Filter unit

Abstract

To provide a filter unit that can be arranged straight without tilting, upon inserting a filter member into a container.SOLUTION: A filter unit 1 for removing impurities included in a fluid, at least comprises a cylindrical container 2 and a filter member 3 of a smaller outer diameter relative to the inner diameter of the container 2 in which a filter support member 5 is to be arranged between the filter member 3 and the container 2 so that the filter member 3 can be erected straight without tilting upon inserting the filter member 3 into the container 2 to arrange the same therein.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a filter unit.

Background Art

[0002] A silicon wafer (hereinafter simply referred to as a wafer) on which a plurality of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed on the surface is ground on the back surface to a predetermined thickness and then divided into individual devices by a cutting device, and used in electrical devices such as mobile phones and personal computers.

[0003] Here, when the wafer is cut by a cutting device, there is a problem that cutting chips adhere to and remain on the wafer surface.

[0004] Therefore, the applicant has proposed a processing method in which a surfactant is added to the cutting water supplied to the processing point during cutting (see, for example, Patent Document 1).

[0005] In addition, a circulation system for a processing fluid has also been proposed in which a surfactant is removed from the waste liquid (hereinafter simply referred to as liquid) used in the cutting device to make it clean water, and then the surfactant is added again at a predetermined concentration and supplied to the cutting device as cutting water (see, for example, Patent Document 2).

[0006] The circulation system shown in Patent Document 2 removes the surfactant contained in the liquid by passing the liquid through a filter unit. The filter unit has a bottom surface, and a cylindrical filter member having an outer diameter smaller than the inner diameter of the container is inserted and disposed in the center of a cylindrical container (housing) having an opening on the upper surface, and the opening of the container is covered with a lid portion.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0008] However, in the filter unit disclosed in Patent Document 2, when a filter member is inserted and disposed at the center inside the container, there is a gap between the inner wall of the container and the outer peripheral side surface of the filter member, so there is a problem that the filter member may tilt.

[0009] When the filter member tilts, the fitting convex portion (cylindrical portion 48) that mates with the inner cylindrical flow path of the filter member provided on the bottom surface of the lid portion hits the upper surface of the filter member, and the filter member may be damaged.

[0010] An object of the present invention is to provide a filter unit that can be disposed straight without tilting when a filter member is inserted into a container.

Means for Solving the Problems

[0011] In order to solve the above-described problems and achieve the object, a filter unit of the present invention is a filter unit that removes impurities contained in a fluid, and the filter unit includes at least a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container. When the filter member is inserted and disposed in the container, a filter support member is disposed so that the filter member can stand straight without tilting between the filter member and the container.

[0012] The filter unit of the present invention is a filter unit for removing impurities contained in a fluid, and the filter unit includes at least a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container. The outer periphery of the filter member is further provided with a filter support portion that can be erected straight without tilting when the filter member is inserted and disposed in the container and abuts against the inner wall of the container.

[0013] The filter unit of the present invention is a filter unit for removing impurities contained in a fluid, and the filter unit includes at least a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container. On the inner wall side of the container, when the filter member is inserted and disposed in the container, it is further provided with a filter support portion that abuts against the filter member and can be erected straight without tilting the filter member.

Effect of the Invention

[0014] The filter unit of the present invention has the effect that the filter member can be placed straight without tilting when inserted into the container.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0016] Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Also, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially identical ones. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0017] 〔Embodiment 1〕 The filter unit according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the filter unit according to Embodiment 1 disassembled. FIG. 2 is a side cross-sectional view of the filter unit according to Embodiment 1. FIG. 3 is a side cross-sectional view showing an enlarged view of part III in FIG. 2.

[0018] The filter unit 1 shown in FIGS. 1 and 2 removes impurities contained in the fluid. The filter unit 1 according to Embodiment 1 removes impurities such as cutting chips and surfactants contained in cutting water (pure water in Embodiment 1) from the cutting water.

[0019] As shown in FIGS. 1 and 2, the filter unit 1 includes a container 2, a filter member 3, a lid member 4, and a filter support member 5. The container 2 is formed in a cylindrical shape with the lower part closed by a bottom wall 21, and an opening 23 that communicates the inside and outside of the container 2 is provided at the upper end by the upper end of a peripheral wall 22 continuous with the outer edge of the bottom wall 21. In Embodiment 1, the container 2 is formed in a cylindrical shape with a constant inner and outer diameter of the peripheral wall 22. In Embodiment 1, the container 2 is provided with a convex portion 24 for positioning the filter member protruding from the center of the bottom wall 21 and a ring-shaped sealing convex portion 25 protruding from the outer periphery of the filter member positioning convex portion 24 of the bottom wall 21.

[0020] The filter member 3 has an outer diameter smaller than the inner diameter of the container 2 and is formed in a cylindrical shape having a central hole 31 with a circular cross-section extending along the axis in the center. Also, the filter member 3 has an outer diameter larger than the outer diameter of the sealing convex portion 25 and an inner diameter smaller than the inner diameter of the sealing convex portion 25. The filter member 3 is formed with a constant inner and outer diameter along the axis. In Embodiment 1, the filter member 3 is made of charcoal having a large number of fine pores and excellent adsorption power, which is a so-called activated carbon filter made by carbonizing carbonaceous substances such as wood and coconut shells at a high temperature. However, in the present invention, it is not limited to an activated carbon filter and may be a so-called filtration filter composed of a porous resin or the like.

[0021] Also, in Embodiment 1, ring-shaped seal members 6 are attached to both ends of the filter member 3. In Embodiment 1, the seal member 6 is composed of a sponge. The seal member 6 is formed in a ring shape with an outer diameter equal to the outer diameter of the filter member 3 and an inner diameter smaller than the inner diameter of the filter member 3, and includes a ring-shaped portion 61 that is overlapped with both end faces of the filter member 3 and a cylindrical portion 62 that is continuous with the outer edge of the ring-shaped portion 61 and is formed in a cylindrical shape with an inner diameter equal to the outer diameter of the filter member 3 and an outer diameter smaller than the inner diameter of the container 2 and covers the outer periphery of the filter member 3.

[0022] The seal member 6 is attached to both ends of the filter member 3 such that the ring-shaped portion 61 is overlapped with the end face of the filter member 3 and the cylindrical portion 62 is put over the outer periphery of the filter member 3. The filter member 3 is accommodated in the container 2 with ring-shaped seal members 6 attached to both ends. When the filter member 3 is accommodated in the container 2, the ring-shaped portion 61 of the seal member 6 attached to the lower end is overlapped on the sealing convex portion 25.

[0023] The lid member 4 is attached to the upper end of the container 2 to close the opening 23. The lid member 4 includes a disk portion 41 formed in a thick disk shape, a cylindrical portion 43 erected from the outer edge of the lower surface 42 of the disk portion 41 and fitted to the outer periphery of the upper end of the peripheral wall 22 of the container 2, a fluid introduction path 44, a fluid discharge path 45, and a partitioning convex portion 46.

[0024] One end of the fluid introduction path 44 opens to the outer peripheral surface of the disk portion 41, and the other end opens to the outer peripheral portion of the lower surface 42 of the disk portion 41. It is a flow path formed in the disk portion 41 for flowing fluid. When the lid member 4 is attached to the upper end of the container 2, the fluid introduction path 44 guides the fluid to be purified between the outer peripheral surface of the filter member 3 accommodated in the container 2 and the inner peripheral surface 26 of the container 2.

[0025] The fluid discharge path 45 includes a flow path 47 formed in the disk portion 41 with one end opening to the outer peripheral surface of the disk portion 41 and the other end opening to the center of the lower surface 42 for flowing fluid, and a cylindrical portion 48 that is convex from the lower surface 42 and continues to the other end of the flow path 47. The outer diameter of the cylindrical portion 48 is smaller than the inner diameters of the filter member 3 and the ring-shaped portion 61 of the seal member 6. When the lid member 4 is attached to the upper end of the container 2, the cylindrical portion 48 penetrates into the ring-shaped portion 61 of the seal member 6 and the inner periphery of the filter member 3, and guides the fluid from which impurities have been removed by the filter member 3 on the inner periphery of the filter member 3 outside the filter unit 1.

[0026] The partition convex portion 46 is formed in a ring shape protruding from the outer periphery of the cylindrical portion 48 on the lower surface 42 of the disk portion 41. The inner and outer diameters of the partition convex portion 46 are equal to the inner and outer diameters of the seal convex portion 25. When the lid member 4 is attached to the upper end of the container 2, the partition convex portion 46 is overlapped on the ring-shaped portion 61 of the seal member 6 attached to the upper end of the filter member 3.

[0027] The filter support member 5 is arranged so that when the filter member 3 is inserted and disposed in the container 2, the filter member 3 can stand upright straight without tilting between the filter member 3 and the container 2. The filter support member 5 is made of a hard resin and integrally includes a ring-shaped thick portion 51, a ring-shaped thin portion 52, and a plurality of fitting claws 53 as shown in FIG. 3.

[0028] The thick portion 51 is formed with a constant thickness, the inner diameter is equal to the sum of the outer diameter of the filter member 3 and the thickness of the cylindrical portion 62 of the seal member 6, and the outer diameter is formed smaller than the inner diameter of the container 2. The thin portion 52 is formed with a constant thickness and thinner than the thickness of the thick portion 51, and is connected to the inner edge of the thick portion 51 and has an inner diameter formed larger than the outer diameter of the partition convex portion 46. The upper surface of the thin portion 52 is located on the same plane as the upper surface of the thick portion 51, and a step is provided between the lower surface of the thin portion 52 and the lower surface of the thick portion 51.

[0029] The fitting claws 53 are connected to the outer edge of the thick portion 51 and are provided at intervals in the circumferential direction of the thick portion 51 (in Embodiment 1, three at equal intervals). The outer edge of the fitting claw 53 is formed in an arc shape in plan view, and the distance from the center of curvature is formed equal to the radius of the inner diameter of the container 2.

[0030] The filter support member 5 has a thick portion 51 fitted to the outer periphery of the cylindrical portion 62 of the seal member 6 attached to the upper end of the filter member 3, and is attached to the upper end of the filter member 3. The fitting claws 53 are fitted to the inner periphery of the upper end of the container 2, and the filter member 3 is erected straight between the filter member 3 and the container 2 without tilting. Note that the filter member 3 being erected straight without tilting means that, in a state where the filter member 3 is accommodated in the container 2, the distance between the inner peripheral surface 26 of the container 2 and the outer peripheral surface of the filter member 3 is constant in both the circumferential direction and the axial direction.

[0031] In the filter unit 1 having the above-described configuration, the filter support member 5 is attached to the upper end of the filter member 3 to which the seal members 6 are attached at both ends, and the filter member 3 to which the filter support member 5 is attached at the upper end is inserted into the container 2 through the opening 23 from the lower end. In the filter unit 1, the fitting claws 53 of the filter support member 5 are fitted to the inner periphery of the upper end of the container 2, and the filter member 3 is erected straight between the filter member 3 and the container 2 without tilting and the outer peripheral surface of the filter member 3 is disposed at a distance from the inner peripheral surface of the container 2, and the filter member 3 is accommodated in the container 2.

[0032] The lid member 4 is attached to the upper end of the container 2 that houses the filter member 3, and the filter unit 1 is assembled. Then, it is deformed so that the position where it abuts against the sealing convex portion 25 and the partitioning convex portion 46 of the seal member 6 becomes thinner than other positions, and the outer peripheral side space and the inner peripheral side space of the filter member 3 in the container 2 are liquid-tightly partitioned by the seal member 6 and the convex portions 25 and 46.

[0033] In the filter unit 1 thus assembled, the fluid to be purified (in the first embodiment, the cutting water used for cutting and containing cutting chips and a surfactant) from the fluid introduction path 44 is guided between the outer peripheral surface of the filter member 3 in the container 2 and the inner peripheral surface of the container 2. Then, when the fluid seeps from the outer peripheral side to the inner peripheral side of the filter member 3 and moves inside the filter member 3, the impurities are removed. The fluid from which the impurities have been removed will seep out to the inner peripheral side of the filter member 3.

[0034] In the filter unit 1, the fluid inside the filter member 3 from which impurities have been removed is sent out from the fluid discharge passage 45 to the outside of the filter unit 1 (in Embodiment 1, a pure water purification device that purifies the fluid into cutting water and reuses it in a cutting device).

[0035] As described above, the filter unit 1 according to Embodiment 1 includes a filter support member 5 having a thick portion 51 that fits on the outer circumference of the cylindrical portion 62 of the seal member 6 attached to the upper end of the filter member 3, and a fitting claw 53 that continues from the outer edge of the thick portion 51 and fits on the inner circumference of the container 2. For this reason, the filter unit 1 according to Embodiment 1 can stand the filter member 3 upright in the container 2 with a space between the outer peripheral surface and the inner peripheral surface of the container 2.

[0036] As a result, the filter unit 1 in Embodiment 1 has the effect that it can be arranged straight without tilting when the filter member 3 is inserted into the container 2.

[0037] 〔Embodiment 2〕 The filter unit according to Embodiment 2 will be described with reference to the drawings. FIG. 4 is a perspective view showing the filter unit according to Embodiment 2 disassembled. FIG. 5 is a side sectional view of the filter unit according to Embodiment 2. Note that the same reference numerals are given to the same parts as in Embodiment 1, and the description thereof is omitted.

[0038] As shown in FIGS. 4 and 5, the filter unit 1-2 according to Embodiment 2 is the same as Embodiment 1 except that the seal member 6 is not attached to the upper end of the filter member 3, and the filter support member 5-2 integrally includes a cylindrical portion 54 in addition to the thick portion 51, the thin portion 52, and the fitting claw 53.

[0039] In Embodiment 2, the inner diameter of the thick portion 51 of the filter support member 5-2 is equal to the outer diameter of the filter member 3. The cylindrical portion 54 is formed in a cylindrical shape that stands upright from the inner edge of the lower surface of the thick portion 51 and has an inner diameter equal to the outer diameter of the filter member 3. In Embodiment 2, the filter support member 5-2 is provided on the outer periphery of the upper end of the filter member 3, with the thick portion 51 and the cylindrical portion 54 fitting onto the outer periphery of the upper end of the filter member 3.

[0040] In Embodiment 2, the filter support member 5-2 is provided on the outer periphery of the upper end of the filter member 3, and the fitting claws 53 fit onto the inner periphery of the upper end of the container 2, so that the filter member 3 stands upright straight without tilting inside the container 2. Thus, the filter support member 5-2 according to Embodiment 2 is provided on the outer periphery of the filter member 3 and, when the filter member 3 is inserted and arranged inside the container 2, abuts against the inner peripheral surface of the container 2, which is the inner wall of the container, so that the filter member 3 can stand upright straight without tilting.

[0041] The filter unit 1-2 according to Embodiment 2 includes a filter support member 5-2 having a thick portion 51 and a cylindrical portion 54 that fit onto the outer periphery of the upper end of the filter member 3, and fitting claws 53 that are continuous with the outer edge of the thick portion 51 and fit onto the inner periphery of the container 2. For this reason, the filter unit 1-2 according to Embodiment 2 can cause the filter member 3 to stand upright straight inside the container 2 with a gap between its outer peripheral surface and the inner peripheral surface of the container 2, and has the effect that, similar to Embodiment 1, the filter member 3 can be arranged straight without tilting when inserted into the container 2.

[0042] 〔Embodiment 3〕 The filter unit according to Embodiment 3 will be described with reference to the drawings. FIG. 6 is a perspective view showing the filter unit according to Embodiment 3 disassembled. FIG. 7 is a side cross-sectional view of the container of the filter unit shown in FIG. 6. FIG. 8 is a side cross-sectional view of the container of the filter unit shown in FIG. 6 with the filter member accommodated therein. Note that the same reference numerals are given to the same parts as in Embodiment 1 in FIGS. 6, 7, and 8, and the description thereof is omitted.

[0043] The filter unit 1-3 according to Embodiment 3 is the same as Embodiment 1, except that the filter support member 5-3 is divided into a plurality of parts without fitting claws 53 and is rotatably provided by a hinge 7 attached to the upper end of the inner peripheral surface 26 of the container 2 as shown in FIGS. 6, 7, and 8.

[0044] The filter support member 5-3 is formed in a shape equivalent to a part of the thick portion 51 and the thin portion 52 of the filter support member 5 of Embodiment 1, and the planar shape is formed in an arc shape. In Embodiment 3, three filter support members 5-3 are provided.

[0045] The hinge 7 supports the filter support member 5-3 so as to be rotatable over the insertion and removal position where the upper and lower surfaces of the filter support member 5-3 shown in FIG. 7 are parallel to the inner peripheral surface 26 of the container 2 and the fixed position where the upper and lower surfaces of the filter support member 5-3 shown in FIG. 8 are orthogonal to the inner peripheral surface 26 of the container 2 and are located in the opening 23. The filter support member 5-3 supports the outer periphery of the seal member 6 to which the thick portion 51 is attached to the upper end of the filter member 3 at the fixed position.

[0046] In Embodiment 3, in the filter unit 1-3, the filter support member 5-3 is positioned at the insertion and removal position, and the filter member 3 with seal members 6 attached to both ends is inserted into the container 2 from the lower end side. In Embodiment 3, in the state where the filter member 3 is accommodated in the container 2, the filter support member 5-3 is positioned at the fixed position, and the filter member 3 stands upright straight without tilting in the container 2. Thus, the filter support member 5-3 according to Embodiment 3 is provided on the inner peripheral surface 26 which is the inner wall side of the container 2, and when the filter member 3 is inserted and arranged in the container 2, it abuts against the inner peripheral surface 26 of the container 2 which is the inner wall of the container, and is a filter support that can keep the filter member 3 standing upright straight without tilting.

[0047] The filter unit 1-3 according to Embodiment 3 has a thick portion 51 that supports the outer periphery of the upper end of the filter member 3 via a seal member 6, and includes a filter support member 5-3 that is rotatably attached to the inner peripheral surface 26 of the container 2 by a hinge 7. For this reason, the filter unit 1-3 according to Embodiment 3 can stand the filter member 3 upright in the container 2 with a space between the outer peripheral surface and the inner peripheral surface of the container 2. Similar to Embodiment 1, when the filter member 3 is inserted into the container 2, it can be arranged straight without tilting.

[0048] Note that the present invention is not limited to the above embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention.

Explanation of reference numerals

[0049] 1, 1-2, 1-3 Filter unit 2 Container 3 Filter member 5, 5-2, 5-3 Filter support member (filter support part) 26 Inner peripheral surface (inner wall of container)

Claims

1. A filter unit for removing impurities contained in a fluid, the filter unit comprising a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container, and at least comprising when the filter member is inserted and disposed in the container, a filter support member is disposed so that the filter member can stand upright without tilting between the filter member and the container, the filter unit.

2. A filter unit for removing impurities contained in a fluid, the filter unit comprising a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container, and at least comprising on the outer periphery of the filter member, when the filter member is inserted and disposed in the container, a filter support portion is further provided which abuts against the inner wall of the container so that the filter member can stand upright without tilting, the filter unit.

3. A filter unit for removing impurities contained in a fluid, the filter unit comprising a cylindrical container and a filter member having an outer diameter smaller than the inner diameter of the container, and at least comprising on the inner wall side of the container, when the filter member is inserted and disposed in the container, a filter support portion is further provided which abuts against the filter member so that the filter member can stand upright without tilting, the filter unit.

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