Substrate manufacturing system

Abstract

To provide a substrate manufacturing system that is capable of appropriately transporting a substrate container to a substrate manufacturing device even when it is difficult to check the status of the substrate manufacturing device through communication.SOLUTION: A substrate manufacturing system 100 includes a robot arm 11, a self-propelled robot 1 which includes a hand 14 attached to the tip of the robot arm 11 and which holds a substrate storage container F which contains a substrate C, and which holds and transports the substrate storage container F with the hand 14, an imaging unit 2 which is moved by the robot arm 11, and a substrate manufacturing device 3 which includes a status display unit 38 which is imaged by the imaging unit 2, and in which the substrate storage container F is transported by the self-propelled robot 1.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This disclosure relates to a substrate manufacturing system.

Background Art

[0002] Conventionally, substrate manufacturing apparatuses are known.

[0003] Patent Document 1 discloses a substrate processing system including two load lock chambers, four processing chambers, one transfer chamber, and one substrate transfer robot. An interface as a substrate manufacturing apparatus for loading and unloading substrates to and from the substrate manufacturing apparatus is provided outside the load lock chamber. A cassette containing a plurality of substrates to be loaded and unloaded to and from the substrate processing system is arranged at the interface. The cassette is transported by an automated guided vehicle.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the interface as described in Patent Document 1 above, in order for the automated guided vehicle to transport a cassette as a substrate storage container, the state of the interface may be confirmed by communication. However, due to communication abnormalities, it may be difficult to confirm the state of the interface by communication in some cases. In this case, there is an inconvenience that it is difficult to appropriately transport the substrate storage container to the interface as a substrate manufacturing apparatus. For this reason, even when it is difficult to confirm the state of the substrate manufacturing apparatus by communication, it is desired to appropriately transport the substrate storage container to the substrate manufacturing apparatus.

[0006] This disclosure is made to solve the above problems, and one object of this disclosure is to provide a substrate manufacturing system capable of appropriately transporting a substrate storage container to a substrate manufacturing apparatus even when it is difficult to check the state of the substrate manufacturing apparatus by communication.

Means for Solving the Problems

[0007] A substrate manufacturing system according to one aspect of this disclosure includes a robot arm and a hand attached to the tip of the robot arm for holding a substrate storage container for storing substrates, a self-propelled robot that holds and transports the substrate storage container by the hand, an imaging unit moved by the robot arm, and a substrate manufacturing apparatus state display unit imaged by the imaging unit, and is provided with a substrate manufacturing apparatus in which the substrate storage container is transported by the self-propelled robot.

[0008] A substrate manufacturing system according to one aspect of this disclosure is provided with an imaging unit disposed on the robot arm and a substrate manufacturing apparatus state display unit imaged by the imaging unit, as described above, and a substrate manufacturing apparatus in which the substrate storage container is transported by the self-propelled robot. Thereby, the self-propelled robot can check the state of the substrate manufacturing apparatus based on the image of the substrate manufacturing apparatus state display unit imaged by the imaging unit. As a result, even when it is difficult to check the state of the substrate manufacturing apparatus by communication, the state of the substrate manufacturing apparatus can be checked, so that the substrate storage container can be appropriately transported to the substrate manufacturing apparatus.

Effects of the Invention

[0009] According to the present disclosure, even when it is difficult to check the state of the substrate manufacturing apparatus by communication, the substrate storage container can be appropriately transported to the substrate manufacturing apparatus.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Mode for Carrying Out the Invention

[0011] Hereinafter, an embodiment of the present disclosure embodying the present disclosure will be described with reference to the drawings.

[0012] With reference to FIGS. 1 to 7, a substrate manufacturing system 100 according to an embodiment will be described.

[0013] (Overall Configuration of Substrate Manufacturing System) As shown in FIG. 1, the substrate manufacturing system 100 includes a self-propelled robot 1 and an imaging unit 2. Further, the substrate manufacturing system 100 includes a substrate manufacturing apparatus 3 for manufacturing a substrate C.

[0014] In the drawings, the front-rear direction with respect to the substrate manufacturing apparatus 3 is indicated by the X direction, the front is indicated by the X1 direction, and the rear is indicated by the X2 direction. Further, the left-right direction with respect to the substrate manufacturing apparatus 3 is indicated by the Y direction, the left is indicated by the Y1 direction, and the right is indicated by the Y2 direction. Further, the up-down direction is indicated by the Z direction, the upper side is indicated by the Z1 direction, and the lower side is indicated by the Z2 direction.

[0015] The substrate manufacturing apparatus 3 and the self-propelled robot 1 are both arranged in the clean room CR. Each operation of the substrate manufacturing apparatus 3 and the self-propelled robot 1 can be performed by a worker in a monitoring room MR outside the clean room CR or the like through remote operation, or directly by a worker who enters the clean room CR wearing a dust-proof suit.

[0016] The self-propelled robot 1 includes a robot arm 11 and transports a substrate storage container F that houses a plurality of substrates C. The substrate storage container F is, for example, a so-called FOUP (Front-Opening Unified Pod), which is a dedicated container for transporting and storing wafers as substrates C.

[0017] The imaging unit 2 is arranged on the robot arm 11. The imaging unit 2 images the substrate storage container F when the self-propelled robot 1 transports the substrate storage container F.

[0018] The substrate manufacturing apparatus 3 is transported by the self-propelled robot 1 with the substrate storage container F. The substrate manufacturing apparatus 3 is a substrate transfer device that transfers the substrate C without performing processing on the substrate C. The substrate manufacturing apparatus 3 is, for example, a so-called EFEM (Equipment Front End Module). The substrate manufacturing apparatus 3 includes a substrate transfer chamber 33 and a substrate transfer robot 34 arranged inside the substrate transfer chamber 33. The substrate transfer robot 34 transfers the substrate C between the substrate storage container F and the substrate processing apparatus 8 through the substrate transfer chamber 33. The substrate transfer robot 34 is a device that delivers the substrate C between the substrate storage container F and the substrate processing apparatus 8. Note that the substrate processing apparatus 8 is arranged adjacent to the back side (X2 direction side) of the substrate manufacturing apparatus 3.

[0019] Also, as shown in FIGS. 2 and 4, the substrate manufacturing system 100 includes a terminal 5 having a display unit 5a and a remote operation unit 6 that receives an operation instruction for driving the self-propelled robot 1.

[0020] The terminal 5 and the remote operation unit 6 are generally arranged outside the clean room CR. The terminal 5 is arranged, for example, in the monitoring room MR for monitoring the situation of the clean room CR. The terminal 5 is a desktop personal computer having a display as the display unit 5a. Note that the terminal may be a notebook computer, an information terminal having a touch panel, a tablet terminal, a smartphone, or the like. The moving image captured by the imaging unit 2 and the like are displayed on the display unit 5a. The terminal 5 has a communication unit for communicating with the communication unit 15 of the self-propelled robot 1 described later and the communication unit 36 of the substrate manufacturing apparatus 3 described later.

[0021] The remote operation unit 6 includes, for example, a stick operation unit 6a such as a joystick. The remote operation unit 6 is connected to the terminal 5 and transmits an operation instruction to the self-propelled robot 1 via the terminal 5. Note that the remote operation unit may transmit an operation instruction directly to the self-propelled robot without passing through the terminal.

[0022] In addition, the substrate manufacturing system 100 includes an operation touch panel 7 that receives an input operation regarding the substrate manufacturing apparatus 3. The operation touch panel 7 is arranged in the vicinity of the substrate manufacturing apparatus 3. The operation touch panel 7 is installed, for example, on a stand 70 beside the substrate manufacturing apparatus 3 and is arranged in the vicinity of the second side wall 31b described later.

[0023] (Detailed Configuration of Self-Propelled Robot) As shown in FIGS. 1 to 3, the self-propelled robot 1 includes a box-shaped housing 10, a robot arm 11 installed on the upper part of the housing 10, a moving part 12 installed on the lower part of the housing 10, a bracket 2a, a hand attachment part 13, a hand 14, a communication part 15, and a control part 16.

[0024] The housing 10 has a rectangular upper surface 10a. The upper surface 10a is used as a placement surface on which a substrate storage container F or the like is placed. The housing 10 has a slide base 110 that expands the area of the upper surface 10a by pulling it out in the horizontal direction. The robot arm 11 of the self-propelled robot 1 is a vertically articulated arm. The robot arm 11 can freely change the positions of the imaging unit 2 and the hand 14 by driving. The moving unit 12 has a plurality of wheels 12a that rotate while supporting the housing 10 from below, and a servo motor that drives the plurality of wheels 12a. In principle, the moving unit 12 moves the self-propelled robot 1 linearly along the longitudinal direction of the housing 10. Also, when changing the moving direction, the moving unit 12 turns while holding its position. The moving unit 12 is a so-called AGV (Automatic Guided Vehicle), which is a traveling device that travels along a predetermined route while detecting obstacles so as not to collide with surrounding obstacles.

[0025] The bracket 2a is attached to the tip of the robot arm 11. The hand attachment part 13 is attached to the bracket 2a. The hand attachment part 13 is a so-called tool changer for attachably and detachably attaching various hands 14. The hand attachment part 13 is attached to the tip of the robot arm 11 via the bracket 2a.

[0026] The hand 14 is detachably attached to the hand attachment portion 13. The hand 14 is attached to the tip of the robot arm 11 via the bracket 2a and the hand attachment portion 13. The hand 14 includes a holding hand 14a that holds a substrate storage container F for housing the substrate C. Specifically, the holding hand 14a has a pair of rod-shaped members for holding the substrate storage container F. The self-propelled robot 1 holds and transports the substrate storage container F by the holding hand 14a. The holding hand 14a holds the protruding portion F1 disposed at the upper end of the substrate storage container F by sandwiching it with the pair of rod-shaped members brought close to each other. As other types of hands 14, there are an operation hand 14b having a touch operation portion 141 for operating the touch panel (see FIG. 7), a suction hand having a suction portion for sucking the substrate C, and the like. The self-propelled robot 1 moves to a hand storage where various types of hands 14 are stored and automatically exchanges the hand 14 even when there is no operator. That is, the self-propelled robot 1 performs a so-called auto tool change.

[0027] The communication unit 15 is a wireless communication unit. The communication unit 15 transmits and receives various types of information to and from the terminal 5. Specifically, the communication unit 15 transmits the image information D1 captured by the imaging unit 2 to the terminal 5. Further, the communication unit 15 receives an operation instruction from the remote operation unit 6.

[0028] The control unit 16 is a robot controller that controls the operations of each part of the self-propelled robot 1. The control unit 16 includes, for example, an arithmetic unit such as a CPU (Central Processing Unit). The control unit 16 also includes memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), and a storage device such as a hard disk. The control unit 16 executes control processing by the arithmetic unit based on programs and parameters stored in the storage device. Specifically, the control unit 16 controls the operations of the robot arm 11, the hand 14, and the moving unit 12. Further, the control unit 16 controls the operation of the imaging unit 2. The control unit 16 acquires the image information D1 captured by the imaging unit 2 and transmits it to the terminal 5 via the communication unit 15. Note that the control unit of the self-propelled robot may be configured as an integrated robot controller that performs each control of the robot arm, the hand, the moving unit, and the imaging unit, or may be configured as separate controllers for each configuration of the robot arm, the hand, the moving unit, and the imaging unit. Also, the self-propelled robot may include an integrated robot controller that performs each control of the robot arm, the hand, and the moving unit, and the imaging unit may include a dedicated controller separate from the robot controller of the self-propelled robot.

[0029] (Detailed Configuration of Imaging Unit) As shown in FIGS. 1 to 3, the imaging unit 2 is moved by the robot arm 11. The imaging unit 2 is a camera having an image sensor that captures moving images and still images. The imaging unit 2 is attached to the bracket 2a. The imaging unit 2 is attached to the tip of the robot arm 11 via the bracket 2a. Therefore, when replacing the hand 14, the imaging unit 2 does not need to be removed, and the attachment state to the robot arm 11 is maintained.

[0030] When the imaging unit 2 images the substrate storage container F to correct the position of the holding hand 14a with respect to the substrate storage container F when the substrate storage container F is held by the holding hand 14a at the tip of the robot arm 11. Further, the imaging unit 2 images the inside of the substrate manufacturing apparatus 3 to check for abnormalities in the substrate C inside the substrate manufacturing apparatus 3. The imaging unit 2 is communicably connected to the control unit 16 wirelessly or by wire, and transmits the image information D1 to the terminal 5 via the control unit 16.

[0031] (Detailed Configuration of Substrate Manufacturing Apparatus) As shown in FIGS. 1 to 3, the substrate manufacturing apparatus 3 includes a mounting table 30 for the substrate storage container F, a box-shaped housing 31, a window portion 32, a substrate transfer chamber 33 which is the internal space of the housing 31, a substrate transfer robot 34, an abnormality detection unit 35, a communication unit 36, a control unit 37, and a status display unit 38. The status display unit 38 is an example of a manufacturing apparatus status display unit.

[0032] The mounting tables 30 are arranged in two in front of the housing 31 outside the housing 31. The two mounting tables 30 are spaced apart in the left-right direction (Y direction). The substrate storage container F is placed on the mounting table 30 by the self-propelled robot 1. Further, the substrate storage container F on the mounting table 30 is moved by the self-propelled robot 1 after being processed by the substrate manufacturing apparatus 3. The inside of the housing 31 (substrate transfer chamber 33) is filled with nitrogen and is sealed. The housing 31 has a wide shape that is longer in the left-right direction (Y direction) than in the front-rear direction (X direction). The housing 31 has a first side wall 31a and a second side wall 31b different from the first side wall 31a. The first side wall 31a is the side wall in front (X1 direction) of the housing 31 and is arranged along the mounting table 30. The second side wall 31b is the side wall on the left (Y1 direction) of the housing 31. Further, the housing 31 has an openable shutter 31c that forms a part of the first side wall 31a. The shutters 31c are arranged one by one behind the mounting table 30. Further, the housing 31 has a door 31d that forms a part of the second side wall 31b. The door 31d is opened and closed by the operator and the hand 14 of the self-propelled robot 1 or the operator.

[0033] The substrate transfer robot 34 is a horizontally articulated robot. The substrate transfer robot 34 has a hand 34a at its tip for placing the substrate C. The substrate transfer robot 34 can freely change the position of the hand 34a by driving. The abnormality detection unit 35 is a sensor that detects abnormalities in the substrate C. Specifically, the abnormality detection unit 35 detects the inclination and displacement of the substrate C placed on the hand 14 of the substrate transfer robot 34, the presence or absence of the substrate C on the hand 34a, etc. The abnormality detection unit 35 is, for example, a mapping sensor. The abnormality detection unit 35 is, for example, arranged on the substrate transfer robot 34. The abnormality detection unit may be arranged on the inner surface of the housing. When the abnormality detection unit 35 detects an abnormality in the substrate C, the substrate manufacturing apparatus 3 switches from the normal state mode in which the substrate manufacturing apparatus 3 operates to the abnormal state mode in which the operation of the substrate manufacturing apparatus 3 is stopped. If an abnormality occurs in the substrate C and the substrate manufacturing apparatus 3 continues to operate, there is a risk of damage to the substrate C, etc. Therefore, the substrate manufacturing apparatus 3 switches to the abnormal state mode and stops the operation of the substrate manufacturing apparatus 3. In short, in the abnormal state mode, the substrate manufacturing apparatus 3 cannot be operated.

[0034] The communication unit 36 is a wireless communication unit. The communication unit 36 transmits and receives various types of information to and from the terminal 5. Specifically, the communication unit 36 transmits state information indicating whether it is in the abnormal state mode or the normal state mode to the terminal 5.

[0035] The control unit 37 is a controller that controls the operations of each part of the substrate manufacturing apparatus 3. The control unit 37 includes, for example, an arithmetic unit such as a CPU (Central Processing Unit). The control unit 37 also includes memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), and a storage device such as a hard disk. The control unit 37 executes control processing by the arithmetic unit based on programs and parameters stored in the storage device. Specifically, the control unit 37 controls the operations of the substrate transfer robot 34, the hand 34a, and the shutter 31c. Note that the control unit of the substrate manufacturing apparatus may be configured as an integrated controller that performs controls on the substrate transfer robot, the hand, the shutter, and the imaging unit mounted on the substrate manufacturing apparatus, or may be configured as separate controllers for each configuration such as the substrate transfer robot, the hand, the shutter, and the imaging unit. Further, the substrate manufacturing apparatus may include an integrated controller that performs controls on the abnormality detection unit, the communication unit, the abnormality reset button, and the shutter, and the substrate transfer robot and the imaging unit may include dedicated controllers separate from the controller of the substrate manufacturing apparatus.

[0036] The status display unit 38 displays the status of the substrate manufacturing apparatus 3. The status display unit 38 is disposed in the vicinity of the mounting table 30. Specifically, the status display unit 38 is disposed above the substrate storage container F in a state where the substrate storage container F is disposed on the mounting table 30. Further, the status display unit 38 displays the status by lighting. The status display unit 38 has a light source that can be lit and extinguished. The light source is, for example, an LED (Light Emitting Diode).

[0037] As shown in FIG. 5, the state display unit 38 displays whether the substrate storage container F on the mounting table 30 is in a state where it cannot be transported or in a state where it can be transported. Further, the state display unit 38 displays whether the substrate manufacturing apparatus 3 is in an error state, in a communication abnormal state, or in a state where the substrate storage container F is disposed on the mounting table 30. The state display unit 38 includes a state display unit 38a indicating that the substrate storage container F on the mounting table 30 is in a state where it cannot be transported, and a state display unit 38b indicating that the substrate storage container F on the mounting table 30 is in a state where it can be transported. Further, the state display unit 38 includes a state display unit 38c indicating that the substrate manufacturing apparatus 3 is in an error state, a state display unit 38d indicating that the substrate manufacturing apparatus 3 is in a communication abnormal state, and a state display unit 38e indicating that the substrate storage container F is disposed on the mounting table 30. Each of the state display units 38a, 38b, 38c, 38d, and 38e is separately disposed. Further, the state display units 38a, 38b, 38c, 38d, and 38e are arranged side by side in a row. The state display units 38a and 38b are each an example of a first state display unit and a second state display unit, respectively.

[0038] The state display unit 38a lights up when the substrate storage container F on the mounting table 30 is in a state where it cannot be transported. Specifically, when the substrate storage container F is locked on the mounting table 30, the control unit 37 lights up the state display unit 38a because the substrate storage container F on the mounting table 30 is in a state of being used. The state display unit 38b lights up when the substrate storage container F on the mounting table 30 is in a state where it can be transported. Specifically, when the lock of the substrate storage container F is released on the mounting table 30, the control unit 37 lights up the state display unit 38b because the substrate storage container F on the mounting table 30 is in a state of not being used.

[0039] The status display unit 38c lights up when the substrate manufacturing apparatus 3 is in an error state. Specifically, when it is determined that the substrate manufacturing apparatus 3 is in an error state, the control unit 37 lights up the status display unit 38c. The status display unit 38d lights up when the substrate manufacturing apparatus 3 is in a communication error state. Specifically, when it is determined that the substrate manufacturing apparatus 3 is in a communication error state, the control unit 37 lights up the status display unit 38d. The status display unit 38e lights up when the substrate storage container F is placed on the mounting table 30. Specifically, based on the detection result of the occupancy sensor that detects that the substrate storage container F is placed on the mounting table 30, when it is determined that the substrate storage container F is placed on the mounting table 30, the control unit 37 lights up the status display unit 38e.

[0040] The status display unit 38 is imaged by the imaging unit 2. Specifically, the status display unit 38 is imaged by the imaging unit 2 in a state where the self-propelled robot 1 is stopped at the robot stop position P1 (see FIG. 3) in front of the mounting table 30 for holding the substrate storage container F. When the substrate manufacturing apparatus 3 cannot communicate, the control unit 16 of the self-propelled robot 1 adopts the status of the substrate manufacturing apparatus 3 obtained based on the image of the status display unit 38 imaged by the imaging unit 2. When the substrate manufacturing apparatus 3 can communicate, the control unit 16 adopts the status of the substrate manufacturing apparatus 3 obtained by communication from the substrate manufacturing apparatus 3.

[0041] When it is determined based on the image of the status display unit 38 imaged by the imaging unit 2 that the substrate storage container F on the mounting table 30 is in a non-conveyable state, the control unit 16 performs control not to collect the substrate storage container F from the mounting table 30. That is, when the status display unit 38a is lit, the control unit 16 performs control not to collect the substrate storage container F from the mounting table 30. When it is determined based on the image of the status display unit 38 imaged by the imaging unit 2 that the substrate storage container F on the mounting table 30 is in a conveyable state, the control unit 16 performs control to collect and convey the substrate storage container F from the mounting table 30. That is, when the status display unit 38b is lit, the control unit 16 performs control to collect and convey the substrate storage container F from the mounting table 30.

[0042] Note that when the control unit 16 determines, based on the image of the status display unit 38 captured by the imaging unit 2, that the substrate manufacturing apparatus 3 is in an error state or a communication abnormal state, the control unit 16 may transmit information indicating that the substrate manufacturing apparatus 3 is in an error state or a communication abnormal state to the terminal 5. Further, the control unit 16 determines, based on the image of the status display unit 38 captured by the imaging unit 2, whether or not the substrate storage container F is placed on the mounting table 30.

[0043] (Remote operation of self-propelled robot) As shown in FIGS. 6 and 7, the remote operation unit 6 remotely operates the self-propelled robot 1 to cause the self-propelled robot 1 to perform work on the substrate manufacturing apparatus 3 for manufacturing the substrate C. Specifically, the self-propelled robot 1 performs at least one of the operations of imaging the inside of the substrate manufacturing apparatus 3 and operating the operation touch panel 7 of the substrate manufacturing apparatus 3 by being remotely operated by the remote operation unit 6.

[0044] As shown in FIG. 6, when an abnormality is detected in the substrate manufacturing apparatus 3, the self-propelled robot 1 performs an operation of imaging the inside of the substrate manufacturing apparatus 3 by the imaging unit 2 by being remotely operated by the remote operation unit 6. Specifically, when the self-propelled robot 1 is remotely operated by the remote operation unit 6, the self-propelled robot 1 moves to a predetermined position P2 (see FIG. 3) near the substrate manufacturing apparatus 3. The remote operation unit 6 receives an operation instruction to move the robot arm 11 when the self-propelled robot 1 moves to the predetermined position P2.

[0045] More specifically, when the substrate manufacturing apparatus 3 switches from the normal state mode to the abnormal state mode, the self-propelled robot 1 moves to a predetermined position P2 for imaging the inside of the substrate manufacturing apparatus 3 by the imaging unit 2 by the moving unit 12. The predetermined position P2 is a position where the self-propelled robot 1 faces the second side wall 31b having the window portion 32 of the substrate manufacturing apparatus 3 in a plan view. The self-propelled robot 1 includes a position detection unit for detecting that it has reached the predetermined position P2. The position detection unit is a proximity sensor or a magnetic sensor, etc. For example, the self-propelled robot 1 detects that it has reached the predetermined position P2 by detecting that it has approached the substrate manufacturing apparatus 3 by the proximity sensor. Also, for example, the self-propelled robot 1 detects that it has reached the predetermined position P2 by detecting a magnetic tape for movement of the self-propelled robot 1 by the magnetic sensor. When the self-propelled robot 1 has moved to the predetermined position P2, it stops the movement by the moving unit 12 and assumes a posture of the robot arm 11 such that the imaging unit 2 looks into the inside of the substrate manufacturing apparatus 3 from the window portion 32 of the substrate manufacturing apparatus 3. Then, the self-propelled robot 1 switches to a remote operation mode for receiving remote operation by the remote operation unit 6. Also, the self-propelled robot 1 transmits the image information D1 captured by the imaging unit 2 to the terminal 5 via the communication unit 15. That is, the self-propelled robot 1 transmits the image information D1, which is a moving image showing the inside of the substrate manufacturing apparatus 3 captured by the imaging unit 2, to the terminal 5 in real time. Thereby, the operator in the monitoring room MR can visually recognize in real time the moving image showing the inside of the substrate manufacturing apparatus 3 displayed on the display unit 5a of the terminal 5.

[0046] The operator in the monitoring room MR operates the remote control unit 6 while visually recognizing the moving image displayed on the display unit 5a of the terminal 5. In the remote control mode, when the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15, the robot arm 11 is moved so that the imaging unit 2 is moved according to the received operation instruction. For example, the imaging unit 2 is moved in the front-rear direction, left-right direction, and up-down direction with respect to the self-propelled robot 1 according to the operation direction of the stick operation unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so that the imaging unit 2 is moved without changing the posture of the imaging unit 2. In this way, the self-propelled robot 1 performs the operation of imaging the inside of the substrate manufacturing apparatus 3 by being remotely controlled by the remote control unit 6.

[0047] As shown in FIG. 7, the self-propelled robot 1 performs the operation of operating the operation touch panel 7 by the operation hand 14b by being remotely controlled by the remote control unit 6. Specifically, when the self-propelled robot 1 is remotely controlled by the remote control unit 6, it moves to a predetermined position P3 (see FIG. 3) near the substrate manufacturing apparatus 3. When the self-propelled robot 1 moves to the predetermined position P3, the remote control unit 6 receives an operation instruction to move the robot arm 11.

[0048] More specifically, when the self-propelled robot 1 performs a setting operation when starting the operation of the substrate manufacturing apparatus 3, an abnormality reset operation when returning from the abnormal state mode of the substrate manufacturing apparatus 3, etc., the moving unit 12 moves it to a predetermined position P3 for operating the operation touch panel 7 by the operation hand 14b. The predetermined position P3 is a position where the self-propelled robot 1 faces the operation touch panel 7 in a plan view. The self-propelled robot 1 includes a position detection unit for detecting that it has reached the predetermined position P3. The position detection unit is a proximity sensor, a magnetic sensor, or the like. For example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting that it has approached the operation touch panel 7 with a proximity sensor. Also, for example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting a magnetic tape for movement of the self-propelled robot 1 with a magnetic sensor. When the self-propelled robot 1 has moved to the predetermined position P3, the movement by the moving unit 12 is stopped, and the imaging unit 2 assumes a posture of the robot arm 11 that can image the screen of the operation touch panel 7 and the operation hand 14b can operate the operation touch panel 7. Then, the self-propelled robot 1 switches to a remote operation mode for receiving remote operation by the remote operation unit 6. Also, the self-propelled robot 1 transmits the image information D1 imaged by the imaging unit 2 to the terminal 5 via the communication unit 15. That is, the self-propelled robot 1 transmits the image information D1, which is a moving image showing the screen of the operation touch panel 7 imaged by the imaging unit 2, to the terminal 5 in real time. As a result, the operator in the monitoring room MR can visually recognize in real time the moving image showing the screen of the operation touch panel 7 displayed on the display unit 5a of the terminal 5.

[0049] An operator in the MR monitoring room operates the remote control unit 6 while visually recognizing the moving image displayed on the display unit 5a of the terminal 5. In the remote control mode, when the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15, the robot arm 11 is moved so that the imaging unit 2 and the operation hand 14b are moved according to the received operation instruction. For example, the imaging unit 2 and the operation hand 14b are moved in the front-rear direction, left-right direction, and up-down direction with respect to the self-propelled robot 1 according to the operation direction of the stick operation unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so that the imaging unit 2 and the operation hand 14b are moved without changing the postures of the imaging unit 2 and the operation hand 14b. Then, the operation hand 14b operates a desired button displayed on the operation touch panel 7. The desired button is, for example, a button for a setting operation when starting the operation of the substrate manufacturing apparatus 3 and a button for an abnormality reset operation when returning from the abnormal state mode of the substrate manufacturing apparatus 3. In this way, the self-propelled robot 1 performs the work of operating the operation touch panel 7 by being remotely controlled by the remote control unit 6.

[0050] [Effects of the present embodiment] In the present embodiment, as described above, the substrate manufacturing apparatus 3 including the imaging unit 2 disposed on the robot arm 11 and the state display unit 38 imaged by the imaging unit 2 is provided, and the substrate storage container F is transported by the self-propelled robot 1. Thereby, the self-propelled robot 1 can confirm the state of the substrate manufacturing apparatus 3 based on the image of the state display unit 38 imaged by the imaging unit 2. As a result, even when it is difficult to confirm the state of the substrate manufacturing apparatus 3 by communication, the state of the substrate manufacturing apparatus 3 can be confirmed, so that the substrate storage container F can be appropriately transported to the substrate manufacturing apparatus 3.

[0051] In the present embodiment, as described above, when the self-propelled robot 1 cannot communicate with the substrate manufacturing apparatus 3, the state of the substrate manufacturing apparatus 3 acquired based on the image of the state display unit 38 captured by the imaging unit 2 is adopted. Thereby, even when it is difficult to confirm the state of the substrate manufacturing apparatus 3 by communication, the conveyance of the substrate storage container F to the substrate manufacturing apparatus 3 can be easily and appropriately performed.

[0052] In the present embodiment, as described above, the substrate manufacturing apparatus 3 includes a mounting table 30 on which the substrate storage container F is placed, and the state display unit 38 indicates whether the substrate storage container F on the mounting table 30 is in a state where it cannot be conveyed or in a state where the substrate storage container F on the mounting table 30 can be conveyed. Thereby, the self-propelled robot 1 can confirm whether the substrate storage container F on the mounting table 30 is in a state where it can be conveyed or in a state where it cannot be conveyed. As a result, the conveyance of the substrate storage container F to the substrate manufacturing apparatus 3 can be easily and appropriately performed.

[0053] In the present embodiment, as described above, when it is determined based on the image of the state display unit 38 captured by the imaging unit 2 that the substrate storage container F on the mounting table 30 is in a state where it cannot be conveyed, the self-propelled robot 1 does not recover the substrate storage container F from the mounting table 30, and when it is determined based on the image of the state display unit 38 captured by the imaging unit 2 that the substrate storage container F on the mounting table 30 is in a state where it can be conveyed, the self-propelled robot 1 includes a control unit 16 that performs control to recover and convey the substrate storage container F from the mounting table 30. Thereby, based on the image of the state display unit 38 captured by the imaging unit 2, the conveyance of the substrate storage container F to the substrate manufacturing apparatus 3 can be easily and appropriately performed.

[0054] In the present embodiment, as described above, the status display unit 38 includes a status display unit 38a that indicates that the substrate storage container F on the mounting table 30 is in a non-conveyable state, and a status display unit 38b that is separately arranged from the status display unit 38a and indicates that the substrate storage container F on the mounting table 30 is in a conveyable state. As a result, since the status display unit 38a and the status display unit 38b are provided separately, the self-propelled robot 1 can more easily confirm whether the substrate storage container F on the mounting table 30 is in a conveyable state or in a non-conveyable state compared to the case where only a single status display unit is provided.

[0055] In the present embodiment, as described above, the status display unit 38 is arranged in the vicinity of the mounting table 30. Thereby, the imaging unit 2 of the self-propelled robot 1 approaching the mounting table 30 for transporting the substrate storage container F can easily image the status display unit 38.

[0056] In the present embodiment, as described above, the status display unit 38 is arranged above the substrate storage container F in a state where the substrate storage container F is arranged on the mounting table 30. Thereby, in a state where the self-propelled robot 1 is stopped at the robot stop position for holding the substrate storage container F, the imaging unit 2 can image the status display unit 38. As a result, when the substrate storage container F is conveyable, the conveyance of the substrate storage container F can be started promptly.

[0057] In the present embodiment, as described above, the status display unit 38 displays the status by lighting. Thereby, since the status can be displayed only by lighting, the status display unit 38 can be simply configured.

[0058] In this embodiment, as described above, the status display unit 38 indicates whether the substrate manufacturing apparatus 3 is in an error state, whether the substrate manufacturing apparatus 3 is in a communication error state, and whether a substrate storage container F is placed on the mounting table 30 provided in the substrate manufacturing apparatus 3. As a result, the self-propelled robot 1 can check whether the substrate manufacturing apparatus 3 is in an error state and whether the substrate manufacturing apparatus 3 is in a communication error state. As a result, the self-propelled robot 1 can quickly take measures such as notifying an operator. Further, the self-propelled robot 1 can check whether a substrate storage container F is placed on the mounting table 30. As a result, after confirming that the substrate storage container F is placed on the mounting table 30, the self-propelled robot 1 can surely carry the substrate storage container F on the mounting table 30.

[0059] In this embodiment, as described above, when the imaging unit 2 holds the substrate storage container F by the holding hand 14a, the imaging unit 2 also serves as an imaging unit that images the substrate storage container F. As a result, when performing work on the substrate manufacturing apparatus 3, imaging can be performed using the imaging unit 2 that images the substrate storage container F, so that it is not necessary to provide a dedicated imaging unit 2. As a result, it is possible to suppress the complication of the configuration of the self-propelled robot 1.

[0060] [Modification Example] It should be considered that the embodiment disclosed this time is illustrative in all respects and not restrictive. The scope of the present disclosure is indicated by the scope of claims rather than the description of the above-described embodiment, and further includes all changes (modification examples) within the meaning and scope equivalent to the scope of claims.

[0061] For example, in the above-described embodiment, an example in which the substrate manufacturing apparatus is a substrate transfer apparatus that transfers a substrate between a substrate storage container and a substrate processing apparatus has been shown, but the present disclosure is not limited thereto. In the present disclosure, the substrate manufacturing apparatus may be a substrate transfer apparatus as a so-called sorter that transfers a substrate between substrate storage containers, or a substrate transfer apparatus as a so-called stocker that transfers a substrate between a substrate storage container and a substrate storage unit. Further, the substrate manufacturing apparatus may be a substrate processing apparatus that performs processing on a substrate. Further, the substrate manufacturing apparatus may be equipped with an aligner that positions the substrate within the apparatus and detects eccentricity of the substrate.

[0062] In the above-described embodiment, an example in which the status display unit displays whether the substrate storage container on the mounting table is in a non-transferable state, whether the substrate storage container on the mounting table is in a transferable state, whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication error state, and whether a substrate storage container is placed on the mounting table has been shown, but the present disclosure is not limited thereto. In the present disclosure, the status display unit may display at least one of whether the substrate storage container on the mounting table is in a non-transferable state, whether the substrate storage container on the mounting table is in a transferable state, whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication error state, and whether a substrate storage container is placed on the mounting table. Further, the status display unit may display other states than these.

[0063] In the above-described embodiment, an example in which the status display unit includes a first status display unit indicating that the substrate storage container on the mounting table is in a non-transferable state and a second status display unit, which is arranged separately from the first status display unit and indicates that the substrate storage container on the mounting table is in a transferable state, has been shown, but the present disclosure is not limited thereto. In the present disclosure, a single status display unit indicating that the substrate storage container on the mounting table is in a transferable state and that the substrate storage container on the mounting table is in a non-transferable state may be provided. For example, the single status display unit may indicate that the substrate storage container on the mounting table is in a non-transferable state by one of lighting or extinguishing, and indicate that the substrate storage container on the mounting table is in a transferable state by the other of lighting or extinguishing.

[0064] In the above embodiment, an example in which the state display unit is arranged near the mounting table has been shown, but the present disclosure is not limited to this. In the present disclosure, the state display unit may be arranged other than near the mounting table.

[0065] In the above embodiment, an example in which the number of mounting tables is two has been shown, but the present disclosure is not limited to this. In the present disclosure, the number of mounting tables may be any number.

[0066] In the above embodiment, an example in which the imaging unit is attached to the robot arm of the self-propelled robot via a bracket has been shown, but the present disclosure is not limited to this. In the present disclosure, the imaging unit may be gripped by the hand of the robot arm of the self-propelled robot. The imaging unit may be configured to be moved by the robot arm.

[0067] The functions of the elements disclosed in this specification can be executed using a circuit or processing circuit including a general-purpose processor, a dedicated processor, an integrated circuit, an ASIC (Application Specific Integrated Circuits), a conventional circuit, and / or a combination thereof configured or programmed to execute the disclosed functions. Since a processor includes transistors and other circuits, it is regarded as a processing circuit or a circuit. In the present disclosure, a circuit, a unit, or a means is hardware that executes the listed functions or hardware programmed to execute the listed functions. The hardware may be the hardware disclosed in this specification or other known hardware programmed or configured to execute the listed functions. When the hardware is a processor considered to be a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used in the configuration of the hardware and / or the processor.

[0068] [Aspect] The above-described embodiments are specific examples of the following aspects.

[0069] (Aspect 1) A self-propelled robot including a robotic arm and a hand attached to the tip of the robotic arm for holding a substrate storage container for storing a substrate, and holding and transporting the substrate storage container by the hand, an imaging unit moved by the robotic arm, and a substrate manufacturing apparatus including a substrate manufacturing apparatus state display unit imaged by the imaging unit, and transporting the substrate storage container by the self-propelled robot.

[0070] (Aspect 2) The substrate manufacturing system according to Aspect 1, wherein the self-propelled robot adopts the state of the substrate manufacturing apparatus obtained based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit when the substrate manufacturing apparatus cannot communicate.

[0071] (Aspect 3) The substrate manufacturing apparatus includes a mounting table on which the substrate storage container is placed, The substrate manufacturing system according to Aspect 1, wherein the substrate manufacturing apparatus state display unit displays whether the substrate storage container on the mounting table is in a state where it cannot be transported or in a state where it can be transported.

[0072] (Aspect 4) The substrate manufacturing system according to Aspect 3, wherein the self-propelled robot does not collect the substrate storage container from the mounting table when it is determined based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit that the substrate storage container on the mounting table is in a state where it cannot be transported, and when it is determined based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit that the substrate storage container on the mounting table is in a state where it can be transported, the self-propelled robot includes a control unit that performs control to collect and transport the substrate storage container from the mounting table.

[0073] (Aspect 5) The substrate manufacturing apparatus state display unit includes a first state display unit indicating that the substrate storage container on the mounting table is in a state where it cannot be transported, and a second state display unit that is separately arranged from the first state display unit and indicates that the substrate storage container on the mounting table is in a state where it can be transported. The substrate manufacturing system according to aspect 3 or 4.

[0074] (Aspect 6) The substrate manufacturing apparatus state display unit is arranged near the mounting table. The substrate manufacturing system according to any one of aspects 3 to 5.

[0075] (Aspect 7) The substrate manufacturing apparatus state display unit is arranged above the substrate storage container in a state where the substrate storage container is arranged on the mounting table. The substrate manufacturing system according to aspect 6.

[0076] (Aspect 8) The substrate manufacturing apparatus state display unit displays the state by lighting. The substrate manufacturing system according to any one of aspects 1 to 7.

[0077] (Aspect 9) The substrate manufacturing apparatus state display unit displays at least one of whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication abnormal state, and whether the substrate storage container is arranged on the mounting table provided in the substrate manufacturing apparatus. The substrate manufacturing system according to any one of aspects 1 to 8.

[0078] (Aspect 10) The imaging unit also serves as an imaging unit that images the substrate storage container when the substrate storage container is held by the holding hand. The substrate manufacturing system according to any one of aspects 1 to 9.

Explanation of Reference Numerals

[0079] 1 Self-propelled robot 2 Imaging unit 3 Substrate manufacturing apparatus 11 Robot arm 14 Hand 14a Holding hand 16 Control unit 38 Status display unit (substrate manufacturing apparatus status display unit) 38a Status display unit (first status display unit) 38b Status display unit (second status display unit) 100 Substrate manufacturing system C Substrate F Substrate storage container

Claims

1. A self-propelled robot including a robot arm and a hand attached to the tip of the robot arm for holding a substrate storage container for storing a substrate, and transporting the substrate storage container held by the hand, an imaging unit moved by the robot arm, and a substrate manufacturing apparatus including a substrate manufacturing apparatus state display unit imaged by the imaging unit, wherein the substrate storage container is transported by the self-propelled robot. A substrate manufacturing system comprising:

2. The substrate manufacturing system according to claim 1, wherein the self-propelled robot adopts the state of the substrate manufacturing apparatus obtained based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit when the substrate manufacturing apparatus cannot communicate.

3. The substrate manufacturing apparatus includes a mounting table on which the substrate storage container is placed, The substrate manufacturing apparatus state display unit displays whether the substrate storage container on the mounting table is in a state where it cannot be transported or in a state where it can be transported. The substrate manufacturing system according to claim 1.

4. When the self-propelled robot determines that the substrate storage container on the mounting table is in a state where it cannot be transported based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit, the self-propelled robot does not collect the substrate storage container from the mounting table, and when it is determined based on an image of the substrate manufacturing apparatus state display unit imaged by the imaging unit that the substrate storage container on the mounting table is in a state where it can be transported, the substrate manufacturing system according to claim 3, further comprising a control unit that performs control to collect and transport the substrate storage container from the mounting table.

5. The substrate manufacturing apparatus state display unit according to claim 3, includes a first state display unit indicating that the substrate storage container on the mounting table is in a state where it cannot be transported, and is disposed separately from the first state display unit, and the substrate storage container on the mounting table is in a state where it can be transported. And a second state display unit indicating the above.

6. The substrate manufacturing system according to claim 3, wherein the substrate manufacturing apparatus state display unit is disposed in the vicinity of the mounting table.

7. The substrate manufacturing system according to claim 6, wherein the substrate manufacturing apparatus state display unit is disposed above the substrate storage container in a state where the substrate storage container is disposed on the mounting table.

8. The substrate manufacturing system according to claim 1, wherein the substrate manufacturing apparatus state display unit displays the state by lighting.

9. The substrate manufacturing apparatus state display unit displays at least one of whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication error state, and whether the substrate accommodation container is placed on the mounting table provided in the substrate manufacturing apparatus. The substrate manufacturing system according to claim 1.

10. The imaging unit also serves as an imaging unit that images the substrate accommodation container when the hand holds the substrate accommodation container. The substrate manufacturing system according to claim 1.

Images