Manufacturing method of defect sample for surface inspection, mold, and manufacturing method of temporary form

Abstract

To provide a manufacturing method of a surface defect sample having small surface roughness, a mold, and a manufacturing method of a temporary form.SOLUTION: In a manufacturing method of a defect sample for surface inspection 2, 4 provided with at least one false defect part 21, 41 having a convex shape and / or a concave shape on its surface, a mold 1 is used in which a transfer surface 10 having a concave part 12 or a convex part 11 for forming the false defect part 21, 41 is formed by turning, and the profile of the transfer surface 10 of the mold 1 is transferred to a raw material for the defect sample for surface inspection 2, 4.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a defect sample for surface inspection, a mold, and a method for manufacturing a dummy mold, which are used when inspecting convex defects and / or concave defects occurring on the painted surface of products such as automobiles.

Background Art

[0002] In order to improve the reliability of products and enhance their design, painting the surface of products is often carried out. At this time, foreign substances such as dust floating in the air land on the surface to be painted and are painted thereon, resulting in convex painting defects called bumps on the painted surface, which may reduce the design quality of the product. In addition, when oil adheres to the painted surface and is painted there, the paint does not adhere, resulting in concave defects.

[0003] The surface inspection of such convex and concave defects on the painted surface has been carried out visually, but recently, in particular, an automatic inspection technique using an inspection device has been proposed.

[0004] In such painting defects, surface defect samples with sizes changed near the acceptable limit are required for alignment between component manufacturers and manufacturing manufacturers.

[0005] In addition, in the defect inspection device, due to the need to tune the detection threshold with a defect sample at the acceptable limit, a defect sample whose defect size can be adjusted is required.

[0006] As such a defect sample for surface inspection, Patent Document 1 discloses a defect sample in which a coating film layer is formed by covering one or a plurality of pseudo-defect portions having convex and / or concave shapes formed on the surface of a substrate and the peripheral portions thereof.

[0007] Patent Document 1 describes that the defect sample is manufactured by machining with a milling machine or by plastic molding using a mold having pseudo-concave and convex portions.

[0008] Recently, in order to be easy to use during the verification of devices at the actual site, defective samples for surface inspection having flexibility and transparency have also been proposed.

Prior Art Documents

Patent Documents

[0009]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0010] In the above-described defective samples for surface inspection having flexibility and transparency, as described in Patent Document 1, coating cannot be applied to the samples. This is because transparency and the like are impaired by the coating.

[0011] The surface roughness of actual automobile painting is Ra = 5 to 10 nm. In this case of surface roughness, the external scenery is reflected like a mirror. This serves as one factor in creating the luxurious feeling of automobiles. From this, one of the specifications required for defective samples for surface inspection is to achieve specular reflection that a person feels to be equivalent to the painting of an actual product.

[0012] When manufacturing a defective sample for surface inspection by plastic molding using a mold, in order to achieve specular reflection of the defective sample, the mold is also required to have specular reflection. Here, regarding the required surface roughness, the experimental results using sample products are shown in the table of FIG. 9. This sample product is a plastic molded product using a mold manufactured by machining (cutting and polishing). Also, the table of FIG. 9 is a visual evaluation of the appearance of the sample product by six inspectors and is an evaluation regarding specularity. In the table, the ○ mark indicates an evaluation equivalent to an actual painting defect. The △ mark indicates an evaluation having a slightly uncomfortable feeling with respect to an actual painting defect. The × mark indicates an evaluation different from an actual painting defect.

[0013] As can be understood from the table in Fig. 9, if the surface roughness of the defective sample was Ra 30 nm or less, it was evaluated as equivalent to an actual coating defect. Therefore, it is necessary that the surface roughness of the mold is also Ra 30 nm or less.

[0014] However, in cutting using a milling cutter, the resulting surface roughness is Ra > 3.2 μm, which is more than 100 times the required surface roughness.

[0015] In order to make this a mirror surface, polishing of the mold is necessary. However, polishing is generally performed on a flat surface, and it is very difficult to polish when there is a convex shape like a surface inspection defective sample. Also, even if polishing can be carried out, it will be extremely costly.

[0016] An object of the present invention is to provide a method for manufacturing a surface defect sample having a small surface roughness without using cutting, using a mold having a small surface roughness or a dummy mold transferred from the mold.

[0017] Another object of the present invention is to provide a mold used for manufacturing the surface defect sample, the mold having a small surface roughness without using cutting.

[0018] Still another object of the present invention is to provide a method for manufacturing a dummy mold used for manufacturing the surface defect sample, the method for manufacturing the dummy mold using a mold having a small surface roughness without using cutting.

Means for Solving the Problems

[0019] The above object is achieved by the following means. (1) A method for manufacturing a surface inspection defective sample in which at least one pseudo-defect portion having a convex shape and / or a concave shape is formed on the surface, characterized by using a mold in which a transfer surface having a concave portion or a convex portion for forming the pseudo-defect portion is formed by turning, and transferring the shape of the transfer surface of the mold to the material of the surface inspection defective sample. (2) A method for manufacturing a defect sample for surface inspection, on which at least one pseudo defect portion having a convex shape and / or a concave shape is formed on the surface, using a dummy mold manufactured by repeating shape transfer one or more times in sequence, starting from the transfer surface of a mold in which a transfer surface having a concave or convex portion for forming the pseudo defect portion is formed by turning, characterized by transferring the shape of the transfer surface of the dummy mold to a material for the defect sample for surface inspection. (3) The method for manufacturing a defect sample for surface inspection according to item (1) or (2) above, wherein the surface roughness of the defect sample for surface inspection is Ra ≦ 30 nm. (4) The method for manufacturing a defect sample for surface inspection according to item (1) or (2) above, wherein the material of the processed surface of the mold to be subjected to turning contains 50 atomic% or more of Ni. (5) The method for manufacturing a defect sample for surface inspection according to item (1) or (2) above, wherein the mold is made of a material mainly composed of Al or Cu. (6) The method for manufacturing a defect sample for surface inspection according to item (1) above, wherein a plurality of the molds are used, and a plurality of defect samples are formed in an array by transferring the shape of the transfer surface of each mold to a material for the defect sample for surface inspection. (7) The method for manufacturing a defect sample for surface inspection according to item (2) above, wherein a plurality of the dummy molds are used, and a plurality of defect samples are formed in an array by transferring the shape of the transfer surface of each dummy mold to a material for the defect sample for surface inspection. (8) The method for manufacturing a defect sample for surface inspection according to item (6) or (7) above, wherein at least one of the diameter, maximum inclination, height or depth of the pseudo defect portion of the plurality of defect samples in an array changes stepwise. (9) The method for manufacturing a defect sample for surface inspection according to item (1), (2), (6) or (7) above, wherein the diameter of the pseudo defect portion is 200 to 500 μm, and the maximum inclination is 0.3 to 1.0 degrees. (10) The method for manufacturing a defect sample for surface inspection according to item (1) or (2) above, wherein the convex shape of the pseudo defect portion is a conical shape or the contour of the cross section is a Gaussian distribution curve shape, and the concave shape of the pseudo defect portion is a conical hole shape or the contour of the cross section is a reverse Gaussian distribution curve shape. (11) A mold used for manufacturing a defect sample for surface inspection, on the surface of which at least one pseudo defect part having a convex shape and / or a concave shape is formed, characterized in that a transfer surface having a concave or convex part for forming the pseudo defect part is formed by turning. (12) The mold according to item 11 above, wherein the surface roughness of the transfer surface is Ra≦30 nm. (13) The mold according to item 11 or 12 above, wherein the material of the machined surface of the mold to be turned is a material containing 50 atomic% or more of Ni. (14) The mold according to item 11 or 12 above, wherein the diameter of the concave or convex part of the transfer surface is 200 to 500 μm, and the maximum inclination is 0.3 to 1.0 degrees. (15) The mold according to item 11 or 12 above, wherein the shape of the convex part of the transfer surface is a conical shape or the contour of the cross section is a Gaussian distribution curve shape, and the shape of the concave part of the transfer surface is a conical hole shape or the contour of the cross section is an inverted Gaussian distribution curve shape. (16) A method for manufacturing a dummy mold used for manufacturing a defect sample for surface inspection, on the surface of which at least one pseudo defect part having a convex shape and / or a concave shape is formed, characterized in that a mold having a transfer surface with a concave or convex part for forming the pseudo defect part formed by turning is used, and the dummy mold is manufactured by repeating one or more shape transfers in sequence starting from the transfer surface of the mold. [Effect of the Invention]

[0020] In the method for manufacturing a defect sample for surface inspection according to the present invention, a mold or a dummy mold is used. The mold is a mold in which a transfer surface having a concave or convex part for forming a pseudo defect part is formed by turning. The dummy mold is manufactured by repeating one or more shape transfers in sequence starting from the transfer surface of the mold. Then, the shape of the transfer surface of the mold or the dummy mold is transferred to the material of the defect sample for surface inspection.

[0021] Since the transfer surface of the mold is formed by turning, the surface roughness of the transfer surface can be made extremely small. Also, the transfer surface of the master mold is in a state where the surface roughness is extremely small, similar to the mold. Therefore, the surface roughness of the surface inspection defect sample onto which the transfer surface of the mold or master mold is transferred is also extremely small. As a result, it is possible to achieve a mirror finish comparable to that of an actual product on the surface inspection defect sample, and high-precision surface inspection can be realized.

[0022] In the mold according to this invention, since the transfer surface having a concave or convex portion for forming a pseudo defect portion is formed by turning, the surface roughness of the transfer surface can be made extremely small. As a result, by using the mold or master mold, it is possible to manufacture a surface inspection defect sample with an extremely small surface roughness.

[0023] In the method for manufacturing a master mold according to this invention, it is manufactured by repeating one or a plurality of shape transfers in sequence starting from the transfer surface of a mold whose transfer surface is formed by turning. Therefore, the surface roughness of the transfer surface of the master mold can be made extremely small. As a result, it is possible to manufacture a surface inspection defect sample with an extremely small surface roughness.

Brief Description of the Drawings

[0024]

Figure 1

Figure 2

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Figure 8

Figure 9

Embodiments for Carrying Out the Invention

[0025] Hereinafter, an embodiment of the present invention will be described.

[0026] First, a mold is manufactured. For example, a circular blank material with a diameter of about 45 mm and a thickness of about 2 mm is prepared as the material of the mold. The material of the blank material is not limited. Stainless steel or the like may be used, but considering the rigidity and corrosiveness of the mold, it is desirable that the material contains 50 atomic% or more of Ni. It is not necessary for all of the mold material to be a Ni-based material. For example, a material in which an electroless Ni-P plating layer is formed on the surface of a stainless steel material (such as SUS420J2) may be used. The thickness of the electroless Ni-P plating layer may be about 200 μm.

[0027] Also, the material of the mold may be a material mainly composed of Al or Cu from the viewpoints of rigidity and corrosiveness. Also in this case, it is not necessary for the entire mold to be formed of a material mainly composed of Al or Cu, and it is sufficient if a layer mainly composed of Al or Cu is formed on the machined surface of the mold.

[0028] Turn the blank material as described above to form a transfer surface. The turning process may be performed using a precision lathe that operates with sub-μm accuracy.

[0029] On the transfer surface, at least one concave or convex portion is formed to form at least one pseudo-defect portion having a convex shape and / or a concave shape in the surface inspection defect sample. In order to match the coating defects of the actual product, the diameter of the concave or convex portion is preferably 200 to 500 μm, and the maximum inclination is preferably 0.3 to 1.0 degrees.

[0030] In addition, in order to match the coating defects of the actual product, the shape of the convex and concave portions on the transfer surface of the mold is preferably as follows. That is, the shape of the convex portion is preferably a conical shape or the cross-sectional contour is a Gaussian distribution curve shape. The shape of the concave portion is preferably a conical hole shape or the cross-sectional contour is an inverted Gaussian distribution curve shape.

[0031] By turning, the surface of the transfer surface is preferably processed to a surface roughness of Ra ≦ 30 nm. When the surface roughness is Ra ≦ 30 nm, when the shape of the transfer surface is transferred to the surface inspection defect sample, as described in the table of FIG. 9, a visual evaluation equivalent to an actual coating defect can be obtained by an observer.

[0032] FIG. 1 is an enlarged view showing the surface shape of the portion indicated by the rectangular frame in a state where a convex portion 11 is formed at the center of the transfer surface 10 of the mold 1 by grinding. The vertical axis represents the height of the convex portion 11, and the horizontal axis represents the position from the center of the convex portion 11. The diameter of the convex portion is about 0.3 mm (300 μm).

[0033] The conditions of the turning process applied to the transfer surface 10 of the mold 1 are not limited, but an example of the machine specifications, tools, and processing conditions is as follows. Environment: Constant temperature and humidity (23 ° C 50% RH) Machine tool: Lathe-type NC machine tool, feed resolution 10 nm Hydrostatic slide, oil hydrostatic spindle drive Tool: Material Single crystal diamond Tool R 0.1 mm Processing condition: 1000 rpm Under the above turning conditions, the surface shape of the transfer surface 10 of the mold 1 having the convex portion 11 is enlarged and shown in FIGS. 2A, 2B, and 2C, respectively.

[0034] FIG. 2A shows three types of molds a, b, and c in which the diameter of the convex portion 11 is 0.2 mm (200 μm) and the maximum inclination angles of the convex portion 11 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0035] FIG. 2B shows three types of molds a, b, and c in which the diameter of the convex portion 11 is 0.3 mm (300 μm) and the maximum inclination angles of the convex portion 11 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0036] FIG. 2C shows three types of molds a, b, and c in which the diameter of the convex portion is 0.5 mm (500 μm) and the maximum inclination angles of the convex portion 11 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0037] Under the above turning conditions, the surface shape of the transfer surface 10 of the mold 1 having the concave portion is enlarged and shown in FIGS. 3A, 3B, and 3C, respectively.

[0038] FIG. 3A shows three types of molds a, b, and c in which the diameter of the concave portion 12 is 0.2 mm (200 μm) and the maximum inclination angles of the concave portion 12 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0039] FIG. 3B shows three types of molds a, b, and c in which the diameter of the concave portion 12 is 0.3 mm (300 μm) and the maximum inclination angles of the concave portion 12 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0040] FIG. 3C shows three types of molds a, b, and c in which the diameter of the concave portion 12 is 0.5 mm (500 μm) and the maximum inclination angles of the concave portion 12 are 1.0 degree, 0.6 degree, and 0.3 degree, respectively.

[0041] For any of the molds 1 shown in FIGS. 2A to 2C and FIGS. 3A to 3C, the surface roughness of the transfer surface 10 achieved Ra = 10 nm.

[0042] Note that the tool of the lathe does not have to be a single crystal diamond, and WC tools, cBN tools, DLC-coated chip tools, etc. may be used. Also, an oscillatory cutting method may be used as the turning method. Further, if it is desired to improve the machining marks and diffraction phenomena (rainbow eyes) on the transfer surface after turning, polishing may be performed.

[0043] Note that one mold 1 has been exemplified for each of the convex portion 11 or the concave portion 12 of the transfer surface 10. However, two or more convex portions 11 or concave portions 12 may be formed on the transfer surface 10 respectively. Also, one or more convex portions 11 and one or more concave portions 12 may be formed on one transfer surface 10.

[0044] Next, a defect sample for surface inspection is manufactured using the mold 1 whose transfer surface 10 has been turned. The manufacturing is performed by transferring the shape of the transfer surface 10 of the mold 1 to the material of the defect sample for surface inspection.

[0045] As a method of transferring the shape of the transfer surface 10 of the mold 1 to the material of the defect sample for surface inspection, a plastic molding method by vacuum forming can be cited. Since the plastic molding method by vacuum forming is well-known, a detailed description is omitted.

[0046] Examples of the material of the defect sample for surface inspection include a flexible urethane resin. The urethane resin is preferably transparent, and may be colorless transparent or colored transparent.

[0047] When the convex portion 11 is formed on the transfer surface 10 of the mold 1, if the shape of the transfer surface 10 of the mold 1 is directly transferred to the material of the defect sample, a concave-shaped pseudo-defect portion corresponding to the convex portion 11 of the mold 1 is formed in the defect sample for surface inspection. Conversely, when the concave portion 12 is formed on the transfer surface 10 of the mold 1, if the shape of the transfer surface 10 of the mold 1 is directly transferred to the material of the defect sample, a convex-shaped pseudo-defect portion corresponding to the concave portion 12 of the mold 1 is formed in the defect sample for surface inspection.

[0048] A dummy mold may be manufactured by plastic molding with respect to the mold 1, and a dummy mold in which the convex portion 11 or the concave portion 12 of the transfer surface 10 of the mold 1 is transferred may be manufactured. The concave portion 12 of the transfer surface 10 of the mold 1 becomes the convex portion of the transfer surface of the dummy mold. The convex portion 11 of the transfer surface 10 of the mold 1 becomes the concave portion of the transfer surface of the dummy mold. As the material of the dummy mold, silicon or the like may be used.

[0049] By plastic molding the material of the defect sample for surface inspection using this dummy mold, a defect sample for surface inspection having the same concave or convex portion as the concave portion 12 or the convex portion 11 of the mold 1 is manufactured.

[0050] Note that the dummy mold may be a primary dummy mold in which the shape of the transfer surface 10 of the mold 1 is transferred by plastic molding. Alternatively, it may be a secondary dummy mold in which the shape of the transfer surface of the primary dummy mold is further transferred by plastic molding, or a tertiary dummy mold in which the shape of the transfer surface of the secondary dummy mold is transferred. In short, the dummy mold may be manufactured by repeating the shape transfer one or more times in order starting from the transfer surface 10 of the mold 1.

[0051] FIG. 4A is a plan view of the defect sample 2 for surface inspection on which the shape of the transfer surface 10 of the mold 1 or the dummy mold is transferred. FIGS. 4B and 4C are schematic cross-sectional views when the defect sample 2 for surface inspection is cut along the line IV-IV shown in FIG. 4A. FIG. 4B shows the case where the pseudo defect portion 21 has a convex shape 21a, and FIG. 4C shows the case where the pseudo defect portion 21 has a concave shape 21b.

[0052] At least one pseudo defect portion 21 having a convex shape 21a or a concave shape 21b may exist on the surface of the defect sample 2 for surface inspection. The pseudo defect portions 21 having a convex shape 21a and a concave shape 21b may be formed simultaneously on one defect sample 2 for surface inspection. Alternatively, a plurality of pseudo defect portions 21 having a convex shape 21a and a concave shape 21b may be formed.

[0053] In order for an observer to obtain a visual evaluation equivalent to an actual painting defect, it is desirable that the surface roughness of the surface inspection defect sample 2 be Ra ≤ 30 nm. If the surface roughness of the transfer surface 10 of the mold 1 is Ra ≤ 30 nm, the surface roughness of the surface inspection defect sample 2 will be Ra ≤ 30 nm.

[0054] In order to match the actual painting defects of the product, etc., the diameter of the pseudo-defect portion 21 of the convex shape 21a or the concave shape 21b is preferably 200 to 500 μm, and the maximum inclination is preferably 0.3 to 1.0 degrees. Also, in order to match the actual painting defects of the product, etc., the shape of the pseudo-defect portion 21 of the convex shape 21a is preferably a conical shape or the cross-sectional contour is a Gaussian distribution curve shape, similar to the shape of the convex portion 11 of the transfer surface 10 of the mold 1. The shape of the pseudo-defect portion 21 of the concave shape 21b is also preferably a conical hole shape or the cross-sectional contour is an inverted Gaussian distribution curve shape, similar to the shape of the concave portion 12 of the transfer surface 10 of the mold 1.

[0055] In this embodiment, the diameter of the pseudo-defect portion 21 is represented by the diameter of the protruding region or the recessed region based on the absolute value of the inclination of the contour of the pseudo-defect portion 21 being 0.5 degrees.

[0056] The surface inspection defect sample 2 may be a single defect sample 2 manufactured based on one mold 1 or a dummy mold. Alternatively, it may be a surface inspection defect sample in which a plurality of defect samples are formed in an array by plastic molding using a plurality of molds 1 or dummy molds simultaneously. In the following description, the surface inspection defect sample in which a plurality of defect samples are formed in an array is also referred to as an array sample.

[0057] An example of the manufacturing method of this array sample will be described. First, a metal porous plate 3 with a thickness of about 0.1 mm as shown in FIG. 5 is prepared. A plurality of circular holes 31 with a diameter of about 45 mm, for example, are opened in the porous plate 3 vertically and horizontally. In this example, three circular holes 31 are provided vertically and horizontally, for a total of nine circular holes 31.

[0058] Next, circular molds 1 are respectively fitted into each circular hole 31. On the transfer surface 10 of each mold 1, a convex portion 11 and / or a concave portion 12 are formed. Among the vertical and horizontal molds 1 fitted into the porous plate 3, for the horizontal molds 1, at least any one of the diameter, maximum inclination, height or depth of the convex portion 11 or the concave portion 12 changes stepwise from one end side to the other end side. In this example, a convex portion 11 is formed on the transfer surface 10 of each mold 1, the diameters of the convex portions 11 are the same in the horizontal row, and the maximum inclination and height change stepwise from one end side to the other end side in the horizontal direction.

[0059] Also, for the vertical molds 1, at least any one of the diameter, maximum inclination, height or depth of the convex portion 11 or the concave portion 12 changes stepwise from one end side to the other end side. In this example, the heights of the convex portions 11 formed on the transfer surface 10 of each mold 1 are the same in the vertical column, and the diameter and maximum inclination change stepwise from one end side to the other end side in the vertical direction.

[0060] Next, using the porous plate 3 into which the mold 1 is fitted, plastic molding by vacuum forming is performed, and the shape of the transfer surface 10 of each mold 1 is transferred to the material of the surface inspection defect sample 2. Thereby, an array sample is manufactured.

[0061] Alternatively, using the porous plate 3 into which the mold 1 is fitted, plastic molding by vacuum forming is performed, and a dummy mold plate having a plurality of dummy molds onto which the shape of the transfer surface 10 of each mold 1 is transferred is manufactured. Then, plastic molding by vacuum forming may be performed using this dummy mold plate. Then, an array sample onto which the shape of the transfer surface of each dummy mold is transferred is manufactured.

[0062] FIG. 6 is a plan view of the manufactured array sample 4. In this embodiment, a dummy mold plate onto which the shape of the transfer surface 10 of each mold 1 is transferred is used. The circular portion shown by the broken line in FIG. 6 is a transfer region 40 onto which the transfer surface of the dummy shape is transferred. Therefore, the array sample 4 shown in FIG. 6 becomes an array sample 4 in which convex-shaped pseudo defect portions 41 corresponding to the convex portions 11 of the mold 1 are formed on the surfaces of the respective transfer regions 40.

[0063] Figure 7A is a schematic cross-sectional view when the array sample 4 shown in FIG. 6 is cut along the line VIIA-VIIA of FIG. 6. As shown in FIG. 7A, although the diameters of the convex-shaped pseudo-defect portions 41 are all the same, from the left pseudo-defect portion 41a to the pseudo-defect portions 41b and 41c and towards the right, the height of the pseudo-defect portion 41 gradually increases, and the maximum inclination gradually increases.

[0064] Figure 7B is a schematic cross-sectional view when the array sample 4 shown in FIG. 6 is cut along the line VIIB-VIIB of FIG. 6. As shown in FIG. 7B, although the maximum heights of the convex-shaped pseudo-defect portions 41 are all the same, from the upper pseudo-defect portion 41a to the pseudo-defect portions 41d and 41e and towards the lower side, the diameter of the pseudo-defect portion 41 gradually increases, and the maximum inclination gradually decreases.

[0065] Note that although the array sample 4 having the convex-shaped pseudo-defect portion 41 is exemplified, the same applies to the case of the array sample 4 having a concave-shaped pseudo-defect portion. That is, for the pseudo-defect portions in the horizontal and / or vertical directions, at least any one of the diameter, maximum inclination, and depth may change stepwise.

[0066] By using such an array sample 4, a plurality of different coating defects in the same state can be reproduced with one array sample 4, which is extremely convenient and user-friendly.

[0067] Note that when it is desired to change stepwise at least any one of the diameter, maximum inclination, height, or depth of the pseudo-defect portion 41 only in the horizontal or vertical direction, a porous plate 3 in which circular holes 31 are arranged in one row or one column as shown in FIG. 8 may be used.

[0068] The defect sample 2 for surface inspection (including the array sample 4) manufactured in this way is used, for example, for surface inspection of automobiles.

[0069] As described above, in this embodiment, the surface inspection defect sample 2 (including the array sample 4) is manufactured using the mold 1 or a dummy mold. The mold 1 is a mold in which a transfer surface 10 having a concave portion 12 or a convex portion 11 for forming the pseudo defect portions 21 and 41 is formed by turning. The dummy mold is manufactured by repeatedly performing shape transfer one or more times in sequence starting from the transfer surface 10 of the mold 1. Then, the shape of the transfer surface 10 of the mold 1 or the dummy mold is transferred to the material of the surface inspection defect sample 2.

[0070] Since the transfer surface 10 of the mold 1 is formed by turning, the surface roughness of the transfer surface 10 can be made extremely small. Also, the transfer surface of the dummy mold is in a state where the surface roughness is extremely small, similar to the mold. Therefore, the surface roughness of the surface inspection defect sample 2 onto which the transfer surface 10 of the mold 1 or the dummy mold is transferred is also in an extremely small state. As a result, mirror finish equivalent to that of an actual product can be realized for the surface inspection defect sample 2, and high-precision surface inspection can be realized.

[0071] In particular, by setting the surface roughness of the transfer surface 10 of the mold 1 to Ra ≤ 30 nm, the surface roughness of the surface inspection defect sample 2 can also be set to Ra ≤ 30 nm, and visual evaluation by an observer equivalent to an actual coating defect can be obtained.

Explanation of Reference Numerals

[0072] 1 Mold 2 Surface inspection defect sample 3 Porous plate 4 Array sample 10 Transfer surface 11 Convex portion 12 Concave portion 21 Pseudo defect portion 21a Convex shape 21b Concave shape 31 Hole 40 Transfer region 41, 41a - 41e Pseudo defect portions

Claims

1. A method for manufacturing a defect sample for surface inspection, on which at least one pseudo-defect portion having a convex shape and / or a concave shape is formed on the surface, comprising: using a mold having a transfer surface with a concave or convex portion for forming the pseudo-defect portion, the transfer surface of which is formed by turning, and transferring the shape of the transfer surface of the mold to a material of the defect sample for surface inspection.

2. A method for manufacturing a defect sample for surface inspection, on which at least one pseudo-defect portion having a convex shape and / or a concave shape is formed on the surface, comprising: using a dummy mold manufactured by repeatedly performing shape transfer one or more times in sequence, starting from the transfer surface of a mold having a transfer surface with a concave or convex portion for forming the pseudo-defect portion, the transfer surface of which is formed by turning, and transferring the shape of the transfer surface of the dummy mold to a material of the defect sample for surface inspection.

3. The method for manufacturing a defect sample for surface inspection according to claim 1 or 2, wherein the surface roughness of the defect sample for surface inspection is Ra≦30 nm.

4. The method for manufacturing a defect sample for surface inspection according to claim 1 or 2, wherein the material of the processed surface of the mold to be subjected to turning contains 50 atomic% or more of Ni.

5. The method for manufacturing a defect sample for surface inspection according to claim 1 or 2, wherein the mold is made of a material mainly composed of Al or Cu.

6. The method for manufacturing a defect sample for surface inspection according to claim 1, wherein a plurality of the molds are used, and a plurality of defect samples are formed in an array by transferring the shape of the transfer surface of each mold to a material of the defect sample for surface inspection.

7. The method for manufacturing a defect sample for surface inspection according to claim 2, wherein a plurality of the dummy molds are used, and a plurality of defect samples are formed in an array by transferring the shape of the transfer surface of each dummy mold to a material of the defect sample for surface inspection.

8. The method for manufacturing a defect sample for surface inspection according to claim 6 or 7, wherein at least one of the diameter, maximum inclination, height or depth of the pseudo-defect portion of the plurality of defect samples in the array changes stepwise.

9. The method for manufacturing a defect sample for surface inspection according to claim 1, 2, 6 or 7, wherein the diameter of the pseudo-defect portion is 200 to 500 μm and the maximum inclination is 0.3 to 1.0 degrees.

10. The convex shape of the pseudo-defect part is a conical shape or the contour of the cross-section is a Gaussian distribution curve shape, and the concave shape of the pseudo-defect part is a conical hole shape or the contour of the cross-section is an inverse Gaussian distribution curve shape. The method for manufacturing a defect sample for surface inspection according to claim 1 or 2.

11. A mold used for manufacturing a defect sample for surface inspection, on which at least one pseudo-defect part having a convex shape and / or a concave shape is formed on the surface, A mold characterized in that a transfer surface having a concave or convex part for forming the pseudo-defect part is formed by turning.

12. The mold according to claim 11, wherein the surface roughness of the transfer surface is Ra≤30 nm.

13. The mold according to claim 11 or 12, wherein the material of the processed surface of the mold to be turned is a material containing 50 atomic% or more of Ni.

14. The mold according to claim 11 or 12, wherein the diameter of the concave or convex part of the transfer surface is 200 to 500 μm, and the maximum inclination is 0.3 to 1.0 degrees.

15. The mold according to claim 11 or 12, wherein the shape of the convex part of the transfer surface is a conical shape or the contour of the cross-section is a Gaussian distribution curve shape, and the shape of the concave part of the transfer surface is a conical hole shape or the contour of the cross-section is an inverse Gaussian distribution curve shape.

16. A method for manufacturing a master mold used for manufacturing a defect sample for surface inspection, on which at least one pseudo-defect part having a convex shape and / or a concave shape is formed on the surface, A method for manufacturing a master mold, characterized in that a mold having a transfer surface with a concave or convex part for forming the pseudo-defect part formed by turning is used, and starting from the transfer surface of the mold, the master mold is manufactured by repeating one or more shape transfers in sequence.

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