Device comprising robot arm with two substrate holding areas

Abstract

To provide substrate transport automation for suppressing work space volume or the like to minimum.SOLUTION: A device comprises: a drive part; a first robot arm comprising, a first upper arm, a first forearm, and a first end effector; and a second robot arm comprising, a second upper arm, a second forearm, and a second end effector. The first and second upper arms are connected to the drive part at a first rotary shaft, the first and second end effectors have respectively, two substrate holding areas. The first robot arm is configured to extend the first end effector from a first retreat position to a first extension position in a first direction, above the second end effector without moving the second robot arm. The second robot arm is configured to extend the second end effector from a second retreat position to a second extension position, in the first direction below the first end effector, without moving the first robot arm.SELECTED DRAWING: Figure 42

Description

[Technical field]

[0001] The disclosed embodiments relate to an apparatus having a robotic arm with two substrate holding areas.

[0002] Vacuum, atmospheric, and controlled environment processing for applications such as those associated with the manufacturing of semiconductor, LED (Light Emitting Diode), solar, MEMS (Micro Electro Mechanical Systems) or other devices utilizes robotics and other forms of automation to transport substrates and associated carriers to or from storage, processing, or other locations. Such transport of substrates may move individual substrates, groups of substrates, using a single arm carrying one or more substrates, or using multiple arms each carrying one or more substrates. Much of the manufacturing is performed in clean or vacuum environments where footprint and volume are at a premium, such as those associated with semiconductor manufacturing. Furthermore, much of the automated transport is performed where minimizing the transport time will result in reduced cycle times and increased throughput and utilization of the associated equipment. It is therefore desirable to provide substrate transport automation that minimizes the footprint and workspace volume required for a given range of transport applications and minimizes transport time. Abstract

[0003] The following summary is intended to be exemplary only and is not intended to limit the scope of the claims.

[0004] An example of an exemplary embodiment of an apparatus includes: Drive unit and; a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm connected to the drive at a first axis of rotation, the first end effector comprising two laterally spaced substrate holding areas; a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, the second upper arm connected to the drive at the first axis of rotation, the second end effector comprising two laterally spaced substrate holding areas; having the first robotic arm is configured to position the first end effector in a first retracted position overlying the second end effector, and the first robotic arm is configured to extend the first end effector from the first retracted position to a first extended position in a first direction above the second end effector without moving the second robotic arm; The second robotic arm is configured to position the second end effector in a second retracted position overlapping the first end effector, and the second robotic arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction below the first end effector without moving the first robotic arm.

[0005] Another apparatus, which is an example of an exemplary embodiment, includes: a drive section having a plurality of coaxial drive shafts; a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm connected to a first of the plurality of coaxial drive shafts, the first end effector comprising two laterally spaced substrate holding areas, the first forearm connected to the first end effector at a first wrist connection offset from a first centerline of the first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector, the second upper arm connected to a second one of the plurality of coaxial drive shafts, the second end effector comprising two laterally spaced substrate holding areas, and the second forearm connected to the second end effector at a second wrist connection offset from a second centerline of the second end effector; Equipped with the first robotic arm is configured to position the first end effector in a first retracted position overlying the second end effector, and the first robotic arm is configured to extend the first end effector in a first direction above the second end effector from the first retracted position to a first extended position; The second robotic arm is configured to position the second end effector in a second retracted position overlapping the first end effector, and the second robotic arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction beneath the first end effector.

[0006] In one aspect of the exemplary embodiment, the transport device includes at least one drive device, a first robot arm with a first upper arm, a first forearm, and a first end effector, and a second robot arm with a second upper arm, a second forearm, and a second end effector. The first upper arm is connected to the at least one drive device at a first rotation axis. The second upper arm is connected to the at least one drive device at a second rotation axis spaced apart from the first rotation axis. The first and second robot arms are configured to set the first and second end effectors in a first retracted position to at least partially stack a plurality of substrates disposed on the one and second end effectors one above the other. The first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths at least partially located directly above each other. The first and second robotic arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not above and below each other and is spaced apart from each other. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths. In another aspect of an exemplary embodiment, a method is provided that includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm and the first forearm having different effective lengths; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, the second upper arm and the second forearm having different effective lengths; connecting the first upper arm to at least one drive device at a first axis of rotation; and connecting the second upper arm to the at least one drive device at a second axis of rotation spaced from the first axis of rotation. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, and the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other. In another aspect of an exemplary embodiment, a method is provided that includes setting a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position to at least partially stack a plurality of substrates disposed on the end effectors, where the first robot arm includes a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to at least one actuator at a first axis of rotation, and the second robot arm includes a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the at least one actuator at a second axis of rotation spaced from the first axis of rotation. The method further includes moving the first and second robotic arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from a first retracted position, and moving the first and second robotic arms to move the first and second end effectors to extend them in at least a second direction along a second path that is not directly above and is spaced apart from each other.

[0007] In another aspect of the exemplary embodiment, the transport device includes a first robotic arm with a first upper arm, a first forearm, and a first end effector, a second robotic arm with a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms. The first upper arm is connected to the drive at a first axis of rotation. The second upper arm is connected to the drive at a second axis of rotation spaced from the first axis of rotation. The drive includes only three motors to rotate the first and second upper arms. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, and the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0008] In another aspect of an exemplary embodiment, a method includes setting a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position to at least partially stack a plurality of substrates disposed on the end effectors, where the first robot arm includes a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, and the second robot arm includes a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation. The method further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position, moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not above and spaced apart from each other, and rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation, wherein the moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using only three motors of the drive.

[0009] In another aspect of an exemplary embodiment, a method includes providing a first robotic arm with a first upper arm, a first forearm and a first end effector; providing a second robotic arm with a second upper arm, a second forearm and a second end effector; connecting the first upper arm to a drive at a first axis of rotation; and connecting the second upper arm to the drive at a second axis of rotation spaced from the first axis of rotation. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first and second robot arms are configured to be rotated from the first retracted position to extend the first and second end effectors in a first direction along parallel first paths located at least partially directly above one another, and the first and second robot arms are configured to be rotated to extend the first and second end effectors in at least one second direction along a second path not located above one another and spaced apart from one another. The drive comprises only three motors for rotating the first and second robot arms to extend the first and second end effectors and for rotating the first and second robot arms about a third axis of rotation spaced apart from the first and second axes of rotation.

[0010] In another aspect of the exemplary embodiment, an apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms. The first upper arm is connected to the drive at a first axis of rotation. The second upper arm is connected to the drive at a second axis of rotation spaced from the first axis of rotation. The drive includes five motors for rotating the first and second upper arms. A first of the motors is connected to the first and second robotic arms to rotate the first and second robotic arms about a third axis of rotation spaced from the first and second axes of rotation, a second and third motor is connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motor is connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, and the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0011] In another aspect of an exemplary embodiment, a method includes setting a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position to at least partially stack a plurality of substrates disposed on the end effectors, where the first robot arm includes a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, and the second robot arm includes a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation. The method further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position, moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not above and spaced apart from each other, and rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation. The moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using five motors of the drive. A first of the motors is configured to be connected to the first and second robotic arms to rotate the first and second robotic arms about the third axis of rotation, a second and third motors are configured to be connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motors are configured to be connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm.

[0012] In another aspect of an exemplary embodiment, a method includes providing a first robotic arm with a first upper arm, a first forearm and a first end effector; providing a second robotic arm with a second upper arm, a second forearm and a second end effector; connecting the first upper arm to a drive at a first axis of rotation; and connecting the second upper arm to the drive at a second axis of rotation spaced from the first axis of rotation. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first and second robot arms are configured to be rotated from the first retracted position to extend the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to be rotated to extend the first and second end effectors in at least one second direction along a second path that is not directly above and spaced apart from each other. The drive comprises five motors for rotating the first and second robot arms to extend the first and second end effectors and for rotating the first and second robot arms about a third axis of rotation spaced apart from the first and second axes of rotation. A first of the motors is configured to be connected to the first and second robotic arms to rotate the first and second robotic arms about the third axis of rotation, a second and third motors are configured to be connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motors are configured to be connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm.

[0013] In another aspect of the exemplary embodiment, an apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms. The first upper arm is connected to the drive at a first axis of rotation. The second upper arm is connected to the drive at a second axis of rotation spaced apart from the first axis of rotation. The drive includes four motors for rotating the first and second upper arms. A first of the motors is connected to the first upper arm, a second motor is connected to the second upper arm, a third motor is connected to the first forearm, and a fourth motor is connected to the second forearm, the third and fourth motors being aligned on a common axis spaced apart from the first and second axes of rotation. The first motor is aligned with the first axis of rotation and the second motor is aligned with the second axis of rotation. The first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not above and is spaced apart from each other. [Brief description of the drawings]

[0014] The foregoing aspects and other features are explained in the following description, which refers to the accompanying drawings, in which:

[0015] [Figure 1] FIG. 1A is a top view of the transport device.

[0016] FIG. 1B is a side view of the transport device.

[0017] [Figure 2A] FIG. 2A is a schematic top partial view of the transport device.

[0018] [Figure 2B] FIG. 2B is a schematic side partial view of the transport device.

[0019] [Diagram 3] FIG. 3A is a top view of the transport apparatus.

[0020] FIG. 3B is a top view of the transport device.

[0021] FIG. 3C is a top view of the transport device.

[0022] [Figure 4] FIG. 4 is a graph diagram.

[0023] [Diagram 5] FIG. 5A is a top view of the transport device.

[0024] FIG. 5B is a side view of the transport device.

[0025] [Figure 6A] FIG. 6A is a schematic top partial view of the transport device.

[0026] [Figure 6B] FIG. 6B is a schematic side partial view of the transport device.

[0027] [Figure 7] FIG. 7A is a top view of the transport apparatus.

[0028] FIG. 7B is a top view of the transport device.

[0029] FIG. 7C is a top view of the transport apparatus.

[0030] [Figure 8] FIG. 8 is a graph diagram.

[0031] [Figure 9] FIG. 9 is a schematic side view of a portion of the transport device.

[0032] [Figure 10] FIG. 10A is a top view of the transport device.

[0033] FIG. 10B is a side view of the transport device.

[0034] [Figure 11] FIG. 11A is a top view of the transport device.

[0035] FIG. 11B is a side view of the transport device.

[0036] [Figure 12] FIG. 12 is a schematic side partial view of the transport device.

[0037] [Figure 13] FIG. 13 is a schematic side partial view of the transport device.

[0038] [Figure 14] FIG. 14A is a top view of the transport device.

[0039] FIG. 14B is a top view of the transport device.

[0040] FIG. 14C is a top view of the transport device.

[0041] [Figure 15] FIG. 15A is a top view of the transport device.

[0042] FIG. 15B is a side view of the transport device.

[0043] [Figure 16] FIG. 16A is a top view of the transport device.

[0044] FIG. 16B is a side view of the transport device.

[0045] [Figure 17] FIG. 17A is a top view of the transport apparatus.

[0046] FIG. 17B is a side view of the transport device.

[0047] [Figure 18] FIG. 18 is a schematic side partial view of the transport device.

[0048] [Figure 19] FIG. 19 is a schematic side partial view of the transport device.

[0049] [Figure 20] FIG. 20A is a top view of the transport device.

[0050] FIG. 20B is a top view of the transport device.

[0051] FIG. 20C is a top view of the transport device.

[0052] [Figure 21] FIG. 21A is a top view of the transport device.

[0053] FIG. 21B is a side view of the transport device.

[0054] [Figure 22] FIG. 22A is a top view of the transport apparatus.

[0055] FIG. 22B is a side view of the transport device.

[0056] [Diagram 23] FIG. 23 is a schematic side partial view of the transport device.

[0057] [Figure 24] FIG. 24A is a top view of the transport apparatus.

[0058] FIG. 24B is a top view of the transport apparatus.

[0059] FIG. 24C is a top view of the transport apparatus.

[0060] [Diagram 25] FIG. 25A is a top view of the transport apparatus.

[0061] FIG. 25B is a side view of the transport device.

[0062] [Figure 26] FIG. 26A is a top view of the transport apparatus.

[0063] FIG. 26B is a top view of the transport apparatus.

[0064] FIG. 26C is a top view of the transport apparatus.

[0065] [Figure 27] FIG. 27A is a top view of the transport apparatus.

[0066] FIG. 27B is a side view of the transport device.

[0067] [Figure 28] FIG. 28A is a top view of the transport apparatus.

[0068] FIG. 28B is a side view of the transport device.

[0069] [Figure 29] FIG. 29A is a top view of the transport apparatus.

[0070] FIG. 29B is a top view of the transport apparatus.

[0071] FIG. 29C is a top view of the transport apparatus.

[0072] [Diagram 30] FIG. 30A is a top view of the transport device.

[0073] FIG. 30B is a side view of the transport device.

[0074] [Diagram 31] FIG. 31A is a top view of the transport device.

[0075] FIG. 31B is a side view of the transport device.

[0076] [Diagram 32] FIG. 32A is a top view of the transport apparatus.

[0077] FIG. 32B is a top view of the transport device.

[0078] FIG. 32C is a top view of the transport apparatus.

[0079] FIG. 32D is a top view of the transport apparatus.

[0080] [Diagram 33] FIG. 33A is a top view of the transport apparatus.

[0081] FIG. 33B is a side view of the transport device.

[0082] [Diagram 34] FIG. 34A is a top view of the transport apparatus.

[0083] FIG. 34B is a top view of the transport apparatus.

[0084] FIG. 34C is a top view of the transport apparatus.

[0085] [Diagram 35] FIG. 35A is a top view of the transport apparatus.

[0086] FIG. 35B is a side view of the transport device.

[0087] [Diagram 36] FIG. 36 is a top view of the transport device.

[0088] [Figure 37] FIG. 37A is a top view of the transport apparatus.

[0089] FIG. 37B is a side view of the transport device.

[0090] [Figure 38] FIG. 38A is a top view of the transport apparatus.

[0091] FIG. 38B is a side view of the transport device.

[0092] [Figure 39] FIG. 39 is a top view of the transport device.

[0093] [Diagram 40] FIG. 40A is a top view of the transport device.

[0094] FIG. 40B is a side view of the transport device.

[0095] [Diagram 41] FIG. 41 is a top view of the transport device.

[0096] [Diagram 42] FIG. 42 is a top view of the transport device.

[0097] [Diagram 43] FIG. 43A is a top view of the transport apparatus.

[0098] FIG. 43B is a side view of the transport device.

[0099] [Diagram 44] FIG. 44 is a top view of the transport device.

[0100] [Diagram 45] FIG. 45 is a top view of the transport device.

[0101] [Figure 46] FIG. 46A is a top view of the transport apparatus.

[0102] FIG. 46B is a side view of the transport device.

[0103] [Figure 47] FIG. 47A is a top view of the transport apparatus.

[0104] FIG. 47B is a side view of the transport device.

[0105] [Figure 48] FIG. 48 is a top view of the transport device.

[0106] [Figure 49] FIG. 49 is a top view of the transport device.

[0107] [Figure 50] FIG. 50A is a top view of the transport apparatus.

[0108] FIG. 50B is a side view of the transport device.

[0109] [Figure 51] FIG. 51 is a top view of the transport device.

[0110] [Figure 52] FIG. 52A is a top view of the transport apparatus.

[0111] FIG. 52B is a side view of the transport device.

[0112] [Diagram 53] FIG. 53 is a top view of the transport device.

[0113] [Figure 54] FIG. 54A is a top view of the transport apparatus.

[0114] FIG. 54B is a side view of the transport device.

[0115] [Figure 55] FIG. 55A is a top view of the transport apparatus.

[0116] FIG. 55B is a top view of the transport apparatus.

[0117] FIG. 55C is a top view of the transport apparatus.

[0118] [Figure 56] FIG. 56A is a top view of the transport apparatus.

[0119] FIG. 56B is a side view of the transport device.

[0120] [Figure 57] FIG. 57A is a top view of the transport apparatus.

[0121] FIG. 57B is a top view of the transport apparatus.

[0122] FIG. 57C is a top view of the transport apparatus.

[0123] [Figure 58] FIG. 58A is a top view of the transport apparatus.

[0124] FIG. 58B is a side view of the transport device.

[0125] [Figure 59] FIG. 59A is a top view of the transport apparatus.

[0126] FIG. 59B is a top view of the transport apparatus.

[0127] FIG. 59C is a top view of the transport apparatus.

[0128] [Figure 60] FIG. 60A is a top view of the transport device.

[0129] FIG. 60B is a side view of the transport device.

[0130] [Figure 61] FIG. 61A is a top view of the transport device.

[0131] FIG. 61B is a top view of the transport device.

[0132] FIG. 61C is a top view of the transport device.

[0133] [Figure 62] FIG. 62 is a top view of the transport device.

[0134] [Figure 63] FIG. 63 illustrates an exemplary pulley.

[0135] [Figure 64] FIG. 64 is a top view of the transport device.

[0136] [Figure 65] FIG. 65 is a top view of the transport device.

[0137] [Fig. 66A-B] FIG. 66A is a top view of the transport apparatus.

[0138] FIG. 66B is an isometric view of the transport apparatus.

[0139] [Fig. 66C-D] FIG. 66C is an end view of the delivery device.

[0140] FIG. 66D is a side view of the transport device.

[0141] [Fig. 67A-B] FIG. 67A is a top view of the transport apparatus.

[0142] FIG. 67B is an isometric view of the transport apparatus.

[0143] [Fig. 67C-D] FIG. 67C is an end view of the delivery device.

[0144] FIG. 67D is a side view of the transport device.

[0145] [Figure 68A] FIG. 68A is a top view of the transport apparatus.

[0146] [Figure 68B] FIG. 68B is a top view of the transport apparatus.

[0147] [Figure 69] 69A-F are top views of the transport apparatus.

[0148] [Figure 70] 70A-F are top views of the transport apparatus.

[0149] [Figure 71] 71A-E are top views of the transport apparatus.

[0150] [Fig. 72A-B] FIG. 72A is a top view of the transport device, and FIG. 72B is a side view of the transport device.

[0151] [Fig. 72C-D] FIG. 72C is a top view of the transport device, and FIG. 72D is a side view of the transport device.

[0152] [Fig. 73A-B] FIG. 73A is a top view of the transport device, and FIG. 73B is a side view of the transport device.

[0153] [Fig. 73C-D] FIG. 73C is a top view of the transport device, and FIG. 73D is a side view of the transport device.

[0154] [Fig. 74A] FIG. 74A is a top view of the transport apparatus.

[0155] [Fig. 74B] FIG. 74B is a top view of the transport apparatus.

[0156] [Figure 75] 75A-F are top views of the transport apparatus.

[0157] [Figure 76A] FIG. 76A is a top view of the transport apparatus.

[0158] [Figure 76B] FIG. 76B is a top view of the transport apparatus.

[0159] [Figure 76C] FIG. 76C is a top view of the transport apparatus.

[0160] [Fig. 76D] FIG. 76D is a top view of the transport apparatus.

[0161] [Fig. 77A-B] FIG. 77A is a top view of the transport device, and FIG. 77B is a side view of the transport device.

[0162] [Fig. 77C-D] FIG. 77C is a top view of the transport device, and FIG. 77D is a side view of the transport device.

[0163] [Figure 78] FIG. 78A is a top view of the transport device, and FIG. 78B is a side view of the transport device.

[0164] [Figure 79A] FIG. 79A is a top view of the transport apparatus.

[0165] [Figure 79B] FIG. 79B is a top view of the transport apparatus.

[0166] [Figure 80] FIG. 80A is a top view of the transport apparatus.

[0167] 80B is a top view of the transport device.

[0168] In addition to the embodiments disclosed below, the disclosed embodiments are capable of other embodiments and can be practiced or carried out in various ways. It is therefore to be understood that the disclosed embodiments are not limited in their application to the details of construction and the arrangement of components set forth in the following description or illustrated in the drawings. If only one embodiment is described herein, the claims thereto should not be limited to that embodiment. Moreover, the claims should not be read restrictively unless there is clear and convincing evidence expressing a definite exclusion, limitation, or disclaimer.

[0169] 1A and 1B, a top view and a side view, respectively, of a robot 10 having a drive 12 and an arm 14 are shown. The arm 14 is shown in a retracted position. The arm 14 has an upper arm or first link 16 rotatable about a central rotation axis 18 of the drive 12. The arm 14 further has a forearm or second link 20 rotatable about an elbow rotation axis 22. The arm 14 further has an end effector or third link 24 rotatable about a wrist rotation axis 26. The end effector 24 supports a substrate 28. As will be described, the arm 14 is configured to cooperate with the drive 12 such that the substrate 28 is transported along a radial path 30 that may coincide (as seen in FIG. 1A) with a linear path 32 that coincides with the central rotation axis 18 of the drive 12, or a path parallel to the linear path 32, e.g., paths 34, 36 or otherwise. In the illustrated embodiment, the joint-to-joint length of the forearm or second link 20 is greater than the joint-to-joint length of the upper arm or first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in joint-to-joint length of the forearm 20 and the upper arm 14. As described in more detail below, the lateral offset 38 is maintained substantially constant during extension and retraction of the arm 14, thereby moving the substrate 28 along a linear path without rotation of the substrate 28 or end effector 24 relative to the linear path. This is accomplished using the internal structure of the arm 14, as described, without an additional control axis to control the rotation of the end effector 24 at the wrist 26 relative to the forearm 20. In one aspect of the embodiment disclosed with respect to FIG. 1A, the center of mass of the third link or end effector 24 may be at the wrist centerline or axis of rotation 26. Alternatively, the center of mass of the third link or end effector 24 may lie along a path 40 that is offset (38) from the central axis of rotation 18. In this way, disturbances to the bands constraining the end effector 24 to the links 16, 20 due to moments applied as a result of the mass being otherwise offset during extension and retraction of the arm can be minimized.Here, the center of mass may be determined with or without the substrate present, or somewhere in between. Alternatively, the center of mass of the third link or end effector 24 may be at any suitable location. In the illustrated embodiment, the substrate transport apparatus 10 transports the substrate 28 using a movable arm assembly 14 coupled to the drive 12 on a central rotation axis 18. As can be seen in FIGS. 3A-3C, the substrate support 24 is coupled to the arm assembly 14 on a wrist rotation axis 26, and the arm assembly 14 rotates about the central rotation axis 18 during extension and retraction. The wrist rotation axis 26 moves along a radial path relative to the central rotation axis 18, e.g., wrist path 40, parallel to and offset from the path 30, 34, or 36, e.g., 38, during extension and retraction. The substrate support 24 similarly moves parallel to the radial path 30 without rotation during extension and retraction. As described in more detail in other aspects of the disclosed embodiments, the principles and structures for constraining the end effector to move in an almost purely radial motion may be applied when the length of the forearm is less than the length of the upper arm. Furthermore, this feature may be applied when multiple substrates are handled by the end effector. Furthermore, this feature may be applied when a second arm is used in connection with the drive to handle one or more additional substrates. Thus, all such variations may be included.

[0170] 2A and 2B, there are shown partial schematic top and side views, respectively, of the system 10 illustrating the internal configuration used to drive the individual links of the arm 14 shown in FIGS. 1A and 1B. The drive 12 includes first and second motors 52, 54 with corresponding first and second encoders 56, 58 coupled to a housing 60 and driving first and second shafts 62, 64, respectively, where the shaft 62 may be coupled to a pulley 66 and the shaft 64 may be coupled to the upper arm 16, where the shafts 62, 64 may be concentric or otherwise arranged. In alternative embodiments, any suitable drive may be provided. The housing 60 may be in communication with a chamber 68, where the bellows 70, the chamber 68, and the interior portion of the housing 60 isolate a vacuum environment 72 from an atmospheric environment 74. The housing 60 may slide in the z-direction on a slide 76 as a movable bed, and a lead screw or other suitable vertical or linear z-drive 78 may be provided to selectively move the housing 60, and the arm 14 coupled thereto, in the z (80) direction. In the illustrated embodiment, the upper arm 16 is driven by the motor 54 about a central axis of rotation 18. Similarly, the forearm is driven by the motor 52 through a band drive having pulleys 66, 82 and bands 84, 86, such as conventional circular pulleys and bands. In alternative aspects, any suitable structure for driving the forearm 20 relative to the upper arm 16 may be provided. The ratio of pulleys 66 and 82 may be 1:1, 2:1, or any suitable ratio. The third link 24 with the end effector may be constrained by a band drive having a pulley 88 grounded to the link 16, a pulley 90 grounded to the end effector or the third link 24, and bands 92, 94 constraining the pulleys 88 and 90. As will be explained, the ratio between pulleys 88, 90 does not have to be constant in order for third link 24 to follow a radial path without rotation during extension and retraction of arm 14. This may be achieved if pulleys 88, 90 may be one or more non-circular pulleys, such as two non-circular pulleys, or if one of pulleys 88, 90 is circular and the other is non-circular.Alternatively, any suitable coupling or linkage may be provided to constrain the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley counteracts the effects of the unequal lengths of the upper arm 16 and the forearm 20, thereby allowing the end effector 24 to point in the radial direction 30 regardless of the position of the first two links 16, 20. This embodiment is described with respect to pulley 90 being non-circular and pulley 88 being circular. Alternatively, pulley 88 may be non-circular and pulley 90 may be circular. Alternatively, pulleys 88 and 92 may be non-circular or any suitable coupling may be provided to constrain the links of the arm 14 as described. By way of example, non-circular pulleys or sprockets are described in U.S. Patent No. 4,865,577, issued September 12, 1989, and entitled "Noncircular Drive," which is incorporated herein by reference in its entirety. Alternatively, any suitable coupling may be provided to constrain the links of the arm 14 as described, for example, any suitable variable ratio drive or coupling, interlocking gears or sprockets, cams or otherwise may be used alone or in combination with a suitable linkage or other coupling. In the illustrated embodiment, the elbow pulley 88 is coupled to the upper arm 16 and is shown round or circular, and the wrist pulley 90 coupled to the wrist or third link 24 is shown non-circular. The wrist pulley shape may be non-circular and symmetrical about a line 96 perpendicular to the radial trajectory 30. The line 96 may also coincide with or be parallel to a line between the two pulleys 88, 90 when the forearm 20 and upper arm 16 overlap one another with the wrist axis 26 closest to the shoulder axis 18, as seen in FIG. 3B, for example. The configuration of pulley 90 is such that bands 92, 94 remain taut as arm 14 extends and retracts, establishing contact points 98, 100 on opposite sides of pulley 90 that vary in radial distance 102, 104 from wrist rotation axis 26.For example, in the orientation shown in FIG. 3B, each of the contact points 98, 100 of the two bands on the pulley are at equal radial distances 102, 104 from the wrist rotation axis 26. This is further explained in FIG. 4, which shows the respective ratios. For the arm 14 to rotate, both of the robot's drive shafts 62, 64 must move the same amount in the direction of the arm's rotation. For the end effector 24 to extend and retract radially along a linear path, the two drive shafts 62, 64 must move in coordination, for example, according to the exemplary inverse kinematic equations presented later in this section. Here, the substrate transport apparatus 10 is configured to transport a substrate 28. The forearm 20 is rotatably coupled to the upper arm 16 and rotatable about an elbow axis 22 offset from the central axis 18 by an upper arm link length. The end effector 24 is rotatably coupled to the forearm 20 and rotatable about a wrist axis 26 offset from the elbow axis 22 by a forearm link length. The wrist pulley 90 is fixed to the end effector 24 and coupled to the elbow pulley 88 using bands 92, 94. Here, the forearm link length differs from the upper arm link length, and the end effector is constrained relative to the upper arm by the elbow pulley, wrist pulley, and bands, so that the substrate moves along a linear radial path 30 relative to the central axis 18. Here, the substrate support 24 is coupled to the upper arm 16 using a substrate support coupling 92 and is driven about the wrist rotation axis 26 by the relative motion between the forearm 20 and the upper arm 16 about the elbow rotation axis 22. Figures 3A, 3B, and 3C show the extension motion of the robot of Figures 1 and 2. Figure 3A shows a top view of the robot 10 with the arm 14 in its retracted position. Figure 3B shows the partially extended arm 14 with the forearm 20 aligned over the upper arm 16, illustrating that the lateral offset 38 of the end effector corresponds to the difference in joint length of the forearm 20 and the upper arm 16. FIG. 3C shows the arm 14 in an extended position, but not fully extended.

[0171] Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative configurations. The following example equations may be used to determine the position of the end effector as a function of the motor positions: x2 = l1 cos θ1 + l2 cos θ2 (1.1) y2 = l1 sin θ1 + l2 sin θ2 (1.2) R2 = sqrt(x2 2 +y2 2 ) (1.3) T2=atan2(y2,x2) (1.4) α3=asin(d3 / R2), where d3=l2-l1(1.5) α 12 =θ1-θ2(1.6) α 12 If <π, then R = sqrt(R2 2 -d3 2 )+l3, T=T2+α3, otherwise R=-sqrt(R2 2 -d3 2 )+l3, T=T2-α3+π (1.7)

[0172] Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative configurations. The following example equations may be utilized to determine the positions of the motors to achieve a specified position of the end effector: x3=RcosT (1.8) y3=RsinT (1.9) x2=x3-l3cosT+d3sinT (1.10) y2=y3-l3sinT-d3cosT (1.11) R2 = sqrt(x2 2 +y2 2 ) (1.12) T2=atan2(y2,x2) (1.13) α1=acos((R2 2 +l1 2 -l2 2 ) / (2R2l1)) (1.14) α2=acos((R2 2 -l1 2 +l2 2 ) / (2R2l2)) (1.15) If R>l3, then θ1=T2+α1, θ2=T2-α2; otherwise, θ1=T2-α1, θ2=T2+α2(1.16).

[0173] The following terms may be used in the kinematic equations: d3=lateral offset of the end effector (m) l1 = joint length of the first link (m) l2 = joint length of the second link (m) l3 = length of the third link with the end effector, measured from the wrist joint to a reference point on the end effector (m) R = radial position of the end effector (m) R2 = radial coordinate of the wrist joint (m) T = angular position of the end effector (rad) T2 = Wrist joint angular coordinate (rad) x2 = x coordinate of wrist joint (m) x3 = x coordinate of the end effector (m) y2 = y coordinate of wrist joint (m) y3 = y coordinate of the end effector (m) θ1 = angular position of the drive shaft connected to the first link (rad) θ2 = angular position of the drive shaft connected to the second link (rad).

[0174] The above example kinematic equations may be used to design a suitable drive, such as a band drive that constrains the orientation of the third link 24 so that the end effector 24 points in the radial direction 30 regardless of the positions of the first two links 16, 20 of the arm 14.

[0175] Referring to FIG. 4, the transmission ratio r of the band drive that constrains the orientation of the third link 31A plot 120 of 122 is shown as a function of the normalized extension of the arm measured from the center of the robot to the base of the end effector, i.e., (R-l3) / l1. 31 is the angular velocity ω of the pulley attached to the third link 32 The angular velocity ω of the pulley attached to the first link 12 Both angular velocities are defined relative to the second link. The figure shows the transmission ratio r for different l2 / l1 (from 0.5 to 1.0 in increments of 0.1, and from 1.0 to 2.0 in increments of 0.2). 31 The profile of the non-circular pulley(s) is the transmission ratio r according to FIG. 31 Examples of profiles are shown in Figures 2A, 54A, and 54B.

[0176] In the disclosed embodiments, a longer reach may be obtained compared to an equal-link arm with the same storage volume while using one or more non-circular pulleys or other suitable devices to constrain the motion of the end effector. In alternative aspects, the first link may be driven by a motor, either directly or through any type of coupling or transmission mechanism. Any suitable transmission ratio may be used here. Alternatively, the band drive actuating the second link may be replaced by any other mechanism with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. Similarly, the band drive constraining the third link may be replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gears, linkage-based mechanism, or any combination of the above. Here, the end effector may be radially oriented, but need not be. For example, the end effector may be positioned with any suitable offset relative to the third link and may be oriented in any suitable direction. Furthermore, in alternative aspects, the third link may support multiple end effectors or substrates. Any suitable number of end effectors and / or material holders can be carried by the third link. Additionally, in alternative embodiments, the inter-articular length of the forearm can be less than the inter-articular length of the upper arm, for example, as can be seen in FIG. 4 by l2 / l1<1, and as can be seen and described in FIGS. 25-34 and 43-53.

[0177] 5A and 5B, which respectively show a top view and a side view of a robot 150 incorporating some features of the robot 10. The robot 150 is shown having a drive 12 and an arm 152 shown in a retracted position. The arm 152 has similar features to those of the arm 14, except as described herein. By way of example, the inter-joint length of the forearm or second link 158 is greater than the inter-joint length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in inter-joint length of the forearm 158 and the upper arm 154. With further reference to FIGS. 6A and 6B, the drive 150 is shown having an internal configuration used to drive the individual links of the arm. In the illustrated embodiment, the upper arm 154 is driven by one motor via a shaft 64, as described with respect to the arm 14 of FIGS. 1 and 2. Similarly, the end effector or third link 162 is constrained to the upper arm 154 by a non-circular pulley mechanism as described with respect to the arm 14 of FIGS. 1 and 2. An exemplary difference between the arm 152 and the arm 14 is seen in that the forearm 158 is coupled to the shaft 62 and another motor of the drive 12 via a band mechanism having at least one non-circular pulley. Here, the linkage or band mechanism may have features as described herein or as described with respect to the pulley drives 88, 90 of FIGS. 1 and 2. The linkage or band mechanism has a non-circular pulley 202 coupled to the shaft 62 of the drive 12 and is rotatable with the shaft 62 about the axis 18. The band mechanism of the arm 152 further has a circular pulley 204 coupled to the upper arm link 158 and rotatable about the elbow axis 156. The circular pulley 204 is coupled to the non-circular pulley 202 via bands 206, 208. Here, the bands 206, 208 may be held taut by the profile of the non-circular pulley 202. In alternative embodiments, any combination of pulleys or other suitable transmission devices may be provided.Pulleys 202 and 204 and bands 206, 208 cooperate such that rotation of upper arm 154 relative to pulley 202 (e.g., holding pulley 202 stationary while rotating upper arm 154) causes wrist joint 160 to extend and retract along a straight line parallel to and offset (168) from a desired radial path 180 of the end effector. Here, third link 162 with end effector is constrained to point the end effector in radial direction 180 regardless of the position of the first two links 154, 158, for example by a band drive as described for arm 14, with at least one non-circular pulley. Any suitable coupling may be provided here for constraining the links of arm 14 as described, for example one or more suitable variable ratio drives or couplings, coupling gears or sprockets, cams or otherwise, may be used alone or in combination with suitable linkages or other couplings. In the illustrated embodiment, the elbow pulley 204 is coupled to the forearm 158 and is shown as round or circular, while the shoulder pulley 202 coupled to the shaft 62 is shown as non-circular. The shape of the shaft pulley may be non-circular and symmetrical about a line 218 perpendicular to the radial trajectory 180. The line 218 may also coincide with or be parallel to a line between the two pulleys 202, 204 when the forearm 158 and upper arm 154 overlap each other with the wrist axis 160 closest to the shoulder axis 18, as seen in FIG. 7B, for example. The shape of the pulley 202 is such that the bands 206, 208 remain taut as the arm 152 extends and retracts, establishing contact points 210, 212 on opposite sides of the pulley 202 that change radial distance 214, 216 from the shoulder axis of rotation 18. For example, in the orientation shown in Figure 7B, each of the two band contact points 210, 212 on the pulley are at equal radial distances 214, 216 from the shoulder rotation axis 18. This is further explained in Figure 8, which shows the respective ratios. For the arm 152 to rotate, both of the robot's drive shafts 62, 64 must move the same amount in the direction of the arm's rotation.For the end effector 162 to extend and retract radially along a linear path, the two drive shafts 62, 64 must move in coordination, for example, according to the exemplary inverse kinematic equations presented later in this section. For example, the drive shaft coupled to the upper arm must move according to the inverse kinematic equations presented below, while the other motor is held stationary. Figures 7A, 7B, and 7C show the extension motion of the robot 150 of Figures 5 and 6. Figure 7A shows a top view of the robot with the arm 152 in its retracted position. Figure 7B shows a partially extended arm with the forearm aligned over the upper arm, illustrating that the lateral offset 168 of the end effector 162 corresponds to the difference in joint-to-joint length of the forearm 158 and the upper arm 154. Figure 7C shows the arm in an extended position, but not fully extended.

[0178] Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative configurations. The following example equations may be used to determine the position of the end effector as a function of the motor positions: d1=l1sin(θ1-θ2) (2.1) If (θ1-θ2)<π / 2, then θ 21 =θ2-l2asin((d1+d3) / l2), otherwise θ 21 =θ2+l2asin((d1+d3) / l2)+π (2.2) x2=l1cosθ1+l2cosθ 21 (2.3) y2=l1sinθ1+l2sinθ 21 (2.4) R2 = sqrt(x2 2 +y2 2 ) (2.5) T2=atan2(y2,x2) (2.6) If (θ1-θ2)<π / 2, then R=sqrt(R2 2 -d3 2 )+l3, T=θ2, otherwise R=-sqrt(R2 2 -d3 2) + l3, T = θ2 (2.7)

[0179] Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative configurations. The following example equations may be utilized to determine the positions of the motors to achieve a specified position of the end effector: x3=RcosT (2.8) y3=RsinT (2.9) x2=x3-l3cosT+d3sinT (2.10) y2=y3-l3sinT-d3cosT (2.11) R2 = sqrt(x2 2 +y2 2 ) (2.12) T2=atan2(y2,x2) (2.13) α1=acos((R2 2 +l1 2 -l2 2 ) / (2R2l1)) (2.14) If R>l3, then θ1=T2+α1, θ2=T, otherwise θ1=T2-α1, θ2=T (2.15)

[0180] The following terms may be used in the kinematic equations: d3=lateral offset of the end effector (m) l1 = joint length of the first link (m) l2 = joint length of the second link (m) l3 = length of the third link with the end effector, measured from the wrist joint to a reference point on the end effector (m) R = radial position of the end effector (m) R2 = radial coordinate of the wrist joint (m) T = angular position of the end effector (rad) T2 = Wrist joint angular coordinate (rad) x2 = x coordinate of wrist joint (m) x3 = x coordinate of the end effector (m) y2 = y coordinate of wrist joint (m) y3 = y coordinate of the end effector (m) θ1 = angular position of the drive shaft connected to the first link (rad) θ2 = angular position of the drive shaft connected to the second link (rad).

[0181] The above kinematic equations may be used to design a band drive that controls the second link 158 such that rotation of the upper arm 154 causes the wrist joint 160 to extend and retract along a line parallel to the desired radial path 180 of the end effector 162.

[0182] Next, referring to FIG. 8, the transmission ratio r of the band drive device that drives the second link is 20 A graph 270 is shown showing the transmission ratio r 272 as a function of the normalized extension of the arm measured from the center of the robot to the root of the end effector, i.e., (R-l3) / l1. 20 is the angular velocity ω of the pulley attached to the second link 21 The angular velocity ω of the pulley attached to the second motor 01 The angular velocity is defined relative to the first link. The figure shows the transmission ratio r for different l2 / l1. 20 is shown in the graph.

[0183] The profile of the non-circular pulley or pulleys for the band drive driving the second link is determined according to the transmission ratio r according to FIG. 20 272. An example of a pulley profile is shown in Figure 6A and described in Figures 55A and 55B.

[0184] The transmission ratio r of the band drive that constrains the orientation of the third link 162 31 may be the same as the transmission ratio shown in FIG. 4 for the embodiment of FIGS. 1 and 2. 31 is the angular velocity of the pulley attached to the third link, ω 32 , the angular velocity of the pulley attached to the first link, ω 12Both angular velocities are defined relative to the second link. The figure shows the transmission ratio r for different l2 / l1 (from 0.5 to 1.0 in increments of 0.1, and from 1.0 to 2.0 in increments of 0.2). 31 The profile of the non-circular pulley or pulleys for the band drive constraining the third link 162 is shown in FIG. 31 An example of a pulley profile is shown in Figure 6A.

[0185] In the illustrated embodiment, a longer reach may be obtained compared to an equal-link arm with the same storage volume while using a non-circular pulley or other suitable mechanism to constrain the end effector as described. In comparison to the embodiment disclosed in Figs. 1 and 2, another band drive with a non-circular pulley may be provided in the shoulder axis 18 instead of the conventional band drive. In an alternative embodiment, the first link may be driven by a motor, either directly or through any type of coupling or transmission mechanism, for example, any suitable transmission ratio may be used. Alternatively, the band drive that actuates the second link and constrains the third link may be replaced by any other mechanism with equivalent functionality, such as a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above. Furthermore, the third link may be constrained to hold the end effector radially via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor, as shown in Fig. 9. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. In addition, the end effectors may be, but need not be, radially oriented. For example, the end effectors may be positioned with any suitable offset relative to the third link and may be oriented in any suitable direction. In alternative embodiments, the third link may carry more than one end effector or substrate, where any suitable number of end effectors and / or material holders can be supported by the third link. Additionally, the inter-articular length of the forearm may be less than the inter-articular length of the upper arm, for example, as represented in FIG. 8 by l2 / l1<1.

[0186] 9, an alternative robot 300 is shown. In the robot 300, the third link may be constrained to hold the end effector radially via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor. The robot 300 is shown having a drive 12 and an arm 302. The arm 302 may have an upper arm or first link 304 coupled to the shaft 64 and rotatable about a central axis or shoulder axis 18. The arm 302 has a forearm or second link 308 rotatably coupled to the upper arm 304 at an elbow axis 306. The links 304, 308 may be of different lengths as discussed above. A third link or end effector 312 is rotatably coupled to the second link or forearm 308 at a wrist axis 310, and the end effector 312 can transport the substrate 28 along a radial path without rotation due to the links 304, 308 having unequal link lengths as described above. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314, 316, where the pulley 314 may be circular and the pulley 316 may be non-circular. Here, the circular pulley 314 constrains the third link 312 to hold the end effector 312 radially via a conventional two-stage (318, 320) circular band mechanism that synchronizes the third link 312 to a pulley driven by the shaft 62. The two-stage mechanism 318, 320 has a pulley 314 coupled to an elbow pulley 324 by a band 322. Elbow pulley 324 is coupled to elbow pulley 326, which is coupled to wrist pulley 328 via band 330. Forearm 308 may further include elbow pulley 332, which may be circular and coupled to shoulder pulley 316 via band 334. Shoulder pulley 316 may be non-circular and coupled to pulley 314 and shaft 62.

[0187] The disclosed embodiments may be further embodied with respect to a robot having a robot drive with additional axes, where the arm coupled to the robot drive may have additional independently operable end effectors capable of transporting one or more substrates. As an example, an arm may be provided having two independently operable arm linkages or a "dual arm" configuration, where each independently operable arm may have an end effector configured to support one, two, or any suitable number of substrates. Here, and as described below, each independently operable arm may have first and second links with different link lengths, where the end effectors coupled to the links and the supported substrates operate and follow paths as described above. Here, the substrate transporter may have first and second independently operable arm assemblies transporting first and second substrates and coupled to a drive on a common axis of rotation. The first and second substrate supports are coupled to the first and second arm assemblies on first and second wrist axes of rotation, respectively. One or both of the first and second arm assemblies rotate about a common axis of rotation during extension and retraction. The first and second wrist axes of rotation move parallel to a radial path relative to the common axis of rotation and along first and second wrist paths offset from the radial path during extension and retraction. The first and second substrate supports move parallel to the radial path without rotation during extension and retraction. Below are provided variations of the disclosed embodiments having multiple independently operable arms. Here, in alternative aspects, any suitable combination of features may be provided.

[0188] 10A and 10B, top and side views, respectively, of a robot 350 having a dual arm mechanism are shown. The robot 350 has arms 352 with a common upper arm 354 and independently operable forearms 356, 358 each with a respective end effector 360, 362. In the illustrated embodiment, both linkages are shown in their retracted positions. The lateral offset 366 of the end effectors corresponds to the difference in joint length of the upper arm 354 and the forearms 356, 358. In the illustrated embodiment, the upper arms have the same length and may be longer than the forearms. Additionally, the end effectors 360, 362 are positioned above the forearms 356, 358. Now referring to FIGS. 11A and 11B, top and side views, respectively, of a robot 375 having arms in an alternative configuration are shown. In the illustrated embodiment, the arm 377 may have the features as described with respect to Figures 10A and 10B, with both linkages shown in their retracted positions. In this configuration, a third link with an end effector 382 of the upper linkage is provided below the forearm 380 to reduce the vertical spacing between the two end effectors 382, ​​384. A similar effect may be achieved here by lowering the upper end effector 362 of the configuration of Figures 10A and 10B in a stepped manner (368). Referring also to Figures 12 and 13, the internal configurations of the robots 350, 375 used to drive the individual links of the arms of Figures 10 and 11, respectively, are shown. In the illustrated embodiment, the drive 390 may have first, second and third drive motors 392, 394, 396 which may be rotor-stator mechanisms driving concentric shafts 398, 400, 402, respectively, and having position encoders 404, 406, 408, respectively. A Z drive 410 may drive the motors vertically. In this case, the motors may be partially or completely housed within a housing 412, and a bellows 414 may seal the interior volume of the housing 412 to a chamber 416, and the interior volume and the interior of the chamber 416 may operate in an isolated environment, such as a vacuum or otherwise.In the illustrated embodiment, the common upper arm 354 is driven by one motor 396. Each of the two forearms 356, 358 pivots on a common axis 420 at the elbow of the upper arm 354 and is driven independently by a motor 394, 396 through a band drive 422, 424, each of which may have a conventional pulley. The third link with the end effector 360, 362 is constrained by a band drive 426, 428, each of which has at least one non-circular pulley that offsets the effect of the unequal lengths of the upper and forearms. Here, the band drive in each linkage may be designed using the methodology described for Figures 1 and 2, and the kinematic equations presented for Figures 1 and 2 may be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts 398, 400, 402 of the robot must move the same amount in the direction of rotation of the arm. In order for one of the end effectors to extend and retract radially along a linear path, the drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active end effector must move in coordination according to the inverse kinematic equations for Figs. 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm in order for the inactive end effector to remain retracted. Referring also to Figs. 14A, 14B, and 14C, the arm of Figs. 11A and 11B is shown as the upper and lower linkages extend. Here, the inactive linkages 356, 360 rotate while the active linkages 358, 362 extend. By way of example, the upper linkages 358, 362 rotate as the lower linkages 356, 360 extend, and the lower linkages 356, 360 rotate as the upper linkages 358, 362 extend. In the disclosed embodiment of Figures 10 and 11, assembly and control can be simplified, where the arm mechanism may be used on a coaxial drive without dynamic seals, while providing a longer reach compared to an equal link length arm with the same storage volume, where no bridge is used to support any of the end effectors.In the embodiment shown, the inactive arm rotates while the active arm extends. One of the wrist joints travels above the lower end effector (closer to the wafer than in the equal link mechanism).

[0189] 15A and 15B, top and side views, respectively, of a robot 450 having a dual arm mechanism are shown. The robot 450 has arms 452 with a common upper arm 454 and independently movable forearms 456, 458 each with a respective end effector 460, 462. In the illustrated embodiment, both linkages are shown in their retracted positions. The lateral offset 466 of the end effectors corresponds to the difference in inter-articular length of the upper arm 454 and the forearms 456, 458. In the illustrated embodiment, the upper arms have the same length and may be longer than the forearms. Additionally, the end effector 460 is positioned above the forearm 456 and the end effector 462 is positioned above the forearm 458. Similarly, referring to FIGS. 16A and 16B, top and side views, respectively, of a robot 475 having arms in an alternative configuration are shown. Again, both linkages are shown in their retracted positions. In this configuration, the third link and end effector 482 of the left linkage is provided below the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. A similar effect can be achieved by lowering the upper end effector of the configuration of Figures 15A and 15B by stepping it (468). Alternatively, a bridge can be used to support one of the end effectors. The integrated upper arm link 454 can be a single piece, as shown in Figures 15 and 16, or can be formed by two or more parts 470, 472, as shown in the example of Figures 17A and 17B. Here, the two-part design can be provided as being lighter and using less material, and the left 472 and right 470 parts can be identical components. Here, the two-part design can also have provisions for adjustment of the angular offset between the left and right parts. These provisions can be convenient when different retracted positions need to be supported. 18 and 19, which show the internal configurations used to drive the individual links of the arms of Figures 15 and 16, respectively. Integrated upper arm 454 is shown driven together with shaft 402 by a single motor.Each of the two forearms 456, 458 is independently driven by one motor, each via a shaft 400, 398, through a band drive 490, 492 with a conventional pulley, respectively. Here, the links 456, 458 rotate on separate axes 494, 496, respectively. The third link with the end effector 460, 462 is constrained by a band drive 498, 500, each with at least one non-circular pulley that counteracts the effect of the unequal lengths of the upper arm and the forearm, respectively. Here, the band drives 498, 500 in each linkage 456, 460 and 458, 462 are designed using the methodology described for FIG. 1 and FIG. 2. Here, the kinematic equations presented for FIG. 1 and FIG. 2 may be used for each of the two linkages 456, 460 and 458, 462 of the dual arm as well. For the arm 452 to rotate, all three drive shafts 398, 400, 402 of the robot must move the same amount in the direction of rotation of the arm. For one of the end effectors to extend and retract radially along a linear path, the drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active end effector must move in coordination according to the inverse kinematic equations presented with respect to Figures 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate in synchrony with the drive shaft of the common upper arm for the inactive end effector to remain retracted. Referring also to Figures 20A, 20B, and 20C, the arm of Figures 16A and 16B is shown as the left 458, 462 and right 456, 460 linkages extend. Note that the inactive linkages 456, 460 rotate while the active linkages 458, 462 extend. Here, the right linkages 456, 460 rotate as the left linkages 458, 462 extend and the left linkages 458, 462 rotate as the right linkages 456, 460 extend.The illustrated embodiment utilizes the advantages of the spatial link design being easy to assemble and control, and of a coaxial drive, e.g., without dynamic seals, while providing a longer reach compared to an equal-link arm with the same storage volume. Here, no bridge is used to support any of the end effectors. Here, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector, closer to the wafer than in the equal-link mechanism. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge can be longer compared to an equal-link arm design. Furthermore, the retraction angle can be more difficult to change compared to a configuration with a common elbow joint, e.g., as seen in Figures 10 and 11, and with independent dual arms, e.g., as seen in Figures 21 and 22.

[0190] 21A and 21B, top and side views, respectively, of a robot 520 having dual independent arms 522, 524 are shown. In the illustrated embodiment, the linkages 522, 524 are both shown in their retracted positions. The arm 522 has an independently operable upper arm 526, a forearm 528, and a third link having an end effector 530. The arm 524 has an independently operable upper arm 532, a forearm 534, and a third link having an end effector 536. In the illustrated embodiment, the forearms 528, 534 are shown longer than the upper arms 526, 532, and the end effectors 530, 536 are positioned above the forearms 528, 534, respectively. Also referring to FIGS. 22A and 22B, top and side views of a robot 550 having similar features to those of the robot 520, but with arms in an alternative configuration, are shown with both linkages shown in their retracted positions. In this configuration, the third link and end effector 552 of the left linkage is located below the forearm 554 to reduce the vertical spacing between the two end effectors. A similar effect can be achieved by stepping down the upper end effector of the configuration of FIG. 21. Alternatively, a bridge can be used to support one of the end effectors. In FIGS. 21 and 22, the right upper arm 532 is located below the left upper arm 526. Alternatively, for example, the left upper arm can be located below the right upper arm, in which case one linkage can be nested within the other. Referring also to FIG. 23, the internal arrangement used to drive the individual links of the arms of FIGS. 21A and 21B is shown. Here, the height of the links has been adjusted to avoid overlapping components for clarity of illustration. Each of the two upper arms 526, 532 is independently driven by one motor, each through a respective shaft 398, 402. The forearms 528, 534 are coupled to a third motor via shaft 400 through band mechanisms 570, 572, each having at least one non-circular pulley.The third links 530, 536 with end effectors are constrained by band drives 574, 576 each with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 526, 532 causes the corresponding linkages 528, 530 and 534, 536, respectively, to extend and retract along a straight line while the other linkage remains stationary. The band drives in each linkage may be designed using the methodology described with respect to Figures 5 and 6, and the kinematic equations presented for Figures 5 and 6 can be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the direction of the arm's rotation. In order for one of the end effectors to extend and retract radially along a linear path, the drive shaft of the upper arm associated with the active end effector must be rotated according to the inverse kinematic equations for Figures 5 and 6, while the other two drive shafts must be held stationary. Referring also to Figures 24A, 24B, and 24C, the arm of Figure 22 is shown as the left 522 and right 524 linkages extend. Note that the inactive linkage 524 remains stationary while the active linkage 522 extends. That is, the left linkage 522 does not move while the right linkage 524 extends, and the right linkage 524 does not move when the left linkage 522 extends. The illustrated embodiment provides a longer reach compared to an equal-link arm design with the same storage volume. Here, no bridges are used to support any of the end effectors, and the inactive linkages remain stationary while the active linkages extend. Active linkages can extend or retract faster without load, potentially resulting in higher throughput. The illustrated embodiment has two more band drives with non-circular pulleys instead of the conventional ones, and can be more complex than shown in Figures 15 and 16. One of the wrist joints travels above the lower end effector, as seen in Figure 24.This can be avoided by using a bridge (not shown) to support the upper end effector, in which case the unsupported length of the bridge is longer compared to the equal link arm design.

[0191] 25A and 25B, a top view and a side view, respectively, of a robot 600 with an arm 602 are shown. In the illustrated embodiment, both linkages are shown in their retracted position. The lateral offset 604 of the end effector corresponds to the difference in inter-joint length of the upper arm 606 and the forearms 608, 612, where in this embodiment the forearms 608, 612 are shorter than the common upper arm 606. The internal configuration used to drive the individual links of the arm may be similar to that of Figs. 10-13, for example as in Fig. 13, but the forearm in this example is shorter than the common upper arm. Here, the common upper arm is driven by one motor. Each of the two forearms is driven independently by one motor through a band drive with conventional pulleys. The third link 614, 616 with the end effector is constrained by a band drive, each with at least one non-circular pulley that counteracts the effect of the unequal lengths of the upper arm and the forearm. The band drives in each linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two linkages of the dual arm as well. Referring also to Figures 26A, 26B, and 26C, the arm of Figures 25A and 25B is shown as the upper linkage 612, 616 extends. The lateral offset 604 of the end effector corresponds to the difference in joint length of the upper arm and forearm, and the wrist joint moves along a line offset by this difference relative to the trajectory of the center of the wafer. Note that the inactive linkages 608, 614 rotate while the active linkages 612, 616 extend. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Here, Figure 26A shows the arm with both linkages in a retracted position. 26B shows the upper linkage 612, 616 partially extended in a position where the wrist joint of the upper linkage is closest to the wafer carried by the lower linkage. It is observed that the wrist joint of the upper linkage does not move directly above the wafer (although it does move in a plane above the wafer).FIG. 26C shows the extension of the upper linkage 612, 616 further. The illustrated embodiment can provide ease of assembly and control and may be used on coaxial or 3-axis drives without dynamic seals, or other suitable drives. Here, no bridge may be used to support any of the end effectors. The wrist joint of the upper linkage does not move directly above the wafer on the lower end effector, as is the case in an equal link design (this wrist joint moves in a plane above the wafer on the lower end effector). Here, the inactive arm rotates while the active arm extends. The elbow joint may be more complex, which may lead to a larger turning radius, or a shorter reach. Here, the arm may be taller than the arms shown in FIGS. 30 and 31 and 33 due to the overlap of the forearms 608, 612.

[0192] 27A and 27B, top and side views, respectively, of a robot 630 having an arm 632 are shown. The arm 632 may have similar features as disclosed with respect to FIGS. 15-19, except that the forearms 638, 640 are shown to have a shorter link length than the upper arm 636. Both linkages are shown in their retracted positions. The lateral offset 634 of the end effectors 642, 646 corresponds to the inter-joint length difference of the upper arm 636 and the forearms 638, 640. The integrated upper arm link 636 may be a single piece, as shown in FIGS. 27A and 27B, or the upper arm link may be formed by two or more sections 636', 636", as shown in the example of FIGS. 28A and 28B. The two-part design may be lighter using less material, and the left 636' and right 636" sections may be identical components. Room may be provided for adjustment of the angular offset between the left 636' and right 636" portions, for example if different retracted positions need to be supported. The internal configurations used to drive the individual links of the arm 632 may be similar to those in Figs. 15-19, for example as seen in Fig. 19. The common upper arm 636 is driven by one motor. Each of the two forearms 638, 640 is independently driven by one motor through a band drive with conventional pulleys. A third link with end effectors 642, 646 has at least one end effector 644 that offsets the effects of unequal lengths of the upper arm 636 and the forearms 638, 640. The linkages may be constrained by band drives, each having a non-circular pulley of 1. The band drives in each linkage may be designed using the methodology described for FIG. 1 and FIG. 2. The kinematic equations presented for FIG. 1 and FIG. 2 may be used for each of the two linkages of the dual arm as well. Referring also to FIG. 29A, FIG. 29B, and FIG. 29C, the arm of FIG. 27A and FIG. 27B is shown as the right upper linkage 640, 646 extends. The lateral offset 634 of the end effector corresponds to the difference in joint length of the upper arm and the forearm, and the wrist joint moves along a line offset by this difference relative to the trajectory of the center of the wafer.Here, the inactive linkages 638, 642 rotate while the active linkages 640, 646 extend. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Of Figures 29A, 29B, and 29C, Figure 29A shows the arm with both linkages in a retracted position. Figure 29B shows the right upper linkage 640, 646 partially extended with its wrist joint closest to the wafer carried by the left lower linkage 638, 642. Here, the wrist joint of the right upper linkage 640, 646 does not move directly above the wafer, but rather moves in a plane above the wafer. Figure 29C shows the right upper linkage 640, 646 extended further. The illustrated embodiment takes advantage of the advantages of the spatial link design, ease of assembly and control, and coaxial drives, e.g., without dynamic seals. No bridge is used to support any of the end effectors. The wrist joint of the upper linkage does not move directly above the wafer on the lower end effector, as would be the case in an equal link design. However, it moves in a plane above the wafer on the lower end effector. The inactive arms 638, 642 rotate while the active arms 640, 646 extend. The contraction angle is more difficult to change compared to configurations with a common elbow joint, e.g., as seen in Figures 25A and 25B, and independent dual arms, e.g., as seen in Figures 33A and 33B. Additionally, the forearm 640 is shown higher than the forearm 638, and thus the arms are shown higher than in Figures 30 and 31 and Figures 33A and 33B.

[0193] 30A and 30B, there is shown a top view and a side view, respectively, of a robot 660 having an arm 662. The arm 662 may have the features as described with respect to FIGS. 27-29, but uses a bridge and has two forearms at the same height as described. Both linkages are shown in their retracted position. The lateral offset 664 of the end effector corresponds to the difference in joint length of the upper arm 666 and the forearms 668, 670. The integrated upper arm link 666 can be a single piece, as shown in Figures 30A and 30B, or the upper arm link can be formed by two or more sections 666', 666", as shown in the example of Figures 31A and 31B. The internal configurations used to drive the individual links of the arm can be the same as those shown for Figures 15-19, but in this case the forearms 668, 670 are shorter than the upper arm 666. The common upper arm 666 is driven by one motor. Each of the two forearms 668, 670 is driven independently by one motor through a band drive with conventional pulleys. The third link with end effectors 672, 674 is constrained by a band drive, each with at least one non-circular pulley that offsets the effect of the unequal lengths of the upper arm and forearm. Each link is driven by a motor. The band drive in the linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two linkages of the dual arm as well. The third link and end effector 674 has a bridge 680. The bridge 680 has an upper end effector portion 682, a lateral offset support 684 offset from the wrist axis between the links 670 and 674, and further has a lower support 686 connecting the wrist axis to the offset support 684. The bridge 680 allows the forearms 668 and 670 to be mounted at the same height while providing clearance for the third link and end effector 672 (which may include a wafer) and the interleaved portion of the bridge 680, as can be seen below with respect to Figure 32.The bridge 680 further provides a mechanism for any moving parts, for example associated with the two wrist joints, to be located below the wafer surface during transfer. Referring also to Figures 32A, 32B, 32C, and 32D, a top view of the robot arm of Figures 30A and 30B is shown as the right linkage 670, 674 extends. The lateral offset 664 of the end effector corresponds to the difference in inter-joint length of the upper arm 666 and the forearm 670, and the wrist joint 690 moves along a line offset by this difference relative to the trajectory of the center of the wafer 692. Note that while the active linkages 670, 674 extend, the inactive linkages 668, 672 rotate. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Of Figures 32A, 32B, 32C and 32D, Figure 32A shows the arm with both linkages in a retracted position, while Figure 32B shows the right linkage 670, 674 partially extended in a position that corresponds to the least favorable (or closest to the least favorable) gap between the bridge 680 of the right linkage 670, 674 and the end effector 672 of the left linkage 668, 672. FIG. 32C shows the right linkage 670, 674 partially extended in a position when the forearm 670 is aligned with the upper arm 66″. The lateral offset of the end effector corresponds to the difference in joint length of the upper arm and forearm. The axis of the wrist joint 690 moves along a line offset by this difference relative to the trajectory of the center of the wafer 692. FIG. 32D shows the right linkage 670, 674 extended further. The illustrated embodiment combines the advantages of a side-by-side dual scara arrangement, such as a slim profile resulting in a shallow chamber with a small volume, the advantages of a three-dimensional link design, and the advantages of a coaxial drive. The bridge 680 on the right linkage 670, 674 is lower, the unsupported length of the bridge 680 between the vertical member 684 and the wrist 690 is shorter than in the prior art coaxial dual scara arm, and all of the joints are below the end effector.Here, the inactive arms 668, 672 rotate while the active arms 670, 674 extend. As described below, in other aspects of the disclosed embodiments, arms that do not exhibit this behavior may be provided with a different band drive having a non-circular pulley instead of the conventional one disclosed herein. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described above for Figures 25A, 25B, 27, and 28.

[0194] 33A and 33B, a top view and a side view, respectively, of a robot 700 having an arm 702 are shown. The arm 702 may have features similar to those of the arms shown in FIGS. 21-23, but the forearm length is shorter than the upper arm length, and the forearms are positioned at the same height, using a bridge as described with respect to bridge 680 as an example. Both linkages are shown in their retracted positions. In FIGS. 33A and 33B, the right upper arm 708 is positioned above the left upper arm 706. Alternatively, the left upper arm 706 may be positioned above the right upper arm 708. Similarly, the third link and end effector 716 of the right linkage 712, 716 features a bridge that extends directly above the third link and end effector 714 of the left linkage 710, 714. Alternatively, the third link and end effector 714 of the left linkage 710, 714 may feature a bridge that may extend directly above the third link and end effector 716 of the right linkage 712, 716. The internal configuration used to drive the individual links of the arms may be similar to the embodiment shown in Figures 21-23. Each of the two upper arms 706, 708 is driven independently by one motor. The forearms 710, 712 are coupled to the third motor via a band mechanism, each having at least one non-circular pulley. The third links 714, 716 with their end effectors are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 706, 708 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives in each linkage are designed using the methodology described for the embodiment shown in Figures 5 and 6. The kinematic equations presented for the embodiment shown in Figures 5 and 6 can be used for each of the two linkages of the dual arm as well. Referring also to Figures 34A, 34B, and 34C, the arms of Figures 33A and 33B are shown as the right linkages 708, 712, 716 extend.Here, the inactive linkages 706, 710, 714 remain stationary while the active linkages 712, 716 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. The illustrated embodiment combines the advantages of a parallel dual SCARA mechanism, such as a slim profile resulting in a shallow chamber with a small volume, and the advantages of a coaxial drive. The bridge on the right linkage is lower, the unsupported length of the bridge is shorter than with existing coaxial dual SCARA arms, and all of the articulation is below the end effector. The inactive linkages remain stationary while the active linkages extend. Higher throughput is potentially achieved because the active linkages can extend or retract faster without load. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described for Figures 25, 27, and 28.

[0195] 35A and 35B, there is shown a top view and a side view of a robot 730 with an arm 732 with both linkages shown in their retracted positions. Each linkage has a dual-holder end-effector 740, 742. Each end-effector can support two substrates offset from each other for a total of four substrates. The internal configuration used to drive the individual links of the arm 732 may be the same as in Figs. 10 and 11, e.g., Fig. 13. The common upper arm 734 is driven by one motor. Each of the two forearms 736, 738 is independently driven by one motor through a band drive with conventional pulleys. The third link with end effectors 740, 742 is constrained by a band drive, each with at least one non-circular pulley that offsets the effect of unequal lengths of the upper and forearms. The embodiment shown has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drives in each linkage are designed using the methodology described for Figs. 1 and 2. The kinematic equations presented for Figs. 1 and 2 may be used for each of the two linkages of the dual arm as well. Referring also to Fig. 36, the arm of Figs. 35A and 35B is shown as one linkage 738, 742 extends. Note that the inactive linkages 736, 740 rotate while the active linkages 738, 742 extend. For example, the upper linkage rotates as the lower linkage extends and the lower linkage rotates as the upper linkage extends. Compared to Figs. 37 and 38, the end effector does not need to be shaped to avoid interference with the opposite elbow.

[0196] 37A and 37B, there is shown a top and side view, respectively, of a robot having an arm 750. Both linkages are shown in their retracted positions, with each linkage having a dual holder end effector 758, 760. The integrated upper arm link 752 may be a single piece, as shown in Figures 37A and 37B, or the upper arm link may be formed by two or more sections 752', 752", as shown in the example of Figures 38A and 38B. The internal configurations used to drive the individual links of the arm may be the same as in Figures 15-19, e.g., Figure 19. The integrated upper arm 752 is driven by one motor. Each of the two forearms 754, 756 is driven independently by one motor through band drives with conventional pulleys. The third links 758, 760 with end effectors are constrained by band drives, each with at least one non-circular pulley that counteracts the effects of the unequal lengths of the upper and forearms. The embodiment shown has forearms that are longer than the upper arms. Alternatively, the forearms may be shorter. The band drives in each linkage are designed using the methodology described for Figures 1 and 2. 1 and 2 may be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of rotation of the arm. For one of the end effector assemblies to extend and retract radially along a linear path, the drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active linkage must move in coordination according to the inverse kinematic equations for FIG. 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm in order for the inactive linkage to remain retracted. Referring also to FIG. 39, the arm of FIGS. 37A and 37B is shown as one linkage 756, 760 extends. Here, the inactive linkages 754, 758 rotate while the active linkage extends.For example, as the left linkage extends the right linkage rotates and as the right linkage extends the left linkage rotates. The embodiment shown does not have a bridge. The upper wrist travels directly above one of the wafers on the lower end effector. Here, the arm and end effector must be designed so that the upper elbow passes the lower end effector without touching it.

[0197] 40A and 40B, a top view and a side view, respectively, of a robot 750 having an arm 752 are shown. Both linkages are shown in their retracted position, with each linkage having a dual holder end effector 792, 794. The internal configurations used to drive the individual links of the arm may be the same as in FIGS. 21-23. Each of the two upper arms 784, 786 is driven independently by one motor. The forearms 788, 790 are coupled to a third motor via a band mechanism, each having at least one non-circular pulley. The third links, having end effectors 792, 794, are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The embodiment shown has forearms that are longer than the upper arms. Alternatively, the forearms may be shorter. The band drives in each linkage are designed using the methodology described for Figures 5 and 6. The kinematic equations presented for Figures 5 and 6 can be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. For one of the end effector assemblies to extend and retract radially along a linear path, the drive shaft of the upper arm associated with the active linkage needs to be rotated according to the inverse kinematic equations for Figures 5 and 6, while the other two drive shafts need to be held stationary. Referring also to Figure 41, the arm of Figures 40A and 40B is shown as one linkage 784, 788, 794 extends. Note that the inactive linkages 786, 790, 792 may remain stationary while the active linkages 784, 788, 794 extend. That is, the left linkage does not move while the right linkage extends and the right linkage does not move when the left linkage extends.Alternatively, the left and right linkages may be moved independently and radially simultaneously, for example as seen in FIG. 42 where the right linkage is independently extended slightly compared to FIG. 41. The elbow movement of the upper linkage may be limited due to potential interference with the wafer on the lower end effector. This may limit the reach of the robot, as shown in FIG. 41. This limitation may be alleviated by extending the lower linkage slightly to provide additional clearance and achieve full reach, as shown in FIG. 42. The embodiment shown does not have a bridge. The wrist of the upper linkage may travel above the wafer on the lower end effector.

[0198] 43A and 43B, a top view and a side view, respectively, of a robot 810 having an arm 812 are shown. Both linkages are shown in their retracted position, with each linkage having a dual holder end effector 820, 822. The internal configurations used to drive the individual links of the arm may be identical to those of FIGS. 10-13. The common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is driven independently by one motor through a band drive with a conventional pulley. The third link with end effectors 820, 822 is constrained by a band drive, each having at least one non-circular pulley that offsets the effects of the unequal lengths of the upper arm and forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive in each linkage is designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two linkages of the dual arm as well. Referring also to Figures 44 and 45, the arm of Figures 43A and 43B is shown as the upper linkage 818, 822 extends. Note that the inactive linkages 816, 820 rotate while the active linkages 818, 822 extend. For example, the upper linkage rotates as the lower linkage extends and the lower linkage rotates as the upper linkage extends. Figures 44 and 45 show that the wrist joint 824 of the upper linkage 818, 822 does not move directly above the wafer 826 carried by the lower linkages 816, 820 of the arm. The illustrated embodiment does not have a bridge. Compared to Figures 46 and 47, the end effector does not need to be shaped to avoid interference with the opposite elbow.

[0199] 46A and 46B, there is shown a top and side view, respectively, of a robot 840 having an arm 842. Both linkages are shown in their retracted positions, with each linkage having a dual holder end effector 850, 852. The integrated upper arm link 844 can be a single piece, as shown in FIGS. 46A and 46B, or the upper arm link can be formed by two or more sections 844', 844", as shown in the example of FIGS. 47A and 47B. The internal configurations used to drive the individual links of the arm can be the same as in FIGS. 15-19, e.g., FIG. 19. The integrated upper arm 844 is driven by one motor. Each of the two forearms 846, 848 is driven independently by one motor through a band drive with conventional pulleys. The third link with end effectors 850, 852 is constrained by a band drive, each having at least one non-circular pulley that offsets the effects of the unequal lengths of the upper arm and forearm. In the embodiment shown, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives in each linkage are designed using the methodology described for FIGS. 1 and 2. FIG. 2 may be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of rotation of the arm. For one of the end effector assemblies to extend and retract radially along a linear path, the drive shaft of the common upper arm 844 and the drive shaft coupled to the forearm associated with the active linkage must move in coordination according to the inverse kinematic equations for FIGS. 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate in synchrony with the drive shaft of the common upper arm in order for the inactive linkage to remain retracted. Referring also to FIGS. 48 and 49, the arm of FIGS. 46A and 46B is shown as the upper linkages 848, 852 extend. Here, the inactive linkages 846, 850 rotate while the active linkages 848, 852 extend.For example, as the lower linkage extends the upper linkage rotates and as the upper linkage extends the lower linkage rotates. Figures 48 and 49 show that the wrist joint 854 of the upper linkage does not move directly above the wafer 856 carried by the lower linkage of the arm. The embodiment shown does not have a bridge and the wrist joint of the upper linkage does not move directly above the wafer carried by the lower linkage. Here, the inactive arm rotates less, allowing faster movement as the active arm extends or retracts without a load.

[0200] 50A and 50B, a top view and a side view of a robot 870 having an arm 872 are shown. Both linkages are shown in their retracted position, each linkage having a dual holder end effector 880, 882. The integrated upper arm link 874 can be a single piece, as shown in FIG. 50A and 50B, or the upper arm link can be formed by two or more parts, as shown in the example of FIG. 47A and 47B. The internal configurations used to drive the individual links of the arm can be the same as in FIG. 15-19, e.g., FIG. 18. The integrated upper arm 874 is driven by one motor. Each of the two forearms 876, 878 is driven independently by one motor through a band drive with conventional pulleys. The third link with an end effector is constrained by a band drive, each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives in each linkage may be designed using the methodology described for FIG. 1 and FIG. 2. The kinematic equations presented for FIG. 1 and FIG. 2 may be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of rotation of the arm. For one of the end effector assemblies to extend and retract radially along a linear path, the drive shaft of the common upper arm 874 and the drive shaft coupled to the forearm associated with the active linkage must move in concert according to the inverse kinematic equations for FIG. 1 and FIG. 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm 874 for the inactive linkage to remain retracted. Referring also to FIG. 51, the arm of FIGS. 50A and 50B is shown with one linkage 878, 882 extended. Here, the inactive linkages 876, 880 rotate while the active linkages 878, 882 extend.For example, as the lower linkage extends the upper linkage rotates and as the upper linkage extends the lower linkage rotates. The illustrated embodiment has a shorter forearm link that can be stiffer using a shorter short band, and the forearm is arranged in parallel to facilitate a shallow chamber. Here, the short link allows more rotation of the inactive arm compared to Figs. 46 and 47 that may be accommodated by a longer upper arm. A bridge 884 is provided and the arm and end effector may be designed such that the bridge 884 passes untouched by the inactive end effector 880 during the extension movement. Here, the base of the end effector features an angled shape 886 as shown.

[0201] 52A and 52B, a top view and a side view, respectively, of a robot 900 having an arm 902 are shown. Both linkages are shown in their retracted position, with each linkage having a dual holder end effector. The internal configurations used to drive the individual links of the arm may be identical to those of FIGS. 21-23. Each of the two upper arms 904, 906 is driven independently by one motor. The forearms 908, 910 are coupled to a third motor via a band mechanism, each having at least one non-circular pulley. The third links, having end effectors 912, 914, are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 904, 906 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer. The band drives in each linkage are designed using the methodology described for Figures 5-6. The kinematic equations presented for Figures 5-6 may be used for each of the two linkages of the dual arm as well. For the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. For one of the end effector assemblies to extend and retract radially along a linear path, the drive shaft of the upper arm associated with the active linkage needs to be rotated according to the inverse kinematic equations for Figures 5-6, while the other two drive shafts need to be held stationary. Referring also to Figure 53, the arm of Figures 52A and 52B is shown with one linkage 906, 910, 914 extended. Note that the inactive linkages 904, 908, 912 remain stationary while the active linkages 906, 910, 914 extend along with the bridge 916. That is, the left linkage need not move while the right linkage extends and the right linkage need not move when the left linkage extends, but the linkages may be moved independently radially.The embodiment shown uses a shorter band, has shorter links which can be stiffer, and has parallel forearms which facilitate a shallower chamber. Alternatively, the forearms may be longer than the upper arms in a configuration with a bridge.

[0202] 54-55, a coupled dual arm 930 with opposing end effectors 938, 940 is shown. FIGS. 54A and 54B show a top view and a side view, respectively, of the robot with the arms. Both linkages are shown in their retracted position, with the lateral offset of the end effectors corresponding to the difference in joint lengths of the upper arm 932 and the forearms 934, 936. The integrated upper arm link 932 can be a single piece, as shown in FIG. 54, or the upper arm link can be formed by two or more parts. As an example, a two-part design may be lighter using less material, and the left and right parts may be identical components. The internal configurations used to drive the individual links of the arm may be based on those shown with respect to FIGS. 18 and 19, or another. The common upper arm 932 is driven by one motor. Each of the two forearms 934, 936 is driven independently by one motor through a band drive with conventional pulleys. The third link with end effectors 938, 940 is constrained by band drives, each with at least one non-circular pulley that offsets the effect of the unequal lengths of the upper arm 932 and the forearm 934, 936. The band drives in each linkage are designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can be used for each of the two linkages of the dual arm as well. FIGS. 55A-55C show the arm of FIG. 54 as the first linkage 934, 938 and the second linkage 936, 940 extend from a retracted position. The lateral offset of the end effector corresponds to the difference in inter-joint lengths of the upper arm 932 and the forearm 934, 936, and the wrist joints 942, 946 move along a line offset by this difference relative to the trajectory of the center of the wafer. Note that the inactive linkage rotates while the active linkage extends. For example, as the first linkage extends the second linkage rotates and as the second linkage extends the first linkage rotates. Figure 55A shows the arm with both linkages in a retracted position.FIG. 55B shows the first linkage 934, 938 extended. FIG. 55C shows the second linkage 936, 940 extended. Because the forearms move in the same plane and the end effectors move in the same plane, the illustrated arms have a low profile, allowing for a shallow vacuum chamber with a small volume. Because the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arms can be large, making them particularly suitable for applications with multiple process modules where the diameter of the chamber is dictated by the size of the slot valve. Because of the low profile, the arms can replace frog-legged arms with opposing end effectors. In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms can be longer, e.g., the forearms are at different heights and overlap.

[0203] Referring to Figures 56-57, an independent dual arm 960 with opposing end effectors 970, 972 is shown. Figures 56A and 56B show a top view and a side view of the robot with the arms. Both linkages are shown in their retracted positions. In Figure 56, the upper arm 962 of the first linkage is located above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be located above the upper arm of the first linkage. The internal configuration used to drive the individual links of the arm may be based on Figure 23 or different. Here, each of the two upper arms 962, 964 may be independently driven by one motor. The forearms 966, 968 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. The third links with end effectors 970, 972 are constrained by a band drive each having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives in each linkage are designed using the methodology described for FIG. 5. The kinematic equations presented for FIG. 5 can be used for each of the two linkages of the dual arm as well. FIGS. 57A-C show the arm of FIG. 56 as the first linkage 962, 966, 970 and the second linkage 964, 968, 972 extend from a retracted position. Here, the inactive linkages remain stationary while the active linkages extend (although this is not required). That is, the second linkage does not move while the first linkage extends, and the first linkage does not move when the second linkage extends. Because the forearms move in the same plane and the end effectors move in the same plane, the arms have a low profile allowing for a shallow vacuum chamber with a small volume.Because the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the retracted radius of the arm is large, making the arm particularly suitable for applications with multiple process modules where the size of the throttle valve dictates the diameter of the chamber. Due to the low profile, the arm can replace a frog-leg arm with opposing end effectors. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, e.g., the forearms are at different heights and overlap.

[0204] Referring now to FIG. 58, a combined dual arm 990 with angularly offset end effectors 998, 1000 is shown. FIGS. 58A and 58B show a top and side view of the robot with the arms. Both linkages are shown in their retracted positions. The lateral offsets 1002, 1004 of the end effectors correspond to the difference in joint lengths of the upper arm 992 and the forearms 994, 996. The integrated upper arm link 992 may be a single piece, as shown in FIG. 59, or may be formed by two or more parts. The internal configurations used to drive the individual links of the arm are based on FIGS. 18 and 19 or otherwise. Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994, 996 may be driven independently by one motor through a band drive with conventional pulleys. The third link with end effectors 998, 1000 is constrained by band drives, each with at least one non-circular pulley that offsets the effect of the unequal lengths of the upper arm and forearm. The band drives in each linkage are designed using the methodology described for FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can be used for each of the two linkages of the dual arm as well. Referring also to FIGS. 59A-59C, the arm of FIG. 58 is shown as the left linkage 994, 998 and the right linkage 996, 1000 extend. The lateral offset 1002, 1004 of the end effectors corresponds to the difference in inter-joint lengths of the upper arm and forearm, and the wrist joint moves along a line offset by this difference relative to the trajectory of the center of the wafer. Here, the inactive linkage rotates while the active linkage extends. For example, as the left linkage extends the right linkage rotates and as the right linkage extends the left linkage rotates. Figure 59A shows the arms with both linkages in a retracted position. Figure 59B shows the left linkage 994, 998 extended. Figure 59C shows the right linkage 996, 1000 extended. Here the inactive arm rotates while the active arm extends.In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer, for example, in which case the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

[0205] Now referring to FIG. 60, an independent dual arm 1030 with angularly offset end effectors 1040, 1042 is shown. Here, FIG. 60A and FIG. 60B show a top view and a side view of the robot with the arms. Both linkages are shown in their retracted position. In FIG. 60, the right upper arm 1034 is placed below the left upper arm 1032. Alternatively, the left upper arm may be placed below the right upper arm. The internal configuration used to drive the individual links of the arm may be based on FIG. 23. Each of the two upper arms 1032, 1034 may be driven independently by one motor. The forearm is coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third links with end effectors 1040, 1042 are constrained by a band drive, each with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 1032, 1034 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives in each linkage are designed using the methodology described for FIG. 5 or otherwise. The kinematic equations presented for FIG. 5 can be used for each of the two linkages of the dual arm as well. FIGS. 61A-61C show the arms of FIG. 60 as the left linkage 1032, 1036, 1040 and then the right linkage 1034, 1038, 1042 extend. Here, the inactive linkages remain stationary while the active linkages extend (although this is not required). That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Here, the inactive linkages remain stationary while the active linkages extend. In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer, for example, in which case the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

[0206] As an example with respect to FIG. 62 or otherwise, the third link and end effector 1060, 1062, which may each be referred to as the third link assembly, may be designed such that their centers of mass 1064, 1066 are on or near the linear trajectory of the wrist joint 1068, 1070, respectively, as the corresponding linkage of the arm extends and retracts. This reduces the moment due to inertial forces acting at the center of mass of the third link assembly and reaction forces at the wrist joint, and therefore reduces the load on the band mechanism constraining the third link assembly. Here, the third link assembly may be further designed such that its center of mass is on one side of the wrist joint trajectory when a payload is present, and on the other side of the trajectory when no payload is present. Alternatively, since the best linear tracking performance is usually desired with a payload, the third link assembly may be designed such that its center of mass is substantially on the wrist joint trajectory when a payload is present, as shown in FIG. 62. In FIG. 62, 1L is the linear trajectory of the center of the wrist joint of the left linkage, 2L is the center 1070 of the wrist joint of the left linkage, 3L is the center of mass 1066 of the third link assembly of the left linkage, 4L is the force acting on the third link assembly of the left linkage as the left linkage accelerates at the start of an extension movement (or decelerates at the end of a retraction movement), and 5L is the inertial force acting at the center of mass of the third link assembly of the left linkage as the left linkage accelerates at the start of an extension movement (or decelerates at the end of a retraction movement). Similarly, 1R is the linear trajectory of the center of the wrist joint of the right linkage, 2R is the center of the wrist joint of the right linkage 1068, 3R is the center of mass 1064 of the third link assembly of the right linkage, 4R is the force acting on the third link assembly of the right linkage as the right linkage decelerates at the end of the extension movement (or accelerates at the start of the retraction movement), and 5R is the inertial force acting at the center of mass of the third link assembly of the right linkage as the right linkage decelerates at the end of the extension movement (or accelerates at the start of the retraction movement).In the illustrated embodiment, a dual wafer end effector is provided, although in alternative aspects, any suitable end effector and arm or link geometry may be provided.

[0207] In alternative aspects, the upper arm in any of the aspects of this embodiment can be driven by a motor, either directly or through any type of coupling or transmission mechanism. Any transmission ratio may be used. Alternatively, the band drive that actuates the second link and constrains the third link can be replaced by any other mechanism with equivalent functionality, such as belt drives, cable drives, circular and non-circular gears, linkage-based mechanisms, or any combination of the above. Alternatively, for example, in the dual arm and quad arm aspects of this embodiment, the third link of each linkage can be constrained to keep the end effector radially via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by the second motor, similar to the single arm concept of FIG. 9. Alternatively, the two-stage band mechanism can be replaced by any other suitable mechanism, such as belt drives, cable drives, gear drives, linkage-based mechanisms, or any combination of the above. Alternatively, the upper arms in the dual and quad arm aspects of this embodiment do not have to be coaxially arranged. The upper arms can have separate shoulder joints. The two linkages of the dual and quad arm do not have to have the same length upper arms and the same length forearms. The length of the upper arm of one linkage may be different from the length of the upper arm of the other linkage, and the length of the forearm of one linkage may be different from the length of the forearm of the other linkage. The ratio of forearms to upper arms may be different for the two linkages. In the dual and quad arm aspects of this embodiment where the links of the left and right linkages have different heights, the left and right linkages can be interchanged. The two linkages of the dual and quad arm do not have to extend along the same direction. The arms can be configured so that each linkage extends in a different direction. The two linkages in any of the aspects of this embodiment may consist of more or less than three links (first link = upper arm, second link = forearm, third link = link with end effector).In dual and quad arm aspects of the present embodiment, each linkage may have a different number of links. In single arm aspects of the present embodiment, the third link may carry multiple end effectors. Any suitable number of end effectors and / or material holders may be carried by the third link. Similarly, in dual arm aspects of the present embodiment, each linkage may carry any suitable number of end effectors. In either case, the end effectors may be positioned in the same plane, stacked one above the other, a combination of the two, or arranged in any other suitable manner. Additionally, for dual arm configurations, each arm may be independently operable, e.g., independently operable in rotation, extension, and / or z (vertical), as described, for example, in pending U.S. patent application having application Ser. No. 13 / 670,004, entitled "Robot System with Independent Arms," ​​having a filing date of Nov. 6, 2012, which is incorporated herein by reference in its entirety. Accordingly, all such modifications, combinations and variations are intended to be embraced.

[0208] 63, an exemplary pulley graphical representation 1100 is shown. Exemplary pulley profiles may be for arms with unequal link lengths, as described below. As an example, graph 1100 may show a wrist pulley profile where the elbow pulley is circular. Here, the following design example was used for the illustration: Re / l2=0.2, where Re is the radius of the elbow pulley and l2 is the inter-joint length of the forearm. Alternatively, any suitable ratio may be provided. For clarity, the graph shows an extreme design example compared to an equal-link arm pulley. The outermost profile 1110 is l2 / l1=2, where l2 is the inter-joint length of the forearm and l1 is the inter-joint length of the upper arm, e.g., representing a longer forearm in this case. The intermediate profile 1112, e.g., for equal link lengths, is l2 / l1=1. The innermost profile 1114 is l2 / l1=0.5, e.g., representing a shorter forearm in this case. In the illustrated embodiment, a polar coordinate system 1120 is used, where radial distances are normalized to the radius of the elbow pulley, e.g., expressed as multiples of the elbow pulley radius. In other words, Rw / Re is shown, where Rw represents the polar coordinate of the wrist pulley and Re represents the elbow pulley. Angular coordinates are in degrees, with zero pointing along the direction 1122 of the end effector, e.g., the end effector is pointing to the right relative to the figure.

[0209] 64 and 65, two additional configurations of arms 1140 and 1160 with unequal link lengths are shown. Arm 1140 is shown with a forearm 1144 that is longer than upper arm 1142, where a single arm configuration may utilize features as disclosed with respect to FIGS. 1-4 and 5-8, or others. In the illustrated embodiment, two end effectors 1146, 1148 supporting respective substrates 1150, 1152 are rigidly connected to each other and point in opposite directions. The substrates travel in a radial path that is aligned with center 1156 of robot 1140 and offset (1154) from the wrist as shown. Similarly, arm 1160 is shown with a forearm 1164 that is shorter than upper arm 1162, where a single arm configuration may utilize features as disclosed with respect to FIGS. 1-4 and 5-8, or others. In the illustrated embodiment, two end effectors 1166, 1168 supporting respective substrates 1170, 1172 are rigidly connected to each other and face in opposite directions. The substrate travels in a radial path that is coincident with the center 1176 of the robot 1160 and offset (1174) from the wrist as shown. Here, features of the disclosed embodiments may be shared with any of the other disclosed embodiments as well.

[0210] 66 and 67, the present disclosure describes a dual arm robot 1310 having a stacked parallel end effector configuration. This apparatus may be used in combination with transport mechanisms and apparatus such as those disclosed in U.S. Patent Publication No. 2013 / 0071218, entitled "Low Variability Robot," published on March 21, 2013, which is based on U.S. Patent Application No. 13 / 618,117, filed on September 14, 2012, or U.S. Patent Application No. 14 / 601,455, entitled "Substrate Transport Platform," filed on January 21, 2015, both of which are incorporated herein by reference in their entirety. Alternatively, the present embodiment may be used in any suitable apparatus or applications. The disclosed apparatus may provide the robot 1310 with two end effectors that (i) have a small footprint that allows it to move and rotate within a narrow tunnel, (ii) can use both end effectors independently or simultaneously to access the same station, and (iii) can access parallel offset stations independently or simultaneously.

[0211] An exemplary embodiment of a robot 1310 is shown diagrammatically in Figures 66A-66D and 67A-67D. The robot may consist of a robot drive unit 1312 having a pivot base 1314 about an axis 1334, and a robot arm 1316. The robot arm 1316 may feature two linkages: a left linkage 1318 and a right linkage 1320. Figures 66A-66D show the robot with both linkages retracted, and Figures 67A-67D show the robot with the left linkage 1318 extended.

[0212] The left linkage 1318 may consist of a left upper arm 1322, a left forearm 1324, and a left end effector 1326. The left upper arm 1322 may be coupled to the base via a revolute joint or axis 1336, the left forearm 1324 may be coupled to the left upper arm 1322 by another revolute joint or axis 1338, and the left end effector 1326 may be coupled to the left forearm 1324 by yet another revolute joint or axis 1340.

[0213] Similarly, the right linkage 1320 may consist of a right upper arm 1328, a right forearm 1330, and a right end effector 1332. The right upper arm 1328 may be coupled to the base via a revolute joint or axis 1342, the right forearm 1330 may be coupled to the right upper arm 1328 by another revolute joint or axis 1344, and the right end effector 1332 may be coupled to the right forearm 1330 by yet another revolute joint or axis 1346.

[0214] The inter-articular length of the left forearm may be longer than the inter-articular length of the left upper arm. Alternatively, the inter-articular length of the left forearm may be equal to the inter-articular length of the left upper arm. In yet another alternative, the left forearm and left upper arm may have any other suitable length.

[0215] Similarly, the inter-joint length of the right forearm may be longer than the inter-joint length of the right upper arm. Alternatively, the inter-joint length of the right forearm may be equal to the inter-joint length of the right upper arm. In yet another alternative, the right forearm and right upper arm may have any other suitable length.

[0216] In the examples of Figures 66A-66D and 67A-67D, the joint-to-joint lengths of the left and right upper arms and left and right forearms are shown as being the same. Similarly, the dimensions of the left and right end effectors, including length and lateral offset, are also shown as being the same. However, the linkage may feature any suitable dimensions of the upper arms, forearms and end effectors.

[0217] To allow two end effectors to simultaneously access parallel offset stations, the distance between the joints coupling the left and right upper arms to the base may be selected to satisfy the following relationship: D=2d0 (1)

[0218] where D is the center-to-center distance between the parallel offset stations (m) and d0 is the distance (m) between the joints connecting the left and right upper arms to the base.

[0219] Furthermore, to allow two end effectors to access the same station simultaneously, the linkage dimensions may be selected to satisfy the following relationship: d0=l2L-l1L+d3L+l2R-l1R+d3R (2)

[0220] The following terms are used in equation (2) above: d3L is the lateral offset of the left end effector (m), d3R is the lateral offset of the right end effector (m), l1L is the joint-to-joint length of the left upper arm (m), l1R is the joint-to-joint length of the right upper arm (m), l2L is the joint-to-joint length of the left forearm (m), and l2R is the joint-to-joint length of the right forearm (m).

[0221] If the robot arm is symmetric, i.e., the left and right linkages have the same dimensions, equation (2) may be simplified to: d0=2(l2-l1+d3) (3)

[0222] where d3 is the lateral offset of the end effector (m), l1 is the inter-articular length of the upper arm (m), and l2 is the inter-articular length of the forearm (m).

[0223] 68A and 68B show schematic diagrams of exemplary mechanisms 1398, 1438 that may be used to drive the base and individual links of a robot, i.e., upper arm, forearm, and end effector. As shown in FIG. 68A and 68B, the base may be driven by a drive shaft 1400, 1448, e.g., T0.

[0224] The left upper arm 1402, 1454 may be actuated by a drive shaft T1L 1420, 1440. The left forearm 1406, 1456 may be coupled to another drive shaft T2L 1422, 1442 via a band mechanism having at least one non-circular pulley. The band mechanism may be designed such that rotation of the left upper arm causes the left wrist joint, i.e., the joint coupling the left end effector to the left forearm, to extend and retract along a straight line parallel to the desired linear path of the left end effector.

[0225] The left end effector 1410 may be constrained by another band mechanism having at least one non-circular pulley that offsets the effects of the unequal lengths of the left upper arm and left forearm, so that the left end effector may move along a straight line while maintaining a desired orientation.

[0226] Alternatively, if l1L=l2L, conventional pulleys may be utilized as shown in FIG 68B. In this embodiment, the band mechanism connecting the left forearm to shaft T2L is designed such that the diameter of the pulley connected to shaft T2L is twice the diameter of the pulley connected to the left forearm. The band mechanism constraining the left end effector is designed such that the diameter of the pulley attached to the left upper arm is half the diameter of the pulley attached to the left end effector.

[0227] Similarly, the right upper arm 1404, 1450 may be actuated by a drive shaft T1R 1424, 1444. The right forearm 1408, 1452 may be coupled to another drive shaft T2R 1426, 1446 via a band mechanism having at least one non-circular pulley. The band mechanism may be designed such that rotation of the right upper arm causes the right wrist joint, i.e., the joint coupling the right end effector to the right forearm, to extend and retract along a straight line parallel to the desired linear path of the right end effector 1412.

[0228] The right end effector 1412 is constrained by another band mechanism having at least one non-circular pulley that offsets the effects of the unequal lengths of the right upper arm and right forearm so that the right end effector may move along a straight line while maintaining a desired orientation.

[0229] Alternatively, if l1R=l2R, conventional pulleys can be utilized as shown in Figure 68B. In this embodiment, the band mechanism connecting the right forearm to shaft T2R is designed such that the diameter of the pulley connected to shaft T2R is twice the diameter of the pulley connected to the right forearm. The band mechanism constraining the right end effector is designed such that the diameter of the pulley attached to the right upper arm is half the diameter of the pulley attached to the right end effector.

[0230] For the entire robot arm to rotate, all drive shafts, i.e., T0, T1L, T2L, T1R, and T2R, must move the same amount relative to a fixed reference frame in the desired direction of rotation of the arm (or drive shaft T0 must move, while the other drive shafts can be considered stationary relative to the base). This is shown diagrammatically in Figures 69A-69C. In this particular example, the entire robot arm rotates 180 degrees counterclockwise.

[0231] In order for the left end effector to extend and retract along a linear path, the drive shaft T1L must move an angle determined based on the inverse kinematic equation for the left linkage while shafts T0 and T2L are stationary. A robot 1500 having a left arm 1502 and a right arm 1504 with the left end effector extended from the initial position in FIG. 69A is shown diagrammatically in FIG. 69D.

[0232] Similarly, for the right end effector to extend and retract along a linear path, the drive shaft T1R must move an angle determined based on the inverse kinematic equation for the right linkage while shafts T0 and T2R are stationary. The robot is shown diagrammatically in Figure 69E with the right end effector extended from the initial position in Figure 69A.

[0233] Both the left and right end effectors of the robot may be extended and retracted simultaneously along a linear path by rotating the drive shafts T1L and T1R in opposite directions, and by the same amounts if the left and right linkages feature the same dimensions. The robot is shown diagrammatically in FIG. 69F with both the left and right end effectors extended from the initial positions of FIG. 69A.

[0234] 69D-69F, the robot can extend and retract each end effector independently or simultaneously to the same station. Thus, the robot can lift and place material, such as a semiconductor wafer, using both end effectors along linear path 1510 independently or simultaneously to the same station.

[0235] The left linkage 1502 and the right linkage 1504 can also rotate independently. For the left linkage to rotate, the drive shafts T1L and T2L must move the same amount in the desired rotational direction. Similarly, for the right linkage to rotate, the drive shafts T1R and T2R must move the same amount in the desired rotational direction.

[0236] When the left and right linkages are independently rotated 180 degrees, the left and right end effectors are laterally offset as shown in the exemplary diagrams shown in Figures 70A-70C. In this particular example, the left linkage 1502 rotates in a clockwise direction while the right linkage 1504 rotates in a counterclockwise direction (preventing risk of collision between the left and right wrist joints). However, the left and right linkages may rotate independently in sequence, in the same direction, or in any other suitable manner.

[0237] As a result of the individual rotations of the left and right linkages described above, the arm is reconfigured such that the centers of the left and right end effectors are laterally offset by a distance D, so long as the robot dimensions satisfy the conditions of equations (1) and (2).

[0238] If the above reconfiguration of the end effector offset by individual rotation of the left and right linkages precedes or follows a rotation of the entire arm, their movements may be conveniently coordinated to minimize the overall duration.

[0239] Once in the position of the diagram in FIG. 70C, the left end effector may again be extended and retracted along a linear path 1512 by moving drive shaft T1L while holding shafts T0 and T2L stationary. Similarly, the right end effector may be extended and retracted along a linear path by moving drive shaft T1R while holding shafts T0 and T2R stationary. Finally, both the left and right end effectors of the robot may be extended and retracted simultaneously along linear paths by rotating drive shafts T1L and T1R in opposite directions, and by the same amount if the left and right linkages feature the same dimensions.

[0240] The robot is shown diagrammatically in Figure 70D with the left end effector extended from the initial position in Figure 70C. The robot is shown diagrammatically in Figure 70E with the right end effector extended from the initial position in Figure 70C. The robot is shown diagrammatically in Figure 70F with both the left and right end effectors extended from the initial positions in Figure 70C.

[0241] 70E-70F, the robot can extend and retract the end effector relative to the two parallel offset stations, thus allowing the robot to lift and place materials, such as semiconductor wafers, relative to the two parallel offset stations independently or simultaneously.

[0242] For example, if the access paths to the parallel offset stations are not parallel, such as paths 1514 or 1516 in FIG. 71, the robot may rotate the left and right linkages individually to align the direction of its extension / retraction paths with the access paths to the stations. An example of such a situation is shown diagrammatically in FIGS. 71A-C. Given the initial position of FIG. 71A, the left and right linkages may be rotated to reconfigure the arm to laterally and angularly offset the end effectors as shown in FIG. 71B. In this particular example, the angular offset between the left and right end effectors is 30 degrees. From the retracted position of FIG. 71B, the left linkage may be extended independently or simultaneously as shown in FIG. 71C.

[0243] The robot may also independently or simultaneously access stations 180 degrees apart as shown in illustrative Figures 71D and 71E. In this particular example, assuming the starting position of Figure 71A, the left and right linkages may first be rotated to the configuration of Figure 71D, and then the left and / or right end effectors may be independently or simultaneously extended as shown in Figure 71E.

[0244] In Fig. 71E, both the left and right linkages are shown extended, however, in alternative embodiments, only one of the two linkages may be extended, where in the configuration shown in Fig. 71E, the reach of the linkages (measured from the center of the robot represented by the axis of the drive shaft T0) is longer, so this configuration may be utilized for stations located farther away from the robot.

[0245] Depending on the number of degrees of freedom required for a particular application, the robot may be driven using a 3-5 axis drive mechanism.

[0246] As shown in two examples 1600, 1700 in Figures 72A and 72B and 72C and 72D, the three-axis drive mechanism may include three independently controlled motors M0, M1, and M2.

[0247] 72A-72D, FIGS. 72A and 72B respectively show top and side views of an exemplary configuration 1600 of a robot drive unit and arm base 1618. Here, motor M0 is directly coupled to shaft T0 1602 to actuate base 1618, motor M1 1604 is directly attached to shaft T1L 1610 to drive the left upper arm, and motor M2 1606 is directly attached to shaft T2R 1616 coupled to the right forearm. Additionally, two belt mechanisms 1620, 1622 are utilized such that shafts T1L 1610 and T1R 1614 rotate in opposite directions to each other, and shafts T2L 1612 and T2R 1616 rotate in opposite directions to each other, respectively. This is similarly accomplished by a crossover band mechanism 1620 between shafts T1L and T1R, and another crossover band mechanism 1622 between shafts T2L and T2R.

[0248] Alternatively, the drive 1700 may have motors M0 1702, M1 1704, and M2 1706 disposed in a drive unit, and motion may be transferred from motors M1 and M2 to shafts T1L 1710, T1R 1714, and T2L 1712, T2R 1716, respectively, using band drives 1720, 1722, as shown in the examples of FIGS. 72C and 72D.

[0249] In yet another alternative, any suitable combination of direct coupling and band mechanisms between the motor and drive shaft may be employed. In general, any suitable means of transmitting motion between the motor and drive shaft that provides the desired motion relationship may be used.

[0250] When a three-axis drive mechanism according to the embodiment of Figures 72A-72D is utilized, the robot may perform all operations defined in Figures 69-71 except for independent extension and retraction of the left and right linkages (Figures 69D, 69E, 70D, 70E).

[0251] The four-axis drive mechanism may comprise four independently controlled motors, as shown in the example diagrams 1800, 1900 of FIG. 73A and FIG. 73B. FIG. 73A and FIG. 73B show top and side views of the robot drive unit and arm base 1802. Motors M0 1804, M1L 1808, and M1R 1810 may be utilized to independently actuate shafts T0 1804, T1L 1808, and T1R 1810, respectively. Motor M2 1806 may be used to actuate shafts T2L 1812 and T2R 1814 such that the two shafts rotate in opposite directions. In the particular example diagrams of FIG. 73A and FIG. 73B, this is accomplished via a straight band mechanism 1820 between a pulley coupled to motor M2 and shaft T2L, and a crossover band mechanism 1822 between another pulley coupled to motor M2 and shaft T2R.

[0252] Alternatively, any combination of direct couplings and band mechanisms or any other suitable motion transmission means between the motors and drive shafts that facilitates independent actuation of shafts T0, T1L, and T1R and coupled actuation of shafts T2L and T2R is employed.

[0253] When such a four-axis drive mechanism is utilized, the robot may perform all of the operations of Figures 69-71, including independent extension and retraction of the left and right linkages.

[0254] The five-axis drive 1900 may comprise five independently controlled motors M0 1904, M1L 1906, M2L 1908, M1R 1910, and M2R 1912. Each of these motors may be coupled to drive shafts T0, T1L, T2L, T1R, and T2R directly as shown in the example diagrams of FIGS. 73C and 73D, via band drives by extending the example diagrams of FIGS. 72C and 72D, using a combination of direct coupling and band mechanisms, or in any other suitable manner that can facilitate the transfer of motion from the motors to the drive shafts. FIG. 73C shows a top view of the drive unit 1900 and base 1902, and FIG. 73D shows a side view.

[0255] When a 5-axis drive mechanism is utilized, the robot may perform all of the operations in Figures 69-71. In addition, the left and right linkages can operate in a completely independent manner, including independent rotation, which is not possible with 3 and 4 axis drive mechanisms.

[0256] The internal configuration of another example of the base and linkage of the robot 2010 of Fig. 66 is shown diagrammatically in Fig. 74A. Again, the base 2012 may be driven by a drive shaft T0.

[0257] The left upper arm 2014 may be actuated by a drive shaft T1L. The left forearm may be driven by another drive shaft T2L via a band mechanism with conventional pulleys. The left end effector may be constrained by another band mechanism with at least one non-circular pulley that offsets the effects of the unequal lengths of the left upper arm and left forearm, so that the left end effector may move along a straight line while maintaining a desired orientation. Alternatively, if l1L=l2L, a conventional pulley may be utilized as shown in FIG. 74B having an arm 2030 with a base 2032, a left arm 2034, and a right arm 2036.

[0258] Similarly, the right upper arm 2016 may be actuated by a drive shaft T1R. The right forearm may be driven by another drive shaft T2R via a band mechanism with conventional pulleys. The right end effector may be constrained by another band mechanism with at least one non-circular pulley that offsets the effects of the unequal lengths of the right upper arm and right forearm, so that the right end effector may move along a straight line while maintaining a desired orientation. Alternatively, if l1R=l2R, conventional pulleys may be utilized as shown in FIG. 74B.

[0259] In order for the entire robot arm to rotate, all drive shafts, i.e., T0, T1L, T2L, T1R and T2R, need to move the same amount relative to a fixed reference frame in the desired direction of rotation of the arm (or drive shaft T0 needs to move while the other drive shafts are stationary relative to the base).

[0260] For the left end effector to extend and retract along a linear path, the drive shafts T1L and T2L must move in coordination based on the inverse kinematic equations of the left linkage. Similarly, for the right end effector to extend and retract along a linear path, the drive shafts T1R and T2R must move in coordination based on the inverse kinematic equations of the right linkage. Example kinematic equations can be found above.

[0261] Both end effectors of the robot can be extended and retracted along a linear path by simultaneously rotating the drive shafts T1L, T2L and T1R, T2R in the manner described above for independently extending the left and right end effectors.

[0262] The left and right linkages can also be rotated independently. For the left linkage to rotate, drive shafts T1L and T2L must move the same amount in the desired rotational direction. Similarly, for the right linkage to rotate, drive shafts T1R and T2R must move the same amount in the desired rotational direction. Similar to Figures 68A and 68B, when the left and right linkages are independently rotated 180 degrees, the left and right end effectors are laterally offset (see Figures 70A-C).

[0263] Considering the above motor capabilities, a robot having the internal configuration according to Figures 74A and 74B may perform the same operations as outlined in Figures 69-71.

[0264] The base and linkage having the internal configuration of Figures 74A and 74B may be driven by the 3-axis and 5-axis drive mechanisms of Figures 72 and 73C, 73D, respectively.

[0265] Another exemplary embodiment of a robot 2100 is shown in the views of Figures 75A and 75B, where Figure 75A shows a top view of the robot with both linkages retracted and Figure 75B shows the robot with both end effectors extended.

[0266] An example of the internal configuration of the robot 2330 is shown diagrammatically in Figure 76A, which shows a base 2332 with equal length upper and forearm linkages 2334, 2336 and circular pulleys, although unequal length and non-circular pulleys may be utilized.

[0267] The robot may be actuated by the drive mechanism described above with reference to Figures 72 and 73.

[0268] An alternative internal configuration 2360 of the robot of Figures 75A and 75B is shown diagrammatically in Figure 76B, which shows a base 2362 and linkages 2364, 2366 with equal upper and forearm lengths and circular pulleys, although unequal length non-circular pulleys may be utilized.

[0269] The robot may be actuated by a drive mechanism according to Figure 72 and Figures 73C, 73D.

[0270] Yet another exemplary embodiment of the robot 2200 is shown in Figures 75C and 75D. Figure 75C shows a top view of the robot with both linkages retracted, and Figure 75D shows the robot with both end effectors extended. Figures 75C and 75D show the linkages of the robot in a left-handed configuration. Alternatively, the linkages may be configured in a right-handed configuration, as shown in Figures 75E and 75F with the robot 2300.

[0271] An exemplary internal configuration 2390 of an embodiment according to Figures 75C and 75D is shown diagrammatically in Figure 76C. Similarly, an exemplary internal configuration 2430 of an embodiment according to Figures 75E and 75F is shown diagrammatically in Figure 76D. Although Figures 76C and 76D show linkages 2394, 2396, 2434, 2436 with equal upper and forearm lengths and circular pulleys, unequal length and non-circular pulleys may also be utilized.

[0272] The robot may be actuated by the drive mechanism according to Figs. 77A-77D, 78A-78B, and 73C and 73D. In Figs. 77A and 77B, the drive 2500 has a base 2504 driven by a motor M0 2502. M1 2506 drives T1l 2510, M2 2508 drives T2r 2516, T1l 2510 and t1r 2514 are constrained by a band, and T2l 2512 and T2r 2516 are constrained by a band. In Figs. 77C and 77D, the drive 2560 has a base 2562 driven by a motor M0 2564. M1 2566 drives T1l 2570, M2 2568 drives T2r 2576, T1l 2570 and t1r 2574 are constrained by a band, and T2l 2572 and T2r 2576 are constrained by a band. In Fig. 78A and Fig. 78B, the drive 2700 has a base 2702 driven by a motor M0 2704. M1l 2706 drives T1l, M1r 2708 drives T1r, and M2 2710 drives T2r 2714 and T2l 2712 by a band.

[0273] For example, if a three-axis drive mechanism according to the embodiment of Fig. 77 is utilized, the robot may perform all of the operations defined in Figs. 69 and 70 except for the independent extension and retraction of the left and right linkages (Figs. 69D, 69E, 70D, 70E). The robot cannot simultaneously extend and retract along the non-parallel and opposing paths of Fig. 71.

[0274] If a four-axis drive mechanism is utilized, such as the embodiment of Figure 78, the robot may perform all of the operations of Figures 69 and 70, including independent extension and retraction of the left and right linkages. The robot cannot simultaneously extend and retract along the non-parallel and opposing paths of Figure 71.

[0275] When a 5-axis drive mechanism is utilized, the robot may perform all of the operations in Figures 69-71. In addition, the left and right linkages can operate in a completely independent manner, including independent rotation, which is not possible with 3 and 4 axis drive mechanisms.

[0276] The present disclosure exhibits a favorable ratio of reach to storage volume. In combination with the three-axis drive mechanism of Figures 77A and 77B, it also provides a low profile and low complexity. Additionally, the present disclosure in combination with the four-axis drive mechanism accommodates independent extension of the left and right linkages.

[0277] Alternative internal configurations 2800, 2830 of the exemplary embodiment of the diagrams of Figures 75A-75D are shown diagrammatically in Figures 79A and 79B, respectively, which show bases 2802, 2832 with equal length upper and forearm linkages 2804, 2806, 2834, 2836 and circular pulleys, although unequal length and non-circular pulleys may be utilized.

[0278] The robot may be actuated by a drive mechanism according to Figures 77 and 73C and 73D.

[0279] Although the left and right linkages are shown in the figures with the same dimensions, the left linkage may have different dimensions than the right linkage, and the drive unit may be configured to reflect the dimensional differences.

[0280] A robotic arm may be designed such that some of its links, such as the upper arm and / or forearm, are below one or both of the end effectors and other links are above one or both of the end effectors.

[0281] When the terms "band mechanism" and "band drive" are used, they collectively refer to means for transmitting motion, force, and / or torque, including bands, belts, cables, gears, or any other suitable mechanism.

[0282] Although the motors of the robot are shown throughout the text as being directly attached to shafts, pulleys, and other driven components in the figures, they may be coupled to the driven components via additional bands, belts, cables, gears, or any suitable mechanism capable of transmitting motion, force, and / or torque.

[0283] Although the motors of the robot are depicted in the drive unit or base in the drawings throughout the text, the motors may also be located in the robot arm, for example as part of the upper arm or forearm, or may be integrated into the robot's rotary joints.

[0284] The drive unit of the robot may further comprise a vertical lift mechanism for adjusting the height of the entire robot arm. Alternatively, the drive unit may comprise two vertical lift mechanisms, one for the left linkage and the other for the right linkage, for independently adjusting the height of the left and right linkages, where the end effectors may be stacked or set at the same height or otherwise positioned independently in the z-axis.

[0285] In alternative embodiments, any number and type of suitable mechanisms may be used within the robot drive and / or robot arm to control the height of the robot's left and right end effectors.

[0286] The robot may further comprise a traverser mechanism capable of moving the robot along a tunnel, for example when the robot is installed in the tunnel.

[0287] In another embodiment, the robot may be designed to operate in an upside down configuration, for example with support provided from the top rather than from the bottom.

[0288] The robot may be combined with another robot of the same or similar type, for example in an inverted configuration, to provide a system with four end effectors capable of accommodating rapid material changes.

[0289] A robot may be designed for operation in a special environment, such as in a vacuum, which may include the use of static and / or dynamic seals and other means of isolating some of the robot's components from the operating environment.

[0290] FIG. 80A illustrates a system 2900 having a robot. A robot drive unit 2904 may be configured to be movable relative to a stationary portion 2902 of the system, as indicated by arrows 2906, 2908. By way of example, the robot drive unit may be on rails, linear bearings, magnetic bearings, or coupled to the stationary portion of the system in any suitable manner that allows the robot drive unit to move relative to the stationary portion of the system. By way of example, the robot drive unit may be actuated by an electric linear motor with windings in the drive unit, by an electric linear motor with windings in the stationary portion of the system, via a magnetic coupling, with a pneumatic or hydraulic actuator, via a ball screw, via a cable or belt, or utilizing any other suitable mechanism that can actuate the robot drive unit relative to the stationary portion of the system. As previously described, the robot drive unit may include a pivoting base and a robot arm. In FIG. 80A, the pivoting base is actuated relative to the robot drive unit, as indicated by the arrows.

[0291] FIG. 80B illustrates a system 3000 having a configuration in which the pivoting base 3004 is actuated directly relative to the stationary portion 3002 of the system, as indicated by arrows 3006, 3008 at the sides of the pivoting base. When both sides of the pivoting base are synchronously actuated in the same direction and by the same amount, the entire robot translates in the corresponding direction. When the sides of the pivoting base are synchronously actuated in the opposite direction and by the same amount, the pivoting base rotates while its center remains fixed. Any combination of translation and rotation can be achieved by actuating the sides of the pivoting base accordingly. As an example, the base may be actuated by an electric linear motor with windings in the pivoting base, by an electric linear motor with windings in the stationary portion of the system, via a magnetic coupling, via a ball screw, via a cable or belt, or utilizing any other suitable mechanism that can actuate the pivoting base relative to the stationary portion of the system.

[0292] In one aspect of an exemplary embodiment, an apparatus includes at least one actuator; a first robot arm including a first upper arm, a first forearm, and a first end effector, the first upper arm being connected to the at least one actuator at a first axis of rotation; and a second robot arm including a second upper arm, a second forearm, and a second end effector, the second upper arm being connected to the at least one actuator at a second axis of rotation spaced from the first axis of rotation, the first and second robot arms controlling the first and second end effectors to at least partially rotate a plurality of substrates disposed on the end effectors. and configured to set the first and second robotic arms in a first retracted position for stacking one above the other, the first and second robotic arms configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, the first and second robotic arms configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other, the first upper arm and first forearm having different effective lengths, and the second upper arm and second forearm having different effective lengths.

[0293] In another aspect, the apparatus includes at least one non-circular pulley and a first band connecting the at least one driver to the first forearm at a first joint between the first upper arm and the first forearm.

[0294] In another aspect, the device includes a second band connecting the first end effector to a first forearm at a wrist joint of the first end effector.

[0295] In another aspect, the apparatus includes where the first and second end effectors each have a generally L-shape.

[0296] In another aspect, the apparatus includes a first circular pulley and a first band connecting the at least one driver to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0297] In another aspect, the apparatus includes where the first path is along a straight line from the first retracted position.

[0298] In another aspect, the apparatus includes a configuration in which the first and second robotic arms are configured to provide a second retracted position to set the first and second end effectors such that the plurality of substrates disposed on the end effectors are not stacked one on top of the other.

[0299] In another aspect, the apparatus includes a controller configured to control the at least one drive to move the first and second robotic arms substantially simultaneously along a first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0300] In another aspect, a method includes providing a first robotic arm having a first upper arm, a first forearm, and a first end effector, the first upper arm and the first forearm having different effective lengths; providing a second robotic arm having a second upper arm, a second forearm, and a second end effector, the second upper arm and the second forearm having different effective lengths; connecting the first upper arm to at least one drive at a first axis of rotation; and connecting the second upper arm to the at least one drive at a second axis of rotation spaced from the first axis of rotation; a robot arm configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first and second robot arms configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0301] In another aspect, the method involves at least one non-circular pulley at the first axis of rotation and a first band connecting the at least one driver to the first forearm at a first joint between the first upper arm and the first forearm.

[0302] In another aspect, the method involves a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0303] In another aspect, the method involves a first circular pulley and a first band connecting the at least one driver to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0304] In another aspect, the method includes where the first and second robotic arms are configured to provide the first path along a straight line from the first retracted position.

[0305] In another aspect, the method includes configuring the first and second robotic arms to provide a second retracted position to set the first and second end effectors such that the substrates disposed on the end effectors are not stacked one on top of the other.

[0306] In another aspect, the method includes connecting the at least one driver to a controller configured to control the at least one driver to move the first and second robotic arms substantially simultaneously from the first retracted position along the first path and to move the first and second robotic arms independently or simultaneously along the second path.

[0307] In another aspect, a method includes setting a first end effector of a first robot arm and a second end effector of a second robot arm to a first retracted position to at least partially stack substrates disposed on the end effectors one above the other, where the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm connected to at least one drive device at a first rotational axis, and the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm connected to the at least one drive device at a second rotational axis spaced from the first rotational axis. The method further includes moving the first and second robotic arms to move the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below, and moving the first and second robotic arms to extend the first and second end effectors in at least a second direction along a second path that is not above and is spaced apart from one another.

[0308] In another aspect, the method includes where moving the first and second robotic arms involves at least one non-circular pulley and a first band connecting the at least one drive to the first forearm at a first joint between the first upper arm and the first forearm.

[0309] In another aspect, the method includes where moving the first and second robotic arms involves a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0310] In another aspect, the method further comprises moving the first and second robotic arms with a first circular pulley and a first band connecting the at least one drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0311] In another aspect, the method involves a controller controlling the at least one drive to move the first and second robotic arms substantially simultaneously along the first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0312] In another aspect, an apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms, the first upper arm being connected to the drive at a first axis of rotation and the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation, the drive including only three motors for rotating the first and second upper arms, and the first and second robotic arms being configured to rotate the first and second robotic arms. the first and second robot arms are configured to set the end effectors of the end effectors at a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, and the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0313] In another aspect, the apparatus includes where the first upper arm and the first forearm have different effective lengths and the second upper arm and the second forearm have different effective lengths.

[0314] In another aspect, the apparatus includes at least one non-circular pulley and a first band connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm.

[0315] In another aspect, the apparatus includes a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0316] In another aspect, the apparatus includes where the first and second end effectors each have a generally L-shape.

[0317] In another aspect, the apparatus includes a first circular pulley and a first band connecting the drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0318] In another aspect, the apparatus includes where the first path is along a straight line from the first retracted position.

[0319] In another aspect, the apparatus includes a configuration in which the first and second robotic arms are configured to provide a second retracted position to set the first and second end effectors such that the plurality of substrates disposed on the end effectors are not stacked one on top of the other.

[0320] In another aspect, the apparatus includes a controller configured to control the drives to move the first and second robotic arms substantially simultaneously along the first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0321] In another embodiment, the apparatus includes where the three motors are aligned on a common axis.

[0322] In another aspect, the apparatus includes where the three motors are arranged on three corresponding spaced apart axes.

[0323] In another aspect, the apparatus includes a drive unit and a z-axis motor connected to the drive unit for vertically moving the first and second robotic arms.

[0324] In another aspect, a method includes setting a first end effector of a first robot arm and a second end effector of a second robot arm to a first retracted position to at least partially stack substrates disposed on the end effectors one above the other, where the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm connected to a drive at a first axis of rotation, and the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm connected to the drive at a second axis of rotation spaced from the first axis of rotation. The method further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position; moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not above and spaced from each other; and rotating the first and second robot arms together about a third axis of rotation that is spaced from the first and second axes of rotation, wherein the moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using only three motors of a drive arrangement.

[0325] In another aspect, the method includes where moving the first and second robotic arms involves at least one non-circular pulley and a first band connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm.

[0326] In another aspect, the method includes where moving the first and second robotic arms involves a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0327] In another aspect, the method further includes moving the first and second robotic arms involving a first circular pulley and a first band connecting the drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0328] In another aspect, the method includes the step of controlling the motor of the drive device to move first and second robotic arms substantially simultaneously along the first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0329] In another aspect, a method includes providing a first robotic arm having a first upper arm, a first forearm, and a first end effector; providing a second robotic arm having a second upper arm, a second forearm, and a second end effector; connecting the first upper arm to a drive at a first axis of rotation; and connecting the second upper arm to the drive at a second axis of rotation spaced from the first axis of rotation, the first and second robotic arms being configured to set the first and second end effectors to a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other; and the first and second robotic arms being configured to at least partially stack the first and second end effectors at a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other. and the first and second robot arms are configured to be rotated from a first retracted position to extend the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms are configured to be rotated to extend the first and second end effectors in at least a second direction along a second path that is not above and is spaced from each other, and the drive comprises only three motors for rotating the first and second robot arms to extend the first and second end effectors and for rotating the first and second robot arms about a third axis of rotation that is spaced from the first and second axes of rotation.

[0330] In another aspect, the method includes where the first robotic arm comprises the first upper arm and the first forearm having different effective lengths, and where the second robotic arm comprises the second upper arm and the second forearm having different effective lengths.

[0331] In another aspect, the method involves at least one non-circular pulley at the first axis of rotation and a first band connecting the driver to the first forearm at a first joint between the first upper arm and the first forearm.

[0332] In another aspect, the method involves a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0333] In another aspect, the method involves a first circular pulley and a first band connecting the driver to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0334] In another aspect, the method includes where the first and second robotic arms are configured to provide the first path along a straight line from the first retracted position.

[0335] In another aspect, the method includes configuring the first and second robotic arms to provide a second retracted position to set the first and second end effectors such that the substrates disposed on the end effectors are not stacked one on top of the other.

[0336] In another aspect, the method includes connecting the drivers to a controller configured to control the drivers to move the first and second robotic arms substantially simultaneously along the first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0337] In another aspect, an apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms, the first upper arm connected to the drive at a first axis of rotation and the second upper arm connected to the drive at a second axis of rotation spaced from the first axis of rotation, the drive including five motors for rotating the first and second upper arms, a first of the motors connected to the first and second robotic arms for rotating the first and second robotic arms about a third axis of rotation spaced from the first and second axes of rotation, and a second and third motor connected to the first robotic arm for rotating the first upper arm and the second forearm, respectively. a first motor connected to the second robot arm for rotating the first upper arm and the second forearm, and fourth and fifth motors connected to the second robot arm for respectively rotating the second upper arm and the second forearm independently of the first robot arm, the first and second robot arms configured to set the first and second end effectors to a first retracted position for stacking a plurality of substrates disposed on the end effectors at least partially one above the other, the first and second robot arms configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other, and the first and second robot arms configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0338] In another aspect, the apparatus includes where the first upper arm and the first forearm have different effective lengths and the second upper arm and the second forearm have different effective lengths.

[0339] In another aspect, the apparatus includes at least one non-circular pulley and a first band connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm.

[0340] In another aspect, the apparatus includes a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

[0341] In another aspect, the apparatus includes where the first and second end effectors each have a generally L-shape.

[0342] In another aspect, the apparatus includes a first circular pulley and a first band connecting the drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys having different diameters.

[0343] In another aspect, the apparatus includes where the first path is along a straight line from the first retracted position.

[0344] In another aspect, the apparatus includes a configuration in which the first and second robotic arms are configured to provide a second retracted position to set the first and second end effectors such that the plurality of substrates disposed on the end effectors are not stacked one on top of the other.

[0345] In another aspect, the apparatus includes a controller configured to control the drives to move the first and second robotic arms substantially simultaneously along a first path from the first retracted position and to move the first and second robotic arms independently or simultaneously along the second path.

[0346] In another aspect, the apparatus includes a drive unit and a z-axis motor connected to the drive unit for vertically moving the first and second robotic arms.

[0347] In another aspect, a method includes setting a first end effector of a first robot arm and a second end effector of a second robot arm to a first retracted position to at least partially stack substrates disposed on the end effectors one above the other, where the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm connected to a drive at a first axis of rotation, and the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm connected to the drive at a second axis of rotation spaced from the first axis of rotation. The method further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position, moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not above and spaced apart from each other, and rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation. The moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using five motors of the drive. A first of the motors is connected to the first and second robotic arms to rotate the first and second robotic arms about the third axis of rotation, a second and third motor is connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motor is connected to the second robotic arm to rotate the second upper arm and second forearm, respectively, independently of the first robotic arm.

[0348] In another aspect, the method or apparatus includes where the first motor is aligned to the third axis of rotation, the second and third motors are aligned to each other on the first axis of rotation, and the fourth and fifth motors are aligned to each other on the second axis of rotation.

[0349] In another aspect, a method includes providing a first robot arm having a first upper arm, a first forearm, and a first end effector; providing a second robot arm having a second upper arm, a second forearm, and a second end effector; connecting the first upper arm to a drive at the first axis of rotation; and connecting the second upper arm to the drive at a second axis of rotation spaced from the first axis of rotation, the first and second robot arms being configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first and second robot arms being configured to be rotated from the first retracted position to extend the first and second end effectors in a first direction along parallel first paths at least partially located directly above each other, the first and second robot arms being configured to and configured to be rotated to extend the first and second end effectors in at least one second direction along a second path that is not above and below and spaced apart from one another, and for rotating the first and second robot arms to extend the first and second end effectors and for rotating the first and second robot arms about a third axis of rotation spaced apart from the first and second axes of rotation, the drive device comprising five motors, a first of the motors being connected to the first and second robot arms to rotate the first and second robot arms about the third axis of rotation, a second and third motor being connected to the first robot arm to rotate the first upper arm and first forearm, respectively, and a fourth and fifth motor being connected to the second robot arm to rotate the second upper arm and second forearm, respectively, independently of the first robot arm.

[0350] In another aspect, an apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive connected to the first and second robotic arms, the first upper arm being connected to the drive at a first axis of rotation and the second upper arm being connected to the drive at a second axis of rotation spaced apart from the first axis of rotation, the drive including four motors for rotating the first and second upper arms, a first of the motors being connected to the first upper arm, a second of the motors being connected to the second upper arm, a third of the motors being connected to the first forearm, and a fourth of the motors being connected to the second forearm, the third and fourth of the motors being connected to the second forearm, and the third and fourth of the motors being connected to the first and second axes of rotation. a first motor aligned on a first axis of rotation and a second motor aligned on a second axis of rotation; the first and second robot arms are configured to set the first and second end effectors in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other; the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along parallel first paths that are at least partially directly above and below each other; and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not directly above and is spaced apart from each other.

[0351] In an exemplary embodiment, an apparatus is provided that includes at least one processor and at least one non-transitory memory including computer program code, the at least one memory and the computer program code, in conjunction with the at least one processor, cause the apparatus to set a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position to at least partially stack a plurality of substrates disposed on the first and second end effectors, the first robot arm including a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, the second robot arm including a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation, and move the first and second robot arms to stack the substrates on the first and second end effectors. moving the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from a first retracted position; moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not directly above and spaced from each other; and rotating the first and second robot arms together about a third rotation axis that is spaced from the first and second rotation axes; and wherein the moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are configured to be performed by use of only three motors of the drive.

[0352] According to an exemplary embodiment, there is provided an apparatus comprising a machine readable non-transitory program storage device tangibly embodying a program of instructions executable by the machine to perform an operation including setting a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position to at least partially stack a plurality of substrates disposed on the first and second end effectors, wherein the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, and the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation. The manipulation further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position, moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not above and spaced apart from each other, and rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation. The moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using only three motors of the drive.

[0353] In one exemplary embodiment, an apparatus is provided that includes at least one processor and at least one non-transitory memory that includes computer program code. The at least one memory and the computer program code, in conjunction with the at least one processor, cause the apparatus to set a first end effector of a first robot arm and a second end effector of a second robot arm to a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors one above the other, the first robot arm comprising a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, the second robot arm comprising a second upper arm, a second forearm and the second end effector, the second upper arm being connected to a drive at a second axis of rotation spaced from the first axis of rotation, moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along parallel first paths at least partially located directly above and below each other, and rotating the first and second robot arms together about a third axis of rotation spaced from the first and second axes of rotation, and the moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed by use of five motors of the drive arrangement, a first of the motors being connected to the first and second robot arms and configured to rotate the first and second robot arms about the third axis of rotation, a second and third motor being connected to the first robot arm and configured to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motor being connected to the second robot arm and configured to rotate the second upper arm and the second forearm, respectively, independent of the first robot arm.

[0354] According to an exemplary embodiment, there is provided an apparatus comprising a machine readable non-transitory program storage device tangibly embodying a program of instructions executable by the machine to perform an operation including setting a first end effector of a first robot arm and a second end effector of a second robot arm in a first retracted position for at least partially stacking a plurality of substrates disposed on the end effectors, the first robot arm comprising a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first axis of rotation, and the second robot arm comprising a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second axis of rotation spaced from the first axis of rotation. The manipulation further includes moving the first and second robot arms to move the first and second end effectors in a first direction along parallel first paths that are at least partially directly above and below each other from the first retracted position, moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not directly above and spaced apart from each other, and rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation. The moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed using five motors of the drive.A first of the motors is configured to be connected to the first and second robotic arms to rotate the first and second robotic arms about the third axis of rotation, a second and third motors are configured to be connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and a fourth and fifth motors are configured to be connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm.

[0355] Any combination of one or more computer readable media may be utilized as memory. The computer readable media may be computer readable signal media or non-transitory computer readable storage media. The non-transitory computer readable storage media does not include a propagating signal, and may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the above. More specific examples (non-exhaustive list) of computer readable storage media include an electrical connection with one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a Read-Only Memory (ROM), an Erasable Programmable Read-Only Memory (EPROM or Flash memory), an optical fiber, a portable Compact Disc Read-Only Memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.

[0356] It should be understood that the above description is illustrative only. Various alternatives and modifications may be devised by those skilled in the art. Accordingly, the present embodiments are intended to embrace all such alternatives, modifications, and variations. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination. In addition, features of the various embodiments described above may be selectively combined to form new embodiments. Accordingly, the present description is intended to embrace all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. An apparatus comprising: A drive unit; a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm connected to the drive at a first axis of rotation, the first end effector comprising two laterally spaced substrate holding areas; a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, the second upper arm connected to the drive at the first axis of rotation, the second end effector comprising two laterally spaced substrate holding areas; having the first robotic arm is configured to position the first end effector in a first retracted position overlying the second end effector, and the first robotic arm is configured to extend the first end effector from the first retracted position to a first extended position in a first direction above the second end effector without moving the second robotic arm; the second robotic arm is configured to position the second end effector in a second retracted position overlapping the first end effector, and the second robotic arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction beneath the first end effector without moving the first robotic arm; Device.

2. The apparatus of claim 1 , wherein the first upper arm and the first forearm have different effective lengths and the second upper arm and the second forearm have different effective lengths.

3. 3. The apparatus of claim 2, wherein the first forearm and the second forearm have different effective lengths.

4. 4. The apparatus of claim 3, wherein the first upper arm and the second upper arm have different effective lengths.

5. 2. The apparatus of claim 1, wherein the first upper arm and the first forearm have the same effective length.

6. 10. The apparatus of claim 1, wherein the first end effector is U-shaped and the first forearm is coupled to the first end effector at a location off-center of the U-shaped configuration.

7. 10. The apparatus of claim 1, wherein the first end effector is V-shaped and the first forearm is coupled to the first end effector at a location off-center of the V-shaped configuration.

8. 2. The apparatus of claim 1, wherein the first upper arm is located between the second upper arm and the second forearm when the first and second robotic arms are in the first and second retracted positions, respectively.

9. The apparatus of claim 8 , wherein the first end effector is coupled to an underside of the first forearm.

10. 10. The apparatus of claim 9, wherein the first and second end effectors are connected to an upper side of the second forearm, when the first and second robotic arms are in their respective first and second retracted positions, the second end effector is aligned below and directly opposite a bottom of the first end effector.

11. 2. The apparatus of claim 1, further comprising a mechanically driven transmission connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm for rotating the first forearm, the transmission comprising at least one non-circular pulley and a first band.

12. The apparatus of claim 11 , further comprising a second band connecting the first end effector to the first joint at a wrist joint of the first end effector to the first forearm.

13. 2. The apparatus of claim 1, further comprising a first circular pulley and a first band, the first band connecting the drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first circular pulley and the second circular pulley having different diameters.

14. An apparatus comprising: a drive section comprising a plurality of coaxial drive shafts; a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm connected to a first of the plurality of coaxial drive shafts, the first end effector comprising two laterally spaced substrate holding areas, the first forearm connected to the first end effector at a first wrist connection offset from a first centerline of the first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector, the second upper arm connected to a second one of the plurality of coaxial drive shafts, the second end effector comprising two laterally spaced substrate holding areas, the second forearm connected to the second end effector at a second wrist connection offset from a second centerline of the second end effector; Equipped with the first robotic arm is configured to position the first end effector in a first retracted position overlying the second end effector, and the first robotic arm is configured to extend the first end effector in a first direction above the second end effector from the first retracted position to a first extended position; the second robotic arm is configured to position the second end effector in a second retracted position overlapping the first end effector, and the second robotic arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction beneath the first end effector; Device.

15. 15. The apparatus of claim 14, wherein the second centerline lies below and aligned with the first centerline when the first and second robotic arms are in the first and second retracted positions, respectively.

16. The apparatus of claim 14 , wherein the first centerline of the first end effector is aligned with a linear extension path of the first end effector from the first retracted position to the first extended position.

17. 15. The apparatus of claim 14, wherein the first robotic arm is configured to extend the first end effector in the first direction from the first retracted position without moving the second robotic arm.

18. 15. The apparatus of claim 14, wherein the second robotic arm is configured to extend the second end effector from the second retracted position to the second extended position without moving the first robotic arm.

19. The apparatus of claim 1 , wherein the first upper arm and the first forearm have different effective lengths and the second upper arm and the second forearm have different effective lengths.

20. 3. The apparatus of claim 2, wherein the first forearm and the second forearm have different effective lengths.

21. 15. The apparatus of claim 14, wherein the first upper arm and the second upper arm have different effective lengths.

22. 15. The apparatus of claim 14, wherein the first upper arm and the first forearm have the same effective length.

23. 10. The apparatus of claim 1, wherein the first end effector is U-shaped and the first forearm is coupled to the first end effector at a location off-center of the U-shaped configuration.

24. 10. The apparatus of claim 1, wherein the first end effector is V-shaped and the first forearm is coupled to the first end effector at a location off-center of the V-shaped configuration.

25. 2. The apparatus of claim 1, wherein the first upper arm is located between the second upper arm and the second forearm when the first and second robotic arms are in the first and second retracted positions, respectively.

26. 26. The apparatus of claim 25, wherein the first end effector is coupled to an underside of the first forearm.

27. 27. The apparatus of claim 26, wherein the first and second end effectors are connected to an upper side of the second forearm, when the first and second robotic arms are in their respective first and second retracted positions, the second end effector is aligned below and directly opposite a bottom of the first end effector.

Images