Housing container

Abstract

To provide a technique for easily connecting electrodes of a substrate-like sensor to charging terminals during a charging operation of the substrate-like sensor.SOLUTION: A housing container houses a substrate-like sensor. The housing container includes a container body, a lid, and a charging terminal. The container body has a side wall provided with an opening through which the substrate-like sensor can be carried in / out. The lid closes the opening of the container body. The charging terminal has a contact end that can abut against a charging electrode of the substrate-like sensor supported within the housing container. The terminal has a biasing portion that biases the contact end such that the position of the contact end is changed when the contact end is pressed.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] Exemplary embodiments of the present disclosure relate to a storage container.

Background Art

[0002] Patent Document 1 discloses a housing device for housing a substrate-shaped sensor. This housing device has a container body having an opening. Inside the container body, a support portion for supporting the substrate-shaped sensor, a charging contact pin that can contact the terminal portion of the substrate-shaped sensor, and a drive mechanism for driving the contact pin are arranged. The housing device includes a rotary shaft member that drives the drive mechanism from outside the container body. The rotary shaft member has a grip for an operator to operate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique for easily performing the connection between the electrodes of a substrate-shaped sensor and the charging terminals during the charging operation of the substrate-shaped sensor.

Means for Solving the Problems

[0005] In one exemplary embodiment, a housing container for housing a substrate-like sensor is provided. The substrate-like sensor has a plate-like substrate with a first direction as the thickness direction, and a charging electrode including a connection end facing in a second direction intersecting the first direction. The housing container includes a container body, a lid, a support portion, and a charging terminal. The container body has a side wall provided with an opening through which the substrate-like sensor can be inserted and removed. The lid closes the opening of the container body. The support portion supports the substrate-like sensor within the container body such that the first direction is along the vertical direction and the second direction is along the horizontal direction. The charging terminal has a contact end that can abut against the connection end of the substrate-like sensor supported by the support portion. This terminal has a biasing portion that biases the contact end such that the position of the contact end is changed when the contact end is pressed. The distance along the horizontal direction from the unpressed contact end to the lid in a state where the opening is closed by the lid is less than or equal to the distance along the second direction from the connection end to the edge of the substrate facing the connection end.

Advantages of the Invention

[0006] According to the housing container according to one exemplary embodiment, the connection between the electrode of the substrate-like sensor and the charging terminal can be easily performed during the charging operation of the substrate-like sensor.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

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Figure 8

Embodiments for Carrying Out the Invention

[0008] Hereinafter, various exemplary embodiments will be described.

[0009] In one exemplary embodiment, a housing container for housing a substrate-like sensor is provided. The substrate-like sensor has a plate-like substrate with a first direction as the thickness direction, and a charging electrode including a connection end facing in a second direction intersecting the first direction. The housing container includes a container body, a lid, a support portion, and a charging terminal. The container body has a side wall provided with an opening through which the substrate-like sensor can be inserted and removed. The lid closes the opening of the container body. The support portion supports the substrate-like sensor in the container body such that the first direction is along the vertical direction and the second direction is along the horizontal direction. The charging terminal has a contact end that can abut against the connection end of the substrate-like sensor supported by the support portion. This terminal has a biasing portion that biases the contact end so that the position of the contact end is changed when the contact end is pressed. The distance along the horizontal direction from the unpressed contact end to the lid in a state where the opening is closed by the lid is equal to or less than the distance along the second direction from the connection end to the edge of the substrate facing the connection end.

[0010] In the above housing container, when the housing container is closed by the lid with the substrate-like sensor supported by the support portion, the electrode of the substrate-like sensor and the charging terminal of the housing container are electrically connected. Since the distance along the horizontal direction from the contact end of the terminal to the lid is equal to or less than the distance from the connection end of the electrode to the edge of the substrate facing the connection end, in a state where the opening is closed by the lid, the substrate-like sensor is pressed toward the terminal by the lid. Thus, by the operation of closing the lid, the electrode of the substrate-like sensor and the charging terminal can be electrically connected.

[0011] Hereinafter, various embodiments will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts will be denoted by the same reference numerals.

[0012] FIG. 1 is a diagram illustrating a processing system. A housing container according to one exemplary embodiment can house a substrate sensor used in a processing system 1 having a function as a semiconductor manufacturing apparatus S1. The processing system 1 includes load ports 2a to 2d, containers 4a to 4d, a loader module LM, an aligner AN, load lock modules LL1 and LL2, process modules PM1 to PM6, a transfer module TF, and a control unit MC. Note that the number of load ports 2a to 2d, the number of containers 4a to 4d, the number of load lock modules LL1 and LL2, and the number of process modules PM1 to PM6 are not limited and can be any number of one or more.

[0013] The load ports 2a to 2d are arranged along one edge of the loader module LM. The containers 4a to 4d are respectively mounted on the load ports 2a to 2d. Each of the containers 4a to 4d is, for example, a container called a FOUP (Front Opening Unified Pod). Each of the containers 4a to 4d can be configured to house a workpiece W. The workpiece W has a substantially disk shape like a wafer.

[0014] The loader module LM has a chamber wall that defines a transfer space in an atmospheric pressure state inside. A transfer device TU1 is provided in this transfer space. The transfer device TU1 is, for example, an articulated robot and is controlled by the control unit MC. The transfer device TU1 is configured to transfer the workpiece W between the containers 4a to 4d and the aligner AN, between the aligner AN and the load lock modules LL1 to LL2, and between the load lock modules LL1 to LL2 and the containers 4a to 4d.

[0015] Aligner AN is connected to loader module LM. Aligner AN is configured to adjust (calibrate the position) of workpiece W. Aligner AN has a support base 6. Support base 6 is a table rotatable about an axis extending in the vertical direction. The placement surface 6a, which is the upper surface of support base 6, is configured to support workpiece W. Support base 6 is configured to be rotatable by a driving device controlled by control unit MC. The placement surface 6a of support base 6 is circular in plan view. The diameter of placement surface 6a may be smaller than the diameter of workpiece W. For example, support base 6 is formed of a metal material.

[0016] In one example, while the placed workpiece W is being rotated, aligner AN detects the edge of workpiece W by an optical sensor. Aligner NA detects, from the detection result of the optical sensor, the amount of deviation of the angular position of the notch of workpiece W with respect to the reference angular position and the amount of deviation of the center position of workpiece W with respect to the reference position. For example, control unit MC calculates the amount of rotation of support base 6 for correcting the angular position of the notch to the reference angular position based on the amount of deviation of the angular position of the notch. Thereby, the angular position of the notch can be corrected to the reference angular position. Further, control unit MC may control the position of the transfer fork 8 of transfer device TU1 when receiving workpiece W from aligner AN based on the amount of deviation of the center position of workpiece W. Thereby, the center position of workpiece W coincides with a predetermined position on the end effector of transfer device TU1.

[0017] Each of the load lock modules LL1 and LL2 is provided between the loader module LM and the transfer module TF. Each of the load lock modules LL1 and LL2 provides a preliminary decompression chamber. A mounting table 7 is provided in each of the load lock modules LL1 and LL2. The mounting surface 7a, which is the upper surface of the mounting table 7, is configured to support the workpiece W. The mounting surface 7a of the mounting table 7 is circular in plan view. The diameter of the mounting surface 7a may be smaller than the diameter of the workpiece W. In one example, the diameter of the mounting surface 7a may be the same as the diameter of the mounting surface 6a of the aligner AN. For example, the mounting table 7 is formed of a metal material.

[0018] The transfer module TF is hermetically connected to the load lock modules LL1 and LL2 via gate valves. The transfer module TF provides a decompressible decompression chamber. A transfer device TU2 is provided in this decompression chamber. The transfer device TU2 is, for example, an articulated robot having a transfer arm 9 and is controlled by a control unit MC. The transfer device TU2 is configured to transfer the workpiece W between the load lock modules LL1 to LL2 and the process modules PM1 to PM6, and between any two of the process modules PM1 to PM6.

[0019] The process modules PM1 to PM6 are hermetically connected to the transfer module TF via gate valves. Each of the process modules PM1 to PM6 is a processing device configured to perform a dedicated process such as plasma processing on the workpiece W.

[0020] A series of operations when the workpiece W is processed in this processing system 1 are exemplified as follows. The transfer device TU1 of the loader module LM takes out the workpiece W from one of the containers 4a to 4d and conveys the workpiece W to the aligner AN. Next, the transfer device TU1 takes out the workpiece W with its position adjusted from the aligner AN and conveys the workpiece W to one of the load lock modules of the load lock module LL1 and the load lock module LL2. Next, one of the load lock modules reduces the pressure in the preliminary decompression chamber to a predetermined pressure. Next, the transfer device TU2 of the transfer module TF takes out the workpiece W from one of the load lock modules and conveys the workpiece W to any one of the process modules PM1 to PM6. Then, one or more of the process modules PM1 to PM6 process the workpiece W. Then, the transfer device TU2 conveys the processed workpiece W from the process module to one of the load lock modules of the load lock module LL1 and the load lock module LL2. Next, the transfer device TU1 conveys the workpiece W from one of the load lock modules to one of the containers 4a to 4d.

[0021] This processing system 1 includes a control unit MC as described above. The control unit MC can be a computer including a processor, a storage device such as a memory, a display device, an input / output device, a communication device, and the like. A series of operations of the above-described processing system 1 are realized by the control of each part of the processing system 1 by the control unit MC according to a program stored in the storage device.

[0022] Next, a storage container and a substrate sensor according to one exemplary embodiment will be described. FIG. 2 is a cross-sectional view schematically showing an example of the storage container. FIG. 3 is a block diagram for explaining the functions of an example of the substrate sensor. FIG. 4 is a cross-sectional view schematically showing an example of the substrate sensor. FIG. 5 is a plan view schematically showing an example of a state where the substrate sensor is placed in the storage container. FIGS. 6 and 7 are cross-sectional views schematically showing an example of a state where the substrate sensor is placed in the storage container. Note that in FIGS. 5 and 6, a state where the lid of the storage container is not closed is shown, and in FIG. 7, a state where the lid of the storage container is closed is shown. In the description, a rectangular coordinate system defined by the X-axis, Y-axis, and Z-axis shown in the drawings may be referred to. In one example, the Z-axis direction corresponds to the vertical direction, and the X-axis direction and the Y-axis direction correspond to the horizontal plane.

[0023] An example of the storage container 10 includes a container body 11, a lid 16, a support portion 15, and a charging terminal 18, and can be mounted on load ports 2a to 2d in the same manner as a FOUP. The container body 11 includes a bottom wall 12, a top wall 13 facing the bottom wall 12 in the Z-axis direction, and a side wall 14 connecting the bottom wall 12 and the top wall 13. An opening 14d through which the substrate sensor 100 can be inserted and removed is provided in the side wall 14. For example, the bottom wall 12 and the top wall 13 may have a rectangular shape. In this case, the side wall 14 includes a first side wall 14a and a second side wall 14b facing each other in the Y-axis direction, a third side wall 14c connecting the first side wall 14a and the second side wall 14b, and an opening 14d formed at a position facing the third side wall 14c in the X-axis direction.

[0024] Similar to a FOUP, the storage container 10 may be compatible with a transport device (not shown) such as an OHT (Overhead Hoist Transport) or a PGV (Person Guided Vehicle). Further, similar to a FOUP, the storage container 10 may be configured to be able to supply N2 gas. It may be.

[0025] The lid 16 is configured to be able to close the opening 14d of the container body 11. In one example, the lid 16 is configured to be openable and closable by the corresponding load port in a state where the storage container 10 is mounted on the load ports 2a to 2d. For example, the lid 16 moves a predetermined distance in the horizontal direction from the state of closing the opening 14d and moves in the vertical direction to open the opening 14d. In a state where the opening 14d is open, the lid 16 may be held at a predetermined position of the load port. When the opening 14d is closed by the lid 16, the lid 16 is moved to a position at a predetermined distance from the opening 14d so as to face the opening 14d by the load port, and further moves in the horizontal direction to close the opening 14d.

[0026] The support portion 15 supports the substrate-like sensor 100 inside the container body 11. In one example, the support portions 15 project from the first side wall 14a and the second side wall 14b so as to face each other and support the outer edge of the substrate-like sensor 100. In the illustrated example, a plurality of support portions 15 are arranged at intervals in the vertical direction, and one of the support portions 17 is used as a dedicated housing portion for the substrate-like sensor 100.

[0027] The charging terminal 18 is a terminal for charging the substrate-like sensor 100 and is electrically connected to a power source 19 housed inside the container body 11. In the illustrated example, the power source 19 is a so-called secondary battery and is placed on the bottom wall 12. A pair of charging terminals 18 are provided so as to correspond to the positive electrode and the negative electrode. In one example, the charging terminal 18 includes a probe 18a including a contact end 18c for contacting the substrate-like sensor 100 and a biasing portion 18b for biasing the probe 18a. The biasing portion 18b biases the proximal end of the probe 18a toward the contact end 18c so that the position of the contact end 18c is changed when the contact end 18c is pressed. The biasing portion 18b may include an elastic body such as a spring. As an example, the charging terminal 18 may be a so-called spring contact probe.

[0028] As shown in FIGS. 3 and 4, the substrate-shaped sensor 100 includes a base substrate 110, a control substrate 120, a control circuit 101, a sensor 102, a communication unit 103, a charging electrode 105, a battery 106, a charging circuit 107, and a power supply circuit 108. The base substrate 110 is a substrate exemplified by a disk-shaped wafer. The base substrate 110 is not limited to a disk shape and may have any shape such as a polygon or an ellipse as long as it can be transported by a transport device that transports the workpiece W. Notches that can be used for controlling the rotational position and the like in the aligner AN are formed on the edge of the base substrate 110. Examples of the material of the substrate include silicon, carbon fiber, quartz glass, silicon carbide, silicon nitride, and alumina.

[0029] The control substrate 120 is a circuit board provided on the upper surface of the base substrate 110. An example of the control substrate 120 may have a control circuit 101, a communication unit 103, a battery 106, a charging circuit 107, and a power supply circuit 108. The control circuit 101 includes an arithmetic device including a processor, a memory, a controller, a current / voltage meter, etc., and comprehensively controls the operation of the substrate-shaped sensor 100 based on a program stored in the memory.

[0030] The sensor 102 is a sensor for inspecting a semiconductor manufacturing apparatus, and may be, for example, a temperature sensor, a capacitance sensor, a humidity sensor, an acceleration sensor, an image sensor, or the like. The sensor 102 may be controlled by the control circuit 101 so as to acquire a predetermined detection value. The sensor 102 may be provided on the base substrate 110 or the control substrate 120. The communication unit 103 communicates with other external devices. The communication by the communication unit 103 may be controlled by the control circuit 101. The battery 106 supplies power to devices such as each circuit and sensor. The charging circuit 107 is connected between the charging electrode 105 and the battery 106 and controls the charging of the battery 106. The power supply circuit 108 is connected to the battery 106140 and controls the power supply from the battery 106 to each device.

[0031] The charging electrode 105 is a terminal for electrically connecting to an external power source 19 when charging the battery 106. A pair of charging electrodes 105 are provided so as to correspond to the positive electrode and the negative electrode. For example, the charging electrode 105 may be provided on the base substrate 110. The charging electrode 105 in the illustrated example is provided at the edge of the base substrate 110. The pair of charging electrodes 105 are arranged adjacent to each other along the edge of the base substrate 110. The charging electrode 105 includes a connection end 105a facing in the radial direction (second direction) that intersects (orthogonal in the illustrated example) the thickness direction (first direction) of the base substrate 110. The connection end 105a is a portion for connecting to the charging terminal 18 of the storage container 10 and may be the end face of the charging electrode 105.

[0032] In a state where the opening 14d is closed by the lid 16, the distance along the horizontal direction (X-axis direction in the illustrated example) from the non-pressed contact end 18c to the inner surface 16a of the lid 16 is defined as the distance L1 (see FIG. 2). The distance from the connection end 105a to the edge of the base substrate 110 facing the connection end 105a is defined as the distance L2 (see FIGS. 4 and 5). In this case, the distance L1 may be less than or equal to the distance L2. The inner surface 16a is a portion of the lid 16 that abuts against the base substrate 110 of the substrate-like sensor 100 in a state where the substrate-like sensor 100 is housed in the storage container 10.

[0033] Next, the charging operation of the substrate-shaped sensor 100 in the storage container 10 will be described. The substrate-shaped sensor 100 operates the sensor 102, for example, in a process module PM or the like, and acquires a predetermined detection value. The substrate-shaped sensor 100 that has acquired the detection value is transported by the transport device TU2 of the transfer module TF to one of the load lock modules LL1 and LL2. Next, the substrate-shaped sensor 100 is transported to the aligner AN by the transport device TU1 and is position-adjusted in the aligner AN. The substrate-shaped sensor 100 whose position has been adjusted is transported into the storage container 10 from the opening 14d of the storage container 10 by the transport device TU1. When charging of the substrate-shaped sensor 100 is performed inside the storage container 10, the substrate-shaped sensor 100 is supported by the support portion 17 corresponding to the position of the charging terminal 18.

[0034] As described above, by adjusting the position of the substrate-like sensor 100 in the aligner AN, the charging electrode 105 of the substrate-like sensor 100 supported by the support portion 17 of the storage container 10 faces the charging terminal 18 of the storage container 10 (see FIG. 6). In FIG. 6, a state where the charging terminal 18 and the charging electrode 105 are in contact is shown, but it is not necessary for the charging terminal 18 and the charging electrode 105 to be in contact immediately after conveyance by the conveyance device TU1. When the substrate-like sensor 100 is supported by the support portion 17, the load port closes the opening 14d of the storage container 10 with the lid body 16. At this time, the lid body 16 moves along the X-axis direction from the front of the opening 14d and presses the substrate-like sensor 100 toward the third side wall 14c. The substrate-like sensor 100 moves toward the third side wall 14c in response to the movement of the lid body 16. As shown in FIG. 6, in a state where a pair of contact ends 18c are in contact with a pair of connection ends 105a of the substrate-like sensor 100, the edge of the base substrate 110 of the substrate-like sensor 100 protrudes outside the storage container 10 from the opening 14d. From this state, when the lid body 16 is further moved toward the opening 14d side, the charging electrode 105 of the substrate-like sensor 100 presses the charging terminal 18. As shown in FIG. 7, in a state where the lid body 16 closes the opening 14d, the probe 18a is pushed into the biasing portion 18b side, and the charging terminal 18 of the storage container 10 and the charging electrode 105 of the substrate-like sensor 100 are in a state of being reliably in contact. In this state, the charging circuit 107 of the substrate-like sensor 100 starts controlling the charging of the battery 106.

[0035] As described above, in one exemplary embodiment, a housing container 10 for housing the substrate-like sensor 100 is provided. The substrate-like sensor 100 has a plate-shaped base substrate 110 with the Z-axis direction as the thickness direction, and a charging electrode 105 including a connection end 105a facing in the X-axis direction. The housing container 10 includes a container body 11 provided with an opening 14d, a lid 16 capable of closing the opening 14d of the container body 11, a support portion 17 for supporting the substrate-like sensor 100 within the container body 11, and a charging terminal 18 capable of abutting against the connection end 105a. The charging terminal 18 has a biasing portion 18b for biasing the contact end 18c such that the position of the contact end 18c is changed when the contact end 18c is pressed. The horizontal distance L1 from the unpressed contact end 18c to the lid 16 in a state where the opening 14d is closed by the lid 16 is less than or equal to the distance L2 along the X-axis direction from the connection end 105a to the edge of the substrate facing the connection end 105a.

[0036] In the above-described housing container 10, when the housing container 10 is closed by the lid 16 with the substrate-like sensor 100 supported by the support portion 17, the charging electrode 105 of the substrate-like sensor 100 and the charging terminal 18 of the housing container 10 are electrically connected. As described above, since the distance L1 is less than or equal to the distance L2, in a state where the opening 14d is closed by the lid 16, the substrate-like sensor 100 is pressed by the lid 16 toward the charging terminal 18. Thus, by the operation of closing the lid 16, the charging electrode 105 of the substrate-like sensor 100 and the charging terminal 18 of the housing container 10 can be electrically connected.

[0037] Although various exemplary embodiments have been described above, various omissions, substitutions, and changes may be made without being limited to the above-described exemplary embodiments.

[0038] For example, FIG. 8 is a schematic diagram for explaining a housing container of another example. The housing container shown in FIG. 8 has a heating device 21 in addition to the configuration of the housing container of FIG. 2. The heating device 21 heats the substrate-like sensor 100 supported by the support portion 17. The heating device 21 in the illustrated example is disposed below the height position of the support portion 17 that supports the substrate-like sensor 100. Note that the heating device 21 may be disposed above the height position of the support portion 17 so as to heat the substrate-like sensor 100 from directly above. For example, the heating device 21 may have a size larger than that of the substrate-like sensor 100 so as to be able to heat the entire area of the substrate-like sensor 100 in plan view. The heating device 21 is electrically connected to the battery 106 and may be heated by the power of the battery 106. The type of the heating device 21 is not particularly limited. For example, the heating device 21 may be a so-called heating wire heater or the like.

[0039] In addition, although an example in which the charging electrode 105 of the substrate-like sensor 100 is provided on the base substrate 110 has been shown, the position of the charging electrode 105 is not particularly limited. For example, the charging electrode 105 may be provided at the edge of the control substrate 120 or may be provided on the upper surface of the control substrate 120. Note that the position of the charging terminal 18 provided in the housing container 10 may be designed according to the position of the charging electrode 105 of the substrate-like sensor 100.

[0040] In addition, an example in which the charging terminal 18 is provided in the housing container 10 and the charging electrode 105 is provided in the substrate-like sensor 100, that is, an example in which the charging electrode provided in the housing container 10 changes its position by pressing has been shown, but the present invention is not limited thereto. For example, the charging electrode provided in the substrate-like sensor 100 may be biased by a biasing member so as to change its position when pressed by the charging terminal provided in the housing container. Further, in both the housing container 10 and the substrate-like sensor 100, the charging terminals (electrodes) may be biased by a biasing member so as to change their positions by pressing.

[0041] From the above description, it will be understood that various embodiments of the present disclosure have been described herein and that various changes can be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, and the true scope and spirit are indicated by the appended claims.

Description of Reference Numerals

[0042] 10... housing container, 11... container body, 17... support portion, 16... lid, 18... charging terminal (terminal), 18b... biasing portion, 18c... contact end, 100... substrate-like sensor, 105... charging electrode (electrode), 105a... connection end, 110... base substrate (substrate).

Claims

Claim 1 A housing container for housing a substrate-shaped sensor, wherein the substrate-shaped sensor has a plate-shaped substrate with a first direction as a thickness direction, and a charging electrode including a connection end facing in a second direction intersecting the first direction, the housing container includes a container body having a side wall provided with an opening through which the substrate-shaped sensor can be inserted and removed, a lid capable of closing the opening of the container body, a support portion for supporting the substrate-shaped sensor in the container body such that the first direction is along the vertical direction and the second direction is along the horizontal direction, and a charging terminal having a contact end capable of contacting the connection end of the substrate-shaped sensor supported by the support portion, the terminal having a biasing portion for biasing the contact end such that the position of the contact end is changed when the contact end is pressed, the housing container, wherein a distance along the horizontal direction from the non-pressed contact end to the lid in a state where the opening is closed by the lid is equal to or less than a distance along the second direction from the connection end to an edge of the substrate facing the connection end.

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