Precision air conditioner

Abstract

To provide a precision air conditioner that has a small environmental load and performs air-conditioned temperature control without using an electric heater.SOLUTION: A precision air conditioner comprises: a cooling unit 2 that cools outside air; a blower 4 that blows the air cooled by the cooling unit 2; an outside cooling water supply path 12 that supplies external cooling water to the cooling unit 2; an outside cooling water discharge path 13 that discharges outside cooling water from the cooling unit 2; a control valve 15 that connects the outside cooling water supply path 12 and the outside cooling water discharge path 13; a blown air temperature sensor 18 that detects a temperature of the air blown from the blower 4; and a regulator 17 that connects the blown air temperature sensor 18 and the control valve 15.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention is a precision air conditioning engine with a built-in chilled water control system. [Background technology]

[0002] Semiconductor manufacturing plants and computer rooms are air-conditioned throughout the year. The cold water used for cooling these facilities is basically produced by refrigerators (see, for example, Patent Document 1). An example of a conventional precision air conditioner (temperature control system) that uses a refrigerator is shown in Figure 4. As shown in this figure, outside air taken into the precision air conditioner is supercooled by a cooling system that uses a refrigerator, and then controlled to a specified temperature using an electric heater.

[0003] The electric heater heats the cold air generated (cooled) by the cooling coil to generate hot air, which is then sent to the outside (e.g., a clean room) by a blower. A control unit is connected to the electric heater, and a regulator is connected to the control unit. A temperature sensor is provided in front of the blower outlet, and the temperature sensor is connected to the regulator. The regulator controls the temperature of the electric heater through the control unit based on the temperature detected by the temperature sensor. In addition, an expansion valve is provided in the refrigerant piping that supplies the refrigerant from the refrigerator to the cooling coil. Further, a water control valve is provided in a discharge passage for discharging cooling water from the refrigerator, and the water control valve is connected to a refrigerant pipe. Such precision air conditioners use a refrigerator to cool the air, but the refrigerants used in the refrigerator, such as freon, pose a large environmental burden.

[0004] An example of a conventional air conditioner that does not use a chiller is shown in Figure 5. As shown in this figure, air conditioners that do not use a chiller use cooling water supplied from a cooling tower on the building side to cool the air. The outside air taken into the air conditioner is supercooled by a cooling coil through which cooling water supplied from a cooling tower circulates. The amount of cold water supplied to the cooling coil is controlled by a motor valve (control valve), thereby controlling the temperature of the cold air blown out from the cooling coil.

[0005] A temperature sensor SE is provided to detect the temperature of the cold air generated by the cooling coil, and a regulator is connected to the temperature sensor SE, which is connected to a motor valve (control valve).The regulator controls the control valve based on the temperature of the cold air detected by the temperature sensor SE, and uses an electric heater to control the cold air blown out from the cooling coil to a predetermined temperature. A control unit is connected to the electric heater, and a regulator is connected to the control unit. A temperature sensor is provided in front of the blower outlet, and the temperature sensor SE is connected to the regulator. The regulator controls the temperature of the electric heater through the control unit based on the temperature detected by the temperature sensor SE. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2002-61911 A Summary of the Invention [Problem to be solved by the invention]

[0007] However, conventional air conditioners that do not use the above-mentioned refrigerators have a small environmental impact because they do not use refrigerants such as fluorocarbons. However, they have a problem in that they consume a lot of power because they use an electric heater to raise the temperature to a specified level after supercooling using a cooling coil.

[0008] The present invention has been made in consideration of the above circumstances, and has an object to provide a precision air conditioning device that has a small environmental impact and can perform air conditioning temperature control without using an electric heater. [Means for solving the problem]

[0009] In order to achieve the above object, the precision air conditioning device of the present invention is a precision air conditioning device comprising a cooling unit that cools outside air and a blower that blows the air cooled by the cooling unit, an external cooling water supply passage for supplying external cooling water to the cooling unit; an external cooling water discharge passage for discharging the external cooling water from the cooling portion; a control valve to which the external cooling water supply passage and the external cooling water discharge passage are connected; a blown air temperature sensor that detects the temperature of the air blown from the blower; a regulator connected to the blown air temperature sensor and the control valve; Equipped with a flow rate of the external cooling water flowing into the cooling unit from the external cooling water supply passage is controlled by the regulator controlling the control valve based on a temperature detected by the blowing air temperature sensor; The system is characterized in that the air, which is temperature-controlled in the cooling section by external cooling water whose flow rate is controlled and sent from the cooling section to the blower, is heated to a predetermined temperature by the heat generation load of the blower and then blown by the blower.

[0010] Here, the cooling section is preferably, but not limited to, a cooling coil. The cooling coil refers to a heat exchange section of a heat exchanger that cools the fluid outside the tube by low-temperature water, brine, or refrigerant flowing inside the tube.

[0011] In the present invention, the flow rate of external cooling water flowing into the cooling section from the external cooling water supply passage is controlled by the regulator controlling the control valve based on the temperature detected by a blown air temperature sensor that detects the temperature of the air blown from the blower, and the air that is temperature-controlled in the cooling section by the external cooling water with controlled flow rate and sent from the cooling section to the blower is heated to a predetermined temperature by the heat generation load of the blower and blown by the blower. Therefore, unlike the conventional technology, no electric heater is used for air conditioning temperature control, and air conditioning temperature control can be performed only by controlling the amount of cold water flowing into the cold water coil. In addition, since no refrigerator, which has a large environmental impact, is used, the environmental impact can be reduced.

[0012] The precision air conditioning device of the present invention is a precision air conditioning device including a cooling unit that cools outside air and a blower that blows the air cooled by the cooling unit, A heat exchanger; an internal cooling water circulation path connected to the cooling unit and the heat exchanger, for circulating internal cooling water between the cooling unit and the heat exchanger; an external cooling water supply passage connected to the heat exchanger independently of the internal cooling water circulation passage and supplying external cooling water to the heat exchanger; an external cooling water discharge passage that is connected to the heat exchanger independently of the internal cooling water circulation passage and that discharges the external cooling water that has been heat exchanged between the external cooling water and the internal cooling water from the heat exchanger; a first control valve that connects a forward path of the internal cooling water circulation passage, through which the internal cooling water flows from the cooling portion toward the heat exchanger, and a return path of the internal cooling water flows from the heat exchanger toward the cooling portion; a blown air temperature sensor that detects the temperature of the air blown from the blower; a first regulator connected to the blown air temperature sensor and the first control valve; a flow rate of the internal cooling water flowing into the cooling section from the return path is controlled by the first regulator controlling the first control valve based on a temperature detected by the blowing air temperature sensor; The system is characterized in that the air, which is temperature-controlled in the cooling section by internal cooling water whose flow rate is controlled and sent from the cooling section to the blower, is heated to a predetermined temperature by the heat generation load of the blower and then blown by the blower.

[0013] In the present invention, the flow rate of the internal cooling water flowing into the cooling section from the return path of the internal cooling water circulation path is controlled by the first adjuster controlling the first control valve based on the temperature detected by a blown air temperature sensor that detects the temperature of the air blown from the blower, and the cold air that is temperature-controlled in the cooling section by the internal cooling water with the controlled flow rate and sent from the cooling section to the blower is heated to a predetermined temperature by the heat generation load of the blower and blown by the blower. Therefore, unlike the conventional technology, air conditioning temperature control can be performed only by controlling the amount of cold water flowing into the cold water coil without using an electric heater for temperature control. In addition, since no refrigerator, which has a large environmental impact, is used, the environmental impact can be reduced. Furthermore, since the internal cooling water circulation path is independent of the external cooling water supply path and the external cooling water discharge path, the internal cooling water circulation path is less susceptible to pressure fluctuations of the external cooling water.

[0014] In the above-mentioned configuration of the present invention, a second control valve is provided to connect the external cooling water supply passage and the external cooling water discharge passage, a cooling water temperature sensor that detects the temperature of the internal cooling water flowing downstream of the heat exchanger in the internal cooling water circulation path; a second regulator connected to the cooling water temperature sensor and the second control valve; the heat exchanger exchanges heat between the internal cooling water flowing in from the internal cooling water circulation passage and the external cooling water flowing in from the external cooling water supply passage; The flow rate of the external cooling water flowing from the external cooling water supply path to the heat exchanger may be controlled by the second adjuster controlling the second control valve based on the temperature detected by the cooling water temperature sensor.

[0015] According to this configuration, the flow rate of the external cooling water flowing into the heat exchanger from the external cooling water supply path is controlled by the second adjuster controlling the second control valve based on the temperature detected by the cooling water temperature sensor, thereby controlling the temperature of the internal cooling water flowing through the internal cooling water circulation path and supplied to the cooling section to a predetermined temperature.

[0016] In the above-mentioned configuration of the present invention, an auxiliary heating unit capable of heating the outside air supplied to the cooling unit is provided, The cooling unit may cool the outside air whose temperature has been raised by the auxiliary heating unit.

[0017] With this configuration, when it is difficult to raise the temperature of the cold air sent from the cooling unit to the blower to a specified temperature (insufficient heating) using only the heat generation load of the blower, the insufficient heating of the air conditioning can be resolved by raising the temperature of the outside air using the auxiliary heating unit.

[0018] In the above-mentioned configuration of the present invention, an outside air temperature sensor that detects the temperature of the outside air that has passed through the auxiliary heating unit; A temperature control unit that controls the temperature of the auxiliary heating unit; an outside air temperature regulator connected to the outside air temperature sensor and the temperature control unit, The temperature of the auxiliary heating section may be controlled by the outside air temperature regulator controlling the temperature control section based on the temperature detected by the outside air temperature sensor.

[0019] With this configuration, the temperature of the auxiliary heating section is controlled by the outdoor air temperature regulator controlling the temperature control section based on the temperature detected by the outdoor air temperature sensor, so that the temperature of the outdoor air heated by the auxiliary heating section can be controlled to a predetermined temperature. Effect of the Invention

[0020] According to the present invention, air conditioning temperature control can be performed with a small environmental load and without using an electric heater. [Brief description of the drawings]

[0021] [Figure 1] FIG. 1 is a cooling control system diagram showing a schematic configuration of a precision air conditioning device according to a first embodiment of the present invention. [Diagram 2] FIG. 10 is a cooling control system diagram showing a schematic configuration of a precision air conditioning device according to a second embodiment of the present invention. [Diagram 3]FIG. [Figure 4] FIG. 1 is a cooling control system diagram showing a schematic configuration of a precision air conditioner using a conventional refrigerator. [Diagram 5] FIG. 1 is a cooling control system diagram showing a schematic configuration of a conventional precision air conditioner that does not use a refrigerator. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a precision air conditioning device according to the present invention will be described with reference to the drawings. (First embodiment) FIG. 1 is a temperature control system diagram showing a schematic configuration of a precision air conditioning device 1 according to the first embodiment. 1, the precision air conditioning device 1 includes a cooling coil (cooling unit) 2, an auxiliary electric heater (auxiliary heating unit) 3, and a blower 4. Such a precision air conditioning device 1 is installed in a room such as a clean room, but the precision air conditioning device 1 may also be installed in other places or rooms other than a clean room.

[0023] External cooling water is supplied to the cooling coil 2 from an external cooling water supply passage 12 described later, and external air passes over the surface of the cooling coil 2, thereby cooling the external air. The cooled external air (cold air) is blown to the outside by the blower 4. The auxiliary electric heater 3 is an electric heater capable of heating the outside air supplied to the cooling coil 2, and heats the outside air as necessary to raise its temperature. In addition, the cooling coil 2 cools the outside air whose temperature has been raised by the auxiliary electric heater 3.

[0024] The precision air conditioning device 1 also includes an external cooling water supply passage 12 and an external cooling water discharge passage 13 . The external cooling water supply passage 12 is a pipe that supplies external cooling water to the cooling coil 2, and has a base end connected to a cooling tower provided on the building side and a tip end connected to the cooling coil 2. The external cooling water discharge passage 13 is a pipe that discharges the external cooling water that has been heat exchanged in the cooling coil 2 from the cooling coil 2, and has a base end connected to the cooling coil 2 and a tip connected to the cooling tower.

[0025] The precision air conditioning device 1 of this embodiment also includes a control valve 15. The control valve 15 is a motor valve equipped with a three-way valve and a motor, and the external cooling water supply passage 12 and the external cooling water discharge passage 13 are connected to the control valve 15. That is, the external cooling water supply passage 12 has a branch passage 12a branching off from the external cooling water supply passage 12, and this branch passage 12a is connected to the control valve 15. Also, the control valve 15 is connected midway through the external cooling water discharge passage 13.

[0026] The precision air conditioning system 1 of this embodiment also includes a regulator 17 and a blown air temperature sensor 18. The blown air temperature sensor 18 detects the temperature of the air blown from the blower 4, and is connected to the regulator 17. The control valve 15 is connected to this regulator 17. The flow rate of the external cooling water flowing from the external cooling water supply passage 12 to the cooling coil 2 is controlled by the regulator 17 controlling (feedback control) the control valve 15 based on the temperature detected by the blowing air temperature sensor 18.

[0027] For example, if the air temperature detected by the blower air temperature sensor 18 is lower than a predetermined set temperature, the regulator 17 controls the control valve 15 to open more than it is now, thereby causing a portion of the external cooling water to flow through the branch path 12a to the external cooling water discharge path 13, thereby reducing the flow rate of external cooling water supplied to the cooling coil 2 and adjusting the amount of heat exchange by the cooling coil 2, thereby raising the temperature of the air generated by the cooling coil 2 to the set temperature.

[0028] On the other hand, if the temperature of the warm air detected by the blower air temperature sensor 18 is higher than the predetermined set temperature, the regulator 17 controls the control valve 15 to close more than it is now, thereby increasing the flow rate of external cooling water supplied to the cooling coil 2 and adjusting the amount of heat exchange by the cooling coil 2, thereby lowering the temperature of the air generated by the cooling coil 2 to the set temperature.

[0029] In this way, the external cooling water, the flow rate of which is controlled as it flows into the cooling coil 2, is temperature-controlled by the cooling coil 2 and the air sent from the cooling coil 2 to the blower 4 is heated to a predetermined temperature by the heat generation load of the blower 4 and then blown by the blower 4.

[0030] Furthermore, the precision air conditioning system 1 of this embodiment is equipped with the auxiliary electric heater (auxiliary heating section) 3, an outside air temperature sensor 40, a temperature control section 41, and an outside air temperature regulator . The auxiliary electric heater 3 heats, as necessary, the outside air supplied to the cooling coil 2. For example, the auxiliary electric heater 3 operates when the heat load of the blower 4 is insufficient to raise the temperature of the outside air to a predetermined temperature. The temperature control unit 41 controls the temperature of the auxiliary electric heater 3 and is connected to the outside air temperature sensor 40 . The outside air temperature regulator 42 is connected to the outside air temperature sensor 40 and the temperature control unit 41 . The temperature of the auxiliary electric heater 3 is controlled by an outside air temperature regulator 42 controlling a temperature control section 41 based on the temperature detected by an outside air temperature sensor 40 .

[0031] For example, when the outside air that has been taken in by the precision air conditioning system 1 and passed through the auxiliary electric heater 3 is at a specified temperature, the outside air passes through the auxiliary electric heater 3 without being heated by the auxiliary electric heater 3, and is subjected to minimum cooling control by the cooling coil 2, and the target temperature is reached by utilizing the heat generation load of the blower 4. In this case, there is no need to operate the auxiliary electric heater 3, which saves energy. On the other hand, when the outside air temperature is lower than the specified temperature, the outside air taken in by the precision air conditioning system 1 is heated by the auxiliary electric heater 3, and then cooling control is performed by the cooling coil 2, and the target temperature is reached by utilizing the heat generation load of the blower 4. In this case, the auxiliary electric heater 3 operates, and the heat generation load of the blower 4 compensates for the temperature deficiency.

[0032] As described above, according to this embodiment, the flow rate of the external cooling water flowing from the external cooling water supply passage 12 into the cooling coil 2 is controlled by the regulator 17 controlling the control valve 15 based on the temperature detected by the blown air temperature sensor 18, which detects the temperature of the air blown from the blower 4, and the air, which is temperature-controlled by the cooling coil 2 using the flow rate-controlled external cooling water and sent from the cooling coil 2 to the blower 4, is heated to a predetermined temperature by the heat generation load of the blower 4 and blown by the blower 4. Therefore, unlike the conventional technology, air conditioning temperature control can be performed only by controlling the amount of cold water flowing into the cooling coil 2 without using an electric heater for air conditioning temperature control. In addition, since no refrigerator, which has a large environmental impact, is used, the environmental impact can be reduced.

[0033] Furthermore, an auxiliary electric heater 3 capable of heating outside air is provided, and the cooling coil 2 cools the outside air heated by the auxiliary electric heater 3 as necessary. Therefore, when it is difficult to heat the air sent from the cooling coil 2 to the blower 4 to a specified temperature (insufficient heating) using only the heat generation load of the blower 4, the insufficient heating of the air conditioning can be eliminated by heating the outside air using the auxiliary electric heater 3.

[0034] In addition, the vehicle is equipped with an outside air temperature sensor 40 that detects the temperature of the outside air heated by the auxiliary electric heater 3, a temperature control unit 41 that controls the temperature of the auxiliary electric heater 3, and an outside air temperature regulator 42 to which the outside air temperature sensor 40 and the temperature control unit 41 are connected, and the temperature of the auxiliary electric heater 3 is controlled by the outside air temperature regulator 42 controlling the temperature control unit 41 based on the temperature detected by the outside air temperature sensor 40, so that the temperature of the outside air heated by the auxiliary electric heater 3 can be controlled to a predetermined temperature.

[0035] Second embodiment FIG. 2 is a temperature control system diagram showing a schematic configuration of a precision air conditioning device 11 according to the second embodiment. As shown in FIG. 2, the precision air conditioning device 11 includes a cooling coil (cooling unit) 2, an auxiliary electric heater (auxiliary heating unit) 3, and a blower 4, similar to the precision air conditioning device 1 of the first embodiment.

[0036] Internal cooling water flows through an internal cooling water circulation passage 21, which will be described later, in the cooling coil 2, and outside air passes over the surface of the cooling coil 2, whereby the outside air is cooled.

[0037] The precision air conditioning system 11 of this embodiment also includes a heat exchanger 20 and an internal cooling water circulation path 21. The internal cooling water circulation path 21 is connected to the cooling coil 2 and the heat exchanger 20, and is a pipe that circulates the internal cooling water between the cooling coil 2 and the heat exchanger 20. The internal cooling water circulation path 21 includes an outward path 21a and a return path 21b. The outward path 21a is a pipe through which the internal cooling water flows from the cooling coil 2 toward the heat exchanger 20, with a base end connected to the cooling coil 2 and a tip end connected to the heat exchanger 20. The return path 21b is a pipe through which the internal cooling water flows from the heat exchanger 20 toward the cooling coil 2, with a base end connected to the heat exchanger 20 and a tip end connected to the cooling coil 2. The outward path 21 a and the return path 21 b are connected inside the heat exchanger 20 .

[0038] Further, the precision air conditioning device 11 of this embodiment is provided with an external cooling water supply passage 22 and an external cooling water discharge passage 23. The external cooling water supply passage 22 is a pipe that supplies the external cooling water to the heat exchanger 20, and has a base end connected to a cooling tower provided on the building side and a tip end connected to the heat exchanger 20. The external cooling water discharge passage 23 is a pipe that discharges the external cooling water that has been heat exchanged with the internal cooling water in the heat exchanger 20 from the heat exchanger 20, and has a base end connected to the heat exchanger 20 and a tip end connected to the cooling tower.

[0039] In addition, the external cooling water supply passage 22 and the external cooling water discharge passage 23 are connected to the heat exchanger 20 independently of the internal cooling water circulation passage 21, and the external cooling water supply passage 22 and the external cooling water discharge passage 23 are connected inside the heat exchanger 20. As described above, the forward passage 21a and the return passage 21b of the internal cooling water circulation passage 21 are also connected inside the heat exchanger 20. Therefore, heat is exchanged between the external cooling water and the internal cooling water by the heat exchanger 20. In other words, the heat exchanger 20 exchanges heat between the internal cooling water flowing in from the forward passage 21a of the internal cooling water circulation passage 21 and the external cooling water flowing in from the external cooling water supply passage 22.

[0040] The precision air conditioning device 11 of this embodiment also includes a first control valve 25. The first control valve 25 is a motor valve equipped with a three-way valve and a motor, and the outward path 21a and the return path 21b of the internal cooling water circulation path 21 are connected to the first control valve 25. That is, the return path 21b has a branch path 21c branching off from the return path 21b, and the branch path 21c is connected to the first control valve 25. The first control valve 25 is also connected to the outward path 21a, upstream of the buffer tank 28.

[0041] Moreover, the precision air conditioning device 11 of this embodiment is equipped with a first controller 17 and a blown air temperature sensor 18. The blown air temperature sensor 18 detects the temperature of the warm air blown from the blower 4, and is connected to the first controller 17. The first controller 17 is connected to the first control valve 25. The flow rate of the internal cooling water flowing from the return path 21b of the internal cooling water circulation path 21 to the cooling coil 2 is controlled by the first regulator 17 controlling (feedback control) the first control valve 25 based on the temperature detected by the blowing air temperature sensor 18.

[0042] For example, if the air temperature detected by the supply air temperature sensor 18 is lower than a predetermined set temperature, the first regulator 17 controls the first control valve 25 to open more than it is now, thereby causing a portion of the internal cooling water flowing through the return path 21b to flow through the branch path 21c to the outward path 21a, thereby reducing the flow rate of the internal cooling water supplied to the cooling coil 2 and adjusting the amount of heat exchange by the cooling coil 2, thereby raising the temperature of the air generated by the cooling coil 2 to the set temperature.

[0043] On the other hand, when the temperature of the warm air detected by the blower air temperature sensor 18 is higher than the predetermined set temperature, the first regulator 17 controls the first control valve 25 to close it more than at present, thereby increasing the flow rate of the internal cooling water supplied to the cooling coil 2 and adjusting the amount of heat exchange by the cooling coil 2, thereby lowering the temperature of the air generated by the cooling coil 2 to the set temperature.

[0044] In this way, the internal cooling water flowing into the cooling coil 2 is controlled in flow rate, and the air sent from the cooling coil 2 to the blower 4 is heated to a predetermined temperature by the heat generation load of the blower 4 and then blown by the blower 4.

[0045] Furthermore, the precision air conditioner 11 of this embodiment includes the auxiliary electric heater (auxiliary heating section) 3, an outside air temperature sensor 40, a temperature control section 41, and an outside air temperature regulator 42, similarly to the first embodiment. The auxiliary electric heater 3 heats the outside air supplied to the cooling coil 2 as required. The temperature control unit 41 controls the temperature of the auxiliary electric heater 3 and is connected to the outside air temperature sensor 40 . The outside air temperature regulator 42 is connected to the outside air temperature sensor 40 and the temperature control unit 41 . The temperature of the auxiliary electric heater 3 is controlled by an outside air temperature regulator 42 controlling a temperature control section 41 based on the temperature detected by an outside air temperature sensor 40 .

[0046] For example, when the outside air that has been taken in by the precision air conditioning system 11 and passed through the auxiliary electric heater 3 is at a specified temperature, the outside air passes through the auxiliary electric heater 3 without being heated by the auxiliary electric heater 3, and then the cold water coil 2 performs minimum cooling control, and the target temperature is reached by utilizing the heat generation load of the blower 4. In this case, there is no need to operate the auxiliary electric heater 3, which saves energy. On the other hand, when the outside air temperature is lower than the specified temperature, the outside air taken in by the precision air conditioning system 11 is heated by the auxiliary electric heater 3, and then cooling control is performed by the chilled water coil 2, and the target temperature is reached by utilizing the heat generation load of the blower 4. In this case, the auxiliary electric heater 3 operates, and the heat generation load of the blower 4 compensates for the temperature deficiency.

[0047] The precision air conditioning device 11 of this embodiment also includes a second control valve 30. The second control valve 30 is a motor valve equipped with a three-way valve and a motor, and the external cooling water supply passage 22 and the external cooling water discharge passage 23 are connected to the second control valve 30. That is, the external cooling water supply passage 22 has a branch passage 22a branching off from the external cooling water supply passage 22, and this branch passage 22a is connected to the second control valve 30. The second control valve 30 is also connected midway through the external cooling water discharge passage 23.

[0048] The flow rate of the external cooling water flowing from the external cooling water supply path 22 to the heat exchanger 20 is controlled by the second control valve 30 based on the temperature of the internal cooling water flowing through the return path 21b downstream of the heat exchanger 20 of the internal cooling water circulation path 21. Specifically, a coolant temperature sensor 26 that detects the temperature of the internal coolant flowing through the return line 21b is provided in the middle of the return line 21b. A second regulator 27 is connected to the coolant temperature sensor 26, and a second control valve 30 is connected to the second regulator 27. The second regulator 27 controls (feedback controls) the second control valve 30 based on the temperature detected by the coolant temperature sensor 26.

[0049] For example, when the temperature of the internal cooling water detected by the cooling water temperature sensor 26 is lower than a predetermined set temperature, the second regulator 27 controls the second control valve 30 to open more than it is now, thereby causing a portion of the external cooling water to flow directly into the external cooling water discharge path 23 without passing through the heat exchanger 20, thereby reducing the flow rate of the external cooling water supplied to the heat exchanger 20 and adjusting the amount of heat exchange by the heat exchanger 20, thereby raising the temperature of the internal cooling water to the set temperature.

[0050] On the other hand, when the temperature of the internal cooling water detected by the cooling water temperature sensor 26 is higher than a predetermined set temperature, the second regulator 27 controls the second control valve 30 to close it more than at present, thereby increasing the flow rate of the external cooling water supplied to the heat exchanger 20 and adjusting the amount of heat exchange by the heat exchanger 20, thereby lowering the temperature of the internal cooling water to the set temperature.

[0051] Further, in the internal cooling water circulation path 21, a buffer tank 28 and a pump 29 are provided in this order from the upstream side. The pump 29 supplies hot water from the first control valve 25 to the heat exchanger 20 via the buffer tank 28. The buffer tank 28 and the pump 29 are provided in the outgoing path 21a of the internal cooling water circulation path 21.

[0052] In addition, a bypass path 35 is connected to the outward path 21a and the return path 21b of the internal cooling water circulation path 21, and a manual bypass valve 36 is provided on this bypass path 35. By opening this bypass valve 36, a part of the internal cooling water flowing through the return path 21b can be made to flow directly into the outward path 21a without passing through the cooling coil 2.

[0053] 3, the precision air conditioning device 11 having the above-mentioned configuration comprises a casing 50 in the shape of a substantially rectangular parallelepiped box, and the cooling coil 2, auxiliary electric heater 3, blower 4, etc. are provided inside this casing 50. A chamber 51 is provided at the upper part inside the casing 50, and a filter 52 such as a HEPA filter is provided in this chamber 51. The air blown out from the blower 4 has foreign matter removed by a filter 52, and is then blown out from an outlet in a ceiling portion 53 towards the outside (for example, a clean room). In FIG. 3, the space below the ceiling portion 53 is open and communicates with the outside.

[0054] The casing 50 has a room 54, in which the cooling coil 2 and the auxiliary electric heater 3 are provided in a vertically connected state below the blower 4. An intake port 54a for taking in outside air (for example, air in a clean room in which the precision air-conditioning device 11 is installed) is provided in the wall forming the room 54, and the outside air is sucked in by the blower 4, heated by the auxiliary electric heater 3 as necessary, cooled by the cooling coil 2, and further heated to a predetermined temperature by the heat generation load of the blower 4, and then blown into the chamber 51. The air blown into the chamber 51 has foreign matter removed by a filter 52, and is then blown out from an outlet in the ceiling portion 53 toward the outside (for example, a clean room).

[0055] Further, a room 55 is provided below the room 54, and a heat exchanger 20 is provided in this room 55. An internal cooling water circulation path 21 that is connected to the cooling coil 2 and the heat exchanger 20 and circulates internal cooling water between the cooling coil 2 and the heat exchanger 20 is provided across both rooms 54, 55 so as to penetrate the partition wall between the rooms 54 and 55. Further, a first control valve 25 is provided in the chamber 54, and the first control valve 25 is connected to the outgoing path 21a and the branch path 21c of the return path 21b of the internal cooling water circulation path 21. Further, a second control valve 30 is provided in the room 55, and a branch passage 22a of the external cooling water supply passage 22 and an external cooling water discharge passage 23 are connected to the second control valve 30. The external cooling water supply passage 22 and the external cooling water discharge passage 23 penetrate the outer wall of the casing 50 and are connected to a cooling tower on the building side (not shown).

[0056] In addition, in the precision air conditioning device 11 shown in FIG. 3, the blower air temperature sensor 18, cooling water temperature sensor 26, first regulator 17, second regulator 27, buffer tank 28, bypass valve 36, temperature control unit 41, outside air temperature regulator 42, blower air temperature sensor 18, etc. shown in FIG. 2 are not shown, but in reality these are also provided in appropriate locations on the casing 50. In this way, the cooling control system of the precision air conditioning unit 11 is compactly housed within the casing 50. Furthermore, the bottom of the casing 50 may be provided with casters for moving the precision air conditioning device 11 and a setting and fixing portion for installing and fixing the precision air conditioning device 11.

[0057] Although not shown, the precision air conditioning device 1 shown in Fig. 1 is also housed in a casing similar to the casing 50. In this case, the precision air conditioning device 1 does not have the heat exchanger 20, internal cooling water circulation path 21, second regulator 27, buffer tank 28, pump 29, second control valve 30, etc., which are provided in the precision air conditioning device 11 shown in Fig. 2, and therefore these are not provided in the casing. For this reason, the casing in which the precision air conditioning device 1 is housed is more compact than the casing 50 in which the precision air conditioning device 11 is housed.

[0058] As described above, according to this embodiment, the flow rate of the internal cooling water flowing into the cooling coil 2 from the return path 21b of the internal cooling water circulation path 21 is controlled by the first controller 17 controlling the first control valve 25 based on the temperature detected by the blown air temperature sensor 18 that detects the temperature of the air blown from the blower 4, and the cold air that is temperature-controlled in the cooling coil 2 by the internal cooling water with the controlled flow rate and sent from the cooling coil 2 to the blower 4 is heated to a predetermined temperature by the heat generation load of the blower 4 and blown by the blower 4. Therefore, unlike the conventional method, air conditioning temperature control can be performed only by controlling the amount of cold water flowing into the cold water coil without using an electric heater for temperature control. In addition, since no refrigerator, which has a large environmental impact, is used, the environmental impact can be reduced.

[0059] It also includes an outside air temperature sensor 40 that detects the temperature of the outside air heated by the auxiliary electric heater 3, a temperature control unit 41 that controls the temperature of the auxiliary electric heater 3, and an outside air temperature regulator 42 to which the outside air temperature sensor 40 and the temperature control unit 41 are connected, and the temperature of the auxiliary electric heater 3 is controlled by the outside air temperature regulator 42 controlling the temperature control unit 41 based on the temperature detected by the outside air temperature sensor 40, so that the temperature of the outside air heated by the auxiliary electric heater 3 can be controlled to a predetermined temperature.

[0060] In addition, since the internal cooling water circulation path 21 is independent of the external cooling water supply path 22 and the external cooling water discharge path 23, the internal cooling water circulation path 21 is less susceptible to pressure fluctuations of the external cooling water. In addition, the flow rate of the external cooling water flowing into the heat exchanger 20 from the external cooling water supply path 22 is controlled by the second regulator 27 controlling the second control valve 30 based on the temperature detected by the cooling water temperature sensor 26, thereby enabling the temperature of the internal cooling water flowing through the internal cooling water circulation path 21 and supplied to the cooling coil 2 to be controlled to a predetermined temperature. [Explanation of symbols]

[0061] 1,11 Precision air conditioning equipment 2 Cooling coil (cooling section) 3 Auxiliary electric heater (auxiliary heating section) 4. Blower 12 External cooling water supply path 13 External cooling water drain 15 Control valve 17 Controller, 1st controller 18 Blow Air Temperature Sensor 20 Heat exchanger 21 Internal cooling water circulation path 21a Outbound 21b Return 22 External cooling water supply path 23 External cooling water drain 25 First control valve 26 Coolant temperature sensor 27 2nd controller 30 Second control valve 40 Outside Air Temperature Sensor 41 Temperature control unit 42 Outdoor temperature controller

Claims

1. A precision air conditioning device comprising a cooling unit that cools outside air and a blower that blows the air cooled by the cooling unit, an external cooling water supply passage for supplying external cooling water to the cooling unit; an external cooling water discharge passage for discharging the external cooling water from the cooling portion; a control valve to which the external cooling water supply passage and the external cooling water discharge passage are connected; a blown air temperature sensor that detects the temperature of the air blown from the blower; a regulator connected to the blown air temperature sensor and the control valve; Equipped with a flow rate of the external cooling water flowing into the cooling unit from the external cooling water supply passage is controlled by the regulator controlling the control valve based on a temperature detected by the blowing air temperature sensor; A precision air conditioning system characterized in that the air, which is temperature-controlled in the cooling section by external cooling water whose flow rate is controlled and sent from the cooling section to the blower, is heated to a predetermined temperature by the heat generation load of the blower and then blown by the blower.

2. A precision air conditioning device comprising a cooling unit that cools outside air and a blower that blows the air cooled by the cooling unit, A heat exchanger; an internal cooling water circulation path connected to the cooling unit and the heat exchanger, for circulating internal cooling water between the cooling unit and the heat exchanger; an external cooling water supply passage connected to the heat exchanger independently of the internal cooling water circulation passage and supplying external cooling water to the heat exchanger; an external cooling water discharge passage that is connected to the heat exchanger independently of the internal cooling water circulation passage and that discharges the external cooling water that has been heat exchanged between the external cooling water and the internal cooling water from the heat exchanger; a first control valve that connects a forward path of the internal cooling water circulation passage, through which the internal cooling water flows from the cooling portion toward the heat exchanger, and a return path of the internal cooling water flows from the heat exchanger toward the cooling portion; a blown air temperature sensor that detects the temperature of the air blown from the blower; a first regulator connected to the blown air temperature sensor and the first control valve; a flow rate of the internal cooling water flowing into the cooling section from the return path is controlled by the first controller controlling the first control valve based on a temperature detected by the blowing air temperature sensor, A precision air conditioning system characterized in that the air, which is temperature-controlled in the cooling section by internal cooling water whose flow rate is controlled and sent from the cooling section to the blower, is heated to a predetermined temperature by the heat generation load of the blower and then blown by the blower.

3. a second control valve to which the external cooling water supply passage and the external cooling water discharge passage are connected; a cooling water temperature sensor that detects the temperature of the internal cooling water flowing downstream of the heat exchanger in the internal cooling water circulation path; a second regulator connected to the cooling water temperature sensor and the second control valve; the heat exchanger exchanges heat between the internal cooling water flowing in from the internal cooling water circulation passage and the external cooling water flowing in from the external cooling water supply passage; 3. The precision air conditioning system according to claim 2, wherein the flow rate of the external cooling water flowing from the external cooling water supply path to the heat exchanger is controlled by the second adjuster controlling the second control valve based on the temperature detected by the cooling water temperature sensor.

4. An auxiliary heating unit capable of heating the outside air supplied to the cooling unit, 4. The precision air conditioning system according to claim 1, wherein the cooling section cools outside air whose temperature has been raised by the auxiliary heating section.

5. an outside air temperature sensor that detects the temperature of the outside air that has passed through the auxiliary heating unit; A temperature control unit that controls the temperature of the auxiliary heating unit; an outside air temperature regulator connected to the outside air temperature sensor and the temperature control unit, 5. The precision air conditioning system according to claim 4, wherein the temperature of the auxiliary heating section is controlled by the outdoor air temperature regulator controlling the temperature control section based on the temperature detected by the outdoor air temperature sensor.

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