Component mounting apparatus, component mounting system, method of inspecting pneumatic circuit in component mounting apparatus, and method of diagnosing pneumatic circuit in component mounting apparatus

Abstract

To provide a component mounting apparatus, a component mounting system, a method of inspecting a pneumatic circuit in the component mounting apparatus, and a method of diagnosing the pneumatic circuit in the component mounting apparatus, configured to detect a minor fault in a pneumatic circuit that supplies positive pressure or negative pressure to a suction nozzle.SOLUTION: A component mounting apparatus includes: a component holding head 22 having a suction nozzle 21; a driving unit 24 which moves up / down the component holding head 22; a pneumatic circuit having a first air flow channel P1 leading to the suction nozzle 21, a flow channel switching unit S, and a flow rate measuring instrument 31 for measuring a flow rate of the air in the first air flow channel P1; and a pneumatic circuit inspection unit which moves down the component holding head 22 to bring a component holding surface 21a of the suction nozzle 21 into contact with a height reference member 14, actuates the flow channel switching unit S to connect the first air flow channel P1 to a positive pressure source 34 or a negative pressure source 33, and obtains a flow rate of the air measured by the flow rate measuring instrument 31.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a component mounting apparatus including a pneumatic circuit that supplies positive pressure or negative pressure to a suction nozzle for sucking and holding components, a component mounting system, a method for inspecting a pneumatic circuit in a component mounting apparatus, and a method for diagnosing a pneumatic circuit in a component mounting apparatus.

Background Art

[0002] There is known a component mounting apparatus that sucks and holds components using a suction nozzle and mounts them on a substrate, which automatically detects clogging or air leakage of the suction nozzle. The suction transfer apparatus (component mounting apparatus) described in Patent Document 1 includes a flow rate sensor (flow rate measuring device) that measures the flow rate of air in a detachable flow path (pneumatic circuit) that supplies positive pressure or negative pressure to the suction nozzle, and it is disclosed that when the flow rate of air measured by the flow rate sensor is less than a determination flow rate, it is determined that the suction nozzle is clogged.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the prior art including Patent Document 1, since an abnormality is determined from the flow rate of air flowing in or out through the opening of the component holding surface of the suction nozzle, there is a problem that minute abnormalities caused by a gap smaller than the opening of the suction nozzle cannot be detected, and there is room for further improvement.

[0005] Therefore, an object of the present invention is to provide a component mounting apparatus, a component mounting system, a method for inspecting a pneumatic circuit in a component mounting apparatus, and a method for diagnosing a pneumatic circuit in a component mounting apparatus that can detect minor abnormalities in a pneumatic circuit that supplies positive pressure or negative pressure to a suction nozzle.

Means for Solving the Problem

[0006] The component mounting device of the present invention is a component mounting device for mounting components on a substrate, and includes a component holding head having a suction nozzle for sucking and holding components at its tip, a mounting head main body having a driving unit for raising and lowering the component holding head, a pneumatic circuit including an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source, and a flow rate measuring device for measuring the air flow rate in the air flow path between the suction nozzle and the flow path switching unit, a contact member that contacts the component holding surface of the suction nozzle, and a pneumatic circuit inspection unit that lowers the component holding head to bring the component holding surface of the suction nozzle into contact with the contact member, operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and acquires the air flow rate measured by the flow rate measuring device.

[0007] The component mounting system of the present invention is a component mounting system including a component mounting device for mounting components on a substrate and an information processing device capable of communicating with the component mounting device. The component mounting device includes a component holding head having a suction nozzle for sucking and holding components at its tip, a mounting head main body having a driving unit for raising and lowering the component holding head, a pneumatic circuit including a flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source, and a flow rate measuring device for measuring the air flow rate in the air flow path between the suction nozzle and the flow path switching unit, a contact member that contacts the component holding surface of the suction nozzle, and a pneumatic circuit inspection unit that lowers the component holding head to bring the component holding surface of the suction nozzle into contact with the contact member, operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and acquires the air flow rate measured by the flow rate measuring device. The information processing device has a pneumatic circuit state diagnosis unit for diagnosing the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit.

[0008] The inspection method of the pneumatic circuit in the component mounting device of the present invention includes a component holding head having a suction nozzle at its tip for sucking and holding components, a mounting head main body having a drive unit for raising and lowering the component holding head, an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source, and a flow meter for measuring the air flow rate in the air flow path between the suction nozzle and the flow path switching unit. A method for inspecting a pneumatic circuit in a component mounting device, comprising: a first step of bringing the component holding surface of the suction nozzle into contact with the contact member; a second step of operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source; and a third step of acquiring the air flow rate measured by the flow meter.

[0009] The diagnosis method of the pneumatic circuit in the component mounting device of the present invention diagnoses the state of the pneumatic circuit based on the flow rate obtained by the method according to any one of claims 11 to 14.

Advantages of the Invention

[0010] According to the present invention, it is possible to detect a slight abnormality in the pneumatic circuit that supplies positive pressure or negative pressure to the suction nozzle.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0012] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The configurations, shapes, etc. described below are examples for explanation, and can be appropriately changed according to the specifications of the component mounting apparatus, mounting head, and component mounting system. Hereinafter, corresponding elements in all the drawings are denoted by the same reference numerals, and redundant explanations are omitted. In FIG. 1 and a part described later, as two axes orthogonal to each other in the horizontal plane, the X-axis in the substrate conveyance direction (the left-right direction in FIG. 1) and the Y-axis orthogonal to the substrate conveyance direction (the up-down direction in FIG. 1) are shown. In FIG. 1 and a part described later, the Z-axis (the direction perpendicular to the paper surface in FIG. 1) is shown as the height direction orthogonal to the horizontal plane.

[0013] First, referring to FIG. 1, the configuration of the component mounting apparatus 1 will be described. In FIG. 1, on the upper surface of the base 2, two substrate transfer mechanisms 3 are arranged side by side in the front-rear direction of the Y-axis. The substrate transfer mechanisms 3 each transfer, position, and hold the substrate 4 along the X-axis. Component supply units 5 are installed in front of the front substrate transfer mechanism 3 and behind the rear substrate transfer mechanism 3, respectively.

[0014] Each component supply unit 5 is equipped with a carriage 7 on which a plurality of tape feeders 6 are mounted in parallel along the X-axis. The tape feeder 6 supplies components to the component extraction position where the mounting head picks up the components by pitch-feeding the carrier tape formed with pockets for storing the components in the direction from the outside of the component supply unit 5 toward the substrate transfer mechanism 3 (tape feed direction).

[0015] In FIG. 1, at both ends in the X-axis direction on the upper surface of the base 2, Y-axis tables 8 equipped with linear drive mechanisms are arranged along the Y-axis direction. Two beams 9 equipped with linear drive mechanisms are movably coupled to the Y-axis table 8 in the front-rear direction along the Y-axis direction. Mounting heads 20 that move left and right along the X-axis direction are coupled to the respective beams 9. The mounting head 20 includes a plurality of component holding heads 22 having suction nozzles 21 for sucking and holding components at the tip (suction nozzle holder) (see FIG. 2). Further, the mounting head 20 has a drive unit 24 for raising and lowering the component holding head 22 in the mounting head main body 23 (see FIG. 3).

[0016] The Y-axis table 8, the beam 9, and the mounting head 20 perform a component mounting operation of taking out components from the tape feeder 6 of the component supply unit 5 and mounting them at the mounting positions on the substrate 4. In the component mounting operation, the mounting head 20 moves above the component supply unit 5 and picks up predetermined components with the respective suction nozzles 21. Next, the mounting head 20 moves above the substrate 4, rotates the components held by the respective suction nozzles 21 in a predetermined direction, and repeats a series of mounting turns of mounting them at the respective mounting positions.

[0017] In FIG. 1, each beam 9 is equipped with a head camera 10 located on the lower surface side of the beam 9 and moving integrally with the mounting head 20. As the mounting head 20 moves, the head camera 10 moves above the substrate 4 held by the substrate transfer mechanism 3 and images a substrate mark (not shown) provided on the substrate 4. From the imaging result, the position of the substrate 4 is recognized.

[0018] On the base 2 between the front substrate transfer mechanism 3 and the front component supply unit 5 and between the rear substrate transfer mechanism 3 and the rear component supply unit 5, a component camera 11, a nozzle changer 12, a reference post 13, and a height reference member 14 are respectively arranged. When the mounting head 20 that has taken out a component from the tape feeder 6 of the component supply unit 5 is positioned above, the component camera 11 images the component held by the suction nozzle 21 from below. From the imaging result, the holding posture of the component is recognized. In the component mounting operation, correction of the mounting position is performed in consideration of the imaging result of the substrate 4 by the head camera 10 and the imaging result of the component by the component camera 11.

[0019] In FIG. 1, the nozzle changer 12 has a plurality of nozzle holding holes at the upper part, and stocks the suction nozzles 21 for replacement and an inspection jig 15 described later in the nozzle holding holes. The component holding head 22 of the mounting head 20 with the suction nozzle 21 or the inspection jig 15 mounted accesses the nozzle holding hole where it is empty and performs a predetermined removal operation, so that the suction nozzle 21 or the inspection jig 15 mounted on the component holding head 22 is transferred to the nozzle changer 12.

[0020] Also, an empty component holding head 22 accesses the suction nozzle 21 or the inspection jig 15 held by the nozzle changer 12 and performs a predetermined attachment operation, so that the suction nozzle 21 or the inspection jig 15 is mounted on the component holding head 22. In this way, the component holding head 22 can replace the mounted suction nozzle 21 with another suction nozzle 21 or the inspection jig 15.

[0021] In FIG. 1, the reference post 13 and the height reference member 14 are arranged on the left and right in the X-axis direction sandwiching the component camera 11 and the nozzle changer 12. The reference post 13 and the height reference member 14 are formed of a hard material such as metal, and calibration marks 16 are arranged on the upper surfaces thereof. The head camera 10 images the calibration mark 16 and recognizes the position of the calibration mark 16 in the horizontal plane, whereby the position of the mounting head 20 in the horizontal plane is corrected (calibrated). Further, by lowering the component holding head 22 and bringing the suction nozzle 21 into contact with a region other than the calibration mark 16 on the upper surface of the height reference member 14, the height position of the mounting head 20 is corrected (see FIG. 3).

[0022] Next, with reference to FIGS. 2 to 4, the details of the configuration of the mounting head 20 will be described. Here, the mounting head 20, which is a 16-nozzle head having eight component holding heads 22 arranged in the X-axis direction and provided with two rows in the Y-axis direction, will be described as an example.

[0023] In FIG. 3, the component holding head 22 includes a suction nozzle holder 26, which is a tip portion to which the suction nozzle 21 is attached from below, a rotary joint 27, and a lifting shaft 28. A guide frame 25 is provided hanging down below the mounting head main body portion 23 of the mounting head 20. The component holding head 22 moves up and down along the guide frame 25 (arrow a).

[0024] The drive unit 24 provided in the mounting head main body portion 23 raises and lowers the lifting shaft 28, and the rotary joint 27 and the component holding head 22 move up and down along the guide frame 25 together with the lifting shaft 28. The rotary joint 27 is rotatably attached to the lifting shaft 28 that rotates around the Z-axis. The drive unit 24 rotates the lifting shaft 28 around the Z-axis, and the suction nozzle holder 26 rotates around the Z-axis as the lifting shaft 28 rotates. As a result, the suction nozzle 21 attached to the suction nozzle holder 26 (tip portion) moves up and down and rotates around the Z-axis. The drive unit 24 is controlled by the control unit 40 provided in the component mounting apparatus 1 (FIG. 5).

[0025] In FIGS. 2 to 4, the mounting head main body 23 is provided with a first valve 29, a second valve 30, a flow meter 31, and a filter 32 for each component holding head 22. The first valve 29 and the second valve 30 are two-input one-output air valves and are controlled by the control unit 40. The first valve 29 includes an output port T1, a first input port T2, and a second input port T3. The second valve 30 includes an output port T4, a first input port T5, and a second input port T6.

[0026] In FIGS. 3 and 4, the first input port T2 of the first valve 29 is connected to the negative pressure source 33, and the second input port T3 is connected to the output port T4 of the second valve 30. The first input port T5 of the second valve 30 is connected to the positive pressure source 34, and the second input port T6 is connected to the atmosphere opening 35.

[0027] The output port T1 of the first valve 29 communicates to the head main body side tube connection portion 36 provided in the mounting head main body 23 via the flow meter 31 and the filter 32. A rotary joint side tube connection portion 37 is provided in the rotary joint 27 of the component holding head 22. The rotary joint side tube connection portion 37 communicates to the opening of the component holding surface 21a of the suction nozzle 21 via the rotary joint 27 and the suction nozzle holder 26. The head main body side tube connection portion 36 and the rotary joint side tube connection portion 37 are connected by a flexible tube 38. A damper 39 for protecting the tube 38 from collision is provided in the mounting head main body 23.

[0028] In this way, the air flow path that leads from the output port T1 of the first valve 29 to the flow meter 31, the filter 32, the head main body side tube connection portion 36, the tube 38, the rotary joint side tube connection portion 37, the rotary joint 27, and the suction nozzle holder 26 constitutes the first air flow path P1 that extends from the output port T1 of the first valve 29 to the suction nozzle 21. Further, the air flow path that leads from the flow meter 31 via the first valve 29 and the second valve 30 (flow path switching section S) to the positive pressure source 34 or the negative pressure source 33 constitutes the second air flow path P2. And the section that extends from the head main body side tube connection portion 36 of the mounting head main body portion 23 of the first air flow path P1 to the rotary joint side tube connection portion 37 of the component holding head 22 is constituted by the flexible tube 38.

[0029] In FIGS. 3 and 4, when the control unit 40 turns off the first valve 29, the output port T1 is connected to the first input port T2, the output port T1 communicates with the negative pressure source 33, and the opening of the suction nozzle 21 is vacuum-sucked through the first air flow path P1. When the control unit 40 turns on the first valve 29, the output port T1 is connected to the second input port T3 and communicates with the output port T4 of the second valve 30.

[0030] When the first valve 29 is in the ON state and the control unit 40 turns on the second valve 30, the output port T4 is connected to the first input port T5, the output port T1 of the first valve 29 communicates with the positive pressure source 34, and air is ejected (air blow) from the opening of the suction nozzle 21 through the first air flow path P1. When the first valve 29 is in the ON state and the control unit 40 turns off the second valve 30, the output port T4 is connected to the second input port T6, the output port T1 of the first valve 29 communicates with the atmosphere opening 35, and the opening of the suction nozzle 21 is opened to the atmosphere through the first air flow path P1.

[0031] In this way, the first valve 29 and the second valve 30 constitute a flow path switching section S that switches the first air flow path P1 to be connected to at least the positive pressure source 34 or the negative pressure source 33. The flow meter 31 measures the air flow rate in the first air flow path P1 between the suction nozzle 21 and the flow path switching section S. Then, the first air flow path P1, the second air flow path P2, and the flow path switching section S constitute a pneumatic circuit R.

[0032] Next, with reference to FIG. 5, the configuration of the control system of the component mounting apparatus 1 will be described. Here, the description will focus on the function of acquiring the air flow rate of the pneumatic circuit R and diagnosing the state of the pneumatic circuit R. The control unit 40 provided in the component mounting apparatus 1 includes an air leakage measurement setting unit 41, a pneumatic circuit inspection unit 42, a measurement data storage unit 43, and a pneumatic circuit state diagnosis unit 44. A display / input unit 45 is connected to the control unit 40. The display / input unit 45 is a display / input means such as a touch panel, and displays an operation screen and various information necessary for the operation of the component mounting apparatus 1. Also, it displays an inspection mode input screen used when setting the inspection mode of the pneumatic circuit.

[0033] The air leakage measurement setting unit 41 causes the display / input unit 45 to display an inspection mode input screen and sets the inspection mode for inspecting (acquiring the air flow rate) the pneumatic circuit R. Examples of the inspection mode include a positive pressure inspection mode in which positive pressure is supplied from the positive pressure source 34, a negative pressure inspection mode in which negative pressure is supplied from the negative pressure source 33, and a positive / negative inspection mode in which both the positive pressure inspection mode and the negative pressure inspection mode are executed. Also, the air leakage measurement setting unit 41 stores the inspection mode set using the display / input unit 45.

[0034] In FIG. 5, the pneumatic circuit inspection unit 42 operates the flow path switching unit S (the first valve 29 and the second valve 30) while restricting the outflow or inflow of air from the tip of the component holding head 22 (the suction nozzle holder 26) according to the set inspection mode, and connects the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33 to obtain the air flow rate Q measured by the flow meter 31. That is, in the positive pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34. Also, in the negative pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the negative pressure source 33. Then, the pneumatic circuit inspection unit 42 obtains the flow rate Q1 when the first air flow path P1 is connected to the positive pressure source 34 and the flow rate Q2 when it is connected to the negative pressure source 33.

[0035] After a predetermined waiting time has elapsed since the pneumatic circuit inspection unit 42 operates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33, the pneumatic circuit inspection unit 42 obtains the air flow rate Q from the flow meter 31. Thereby, even a minute air flow rate Q can be accurately measured. The pneumatic circuit inspection unit 42 associates the air flow rate Q measured by the flow meter 31 with the information identifying the component holding head 22 to be inspected and stores it in the measurement data storage unit 43.

[0036] In FIG. 5, the pneumatic circuit inspection unit 42 includes a first flow rate restriction setting unit 42a and a second flow rate restriction setting unit 42b, which are sub-processing units that restrict the outflow or inflow of air from the tip of the component holding head 22. The first flow rate restriction setting unit 42a restricts the outflow or inflow of air in a state where the designated suction nozzle 21 (hereinafter referred to as the "designated nozzle") is attached to the suction nozzle holder 26 (the tip) of the component holding head 22 to be inspected.

[0037] First, the first air flow rate limiting setting unit 42a controls the linear drive mechanism of the Y-axis table 8 and the beam 9, and the drive unit 24 of the component holding head 22 to be inspected, and attaches the designated nozzle in the nozzle changer 12 to the suction nozzle holder 26 of the component holding head 22 to be inspected. Next, the first air flow rate limiting setting unit 42a moves the component holding head 22 with the designated nozzle attached above the height reference member 14, and lowers the component holding head 22 until the component holding surface 21a of the designated nozzle abuts against the upper surface of the height reference member 14 to a reference height H0 (Fig. 3).

[0038] As a result, the opening of the component holding surface 21a of the designated nozzle (suction nozzle 21) abuts against the upper surface of the height reference member 14 and is blocked, and the outflow or inflow of air is restricted. Since the height reference member 14 formed of a hard material contacts the designated nozzle (suction nozzle 21), the opening of the designated nozzle is not completely blocked. As a result, a minute gap through which air flows out or in is formed between the opening of the designated nozzle and the upper surface of the height reference member 14.

[0039] In this way, the height reference member 14 is a contact member that abuts against the component holding surface 21a of the designated nozzle (suction nozzle 21). The contact member (height reference member 14) is an air flow rate limiting means for restricting the first air flow path P1 so that the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33 becomes a minute flow rate Q0.

[0040] In Fig. 5, the second air flow rate limiting setting unit 42b restricts the outflow or inflow of air by attaching the inspection jig 15 to the suction nozzle holder 26 (tip portion) of the component holding head 22 to be inspected. Specifically, the second air flow rate limiting setting unit 42b controls the linear drive mechanism of the Y-axis table 8 and the beam 9, and the drive unit 24 of the component holding head 22 to be inspected, and attaches the inspection jig 15 held in the nozzle changer 12 to the suction nozzle holder 26 of the component holding head 22 to be inspected.

[0041] In the inspection jig 15, an opening or a ventilation path smaller than the opening of the suction nozzle 21 is formed so that the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33 becomes a predetermined minute flow rate Q0. That is, the inspection jig 15 is attached to the component holding head 22 in place of the suction nozzle 21, and is an air flow rate limiting means for limiting the air flow rate Q flowing out from or flowing into the first air flow path P1 to the minute flow rate Q0. Note that as the inspection jig 15, in addition to the one in which an opening for limiting the air flow rate Q to the minute flow rate Q0 is formed, it may be configured to limit to the minute flow rate Q0 with a breathable member such as a porous material or a non-woven fabric.

[0042] In FIG. 5, the pneumatic circuit state diagnosis unit 44 diagnoses the state of the pneumatic circuit R based on the flow rate Q acquired by the pneumatic circuit inspection unit 42 and stored in the measurement data storage unit 43. For example, when the acquired air flow rate Q is larger than a predetermined threshold value, the pneumatic circuit state diagnosis unit 44 diagnoses that an air leak has occurred in the first air flow path P1 from the flow meter 31 to the suction nozzle 21. Note that the minute flow rate Q0 set in the positive pressure inspection mode and the negative pressure inspection mode may be different, and different threshold values may be used in the state diagnosis.

[0043] Next, a method for inspecting the pneumatic circuit R in the component mounting apparatus 1 will be described along the flowcharts of FIGS. 6 to 8. In FIG. 6, first, the air leak measurement setting unit 41 causes the display / input unit 45 to display an inspection mode input screen and selects an inspection mode for the pneumatic circuit R (ST1). If none of the inspection modes are selected (No in ST1), that is, if it is selected not to inspect the pneumatic circuit R, the inspection of the pneumatic circuit R ends. If any inspection mode is selected (Yes in ST1), the pneumatic circuit inspection unit 42 executes an inspection preparation process (ST2) described later.

[0044] Next, when the positive pressure inspection mode or the positive / negative inspection mode is selected (Yes in ST3), the pneumatic circuit inspection unit 42 executes a positive pressure inspection process (ST4) described later. Next, when the negative pressure inspection mode or the positive / negative inspection mode is selected (Yes in ST5), the pneumatic circuit inspection unit 42 executes a negative pressure inspection process (ST6) described later. Next, the pneumatic circuit inspection unit 42 causes the measurement data storage unit 43 to store (output) all the acquired flow rates Q (flow rate data) (ST7). Note that the pneumatic circuit inspection unit 42 may cause the measurement data storage unit 43 to store (output) the flow rate data each time the flow rate data is acquired.

[0045] In FIG. 6, when only the positive pressure inspection mode is selected (Yes in ST3 and No in ST5), only the positive pressure inspection process (ST4) is executed. When only the negative pressure inspection mode is selected (No in ST3 and Yes in ST5), only the negative pressure inspection process (ST6) is executed. When the positive / negative inspection mode (both the positive pressure inspection mode and the negative pressure inspection mode) is selected (Yes in ST3 and Yes in ST5), the positive pressure inspection process (ST4) and the negative pressure inspection process (ST6) are executed.

[0046] Next, the details of the inspection preparation process (ST2) will be described along the flow of FIG. 7. In the inspection preparation process (ST2), first, the pneumatic circuit inspection unit 42 resets the counter for specifying the component holding head 22 (N = 1) (ST11). Next, the first flow rate limit setting unit 42a attaches the designated nozzles held by the nozzle changer 12 to all the component holding heads 22 (ST12). Next, the first flow rate limit setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14 (ST13).

[0047] Next, the first flow rate limit setting unit 42a lowers the component holding head 22(N) to be inspected to a cleaning height H1 (Fig. 3) that is higher than the reference height H0 and at which the component holding surface 21a of the designated nozzle does not contact the upper surface of the height reference member 14 (contact member) (ST14). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34, and blows air from the opening of the designated nozzle (ST15: cleaning blow step). As a result, the air ejected from the opening of the designated nozzle bounces off the surface of the height reference member 14 and hits the component holding surface 21a of the designated nozzle, blowing off dust and the like adhering to the surface of the height reference member 14 and the component holding surface 21a of the designated nozzle.

[0048] In Fig. 7, next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the atmosphere opening 35, and opens the opening of the designated nozzle to the atmosphere (ST16: atmosphere opening step). Next, the first flow rate limit setting unit 42a raises the component holding head 22(N) to be inspected to the standby height H2 (Fig. 3) (ST17). Next, if the processing has not been completed for all the component holding heads 22 (No in ST18), the pneumatic circuit inspection unit 42 increments the counter (N = N + 1) (ST19), and repeats the operations from (ST13) to (ST17) for the next component holding head 22(N + 1). Also, if the processing has been completed for all the component holding heads 22 (Yes in ST18), the pneumatic circuit inspection unit 42 ends the inspection preparation step (ST2).

[0049] Next, the details of the positive pressure inspection step (ST4) will be described according to the flow in Fig. 8. In the positive pressure inspection step (ST4), first, the pneumatic circuit inspection unit 42 resets the counter that identifies the component holding head 22 (N = 1) (ST21). Next, the first flow rate limit setting unit 42a moves the component holding head 22(N) to be inspected above the height reference member 14 and lowers it to the reference height H0, bringing the component holding surface 21a of the designated nozzle (suction nozzle 21) into contact with the height reference member 14 (contact member) (ST22: air flow path restriction step). As a result, the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 is restricted to a minute flow rate Q0.

[0050] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34, and blows air from the opening of the designated nozzle (ST23: Blow ON step). Next, after a predetermined waiting time (ST24: Timer waiting step), the pneumatic circuit inspection unit 42 acquires the air flow rate Q1 (N) measured by the flow meter 31 (ST25: Blow flow rate acquisition step). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the atmosphere opening 35, and opens the opening of the designated nozzle to the atmosphere (ST26: Blow OFF step).

[0051] In FIG. 8, next, if the processing has not been completed for all the component holding heads 22 (No in ST27), the pneumatic circuit inspection unit 42 increments the counter (N = N + 1) (ST28), and repeats the air flow path restriction step (ST22) to the blow OFF step (ST26) for the next component holding head 22 (N + 1). Further, if the processing has been completed for all the component holding heads 22 (Yes in ST27), the pneumatic circuit inspection unit 42 ends the positive pressure inspection step (ST4).

[0052] Next, along the flow of FIG. 9, the details of the negative pressure inspection step (ST6) will be described. In the negative pressure inspection step (ST6), first, the pneumatic circuit inspection unit 42 resets the counter that identifies the component holding head 22 (N = 1) (ST31). Next, the first flow rate restriction setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14 and lowers it to the reference height H0, and brings the component holding surface 21a of the designated nozzle (suction nozzle 21) into contact with the height reference member 14 (contact member) (ST32: Air flow path restriction step). Thereby, the air flow rate Q when the first air flow path P1 is connected to the negative pressure source 33 is restricted to a minute flow rate Q0.

[0053] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the negative pressure source 33, and performs vacuum suction from the opening of the designated nozzle (ST33: suction ON step). Next, after a predetermined waiting time (ST34: timer waiting step), the pneumatic circuit inspection unit 42 acquires the air flow rate Q2(N) measured by the flow meter 31 (ST35: suction flow rate acquisition step). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the atmosphere opening 35, and releases the opening of the designated nozzle to the atmosphere (ST36: suction OFF step).

[0054] In FIG. 9, next, when the processing has not been completed for all the component holding heads 22 (No in ST37), the pneumatic circuit inspection unit 42 increments the counter (N = N + 1) (ST38), and repeats the air flow path restriction step (ST32) to the suction OFF step (ST36) for the next component holding head 22 (N + 1). Further, when the processing has been completed for all the component holding heads 22 (Yes in ST37), the pneumatic circuit inspection unit 42 ends the negative pressure inspection step (ST6).

[0055] As described above, the inspection method of the pneumatic circuit R in the component mounting apparatus 1 of the present embodiment includes a first step of bringing the component holding surface 21a of the suction nozzle 21 into contact with the contact member (height reference member 14) (air flow path restriction steps (ST22), (ST32)), a second step of operating the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33 (blow ON step (ST23), suction ON step (ST33)), and a third step of acquiring the air flow rates Q1(N), Q2(N) measured by the flow meter 31 (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)).

[0056] Also, the third step is executed after a predetermined waiting time from the second step (timer waiting steps (ST24), (ST34)). Further, the pneumatic circuit inspection unit 42 performs the second and third steps when at least one of the cases where the first air flow path P1 is connected to the positive pressure source 34 (positive pressure inspection step (ST2)) and the negative pressure source 33 (negative pressure inspection step (ST4)) after the first step (Yes in ST1).

[0057] Furthermore, the third step is being performed with the component holding head 22 (N) of the inspection target having descended to the reference height H0. That is, the air flow rates Q1(N) and Q2(N) are acquired with the tube 38 connecting the section from the mounting head main body 23 of the first air flow path P1 to the component holding head 22 being in an extended state. By extending the tube 38, it becomes easier to detect cracks occurring in the tube 38 and air leakage from connection parts such as the head main body side tube connection part 36 and the rotary joint side tube connection part 37.

[0058] In this way, the pneumatic circuit inspection unit 42 deforms the tube 38 into a shape suitable for detecting air leakage from the tube 38 or the connection parts of the tube 38 (the head main body side tube connection part 36, the rotary joint side tube connection part 37) by lowering the component holding head 22 in the first step, and acquires the air flow rates Q1(N) and Q2(N). Thereby, fine cracks and the like can be detected.

[0059] When the inspection of the pneumatic circuit R is completed, then the diagnosis of the state of the pneumatic circuit R is performed. In the diagnosis method of the pneumatic circuit R in the component mounting apparatus 1, the pneumatic circuit state diagnosis unit 44 diagnoses the state of the pneumatic circuit R based on the air flow rates Q1(N) and Q2(N) acquired by the pneumatic circuit inspection unit 42 and stored in the measurement data storage unit 43.

[0060] Next, another embodiment of the inspection method for the pneumatic circuit R in the component mounting apparatus 1 will be described along the flowcharts of FIGS. 10 to 12. Hereinafter, the same steps as those of the inspection method for the pneumatic circuit R shown in FIGS. 6 to 9 are denoted by the same reference numerals, and detailed descriptions thereof are omitted. In another embodiment of the inspection method for the pneumatic circuit R, the use of the inspection jig 15 as the air flow rate limiting means is different from the inspection method for the pneumatic circuit R shown in FIGS. 6 to 9. That is, a part of the inspection preparation step (ST2), the positive pressure inspection step (ST4), and the negative pressure inspection step (ST6) are different, and the different parts will be mainly described below.

[0061] In FIG. 10, in the inspection preparation step (ST2), after the counter for specifying the component holding head 22 is reset (N = 1) (ST11), the second flow rate limit setting unit 42a attaches the inspection jig 15 held by the nozzle changer 12 to all the component holding heads 22 (ST41: inspection jig attachment step). Next, for all the component holding heads 22, the cleaning blow step (ST15) and the atmosphere release step (ST16) are sequentially executed. Thereby, dust and the like adhering to minute openings and the like formed in the inspection jig 15 are blown off.

[0062] In FIG. 11, in the positive pressure inspection step (ST4), after the counter for specifying the component holding head 22 is reset (N = 1) (ST21), for all the component holding heads 22, the blow ON step (ST23), the timer waiting step (ST24), the blow flow rate acquisition step (ST25), and the blow OFF step (ST26) are sequentially executed. Thereby, the air flow rate Q1(N) is acquired at all the component holding heads 22.

[0063] In FIG. 12, in the negative pressure inspection step (ST6), after the counter for specifying the component holding head 22 is reset (N = 1) (ST31), for all the component holding heads 22, the suction ON step (ST33), the timer waiting step (ST34), the suction flow rate acquisition step (ST35), and the suction OFF step (ST36) are sequentially executed. Thereby, the air flow rate Q2(N) is acquired at all the component holding heads 22.

[0064] As described above, another example of the inspection method of the pneumatic circuit R in the component mounting apparatus 1 of the present embodiment includes a first step (inspection jig mounting step (ST41)) of restricting the first air passage P1 so that the air flow rate Q becomes a minute flow rate Q0 when the first air passage P1 is connected to the positive pressure source 34 or the negative pressure source 33, a second step (blow ON step (ST23), suction ON step (ST33)) of operating the flow path switching unit S to connect the first air passage P1 to the positive pressure source 34 or the negative pressure source 33, and a third step of obtaining the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring device 31 (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)).

[0065] Further, in the first step, an inspection jig 15 that restricts the air flow rate Q flowing out from or flowing into the first air passage P1 to the minute flow rate Q0 is attached to the component holding head 22 instead of the suction nozzle 21. By using the inspection jig 15, the minute flow rate Q0 can be accurately set. In the third step, the air flow rates Q1(N) and Q2(N) may be obtained with the component holding head 22 lowered to the cleaning height H1 and the tube 38 extended. Thereby, it is possible to detect air leakage from minute cracks and the like that cannot be detected when the component holding head 22 is in the standby height H2.

[0066] If there is a limit to the number of inspection jigs 15 that can be held by the nozzle changer 12, the first step, the second step, and the third step may be executed for each component holding head 22.

[0067] When the inspection of the pneumatic circuit R is completed and the air flow rates Q1(N) and Q2(N) are obtained, the state of the pneumatic circuit R is diagnosed by the pneumatic circuit state diagnosis unit 44. Here, with reference to FIG. 13, an example of the diagnosis method of the pneumatic circuit R in the component mounting apparatus 1 by the pneumatic circuit state diagnosis unit 44 will be described.

[0068] In FIG. 13, the pneumatic circuit state diagnosis unit 44 determines the state of the pneumatic circuit R by comparing the air flow rates Q1(N) and Q2(N) with a first threshold value Qt1 smaller than the minute flow rate Q0 and a second threshold value Qt2 larger than the minute flow rate Q0. Specifically, if the air flow rates Q1(N) and Q2(N) are between the first threshold value Qt1 and the second threshold value Qt2, the pneumatic circuit state diagnosis unit 44 diagnoses that the state of the pneumatic circuit R is good or normal. Further, when the air flow rates Q1(N) and Q2(N) are larger than the second threshold value Qt2, the pneumatic circuit state diagnosis unit 44 diagnoses that an abnormality such as an air leak exists in the first air flow path P1 from the flow rate measuring device 31 to the component holding head 22.

[0069] In addition, when the air flow rates Q1(N) and Q2(N) are zero, the pneumatic circuit state diagnosis unit 44 diagnoses that there is a problem in the second air flow path P2 from the flow rate measuring device 31 to the positive pressure source 34 or the negative pressure source 33. For example, it diagnoses that problems such as failures of the flow rate measuring device 31, the positive pressure source 34, and the negative pressure source 33, or disconnection of the piping up to the flow path switching unit S have occurred. Furthermore, when the air flow rates Q1(N) and Q2(N) are larger than zero and smaller than the first threshold value Qt1, the pneumatic circuit state diagnosis unit 44 diagnoses that an investigation is necessary because an abnormality may have occurred in the first air flow path P1, the second air flow path P2, or the like.

[0070] Next, with reference to FIG. 14, the component mounting system 50 will be described. The component mounting system 50 includes a component mounting device 1A and an information processing device 51. The component mounting device 1A includes a communication unit 46 and can communicate with the information processing device 51 through a communication network 52. Hereinafter, the same parts as those of the component mounting device 1 shown in FIG. 5 are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

[0071] The control unit 40A included in the component mounting device 1A includes an air leakage measurement setting unit 41 and a pneumatic circuit inspection unit 42. The information processing device 51 includes a measurement data storage unit 43 and a pneumatic circuit state diagnosis unit 44. The communication unit 46 of the component mounting device 1A transmits the air flow rates Q1(N) and Q2(N) of the air acquired by the pneumatic circuit inspection unit 42 to the information processing device 51 via the communication network 52. The information processing device 51 stores the received air flow rates Q1(N) and Q2(N) in the measurement data storage unit 43. Then, the pneumatic circuit state diagnosis unit 44 of the information processing device 51 diagnoses the state of the pneumatic circuit R of the component mounting device 1A based on the air flow rates Q1(N) and Q2(N). As a result, a slight abnormality in the pneumatic circuit R that supplies positive pressure or negative pressure to the suction nozzle 21 can be detected.

[0072] As described above, the component mounting device 1 of the present embodiment includes a component holding head 22 having a suction nozzle 21 at its tip (nozzle holder 26), a mounting head main body 23 having a drive unit 24 for raising and lowering the component holding head 22, a first air flow path P1 leading to the suction nozzle 21, and a flow path switching unit S (first valve 29, second valve 30) for switching the first air flow path P1 to be connected to at least a positive pressure source 34 or a negative pressure source 33, and a pneumatic circuit R including a flow rate measuring device 31 for measuring the air flow rates Q1(N) and Q2(N) of the air in the first air flow path P1 between the suction nozzle 21 and the flow path switching unit S.

[0073] Furthermore, the component mounting device 1 includes a contact member (height reference member 14) that contacts the component holding surface 21a of the suction nozzle 21, and a pneumatic circuit inspection unit 42 that lowers the component holding head 22 to bring the component holding surface 21a of the suction nozzle 21 into contact with the contact member, operates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33, and acquires the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring device 31. As a result, a slight abnormality in the pneumatic circuit R that supplies positive pressure or negative pressure to the suction nozzle 21 can be detected.

Industrial Applicability

[0074] The component mounting device, component mounting system, inspection method for a pneumatic circuit in a component mounting device, and diagnosis method for a pneumatic circuit in a component mounting device of the present invention have the effect of being able to detect minor abnormalities in a pneumatic circuit that supplies positive pressure or negative pressure to a suction nozzle, and are useful in the field of mounting components on a substrate.

Explanation of symbols

[0075] 1, 1A Component mounting device 4 Substrate 14 Height reference member (contact member) 21 Suction nozzle 22 Component holding head 26 Suction nozzle holder (tip) 31 Flow meter 33 Negative pressure source 34 Positive pressure source 36 Head main body side tube connection part (connection part) 37 Rotary joint side tube connection part (connection part) 38 Tube 50 Component mounting system P1 First air flow path Q, Q1(N), Q2(N) Flow rate R Pneumatic circuit S Flow path switching part

Claims

1. A component mounting device for mounting components on a substrate, comprising: a component holding head having a suction nozzle at its tip for sucking and holding a component; a mounting head main body having a drive unit for raising and lowering the component holding head; a pneumatic circuit including an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source, and a flow meter for measuring the air flow rate in the air flow path between the suction nozzle and the flow path switching unit; a contact member that contacts the component holding surface of the suction nozzle; a pneumatic circuit inspection unit that lowers the component holding head to bring the component holding surface of the suction nozzle into contact with the contact member, operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and acquires the air flow rate measured by the flow meter.

2. The section of the air flow path from the mounting head main body to the component holding head is constituted by a flexible tube, The pneumatic circuit inspection unit deforms the tube into a shape suitable for detecting air leakage from the tube or the connection part of the tube by lowering the component holding head, and acquires the flow rate. The component mounting device according to claim 1.

3. The pneumatic circuit inspection unit acquires the flow rate after a predetermined waiting time after operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source. The component mounting device according to claim 1.

4. The pneumatic circuit inspection unit acquires the flow rate when the air flow path is connected to the positive pressure source and the flow rate when the air flow path is connected to the negative pressure source. The component mounting device according to claim 1.

5. The component mounting device according to any one of claims 1 to 4, further comprising a pneumatic circuit state diagnosis unit for diagnosing the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit.

6. The component mounting device further comprises a communication unit for communicating with an information processing device having a pneumatic circuit state diagnosis unit for diagnosing the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit, The communication unit transmits the flow rate to the information processing device. The component mounting device according to any one of claims 1 to 4.

7. A component mounting system including a component mounting device for mounting components on a substrate and an information processing device capable of communicating with the component mounting device, The component mounting device includes: a component holding head having a suction nozzle at its tip for sucking and holding a component; A mounting head main body having a drive unit for raising and lowering the component holding head; A pneumatic circuit including a flow path switching unit that switches at least the flow path leading to the suction nozzle and the air flow path to be connected to a positive pressure source or a negative pressure source, and a flow rate measuring device that measures the air flow rate in the air flow path between the suction nozzle and the flow path switching unit; A contact member that contacts the component holding surface of the suction nozzle; A pneumatic circuit inspection unit that lowers the component holding head to bring the component holding surface of the suction nozzle into contact with the contact member, operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and obtains the air flow rate measured by the flow rate measuring device; The information processing device; A component mounting system having a pneumatic circuit state diagnosis unit that diagnoses the state of the pneumatic circuit based on the flow rate obtained by the pneumatic circuit inspection unit.

8. The section of the air flow path from the mounting head main body to the component holding head is constituted by a flexible tube, and the pneumatic circuit inspection unit deforms the tube into a shape suitable for detecting air leakage from the tube or the connection part of the tube by lowering the component holding head to obtain the flow rate. The component mounting system according to claim 7.

9. The pneumatic circuit inspection unit operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, and then obtains the air flow rate measured by the flow rate measuring device after a predetermined waiting time. The component mounting system according to claim 7.

10. The pneumatic circuit inspection unit obtains the air flow rate measured by the flow rate measuring device when the air flow path is connected to the positive pressure source and the air flow rate measured by the flow rate measuring device when the air flow path is connected to the negative pressure source. The component mounting system according to claim 7.

11. A method for inspecting a pneumatic circuit in a component mounting device, the component mounting device including a component holding head having a suction nozzle for sucking and holding a component at a tip, a mounting head main body having a drive unit for raising and lowering the component holding head, a pneumatic circuit including an air flow path leading to the suction nozzle, a flow path switching unit for switching the air flow path to be connected to at least a positive pressure source or a negative pressure source, and a flow rate measuring device for measuring the air flow rate in the air flow path between the suction nozzle and the flow path switching unit, the method comprising: A first step of bringing the component holding surface of the suction nozzle into contact with the contact member; A second step of operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source; A third step of obtaining the flow rate of air measured by the flow rate measuring device, which is an inspection method for a pneumatic circuit in a component mounting device.

12. The section of the air flow path from the mounting head main body part to the component holding head is constituted by a flexible tube, and in the first step, by lowering the component holding head, the tube is deformed into a shape suitable for detecting air leakage from the tube or the connection part of the tube to obtain the flow rate. The inspection method for a pneumatic circuit in a component mounting device according to claim 11.

13. The inspection method for a pneumatic circuit in a component mounting device according to claim 11, wherein the third step is executed after a predetermined waiting time from the second step.

14. The pneumatic circuit inspection unit performs the second step and the third step in at least one of the cases where the air flow path is connected to the positive pressure source and the negative pressure source after the first step. The inspection method for a pneumatic circuit in a component mounting device according to claim 11.

15. A diagnostic method for a pneumatic circuit in a component mounting device, which diagnoses the state of the pneumatic circuit based on the flow rate obtained by the method according to any one of claims 11 to 14.

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