Extreme uniformity heated substrate support assembly

Abstract

To provide a substrate support assembly which enables temperature uniformity across a workpiece surface.SOLUTION: A substrate support assembly includes a body that is made from ceramic and that has a workpiece support surface and a mounting surface. The workpiece support surface and a chuck body bonding surface each have a flatness of less than 10 microns. A first heater is disposed on the bottom surface outside the body. A bonding layer is disposed over the first heater, and the bonding layer is electrically insulating. A cooling base has a body made from a metal. A cooling body has a cooling body upper surface and a cooling body lower surface, the cooling body upper surface having a flatness of less than about 10 microns.SELECTED DRAWING: None

Description

[Technical field]

[0001] TECHNICAL FIELD The implementations described herein relate generally to semiconductor manufacturing, and more particularly to a temperature-controlled substrate support assembly and a method of using the substrate support assembly. [Background technology]

[0002] As feature sizes in device patterns become smaller, the critical dimension (CD) requirements of those features become an increasingly important criterion for stable and repeatable device performance. Acceptable CD variation across substrates processed in a processing chamber is difficult to achieve due to chamber asymmetries such as chamber and substrate temperatures, fluid conductivity, and RF fields.

[0003] In processes utilizing electrostatic chucks, uniform temperature control across the surface of the substrate is further difficult due to the non-uniform structure of the chuck underlying the substrate. For example, some areas of the electrostatic chuck have gas holes while other areas have lift pin holes that are offset horizontally from the gas holes. Still other areas have chuck electrodes while other areas have heater electrodes that are offset horizontally from the chuck electrodes. Because the structure of the electrostatic chuck can vary both horizontally and azimuthally, uniformity of heat transfer between the chuck and the substrate is complicated and very difficult to achieve, resulting in localized hot and cold spots across the chuck surface and non-uniform process results along the surface of the substrate.

[0004] The lateral and azimuthal uniformity of heat transfer between the chuck and the substrate is further complicated by the heat transfer schemes typically employed in conventional substrate supports to which the electrostatic chuck is attached. The non-uniformity creates particular problems for controlling the etch rate across the substrate. In particular, temperature non-uniformity across the substrate makes it difficult to control the selective center-to-edge etching of the substrate when forming small critical dimension device features in the substrate.

[0005] Therefore, there is a need for an improved substrate support assembly. Summary of the Invention

[0006] Implementations described herein provide a substrate support assembly that enables temperature uniformity across a surface of a workpiece. In one embodiment, a substrate support assembly is provided that includes a body. The body is made of ceramic. The body has a workpiece support surface and a mounting surface. The workpiece support surface and the chuck body bonding surface have a flatness of less than about 10 microns. At least one first heater is mounted on an outer bottom surface of the body. A bonding layer is disposed over the first heater, where the bonding layer is electrically insulating, and the cooling base includes a body made of metal. The cooling body has an upper cooling body surface and a lower cooling body surface, where the upper cooling body surface has a flatness of less than about 10 microns.

[0007] In another embodiment, a substrate support assembly is provided that includes an electrostatic chuck, at least one first heater, an insulating layer, and a shaft. The electrostatic chuck includes a chuck body made of ceramic. A high voltage chuck electrode is embedded in the chuck body. The chuck body has a workpiece support surface and a chuck body mating surface. The workpiece support surface and the chuck body mating surface have a flatness of less than about 10 microns. A first heater is mounted on an outer bottom surface of the chuck body. An insulating layer is disposed over the first heater. The first heater has a portion that is trimmed to achieve a desired resistance higher than an adjacent portion of the first heater to provide a desired temperature output. The ceramic shaft has leads connected to the chuck electrode embedded in the electrostatic chuck.

[0008] Another implementation described herein provides a processing chamber having a substrate support assembly that enables both horizontal and azimuthal uniformity across a surface of a workpiece. The processing chamber has a body having a wall, a bottom, and a lid enclosing an interior space. The substrate support assembly is disposed within the interior space. The substrate support assembly has an electrostatic chuck having a body made of ceramic. The body has a workpiece support surface and a mounting surface. The workpiece support surface and the chuck body bonding surface have a flatness of less than 10 microns. A plurality of heaters are mounted on an exterior bottom surface of the body, where the heaters are arranged in a plurality of zones. A bonding layer is disposed over the plurality of heaters, the bonding layer being electrically insulating, and the cooling base has a body made of metal. The cooling body has an upper cooling body surface and a lower cooling body surface, where the upper cooling body surface has a flatness of less than about 10 microns.

[0009] In yet another embodiment, a method for controlling temperature uniformity of a workpiece is provided. The method begins by powering a primary resistive heater having four or more zones formed on a bottom surface of an electrostatic chuck (ESC). Temperature is measured across the substrate by a plurality of temperature sensors. Temperature uniformity of the substrate is controlled to within 1° C. across the substrate surface. The method includes selectively etching a substrate mounted on a substrate support assembly.

[0010] So that the above-mentioned features of the present invention may be understood in detail, a more particular description of the present invention, briefly summarized above, may be obtained by reference to implementations, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings illustrate only typical embodiments of the present disclosure, and therefore should not be considered as limiting the scope of the present disclosure, which may also admit of other equally effective embodiments. [Brief description of the drawings]

[0011] [Figure 1] 1 is a schematic cross-sectional side view of a processing chamber having a substrate support assembly according to one embodiment. [Diagram 2] 2 is a schematic partial cross-sectional side view of a substrate support assembly; [Diagram 3] 3 is a flow diagram of a method 300 for processing a substrate using a substrate support assembly, such as the substrate support assemblies described above, among others, according to one embodiment. [Figure 4] FIG. 13 is a schematic bottom view detailing a trimmed primary resistive heater of the substrate support assembly. [Diagram 5] 1 is a schematic partial cross-sectional side view of a substrate support assembly according to another embodiment. [Figure 6] 1 is a schematic partial cross-sectional side view of a substrate support assembly according to yet another embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] For ease of understanding, the same reference numbers have been used, where possible, to designate identical elements that are common to multiple figures, and it is contemplated that elements disclosed in one implementation can be beneficially used in other implementations without specific recitation.

[0013] Implementations described herein provide a substrate support assembly that allows for both horizontal and azimuthal temperature uniformity of the electrostatic chuck that comprises the substrate support assembly, which itself allows for both horizontal and azimuthal uniformity of the horizontal temperature profile of a substrate processed thereon. Additionally, the substrate support assembly also allows for selective etching. Although the substrate support assembly is described below in an etch processing chamber, the substrate support assembly may be utilized in other types of plasma processing chambers, such as physical vapor deposition chambers, chemical vapor deposition chambers, ion implantation chambers, among others, and in other systems in which azimuthal adjustment of the horizontal temperature profile is desirable.

[0014] In one or more embodiments, the substrate support assembly allows for correction of critical dimension (CD) variations at the edge of the substrate during vacuum processes such as etching, deposition, implantation, etc., by allowing the temperature of the substrate to be used to compensate for chamber non-uniformities such as temperature, fluid conductivity, electric field, plasma density, etc. In an embodiment herein, an electrostatic chuck (ESC) is described having a ceramic component with embedded electrodes and one or more heaters printed thereon. The ESC structure is bonded to an aluminum cooling base. The cooling base is thermally insulated from the shaft and built-in components. Temperature is measured by multiple temperature probes, and the temperature of the substrate support assembly is controlled by a closed-loop chamber temperature controller.

[0015] 1 is a schematic cross-sectional view of an exemplary etch processing chamber 100 having a substrate support assembly 126. The processing chamber may be, among others, an etch chamber, a plasma processing chamber, a thermal processing chamber, a physical vapor deposition chamber, a chemical vapor deposition chamber, an ion implantation chamber, or other processing system in which the ability to control the temperature profile of a substrate is desired. Separate local control of temperature over distributed regions of the substrate support assembly 126 advantageously allows for azimuthal adjustment of the temperature profile, adjustment of the center-to-edge temperature profile, and reduction of local temperature non-uniformities (asperities), such as hot spots and cool spots, for controlling plasma processing rates, such as etch rates.

[0016] The processing chamber 100 includes a grounded chamber body 102. The chamber body 102 includes walls 104, a bottom 106, and a lid 108, which enclose a processing volume 124. A substrate support assembly 126 is disposed within the processing volume 124 and supports a substrate 134 therein during processing.

[0017] The walls 104 of the processing chamber 100 include openings (not shown) through which substrates 134 are transferred by a robot into and out of the interior volume 124. A pumping port 110 is formed in one of the walls 104 or in the bottom 106 of the chamber body 102 and is fluidly connected to a pumping system (not shown). The pumping system is utilized to remove processing by-products while maintaining a vacuum environment within the interior volume 124 of the processing chamber 100.

[0018] A gas panel 112 supplies process gases and / or other gases to an interior volume 124 of the processing chamber 100 through one or more inlet ports 114 formed through at least one of the lid 108 or the walls 104 of the chamber body 102. The process gases supplied by the gas panel 112 are excited in the interior volume 124 to form a plasma 122 that is utilized to process a substrate 134 disposed on a substrate support assembly 126. The process gases are excited by RF power that is inductively coupled to the process gases from a plasma applicator 120 disposed outside the chamber body 102. In the embodiment shown in FIG. 1, the plasma applicator 120 is a pair of coaxial coils coupled to the RF power source 116 through a matching network 118. In other embodiments, the plasma applicator 120 may be one or more chamber components, such as a showerhead assembly connected to the RF power source 116 through a matching network 118.

[0019] A controller 148 is connected to the process chamber 100 to control the operation of the process chamber 100 and the processing of the substrate 134. The controller 148 can be one of any form of general purpose data processing system that may be used in an industrial environment to control various sub-processors and sub-controllers. Generally, the controller 148 includes a central processing unit (CPU) 172 in communication with a memory 174 and input / output (I / O) circuitry 176, among other common components. Software commands executed by the CPU of the controller 148 cause the process chamber to, for example, introduce an etchant gas mixture (i.e., process gas) into the interior volume 124, form a plasma 122 from the process gas by application of RF power from the plasma applicator 120, and etch a material layer on the substrate 134.

[0020] The substrate support assembly 126 is removably coupled to the support pedestal 125. The support pedestal 125 includes a pedestal base 128 that is attached to the chamber body 102. The substrate support assembly 126 may be periodically removed from the support pedestal 125 to allow for the renewal of one or more components of the substrate support assembly 126.

[0021] The substrate support assembly 126 generally includes at least one substrate support 132. The substrate support 132 may be a vacuum chuck, an electrostatic chuck, a susceptor, or other workpiece support surface. In the embodiment of FIG. 1, the substrate support 132 is an electrostatic chuck, hereinafter referred to as an electrostatic chuck (ESC) 132. The substrate support assembly 126 also includes a cooling base 130. The substrate support assembly 126 further includes a thermal insulator 180 and a base plate 190. The electrostatic chuck 132, the cooling base 130, the thermal insulator 180, and the base plate 190 are surrounded by an edge ring portion 140.

[0022] In one embodiment, the edge ring portion 140 is formed from a silicon-based material. The edge ring portion forms a gap (not shown) that provides for purge gas transmission between the edge ring portion 140 and the electrostatic chuck 132. An additional space (not shown) is provided between the edge ring portion 140 and the substrate 134, such that the edge ring portion 140 is configured to provide purge gas that is transmitted under the substrate 134. The purge gas at the edge ring portion 140 is directed away from the center of the substrate 134 toward the exhaust, such that no deposition occurs at the edge ring portion 140 at the extreme edge of the substrate 134. Unlike conventional ESCs that have porous plugs and limited purge gas flow, the gap and additional space provide a high conductance purge gas channel that leads under the substrate 134, allowing high flow (up to 15 slm) through the 16 holes when the substrate 134 is heat treated on the pins. Purge gas additionally comes from holes located in the electrostatic chuck 132. The substrate 134 is lifted on pins and then a flow from the backside keeps any by-products from condensing on the surface of the electrostatic chuck 132.

[0023] The base plate 190 is configured to house a number of drive mechanisms configured to raise and lower a number of lift pins. Additionally, the base plate 190 is configured to house a number of fluid connections from the electrostatic chuck 132 and the cooling base 130. The base plate 190 is also configured to house a number of electrical connections from the electrostatic chuck 132. Although a myriad of connections may pass to the exterior or interior of the substrate support assembly 126, the base plate 190 provides an interface for connections to each end. The base plate 190 may be formed of any metal.

[0024] A thermal insulator 180 is disposed between the base plate 190 and the cooling base 130. The thermal insulator 180 is formed from a chemically and physically stable insulating material, such as cross-linked polystyrene, polyetheretherketone, alumina (Al2O3), or other suitable material.

[0025] The cooling base 130 is disposed between the thermal insulator 180 and the electrostatic chuck 132. The cooling base 130 is connected to a heat transfer fluid source 144. The heat transfer fluid source 144 provides a non-conductive heat transfer fluid that circulates through one or more conduits 160 disposed within the cooling base 130. The fluid flowing through adjacent conduits 160 is isolated from one another, allowing for localized control of heat transfer between various regions of the electrostatic chuck 132 and the cooling base 130, which also aids in controlling the horizontal temperature file of the substrate 134.

[0026] A fluid distributor is fluidly connected between the outlet of the heat transfer fluid source 144 and the temperature controlled cooling base 130. The fluid distributor operates to control the amount of heat transfer fluid supplied to the conduit 160. The fluid distributor may be located outside the processing chamber 100, within the substrate support assembly 126, within the pedestal base 128, or in another suitable location.

[0027] The electrostatic chuck 132 has a mounting surface 131 and a workpiece surface 133 opposite the mounting surface 131. The electrostatic chuck 132 generally includes a chucking electrode 136 and one or more primary resistive heaters 154 embedded in a dielectric 150. The dielectric 150 is made of a ceramic material such as Y2O3, Er2O3, AlN, or Al2O3. Alternatively, the dielectric 150 is made of one or more polymer layers such as polyimide, polyetheretherketone, polyaryletherketone, etc.

[0028] The chuck electrode 136 may be configured as a monopolar or bipolar electrode or other suitable configuration. The chuck electrode 136 is connected through an RF filter 182 to a chuck power supply 138, which provides RF or DC power for electrostatically clamping the substrate 134 to the workpiece surface 133 of the dielectric 150. The RF filter 182 prevents the RF power utilized to form the plasma within the process chamber 100 from damaging electrical equipment or creating electrical disturbances outside the process chamber 100.

[0029] The workpiece surface 133 of the electrostatic chuck 132 may include gas passages (not shown) for supplying a backside heat transfer gas to a gap space defined between the substrate 134 and the workpiece surface 133 of the electrostatic chuck 132. The electrostatic chuck 132 also includes lift pin holes (both not shown) for accommodating lift pins for raising the substrate 134 above the workpiece surface 133 of the electrostatic chuck 132 to facilitate robotic transfer into and out of the processing chamber 100. This allows for low pressure chucking and positive backside pressure control for a substrate placed on the work surface 133 .

[0030] The electrostatic chuck 132 further includes one or more primary resistive heaters 154 mounted on the mounting surface 131. For example, the primary resistive heaters 154 may be provided by attached polymer sheets or may be printed directly on the mounting surface 131, i.e., between the dielectric 150 and the cooling base 130. The primary resistive heaters 154 are provided to raise the temperature of the substrate support assembly 126 to a temperature for performing a chamber process. The primary resistive heaters 154 are configured to regulate the temperature of the electrostatic chuck 132 in a plurality of horizontally separated heating zones defined by the primary resistive heaters 154. The primary resistive heaters 154 are connected through an RF filter 184 to a primary heater power supply 156. The primary heater power supply 156 provides power to the primary resistive heaters 154. A controller 148 controls operation of the primary heater power supply 156, which is typically set to heat the substrate 134 to approximately a predetermined temperature.

[0031] In one embodiment, a single main resistive heater 154 is utilized to create a single heating zone. In another embodiment, multiple main resistive heaters 154 are utilized to create multiple horizontally separated heating zones, where the controller 148 enables one zone of the main resistive heaters 154 to be preferentially heated relative to main resistive heaters 154 located in one or more other zones. For example, the main resistive heaters 154 are concentrically arranged into a plurality of four separated concentric heating zones.

[0032] The electrostatic chuck 132 includes one or more temperature sensors (not shown) for providing temperature feedback information to the controller 148 for controlling the power applied to the main resistive heater 154 by the main heater power supply 156. The controller 148 may also control the operation of the cooling base 130. The temperature of the surface of the substrate 134 in the processing chamber 100 is affected by the pumping of process gases, the slit valve door, the plasma 122, and other factors. The cooling base 130 and the main resistive heater 154 all help to control the surface temperature of the substrate 134.

[0033] 2 is a schematic partial cross-sectional view of a portion of the substrate support assembly 126. FIG. 2 includes a portion of the electrostatic chuck (ESC) 132, the bonding layer 260, the cooling base 130, and the thermal insulator 180. The ESC 132 is configured for temperature control for four or more zones with a uniformity between the zones of between about 0.3° C. and about 0.7° C. The ESC 132 can operate at temperatures between about −20° C. and below 200° C. for low temperature processing and above about 200° C. for high temperature processes. For example, the ESC 132 can operate at temperatures such as between about −20° C. and about 150° C.

[0034] The mounting surface 131 and the workpiece surface 133 are disposed on opposite sides of a body 150 of the ESC 132 and are spaced apart by about 2 mm to about 7 mm. The mounting surface 131 has a flatness between about 1 micron and about 10 microns, for example about 2 microns. The mounting surface 131 is substantially flat relative to the workpiece surface 133. The workpiece surface 133 has a flatness between about 1 micron and about 10 microns. The body 150 is formed from a ceramic material, such as alumina, or other suitable material.

[0035] The primary resistive heaters 154 are mounted on the outer mounting surface 131 of the body 150. The primary resistive heaters 154 are arranged in concentric zones around the center of the ESC 132, where the heaters in a first zone (not shown) are arranged along a first radius, the heaters in a second zone (not shown) are arranged along a second radius that is greater than the first radius, the primary resistive heaters 154B in a third zone 214 are arranged along a third radius that is greater than the second radius, and the outermost primary heaters 154A in a fourth zone 216 are arranged along a fourth radius that is greater than the third radius. The primary resistive heaters 154 are formed on the mounting surface 131 by baking, inkjet printing, screen printing, physical vapor deposition, stamping, wire mesh, patterned polyimide flexible circuits, or in any other suitable form. For example, the primary resistive heaters 154 are printed on the mounting surface 131 of the body 150. In other embodiments, primary resistive heater 154 is deposited on mounting surface 131 by physical vapor deposition, chemical vapor deposition, applied as a prefabricated sheet, or applied in any other suitable manner.

[0036] The main resistive heater 154 is a resistor formed from a film of nichrome, rhenium, tungsten, tantalum, or other suitable material. A resistor has an electrical resistance (ρ), where a low ρ indicates a material that allows easy movement of charge across the heater resistor. The resistance (R) depends on ρ times the length (l) divided by the cross-sectional area of ​​the wire (A), or simply R=ρ·l / A. Platinum has a ρ of approximately 1.06×10 at 20° C. -7 (Ωm). At 20°C, tungsten has a ρ of approximately 6.60×10 -8 (Ωm). At 20°C, nichrome has a ρ of approximately 1.1×10 -8 ~Approx. 1.5×10 -8 (Ωm). Thus, the resistance, and thus the heat output, of an individual heater can be varied by changing the length or cross-sectional area of ​​the wire.

[0037] 4, the primary resistive heater 154 has a film thickness 420 or wire diameter configured to efficiently deliver heat when current is passed along the wire of the primary resistive heater 154. Reducing the heater film thickness 420 results in an increased resistance R of the primary resistive heater 154 and a greater heat output from the primary resistive heater 154. For example, the film thickness 420 is selected or changed to a reduced film thickness 410 for the primary resistive heater 154 after the primary resistive heater 154 is mounted on the mounting surface 131 to control the heat generated within a portion 430 of the resistive heater 154. In this manner, the primary resistive heater 154 in each zone is fine-tuned to provide the desired temperature uniformity across the workpiece surface 133 of the ESC 132.

[0038] The resistance of one or more primary resistive heaters 154 mounted on the mounting surface 131 of the ESC 132 is adjusted. The primary resistive heaters 154 may be tested and further adjusted to more closely meet the temperature profile control criteria.

[0039] The bonding layer 260 is an electrical insulating layer. The bonding layer 260 bonds the ESC 132 to the cooling base 130. The bonding layer 260 is applied to the main resistive heater 154 and electrically insulates the main resistive heater 154 to prevent contact with the cooling base 130 and shorting of the main resistive heater 154. The adhesive layer 260 is an adhesive, such as an acrylic adhesive, an epoxy, a silicone adhesive, a neoprene adhesive, or other suitable adhesive. The bonding layer 260 has a coefficient of thermal conductivity selected within the range of 0.1 to 160 W / mK. The adhesive material constituting the adhesive layer 260 includes aluminum oxide (AlO 3) At least one thermally conductive filler, such as aluminum nitride (AlN) or titanium diboride (TiB2), is included.

[0040] In one embodiment, the bonding layer 260 has a thickness between about 0.3 mm and about 2.0 mm, e.g., about 1.0 mm, and a thermal conductivity between about 1.0 W / mK and about 3.0 W / mK, e.g., about 1.0 W / mK. As the thickness of the bonding layer 260 increases, the power to the main resistive heater 154 decreases. Furthermore, the variation in the thickness of the bonding layer 260 can be controlled to precisely set the gap between the ESC 132 and the cooling base 130. The small variation in the thickness of the bonding layer 260 improves the uniformity of the heat transfer rate through the bonding layer 260 between the ESC 132 and the cooling base 130, and thus improves the ability to maintain a desired temperature profile across the workpiece surface 133 of the body 150 of the ESC 132, and advantageously across the substrate, during processing.

[0041] 2, a seal 290, such as an O-ring, is disposed between the ESC 132 and the cooling base 130. The seal 290 surrounds and isolates the bonding layer 260 from the processing region of the processing chamber, thus extending the life of the bonding layer 260 while preventing degraded bonding material from becoming a process contaminant.

[0042] The cooling base 130 includes a body 230 having a top surface 272 and a bottom surface 274. The body 230 is formed from a metallic material, such as an aluminum alloy. The top surface 272 and the bottom surface 274 define opposing sides of the body 230 and are spaced apart by about 10 mm to about 32 mm. The top surface 272 is substantially flat relative to the bottom surface 274. The top surface 272 is flat to less than about 10 microns, such as about 1 micron or about 2 microns. The bottom surface 274 is flat to less than about 10 microns. The top surface 272 of the cooling base 130 is in contact with the bonding layer 260. The cooling base 130 is configured to pump a cooling fluid, such as a fluorinated fluid such as perfluoropolyether (PFPE) or water, suitable for maintaining a temperature within the cooling base 130 between about 90° C. and about −20° C., at a power of about 1000 W / m 2 -K and about 1400W / m 2 -K due to the effective exchange coefficient.

[0043] The bottom surface 274 is in contact with a top surface 282 of the thermal insulator 180. The thermal insulator 180 further has a bottom surface 284 opposite the top surface 282. The top surface 282 has a flatness of less than about 10 microns.

[0044] The flatness of each of the ESC 132, cooling base 130, and thermal insulator 180 facilitates an assembly in which the adhesive thickness variation between each of the ESC 132, cooling base 130, and thermal insulator 180 is less than 20 microns, e.g., about 1 micron. Such a gap is achieved while the surfaces of the ESC 132, cooling base 130, and thermal insulator 180 remain substantially parallel to one another. The substrate support assembly 126 synergistically enables greater temperature uniformity in a temperature control range between about -20°C and about 150°C. Temperature uniformity of the substrate support assembly 126 across the workpiece surface 133 can be maintained to less than 1°C. Temperature uniformity advantageously enables selective etching of the substrate.

[0045] Terminations 250 are connected to at least the outer main heater 154A to couple the main resistance heater 154 to the main heater power supply 156. The terminations 250 are connected to the outer main heater 154A by brazing, soldering, or other suitable manner. The terminations 250 extend through passages 252 formed in the cooling base 130 in a direction generally perpendicular to the bottom surface 274 of the cooling base 130. The terminations 250 extend in a direction generally perpendicular to the bottom surface 274 of the cooling base 130. The location of the terminations 250 directly below the outer main heater 154A provides space in the center of the ESC 132 for gas passage and electrical connection to the chuck electrode 136. The thermal insulator 180 also includes passages 254 that allow the terminations 250 to pass through the thermal insulator 180 to facilitate electrical connection. The other main resistance heaters 154 also have terminations 250 connected thereto in a simple manner.

[0046] FIG. 3 is a flow diagram of a method 300 for processing a substrate using a substrate support assembly, such as the substrate support assembly 126 described above, among others, according to one embodiment. The method 300 begins at block 302, where power is applied to a primary resistive heater having four or more zones formed on the bottom surface of the ESC. The electrostatic chuck (ESC) has a ceramic component with embedded electrodes and four or more independent heater elements printed on the bottom surface as described above. The primary resistive heater is segmented into separately controllable zones to allow for horizontal and azimuthal adjustment of the horizontal temperature profile of a substrate being processed on the substrate support assembly. Additionally, the primary resistive heater within each segmented zone has material selectively removed to fine-tune the local resistance and temperature output. Thus, uniform temperature across the substrate to within less than 1° C. can be achieved.

[0047] At block 304, the temperature is measured across the substrate by a number of resistance thermometers. In one embodiment, the temperature is measured by resistance temperature detectors (RTDs).

[0048] In block 306, the temperature uniformity of the substrate is controlled to within 1° C. across the substrate surface. A thermometer provides real-time temperature information of the substrate to a closed-loop chamber temperature controller which controls the heaters to maintain temperature uniformity across the substrate.

[0049] At block 308, a substrate mounted on the substrate support assembly is etched. The substrate has an exposed etch layer. In one embodiment, the etch layer can be a dielectric material such as a silicon-containing material, e.g., SiO2, SiN, SiON, SiC, SiOC, SiOCN, SiCN, a-Si. In another embodiment, the etch layer can be a metallic dielectric material such as AlN, HfO2, AlO3, WN, NiSi, etc. In yet another embodiment, the etch layer can be a metallic material such as Cu, Al, W, Ni, Co, etc. In each embodiment, the etch layer is selectively etched relative to other materials or layers on the substrate.

[0050] 5 is a schematic partial cross-sectional side view of a substrate support assembly 500 according to another embodiment. The substrate support 500 includes an electrostatic chuck 532 coupled to a shaft 502. The shaft 502 may be formed from a ceramic material, such as AlN or other suitable material.

[0051] The electrostatic chuck 532 is generally fabricated as described above with reference to the electrostatic chuck 132. The electrostatic chuck 532 includes a ceramic body 504 having a high voltage chuck electrode 506 embedded therein. The chuck electrode 506 is disposed proximate the workpiece surface 133. One or more primary resistive heaters 154 are mounted on the mounting surface 131 of the ceramic body 504. The one or more primary resistive heaters 154 may be trimmed as described above to adjust the resistance, and thus the heat output, of the one or more primary resistive heaters 154. In some cases, the primary resistive heaters 154 may be trimmed after the shaft 502 is bonded to the ceramic body 504.

[0052] The center of the ceramic body 504 is prepared to facilitate providing an electrical connection after bonding of the body 504 to the shaft 502. For example, the center of the ceramic body 504 may be prepared by machining the body 504 after firing. The main resistive heater 154 may be applied, for example, by screen printing or a film, before or after the center of the shaft 502 is machined to facilitate electrical connection of the lead 540 to the main resistive heater 154 and the lead 550 to the electrode 506.

[0053] After trimming the main resistive heater 154, an insulating coating 508 is placed on the main resistive heater 154. The insulating coating 508 may be a layer of ceramic, such as AlN, ceramic, or other insulating tape, such as green tape or glass tape. Green tape is an unfired ceramic tape, such as AlN tape. In one embodiment where the insulating coating 508 is a glass tape, the glass includes one or more elements selected from the group consisting of Al, N, O, and Y. The insulating coating 508 may include holes 510 to allow the end 512 of the shaft 502 to be directly bonded to the mounting surface 131 of the ceramic body 504. The end 512 of the shaft 502 may be bonded by diffusion, high temperature adhesive, brazed, or otherwise suitable to be directly bonded to the mounting surface 131 of the ceramic body 504.

[0054] Alternatively, the insulating coating 508 may be replaced with a coating having one or more of alumina (Al2O3), silica (SiO2), magnesium oxide (MgO), yttria (Y2O3), (i.e., ASMY) therein. The insulating coating 508, or ASMY coating, is applied by plasma spraying to the main resistive heater 154 with a thickness of about 300 μm. It is understood that other techniques are suitable for applying the ASMY coating to the main resistive heater 154 as well. The insulating coating 508 and ceramic body 504 may be heat treated. The ASMY insulating coating 508 is heat treated to produce a dielectric breakdown in the insulating coating 508 of about 4 KV.

[0055] In one embodiment, a fabrication procedure for fabricating the substrate support assembly 500 includes sintering an AlN ceramic body with embedded high voltage chuck electrodes, screen printing one or more primary resistive heaters on the bottom of the ceramic body to form one or more heating zones, and firing the ceramic body on which the primary resistive heaters are mounted. After the firing, the primary resistive heaters are trimmed, for example by a laser, to adjust their resistance. After trimming, the ceramic body is machined in the center to prepare the center for electrode brazing. An insulating layer is trimmed and placed on the heater and fired. A shaft is then bonded to the ceramic body of the ESC using AlN-containing tape or glass bonding tape. The AlN-containing tape or glass bonding tape can form the insulating layer. The shaft can be attached at the same time that the insulating layer is bonded onto the heater. After the shaft is attached, the end of the high voltage chuck electrode is brazed into the shaft.

[0056] Alternatively, or in addition to the above procedure, the main resistive heater may be trimmed after the shaft is bonded to the ceramic body of the ESC. The substrate support assembly 500 is heat treated to produce the desired breakdown voltage.

[0057] 6 is a schematic partial cross-sectional side view of a substrate support assembly 600 according to another embodiment. The substrate support assembly 600 is the same as the substrate support assembly 500 described above, except that the insulating coating 508 extends between the mounting surface 131 of the ceramic body 504 and the end 512 of the shaft 502, thereby securing the shaft 502 to the exposed lower surface 602 of the insulating coating 508.

[0058] Advantageously, the substrate support described above allows for temperature adjustment in one or more zones, providing temperature uniformity that allows for etch rate adjustment. Additionally, the chucking of the ESC allows for different backside pressure set points independent of chamber pressure, providing better tuning of temperature control across the wafer. This allows for radial etch rate adjustment across the wafer from center to edge, providing additional ability to adjust yield and chamber performance.

[0059] While the foregoing is directed to implementations of the present invention, other and further implementations of the disclosure may be devised without departing from the basic scope of the invention, the scope of which is defined by the following claims.

Claims

1. 1. A substrate support assembly comprising: an electrostatic chuck having a chuck body made of ceramic, the chuck body having a workpiece support surface and a chuck body mating surface, the workpiece support surface and the chuck body mating surface having a flatness of less than about 10 microns; a cooling base having a cooling body made of a metal or composite material, the cooling body of the cooling base having an upper cooling body surface opposite the chuck body bonding surface and a lower cooling body surface, the upper cooling body surface having a flatness of less than about 10 microns; A substrate support assembly comprising:

2. at least one first heater mounted on the chuck body mating surface on an exterior side of the chuck body; a bonding layer disposed on the first heater, the bonding layer being electrically insulating; The substrate support assembly of claim 1 , further comprising:

3. 10. The substrate support assembly of claim 1, further comprising an edge ring portion surrounding the electrostatic chuck, the cooling base, and a base plate, the edge ring portion configured to direct a purge gas toward the workpiece mounting surface.

4. The substrate support assembly of claim 2 , wherein the bonding layer has a thickness between about 0.3 mm and about 2.0 mm and a thermal conductivity between about 1.0 W / m-K and about 3.0 W / m-K.

5. 5. The substrate support assembly of claim 4, wherein the variation in thickness of the bonding layer between the electrostatic chuck and the cooling base is less than 20 microns.

6. 10. The substrate support assembly of claim 1, wherein the first heater is trimmed to achieve a desired resistance higher than adjacent portions of the first heater to provide a desired temperature output.

7. 1. A substrate support assembly comprising: an electrostatic chuck having a chuck body made of ceramic, the chuck body having an embedded high voltage chucking electrode, the chuck body having a workpiece support surface and a chuck body mating surface, the workpiece support surface and the chuck body mating surface having a flatness of less than about 10 microns; at least one first heater mounted on the exterior of the chuck body on the chuck body mating surface, the at least one first heater being trimmed to achieve a desired resistance higher than adjacent portions of the first heater to provide a desired temperature output; an insulating layer disposed over the first heater; a ceramic shaft having lead wires connected to the heater and to the chuck electrode embedded in the electrostatic chuck; A substrate support assembly comprising:

8. The substrate support assembly of claim 7 , wherein the ceramic shaft is bonded to the insulating layer disposed above the first heater.

9. The substrate support assembly of claim 7 , wherein the insulating layer comprises one of a ceramic layer, a ceramic tape, and a glass tape.

10. a plurality of heaters disposed on the chuck body mating surface exterior to the chuck body, the heaters being arranged in a plurality of zones; a bonding layer disposed over the plurality of heaters, the bonding layer being electrically insulating; a base plate disposed below the cooling base; an edge ring portion surrounding the electrostatic chuck, the cooling base, and the base plate, the edge ring portion configured to direct a purge gas toward the workpiece mounting surface; The substrate support assembly of claim 9 , further comprising:

11. The substrate support assembly of claim 10 , wherein the flatness of the mounting surface and the top surface is less than about 10 microns.

12. 11. The substrate support assembly of claim 10, wherein the bonding layer has a thickness between about 0.3 mm and about 2.0 mm, the thickness varying by less than about 20 microns, and the bonding layer has a thermal conductivity between about 1.0 W / m-K and about 3.0 W / m-K.

13. 11. The substrate support assembly of claim 10, wherein at least one of the heaters is trimmed to achieve a desired higher resistance than an adjacent portion of the trimmed heater to provide a desired temperature output.

14. an insulating layer disposed over the first heater; a shaft coupled to the chuck body; The substrate support assembly of claim 12 , further comprising:

15. The substrate support assembly of claim 14 , wherein the ceramic shaft is bonded to the insulating layer disposed above the first heater.

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