Heating device and surface processor

Abstract

To provide a heating device and a surface processor capable of efficiently generating high-temperature high-pressure fluid.SOLUTION: According to an embodiment, a heating device capable of generating high-temperature high-pressure fluid is provided. The heating device comprises a heater, a stainless steel tube, an insulation section, a supply section, and a discharge section. The wavelength that indicates the maximum value of the spectral radiative energy density of the heater is 2 μm or less. The stainless steel tube has an inlet and an outlet. The stainless steel tube is spirally wound more than twice around the heater, with gaps between each helical winding. The insulation section covers the heater and the stainless steel tube. The supply section supplies fluid towards the inlet. The discharge section discharges the high-temperature high-pressure fluid from the outlet.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a heating device and a surface treatment device. [Background technology]

[0002] A supercritical fluid is a fluid that is at a temperature and pressure above its critical point. Supercritical fluids have properties different from those of gases and liquids, and are therefore used in a variety of technologies. For example, supercritical water has a high oxidizing power and is sometimes used for surface treatment of materials that are resistant to corrosion. Supercritical carbon dioxide and supercritical isopropanol are sometimes used for extraction of active ingredients and cleaning and drying.

[0003] A supercritical fluid can be produced, for example, by heating a fluid in an enclosed space above its critical point. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2012-114361 A [Patent Document 2] JP 2000-276238 A [Patent Document 3] JP 2012-013372 A [Patent Document 4] JP 2010-190467 A [Patent Document 5] JP 2005-021724 A [Non-patent literature]

[0005] [Non-Patent Document 1] Kinya Horibe, "Stainless Steel Selective Absorption Surface," Surface Mount Technology, Published by the Surface Mounting Technology Association, Vol. 27, No. 5, 1980, p. 231-236 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of the present invention is to provide a heating device and a surface treatment device capable of efficiently generating high-temperature and high-pressure fluid. [Means for solving the problem]

[0007] According to an embodiment, a heating device capable of generating a high-temperature, high-pressure fluid is provided. The heating device includes a heater, a stainless steel tube, a heat insulating section, a supply section, and an exhaust section. The wavelength at which the heater exhibits the maximum value of the spectral radiant energy density is 2 μm or less. The stainless steel tube has an inlet and an outlet. The stainless steel tube is wound around the heater in a spiral shape two or more times, with a gap between each spiral. The heat insulating section covers the heater and the stainless steel tube. The supply section supplies a fluid toward the inlet. The exhaust section exhausts the high-temperature, high-pressure fluid from the outlet.

[0008] According to an embodiment, a surface treatment device is provided. The surface treatment device includes a heating device according to an embodiment, a treatment section, a sample introduction section, and a discharge section. The treatment section is connected to the discharge section of the heating device. The sample introduction section introduces a sample into the treatment section. The discharge section discharges a treatment product from within the treatment section. Effect of the Invention

[0009] According to the present invention, a heating device and a surface treatment device capable of efficiently generating high-temperature and high-pressure fluid are provided. [Brief description of the drawings]

[0010] [Figure 1] FIG. 2 is an enlarged schematic view showing a part of the heating device according to the embodiment. [Diagram 2] FIG. 2 is a cross-sectional view showing a schematic view of a part of the heating device according to the embodiment. [Diagram 3] FIG. 2 is a cross-sectional view taken along line A, illustrating a part of the heating device according to the embodiment. [Figure 4] FIG. 1 is a schematic diagram showing an example of a surface treatment apparatus according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] [Heating device] The heating device according to the embodiment includes a heater, a stainless steel tube, a heat insulating section, a supply section, and a discharge section. The wavelength at which the heater exhibits the maximum value of the spectral radiant energy density is 2 μm or less. The stainless steel tube has an inlet and an outlet. The stainless steel tube is wound around the heater in a spiral shape two or more times, with a gap between each spiral. The heat insulating section covers the heater and the stainless steel tube. The supply section supplies a fluid toward the inlet. The discharge section discharges the high-temperature, high-pressure fluid from the outlet.

[0012] When the heating device according to the embodiment is used, high-temperature, high-pressure water can be efficiently generated. The inventor believes that the reason is as follows. First, the heating device according to the embodiment uses a heater having a wavelength of 2 μm or less that indicates the maximum value of the spectral radiant energy density to heat the stainless steel tube located in the heat-insulating section. Stainless steel has a reflectance of about 40% or less for the radiation spectrum of wavelengths of 2 μm or less. Therefore, the stainless steel can efficiently absorb the energy emitted from the heater and convert it into heat. In the device according to the embodiment, the stainless steel tube is wound in a spiral shape multiple times, and a gap is provided between the adjacent stainless steel tubes. The stainless steel tube is located in the heat-insulating section. Therefore, the infrared rays emitted from the heater located in the center of the spiral stainless steel tube can easily reach not only the part of the stainless steel tube facing the heater, but also the side part of the part facing the heater. Therefore, the stainless steel tube can be efficiently heated while suppressing thermal shock caused by local heating of the stainless steel tube located around the heater, and the fluid in the stainless steel tube can be heated with a higher output to generate a high-temperature, high-pressure fluid. This device can produce a high-temperature, high-pressure fluid in a relatively short time, making it possible to efficiently perform processes such as the production of fine particles, surface modification of particles, and extraction processing using the high-temperature, high-pressure fluid.

[0013] Hereinafter, the heating device according to the embodiment will be described in detail.

[0014] Heater spectral radiant energy density (W / cm2 The wavelength showing the maximum value of the wavelength difference (μm), i.e., the peak wavelength, is 2 μm or less. This peak wavelength is preferably 0.25 μm or more and 1.8 μm or less. If the peak wavelength is within this range, the stainless steel pipe can be heated more efficiently. The peak wavelength is more preferably 0.50 μm or more and 1.6 μm or less.

[0015] As the heater, for example, a near-infrared heater such as a halogen lamp is used. The filament of the halogen lamp contains, for example, tungsten.

[0016] The shape of the heater is not particularly limited. For example, the heater is cylindrical. The heater is preferably cylindrical or prismatic with a longitudinal direction. The total length of the heater filament is, for example, 1 cm or more and 100 cm or less, and, for another example, 10 cm or more and 50 cm or less.

[0017] The stainless steel tube is disposed around the heater. The stainless steel tube is preferably wound in a spiral or coil shape with the heater at the center. The stainless steel tube preferably forms a spiral along the longitudinal direction of the heater. The angle of the spiral is not particularly limited.

[0018] The stainless steel pipe may include stainless steel or may be made of stainless steel only. The stainless steel may be a chromium-based stainless steel, a chromium-nickel-based stainless steel, or a chromium-nickel-manganese-based stainless steel. The stainless steel may also contain molybdenum, niobium, or the like. The stainless steel may be any of martensitic, ferritic, austenitic, austenitic-ferritic, and precipitation hardening.

[0019] The inner wall of the stainless steel pipe may be coated with a heat-resistant material such as ceramics.

[0020] The outer diameter D of the stainless steel pipe is, for example, 1.5 mm or more and 8.0 mm or less. The outer diameter D of the stainless steel pipe may be, for example, 2.0 mm or more and 5.0 mm or less. As the outer diameter D, for example, the average value of measurements taken at 10 equally spaced points on the stainless steel pipe using a vernier caliper or the like is used.

[0021] The wall thickness of the stainless steel pipe is, for example, 0.3 mm or more and 2.0 mm or less. The wall thickness of the stainless steel pipe may be 0.4 mm or more and 1.2 mm or less.

[0022] The width T of the gap between each spiral of the stainless steel pipe is, for example, 0.75 mm or more and 16.0 mm or less. The width T may be 1.0 mm or more and 8.0 mm or less. For example, the width T is determined by measuring the width of the gap between two or more points of the stainless steel pipe using a caliper or the like and averaging the measured values.

[0023] The ratio T / D of the width T of the gap between each spiral of the stainless steel pipe to the outer diameter D of the stainless steel pipe is, for example, not less than 0.5 and not more than 2. The ratio T / D may be not less than 0.7 and not more than 1.5.

[0024] The shortest distance between the stainless steel tube and the heater is, for example, 1.0 cm or more and 5.0 cm or less. If the distance between the stainless steel tube and the heater is within this range, thermal shock to the stainless steel tube can be suppressed while increasing thermal efficiency. This distance may be 2.0 cm or more and 3.0 cm or less. The longest distance between the stainless steel tube and the heater is, for example, 2.0 cm or more and 6.0 cm or less. This distance may be 2.5 cm or more and 4.0 cm or less.

[0025] FIG. 1 is a schematic diagram showing an enlarged portion of a heating device according to an embodiment. In FIG. 1, a stainless steel tube 1 is wound in a spiral shape around a heater 2. The heater 2 shown in FIG. 1 has a cylindrical shape and extends in the vertical direction. In FIG. 1, the stainless steel tube has a spiral shape that is almost parallel. That is, the width T of the gap between each spiral is almost constant. The width T may be different for each spiral. In addition, the outer diameter D of the stainless steel tube is a nearly constant length.

[0026] The stainless steel tube has an inlet and an outlet. The inlet is connected to a supply for supplying a fluid. The outlet is connected to a discharge for discharging the fluid. The stainless steel tube located around the heater can be a reaction section for producing a high temperature and high pressure fluid.

[0027] The heat insulating part covers the heater and the stainless steel pipe. The heat insulating part blocks heat radiation from the gaps and the outer periphery of the stainless steel pipe to the outside. A thermometer may be provided inside the heat insulating material, on the stainless steel pipe side of the heat insulating material, or on the outside of the stainless steel pipe.

[0028] The heat insulating part includes, for example, ceramics, metal, glass, etc. The heat insulating part preferably includes ceramics, and more preferably is composed only of heat-resistant ceramic fibers. The shortest distance between the heat insulating part and the stainless steel pipe is preferably 5 mm or less, and more preferably 0 mm, i.e., the heat insulating part and the stainless steel pipe are in contact with each other.

[0029] The shape of the heat insulating part is not particularly limited. The heat insulating part includes, for example, a metal case and a heat insulating material filled in the metal case. For example, the heat insulating part is preferably in contact with the outer periphery of the stainless steel pipe to prevent thermal convection, and the outer periphery of the heat insulating part is preferably in contact with and surrounded by a metal casing to minimize convective heat transfer. The heat insulating part has holes for connecting the supply part and the discharge part to the stainless steel pipe and a hole for supplying electric current to the heater.

[0030] FIG. 2 is a cross-sectional view showing a schematic view of a part of a heating device according to an embodiment. In FIG. 2, a stainless steel pipe located around a heater (not shown) is covered with a heat insulating part. The supply and exhaust ports which communicate with the insulated pipes are located outside the insulated section.

[0031] Fig. 3 is a cross-sectional view taken along line A of a schematic diagram of a portion of a heating device according to an embodiment. In Fig. 3, a stainless steel tube 1 located around a heater (not shown) is located inside a metal case 3a. A heat insulating material 3b is filled between the metal case 3a and the outer periphery of the stainless steel tube 1.

[0032] The supply unit is connected to the inlet of the stainless steel pipe and supplies a fluid to the stainless steel pipe. The supply unit includes, for example, a tank for storing the fluid and a pipe connecting the tank to the inlet of the stainless steel pipe. The pipe is, for example, made of a stainless steel pipe. The supply unit may include a pump for supplying the fluid and a valve for switching the supply of the fluid. The fluid is, for example, a liquid. The fluid is, for example, water, carbon dioxide, methanol, ethanol, or isopropanol.

[0033] The discharge unit is connected to the outlet of the stainless steel pipe. The discharge unit discharges the high-temperature, high-pressure fluid generated in the stainless steel pipe around the heater to the outside. The high-temperature, high-pressure fluid includes a critical fluid or a fluid at a temperature and pressure near the critical point. The discharge unit includes, for example, a cooling device for cooling the high-temperature, high-pressure fluid, a tank for storing the high-temperature, high-pressure fluid or the cooled high-pressure fluid, and a pipe for connecting the outlet of the stainless steel pipe and the tank. The pipe is made of, for example, a stainless steel pipe. The cooling device may have a double-pipe structure in which a pipe for flowing a refrigerant is provided around the process pipe. The discharge unit may include one or more of each of a valve for discharging the high-temperature, high-pressure fluid, a valve for switching the discharge of the fluid, and a pump for maintaining the pressure in the system. The discharge unit preferably includes one or more pressure loss coils for reducing the pressure of the high-pressure fluid. The pressure loss coil may flow a cooled high-pressure fluid, or may flow a high-temperature, high-pressure fluid before being introduced into the cooling device.

[0034] [Surface treatment equipment] The surface treatment apparatus according to the embodiment includes a heating apparatus according to the embodiment, a treatment section, a sample introduction section, and a discharge section. The treatment section is connected to the discharge section of the heating apparatus. In the treatment section, a surface treatment is performed using a high-temperature, high-pressure fluid. The sample introduction section introduces a sample into the treatment section. The discharge section discharges the object to be treated from within the treatment section.

[0035] The processing section may have the same structure as the heater and stainless steel tube of the heating device. That is, the processing section may have a heater having a wavelength of 2 μm or less that indicates the maximum value of the spectral radiant energy density, and a stainless steel tube having an inlet and an outlet, wound around the heater in a spiral shape with two or more turns and with a gap between each turn. The processing section may have a reactor instead of the stainless steel tube. The processing section preferably has a heat insulating section that covers the heater and the stainless steel tube. The high-temperature, high-pressure fluid generated in the heating device is supplied to the processing section via the exhaust section of the heating device. The exhaust section of the heating device may be rephrased as the supply section of the surface treatment device.

[0036] The sample introduction section includes, for example, a pipe for supplying the sample to the supply section or the processing section. The sample introduction section may include a tank for storing the sample, a pump, and a valve. The tank is preferably a pressurizable container. The sample may be mixed with a high-temperature, high-pressure fluid in the exhaust section of the heating device and then supplied to the processing section. For example, a dispersion liquid of fine particles is used as the sample. The fine particles may be inorganic, such as silicon nitride, silicon oxide, boron nitride, aluminum nitride, or the like, or may be organic. For example, water, an organic solvent such as methanol, or a mixture thereof is used as the dispersion medium.

[0037] The discharge unit is connected to the processing unit, for example, to an outlet of a stainless steel pipe. The discharge unit discharges the processed product produced in the processing unit to the outside. The discharge unit includes a cooling device for cooling the processed product, a tank for storing the processed product, and piping for connecting the outlet and the tank. The piping is made of, for example, a stainless steel pipe. The cooling device may be provided outside the stainless steel pipe. The discharge unit includes a pump for discharging the processed product and one or more valves for switching the discharge of the processed product.

[0038] The surface treatment device may further include a treatment agent introduction section. The treatment agent introduction section includes, for example, a pipe for supplying the treatment agent to the supply section or the treatment section. The treatment agent introduction section may include a tank for storing the treatment agent, a pump, and a valve. The treatment agent may be supplied to the treatment section, or may be supplied to the treatment section in a state where it is mixed with the high-temperature, high-pressure fluid and the sample in the exhaust section of the heating device. For example, a dispersion liquid of an organic compound is used as the treatment agent. For example, an organic solvent such as water or isopropanol, or a mixture thereof is used as the dispersion medium.

[0039] Hereinafter, the configuration and operation method of an example of a surface treatment apparatus will be described with reference to the drawings.

[0040] Fig. 4 is a schematic diagram showing an example of a surface treatment apparatus according to an embodiment. The surface treatment apparatus 100 shown in Fig. 4 includes a heating device 10, a first treatment section 101, a second treatment section 102, a second supply section 103, a sample introduction section 104, a treatment agent introduction section 105, a third supply section 106, and a first discharge section 107.

[0041] The heating device 10 includes a first heater (not shown), a spiral first stainless steel pipe 11 surrounding the first heater, a first heat insulating section (not shown) covering the first heater and the first stainless steel pipe 11, and a first supply section 12. The first supply section 12 includes a first tank T1 for storing water, and a pipe L1 connecting the tank T1 and the inlet of the first stainless steel pipe 11. The first supply section 12 is provided with a first pump P1 and a first valve V1. The first heater, the first pump P1, and the first valve V1 are connected to a controller (not shown). The pipe L1 is provided with a thermometer TE1 and a pressure gauge PI1. The first stainless steel pipe 11 is provided with a thermometer TE2. The first valve V1 may be a manual valve instead of an electric valve.

[0042] The first processing section 101 includes a second heater (not shown), a spiral second stainless steel tube 111 surrounding the second heater, and a second insulation section (not shown) covering the second heater and the second stainless steel tube 111.

[0043] The second supply section 103 has a pipe L2 that connects the inlet of the second stainless steel pipe 111 of the first processing section 101 and the outlet of the first stainless steel pipe 11. The sample introduction section 104 has a tank T2 that stores a sample, a pipe L3 that connects the tank T2 and the pipe L2, a tank T3 that stores a discharged sample, and a pipe L4 that connects the tank T3 and the pipe L3. The treatment agent introduction section 105 has a tank T4 that stores a treatment agent, a pipe L5 that connects the tank T4 and the pipe L2, a tank T5 that stores a discharged treatment agent, and a pipe L6 that connects the tank T5 and the pipe L5. The tanks T3 and T5 can store waste liquid discharged by purging a cleaning liquid, degassing a pump, etc., in addition to sampling a liquid distilled from the second supply section 103 and a mixed fluid that has passed through the second supply section 103 and the sample introduction section 104. The pipe L5 is connected to the pipe L2 at a position closer to the second stainless steel pipe 111 than the connection portion with the pipe L3. The pipe L5 may be connected to the pipe L2 at a position farther from the second stainless steel pipe 111 than the pipe L3, or may be connected to the pipe L3. The pipe L2 is provided with thermometers TE3 and TE4 and a pressure gauge PI2. The pipe L3 is provided with a second pump P2, a second valve V2, and a third valve V3. The pipe L4 is provided with a fourth valve V4. The pipe L5 is provided with a third pump P3, a fifth valve V5, and a sixth valve V6. The pipe L6 is provided with a seventh valve V7.

[0044] The second processing section 102 includes a third heater (not shown), a spiral third stainless steel tube 121 surrounding the third heater, and a third heat insulating section (not shown) covering the third heater and the third stainless steel tube 121. The third stainless steel tube 121 is provided with a thermometer TE7.

[0045] The third supply unit 106 includes a pipe L7 that connects the inlet of the third stainless steel pipe 121 of the second processing unit 102 to the outlet of the second stainless steel pipe 111, a tank T6 that stores the discharged liquid, and a pipe L8 that connects the tank T6 to the pipe L7. The pipe L7 is provided with a thermometer TE6 and a pressure gauge PI3. The pipe L8 is provided with an eighth valve V8.

[0046] The first discharge section 107 includes a first pressure loss coil C1, a second pressure loss coil C2 connected to the outlet of the first pressure loss coil C1, a third pressure loss coil C3 connected to the outlet of the second pressure loss coil, a tank T7 connected to the outlet of the third pressure loss coil C3 and storing the treated sample, a pipe L9 connecting the outlet of the third stainless steel pipe 121 and the first pressure loss coil C1, and a cooling unit CC1 provided in the pipe L9. The cooling unit CC1 is, for example, located around the pipe L9 and includes a pipe through which cooling water flows. This pipe may surround the pipe L9 in a shell shape, or may be a double pipe that cools between the inner pipe and the outer pipe. Thermometers TE8 and TE10 are provided in the pipe L9 before and after the cooling unit CC1. A pressure gauge PI4 is provided in the pipe L9 before the cooling unit CC1. A thermometer TE9 is provided in the cooling unit CC1. A ninth valve V9 is provided downstream of the third coil C3. Any of the coils C1, C2, and C3 may be disposed upstream of the cooling unit CC1 in the discharge section 107.

[0047] The surface treatment device 100 shown in FIG. 4 performs surface treatment of fine particles, for example, by the following flow method. First, as a preliminary operation, a cleaning process of the surface treatment device is performed. First, the first pump P1 is started, and the first valve V1, the third valve V3, and the fourth valve V4 are opened to wash each pipe with water. Next, the third valve V3 is closed, and the sixth valve V6 and the seventh valve V7 are opened to wash each pipe with water. Next, the sixth valve V6 is closed, the eighth valve is opened, and each pipe is washed with water. Next, the eighth valve V8 is closed, and the ninth valve V9 is opened to wash each pipe with water. Next, only the second valve V2 and the fourth valve V4 are opened, and the second pump P2 is started to wash each pipe with a sample. Next, only the fifth valve V5 and the seventh valve V7 are opened, and the third pump P3 is started to wash each pipe with a treatment agent. All or part of the preliminary operation may be omitted.

[0048] After the preliminary operation is completed, the first valve V1, the second valve V2, the third valve V3, the fifth valve V5, the sixth valve V6, and the ninth valve V9 are opened, and the first heater, the second heater, the third heater, the first pump P1, the second pump P2, and the third pump P3 are started while the other valves are closed. As a result, the water supplied from the first tank T1 becomes high-temperature, high-pressure water in the first stainless steel pipe 11. By adjusting the temperature of the first heater, the flow rate of the pump P1, or the inner diameter and length of the pressure drop coils C1, C2, and C3, supercritical water or subcritical water can be generated. This high-temperature, high-pressure water is mixed with the sample supplied from the second tank T2 and the treatment agent supplied from the third tank T3 in the pipe L3, and this mixture is sent into the second stainless steel pipe 111. This mixture is heated to a predetermined temperature in the second stainless steel tube 111 and pressurized, and the surface of the sample is treated with, for example, supercritical water or subcritical water. This treatment liquid is sent to the second processing unit 102 and further treated in the third stainless steel tube 121. The temperature of the first stainless steel tube 11 and the temperature of the second stainless steel tube 111 may be different from each other or may be the same. The treatment time can be adjusted by adjusting the length of the first stainless steel tube 11 and the length of the second stainless steel tube 111. After passing through the third stainless steel tube 121, the treatment liquid is cooled in the cooling unit CC1, depressurized by the first to third pressure loss coils, and collected in the seventh tank T7. At this time, the temperature of the second processing unit 102 and the temperature of the first processing unit 101 may be the same from each other or may be different. In this way, fine particles treated with high-temperature high-pressure water and the treatment liquid are obtained. In the surface treatment device of the embodiment, the first stainless steel tube 11, the second stainless steel tube 111, and the third stainless steel tube 121 are each spirally shaped with gaps and surround the halogen lamp, and are covered with an insulating section, making them easy to heat efficiently and shortening the heating preparation time until the specified temperature is reached after the first to third heaters are started.

[0049] The surface treatment apparatus described above can be modified in various ways. For example, the second treatment section may be omitted, or a third treatment section, a fourth treatment section, and other treatment sections may be added. Also, a valve may be provided in each of the pipes L2 and L9, and the sample may be treated with these valves closed. According to such a half-flow method, the treatment liquid is kept in the first treatment section 101 and the second treatment section 102, and the sample can be treated with high-temperature, high-pressure water for a long period of time. In this case, in the case of a high temperature at which the durability of the valves cannot be obtained, the valves V1 and V9 may be closed for treatment. Also, the treatment agent introduction section 105 may be omitted. In this case, the sample and the treatment agent may be mixed in the tank T2. Also, the sample introduction section 104 and the treatment agent introduction section 105 may be omitted. In this case, the sample, the treatment agent, and a dispersion medium for dispersing them may be mixed in the tank T1.

[0050] Preferred embodiments of the invention are described below. [1] A heating device capable of generating high-temperature and high-pressure fluid, A heater having a wavelength showing a maximum value of a spectral radiant energy density of 2 μm or less; a stainless steel tube having an inlet and an outlet, wound around the heater in a spiral shape for two or more turns, with a gap between each turn; a heat insulating portion that covers the heater and the stainless steel pipe; A supply unit that supplies a fluid toward the inlet; a discharge section that discharges a high-temperature, high-pressure fluid from the outlet; A heating device comprising: [2] The heating device according to [1], wherein the heater includes a halogen lamp. [3] The heating device according to [1] or [2], wherein the outer diameter of the stainless steel tube is 1.5 mm or more and 8.0 mm or less. [4] The heating device according to any one of [1] to [3], wherein a ratio T / D of a width T of the gap between each spiral to an outer diameter D of the stainless steel tube is 0.5 or more and 2 or less. [5] The heating device according to any one of [1] to [4], wherein the heat insulating portion includes ceramics. [6] The heating device according to any one of [1] to [5], wherein the fluid is water. [7] A heating device according to any one of [1] to [6], A processing unit connected to the discharge unit; A sample introduction unit that introduces a sample into the processing unit; a discharge section for discharging the processed material from the processing section; A surface treatment device comprising: [Explanation of symbols]

[0051]

[0033] 1...stainless steel pipe, 2...heater, 3...insulation section, 4...inlet, 5...outlet, 10...heating device, 11...first stainless steel pipe, 12...first supply section, 100...surface treatment device, 101...first processing section, 102...second processing section, 103...second supply section, 104...sample introduction section, 105...treatment agent introduction section, 106...third supply section, 107...first discharge section, 111...second stainless steel pipe, 121...third stainless steel pipe, C1...first pressure loss coil, C2...second pressure loss coil, C3...third pressure loss coil, L1...piping, L2...piping, L3...piping, L4...piping, L5...piping, L6...piping, L7...piping, L8...piping, L9...piping, P1...first pump, P2...second pump P3...3rd pump, P4...4th pump, T1...tank, T2...tank, T3...tank, T4...tank, T5...tank, T6...tank, T7...tank, V1...1st valve, V2...2nd valve, V3...3rd valve, V4...4th valve, V5...5th valve, V6...6th valve, V7...7th valve, V8...8th valve, V9...9th valve, CC1...cooling unit, PI1...pressure gauge, PI2...pressure gauge, PI3...pressure gauge, PI4...pressure gauge, TE1...thermometer, TE2...thermometer, TE3...thermometer, TE4...thermometer, TE5...thermometer, TE6...thermometer, TE7...thermometer, TE8...thermometer, TE9...thermometer, TE10...thermometer.

Claims

1. A heating device capable of generating high-temperature and high-pressure fluid, A heater having a wavelength showing a maximum value of a spectral radiant energy density of 2 μm or less; a stainless steel tube having an inlet and an outlet, wound around the heater in a spiral shape by two or more turns, with a gap between each turn; a heat insulating portion that covers the heater and the stainless steel pipe; A supply unit that supplies a fluid toward the inlet; a discharge section that discharges a high-temperature, high-pressure fluid from the outlet; A heating device comprising:

2. The heating device of claim 1 , wherein the heater comprises a halogen lamp.

3. 2. The heating device according to claim 1, wherein the stainless steel pipe has an outer diameter of 1.5 mm or more and 8.0 mm or less.

4. 2. The heating device according to claim 1, wherein a ratio T / D of a width T of the gap between the spirals to an outer diameter D of the stainless steel pipe is 0.5 or more and 2 or less.

5. The heating device according to claim 1 , wherein the heat insulating portion includes ceramics.

6. The heating device of claim 1 , wherein the fluid comprises water.

7. 2. The heating device according to claim 1, wherein the shortest distance between the heat insulating portion and the stainless steel pipe is 5 mm or less.

8. The heating device according to claim 1 ; A processing unit connected to the discharge unit; A sample introduction unit that introduces a sample into the processing unit; a discharge section for discharging the processed material from the processing section; A surface treatment device comprising:

Images