Airtight container, system and method for manufacturing article

Abstract

To enhance airtightness inside a pressurized airtight container.SOLUTION: An airtight container whose interior is pressurized, comprises a frame having an opening, and a plate member attached to the frame so as to cover the opening. The plate member has an end part that engages with the frame. The end part has a first part that includes an end surface of the plate member, and a second part that is continuous with the first part and intersects with the first part. The first part and the second part are pressed toward the frame from different directions by a pressure inside the airtight container.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present disclosure relates to an airtight container, a system, and a method for manufacturing an article.

Background Art

[0002] In fields related to semiconductor devices and fields related to flat panel displays, substrates are transported and processed inside an airtight container. The airtight container has a frame and a plate member that closes an opening of the frame. The plate member is attached to the frame so as to be able to open and close the opening of the frame in consideration of the layout and maintenance of the system. As a technique for controlling the atmosphere in a chamber, which is the internal space of the airtight container, a structure in which a plate member is fastened to the frame from the outside with bolts or the like is known.

[0003] On the other hand, Patent Document 1 discloses a machine tool including a movable cover that can move between a position where a processing space is opened and a position where the processing space is closed. Patent Document 1 describes that by pressing the movable cover against a fixed cover via an elastic body with an actuator, scattering of coolant mist in the processing space to the outside is reduced.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, when the inside of the airtight container is pressurized, a force is applied to the plate member in a direction in which a gap is opened between the plate member and the frame, so there is a risk that the airtightness inside the airtight container will decrease. Further, even if the configuration described in Patent Document 1 is applied to the airtight container, it is difficult to ensure the airtightness inside the airtight container with a configuration in which the movable cover is pressed in one direction by an actuator.

[0006] The present disclosure aims to provide a technique advantageous for enhancing the airtightness inside a pressurized airtight container.

Means for Solving the Problems

[0007] One aspect of the present disclosure is an airtight container whose interior is pressurized, comprising a frame having an opening, and a plate member attached to the frame so as to close the opening, wherein the plate member has an end portion that engages with the frame, and the end portion has a first portion including an end face of the plate member, and a second portion that is continuous with and intersects the first portion, and the first portion and the second portion are pressed against the frame from different directions by the pressure inside the airtight container. The airtight container is characterized by this.

Advantages of the Invention

[0008] According to the present disclosure, a technique advantageous for enhancing the airtightness inside a pressurized airtight container is provided.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Embodiments for Carrying out the Invention

[0010] Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the drawings. In each figure, the same members are denoted by the same reference numerals, and redundant descriptions are omitted. In the following embodiments, the directions are indicated by the XYZ coordinate system, which is an orthogonal coordinate system. In the XYZ coordinate system, the XY plane is a horizontal plane, the Z direction is the vertical direction, and the minus direction of the Z axis is the vertical direction (gravity direction).

[0011] [First Embodiment] FIG. 1 is an explanatory view of a manufacturing system 100, which is an example of a system according to the first embodiment. The manufacturing system 100 is used for manufacturing articles, such as manufacturing semiconductor devices or flat panel displays. The manufacturing system 100 includes a plurality of airtight containers 11 to 1 13 connected to each other, at least one processing unit that performs processing on a substrate, and at least one transfer device that transfers the substrate. The processing unit is disposed inside (chamber) of any one of the plurality of airtight containers 11 to 1 13 . Also, the transfer device is disposed inside any one of the plurality of airtight containers 11 to 1 13 . For example, transfer devices are disposed inside each of the airtight containers 13, 1 10 . The transfer device is, for example, a robot capable of transferring a substrate. The substrate is in a plurality of airtight containers 11 to 1 13A predetermined process is performed under a pressurized atmosphere in any one of the airtight containers.

[0012] One of the plurality of airtight containers 11 to 1 13 can be an airtight container for substrate processing or an airtight container for substrate buffering. Buffering means that when the devices in the pre- and post-steps of substrate transfer cannot transfer the substrate to the post-step device due to some trouble, the substrate is temporarily evacuated to the buffering airtight container. Buffering is performed, for example, by a transfer device. Note that one of the plurality of airtight containers 11 to 1 13 can also be an airtight container for substrate transfer.

[0013] FIGS. 2(a) and 2(b) are schematic perspective views of the airtight container 1 according to the first embodiment. The airtight container 1 shown in FIG. 2(a) or FIG. 2(b) can be any one of the plurality of airtight containers 11 to 1 13

[0014] The airtight container 1 shown in FIG. 2(a) has a substantially rectangular parallelepiped shape. The airtight container 1 shown in FIG. 2(a) has a bottom plate 2, four side plates 3, and a top plate 4. The airtight container 1 shown in FIG. 2(b) has a substantially octagonal prism shape. The airtight container 1 shown in FIG. 2(b) has a bottom plate 2, four side plates 3, and a top plate 4.

[0015] The manufacturing system 100 shown in FIG. 1 includes at least one airtight container 1 shown in FIG. 2(a) and at least one airtight container 1 shown in FIG. 2(b). In the manufacturing system 100, any one of the side plates 3 of each airtight container 1 is removed, and the plurality of airtight containers 1 are connected to each other.

[0016] Hereinafter, the airtight container 1 shown in FIG. 2(a) will be described. Note that the airtight container 1 shown in FIG. 2(b) has the same configuration as the airtight container 1 shown in FIG. 2(a), and the description thereof will be omitted. FIG. 3(a) is a perspective view of the airtight container 1 according to the first embodiment. FIG. 3(b) is a cross-sectional view of the airtight container 1 according to the first embodiment. FIG. 3(b) shows a cross-section of the airtight container 1 along the horizontal plane (XY plane) indicated by the broken line in FIG. 3(a).

[0017] ​ The airtight container 1 is an airtight container whose interior is pressurized. The internal space SP0 of the airtight container 1 is a chamber. The pressure of the internal space SP0 is set to a pressure higher than 1 atm by a pressurizing mechanism (not shown).

[0018] The airtight container 1 shown in Fig. 3(a) includes a frame 6. In the first embodiment, the frame 6 includes a plurality of columns 61 connected to each other. The plurality of columns 61 are assembled in a substantially rectangular parallelepiped shape. The bottom plate 2, the side plates 3, and the top plate 4 are fixed to four corresponding columns 61 among the plurality of columns 61 of the frame 6. In the first embodiment, the bottom plate 2 is fixed to the corresponding four columns 61, for example, by welding or the like. That is, the bottom plate 2 may be included in the frame 6. Also, a plate member (not shown) may be fixed to the column 61 by welding or the like.

[0019] The side plates 3 and the top plate 4 are detachable from the frame 6 and are also attachable to the frame 6. In Fig. 3(a), the side plates 3 and the top plate 4 are detachably attached to the frame 6.

[0020] The space surrounded by the four columns 61 assembled in a rectangular shape is the opening 62 of the frame 6. That is, the frame 6 has at least one opening, in this example, a plurality of openings 62. Any one of the plurality of openings 62 of the frame 6 is blocked by the side plate 3 or the top plate 4. In Fig. 3(a), all the openings 62 are blocked by the side plate 3 or the top plate 4.

[0021] Hereinafter, the attachment structure between the side plate 3 and the frame 6 will be described. The attachment structure between the top plate 4 and the frame 6 is the same as the attachment structure between the side plate 3 and the frame 6, and the description thereof will be omitted.

[0022] The side plate 3 shown in Fig. 3(a) is the plate member 5 shown in Fig. 3(b). Figs. 4(a) and 4(b) are cross-sectional views of a part of the airtight container 1 according to the first embodiment. In Figs. 4(a) and 4(b), the broken line portion of the airtight container 1 shown in Fig. 3(b) is illustrated. Fig. 4(a) shows the state where the plate member 5 is attached to the frame 6, and Fig. 4(b) shows the state where the plate member 5 is removed from the frame 6.

[0023] The plate member 5 is attached to the frame 6 so as to close the opening 62 of the frame 6. The plate member 5 has a main portion 500 and an end portion 510 continuous with the main portion 500. The main portion 500 is flat. The main portion 500 has a planar main surface 501 facing the outside of the airtight container 1. That is, in the state shown in Fig. 4(a), the main surface 501 faces the outside of the airtight container 1. Viewed in the direction perpendicular to the main surface 501, in the example of Fig. 4(b), in the minus direction of the Y-axis, the main portion 500 is substantially rectangular.

[0024] The frame 6 is made of, for example, stainless steel. The plate member 5 is preferably a stainless steel plate, an aluminum plate, or a painted steel plate. The end portion 510 of the plate member 5 is formed by, for example, bending or welding.

[0025] The end portion 510 is disposed on the outer periphery of the main portion 500. The end portion 510 is formed continuously in the circumferential direction along the outer periphery of the main portion 500. Note that the plate member 5 may have end portions provided independently on each side of the rectangular main portion 500. That is, a plurality of end portions that are not continuous with each other in the circumferential direction along the outer periphery of the main portion 500 may be connected to the main portion 500.

[0026] As shown in Fig. 4(a), the end portion 510 of the plate member 5 engages with the frame 6. The plate member 5 is attached to the frame 6 by the engagement of the end portion 510 with the frame 6. The main portion 500 is disposed at a position corresponding to the opening 62 of the frame 6 in a state where the end portion 510 engages with the frame 6. The main portion 500 is the main part that closes the opening 62. The end portion 510 is formed in a bent shape so as to project outward in a flange shape from the main portion 500 when viewed in a direction perpendicular to the main surface 501 of the main portion 500 (i.e., when viewed in the Y direction).

[0027] The end portion 510 includes an engaging portion 511 including the end face 51 of the plate member 5 and an engaging portion 512 continuous with the engaging portion 511. The engaging portion 511 is an example of the first portion. The engaging portion 512 is an example of the second portion. In Fig. 4(a), the engaging portion 511 and the engaging portion 512 have flat plate-like portions.

[0028] The engaging portion 512 intersects the engaging portion 511. In the first embodiment, the engaging portion 512 is orthogonal to the engaging portion 511. Also, the engaging portion 512 is continuous with the main portion 500. The engaging portion 512 intersects the main portion 500. In the first embodiment, the engaging portion 512 is orthogonal to the main portion 500.

[0029] The column 61 of the frame 6 has a plane 611 with which the engaging portion 511 engages and a plane 612 with which the engaging portion 512 engages. The plane 611 is an example of the first surface, and the plane 612 is an example of the second surface. The plane 611 and the plane 612 intersect each other, preferably orthogonally to each other.

[0030] The engaging portion 511 has a plane 521 facing the plane 611 of the frame 6. The engaging portion 512 has a plane 522 facing the plane 612 of the frame 6. The plane 521 engages with the plane 611 of the frame 6, and the plane 522 engages with the plane 612 of the frame 6. The plane 521 is an example of the first engaging surface, and the plane 522 is an example of the second engaging surface.

[0031] Plane 521 and plane 522 intersect with each other, and plane 522 and main surface 501 intersect with each other. It is preferable that plane 521 and plane 522 are orthogonal to each other, and it is preferable that plane 522 and main surface 501 are orthogonal to each other.

[0032] In the first embodiment, plane 521 and plane 522 are continuous such that a valley-shaped bottom is formed at the boundary 52 between plane 521 and plane 522. Also, plane 522 and main surface 501 are continuous such that a mountain-shaped top is formed at the boundary 53 between plane 522 and main surface 501. That is, plane 521 and plane 522 are continuously connected in a valley-fold shape, and plane 522 and main surface 501 are continuously connected in a mountain-fold shape.

[0033] With the above configuration, engaging portions 511 and 512 engage with the column 61 of the frame 6. When the inside of the airtight container 1 is pressurized, that is, when the internal space SP0 is set to a pressure higher than 1 atm, the internal pressure P0, which is the pressure of the internal space SP0, acts on the main portion 500 and the end portion 510 of the plate member 5. At the end portion 510, the internal pressure P0 is applied to the engaging portions 511 and 512 from mutually different directions D1 and D2. Thereby, the engaging portions 511 and 512 of the end portion 510 are pressed toward the column 61 of the frame 6 from mutually different directions D1 and D2 by the internal pressure P0.

[0034] Specifically, the plate member 5 is slightly deformed in a direction in which it bulges outward due to the internal pressure P0. Then, the engaging portion 511 is pressed against the column 61 of the frame 6 from the direction D1 away from the center of the internal space SP0 by the internal pressure P0. Further, the engaging portion 512 is pressed against the column 61 of the frame 6 from the direction D2 that intersects the direction D1 and is away from the center of the internal space SP0 by the internal pressure P0. As a result, the gap between the plate member 5 and the frame 6 is reduced, and the airtightness of the internal space SP0 inside the airtight container 1 can be ensured. Further, since the bent end portion 510 is in pressure contact with the column 61 of the frame 6, a labyrinth is formed between the end portion 510 and the frame 6, and the sealing property is increased by the labyrinth effect, improving the airtightness of the internal space SP0 of the airtight container 1. Furthermore, since the end portion 510 has a bent shape, the sealing length becomes longer, thereby improving the airtightness of the internal space SP0 of the airtight container 1.

[0035] Also, in the first embodiment, the column 61 of the frame 6 has a plane 611 and a plane 612. By pressing the plane 521 of the engaging portion 511 against the plane 611 and pressing the plane 522 of the engaging portion 512 against the plane 612, the sealing property is increased and the airtightness is improved.

[0036] Note that the bending angle between the engaging portion 511 and the engaging portion 512, and the bending angle between the main portion 500 and the engaging portion 512 are not limited to 90 degrees. Also, although the case where the number of bends in the plate member 5 is 2 has been described as an example, it is not limited thereto, and for example, the number of bends may be 1 or may be 3 or more.

[0037] In the step of processing the substrate, the inside of the airtight container 1 can be pressurized to a pressure of 100 Pa or more and 2000 Pa or less. Considering the sealing property between the plate member 5 and the frame 6, it is preferable that the inside of the airtight container 1 is pressurized to a pressure of 100 Pa or more and 1000 Pa or less. That is, the pressure (internal pressure) P0 of the internal space SP0 of the airtight container 1 is preferably set to 100 Pa or more and 1000 Pa or less. The pressure P0 of the internal space SP0 of the airtight container 1 can typically be set to 300 Pa.

[0038] The thickness T1 of the plate member 5 is preferably 0.5 mm or more and 3 mm or less. By setting the thickness T1 of the plate member 5 to be 0.5 mm or more and 3 mm or less, the deformation of the plate member 5 necessary for the engaging portion 511 and the engaging portion 512 to be pressed against the frame 6 by the internal pressure P0 is ensured, and the engaging portion 511 and the engaging portion 512 are more effectively pressed against the frame 6. Considering the airtightness of the airtight container 1, the thickness of the plate member 5 is more preferably 0.8 mm or more and 1.5 mm or less.

[0039] Here, it is preferable that the frame 6 and the engaging portion 511 are fixed by a fastening member. FIG. 5(a) is a cross-sectional view of the airtight container 1 according to the first embodiment. FIG. 5(a) shows a cross-section of the airtight container 1 along a horizontal plane (XY plane) at a position different from that in FIG. 3(b) in the Z direction. FIG. 5(b) is a cross-sectional view of a part of the airtight container 1 according to the first embodiment. FIG. 5(b) shows a broken line portion of the airtight container 1 shown in FIG. 5(a).

[0040] The frame 6 and the engaging portion 511 of the end portion 510 of the plate member 5 are fixed by a plurality of fastening members 8. The engaging portion 511 is fixed to the frame 6 by a plurality of fastening members 8 arranged along the longitudinal direction.

[0041] In the first embodiment, the fastening member 8 includes a bolt 81 and a nut 82. A through-hole 63 through which the bolt 81 is inserted is formed in the frame 6, specifically, the support column 61. A through-hole 54 through which the bolt 81 is inserted is formed in the engaging portion 511 of the end portion 510. By fastening the bolt 81 and the nut 82, the end portion 510 of the plate member 5 is fixed to the frame 6. And in the engaging portion 511, the portion other than the portion where the fastening member 8 contacts is pressed against the frame 6 by the internal pressure P0.

[0042] Note that the nut 82 is arranged on the surface opposite to the flat surface 521 at the engaging portion 511 of the end portion 510 of the plate member 5, but it may be fixed to the surface opposite to the flat surface 521 by welding or the like. When attaching the plate member 5 to the frame 6, the bolt 81 is tightened from the outside of the airtight container 1, and when removing the plate member 5 from the frame 6, the bolt 81 is loosened from the outside of the airtight container 1. This facilitates the attachment and removal operations of the plate member 5. Note that a member with a tapped portion may be used instead of the nut 82.

[0043] In the above description, the attachment structure at the left and right end portions 510 of the plate member 5 has been described. However, since the attachment structure at the upper and lower end portions of the plate member 5 is the same as the attachment structure at the left and right end portions 510 of the plate member 5, the description of the attachment structure at the upper and lower end portions of the plate member 5 will be omitted.

[0044] Also, the case where the plate member 5 is attached to the support column 61 in the frame 6 has been described, but it is not limited thereto. For example, the plate member 5 may be attached to a plate member fixed to the support column 61.

[0045] [Second Embodiment] The second embodiment will be described. Hereinafter, elements with the same reference numerals as those in the first embodiment have substantially the same configuration and operation as those described in the first embodiment unless otherwise specified, and the parts different from the first embodiment will be mainly described.

[0046] FIG. 6(a) is a cross-sectional view of a part of the airtight container 1A according to the second embodiment. In FIG. 6(a), a part corresponding to the broken line portion of the airtight container 1 shown in FIG. 5(a) is shown.

[0047] In the second embodiment, a seal member 9 is disposed between the column 61 of the frame 6 and the end portion 510 of the plate member 5. The seal member 9 is an elastic body such as rubber, for example. Since the seal member 9 is sandwiched between the plate member 5 and the frame 6, the sealing performance between the plate member 5 and the frame 6 is enhanced, and the gap between the plate member 5 and the frame 6 can be reduced. Thereby, the airtightness inside the airtight container 1A is further improved.

[0048] [Third Embodiment] The third embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first or second embodiment have substantially the same configuration and operation as those described in the first or second embodiment unless otherwise specified, and differences from the first and second embodiments will be mainly described.

[0049] FIG. 6(b) is a cross-sectional view of a part of the airtight container 1B according to the third embodiment. In FIG. 6(b), a portion corresponding to the broken-line portion of the airtight container 1 shown in FIG. 5(a) is illustrated.

[0050] In the third embodiment, a lubricant 7 is disposed between the column 61 of the frame 6 and the end portion 510 of the plate member 5. Since the fluid lubricant 7 is sandwiched between the plate member 5 and the frame 6, the sealing performance between the plate member 5 and the frame 6 is enhanced, and the gap between the plate member 5 and the frame 6 can be reduced. Thereby, the airtightness inside the airtight container 1B is further improved.

[0051] [Fourth Embodiment] The fourth embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first, second, or third embodiment have substantially the same configuration and operation as those described in the first, second, or third embodiment unless otherwise specified, and differences from the first, second, and third embodiments will be mainly described.

[0052] FIG. 6(c) is a cross-sectional view of a part of the airtight container 1C according to the fourth embodiment. In FIG. 6(c), a portion corresponding to the broken-line portion of the airtight container 1 shown in FIG. 5(a) is illustrated.

[0053] In the fourth embodiment, a seal member 9 and a lubricant 7 are disposed between the column 61 of the frame 6 and the end portion 510 of the plate member 5. Since the seal member 9 and the lubricant 7 are sandwiched between the plate member 5 and the frame 6, the sealing performance between the plate member 5 and the frame 6 is enhanced, and the gap between the plate member 5 and the frame 6 can be reduced. As a result, the airtightness inside the airtight container 1C is further improved.

[0054] [Fifth Embodiment] The fifth embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first, second, third, or fourth embodiment have substantially the same configuration and operation as those described in the first, second, third, or fourth embodiment unless otherwise specified, and the parts different from the first, second, third, and fourth embodiments will be mainly described.

[0055] FIG. 7(a) is a cross-sectional view of a part of the airtight container 1D according to the fifth embodiment. In FIG. 7(a), a part corresponding to the broken line portion of the airtight container 1 shown in FIG. 5(a) is shown.

[0056] The airtight container 1D includes a frame 6A, a frame 6B disposed inside the frame 6A, and a plate member 5. The frame 6A is an example of a first frame, and the frame 6B is an example of a second frame.

[0057] FIGS. 7(b) and 7(c) are explanatory views of the attachment structure of the plate member 5 according to the fifth embodiment. FIG. 7(b) schematically shows a state in which the plate member 5 is removed from the frames 6A and 6B. FIG. 7(c) schematically shows a state in which the plate member 5 is attached to the frames 6A and 6B.

[0058] Frame 6A has substantially the same configuration as frame 6 of the first embodiment. The engaging portion 511 at the end 510 of the plate member 5 includes a tip portion 531 and a base end portion 532. The tip portion 531 is the portion on the side of the end face 51. That is, the tip portion 531 includes the end face 51. The tip portion 531 is sandwiched between the frame 6A and the frame 6B. The base end portion 532 is the portion other than the tip portion 531 in the engaging portion 511. The base end portion 532 is the portion between the tip portion 531 and the engaging portion 512. The tip portion 531 is an example of the first portion, and the base end portion 532 is an example of the second portion.

[0059] The base end portion 532 is a portion that does not contact the frame 6B and is not sandwiched between the frames 6A and 6B. The base end portion 532 is pressed toward the frame 6A by the internal pressure P0 of the airtight container 1D. Specifically, the base end portion 532 of the engaging portion 511 is pressed toward the frame 6A from the D1 direction by the internal pressure P0 of the airtight container 1E, and the engaging portion 512 is pressed toward the frame 6A from the D2 direction by the internal pressure P0 of the airtight container 1E. Thereby, the airtightness inside the airtight container 1D is further improved.

[0060] The frame 6A and the frame 6B are fixed by a fastening member 8D in a state of sandwiching the tip portion 531 of the end 510 of the plate member 5. In the fifth embodiment, the fastening member 8D is a bolt 81. A through hole 63 through which the bolt 81 is inserted is formed in the frame 6A, and a screw hole 64 into which the bolt 81 is screwed is formed in the frame 6B. By sandwiching the tip portion 531 with the frames 6A and 6B and tightening the bolt 81, the plate member 5 is firmly fixed to the frames 6A and 6B.

[0061] Also, when attaching the plate member 5 to the frames 6A and 6B, the bolt 81 is tightened from the outside of the airtight container 1D, and when detaching the plate member 5 from the frames 6A and 6B, the bolt 81 is loosened from the outside of the airtight container 1D. Thereby, the attachment work and detachment work of the plate member 5 are facilitated.

[0062] [Sixth Embodiment] The sixth embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first, second, third, fourth, or fifth embodiment have substantially the same configuration and operation as those described in the first, second, third, fourth, or fifth embodiment, and the parts different from the first, second, third, fourth, and fifth embodiments will be mainly described.

[0063] FIG. 8(a) is a cross-sectional view of a part of the hermetic container 1E according to the sixth embodiment. In FIG. 8(a), a part corresponding to the broken-line part of the hermetic container 1 shown in FIG. 5(a) is illustrated.

[0064] In the sixth embodiment, a seal member 9 is disposed between the frame 6A and the end portion 510 of the plate member 5, and between the frame 6B and the end portion 510 of the plate member 5. The seal member 9 is an elastic body such as rubber, for example. Since the seal member 9 is sandwiched between the frame 6A and the end portion 510 of the plate member 5 and between the frame 6B and the end portion 510 of the plate member 5, the sealing property between the plate member 5 and the frames 6A, 6B is enhanced, and the gap between the plate member 5 and the frames 6A, 6B can be reduced. Further, by sandwiching the seal member 9 between the plate member 5 and the frames 6A, 6B, the labyrinth effect is enhanced. As a result, the airtightness inside the hermetic container 1E is further improved.

[0065] [Seventh Embodiment] The seventh embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first, second, third, fourth, fifth, or sixth embodiment have substantially the same configuration and operation as those described in the first, second, third, fourth, fifth, or sixth embodiment, and the parts different from the first, second, third, fourth, fifth, and sixth embodiments will be mainly described.

[0066] FIG. 8(b) is a cross-sectional view of a part of the hermetic container 1F according to the seventh embodiment. In FIG. 8(b), a part corresponding to the broken-line part of the hermetic container 1 shown in FIG. 5(a) is illustrated.

[0067] In the seventh embodiment, a lubricant 7 is disposed between the frame 6A and the end portion 510 of the plate member 5, and between the frame 6B and the end portion 510 of the plate member 5. Since the fluid lubricant 7 is sandwiched between the frame 6A and the end portion 510 of the plate member 5 and between the frame 6B and the end portion 510 of the plate member 5, the sealing property between the plate member 5 and the frames 6A and 6B is enhanced, and the gap between the plate member 5 and the frames 6A and 6B can be reduced. Further, since the lubricant 7 is sandwiched between the plate member 5 and the frames 6A and 6B, the lubrication effect is increased. As a result, the airtightness inside the airtight container 1E is further enhanced.

[0068] [Eighth Embodiment] The eighth embodiment will be described. Hereinafter, elements denoted by the same reference numerals as those in the first, second, third, fourth, fifth, sixth, or seventh embodiment have substantially the same configurations and operations as those described in the first, second, third, fourth, fifth, sixth, or seventh embodiment, and differences from the first, second, third, fourth, fifth, sixth, and seventh embodiments will be mainly described.

[0069] FIG. 8(c) is a cross-sectional view of a part of the airtight container 1G according to the eighth embodiment. In FIG. 8(c), a portion corresponding to the broken line portion of the airtight container 1 shown in FIG. 5(a) is illustrated.

[0070] In the eighth embodiment, a lubricant 7 and a seal member 9 are disposed between the frame 6A and the end portion 510 of the plate member 5, and between the frame 6B and the end portion 510 of the plate member 5. Since the lubricant 7 and the seal member 9 are sandwiched between the frame 6A and the end portion 510 of the plate member 5 and between the frame 6B and the end portion 510 of the plate member 5, the sealing property between the plate member 5 and the frames 6A and 6B is enhanced, and the gap between the plate member 5 and the frames 6A and 6B can be reduced. Further, since the lubricant 7 and the seal member 9 are sandwiched between the plate member 5 and the frames 6A and 6B, the lubrication effect is increased. As a result, the airtightness inside the airtight container 1E is further enhanced.

[0071] [Ninth Embodiment] The ninth embodiment will be described. Hereinafter, elements with the same reference numerals as those in the first, second, third, fourth, fifth, sixth, seventh, or eighth embodiment shall have substantially the same configuration and operation as those described in the first, second, third, fourth, fifth, sixth, seventh, or eighth embodiment, and differences from the first, second, third, fourth, fifth, sixth, seventh, and eighth embodiments will be mainly described.

[0072] FIG. 9 is a cross-sectional view of a part of the hermetic container 1H according to the ninth embodiment. In FIG. 9, a part corresponding to the broken line part of the hermetic container 1 shown in FIG. 5(a) is illustrated. Note that the configuration of the hermetic container 1H is substantially the same as that of the hermetic container 1D of the fifth embodiment shown in FIG. 7(a), but is partially different. That is, in the hermetic container 1D of the fifth embodiment shown in FIG. 7(a), the bolt 81 does not penetrate the plate member 5. On the other hand, in the hermetic container 1H of the ninth embodiment, the bolt 81 penetrates the plate member 5. Specifically, a through hole 54 through which the bolt 81 is inserted is formed in the tip portion 531 of the engaging portion 511 of the end portion 510 of the plate member 5. Thereby, by sandwiching the tip portion 531 with the frames 6A and 6B and tightening the bolt 81, the plate member 5 is firmly fixed to the frames 6A and 6B.

[0073] Note that in the hermetic container 1H of the ninth embodiment, deformation as shown in any of the sixth to eighth embodiments is possible. Also, at least one of the plurality of hermetic containers included in the manufacturing system 100 may be any of the hermetic containers 1 to 1H of the first to ninth embodiments.

[0074] [Embodiment of the method for manufacturing an article] The method for manufacturing an article according to an embodiment of the present disclosure is suitable for manufacturing an article such as an organic EL (OLED) panel using an inkjet printing apparatus, for example. The method for manufacturing an article of the present embodiment includes, as a step of processing a substrate, a step (coating step) of disposing or coating a solution film (a solution containing a solute and a solvent for forming an organic film) on the substrate by a printing method using an inkjet printing apparatus or the like to obtain a coated substrate. Further, as a step of processing the substrate, the method includes a step (drying step) of drying the solution film on the coated substrate by a vacuum drying apparatus to obtain a dried substrate on which an organic film is formed. Furthermore, such a manufacturing method includes, as a processing step, other well-known steps (such as firing, cooling, dehumidification, dry cleaning, formation of electrodes, formation of a sealing film, etc.). The method for manufacturing an article of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

[0075] [Other Modification Examples] The present disclosure is not limited to the embodiments described above, and many modifications are possible within the technical idea of the present disclosure. For example, at least two of the above-described plurality of embodiments and plurality of modification examples may be combined. Further, the effects described in the present embodiment merely list the most preferable effects resulting from the embodiments of the present disclosure, and the effects according to the embodiments of the present disclosure are not limited to those described in the present embodiment.

[0076] The disclosure of the above embodiments includes the following items.

[0077] (Item 1) An airtight container whose interior is pressurized, comprising a frame having an opening and a plate member attached to the frame so as to close the opening, the plate member having an end portion engaged with the frame, the end portion having a first portion including an end face of the plate member and a second portion continuous with and intersecting the first portion, the first portion and the second portion being pressed against the frame from different directions by the pressure inside the airtight container. An airtight container characterized by the following.

[0078] (Item 2) The plate member has a main portion disposed at a position corresponding to the opening of the frame. The airtight container according to claim 1, characterized by the above.

[0079] (Item 3) The second portion is continuous with and intersects the main portion. The airtight container according to claim 2, characterized by the above.

[0080] (Item 4) The main portion has a main surface facing the outside of the airtight container. The first portion has a first engagement surface facing the first surface of the frame. The second portion has a second engagement surface facing the second surface intersecting the first surface of the frame. The airtight container according to claim 2 or 3, characterized by the above.

[0081] (Item 5) The first engagement surface and the second engagement surface are continuous such that a valley-shaped bottom is formed at the boundary between the first engagement surface and the second engagement surface. The second engagement surface and the main surface are continuous such that a mountain-shaped top is formed at the boundary between the second engagement surface and the main surface. The airtight container according to claim 4, characterized by the above.

[0082] (Item 6) The inside of the airtight container is pressurized to a pressure of 100 Pa or more and 2000 Pa or less. The airtight container according to any one of claims 1 to 5, characterized by the above.

[0083] (Item 7) The thickness of the plate member is 0.5 mm or more and 3 mm or less. The airtight container according to any one of claims 1 to 6, characterized by the above.

[0084] (Item 8) The plate member is a stainless steel plate, an aluminum plate, or a painted steel plate. The airtight container according to any one of claims 1 to 7, characterized in that.

[0085] (Claim 9) The frame and the first part are fixed by a fastening member. The airtight container according to any one of claims 1 to 8, characterized in that.

[0086] (Claim 10) The fastening member includes bolts. A through hole through which the bolt is inserted is formed in the first part. The airtight container according to claim 9, characterized in that.

[0087] (Claim 11) The airtight container further includes a seal member disposed between the frame and the end portion. The airtight container according to any one of claims 1 to 10, characterized in that.

[0088] (Claim 12) The airtight container further includes a lubricant disposed between the frame and the end portion. The airtight container according to any one of claims 1 to 11, characterized in that.

[0089] (Claim 13) The frame is a first frame. The airtight container further includes a second frame disposed inside the first frame. A first portion on the side of the end face in the first part is sandwiched between the first frame and the second frame. The airtight container according to any one of claims 1 to 8, characterized in that.

[0090] (Claim 14) A second portion other than the first portion in the first part is pressed toward the first frame by the pressure inside the airtight container. The airtight container according to claim 13, characterized in that.

[0091] (Item 15) The first frame and the second frame are fixed by a fastening member. The hermetic container according to claim 13 or 14, characterized in that.

[0092] (Item 16) The fastening member includes bolts. A through hole through which the bolt is inserted is formed in the first part of the first portion. The hermetic container according to claim 15, characterized in that.

[0093] (Item 17) Further provided with a seal member disposed between the first frame and the end portion, and between the second frame and the end portion. The hermetic container according to any one of claims 13 to 16, characterized in that.

[0094] (Item 18) Further provided with a lubricant disposed between the first frame and the end portion, and between the second frame and the end portion. The hermetic container according to any one of claims 13 to 17, characterized in that.

[0095] (Item 19) A system comprising a plurality of hermetic containers connected to each other, At least one of the plurality of hermetic containers is the hermetic container according to any one of claims 1 to 18. The system, characterized in that.

[0096] (Item 20) At least one of the plurality of hermetic containers is used to process a substrate on which a solution film or an organic film is formed. The system according to claim 19, characterized in that.

[0097] (Item 21) Processing the substrate using the system according to claim 20. A method for manufacturing an article, characterized in that.

Description of Signs

[0098] 1... airtight container, 5... plate member, 6... frame, 51... end face, 62... opening, 500... main part, 501... main surface, 510... end portion, 511... engaging portion (first part), 512... engaging portion (second part), 521... flat surface (first engaging surface), 522... flat surface (second engaging surface), 531... tip portion (first portion), 532... base end portion (second portion), 611... flat surface (first surface), 612... flat surface (second surface)

Claims

1. A hermetic container whose interior is pressurized, comprising a frame having an opening and a plate member attached to the frame so as to close the opening, the plate member having an end portion engaged with the frame, the end portion having a first portion including an end face of the plate member and a second portion continuous with and intersecting the first portion, the first portion and the second portion being pressed against the frame from different directions by the pressure inside the hermetic container, A hermetic container characterized by the above.

2. the plate member having a main portion disposed at a position corresponding to the opening of the frame, A hermetic container according to claim 1, characterized by the above.

3. the second portion being continuous with and intersecting the main portion, A hermetic container according to claim 2, characterized by the above.

4. the main portion having a main surface facing the outside of the hermetic container, the first portion having a first engagement surface facing a first surface of the frame, the second portion having a second engagement surface facing a second surface of the frame intersecting the first surface of the frame, A hermetic container according to claim 2, characterized by the above.

5. the first engagement surface and the second engagement surface being continuous such that a valley-shaped bottom is formed at a boundary between the first engagement surface and the second engagement surface, the second engagement surface and the main surface being continuous such that a mountain-shaped top is formed at a boundary between the second engagement surface and the main surface, A hermetic container according to claim 4, characterized by the above.

6. The interior of the hermetic container is pressurized to a pressure of 100 Pa or more and 2000 Pa or less, A hermetic container according to claim 1, characterized by the above.

7. The thickness of the plate member is 0.5 mm or more and 3 mm or less, The airtight container according to claim 1, characterized in that.

8. The plate member is a stainless steel plate, an aluminum plate, or a painted steel plate, The airtight container according to claim 1, characterized in that.

9. The frame and the first part are fixed by a fastening member, The airtight container according to claim 1, characterized in that.

10. The fastening member includes bolts, A through-hole through which the bolts are inserted is formed in the first part, The airtight container according to claim 9, characterized in that.

11. Further comprising a seal member disposed between the frame and the end portion, The airtight container according to claim 1, characterized in that.

12. Further comprising a lubricant disposed between the frame and the end portion, The airtight container according to claim 1, characterized in that.

13. The frame is a first frame, Further comprising a second frame disposed inside the first frame, A first portion on the side of the end face in the first part is sandwiched between the first frame and the second frame, The airtight container according to claim 1, characterized in that.

14. A second portion other than the first portion in the first part is pressed toward the first frame by the pressure inside the airtight container, The airtight container according to claim 13, characterized in that.

15. The first frame and the second frame are fixed by a fastening member. The hermetic container according to claim 13, characterized in that.

16. The fastening member includes bolts. A through hole through which the bolt is inserted is formed in the first part of the first part. The hermetic container according to claim 15, characterized in that.

17. Further provided with a seal member disposed between the first frame and the end portion, and between the second frame and the end portion. The hermetic container according to claim 13, characterized in that.

18. Further provided with a lubricant disposed between the first frame and the end portion, and between the second frame and the end portion. The hermetic container according to claim 13, characterized in that.

19. A system comprising a plurality of hermetic containers connected to each other, At least one of the plurality of hermetic containers is the hermetic container according to any one of claims 1 to 18. A system characterized in that.

20. At least one of the plurality of hermetic containers is used to process a substrate on which a solution film or an organic film is formed. The system according to claim 19, characterized in that.

21. Processing the substrate using the system according to claim 20. A method for manufacturing an article, characterized in that.

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