Panel storage container

The panel storage container addresses the issues of panel bending and dust generation by using a support mechanism and integrated pressing mechanism to securely hold and protect panels during storage and transport.

JP2025089060APending Publication Date: 2025-06-12SHIN ETSU POLYMER CO LTD
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Patent Information

Application Number
JP2023204020
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-12-01
Publication Date
2025-06-12

AI Technical Summary

Technical Problem

In panel storage containers, panels may bend due to vibration and generate dust from their end faces, leading to inefficiencies and potential damage.

Method used

A panel storage container design featuring a support mechanism that includes a support portion to hold the panel's end in the second direction and a pressing mechanism integrated into the lid body to press the panel's end toward the support portion, restricting movement and reducing dust generation.

Benefits of technology

The solution effectively restricts panel movement during vibration, thereby reducing dust generation and preventing panel damage, while allowing for easy insertion and removal of panels.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a panel storage container capable of suppressing dust generation.SOLUTION: A panel storage container includes a container body having an opening and storing a panel P, a support mechanism provided inside the container body and supporting the panel P, and a lid body 3 closing the opening, wherein the container body defines a storage space for storing the panel P and includes a pair of side walls facing each other in a first direction, the support mechanism includes a support portion 62 supporting an end portion in the first direction of the panel P in a second direction intersecting the first direction, and the lid body 3 includes a pressing mechanism 35 pressing the end portion toward the support portion 62 in the second direction.SELECTED DRAWING: Figure 8
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Description

Technical Field

[0001] The present disclosure relates to a panel storage container.

Background Art

[0002] In a manufacturing process for handling panels such as glass substrates for liquid crystal panels, when transferring a rectangular panel from a manufacturing apparatus to a manufacturing apparatus in another process and when temporarily storing the panel, a panel storage container for storing a plurality of panels is used. For example, Patent Document 1 describes a substrate storage container including a container body for storing a substrate and a lid for closing an opening provided in the container body.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In such a panel storage container, both ends of the panel are supported by support members from below. In this case, the panel may be bent due to vibration or the like, and dust may be generated from the end face of the panel or the like.

[0005] The present disclosure describes a panel storage container capable of suppressing dust generation.

Means for Solving the Problems

[0006] The panel storage container according to one aspect of the present disclosure includes a container body having an opening for storing a panel, a support mechanism provided inside the container body for supporting the panel, and a lid body for closing the opening. The container body defines a storage space for storing the panel and includes a pair of side walls facing each other in a first direction. The support mechanism includes a support portion that supports an end portion of the panel in a second direction intersecting the first direction. The lid body includes a pressing mechanism that presses the end portion toward the support portion in the second direction.

[0007] In this panel storage container, an end portion of the panel in the first direction is supported in the second direction by the support portion and is pressed toward the support portion in the second direction by the pressing mechanism. As a result, the end portion of the panel in the first direction is sandwiched between the support portion and the pressing mechanism in the second direction, so that the movement of the panel is restricted. Therefore, even if vibration is applied to the panel storage container, the panel is less likely to be affected by the vibration. As a result, it is possible to suppress dust generation.

[0008] In some embodiments, the pressing mechanism may press the end portion in a state where the lid body closes the opening, and may release the pressing on the end portion in a state where the opening is open. The panel can be inserted into and removed from the panel storage container in a state where the opening is open, and the panel storage container can be transported in a state where the lid body closes the opening. According to the above configuration, it is possible to suppress dust generation during transportation of the panel storage container and to insert and remove the panel.

[0009] In some embodiments, the pressing mechanism may include a pressing member for pressing the end portion and a link mechanism for moving the pressing member so as to press the end portion in a state where the lid body closes the opening and release the pressing on the end portion in a state where the opening is open. In this case, the pressing member moves in conjunction with the opening and closing of the lid body. Thereby, it is possible to suppress dust generation during transportation of the panel storage container and to insert and remove the panel without the user operating the pressing mechanism.

[0010] In some embodiments, the panel storage container may further include a pusher for operating the pressing mechanism. The link mechanism may include a link member rotatably attached about a first axis extending in a first direction, and an elastic member provided to be extendable and contractible in the rotational direction of the link member. The link member may include a link portion extending in a direction intersecting the first axis and supporting the pressing member, and a lever portion extending in a direction intersecting the first axis and the link portion. The elastic member may be provided to support the lever portion. When the lid closes the opening, the pusher may rotate the link member about the first axis by pushing the lever portion in a third direction intersecting the first direction and the second direction. The link member may move the pressing member so that the pressing member presses the end portion by rotating about the first axis. In this case, when the lid closes the opening, the pusher pushes the lever portion in the third direction, causing the link member to rotate about the first axis and the pressing member to press the end portion of the panel in the first direction. At this time, the elastic member is compressed by the lever portion. On the other hand, when the lid is removed, the pressing by the pusher is released. Therefore, the elastic force (restoring force) of the elastic member pushes back the lever portion, and the link member rotates about the first axis until the lever portion returns to its original position, releasing the pressing of the end portion by the pressing member. As a result, the panel can be carried out of the panel storage container. As described above, dust generation during the conveyance of the panel storage container is suppressed, and the panel can be taken in and out.

[0011] In some embodiments, the support portion may include a shaft extending in the third direction. The pusher may include a mounting portion for attaching the pusher to the container body, and a protruding portion extending toward the lid from the shaft in a state where the lid closes the opening. In this case, when the lid closes the opening, the protruding portion abuts against the lever portion and pushes the lever portion in the third direction. Since the protruding portion extends toward the lid from the shaft in a state where the lid closes the opening, the lever portion can be provided at a position that does not interfere with the panel. As a result, it is possible to suppress damage to the panel.

[0012] In some embodiments, the protruding portion may be located between the shaft and the side wall close to the shaft among the pair of side walls. Since the support portion supports the end portion of the panel in the first direction of the panel, a space may be formed between the panel supported by the support portion and the side wall. Therefore, according to the above configuration, when the panel is carried into the container body or carried out from the container body, the possibility that the protruding portion interferes with the panel can be reduced. As a result, it is possible to suppress damage to the panel.

Effects of the Invention

[0013] According to the present disclosure, dust generation can be suppressed.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Modes for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same reference numerals are assigned to the same elements, and redundant descriptions are omitted. An XYZ coordinate system is shown in each figure. The Y-axis direction is a direction that intersects (here, is orthogonal to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction that intersects (here, is orthogonal to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For convenience of explanation, the terms "front", "rear", "up", "down", "left", and "right" are used, but are not limited to these directions.

[0016] Referring to FIG. 1, a panel storage container according to an embodiment will be described. FIG. 1 is an exploded perspective view of a panel storage container according to an embodiment. The panel storage container 1 shown in FIG. 1 is a container for storing a plurality of panels. The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. Examples of panels include glass substrates for liquid crystal panels and panels on which electronic components are mounted. The panel has a rectangular shape. Examples of the size of the panel include 510 mm × 515 mm and 600 mm × 600 mm. The number of panels that can be stored in the panel storage container 1 is arbitrarily determined, and may be, for example, 6, 12, 16, or 24.

[0017] The panel storage container 1 is used, for example, in a manufacturing apparatus for manufacturing an electronic component assembly. The electronic component assembly is manufactured through steps such as mounting a large number of electronic components on a large carrier panel such as a glass plate and a stainless steel plate, sealing these electronic components with an epoxy resin or the like, peeling the sealed electronic components from the carrier panel in a panel form, and individually cutting out the electronic components in a panel form. The panel storage container 1 is used to transfer the panel between these steps.

[0018] The panel storage container 1 includes a container body 2, a lid body 3, and a pair of handles 4.

[0019] The container body 2 is a rectangular parallelepiped-shaped container with an open front (front face). In other words, the container body 2 is a front-open box-type container provided with an opening 2a on the front face. The container body 2 stores a plurality of panels. Specifically, the container body 2 stores a plurality of panels in a state where they are stacked with spaces between them in the vertical direction (second direction). The panels are inserted into and removed from the container body 2 through the opening 2a. Details of the container body 2 will be described later.

[0020] The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 is detachably attached to a flange 25 that defines the opening 2a. Details of the lid body 3 will be described later.

[0021] The pair of handles 4 are members used when a conveying device conveys the panel storage container 1. The pair of handles 4 are provided at both left and right ends of a top plate 21 described later. By the conveying device gripping the pair of handles 4 and lifting the panel storage container 1, the conveying device can convey the panel storage container 1.

[0022] The container body 2, the lid body 3, and the handle 4 are configured by combining a plurality of parts formed of a metal material or a resin material. Examples of the resin included in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. These alloys may be used as the resin included in the molding material of the resin material.

[0023] These resins may be added with a conductive substance and various antistatic agents. The conductive substance may be composed of, for example, carbon fiber, carbon powder, carbon nanotube, or conductive polymer, etc. As the antistatic agent, antistatic agents such as anionic, cationic, and nonionic types can be used. Benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based ultraviolet absorbers may be added. Glass fiber or carbon fiber, etc. that improves rigidity may also be selectively added.

[0024] Next, the container body 2 will be described in detail. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, and a flange 25.

[0025] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are rectangular plates. The top plate 21 and the bottom plate 22 face each other in the vertical direction and are arranged substantially parallel. The pair of side walls 23 face each other in the left-right direction (the first direction) and are arranged substantially parallel. The rear wall 24 faces the lid body 3 in the front-rear direction (the third direction) with the lid body 3 closing the opening 2a. Two adjacent members among the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 are connected by a frame. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define an accommodation space 20 for accommodating a plurality of panels.

[0026] The top plate 21, the bottom plate 22, and the side walls 23 are composed of, for example, metal materials such as aluminum and stainless steel. The rear wall 24 is composed of, for example, a transparent resin material that allows the accommodation space 20 to be visible from the outside of the container body 2. A part of the rear wall 24 may be composed of a transparent resin material. Examples of the transparent resin material include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0027] The flange 25 is a rectangular frame body provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The opening 2a is defined by the flange 25. The flange 25 is composed of, for example, the above-mentioned resin material or a metal material such as aluminum and stainless steel. Two locking holes 25h arranged at intervals in the left-right direction are provided in each of the upper frame portion and the lower frame portion of the flange 25. The locking hole 25h in the upper frame portion and the locking hole 25h in the lower frame portion are provided at positions facing each other in the vertical direction.

[0028] A cover member for preventing particles from entering the storage space 20 is provided at the corner of the container body 2.

[0029] Next, with further reference to FIGS. 2 to 4, the configuration inside the storage space 20 will be described. FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1. FIG. 3 is a perspective view showing the members provided on the side wall of the container body shown in FIG. 1. FIG. 4 is a perspective view of the pusher shown in FIG. 2. In FIG. 3, the members provided on one side wall 23 are shown, and the illustration of the container body 2 is omitted. Similar members are also provided on the other side wall 23.

[0030] As shown in FIGS. 2 and 3, the panel storage container 1 further includes a support mechanism 6 and a pair of pushers 7. The support mechanism 6 is a mechanism for supporting the panel. The support mechanism 6 is provided inside the container body 2 (storage space 20). The support mechanism 6 includes a plurality of support portions 61, a plurality of support portions 62, a plurality of columns 63, and a plurality of holders 64.

[0031] Each support part 61 is a part for supporting the central part of the panel in the left - right direction. Each support part 61 includes a shaft 61a and a plurality of elastic bodies 61b. The shaft 61a is a columnar (for example, cylindrical) member extending in the front - rear direction. The rear end part of the shaft 61a is fixed to a support column provided on the inner surface of the rear wall 24. The shaft 61a is constituted by, for example, a material with high bending rigidity. Examples of the constituent material of the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastics.

[0032] Each elastic body 61b is an annular (for example, circular - ring - shaped) member provided on the outer peripheral surface of the shaft 61a around the axis of the shaft 61a. The elastic body 61b is provided to suppress the sliding of the panel and improve the positioning accuracy of the panel. The elastic body 61b is constituted by, for example, a rubber material. Examples of the rubber material include EPDM (ethylene propylene diene rubber), silicone rubber, and fluorine rubber. The plurality of elastic bodies 61b are arranged at regular intervals in the extending direction of the shaft 61a.

[0033] Each support part 62 is a part for supporting the end part of the panel in the left - right direction in the up - down direction. Each support part 62 includes a shaft 62a, a plurality of elastic bodies 62b, and a stopper 62c. The shaft 62a is a columnar (for example, cylindrical) member extending in the front - rear direction. The rear end part of the shaft 62a is fixed to a support column provided on the inner surface of the rear wall 24. The shaft 62a is constituted by, for example, a material with high bending rigidity. Examples of the constituent material of the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastics. The length of the shaft 62a in the front - rear direction is slightly longer than the length of the panel in the front - rear direction and longer than the length of the shaft 61a in the front - rear direction.

[0034] Each elastic body 62b is an annular (e.g., circular ring-shaped) member provided on the outer peripheral surface of the shaft 62a around the axis of the shaft 62a. The elastic body 62b is provided to suppress the sliding of the panel and improve the positioning accuracy of the panel. Since the constituent material and arrangement of the elastic body 62b are the same as those of the elastic body 61b, detailed description thereof is omitted.

[0035] The stopper 62c is a member for determining the position of the rear end of the panel. The stopper 62c is made of, for example, the resin material described above. The stopper 62c is provided at the rear end portion of the shaft 62a. The stopper 62c has a block shape. The stopper 62c is provided with an insertion hole for inserting the shaft 62a in the front-rear direction.

[0036] The number of the support portions 61 and 62 is changed according to the number of panels that can be stored in the panel storage container 1. In the present embodiment, the support mechanism 6 includes one support portion 61 and two support portions 62 per panel. In other words, a storage stage for storing one panel is formed by one support portion 61 and two support portions 62. One support portion 61 and two support portions 62 are arranged in the left-right direction. One support portion 61 is disposed between the two support portions 62.

[0037] Each support column 63 is a member for attaching the handle 4 and attaching the holder 64. Each support column 63 is a columnar member extending in the vertical direction from the top plate 21 to the bottom plate 22. Each support column 63 is made of, for example, a metal material such as aluminum and stainless steel. Each support column 63 is provided on the inner surface of the side wall 23. In the present embodiment, three support columns 63 are provided on each side wall 23. The three support columns 63 are arranged in the front-rear direction and are arranged substantially parallel to each other.

[0038] Each holding member 64 holds (supports) the shaft 62a and is a member for supporting the end portions of the panel in the left - right direction. In the present embodiment, each holding member 64 is provided over four storage levels. For each column 63, three holding members 64 are provided in the vertical direction. The front surface of the holding member 64 abuts against the rear surface of the column 63, and the holding member 64 is fixed to the column 63 by screws. Therefore, in the present embodiment, nine holding members 64 are provided on each side wall 23.

[0039] Each holding member 64 includes the same number of placement portions 64a as the number of shafts 62a that can be held by the holding member 64. In the present embodiment, each holding member 64 includes four placement portions 64a. Each placement portion 64a is a portion where the end portion of the panel in the left - right direction is placed and holds the shaft 62a. Each placement portion 64a protrudes toward the accommodation space 20 in the left - right direction. Each placement portion 64a is provided with an insertion hole penetrating in the front - rear direction, and the shaft 62a is inserted through the insertion hole.

[0040] Each pusher 7 is a member for operating the pressing mechanism 35 described later. Each pusher 7 is made of a metal material such as aluminum and stainless steel, for example. Each pusher 7 is provided at a position where it does not interfere with the panel placed on the storage level and does not interfere with the detection area of the mapping sensor provided in the load port. The mapping sensor is a sensor for confirming the position of the panel. In the present embodiment, a pair of pushers 7 are provided at the lower left and right in the accommodation space 20. The left pusher 7 is provided corresponding to the left pressing mechanism 35, and the right pusher 7 is provided corresponding to the right pressing mechanism 35.

[0041] As shown in Fig. 4, each pusher 7 includes an attachment portion 71 and a protruding portion 72. The attachment portion 71 is a part for attaching the pusher 7 to the container body 2. In the present embodiment, the attachment portion 71 is fixed to the lower end portion of the frontmost one of the three support columns 63 provided on each side wall 23. Specifically, the rear surface of the attachment portion 71 abuts against the front surface at the lower end portion of the support column 63, and the attachment portion 71 is fixed to the support column 63 by screws.

[0042] The protruding portion 72 is a part for pushing the lever portion 54b of the link member 54 described later forward. The protruding portion 72 extends toward the lid body 3 from the shaft 62a in a state where the lid body 3 closes the opening 2a. In the present embodiment, the protruding portion 72 extends forward from the attachment portion 71. The protruding portion 72 extends substantially parallel to the shaft 62a and protrudes forward from the front end of the shaft 62a. The front end of the protruding portion 72 is located in front of the stepped surface 25a of the flange 25. The protruding portion 72 has an inclined surface 72a provided at the front end of the protruding portion 72. The inclined surface 72a is inclined rearward as it goes downward.

[0043] The protruding portion 72 is located between the shaft 62a and the side wall 23 of the pair of side walls 23 that is close to the shaft 62a. That is, the protruding portion 72 of the left pusher 7 is located between the shaft 62a of the left support portion 62 and the left side wall 23, and the protruding portion 72 of the right pusher 7 is located between the shaft 62a of the right support portion 62 and the right side wall 23.

[0044] Next, the lid body 3 will be described in detail with reference to Figs. 1, 5, and 6. Fig. 5 is a perspective view of the lid body shown in Fig. 1 as seen from the back. Fig. 6 is a perspective view of the pressing mechanism shown in Fig. 5. As shown in Figs. 1 and 5, the lid body 3 includes a lid main body 31, a cover member 32, a locking mechanism 33, a sealing member 34, and a pair of pressing mechanisms 35.

[0045] The lid body 31 is the main body part of the lid 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material such as, for example, an aluminum and magnesium alloy. The lid body 31 may be made of a thermoplastic resin such as polycarbonate resin. The lid body 31 has a front surface 31a and a back surface 31b. The back surface 31b is the surface facing a plurality of panels in the front-rear direction in a state where the lid 3 closes the opening 2a. The front surface 31a is the surface on the opposite side of the back surface 31b in the front-rear direction.

[0046] Near both left and right ends of the lid body 31, a pair of through holes 31c penetrating the lid body 31 in the front-rear direction are provided. Each through hole 31c is provided along the left and right peripheries of the lid body 31 and extends in the vertical direction over all the storage stages. Each through hole 31c has the same shape as the opening 51a of the storage box 51 described later in plan view.

[0047] The cover member 32 is a member that covers the front surface 31a of the lid body 31. The cover member 32 is a rectangular plate material. The cover member 32 is made of a resin material such as, for example, polycarbonate. A keyhole 32h is provided in the cover member 32. A key (not shown) is inserted into the keyhole 32h.

[0048] The locking mechanism 33 locks or unlocks the lid 3 when the key inserted into the keyhole 32h is operated. The locking mechanism 33 includes a latch (not shown). In a state where the lid 3 is attached to the flange 25, the lid 3 is locked when the latch is inserted into a locking hole 25h provided in the flange 25 by operating the key. In a state where the lid 3 is locked, the lid 3 is unlocked when the latch is pulled out of the locking hole 25h by operating the key.

[0049] The sealing member 34 is a member that seals between the container body 2 and the lid body 31. The sealing member 34 is provided on the back surface 31b of the lid body 31. The sealing member 34 is arranged in a rectangular ring shape along the outer peripheral edge of the back surface 31b. When the sealing member 34 is pressed against the stepped surface 25a of the flange 25, the opening 2a of the container body 2 is hermetically closed. The sealing member 34 is made of an elastically deformable resin. Examples of such resins include fluororubber, EPDM, silicone, and urethane.

[0050] The pair of pressing mechanisms 35 is a mechanism that presses the end portions of the panel in the left - right direction toward the support portion 62 in the up - down direction. In the present embodiment, the left pressing mechanism 35 presses the left front end portion of the panel when the lid 3 closes the opening 2a, and releases the pressing on the left front end portion when the opening 2a is opened. The right pressing mechanism 35 presses the right front end portion of the panel when the lid 3 closes the opening 2a, and releases the pressing on the right front end portion when the opening 2a is opened.

[0051] As shown in FIG. 6, the pressing mechanism 35 includes a storage box 51, a pressing member 52, and a link mechanism 53.

[0052] The storage box 51 is a member that stores the pressing member 52 and the link mechanism 53. The storage box 51 has a box - like shape extending in the up - down direction. The storage box 51 is made of, for example, the above - mentioned resin material or a metal material such as aluminum and stainless steel. An opening 51a is provided on the rear surface of the storage box 51. The opening 51a is overlapped with the through - hole 31c. Through the opening 51a and the through - hole 31c, the pressing member 52 is inserted into and removed from the storage box 51. The storage box 51 includes a plurality of mounting shafts 51b (first shafts; see FIG. 7). The number of mounting shafts 51b is the same as the sum of the number of link members 54 and the number of link members 55 described later. In the present embodiment, the storage box 51 includes three mounting shafts 51b.

[0053] Each mounting shaft 51b is a member for rotatably mounting a link member 54 or a link member 55, which will be described later, around the mounting shaft 51b in the storage box 51. The lowermost mounting shaft 51b is used to mount the link member 54, and the remaining two mounting shafts 51b are used to mount the link member 55. The three mounting shafts 51b are arranged at substantially equal intervals in the vertical direction. Each mounting shaft 51b extends in the left-right direction. Each mounting shaft 51b is provided on one of the side walls of the storage box 51 in the left-right direction and extends from one side wall toward the other side wall. The mounting shaft 51b of the left pressing mechanism 35 is provided on the left side wall of the storage box 51 and extends toward the right side wall. The mounting shaft 51b of the right pressing mechanism 35 is provided on the right side wall of the storage box 51 and extends toward the left side wall.

[0054] The pressing member 52 is a member for pressing the end portions of the panel in the left-right direction. The pressing member 52 is composed of, for example, the resin material described above. In the present embodiment, the pressing member 52 presses the front end portions of the panel in the left-right direction. The pressing member 52 includes a base portion 52a, a plurality of pressing pieces 52b, and a reinforcing portion 52c. The base portion 52a is a plate-like portion extending in the vertical direction over all the storage stages. Three through holes penetrating the base portion 52a in the left-right direction are provided in the base portion 52a. The three through holes are provided at substantially equal intervals in the vertical direction. The diameter of the through hole is the same as or slightly smaller than the outer diameter of a mounting shaft 57, which will be described later, and the mounting shaft 57 is fitted into the through hole.

[0055] Note that the three mounting shafts 51b are arranged linearly in the vertical direction, and the three through holes provided in the base portion 52a are arranged linearly in the vertical direction. The distance between the axes of the uppermost mounting shaft 57 and the middle mounting shaft 57 is substantially equal to the distance between the axes of the uppermost mounting shaft 51b and the middle mounting shaft 51b, and the distance between the axes of the middle mounting shaft 57 and the lowermost mounting shaft 57 is substantially equal to the distance between the axes of the middle mounting shaft 51b and the lowermost mounting shaft 51b. As long as these conditions are satisfied, the arrangement of the three mounting shafts 51b and the three through holes provided in the base portion 52a can be changed as appropriate.

[0056] Each pressing piece 52b is a portion that presses the end portion (front end portion) of the panel in the left - right direction. The pressing member 52 includes the same number of pressing pieces 52b as the number of panels that can be stored in the panel storage container 1. Each pressing piece 52b is provided in a standing state on one surface of the base portion 52a in the left - right direction. The plurality of pressing pieces 52b are provided at substantially equal intervals in the vertical direction. Each pressing piece 52b is provided at a position where it can press the front end portion of the panel in the left - right direction corresponding to the pressing piece 52b.

[0057] The reinforcing portion 52c is a portion that reinforces the plurality of pressing pieces 52b. The reinforcing portion 52c extends in the vertical direction over the entire plurality of pressing pieces 52b. In the present embodiment, the length of the reinforcing portion 52c in the vertical direction is the same as the length of the base portion 52a in the vertical direction. The reinforcing portion 52c is connected to the front end of the base portion 52a so as to form a substantially right angle with the base portion 52a and extends in the left - right direction from the front end of the base portion 52a. The reinforcing portion 52c is connected to the front ends of all the pressing pieces 52b.

[0058] The link mechanism 53 is a mechanism that moves the pressing member 52 in accordance with the opening and closing of the lid body 3. Specifically, the link mechanism 53 presses the end portion (front end portion) of the panel in the left - right direction when the lid body 3 closes the opening 2a, and releases the pressing on the end portion (front end portion) when the opening 2a is open, so as to move the pressing member 52. The link mechanism 53 includes a link member 54, one or a plurality of link members 55, an elastic member 56, and a plurality of mounting shafts 57. Note that the number of link members 55 is appropriately changed according to the length of the pressing member 52 in the vertical direction. The number of mounting shafts 57 is the same as the sum of the number of link members 54 and the number of link members 55. In the present embodiment, the link mechanism 53 includes two link members 55 and three mounting shafts 57.

[0059] The link member 54 is a member that converts the movement of the pusher 7 in the front-rear direction into the insertion and extraction movement of the pressing member 52. The link member 54 is made of, for example, the above-mentioned resin material or a metal material such as aluminum and stainless steel. The link member 54 is attached to the side wall of the storage box 51 so as to be rotatable about the mounting shaft 51b. When the link member 54 is pressed forward by the pusher 7 and rotates about the mounting shaft 51b, the pressing member 52 is moved so as to press the end portion of the panel in the left-right direction. The link member 54 has an L-shaped configuration. The link member 54 includes a link portion 54a and a lever portion 54b.

[0060] The link portion 54a is a portion that supports the pressing member 52 so as to be rotatable about the mounting shaft 57. The link portion 54a extends in a direction intersecting (for example, orthogonal to) the mounting shaft 51b. Through holes penetrating the link portion 54a in the left-right direction are provided at both ends in the extending direction of the link portion 54a. The mounting shaft 51b is inserted into one of the through holes. The diameter of the through hole is slightly larger than the outer diameter of the mounting shaft 51b. Thereby, the link member 54 is attached to the side wall of the storage box 51 so as to be rotatable about the mounting shaft 51b. The mounting shaft 57 fitted into the base portion 52a is inserted into the other through hole. The diameter of the through hole is slightly larger than the outer diameter of the mounting shaft 57. Thereby, the link member 54 supports the pressing member 52 so as to be rotatable about the mounting shaft 57.

[0061] The lever portion 54b is a portion that functions as an input lever of the link mechanism 53. The lever portion 54b is provided so as to be able to advance and retreat in the rotation direction of the link member 54 according to the opening and closing of the lid body 3. Specifically, the lever portion 54b extends from the end portion of the link portion 54a through which the mounting shaft 51b is inserted in a direction intersecting the extending direction of the mounting shaft 51b and the link portion 54a. The lever portion 54b extends rearward when the lid body 3 does not close the opening 2a. The lever portion 54b has a pressing surface 54c that abuts against the inclined surface 72a of the pusher 7 when the lid body 3 closes the opening 2a.

[0062] Each link member 55 is a member that supports the pressing member 52 so as to be rotatable about the mounting shaft 57. Each link member 55 is made of, for example, the above-described resin material or a metal material such as aluminum and stainless steel. Each link member 55 has a plate-like shape extending in a direction (for example, orthogonal) intersecting the mounting shaft 51b. Each link member 55 has substantially the same shape as the link portion 54a.

[0063] Through holes penetrating the link member 55 in the left-right direction are provided at both ends of each link member 55 in the extending direction. The mounting shaft 51b is inserted into one of the through holes. The diameter of the through hole is slightly larger than the outer shape of the mounting shaft 51b. Thereby, the link member 55 is attached to the side wall of the storage box 51 so as to be rotatable about the mounting shaft 51b. The mounting shaft 57 fitted into the base portion 52a is inserted into the other through hole. The diameter of the through hole is slightly larger than the outer shape of the mounting shaft 57. Thereby, the link member 55 supports the pressing member 52 so as to be rotatable about the mounting shaft 57.

[0064] The elastic member 56 is provided so as to be stretchable and contractible in the rotation direction of the link member 54 (lever portion 54b) in accordance with the rotation of the link member 54. The elastic member 56 supports the lever portion 54b. In the present embodiment, the elastic member 56 is an L-shaped leaf spring. The elastic member 56 is made of, for example, the above-described resin material or a metal material such as aluminum and stainless steel. The elastic member 56 includes a flat plate portion 56a and a flat plate portion 56b. The flat plate portion 56a is a portion along the upper surface of the bottom wall of the storage box 51 and is fixed to the upper surface of the bottom wall of the storage box 51. The flat plate portion 56b extends upward from the rear end of the flat plate portion 56a and is inclined forward as it goes upward. The tip of the flat plate portion 56b has a convex curved shape toward the lower surface of the lever portion 54b and is in contact with the lower surface of the lever portion 54b.

[0065] Next, while referring to FIGS. 7 and 8, the operation of the pressing mechanism 35 will be described. FIG. 7 is a side view for explaining the pressing mechanism in a state where the opening is open. FIG. 8 is a side view for explaining the pressing mechanism in a state where the lid closes the opening.

[0066] As shown in FIG. 7, in a state where the opening 2a is open, the pressing member 52 is housed in the storage box 51 and is located in front of the back surface 31b. At this time, since the protruding portion 72 of the pusher 7 is not in contact with the pressing surface 54c of the lever portion 54b, no pressing force acts on the lever portion 54b. Therefore, since the lever portion 54b does not press the elastic member 56, no elastic force is generated in the elastic member 56. This state of the pressing mechanism 35 is referred to as the initial state.

[0067] As shown in FIG. 8, when the lid 3 closes the opening 2a, the pusher 7 rotates the link member 54 about the mounting shaft 51b by pushing the lever portion 54b forward. Specifically, since the front end of the protruding portion 72 is located in front of the stepped surface 25a of the flange 25, the front end of the protruding portion 72 comes into contact with the lever portion 54b before the sealing member 34 is pressed against the stepped surface 25a. Then, until the sealing member 34 is pressed against the stepped surface 25a, the lever portion 54b is pushed forward by the front end of the protruding portion 72.

[0068] As a result, the link member 54 rotates in the rotational direction C1 about the mounting shaft 51b so that the pressing surface 54c of the lever portion 54b follows the inclined surface 72a of the protruding portion 72, and the elastic member 56 sandwiched between the lever portion 54b and the bottom wall of the storage box 51 is compressed by the lever portion 54b. At this time, the end portion of the link portion 54a that supports the pressing member 52 moves backward in an arc about the mounting shaft 51b.

[0069] Here, the distance between the centers of the two mounting shafts 57 adjacent in the vertical direction is substantially equal to the distance between the centers of the two mounting shafts 51b adjacent in the vertical direction, and the link portion 54a and the link member 55 have substantially the same shape. Therefore, the link portion 54a and the two link members 55 maintain a substantially parallel state. For this reason, in conjunction with the rotation of the link portion 54a, the two link members 55 rotate about the mounting shaft 51b, and the end portion of the link member 55 supporting the pressing member 52 moves backward in an arc about the mounting shaft 51b.

[0070] As a result, the pressing member 52 is moved obliquely downward backward without tilting, and the pressing member 52 is pulled out from the storage box 51 through the opening 51a and the through hole 31c. Then, each pressing piece 52b presses the upper surface Pa of the panel P downward at the front end portion of the panel P in the left - right direction corresponding to the pressing piece 52b. The lower surface Pb of the panel P is supported by the support portion 62 (mounting portion 64a) at the end portion of the panel P in the left - right direction. Therefore, the front end portion of the panel P in the left - right direction is sandwiched between the pressing piece 52b and the support portion 62 in the vertical direction.

[0071] When the lid body 3 is removed from the container body 2 and the opening 2a is opened, the pressing by the pusher 7 is released. For this reason, due to the elastic force (restoring force) of the elastic member 56, the lever portion 54b is pushed back, and the end portion of the link portion 54a supporting the pressing member 52 moves forward in an arc about the mounting shaft 51b. At this time, in conjunction with the rotation of the link portion 54a, the two link members 55 rotate about the mounting shaft 51b, and the end portion of the link member 55 supporting the pressing member 52 moves forward in an arc about the mounting shaft 51b.

[0072] As a result, the pressing member 52 is moved obliquely upward forward without tilting, and the pressing member 52 is stored in the storage box 51 through the through hole 31c and the opening 51a. As described above, since the pressing mechanism 35 returns to the initial state, the pressing piece 52b separates from the upper surface Pa of the panel P, and the pressing of the front end portion of the panel P in the left - right direction is released. As a result, the panel P becomes in a state where it can be carried out.

[0073] In the panel storage container 1 described above, the end portions of the panel P in the left - right direction are supported on the lower surface of the panel P by the support portions 62, and are pressed downward toward the support portions 62 (shafts 62a) by the pressing mechanism 35. As a result, the end portions of the panel P in the left - right direction are sandwiched in the vertical direction by the support portions 62 and the pressing mechanism 35, so that the movement of the panel P is restricted. Therefore, even if vibration is applied to the panel storage container 1, the panel P is less likely to be affected by the vibration. As a result, it is possible to suppress dust generation.

[0074] In the panel storage container 1, the pressing mechanism 35 is provided on the lid body 3, and the pusher 7 is provided on the container body 2. With such a simple structure, the movement of the panel P can be restricted. As a result, the workability of attaching the structure for restricting the movement of the panel P can be improved, and the cost can be reduced.

[0075] The panel P can be inserted into and removed from the panel storage container 1 with the opening 2a open, and the panel storage container 1 can be conveyed with the lid body 3 closing the opening 2a. The pressing member 52 of the pressing mechanism 35 presses the end portions of the panel P in the left - right direction with the lid body 3 closing the opening 2a, and releases the pressing on the end portions of the panel P in the left - right direction with the opening 2a open. Therefore, it is possible to suppress dust generation during the conveyance of the panel storage container 1 and to insert and remove the panel P.

[0076] The link mechanism 53 moves the pressing member 52 so as to hold the end portions of the panel P in the left-right direction when the lid body 3 closes the opening 2a, and to release the holding of the end portions of the panel P in the left-right direction when the opening 2a is open. Accordingly, the pressing member 52 moves in conjunction with the opening and closing of the lid body 3. Thereby, it is possible to suppress the generation of dust during the conveyance of the panel storage container 1 and to insert and remove the panel P without the user operating the pressing mechanism 35.

[0077] The elastic member 56 supports the lever portion 54b and is provided so as to be stretchable and contractible in the rotational direction of the lever portion 54b in accordance with the rotation of the lever portion 54b. When the lid body 3 closes the opening 2a, the pusher 7 rotates the link member 54 in the rotational direction C1 about the mounting shaft 51b by pushing the lever portion 54b forward. Accordingly, when the lid body 3 closes the opening 2a and the pusher 7 pushes the lever portion 54b forward, the link member 54 rotates in the rotational direction C1 about the mounting shaft 51b, and the pressing member 52 holds the end portion (front end portion) of the panel P in the left-right direction. At this time, the elastic member 56 is compressed by the lever portion 54b. On the other hand, when the lid body 3 is removed, the pressing by the pusher 7 is released. For this reason, the lever portion 54b is pushed back by the elastic force (restoring force) of the elastic member 56, and the link member 54 rotates in the direction opposite to the rotational direction C1 about the mounting shaft 51b until the lever portion 54b returns to its original position, and the pressing of the end portion of the panel P in the left-right direction by the pressing member 52 is released. Thereby, it is possible to carry out the panel P from the panel storage container 1. As described above, it is possible to suppress the generation of dust during the conveyance of the panel storage container 1 and to insert and remove the panel P.

[0078] When the lid body 3 closes the opening 2a, the protruding portion 72 abuts against the lever portion 54b and pushes the lever portion 54b forward. Since the protruding portion 72 extends toward the lid body 3 from the shaft 62a in the state where the lid body 3 closes the opening 2a, the lever portion 54b can be provided in front of the front end of the panel P. Accordingly, since the lever portion 54b does not interfere with the panel P, it is possible to suppress damage to the panel P.

[0079] Since the support portion 62 supports the end portions of the panel P in the left - right direction, a space may be formed between the panel P supported by the support portion 62 and the side wall 23. The protruding portion 72 of the pusher 7 is located between the shaft 62a and the side wall 23 close to the shaft 62a. Therefore, when the panel P is carried into the container body 2 or carried out from the container body 2, the possibility of the protruding portion 72 interfering with the panel P can be reduced. As a result, it is possible to suppress damage to the panel P.

[0080] Note that the panel storage container according to the present disclosure is not limited to the above - described embodiment.

[0081] The pressing member 52 may include the mounting shaft 57. That is, the mounting shaft 57 may be integrally formed with the base portion 52a. The mounting shaft 57 may be fixed to the link member 54. In this case, the link mechanism 53 may not include the link member 55.

[0082] If the lever portion 54b is provided at a position where it is pushed forward by the protruding portion 72 in a state where the lid body 3 closes the opening 2a, the front end of the protruding portion 72 may be the same as the front end of the shaft 62a or may be located behind the front end of the shaft 62a.

[0083] The mounting position and shape of each pusher 7 can be appropriately changed according to the detection area of the mapping sensor. For example, as shown in FIG. 9, the pusher 7A is mainly different from the pusher 7 in that the mounting position where the mounting portion 71 is mounted and the connecting portion 73 are further included. The pusher 7A is mounted on the inner surface of the side wall 23.

[0084] The mounting portion 71 is fixed near the front end at the lower end of the inner surface of the side wall 23. The connecting portion 73 is a portion that connects the mounting portion 71 and the protruding portion 72. The protruding portion 72 is provided at a position where the lever portion 54b can be pushed in. Therefore, the connecting portion 73 is inclined so as to face forward as it approaches the side wall 23 on the side opposite to the side wall 23 where the mounting portion 71 is fixed. The protruding portion 72 extends forward from the tip of the connecting portion 73.

[0085] As shown in FIG. 10, the pusher 7B mainly differs from the pusher 7 in that the mounting portion 71 is attached and further includes the connecting portion 73. The pusher 7B is attached to the upper surface of the bottom plate 22.

[0086] The mounting portion 71 of the left pusher 7B is fixed to the left front end of the upper surface of the bottom plate 22. The mounting portion 71 of the right pusher 7B is fixed to the right front end of the upper surface of the bottom plate 22. The connecting portion 73 is a portion that connects the mounting portion 71 and the protruding portion 72. The protruding portion 72 is provided at a position where the lever portion 54b can be pushed in. Therefore, the connecting portion 73 extends upward from the mounting portion 71. The protruding portion 72 extends forward from the upper end of the connecting portion 73.

Explanation of Reference Numerals

[0087] 1... Panel storage container, 2... Container body, 2a... Opening, 3... Lid body, 6... Support mechanism, 7, 7A, 7B... Pushers, 20... Storage space, 23... Side wall, 35... Pressing mechanism, 51b... Mounting shaft (first shaft), 52... Pressing member, 53... Link mechanism, 54... Link member, 54a... Link portion, 54b... Lever portion, 56... Elastic member, 62... Support portion, 62a... Shaft, 71... Mounting portion, 72... Protruding portion, P... Panel.

Claims

1. A container body having an opening for storing a panel, a support mechanism provided inside the container body for supporting the panel, and a lid for closing the opening, comprising: The container body defines a storage space for storing the panel and includes a pair of side walls facing each other in a first direction, The support mechanism includes a support portion that supports an end portion of the panel in a second direction intersecting the first direction, The lid includes a pressing mechanism that presses the end portion toward the support portion in the second direction, a panel storage container.

2. The pressing mechanism presses the end portion in a state where the lid closes the opening and releases the pressing on the end portion in a state where the opening is open, the panel storage container according to claim 1.

3. The pressing mechanism includes: a pressing member for pressing the end portion, and a link mechanism for moving the pressing member so as to press the end portion in a state where the lid closes the opening and release the pressing on the end portion in a state where the opening is open, the panel storage container according to claim 2.

4. Further comprising a pusher for operating the pressing mechanism, The link mechanism includes: a link member rotatably attached about a first axis extending in the first direction, and an elastic member provided to be extendable and contractible in the rotational direction of the link member, comprising: The link member includes: a link portion extending in a direction intersecting the first axis and supporting the pressing member, and a lever portion extending in a direction intersecting the first axis and the link portion, comprising: The elastic member is provided to support the lever portion, When the lid closes the opening, the pusher rotates the link member about the first axis by pushing the lever portion in a third direction intersecting the first direction and the second direction, The link member rotates about the first axis to move the pressing member so that the pressing member presses the end portion, the panel storage container according to claim 3.

5. The support portion includes a shaft extending in the third direction, The pusher includes a mounting portion for mounting the pusher to the container body and a protruding portion extending toward the lid from the shaft in a state where the lid closes the opening, the panel storage container according to claim 4.

6. The panel storage container according to claim 5, wherein the protruding portion is located between the shaft and the side wall closer to the shaft among the pair of side walls.

Citation Information

Patent Citations

  • Substrate storage container

    JP3235982U