Contact terminal, terminal assembly, and device testing apparatus

Abstract

To provide a contact terminal that enables an improvement in the degree of freedom in design.SOLUTION: A contact terminal 50 includes a contact portion 70 that is in releasable contact with a pad 24, a pressing member 60 that presses a contact portion 70 relatively against the pad 24, and an electrical connection member 80 that has wiring 85, 86 connected to the contact portion 70, and the pressing member 60 and the electrical connection member 80 are mutually independent members.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a contact terminal, a terminal assembly including the contact terminal, and a device test apparatus including the terminal assembly.

Background Art

[0002] Signal contacts for connecting a flat cable and a printed circuit board are known (see, for example, Patent Document 1). This signal contact includes a contact point that contacts a contact portion of a signal layer of a flat cable and a terminal portion that is connected to a connection portion of a printed circuit board. This signal contact is composed of a conductive metal, electrically connects the contact portion of the flat cable and the connection portion of the printed circuit board, and also functions as a spring that presses the contact point against the contact portion of the flat cable.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The above signal contact performs both electrical and mechanical functions with one member. Therefore, in the above signal contact, there is a problem that when the mechanical performance is improved, the electrical performance may decrease, and there may be electrical constraints on the mechanical design.

[0005] The problem to be solved by the present invention is to provide a contact terminal, a terminal assembly, and a device test apparatus that can improve the degree of freedom in design.

Means for Solving the Problems

[0006] [1]Aspect 1 of the present invention is a contact terminal including a contact portion that detachably contacts a first conductive member, a pressing member that presses the contact portion against the first conductive member, and an electrical connection member having a first conductive path connected to the contact portion, wherein the pressing member and the electrical connection member are independent members from each other.

[0007] [2]Aspect 2 of the present invention may be the contact terminal according to Aspect 1, wherein the pressing member includes an elastically deformable portion that elastically deforms when the contact portion is relatively pressed against the first conductive member.

[0008] [3]Aspect 3 of the present invention may be the contact terminal according to Aspect 2, wherein the electrical length of the first conductive path is constant when the elastically deformable portion deforms.

[0009] [4]Aspect 4 of the present invention may be the contact terminal according to Aspect 2 or 3, wherein the electrical connection member includes an insulator surrounding the entire circumference of the first conductive path.

[0010] [5]Aspect 5 of the present invention may be the contact terminal according to Aspect 4, wherein the insulator is made of a resin material.

[0011] [6]Aspect 6 of the present invention may be the contact terminal according to any one of Aspects 2 to 5, wherein the elastically deformable portion is a resin spring made of a resin material and elastically deforms when the contact portion is relatively pressed against the first conductive member, a metal spring made of a metal material and elastically deforms when the contact portion is relatively pressed against the first conductive member, or an air spring compressed by the relative pressing of the contact portion against the first conductive member.

[0012] [7]Aspect 7 of the present invention may be the contact terminal according to any one of Aspects 2 to 5, wherein the pressing member is made of a resin material, and the elastically deformable portion includes a resin spring that elastically deforms when the contact portion is relatively pressed against the first conductive member.

[0013] [8]Aspect 8 of the present invention is that in the contact terminal of Aspect 7, the contact terminal includes a plurality of the contact portions, the electrical connection member includes a plurality of the first conductive paths connected to the plurality of contact portions, the pressing member includes a plurality of the elastic deformation portions corresponding to the plurality of contact portions, and the plurality of elastic deformation portions may be contact terminals integrally formed.

[0014] [9]Aspect 9 of the present invention is that in the contact terminal of any one of Aspects 1 to 8, the contact terminal includes a plurality of the contact portions, the electrical connection member includes a flexible printed wiring board having flexibility, and the flexible printed wiring board may be a contact terminal including a plurality of the first conductive paths connected to the plurality of contact portions.

[0015]

[10] Aspect 10 of the present invention is that in the contact terminal of Aspect 9, the flexible printed wiring board may be a contact terminal including a first insulating layer, the plurality of the first conductive paths provided on the first insulating layer, and a second insulating layer overlapping the first insulating layer so as to cover the plurality of the first conductive paths.

[0016]

[11] Aspect 11 of the present invention is that in the contact terminal of Aspect 10, the plurality of the first conductive paths may be contact terminals arranged on the first insulating layer with a space therebetween.

[0017]

[12] Aspect 12 of the present invention is that in the contact terminal of Aspect 10 or 11, the flexible printed wiring board may be a contact terminal having a slit disposed between the plurality of the first conductive paths.

[0018]

[13] Aspect 13 of the present invention is that in the contact terminal of Aspect 12, the slit may be a contact terminal penetrating at least one of the first and second insulating layers.

[0019]

[14] Aspect 14 of the present invention is that in the contact terminal of Aspect 12 or 13, the slit may be a contact terminal penetrating the flexible printed wiring board.

[0020]

[15] Aspect 15 of the present invention may be a contact terminal in any one of Aspects 11 to 14, wherein the plurality of first conductive paths include a plurality of ground lines and a plurality of signal lines respectively arranged between the ground lines.

[0021]

[16] Aspect 16 of the present invention may be a contact terminal in the contact terminal of Aspect 15, wherein the flexible printed wiring board is provided on the first insulating layer and includes a first ground layer facing the signal line through the first insulating layer.

[0022]

[17] Aspect 17 of the present invention may be a contact terminal in the contact terminal of Aspect 15 or 16, wherein the flexible printed wiring board is provided on the second insulating layer and includes a second ground layer facing the signal line through the second insulating layer.

[0023]

[18] Aspect 18 of the present invention may be a contact terminal in any one of Aspects 15 to 17, wherein the contact portion includes a signal contact portion connected to the signal line and a ground contact portion connected to the ground line.

[0024]

[19] Aspect 19 of the present invention may be a contact terminal in the contact terminal of Aspect 18, wherein the contact terminal includes a third ground layer electrically connected to the ground contact portion, the pressing member has a through hole through which the signal contact portion passes, and the third ground layer is disposed in the through hole so as to face the signal contact portion with a gap therebetween.

[0025]

[20] Aspect 20 of the present invention may be a contact terminal in any one of Aspects 1 to 19, wherein the contact portion includes a metal layer held by the pressing member, and the metal layer is provided at the tip portion of the pressing member.

[0026]

[21] Aspect 21 of the present invention is such that, in the contact terminal of Aspect 20, the pressing member includes an elastically deformable portion that elastically deforms when relatively pressing the contact portion against the first conductive member, and the contact portion may be a contact terminal provided at the tip portion of the elastically deformable portion.

[0027]

[22] Aspect 22 of the present invention is such that, in the contact terminal of Aspect 20 or 21, the metal layer extends linearly at the tip portion, and the contact terminal may satisfy the following formula (1). L b <L a ×1 / 10 ··· (1) However, in the above formula (1), L a is the length of the first conductive path, and L b is the length of the metal layer.

[0028]

[23] Aspect 23 of the present invention is such that, in any one of Aspects 20 to 22, the contact terminal includes a plurality of the contact portions, and the plurality of contact portions may be a contact terminal provided at a single tip portion.

[0029]

[24] Aspect 24 of the present invention is such that, in the contact terminal of any one of Aspects 1 to 23, the pressing member may be a contact terminal including an elastically deformable portion that elastically deforms when relatively pressing the contact portion against the first conductive member, and a support portion that supports the elastically deformable portion.

[0030]

[25] Aspect 25 of the present invention is such that, in the contact terminal of Aspect 24, the pressing member is made of a resin material, and the elastically deformable portion and the support portion may be integrally formed.

[0031]

[26] Aspect 26 of the present invention is such that, in the contact terminal of Aspect 24 or 25, a virtual straight line passing through the tip of the pressing member and parallel to the center line of the support portion may be offset with respect to the center line.

[0032]

[27] Aspect 27 of the present invention is a contact terminal in any one of Aspects 1 to 26, wherein the pressing member includes an elastically deformable portion that elastically deforms when the contact portion is relatively pressed against the first conductive member, and a deformation restricting portion that restricts the elastic deformation of the elastically deformable portion by contacting the first conductive member.

[0033]

[28] Aspect 28 of the present invention is a contact terminal according to Aspect 27, wherein the pressing member is made of a resin material, and the elastically deformable portion and the deformation restricting portion are integrally formed.

[0034]

[29] Aspect 29 of the present invention is a contact terminal according to Aspect 28, wherein the pressing member includes a support portion that supports the elastically deformable portion and the deformation restricting portion, and the elastically deformable portion, the deformation restricting portion, and the support portion are integrally formed.

[0035]

[30] Aspect 30 of the present invention is a contact terminal in any one of Aspects 1 to 29, wherein the contact portion contacts the first conductive member as the contact terminal relatively moves with respect to the first conductive member.

[0036]

[31] Aspect 31 of the present invention is a contact terminal according to Aspect 30, wherein the pressing direction of the contact portion by the pressing member is parallel to the direction of relative movement of the contact terminal with respect to the first conductive member.

[0037]

[32] Aspect 32 of the present invention is a contact terminal in any one of Aspects 1 to 31, wherein the signal passing through the first conductive path is a high-frequency signal of 1 GHz or higher.

[0038]

[33] Aspect 33 of the present invention is a contact terminal in any one of Aspects 1 to 32, wherein the contact terminal is a terminal that electrically connects the first conductive member and the second conductive member, and the first conductive path is electrically connected to the second conductive member.

[0039]

[34] Aspect 34 of the present invention is a terminal assembly including a plurality of contact terminals of any one of Aspects 1 to 33 and a support member that supports the plurality of contact terminals.

[0040]

[35] Aspect 35 of the present invention is the terminal assembly of Aspect 34, in which the support member includes a wiring board having a second conductive path, and the first conductive path is connected to the second conductive path. It may be a terminal assembly.

[0041]

[36] Aspect 36 of the present invention is the terminal assembly of Aspect 35, in which a second conductive member may be connected to the second conductive path.

[0042]

[37] Aspect 37 of the present invention is the terminal assembly of any one of Aspects 34 to 36, in which the plurality of contact terminals may be arranged such that the pressing members face each other.

[0043]

[38] Aspect 38 of the present invention is a device test apparatus for testing a DUT, including a first conductive member, a second conductive member, and a terminal assembly of any one of Aspects 34 to 37, and the first conductive path of the contact terminal is electrically connected to the second conductive member, and the contact terminal is a device test apparatus that electrically connects the first conductive member and the second conductive member. [Advantages of the Invention]

[0044] In the present invention, since the pressing member and the electrical connection member are independent of each other, it is possible to reduce the mutual constraints between the design of the pressing member and the design of the electrical connection member, and improve the degree of freedom in the design of the contact terminal. [Brief Description of the Drawings]

[0045]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

DETAILED DESCRIPTION OF THE INVENTION

[0046] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0047] FIG. 1 is a schematic cross-sectional view showing the overall configuration of a device test apparatus 1 according to an embodiment of the present invention, and FIG. 2 is an exploded cross-sectional view showing a DSA 20 and a motherboard 30 in this embodiment, which is a view corresponding to part II of FIG. 1.

[0048] The device test apparatus 1 in this embodiment is an apparatus for testing a device under test (hereinafter also simply referred to as "DUT") 200. Although not particularly limited, specific examples of the DUT 200 to be tested include, for example, memory devices, logic devices, or semiconductor devices such as SoC (System on chip). The device test apparatus 1 tests the electrical characteristics of this semiconductor device 200.

[0049] As shown in FIG. 1, this device test apparatus 1 includes a tester 10 that executes a test on the DUT 200, and a handler 130 that handles the DUT 200 and presses the DUT 200 against a socket 21. The tester 10 includes a DSA 20, a motherboard 30, a test head 110, and a main frame 120. Note that the configuration of the tester 10 is not particularly limited as long as it includes a terminal assembly 40 described later.

[0050] As shown in FIGS. 1 and 2, a DSA (Device Specific Adapter) 20 includes a socket 21 and a wiring board 23. This DSA 20 is electrically connected to the test head 110 via the motherboard 30. This DSA 20 is detachable from the motherboard 30. The DSA 20 is designed according to the type of the DUT 200 and is replaced with a corresponding one when the type of the DUT 200 is switched. Note that the number of DSA 20s mounted on the motherboard 30 is not particularly limited, and a plurality of DSA 20s may be mounted on the motherboard 30.

[0051] During the test of the DUT200, the DUT200 is pressed against the socket 21 by the handler 130, so that the DUT200 and the socket 21 are electrically connected. The socket 21 includes a plurality of contacts 22 that respectively contact the terminals 210 of the DUT200. Although not particularly limited, specific examples of the contact 22 include, for example, a pogo pin, a vertical probe pin, a cantilever probe pin, an anisotropic conductive rubber sheet, bumps provided on a membrane, or a contact manufactured using MEMS technology.

[0052] The wiring board 23 is a rigid wiring board on which the above socket 21 is mounted on its upper surface. Although not particularly shown, a socket guide for positioning the DUT200 with respect to the socket 21 may be mounted on the socket 21. The wiring board 23 has a plurality of pads 24 on the lower surface of the wiring board 23. The plurality of pads 24 are arranged on the lower surface of the wiring board 23 so as to correspond to a plurality of contact portions 70 (described later) of the terminal assembly 40 of the motherboard 30. The socket 21 and the pads 24 are electrically connected via a conductive path (not shown) such as a wiring pattern or a through hole formed in the wiring board 23.

[0053] In addition, in FIGS. 1 and 2, only one socket 21 is mounted on the wiring board 23, but actually, a large number of sockets 21 are mounted on one wiring board 23. For this reason, in the present embodiment, tens of thousands of pads 24 are provided on the lower surface of the wiring board 23. Further, the wiring board 23 of the present embodiment has a size of about 1200 mm × 500 mm, for example. Note that the number of pads 24 included in the wiring board 23 and the size of the wiring board 23 are not particularly limited to the above.

[0054] The mother board 30 is a repeater that electrically connects the DSA 20 and the test head 110. This mother board 30 includes a housing 31, a terminal assembly 40, and a plurality of coaxial cables 100. One end (the upper end in FIG. 2) of the coaxial cable 100 is connected to a wiring board 90 (described later) of the terminal assembly 40. When the DSA 20 is mounted on the mother board 30, the contact portion 70 of the terminal assembly 40 is pressed against the pad 24 of the DSA 20 described above, and when the contact portion 70 contacts the pad 24, the wiring board 23 of the DSA 20 and the coaxial cable 100 are electrically connected. The configuration of the terminal assembly 40 will be described in detail later.

[0055] As shown in FIG. 1, the test head 110 houses a test module (pin electronics card) 111 for testing the DUT 200 inside. This test module 111 is a wiring board on which electronic components such as test devices used for testing the DUT 200 are mounted. This test module 111 is electrically connected to the coaxial cable 100 via a connector (not shown) connected to the other end of the coaxial cable 100 of the mother board 30. This test module 111 tests the DUT 200 by transmitting and receiving test signals to and from the DUT 200 via the DSA 20 and the mother board 30. The test head 110 is connected to the main frame 120 via a cable 112.

[0056] The main frame (tester body) 120 is, for example, a computer that executes a program, and communicates with each test module 111 in the test head 110 according to the program to control each test module 111. Each test module 111 generates a test signal according to an instruction from the main frame 120 and outputs the test signal to the DUT 200.

[0057] Although not particularly shown, the handler 130 includes, for example, a transfer device that transfers a test tray on which the DUT 200 is mounted above the DSA 20, a pressing device that presses the DUT 200 against the socket 21 of the DSA 20, and a sorting device that sorts the DUT 200 while taking it out from the test tray according to the test results.

[0058] Further, the handler 130 includes a chamber 131 as a temperature adjustment device that applies high-temperature or low-temperature thermal stress to the DUT 200. This chamber 131 is composed of a thermostatic bath capable of maintaining the temperature inside the tank at a desired temperature. Therefore, this device test apparatus 1 can test the DUT 200 while applying thermal stress to the DUT 200, that is, it can perform a so-called high-temperature test and a low-temperature test.

[0059] The above-described DSA 20 enters the chamber 131 through the opening 132 formed in the handler 130, and the socket 21 of the DSA 20 is disposed inside the chamber 131. When the DUT 200 is pressed against the socket 21 of the DSA 20 by the pressing device of the handler 130, the DUT 200 and the socket 21 are electrically connected.

[0060] Note that the handler 130 may include a contact arm that sucks and holds the DUT 200 and moves it without using a test tray, and presses the DUT 200 with the contact arm. In this case, the handler 130 may include a heater or a heat sink provided at the tip of the contact arm instead of the chamber 131 as a temperature adjustment device. Alternatively, the handler 130 may include a heater or a heat sink provided at the tip of the contact arm in addition to the chamber 131 as a temperature adjustment device.

[0061] Next, the configuration of the terminal assembly 40 included in the motherboard 30 described above will be described in detail with reference to FIGS. 3 to 10.

[0062] FIG. 3 is a perspective view of the terminal assembly 40 in the present embodiment as viewed from the front, and FIG. 4 is a perspective view of the terminal assembly 40 in the present embodiment as viewed from the rear. FIG. 5 is a cross-sectional view showing the terminal assembly 40 in the present embodiment, and is a view along line V-V in FIG. 3. FIG. 6 is a plan view showing the contact terminal 50 and the wiring board 90 in the present embodiment, and FIG. 7 is an exploded perspective view showing the contact terminal 50 in the present embodiment. FIG. 8 is a side view showing the pressing member 60 in the present embodiment. FIG. 9 is a bottom view showing the electrical connection member 80 in the present embodiment. FIG. 10 is a partial cross-sectional view showing the electrical connection member 80 in the present embodiment, and is a view along line X-X in FIG. 9.

[0063] As shown in FIGS. 3 to 5, the motherboard 30 includes a plurality of terminal assemblies 40. As described above, this terminal assembly 40 electrically connects the pad 24 of the wiring board 23 of the DSA 20 and the coaxial cable 100 of the motherboard 30. This wiring board 23 corresponds to an example of the "first conductive member" in the aspect of the present invention, and the coaxial cable 100 corresponds to an example of the "second conductive member" in the aspect of the present invention. Each terminal assembly 40 includes a contact terminal 50 and a wiring board 90 that supports the contact terminal 50.

[0064] In FIGS. 3 to 5, only two terminal assemblies 40 are shown, and each terminal assembly 40 includes only one or two contact terminals 50. However, in reality, the motherboard 30 includes a large number of terminal assemblies 40 each having a large number of contact terminals 50. As a result, the motherboard 30 has a number (tens of thousands in this embodiment) of contact portions 70 corresponding to the number of pads 24 of the DSA 20.

[0065] As shown in FIGS. 5 to 7, the contact terminal 50 includes a pressing member 60, a contact portion 70, and an electrical connection member 80. The contact portion 70 is detachably in contact with the pad 24 of the wiring board 23 of the above-described DSA 20. The pressing member 60 holds the contact portion 70 at the tip portion 611 of the pressing member 60 and presses (applies pressure to) the contact portion 70 relative to the pad 24. In the present embodiment, when the pad 24 is pressed against the contact portion 70, the pressing member 60 pushes back the contact portion 70 toward the pad 24. The electrical connection member 80 is connected to the contact portion 70 and is electrically connected to the coaxial cable 100 via the wiring board 90. Since all the contact terminals 50 provided in the mother board 30 basically have the same configuration, the configuration of the central contact terminal 50 among the three contact terminals 50 shown in FIG. 5 will be typically described.

[0066] As shown in FIGS. 7 and 8, the pressing member 60 includes an elastic deformation portion 61, a deformation restricting portion 62, and a support portion 63. The pressing member 60 is made of a material having electrical insulation and being elastically deformable. Although not particularly limited, specific materials constituting the pressing member 60 may include, for example, resin materials. The elastic deformation portion 61, the deformation restricting portion 62, and the support portion 63 are integrally formed by resin molding. Note that the pressing member 60 may be made of a metal material. In this case, an insulating layer is formed by performing an insulation treatment on the surface of the pressing member 60.

[0067] In contrast, as will be described later, the electrical connection member 80 is a flexible printed wiring board. Therefore, in the present embodiment, the pressing member 60 and the electrical connection member 80 are configured by completely independent members. By making the pressing member 60 and the electrical connection member 80 independent of each other in this way, electrical constraints on mechanical design can be minimized, and the pressing member 60 can be freely designed. For example, while minimizing the impact on electrical performance, the spring stroke (the amount of elastic deformation along the Z direction in the figure) of the pressing member 60 can be increased, thereby expanding the range capable of absorbing the height variation of the pad 24 caused by the warpage of the wiring board 23 and the processing accuracy of the DSA 20.

[0068] Also, when performing a low-temperature test (for example, a test of the DUT at -50°C to -40°C) in the device test apparatus, if the contact terminal is made of a metal material, heat may be transferred from the conductor of the coaxial cable to the inside of the mother board through this contact terminal, and there is a risk that the inside of the mother board will be cooled and condensation will occur. In contrast, by configuring the pressing member 60 with a resin material, heat transfer from the chamber 131 of the handler 130 to the inside of the mother board 30 can be suppressed, and condensation inside the mother board 30 can be suppressed. Also, since the resin material has a relatively low Young's modulus, a large spring stroke can be ensured even in a narrow space.

[0069] The elastic deformation portion 61 is a portion that extends in the pressing direction (the Z direction in the figure) of the pressing member 60. The deformation limiting portion 62 is also a portion that extends in the pressing direction (the Z direction in the figure) of the pressing member 60. And to the support portion 63, the rear end portion (the end portion on the -Z side in the figure) of the elastic support portion is connected, and the rear end portion (the end portion on the -Z side in the figure) of the deformation limiting portion 62 is also connected. That is, the elastic deformation portion 61 and the deformation limiting portion 62 are supported by the support portion 63. Note that the pad 24 side (the +Z direction side in the figure) is the front in the contact terminal 50, and the coaxial cable 100 side is the rear (the -Z direction side in the figure) in the contact terminal 50, so the above pressing direction is also the front-rear direction of the contact terminal 50.

[0070] As shown in FIGS. 6 and 7, a plurality (seven in this embodiment) of contact portions 70 are provided at the tip portion 611 of the elastic deformation portion 61. Each contact portion 70 linearly extends from the tip 611b of the tip portion 611 toward the rear of the elastic deformation portion 61 and has a length L b (see FIG. 5). The plurality of contact portions 70 are arranged at intervals from each other. Note that the number of the contact portions 70 provided in the contact terminal 50 is not particularly limited as described above.

[0071] Each contact portion 70 is a thin film formed in a tip region 611a which is the surface of the tip portion 611. The tip region 611a is a region that extends rearward from the tip 611b in the tip portion 611 of the elastic deformation portion 61, and the tip 611b is included in the tip region 611a. This thin film is made of a material having conductivity. Although not particularly limited, examples of the material constituting the contact portion 70 include metal materials such as copper. This thin film is, for example, a plating layer formed by a plating method such as electrolytic plating or electroless plating. Note that the method for forming the thin film of the contact portion 70 is not limited to the above-described plating method. For example, the contact portion 70 may be formed by a physical vapor deposition method (PVD) such as vacuum evaporation or sputtering, or a chemical vapor deposition method (CVD).

[0072] Alternatively, instead of the above-described thin film, the contact portion 70 may be formed of a metal foil. Although not particularly limited, examples of the metal foil constituting the contact portion 70 include a copper foil and a silver-plated foil. In this case, the pressing member 60 and the contact portion 70 are integrated by insert molding. Alternatively, the contact portion 70 may be fixed to the pressing member 60 with an adhesive.

[0073] In this embodiment, the plurality of contact portions 70 include three signal contact portions 71 and four ground contact portions 72. Each signal contact portion 71 is arranged between the ground contact portions 72. The signal contact portion 71 is connected to a signal line 85 (described later) of the electrical connection member 80. On the other hand, the ground contact portion 72 is connected to a ground line 86 (described later) of the electrical connection member 80.

[0074] As shown in FIG. 8, the elastic deformation portion 61 is a leaf spring having a generally arcuate (substantially circular arc-shaped) shape protruding in the +X direction in the drawing as a whole. This elastic deformation portion 61 includes the above-described tip portion 611 provided with the contact portion 70, and a spring portion 612 that elastically deforms and presses the tip portion 611 toward the pad 24. The tip portion 611 and the spring portion 612 are integrally formed. The tip portion 611 holds a plurality of contact portions 70. That is, a plurality of contact portions 70 are provided on a single (one) tip portion 611 (the same tip portion 611). Therefore, the relative positional relationship between the contact portions 70 can be ensured with high accuracy, and the occurrence of a short circuit between adjacent pads 24 due to the contact portions 70 can be suppressed. As shown by the broken line in FIG. 8, the spring portion 612 of the elastic deformation portion 61 can be elastically deformed when the tip 611b of the elastic deformation portion 61 is pressed by the pad 24. That is, this elastic deformation portion 61 includes a resin spring. On the other hand, when the pressing member 60 is made of a metal material, this elastic deformation portion 61 includes a metal spring. In FIG. 8, the contact portion 70 is omitted.

[0075] Here, as shown in FIG. 8, a virtual straight line VL passing through the tip 611b of the elastic deformation portion 61 is displaced with respect to the center line CL of the support portion 63. More specifically, the virtual straight line VL is displaced in a direction opposite to the protruding direction of the arcuate shape of the elastic deformation portion 61 (the -X direction in the drawing) with respect to the center line CL. For this reason, the contact portion 70 can be rubbed against (scrubbed against) the pad 24, and good electrical connection between the contact terminal 50 and the pad 24 can be ensured. Note that both the above-described virtual straight line VL and the center line CL are straight lines parallel to the pressing direction (the Z direction in the drawing) of the pressing member 60.

[0076] The deformation restricting portion 62 has a contact portion 621 at its tip. This contact portion 621 is located on the rear end side (the -Z direction side in the figure) with respect to the tip 611b of the elastic deformation portion 61. As shown by the dashed line in Fig. 8, when the tip 611b of the elastic deformation portion 61 is pressed by the pad 24, the contact portion 621 contacts the pad 24, thereby suppressing breakage of the elastic deformation portion 61 due to excessive deformation.

[0077] In this embodiment, a plurality of pressing members that individually hold the plurality of contact portions 70 are integrated as one pressing member 60. For this reason, the relative positional relationship between the contact portions 70 can be ensured with high accuracy, and the occurrence of short - circuit between adjacent pads 24 due to the contact portions 70 can be suppressed. Further, by integrally forming the plurality of pressing members as one pressing member 60 with a resin material, the cost of the contact terminal 50 can be reduced. Note that the contact terminal 50 may include a plurality of pressing members that individually hold the plurality of contact portions 70. Alternatively, for example, a pressing member may include a plurality of elastic deformation portions that individually hold the plurality of contact portions 70, a plurality of deformation restricting portions may be integrated as one deformation restricting portion 62, and a plurality of support portions may also be integrated as one support portion 63, and one support portion 63 may support the plurality of elastic deformation portions and one deformation restricting portion 62.

[0078] The electrical connection member 80 is composed of a single flexible printed circuit board (FPC: Flexible Printed Circuit) having flexibility. In this embodiment, as described above, since the pressing member 60 and the electrical connection member 80 are independent members from each other, an FPC can be adopted as the electrical connection member 80, and a transmission line having transmission performance for transmitting high - frequency signals can be designed independently of the design of the pressing member 60.

[0079] This electrical connection member 80 (hereinafter also simply referred to as "FPC80") includes, as shown in Figs. 9 and 10, first to fourth insulating layers 81 - 84, a plurality (three in this embodiment) of signal lines 85, a plurality (four in this embodiment) of ground lines 86, and first and second ground layers 87, 88.

[0080] The first to fourth insulating layers 81 to 84 are all flexible films made of materials having electrical insulation properties. Specific examples of the materials constituting the first to fourth insulating layers 81 to 84 include, for example, polyimide (PI), liquid crystal polymer (LCP), and polyethylene terephthalate (PET).

[0081] As shown in FIG. 10, signal lines 85 and ground lines 86 are provided on the lower surface of the first insulating layer 81. The signal line 85 functions as a transmission path for transmitting electrical signals between the test head 110 and the DUT 200. On the other hand, the ground line 86 is connected to the ground and functions as an electromagnetic shielding layer for shielding noise. In the device test apparatus 1 described above, the electrical signal flowing through the signal line 85 is a high-frequency electrical signal, an electrical signal of 1 GHz or more, or an electrical signal of 10 GHz or more.

[0082] The signal line 85 and the ground line 86 are formed, for example, by etching a copper foil laminated on the first insulating layer 81 into a predetermined shape. As shown in FIGS. 6, 7, and 9, the signal line 85 and the ground line 86 linearly extend from the end on the front end side (the +Z direction side in the figure) to the end on the rear end side (the -Z direction side in the figure) of the electrical connection member 80, and have a length L a (see FIGS. 5 and 9).

[0083] Note that the number of the wirings 85 and 86 provided in the FPC 80 is not particularly limited to the above, and can be set, for example, according to the number of the contact portions 70 provided in the contact terminals 50. Also, the shape and arrangement of the wirings 85 and 86 provided in the FPC 80 are not particularly limited to the above. Instead of swapping the coaxial cable 100, the shape and arrangement of the wirings 85 and 86 of the FPC 80 may be changed.

[0084] As shown in FIG. 10, the second insulating layer 82 is stacked on the lower surface of the first insulating layer 81 so as to cover the signal line 85 and the ground line 86. The signal line 85 and the ground line 86 are arranged at intervals. Therefore, the signal line 85 is surrounded by a resin material (insulator) over its entire circumference. Note that the first insulating layer 81 and the second insulating layer 82 may be adhered by an adhesive having electrical insulating properties.

[0085] As described above, in this embodiment, since the entire circumference of the signal line 85 is surrounded by the resin material, even if the spring stroke of the pressing member 60 is increased, the dielectric constant and thickness of the insulator existing around the signal line 85 do not change. Therefore, even when the pressing member 60 is elastically deformed, the electrical length of the signal line 85 is always constant, and fluctuations in the impedance of the signal line 85 can be suppressed, so that variations in transmission characteristics among a large number of signal lines 85 can be suppressed. Further, since the entire circumference of the signal line 85 is surrounded by the resin material, the generation of leakage current between the signal line 85 and the ground line 86 can be suppressed.

[0086] The first ground layer 87 is disposed on the upper surface of the first insulating layer 81. Further, the third insulating layer 83 is stacked on the upper surface of the first insulating layer 81 so as to cover the first ground layer 87. Note that the first insulating layer 81 and the third insulating layer 83 may be adhered by an adhesive having electrical insulating properties. The first ground layer 87 is a so-called solid pattern and is formed by etching a copper foil into a predetermined shape. The first ground layer 87 faces the signal line 85 through the first insulating layer 81. The first ground layer 87 is electrically connected to the ground line 86 through a through hole 871 and functions as an electromagnetic shielding layer for shielding noise.

[0087] On one hand, the second ground layer 88 is disposed on the lower surface of the second insulating layer 82. Further, a fourth insulating layer 84 is stacked on the lower surface of the second insulating layer 82 so as to cover the second ground layer 88. Note that the second insulating layer 82 and the fourth insulating layer 84 may be adhered by an adhesive having electrical insulation properties. This second ground layer 88 is also a so-called solid pattern and is formed by etching a copper foil into a predetermined shape. This second ground layer 88 faces the signal line 85 via the first insulating layer 81. Also, this second ground layer 88 is electrically connected to the ground line 86 via the through hole 881 and functions as an electromagnetic shielding layer for shielding noise.

[0088] As described above, the FPC 80 of this embodiment has a stripline structure in which the signal line 85 is surrounded by the ground line 86 and the ground layers 87 and 88 on all four sides. Thereby, good shielding performance can be ensured, and even if the spring stroke of the pressing member 60 is lengthened, the occurrence of crosstalk between the signal lines 85 can be suppressed, and the variation in transmission characteristics among a large number of signal lines 85 can be suppressed. Also, even if the signal lines 85 are arranged at high density on the mother board 30, the deterioration of crosstalk characteristics can be suppressed, so that both high density and wide bandwidth can be achieved. Also, in this embodiment, since the electrical connection member 80 is an FPC, the cost of the contact terminal 50 having a high-density wiring can be reduced.

[0089] Here, as shown in the following formula (2), the length L b (see FIG. 5) of the above-described signal contact portion 71 is less than 1 / 10 of the length L a (see FIGS. 5 and 9) of the signal line 85 of this FPC 80. That is, in this embodiment, since the stripline structure is maintained up to the immediate vicinity of the pad 24, good shielding performance can be ensured. L b < L a × 1 / 10 ··· (2)

[0090] Note that the structure of the FPC 80 is not particularly limited as described above. As shown in FIG. 11, the FPC 80 may have a microstrip line structure. FIG. 11 is a partial cross-sectional view showing a first modification example of the electrical connection member 80 in the present embodiment. The FPC 80 shown in FIG. 11 is different from the FPC 80 shown in FIG. 10 in that it does not include a fourth insulating layer 84, a second ground layer 88, and a through hole 881.

[0091] Also, as shown in FIG. 12, the FPC 80 may have a slit 89. FIG. 12 is a plan view showing a second modification example of the electrical connection member 80 in the present embodiment. This slit 89 is disposed between the signal line 85 and the ground line 86 and penetrates the first to fourth insulating layers 81 to 84 in the thickness direction thereof. Thereby, the FPC 80 having a multilayer structure can be made more flexible. Note that the slit 89 may be formed in at least one of the first to fourth insulating layers 81 to 84. Also, the position of the slit 89 in the FPC 80 is not particularly limited as described above.

[0092] Also, as shown in FIGS. 13 and 14, a microstrip line structure may be formed in the contact portion 70. FIG. 13 is a perspective view showing the contact portion 70 formed at the tip portion 611 of the pressing member 60 in another embodiment of the present invention, FIG. 14 is a cross-sectional view of the tip portion 611 of the pressing member 60 in another embodiment of the present invention, and is a view along line XIV-XIV of FIG. 13.

[0093] Specifically, as shown in FIGS. 13 and 14, a through hole 613 is formed in the tip portion 611 of the pressing member 60, a signal contact portion 71 is formed on the inner surface of one side (the -Z direction side in the figure) of the through hole 613, and a third ground layer 73 is formed on the inner surface of the other side (the +Z direction side in the figure) of the through hole 613. Therefore, this third ground layer 73 faces the signal contact portion 71 with a gap therebetween. This third ground layer 73 is electrically connected to a ground contact portion 72 adjacent to the signal contact portion 71 via a connection portion 74. Thereby, good shielding performance can be ensured closer to the pad 24.

[0094] As shown in FIG. 9, the FPC 80 does not have the second and fourth insulating layers 82 and 84 and the second ground layer 88 at both ends of the FPC 80 (both ends in the Z direction in the figure), and the signal line 85 and the ground line 86 are exposed in the -X direction in the figure.

[0095] Then, as shown in FIGS. 5 to 7, the FPC 80 is attached to the pressing member 60 such that the fourth insulating layer 84 faces the elastic deformation portion 61. At this time, one end 851 (the +Z direction side in the figure) of the signal line 85 faces the signal contact portion 71, and one end 861 (the +Z direction side in the figure) of the ground line 86 faces the ground contact portion 72. The end 851 of the signal line 85 and the signal contact portion 71 are connected via, for example, a conductive film (ACF). Similarly, the end 861 of the ground line 86 and the ground contact portion 72 are also connected via, for example, a conductive film (ACF). One end (the +Z direction side in the figure) of the FPC 80 is fixed to the pressing member 60 via this conductive film.

[0096] Note that instead of the conductive film, the contact portions 71 and 72 and the wirings 85 and 86 may be connected by a conductive adhesive. Alternatively, the end of the FPC 80 may be fixed to the pressing member 60 by mechanical means such as screws or clamps to connect the contact portions 71 and 72 and the wirings 85 and 86. Alternatively, the end of the FPC 80 may be fixed to the pressing member 60 and the contact portions 71 and 72 and the wirings 85 and 86 may be connected by depressurizing the inside of a tube that wraps the end of the FPC 80 and the pressing member 60. Alternatively, when the contact portions 71 and 72 are thin films, the contact portions 71 and 72 and the wirings 85 and 86 may be connected during the above-described insert molding.

[0097] As described above, the pressing member 60 and the electrical connection member 80 are fixed only at the tip portion of the electrical connection member 80, and the pressing member 60 and the electrical connection member 80 are not fixed at portions other than the tip portion. Therefore, the electrical connection member (FPC) 80 can be deformed relatively freely with respect to the pressing member 60. Note that the pressing member 60 and the electrical connection member 80 may be fixed by an adhesive or the like at portions other than the tip portion of the electrical connection member 80.

[0098] The contact terminal 50 described above is supported by the wiring board 90. Although not particularly limited, the contact terminal 50 is supported by the wiring board 90 by fixing the support portion 63 of the pressing member 60 to the edge portion of the wiring board 90 via the fixing member 95. Note that the method of fixing the contact terminal 50 to the wiring board 90 is not particularly limited to the above.

[0099] This wiring board 90 is a rigid wiring board including a base material 91, a signal line 92, and a ground line 93. The base material 91 is made of a material having electrical insulation properties such as glass epoxy resin, for example. The signal line 92 and the ground line 93 are provided on the upper surface of the base material 91. The signal line 92 and the ground line 93 linearly extend from the end portion on the front end side (+Z direction side in the figure) of the wiring board 90 toward the rear end side (-Z direction side in the figure) and are arranged at intervals. The signal line 92 and the ground line 93 are formed by etching a copper foil into a predetermined shape. Although not particularly shown, this wiring board 90 includes a ground layer inside. Note that the signal line 92 and the ground line 93 may pass through the inside of the wiring board 90.

[0100] Note that the number of wirings 92 and 93 included in the wiring board 90 is not particularly limited to the above, and can be set according to, for example, the number of contact portions 70 included in the contact terminal 50. Also, the shape and arrangement of the wirings 92 and 93 included in the wiring board 90 are not particularly limited to the above. Instead of swapping the coaxial cable 100, the shape and arrangement of the wirings 92 and 93 of this wiring board 90 may be changed.

[0101] And the FPC 80 of the contact terminal 50 supported by the wiring board 90 is connected to this wiring board 90. Specifically, as shown in FIG. 6, the end 852 on the other side (the -Z direction side in the figure) of the signal line 85 of the FPC 80 faces the end 921 on one side (the +Z direction side in the figure) of the signal line 92 of the wiring board 90, and the end 862 on the other side (the -Z direction side in the figure) of the ground line 86 of the FPC 80 faces the end 931 on one side (the +Z direction side in the figure) of the ground line 93 of the wiring board 90. And the ends 852 and 921 of the signal lines 85 and 92 are connected to each other via, for example, a conductive film (ACF). Similarly, the ends 862 and 931 of the ground lines 86 and 93 are also connected to each other via, for example, a conductive film (ACF).

[0102] In FIGS. 3 to 5, since the lower terminal assembly 40 includes two contact terminals 50 respectively connected to the upper and lower surfaces of the wiring board 90, the wiring board 90 has wirings 92 and 93 on the upper and lower surfaces. These two contact terminals 50 are arranged such that the deformation restricting portions 62 of the pressing member 60 are in contact with each other. Note that in FIGS. 3 to 5, the upper terminal assembly 40 may include two upper and lower contact terminals 50. Also, in FIGS. 3 and 4, only one contact terminal 50 is arranged in the longitudinal direction (the Y direction in the figure) of the wiring board 90, but actually, a plurality of contact terminals 50 are arranged in the longitudinal direction (the Y direction in the figure) of the wiring board 90. Alternatively, one contact terminal 50 may have a width corresponding to the entire region in the longitudinal direction (the Y direction in the figure) of the wiring board 90.

[0103] A coaxial cable 100 is connected to the terminal assembly 40 described above. Specifically, as shown in FIGS. 5 and 6, the inner conductor 101 of the coaxial cable 100 is connected to the end 922 on the other side (the -Z direction side in the figure) of the signal line 92 of the wiring board 90 by soldering or the like. Also, the outer conductor 102 (for example, a braided shield) of the coaxial cable 100 is connected to the end 932 on the other side (the -Z direction side in the figure) of the ground line 93 of the wiring board 90 via a connecting member 105.

[0104] Also, as shown in FIG. 2, the wiring board 23 of the DSA 20 is fixed to the wiring board 90 of the terminal assembly 40 by bolts 25, whereby the DSA 20 is mounted on the motherboard 30. With the fixing of these bolts 25, all the pads 24 of the DSA 20 simultaneously come into contact with and press against all the contact portions 70 provided in all the terminal assemblies 40, and the contact portions 70 electrically connect the DSA 20 and the motherboard 30. Note that the method of fixing the DSA 20 to the motherboard 30 is not particularly limited to the above, and for example, a mechanical clamp or the like may be used.

[0105] As described above, in the present embodiment, since the pressing member 60 and the electrical connection member 80 are independent members, it is possible to reduce the mutual constraints between the design of the pressing member 60 and the design of the electrical connection member 80, and it is possible to improve the degree of freedom in the design of the contact terminal 50.

[0106] Also, in the present embodiment, since the pressing member 60 and the electrical connection member 80 are independent members, by changing the shape of the pressing member 60 without changing the electrical connection member 80, it is possible to realize various pressing forces and spring strokes while maintaining the electrical performance.

[0107] Also, in the present embodiment, since the pressing member 60 and the electrical connection member 80 are independent members, an FPC can be adopted as the electrical connection member 80, and independently of the design of the pressing member 60, it is possible to design a transmission line having transmission performance (such as impedance matching and shielding performance described above) for transmitting high-frequency signals.

[0108] Note that the embodiments described above are described to facilitate the understanding of the present invention and are not described to limit the present invention. Therefore, each element disclosed in the above embodiments is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

[0109] For example, in the above-described embodiment, the elastic deformation portion 61 of the pressing member 60 of the contact terminal 50 includes a resin spring, but the elastic deformation portion 61 may include a metal spring or an air spring. FIGS. 15(a) to 15(c) are cross-sectional views showing pressing members 60B to 60D which are the first to third modification examples of the pressing member in the present embodiment.

[0110] The elastic deformation portion 61B of the pressing member 60B shown in FIG. 15(a) includes a tip member (tip portion) 614 and a leaf spring (spring portion) 615. The tip member 614 is fixed to the tip of the leaf spring 615. The tip member 614 is made of a material having electrical insulation properties. Although not particularly limited, specific materials constituting the tip member 614 may include, for example, resin materials. The contact portion 70 is provided in the tip region 611a of the tip member 614. Similar to the elastic deformation portion 61 shown in FIGS. 6 and 7 described above, a plurality of contact portions 70 are provided on a single (one) tip member 614 (the same tip member 614). Therefore, the relative positional relationship between the contact portions 70 can be ensured with high accuracy, and the occurrence of a short circuit between adjacent pads 24 due to the contact portions 70 can be suppressed. And the electrical connection member 80 is connected to the contact portion 70 provided on the tip member 614.

[0111] On the other hand, the leaf spring 615 is made of a metal material and can be elastically deformed when the tip member 614 is pressed by the pad 24. That is, this pressing member 60B includes a metal spring. The rear end portion of this leaf spring 615 is supported by the support portion 63.

[0112] The elastic deformation portion 61C of the pressing member 60C shown in FIG. 15(b) includes a tip member (tip portion) 614, a shaft 616, and a coil spring (spring portion) 617. The tip member 614 is fixed to the tip of the shaft 616. On the other hand, the rear end of this shaft 616 is supported by the support portion 63. This shaft 616 can expand and contract in the pressing direction (Z direction in the figure) of the pressing member 60C.

[0113] The coil spring 617 is composed of a metallic material, and the shaft 616 is inserted into this coil spring 617. The coil spring 617 is interposed between the tip member 614 and the support portion 63 in a state where the coil spring 617 is compressed. That is, this pressing member 60C includes a metal spring. Note that the coil spring 617 may be composed of a resin material, and in this case, the pressing member 60C includes a resin spring.

[0114] The elastic deformation portion 61D of the pressing member 60D shown in FIG. 15(c) includes a tip member (tip portion) 614 and an air spring 618 (spring portion). The air spring 618 includes a front plate portion 618a, a rear plate portion 618b, and a bellows portion 618c. The bellows portion 618c is a cylindrical body that expands and contracts in the pressing direction (Z direction in the figure) of the pressing member 60C. This bellows portion 618c is interposed between the front plate portion 618a and the rear plate portion 618b, and forms an air chamber (sealed space) 618d that hermetically contains air by the front plate portion 618a, the rear plate portion 618b, and the bellows portion 618c. The tip member 614 is fixed to the front plate portion 618a of this air spring 618. When the tip member 614 is pressed by the pad 24, this air spring 618 pushes back the contact portion 70 toward the pad 24 as the air chamber 618d is compressed. In the example shown in FIG. 15(c), this air spring 618 is supported by the support portion 63 via the pipe 65, but is not particularly limited thereto, and the air spring 618 may be directly fixed to the support portion 63.

[0115] As shown in FIG. 15(c), an air supply device 66 may be connected to the air spring 618 via a pipe 65. A valve 67 is provided in the pipe 65. By opening and closing this valve 67, it is possible to seal the air chamber 618d of the air spring 618 or to communicate the air chamber 618d with the air supply device 66. By opening the valve 67 and supplying air from the air supply device 66, it is possible to adjust the pressure in the air chamber 618d. As a specific example of the air supply device 66, a pump can be exemplified. When the air supply device 66 is not connected to the air spring 618, the air chamber 618d is a sealed space filled with air.

[0116] Also, in the above-described embodiment, the electrical connection member 80 is constituted by a single FPC, but the electrical connection member 80 may be divided. In this case, the contact terminals 50 include a plurality of FPCs. Alternatively, instead of the FPC, a thin coaxial cable may be used as the electrical connection member 80.

Description of Reference Numerals

[0117] 1... Device test apparatus 10... Tester 20... DSA 21... Socket 23... Wiring board 24... Pad 30... Motherboard 40... Terminal assembly 50... Contact terminal 60, 60B to 60D... Pressing member 61, 61B to 61D... Elastic deformation part 611... Tip part 612... Spring part 614... Tip member 615... Leaf spring 616... Shaft 617... Coil spring 618... Air spring 62... Deformation limiting part 621... Contact part 63... Support part 70... Contact part 71…Signal contact part 72…Ground contact part 73…Third ground layer 74…Connection part 80…Electrical connection member (FPC) 81~84…First to fourth insulating layers 85…Signal line 851,852…Ends 86…Ground line 87,88…First and second ground layers 90…Wiring board 91…Base material 92…Signal line 921,922…Ends 93…Ground line 931,932…Ends 100…Coaxial cable 110…Test head 120…Main frame 130…Handler 200…DUT

Claims

1. A contact portion that detachably contacts the first conductive member, A pressing member that presses the contact portion against the first conductive member relatively, An electrical connection member including a first conductive path connected to the contact portion, and comprising a contact terminal. The pressing member and the electrical connection member are members independent of each other.

2. The contact terminal according to claim 1, The pressing member includes an elastic deformation portion that elastically deforms when the contact portion is relatively pressed against the first conductive member.

3. The contact terminal according to claim 2, The electrical length of the first conductive path is constant when the elastic deformation portion deforms.

4. The contact terminal according to claim 2, The electrical connection member includes an insulator surrounding the entire circumference of the first conductive path.

5. The contact terminal according to claim 2, The elastic deformation portion Is made of a resin material and is a resin spring that elastically deforms when the contact portion is relatively pressed against the first conductive member, Is made of a metal material and is a metal spring that elastically deforms when the contact portion is relatively pressed against the first conductive member, or An air spring that compresses when the contact portion is relatively pressed against the first conductive member.

6. The contact terminal according to claim 2, The pressing member is composed of a resin material, The elastic deformation portion includes a resin spring that elastically deforms when the contact portion is relatively pressed against the first conductive member.

7. The contact terminal according to claim 6, The contact terminal includes a plurality of the contact portions. The electrical connection member includes a plurality of the first conductive paths connected to the plurality of contact portions. The pressing member includes a plurality of the elastic deformation portions corresponding to the plurality of contact portions. The plurality of elastic deformation portions are integrally formed contact terminals. **Claim 8** The contact terminal according to claim 1, The contact terminal includes a plurality of the contact portions. The electrical connection member includes a flexible printed wiring board having flexibility. The flexible printed wiring board is a contact terminal including a plurality of the first conductive paths connected to the plurality of contact portions. **Claim 9** The contact terminal according to claim 8, The flexible printed wiring board, a first insulating layer, the plurality of first conductive paths provided on the first insulating layer, and a second insulating layer formed by overlapping the first insulating layer so as to cover the plurality of first conductive paths, is a contact terminal. **Claim 10** The contact terminal according to claim 9, The plurality of first conductive paths are arranged on the first insulating layer with intervals therebetween, is a contact terminal. **Claim 11** The contact terminal according to claim 9, The flexible printed wiring board has a slit disposed between the plurality of first conductive paths, is a contact terminal. **Claim 12** The contact terminal according to claim 10, The plurality of first conductive paths, a plurality of ground lines, and a plurality of signal lines respectively disposed between the ground lines, is a contact terminal. **Claim 13** The contact terminal according to claim 12, The flexible printed wiring board is provided on the first insulating layer and includes a contact terminal having a first ground layer facing the signal line through the first insulating layer.

14. The contact terminal according to claim 12, The flexible printed wiring board is provided on the second insulating layer and includes a contact terminal having a second ground layer facing the signal line through the second insulating layer.

15. The contact terminal according to claim 12, The contact portion includes a signal contact portion connected to the signal line and a ground contact portion connected to the ground line.

16. The contact terminal according to claim 15, The contact terminal includes a third ground layer electrically connected to the ground contact portion, The pressing member has a through hole through which the signal contact portion passes, The third ground layer is disposed in the through hole so as to face the signal contact portion with a gap therebetween.

17. The contact terminal according to claim 1, The contact portion includes a metal layer held by the pressing member, The metal layer is provided at the tip portion of the pressing member.

18. The contact terminal according to claim 17, The metal layer extends linearly at the tip portion, and satisfies the following formula (1). L ｂ < L ａ × 1 / 10... (1) However, in the above formula (1), L ａ is the length of the first conductive path, and L ｂ is the length of the metal layer.

19. The contact terminal according to claim 17, wherein the contact terminal includes a plurality of the contact portions, and the plurality of contact portions are provided at a single tip portion.

20. The contact terminal according to claim 1, wherein the pressing member includes an elastically deformable portion that elastically deforms when the contact portion is relatively pressed against the first conductive member, and a support portion that supports the elastically deformable portion.

21. The contact terminal according to claim 20, wherein the pressing member is made of a resin material, and the elastically deformable portion and the support portion are integrally formed.

22. The contact terminal according to claim 20, wherein a virtual straight line passing through the tip of the pressing member and parallel to the center line of the support portion is offset from the center line.

23. The contact terminal according to claim 1, wherein the pressing member includes an elastically deformable portion that elastically deforms when the contact portion is relatively pressed against the first conductive member, and a deformation restricting portion that restricts the elastic deformation of the elastically deformable portion by contacting the first conductive member.

24. The contact terminal according to claim 23, wherein the pressing member is made of a resin material, and the elastically deformable portion and the deformation restricting portion are integrally formed.

25. The contact terminal according to claim 24, wherein the pressing member includes a support portion that supports the elastically deformable portion and the deformation restricting portion. The elastic deformation part, the deformation limiting part, and the support part are integrally formed contact terminals.

26. A plurality of contact terminals according to any one of claims 1 to 25, and a support member that supports the plurality of contact terminals, a terminal assembly.

27. The terminal assembly according to claim 26, wherein the support member includes a wiring board having a second conductive path, and the first conductive path is connected to the second conductive path, a terminal assembly.

28. A device test apparatus for testing a DUT, a first conductive member, a second conductive member, comprising the terminal assembly according to claim 26, wherein the first conductive path of the contact terminal is electrically connected to the second conductive member, and the contact terminal is a device test apparatus that electrically connects the first conductive member and the second conductive member.

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