Axially cooled metal showerhead for high temperature process

Abstract

To provide an axially cooled metal showerhead for a high temperature process.SOLUTION: In a substrate processing system, a base portion 402 of a showerhead 400 (first and second components 500, 520) is made of a first metallic material, has a top surface 560 including a gas inlet and a buttom surface 562, and includes passages. A faceplate 404 is made of a second metallic material and includes side surfaces attached to a lower surface 562, a bottom surface 439 defining a plenum 405 together with the buttom surface 562, a vertical wall 416 that extends from the bottom surface upward through the plenum and is in contact with a second surface, and an outlet disposed along the vertical wall. A heater coil 422 is disposed in a groove 411 along the periphery of the base portion. A cooling plate 420 is disposed on the top surface and includes a conduit 424 for a coolant. Plates 430, 432 are made of a third material having a lower thermal conductivity than that of the first and second metallic materials and are disposed between the cooling plate and the base portion.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] CROSS REFERENCE TO RELATED APPLICATIONS: This disclosure is a PCT International Application of U.S. Patent Application No. 63 / 083,442, filed September 25, 2020. The entire disclosure of the above application is incorporated herein by reference.

[0002] The present disclosure relates generally to substrate processing systems, and more particularly to an axially cooled metallic showerhead for high temperature processes. [Background technology]

[0003] The discussion of the background art provided herein is for the purpose of generally providing a context for the present disclosure. Neither the work of the currently named inventors to the extent described in this Background section, nor aspects of the description that would not normally qualify as prior art at the time of filing, are admitted explicitly or implicitly as prior art to the present disclosure.

[0004] Atomic layer deposition (ALD) is a thin film deposition method that sequentially performs gas-phase chemical processes to deposit a thin film on the surface of a material (e.g., the surface of a substrate such as a semiconductor wafer). Most ALD reactions use at least two chemicals, called precursors (reactants), that react with the surface of the material in a sequential, self-limiting manner, one precursor at a time. Through repeated exposure to the separate precursors, a thin film is gradually deposited on the surface of the material.

[0005] Thermal ALD (T-ALD) is carried out in a heated processing chamber. The processing chamber is maintained at a subatmospheric pressure using a vacuum pump and a controlled flow of an inert gas. The substrate to be coated with the ALD film is placed in the processing chamber and allowed to equilibrate to the temperature of the processing chamber before starting the ALD process. Summary of the Invention

[0006] The showerhead includes a base portion, a faceplate, a heater, a cooling plate, and a metal plate. The base portion is made of a first metal material and has a first surface including a gas inlet and a second surface opposite the first surface, and includes a plurality of passages in fluid communication with the gas inlet. The faceplate is made of a second metal material and has a side attached to the second surface of the base portion and a bottom surface. The side and bottom surfaces of the faceplate and the second surface of the base portion define a plenum in fluid communication with the plurality of passages. The faceplate includes a plurality of walls extending from the bottom surface upwardly through the plenum and contacting the second surface of the base portion. The bottom surface includes a plurality of outlets disposed along the plurality of walls and in fluid communication with the plenum. The heater is disposed in a groove along a periphery of the base portion. The cooling plate is disposed on the first surface of the base portion and includes a conduit having an inlet for receiving a coolant and an outlet. The metal plate is made of a third metal material having a lower thermal conductivity than the first metal material and the second metal material and is disposed between the cooling plate and the base portion of the showerhead.

[0007] In other features, the outer diameter of the cooling plate and the metal plate is equal to or smaller than the inner diameter of the groove.

[0008] In other features, the walls are vertical and concentric.

[0009] In another feature, the walls have different heights.

[0010] In another feature, the walls have different widths.

[0011] In other features, the wall and the outlet are disposed within a region of the faceplate, and an outer diameter of the cooling plate and the metal plate is equal to or less than a diameter of the region.

[0012] In other features, the plurality of walls and the outlet are disposed within a region of the faceplate, the diameter of the region being equal to or less than the inner diameter of the groove.

[0013] In other features, the cooling plate and the metal plate have diameters that are smaller than outer diameters of the base portion and the faceplate.

[0014] In other features, the first metallic material and the second metallic material are the same.

[0015] In other features, the base portion includes a flange extending radially outward from an upper end of the base portion, and the showerhead further includes a clamping ring having a vertical portion disposed on the heater and having a horizontal portion attached to the flange.

[0016] In other features, the metal plate includes one or more recesses in at least one of the top and bottom surfaces.

[0017] In another feature, the showerhead further comprises an additional non-metallic plate disposed between the metal plate and the base portion.

[0018] In another feature, the non-metal has a lower thermal conductivity than the third metallic material.

[0019] In another feature, the outer diameter of the additional plate is equal to or smaller than the outer diameter of the metal plate.

[0020] In another feature, the metal plate is thicker than the additional plate.

[0021] In another feature, the faceplate is diffusion bonded to the base portion.

[0022] In another feature, the base portion and the faceplate are coated with a corrosion resistant material.

[0023] In other features, the metal plate comprises a first layer including one or more recesses, a second layer that is flat, and a third layer that includes one or more recesses.

[0024] In other features, the first layer, the second layer, and the third layer are diffusion bonded.

[0025] In other features, the recesses in the first layer and the third layer are aligned with one another.

[0026] In other features, the recesses of the first layer and the third layer overlap.

[0027] In other features, the recesses of the first layer and the third layer do not overlap.

[0028] In other features, the base portion comprises first and second disc-shaped elements and a cylindrical element. The first disc-shaped element includes a groove proximate an outer diameter of the first disc-shaped element. The heater is disposed within the groove. The second disc-shaped element is disposed on the first disc-shaped element and has an outer diameter that is equal to or less than the inner diameter of the groove. The cylindrical element is disposed on the first disc-shaped element and has an inner diameter that is equal to or greater than the outer diameter of the groove.

[0029] In other features, the first and second disc-shaped elements and the cylindrical element are diffusion bonded.

[0030] In another feature, the groove extends vertically from a top surface of the first disc-shaped element to a bottom surface of the first disc-shaped element.

[0031] In other features, the outer diameters of the bases of the first and second disc-shaped elements and the cylindrical element are equal.

[0032] In other features, the first disc-shaped element includes a slot in a center of a top surface of the first disc-shaped element, the slot being in fluid communication with the gas inlet and including a plurality of grooves extending radially from the slot, and a passageway extending downwardly from a distal end of the grooves to and through a bottom surface of the first disc-shaped element.

[0033] In other features, the upper end of the cylindrical element includes a flange extending radially outward, and the showerhead further includes a clamping ring having a vertical portion disposed on the heater and having a horizontal portion attached to the flange.

[0034] In other features, the faceplate includes a plurality of grooves extending radially outward from a center of the faceplate.

[0035] In other features, the grooves are of different lengths.

[0036] In other features, the walls are vertical and concentric and the grooves intersect the walls.

[0037] In other features, the faceplate includes an annular recess along an outer diameter of the bottom surface, and the showerhead further comprises an edge ring disposed within the annular recess.

[0038] In other features, the processing chamber includes a showerhead and a pedestal, the edge ring being adjacent an outer periphery of a top surface of the pedestal.

[0039] In another feature, a radially outward gas flow through a gap between the edge ring and the outer edge of the top surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap toward a substrate positioned on the pedestal during substrate processing.

[0040] In other features, the system includes a showerhead, a gas distribution system for supplying process gas to the gas inlets, a fluid distribution system for supplying fluid to conduits in the cooling plate, and a power supply for providing power to the heater.

[0041] In another feature, the system further comprises a controller for controlling the gas distribution system, the fluid distribution system, and the power source.

[0042] In yet another feature, a showerhead includes a base portion, a faceplate, a cooling plate, a first metal plate, and a second plate. The base portion has a first surface including a gas inlet and a second surface opposite the first surface. The base portion includes a plurality of passages in fluid communication with the gas inlet. The faceplate has a side attached to the second surface of the base portion and a bottom surface including a plurality of outlets. The faceplate includes a plurality of walls extending upwardly from the bottom surface and contacting the second surface of the base portion. The cooling plate is disposed on the first surface of the base portion. The cooling plate includes a conduit having an inlet for receiving a coolant and an outlet. The first metal plate is disposed between the cooling plate and the base portion of the showerhead. The first metal plate has a lower thermal conductivity than the faceplate and the cooling plate. The second plate is disposed between the first metal plate and the base portion. The second plate is comprised of a non-metal having a lower thermal conductivity than the first metal plate.

[0043] In another feature, the first metal plate comprises a first layer including one or more recesses, a second layer that is flat, and a third layer that includes one or more recesses.

[0044] In another feature, the base portion comprises a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a heater disposed in a groove proximate an outer diameter of the first disc-shaped element. The second disc-shaped element is disposed on the first disc-shaped element and has an outer diameter that is equal to or less than the inner diameter of the groove. The cylindrical element is disposed on the first disc-shaped element and has an inner diameter that is equal to or greater than the outer diameter of the groove. The outer diameters of the bottom of the cylindrical element and the first and second disc-shaped elements are equal.

[0045] In other features, the first disc-shaped element includes a slot in a center of a top surface of the first disc-shaped element, the slot being in fluid communication with the gas inlet and including a plurality of grooves extending radially from the slot, and a passageway extending downwardly from a distal end of the grooves to and through a bottom surface of the first disc-shaped element.

[0046] In other features, the upper end of the cylindrical element includes a flange extending radially outward. The showerhead further includes a clamping ring having a vertical portion disposed over the heater and having a horizontal portion attached to the flange.

[0047] In other features, the faceplate includes a plurality of grooves extending radially outward from a center of the faceplate. The grooves are of different lengths. The walls are vertical and concentric. The grooves intersect the walls. The faceplate includes an annular recess along an outer diameter of the bottom surface. The annular recess includes an edge ring that allows gas flow radially outward through a gap between the edge ring and an outer edge of the top surface of the pedestal.

[0048] In still other features, the showerhead includes a base portion, a faceplate, a heater, a cooling plate, and a plate. The base portion is comprised of a first metallic material. The base portion has a first surface including a gas inlet and a second surface opposite the first surface. The base portion includes a plurality of passages in fluid communication with the gas inlet. The faceplate is comprised of a second metallic material. The faceplate has a side attached to the second surface of the base portion and a bottom surface. The side and bottom surface of the faceplate and the second surface of the base portion define a plenum in fluid communication with the plurality of passages. The faceplate includes a plurality of walls extending from the bottom surface upwardly through the plenum and contacting the second surface of the base portion. The bottom surface includes a plurality of outlets disposed along the walls and in fluid communication with the plenum. The heater is disposed in a groove along a periphery of the base portion. The cooling plate is disposed on the first surface of the base portion. The cooling plate includes a conduit having an inlet for receiving a coolant and an outlet. The plate is made of a third material having a lower thermal conductivity than the first and second metallic materials. The plate is disposed between the cooling plate and a base portion of the showerhead.

[0049] In other features, the outer diameter of the cooling plate and the plate is equal to or smaller than the inner diameter of the groove.

[0050] In other features, the walls are vertical and concentric. The walls have different heights. The walls have different widths.

[0051] In other features, the plurality of walls and the outlet are disposed within a region of the faceplate. An outer diameter of the cooling plate and the plate is equal to or less than a diameter of the region. The diameter of the region is equal to or less than an inner diameter of the groove.

[0052] In other features, the base portion includes a flange extending radially outward from an upper end of the base portion. The showerhead further includes a clamping ring having a vertical portion disposed over the heater and having a horizontal portion attached to the flange.

[0053] In other features, the third material includes a thermoplastic material. The showerhead further includes an additional plate disposed between the plate and the cooling plate. The additional plate has a different thermal conductivity than the third material.

[0054] In other features, the first outer diameter of the additional plate is greater than or equal to the second outer diameter of the plate. The plate is thinner than the additional plate.

[0055] In other features, the third material comprises a thermoplastic material.The plate comprises a first layer including one or more recesses, a second layer that is flat, and a third layer including one or more recesses.

[0056] In other features, the recesses in the first layer and the third layer are aligned with one another, the recesses in the first layer and the third layer partially overlap, or the recesses in the first layer and the third layer do not overlap.

[0057] In other features, the base portion comprises a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a groove proximate an outer diameter of the first disc-shaped element. The heater is disposed within the groove. The second disc-shaped element is disposed on the first disc-shaped element and has an outer diameter that is equal to or less than the inner diameter of the groove. The cylindrical element is disposed on the first disc-shaped element and has an inner diameter that is equal to or greater than the outer diameter of the groove. The outer diameters of the bases of the first disc-shaped element and the second disc-shaped element and the cylindrical element are equal. The first disc-shaped element and the second disc-shaped element and the cylindrical element are diffusion bonded.

[0058] In other features, the first disc-shaped element includes a slot in a center of a top surface of the first disc-shaped element, the slot being in fluid communication with the gas inlet and including a plurality of grooves extending radially from the slot, and a passageway extending downwardly from a distal end of the grooves to and through a bottom surface of the first disc-shaped element.

[0059] In other features, the upper end of the cylindrical element includes a flange extending radially outward. The showerhead further includes a clamping ring having a vertical portion disposed over the heater and having a horizontal portion attached to the flange.

[0060] In other features, the faceplate includes a plurality of grooves extending radially outward from a center of the faceplate. The plurality of grooves are of different lengths. The plurality of walls are perpendicular and concentric. The plurality of grooves intersect the walls.

[0061] In other features, a processing chamber includes a showerhead and a pedestal. The faceplate includes an annular recess along an outer diameter of a bottom surface. The showerhead includes an edge ring disposed within the annular recess. The edge ring is proximate an outer periphery of a top surface of the pedestal. A radially outward gas flow through a gap between the edge ring and the outer periphery of the top surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap toward a substrate disposed on the pedestal during substrate processing.

[0062] In still other features, a showerhead includes a base portion, a faceplate, a cooling plate, and a plate. The base portion has a first surface including a gas inlet and a second surface opposite the first surface. The base portion includes a plurality of passages in fluid communication with the gas inlet. The faceplate has a side attached to the second surface of the base portion and a bottom surface including a plurality of outlets. The faceplate includes a plurality of walls extending upwardly from the bottom surface and contacting the second surface of the base portion. The cooling plate is disposed on the first surface of the base portion. The cooling plate includes a conduit having an inlet and an outlet for receiving a coolant. The plate has a lower thermal conductivity than the faceplate and the cooling plate. The plate is disposed between the cooling plate and the base portion of the showerhead.

[0063] In other features, the plate is made of a thermoplastic material. The plate includes a first layer including one or more recesses, a second layer that is flat, and a third layer including one or more recesses.

[0064] In other features, the base portion comprises a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a heater disposed in a groove proximate an outer diameter of the first disc-shaped element. The second disc-shaped element is disposed on the first disc-shaped element and has an outer diameter that is equal to or less than the inner diameter of the groove. The cylindrical element is disposed on the first disc-shaped element and has an inner diameter that is equal to or greater than the outer diameter of the groove. The outer diameters of the bottom of the cylindrical element and the first and second disc-shaped elements are equal.

[0065] In other features, the first disc-shaped element includes a slot in a center of a top surface of the first disc-shaped element, the slot being in fluid communication with the gas inlet and including a plurality of grooves extending radially from the slot, and a passageway extending downwardly from a distal end of the grooves to and through a bottom surface of the first disc-shaped element.

[0066] In other features, the upper end of the cylindrical element includes a flange extending radially outward. The showerhead further includes a clamping ring having a vertical portion disposed over the heater and having a horizontal portion attached to the flange.

[0067] In other features, the faceplate includes a plurality of grooves extending radially outward from a center of the faceplate. The plurality of grooves are of different lengths. The plurality of walls are vertical and concentric. The plurality of grooves intersect the walls. The faceplate includes an annular recess along an outer diameter of the bottom surface. The annular recess includes an edge ring that allows gas flow radially outward through a gap between the edge ring and an outer edge of the top surface of the pedestal.

[0068] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.

[0069] The present disclosure will become more fully understood from the detailed description and the accompanying drawings. [Brief description of the drawings]

[0070] [Figure 1] FIG. 1 illustrates an example of a substrate processing system including a processing chamber.

[0071] [Diagram 2] FIG. 1 is a diagram illustrating an example of a shower head.

[0072] [Diagram 3] FIG. 1 illustrates an example of a showerhead with a faceplate having multiple vertical walls.

[0073] [Figure 4] FIG. 1 illustrates an example of a showerhead with a faceplate having multiple vertical walls and thermal chokes.

[0074] [Diagram 5] FIG. 5 shows the showerhead of FIG. 4 together with a pedestal.

[0075] [Figure 6] FIG. 5 illustrates an example of a thermal choke of the showerhead of FIG. 4.

[0076] [Figure 7] FIG. 5 is a top view of the showerhead in FIG.

[0077] [Figure 8] FIG. 5 is a bottom view of the showerhead of FIG.

[0078] [Figure 9A] FIG. 5 shows the showerhead of FIG. 4 in further detail. [Figure 9B] FIG. 5 shows the showerhead of FIG. 4 in further detail.

[0079] [Figure 10A] FIG. 5 is an isometric view of the showerhead of FIG. [Figure 10B] FIG. 5 is a side cross-sectional view of the showerhead of FIG.

[0080] [Figure 11A] FIG. 5 is an isometric view of a faceplate of the showerhead of FIG. [Figure 11B] FIG. 5 is a top cross-sectional view of the faceplate of the showerhead of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0081] In the drawings, reference numbers may be reused to identify similar and / or identical elements.

[0082] Showerheads made of metals such as aluminum are not typically used for processes that are performed at relatively high pedestal temperatures due to the relatively large heat flow into the showerhead for processes that require a pedestal temperature of about 575-650 degrees Celsius. The heat flow into the showerhead is typically offset by the heat flux direction being driven radially from the center region to the edge region of the showerhead. The edge region of the showerhead is thermally coupled to the cooler top plate or sidewall of the processing chamber. The thermal coupling induces a temperature gradient (e.g., about 80-120 degrees Celsius) within the metal showerhead. The temperature gradient in turn induces a relatively large temperature gradient within the substrate during processing due to the thermal coupling between the showerhead and the substrate, especially when the gap between the showerhead and the substrate is relatively small (e.g., in processes such as ALD).

[0083] In the present disclosure, a heat flow path through vertical plenum walls in the showerhead enhances axial heat flow from the bottom to the top of the showerhead, resulting in a reduced radial temperature gradient across the showerhead. Specifically, instead of using an open plenum with a cavity in the center of the showerhead, the showerhead according to the present disclosure uses spoke-like grooves (shown and described in detail below) in the showerhead faceplate to distribute gas flow within the showerhead. The spoke-like grooves allow for the inclusion of dual-purpose vertical walls within the showerhead plenum. In addition to distributing gas flow within the showerhead, these walls also provide a heat flow path from the bottom to the top of the showerhead. The resulting axial heat flow path and axial temperature gradient within the showerhead significantly reduces the radial temperature range across the showerhead faceplate (e.g., from about 150 degrees Celsius to about 30 degrees Celsius in some processes).

[0084] For additional thermal management, a combination of heating, cooling, and thermal chokes (described below) are used in the showerhead according to the present disclosure. A cooling plate is placed on the top surface of the showerhead and is designed to cool the center region of the showerhead while retaining heating capacity at the edges of the showerhead for temperature control. Heater coils are disposed along the perimeter of the showerhead. Thermal chokes are placed between the cooling plate and the faceplate of the showerhead as described below.

[0085] The heating, cooling, and thermal chokes allow the showerhead to be used in processes that run at temperatures as high as 650 degrees Celsius while having a relatively small gap between the showerhead and the pedestal, while keeping the showerhead relatively cool (e.g., below 200 degrees Celsius). Keeping the showerhead cool protects any corrosion-resistant coatings applied to the showerhead. The thermal management provided by the heating, cooling, and thermal chokes allows the showerhead to operate with such a reduced gap without being damaged by heat loads from the pedestal.

[0086] Furthermore, by reducing the gap between the showerhead and the pedestal, the volume of gas flowing through the showerhead can be significantly reduced with grooves and walls used for gas distribution in the showerhead instead of using a hollow plenum in the showerhead. The reduced flow volume helps reduce precursor consumption in the process, which reduces costs. With the reduced flow volume, the process gases can be purged quickly, which reduces the duration between gas transitions, resulting in reduced cycle times in processes such as ALD. With the reduced cycle time, a larger number of substrates can be processed in the same amount of time, which increases throughput. These and other features of showerheads according to the present disclosure are described in detail below.

[0087] The disclosure is organized as follows: An example of a processing chamber in which a showerhead according to the disclosure may be used is illustrated and described with reference to FIG. 1. A problem solved by a showerhead of the disclosure is described with reference to FIG. 2. An example of a showerhead according to the disclosure that solves a problem is illustrated and described with reference to FIGS. 3-5. An example of a thermal choke used in the showerhead of FIG. 4 is illustrated and described with reference to FIG. 6. Top and bottom views of the showerhead of FIG. 4 are illustrated and described with reference to FIGS. 7 and 8, respectively. The showerhead of FIG. 4 is illustrated and described in further detail with reference to FIGS. 9A-11B.

[0088] 1 illustrates an example of a substrate processing system 100 that includes a processing chamber 102 configured to process a substrate using thermal atomic layer deposition (T-ALD). The processing chamber 102 encloses the other components of the substrate processing system 100. The processing chamber 102 includes a substrate support (e.g., a pedestal) 104. During processing, a substrate 106 is disposed on the pedestal 104.

[0089] One or more heaters 108 (e.g., a heater array) may be disposed in a ceramic plate disposed on a metallic base plate of the pedestal 104 for heating the substrate 106 during processing. One or more additional heaters, referred to as zone heaters or primary heaters (not shown), may be disposed in the ceramic plate above or below the heater 108. Additionally, although not shown, a cooling system may be disposed in the base plate of the pedestal 104 including cooling channels through which a coolant may flow to cool the pedestal 104, and one or more temperature sensors may be disposed in the pedestal 104 for sensing the temperature of the pedestal 104.

[0090] The processing chamber 102 includes a gas distribution apparatus 110, such as a showerhead, for introducing and distributing process gases into the processing chamber 102. The gas distribution apparatus (hereafter showerhead) 110 is made of a metal or alloy, such as aluminum. The showerhead 110 may include a stem portion 112 having one end connected to a top surface of the processing chamber 102. A base portion 114 of the showerhead 110 is generally cylindrical and extends radially outward from an opposite end of the stem portion 112 at a location spaced apart from the top surface of the processing chamber 102.

[0091] The substrate-facing surface of the base portion 114 of the showerhead 110 comprises a faceplate (shown in subsequent figures). The faceplate comprises a number of outlets or features (e.g., slots or through-holes) through which precursors flow into the processing chamber 102. The faceplate of the showerhead 110 is shown and described in detail with reference to Figures 10A-11B.

[0092] The showerhead 110 also includes a cooling plate and a heater (as shown and described with reference to later figures). The cooling plate includes conduits (see FIG. 7) through which a coolant can circulate as described below. Additionally, although not shown, one or more temperature sensors may be disposed within the showerhead 110 to sense the temperature of the showerhead 110. The showerhead 110 includes additional features, such as one or more thermal chokes and an edge ring, which are shown and described in detail with reference to later figures.

[0093] The gas delivery system 130 comprises one or more gas sources 132-1, 132-2, ..., and 132-N (collectively, gas sources 132), where N is an integer greater than 0. The gas sources 132 are connected to a manifold 139 by valves 134-1, 134-2, ..., and 134-N (collectively, valves 134) and mass flow controllers 136-1, 136-2, ..., and 136-N (collectively, mass flow controllers 136). The output of the manifold 139 is sent to the processing chamber 102. The gas sources 132 may supply process gases, cleaning gases, purge gases, inert gases, etc. to the processing chamber 102.

[0094] A fluid delivery system 140 supplies coolant to the cooling system in the pedestal 104 and to the cooling plate in the showerhead 110. A temperature controller 150 may be connected to the heater 108, the zone heaters, the cooling system, and temperature sensors in the pedestal 104. The temperature controller 150 may also be connected to the cooling plate, the heater, and temperature sensors in the showerhead 110. The temperature controller 150 may control the power supplied to the heater 108, the zone heaters, and the flow of coolant through the cooling system in the pedestal 104 to control the temperature of the pedestal 104 and the substrate 106. The temperature controller 150 may also control the power supplied to the heater disposed in the showerhead 110 and the flow of coolant through conduits disposed in the cooling plate of the showerhead 110 to control the temperature of the showerhead 110.

[0095] A vacuum pump 158 maintains a subatmospheric pressure inside the processing chamber 102 during substrate processing. A valve 156 is connected to an exhaust port of the processing chamber 102. The valve 156 and vacuum pump 158 are used to control the pressure within the processing chamber 102 and to evacuate reactants from the processing chamber 102 via the valve 156. A system controller 160 controls the components of the substrate processing system 100.

[0096] 2 shows a showerhead 200 comprising a base portion 202 and a faceplate 204, where the faceplate 204 is attached to the base portion 202 with a spatial offset from a bottom surface 203 of the base portion 202. The showerhead 200 (i.e., both the base portion 202 and the faceplate 204) are made of a metal or metal alloy, such as aluminum. In some examples, the base portion 202 and the faceplate 204 may be made of different metals or metal alloys.

[0097] The bottom surface 203 of the base portion 202 is non-planar. For example, the bottom surface 203 of the base portion 202 is substantially concave. The top surface 209 of the faceplate 204 is planar. The bottom surface 203 of the base portion 202 and the top surface 209 of the faceplate 204 define a plenum 206.

[0098] The top surface 205 of the base portion 202 is substantially planar. The top surface 205 includes a groove 207 proximate an outer diameter (OD) of the top surface 205. The heater coil 212 is mounted in the groove 207 using a flat ring 223. The flat ring 223 is flush with the top surface 205 of the base portion 202 and extends radially inward from the outer edge of the groove 207 toward the center of the base portion 202. The top surface 205 extends radially outward from the OD of the groove 207 to the OD of the top surface 205, then extends vertically downward, and then extends radially inward toward the center of the base portion 202 to form a first flange 211.

[0099] A processing chamber top plate 213 surrounds the base portion 202 and faceplate 204 of the showerhead 200. The top plate 213 includes a flange 217 that extends radially inward from an inner diameter (ID) of the top plate 213. A first flange 211 of the base portion 202 overhangs the flange 217 of the top plate 213. An O-ring 215 is disposed in a groove 219 in the flange 217.

[0100] The base portion 202 extends vertically upward from the bottom surface 203 at the OD of the base portion 202, then extends radially outward and then vertically upward to the bottom of the first flange 211 to form a second flange 229. The second flange 229 has a smaller diameter than the first flange 211. A perimeter portion 231 of the faceplate 204 extends vertically upward from the OD of the faceplate 204 to the second flange 229. The faceplate 204 is attached to the base portion 202 at the second flange 229.

[0101] The showerhead 200 has a stem portion 208. One end of the stem portion 208 is attached to the top of the processing chamber. The other end of the stem portion 208 is attached to the center of the upper region 237 of the base portion 202 using fasteners 221-1, 221-2. The stem portion 208 includes an inlet 210 for receiving one or more gases from a gas delivery system. The inlet 210 extends vertically downward through the stem portion 208, through the center of the base portion 202, and into the plenum 206. Gases flow from the inlet 210 into the plenum 206 and then through a number of holes 227-1, 227-2, 227-3, ..., and 227-N (collectively, through holes 227), where N is an integer greater than 1, into the processing chamber.

[0102] A cooling plate 214 is disposed above the base portion 202. The cooling plate 214 is annular with an OD substantially equal to the OD of the base portion 202. The ID of the cooling plate 214 is substantially equal to the ID of the grooves 207. The cooling plate 214 includes conduits 225 through which coolant from the fluid delivery system flows. The conduits 225 are disposed within grooves 233 in the cooling plate 214. The cooling plate 214 provides cooling at the edges of the base portion 202.

[0103] When used in close proximity to a pedestal in processes requiring relatively high temperatures (e.g., ALD), the faceplate 204 of the showerhead 200 has a relatively large radial temperature gradient. For example, heat flows along the path indicated by the arrows from the center of the faceplate 204 toward the OD of the faceplate 204 and upward toward the cooling plate 214. For example, in some processes, the temperature at the center of the faceplate 204 may be about 330 degrees Celsius, while the temperature at the edge of the faceplate 204 may be about 190 degrees Celsius (due to heat loss to the relatively cooler top plate 213 of the processing chamber), resulting in a radial temperature gradient across the faceplate 204 of about 140 degrees Celsius.

[0104] 3 shows a showerhead 300 positioned in close proximity to a pedestal 312 in accordance with the present disclosure. The showerhead 300 includes a base portion 302 and a faceplate 304. The showerhead 300 (i.e., both the base portion 302 and the faceplate 304) are made of a metal or alloy, such as aluminum, and are diffusion bonded to one another. In some examples, the base portion 302 and the faceplate 304 may be made of different metals or alloys.

[0105] The base portion 302 comprises two elements 302-1 and 302-2 (collectively, base portion 302) that are diffusion bonded together. The first element 302-1 is cylindrical. A peripheral portion 333 of the first element 302-1 extends vertically upward and then radially outward to form a flange 307 along the OD of the first element 302-1. The top surface 301 of the first element 302-1 is substantially planar and includes a groove 311. The groove 311 is located proximate to the peripheral portion 333 of the first element 302-1. The heater coil 322 is mounted in the groove 311 using a flat ring 326. The flat ring 326 extends radially inward from the outer edge of the groove 311 toward the center of the first element 302-1. The second element 302-2 of the base portion 302 is a flat disc-shaped element attached to the top surface 309 of the first element 302-1. The second element 302-2 has an OD equal to the ID of the flat ring 326.

[0106] The showerhead 300 differs in a number of ways from the showerhead 200 shown in Figure 2. First, the structure of the base portion 302 and faceplate 304 of the showerhead 300 differs from the structure of the base portion 202 and faceplate 204 of the showerhead 200 shown in Figure 2. Specifically, the bottom surface 203 of the base portion 202 of the showerhead 200 is non-planar and has a spatial offset from the faceplate 204, whereas the bottom surface 303 of the base portion 302 of the showerhead 300 is planar.

[0107] Second, the bottom surface 303 of the base portion 302 is in direct contact with the top surface 309 of the faceplate 304, which is also planar. The base portion 302 and the faceplate 304 define a plenum 305 that is different from the plenum 206 of the showerhead 200. The plenum 305 of the showerhead 300 is different from the plenum 206 of the showerhead 200 because the faceplate 304 of the showerhead 300, unlike the faceplate 204 of the showerhead 200, includes a plurality of vertical walls 316-1, 316-2, 316-3, ..., 316-N (collectively, vertical walls 316), where N is an integer greater than 1. The vertical walls 316 extend from the faceplate 304 through the plenum 305 to the base portion 302, but are not present in the plenum 206 of the showerhead 200.

[0108] The vertical walls 316 may have a uniform height or may have different heights. The vertical walls 316 may have a uniform width or may have different widths. Because the vertical walls 316 extend from the bottom of the faceplate 304 to the top surface 309 of the faceplate 304 and contact the bottom surface 303 of the base portion 302, the vertical walls 316 provide a heat flow path from the bottom of the faceplate 304 to the base portion 302 along the vertical axis of the showerhead 300. Thus, the vertical walls 316 provide axial cooling of the showerhead 300. These heat flow paths and axial cooling provided by the vertical walls 316 help to reduce radial temperature gradients across the faceplate 304 of the showerhead 300.

[0109] Third, the showerhead 300 includes a cooling plate 320 that is different from the showerhead's cooling plate 214. Specifically, unlike cooling plate 214, which is annular and provides cooling only at the edges of the showerhead 200, cooling plate 320 is larger in size (has a larger surface area in contact with the showerhead) than cooling plate 214 and extends from the center of the showerhead 300 (specifically, from a stem portion, described below) to the OD of the second element 302-2 of the base portion 302 of the showerhead 300.

[0110] The cooling plate 320 is disposed on and attached to the second element 302-2 of the base portion 302. The cooling plate 320 includes conduits 324 through which coolant from a fluid delivery system flows. The conduits 324 are disposed in grooves 325 in the cooling plate 320. Heat flows from the bottom of the faceplate 304, through the vertical wall 316, through the first and second elements 302-1, 302-2 of the base portion 302, as indicated by the vertical arrows, to the cooling plate 320. Thus, unlike the cooling plate 214, which cools the edges of the showerhead 200, the cooling plate 320 cools a center region of the showerhead 300.

[0111] A processing chamber top plate 313 surrounds the base portion 302 and faceplate 304 of the showerhead 300. The top plate 313 includes a flange 317 that extends radially inward from an inner diameter (ID) of the top plate 313. The flange 307 of the base portion 302 overhangs the flange 317 of the top plate 313. An O-ring 315 is disposed in a groove 319 in the flange 317.

[0112] The showerhead 300 has a stem portion 308. One end of the stem portion 308 is attached to the top of the processing chamber. The other end of the stem portion 308 is attached to the center of the top surface 335 of the second element 302-2 of the base portion 302. The stem portion 308 includes an inlet 310 for receiving one or more gases from a gas delivery system.

[0113] The inlet 310 extends vertically downward through the stem portion 308 and connects to the plenum 305 via a slot (one example is shown in FIGS. 9A-10B) in the center of the base portion 302. A bottom surface 339 of the faceplate 304 includes a plurality of holes 327-1, 327-2, 327-3, ..., and 327-N (collectively, through holes 327), where N is an integer greater than 1. Gas flows from the inlet 310 through the slot into the plenum 305 and then through the plurality of holes 327 in the bottom surface 339 of the faceplate 304 into the processing chamber. The bottom surface 339 of the faceplate 304 is in close proximity to a top surface 349 of a pedestal 312 disposed within the processing chamber.

[0114] During processing, a substrate 341 is placed on the pedestal 312. The pedestal includes a ring 343 that surrounds an upper surface 349 of the pedestal 312 to support the substrate 341. Although not shown, the pedestal 312 includes other features of the substrate support 110 described with reference to FIG.

[0115] As described below, by increasing the diameter of the cooling plate 320 and positioning the heater coils 322 differently, the axial cooling of the showerhead 300 provided by the vertical walls 316 of the faceplate 304 can be improved and the radial temperature gradient across the showerhead 300 can be further reduced. As described below, thermal chokes can be added to further improve thermal management and further improve the axial cooling and radial temperature gradient across the showerhead.

[0116] 4 and 5 show a showerhead 400 according to the present disclosure. FIG. 4 shows the showerhead 400, and FIG. 5 shows the showerhead 400 disposed on a pedestal 312 according to the present disclosure. The showerhead 400 includes a base portion 402, a faceplate 404, and a flange portion 530. The showerhead 400 (i.e., the base portion 402, the faceplate 404, and the flange portion 530) are made of a metal or alloy, such as aluminum, and are diffusion bonded to one another. In some examples, the base portion 402 and the faceplate 404 may be made of different metals or alloys.

[0117] Showerhead 400 differs in a number of ways from showerhead 300. In addition to using a larger cooling plate than showerhead 300 and a different heater coil arrangement than showerhead 300, showerhead 400 also includes thermal chokes that are not present in showerhead 300. These elements of showerhead 400 are described in more detail below.

[0118] The base portion 402 and faceplate 404 are shown and described in further detail with reference to Figures 9A-11B. Briefly, the base portion 402 comprises three components, a first component 500, a second component 520, and a third component 530, collectively referred to as the base portion 402. The first component 500 is a disc-shaped element having planar top and bottom surfaces 560, 562. The second component 520 is a flat disc-shaped element attached to the top surface 560 of the first component 500.

[0119] The third component 530 (referred to above as flange portion 530 because it includes flange 428 described below) is a cylindrical element attached to the first component 500 at the OD of the first component 500. The OD of the bottom of the third component 530 attached to the first component 500 is equal to the OD of the first component 500. The third component 530 extends perpendicularly from the OD of the first component 500 and then extends radially outward to form the flange 428.

[0120] Top surface 560 of first component 500 includes groove 411 proximate the OD of first component 500. Heater coil 422 is mounted in groove 411 using a clamping ring 564 having an inverted L-shape. Clamping ring 564 extends vertically upward from the top of heater coil 422 and then extends radially outward to form an inverted L-shape and is attached to flange 428. Base portion 402 is shown and described in further detail below with reference to Figures 9A and 9B.

[0121] The showerhead 400 differs from the showerhead 300 shown in FIG. 3 in a number of ways. First, unlike the flat ring 326 used to mount the heater coil 322 to the showerhead 300, which extends radially inward, the inverted L-shaped clamping ring 564 used to mount the heater coil 422 to the showerhead 400 extends vertically upward and then radially outward. This inverted L-shape of the clamping ring 564 allows for the use of a cooling plate 420 with a larger diameter than the cooling plate 320 used in the showerhead 300. The OD of the cooling plate 420 is equal to or less than the ID of the groove 411 in which the heater coil 422 is disposed. The increased size (diameter) of the cooling plate 420 improves axial cooling along the vertical axis of the showerhead 400 compared to the axial cooling provided by the cooling plate 320 to the showerhead 300. The improved axial cooling provided by the cooling plate 420 results in a further reduction in the radial temperature gradient across the faceplate 404 of the showerhead 400.

[0122] Second, unlike the showerhead 300, the showerhead 400 includes a thermal resistor formed by first and second plates 430, 432, each of which has a lower thermal conductivity than the metal or alloy used for the base portion 402 and the faceplate 404. As described in more detail below, the first and second plates 430, 432 impede (i.e., slow) heat flow from the faceplate 404 to the cooling plate 420 to prevent the coolant in the cooling plate 420 from boiling. Additionally, as described in more detail below with reference to FIG. 6, the first plate 430 includes a plurality of recesses 434-1, 432-2 (collectively, recesses 434, shown in more detail in FIG. 6) that further increase the impedance of the thermal resistor formed by the first and second plates 430, 432.

[0123] The combination of the cooling plate 420, heater coil 422, and first and second plates 430, 432 significantly improves thermal management in the showerhead 400 by balancing the heating and cooling of the showerhead 400 compared to the showerhead 300. The improved thermal management reduces the radial temperature gradient across the faceplate 404 of the showerhead 400. The reduced thermal stress in the showerhead 400 allows the showerhead 400 to be placed closer to the pedestal 312 than the showerhead 300.

[0124] The smaller gap between the faceplate 404 and the pedestal 312 allows the process gas flow volume to be reduced, which reduces costs. By reducing the process gas flow volume, smaller amounts of process gas can be purged quickly and transitions between process gases during a process cycle can be performed faster, resulting in faster process cycles. This allows more substrates to be processed in the same amount of time, resulting in higher throughput.

[0125] More specifically, a bottom surface 562 of the base portion 402, which is planar, directly contacts a top surface 409 of the faceplate 404, which is also planar. The base portion 402 and the faceplate 404 define a plenum 405. The faceplate 404 of the showerhead 400 includes a plurality of vertical walls 416-1, 416-2, 416-3, ..., 416-N (collectively, vertical walls 416), where N is an integer greater than 1. The vertical walls 416 extend from the faceplate 404 through the plenum 405 to the base portion 402 and contact the base portion 402.

[0126] The vertical walls 416 extend from the bottom of the faceplate 404 to the top surface 409 of the faceplate 404 and contact the bottom surface 562 of the base portion 402, so that the vertical walls 416 provide a heat flow path from the bottom of the faceplate 404 to the base portion 402 along the vertical axis of the showerhead 400. Thus, the vertical walls 416 provide axial cooling of the showerhead 400. The axial cooling provided by the vertical walls 416 helps to reduce the radial temperature gradient across the faceplate 404 of the showerhead 400 (e.g., from about 150 degrees Celsius to about 30 degrees Celsius in some processes). The vertical walls 416 may have a uniform height or may have different heights. The vertical walls 416 may have a uniform width or may have different widths. The vertical walls 416 are shown and described in further detail with reference to FIGS. 10A-11B.

[0127] The cooling plate 420 extends from the center of the showerhead 400 (specifically, from a stem portion, described below) to the OD of the second component 520 of the base portion 402 of the showerhead 400. The cooling plate 420 is disposed over and attached to the first and second plates 430, 432. The cooling plate 420 includes conduits 424 through which coolant from the fluid delivery system flows. The conduits 424 are disposed within grooves 425 in the cooling plate 420. Heat flows from the bottom of the faceplate 404, through the vertical walls 416, through the base portion 402 and the first and second plates 430, 432 to the cooling plate 420.

[0128] Because the cooling plate 420 of the showerhead 400 has a larger diameter than the cooling plate 320 of the showerhead 300, the cooling plate 420 covers and cools a larger area of ​​the base portion 402 than the area of ​​the base portion 302 covered and cooled by the cooling plate 320 of the showerhead 300. Specifically, the cooling plate 420 cools most of the portion of the showerhead 400 that extends from the center of the showerhead 400 to the heater coil 422. Thus, the cooling plate 420 significantly improves axial cooling across the showerhead 400 as compared to the axial cooling provided by the cooling plate 320 in the showerhead 300.

[0129] 5, the showerhead 400 has a stem portion 408. One end of the stem portion 408 is attached to the top of the processing chamber. The other end of the stem portion 408 is attached to the center of the top surface 435 of the second component 520 of the base portion 402 using fasteners 421-1, 421-2 through first and second plates 430, 432. The stem portion 408 includes an inlet 410 for receiving one or more gases from a gas delivery system.

[0130] The inlet 410 extends vertically downward through the stem portion 408, through the first and second plates 430, 432 and the base portion 402, and connects to the plenum 405 via a slot 502 (shown and described in further detail in FIGS. 9A-11B) at the center of the first component 500 of the base portion 402. A bottom surface 439 of the faceplate 404 includes a plurality of through holes 427-1, 427-2, 427-3, ..., and 427-N (collectively, through holes 427), where N is an integer greater than 1. Gas flows from the inlet 410 through the slot 502 into the plenum 405 and then into the processing chamber through the plurality of through holes 427 in the bottom surface 439 of the faceplate 404. The bottom surface 439 of the faceplate 404 is in close proximity to a top surface 349 of a pedestal 312 disposed within the processing chamber.

[0131] During processing, a substrate 341 is placed on the pedestal 312. The pedestal 312 includes a ring 343 that surrounds an upper surface 349 of the pedestal 312 to support the substrate 341. Although not shown, the pedestal 312 includes other features of the substrate support 110 described with reference to FIG.

[0132] A top plate 313 of the processing chamber surrounds the base portion 402 and faceplate 404 of the showerhead 400. The top plate 313 includes a flange 317 that extends radially inward from the ID of the top plate 313. A flange 428 of the base portion 402 overhangs the flange 317 of the top plate 313. An O-ring 315 is disposed in a groove 319 in the flange 317.

[0133] The processing chamber top plate 313 is cooler than the showerhead 400. As a result, the center region of the faceplate 404 is relatively hot due to the heat load from the pedestal 312, while the edges of the showerhead 400 lose heat to the processing chamber top plate 313. The heater coils 422 help offset the heat loss along the edges of the showerhead 400, and the cooling plate 420 cools the center region of the showerhead 400. The combination of heating and cooling reduces the radial temperature gradient from the center to the OD of the showerhead 400.

[0134] The showerhead 400, specifically the base portion 402 and faceplate 404, are coated with a corrosion-resistant material, such as nickel. The emissivity of the corrosion-resistant material further reduces the temperature gradient across the showerhead 400. However, the coating may degrade (e.g., crystallize) above a threshold temperature (e.g., about 200 degrees Celsius for a nickel coating). To prevent the coating from degrading, the cooling plate 420 keeps the temperature of the showerhead 400 below the threshold temperature.

[0135] However, while the cooling plate 420 keeps the temperature of the showerhead 400 below the threshold temperature, the coolant flowing through the conduit 424 may heat up and lose its ability to provide cooling (i.e., cooling capacity) as heat flows from the faceplate 404 to the cooling plate 420. For example, if water is used as the coolant (although other coolants may be used), the water may boil at 100 degrees Celsius and lose its cooling capacity. Because the temperature of the showerhead 400 may reach approximately 200 degrees Celsius, the temperature of the coolant needs to be kept well below the boiling point of the coolant (e.g., well below 100 degrees Celsius if water is used as the coolant). This is accomplished by using a thermal resistor (also called a thermal choke) comprising first and second plates 430, 432 interposed between the faceplate 404 and the cooling plate 420 to impede the flow of heat from the faceplate 404 to the cooling plate 420 and prevent the coolant from overheating and boiling.

[0136] Specifically, the showerhead 400 includes a first plate 430 and a second plate 432 disposed between the cooling plate 420 and the base portion 402 (more specifically, disposed between the cooling plate 320 and the second component 520 of the base portion 402) as shown. The first and second plates 430, 432 forming a thermal resistor (or thermal choke) are illustrated and described in further detail below with reference to FIG. 6. In brief, the first and second plates 430, 432 are made of materials having different thermal conductivities, each of which is lower than the thermal conductivity of the metal or alloy that constitutes the base portion 402 and the faceplate 404. For example, if the base portion 402 and the faceplate 404 are made of aluminum, the first plate 430 can be made of stainless steel and the second plate 432 can be made of a non-metal (e.g., a semiconductor material). For example, the thermal conductivity of the first plate 430 is less than the thermal conductivity of the base portion 402 and the faceplate 404 and is greater than the thermal conductivity of the second plate 432 .

[0137] Thus, the first and second plates 430, 432 form a thermal resistor that gently impedes (i.e., slows) the flow of heat from the faceplate 404 to the cooling plate 420 to prevent overheating of the coolant in the conduit 424. Specifically, the thermal resistor prevents the coolant from reaching its boiling point. The first plate 430 further includes a recess 434, which provides an air pocket that further increases the thermal resistance of the thermal resistor.

[0138] The showerhead 400 offers many advantages over showerheads with ceramic faceplates. Specifically, the showerhead 400 is made of one or more metals or alloys and has a higher thermal conductivity than showerheads with ceramic faceplates. For example, the thermal conductivity of aluminum is about 5 to 6 times higher than that of ceramic materials. The higher conductivity of the showerhead 400 reduces the temperature gradient across the showerhead 400. Also, while thermal stresses can damage (e.g., fracture) a ceramic faceplate, thermal stresses do not cause such catastrophic failure in the showerhead 400. Thus, the showerhead 400 can be positioned closer to the pedestal 312 than a showerhead with a ceramic faceplate (see FIG. 5).

[0139] Additionally, as explained above, the temperature gradient across the showerhead 400 is significantly reduced (e.g., to about 30 degrees Celsius when the pedestal set point is about 650 degrees Celsius) due to the improved axial cooling provided by the base portion 402, the cooling plate 420, the heater coil 422, and the vertical wall 416 in the faceplate 404 that contacts the first and second plates 430, 432. Thus, the gap between the faceplate 404 and the pedestal 312 can be further reduced (see FIG. 5). For example, gaps of about 0.2 inches, 0.15 inches, and 0.11 inches between the showerhead 400 and the pedestal 312 can be achieved while maintaining a radial temperature gradient of about 30 degrees Celsius across the showerhead 400 with a pedestal set point of about 650 degrees Celsius without damaging the faceplate 404.

[0140] The additional reduction in the gap allows for a reduction in the amount of process gas used during substrate processing, which reduces costs. For example, the amount of process gas used in the showerhead 200 shown in FIG. 2 may be about 820 cc, while the amount of process gas used in the showerhead 400 shown in FIG. 4 may be about 530 cc. With a significant reduction in the amount of gas used, gases can be purged and transitioned quickly, and thus process cycles (e.g., ALD cycles) can be performed quickly, which results in increased throughput (i.e., more substrates can be processed in the same amount of time).

[0141] The showerhead 400 further comprises an edge ring 442, which helps prevent the diffusion of contaminants from the processing chamber back into the minute volume of process gas in the region between the faceplate 404 and the top of the pedestal 312. Specifically, the bottom surface 439 of the faceplate 404 includes an annular recess 440 along the OD of the faceplate 404. The edge ring 442 is disposed within the annular recess 440. During processing, the diffusion of contaminants into the minute volume of process gas can be prevented if the rate at which process gas flows through the gap 444 between the edge ring 442 and the edge of the pedestal 312 is relatively high, independent of the different process gas flows. The relatively high rate of gas flow through the gap 444, independent of the different process gas flows, can be provided as follows.

[0142] 5, the distance h between the bottom of the edge ring 442 and the top of the ring 343 at the edge of the pedestal 312 (i.e., the height of the gap 444), and the path length L through the gap 444 (approximately the distance between the ID and OD of the ring 343 at the edge of the pedestal 312). The rate at which the process gas flows through the gap 444 is a function of h, L, and the total gas flow used in the process. For example, the smaller the value of h, the higher the gas flow rate in the gap 444.

[0143] The velocity of the gas before entering the gap 444 increases and decreases with the total gas flow used in the process. If the velocity of the gas before entering the gap 444 is low, the value of h needs to be smaller. Conversely, if the velocity of the gas before entering the gap 444 is high, the value of h can be higher. Thus, different values ​​of h are required for different process gas flows to maintain a relatively high velocity in the gap 444. Different values ​​of h can be provided by using edge ring 442 of appropriate thickness for different processes without changing the distance between the faceplate 404 and the pedestal 312.

[0144] 6 shows in further detail the thermal resistor comprising first and second plates 430, 432. The outer diameter of the first and second plates 430 is equal to or less than the OD of the second component 520 of the base portion 402. Although not shown, the first and second plates 430, 432 include holes that align with the various sets of holes shown in FIGS. 7-9B through which fasteners can be inserted to fasten the cooling plate 420 to the base portion 402.

[0145] The first plate 430 includes a plurality of recesses 434-1, 434-2, 434-3, ..., and 434-N (collectively, recesses 434), where N is an integer greater than 1. The recesses 434 may be disposed on at least one of the top and bottom surfaces of the first plate 430. The size, shape, and number of the recesses 434 on the top surface of the first plate 430 may be such that about 65% of the surface area of ​​the top surface of the first plate 430 contacts the bottom surface of the cooling plate 420. Similarly, the size, shape, and number of the recesses 434 on the bottom surface of the first plate 430 may be such that about 65% of the surface area of ​​the bottom surface of the first plate 430 contacts the top surface of the second plate 432. Other percentages may be used for the contact area of ​​the top and bottom surfaces of the first plate 430. For example, the contact area of ​​the top and bottom surfaces of the first plate 430 may vary between 50-80%. Also, the contact areas of the top and bottom surfaces of the first plate 430 may be different (ie, unequal).

[0146] The first and second plates 430, 432 are made of a material having a relatively low thermal conductivity. The first plate 430 may have a higher thermal conductivity than the second plate 432. For example, the thermal conductivity of the first and second plates 430, 432 may be approximately 15 Watts per meter Kelvin (W / mK) and 2 W / mK, respectively. The first and second plates 430, 432 provide a thermal barrier against heat flowing from the faceplate 404 to the cooling plate 420.

[0147] The second plate 432 provides a thermal barrier to heat flowing from the faceplate 404 to the first plate 430, and the first plate 430 provides a thermal barrier to heat flowing from the second plate 432 to the cooling plate 420. The first and second plates 430, 432 act as thermal chokes or resistors in series with one another. Thus, the second plate 432 and the first plate 430 present a slowly increasing thermal barrier or resistance to heat flowing from the faceplate 404 to the cooling plate 420.

[0148] Recesses 434, including air pockets, are spaced across the first plate 430 on at least one of the top and bottom surfaces to further increase the thermal barrier. The stack of first and second plates 430, 432 forms a thermal resistor that prevents the cooling plate 420 from conducting a relatively large amount of heat away from the showerhead 400, which can operate the heater coil 422 at a relatively high capacity. The thermal resistor prevents the coolant (e.g., water) in the conduit 424 from approaching its boiling point due to heat flow.

[0149] Thus, the cooling plate 420, the heater coil 422, and the thermal resistor formed by the first and second plates 430, 432 provide a balance between heating and cooling of the showerhead 400 to minimize temperature gradients across the showerhead and protect the corrosion resistant coating on the showerhead 400 by keeping the temperature of the showerhead 400 below a threshold temperature (e.g., 200 degrees Celsius).

[0150] The first plate 430 may be manufactured as a monolithic plate. Alternatively, the first plate 430 may comprise three layers: two layers (a top layer and a bottom layer) that include recesses 434 (in the form of recesses or slots cut through the layers) and a third layer that is flat (i.e., without recesses 434) and sandwiched between the two layers. The three layers may be bonded (e.g., brazed or diffusion bonded) to one another.

[0151] The recesses 434 may be disposed on at least one of the top and bottom surfaces of the first plate 430 in a number of ways. The recesses 434 on the top surface of the first plate 430 may be aligned with the recesses 434 on the bottom surface of the first plate 430. Alternatively, the recesses 434 on the top surface of the first plate 430 may be offset relative to the recesses 434 on the bottom surface of the first plate 430. For example, the recesses 434 on the top surface of the first plate 430 may overlap with at least one of the recesses 434 on the bottom surface of the first plate 430. Alternatively, none of the recesses 434 on the top surface of the first plate 430 may overlap with the recesses 434 on the bottom surface of the first plate 430.

[0152] The recesses 434 on the top and bottom surfaces of the first plate 430 may have any size, shape, and number, so long as the contact area of ​​the top and bottom surfaces of the first plate 430 is as described above. For example, the recesses 434 on the top and bottom surfaces of the first plate 430 may be the same size and shape. Alternatively, the recesses 434 on the top surface of the first plate 430 may be a different size and / or shape than the recesses 434 on the bottom surface of the first plate 430. The recesses 434 may be disposed symmetrically or asymmetrically on the top and bottom surfaces of the first plate 430.

[0153] The number of recesses 434 can be different (e.g., fewer or more) than that shown. The top and bottom surfaces of the first plate 430 can have the same number of recesses 434. Alternatively, the top surface of the first plate 430 can have a different number of recesses 434 than the bottom surface of the first plate 430.

[0154] The depths of the recesses 434 may be the same or different. The recesses 434 on the top and bottom surfaces of the first plate may have the same depth. Alternatively, the recesses 434 on the top surface of the first plate 430 may have a first depth and the recesses 434 on the bottom surface of the first plate 430 may have a second depth. The depths of the recesses 434 on the top surface of the first plate 430 may vary in a first pattern and the depths of the recesses 434 on the bottom surface of the first plate 430 may vary in a second pattern. Any combination of the above variations may be used.

[0155] The OD of the first and second plates 430, 432 is equal to or less than the OD of the cooling plate 420 and equal to or less than the ID of the groove in which the heater coil 422 is disposed in the base portion 402. The thickness of the first and second plates 430, 432 can vary depending on process requirements. The first plate 430 can be thicker than the second plate 432.

[0156] In some applications, the second plate 432 may also include recesses on at least one of the top and bottom surfaces and may include any of the variations described above with reference to the first plate 430. There may also be additional permutations and combinations possible between the recesses of the first and second plates 430, 432. In some applications, the second plate 432 may be made of a thermoplastic material (e.g., polyimide) and may include all of the structural features of the first plate 430 described above and may be used independently (i.e., by itself instead of being used with the first plate 430). Alternatively, in some applications, the second plate 432 may be omitted and the first plate 430 may be made of a thermoplastic material (e.g., polyimide).

[0157] Also, although not shown, a third plate having a relatively low thermal conductivity may be used in addition to the first and second plates 430, 432. The third plate may be similar to either the first and second plates 430, 432, except that the thermal conductivity of the third plate may be different from the first and second plates 430, 432. The third plate may be disposed above, below, or between the first and second plates 430, 432. The thermal conductivity of the third plate may be selected based on the location of the third plate. For example, a third plate disposed below the second plate 432 may have a lower thermal conductivity than the second plate 432. A third plate disposed above the first plate 430 may have a higher thermal conductivity than the first plate 430. A third plate disposed between the first and second plates 430 , 432 may have a thermal conductivity less than that of the first plate 430 and greater than that of the second plate 432 .

[0158] 7 and 8 show top and bottom views, respectively, of the showerhead 400. In FIG. 7, a top view of the cooling plate 420 is visible. The cooling plate 420 is attached to the second component 520 of the base portion 402 by fasteners inserted into through holes 431. Holes 409 are provided for inserting fasteners to attach the stem portion 408 to the showerhead 400. Various other sets of mounting / fastening holes 431-1, 431-2, and 431-3 are shown through which fasteners may be inserted to fasten the cooling plate 420 to the base portion 402 through the first and second plates 430, 430.

[0159] The top horizontal portion of clamping ring 564 visible in this view is fastened to a bottom vertical portion of clamping ring 564 not visible in this view (but visible in Figures 4 and 5) by fasteners inserted through holes 433-1. The top horizontal portion of clamping ring 564 is fastened to flange 428 of base portion 402 by fasteners inserted through holes 433-2.

[0160] Elements 437-1 and 437-2 are first and second terminals of heater coil 422 that may be connected to a power source. Elements 429-1 and 429-2 are the inlet and outlet, respectively, of conduit 424 that may be connected to a fluid delivery system.

[0161] The cooling plate 420 extends radially outward from the stem portion 408 (visible in FIG. 5 ) toward the OD of the base portion 402. The conduit 424 is disposed in a corresponding groove 425 (visible in FIG. 5 ) in the cooling plate 420. The number of turns of the conduit 424 may vary (i.e., more or fewer turns than shown may be used). The diameter of the conduit 424 may be uniform throughout the length of the conduit 424. The size, shape, and layout of the conduit 424 may be optimized to suit process requirements.

[0162] Alternatively, the cooling plate 420 may be divided into multiple zones and multiple conduits may be disposed in these zones. For example, a first conduit may be disposed in a first zone comprising an inner half of the cooling plate 420 and a second conduit may be disposed in a second zone comprising an outer half of the cooling plate 420. As another example, a first and second conduit may be disposed in first and second zones defined proximate the ID and OD of the cooling plate 420, respectively, and a third conduit may be disposed in a third zone between the first and second zones. Each of the multiple conduits may be supplied with the same coolant. Alternatively, at least one of the multiple conduits may be supplied with a different coolant than the others of the multiple conduits. When multiple conduits are used, each conduit may have any of the characteristics (size, shape, and layout) described above with reference to the conduit 424.

[0163] 8 shows a bottom view of the showerhead 400, showing the substrate-facing side (i.e., bottom surface 439) of the faceplate 404. The through-holes 427 in the bottom surface 439 of the faceplate 404 are visible in this view. The through-holes 427 are also visible in the additional view of the faceplate 404 shown in FIGS. 11A-11B. Also visible in this view is the bottom of the edge ring 442, which is shown and described in detail above with reference to FIGS. 4 and 5.

[0164] 9A and 9B show the base portion 402 and faceplate 404 of the showerhead 400 in further detail. FIG. 9A shows an isometric view of the showerhead 400. The first component 500 is not seen in detail in this view (but is seen in more detail in FIG. 9B). The second component 520 includes a set of holes 409 and 431-1, 431-2, 431-3 that align with the corresponding sets of holes 409 and 431-1, 431-2, 431-3 shown in FIG. 7, respectively. The flange 428 includes a hole 433-1 that aligns with the hole 433-1 shown in FIG. 7.

[0165] 9B shows the first, second and third components 500, 520, 530 of the base portion 402 in further detail. The first component 500 of the base portion 402 is a first disc-shaped element that includes a groove 411 along the OD of the first component 500. The groove 411 opens to a top surface 560 of the first component 500 and extends vertically downward to a bottom surface 562 of the first component 500.

[0166] The first component 500 includes a slot 502 in the center of the top surface 560 of the first component 500. The slot 502 includes a number of grooves 504 extending radially outward from the center of the slot 502. A number of passages 506 extend vertically downward from the far ends of the grooves 504 to approximately the middle of the first component 500. From approximately the midpoint, the passages 506 may split (i.e., branch) through the remainder of the first component 500 and open to the bottom surface 560 of the first component 500, as shown at 507. Thus, the passages 506 may have an inverted "Y" shape, as shown at 507, although other shapes (e.g., U-shaped, V-shaped, etc.) are contemplated. Gas received through the inlet 410 passes through the slots 502 and through the passages 506 to enter the faceplate 404. The first component 500 includes sets of holes 409 and 431-1, 431-2, 431-3, which respectively align with corresponding sets of holes 409 and 431-1, 431-2, 431-3 of the second component 520 and the respective sets of holes shown in FIG.

[0167] The second component 520 of the base portion 402 is a second disc-shaped element. The OD of the second component 520 is equal to or less than the ID of the groove 411 in the first component 500. The second component 520 is placed on the top surface 560 of the first component 500 and is fastened or diffusion bonded to the top surface 560. The inlet 410 in the center of the second component 520 aligns with and opens into the slot 502 in the first component 500.

[0168] The third component 530 of the base portion 402 is a cylindrical element that is also placed on the first component 500 and fastened or diffusion bonded to the first component 500. The top end of the third component 530 extends radially outward to form a flange 428. The ID of the third component 530 is equal to or greater than the OD of the groove 411. The width or thickness of the third component 530 at the bottom end is equal to the distance (or difference) between the OD of the groove 411 and the OD of the second component 520. The OD of the bottom end of the third component 530, the OD of the second component 520, and the OD of the faceplate 404 are equal as seen in FIGS. 4 and 5.

[0169] The second component 520 is disposed on the first component 500. The third component 530 is also disposed on the first component 500. The third component 530 surrounds the second component 520. The first, second, and third components 500, 520, 530 can be bonded together using diffusion bonding to form the base portion 402 of the showerhead 400. Diffusion bonding eliminates fillers that are typically used when brazing is used to bond the components. Eliminating the filler eliminates the possibility of contamination from residual fillers that tend to remain after brazing and subsequent cleaning.

[0170] The faceplate 404 includes a vertical wall 416. For example, the vertical wall 416 may be concentric. As discussed above, the vertical wall 416 may have different heights and / or widths. When the faceplate 404 is attached to the base portion 402, the space between the vertical wall 416 and the bottom surface 562 of the first component 500 of the base portion 402 forms a plenum 405 in the faceplate 404. A passage 506 in the first component 500 of the base portion 402 opens into the plenum 405 in the faceplate 404 (also shown in FIGS. 10A and 10B ).

[0171] The faceplate 404 includes a plurality of radially extending grooves 540-1, 540-2, 540-3, ..., 540-N (collectively, grooves 540), where N is an integer greater than 1, arranged like the spokes of a wheel. The grooves 540 intersect the vertical wall 416 and divide the vertical wall 416 into a plurality of sections. A plurality of through holes 427 (see Figures 8 and 11B) are disposed on either side of the vertical wall 416 on a bottom surface 439 (i.e., the substrate-facing surface, see Figure 8) of the faceplate 404.

[0172] The vertical walls 416 and the through holes 427 are formed in a region of the faceplate 404 that extends from the center of the faceplate 404 to a predetermined radial distance from the center of the faceplate 404. The corresponding predetermined diameter of the region of the faceplate 404 defined by the predetermined radial distance aligns with (i.e., is less than or equal to) the ID of the recess 440 in the bottom surface 439 of the faceplate 404 in which the edge ring 442 is disposed. Thus, the predetermined diameter of the region of the faceplate 404 that includes the vertical walls 416 and the through holes 427 is less than or equal to the ID of the edge ring 442. The predetermined diameter is also less than or equal to the ID of the groove 411 in the base portion 402, as seen in FIGS. 4 and 5.

[0173] The vertical walls 416 and the grooves 540 uniformly distribute gas received from the passages 506 in the first component 500 of the base portion 402 to the through-holes 427. Additionally, as described above with reference to Figures 4 and 5, the vertical walls 416 extend vertically upward from the faceplate 404 to contact the bottom surface 562 of the base portion 402 (i.e., the bottom surface 562 of the first component 500 of the base portion 402), so that the vertical walls 416 provide a thermal path between the faceplate 404 and the base portion 402.

[0174] 10A and 10B show isometric and cross-sectional views, respectively, of a showerhead 400 comprising a base portion 402 and a faceplate 404. An inlet 410 of the showerhead 400 receives process gases from a gas distribution system (e.g., element 130 shown in FIG. 1). The process gases flow through the inlet 410, slots 502, grooves 504, and passages 506 into the faceplate 404, and the process gases exit the faceplate 404 via through-holes 427 into the processing chamber. The structural and functional details of the components of the showerhead 400, particularly the base portion 402 and the faceplate 404, have already been described in detail above with reference to FIGS. 4-9B and will not be described again here for the sake of brevity.

[0175] 11A and 11B show isometric and top views, respectively, of cross section AA of faceplate 404 shown in FIG. 10B. FIG. 11A and 11B show vertical wall 416, grooves 540, and through holes 427 disposed about vertical wall 416. As shown, grooves 540 can be disposed in a pattern. For example, as shown, grooves 540 can extend radially outward from the center of faceplate 404 to the end of a given diameter of the faceplate within which vertical wall 416 and through holes 427 are disposed.

[0176] Alternatively, some of the grooves 540 may extend radially outward from the center of the faceplate 404, but not all the way to the end of a given diameter. In another arrangement, some of the grooves 540 may not begin at the center of the faceplate 404, and may not extend radially outward all the way to the end of a given diameter. For example, a first set of grooves 540 may begin a first distance from the center of the faceplate 404 and then extend radially outward to the end or part way of the given diameter, a second set of grooves 540 may begin a second distance from the center of the faceplate 404 and then extend radially outward to the end or part way of the given diameter, etc., where the second distance is different from the first distance.

[0177] In other words, the lengths and extents of the grooves 540 in the first set, second set, etc. may be different (i.e., not equal). Thus, some of the vertical walls 416 may be located the same radial distance from the center of the faceplate 404, but may have different arc lengths. Other patterns and arrangements of the vertical walls 416 and grooves 540 that may be suitable for distributing gas received from the inlets 410, slots 502, grooves 504, and passages 506 via the through holes 427 are also contemplated.

[0178] The above description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses. The broad teachings of the disclosure can be embodied in various forms. Thus, although the disclosure includes specific examples, the true scope of the disclosure should not be so limited, since other variations will become apparent from a study of the drawings, specification, and appended claims.

[0179] It should be understood that one or more steps in the method may be performed in different orders (or in parallel) without altering the principles of the present disclosure. Also, although each of the embodiments is described above as having certain features, any one or more of those features described with respect to any embodiment of the present disclosure may be implemented in and / or combined with any feature of any other embodiment, even if the combination is not explicitly described. In other words, the described embodiments are not mutually exclusive, and it is within the scope of the present disclosure to substitute one or more embodiments for one another.

[0180] Spatial and functional relationships between elements (e.g., between modules, circuit elements, semiconductor layers, etc.) are described using various terms including "connected," "engaged," "coupled," "adjacent," "adjacent," "on," "above," "below," and "disposed." Unless expressly described as "direct," when a relationship between a first and second element is described in the disclosure above, the relationship may be a direct relationship where no other intervening elements are present between the first and second elements, but may also be an indirect relationship where one or more intervening elements are present (either spatially or functionally) between the first and second elements. As used herein, the phrase at least one of A, B, and C should be interpreted as meaning a logical (A OR B OR C) with a non-exclusive logical OR, and not as meaning "at least one of A, at least one of B, and at least one of C."

[0181] In some implementations, the controller is part of the system, which may be part of the above examples. Such systems may include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more platforms for processing, and / or specific processing components (pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling their operation before, during, and after processing of semiconductor wafers or substrates. The electronics may be referred to as a "controller" and may control various components or parts of one or more systems.

[0182] The controller may be programmed to control any of the processes disclosed herein, including delivery of process gases, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer transfer to and from tools and other transfer tools and / or load locks connected or interfaced to a particular system, depending on the processing requirements and / or type of system.

[0183] In general, a controller may be defined as electronic equipment having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software).

[0184] The program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer for performing one or more processing steps during the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of the wafer.

[0185] The controller, in some embodiments, may be part of or coupled to a computer that is integrated into the system, coupled to the system, otherwise networked to the system, or a combination thereof. For example, the controller may be all or part of a fab host computer system that may be in the "cloud" and enable remote access of wafer processing. The computer may enable remote access to the system to monitor the current progress of a fabrication operation, examine the history of past fabrication operations, examine trends or performance metrics from multiple fabrication operations, change parameters of a current process, set up processing steps following a current process, or initiate a new process.

[0186] In some examples, a remote computer (e.g., a server) can provide the process recipe to the system over a network, which may include a local network or the Internet. The remote computer can include a user interface that allows for entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data that specifies parameters for each of the processing steps to be performed during one or more operations. It should be understood that the parameters can be specific to the type of process to be performed and the type of tool the controller is configured to interface with or control.

[0187] Thus, as explained above, the controller may be distributed, such as by having one or more individual controllers networked together and operating toward a common purpose, such as the processes and controls described herein. One example of a distributed controller for such purposes is one or more integrated circuits on the chamber that communicate with one or more remotely located integrated circuits (such as at the platform level or as part of a remote computer) that are combined to control the process on the chamber.

[0188] Without limitation, example systems may include a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0189] As described above, depending on the process step or steps to be performed by the tool, the controller may communicate with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, neighboring tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to carry containers of wafers to and from tool locations and / or load ports in a semiconductor manufacturing factory.

Claims

1. A shower head, a base portion made of a first metallic material, the base portion having a first surface including a gas inlet and a second surface opposite the first surface, the base portion including a plurality of passages in fluid communication with the gas inlet; a faceplate made of a second metallic material, the faceplate having a side attached to the second surface of the base portion and a bottom surface, the side and bottom surface of the faceplate and the second surface of the base portion defining a plenum in fluid communication with the plurality of passages, the faceplate including a plurality of walls extending from the bottom surface upwardly through the plenum and contacting the second surface of the base portion, the bottom surface including a plurality of outlets disposed along the walls and in fluid communication with the plenum; a heater disposed within a groove along the periphery of the base portion; a cooling plate disposed on the first surface of the base portion, the cooling plate including a conduit having an inlet for receiving a coolant and an outlet; a plate made of a third material having a lower thermal conductivity than the first metallic material and the second metallic material and disposed between the cooling plate and the base portion of the showerhead; A shower head equipped with

2. 10. The showerhead of claim 1, wherein an outer diameter of the cooling plate and the plate is equal to or smaller than an inner diameter of the groove.

3. 10. The showerhead of claim 1, the walls are vertical and concentric; the walls have different heights; The walls of the showerhead have different widths.

4. 10. The showerhead of claim 1, the walls and the outlet are disposed within the area of ​​the faceplate; an outer diameter of the cooling plate and the plate is equal to or less than a diameter of the region; the diameter of the region is less than or equal to an inner diameter of the groove.

5. 10. The showerhead of claim 1, wherein the base portion includes a flange extending radially outward from an upper end of the base portion, the showerhead further comprising a clamping ring having a vertical portion disposed over the heater and having a horizontal portion attached to the flange.

6. 10. The showerhead of claim 1 , wherein the third material comprises a thermoplastic material, the showerhead further comprising an additional plate disposed between the plate and the cooling plate, the additional plate having a different thermal conductivity than the third material.

7. 7. The showerhead of claim 6, a first outer diameter of the additional plate is greater than or equal to a second outer diameter of the additional plate; The plate is thinner than the additional plate.

8. 10. The showerhead of claim 1, wherein the third material comprises a thermoplastic material and the plate comprises: a first layer including one or more recesses; a second layer that is flat; and a third layer including one or more recesses; Equipped with a shower head.

9. 9. The showerhead of claim 8, the recesses of the first layer and the third layer are aligned with one another; the recesses of the first layer and the third layer partially overlap; or The recesses in the first layer and the third layer do not overlap.

10. 10. The showerhead of claim 1 , wherein the base portion comprises: a first disc-shaped element including a groove proximate an outer diameter of the first disc-shaped element, the heater being disposed within the groove; a second disc-shaped element disposed on the first disc-shaped element and having an outer diameter equal to or smaller than the inner diameter of the groove; a cylindrical element disposed on the first disk-shaped element and having an inner diameter equal to or greater than an outer diameter of the groove; Equipped with the outer diameters of the bases of the first and second disk-shaped elements and the cylindrical element are equal; The showerhead, wherein the first and second disk-shaped elements and the cylindrical element are diffusion bonded.

11. 11. The showerhead of claim 10, wherein the first disc-shaped element comprises: a slot in the center of an upper surface of the first disc-shaped element; the slot is in fluid communication with the gas inlet and includes a plurality of grooves extending radially from the slot; the passage extends from a distal end of the groove downwardly to and through a bottom surface of the first disc-shaped element.

12. 11. The showerhead of claim 10, wherein a top end of the cylindrical element includes a flange extending radially outward, the showerhead further comprising a clamping ring having a vertical portion disposed over the heater and a horizontal portion attached to the flange.

13. 10. The showerhead of claim 1, the faceplate includes a plurality of grooves extending radially outward from a center of the faceplate; the grooves are of different lengths; the walls are vertical and concentric; The plurality of grooves intersect the plurality of walls.

14. 13. A processing chamber comprising the showerhead of claim 1 and a pedestal, the faceplate includes an annular recess along an outer diameter of the bottom surface; the showerhead includes an edge ring disposed within the annular recess; the edge ring is adjacent an outer edge of a top surface of the pedestal; A processing chamber, wherein a radially outward gas flow through a gap between the edge ring and the outer edge of the upper surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap toward a substrate positioned on the pedestal during substrate processing.

15. A shower head, a base portion having a first surface including a gas inlet and a second surface opposite the first surface, the base portion including a plurality of passages in fluid communication with the gas inlet; a faceplate having a side attached to the second surface of the base portion and a bottom surface including a plurality of outlets, the faceplate including a plurality of walls extending upwardly from the bottom surface and contacting the second surface of the base portion; a cooling plate disposed on the first surface of the base portion, the cooling plate including a conduit having an inlet for receiving a coolant and an outlet; a plate having a lower thermal conductivity than the faceplate and the cooling plate and disposed between the cooling plate and the base portion of the showerhead; A shower head equipped with

16. 16. The showerhead of claim 15, wherein the plate is made of a thermoplastic material, the plate comprising: a first layer including one or more recesses; a second layer that is flat; and a third layer including one or more recesses; Equipped with a shower head.

17. 16. The showerhead of claim 15, wherein the base portion comprises: a first disc-shaped element including a heater disposed in a groove proximate an outer diameter of the first disc-shaped element; a second disc-shaped element disposed on the first disc-shaped element and having an outer diameter equal to or smaller than the inner diameter of the groove; a cylindrical element disposed on the first disk-shaped element and having an inner diameter equal to or greater than an outer diameter of the groove; Equipped with a bottom of the cylindrical element and an outer diameter of the first disc-shaped element and the second disc-shaped element are equal.

18. 20. The showerhead of claim 17, wherein the first disk-shaped element comprises a slot in a center of a top surface of the first disk-shaped element, the slot including a plurality of grooves in fluid communication with the gas inlet and extending radially from the slot, the passages extending from a distal end of the grooves downwardly to and through a bottom surface of the first disk-shaped element.

19. 20. The showerhead of claim 17, wherein a top end of the cylindrical element includes a flange extending radially outward, the showerhead further comprising a clamping ring having a vertical portion disposed over the heater and a horizontal portion attached to the flange.

20. 16. The showerhead of claim 15, wherein the faceplate comprises: a plurality of grooves extending radially outward from a center of the faceplate, the grooves being of different lengths, the walls being perpendicular and concentric, and the grooves intersecting the walls; an annular recess along an outer diameter of the bottom surface, the annular recess including an edge ring that allows gas flow radially outward through a gap between the edge ring and an outer edge of a top surface of the pedestal; Including the shower head.

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