to the capacitance sensor of the above aspect, it is possible to reduce the occurrence of changes in detection accuracy due to the material of the object to be detected. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of the capacitance sensor according to the first embodiment. [Diagram 2] Fig. 2A is a graph showing the relationship between the distance between an electrode and an object to be detected and the capacitance of the electrode for a 3 cm square electrode, and Fig. 2B is a graph showing the relationship between the distance between an electrode and an object to be detected and the capacitance of the electrode for a 1 cm square electrode. [Diagram 3] FIG. 3 is a plan view of the capacitance sensor according to the second embodiment. [Figure 4] FIG. 4 shows the capacitance sensor of the above, and is a cross-sectional view taken along line A1-A1 in FIG. [Diagram 5] FIG. 5 is a plan view of the capacitance sensor according to the third embodiment. [Figure 6]FIG. 6 shows the capacitance sensor of the above, and is a cross-sectional view taken along line A2-A2 in FIG. [Figure 7] FIG. 7 is a plan view of the capacitance sensor according to the fourth embodiment. [Figure 8] FIG. 8 shows the capacitance sensor of the above, and is a cross-sectional view taken along line A3-A3 in FIG. [Figure 9] FIG. 9 is a plan view of the capacitance sensor according to the fifth embodiment. [Figure 10] FIG. 10 is a plan view of the capacitance sensor according to the sixth embodiment. [Figure 11] FIG. 11 is a plan view of the capacitance sensor according to the seventh embodiment. [Figure 12] FIG. 12 shows the capacitance sensor of the same as above, and is a cross-sectional view taken along line A4-A4 of FIG. [Figure 13] FIG. 13 is a plan view of a capacitance sensor according to a first modification of the sixth embodiment. [Figure 14] FIG. 14 is a plan view of a capacitance sensor according to a second modification of the sixth embodiment. [Figure 15] FIG. 15 is a plan view of a capacitance sensor according to a third modification of the sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The capacitance sensors according to the first to seventh embodiments will be described in detail below with reference to the drawings. However, the figures described in the following embodiments are schematic diagrams, and the ratios of the sizes and thicknesses of the components do not necessarily reflect the actual dimensional ratios. The configurations described in the following embodiments are merely examples of the present disclosure. The present disclosure is not limited to the following embodiments, and various modifications are possible depending on the design, etc., as long as the effects of the present disclosure can be achieved.

[0010] (Embodiment 1) 1. Configuration (1) Capacitive sensor Fig. 1 is a plan view of a capacitance sensor 1 according to a first embodiment. In Fig. 1, dot hatching indicates the surface, not the cross section, of the electrodes on a first surface 11 of a substrate 10. More specifically, the electrodes are a first electrode 23, a second electrode 22, a ground section 30, and a shield section 40, which will be described later. The capacitance sensor 1 includes the substrate 10, a detection section 20, the ground section 30, and the shield section 40. The capacitance sensor 1 further includes a contact section 50 and a wiring section 60.

[0011] The substrate 10 is, for example, a rectangular substrate made of an insulating material. The material of the substrate 10 is, for example, a resin such as polyethylene terephthalate (PET). Hereinafter, the longitudinal direction, lateral direction, and thickness direction of the substrate 10 are referred to as a first direction D1, a second direction D2, and a third direction D3, respectively (see FIG. 4). Any two of the first direction D1, the second direction D2, and the third direction D3 are orthogonal to each other.

[0012] The substrate 10 has a first surface 11 and a second surface 12 that face each other in a third direction D3. The detection section 20, the ground section 30, and the shield section 40 are disposed on the first surface 11.

[0013] The detection unit 20 includes a first electrode group 21 and a second electrode 22. The first electrode group 21 and the second electrode 22 are arranged side by side in the second direction D2. The first electrode group 21 includes a plurality of first electrodes 23 (three in FIG. 1). Each of the plurality of first electrodes 23 has, for example, a square shape. The second electrode 22 has, for example, a rectangular shape that is elongated in the first direction D1.

[0014] Each of the plurality of first electrodes 23 and second electrodes 22 is formed of, for example, a conductive material. The conductive material is, for example, a metal material such as an aluminum alloy, or a light-transmitting oxide conductive material such as ITO (Indium Tin Oxide). Each of the plurality of first electrodes 23 and second electrodes 22 is, for example, a plate-shaped electrode. Also, each of the plurality of first electrodes 23 and second electrodes 22 is, for example, an electrode in which a plurality of linear conductive materials are arranged in a mesh shape.

[0015] In the first electrode group 21, the multiple first electrodes 23 are arranged in a row in the first direction D1. It is preferable that the multiple first electrodes 23 are arranged at equal intervals in the first direction D1. This makes it difficult for the capacitance sensor 1 to cause changes in the detection distance and detection accuracy of the detection object in the first direction D1.

[0016] Moreover, the multiple first electrodes 23 have the same area. Here, "the multiple first electrodes 23 have the same area" does not necessarily mean that all the first electrodes 23 have exactly the same area, but also includes the case where the difference in area between two first electrodes 23 is 10% or less of the area of ​​one first electrode 23. This makes it difficult for a difference in the detection distance of the detection object to occur between the multiple first electrodes 23.

[0017] The ground section 30 is a ground electrode that absorbs electric fields inside and outside the capacitance sensor 1, reduces noise, and adjusts the sensor sensitivity. The ground section 30 is connected to the ground potential of an external device to which the capacitance sensor 1 is connected, for example, via a wiring section 60 and a contact section 50. That is, the potential of the ground section 30 is equal to the ground potential. The ground section 30 includes a first ground section 31 and a second ground section 32 that extend in a first direction D1, and a third ground section 33 that extends in a second direction D2.

[0018] The shield section 40 is a shield electrode that absorbs electric fields inside and outside the capacitance sensor 1, reduces noise, and adjusts the sensor sensitivity. The shield section 40 is connected to an external device to which the capacitance sensor 1 is connected, for example, via the wiring section 60 and the contact section 50. Unlike the ground section 30, the shield section 40 is not connected to a reference potential. In other words, the potential of the shield section 40 is independent of the ground potential. Here, "the potential of the shield section 40 is independent of the ground potential" means that the potential difference between the shield section 40 and the ground potential can be freely changed. The shield section 40 extends in a first direction D1. The shield section 40 is capacitively coupled to the first electrode 23 and the second electrode 22. As a result, the electric field emitted from the first electrode 23 and the second electrode 22 that is absorbed by the ground section 30 is suppressed. As a result, the electric field generated from the first electrode 23 and the second electrode 22 can be emitted over a wide range, and the detection range using the first electrode 23 and the second electrode 22 becomes wider.

[0019] The contact unit 50 is a connector for electrically connecting an external device connected to the capacitance sensor 1 with the detection unit 20, the ground unit 30, and the shield unit 40. The external device applies a voltage to the capacitance sensor 1. For example, the external device applies a voltage to the capacitance sensor 1 so that a potential difference between a reference ground electrode and each of the multiple first electrodes 23 is a first voltage, and a potential difference between the ground electrode and the second electrode 22 is a second voltage. When a detection object approaches the capacitance sensor 1, the capacitance between each of the multiple first electrodes 23 and the second electrode 22 and the ground electrode changes. For example, the external device calculates the capacitance between each of the multiple first electrodes 23 and the second electrode 22 and the ground unit 30 based on a current flowing from the external device to the capacitance sensor 1, and detects the approach of the detection object based on the change in capacitance.

[0020] The contact portion 50 is formed on the first surface 11 of the substrate 10. The contact portion 50 includes a plurality of contact terminals 51 (seven in FIG. 1). The plurality of contact terminals 51 include two or more (four in FIG. 1) contact terminals 51 in one-to-one correspondence with each of the plurality of first electrodes 23 and the second electrode 22. The plurality of contact terminals 51 also include a contact terminal 51 corresponding to the shield portion 40 and one or more (two in FIG. 1) contact terminals 51 corresponding to the ground portion 30.

[0021] The wiring section 60 is a wiring section for electrically connecting each of the multiple contact terminals 51 of the contact section 50 to electrodes, etc. corresponding to each of the multiple contact terminals 51 of the detection section 20, the ground section 30, and the shield section 40.

[0022] Each of the electrodes included in the detection unit 20, the ground unit 30, the shield unit 40, and the wiring unit 60 are formed by patterning a single metal layer made of, for example, an aluminum alloy.

[0023] (2) Size of the first electrode and the second electrode 2A is a graph showing the relationship between the distance between an electrode and an object to be detected and the capacitance of the electrode for a 3 cm square electrode. More specifically, the capacitance when the object to be detected is metal is shown as data 211, and the capacitance when the object to be detected is plastic is shown as data 212. Note that in FIG. 2A, the capacitance is shown as a relative value, not an absolute value.

[0024] FIG. 2B is a graph showing the relationship between the distance between the electrode and the object to be detected and the capacitance of the electrode for a 1 cm square electrode. More specifically, the capacitance when the object to be detected is metal is shown as data 221, and the capacitance when the object to be detected is plastic is shown as data 222. Note that in FIG. 2B, the capacitance is shown as a relative value, not an absolute value. Note that the standard for the relative value of the capacitance in FIG. 2A is different from the standard for the relative value of the capacitance in FIG. 2B.

[0025] As shown in FIG. 2A and FIG. 2B, regardless of the size of the electrode, the greater the distance between the electrode and the object to be detected, the smaller the rate of change in the capacitance of the electrode relative to the change in the distance between the electrode and the object to be detected. Here, as shown in FIG. 2A, in a 3 cm square electrode, when the object to be detected is metal, the capacitance of the electrode changes by more than four times when the distance between the object to be detected and the electrode changes from 40 mm to 20 mm. In contrast, as shown in FIG. 2B, in a 1 cm square electrode, when the object to be detected is metal, even if the distance between the object to be detected and the electrode changes from 4 mm to 2 mm, the capacitance of the electrode similarly changes by about two times. That is, the larger the size of the electrode, the easier it is for the capacitance of the electrode to change relative to the change in the distance between the object to be detected and the electrode. That is, the larger the area of ​​the electrode of the capacitance sensor, the longer the detection distance of the object to be detected.

[0026] On the other hand, as shown in FIG. 2A and FIG. 2B, the larger the area of ​​the electrode, the more the degree of change in capacitance due to the difference in the detection object is different. More specifically, if the distance between the detection object and the electrode is the same, the capacitance of the electrode changes more when the detection object is a conductor than when the detection object is an insulator. For example, as shown in FIG. 2A, the longest distance between the detection object and the electrode when the capacitance of the electrode is equal to or greater than the threshold Th1 is 20 mm for a plastic detection object with a 3 cm square electrode, whereas it is 45 mm for a metal detection object. That is, for example, with a 3 cm square electrode, the difference in detection distance may be 2 cm or more depending on whether the detection object is metal or plastic. In contrast, the longest distance between the detection object and the electrode when the capacitance of the electrode is equal to or greater than the threshold Th2 is 2 mm for a plastic detection object with a 1 cm square electrode, whereas it is 4 mm for a metal detection object, as shown in FIG. 2B. For example, with a 1 cm square electrode, the difference in detection distance depending on whether the object to be detected is metal or plastic is 2 mm. Therefore, the smaller the area of ​​the capacitance electrode, the smaller the difference in detection distance depending on the material of the object to be detected.

[0027] In the capacitance sensor 1 according to the first embodiment, the area of ​​each of the first electrodes 23 is, for example, 90 mm 2 More than 110mm 2 As a result, the detection distance of each of the multiple first electrodes 23 is unlikely to change regardless of the material of the detection object. Therefore, in the capacitance sensor 1 according to the first embodiment, the detection distance of each of the multiple first electrodes 23 is unlikely to differ regardless of the material of the detection object.

[0028] The area of ​​the second electrode 22 is preferably equal to or larger than the sum of the areas of the multiple first electrodes 23 included in the first electrode group 21. More specifically, in the capacitance sensor 1 according to the first embodiment, the area of ​​the second electrode 22 is equal to or larger than three times the area of ​​the first electrode 23. As a result, the second electrode 22 has a longer detection distance for a detection object than each of the multiple first electrodes 23. Therefore, in the capacitance sensor 1 according to the first embodiment, the second electrode 22 can detect a detection object that is not in the detection range of any of the multiple first electrodes 23.

[0029] In addition, it is preferable that the width d2 of the second electrode 22 is larger than the width d1 of each of the multiple first electrodes 23 in the first direction D1.

[0030] (3) Layout of the detection unit, shield unit, and ground unit 1, the ground portion 30 includes a first ground portion 31 and a second ground portion 32 extending in a first direction D1, and a third ground portion 33 extending in a second direction D2. The third ground portion 33 is electrically connected to each of the first ground portion 31 and the second ground portion 32. In other words, the third ground portion 33 connects the first ground portion 31 and the second ground portion 32.

[0031] The first ground section 31 is disposed at one end (first end) of the substrate 10 in the second direction D2. The second ground section 32 is disposed at the other end (second end) of the substrate 10 in the second direction D2. That is, the first ground section 31 and the second ground section 32 are arranged in the second direction D2, and the detection section 20 and the shield section 40 are located between the first ground section 31 and the second ground section 32. More specifically, in the detection section 20, the first electrode group 21 is located on the second ground section 32 side, and the second electrode 22 is located on the first ground section 31 side. In other words, the first electrode group 21 is disposed between the second ground section 32 and the second electrode 22. Also, the second electrode 22 is disposed between the first electrode group 21 and the shield section 40. This makes it possible to optimize the detection sensitivity and reduce the possibility of erroneous detection due to noise. Specifically, the first electrode group 21 is disposed along the second ground section 32 for short-distance detection as a noise countermeasure. Second electrode 22 is disposed along shield portion 40 so that the electric field is not easily absorbed.

[0032] Moreover, the third ground portion 33 is disposed at one end (first end) of the substrate 10 in the first direction D1. As a result, the area surrounded by the ground on the outer periphery of the substrate 10 becomes larger, and the capacitance sensor 1 becomes less susceptible to external noise. Also, the influence of the electric field propagating along the first direction D1 on the detection of the detection object by the detection unit 20 can be reduced. The possibility of erroneous detection of the detection object located in the first direction D1 by each of the multiple first electrodes 23 and second electrodes 22 as viewed from the detection unit 20 can be reduced.

[0033] In addition, the third ground section 33 electrically connects the first ground section 31 and the second ground section 32. This makes it difficult for a potential difference to occur between the first ground section 31, the second ground section 32, and the third ground section 33, so that it is possible to reduce the generation of an electric field inside the area surrounded by the ground section 30, which is caused by a local potential difference of the ground section 30.

[0034] The first electrode group 21 of the detection unit 20 is adjacent to the second ground portion 32 in the second direction D2. Here, "the first electrode group 21 is adjacent to the second ground portion 32 in the second direction D2" means that there is no conductor other than the wiring portion 60 between the first electrode group 21 and the second ground portion 32. As a result, the electric field formed by the multiple first electrodes 23 included in the first electrode group 21 is absorbed by the ground portion 30 and does not spread over a wide area. Here, "the electric field formed by the first electrode 23 is absorbed by the ground portion 30" means that the electric field formed from the first electrode 23 in the third direction D3 is weaker than when the ground portion 30 is not present. Therefore, the first electrode 23 has a short detection distance to the detection object, but it is possible to improve detection of the detection object approaching the first electrode 23 from the third direction D3. Therefore, while each of the multiple first electrodes 23 has a short detection distance for the detection object, differences in detection distance and detection accuracy depending on the material of the detection object are unlikely to occur.

[0035] Moreover, the second electrode 22 of the detection unit 20 is disposed between the first electrode group 21 and the first ground portion 31. Here, the shield portion 40 is disposed between the second electrode 22 and the first ground portion 31. That is, the second electrode 22 is adjacent to the shield portion 40 in the second direction D2.

[0036] The shield section 40 absorbs the electric field formed by the second electrode 22, but the degree of absorption is smaller than when the second electrode 22 and the first ground section 31 are adjacent to each other. That is, the electric field formed from the second electrode 22 in the third direction D3 is weaker than when the shield section 40 and the ground section 30 are not present, but is stronger than when the shield section 40 is not present and the ground section 30 is present. Therefore, in the capacitance sensor 1 according to the first embodiment, the range of the electric field formed by the second electrode 22 is wider than when the second electrode 22 and the first ground section 31 are adjacent to each other. Therefore, the detection distance of the second electrode 22 with respect to the detection target is long.

[0037] 2.Effects The capacitance sensor 1 according to the first embodiment includes a substrate 10, a detection unit 20, a shield unit 40, and a ground unit 30. The substrate 10 has a first surface 11 and a second surface 12 that face each other. The detection unit 20 is disposed on the first surface 11 of the substrate 10. The shield unit 40 is disposed on the first surface 11 of the substrate 10 and extends in a first direction D1. The ground unit 30 is disposed on the first surface 11 of the substrate 10 and includes a first ground unit 31. The first ground unit 31 extends in the first direction D1. The detection unit 20 includes a first electrode group 21 and a second electrode 22. The first electrode group 21 includes a plurality of first electrodes 23. The plurality of first electrodes 23 are arranged in a row in the first direction D1. The second electrode 22 is adjacent to the first electrode group 21 in the second direction D2. The second direction D2 is perpendicular to the first direction D1 and the normal direction D3 of the substrate 10. In the second direction D2, the second electrode 22 is disposed between the first electrode group 21 of the detection unit 20 and the first ground part 31. In the second direction, the shield part 40 is disposed between the first ground part 31 and the second electrode 22 of the detection unit 20. As a result, the electric field formed by the second electrode 22 is likely to spread in the third direction D3, so that the detection distance of the second electrode 22 with respect to the detection object is long. Therefore, in the capacitance sensor 1, even when the detection object is located outside the detection range of the first electrode 23, it is possible to improve the detection accuracy of the detection object by using the second electrode 22.

[0038] In the capacitance sensor 1 according to the first embodiment, the ground section 30 further includes a second ground section 32. The second ground section 32 extends in the first direction D1. In the second direction D2, the first electrode group 21 is disposed between the second ground section 32 and the second electrode 22. In the second direction D2, the second ground section 32 and the first electrode group 21 are adjacent to each other. As a result, the electric field formed by each of the first electrodes 23 is unlikely to spread in the third direction D3, so that the detection distance of the first electrode 23 to the detection object is short, while differences depending on the material of the detection object are unlikely to occur. Therefore, in the capacitance sensor 1, when the detection object and the capacitance sensor 1 are close to each other, it is possible to improve the detection accuracy of the detection object regardless of the material of the detection object.

[0039] Moreover, in the capacitance sensor 1 according to the first embodiment, the multiple first electrodes 23 each have the same area. This makes it difficult for differences in the detection distance and detection accuracy of the detection object to occur between the multiple first electrodes 23. Therefore, in the capacitance sensor 1, local differences in the detection distance and detection accuracy of the detection object are unlikely to occur.

[0040] In the capacitance sensor 1 according to the first embodiment, the area of ​​each of the first electrodes 23 is 90 mm 2 More than 110mm 2 As a result, in the capacitance sensor 1, while the detection distance of each of the plurality of first electrodes 23 to the detection object is short, differences in the detection distances of each of the plurality of first electrodes 23 are unlikely to occur regardless of the material of the detection object. Therefore, in the capacitance sensor 1, when the detection object and the capacitance sensor 1 are close to each other, it is possible to further improve the detection accuracy of the detection object regardless of the material of the detection object.

[0041] In the capacitance sensor 1 according to the first embodiment, the ground section 30 further includes a third ground section 33. The third ground section 33 connects the first ground section 31 and the second ground section 32. Therefore, the area surrounded by the ground on the outer periphery of the substrate 10 becomes larger, and the capacitance sensor 1 becomes less susceptible to external noise. As a result, a potential difference is less likely to occur among the first ground section 31, the second ground section 32, and the third ground section 33 in the ground section 30. Therefore, in the capacitance sensor 1, it is possible to reduce the generation of an electric field caused by a local potential difference in the ground section 30 inside the area surrounded by the ground section 30.

[0042] (Embodiment 2) 1. Configuration As shown in Figs. 3 and 4, the capacitance sensor 1a according to the second embodiment includes a second substrate 13 different from the substrate (first substrate) 10 and a back electrode 71 in addition to the components of the capacitance sensor 1. Here, in Fig. 3, as in Fig. 1, the dot hatching indicates the surface, not the cross section, of the electrode on the first surface 11 of the first substrate 10. Also, in Fig. 4, the surface of the back electrode 71 on the first substrate 10 side and the fourth surface 15 of the second substrate 13 are depicted as being on the same plane, but the back electrode 71 may be located between the second surface 12 of the first substrate 10 and the third surface 14 of the second substrate 13, and the back electrode 71 may protrude in the third direction D3 from the third surface 14 of the second substrate 13, which is a plane. Similarly, the second electrode 22 may protrude in the third direction D3 from the first surface 11 of the first substrate 10, which is a plane.

[0043] The second substrate 13 is, for example, a rectangular substrate made of an insulating material. The material of the substrate 10 is, for example, a resin such as PET. As shown in FIG. 4, the second substrate 13 has a third surface 14 and a fourth surface 15 that face each other in the first direction D1. The second substrate 13 is attached to the first substrate 10 with the third surface 14 of the second substrate 13 and the second surface 12 of the first substrate 10 in contact with each other.

[0044] The back electrode 71 is, for example, a metal layer, and is formed on the third surface 14 of the second substrate 13. That is, the back electrode 71 is disposed on the second surface 12 of the first substrate 10. The back electrode 71 is connected to an external device to which the capacitance sensor 1 is connected via the wiring portion 60 and the contact portion 50. The back electrode 71 is not connected to a reference potential, similar to the shield portion 40. That is, the potential of the back electrode 71 is independent of the potential of the ground portion 30. The back electrode 71 is, for example, rectangular in shape.

[0045] The contact terminal 51 of the contact section 50 connected to the rear electrode 71 and the portion of the wiring section 60 connecting the rear electrode 71 and the contact terminal 51 connected to the rear electrode 71 are formed on the third surface 14 of the second substrate 13. The first substrate 10 is provided with a recess 101. In a plan view from the third direction D3, the recess 101 of the first substrate 10 and the contact terminal 51 connected to the rear electrode 71 overlap with each other. Therefore, the contact terminal 51 connected to the rear electrode 71 is exposed on a surface continuous with the first surface 11 of the first substrate 10, similar to the other contact terminals 51.

[0046] 3 and 4, in the capacitance sensor 1a, an outer edge 711 of the back electrode 71 is located outside the ground section 30 in plan view from the third direction D3. In other words, in the capacitance sensor 1a, the outer edge 711 of the back electrode 71 is located outside each of the detection section 20, the shield section 40, and the ground section 30 in plan view from the third direction D3.

[0047] As a result, in the capacitance sensor 1a, an external electric field is less likely to penetrate the detection unit 20 in the third direction D3, and each of the multiple first electrodes 23 and second electrodes 22 is less likely to be affected by an object located on the second substrate 13 side as viewed from the detection unit 20. Therefore, in the capacitance sensor 1a, erroneous detection due to static electricity or an external electric field is less likely to occur in the detection unit 20.

[0048] Alternatively, in a plan view from the third direction, the tip of the ground section 30 may be located outside the outer edge 711 of the back electrode 71. Or, the outer edge of the ground section 30 may be located at the outer edge 711 of the back electrode 71. Even with this configuration, the influence of an object located on the second substrate 13 side as viewed from the detection section 20 on the detection section 20 is reduced by the ground section 30 or the back electrode 71. Therefore, in the capacitance sensor 1a, erroneous detection due to static electricity or an external electric field is less likely to occur in the detection section 20.

[0049] 2.Effects The capacitance sensor 1a according to the second embodiment further includes a back electrode 71. The back electrode 71 is disposed on the second surface 12 of the first substrate 10. The potential of the back electrode 71 is independent of the potential of the ground section 30. This makes it difficult for an external electric field to penetrate from the second substrate 13 to the detection section 20 side in the capacitance sensor 1a. Also, in the capacitance sensor 1a, each of the multiple first electrodes 23 and second electrodes 22 is unlikely to be affected by an object located on the second substrate 13 side as viewed from the detection section 20.

[0050] Furthermore, in the capacitance sensor 1a according to the second embodiment, the ground section 30 has a portion disposed outside the outer edge 711 of the back electrode 71 in a plan view in the third direction D3. This makes it difficult for an external electric field to penetrate from the second substrate 13 to the detection section 20 in the capacitance sensor 1a. This makes it even less likely that each of the multiple first electrodes 23 and second electrodes 22 in the capacitance sensor 1a will be affected by an object located on the second substrate 13 side as viewed from the detection section 20.

[0051] (Embodiment 3) 1. Configuration As shown in Figs. 5 and 6, the capacitance sensor 1b according to the third embodiment includes a third substrate 16 different from the first substrate 10 and a front electrode 72 in addition to the components of the capacitance sensor 1. In Fig. 5, the front electrode 72 is seen through and only the outer edge is shown by a dashed line. Here, in Fig. 5, similar to Fig. 1, the dot hatching shows the surface of the electrode on the first surface 11 of the first substrate 10, not the cross section. Also, each of the first electrode 23, the second electrode 22, the ground section 30, and the shield section 40 may be located between the first surface 11 of the first substrate 10 and the sixth surface 18 of the third substrate 16, and may protrude from the first surface 11 of the first substrate 10 in the third direction D3, unlike Fig. 6. Similarly, the front electrode 72 may protrude from the fifth surface 17 of the third substrate 16, which is a plane, in the third direction D3.

[0052] The third substrate 16 is, for example, a rectangular substrate made of an insulating material. The material of the substrate 10 is, for example, a resin such as PET. As shown in FIG. 6, the third substrate 16 has a fifth surface 17 and a sixth surface 18 that face each other in the third direction D3. The third substrate 16 is attached to the first substrate 10 in a state in which the sixth surface 18 of the third substrate 16 and the first surface 11 of the first substrate 10 are in contact with each other. The third substrate 16 is provided with a recess 161. In a plan view from the third direction D3, a plurality of contact terminals 51 of the contact portion 50 on the first substrate 10 overlap with the recess 161 of the third substrate 16. Therefore, the plurality of contact terminals 51 are exposed on a surface that is continuous with the fifth surface 17 of the third substrate 16. The contact terminal 51 connected to the front electrode 72 described later is provided so as to be adjacent to the recess 161 on the fifth surface 17 of the third substrate 16.

[0053] The front electrode 72 is, for example, a metal layer, and is formed on the fifth surface 17 of the third substrate 16. That is, the front electrode 72 is disposed on the first surface 11 of the first substrate 10. The front electrode 72 is connected to an external device to which the capacitance sensor 1 is connected via the wiring portion 60 and the contact portion 50. The front electrode 72 is a shield electrode floating above the ground potential. That is, the potential of the front electrode 72 is independent of the potential of the ground portion 30.

[0054] As shown in FIG. 5, the front electrode 72 has one or more openings 73 (four in FIG. 5). In plan view from the third direction D3, the openings 73 of the front electrode 72 do not overlap with the detection unit 20. More specifically, in plan view from the third direction D3, each of the multiple first electrodes 23 and second electrodes 22 is located inside the openings 73 of the front electrode 72 and has no overlapping portion with the front electrode 72. This makes it difficult for an external electric field to penetrate the capacitance sensor 1b along the third direction D3, and each of the multiple first electrodes 23 and second electrodes 22 is difficult to be affected by an object located in the first direction D1 or the second direction D2 as viewed from the detection unit 20. Therefore, it is possible to limit the detection area of ​​the capacitance sensor 1b to the third direction D3 as viewed from the detection unit 20.

[0055] 5 and 6, in the capacitance sensor 1b, the ground section 30 has a portion located outside the outer edge 721 of the front electrode 72 in plan view from the third direction D3. That is, in the capacitance sensor 1b, the ground section 30 is located on the outermost periphery in plan view from the third direction D3. Therefore, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground section 30, and the possibility that the static electricity will affect the multiple first electrodes 23 or second electrodes 22 can be reduced.

[0056] 2.Effects The capacitance sensor 1b according to the third embodiment further includes a front electrode 72. The front electrode 72 is disposed on the first surface 11 of the substrate 10 and has an opening 73. The potential of the front electrode 72 is independent of the potential of the ground section 30. In a plan view from the thickness direction D3 of the substrate 10, the detection section 20 is located inside the opening 73 of the front electrode 72. This makes it difficult for an external electric field to penetrate the capacitance sensor 1b along the third direction D3, and each of the multiple first electrodes 23 and second electrodes 22 is unlikely to be affected by an object located in the first direction D1 or the second direction D2 as viewed from the detection section 20. Therefore, it is possible to limit the detection area of ​​the capacitance sensor 1b to the third direction D3 as viewed from the detection section 20. In addition, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground section 30, and the possibility that the static electricity will affect the multiple first electrodes 23 or the second electrodes 22 can be reduced.

[0057] Furthermore, in the capacitance sensor 1b according to the third embodiment, in a plan view from the thickness direction D3 of the substrate 10, the ground section 30 has a portion located outside the outer edge 721 of the front electrode 72. This makes it even more difficult for an external electric field to penetrate the capacitance sensor 1b along the third direction D3, and also makes each of the multiple first electrodes 23 and second electrodes 22 even less susceptible to the influence of an object located in the first direction D1 or the second direction D2 as viewed from the detection section 20. Furthermore, when the object to be detected is charged with static electricity, it is possible to further reduce the possibility that the multiple first electrodes 23 or second electrodes 22 will be affected by the static electricity.

[0058] (Modification) 1. Configuration In a capacitance sensor 1b according to a modification of the third embodiment, the front electrode 72 is a ground electrode.

[0059] The front electrode 72 is connected to the ground potential, for example, similarly to the ground section 30. That is, the potential of the front electrode 72 is the same as the potential of the ground section 30.

[0060] In the capacitance sensor 1b according to the modification of the third embodiment, as shown in FIG. 5, the outer edge of the ground section 30 is located outside the detection section 20 and the shield section 40 in a plan view from the third direction D3. In addition, in the capacitance sensor 1b according to the modification of the third embodiment, the outer edge 721 of the front electrode 72 is located outside the detection section 20 and the shield section 40 in a plan view from the third direction D3. That is, in the capacitance sensor 1b, at least one of the ground section 30 and the outer edge 721 of the front electrode 72 is located outside the detection section 20 and the shield section 40 in a plan view from the third direction D3. Therefore, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground section 30 or the front electrode 72, and the possibility that the static electricity will affect the multiple first electrodes 23 or second electrodes 22 can be reduced.

[0061] 2.Effects The capacitance sensor 1b according to the modified example of the third embodiment further includes a front electrode 72. The front electrode 72 is disposed on the first surface 11 of the substrate 10 and has an opening 73. The potential of the front electrode 72 is the same as the potential of the ground section 30. In a plan view from the thickness direction D3 of the substrate 10, the detection section 20 is located inside the opening 73 of the front electrode 72. This makes it difficult for an external electric field to penetrate the capacitance sensor 1b along the third direction D3, and each of the multiple first electrodes 23 and second electrodes 22 is unlikely to be affected by an object located in the first direction D1 or the second direction D2 as viewed from the detection section 20. Therefore, it is possible to limit the detection area of ​​the capacitance sensor 1b to the third direction D3 as viewed from the detection section 20. In addition, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground section 30, and the possibility that the static electricity will affect the multiple first electrodes 23 or the second electrodes 22 can be reduced.

[0062] In the capacitance sensor 1b according to the modified example of the third embodiment, at least one of the outer edge of the ground part 30 and the outer edge 721 of the front electrode 72 is located outside the detection part 20 and the shield part 40 in a plan view from the thickness direction D3 of the substrate 10. This makes it difficult for an external electric field to penetrate the capacitance sensor 1b along the third direction D3, and each of the first electrodes 23 and the second electrodes 22 is further unlikely to be affected by an object located in the first direction D1 or the second direction D2 as viewed from the detection part 20. Therefore, it is possible to limit the detection area of ​​the capacitance sensor 1b to the third direction D3 as viewed from the detection part 20. In addition, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground part 30, and the possibility that the static electricity will affect the first electrodes 23 or the second electrodes 22 can be further reduced.

[0063] (Embodiment 4) As shown in Figs. 7 and 8, the capacitance sensor 1c according to the fourth embodiment includes a second substrate 13 and a back electrode 71 in addition to the components of the capacitance sensor 1b according to the third embodiment. In Fig. 7, the front electrode 72 is seen through as in Fig. 5, and only the outer edge is shown by a dashed line. In Fig. 7, the dotted hatching shows the surface, not the cross section, of the electrode on the first surface 11 of the first substrate 10 as in Fig. 1. In addition, the relationship between the first surface 11 of the first substrate 10 and the first electrode 23, the second electrode 22, the ground section 30, and the shield section 40 in the third direction D3 does not have to be as shown in Fig. 8, and the first electrode 23 and the like may protrude in the third direction D3 from the first surface 11 of the first substrate 10, which is a flat surface. The same applies to the relationship between the third surface 14 of the second substrate 13 and the back electrode 71 in the third direction D3, and the relationship between the fifth surface 17 of the third substrate 16 and the front electrode 72 in the third direction D3.

[0064] The front electrode 72 is a shield electrode that is floating above the ground potential. That is, the potential of the front electrode 72 is independent of the potential of the ground section 30.

[0065] 7 and 8, in the capacitance sensor 1c, in plan view from the third direction D3, the ground section 30 has a portion located outside the outer edge 721 of the front electrode 72. In other words, in the capacitance sensor 1c, in plan view from the third direction D3, the ground section 30 is located outside each of the detection section 20, the shield section 40, and the front electrode 72.

[0066] In the capacitance sensor 1c, the detection unit 20 and the back electrode 71 are adjacent to each other in the third direction D3. Therefore, an external electric field is unlikely to penetrate from the second substrate 13 to the detection unit 20, and each of the multiple first electrodes 23 and second electrodes 22 is unlikely to be affected by an object located on the second substrate 13 side as viewed from the detection unit 20. Therefore, in the capacitance sensor 1c, false detection caused by static electricity or an external electric field is unlikely to occur in the detection unit 20.

[0067] In addition, in the capacitance sensor 1c, an external electric field is less likely to penetrate the capacitance sensor 1b along the third direction D3, and each of the multiple first electrodes 23 and second electrodes 22 is less likely to be affected by an object located in the first direction D1 or the second direction D2 as viewed from the detection unit 20. Therefore, it is possible to limit the detection area of ​​the capacitance sensor 1b to the third direction D3 as viewed from the detection unit 20.

[0068] In addition, in the capacitance sensor 1c, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground portion 30, thereby reducing the possibility of the static electricity affecting the multiple first electrodes 23 or second electrodes 22.

[0069] Therefore, the capacitance sensor 1c according to the fourth embodiment has the same effects as the capacitance sensor 1a according to the second embodiment and the capacitance sensor 1b according to the third embodiment.

[0070] (Modification) In a capacitance sensor 1c according to a modification of the fourth embodiment, the front electrode 72 is a ground electrode.

[0071] The front electrode 72 is connected to the ground potential, for example, similar to the ground section 30 .

[0072] 8, in the capacitance sensor 1b according to the modification of the fourth embodiment, the detection unit 20 and the shield unit 40 are located inside the outer edge of the ground unit 30 and the outer edge 721 of the front electrode 72 in plan view from the third direction D3. That is, in the capacitance sensor 1c, at least one of the ground unit 30 and the outer edge 721 of the front electrode 72 is located outside the detection unit 20 and the shield unit 40 in plan view from the third direction D3. Therefore, when the object to be detected is charged with static electricity, the static electricity is easily absorbed by the ground unit 30 or the front electrode 72, and the possibility that the static electricity will affect the multiple first electrodes 23 or second electrodes 22 can be reduced.

[0073] Therefore, the capacitance sensor 1c according to the modification of the fourth embodiment has the same effects as the capacitance sensor 1a according to the second embodiment and the capacitance sensor 1b according to the modification of the third embodiment.

[0074] (Embodiment 5) 1. Configuration In the capacitance sensor 1 d according to the fifth embodiment, the detection unit 20 includes a plurality of second electrodes 22 .

[0075] As shown in Fig. 9, the detection unit 20 includes a first electrode group 21 and a plurality of second electrodes 22. Note that the contact portion 50 and the wiring portion 60 are omitted from Fig. 9. Also, in Fig. 9, similar to Fig. 1 etc., the dot hatching indicates the surface, not the cross section, of the electrodes on the first surface 11 of the substrate 10.

[0076] The first electrode group 21 includes a plurality of (nine in FIG. 9) first electrodes 23. In the first electrode group 21, the plurality of first electrodes 23 are arranged in a row in the first direction D1.

[0077] A plurality of (three in FIG. 9) second electrodes 22 are arranged in a row in the first direction D1. The plurality of second electrodes 22 have the same area.

[0078] Here, "the multiple second electrodes 22 have the same area" does not necessarily mean that all the second electrodes 22 have exactly the same area, but also includes the case where the difference in area between two second electrodes 22 is 10% or less of the area of ​​one second electrode 22. This makes it difficult for a difference in detection distance to occur between the multiple second electrodes 22.

[0079] Moreover, the second electrodes 22 are preferably arranged at equal intervals in the first direction D1, so that in the capacitance sensor 1, the detection distance and detection accuracy of the object to be detected are less likely to change in the first direction D1.

[0080] The sum of the areas of the second electrodes 22 is equal to or greater than the sum of the areas of the multiple first electrodes 23 included in the first electrode group 21. As a result, the first electrodes 23 have a shorter detection distance than the second electrodes 22, while the detection distance for the detection object is less dependent on the material of the detection object. On the other hand, the second electrodes 22 have a longer detection distance than the first electrodes 23, and are therefore able to detect a detection object located farther away from the substrate 10.

[0081] The capacitance sensor 1d according to the fifth embodiment has a shield section 41 located between the second electrodes 22 and the ground section 30 in the first direction D1. The shield section 41 is electrically connected in the second direction D2 to the shield section 40 located between the second electrodes 22 and the ground section 30 in the first direction D1. This makes it possible to reduce the absorption of the electric field from each of the second electrodes 22 by the ground section 30, particularly the third ground section 33.

[0082] With the above configuration, in the capacitance sensor 1d, similar to the capacitance sensor 1 according to embodiment 1, the first electrode 23 is unlikely to cause a difference depending on the material of the object to be detected in terms of the detection distance and detection accuracy. Also, in the capacitance sensor 1d, similar to the capacitance sensor 1 according to embodiment 1, it is possible to increase the detection distance of the second electrode 22 with respect to the object to be detected. Also, by having a plurality of first electrodes 23 and a plurality of second electrodes 22, it is possible to expand the detection range of the object to be detected.

[0083] 2.Effects In the capacitance sensor 1d according to the fifth embodiment, the detection unit 20 includes a plurality of second electrodes 22. The plurality of second electrodes 22 are arranged in a row in the first direction D1. This makes it possible to expand the detection range of the object to be detected.

[0084] In the capacitance sensor 1d according to the fifth embodiment, the second electrodes each have the same area. This makes it difficult for differences in the detection distance and detection accuracy of the object to occur between the second electrodes 22. Therefore, in the capacitance sensor 1d, local differences in the detection distance and detection accuracy of the object to be detected are unlikely to occur.

[0085] In the capacitance sensor 1d according to the fifth embodiment, the sum of the areas of the second electrodes 22 is equal to or greater than the sum of the areas of the first electrodes 23. As a result, the first electrode 23 has a shorter detection distance than the second electrode 22, but the detection distance of the first electrode 23 to the object is less dependent on the material of the object. On the other hand, the second electrode 22 has a longer detection distance than the first electrode 23, and is therefore able to detect an object located farther away from the substrate 10.

[0086] (Embodiment 6) 1. Configuration The capacitance sensor 1e according to the sixth embodiment includes a plurality of detection sections 20 and a plurality of shield sections 40.

[0087] As shown in Fig. 10, the capacitance sensor 1e includes a plurality of (two in Fig. 10) detection units 20 and a plurality of (two in Fig. 10) shield units 40. The ground unit 30 includes one or more (one in Fig. 10) fourth ground units 34. Note that the contact units 50 and the wiring unit 60 are not shown in Fig. 10. Also, in Fig. 10, similar to Fig. 1 and the like, the dot hatching indicates the surfaces, not the cross sections, of the electrodes on the first surface 11 of the substrate 10.

[0088] The multiple detection units 20 are arranged in the second direction D2.

[0089] The fourth ground portion 34 is located between the detection portion 20a and the detection portion 20b in the two detection portions 20 arranged in the second direction D2. More specifically, the fourth ground portion 34 is located between the multiple first electrodes 23 of the detection portion 20a and the multiple first electrodes 23 of the detection portion 20b arranged in the second direction D2. The fourth ground portion 34 corresponds to a part of the ground portion. The width of the fourth ground portion 34 in the second direction D2 may be wider than the width of each of the first ground portion 31 and the second ground portion 32 in the second direction D2. Of the two detection portions 20, the detection portion 20a located between the first ground portion 31 and the fourth ground portion 34 corresponds to the first detection portion. Also, of the two detection portions 20, the detection portion 20b located between the second ground portion 32 and the fourth ground portion 34 corresponds to the second detection portion.

[0090] Each of the multiple shield parts 40 is disposed between each of the multiple second electrodes 22 and the second ground part 32 or the first ground part 31. Of the two shield parts 40, the shield part 40a disposed between the second electrode 22 of the detection part 20a and the first ground part 31 corresponds to the first shield part. Moreover, the shield part 40b disposed between the second electrode 22 of the detection part 20b and the second ground part 32 corresponds to the second shield part.

[0091] Furthermore, the second electrodes 22 of the multiple detection units 20 have the same area. That is, the second electrodes 22 of the detection units 20a and the second electrodes 22 of the detection units 20b have the same area. Note that the term "same area" as used here includes cases where the difference in area between two second electrodes 22 is 10% or less of the area of ​​one second electrode 22. This makes it difficult for differences in detection distance to occur between the multiple second electrodes 22.

[0092] Moreover, the sum of the areas of the second electrodes 22 is equal to or greater than the sum of the areas of the first electrodes 23 included in the first electrode group 21. More specifically, the sum of the areas of the second electrodes 22 of the detection unit 20a and the second electrodes 22 of the detection unit 20b is equal to or greater than the sum of the areas of the first electrodes 23 of the detection unit 20a and the first electrodes 23 of the detection unit 20b. As a result, the first electrodes 23 have a shorter detection distance than the second electrodes 22, while the detection distance of the detection object is less dependent on the material of the detection object. On the other hand, the second electrodes 22 have a longer detection distance than the first electrodes 23, and are therefore capable of detecting a detection object located farther away from the substrate 10.

[0093] Therefore, in the capacitance sensor 1e, each of the multiple first electrode groups 21 is adjacent to the first ground portion 31 or the second ground portion 32 in the second direction D2. Therefore, similar to the capacitance sensor 1 according to the first embodiment, the electric field formed by the multiple first electrodes 23 included in the first electrode group 21 is absorbed by the ground portion 30 and does not spread over a wide area. Therefore, while the first electrodes 23 have a short detection distance for the detection object, differences in the detection distance and detection accuracy depending on the material of the detection object are unlikely to occur.

[0094] Furthermore, in the capacitance sensor 1e, each of the second electrodes 22 is adjacent to one of the shield parts 40 in the second direction D2. Therefore, similar to the capacitance sensor 1 according to the first embodiment, the electric field formed by each of the second electrodes 22 is absorbed by one of the shield parts 40, but to a small extent. Therefore, the second electrode 22 has a long detection distance for the detection target.

[0095] Furthermore, the capacitance sensor 1e according to the sixth embodiment has a plurality of first electrodes 23 and a plurality of second electrodes 22, and therefore it is possible to expand the detection range of the object to be detected and improve the detection accuracy.

[0096] Furthermore, in the capacitance sensor 1e according to the sixth embodiment, the detection unit 20a and the shield unit 40a, and the detection unit 20b and the shield unit 40b are arranged symmetrically with respect to a virtual line passing through the fourth ground portion 34. This makes it easy to control the detection direction of the detection unit 20a and the detection unit 20b in the second direction D2.

[0097] 2.Effects The capacitance sensor 1e according to the sixth embodiment includes a detection unit 20b. The detection unit 20b is different from the detection unit 20a and includes a plurality of first electrodes 23. The first electrodes 23 of the detection unit 20b and the first electrodes 23 of the detection unit 20a are arranged in the second direction D2, and a fourth ground portion 34 is disposed therebetween. As a result, the capacitance sensor 1e has a plurality of first electrodes 23 separated by the fourth ground portion 34, and therefore it is possible to expand the detection range of the detection target and improve the detection accuracy.

[0098] Moreover, the capacitance sensor 1e according to the sixth embodiment includes a shield portion 40b. Unlike the shield portion 40a, the shield portion 40b extends in the first direction D1. The detection portion 20b further includes a second electrode 22. The shield portion 40b is disposed between the second electrode 22 of the detection portion 20b and the ground portion 30. As a result, the capacitance sensor 1e has a plurality of second electrodes 22 partitioned by the fourth ground portion 34, and therefore it is possible to expand the detection range of the detection target and improve the detection accuracy.

[0099] In the capacitance sensor 1e according to the sixth embodiment, the second electrode 22 of the detection unit 20a and the second electrode 22 of the detection unit 20b have the same area. This makes it difficult for differences in the detection distance and detection accuracy of the detection object to occur between the multiple second electrodes 22. Therefore, in the capacitance sensor 1e, local differences in the detection distance and detection accuracy of the detection object are unlikely to occur.

[0100] In the capacitance sensor 1e according to the sixth embodiment, the sum of the areas of the second electrodes 22 of the detection unit 20a and the second electrodes 22 of the detection unit 20b is equal to or greater than the sum of the areas of the first electrodes 23 of the detection unit 20a and the first electrodes 23 of the detection unit 20b. As a result, the first electrodes 23 have a shorter detection distance than the second electrodes 22, but the detection distance of the detection object is less dependent on the material of the detection object. On the other hand, the second electrodes 22 have a longer detection distance than the first electrodes 23, and can detect a detection object located farther away from the substrate 10.

[0101] (Variation 1) As shown in FIG. 13, the capacitance sensor 1f according to the first modification of the sixth embodiment includes a plurality of (two in FIG. 13) detection units 20 and a plurality of (two in FIG. 13) shield units 40. The ground unit 30 includes one or more (one in FIG. 13) fourth ground units 34. Note that the contact unit 50 and the wiring unit 60 are not shown in FIG. 13. Also, in FIG. 13, similar to FIG. 1 and the like, the dot hatching indicates the surface, not the cross section, of the electrodes on the first surface 11 of the substrate 10. The capacitance sensor 1f according to the first modification of the sixth embodiment is different from the capacitance sensor 1f according to the sixth embodiment (see FIG. 10) in the arrangement of the first electrode group 21 of the detection unit 20b, the second electrode 22 of the detection unit 20b, and the shield unit 40b.

[0102] 13, in the capacitance sensor 1f according to the first modification of the sixth embodiment, the second ground portion 32, the first electrode group 21 of the detection portion 20b, the second electrode 22 of the detection portion 20b, the shield portion 40b, and the fourth ground portion 34 are arranged in this order in the second direction D2. That is, in the capacitance sensor 1f according to the first modification of the sixth embodiment, the detection portion 20b and the shield portion 40b are arranged by shifting the detection portion 20a and the shield portion 40a in parallel in the second direction D2.

[0103] Therefore, like the capacitance sensor 1f according to the sixth embodiment, the capacitance sensor 1f according to the first modification of the sixth embodiment can expand the detection range of the detection target and improve the detection accuracy.

[0104] (Variation 2) As shown in FIG. 14, the capacitance sensor 1g according to the second modification of the sixth embodiment includes a plurality of (two in FIG. 14) detection units 20 and one or more (one in FIG. 14) shield units 40. The ground unit 30 includes one or more (one in FIG. 14) fourth ground units 34. Note that the contact unit 50 and the wiring unit 60 are not shown in FIG. 14. In addition, in FIG. 14, similar to FIG. 1 and the like, the dot hatching indicates the surface, not the cross section, of the electrodes on the first surface 11 of the substrate 10. The capacitance sensor 1g according to the second modification of the sixth embodiment is different from the capacitance sensor 1f according to the sixth embodiment (see FIG. 10) in that it does not include the shield unit 40b and the detection unit 20b includes the first electrode group 21. That is, the capacitance sensor 1g includes the detection unit 20 including the first electrode group 21 and the second electrode 22, and the detection unit 20 including the first electrode group 21. In other words, the number of second electrodes 22 is smaller than the number of detection units 20 in the capacitance sensor 1g.

[0105] In the capacitance sensor 1g according to the second modification of the sixth embodiment, the first electrode group 21 is located between the second ground portion 32 and the fourth ground portion 34. As a result, similar to the capacitance sensor 1 according to the first embodiment, the electric field formed by the multiple first electrodes 23 included in the first electrode group 21 is absorbed by the ground portion 30 and does not spread over a wide area. Therefore, while the first electrodes 23 have a short detection distance for a detection object, differences in the detection distance and detection accuracy depending on the material of the detection object are unlikely to occur.

[0106] Therefore, like the capacitance sensor 1 according to the first embodiment, the capacitance sensor 1f according to the second modification of the sixth embodiment can expand the detection range of the detection target and improve the detection accuracy.

[0107] (Variation 3) As shown in FIG. 15, the capacitance sensor 1h according to the third modification of the sixth embodiment includes a plurality of (two in FIG. 15) detection units 20 and one or more (one in FIG. 15) shield units 40. The ground unit 30 includes one or more (one in FIG. 15) fourth ground units 34. Note that the contact unit 50 and the wiring unit 60 are not shown in FIG. 15. In FIG. 15, similarly to FIG. 1 and the like, the dot hatching indicates the surface, not the cross section, of the electrodes on the first surface 11 of the substrate 10. The capacitance sensor 1h according to the third modification of the sixth embodiment does not include the shield unit 40b, and the arrangement of the detection units 20a and 20b, the ground unit 30, and the shield unit 40 is different from that of the capacitance sensor 1f according to the sixth embodiment (see FIG. 10). In the capacitance sensor 1h according to the third modification of the sixth embodiment, the first electrode group 21 and the second electrode 22 included in the detection unit 20a are arranged in the D2 direction. In the capacitance sensor 1h, the first electrode group 21 and the second electrode 22 included in the detection unit 20b are aligned in the D2 direction.

[0108] In the capacitance sensor 1h according to the third modification of the sixth embodiment, the first electrode group 21 of the detection unit 20a is located between the first ground portion 31 and the fourth ground portion 34. In the capacitance sensor 1h, the first electrode group 21 of the detection unit 20b is located between the second ground portion 32 and the fourth ground portion 34. As a result, similar to the capacitance sensor 1 according to the first embodiment, the electric field formed by the first electrodes 23 included in the first electrode group 21 is absorbed by the ground portion 30 and does not spread over a wide area. Therefore, while the first electrodes 23 have a short detection distance for the detection object, differences in the detection distance and detection accuracy depending on the material of the detection object are unlikely to occur.

[0109] In the capacitance sensor 1h, a shield section 40 is disposed between the first electrode group 21 and the second electrode 22 of the detection section 20a, and between the first electrode group 21 and the second electrode 22 of the detection section 20b. Therefore, the shield section divides the space between the second electrodes 22 and the ground section 30 in the first direction D1. As a result, the electric field formed by each of the second electrodes 22 is absorbed by the shield section 40, but to a small extent. Therefore, the second electrode 22 has a long detection distance with respect to the object to be detected. In the example shown in FIG. 15, one shield section 40 spans both the first electrode group 21 and the second electrode 22 of the detection section 20a and the first electrode group 21 and the second electrode 22 of the detection section 20b. However, for example, a first shield section 40 may be arranged between the first electrode group 21 and the second electrode 22 of the detection unit 20a, and a second shield section 40 may be arranged between the first electrode group 21 and the second electrode 22 of the detection unit 20b.

[0110] Therefore, like the capacitance sensor 1f according to the sixth embodiment, the capacitance sensor 1h according to the third modification of the sixth embodiment can expand the detection range of the object to be detected and improve the detection accuracy.

[0111] (Embodiment 7) 1. Configuration In the capacitance sensor 1f according to the seventh embodiment, the wiring portion 60 is formed on the second surface 12 of the substrate .

[0112] As shown in Fig. 11, the capacitance sensor 1f has a detection unit 20, a ground unit 30, a shield electrode 42, and a contact unit 50 arranged on a first surface 11 of a substrate 10. The substrate 10 is, for example, a printed wiring board. In addition, of the wiring unit 60, a portion that connects the shield electrode 42 to a contact terminal 51 of the contact unit 50 and a portion that connects the ground unit 30 to the contact terminal 51 of the contact unit 50 are formed on the first surface 11 of the substrate 10. Note that in Fig. 11, similar to Fig. 1 and the like, the dot hatching indicates the surface, not the cross section, of the electrodes on the first surface 11 of the substrate 10.

[0113] The shield electrode 42 includes a shield part 40 disposed between the second electrode 22 of the detection unit 20 and the first ground part 31 of the ground part 30 and extending in the first direction D1, and a third shield part 43 surrounding the second electrode 22 together with the shield part 40. This allows the shield part 40a to absorb the part of the electric field formed by the second electrode 22 that spreads in the first direction D1 or the second direction D2, thereby improving the detection accuracy of the capacitance sensor 1f. Even if a detection object is present on the wiring part 60, the change in capacitance of the capacitance of the wiring part 60 is small, making it possible to suppress erroneous detection and improve the detection accuracy.

[0114] 12, in the capacitance sensor 1f, the remaining portion of the wiring portion 60 is disposed on the second surface 12 of the substrate 10. The substrate 10 is provided with via electrodes 61 for electrically connecting each of the multiple first electrodes 23 and second electrodes 22 of the detection unit 20 to the wiring portion 60. The substrate 10 is also provided with through holes and via electrodes for electrically connecting each of the multiple contact terminals 51 of the contact portion 50 to the wiring portion 60.

[0115] In the capacitance sensor 1f, since the wiring portion 60 is disposed on the second surface 12 of the substrate 10, it is possible to dispose the wiring portion 60 at a position overlapping the shield portion 40a in a plan view from the third direction D3. Therefore, the capacitance sensor 1f has a high degree of freedom in disposing the wiring portion 60. In addition, by disposing the wiring portion 60 at a position overlapping the shield portion 40a or the ground portion 30 in a plan view from the third direction D3, the wiring portion 60 is less susceptible to the influence of an external electric field, and the wiring portion 60 is less likely to affect the detection portion 20. Therefore, in the capacitance sensor 1f, it is possible to reduce noise and improve the detection accuracy of the capacitance sensor 1f for detecting an object to be detected.

[0116] 2.Effects The capacitance sensor 1f according to the seventh embodiment further includes a contact portion 50 and a wiring portion 60. An external device can be connected to the contact portion 50. The wiring portion 60 electrically connects the contact portion 50 and the detection portion 20. The wiring portion 60 is disposed on the second surface 12 of the substrate 10. This allows the capacitance sensor 1f to have an improved degree of freedom in the arrangement of the wiring portion 60. Furthermore, in the capacitance sensor 1f, the arrangement of the wiring portion 60 reduces noise, thereby improving the detection accuracy of the capacitance sensor 1f in detecting an object to be detected.

[0117] (Other variations) (1) In each of the capacitance sensors 1 to 1h according to the first to seventh embodiments, each of the first electrodes 23 is square-shaped, and the second electrode 22 is rectangular-shaped and elongated in the first direction D1. However, the shapes of the first electrodes 23 and the second electrodes 22 are not limited to this, and may be any shape, such as a rectangle, a circle, an ellipse, a hexagon, or another polygon.

[0118] (2) In each of the capacitance sensors 1 to 1h according to the first to seventh embodiments, the connection point between the first ground portion 31 and the third ground portion 33 of the ground portion 30 is not limited to being L-shaped, and for example, the first ground portion 31 and the third ground portion 33 may be connected circumferentially. Similarly, the connection point between the second ground portion 32 and the third ground portion 33 is not limited to being L-shaped, and for example, the second ground portion 32 and the third ground portion 33 may be connected circumferentially.

[0119] (3) In the capacitance sensor 1e according to the sixth embodiment, similarly to the capacitance sensor 1d according to the fifth embodiment, one or more detection units 20 may have a plurality of second electrodes 22. This increases the area of ​​the detection unit 20 in both the first direction D1 and the second direction D2, thereby making it possible to increase the detection range of the object to be detected.

[0120] (4) In the capacitance sensor 1e according to the sixth embodiment, the ground section 30 includes the fourth ground section 34. However, the ground section 30 may have a combination of a first ground section 31 and a second ground section 32 instead of the fourth ground section 34. In this case, the first ground section 31 is adjacent to the shield section 40a in the first direction D1, and the second ground section 32 is adjacent to the multiple first electrodes 23 of the detection section 20b in the first direction D1.

[0121] (Aspect) A capacitance sensor (1 to 1g) according to a first aspect includes a substrate (10), a detection unit (20), a shield unit (40), and a ground unit (30). The substrate (10) has a first surface (11) and a second surface (12) facing each other. The detection unit (20) is disposed on the first surface (11) of the substrate (10). The shield unit (40) is disposed on the first surface (11) of the substrate (10) and extends in a first direction (D1). The ground unit (30) is disposed on the first surface (11) of the substrate (10) and includes a first ground unit (31). The detection unit (20) includes a first electrode group (21) and a second electrode (22). The first electrode group (21) includes a plurality of first electrodes (23). The plurality of first electrodes (23) are disposed in a row in the first direction (D1). The second electrode (22) is adjacent to the first electrode group (21) in the second direction (D2). The second direction (D2) is perpendicular to the first direction (D1) and the normal direction (D3) of the substrate (10). In the second direction (D2), the second electrode (22) is disposed between the first electrode group (21) of the detection unit (20) and the first ground portion (31). In the second direction (D2), the shield portion (40) is disposed between the first ground portion (31) and the second electrode (22) of the detection unit (20).

[0122] According to the capacitance sensors (1-1g) of the above aspects, the electric field formed by the second electrode (22) tends to spread in the normal direction (D3) of the substrate (10), and therefore the detection distance of the second electrode (22) to the detection object is long. Therefore, in the capacitance sensors (1-1g), even if the detection object is located outside the detection range of the first electrode (23), it is possible to improve the detection accuracy of the detection object by using the second electrode (22).

[0123] In the capacitance sensor (1 to 1g) according to the second aspect, in the first aspect, the ground portion (30) further includes a second ground portion (32) extending in the first direction (D1). In the second direction (D2), the first electrode group (21) is disposed between the second ground portion (32) and the second electrode (22). In the second direction (D2), the second ground portion (32) and the first electrode group (21) are adjacent to each other.

[0124] According to the capacitance sensor (1-1g) of the above aspect, the electric field formed by each of the first electrodes (23) is unlikely to spread in the normal direction (D3) of the substrate (10), so that the detection distance of the first electrodes (23) to the detection object is short, while differences depending on the material of the detection object are unlikely to occur. Therefore, in the capacitance sensor (1-1g), when the detection object and the capacitance sensor (1-1g) are close to each other, it is possible to improve the detection accuracy of the detection object regardless of the material of the detection object.

[0125] In the capacitance sensor (1 to 1g) according to the third aspect, in the second aspect, the multiple first electrodes (23) each have the same area.

[0126] According to the capacitance sensor (1-1g) of the above aspect, differences in the detection distance and detection accuracy of the detection object are unlikely to occur among the multiple first electrodes (23). Therefore, in the capacitance sensor (1-1g), local differences in the detection distance and detection accuracy of the detection object are unlikely to occur.

[0127] In the capacitance sensor (1 to 1g) according to the fourth aspect, in either the second or third aspect, the area of ​​each of the plurality of first electrodes (23) is 90 mm 2 More than 110mm 2 The following is the result.

[0128] According to the capacitance sensor (1-1g) of the above aspect, the detection distance of each of the plurality of first electrodes (23) is short, while the difference in the detection distance of each of the plurality of first electrodes (23) is unlikely to occur regardless of the material of the detection object. Therefore, in the capacitance sensor (1-1g), when the detection object and the capacitance sensor (1-1g) are close to each other, it is possible to further improve the detection accuracy of the detection object regardless of the material of the detection object.

[0129] In the capacitance sensor (1 to 1g) according to the fifth aspect, in any one of the second to fourth aspects, the ground portion (30) further includes a third ground portion (33). The third ground portion (33) connects the first ground portion (31) and the second ground portion (32).

[0130] According to the capacitance sensors (1 to 1g) of the above aspects, a potential difference is unlikely to occur in the ground portion (30) among the first ground portion (31), the second ground portion (32), and the third ground portion (33). Therefore, the capacitance sensors (1 to 1g) can be made less susceptible to the effects of external noise inside the area surrounded by the ground portion (30).

[0131] The capacitance sensor (1a to 1g) according to a sixth aspect is the same as any of the first to fifth aspects, and further includes a back electrode (71). The back electrode (71) is disposed on the second surface (12) of the substrate (10). The potential of the back electrode (71) is independent of the potential of the ground portion (30).

[0132] According to the capacitance sensors (1a-1g) of the above aspects, an external electric field is unlikely to penetrate in the thickness direction (D3) of the substrate (10). Moreover, in the capacitance sensors (1a-1g), each of the plurality of first electrodes (23) and second electrodes (22) is unlikely to be affected by an object located on the opposite side of the back electrode (71) from the detection unit (20).

[0133] In the capacitance sensor (1a to 1g) according to the seventh aspect, in the sixth aspect, the outer edge (711) of the back electrode (71) is positioned outside the ground portion (30) when viewed in a plan view in the thickness direction (D3) of the substrate (10).

[0134] According to the capacitance sensors (1a-1g) of the above aspects, an external electric field is less likely to penetrate in the thickness direction (D3) of the substrate (10). Moreover, in the capacitance sensors (1a-1g), each of the plurality of first electrodes (23) and second electrodes (22) is less likely to be affected by an object located on the opposite side of the back electrode (71) from the detection unit (20).

[0135] The capacitance sensor (1b) according to an eighth aspect is the capacitance sensor (1b) according to any one of the first to seventh aspects, further comprising a front electrode (72). The front electrode (72) is disposed on a first surface (11) of the substrate (10) and has one or more openings (73). The electric potential of the front electrode (72) is independent of the electric potential of the ground portion (30). In a plan view in the thickness direction (D3) of the substrate (10), the detection portion (20) is located inside the one or more openings (73) of the front electrode (72).

[0136] According to the capacitance sensor (1b) of the above aspect, the electric field generated by each of the plurality of first electrodes (23) and second electrodes (22) does not spread in the first direction (D1) and the second direction (D2), but easily propagates in the thickness direction (D3) of the substrate (10). Therefore, the external electric field is unlikely to penetrate the detection unit (20) in the third direction (D3), and each of the plurality of first electrodes (23) and second electrodes (22) is unlikely to be affected by an object located in the first direction (D1) or the second direction (D2) as viewed from the detection unit (20). Therefore, it is possible to limit the detection area of ​​the capacitance sensor (1b) to the thickness direction (D3) of the substrate (10) as viewed from the detection unit (20). In addition, when the object to be detected is charged with static electricity, the static electricity is likely to be absorbed by the ground portion (30), and the possibility of the static electricity affecting the plurality of first electrodes (23) or the second electrodes (22) can be reduced.

[0137] In the capacitance sensor (1b) of the ninth aspect, in the eighth aspect, the ground portion (30) has a portion located outside the outer edge (721) of the front electrode (72) when viewed in a planar view in the thickness direction (D3) of the substrate (10).

[0138] According to the capacitance sensor (1b) of the above aspect, the external electric field is less likely to penetrate the detection unit (20) in the third direction (D3), and each of the first electrodes (23) and the second electrodes (22) is less likely to be affected by an object located in the first direction (D1) or the second direction (D2) as viewed from the detection unit (20). Therefore, it is possible to limit the detection area of ​​the capacitance sensor (1b) to the thickness direction (D3) of the substrate (10) as viewed from the detection unit (20). In addition, when the object to be detected is charged with static electricity, the static electricity is more likely to be absorbed by the ground portion (30), and the possibility of the static electricity affecting the first electrodes (23) or the second electrodes (22) can be reduced.

[0139] The capacitance sensor (1b) according to a tenth aspect is the capacitance sensor (1b) according to any one of the first to seventh aspects, further comprising a front electrode (72). The front electrode (72) is disposed on a first surface (11) of the substrate (10) and has one or more openings (73). The electric potential of the front electrode (72) is the same as the electric potential of the ground portion (30). In a plan view in the thickness direction (D3) of the substrate (10), the detection portion (20) is located inside the one or more openings (73) of the front electrode (72).

[0140] According to the capacitance sensor (1b) of the above aspect, the electric field generated by each of the plurality of first electrodes (23) and second electrodes (22) does not spread in the first direction (D1) and the second direction (D2), but easily propagates in the thickness direction (D3) of the substrate (10). Therefore, the external electric field is unlikely to penetrate the detection unit (20) in the third direction (D3), and each of the plurality of first electrodes (23) and second electrodes (22) is unlikely to be affected by an object located in the first direction (D1) or the second direction (D2) as viewed from the detection unit (20). Therefore, it is possible to limit the detection area of ​​the capacitance sensor (1b) to the thickness direction (D3) of the substrate (10) as viewed from the detection unit (20). In addition, when the object to be detected is charged with static electricity, the static electricity is likely to be absorbed by the ground portion (30), and the possibility of the static electricity affecting the plurality of first electrodes (23) or the second electrodes (22) can be reduced.

[0141] In the capacitance sensor (1b) of the eleventh aspect, in the tenth aspect, when viewed in a planar view from the thickness direction (D3) of the substrate (10), at least one of the outer edge of the ground portion (30) and the outer edge (721) of the front electrode (72) is located outside the detection portion (20) and the shield portion (40).

[0142] According to the capacitance sensor (1b) of the above aspect, the external electric field is less likely to penetrate the detection unit (20) in the third direction (D3), and each of the first electrodes (23) and the second electrodes (22) is less likely to be affected by an object located in the first direction (D1) or the second direction (D2) as viewed from the detection unit (20). Therefore, it is possible to limit the detection area of ​​the capacitance sensor (1b) to the thickness direction (D3) of the substrate (10) as viewed from the detection unit (20). In addition, when the object to be detected is charged with static electricity, the static electricity is more likely to be absorbed by the ground portion (30), and the possibility of the static electricity affecting the first electrodes (23) or the second electrodes (22) can be reduced.

[0143] The capacitance sensor (1f) according to a twelfth aspect is the capacitance sensor (1f) according to any one of the first to eleventh aspects, further including a contact portion (50) and a wiring portion (60). An external device can be connected to the contact portion (50). The wiring portion (60) electrically connects the contact portion (50) and the detection portion (20). The wiring portion (60) is disposed on the second surface (12) of the substrate (10).

[0144] The capacitance sensor (1f) according to the above aspect can improve the degree of freedom in arranging the wiring portion (60). Moreover, in the capacitance sensor (1f), the arrangement of the wiring portion (60) can reduce noise and improve the detection accuracy of the capacitance sensor (1f) for detecting an object to be detected.

[0145] In a capacitance sensor (1d; 1e; 1f) according to a thirteenth aspect, in any one of the first to twelfth aspects, the detection unit (20) includes a plurality of second electrodes (22). The plurality of second electrodes (22) are arranged in a row in a first direction (D1).

[0146] According to the capacitance sensor (1d; 1e; 1f) according to the above aspect, it is possible to expand the detection range of the detection target object and improve the detection accuracy.

[0147] In a capacitance sensor (1d; 1e; 1f) according to a fourteenth aspect, in the thirteenth aspect, the second electrodes (22) have the same area as each other.

[0148] According to the capacitance sensor (1d; 1e; 1f) of the above aspect, differences in the detection distance and detection accuracy of the object to be detected are unlikely to occur among the second electrodes (22). Therefore, in the capacitance sensor (1d; 1e; 1f), local differences in the detection distance and detection accuracy of the object to be detected are unlikely to occur.

[0149] In a capacitance sensor (1d; 1e; 1f) according to a fifteenth aspect, in the thirteenth or fourteenth aspect, the sum of the areas of the multiple second electrodes (22) is greater than or equal to the sum of the areas of the multiple first electrodes (23).

[0150] According to the capacitance sensor (1d; 1e; 1f) of the above aspects, the first electrode (23) has a shorter detection distance than the second electrode (22), but the detection distance of the detection object is less dependent on the material of the detection object. On the other hand, the second electrode (22) has a longer detection distance than the first electrode (23), and is therefore capable of detecting an object located farther away from the substrate (10).

[0151] A capacitance sensor (1e; 1f; 1g) according to a sixteenth aspect is the capacitance sensor according to any one of the first to fifteenth aspects, further including a second detection unit (20b). The second detection unit (20b) is different from the first detection unit (20a) which is the detection unit (20). The second detection unit (20b) includes a plurality of first electrodes (23). The plurality of first electrodes (23) of the second detection unit (20b) and the plurality of first electrodes (23) of the first detection unit (20a) are arranged in the second direction (D2). A part (34) of the ground unit (30) is disposed between the plurality of first electrodes (23) of the second detection unit (20b) and the plurality of first electrodes (23) of the first detection unit (20a).

[0152] According to the capacitance sensor (1e; 1f; 1g) according to the above aspects, it is possible to expand the detection range of the detection target object and improve the detection accuracy.

[0153] The capacitance sensor (1e; 1f) according to the seventeenth aspect is the same as the capacitance sensor (1e; 1f) according to the sixteenth aspect, and further includes a second shield portion (40b). The second shield portion (40b) is different from the first shield portion (40a) which is the shield portion (40). The second shield portion (40b) extends in a first direction (D1). The second detection portion (20b) further includes a second electrode (22). The second shield portion (40b) is disposed between the second electrode (22) of the second detection portion (20b) and the ground portion (30).

[0154] According to the capacitance sensor (1e; 1f) of the above aspect, it is possible to expand the detection range of the detection target object and improve the detection accuracy.

[0155] In a capacitance sensor (1e; 1f) according to an 18th aspect, in the 17th aspect, the second electrode (22) of the first detection portion (20a) and the second electrode (22) of the second detection portion (20b) have the same area.

[0156] According to the capacitance sensor (1e; 1f) of the above aspect, differences in the detection distance and detection accuracy of the detection object are unlikely to occur among the multiple second electrodes (22). Therefore, in the capacitance sensor (1e; 1f), local differences in the detection distance and detection accuracy of the detection object are unlikely to occur.

[0157] In the capacitance sensor (1e; 1f) according to the 19th aspect, in the 17th or 18th aspect, the sum of the area of ​​the second electrode (22) of the first detection unit (20a) and the second electrode (22) of the second detection unit (20b) is greater than or equal to the sum of the area of ​​the multiple first electrodes (23) of the first detection unit (20a) and the multiple first electrodes (23) of the second detection unit (20b).

[0158] According to the capacitance sensor (1e; 1f) of the above aspect, the first electrode (23) has a shorter detection distance than the second electrode (22), but the detection distance of the detection object is less dependent on the material of the detection object. On the other hand, the second electrode (22) has a longer detection distance than the first electrode (23), and is therefore capable of detecting an object located farther away from the substrate (10). [Explanation of symbols]

[0159] 1, 1a, 1b, 1c, 1d, 1e, 1f, 1g Capacitive Sensors 10 Substrate 11 Page 1 12 Side 2 20 Detection unit 20a First detection section 20b Second detection unit 21 1st electrode group 22 2nd electrode 23 1st electrode 30 Ground Section 31 First Ground Section 32 Second Ground Section 33 Third Ground Section 34 4th Grand Section (Part) 40 Shield section 40a First shield part 40b Second shield part 50 Contact part 60 Wiring section 71 Back electrode 72 Front electrode 721 Outer edge 73 Opening D1 1st direction D2 2nd direction D3 Third direction (normal direction of the board)

Claims

1. a substrate having a first surface and a second surface opposed to each other; A detection unit disposed on the first surface of the substrate; a shield portion disposed on the first surface of the substrate and extending in a first direction; a ground section including a first ground section disposed on the first surface of the substrate and extending in the first direction; Equipped with The detection unit is a first electrode group including a plurality of first electrodes arranged in a row in the first direction; a second electrode adjacent to the first electrode group in a second direction perpendicular to the first direction and the normal direction of the substrate; In the second direction, the second electrode is disposed between the first electrode group of the detection unit and the first ground unit, The shield portion is disposed between the first ground portion and the second electrode of the detection portion. Capacitive sensor.

2. the ground portion further includes a second ground portion extending in the first direction, In the second direction, the first electrode group is disposed between the second ground portion and the second electrode, The second ground portion and the first electrode group are adjacent to each other. The capacitance sensor according to claim 1 .

3. The first electrodes each have the same area. The capacitance sensor according to claim 2 .

4. The area of ​​each of the first electrodes is 90 mm ２ 110mm or more ２ Below is the The capacitance sensor according to claim 3 .

5. the ground section further includes a third ground section connecting the first ground section and the second ground section; The capacitance sensor according to claim 2 .

6. a back electrode disposed on the second surface of the substrate; The potential of the rear electrode is independent of the potential of the ground portion. The capacitance sensor according to claim 1 .

7. When viewed from above in a thickness direction of the substrate, an outer edge of the back electrode is located outside the ground portion. The capacitance sensor according to claim 6.

8. a front electrode disposed on the first surface of the substrate, the front electrode having one or more openings; the potential of the front electrode is independent of the potential of the ground portion; When viewed in a thickness direction of the substrate, the detection unit is located inside the one or more openings of the front electrode. The capacitance sensor according to claim 1 or 6.

9. When viewed from above in a thickness direction of the substrate, the ground portion has a portion located outside an outer edge of the front electrode. The capacitance sensor according to claim 8.

10. a front electrode disposed on the first surface of the substrate, the front electrode having one or more openings; the potential of the front electrode is the same as the potential of the ground portion; When viewed in a thickness direction of the substrate, the detection unit is located inside the one or more openings of the front electrode. The capacitance sensor according to claim 1 or 6.

11. When viewed from above in a thickness direction of the substrate, at least one of an outer edge of the ground portion and an outer edge of the front electrode is located outside the detection portion and the shield portion. The capacitance sensor according to claim 10.

12. A contact portion to which an external device can be connected; A wiring portion electrically connecting the contact portion and the detection portion, The wiring portion is disposed on the second surface of the substrate. The capacitance sensor according to claim 1 .

13. The detection unit includes a plurality of the second electrodes, The plurality of second electrodes are arranged in a row in the first direction. The capacitance sensor according to claim 1 .

14. The second electrodes have the same area. The capacitance sensor according to claim 13.

15. A sum of areas of the plurality of second electrodes is equal to or greater than a sum of areas of the plurality of first electrodes. The capacitance sensor according to claim 13.

16. Further comprising a second detection unit that is different from the first detection unit and includes the plurality of first electrodes; the first electrodes of the second detection unit and the first electrodes of the first detection unit are aligned in the second direction, a part of the ground portion is disposed between the plurality of first electrodes of the second detection portion and the plurality of first electrodes of the first detection portion; 14. The capacitance sensor according to claim 1 or 13.

17. Further, a second shield part extending in the first direction is different from the first shield part, The second detection unit further includes the second electrode, The second shield portion is disposed between the second electrode of the second detection portion and the ground portion.

17. The capacitive sensor of claim 16.

18. The second electrode of the first detection unit and the second electrode of the second detection unit have the same area.

20. The capacitive sensor of claim 17.

19. a sum of areas of the second electrodes of the first detection unit and the second electrodes of the second detection unit is equal to or greater than a sum of areas of the first electrodes of the first detection unit and the first electrodes of the second detection unit; 20. The capacitive sensor of claim 17.

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