Suction recovery system

Abstract

To suppress disturbance of gas in a heat treatment chamber.SOLUTION: A suction recovery system includes: a conveyance device for conveying a sagger in a conveyance direction; a heat treatment chamber having a carry-in port and a carry-out port where a sagger is conveyed from the carry-in port to the carry-out port; a suction chamber arranged on the downstream side of the carry-out port, where the sagger conveyed from the carry-out port passes; a suction nozzle arranged in the suction chamber for sucking and recovering a material to be treated in the sagger; a first partition body arranged between the heat treatment chamber and the suction chamber, which switches the states between a communication state in which the heat treatment chamber and the suction chamber are communicated with each other and a non-communication state in which the heat treatment chamber and the suction chamber are not communicated; a substitution chamber arranged on the downstream side of the suction chamber, where the sagger passing through the suction chamber passes; and a second partition body arranged between the suction chamber and the substitution chamber, which switches the states between a communication state in which the suction chamber and the substitution chamber are communicated with each other and a non-communication state in which the suction chamber and the substitution chamber are not communicated.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The technology disclosed in this specification relates to a suction recovery system.

Background Art

[0002] Patent Document 1 discloses a suction recovery system. The suction recovery system includes a heat treatment chamber, a suction recovery chamber disposed at the outlet of the heat treatment chamber, and a suction nozzle that suctions an object to be processed in a crucible within the suction recovery chamber.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above suction recovery system, the suction recovery chamber communicates with the heat treatment chamber. In this state, when the suction nozzle suctions the object to be processed in the crucible, the heat treatment chamber is depressurized. As a result, the gas in the heat treatment chamber is disturbed.

[0005] This specification discloses a technology capable of suppressing the disturbance of the gas in the heat treatment chamber.

Means for Solving the Problems

[0006] In a first aspect of the technology disclosed in this specification, the suction recovery system includes a conveying device that conveys a sagger in a conveying direction, a loading port, and an unloading port. A heat treatment chamber in which the sagger is conveyed from the loading port toward the unloading port, a suction chamber that is disposed downstream of the unloading port and through which the sagger unloaded from the unloading port passes, a suction nozzle that is disposed in the suction chamber and sucks and recovers an object to be processed in the sagger, a first partition body that is disposed between the heat treatment chamber and the suction chamber and switches between a communicating state in which the heat treatment chamber and the suction chamber communicate and a non-communicating state in which the heat treatment chamber and the suction chamber do not communicate, a replacement chamber that is disposed downstream of the suction chamber and through which the sagger passing through the suction chamber passes, and a second partition body that is disposed between the suction chamber and the replacement chamber and switches between a communicating state in which the suction chamber and the replacement chamber communicate and a non-communicating state in which the suction chamber and the replacement chamber do not communicate.

[0007] According to the above configuration, when the first partition body switches to a non-communicating state in which the heat treatment chamber and the suction chamber do not communicate, the communication between the heat treatment chamber and the suction chamber is blocked. In this state, even if the suction nozzle sucks the object to be processed in the sagger in the suction chamber, the reduction of pressure in the heat treatment chamber is suppressed. Thereby, it is possible to suppress the disturbance of the gas in the heat treatment chamber.

Brief Description of the Drawings

[0008]

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[0009] The main features of the embodiments described below are listed. Note that the technical elements described below are each independent technical elements, which exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

[0010] In a second aspect of the technology disclosed in this specification, in the above first aspect, the suction recovery system is disposed between the heat treatment chamber and the suction chamber, and includes an attitude adjustment chamber through which the crucible carried out from the carry-out port passes, and an attitude adjustment device for adjusting the attitude of the crucible in the attitude adjustment chamber. The first partition body is disposed between the attitude adjustment chamber and the suction chamber. According to the above configuration, the suction nozzle sucks the object to be processed in the crucible in a state where the attitude of the crucible is adjusted. Thereby, the object to be processed can be efficiently sucked. Further, even in a configuration where the attitude adjustment chamber is disposed between the heat treatment chamber and the suction chamber, by switching the first partition body to a non-communicating state where the heat treatment chamber and the suction chamber do not communicate, it is possible to suppress the disturbance of the gas in the heat treatment chamber.

[0011] In a third aspect of the technology disclosed in this specification, in the above second aspect, the conveying device conveys the plurality of crucibles in the conveying direction in a state where the plurality of crucibles are stacked. The suction recovery system is disposed between the attitude adjustment chamber and the suction chamber, and includes a staging chamber through which the plurality of crucibles carried out from the attitude adjustment chamber pass, and a staging device for separating the stacked plurality of crucibles in the staging chamber into a state where the plurality of crucibles are not stacked. According to the above configuration, even in a configuration where the plurality of crucibles are conveyed in a stacked state, it is possible to suppress the disturbance of the gas in the heat treatment chamber.

[0012] In a fourth aspect of the technology disclosed in this specification, in the above-described third aspect, the step-breaking device includes a gripping device main body that grips the sagger and a gripping actuator that operates the gripping device main body. The gripping actuator is disposed outside the step-breaking chamber. According to the above configuration, when the gripping actuator operates the gripping device main body, wear powder may be generated from the gripping actuator. Since the gripping actuator is disposed outside the step-breaking chamber, it is possible to suppress the wear powder from mixing into the object to be processed in the sagger.

[0013] In a fifth aspect of the technology disclosed in this specification, in the above-described third or fourth aspect, the step-breaking device includes a lifting device main body that raises and lowers the plurality of stacked saggers, a lifting actuator that operates the lifting device main body, and a gripping device main body that grips one of the plurality of stacked saggers. The lifting actuator is disposed outside the step-breaking chamber. According to the above configuration, when the lifting actuator operates the lifting device main body, wear powder may be generated from the lifting actuator. Since the lifting actuator is disposed outside the step-breaking chamber, it is possible to suppress the wear powder from mixing into the object to be processed in the sagger.

[0014] In a sixth aspect of the technology disclosed in this specification, in any one of the above-described third or fifth aspects, the first partition body is disposed between the step-breaking chamber and the suction chamber. When the suction chamber and the heat treatment chamber communicate with each other via the posture adjustment chamber and the step-breaking chamber, when the suction nozzle sucks the object to be processed in the sagger in the suction chamber, the heat treatment chamber is depressurized. According to the above configuration, even when the suction nozzle sucks the object to be processed in the sagger in the suction chamber, the depressurization of the heat treatment chamber is suppressed. Thereby, it is possible to suppress the gas in the heat treatment chamber from being disturbed.

[0015] In a seventh aspect of the technology disclosed in this specification, in any one of the first to sixth aspects described above, the suction nozzle is stationary in the left - right direction orthogonal to the conveyance direction. The suction recovery system further includes a pot moving device that moves the pot in the left - right direction with respect to the suction nozzle when the suction nozzle recovers the object to be processed in the pot. According to the above configuration, compared with a configuration in which the suction nozzle is moved in the left - right direction with respect to the pot, it is easier to ensure the sealing property in the suction chamber, and it is possible to suppress the complication of the configuration of the suction recovery system.

[0016] In an eighth aspect of the technology disclosed in this specification, in the seventh aspect described above, the suction recovery system further includes a lifting device that raises and lowers the pot in the suction chamber. The pot moving device moves the pot in the left - right direction with respect to the suction nozzle in a state where the pot is lifted by the lifting device. According to the above configuration, it is possible to suppress the movement of the pot in the conveyance direction when the object to be processed in the pot is being recovered.

[0017] In a ninth aspect of the technology disclosed in this specification, in any one of the first to eighth aspects described above, the suction recovery system is disposed outside the suction chamber and further includes a first actuator that operates the first partition body. According to the above configuration, when the first actuator operates the first partition body, wear powder may be generated from the first actuator. Since the first actuator is disposed outside the suction chamber, it is possible to suppress the mixing of the wear powder into the object to be processed in the pot.

[0018] In a tenth aspect of the technology disclosed in this specification, in any one of the first to ninth aspects described above, the suction recovery system is disposed outside the replacement chamber and further includes a second actuator that operates the second partition body. According to the above configuration, when the second actuator operates the second partition body, wear powder may be generated from the second actuator. Since the second actuator is disposed outside the suction chamber, it is possible to suppress the mixing of the wear powder into the object to be processed in the pot.

[0019] (Example) As shown in FIGS. 1 and 2, the suction recovery system 2 includes a conveying device 10 and a furnace body 12.

[0020] The conveying device 10 is disposed both inside and outside the furnace body 12. The conveying device 10 includes a plurality of rollers 14 rotatably supported at both ends. By rotating the plurality of rollers 14, the crucible 4 on the rollers 14 is conveyed in the conveying direction D1 within the furnace body 12. Hereinafter, the conveying direction D1 is referred to as the forward direction, the opposite of the forward direction is referred to as the backward direction, the direction orthogonal to the forward direction in the horizontal plane is referred to as the left - right direction, and the direction orthogonal to the forward direction and the left - right direction is referred to as the upward direction. In this embodiment, two crucibles 4 are placed on the plurality of rollers 14 in a vertically stacked state and carried into the furnace body 12 (see FIG. 1). Further, the two crucibles 4 stacked in the vertical direction are placed on the plurality of rollers 14 in a side - by - side state in the left - right direction (see FIG. 2). On the other hand, as shown in FIG. 1, the two crucibles 4 stacked in the vertical direction are unstacked in the vertical direction and then carried out of the furnace body 12.

[0021] The furnace body 12 includes an inlet - side replacement section 16, a heat - treatment section 18, an attitude adjustment section 20, a disassembly section 22, a suction recovery section 24, and an outlet - side replacement section 26. The inlet - side replacement section 16, the heat - treatment section 18, the attitude adjustment section 20, the disassembly section 22, the suction recovery section 24, and the outlet - side replacement section 26 are arranged in order in the conveying direction D1.

[0022] The inlet - side replacement section 16 has an inlet - side replacement chamber 36 inside. The inlet - side replacement section 16 replaces the gas in the inlet - side replacement chamber 36 from air to the atmosphere gas, or replaces the gas in the inlet - side replacement chamber 36 from the atmosphere gas to air. The inlet - side replacement chamber 36 communicates with the outside of the furnace body 12. The crucible 4 is carried into the inlet - side replacement chamber 36 from the outside of the furnace body 12 and passes through the inlet - side replacement chamber 36.

[0023] The heat treatment unit 18 has a heat treatment chamber 30 inside. The heat treatment chamber 30 is filled with an atmosphere gas. The atmosphere gas is, for example, nitrogen gas. The heat treatment chamber 30 is arranged downstream of the carry-in port side replacement chamber 36 in the conveyance direction D1. The heat treatment chamber 30 bakes, that is, heat-treats, the workpiece 6 filled in the crucible 4 by a heater (not shown). The workpiece 6 is, for example, a raw material for a ceramic capacitor or a positive electrode material and a negative electrode material for a lithium-ion battery. The heat treatment chamber 30 has a carry-in port 32 arranged at one end in the front-rear direction and a carry-out port 34 arranged at the other end in the front-rear direction. The heat treatment chamber 30 communicates with the carry-in port side replacement chamber 36 through the carry-in port 32. The crucible 4 carried out from the carry-in port side replacement chamber 36 passes through the heat treatment chamber 30. The plurality of crucibles 4 move in the heat treatment chamber 30 in a stacked state and arranged side by side in the left-right direction in the conveyance direction D1 from the carry-in port 32 toward the carry-out port 34. The heat treatment chamber 30 is provided with a gas supply pipe (not shown) for supplying an atmosphere gas into the heat treatment chamber 30. By supplying the atmosphere gas from the gas supply pipe into the heat treatment chamber 30, the gas generated when the workpiece 6 is heat-treated is scavenged from around the workpiece 6. By scavenging the gas generated from the workpiece 6, the firing of the workpiece 6 is promoted. Note that the heat treatment chamber 30 is provided with an exhaust port for exhausting the gas in the heat treatment chamber 30. Therefore, the atmosphere gas supplied into the heat treatment chamber 30 from the gas supply pipe flows in the heat treatment chamber 30 and is exhausted from the exhaust port to the outside of the heat treatment chamber 30. Since the gas flows smoothly in the heat treatment chamber 30, the firing of the workpiece 6 can be efficiently performed.

[0024] The posture adjustment unit 20 has a posture adjustment chamber 40 inside. The posture adjustment chamber 40 is filled with an atmosphere gas. The posture adjustment chamber 40 is arranged downstream of the heat treatment chamber 30 in the conveyance direction D1. The posture adjustment chamber 40 communicates with the heat treatment chamber 30 through the carry-out port 34. The crucible 4 carried out from the carry-out port 34 passes through the posture adjustment chamber 40.

[0025] The step separation part 22 has a step separation chamber 44 inside. The step separation chamber 44 is filled with an atmospheric gas. The step separation chamber 44 is arranged on the downstream side of the posture adjustment chamber 40 in the transport direction D1. For this reason, the posture adjustment chamber 40 is arranged between the heat treatment chamber 30 and the step separation chamber 44. The step separation chamber 44 communicates with the heat treatment chamber 30 via the posture adjustment chamber 40. The pot 4 carried out from the posture adjustment chamber 40 passes through the step separation chamber 44.

[0026] The suction recovery part 24 has a suction chamber 48 inside. The suction chamber 48 is filled with an atmospheric gas. The suction chamber 48 is arranged on the downstream side of the step separation chamber 44 in the transport direction D1. For this reason, the step separation chamber 44 is arranged between the posture adjustment chamber 40 and the suction chamber 48. The suction chamber 48 communicates with the heat treatment chamber 30 via the step separation chamber 44 and the posture adjustment chamber 40. The pot 4 carried out from the step separation chamber 44 passes through the suction chamber 48.

[0027] The outlet side replacement part 26 has an outlet side replacement chamber 52 inside. The outlet side replacement part 26 replaces the gas in the outlet side replacement chamber 52 from the atmospheric gas to air, or replaces the gas in the outlet side replacement chamber 52 from air to the atmospheric gas. The outlet side replacement chamber 52 is arranged on the downstream side of the suction chamber 48 in the transport direction D1. For this reason, the suction chamber 48 is arranged between the step separation chamber 44 and the outlet side replacement chamber 52. The outlet side replacement chamber 52 communicates with the heat treatment chamber 30 via the suction chamber 48, the step separation chamber 44, and the posture adjustment chamber 40. The pot 4 carried out from the suction chamber 48 passes through the outlet side replacement chamber 52. Further, the downstream end of the outlet side replacement chamber 52 in the transport direction D1 communicates with the outside of the furnace body 12. The pot 4 is carried out from the downstream end of the outlet side replacement chamber 52 in the transport direction D1 to the outside of the furnace body 12.

[0028] The suction recovery system 2 includes a primary partition device 56, a secondary partition device 58, a posture adjustment device 60, a stopper device 62, a step separation device 64, a first partition device 66, a suction recovery device 68, a pot moving device 70 (see FIG. 2), a lifting device 72, a second partition device 74, and a third partition device 76.

[0029] As shown in FIG. 1, the primary partition device 56 includes a primary partition body 56a and a primary actuator 56b.

[0030] The primary partition body 56a is disposed between (at the boundary of) the space outside the furnace body 12 and the inlet-side replacement chamber 36. The primary actuator 56b is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the primary actuator 56b due to the operation of the primary actuator 56b, the entry of the wear powder into the inlet-side replacement chamber 36 is suppressed. The primary actuator 56b operates the primary partition body 56a. The primary partition body 56a is switched between a non-communication position and a communication position by the operation of the primary actuator 56b. When the primary partition body 56a is in the non-communication position, the communication between the inlet-side replacement chamber 36 and the space outside the furnace body 12 is blocked. In this state, the inlet-side replacement chamber 36 does not communicate with the space outside the furnace body 12. As shown in FIG. 3, when the primary partition body 56a is in the communication position, the lower end of the primary partition body 56a is disposed above the upper end of the crucible 4 located on the upper stage of the roller 14. In this state, the inlet-side replacement chamber 36 and the space outside the furnace body 12 communicate with each other. Therefore, the primary partition body 56a switches between a non-communication state in which the inlet-side replacement chamber 36 and the space outside the furnace body 12 do not communicate and a communication state in which the inlet-side replacement chamber 36 and the space outside the furnace body 12 communicate by switching between the non-communication position and the communication position.

[0031] As shown in FIG. 1, the secondary partition device 58 includes a secondary partition body 58a and a secondary actuator 58b.

[0032] The secondary partition body 58a is disposed inside the furnace body 12. The secondary partition body 58a is disposed between (at the boundary of) the inlet-side replacement chamber 36 and the heat treatment chamber 30. The secondary actuator 58b is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the secondary actuator 58b due to the operation of the secondary actuator 58b, the entry of the wear powder into the inlet-side replacement chamber 36 and the heat treatment chamber 30 is suppressed. The secondary actuator 58b operates the secondary partition body 58a. The secondary partition body 58a is switched between a non-communication position and a communication position by the operation of the secondary actuator 58b. When the secondary partition body 58a is in the non-communication position, the communication between the inlet-side replacement chamber 36 and the heat treatment chamber 30 is blocked. In this state, the inlet-side replacement chamber 36 does not communicate with the heat treatment chamber 30. As shown in FIG. 4, when the secondary partition body 58a is in the communication position, the lower end of the secondary partition body 58a is disposed above the upper end of the crucible 4 located on the upper stage of the roller 14. In this state, the inlet-side replacement chamber 36 and the heat treatment chamber 30 communicate with each other. Therefore, the secondary partition body 58a switches between a non-communication state in which the inlet-side replacement chamber 36 and the heat treatment chamber 30 do not communicate and a communication state in which the inlet-side replacement chamber 36 and the heat treatment chamber 30 communicate by switching between the non-communication position and the communication position.

[0033] As shown in FIG. 1, the posture adjustment device 60 is disposed on the posture adjustment unit 20. The posture adjustment device 60 includes a plurality of (two in this embodiment) posture adjustment bodies 80 and an actuator 82.

[0034] The posture adjusting body 80 is arranged inside the posture adjusting chamber 40. Two posture adjusting bodies 80 are arranged side by side in the left - right direction. The actuator 82 is arranged outside the posture adjusting chamber 40 (the furnace body 12). Therefore, even when wear powder is generated from the driving part, sliding part, etc. of the actuator 82 due to the operation of the actuator 82, the entry of the wear powder into the posture adjusting chamber 40 is suppressed. For example, when a fluid pressure cylinder is used as the actuator 82, the cylinder is arranged outside the furnace body 12, and the tip of the piston rod to be driven is connected to the posture adjusting body 80 inside the furnace body 12. By arranging it in this way, the sliding part of the cylinder and the piston rod is arranged outside the furnace body 12, and the entry of the wear powder generated from the sliding part into the posture adjusting chamber 40 is suppressed. The actuator 82 moves the posture adjusting body 80 in the vertical direction. The posture adjusting body 80 is switched between an adjustment position and a non - adjustment position by the operation of the actuator 82. When the posture adjusting body 80 is in the adjustment position, the upper end of the posture adjusting body 80 is arranged above the roller 14. In this state, the posture adjusting body 80 abuts against the sagger 4 moving in the conveying direction D1. When the sagger 4 abuts against the posture adjusting body 80, the posture of the sagger 4 is adjusted to a predetermined posture. Also, when the posture adjusting body 80 is in the non - adjustment position, the upper end of the posture adjusting body 80 is arranged below the roller 14. In this state, the sagger 4 does not abut against the posture adjusting body 80.

[0035] The stopper device 62 is arranged in the disassembly part 22. The stopper device 62 includes a plurality of (two in this embodiment) stoppers 84 and an actuator 86.

[0036] The stopper 84 is disposed in the unpacking chamber 44. Two stoppers 84 are arranged side by side in the left - right direction. The actuator 86 is disposed outside the unpacking chamber 44 (the furnace body 12). Therefore, even when wear powder is generated from the actuator 86 due to the operation of the actuator 86, the entry of the wear powder into the unpacking chamber 44 is suppressed. The actuator 86 moves the stopper 84 in the vertical direction. The stopper 84 is switched between a stop position and a non - stop position by the operation of the actuator 86. When the stopper 84 is in the stop position, the upper end of the stopper 84 is disposed above the roller 14. In this state, the stopper 84 abuts on the pot 4 moving in the transport direction D1. Thereby, the pot 4 stops. Also, as shown in FIG. 5, when the stopper 84 is in the non - stop position, the upper end of the stopper 84 is disposed below the roller 14.

[0037] The unpacking device 64 is disposed in the unpacking section 22. The unpacking device 64 includes a lifting device main body 90, a lifting actuator 92, a gripping device main body 94, and a gripping actuator 96.

[0038] The lifting device main body 90 is disposed in the unpacking chamber 44. The lifting device main body 90 is disposed upstream of the stopper 84 in the transport direction D1. The lifting actuator 92 is disposed outside the unpacking chamber 44 (the furnace body 12). Therefore, even when wear powder is generated from the lifting actuator 92 due to the operation of the lifting actuator 92, the entry of the wear powder into the unpacking chamber 44 is suppressed. The lifting actuator 92 moves the lifting device main body 90 in the vertical direction. As shown in FIG. 6, when the lifting device main body 90 moves above the roller 14, the plurality of pots 4 in contact with the stopper 84 are placed on the lifting device main body 90 and lifted while being stacked. Also, as shown in FIG. 7, when the lifting device main body 90 moves below the roller 14, the pot 4 disposed on the lifting device main body 90 descends and is placed on the roller 14.

[0039] The main body 94 of the gripping device is disposed in the unpacking chamber 44. The main body 94 of the gripping device includes a first clamp 100 and a second clamp 102. The first clamp 100 and the second clamp 102 are disposed above the unpacking portion 22. The first clamp 100 and the second clamp 102 face each other in the front-rear direction.

[0040] The gripping actuator 96 is disposed outside the unpacking chamber 44 (furnace body 12). Therefore, even when wear powder is generated from the gripping actuator 96 due to the operation of the gripping actuator 96, the entry of the wear powder into the unpacking chamber 44 is suppressed. The gripping actuator 96 includes a first gripping actuator 104 and a second gripping actuator 106. The first gripping actuator 104 operates the first clamp 100, and the second gripping actuator 106 operates the second clamp 102. Thereby, the first clamp 100 and the second clamp 102 move in the front-rear direction so as to approach each other, and also move in the front-rear direction so as to separate from each other. In a state where the plurality of stacked crucibles 4 are lifted by the lifting device main body 90, when the first clamp 100 and the second clamp 102 move so as to approach each other, the crucible 4 located in the upper stage is gripped by the first clamp 100 and the second clamp 102. Further, as shown in FIG. 8, when the first clamp 100 and the second clamp 102 move so as to separate from each other, the crucible 4 located in the upper stage is released from the first clamp 100 and the second clamp 102.

[0041] As shown in FIG. 1, the first partitioning device 66 includes a first partitioning body 108 and a first actuator 110.

[0042] The first partition body 108 is disposed inside the furnace body 12. The first partition body 108 is disposed between (at the boundary of) the crushing chamber 44 and the suction chamber 48. The first actuator 110 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the first actuator 110 due to its operation, the entry of the wear powder into the crushing chamber 44 and the suction chamber 48 is suppressed. The first actuator 110 operates the first partition body 108. The first partition body 108 is switched between a non-communication position and a communication position by the operation of the first actuator 110. When the first partition body 108 is in the non-communication position, it blocks the communication between the crushing chamber 44 and the suction chamber 48. In this state, the suction chamber 48 does not communicate with the heat treatment chamber 30 via the crushing chamber 44 and the posture adjustment chamber 40. As shown in FIG. 9, when the first partition body 108 is in the communication position, the lower end of the first partition body 108 is disposed above the upper end of the crucible 4 located on the upper stage of the roller 14. In this state, the crushing chamber 44 and the suction chamber 48 communicate with each other. Therefore, the suction chamber 48 communicates with the heat treatment chamber 30 via the crushing chamber 44 and the posture adjustment chamber 40. Thus, by switching the first partition body 108 between the non-communication position and the communication position, the non-communication state in which the heat treatment chamber 30 and the suction chamber 48 do not communicate and the communication state in which the heat treatment chamber 30 and the suction chamber 48 communicate are switched.

[0043] As shown in FIG. 10, the suction recovery device 68 includes a plurality of (two in this embodiment) suction nozzles 112, a bag filter 114, a heat exchanger 116, a fan 118, and a filter 120.

[0044] As shown in FIG. 1, the suction nozzle 112 is disposed in the suction chamber 48. The suction nozzle 112 is fixed to the suction recovery unit 24. The suction nozzle 112 is immovable in the front-rear direction, the vertical direction, and the left-right direction. The suction nozzle 112 is disposed above the roller 14. The suction nozzle 112 sucks the gas in the suction chamber 48 by the operation of the fan 118 (see FIG. 10). Thereby, when the suction nozzle 112 is disposed directly above the crucible 4, the workpiece 6 in the crucible 4 is sucked into the suction nozzle 112 together with the gas.

[0045] As shown in FIG. 10, the bag filter 114, the heat exchanger 116, the fan 118, and the filter 120 are arranged outside the furnace body 12. The bag filter 114 is connected to the suction nozzle 112. The bag filter 114 captures the object to be processed 6 (see FIG. 1) sucked by the suction nozzle 112. Thereby, the object to be processed 6 is recovered.

[0046] The heat exchanger 116 is connected to the bag filter 114. The heat exchanger 116 cools the gas that has passed through the bag filter 114 by allowing a refrigerant to flow inside.

[0047] The fan 118 is connected to the heat exchanger 116. The fan 118 generates a gas flow in the suction recovery device 68. The fan 118 sucks the gas into the filter 120.

[0048] The filter 120 is arranged between the fan 118 and the suction chamber 48. The filter 120 removes foreign substances from the gas discharged from the fan 118. Thereby, the gas free of foreign substances is sent to the suction chamber 48.

[0049] As shown in FIG. 11, the sagger transfer device 70 includes a first transfer device main body 124, a second transfer device main body 126, a first transfer actuator 128, and a second transfer actuator 130.

[0050] The first transfer device main body 124 and the second transfer device main body 126 are arranged in the suction chamber 48. The first transfer device main body 124 and the second transfer device main body 126 face each other in the left - right direction. The first transfer device main body 124 is arranged on the left side of the sagger 4. The second transfer device main body 126 is arranged on the right side of the sagger 4.

[0051] The first moving actuator 128 and the second moving actuator 130 are arranged outside the suction chamber 48 (furnace body 12). Therefore, even when wear powder is generated from the first moving actuator 128 and the second moving actuator 130 due to their operations, the entry of the wear powder into the suction chamber 48 is suppressed. The first moving actuator 128 moves the first moving device body 124 in the left - right direction. The second moving actuator 130 moves the second moving device body 126 in the left - right direction. When the first moving device body 124 and the second moving device body 126 move in the left - right direction, the crucible 4 moves in the left - right direction with respect to the suction nozzle 112.

[0052] As shown in FIG. 9, the lifting device 72 is arranged in the suction recovery unit 24. The lifting device 72 includes a lifting device body 134 and a lifting actuator 136.

[0053] The lifting device body 134 is arranged in the suction chamber 48. The lifting device body 134 is arranged directly below the suction nozzle 112. The lifting actuator 136 is arranged outside the suction chamber 48 (furnace body 12). Therefore, even when wear powder is generated from the lifting actuator 136 due to its operation, the entry of the wear powder into the suction chamber 48 is suppressed. The lifting actuator 136 operates the lifting device body 134 in the up - down direction. As shown in FIG. 1, when the lifting device body 134 moves above the roller 14, the crucible 4 is placed on the lifting device body 134 and rises. Also, as shown in FIG. 9, when the lifting device body 134 moves below the roller 14, the crucible 4 descends and is placed on the roller 14.

[0054] The second partitioning device 74 includes a second partitioning body 140 and a second actuator 142.

[0055] The second partition body 140 is disposed inside the furnace body 12. The second partition body 140 is disposed between (at the boundary of) the suction chamber 48 and the discharge port side replacement chamber 52. The second actuator 142 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the second actuator 142 due to the operation of the second actuator 142, the entry of the wear powder into the suction chamber 48 and the discharge port side replacement chamber 52 is suppressed. The second actuator 142 operates the second partition body 140. The second partition body 140 is switched between a non-communication position and a communication position by the operation of the second actuator 142. When the second partition body 140 is in the non-communication position, the communication between the suction chamber 48 and the discharge port side replacement chamber 52 is blocked. In this state, the discharge port side replacement chamber 52 does not communicate with the suction chamber 48. As shown in FIG. 12, when the second partition body 140 is in the communication position, the lower end of the second partition body 140 is disposed above the upper end of the crucible 4 on the roller 14. In this state, the suction chamber 48 and the discharge port side replacement chamber 52 communicate with each other. Therefore, by switching the second partition body 140 between the non-communication position and the communication position, the non-communication state in which the suction chamber 48 and the discharge port side replacement chamber 52 do not communicate and the communication state in which the suction chamber 48 and the discharge port side replacement chamber 52 communicate are switched. The sealing performance between the suction chamber 48 and the discharge port side replacement chamber 52 by the second partition body 140 is higher than the sealing performance between the step-breaking chamber 44 and the suction chamber 48 by the first partition body 108 (see FIG. 9).

[0056] The third partitioning device 76 includes a third partition body 146 and a third actuator 148.

[0057] The third partition body 146 is disposed between (at the boundary of) the carry-out port side replacement chamber 52 and the space outside the furnace body 12. The third actuator 148 is disposed outside the furnace body 12. Therefore, even when wear powder is generated from the third actuator 148 due to the operation of the third actuator 148, the entry of the wear powder into the carry-out port side replacement chamber 52 is suppressed. The third actuator 148 operates the third partition body 146. The third partition body 146 is switched between a non-communication position and a communication position by the operation of the third actuator 148. When the third partition body 146 is in the non-communication position, the communication between the carry-out port side replacement chamber 52 and the space outside the furnace body 12 is blocked. In this state, the carry-out port side replacement chamber 52 does not communicate with the space outside the furnace body 12. As shown in FIG. 13, when the third partition body 146 is in the communication position, the lower end of the third partition body 146 is disposed above the upper end of the crucible 4 on the roller 14. In this state, the carry-out port side replacement chamber 52 and the space outside the furnace body 12 communicate with each other. Therefore, the third partition body 146 switches between a non-communication state in which the carry-out port side replacement chamber 52 and the space outside the furnace body 12 do not communicate with each other and a communication state in which the carry-out port side replacement chamber 52 and the space outside the furnace body 12 communicate with each other by switching between the non-communication position and the communication position. The third partition body 146 switches from the non-communication position to the communication position when the second partition body 140 is in the non-communication position. The sealing performance between the carry-out port side replacement chamber 52 and the space outside the furnace body 12 by the third partition body 146 is substantially the same as the sealing performance between the suction chamber 48 and the carry-out port side replacement chamber 52 by the second partition body 140.

[0058] The flow of transporting the crucible 4 will be described. First, as shown in FIG. 3, when the secondary partition body 58a is in the non-communication position, the primary partition body 56a moves from the non-communication position to the communication position. Next, the plurality of crucibles 4 are carried into the carry-in port side replacement chamber 36 from outside the furnace body 12 by the rotation of the roller 14 in a stacked state and arranged in the left-right direction. Next, the primary partition body 56a moves from the communication position to the non-communication position. Next, the gas in the carry-in port side replacement chamber 36 is replaced from air to the ambient gas.

[0059] Next, as shown in FIG. 4, the secondary partition body 58a moves from the non-communication position to the communication position. Next, the plurality of crucibles 4 are carried out from the carry-in port 32 into the heat treatment chamber 30 by the rotation of the rollers 14 in a stacked state and arranged in the left-right direction. Next, the secondary partition body 58a moves from the communication position to the non-communication position.

[0060] Next, as shown in FIG. 1, the plurality of crucibles 4 move in the heat treatment chamber 30 from the carry-in port 32 toward the carry-out port 34 by the rotation of the rollers 14 in a stacked state and arranged in the left-right direction. Thereby, the workpiece 6 filled in the crucible 4 is fired, that is, heat-treated. Next, the plurality of crucibles 4 are carried out from the carry-out port 34 into the posture adjustment chamber 40.

[0061] Next, the plurality of crucibles 4 move in the posture adjustment chamber 40 in the conveyance direction D1 by the rotation of the rollers 14 in a stacked state and arranged in the left-right direction. Next, the plurality of crucibles 4 come into contact with the posture adjustment body 80 located at the adjustment position. Thereby, the postures of the plurality of crucibles 4 are adjusted to a predetermined posture. Next, the posture adjustment body 80 moves from the adjustment position to the non-adjustment position. Thereby, the plurality of crucibles 4 are carried out from the posture adjustment chamber 40 into the unstacking chamber 44. By controlling the timing of switching the position of the posture adjustment body 80, the plurality of crucibles 4 are carried out from the posture adjustment chamber 40 into the unstacking chamber 44 at a predetermined time interval.

[0062] Next, the plurality of crucibles 4 move in the unstacking chamber 44 in the conveyance direction D1 by the rotation of the rollers 14 in a stacked state and arranged in the left-right direction. Next, the plurality of crucibles 4 come into contact with the stopper 84 located at the stop position. Thereby, the plurality of crucibles 4 stop. Next, as shown in FIG. 5, the stopper 84 moves from the stop position to the non-stop position.

[0063] Next, as shown in FIG. 6, the lifting device main body 90 rises above the roller 14. As a result, the plurality of crucibles 4 are placed on the lifting device main body 90 in a stacked state and arranged in the left-right direction and rise. Next, as shown in FIG. 7, the first clamp 100 and the second clamp 102 move closer to each other. As a result, the plurality of crucibles 4 located in the upper stage are gripped by the first clamp 100 and the second clamp 102. On the other hand, the plurality of crucibles 4 located in the lower stage are not gripped by the first clamp 100 and the second clamp 102. Next, the lifting device main body 90 descends below the roller 14. As a result, the plurality of crucibles 4 located in the lower stage are placed on the roller 14 in a state of being arranged in the left-right direction. Next, the first partition body 108 moves from the non-communication position to the communication position. Next, the plurality of separated crucibles 4 are carried out from the separation chamber 44 to the suction chamber 48 by the rotation of the roller 14. As described above, the plurality of crucibles 4 are separated from the stacked state to the non-stacked state, and first, the lower crucible 4 is carried out to the suction chamber 48. Next, the first partition body 108 moves from the communication position to the non-communication position.

[0064] Next, as shown in FIG. 8, the lifting device main body 90 rises to the plurality of crucibles 4 gripped by the first clamp 100 and the second clamp 102. Next, the first clamp 100 and the second clamp 102 move away from each other. As a result, the plurality of crucibles 4 are placed on the lifting device main body 90. Next, as shown in FIG. 14, the lifting device main body 90 descends below the roller 14. As a result, the plurality of separated upper-stage crucibles 4 are placed on the roller 14 in a state of being arranged in the left-right direction. Next, the first partition body 108 moves from the non-communication position to the communication position in a state where the second partition body 140 (see FIG. 1) is in the non-communication position. Next, the plurality of crucibles 4 are carried out from the separation chamber 44 to the suction chamber 48 by the rotation of the roller 14. Next, the first partition body 108 moves from the communication position to the non-communication position.

[0065] Next, as shown in FIG. 1, the plurality of crucibles 4 are arranged side by side in the left - right direction and are moved in the conveying direction D1 within the suction chamber 48 by the rotation of the rollers 14. Next, the plurality of crucibles 4 stop directly below the suction nozzle 112 due to the stop of the rollers 14. Next, the lifting device main body 134 rises above the rollers 14. As a result, the plurality of crucibles 4 are placed on the lifting device main body 134 and rise, and the surface of the workpiece 6 in the crucible 4 approaches the suction nozzle 112.

[0066] Next, as shown in FIG. 11, the fan 118 (see FIG. 8) operates. Thereby, the suction nozzle 112 sucks and collects the workpiece 6 in the crucible 4 together with the gas in the suction chamber 48. While the suction nozzle 112 is sucking the workpiece 6, the first partition body 108 is arranged at the non - communicating position. For this reason, the suction chamber 48 is not in communication with the heat treatment chamber 30 (see FIG. 1). By suppressing the decompression of the heat treatment chamber 30, the gas (gas flow) in the heat treatment chamber 30 is prevented from being disturbed.

[0067] While the suction nozzle 112 is sucking the workpiece 6, the crucible moving device 70 and the lifting device 72 operate. Specifically, as shown in FIG. 15, the first moving device main body 124 moves rightward until it contacts the crucible 4, and the second moving device main body 126 moves rightward. Next, as shown in FIG. 16, the first moving device main body 124 moves rightward. As a result, the crucible 4 moves rightward and contacts the second moving device main body 126. Thereby, the suction nozzle 112 moves leftward with respect to the crucible 4. As a result, the surface layer of the workpiece 6 in the crucible 4 is sucked by the suction nozzle 112. Next, the lifting device main body 134 rises slightly. Thereby, the surface of the workpiece 6 in the crucible 4 approaches the suction nozzle 112.

[0068] Next, as shown in FIG. 17, the first moving device main body 124 moves leftward. Next, as shown in FIG. 18, the second moving device main body 126 moves leftward. As a result, the sagger 4 moves leftward and abuts against the first moving device main body 124. For this reason, the suction nozzle 112 moves rightward with respect to the sagger 4. As a result, the surface layer of the workpiece 6 in the sagger 4 is sucked by the suction nozzle 112. Next, the lifting device main body 134 slightly rises. As a result, the surface of the workpiece 6 in the sagger 4 approaches the suction nozzle 112. By repeating the operations of the sagger moving device 70 and the lifting device 72 described above, all of the workpieces 6 in the sagger 4 are sucked by the suction nozzle 112.

[0069] Next, the lifting device main body 134 (see FIG. 9) moves below the roller 14. As a result, the plurality of saggers 4 are placed on the roller 14. Next, as shown in FIG. 12, the second partition body 140 moves from the non-communication position to the communication position with the third partition body 146 in the non-communication position. Next, the plurality of saggers 4 are carried out from the suction chamber 48 to the carry-out port side replacement chamber 52 by the rotation of the roller 14 while being arranged side by side in the left-right direction. Next, the second partition body 140 moves from the communication position to the non-communication position. Next, the gas in the carry-out port side replacement chamber 52 is replaced from the atmospheric gas to air.

[0070] Next, as shown in FIG. 13, the third partition body 146 moves from the communication position to the non-communication position. Next, the plurality of saggers 4 are carried out from the carry-out port side replacement chamber 52 to the outside of the furnace body 12 by the rotation of the roller 14 while being arranged side by side in the left-right direction. Next, the third partition body 146 moves from the communication position to the non-communication position. Next, the gas in the carry-out port side replacement chamber 52 is replaced from air to the atmospheric gas.

[0071] (Effect) In the above embodiment, while the suction nozzle 112 is sucking the workpiece 6, the first partition body 108 is arranged at the non-communication position. For this reason, the suction chamber 48 does not communicate with the heat treatment chamber 30 (see FIG. 1). Thereby, it is possible to suppress the heat treatment chamber 30 from being decompressed. As a result, it is possible to suppress the gas in the heat treatment chamber 30 from being disturbed.

[0072] (Corresponding relationship) The replacement chamber 52 on the carry-out port side is an example of the "replacement chamber".

[0073] (Modification example) The furnace body 12 according to one embodiment may not include at least one of the posture adjustment unit 20 and the disassembly unit 22.

[0074] The suction nozzle 112 according to one embodiment may be movable in the left - right direction. In this configuration, the suction nozzle 112 moves in the left - right direction to suck and recover the object to be processed 6 in the crucible 4. Further, the suction recovery system 2 may not include the crucible moving device 70.

[0075] In the suction recovery system 2 according to one embodiment, the plurality of crucibles 4 may be carried into the heat treatment chamber 30 from the carry - in port 32 in a state where they are not stacked in the up - down direction (i.e., in a single layer).

[0076] In the suction recovery system 2 according to one embodiment, the plurality of crucibles 4 may be carried into the heat treatment chamber 30 from the carry - in port 32 in a state where they are not arranged side by side in the left - right direction (i.e., in a single row).

[0077] As described above, specific examples of the technology disclosed in this specification have been described in detail, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples exemplified above. Also, the technical elements described in this specification or the drawings exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Further, the technology exemplified in this specification or the drawings achieves multiple purposes simultaneously, and achieving one of these purposes itself has technical utility.

Explanation of reference numerals

[0078] 2: Suction recovery system 4: Crucible 6: Object to be processed 10: Conveying device 12: Furnace body 30: Heat treatment chamber 32: Loading port 34: Unloading port 40: Posture adjustment chamber 44: Disassembly chamber 48: Suction chamber 52: Substitution chamber on the unloading port side 60: Posture adjustment device 62: Stopper device 64: Disassembly device 66: First partition device 68: Suction recovery device 70: Sagger moving device 72: Lifting device 74: Second partition device 76: Third partition device 90: Lifting device body 92: Lifting actuator 94: Gripping device body 96: Gripping actuator 108: First partition body 110: First actuator 112: Suction nozzle 124: First moving device body 126: Second moving device body 128: First moving actuator 130: Second moving actuator 134: Lifting device body 136: Lifting actuator 140: Second partition body 142: Second actuator 146: Third partition body 148: Third actuator D1: Conveying direction

Claims

1. A conveying device for conveying a sagger in a conveying direction, a heat treatment chamber having a loading port and an unloading port, and through which the sagger is conveyed from the loading port toward the unloading port, a suction chamber disposed downstream of the unloading port and through which the sagger unloaded from the unloading port passes, a suction nozzle disposed in the suction chamber for sucking and collecting an object to be processed in the sagger, a first partition body disposed between the heat treatment chamber and the suction chamber for switching between a communicating state in which the heat treatment chamber and the suction chamber communicate and a non-communicating state in which the heat treatment chamber and the suction chamber do not communicate, a replacement chamber disposed downstream of the suction chamber and through which the sagger passing through the suction chamber passes, a second partition body disposed between the suction chamber and the replacement chamber for switching between a communicating state in which the suction chamber and the replacement chamber communicate and a non-communicating state in which the suction chamber and the replacement chamber do not communicate, and comprising a suction recovery system.

2. a posture adjustment chamber disposed between the heat treatment chamber and the suction chamber and through which the sagger unloaded from the unloading port passes, a posture adjustment device for adjusting the posture of the sagger in the posture adjustment chamber, The first partition body is disposed between the posture adjustment chamber and the suction chamber. The suction recovery system according to claim 1.

3. The conveying device conveys the plurality of saggers in a stacked state in the conveying direction, The suction recovery system is a stage separation chamber disposed between the posture adjustment chamber and the suction chamber and through which the plurality of saggers unloaded from the posture adjustment chamber pass, a stage separation device in the stage separation chamber for separating the plurality of stacked saggers into a state in which the plurality of saggers are not stacked. The suction recovery system according to claim 2.

4. The stage separation device is a gripping device main body for gripping the sagger, a gripping actuator for operating the gripping device main body, The gripping actuator is disposed outside the stage separation chamber. The suction recovery system according to claim 3.

5. The stage separation device is a lifting device main body for lifting the plurality of stacked saggers, a lifting actuator for operating the lifting device main body, a gripping device main body for gripping one of the plurality of stacked saggers, The lifting actuator is disposed outside the step-breaking chamber. The suction recovery system according to claim 3.

6. The first partition body is disposed between the step-breaking chamber and the suction chamber. The suction recovery system according to claim 3.

7. The suction nozzle is immovable in the left-right direction orthogonal to the conveying direction. The suction recovery system further includes a pot moving device that moves the pot in the left-right direction with respect to the suction nozzle when the suction nozzle recovers the workpiece in the pot. The suction recovery system according to any one of claims 1 to 6.

8. The suction recovery system further includes a lifting device that raises and lowers the pot in the suction chamber. The pot moving device moves the pot in the left-right direction with respect to the suction nozzle in a state where the pot is lifted by the lifting device. The suction recovery system according to claim 7.

9. The suction recovery system is disposed outside the suction chamber and further includes a first actuator that operates the first partition body. The suction recovery system according to any one of claims 1 to 6.

10. The suction recovery system is disposed outside the replacement chamber and further includes a second actuator that operates the second partition body. The suction recovery system according to any one of claims 1 to 6.

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