Test device and test method and program

Abstract

To provide a test device that detects the optical power of each wavelength of input light containing n (n is a natural number) mutually different wavelengths emitted from the device under test.SOLUTION: A test device comprises: a propagation unit capable of switching n or more propagation wavelength characteristics that are mutually different with respect to input light and propagating input light containing n wavelengths from a device under test using n propagation wavelength characteristics; an optical power detection unit for detecting the optical power of n propagation light pieces propagated from the propagation part using n propagation wavelength characteristics; and an optical power operation part that calculates the optical power of each wavelength contained in the input light based on the optical power of n propagation light pieces detected by the optical power detection unit and the characteristics of n propagation wavelengths.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a test apparatus, a test method, and a program. [Background technology]

[0002] Patent Document 1 states, "According to the WDM optical amplifier, a gain equalizer having a variable loss wavelength characteristic is provided, and the variable loss wavelength characteristic is controlled in response to a change in the input optical power, so that the gain wavelength characteristic of the optical amplifier, which changes in response to the input optical power, can be reliably compensated for, and output optical power with a flat wavelength characteristic can be obtained." (Paragraph 0105) The machine translation of Patent Document 2 states, "When the data analysis module (109) calibrates the flat spontaneous emission spectrum, it can take into account a sudden change in the spectral shape of the sampled signal at short wavelengths, and the power fluctuations of the input and output ASE at the sampling points are combined and corrected and calibrated." (Paragraph 0061) [Prior art document] [Patent documents] [Patent Document 1] JP 2000-252923 A [Patent Document 2] CN 105281827 A Summary of the Invention

[0003] In a first aspect of the present invention, there is provided a test apparatus for detecting optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test. The test apparatus includes a propagation section capable of switching between n or more mutually different propagation wavelength characteristics for the input light and propagating the input light including the n wavelengths from the device under test with the n propagation wavelength characteristics, an optical power detection section for detecting optical power of the n propagation light propagated from the propagation section with the n propagation wavelength characteristics, and an optical power calculation section for calculating optical power for each of the n wavelengths included in the input light from the optical power of the n propagation light detected by the optical power detection section based on the n propagation wavelength characteristics.

[0004] In the above test apparatus, at least one of the n propagation wavelength characteristics may be a characteristic for propagating propagation light including at least two wavelengths of the n wavelengths.

[0005] In any of the above test devices, the optical power calculation section may back-calculate the optical power for each of the n wavelengths from the optical power of the n propagating lights based on the propagation wavelength characteristics of the n lights.

[0006] In any of the above test devices, the optical power calculation unit may back-calculate the optical power for each of the n wavelengths from the optical power of the n propagating lights based on the n propagation wavelength characteristics that are specified in advance using reference input light for each of the n wavelengths, each of which has a known optical power.

[0007] In any of the above test devices, the n propagation wavelength characteristics may have a total of n×n propagation wavelength characteristic elements by including n propagation wavelength characteristic elements for each of the n wavelengths. In any of the above test devices, the optical power calculation unit may calculate the n propagation wavelength characteristics in advance by calculating the n×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the n wavelengths and the optical power of n×n reference propagation lights propagated with the n propagation wavelength characteristics for each of the n wavelengths from the propagation unit to which the reference input lights for the n wavelengths are input, detected by the optical power detection unit.

[0008] In any of the above test devices, the wavelengths of the n reference input lights may include wavelengths other than the n wavelengths included in the input light, and the wavelength bands of the n reference input lights may at least partially overlap with the wavelength bands of the n wavelengths included in the input light. In any of the above test devices, the n propagation wavelength characteristics may have a total of n×n propagation wavelength characteristic elements by including n propagation wavelength characteristic elements for each of the n wavelengths. In any of the above test devices, the optical power calculation unit may calculate the n×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the n wavelengths and the optical power of n×n reference propagation lights propagated with the n propagation wavelength characteristics for the n wavelengths from the propagation section to which the reference input light for the n wavelengths is input, as detected by the optical power detection unit, and may calculate the n propagation wavelength characteristics in advance by using the calculated n×n propagation wavelength characteristic elements to interpolate n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light.

[0009] In any of the above test devices, the optical power calculation unit may back-calculate the optical power for each of the n wavelengths from the optical power of the n propagation light based on the n propagation wavelength characteristics previously specified using reference input light for each of m (m ≠ n) wavelengths, each of which has a known optical power. In any of the above test devices, the m wavelengths may include wavelengths other than the n wavelengths, and a wavelength band of the m wavelengths may at least partially overlap with the wavelength band of the n wavelengths.

[0010] In any of the above test devices, the n propagation wavelength characteristics may have a total of n×n propagation wavelength characteristic elements by including n propagation wavelength characteristic elements for each of the n wavelengths. In any of the above test devices, the optical power calculation unit may calculate the m×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the m wavelengths and the optical power of m×n reference propagation lights propagated with the n propagation wavelength characteristics for the m wavelengths from the propagation unit to which the reference input lights for the m wavelengths are input, detected by the optical power detection unit, and may calculate the n propagation wavelength characteristics in advance by interpolating the n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light using the calculated m×n propagation wavelength characteristic elements.

[0011] In any of the above test devices, the n propagation wavelength characteristics may be characteristics that maintain or amplify only the optical power of one or more different wavelengths among the n wavelengths and attenuate the optical power of the remaining wavelengths.

[0012] In any of the above test devices, the n propagation wavelength characteristics may be a characteristic that maintains the optical power of only a plurality of different wavelengths among the n wavelengths and sets the optical power of the remaining wavelengths to zero, or a characteristic that sets the optical power of only one different wavelength among the n wavelengths to zero and maintains the optical power of the remaining wavelengths.

[0013] In any of the above test devices, the propagation section may be capable of switching between the n or more propagation wavelength characteristics by controlling at least one of temperature, voltage, current, charge, magnetic flux, and pressure applied to a material with variable optical properties, by changing the physical dimensions of the optical path of the propagating light using at least one of a servo motor, a piezoelectric element, and a bimetal, or by switching between n or more propagation devices that propagate light with different propagation wavelength characteristics.

[0014] Any of the above test apparatuses may further include a judging section that judges whether the device under test is good or bad based on the optical power for each of the n wavelengths calculated by the optical power calculating section.

[0015] In a second aspect of the present invention, there is provided a test method for detecting optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test. The test method includes: propagating input light including the n wavelengths from the device under test with n propagation wavelength characteristics by a propagation unit capable of switching between n or more mutually different propagation wavelength characteristics for the input light, detecting optical power of the n propagated light propagated from the propagation unit with the n propagation wavelength characteristics, and calculating optical power for each of the n wavelengths included in the input light from the detected optical power of the n propagated light based on the n propagation wavelength characteristics.

[0016] In a third aspect of the present invention, there is provided a program, which causes a test apparatus, which detects optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test, to execute the steps of: propagating the input light including the n wavelengths from the device under test with n propagation wavelength characteristics by a propagation unit capable of switching between n or more mutually different propagation wavelength characteristics for the input light, detecting optical power of the n propagation light propagated from the propagation unit with the n propagation wavelength characteristics, and calculating optical power for each of the n wavelengths included in the input light based on the n propagation wavelength characteristics from the optical power of the detected n propagation light.

[0017] The above summary of the invention does not list all of the features of the present invention. Also, subcombinations of these features may also be inventions. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a schematic diagram of a test system according to one embodiment. [Diagram 2]1 is a diagram for explaining a method for detecting the optical power of each of n wavelengths contained in input light from a DUT by a test apparatus according to an embodiment. [Diagram 3] 10 is a diagram for explaining an example of n propagation wavelength characteristics of a propagation section in a test apparatus according to an embodiment. FIG. [Figure 4] 10 is a diagram for explaining an example of n propagation wavelength characteristics of a propagation section in a test apparatus according to an embodiment. FIG. [Diagram 5] 10 is a diagram for explaining an example of n propagation wavelength characteristics of a propagation section in a test apparatus according to an embodiment. FIG. [Figure 6] 10 is a diagram for explaining an example of n propagation wavelength characteristics of a propagation section in a test apparatus according to an embodiment. FIG. [Figure 7] 10 is a flow diagram showing an example of an operation flow for calculating first to eighth propagation wavelength characteristics by the test device according to the embodiment. FIG. [Figure 8] FIG. 11 is a diagram for explaining an example of a method for calculating first to eighth propagation wavelength characteristics by the test device according to the embodiment. [Figure 9] 1 is a flow diagram showing an example of an operation flow for detecting optical power of each of n wavelengths contained in input light from a DUT by a test apparatus according to an embodiment. [Figure 10] 1 is a diagram illustrating an example of a method for calculating the optical power of each of wavelengths λ1 to λ8 contained in input light from a DUT by a test apparatus according to an embodiment. [Figure 11] FIG. 1 illustrates an example of a computer in which aspects of the present invention may be embodied in whole or in part. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0020] Fig. 1 is a schematic diagram of a test system 10 according to an embodiment. In Fig. 1, the direction of light travel is indicated by a white arrow, and the direction of signal flow is indicated by a black arrow. The same applies to the subsequent figures, and duplicated explanations will be omitted.

[0021] The test system 10 includes a calibration device 50, a DUT (Device Under Test) 60, and a test apparatus 100. In the test system 10, the test apparatus 100 communicates with the calibration device 50 and the DUT 60 via a wireless or wired connection. The test system 10 detects the optical power of each wavelength of light including a plurality of different wavelengths emitted from the DUT 60 by utilizing a plurality of propagation wavelength characteristics in the test apparatus 100.

[0022] In the test system 10 according to this embodiment, a calibration device 50 is provided at the location of the DUT 60 on the input side of the test apparatus 100 in order to detect the optical power of each wavelength of the light emitted from the DUT 60. In the test system 10, the calibration device 50 inputs reference input light having a known wavelength and optical power to the test apparatus 100. In this way, the test system 10 specifies in advance a plurality of propagation wavelength characteristics of the test apparatus 100. The test system 10 according to this embodiment also judges whether the DUT 60 is good or bad based on the detected optical power of each wavelength of the DUT 60.

[0023] The calibration device 50 is a device that emits light according to set values ​​of wavelength and optical power. The calibration device 50 sets multiple wavelengths and multiple optical powers corresponding to the multiple wavelengths in accordance with instructions received from the test device 100, and emits light of each of the set wavelengths and the corresponding optical power toward the test device 100 in sequence.

[0024] The DUT 60 emits light including a plurality of different wavelengths. The DUT 60 is an example of a device under test that emits light at n (n is a natural number) mutually different wavelengths. As an example, the DUT 60 according to this embodiment emits light by itself and outputs light including a plurality of different wavelengths. The DUT 60 according to this embodiment is disposed on the input side of the test apparatus 100 so that the light it emits is received by the test apparatus 100.

[0025] The DUT 60 according to the present embodiment may be one or more light emitting elements, for example, one or more LEDs. The LED may be a micro LED having a size of 100 μm or less, a mini LED having a size of more than 100 μm and less than 200 μm, or an LED having a size of more than 200 μm. The DUT 60 may be, for example, an LD or the like in addition to an LED. Alternatively, the DUT 60 may be an optical modulator that does not emit light itself, but modulates and outputs light including a plurality of different wavelengths input from a multi-wavelength light source. In this case, the multi-wavelength light source may include, for example, a distributed feedback (DFB) type laser, a Fabry-Perot (FP) type laser, a fiber Bragg grating (FBG) type laser, or the like.

[0026] The test apparatus 100 detects the optical power of each wavelength of input light containing n mutually different wavelengths emitted from the DUT 60. In other words, when light containing n wavelengths is input from the DUT 60, the test apparatus 100 detects the optical power of each of the n wavelengths. The test apparatus 100 according to this embodiment applies a current or voltage of a predetermined magnitude to the DUT 60 and thus detects the optical power of each wavelength of the DUT 60, thereby testing the optical characteristics of the DUT 60.

[0027] The test apparatus 100 according to the present embodiment also transmits an instruction to the calibration apparatus 50 to set a plurality of wavelengths and a plurality of optical powers corresponding to the plurality of wavelengths, in order to detect the optical power of each wavelength of the DUT 60. The test apparatus 100 further detects, when reference input light having a known wavelength and optical power is input from the calibration apparatus 50, the optical power that has changed during the propagation of the light through the test apparatus 100 due to the propagation wavelength characteristics of the test apparatus 100.

[0028] For example, the test apparatus 100 may detect the optical power of light in a wavelength range of about several tens of nanometers, that is, may detect the optical power of input light in which the interval between the shortest wavelength and the longest wavelength is about several tens of nanometers. For example, the test apparatus 100 may detect the optical power of input light in which the interval between adjacent wavelengths is about several nanometers. In other words, the DUT 60 and the calibration apparatus 50 may emit light in a wavelength range of about several tens of nanometers, or may emit light in which the interval between adjacent wavelengths is about several nanometers.

[0029] The test apparatus 100 according to this embodiment includes a propagation section 110, an optical power detection section 120, an optical power calculation section 130, a storage section 140, a judgment section 150, an input section 160, and a setting instruction section 170. As shown in Fig. 1, in the test apparatus 100, the propagation section 110 and the optical power detection section 120 are arranged such that light from a DUT 60 and a calibration device 50 arranged outside the test apparatus 100 passes through the propagation section 110 before reaching the optical power detection section 120. A waveguide using, for example, an optical fiber may be provided between the propagation section 110 and the optical power detection section 120.

[0030] The propagation unit 110 can switch between n or more different propagation wavelength characteristics for the input light from the DUT 60. When light including n wavelengths is input, the propagation unit 110 propagates the input light with at least n propagation wavelength characteristics. As an example, the propagation unit 110 propagates the input light including n wavelengths from the DUT 60 with n propagation wavelength characteristics. In other words, when the propagation unit 110 receives input light including n wavelengths from the DUT 60, it propagates the propagated light with each of the n propagation wavelength characteristics. When the propagation unit 110 receives reference input light with known wavelengths and optical power from the calibration device 50, it may also propagate the reference propagated light with each of the n propagation wavelength characteristics. The above-mentioned mutually different propagation wavelength characteristics are intended to mean propagation wavelength characteristics that are independent of each other, and the propagation unit 110 may have the same propagation wavelength characteristics, but the number of mutually different propagation wavelength characteristics is not included in the count of the number of the same propagation wavelength characteristics.

[0031] As an example, the propagation section 110 may be capable of propagating light with 12 different switchable propagation wavelength characteristics. In this case, when light containing eight wavelengths is input, the propagation section 110 may propagate the input light with eight of the twelve propagation wavelength characteristics, or may propagate the input light with nine to twelve propagation wavelength characteristics.

[0032] At least one of the n propagation wavelength characteristics of the propagation section 110 may be a characteristic for propagating a propagation light including at least two wavelengths of the n wavelengths from the DUT 60. In other words, any of the n propagation wavelength characteristics of the propagation section 110 may be a characteristic for propagating a propagation light including at least two wavelengths of the n wavelengths from the DUT 60, and the rest of the n propagation wavelength characteristics may be a characteristic for propagating a propagation light including any number of wavelengths from 1 to n of the n wavelengths from the DUT 60.

[0033] The propagation section 110 may be a material with variable optical characteristics, such as an optical switch or a voltage-controlled optical attenuator, and may be capable of switching between n or more different propagation wavelength characteristics by changing the optical characteristics.

[0034] The optical power detection unit 120 is a light receiving element such as a photodiode (PD), receives light from the DUT 60 or the calibration device 50 via the propagation unit 110, and detects the optical power of the received light. More specifically, the optical power detection unit 120 outputs to the optical power calculation unit 130 a photoelectric signal obtained by photoelectrically converting the light received from the DUT 60 or the calibration device 50 via the propagation unit 110.

[0035] The optical power detection unit 120 may have wavelength dependency such that it cannot detect the optical power for each of the multiple wavelengths included in the received light, but detects the optical power for all wavelengths. Alternatively or in addition to this, the optical power detection unit 120 may have wavelength dependency such that it outputs a photoelectric signal with a relatively large or small intensity for a specific wavelength among the multiple wavelengths included in the received light.

[0036] As an example, the optical power detection unit 120 detects the optical power of n pieces of propagated light based on the input light from the DUT 60, which is propagated from the propagation unit 110 with n propagation wavelength characteristics. More specifically, when the propagation unit 110 receives input light from the DUT 60 n times, the optical power detection unit 120 receives n pieces of propagated light propagated with different propagation wavelength characteristics and sequentially detects the optical power of each of the n pieces of propagated light. The optical power detection unit 120 may detect the optical power of p pieces of propagated light propagated from the propagation unit 110 with p propagation wavelength characteristics (p is a natural number other than n). The optical power of the propagated light detected by the optical power detection unit 120 may be an integral value of the optical power of one or more wavelengths included in the propagated light.

[0037] The optical power calculation unit 130 corrects the wavelength dependency of the optical power detection unit 120 by utilizing the multiple propagation wavelength characteristics of the propagation unit 110, and calculates the optical power of each of the multiple wavelengths contained in the input light that is the source of the multiple propagation light from the optical power of the multiple propagation light detected by the optical power detection unit 120. The number of the propagation light and the number of the propagation wavelength characteristics are equal to or greater than the number of wavelengths contained in the input light.

[0038] As an example, the optical power calculation unit 130 calculates the optical power for each of the n wavelengths included in the input light from the DUT 60 from the optical power of the n propagating light detected by the optical power detection unit 120, based on the n propagation wavelength characteristics of the propagation unit 110. The optical power calculation unit 130 of the present embodiment back-calculates the optical power for each of the n wavelengths from the optical power of the n propagating light, based on the n propagation wavelength characteristics.

[0039] In this embodiment, the n propagation wavelength characteristics of the propagation unit 110 are specified in advance using reference input light for each of n wavelengths, each of which has a known optical power, from the calibration device 50, as described above. More specifically, the optical power calculation unit 130 calculates the n propagation wavelength characteristics of the propagation unit 110 in advance using setting information on the wavelength and optical power of each reference input light input from the setting instruction unit 170 and the optical power detection value of each reference propagation light input from the optical power detection unit 120 for each reference input light. The optical power calculation unit 130 may store in the storage unit 140 a transfer function of each calculated propagation wavelength characteristic, for example, a matrix or simultaneous equations.

[0040] The optical power calculation unit 130 may read out a transfer function indicating n propagation wavelength characteristics from the storage unit 140, and use the transfer function to back-calculate the optical power for each of n wavelengths contained in the input light from the DUT 60 from the optical power of the n propagation light. The optical power calculation unit 130 outputs the calculation result to the determination unit 150.

[0041] Instead of the optical power calculation section 130 specifying transfer functions indicating n propagation wavelength characteristics in advance and storing them in the storage section 140, an apparatus other than the test apparatus 100 may specify transfer functions indicating a large number of propagation wavelength characteristics for all wavelengths within a range that can be assumed as the emission wavelengths of various devices under test in advance and store them in the storage section 140 of the test apparatus 100. In this case, the transfer functions indicating the large number of propagation wavelength characteristics may be stored in the storage section 140 during the manufacturing stage of the test apparatus 100 or after the test apparatus 100 is shipped. In this case, the optical power calculation section 130 may selectively read out transfer functions indicating n propagation wavelength characteristics for n wavelengths corresponding to the DUT 60 from the transfer functions indicating the large number of propagation wavelength characteristics stored in the storage section 140.

[0042] The optical power calculation section 130 of this embodiment also grasps the status of optical power detection by the optical power detection section 120 via the propagation section 110, based on a time schedule indicating the operation timing of each of the components of the test apparatus 100, the calibration apparatus 50, and the DUT 60, for example. More specifically, the optical power calculation section 130 may recognize the light emission method including the light emission timing of the calibration apparatus 50 and the DUT 60, which are open-controlled by the setting instruction section 170, based on the time schedule.

[0043] The optical power calculation unit 130 may feedback-control the setting and switching of the propagation wavelength characteristics of the propagation unit 110 by itself by receiving the optical power detection value as a feedback signal from the optical power detection unit 120, thereby grasping the status of optical power detection by the optical power detection unit 120 via the propagation unit 110. In this case, the optical power calculation unit 130 may further feedback-control the calibration device 50 and the DUT 60 by itself by receiving the optical power detection value as a feedback signal from the optical power detection unit 120, thereby grasping the light emission method including the light emission timing of the calibration device 50 and the DUT 60.

[0044] The judgment unit 150 judges whether the DUT 60 is good or bad based on the optical power for each of the n wavelengths corresponding to the DUT 60, which is calculated by the optical power calculation unit 130. The judgment unit 150 may hold a threshold value related to the optical power for each of the n wavelengths, and may judge the DUT 60 to be good when it is determined that the optical power for each of the n wavelengths included in the input light from the DUT 60 is all equal to or greater than the threshold value.

[0045] The input unit 160 is a user interface, and receives input from a user each of the n wavelengths included in the DUT 60. The input unit 160 outputs the input n wavelengths to the setting instruction unit 170.

[0046] The setting instruction unit 170 receives n wavelengths as wavelengths to be included in the reference input light from the input unit 160. The setting instruction unit 170 instructs the calibration device 50 to set the n wavelengths to be included in the reference input light and the optical power of each wavelength. The setting instruction unit 170 also outputs the setting information instructed to the calibration device 50 to the optical power calculation unit 130.

[0047] The setting instruction unit 170 also creates, as an example, a time schedule indicating the operation timing of each of the components of the test apparatus 100, the calibration apparatus 50, and the DUT 60 described above, and outputs the time schedule to the propagation unit 110, the optical power calculation unit 130, the calibration apparatus 50, and the DUT 60. More specifically, the setting instruction unit 170 performs open control of setting and switching of the propagation wavelength characteristics of the propagation unit 110 based on the time schedule. The setting instruction unit 170 also outputs the time schedule to the optical power calculation unit 130, and performs open control of the light emission method including the light emission timing of the calibration apparatus 50 and the DUT 60 according to the time schedule.

[0048] Note that the test apparatus 100 may specify the n wavelengths contained in the light by analyzing the wavelength of the light emitted by the DUT 60 using a spectrometer or the like, instead of receiving information on the n wavelengths corresponding to the DUT 60 from the user via the input unit 160. In this case, the test apparatus 100 does not need to have the input unit 160, and may cause the setting instruction unit 170 to acquire information on the specified n wavelengths.

[0049] Fig. 2 is a diagram for explaining a method for detecting the optical power of each of n wavelengths included in the input light from the DUT 60 by the test apparatus 100 according to one embodiment. Fig. 2 shows eight wavelengths λ1 to λ8 together with their relative optical intensities as an example of the n wavelengths included in the input light from the DUT 60. In the example of Fig. 2, for the purpose of simplifying the explanation, it is assumed that the input light from the DUT 60 includes eight wavelengths λ1 to λ8 that have the same optical power and are spaced equally apart from adjacent wavelengths.

[0050] As an example, the test apparatus 100 inputs the input light from the DUT 60 eight times to the propagation section 110 while switching between the eight propagation wavelength characteristics of the propagation section 110 in order to detect unknown optical powers of the eight wavelengths λ1 to λ8 included in the input light from the DUT 60. As an example, the eight propagation wavelength characteristics of the propagation section 110 are specified in advance using reference input light for each of the wavelengths λ1 to λ8, each of which has a known optical power, and transfer functions indicating the eight propagation wavelength characteristics are stored in the storage section 140 in advance.

[0051] When input light including eight wavelengths λ1 to λ8 is input to the propagation unit 110, the propagation unit 110 outputs propagation light with a different wavelength distribution according to the propagation wavelength characteristic set by the setting instructing unit 170 out of the eight propagation wavelength characteristics. In other words, the wavelength distribution of the input light including the eight wavelengths λ1 to λ8 is changed to a different wavelength distribution by each of the eight propagation wavelength characteristics of the propagation unit 110. For example, the peak wavelength in the wavelength distribution of the input light can be swept by switching between the eight propagation wavelength characteristics of the propagation unit 110 in order.

[0052] Therefore, when the input light from the DUT 60 is input to the propagation unit 110 eight times while switching between the eight propagation wavelength characteristics of the propagation unit 110, the wavelength distributions of the eight propagation light output from the propagation unit 110 are different from one another. For example, when the propagation unit 110 is set to the first propagation wavelength characteristic, the wavelength distribution of the input light including the eight wavelengths λ1 to λ8 is changed by the propagation unit 110 to a first wavelength distribution different from the wavelength distribution of the input light. When the propagation unit 110 is set to the second propagation wavelength characteristic, the wavelength distribution of the input light is changed by the propagation unit 110 to a second wavelength distribution different from the wavelength distribution of the input light and the first wavelength distribution.

[0053] Here, as described above, the different propagation wavelength characteristics in the propagation section 110 are intended to mean propagation wavelength characteristics that are independent of each other. The n propagation wavelength characteristics of the propagation section 110 may be, for example, characteristics that maintain or amplify only the optical power of one or more different wavelengths among the n wavelengths and attenuate the optical power of the remaining wavelengths. Specifically, one of the n propagation wavelength characteristics may be a characteristic that outputs a propagation light having a wavelength distribution in which only the optical power of a first wavelength among the n wavelengths is maintained and the optical power of the remaining wavelengths is attenuated, and the other of the n propagation wavelength characteristics may be a characteristic that outputs a propagation light having a wavelength distribution in which only the optical power of a second wavelength and a third wavelength among the n wavelengths is maintained and the optical power of the remaining wavelengths is attenuated. Alternatively or in addition to this, the n propagation wavelength characteristics of the propagation section 110 may be, for example, characteristics that maintain only the optical power of multiple different wavelengths among the n wavelengths and set the optical power of the remaining wavelengths to zero, or characteristics that set only the optical power of one different wavelength among the n wavelengths to zero and maintain the optical power of the remaining wavelengths. Specifically, one of the n propagation wavelength characteristics may be a characteristic of outputting propagation light having a wavelength distribution that maintains only the optical power of a first wavelength and a second wavelength among the n wavelengths and sets the optical power of the remaining wavelengths to zero, and another of the n propagation wavelength characteristics may be a characteristic of outputting propagation light having a wavelength distribution that maintains only the optical power of a second wavelength and a third wavelength among the n wavelengths and sets the optical power of the remaining wavelengths to zero.

[0054] 2 shows, as an example, a case where the eight propagation wavelength characteristics of the propagation section 110 maintain only the optical power of one different wavelength among the eight wavelengths λ1 to λ8, and the optical power of the remaining wavelengths is attenuated more as the wavelength interval from the one wavelength becomes wider. Specifically, for example, the first propagation wavelength characteristic is a characteristic of outputting a first propagation light having a wavelength distribution in which only the optical power of the wavelength λ1 among the eight wavelengths λ1 to λ8 is maintained, and the optical power of the remaining wavelengths λ2 to λ8 is gradually attenuated in the order of the wavelengths λ2 to λ8. For example, the second propagation wavelength characteristic is a characteristic of outputting a second propagation light having a wavelength distribution in which only the optical power of the wavelength λ2 among the eight wavelengths λ1 to λ8 is maintained, and the optical power of the remaining wavelengths λ1, λ3 to λ8 is attenuated at the same rate for the wavelengths λ1 and λ3, and is gradually attenuated in the order of the wavelengths λ3 to λ8. For example, the eighth propagation wavelength characteristic is a characteristic of outputting an eighth propagation light having a wavelength distribution in which only the optical power of the wavelength λ8 among the eight wavelengths λ1 to λ8 is maintained and the optical power of the remaining wavelengths λ1 to λ7 is gradually attenuated in the order of the wavelengths λ7 to λ1. Note that in Fig. 2, the thickness of the lines in the graph of the relative optical intensity is gradually increased in the order of the wavelengths λ1 to λ8 simply for the purpose of distinguishing the eight wavelengths λ1 to λ8, and this is the same in the subsequent figures, and redundant explanations will be omitted.

[0055] 3 to 6 are diagrams for explaining an example of n propagation wavelength characteristics of the propagation section 110 in the test apparatus 100 according to an embodiment. As another example of the eight propagation wavelength characteristics of the propagation section 110 shown in FIG. 2, FIG. 3 shows a case where the eight propagation wavelength characteristics amplify only the optical power of one different wavelength among the eight wavelengths λ1 to λ8, and attenuate the optical power of the remaining wavelengths to a greater extent as the wavelength interval from the one wavelength becomes wider. Specifically, for example, the first propagation wavelength characteristic is a characteristic for outputting a first propagation light having a wavelength distribution in which only the optical power of the wavelength λ1 among the eight wavelengths λ1 to λ8 is amplified, and the optical power of the remaining wavelengths λ2 to λ8 is gradually attenuated in the order of the wavelengths λ2 to λ8. For example, the second propagation wavelength characteristic is a characteristic of outputting a second propagation light having a wavelength distribution in which only the optical power of wavelength λ2 among the eight wavelengths λ1 to λ8 is amplified, and the optical power of the remaining wavelengths λ1, λ3 to λ8 is attenuated at approximately the same rate for wavelengths λ1 and λ3, and is gradually attenuated in the order of wavelengths λ3 to λ8. For example, the eighth propagation wavelength characteristic is a characteristic of outputting an eighth propagation light having a wavelength distribution in which only the optical power of wavelength λ8 among the eight wavelengths λ1 to λ8 is amplified, and the optical power of the remaining wavelengths λ1 to λ7 is gradually attenuated in the order of wavelengths λ7 to λ1.

[0056] FIG. 4 shows, as another example, a case where the eight propagation wavelength characteristics of the propagation unit 110 are characteristics in which only the optical power of one different wavelength among the eight wavelengths λ1 to λ8 is attenuated and the optical power of the remaining wavelengths is amplified at the same rate. Specifically, for example, the first propagation wavelength characteristic is a characteristic in which a first propagation light having a wavelength distribution in which only the optical power of the wavelength λ1 among the eight wavelengths λ1 to λ8 is attenuated and the optical power of the remaining wavelengths λ2 to λ8 is amplified at the same rate. For example, the second propagation wavelength characteristic is a characteristic in which a second propagation light having a wavelength distribution in which only the optical power of the wavelength λ2 among the eight wavelengths λ1 to λ8 is attenuated and the optical power of the remaining wavelengths λ1, λ3 to λ8 is amplified at the same rate. For example, the eighth propagation wavelength characteristic is a characteristic in which an eighth propagation light having a wavelength distribution in which only the optical power of the wavelength λ8 among the eight wavelengths λ1 to λ8 is attenuated and the optical power of the remaining wavelengths λ1 to λ7 is amplified at the same rate.

[0057] FIG. 5 shows, as another example, a case where at least one of the eight propagation wavelength characteristics of the propagation unit 110 is a characteristic that maintains only the optical power of two different wavelengths among the eight wavelengths λ1 to λ8 and sets the optical power of the remaining wavelengths to zero. Specifically, for example, the first propagation wavelength characteristic is a characteristic that outputs a first propagation light having a wavelength distribution that maintains only the optical power of the wavelength λ1 and the wavelength λ2 among the eight wavelengths λ1 to λ8 and sets the optical power of the remaining wavelengths λ3 to λ8 to zero. For example, the second propagation wavelength characteristic is a characteristic that outputs a second propagation light having a wavelength distribution that maintains only the optical power of the wavelength λ2 and the wavelength λ3 among the eight wavelengths λ1 to λ8 and sets the optical power of the remaining wavelengths λ1, λ4 to λ8 to zero. For example, the eighth propagation wavelength characteristic is a characteristic that outputs an eighth propagation light having a wavelength distribution that maintains only the optical power of the wavelength λ8 among the eight wavelengths λ1 to λ8 and sets the optical power of the remaining wavelengths λ1 to λ7 to zero.

[0058] FIG. 6 shows, as an example, a case where the eight propagation wavelength characteristics of the propagation unit 110 are characteristics in which only the optical power of one different wavelength among the eight wavelengths λ1 to λ8 is set to 0 and the optical power of the remaining wavelengths is maintained. Specifically, for example, the first propagation wavelength characteristic is a characteristic in which a first propagation light having a wavelength distribution in which only the optical power of the wavelength λ1 among the eight wavelengths λ1 to λ8 is set to 0 and the optical power of the remaining wavelengths λ2 to λ8 is maintained is output. For example, the second propagation wavelength characteristic is a characteristic in which a second propagation light having a wavelength distribution in which only the optical power of the wavelength λ2 among the eight wavelengths λ1 to λ8 is set to 0 and the optical power of the remaining wavelengths λ1, λ3 to λ8 is maintained is output. For example, the eighth propagation wavelength characteristic is a characteristic in which an eighth propagation light having a wavelength distribution in which only the optical power of the wavelength λ8 among the eight wavelengths λ1 to λ8 is set to 0 and the optical power of the remaining wavelengths λ1 to λ7 is maintained is output.

[0059] The propagation unit 110 capable of propagating light with n or more different switchable propagation wavelength characteristics may be a material with variable optical characteristics, such as an optical switch or a voltage-controlled optical attenuator, as described above. Other examples of the material may be a tunable filter that transmits only light of several adjacent wavelengths among input light including a plurality of wavelengths and filters light of the remaining wavelengths, or a reflecting element that changes and reflects the optical power of one or more wavelengths among input light including a plurality of wavelengths. The propagation unit 110 may be capable of switching between n or more propagation wavelength characteristics by controlling at least one of temperature, voltage, current, charge, magnetic flux, and pressure applied to such a material with variable optical characteristics. Alternatively, the propagation unit 110 may be capable of switching between n or more propagation wavelength characteristics by changing the physical dimensions of the optical path of the propagating light, such as the optical path length, using at least one of a servo motor, a piezoelectric element, and a bimetal. Alternatively, the propagation section 110 may be capable of switching between n or more propagation wavelength characteristics by switching between n or more propagation devices that propagate light with mutually different propagation wavelength characteristics.

[0060] The optical power detecting section 120 sequentially detects the optical power of each of the first to eighth propagation light beams, and outputs each detected optical power to the optical power calculating section 130. That is, the optical power detecting section 120 outputs photoelectric signals obtained by photoelectrically converting each of the received first to eighth propagation light beams to the optical power calculating section 130. Note that each of the first to eighth propagation light beams is a full-wavelength mixed light beam that includes all eight wavelengths λ1 to λ8.

[0061] The optical power calculation unit 130 calculates the optical power for each of the wavelengths λ1 to λ8 of the input light from the optical power of the first to eighth propagation light based on the first to eighth propagation wavelength characteristics. The optical power calculation unit 130 reads out transfer functions indicating the eight propagation wavelength characteristics from the storage unit 140, and calculates the optical power for each of the wavelengths λ1 to λ8 of the input light from the optical power of the first to eighth propagation light using the transfer functions.

[0062] 7 is a flow diagram showing an example of an operation flow for calculating the first to eighth propagation wavelength characteristics by the test apparatus 100 according to one embodiment. As an example, the operation flow in FIG. 7 is started when the test apparatus 100 receives input of n wavelengths included in the DUT 60 from a user.

[0063] The test apparatus 100 instructs the calibration apparatus 50 to set n wavelengths to be included in the reference input light and the optical power of each wavelength according to the n wavelengths input by the user (step S101). In step S101, the test apparatus 100 performs open control of the calibration apparatus 50 by, for example, transmitting to the calibration apparatus 50 a time schedule indicating the emission timing of each reference input light.

[0064] The test apparatus 100 detects the optical power of the reference propagation light corresponding to each of the n wavelengths from the calibration apparatus 50 (step S103). More specifically, the test apparatus 100 sequentially inputs n reference input lights having different wavelengths from each other from the calibration apparatus 50 in a state where the test apparatus 100 is set to one of the n propagation wavelength characteristics of the propagation section 110, for example, by controlling a voltage applied to the propagation section 110. The optical power of the n reference input lights may be the same as or different from each other. The test apparatus 100 detects the optical power changed due to the one propagation wavelength characteristic while the reference input light propagates through the propagation section 110 of the test apparatus 100. The test apparatus 100 acquires n optical power detection values ​​for the one propagation wavelength characteristic. As an example, the test apparatus 100 acquires n optical power detection values ​​for each propagation wavelength characteristic by sequentially switching the n propagation wavelength characteristics of the propagation section 110 according to the above-mentioned time schedule. Therefore, the test apparatus 100 obtains a total of n×n optical power detection values ​​of n×n reference propagation lights for n propagation wavelength characteristics.

[0065] The test apparatus 100 calculates n propagation wavelength characteristics of the propagation section 110 using the setting information of the wavelength and optical power of each reference input light set in step S101 and the n×n optical power detection values ​​detected in step S103 (step S105).

[0066] 8 is a diagram for explaining an example of a method for calculating the first to eighth propagation wavelength characteristics by the test apparatus 100 according to an embodiment. The left side of FIG. 8 shows, from the top, a first matrix X of 8 rows and 8 columns representing "optical power setting values ​​of each reference input light having wavelengths λ1 to λ8 emitted from the calibration apparatus 50 set to states 1 to 8", a second matrix A of 8 rows and 8 columns representing "unknown first to eighth propagation wavelength characteristics at the time of measuring the optical power of each reference propagation light", and a third matrix Y of 8 rows and 8 columns representing "optical power measurement values ​​of each reference propagation light propagated with the first to eighth propagation wavelength characteristics at each setting of the calibration apparatus 50 to states 1 to 8". As shown on the left side of FIG. 8, the product of the first matrix X and the second matrix A is equal to the third matrix Y, that is, the equation Y=A·X holds.

[0067] In the first matrix X, the first to eighth columns indicate states 1 to 8 corresponding to eight reference input lights output from the calibration device 50, and the first to eighth rows indicate wavelengths λ1 to λ8 of the reference input lights. In the second matrix A, the first to eighth columns indicate wavelengths λ1 to λ8 of the respective propagating lights, and the first to eighth rows indicate first to eighth propagation wavelength characteristics of the propagation unit 110. In the third matrix Y, the first to eighth columns indicate states 1 to 8 of the calibration device 50, and the first to eighth rows indicate first to eighth propagation wavelength characteristics of the propagation unit 110.

[0068] The first matrix X is an example of the setting information transmitted from the setting instruction unit 170 to the calibration device 50, and is an example of the instruction content in step S101 in Fig. 7. The second matrix A is an example of a transfer function indicating the n propagation wavelength characteristics calculated by the optical power calculation unit 130, and is an example of a calculation result in step S105 in Fig. 7. The third matrix Y is an example of the optical power of n x n reference propagation light propagated with n propagation wavelength characteristics for each n wavelength from the propagation unit 110 to which the reference input light for each n wavelength is input, detected by the optical power detection unit 120, and is an example of n x n optical power detection values ​​of the n x n reference propagation light detected in step S103 in Fig. 7.

[0069] Like 8 rows x 8 columns = 64 elements in the second matrix A in FIG. 8, the n propagation wavelength characteristics of the propagation unit 110 may have a total of n x n propagation wavelength characteristic elements by including n propagation wavelength characteristic elements for each of the n wavelengths. The optical power calculation unit 130 aims to calculate the n x n propagation wavelength characteristic elements that are unknown when measuring the optical power of each reference propagation light. The optical power calculation unit 130 may calculate the n x n propagation wavelength characteristic elements such as the second matrix A in FIG. 8 based on the known optical powers of the reference input lights for each of the n wavelengths such as the first matrix X in FIG. 8 and the optical powers of the n x n reference propagation lights such as the third matrix Y in FIG. 8. The optical power calculation unit 130 may calculate the n propagation wavelength characteristics in advance by calculating the n x n propagation wavelength characteristic elements.

[0070] Specifically, while the calibration device 50 is set to state 1 to output reference input light of wavelength λ1, the optical power calculation unit 130 may vertically arrange the optical power detection values ​​of eight reference propagation lights obtained by sequentially switching the propagation unit 110 from the first propagation wavelength characteristic to the eighth propagation wavelength characteristic to obtain a vertical vector in the first column of the third matrix Y. The optical power calculation unit 130 may similarly process states 2 to 8 of the calibration device 50 to obtain each vertical vector in the second to eighth columns of the third matrix Y, thereby obtaining the third matrix Y. The optical power calculation unit 130 may further obtain the inverse matrix X of the known first matrix X as shown in FIG. -1 Calculate the inverse matrix X from the right of both sides of Y=A·X. -1 and obtain the following equation 1 to calculate the second matrix A, that is, the eight propagation wavelength characteristics of the propagation section 110 may be calculated. A=Y·X -1 (…Equation 1)

[0071] As shown in the first matrix X of FIG. 8, in this embodiment, the n reference input lights for each of the n wavelengths each include one wavelength. Alternatively, the n reference input lights for each of the n wavelengths may each include multiple wavelengths, as long as the wavelength distributions of the reference input lights are different and independent of each other.

[0072] Fig. 9 is a flow diagram showing an example of an operation flow in which the test apparatus 100 according to one embodiment detects the optical power of each of n wavelengths contained in the input light from the DUT 60. As an example, the operation flow in Fig. 9 starts when the test apparatus 100 completes the operation flow in Fig. 7, and the user places the DUT 60 at the location where the calibration apparatus 50 was placed on the input side of the test apparatus 100, and electrically connects the test apparatus 100 and the DUT 60 so that a current or voltage can be applied from the test apparatus 100 to the DUT 60.

[0073] The test apparatus 100 detects the optical power of the propagating light corresponding to each of the input lights inputted n times from the DUT 60 while switching between the n propagation wavelength characteristics (step S201). Specifically, the test apparatus 100 controls the voltage applied to the propagating section 110 to propagate the input light from the DUT 60 to the propagating section 110 in a state where one of the n propagation wavelength characteristics of the propagating section 110 is set, and causes the propagating light from the propagating section 110 to be received by the optical power detecting section 120. As an example, the test apparatus 100 performs open control of the DUT 60 by transmitting a time schedule indicating the emission timing of the input light to the DUT 60. As an example, the DUT 60 emits light according to the time schedule in a state where a current or voltage is applied from the test apparatus 100. The optical power detecting section 120 outputs a photoelectric signal obtained by photoelectrically converting the received propagating light to the optical power calculating section 130. The test apparatus 100 sequentially switches between the n propagation wavelength characteristics of the propagation section 110, and repeats the same process for all of the n propagation wavelength characteristics.

[0074] The test apparatus 100 calculates the optical power for each of the n wavelengths contained in the input light from the DUT 60 based on the n propagation wavelength characteristics and the optical power of the detected n propagation lights (step S203).

[0075] Fig. 10 is a diagram for explaining an example of a method for calculating the optical power of each of the wavelengths λ1 to λ8 included in the input light from the DUT 60 by the test apparatus 100 according to an embodiment. The left side of Fig. 10 shows, from the top, a first column vector p with 8 rows and 1 column representing "each optical power of the wavelengths λ1 to λ8 included in the input light that is unknown when measuring the optical power of each propagating light", a matrix A with 8 rows and 8 columns representing "the specified first to eighth propagation wavelength characteristics", and a second column vector q with 8 rows and 1 column representing "the measured optical power value of each propagating light propagated with the first to eighth propagation wavelength characteristics". As shown on the left side of Fig. 9, the product of the first column vector p and the matrix A is equal to the second column vector q, that is, the equation q=A·p holds.

[0076] In the first column vector p, the first row to the eighth row indicate, in order, the wavelengths λ1 to λ8 contained in the input light from the DUT 60. The matrix A is the same as the second matrix A in Fig. 8. In the second column vector q, the first row to the eighth row indicate, in order, the first propagation wavelength characteristic to the eighth propagation wavelength characteristic of the propagation portion 110.

[0077] The first column vector p is an example of the optical power for each of n wavelengths included in the input light from the DUT 60. The matrix A is an example of a transfer function indicating n propagation wavelength characteristics calculated by the optical power calculator 130, similar to the second matrix A in Fig. 8, and is an example of a calculation result in step S105 in Fig. 7, and is stored in, for example, the storage unit 140. The second column vector q is an example of the optical power of n propagation light detected by the optical power detector 120 in step S201 in Fig. 9.

[0078] The optical power calculation unit 130 aims to calculate the optical power for each of n wavelengths included in the input light from the DUT 60, such as the first column vector p in Fig. 10, which is unknown when measuring the optical power of each propagating light. The optical power calculation unit 130 may back-calculate the optical power for each of n wavelengths included in the input light from the DUT 60, such as the first column vector p in Fig. 10, from the optical power of the n propagating lights detected by the optical power detection unit 120, such as the second column vector q in Fig. 10, based on the n propagation wavelength characteristics, such as the matrix A in Fig. 10.

[0079] Specifically, the optical power calculation section 130 may vertically arrange eight optical power detection values ​​of the propagating light obtained by sequentially switching the propagation section 110 from the first propagation wavelength characteristic to the eighth propagation wavelength characteristic while the input light is being output from the DUT 60 to obtain a second vertical vector q. The optical power calculation section 130 may further obtain an inverse matrix A of a matrix A specified in advance, as shown in FIG. -1 Calculate the inverse matrix A from the left of both sides of q=A·p. -1 to obtain the following equation 2, the first column vector p may be calculated. In other words, the optical power of each of the wavelengths λ1 to λ8 contained in the input light from the DUT 60 may be calculated. p=A -1 ·q (…formula 2) After calculating the matrix A in step S105 of FIG. 7, the optical power calculator 130 calculates the inverse matrix A -1 In this case, the inverse matrix A of the matrix A is read from the storage unit 140 in order to calculate the first column vector p in step S203 of FIG. -1 may be read out.

[0080] 9 again, following step S203, the test apparatus 100 judges whether the DUT 60 is good or bad based on the calculated optical power for each of the n wavelengths (step S205), and the flow ends. Specifically, the test apparatus 100 may compare the calculated optical power for each of the n wavelengths with a threshold value related to the optical power for each of the n wavelengths, and judge the DUT 60 to be good if it is judged that all the calculated optical powers for each of the n wavelengths are equal to or greater than the corresponding threshold value. The test apparatus 100 may further exclude the DUT 60 judged to be bad from the target of subsequent tests.

[0081] As a first comparative example of the test apparatus 100 according to the embodiment described above, an apparatus is assumed in which a spectroscope such as a prism is used to spatially separate light of multiple wavelengths contained in input light from a device under test, one wavelength of light is received by an optical power detector, and the spectroscope is rotated to select the light to be received by the optical power detector.As a second comparative example, an apparatus is assumed in which a tunable filter is used to transmit only one wavelength of light selected from the multiple wavelengths of light contained in input light from a device under test, one wavelength of light is received by an optical power detector, and the tunable filter is controlled to select the light to be received by the optical power detector.

[0082] The spectrometer in the first comparative example capable of spatially separating light of multiple wavelengths by wavelength, and the tunable filter in the second comparative example that transmits only one selected wavelength of light from among multiple wavelengths, are expensive compared to the constituent materials of the propagation section 110 of the test device 100 according to this embodiment, such as constituent materials with variable optical characteristics such as optical switches and voltage-controlled optical attenuators, constituent materials that can change the physical dimensions of the optical path of propagating light such as servo motors, piezoelectric elements, and bimetals, and multiple propagation devices that propagate light with different propagation wavelength characteristics. The test apparatus 100 according to the present embodiment is capable of switching between n or more different propagation wavelength characteristics for input light including n wavelengths from a device under test, and includes a propagation section 110 that propagates the input light with the n propagation wavelength characteristics, an optical power detection section 120 that detects the optical power of the n propagation light propagated from the propagation section 110 with the n propagation wavelength characteristics, and an optical power calculation section 130 that calculates the optical power for each of the n wavelengths included in the input light based on the n propagation wavelength characteristics from the optical power of the n propagation light detected by the optical power detection section 120. The test apparatus 100 according to the present embodiment having such a configuration can calculate the optical power for each of the n wavelengths included in the input light with a cheaper device configuration than the first and second comparative examples.

[0083] In the embodiment described above, the test apparatus 100 is configured to detect the optical power of each reference propagation light based on each reference input light of n wavelengths the same as the n wavelengths in order to calculate in advance the n propagation wavelength characteristics of the propagation section 110 corresponding to the n wavelengths included in the input light from the DUT 60. Instead of detecting the optical power of each reference propagation light based on each reference input light of n wavelengths the same as the n wavelengths, the test apparatus 100 may detect the optical power of each reference propagation light based on each reference input light of a plurality of wavelengths close to the n wavelengths, and use these plurality of optical power detection values ​​to interpolate the optical power of each reference propagation light based on each reference input light of the same wavelength as the n wavelengths, thereby calculating in advance the n propagation wavelength characteristics of the propagation section 110. The interpolation may be, for example, linear interpolation or averaging.

[0084] As a specific example, first, the wavelengths of the n reference input lights include wavelengths other than the n wavelengths included in the input light from the DUT 60, and the wavelength band of the n reference input lights at least partially overlaps with the wavelength band of the n wavelengths included in the input light. In this case, the optical power calculation unit 130 may calculate n×n propagation wavelength characteristic elements based on the known optical power of each of the n wavelengths of the reference input light and the optical power of the n×n reference propagation lights propagated with the n propagation wavelength characteristics for each of the n wavelengths from the propagation unit 110 to which the reference input light for each of the n wavelengths is input, detected by the optical power detection unit 120. The optical power calculation unit 130 may calculate the n propagation wavelength characteristics in advance by using the calculated n×n propagation wavelength characteristic elements to interpolate the n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light from the DUT 60.

[0085] In the embodiment described above, the test apparatus 100 is configured to detect the optical power of each reference propagation light based on each reference input light of n wavelengths the same as the n wavelengths in order to calculate in advance the n propagation wavelength characteristics of the propagation section 110 corresponding to the n wavelengths included in the input light from the DUT 60. Instead of detecting the optical power of each reference propagation light based on each reference input light of n wavelengths the same as the n wavelengths, the test apparatus 100 may detect the optical power of each reference propagation light based on each reference input light of a greater number of wavelengths including the n wavelengths, or each reference propagation light based on each reference input light of a smaller number of wavelengths including some of the n wavelengths. When detecting the optical power of each reference propagation light based on each reference input light of a number of wavelengths less than the n wavelengths, as described above, the n propagation wavelength characteristics of the propagation section 110 may be calculated in advance by interpolating the optical power of each reference propagation light based on each reference input light of the same wavelength as the n wavelengths using these multiple optical power detection values.

[0086] As a specific example, the optical power calculation unit 130 may back-calculate the optical power for each of the n wavelengths contained in the input light from the DUT 60 from the optical power of the n propagation light based on n propagation wavelength characteristics previously specified using reference input light for each of m (m ≠ n) wavelengths, each of which has a known optical power. In this case, the m wavelengths may include wavelengths other than the n wavelengths, and in this case, the wavelength band of the m wavelengths is assumed to at least partially overlap with the wavelength band of the n wavelengths. As a more specific example, the optical power calculation unit 130 may store an inverse matrix of m×m (m>n) in the storage unit 140, and use a submatrix of n×n therein as the n propagation wavelength characteristics.

[0087] In this case, the optical power calculation unit 130 may calculate m×n propagation wavelength characteristic elements based on the known optical powers of the reference input lights for each of the m wavelengths and the optical powers of the m×n reference propagation lights propagated with the n propagation wavelength characteristics for each of the m wavelengths from the propagation unit 110 to which the reference input lights for each of the m wavelengths are input, detected by the optical power detection unit 120. The optical power calculation unit 130 may calculate the n propagation wavelength characteristics in advance by interpolating the n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light from the DUT 60 using the calculated m×n propagation wavelength characteristic elements.

[0088] In the above-described embodiment, some examples of n propagation wavelength characteristics in the propagation section 110 of the test apparatus 100 are shown in Fig. 2 to Fig. 6. Alternatively or additionally, the n propagation wavelength characteristics of the propagation section 110 may be characteristics that increase or decrease the rate of attenuation of optical power in the order from the smallest wavelength to the largest wavelength among n wavelengths included in the input light, and the degree of increase or decrease of the rate may be stronger or weaker in the order from the first propagation wavelength characteristic to the nth propagation wavelength characteristic. For example, when the n propagation wavelength characteristics of the propagation section 110 are characteristics that increase the rate of attenuation of optical power in the order from the smallest wavelength to the largest wavelength among n wavelengths included in the input light, and the rate is increased in the order from the first propagation wavelength characteristic to the nth propagation wavelength characteristic, the wavelength distribution of the propagation light propagated with the first propagation wavelength characteristic may be less downward than the wavelength distribution of the propagation light propagated with the second propagation wavelength characteristic. For example, if the n propagation wavelength characteristics of the propagation section 110 are characteristics that decrease the rate at which optical power is attenuated in order from the smallest wavelength to the largest wavelength among the n wavelengths contained in the input light, and the rate decreases in order from the first propagation wavelength characteristic to the nth propagation wavelength characteristic, the wavelength distribution of the propagated light propagated with the first propagation wavelength characteristic may have a stronger left-shouldered slope than the wavelength distribution of the propagated light propagated with the second propagation wavelength characteristic.

[0089] Various embodiments of the present invention may be described with reference to flowcharts and block diagrams, where the blocks may represent (1) stages of a process in which operations are performed or (2) sections of an apparatus responsible for performing the operations. Particular stages and sections may be implemented by dedicated circuitry, programmable circuitry provided with computer readable instructions stored on a computer readable medium, and / or a processor provided with computer readable instructions stored on a computer readable medium. Dedicated circuitry may include digital and / or analog hardware circuitry and may include integrated circuits (ICs) and / or discrete circuits. Programmable circuitry may include reconfigurable hardware circuitry including logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, memory elements such as flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and the like.

[0090] A computer-readable medium may include any tangible device capable of storing instructions that are executed by a suitable device, such that the computer-readable medium having instructions stored thereon comprises an article of manufacture that includes instructions that can be executed to create means for performing the operations specified in the flowcharts or block diagrams. Examples of computer-readable media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like. More specific examples of computer-readable media may include floppy disks, diskettes, hard disks, random access memories (RAMs), read-only memories (ROMs), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disk read-only memories (CD-ROMs), digital versatile disks (DVDs), Blu-ray (RTM) disks, memory sticks, integrated circuit cards, and the like.

[0091] The computer readable instructions may include either assembler instructions, Instruction Set Architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Smalltalk®, JAVA®, C++, etc., and conventional procedural programming languages ​​such as the “C” programming language or similar programming languages.

[0092] The computer-readable instructions may be provided to a processor or programmable circuit of a programmable data processing device such as a computer, either locally or over a wide area network (WAN) such as a local area network (LAN), the Internet, etc., to execute the computer-readable instructions to create a means for performing the operations specified in the flowchart or block diagram. Here, the computer may be a PC (personal computer), a tablet computer, a smartphone, a workstation, a server computer, a general-purpose computer, or a special-purpose computer, or may be a computer system in which multiple computers are connected. Such a computer system in which multiple computers are connected is also called a distributed computing system, and is a computer in the broad sense. In a distributed computing system, each of the multiple computers executes a part of a program, and the multiple computers collectively execute a program by transferring data during program execution between the computers as necessary.

[0093] Examples of processors include computer processors, central processing units (CPUs), processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc. A computer may have one processor or multiple processors. In a multiprocessor system with multiple processors, each processor executes a part of a program, and the multiple processors collectively execute a program by passing data during program execution between the processors as necessary. For example, in executing multitasks, each of the multiple processors may execute a part of each task in small chunks by switching tasks for each time slice. In this case, which part of a program each processor executes changes dynamically. Which part of a program each of the multiple processors executes may be statically determined by programming that takes the multiprocessor into consideration.

[0094] 11 illustrates an example of a computer 1200 in which aspects of the present invention may be embodied in whole or in part. Programs installed on the computer 1200 may cause the computer 1200 to function as or perform operations associated with an apparatus or one or more sections of the apparatus according to an embodiment of the present invention, and / or to perform a process or steps of a process according to an embodiment of the present invention. Such programs may be executed by the CPU 1212 to cause the computer 1200 to perform specific operations associated with some or all of the blocks of the flowcharts and block diagrams described herein.

[0095] The computer 1200 according to this embodiment includes a CPU 1212, a RAM 1214, a graphic controller 1216, and a display device 1218, which are connected to each other by a host controller 1210. The computer 1200 also includes input / output units such as a communication interface 1222, a hard disk drive 1224, a DVD-ROM drive 1226, and an IC card drive, which are connected to the host controller 1210 via an input / output controller 1220. The computer also includes legacy input / output units such as a ROM 1230 and a keyboard 1242, which are connected to the input / output controller 1220 via an input / output chip 1240.

[0096] The CPU 1212 operates according to a program stored in the ROM 1230 and the RAM 1214, thereby controlling each unit. The graphic controller 1216 retrieves image data generated by the CPU 1212 into a frame buffer or the like provided in the RAM 1214 or into the graphic controller 1216 itself, and causes the image data to be displayed on the display device 1218.

[0097] The communication interface 1222 communicates with other electronic devices via a network. The hard disk drive 1224 stores programs and data used by the CPU 1212 in the computer 1200. The DVD-ROM drive 1226 reads programs or data from the DVD-ROM 1201 and provides the programs or data to the hard disk drive 1224 via the RAM 1214. The IC card drive reads programs and data from an IC card and / or writes programs and data to an IC card.

[0098] The ROM 1230 stores therein a boot program or the like executed by the computer 1200 upon activation, and / or a program that depends on the hardware of the computer 1200. The input / output chip 1240 may also connect various input / output units to the input / output controller 1220 via a parallel port, a serial port, a keyboard port, a mouse port, and the like.

[0099] The programs are provided by a computer-readable medium such as a DVD-ROM 1201 or an IC card. The programs are read from the computer-readable medium, installed in the hard disk drive 1224, the RAM 1214, or the ROM 1230, which are also examples of computer-readable media, and executed by the CPU 1212. Information processing described in these programs is read by the computer 1200, and brings about cooperation between the programs and the various types of hardware resources described above. An apparatus or method may be constructed by realizing information manipulation or processing according to the use of the computer 1200.

[0100] For example, when communication is performed between the computer 1200 and an external device, the CPU 1212 may execute a communication program loaded in the RAM 1214 and instruct the communication interface 1222 to perform communication processing based on the processing described in the communication program. Under the control of the CPU 1212, the communication interface 1222 reads transmission data stored in a transmission buffer processing area provided in the RAM 1214, the hard disk drive 1224, the DVD-ROM 1201, or a recording medium such as an IC card, and transmits the read transmission data to a network, or writes reception data received from the network to a reception buffer processing area or the like provided on the recording medium.

[0101] Furthermore, the CPU 1212 may cause all or a necessary portion of a file or database stored in an external recording medium such as a hard disk drive 1224, a DVD-ROM drive 1226 (DVD-ROM 1201), an IC card, etc. to be read into the RAM 1214, and perform various types of processing on the data on the RAM 1214. The CPU 1212 then writes back the processed data to the external recording medium.

[0102] Various types of information, such as various types of programs, data, tables, and databases, may be stored in the recording medium and undergo information processing. The CPU 1212 may perform various types of processing on the data read from the RAM 1214, including various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information search / replacement, etc., as described throughout this disclosure and specified by the instruction sequence of the program, and write back the results to the RAM 1214. The CPU 1212 may also search for information in a file, database, etc. in the recording medium. For example, when a plurality of entries each having an attribute value of a first attribute associated with an attribute value of a second attribute are stored in the recording medium, the CPU 1212 may search for an entry that matches a condition, in which the attribute value of the first attribute is specified, from among the plurality of entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.

[0103] The above-described programs or software modules may be stored in a computer-readable medium on the computer 1200 or in the vicinity of the computer 1200. Also, a recording medium such as a hard disk or a RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable medium, thereby providing the programs to the computer 1200 via the network.

[0104] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is clear to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the description of the claims that such modifications and improvements can also be included in the technical scope of the present invention.

[0105] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and may be realized in any order unless the output of a previous process is used in a later process. Even if the operational flow in the claims, specifications, and drawings is explained using "first," "next," etc. for convenience, it does not mean that it is essential to perform the process in this order. [Explanation of symbols]

[0106] 10 Test System 50 Calibration device 60 DUT 100 Test Equipment 110 Propagation Department 120 Optical power detector 130 Optical power calculation unit 140 Storage area 150 Judgment section 160 Input section 170 Setting instruction section 1200 Computer 1201 DVD-ROM 1210 Host Controller 1212 CPU 1214 RAM 1216 Graphics Controller 1218 Display Devices 1220 Input / Output Controller 1222 Communication Interface 1224 Hard Disk Drive 1226 DVD-ROM drive 1230 ROM 1240 Input / Output Chip 1242 Keyboard

Claims

1. A test apparatus for detecting optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test, a propagation section capable of switching between n or more different propagation wavelength characteristics for the input light and propagating the input light including the n wavelengths from the device under test with the n propagation wavelength characteristics; an optical power detection unit that detects optical power of the n propagating lights propagated from the propagation unit with the n propagation wavelength characteristics; an optical power calculation unit that calculates optical power for each of the n wavelengths included in the input light based on the optical power of the n propagation light beams detected by the optical power detection unit and on the basis of the propagation wavelength characteristics of the n propagation light beams; A test apparatus comprising:

2. At least one of the n propagation wavelength characteristics is a characteristic for propagating a propagation light including at least two wavelengths among the n wavelengths.

2. The test device of claim 1.

3. The optical power calculation unit calculates optical power for each of the n wavelengths from the optical power of the n propagating lights based on the propagation wavelength characteristics of the n wavelengths.

2. The test device of claim 1.

4. the optical power calculation unit back-calculates optical power for each of the n wavelengths from the optical power of the n propagation lights based on the n propagation wavelength characteristics previously specified using reference input light for each of the n wavelengths, each optical power of which is known; 2. The test device of claim 1.

5. The n propagation wavelength characteristics include n propagation wavelength characteristic elements for each of the n wavelengths, thereby having a total of n×n propagation wavelength characteristic elements; the optical power calculation unit calculates the n propagation wavelength characteristics in advance by calculating the n×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the n wavelengths and the optical power of n×n reference propagation lights propagated with the n propagation wavelength characteristics for the n wavelengths from the propagation section to which the reference input lights for the n wavelengths are input, detected by the optical power detection unit.

5. A test device according to claim 4.

6. the wavelengths of the n reference input lights include wavelengths other than the n wavelengths included in the input light, and a wavelength band of the n reference input lights at least partially overlaps with a wavelength band of the n wavelengths included in the input light; The n propagation wavelength characteristics include n propagation wavelength characteristic elements for each of the n wavelengths, thereby having a total of n×n propagation wavelength characteristic elements; the optical power calculation unit calculates the n×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the n wavelengths and the optical power of n×n reference propagation lights propagated with the n propagation wavelength characteristics for the n wavelengths from the propagation section to which the reference input lights for the n wavelengths are input, detected by the optical power detection unit, and calculates the n propagation wavelength characteristics in advance by interpolating n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light using the calculated n×n propagation wavelength characteristic elements.

5. A test device according to claim 4.

7. the optical power calculation unit back-calculates optical power for each of the n wavelengths from the optical power of the n propagation lights based on the n propagation wavelength characteristics previously specified using reference input light for each of m (m ≠ n) wavelengths, each of which has a known optical power; The m wavelengths include wavelengths other than the n wavelengths, and a wavelength band of the m wavelengths at least partially overlaps with a wavelength band of the n wavelengths.

2. The test device of claim 1.

8. The n propagation wavelength characteristics include n propagation wavelength characteristic elements for each of the n wavelengths, thereby having a total of n×n propagation wavelength characteristic elements; the optical power calculation unit calculates the m×n propagation wavelength characteristic elements based on the known optical power of each of the reference input lights for the m wavelengths and the optical power of m×n reference propagation lights propagated with the n propagation wavelength characteristics for the m wavelengths from the propagation section to which the reference input lights for the m wavelengths are input, detected by the optical power detection unit, and calculates the n propagation wavelength characteristics in advance by interpolating n×n propagation wavelength characteristic elements corresponding to the n wavelengths included in the input light using the calculated m×n propagation wavelength characteristic elements.

8. A test device according to claim 7.

9. The n propagation wavelength characteristics are characteristics that maintain or amplify only the optical power of one or more different wavelengths among the n wavelengths and attenuate the optical power of the remaining wavelengths.

2. The test device of claim 1.

10. the n propagation wavelength characteristics are characteristics that maintain only the optical power of a plurality of different wavelengths among the n wavelengths and set the optical power of the remaining wavelengths to zero, or that set only the optical power of one different wavelength among the n wavelengths to zero and maintain the optical power of the remaining wavelengths.

2. The test device of claim 1.

11. the propagation unit is capable of switching between the n or more propagation wavelength characteristics by controlling at least one of temperature, voltage, current, charge, magnetic flux, and pressure applied to a material having variable optical characteristics, by changing a physical dimension of an optical path of the propagating light using at least one of a servo motor, a piezoelectric element, and a bimetal, or by switching between n or more propagation devices that propagate light with different propagation wavelength characteristics; 2. The test device of claim 1.

12. a determination unit that determines whether the device under test is good or bad based on the optical power for each of the n wavelengths calculated by the optical power calculation unit, 2. The test device of claim 1.

13. A test method for detecting optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test, comprising: propagating input light including the n wavelengths from the device under test with n propagation wavelength characteristics by a propagation section capable of switching between n or more propagation wavelength characteristics different from one another for the input light; Detecting optical power of n propagated lights propagated from the propagation portion with the n propagation wavelength characteristics; calculating optical power for each of the n wavelengths included in the input light from the detected optical power of the n propagating light beams based on the propagation wavelength characteristics of the n beams; A test method comprising:

14. A test apparatus for detecting optical power of each wavelength of input light including n (n is a natural number) mutually different wavelengths emitted from a device under test, a step of propagating input light including the n wavelengths from the device under test with n propagation wavelength characteristics by a propagation section capable of switching between n or more different propagation wavelength characteristics for the input light; detecting optical power of n pieces of propagated light propagated from the propagation section with the n pieces of propagation wavelength characteristics; calculating optical power for each of the n wavelengths included in the input light based on the n propagation wavelength characteristics from the detected optical power of the n propagation light; A program that executes the following.

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