Inspection system, inspection method, and program

Abstract

To provide an inspection system, an inspection method, and a program, capable of flexibly adjusting a portion where irradiated light is reflected and performing an inspection.SOLUTION: An inspection system 1 includes an irradiation unit 20 that applies diffuse light onto an inspection object 50, an imaging unit 70 that captures an image of the inspection object 50, a shielding unit 40 that blocks reflection of the diffuse light applied by the irradiation unit 20 on the inspection object 50, a drive unit 10 that rotates the shielding unit 40 around the center of the inspection object 50 as an axis, and a defect determination unit that determines whether or not a defect exists in the inspection object 50 based on the image of the inspection object 50 captured by the imaging unit 70.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an inspection system, an inspection method, and a program.

Background Art

[0002] Techniques for inspecting various lenses including lenses having a curve such as spectacle lenses are known. For example, Patent Document 1 discloses an inspection apparatus that can be appropriately inspected with less labor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the inspection apparatus described in Patent Document 1, since the first to fourth illumination portions are lit in order, there is still room for improvement in terms of flexibly adjusting the reflected portion of the illumination for inspection.

[0005] The present invention has been made in view of the above circumstances, and an object thereof is to provide an inspection system, an inspection method, and a program capable of performing inspection by flexibly adjusting the reflected portion of illumination.

Means for Solving the Problems

[0006] To achieve the above object, an inspection system according to a first aspect of the present invention includes an irradiation unit that irradiates a diffused light onto an inspection target, an imaging unit that captures an image of the inspection target, a shielding unit that shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target, a driving unit that rotationally drives the shielding unit about the center of the inspection target; a defect determination unit that determines whether or not a defect exists in the inspection target based on an image of the inspection target captured by the imaging unit.

[0007] To achieve the above object, an inspection method according to a second aspect of the present invention includes: an irradiation step in which an irradiation unit irradiates diffused light onto an inspection target; an imaging step in which an imaging unit captures an image of the inspection target; a shielding step in which a shielding unit shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target; a driving step in which a driving unit rotationally drives the shielding unit about the center of the inspection target; a defect determination step in which a defect determination unit determines whether or not a defect exists in the inspection target based on an image of the inspection target captured in the imaging step. The inspection method includes the above steps.

[0008] To achieve the above object, a program according to a third aspect of the present invention causes a computer to function as: an irradiation control unit that controls an irradiation unit that irradiates diffused light onto an inspection target, an imaging processing unit that controls an imaging unit that captures an image of the inspection target, a driving control unit that controls a driving unit that rotationally drives a shielding unit that shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target about the center of the inspection target, a defect determination unit that determines whether or not a defect exists in the inspection target based on an image of the inspection target captured by the imaging unit.

Advantages of the Invention

[0009] According to the present invention, inspection can be performed by flexibly adjusting the reflected light portion of illumination.

Brief Description of the Drawings

[0010]

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Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals.

[0012] Fig. 1 shows the overall configuration of the inspection system 1 according to an embodiment of the present invention. The inspection system 1 is a device for inspecting the presence or absence of defects in an inspection object 50 such as glasses or contact lenses. Note that the defects in this embodiment refer to those that do not meet the standards at the time of shipment, such as scratches, dirt, and air bubbles inside the lens, in addition to scratches and dirt.

[0013] The inspection system 1 includes a housing 2 and an image processing unit 80. The housing 2 is formed of a light-shielding material and has a closable box-like shape. The inner surface of the housing 2 is subjected to an antireflection process to prevent light reflection by reducing the light reflectance. The housing 2 includes, inside thereof, a drive unit 10, an irradiation unit 20, a drive shaft 30, a shielding unit 40, an inspection object 50, a pedestal 60, and an imaging unit 70. In the inspection system 1 in this embodiment, the inspection object 50 can be inspected by a user setting the inspection object 50 on the pedestal 60 inside the housing 2.

[0014] The drive unit 10 is, for example, a pulse motor and has a function of rotating the shielding unit 40 connected to the drive shaft 30. The number of rotations and the rotation angle of the shielding unit 40 by the drive unit 10 can be arbitrarily set by the user. The drive unit 10 adjusts the shielding unit 40 to a desired angle by rotating the drive shaft 30 according to a control signal from the image processing unit 80.

[0015] The irradiation unit 20 is, for example, a ring illumination as shown in Fig. 2 and irradiates the inspection object 50. As shown in the figure, the irradiation unit 20 includes a plurality of LEDs (Light emitting diodes) 210. The irradiation unit 20 irradiates diffused light according to a control signal from the image processing unit 80. Note that the irradiation unit 20 is provided with a diffusion plate for diffusing the irradiated light.

[0016] The drive shaft 30 is a shaft that rotates by the drive unit 10 and is a shaft with a point on the center point O of the inspection object 50 as the center point O'. That is, the drive shaft 30 rotates around the center point O' by the drive of the drive unit 10.

[0017] The shielding part 40 is a member that shields the reflection of the irradiation part 20 onto the inspection object 50, and is made of an opaque resin-based material. As shown in FIG. 3, the shielding part 40 has a fan shape with the same center (center O') as the drive shaft 30. The shielding part 40 is connected to the drive shaft 30 at 90 degrees so as to be parallel to the irradiation part 20 (see FIG. 1), and is formed to rotate in accordance with the rotation of the drive shaft 30. By the shielding part 40 shielding the diffused light from the irradiation part 20, the reflection onto the inspection object 50 is prevented. Specifically, when the shielding part 40 is not used, as shown in FIG. 4, in the image of the inspection object 50 captured by the imaging part 70, reflection 55 occurs overall and covers a part of the defect 77. On the other hand, when the shielding part 40 is used, as shown in FIG. 8, a part where reflection 55 does not occur is formed in the image of the inspection object 50. In the illustrated example, an example is shown when the shielding part 40 rotates to a position where the defect 77 can be recognized entirely.

[0018] Returning to FIG. 1, the inspection object 50 is, for example, a lens such as glasses or contact lenses. In this embodiment, the inspection object 50 is positioned such that its center O overlaps with the center O' of the drive shaft 30, and is placed on the pedestal 60 with the convex surface facing down.

[0019] The pedestal 60 includes a mechanism for holding the inspection object 50, and is movable left and right so that the center O of the inspection object 50 overlaps with the center O' of the drive shaft 30. Also, the pedestal 60 is movable up and down so as to be able to adjust the imaging distance in the imaging part 70. The pedestal 60 is box-shaped and is arranged at the inner lower part of the housing 2. Note that by moving the pedestal 60 up and down, the distance between the irradiation part 20 and the inspection object 50 can also be adjusted. Therefore, by setting the distance between the irradiation part 20 and the inspection object 50 to an appropriate distance, the parallelism can be increased and it becomes easier to detect unevenness defects in the inspection object 50. That is, the pedestal 60 can operate in the XY plane shown in FIG. 1 for center adjustment, the imaging part 70 can operate in the Z direction shown in FIG. 1 for focus adjustment, and the irradiation part 20 can operate in the Z direction shown in FIG. 1 for parallelism adjustment.

[0020] The imaging unit 70 is a camera, and captures an image of the inspection object 50 according to a control signal from the image processing unit 80. The imaging unit 70 is disposed at the inner lower part of the pedestal 60. Note that the image captured by the imaging unit 70 may be stored in a storage unit included in the imaging unit 70, or may be stored in the storage unit of the image processing unit 80.

[0021] The image processing unit 80 is an information terminal (so-called computer) such as a smartphone, a tablet, or a PC (Personal Computer), and communicates with the imaging unit 70 in accordance with well-known communication standards such as LAN (Local Area Network) and USB (Universal Serial Bus). Further, the image processing unit 80 has a function of controlling the driving of the driving unit 10 and the irradiation of the irradiation unit 20. That is, although not shown in the figure, the image processing unit 80 is communicably connected to both the driving unit 10 and the irradiation unit 20.

[0022] As shown in FIG. 5, the image processing unit 80 includes a storage unit 110, a control unit 120, an input / output unit 130, a communication unit 140, and a system bus 150 that interconnects these components.

[0023] The storage unit 110 includes a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The ROM stores a program 111 executed by the CPU (Central Processing Unit) of the control unit 120 and various data (not shown) necessary in advance for executing the program 111.

[0024] The program 111 is a program for executing a defect determination process described later, and is stored in the storage unit 110 in advance.

[0025] The control unit 120 is composed of a CPU, an ASIC (Application Specific Integrated Circuit), etc. The control unit 120 operates according to the program 111 stored in the storage unit 110 and executes the processing according to the program 111. As the main functional units provided by the program 111 stored in the storage unit 110, the control unit 120 includes a drive control unit 121, an irradiation control unit 122, an imaging processing unit 123, a sorting unit 124, a synthesis unit 125, and a defect determination unit 126.

[0026] The drive control unit 121 is a functional unit that outputs a drive signal to the drive unit 10 according to an operation on the user input / output unit 130 to rotate the drive shaft 30 and the shielding unit 40. Note that the number of rotations of the drive shaft 30 and the shielding unit 40 is set by the user in advance.

[0027] The irradiation control unit 122 is a functional unit that changes the illuminance and irradiation angle in the irradiation unit 20 according to an operation on the user input / output unit 130. Further, the irradiation control unit 122 has a function of moving the pedestal 60 up, down, left, and right according to an operation on the user input / output unit 130 to adjust the position so that the center O of the inspection object 50 overlaps with the center O' of the drive shaft 30, and a function of adjusting the imaging distance in the imaging unit 70.

[0028] The imaging processing unit 123 is a functional unit that controls the imaging unit 70 according to an operation on the user input / output unit 130 and images the inspection object 50. Specifically, the imaging processing unit 123 images the inspection object 50 through the imaging unit 70 for the same number of times as the number of rotations of the shielding unit 40.

[0029] The sorting unit 124 is a functional unit that divides the image of the inspection object 50 captured by the imaging processing unit 123 into pixels and sorts them in descending order based on the respective luminance information. For example, when six images are captured by the imaging processing unit 123, the sorting unit 124 divides each image into pixels and sorts the pixels located at the same coordinates in descending order based on the luminance information for all the pixels included in the six images. Note that, in this example, an example of sorting in descending order is shown, but sorting in ascending order may also be possible.

[0030] The synthesizing unit 125 is a functional unit that extracts and synthesizes the pixels in the intermediate layer excluding the maximum luminance and the minimum luminance for each pixel sorted by the sorting unit 124. By extracting and synthesizing the pixels in the intermediate layer by the synthesizing unit 125, an image of the inspection object 50 from which the reflection by the irradiation unit 20 is excluded can be generated.

[0031] The defect determination unit 126 is a functional unit that determines whether or not there is a defect in the inspection object 50 based on the image of the inspection object 50 generated by the synthesizing unit 125. Specifically, the defect determination unit 126 determines whether or not there is a portion having a luminance equal to or higher than a predetermined specified luminance in the image of the inspection object 50 generated by the synthesizing unit 125, and if it exists, determines whether or not the length of that portion is equal to or longer than the specified length, thereby determining whether or not there is a defect. Note that the determination method is not limited to this, and any method such as area, or a combination of luminance and length other than length may be used.

[0032] The input / output unit 130 is composed of a keyboard, a mouse, a camera, a microphone, a liquid crystal display, an organic EL (Electro-Luminescence) display, etc., and is a device for inputting and outputting various data. Note that the input / output unit 130 displays the image of the inspection object 50.

[0033] The communication unit 140 is a device for the image processing unit 80 to communicate with the drive unit 10, the irradiation unit 20, the imaging unit 70, etc. The above is the configuration of the inspection system 1.

[0034] Next, the operation of the inspection system 1 will be described with reference to FIGS. 6 to 13. FIG. 6 is a flowchart showing an example of the defect determination process in the inspection system 1. In this defect determination process, the presence or absence of defects in the inspection object 50 is determined. Hereinafter, it is assumed that the inspection object 50 is set on the pedestal 60 by the user. Also, in this example, it is assumed that the drive shaft 30 and the shielding portion 40 are set to rotate 6 times in advance, and the rotation angle per rotation is 60 degrees. Further, it is assumed that the irradiation unit 20 irradiates diffused light with a luminance set in advance by the user. Note that the rotation angle may be equal to or less than the central angle of the shielding portion 40, and there may be an overlap of the shielding portions. That is, when the central angle of the shielding portion 40 is 60 degrees, the rotation angle may be 40 degrees. In that case, instead of 9 rotations, the rotation may be 10 or more times so that there is an overlapping shielding portion (overlap) with the portion shielded in the previous rotation in one rotation.

[0035] The defect determination process starts when an operation is performed on the input / output unit 130 by the user.

[0036] When the defect determination process shown in FIG. 6 is started, the control unit 120 drives the drive unit 10 by the function of the drive control unit 121, rotates the drive shaft 30 by a preset angle, and rotates the shielding unit 40 (step S1). Specifically, in the process of step S1, the drive control unit 121 transmits a control signal for rotating the drive shaft 30 by 60 degrees, which is a preset angle, to the drive unit 10, thereby rotating the shielding unit 40 as shown in FIG. 7.

[0037] After executing the process of step S1 shown in FIG. 6, the control unit 120 captures an image of the inspection object 50 by the function of the imaging processing unit 123 (step S2). Specifically, in the process of step S2, the imaging processing unit 123 controls the imaging unit 70 according to the timing when an operation on the input / output unit 130 by the user is performed, and captures an image of the inspection object 50. In the process of step S2, for example, as shown in FIG. 8, an image in which no reflection 55 by the irradiation unit 20 occurs in the portion of the inspection object 50 covered by the shielding unit 40 is captured. Note that, in the situation where the shielding unit 40 is at the position shown in FIG. 8, an image in which the entire defect 77 can be visually recognized will be captured.

[0038] After executing the process of step S2 shown in FIG. 6, the control unit 120 determines whether the rotation for a preset number of times has been completed, that is, whether the rotation has been performed the preset number of times (step S3). Specifically, in the process of step S3, the control unit 120 determines whether the rotation with a preset rotation angle of 60 degrees per rotation and a rotation number of 6 times has been completed, that is, whether the rotation of 360 degrees has been performed.

[0039] If the rotation has not been performed the preset number of times (step S3; No), the process returns to step S1, and the drive unit 10 is driven by the function of the drive control unit 121 to rotate the shielding unit 40. By executing the process of step S1 again, the shielding unit 40 rotates and moves from the position shown in FIG. 7 to the position shown in FIG. 9.

[0040] Then, after the process of step S1 shown in FIG. 6, by executing the process of step S2 again, as shown in FIG. 10, an image in which no reflection 55 by the irradiation unit 20 occurs in the portion of the inspection object 50 covered by the shielding unit 40 is captured. In this way, the processes of step S1 and step S2 are repeatedly performed, and a number of images corresponding to the preset number of rotations are captured.

[0041] Returning to FIG. 6, when it is determined in the process of step S3 that the set number of rotations has been completed (step S3; Yes), the control unit 120 divides all the images captured in the process of step S2 into pixels by the function of the sorting unit 124, and sorts the pixels located at the same coordinates in each image in descending order based on the luminance information (step S4). Specifically, in the process of step S4, the sorting unit 124 divides the images captured in the process of step S2 into pixels in units of pixels as shown in FIG. 11. In the illustrated example, an example of being divided into respective pixels indicated by coordinates of (1, 1) to (X, X) is shown. Note that all six images captured in the process of step S2 are divided. Then, as shown in FIG. 12, for the first to sixth images, the pixels of the same coordinates from (1, 1) to (X, X) are sorted in descending order based on the luminance information.

[0042] After executing the process of step S4 shown in FIG. 6, the control unit 120 extracts and synthesizes the pixels of the intermediate layer excluding the maximum luminance and the minimum luminance among the respective pixels of the first to sixth images by the function of the synthesizing unit 125 (step S5). Specifically, in the process of step S5, the synthesizing unit 125 extracts and synthesizes the pixels of the intermediate layer other than the pixels of the maximum luminance and the pixels of the minimum luminance among the respective pixels sorted in the process of step S4 from their respective coordinates, thereby generating the synthesized image shown in FIG. 13. For example, when N images are captured, the process of extracting the pixels of an arbitrary coordinate (x, y) of the images from the first to the Nth image and sorting them in order from the brighter image to the darker image is performed for all the coordinates of each image. By doing so, the brighter images will gather in the first image and the darker images will gather in the Nth image. In this state, the images at the positions where there is no reflection and the sensitivity to defects is high are obtained as the pixels of the intermediate layer and synthesized. As a result, as shown in the figure, an image of the inspection object 50 excluding the reflection by the irradiation unit 20 is generated. Note that an image of the layer where the reflection disappears and the defect can be clearly seen may be registered in advance, and post-processing such as defect extraction may be performed using the registered image.

[0043] After executing the process of step S5 shown in FIG. 6, the control unit 120 determines, by the function of the defect determination unit 126, whether there is a portion with a luminance equal to or higher than a predetermined luminance in the image generated in the process of step S5 (step S6). Specifically, in the process of step S6, the defect determination unit 126 determines whether there is a portion with a luminance equal to or higher than the predetermined luminance by determining whether each pixel of the image generated in the process of step S5 includes a pixel with a luminance equal to or higher than the luminance predetermined by the user.

[0044] In the process of step S6, when it is determined that there is a portion with a luminance equal to or higher than the predetermined luminance (step S6; Yes), that is, when the image includes pixels with a luminance equal to or higher than the luminance predetermined by the user, the control unit 120 determines, by the function of the defect determination unit 126, whether the length of the portion with a luminance equal to or higher than the predetermined luminance determined in the process of step S6 is equal to or longer than a predetermined length (step S7). Specifically, in the process of step S7, the defect determination unit 126 determines whether the length obtained by combining pixels with a luminance equal to or higher than the luminance predetermined by the user is equal to or longer than the length predetermined by the user. In addition to the length, determination may be made based on the area or the like. Also, for example, if the luminance is equal to or higher than the first reference, it is determined whether the length is equal to or longer than the first length, and if the luminance is equal to or higher than the second reference and less than the first reference, it is determined whether the length is equal to or longer than the second length, which is longer than the first length. Different reference lengths may be set according to the luminance, and the determination may be made based on the relationship between the luminance and the length. Also, the determination may be made using the feature amount obtained from the defect.

[0045] In the process of step S7, when it is determined that the length of the portion with a luminance equal to or higher than the predetermined luminance determined in the process of step S6 is equal to or longer than the predetermined length (step S7; Yes), the control unit 120 determines, by the function of the defect determination unit 126, that there is a defect in the inspection object 50 (step S8), and ends the defect determination process.

[0046] On the other hand, in the process of step S6, if it is determined that there is no portion with a luminance equal to or higher than a predetermined specified luminance (step S6; No), or in the process of step S7, if it is determined that the length of the portion with a luminance equal to or higher than the specified luminance determined in the process of step S6 is less than the specified length (step S7; No), the control unit 120 determines, by the function of the defect determination unit 126, that there is no defect in the inspection object 50 (step S9), and ends the defect determination process.

[0047] The above is the operation of the inspection system 1. Thus, according to the inspection system 1 in this embodiment, the shielding unit 40 is rotated about the center of the inspection object 50 at an arbitrary angle set by the user. Thereby, it is possible to partially prevent the reflection of the diffused light irradiated by the irradiation unit 20 onto the inspection object 50. Then, by generating an image combining the pixels of the intermediate layer among the images of the inspection object 50 captured at each arbitrary angle set by the user, it is possible to generate an image with improved image sensitivity for defects. Therefore, it is possible to perform the inspection by flexibly adjusting the reflected portion of the illumination.

[0048] (Modification example) Note that the present invention is not limited to the above embodiment, and various modifications and applications are possible. For example, the inspection system 1 according to the above embodiment does not necessarily have all the technical features shown above, and may have some of the configurations described in the above embodiment so as to solve at least one problem in the prior art. Also, for each of the following modification examples, at least a part may be combined.

[0049] In the above-described embodiment, as shown in FIG. 3, an example was shown in which one fan-shaped shielding portion 40 having the same center (center O') as the drive shaft 30 was provided, but this is merely an example. The number of shielding portions 40 is not limited to one, and for example, as shown in FIG. 14, two shielding portions 40 may be provided at positions facing each other. Further, as shown in FIG. 15, a plurality of shielding portions 40 may be provided in a windmill shape. Furthermore, the shielding portion 40 is not limited to a fan shape, and may have other shapes, for example, a shape adapted to the shape of the inspection object 50. According to these, it is possible to perform the inspection by flexibly adjusting the reflected portion of the illumination according to the shape of the inspection object 50.

[0050] Also, in the above-described embodiment, an example was shown in which the drive unit 10 is driven in response to a user operation on the input / output unit 130 of the image processing unit 80, but this is merely an example. The drive unit 10 may be started by an operation of the user on the drive unit 10 in addition to the drive signal from the image processing unit 80. Similarly, for the irradiation unit 20, in addition to the user operation on the input / output unit 130 of the image processing unit 80, the illuminance and the irradiation angle may be adjusted by an operation of the user on the irradiation unit 20.

[0051] Also, in the above-described embodiment, an example was shown in which the drive shaft 30 and the shielding portion 40 are rotated by driving the drive unit 10, but for example, the shielding portion 40 may be fixed and the inspection object 50 may be rotated. That is, the drive unit 10 and the drive shaft 30 may be configured to rotate the inspection object 50.

[0052] Also, in the above-described embodiment, an example was shown in which the inspection system 1 determines the presence or absence of a defect, but in addition to this, it may be possible to determine which classification of a plurality of classifications the defect belongs to. Specifically, criteria for each classification of the defect may be provided, and it may be determined which classification of the defect it is by determining whether or not it applies. According to this, it is possible to collect data such as which classification of defects is likely to occur, which can be used for future improvement.

[0053] Note that the image processing unit 80 in the inspection system 1 according to the above-described embodiment can be realized using a normal computer instead of a dedicated device. For example, the image processing unit 80 that executes any of the above-described processes may be configured by installing a program for executing any of the above on a computer from a recording medium storing the program. Further, one image processing unit 80 may be configured by a plurality of computers operating in cooperation.

[0054] In addition, when the above-described functions are realized by sharing between an OS (Operating System) and an application, or by cooperation between the OS and the application, only the part other than the OS may be stored in a medium.

[0055] It is also possible to superimpose a program on a carrier wave and distribute it via a communication network. For example, the program may be posted on a bulletin board (BBS, Bulletin Board System) on the communication network, and the program may be distributed via the network. Then, these programs may be started and configured to execute the above-described processes by executing them in the same manner as other application programs under the control of the operating system.

[0056] The present invention can be implemented in various embodiments and modifications without departing from the broad spirit and scope of the present invention. Further, the above-described embodiments are for explaining the present invention and do not limit the scope of the present invention. That is, the scope of the present invention is indicated by the claims rather than the embodiments. And various modifications made within the scope of the claims and within the scope of the meaning of the invention equivalent thereto are considered to be within the scope of the present invention.

Explanation of Reference Numerals

[0057] 1 Inspection system, 2 Housing, 10 Driving unit, 20 Irradiation unit, 30 Drive shaft, 40 Shielding unit, 50 Object to be inspected (inspection target), 55 Reflection, 60 Pedestal, 70 Imaging unit, 77 Defect, 80 Image processing unit, 110 Memory unit, 111 Program, 120 Control unit, 121 Drive control unit, 122 Irradiation control unit, 123 Imaging processing unit, 124 Sorting unit, 125 Composition unit, 126 Defect determination unit, 130 Input / output unit, 140 Communication unit, 150 System bus, 210 LED

Claims

1. An irradiation unit that irradiates diffused light onto an inspection target; An imaging unit that captures an image of the inspection target; A shielding unit that shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target; A driving unit that rotationally drives the shielding unit about the center of the inspection target; A defect determination unit that determines whether or not there is a defect in the inspection target based on the image of the inspection target captured by the imaging unit. The inspection system comprises the above components. Inspection system.

2. The imaging unit captures images of the inspection target for the number of rotational drive times of the shielding unit by the driving unit, The inspection system further comprises a combining unit that combines the images of the inspection target for the number of rotational drive times captured by the imaging unit, The defect determination unit determines whether or not there is a defect in the inspection target based on the image of the inspection target combined by the combining unit. The inspection system according to Claim 1.

3. A sorting unit that divides the images of the inspection target for the number of rotational drive times captured by the imaging unit into pixels and sorts the pixels at the same coordinates based on luminance information respectively; The combining unit combines the images of the inspection target by combining the pixels at the middle level among the pixels sorted by the sorting unit. The inspection system according to Claim 2.

4. The defect determination unit determines that there is a defect in the inspection target when there is a portion in the image of the inspection target that is equal to or higher than a predetermined luminance and the length of the portion is equal to or longer than a predetermined length. The inspection system according to any one of Claims 1 to 3.

5. An irradiation step in which an irradiation unit irradiates diffused light onto an inspection target; An imaging step in which an imaging unit captures an image of the inspection target; A shielding step in which a shielding unit shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target; A driving step in which a driving unit rotationally drives the shielding unit about the center of the inspection target; A defect determination step in which a defect determination unit determines whether or not there is a defect in the inspection target based on the image of the inspection target captured in the imaging step. An inspection method comprising the above steps.

6. A computer, An irradiation control unit that controls an irradiation unit that irradiates diffused light onto an inspection target, An imaging processing unit that controls an imaging unit that captures an image of the inspection target, A driving control unit that controls a driving unit that rotationally drives a shielding unit that shields the reflection of the diffused light irradiated by the irradiation unit onto the inspection target about the center of the inspection target, A defect determination unit that determines whether or not there is a defect in the inspection target based on the image of the inspection target captured by the imaging unit. A program that functions as.

Images