Robot hand

Abstract

To provide a robot hand for an industrial robot including a structural body part with low heat resistance or cold resistance, and permitting access to a high-temperature or low-temperature thermostat bath.SOLUTION: A robot hand 1 having a structural body part 5 with low heat resistance or cold resistance accesses to a high-temperature or low-temperature thermostat bath and takes a workpiece in and out. Compressed air is made to flow into a cover 6 for covering the structural body part 5 to avoid an influence of hot air or cool air from the thermostat bath on the structural body part 5. The cover 6 has a blowing-out part for making the compressed air flow out from the inside by overflow. In the robot hand 1, a support bracket 3 is disposed at a control axis portion 2a disposed at the tip of a robot arm 2, and a finger 4 is openably / closably disposed at the support bracket 3 via the structural body part 5.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a robot hand.

Background Art

[0002] Currently, industrial robots are in an era of active operation in all business fields (see, for example, Patent Document 1). And there is a demand to use the robot hand of an industrial robot to access a high-temperature or low-temperature tank and perform operations such as taking in and out workpieces.

[0003] However, since it is difficult to impart heat resistance and cold resistance to a robot hand, for example, an industrial robot capable of taking in and out workpieces in a high-temperature tank of 200°C or a low-temperature tank of -60°C has not been put into practical use. For example, like the handling of a wafer cassette, there is a robot hand with fingers provided at the tip of the robot hand, and the fingers open and close to grip or release the wafer cassette.

[0004] Such a robot hand incorporates a structural part formed by organically combining a general actuator and a guide mechanism, which are commercially available products, in order to enable the opening and closing operation of the fingers. Such a structural part is designed to be used in the normal temperature range, so it does not have heat resistance or cold resistance and has low environmental resistance.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] On one hand, there is an idea of avoiding thermal influence by accessing a high-temperature or low-temperature tank and shortening the cycle time for loading and unloading workpieces. However, for example, when the emergency stop button is pressed during access to the high-temperature tank and the robot hand remains in the high-temperature tank continuously, if the robot hand has not taken sufficient environmental protection measures, it may be damaged soon.

[0007] Therefore, the present invention provides a robot hand that can also access a high-temperature or low-temperature tank.

Means for Solving the Problem

[0008] The robot hand according to one aspect of the present invention is a robot hand that accesses a high-temperature or low-temperature tank, and is characterized by comprising a structural part including an actuator, a cover covering the structural part, and a compressed air supply means for flowing compressed air into the cover.

[0009] In this way, the temperature environment of the structural part can be suitably adjusted by the compressed air supplied into the cover. Therefore, even a robot hand with a structural part having low heat resistance or cold resistance can access a high-temperature or low-temperature tank and perform operations such as loading and unloading workpieces.

[0010] Therefore, for example, even when the emergency stop button is pressed during access to the high-temperature tank and the robot hand stays in the tank, by flowing compressed air into the cover covering the structural part, the influence of the hot air or cold air from the constant temperature tank on the structural part is avoided, so that it will not be damaged soon.

[0011] In addition, this robotic hand is characterized in that the cover has a blowing portion that allows the compressed air to flow out by overflow from inside the cover. In this way, air can be made to flow out and always fresh air can be utilized, so that the temperature environment of the structural part can be maintained. Further, by blowing the overflowed compressed air onto the surrounding structural parts from the blowing portion, the temperature environment can be maintained not only for the structural body but also for, for example, finger and arm parts.

[0012] Moreover, in this robotic hand, fingers are attached to the structural part, the cover has an opening through which the fingers pass in the structural part, and a gap between the opening and the structural part serves as the air blowing portion.

[0013] In this way, by utilizing the opening of the cover for connecting and operating the fingers to the structural part, air can be made to overflow through the gap between the opening and the structural part and blown out toward the fingers. Thereby, the temperature state of the fingers that directly access a high-temperature or low-temperature tank can be stabilized.

[0014] Furthermore, this robotic hand is characterized in that the gap is formed at the periphery of the opening. In this way, air can be made to overflow from the periphery of the opening.

[0015] Moreover, in this robotic hand, the gap formed at the periphery of the opening preferably has a width of 0.5 mm to 10 mm, and more preferably a width of 1 mm to 3 mm. By setting such a width for this gap, that is, the blowing portion, air can be made to flow out from the narrow slit-like gap at the periphery of the opening, and air can be blown out toward a desired location while preventing the intrusion of outside air.

[0016] In addition, this robotic hand includes a robotic arm provided with a control shaft portion near the tip, a support bracket is provided on the control shaft portion, and the structural part is connected to the support bracket.

[0017] Further, this robot hand is characterized in that the cover further includes a second air blowing portion, and the second air blowing portion blows out the compressed air from inside the cover toward the control shaft portion of the robot arm due to overflow.

[0018] In this way, by using the overflowed air, it is possible to avoid the influence on the structure part from the hot air or cold air from the tank, and by blowing air toward the robot arm, the temperature state of the robot arm can also be stabilized.

[0019] Also, this robot hand is characterized in that the compressed air is air with a dew point lower than the dew point of the air in the tank. In this way, by using air with a low dew point, the risk of freezing and condensation can be minimized.

[0020] Also, this robot hand is characterized in that the compressed air supply means allows the compressed air to flow in according to the timing when the finger or the robot hand accesses the tank. In this way, by allowing the compressed air to flow in according to the access timing and causing overflow, sufficient effects can be obtained, so it is not necessary to constantly flow the compressed air, which is economical.

Advantages of the Invention

[0021] The present invention is a robot hand including a structure part such as an actuator. Even in this case, the structure part is covered with a cover, and compressed air is allowed to flow into the cover. Therefore, it is possible to avoid the influence of hot air and cold air from high-temperature and low-temperature tanks on the structure part, and the robot arm accessing the high-temperature or low-temperature tank can operate stably.

Brief Description of the Drawings

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

Mode for Carrying Out the Invention

[0023] <Structure of the Robot Hand> Hereinafter, a robot hand according to an embodiment of the present invention will be described with reference to the drawings. Note that the present invention is not limited by this embodiment. In addition, the components in the following embodiments include those that can be replaced and are easy for those skilled in the art, or those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0024] FIG. 1 is a front view showing a robot hand of an industrial robot according to this embodiment. FIG. 2 is a plan view of the same robot hand. FIG. 3 is an enlarged side view of the same robot hand. FIG. 4 is a figure showing an enlarged main part of FIG. 1.

[0025] As shown in FIGS. 1 and 2, reference numeral 1 denotes a robot hand of an industrial robot that accesses a constant temperature bath at high or low temperature, and takes in and out a work W (for example, a wafer cassette) to and from the constant temperature bath at high or low temperature. The robot hand 1 has a control shaft portion 2a at the tip of the robot arm 2, and a support bracket 3 is provided at the lower end of the control shaft portion 2a. The support bracket 3 has a horizontal plate portion 3a and a vertical plate portion 3b, and is formed in an inverted L-shaped cross section.

[0026] Then, the horizontal plate portion 3a is connected to the control shaft portion 2a, and the vertical plate portion 3b extends in the extending direction of the robot arm 2, and an openable and closable finger 4 for gripping or releasing the grip of the work W at the tip is provided.

[0027] The finger 4 has a pair of left and right finger members 4a and 4b with a U-shaped cross-section, and they perform an opening and closing operation of approaching and separating in the left and right directions to grip and release the workpiece W at the tip portion.

[0028] The base ends of the fingers 4 (finger members 4a and 4b) are connected via connecting members 4c and 4d to a structural part 5 (a set of an opening and closing actuator and a guide mechanism) attached to the vertical plate portion 3b. Then, when the opening and closing actuator of the structural part 5 is driven, the fingers 4 perform an opening and closing operation for gripping and releasing the workpiece W. Also, reference numeral 8 is a power cable connected to the actuator of the structural part 5.

[0029] Since the opening and closing actuator and the guide mechanism included in the structural part 5 have low heat resistance or cold resistance, they are covered with a sheet metal box-shaped cover 6. And by flowing compressed air into the cover 6, it is possible to avoid the influence of hot air or cold air from the constant temperature bath on the structural part 5. The supply of compressed air into the cover 6 is performed through a compressed air supply pipe 7 attached to the vertical plate portion 3b (compressed air supply means).

[0030] Also, one end of the compressed air supply pipe 7 is connected to the cover 6, and the other end is connected to an air conditioner and a dehumidifier (not shown). The temperature and dew point are adjusted according to the constant temperature bath accessed by the robot hand 1, and the compressed air is supplied into the cover 6 through the compressed air supply pipe 7.

[0031] The cover 6 is attached to the vertical plate portion 3b. Thereby, by flowing compressed air into the cover 6, the inside of the cover 6 (that is, the space around the structural part 5) is kept at room temperature, and the influence of hot air or cold air from the constant temperature bath on the structural part 5 is avoided.

[0032] Further, as shown in Fig. 3, on the front surface of the cover 6, there is provided a substantially rectangular front opening 6a formed with R at four corners corresponding to the structure part 5 for connecting the finger 4 and the structure part 5 so that the finger 4 can operate. An annular gap S formed between the periphery of the front opening 6a and the periphery of the structure part 5 forms a first blowing part 6b for allowing the compressed air to flow out by overflow from the inside of the cover 6.

[0033] The width of the first blowing part 6b (gap S) is about 1 mm, which is small. While preventing the intrusion of outside air, the compressed air overflows, avoiding the influence of the hot air or cold air from the constant temperature bath on the structure part 5 and protecting the structure part 5.

[0034] Note that the first blowing part 6b (gap S) does not necessarily have to be continuous over the entire circumference, and the width of the gap does not necessarily have to be constant. For example, the gap S can be formed only above and below the front opening 6a. Or, the front opening 6a can be made to fit exactly with the structure part 5 without forming a gap, and a blowing part can be provided separately on the cover 6.

[0035] Further, as shown in Fig. 4, on the upper surface of the cover 6, there is provided a second blowing part 6c for blowing a part of the overflowing compressed air toward the control shaft part 2a. The compressed air overflows from this second blowing part 6c and is applied to the vicinity of the control shaft part 2a of the robot hand 1, so that it can be protected from the influence of the hot air or cold air from the constant temperature bath on the robot arm.

[0036] In addition, since a robot structure part with low heat resistance or cold resistance (for example, an actuator for rotating the control shaft) is provided near the control shaft part 2a, the structure part of the robot arm is also protected.

[0037] This enables the protection of the robot arm and the robot structure part from the hot air or cold air from the thermostatic chamber. Note that this second blowing part 6c is formed by partially raising the upper surface plate of the cover 6, and is configured such that air flows toward the robot arm 2 side. Note that the number and shape of the second blowing parts 6c are not particularly limited, and may be an elongated slit shape. Further, the second blowing part 6c can also be configured to be openable and closable.

[0038] Also, the compressed air supplied into the cover 6 is air with a dew point lower than the dew point at the operating temperature of the thermostatic chamber. By using air with a low dew point, condensation on the structural part 5 inside the cover 6 and on the fingers 4 and the robot arm due to the overflowing and blown-out air is prevented, and the first blowing part 6b and the second blowing part 6c are prevented from closing due to freezing.

[0039] Also, the supply of compressed air into the cover 6 is synchronized with the timing when the fingers 4 or the robot arm 2 accesses the thermostatic chamber, thereby protecting the structural part 5 inside the cover 6 and protecting the fingers 4 and the robot arm 2. This can obtain sufficient effects and is more economical than constantly flowing in compressed air.

[0040] <Other Embodiments> As described above, the embodiments of the present invention have been described with reference to the drawings, but various additions or changes are possible without departing from the spirit of the present invention. For example, although the compressed air supply means flows in compressed air in accordance with the timing of accessing the thermostatic chamber, when the access to the thermostatic chamber is frequent or when the access time into the thermostatic chamber is very short, it is also possible to constantly flow in compressed air.

[0041] Also, in the above-described embodiment, the gap between the front opening 6a of the cover 6 and the structural part 5 is configured such that the overflowing air blows out as the first blowing part 6b, but it is also possible to adopt a configuration in which a separate blowing part is provided without providing a gap.

Description of Reference Numerals

[0042] 1 Robot Hand 2 Robot Arm 2a Control Axis Section 3 Support Bracket 3a Horizontal Plate Section 3b Vertical Plate Section 4 Finger 4a Finger Member 4b Finger Member 5 Structure Part 6 Cover 6a Front Opening 6b First Blowout Section 6c Second Blowout Section 7 Compressed Air Supply Pipe 8 Power Cable W Workpiece

Claims

1. A robot hand for accessing a high-temperature or low-temperature tank, a structural part including an actuator, a cover covering the structural part, compressed air supply means for allowing compressed air to flow into the cover, and characterized by comprising a robot hand.

2. The cover has an air outlet for allowing the compressed air to flow out by overflow from inside the cover, The robot hand according to claim 1.

3. Fingers are attached to the structural part, The cover has an opening through which the fingers pass in the structural part, A gap between the opening and the structural part serves as the air outlet, The robot hand according to claim 1.

4. The gap is formed at the periphery of the opening, The robot hand according to claim 3.

5. The gap formed at the periphery of the opening is formed with a width of 0.5 mm to 10 mm, The robot hand according to claim 4.

6. Comprising a robot arm provided with a control shaft portion near the tip, A support bracket is provided on the control shaft portion, The structural part is connected to the support bracket, The robot hand of the industrial robot according to claim 1.

7. The cover further includes a second air outlet, The second air outlet blows the compressed air toward the control shaft portion of the robot arm by overflow from inside the cover, The robot hand of the industrial robot according to claim 6.

8. The compressed air is air with a dew point lower than the dew point of the air in the tank, The robot hand of the industrial robot according to claim 1.

9. The compressed air supply means allows the compressed air to flow in according to the timing when the fingers or the robot hand access the tank, The robot hand of the industrial robot according to claim 1.

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