Non-contact measuring instrument and gain adjustment method

Abstract

To provide a non-contact measuring instrument in which the visibility has been improved while restricting a use area on a monitor screen when displaying at least one of sensitivity and a distance on a monitor, and to provide a gain adjustment method.SOLUTION: A non-contact measuring instrument comprises: a detector 12 for executing radiation of a measuring beam L toward a workpiece W, and light reception of reflection light LA reflected by the workpiece W; an arithmetic logical unit 34 for executing calculation of sensitivity of the detector 12 and a distance between the detector 12 and the workpiece W, on the basis of a reception light signal of the reflection light LA received by the detector 12; and a display control unit 36 for displaying the magnitude of sensitivity and the magnitude of a distance on a monitor 24. The display control unit 36 causes the monitor 24 to display: a sensitivity meter 42 in which at least one of a length and a display color changes according to the magnitude of sensitivity; and a distance meter 44 in which at least one of a length and a display color changes according to the magnitude of a distance.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a non-contact measuring instrument and a gain adjustment method used in this non-contact measuring instrument.

Background Art

[0002] A distance meter (non-contact measuring instrument) that measures the distance to a workpiece non-contact is known. This distance meter emits measurement light toward the workpiece and receives the reflected light of the measurement light reflected by the workpiece, and measures the distance to the workpiece non-contact based on the received signal obtained by receiving this reflected light. In distance measurement using this distance meter, in order to execute distance measurement in a state where the sensitivity of the distance meter is high, adjustment of the position and orientation of the distance meter with respect to the workpiece is performed in advance. This adjustment of the position and orientation includes adjustment of the incident angle of the measurement light with respect to the workpiece (angle adjustment), adjustment of the distance between the distance meter and the workpiece (distance adjustment), and the like.

[0003] FIG. 14 is an explanatory diagram for explaining an example of a method for adjusting the position and orientation of a conventional distance meter with respect to a workpiece. As shown in FIG. 14, in a conventional distance meter, a 2D (Dimensions) graph is displayed on a monitor based on the received signal received by the distance meter. In this 2D graph, the position of the signal waveform SG on the horizontal axis changes according to the distance between the workpiece and the distance meter, and the peak height of the signal waveform SG on the vertical axis changes according to the intensity (sensitivity) of the received signal. The operator performs angle adjustment and distance adjustment while observing the waveform position and peak height of the signal waveform SG displayed in real time on the monitor.

[0004] Also, as described in Patent Document 1, a plot graph in which the intensity of the received signal is plotted in time series is displayed on a monitor, and based on whether or not the peak value of the intensity of the received signal is equal to or greater than a predetermined threshold value, it is determined in real time whether or not the position and orientation of the distance meter are appropriate, and this determination result is superimposed and displayed on the plot graph. A method is also known.

[0005] Furthermore, there is also known a method of calculating the sensitivity in real time based on the received light signal received by the distance meter and digitally displaying (numerically displaying) the calculation result of this sensitivity on a monitor.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] However, in the method of displaying the 2D graph shown in FIG. 14 on a monitor, although only the information on the position and peak height of the signal waveform SG is required, since 2D display is performed, there is a problem that the usage area on the monitor screen becomes large. Also, regarding the method of displaying the plot graph described in Patent Document 1 above, similarly, there is a problem that the usage area on the monitor screen becomes large.

[0008] Furthermore, in the method of digitally displaying (numerically displaying) the sensitivity of the distance meter on a monitor, although the usage area on the monitor screen can be suppressed, the visibility deteriorates with respect to changes in sensitivity and distance, making it difficult to adjust the position and orientation of the distance meter. Specifically, in the case of digital display, the refresh rate of the monitor is generally 60 Hz, and for high-speed ones it is 144 Hz, so in static measurement, it may not be possible to distinguish the last two digits of the numerical display shown on the monitor.

[0009] The present invention has been made in view of such circumstances, and an object thereof is to provide a non-contact measuring instrument and a gain adjustment method that improve visibility while suppressing the usage area on the monitor screen when displaying at least one of sensitivity and distance on the monitor.

Means for Solving the Problems

[0010] The non-contact measuring instrument for achieving the object of the present invention includes a detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, an arithmetic unit that calculates the sensitivity of the detector based on the received light signal of the reflected light output from the detector, and a display control unit that causes a monitor to display the magnitude of the sensitivity calculated by the arithmetic unit. The display control unit causes the monitor to display a sensitivity meter in which at least one of the length and the display color changes according to the magnitude of the sensitivity.

[0011] According to this non-contact measuring instrument, when the sensitivity of the detector is displayed on the monitor, it is possible to improve the visibility while suppressing the usage area on the monitor screen.

[0012] The non-contact measuring instrument for achieving the object of the present invention includes a detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, an arithmetic unit that calculates the distance between the detector and the workpiece based on the received light signal of the reflected light received by the detector, and a display control unit that causes a monitor to display the magnitude of the distance calculated by the arithmetic unit. The display control unit causes the monitor to display a distance meter in which at least one of the length and the display color changes according to the magnitude of the distance.

[0013] According to this non-contact measuring instrument, when the distance between the detector and the workpiece is displayed on the monitor, it is possible to improve the visibility while suppressing the usage area on the monitor screen.

[0014] The non-contact measuring instrument for achieving the object of the present invention includes a detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, an arithmetic unit that calculates the sensitivity of the detector and the distance between the detector and the workpiece based on the received light signal of the reflected light received by the detector, and a display control unit that causes a monitor to display the magnitude of the sensitivity and the magnitude of the distance calculated by the arithmetic unit. The display control unit causes the monitor to display a sensitivity meter in which at least one of the length and the display color changes according to the magnitude of the sensitivity and a distance meter in which at least one of the length and the display color changes according to the magnitude of the distance.

[0015] According to this non-contact measuring machine, when the monitor displays the sensitivity indication of the detector and the distance indication between the detector and the workpiece, it is possible to improve the visibility while suppressing the usage area on the monitor screen.

[0016] In the non-contact measuring machine according to another aspect of the present invention, the sensitivity of the detector changes according to the distance and the incident angle of the measurement light with respect to the workpiece, and the maximum sensitivity distance, which is the distance at which the sensitivity is maximum, is known. The display control unit causes the monitor to display an index indicating the maximum sensitivity distance in the distance meter. Thereby, the distance between the detector and the workpiece can be easily adjusted to the maximum sensitivity distance or within a certain range thereof.

[0017] In the non-contact measuring machine according to another aspect of the present invention, the detector includes an amplifier for the received light signal.

[0018] A gain adjustment method for achieving the object of the present invention is a gain adjustment method for adjusting the gain of the amplifier of the non-contact measuring machine described above. Based on the distance meter and the index, a first step of adjusting the distance to a certain range based on the maximum sensitivity distance, a second step of adjusting the incident angle to an angle at which the sensitivity is maximum based on the sensitivity meter after the first step, and a third step of adjusting the gain of the amplifier based on the received light signal of the reflected light detected by the detector after the second step.

[0019] According to this gain adjustment method, the gain adjustment can be executed easily and in a short time.

[0020] In the gain adjustment method according to another aspect of the present invention, when the distance is adjusted to a certain range based on the maximum sensitivity distance in the first step based on the calculation result of the distance by the calculation unit, the display color of the distance meter is changed. Thereby, the operator can easily grasp that the distance has been adjusted to a certain range.

Effects of the Invention

[0021] The present invention can improve visibility while suppressing the usage area on the monitor screen when displaying at least one of sensitivity and distance on the monitor.

Brief Description of the Drawings

[0022]

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Embodiments for Carrying Out the Invention

[0023] [First Embodiment] FIG. 1 is an external view of a distance meter 10 (also referred to as a length measuring instrument) according to a first embodiment corresponding to a non-contact measuring instrument of the present invention. FIG. 2 is a block diagram of a device main body 20 of the distance meter 10 according to the first embodiment. As shown in FIGS. 1 and 2, the distance meter 10 is a portable type and measures the distance to a work W in a non-contact manner. This distance meter 10 is roughly divided into a detector 12 and a device main body 20.

[0024] The detector 12 is used in a distance meter 10 that employs various known distance measurement methods (including triangulation methods) such as, for example, the wavelength sweep method and the color confocal method. The detector 12 emits measurement light L toward the work W and receives the reflected light LA of the measurement light L reflected by the work W. In addition to a light source 14, a sensor head 15, and a light receiving sensor 16, the detector 12 includes optical members necessary for each distance measurement method such as the wavelength sweep method and the color confocal method, although not shown in the figure.

[0025] The light source 14 and the light receiving sensor 16 are provided inside the device main body 20. The sensor head 15 is connected to the device main body 20 (the light source 14 and the light receiving sensor 16) via an optical fiber cable 17. Note that at least one of the light source 14 and the light receiving sensor 16 may be built into the sensor head 15.

[0026] The light source 14 emits measurement light L toward the sensor head 15 via the optical fiber cable 17. In the distance measurement by the wavelength sweep method, the light source 14 emits wavelength sweep light as the measurement light L. A part of this measurement light L (wavelength sweep light) is split by a beam splitter (not shown) and then emitted as reference light toward a reference surface (not shown). Also, in the distance measurement by the color confocal method, the light source 14 emits white light as the measurement light L.

[0027] The sensor head 15 has an optical axis O1 (measurement axis), and emits the measurement light L incident from the light source 14 via the optical fiber cable 17 toward the workpiece W along the optical axis O1. Further, the reflected light LA of the measurement light L reflected by the workpiece W is incident on the sensor head 15, and this reflected light LA is incident on the light receiving sensor 16 via the optical fiber cable 17.

[0028] The sensor head 15 is held by the operator, and the position and orientation are appropriately adjusted by the operator when measuring the distance to the workpiece W. As described above, the adjustment of this position and orientation includes the angle adjustment A1 for adjusting the incident angle of the measurement light L with respect to the workpiece W (the orientation of the sensor head 15), the distance adjustment A2 for adjusting the distance between the sensor head 15 and the workpiece W, and the like.

[0029] The light receiving sensor 16 is a charge coupled device (CCD) type or complementary metal-oxide-semiconductor (CMOS) type image sensor, and receives the reflected light LA incident via the optical fiber cable 17. In the distance measurement by the wavelength sweep method, the light receiving sensor 16 receives the interference light between the reflected light LA and the reference light reflected by the reference surface described above, and outputs a light reception signal to the control device 26 described later.

[0030] In the distance measurement by the color confocal method, the wavelength of the reflected light LA incident on the optical fiber cable 17 (pinhole) changes according to the distance between the sensor head 15 and the workpiece W, and further, the incident position of the reflected light LA incident on the light receiving sensor 16 changes according to the wavelength of this reflected light LA. For this reason, the light receiving sensor 16 receives the reflected light LA having a wavelength corresponding to this distance and outputs a light reception signal (including the incident position information on the light receiving surface of the light receiving sensor 16) to the control device 26.

[0031] Further, a known amplifier 16a for amplifying the light reception signal and outputting it to the control device 26 is provided in the light receiving sensor 16.

[0032] In addition to the aforementioned light source 14 and light receiving sensor 16, the apparatus main body 20 includes an operation unit 22, a monitor 24, and a control device 26 (see FIG. 2).

[0033] The operation unit 22 receives inputs of various operations by the operator. These various operations include, for example, the on / off operation of the power supply of the distance meter 10, the start operation of distance measurement, and the like. When the monitor 24 described later is a touch panel type, a part of its display screen may function as the operation unit 22.

[0034] The monitor 24 uses various displays such as a known liquid crystal display. As shown in FIG. 1, the monitor 24 displays a distance measurement value 40 indicating the distance to the workpiece W numerically (digitally), and a sensitivity meter 42 (also referred to as a sensitivity meter) and a distance meter 44 (distance meter) that the operator refers to when adjusting the position and orientation of the sensor head 15 (angle adjustment A1, distance adjustment A2). The sensitivity meter 42 and the distance meter 44 will be described later.

[0035] As shown in FIG. 2, the control device 26 comprehensively controls the operations of each part of the distance meter 10 according to the input operations on the operation unit 22. The control device 26 includes an arithmetic circuit composed of various processors and memories. The various processors include a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), an ASIC (Application Specific Integrated Circuit), and programmable logic devices [for example, SPLD (Simple Programmable Logic Devices), CPLD (Complex Programmable Logic Device), and FPGA (Field Programmable Gate Arrays)]. The various functions of the control device 26 may be realized by one processor, or may be realized by a plurality of processors of the same type or different types.

[0036] The control device 26 functions as a measurement control unit 30, a signal acquisition unit 32, an arithmetic unit 34, and a display control unit 36 by executing a control program read from a storage unit (not shown).

[0037] The measurement control unit 30 operates in response to a power-on operation of the distance meter 10 or a start operation of distance measurement on the operation unit 22. This measurement control unit 30 continuously executes the emission of the measurement light L from the light source 14, the reception of the reflected light LA by the light receiving sensor 16, and the output of the received light signal amplified by the amplifier 16a to the control device 26.

[0038] The signal acquisition unit 32 is connected to the light receiving sensor 16 via a signal line (not shown). This signal acquisition unit 32 continuously executes the acquisition of the received light signal from the light receiving sensor 16 and the output of the acquired received light signal to the arithmetic unit 34 while the output of the received light signal from the light receiving sensor 16 is being executed.

[0039] While a received light signal is input from the signal acquisition unit 32, the arithmetic unit 34 continuously calculates the sensitivity of the detector 12 (hereinafter simply referred to as sensitivity) and the distance from the sensor head 15 to the workpiece W (hereinafter simply referred to as distance) based on this received light signal. When calculating the sensitivity based on the received light signal, the arithmetic unit 34 calculates, for example, the peak value of the intensity of the received light signal as the "sensitivity". Alternatively, the arithmetic unit 34 performs spline fitting on the signal waveform SG (see FIG. 14) of the received light signal and calculates the maximum value of this spline fitting curve as the "sensitivity". Note that the method of calculating the sensitivity is not limited to these methods, and various known methods may be used.

[0040] Further, when calculating the distance based on the received light signal, the calculation unit 34 performs the distance calculation using a calculation method corresponding to the distance measurement method. For example, when the detector 12 employs the wavelength sweep method for distance measurement, the calculation unit 34 performs the distance calculation using, for example, a known algorithm disclosed in Japanese Patent Application Laid-Open No. 2015-158477. Further, when the detector 12 employs the color confocal distance measurement, the calculation unit 34 performs a calculation to convert the wavelength of the received light signal into a distance based on the incident position of the reflected light LA on the light receiving sensor 16. Note that the calculation method of the sensitivity is not limited to these methods, and various known methods may be used.

[0041] Based on the calculation result of the sensitivity calculated by the calculation unit 34, the display control unit 36 causes the monitor 24 to display a sensitivity meter 42 in a display mode capable of identifying the magnitude of this sensitivity. Further, based on the calculation result of the distance calculated by the calculation unit 34, the display control unit 36 causes the monitor 24 to display a distance measurement value 40 indicating the distance numerically and a distance meter 44 in a display mode capable of identifying the magnitude of the distance. Then, each time the calculation unit 34 calculates the sensitivity and the distance, the display control unit 36 updates the sensitivity meter 42, the distance measurement value 40, and the distance meter 44 based on these new calculation results. Then, the calculation unit 34 sequentially calculates the sensitivity and the distance, and the display control unit 36 updates the sensitivity meter 42, the distance measurement value 40, and the distance meter 44 based on the calculation result of the calculation unit 34 every refresh rate (generally 60 Hz) of the monitor 24.

[0042] FIG. 3 is an enlarged view of the sensitivity meter 42 and the distance meter 44 displayed on the monitor 24. As shown in FIG. 3, the sensitivity meter 42 is a bar meter (also referred to as a level meter or a level graph) in which the length in a predetermined one direction within the screen of the monitor 24 changes stepwise (continuously is also possible) according to the magnitude of the sensitivity calculated by the calculation unit 34. This sensitivity meter 42 increases or decreases stepwise in length by increasing or decreasing the number (number of lit segments) of segments 42a according to the increase or decrease of the sensitivity calculated by the calculation unit 34. Thereby, the operator can intuitively identify the magnitude of the sensitivity based on the length (length or shortness) of the sensitivity meter 42.

[0043] In addition, the display color of each segment 42a of the sensitivity meter 42 changes step by step as the magnitude of the sensitivity (the length of the sensitivity meter 42) increases. For example, it changes step by step in the order of blue, green, yellow, orange, and red. Thereby, the operator can also identify the magnitude of the sensitivity from the display color of each segment 42a. Note that instead of changing both the length and the display color of the sensitivity meter 42 according to the increase or decrease of the sensitivity calculated by the calculation unit 34, only either one of them may be changed.

[0044] The distance meter 44 is a bar meter in which the length in a predetermined one direction within the screen of the monitor 24 changes step by step (continuously is also possible) according to the magnitude of the distance calculated by the calculation unit 34. This distance meter 44 increases or decreases in length by increasing or decreasing the number of segments 44a (the number of lit segments) according to the increase or decrease of the distance calculated by the calculation unit 34. Thereby, the operator can intuitively identify the magnitude of the distance based on the length (length or shortness) of the distance meter 44.

[0045] Note that in this embodiment, the display colors of all the segments 44a of the distance meter 44 are the same color, but the display colors of the segments 44a may be changed step by step as the magnitude of the distance (the length of the distance meter 44) increases, similar to the sensitivity meter 42. Also, instead of changing both the length and the display color of the distance meter 44, only either one of them may be changed.

[0046] The display control unit 36 adjusts the length (the number of segments 42a) of the sensitivity meter 42 and the length (the number of segments 44a) of the distance meter 44 to be displayed on the monitor 24 based on the calculation result of the calculation unit 34 every refresh rate (generally 60 Hz) of the monitor 24. Thereby, the sensitivity and the distance are displayed in real time in an analog manner within a certain range of the display screen of the monitor 24 (a smaller area than when performing 2D graph display).

[0047] As described above, in the distance meter 10 of the first embodiment, by displaying the bar meters on the monitor 24 as the sensitivity meter 42 and the distance meter 44 respectively, compared with the case of displaying a 2D graph (see FIG. 14) or a plot graph (see Patent Document 1 above) on the monitor 24 as in the prior art, the area of the screen of the monitor 24 used for sensitivity display and distance display can be reduced. Also, compared with the sensitivity and distance digitally displayed (numerically displayed) on the monitor 24 as in the prior art, in the sensitivity meter 42 and the distance meter 44, the operator can intuitively grasp the changes in sensitivity and distance, so the visibility is improved with respect to the changes in sensitivity and distance. As a result, it is possible to improve the visibility while suppressing the area of the screen of the monitor 24 when displaying at least one of the sensitivity and the distance on the monitor 24.

[0048] Furthermore, by reducing the area of use of the monitor 24, the monitor 24 (apparatus main body 20) can be miniaturized, and as a result, the power consumption can be reduced.

[0049] [Second Embodiment] FIG. 4 is an external view of the distance meter 10 of the second embodiment. FIG. 5 is a block diagram of the apparatus main body 20 of the distance meter 10 of the second embodiment. As shown in FIGS. 4 and 5, the distance meter 10 of the second embodiment can execute gain adjustment of the amplifier 16a. The distance meter 10 of this second embodiment has basically the same configuration as the distance meter 10 of the first embodiment, except that a gain adjustment button 22a is provided on the operation unit 22 and the control device 26 functions as a gain adjustment unit 38. For this reason, those that are the same as those in the first embodiment in terms of function or configuration are denoted by the same reference numerals and their description is omitted.

[0050] The gain adjustment button 22a is an operation member for starting the gain adjustment of the amplifier 16a by the gain adjustment unit 38 described later. Note that the gain adjustment of the amplifier 16a by the gain adjustment unit 38 may be started using an operation member other than the gain adjustment button 22a (including those displayed on the monitor 24).

[0051] Before the gain adjustment of the amplifier 16a, the position and orientation of the sensor head 15 are adjusted so that the sensitivity of the detector 12 becomes approximately maximum. Specifically, after the distance adjustment A2 is first executed, the angle adjustment A1 is executed.

[0052] FIG. 6 is an explanatory diagram for explaining the distance adjustment A2 executed before the gain adjustment. As is clear from the sensitivity curve SC showing the relationship between the "distance" shown in FIG. 6 and the "intensity" of the received light signal output from the light receiving sensor 16, the sensitivity changes according to the distance, and the sensitivity becomes high in the approximate central range CR of the sensitivity curve SC. Therefore, in the distance adjustment A2 before the gain adjustment, the position of the sensor head 15 is adjusted to a distance (central range CR) where the sensitivity becomes approximately maximum. Then, at this position, the angle adjustment A1 of the sensor head 15 is executed, and the orientation (incident angle of the measurement light L) of the sensor head 15 is adjusted so that the sensitivity becomes approximately maximum.

[0053] FIG. 7 is an enlarged view of the distance meter 44 displayed on the monitor 24 by the display control unit 36 of the second embodiment. As shown in FIG. 7, when the display control unit 36 of the second embodiment displays the distance meter 44 on the monitor 24, an index 46 indicating the sensitivity maximum distance, which is the distance at which the sensitivity is maximum, is also simultaneously displayed on the monitor 24.

[0054] Specifically, since the sensitivity curve SC (see FIG. 6) is known for each type of the detector 12, the sensitivity maximum distance corresponding to the peak position of this sensitivity curve SC is also known. Therefore, the display control unit 36 superimposes and displays the index 46 on the distance meter 44 on the screen of the monitor 24 based on the known sensitivity maximum distance. Thereby, when the operator executes the distance adjustment A2, based on whether the length of the distance meter 44 matches the index 46 (including a substantially match where the length is included within the central range CR of FIG. 6), it is possible to determine whether the position of the sensor head 15 is adjusted to approximately the sensitivity maximum distance (within the central range CR). Here, the central range CR mentioned here is a certain range (for example, a range of ±5%) based on the sensitivity maximum distance.

[0055] FIG. 8 is an explanatory diagram showing a display example of the distance meter 44 when the position of the sensor head 15 is adjusted to approximately the maximum sensitivity distance. As shown in FIG. 8, the display control unit 36 monitors the magnitude of the distance calculated by the calculation unit 34 (see reference numeral 8A in FIG. 8), and when the distance calculated by the calculation unit 34 matches the known maximum sensitivity distance, or when the calculated distance is included within the central range CR, the display mode of the distance meter 44 is changed, for example, the display color of each segment 44a is changed to a predetermined specific color (see reference numeral 8B in FIG. 8). Thereby, the operator can easily determine that the position of the sensor head 15 has been adjusted to approximately the maximum sensitivity distance. Instead of changing the display color of each segment 44a, each segment 44a may be blinked.

[0056] Returning to FIGS. 4 and 5, the gain adjustment unit 38 performs gain adjustment of the amplifier 16a when the gain adjustment button 22a is operated. For example, the gain adjustment unit 38 performs gain adjustment of the amplifier 16a so that the intensity of the received light signal output from the light receiving sensor 16 (amplifier 16a) becomes 0.9 times the known saturation intensity (saturation intensity × 0.9).

[0057] FIG. 9 is a flowchart showing the flow of the gain adjustment method of the amplifier 16a of the distance meter 10 according to the second embodiment. When the power of the distance meter 10 is turned on, the emission of the measurement light L from the light source 14 under the control of the measurement control unit 30, the reception of the reflected light LA by the light receiving sensor 16, and the output of the received light signal amplified by the amplifier 16a to the control device 26 are continuously executed. Also, the acquisition of the received light signal from the light receiving sensor 16 by the signal acquisition unit 32, the calculation of the sensitivity and distance by the calculation unit 34, and the display of the sensitivity meter 42 and the distance meter 44 on the monitor 24 by the display control unit 36 are continuously executed.

[0058] As shown in FIG. 9, while referring to the distance meter 44 displayed on the monitor 24 (see reference numeral 8A in FIG. 8), the operator starts the distance adjustment A2 so that the length of the distance meter 44 matches the index 46 (NO in steps S1 and S2).

[0059] Then, when the distance calculated by the calculation unit 34 matches the known maximum sensitivity distance (including the case of being included in the central range CR) (YES in step S2), as shown by reference numeral 8B in FIG. 8 described above, the display color of each segment 44a of the distance meter 44 is changed to a specific color. Thereby, the operator determines that the position of the sensor head 15 is approximately adjusted to the maximum sensitivity distance, and ends the distance adjustment A2. Note that steps S1 and S2 correspond to the first step of the present invention.

[0060] Next, the operator starts the angle adjustment A1 of the sensor head 15 at the position after the end of the distance adjustment A2 while referring to the sensitivity meter 42 displayed on the monitor 24 (NO in steps S3 and S4). Then, in this angle adjustment A1, the operator adjusts the attitude of the sensor head 15, that is, the incident angle of the measurement light L so that the sensitivity becomes approximately maximum (YES in step S4). Thus, the angle adjustment A1 ends. Note that steps S3 and S4 correspond to the second step of the present invention.

[0061] When the angle adjustment A1 ends, the operator operates the gain adjustment button 22a. Thereby, the gain adjustment unit 38 executes gain adjustment of the amplifier 16a based on the light reception signal output from the light reception sensor 16 (amplifier 16a) (step S5, corresponding to the third step of the present invention).

[0062] As described above, in the distance meter 10 of the second embodiment, the operator can easily adjust the position and attitude of the sensor head 15 so that the sensitivity becomes approximately maximum by referring to the sensitivity meter 42, the distance meter 44, and the indicator 46 displayed on the monitor 24. As a result, the gain adjustment can be performed easily and in a short time.

[0063] [Third Embodiment] FIG. 10 is an external view of the distance meter 10 according to the third embodiment. The distance meter 10 according to the third embodiment has basically the same configuration as the distance meter 10 of each of the above embodiments, except that the display content of the monitor 24 is partially different from that of each of the above embodiments. Therefore, components that are the same as those in each of the above embodiments in terms of function or configuration are denoted by the same reference numerals, and their descriptions are omitted.

[0064] In each of the above embodiments, both the sensitivity meter 42 and the distance meter 44 are displayed on the monitor 24. However, as shown by reference numerals XA and XB in FIG. 10, only one of the sensitivity meter 42 and the distance meter 44 may be displayed on the monitor 24. When performing the angle adjustment A1, only the sensitivity meter 42 is displayed on the monitor 24, and when performing the distance adjustment A2, only the distance meter 44 is displayed, so that the usage area of the monitor 24 can be further reduced.

[0065] [Fourth Embodiment] FIG. 11 is an enlarged view of the sensitivity meter 42A and the distance meter 44A displayed on the monitor 24 of the distance meter 10 according to the fourth embodiment. In the distance meter 10 of each of the above embodiments, the length of the sensitivity meter 42 is changed according to the magnitude of the sensitivity calculated by the arithmetic unit 34, or the length of the distance meter 44 is changed according to the magnitude of the distance calculated by the arithmetic unit 34. However, the magnitudes of the sensitivity and the distance may be distinguishable by other methods.

[0066] The distance meter 10 according to the fourth embodiment has basically the same configuration as the distance meter 10 of each of the above embodiments, except that different sensitivity meter 42A and distance meter 44A are displayed on the monitor 24. Therefore, components that are the same as those in each of the above embodiments in terms of function or configuration are denoted by the same reference numerals, and their descriptions are omitted.

[0067] As shown by reference signs XIA to XIC in FIG. 11, the display control unit 36 of the fourth embodiment causes the monitor 24 to display a sensitivity meter 42A in a display mode capable of identifying the magnitude of sensitivity and a distance meter 44A capable of identifying the magnitude of distance based on the calculation results of sensitivity and distance calculated by the calculation unit 34. Note that the shapes of the sensitivity meter 42A and the distance meter 44A are not limited to the rectangular shape shown in FIG. 11 and can take any shape.

[0068] The display color of the sensitivity meter 42A changes stepwise (or continuously) according to the magnitude of the sensitivity calculated by the calculation unit 34. Also, the display color of the distance meter 42B changes stepwise (or continuously) according to the magnitude of the distance calculated by the calculation unit 34. Thereby, the operator can intuitively identify the magnitude of the sensitivity and the magnitude of the distance based on the display color of the sensitivity meter 42A and the display color of the distance meter 42B.

[0069] Each time the calculation unit 34 calculates new sensitivity and distance, the display control unit 36 adjusts the display color of the sensitivity meter 42A and the display color of the distance meter 44A to be displayed on the monitor 24 based on these calculation results. Thereby, as in each of the above embodiments, the sensitivity and the distance are displayed on the monitor 24 in real time.

[0070] Note that, although not shown in the drawings, the display control unit 36 may cause the monitor 24 to display an index 46 of the display color corresponding to the known maximum sensitivity distance described in the second embodiment. Thereby, when the operator executes the distance adjustment A2, the operator can determine whether the position of the sensor head 15 is approximately adjusted to the maximum sensitivity distance (the central range CR in FIG. 6) based on whether the display color of the distance meter 44 matches (including a substantially match) the display color of the index 46.

[0071] As described above, in the distance meter 10 of the fourth embodiment, by causing the monitor 24 to display the sensitivity meter 42A that indicates the magnitude of sensitivity in a display color and the distance meter 44A that indicates the magnitude of distance in a display color, it is possible to reduce the usage area used for sensitivity display and distance display on the screen of the monitor 24, similar to each of the above embodiments. Further, since the operator can intuitively grasp the changes in sensitivity and distance, the visibility with respect to the changes in sensitivity and distance is improved. As a result, the same effects as those of each of the above embodiments can be obtained.

[0072] [Fifth Embodiment] In each of the above embodiments, the portable distance meter 10 has been described as an example. However, the non-contact measuring machine of the present invention includes a known non-contact shape measuring machine that non-contact measures the shape of the workpiece W (including the contour shape, surface roughness, undulation, etc.).

[0073] Although not shown in the drawings, the non-contact shape measuring machine includes a detector that emits measurement light L toward the workpiece W and receives the reflected light LA reflected by the workpiece W, a holder that holds the detector movably in the X direction parallel to the horizontal direction, and a C-axis that holds the holder movably in the Z direction parallel to the vertical direction. This non-contact shape measuring machine measures the distance to the workpiece W based on the light reception result of receiving the reflected light LA with the detector while moving the detector in the X direction by the holder, thereby non-contact measuring the shape of the workpiece W. Since the detailed configuration of the non-contact shape measuring machine is a known technique, a specific description thereof is omitted here (for example, Japanese Patent Application Laid-Open No. 2011-196763).

[0074] Even in such a non-contact shape measuring machine, in order to perform shape measurement with the detector in a highly sensitive state, adjustment of the position and orientation of the detector with respect to the workpiece W is performed in advance. For this reason, also in the non-contact shape measuring machine, at least one of the sensitivity meter 42 and the distance meter 44 is displayed on the monitor 24 in the same manner as the distance meter 10 of each of the above embodiments. In this case, the non-contact shape measuring machine is also provided with functions equivalent to those of the control device 26 (measurement control unit 30, signal acquisition unit 32, calculation unit 34, display control unit 36, gain adjustment unit 38, etc.) of the distance meter 10 of each of the above embodiments. Further, the non-contact shape measuring machine is also provided with a known shape calculation unit (not shown) for calculating the shape of the workpiece W.

[0075] FIG. 12 is an explanatory diagram showing an example of the display screen of the monitor 24 of the non-contact shape measuring machine. As shown in FIG. 12, the display screen of the monitor 24 of the non-contact shape measuring machine (hereinafter simply abbreviated as the monitor 24) includes, for example, a part program display area 52, a CAD display area 54, a measurement result display area 56, and a detector position display area 58. Note that these display areas may be GUI (Graphical User Interface) areas.

[0076] The part program display area 52 displays a part program (not shown) indicating the movement path (measurement points) of the detector during the shape measurement of the workpiece W. The CAD display area 54 displays CAD (Computer Aided Design) data of the workpiece W, although not shown. In the measurement result display area 56, the shape measurement result of the workpiece W is displayed, although not shown.

[0077] In the detector position display area 58, in addition to the position information indicating the position of the detector on the C axis and the X direction position on the holder, the sensitivity meter 42 and the distance meter 44 (either one alone is also possible) similar to those of each of the above embodiments are displayed. Thereby, as in each of the above embodiments, the visibility of the sensitivity and the distance is improved while suppressing the usage area on the screen of the detector position display area 58.

[0078] In addition, the display screen of the monitor 24 may be generated by adding sensitivity display to the display screen of a known contact type shape measuring machine using a stylus. Even in this case, since the used area of the sensitivity meter 42 is small, the labor for modifying the display screen of the conventional contact type shape measuring machine to generate the display screen of the monitor 24 shown in FIG. 12 can be minimized.

[0079] FIG. 13 is an explanatory diagram showing a modified example of the display screen of the monitor 24 of the non-contact shape measuring machine. In the example shown in FIG. 12 described above, the sensitivity meter 42 and the distance meter 44 are displayed in the detector position display area 58, but the display positions of the sensitivity meter 42 and the distance meter 44 can be changed as appropriate.

[0080] For example, as shown in FIG. 13, the part program display area 52, the CAD display area 54, the measurement result display area 56, and the detector position display area 58 are displayed in a reduced size compared to the size shown in FIG. 12, and the sensitivity meter 42 and the distance meter 44 (either one is acceptable) may be displayed on the monitor 24 in a separate area. Even in this case, since the used area of the sensitivity meter 42 and the distance meter 44 is small, the decrease in the display area of the part program display area 52, the CAD display area 54, the measurement result display area 56, and the detector position display area 58 can be minimized. As a result, it is possible to prevent the operability and displayability of the GUI from being impaired.

[0081] [Others] In the above embodiments, the distance meter 10 and the non-contact shape measuring machine have been described as examples, but the present invention is applicable to various other known non-contact measuring machines.

Explanation of reference numerals

[0082] 10…Distance meter, 12…Detector, 14…Light source, 15…Sensor head, 16…Light-receiving sensor, 16a…Amplifier, 17…Optical fiber cable, 20…Device body, 22…Operation unit, 22a…Gain adjustment button, 24…Monitor, 26…Control device, 30…Measurement control unit, 32…Signal acquisition unit, 34…Calculation unit, 36…Display control unit, 38…Gain adjustment unit, 40…Measured distance value, 42…Sensitivity meter, 42A…Sensitivity meter, 42B…Distance meter, 42a…Segment, 44…Distance meter, 44A…Distance meter, 44a…Segment, 46…Indicator, 52…Part program display area, 54…CAD display area, 56…Measurement result display area, 58…Detector position display area, A1…Angle adjustment, A2…Distance adjustment, CR…Central range, L…Measurement light, LA…Reflected light, O1…Optical axis, SC…Sensitivity curve, SG…Signal waveform, W…Work

Claims

1. A detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, An arithmetic unit that calculates the sensitivity of the detector based on the received light signal of the reflected light output from the detector, A display control unit that causes a monitor to display the magnitude of the sensitivity calculated by the arithmetic unit, comprising: A non-contact measuring instrument in which the display control unit causes the monitor to display a sensitivity meter in which at least one of the length and the display color changes according to the magnitude of the sensitivity.

2. A detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, An arithmetic unit that calculates the distance between the detector and the workpiece based on the received light signal of the reflected light received by the detector, A display control unit that causes a monitor to display the magnitude of the distance calculated by the arithmetic unit, comprising: A non-contact measuring instrument in which the display control unit causes the monitor to display a distance meter in which at least one of the length and the display color changes according to the magnitude of the distance.

3. A detector that emits measurement light toward a workpiece and receives the reflected light of the measurement light reflected by the workpiece, An arithmetic unit that calculates the sensitivity of the detector and the distance between the detector and the workpiece based on the received light signal of the reflected light received by the detector, A display control unit that causes a monitor to display the magnitude of the sensitivity and the magnitude of the distance calculated by the arithmetic unit, comprising: A non-contact measuring instrument in which the display control unit causes the monitor to display a sensitivity meter in which at least one of the length and the display color changes according to the magnitude of the sensitivity, and a distance meter in which at least one of the length and the display color changes according to the magnitude of the distance.

4. The sensitivity of the detector changes according to the distance and the incident angle of the measurement light with respect to the workpiece. The sensitivity maximum distance, which is the distance at which the sensitivity is maximum, is known. The non-contact measuring instrument according to claim 3, wherein the display control unit causes the monitor to display an index indicating the sensitivity maximum distance in the distance meter.

5. The non-contact measuring instrument according to claim 4, wherein the detector includes an amplifier for the received light signal.

6. In the gain adjustment method for adjusting the gain of the amplifier of the non-contact measuring instrument according to claim 5, a first step of adjusting the distance to a certain range based on the sensitivity maximum distance based on the distance meter and the index; a second step of adjusting the incident angle to an angle at which the sensitivity is maximum based on the sensitivity meter after the first step; a third step of adjusting the gain of the amplifier based on the received light signal of the reflected light detected by the detector after the second step; A gain adjustment method having the above steps.

7. The gain adjustment method according to claim 6, wherein when the distance is adjusted to a certain range based on the sensitivity maximum distance in the first step based on the calculation result of the distance by the calculation unit, the display mode of the distance meter is changed.

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