Transport facility

Abstract

To provide a transport facility capable of easily creating map data of a movement path.SOLUTION: A transport facility includes a transport vehicle 1 for transporting a transport object, a movement path P on which the transport vehicle 1 moves, a movable body 2 that moves separately from the transport vehicle 1, and a movable body control device for controlling the movable body 2. The movable body 2 is provided with a path state information acquisition device 22 for acquiring path state information showing a state of the movement path P and is configured to acquire the path state information by the path state information acquisition device 22 while moving along the movement pat P, and the movable body control device executes map creation processing for creating map data of the movement path P on the basis of the path state information acquired by the path state information acquisition device 22.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a conveying facility including a carrier for conveying an object to be conveyed and a moving path along which the carrier moves.

Background Art

[0002] Patent Document 1 below discloses a conveying facility including a carrier (12) for conveying an object to be conveyed and a moving path (4, 6) along which the carrier (12) moves. Note that the reference numerals shown in parentheses in the description of the background art are those of Patent Document 1.

[0003] In the conveying facility of Patent Document 1, the carrier (12) includes a storage device (32) that stores map data of the moving path (4, 6). Then, the carrier (12) refers to the map data stored in the storage device (32) and moves along the moving path (4, 6).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When the configuration of the moving path of the carrier changes as described above, it is necessary to newly create the map data. Therefore, the work of creating the map data becomes complicated, which is not preferable in the operation of the conveying facility.

[0006] Therefore, it is desired to realize a conveying facility capable of easily creating map data of the moving path.

Means for Solving the Problems

[0007] In view of the above, the characteristic configuration of the conveying facility is a carrier for conveying an object to be conveyed, and A conveying facility comprising a moving path along which the conveying vehicle moves. A moving body that moves separately from the conveying vehicle, And a movement control device that controls the moving body. The moving body is provided with a path state information acquisition device that acquires path state information indicating the state of the moving path, and is configured to acquire the path state information by the path state information acquisition device while moving along the moving path. The movement control device is configured to execute a map creation process for creating map data of the moving path based on the path state information acquired by the path state information acquisition device.

[0008] According to this characteristic configuration, the path state information can be acquired by the path state information acquisition device provided in the moving body that moves separately from the conveying vehicle. And based on the path state information acquired by the path state information acquisition device, the map data of the moving path can be created. Thus, according to this characteristic configuration, the map data of the moving path can be easily created.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Modes for Carrying Out the Invention

[0010] Hereinafter, the conveyance facility 100 according to the embodiment will be described with reference to the drawings. As shown in FIG. 1, the conveyance facility 100 includes a conveyance vehicle 1, a moving body 2, and a moving path P. In the present embodiment, the conveyance facility 100 includes a plurality of conveyance vehicles 1 and a plurality of moving bodies 2.

[0011] The conveyance vehicle 1 is configured to convey a conveyed object W (see FIG. 2). The conveyed object W is, for example, a FOUP (Front Opening Unified Pod) that houses a semiconductor wafer.

[0012] The moving path P is a path along which the conveyance vehicle 1 moves. That is, the conveyance vehicle 1 conveys the conveyed object W along the moving path P.

[0013] In the present embodiment, the moving path P includes one main path Pa formed in a ring shape, a plurality of sub-paths Pb formed in a ring shape each passing through a plurality of processing apparatuses 5, and a plurality of connection paths Pc connecting the main path Pa and the plurality of sub-paths Pb.

[0014] The processing apparatus 5 is an apparatus for performing a predetermined process on the conveyed object W (or the content accommodated in the conveyed object W). For example, the conveyed object W to be processed by the processing apparatus 5 is carried into the processing apparatus 5 by the conveyance vehicle 1, and the conveyed object W after the processing by the processing apparatus 5 is carried out of the processing apparatus 5 by the conveyance vehicle 1.

[0015] The mobile body 2 is configured to move separately from the carrier vehicle 1. In the present embodiment, the mobile body 2 is an unmanned aerial vehicle. That is, the mobile body 2 is configured to be movable along a path different from the movement path P. In this example, the mobile body 2 is configured to fly within a preset flight area A. Note that in this example, at least one flight area A is set in the conveying facility 100 so that at least one mobile body 2 corresponds to one flight area A. Further, in this example, a standby unit 20 where the mobile body 2 as an unmanned aerial vehicle takes off and lands and the landed mobile body 2 waits is provided in the conveying facility 100. It is preferable that a charging device for charging the battery included in the mobile body 2 is provided in the standby unit 20.

[0016] As shown in FIG. 2, in the present embodiment, the movement path P is the rail 4. And the carrier vehicle 1 is configured to travel on the rail 4. In the example shown in FIG. 2, a pair of rails 4 are suspended and supported from the ceiling at intervals in the horizontal direction. That is, in this example, the carrier vehicle 1 is a ceiling carrier vehicle.

[0017] In the present embodiment, the carrier vehicle 1 includes a traveling unit 11 that travels on the rail 4 and a main body unit 12 connected to the traveling unit 11.

[0018] The traveling unit 11 includes traveling wheels 11a that roll on the traveling surface (here, the upper surface) of the rail 4. The traveling wheels 11a are rotationally driven by a traveling drive unit (for example, an electric motor such as a servo motor) (not shown).

[0019] The main body unit 12 is suspended and supported by the traveling unit 11 while being located below the rail 4. The main body unit 12 includes a support unit that is supported so as to be movable up and down with respect to the traveling unit 11 and suspends and supports the conveyed object W, and a lifting unit that moves the support unit up and down (not shown).

[0020] In the example shown in FIG. 2, the carrier vehicle 1 is a ceiling carrier vehicle that travels along a rail 4 suspended and supported from the ceiling. However, the type of the carrier vehicle 1 is not limited to this. For example, the carrier vehicle 1 may be a rail-guided vehicle that travels along a rail provided on the floor surface. Further, the carrier vehicle 1 may be a rail-free carrier vehicle such as an AGV (Automated Guided Vehicle) or an AMR (Autonomous Mobile Robot). When the carrier vehicle 1 is a rail-free carrier vehicle, the carrier vehicle 1 travels along a moving path P that is virtually formed, rather than a moving path P physically formed using a rail or the like. In this case, the moving path P is virtually formed so as to connect a plurality of detected objects (for example, two-dimensional codes, RF (Radio Frequency) tags, etc.) installed on the floor surface. Note that such detected objects may not be provided on the floor surface, and the moving path P may be virtually formed based on a route calculated based on the recognition result of the surrounding environment.

[0021] As shown in FIG. 3, the conveying facility 100 includes a movement control device 7. In the present embodiment, the conveying facility 100 further includes a wireless communication device 3 and a carrier vehicle control device 6.

[0022] The wireless communication device 3 is a device that performs wireless communication with the carrier vehicle 1. In the present embodiment, the wireless communication device 3 includes a plurality of wireless transmission / reception units 31 that are distributed (see also FIG. 1). The wireless transmission / reception unit 31 functions as an access point in wireless communication. Here, in the present application, "wireless communication" refers to communication according to a predetermined wireless communication standard (for example, Wi-Fi (registered trademark), Bluetooth (registered trademark), ZigBee (registered trademark), etc.).

[0023] In the present embodiment, the carrier vehicle 1 further includes a carrier vehicle communication device 13 that performs wireless communication with the wireless communication device 3.

[0024] The carrier vehicle communication device 13 functions as a wireless station that performs wireless transmission and reception with the wireless transmission / reception unit 31. The carrier vehicle communication device 13 is communicably connected to the selected wireless transmission / reception unit 31 (for example, the wireless transmission / reception unit 31 with the strongest radio wave intensity) from among the plurality of wireless transmission / reception units 31 by establishing a communication link therewith. As the carrier vehicle 1 travels, the wireless transmission / reception unit 31 with which the carrier vehicle communication device 13 provided on the carrier vehicle 1 establishes a communication link is switched (roamed). For example, roaming is performed when the reception intensity of the radio wave from the connected wireless transmission / reception unit 31 becomes equal to or less than a specified value.

[0025] The carrier vehicle control device 6 is a device that controls the carrier vehicle 1. In the present embodiment, the carrier vehicle control device 6 is connected to the plurality of wireless transmission / reception units 31 in the wireless communication device 3 via the first communication network N1. Then, the carrier vehicle control device 6 communicates with the carrier vehicle communication device 13 of the carrier vehicle 1 via the wireless transmission / reception unit 31 and controls the carrier vehicle 1. Note that the first communication network N1 may be any of wired, wireless, or a combination thereof.

[0026] In the present embodiment, a control unit (not shown) for controlling the operation of the carrier vehicle 1 (for example, a traveling operation, a delivery operation of the conveyed object W, etc.) is provided on the carrier vehicle 1. Then, the carrier vehicle control device 6 communicates with the carrier vehicle communication device 13 of the carrier vehicle 1 via the wireless transmission / reception unit 31 and issues a command regarding the above operation to the control unit of the carrier vehicle 1.

[0027] As shown in FIG. 1, in the present embodiment, an information holding body 8 is provided at a specific location on the movement path P (here, the rail 4). The information holding body 8 holds predetermined information. In the present embodiment, the information held by the information holding body 8 includes position information indicating a position along the rail 4.

[0028] The information storage body 8 is composed of a one-dimensional code, a two-dimensional code, an RF tag, etc. The information storage body 8 may be arranged on the surface of the rail 4, or may be supported by a predetermined support member arranged in the vicinity of the rail 4. In the example shown in FIG. 1, the information storage body 8 is supported by each of a plurality of support members arranged at a plurality of locations along the movement path P.

[0029] As shown in FIG. 3, in the present embodiment, the carrier vehicle 1 further includes a reading device 14. The reading device 14 is a device that reads information held by the information storage body 8 (here, position information indicating a position along the rail 4). In the present embodiment, the carrier vehicle 1 is configured to recognize the position of the carrier vehicle 1 by reading the position information with the reading device 14 while traveling on the rail 4.

[0030] The movement control device 7 is a device that controls the moving body 2. In the present embodiment, the moving body 2 includes a moving body communication device 21. The moving body communication device 21 is a device that performs wireless communication with the movement control device 7. Note that the moving body communication device 21 may be configured to be capable of wireless communication with at least one of the carrier vehicle communication device 13 and the wireless transceiver 31.

[0031] In the present embodiment, the moving body 2 is provided with a control unit (not shown) for controlling its operation (for example, flight operation, etc.). Then, the movement control device 7 performs wireless communication with the moving body communication device 21 of the moving body 2, and issues a command regarding the above operation to the control unit of the moving body 2. Further, in the present embodiment, the moving body 2 is configured to recognize its own current position.

[0032] As shown in FIG. 3, the moving body 2 includes a path state information acquisition device 22. The path state information acquisition device 22 is a device that acquires the path state information i. The path state information i is information indicating the state of the movement path P.

[0033] As shown in FIG. 4, the moving body 2 is configured to acquire route state information i by the route state information acquisition device 22 while moving along the movement route P. In the example shown in FIG. 4, during the operation of the conveying facility 100, the moving body 2 as an unmanned aerial vehicle flies along the movement route P so as not to interfere with the carrier vehicle 1 traveling on the rail 4, and the route state information acquisition device 22 acquires the route state information i.

[0034] In the present embodiment, the route state information acquisition device 22 includes a camera 221 that photographs the movement route P (here, the rail 4). Note that the camera 221 may be configured to be able to take images at regular intervals (based on time or based on the moving distance of the moving body 2), or may be configured to be able to take videos. Also, the camera 221 may be configured to photograph only the movement route P, or may be configured to photograph the movement route P and the surrounding area. In this example, the information holding body 8 is disposed on the lower surface of the rail 4. And the camera 221 photographs the rail 4 from below. Note that when the moving body 2 is an unmanned aerial vehicle, the camera 221 provided in the moving body 2 may be configured to photograph the movement route P from a plurality of directions.

[0035] In the present embodiment, the camera 221 acquires at least one of the shape of each position on the movement route P (for example, the shape of the straight portion, curved portion, merging portion, branching portion, etc. of the rail 4), the structure of each position on the movement route P (for example, the number of rails 4, the presence or absence of a power supply line provided on the rail 4 to supply power to the carrier vehicle 1, the presence or absence of a lifting mechanism provided on the rail 4 to lift the carrier vehicle 1, etc.), the arrangement of the information holding body 8, and the information held by the information holding body 8 (here, position information indicating a position along the rail 4) as the route state information i.

[0036] As shown in FIG. 5, the movement control device 7 executes a map creation process for creating creation map data M1, which is map data of the movement route P, based on the route state information i acquired by the route state information acquisition device 22. In the example shown in FIG. 3, the movement control device 7 includes a moving body storage unit 71. Then, the creation map data M1 is stored in the moving body storage unit 71. Further, in this example, the movement control device 7 acquires position information indicating the current position of the moving body 2 from the moving body 2. Then, the position information is stored in the moving body storage unit 71.

[0037] Here, in the present application, the "map data of the movement route P" is data in which various information (for example, the information acquired as the route state information i) is reflected in the shape and structure of the movement route P. In the present embodiment, the map data of the movement route P includes the arrangement of the processing device 5, the arrangement of facilities for controlling the passage of the carrier vehicle 1 (for example, traffic lights, barriers, etc.), and the arrangement of the wireless transmission / reception unit 31.

[0038] In the present embodiment, at least one of the carrier vehicle 1 and the carrier vehicle control device 6 includes reference map data M0. The reference map data M0 is map data of the movement route P referred to for the movement of the carrier vehicle 1. In the present embodiment, the reference map data M0 is referred to by the carrier vehicle control device 6 for generating a command for the carrier vehicle 1. In the example shown in FIG. 3, the carrier vehicle control device 6 includes a carrier vehicle storage unit 61. Then, the reference map data M0 is stored in the carrier vehicle storage unit 61. That is, in this example, the carrier vehicle control device 6 includes the reference map data M0. Further, in this example, the carrier vehicle control device 6 acquires position information indicating the current position of the carrier vehicle 1 from the carrier vehicle 1. Then, the position information is stored in the carrier vehicle storage unit 61.

[0039] As shown in FIG. 3, in the present embodiment, the carrier vehicle control device 6 and the movement system control device 7 are connected to each other via the second communication network N2. Therefore, in the present embodiment, the carrier vehicle control device 6 and the movement system control device 7 can reference, transmit, and receive data from each other. The second communication network N2 may be wired, wireless, or a combination thereof.

[0040] As shown in FIG. 5, in the present embodiment, at least one of the carrier vehicle control device 6 and the movement system control device 7 executes a difference extraction process of comparing the created map data M1 and the reference map data M0 and extracting differences between them when there are differences between them. In this example, the carrier vehicle control device 6 acquires the created map data M1 stored in the moving body storage unit 71 from the movement system control device 7, and uses the created map data M1 and the reference map data M0 stored in the carrier vehicle storage unit 61 to execute the difference extraction process. In the difference extraction process, differences due to differences in data format and data items between the created map data M1 and the reference map data M0 are not the target of extraction, and differences in content for the same data format and data items are the target of extraction.

[0041] In the present embodiment, at least one of the carrier vehicle control device 6 and the movement system control device 7 executes a map correction process of correcting the reference map data M0 based on the differences extracted by the difference extraction process. In the map correction process, the reference map data M0 is corrected so that the data related to the differences in the reference map data M0 matches that of the created map data M1. In this example, the carrier vehicle control device 6 corrects the reference map data M0 and updates the reference map data M0 stored in the carrier vehicle storage unit 61 to the corrected one.

[0042] 〔Other Embodiments〕 (1) In the above-described embodiment, the configuration in which the mobile body 2 is an unmanned aerial vehicle that can move along a path different from the movement path P of the carrier vehicle 1 has been described as an example. However, the configuration is not limited to such a case, and the mobile body 2 may be configured to move along the movement path P of the carrier vehicle 1 (for example, a vehicle that travels on the rail 4). Such a mobile body 2 may normally convey the conveyed object W in the same manner as the carrier vehicle 1, or may be a dedicated one that does not convey the conveyed object W but collects the path state information i.

[0043] (2) In the above-described embodiment, the configuration in which the movement control device 7 issues a command to the control unit of the mobile body 2 has been described as an example. However, the configuration is not limited to such a case, and for example, the movement control device 7 may be incorporated into each of the plurality of mobile bodies 2, and the plurality of mobile bodies 2 may operate independently of each other or cooperate with each other.

[0044] (3) In the above-described embodiment, the configuration in which the path state information acquisition device 22 includes the camera 221 that photographs the movement path P has been described as an example. However, the configuration is not limited to such a case, and the path state information acquisition device 22 may be configured to include, for example, a LiDAR (Light Detection And Ranging) device, a millimeter-wave radar, etc. instead of the camera 221.

[0045] (4) In the above-described embodiment, the configuration in which the carrier vehicle control device 6 includes the reference map data M0 has been described as an example. However, the configuration is not limited to such a case, and instead of the carrier vehicle control device 6, the carrier vehicle 1 may include the reference map data M0. Alternatively, both the carrier vehicle control device 6 and the carrier vehicle 1 may include the reference map data M0.

[0046] (5) In the above-described embodiment, the configuration in which the carrier control device 6 executes the difference extraction process has been described as an example. However, the present invention is not limited to such a configuration, and a configuration in which the movement control device 7 executes the difference extraction process instead of the carrier control device 6 may be used. Alternatively, a configuration in which both the carrier control device 6 and the movement control device 7 execute the difference extraction process may be used. In this configuration, when the result of the difference extraction process by the carrier control device 6 and the result of the difference extraction process by the movement control device 7 are different from each other, the difference extraction process may be executed again, or the result of the difference extraction process of either one may be adopted. (6) In the above-described embodiment, the configuration in which the carrier control device 6 executes the map correction process has been described as an example. However, the present invention is not limited to such a configuration, and a configuration in which the movement control device 7 executes the map correction process instead of the carrier control device 6 may be used. Alternatively, a configuration in which both the carrier control device 6 and the movement control device 7 execute the map correction process may be used. In this configuration, when the result of the map correction process by the carrier control device 6 and the result of the map correction process by the movement control device 7 are different from each other, the map correction process may be executed again, or the result of the map correction process of either one may be adopted.

[0047] (7) Note that the configurations disclosed in the above-described embodiments can be applied in combination with the configurations disclosed in other embodiments as long as no contradiction occurs. Regarding other configurations as well, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate without departing from the spirit of the present disclosure.

[0048] Summary of the Present Embodiment Hereinafter, an overview of the conveying equipment described above will be described.

[0049] The conveying equipment is a carrier for conveying a conveyed object, a conveying equipment including a movement path along which the carrier moves, a moving body that moves separately from the carrier, Further comprising a mobile body control device for controlling the mobile body, The mobile body is provided with a path state information acquisition device for acquiring path state information indicating the state of the movement path, and is configured to acquire the path state information by the path state information acquisition device while moving along the movement path, The mobile body control device executes a map creation process for creating map data of the movement path based on the path state information acquired by the path state information acquisition device.

[0050] According to this configuration, the path state information can be acquired by the path state information acquisition device provided in the mobile body that moves separately from the transport vehicle. And, based on the path state information acquired by the path state information acquisition device, map data of the movement path can be created. Thus, according to this configuration, the map data of the movement path can be easily created.

[0051] Here, the transport facility further comprises a transport vehicle control device for controlling the transport vehicle, At least one of the transport vehicle and the transport vehicle control device is provided with reference map data which is the map data of the movement path referred to for the movement of the transport vehicle, It is preferable that at least one of the transport vehicle control device and the mobile body control device executes a difference point extraction process for comparing the created map data which is the map data created by the map creation process with the reference map data and extracting the difference points if there are differences.

[0052] According to this configuration, it is possible to extract the points where the reference map data is different from the actual situation by using the created map data that reflects the actual situation of the movement path. Thereby, it is easy to avoid using the reference map data that is different from the actual situation.

[0053] Also, it is preferable that at least one of the transport vehicle control device and the mobile body control device executes a map correction process for correcting the reference map data based on the difference points extracted by the difference point extraction process.

[0054] According to this configuration, the reference map data can be made the latest one corresponding to the created map data in which the actual situation of the movement path is reflected.

[0055] Further, the path state information acquisition device includes a camera that photographs the movement path. It is preferable that the camera acquires at least one of the shape at each position of the movement path, the structure at each position of the movement path, the arrangement of the information holders provided at specific locations of the movement path, and the information held by the information holders as the path state information.

[0056] According to this configuration, the path state information necessary for creating map data by the map creation process can be appropriately acquired.

[0057] Further, the movement path is a rail. An information holder that holds position information indicating a position along the rail is arranged at a specific location of the rail. The carrier vehicle is configured to include a reading device that reads the position information held by the information holder, and to recognize the position of the carrier vehicle by reading the position information with the reading device while traveling on the rail. The moving body is an unmanned aerial vehicle. It is preferable that the path state information acquisition device includes a camera that photographs the rail.

[0058] According to this configuration, the moving body can fly freely around the rail. Thereby, the camera included in the path state information acquisition device of the moving body can perform photographing from an appropriate direction with respect to the rail. Therefore, the path state information necessary for creating map data by the map creation process can be appropriately acquired.

Industrial Applicability

[0059] The technology according to the present disclosure can be used in a conveying facility including a carrier for conveying a conveyed object and a moving path along which the carrier moves.

Explanation of Signs

[0060] 100: Conveying facility 1: Carrier 14: Reading device 2: Moving body 22: Route state information acquisition device 221: Camera 4: Rail 6: Carrier control device 7: Movement control device 8: Information holding body P: Moving path M0: Reference map data M1: Created map data W: Conveyed object

Claims

1. A conveying facility comprising a carrier for conveying an object to be conveyed and a moving path along which the carrier moves, further comprising: a moving body that moves separately from the carrier; and a movement control device for controlling the moving body, wherein the moving body is provided with a path state information acquisition device for acquiring path state information indicating the state of the moving path, and is configured to acquire the path state information by the path state information acquisition device while moving along the moving path; and the movement control device executes a map creation process for creating map data of the moving path based on the path state information acquired by the path state information acquisition device.

2. The conveying facility according to claim 1, further comprising a carrier control device for controlling the carrier, wherein at least one of the carrier and the carrier control device includes reference map data which is map data of the moving path referred to for the movement of the carrier, and at least one of the carrier control device and the movement control device executes a difference point extraction process for comparing the created map data created by the map creation process with the reference map data and extracting the difference points if there are any differences.

3. The conveying facility according to claim 2, wherein at least one of the carrier control device and the movement control device executes a map correction process for correcting the reference map data based on the difference points extracted by the difference point extraction process.

4. The conveying facility according to any one of claims 1 to 3, wherein the path state information acquisition device includes a camera for photographing the moving path, and the camera acquires at least one of the shape at each position of the moving path, the structure at each position of the moving path, the arrangement of the information holding body provided at a specific location of the moving path, and the information held by the information holding body as the path state information.

5. The conveying facility according to any one of claims 1 to 3, wherein the moving path is a rail, an information holding body for holding position information indicating a position along the rail is arranged at a specific location of the rail, the carrier is provided with a reading device for reading the position information held by the information holding body, and is configured to recognize the position of the carrier by reading the position information by the reading device while traveling on the rail, the moving body is an unmanned aerial vehicle, and the path state information acquisition device includes a camera for photographing the rail. ​

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