Container transport device and logistics processing system including the same

Abstract

To provide a container transport device that receives power via a battery and charges the battery while traveling along rails, and a logistics processing system including the device.SOLUTION: A logistics processing system installed in a semiconductor manufacturing plant includes a container transport device 110 that transports a container 310 containing a plurality of substrates, container storage equipment for storing containers and a control device for controlling the running of container transport device. The container transport device includes a battery and charges the battery while traveling along rails 330a and 330b.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a container transport device installed in a semiconductor manufacturing factory and a logistics processing system including the same.

Background Art

[0002] An OHT (Overhead Hoist Transport) transports a FOUP (Front Opening Unified Pod) to the location where a substrate processing apparatus is located within a semiconductor manufacturing factory. A plurality of substrates (Wafers) are stored in the FOUP.

[0003] The OHT operates with electric power provided through a power cable. However, various facilities are installed within a semiconductor manufacturing factory, and there are spaces where power cables are not laid. When a substrate processing apparatus is located in the corresponding space, there is an inconvenience that the FOUP has to be transported by means other than the OHT.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technical problem to be solved by the present invention is to provide a container transport device that receives power supply via a battery and charges the battery while traveling along a rail, and a logistics processing system including the same.

[0005] The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

Means for Solving the Problems

[0006] One aspect of the logistics processing system of the present invention for achieving the above technical problem is installed in a semiconductor manufacturing factory, and includes a container transfer device for transferring a first container storing a plurality of substrates, a container storage device for storing the first container, and a control device for controlling the travel of the container transfer device. The container transfer device includes a battery and charges the battery while traveling along a rail.

[0007] One aspect of the container transfer device of the present invention for achieving the above technical problem is installed in a semiconductor manufacturing factory and transfers a first container storing a plurality of substrates. It includes a gripping module for gripping the first container, a lifting module for lifting and lowering the gripping module when gripping the first container, a power supply part for providing power, and a driving module connected to driving wheels located on both sides and providing the driving force generated by the power to the driving wheels. The power supply part includes a first power supply connected to a power cable installed in the semiconductor manufacturing factory, a second power supply including a plurality of batteries, and a power charging part for charging the plurality of batteries. The power charging part charges the plurality of batteries when traveling along a rail installed in the semiconductor manufacturing factory.

[0008] Another aspect of the logistics processing system of the present invention for achieving the above technical problem is installed in a semiconductor manufacturing factory, and includes a container transport device that travels along a rail and transports a first container in which a plurality of substrates are stored; a container storage device that stores the first container; and a control device that controls the travel of the container transport device. The container transport device is connected to a power cable installed in the semiconductor manufacturing factory, and includes a first power supply unit that provides power required for the operation of the container transport device; a second power supply unit that includes a plurality of batteries and provides power required for the operation of the container transport device; and a power charging unit that charges the plurality of batteries. The rail includes a magnetic flux generation unit that generates magnetic flux using a plurality of magnets, the power charging unit includes a voltage generation unit that generates a voltage using a coil, and the power charging unit charges the plurality of batteries using the voltage generated when the magnetic flux generated by the plurality of magnets intersects the coil.

[0009] Specific contents of other embodiments are included in the detailed description and the drawings.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and redundant descriptions thereof are omitted.

[0012] The present invention relates to a container transport device and a logistics processing system including the same. The container transport device receives power supply via a battery and can charge the battery while traveling along a rail to transport a container. Hereinafter, a logistics processing system including the container transport device will be described first, and then the container transport device operated using a battery will be continuously described.

[0013] FIG. 1 is a diagram schematically showing an internal configuration of a logistics processing system according to an embodiment of the present invention. Referring to FIG. 1, the logistics processing system 100 can be configured to include a container transport device 110, a container storage device 120, a control device 130, and a database 140.

[0014] The logistics processing system 100 can be installed in a semiconductor manufacturing factory. The logistics processing system 100 can include a plurality of container transport devices 110 and a plurality of container storage devices 120. The logistics processing system 100 can be constructed to provide a logistics automation service in a semiconductor manufacturing factory.

[0015] The first direction D1 and the second direction D2 form a plane in the horizontal direction. For example, the first direction D1 may be the front - rear direction, and the second direction D2 may be the left - right direction. Or, the first direction D1 may be the left - right direction, and the second direction D2 may be the front - rear direction. The third direction D3 is the height direction, which is perpendicular to the plane formed by the first direction D1 and the second direction D2. The third direction D3 may be the up - down direction.

[0016] The container transport device 110 serves to transport the container to the destination. For example, the container transport device 110 can be provided as an OHT (Overhead Hoist Transport).

[0017] The container transport device 110 can travel on a moving path (e.g., a rail) installed on the ceiling of a semiconductor manufacturing factory to transport the container to the destination. The container transport device 110 can transport the container to process equipment (e.g., various process chambers such as a deposition process chamber, an etching process chamber, a cleaning process chamber, a heat treatment process chamber) where semiconductor manufacturing processes are executed, and a plurality (110a, 110b, …, 110n) can be arranged within the semiconductor manufacturing factory.

[0018] When the container transport device 110 transports the container to the equipment where semiconductor manufacturing processes are executed, a plurality of substrates (e.g., wafers) can be stored in the container. The container can be provided, for example, as a FOUP (Front Opening Unified Pod).

[0019] The container transport device 110 can operate according to the control of the control device 130. Although not shown in FIG. 1, for this purpose, the container transport device 110 may include a communication module for wired / wireless communication with the control device 130.

[0020] The container transfer device 110 can also operate autonomously without being controlled by the control device 130. In this case, a large number of sensors for providing information so that a plurality of container transfer devices (110a, 110b, …, 110n) arranged in the semiconductor manufacturing factory do not collide with each other can be installed around the movement path, and it is also possible to provide the plurality of container transfer devices (110a, 110b, …, 110n) so that they communicate with each other.

[0021] FIG. 2 is an exemplary diagram schematically showing the structure of a container transfer device constituting a logistics processing system according to an embodiment of the present invention. FIG. 3 is an exemplary diagram schematically showing the installation shape of a container transfer device in a semiconductor manufacturing factory. According to FIGS. 2 and 3, the container transfer device 110 can be configured to include a gripping module 210, a lifting module 220, a driving module 230, a driving wheel 240, and a guide wheel 250.

[0022] The gripping module (Gripping Module; 210) is provided for gripping the container 310. The gripping module 210 can descend to a location where the container 310 is placed (for example, an EFEM (Equipment Front End Module)) to grip the container 310 in order to transport the container 310 to the destination. The gripping module 210 can be provided, for example, as a hand gripper.

[0023] The lifting module 220 is provided for lifting and lowering the gripping module 210. The lifting module 220 can lower the gripping module 210 from near the ceiling 320 in the direction in which the ground is located so that the gripping module 210 can grip the container 310, and if the gripping module 210 grips the container 310, the gripping module 210 can be lifted again near the ceiling 320. The lifting module 220 can be provided, for example, as a hoist.

[0024] When the container 310 is loaded by the gripping module 210 and the lifting module 220 in this way (Loading), the container transport device 110 can transport the container 310 to the destination in this state. When the container transport device 110 reaches the destination, the lifting module 220 lowers the gripping module 210 again, and the gripping module 210 releases the grip on the container 310 placed on the load port module of the EFEM, and the plurality of substrates stored in the container 310 can be transmitted to the process equipment where the next semiconductor manufacturing process is to be executed.

[0025] Although not shown in FIGS. 2 and 3, the container transport device 110 may also include a storage module that provides a storage space instead of the gripping module 210. The storage module can be formed in a shape with an open top (e.g., Basket Type) so as to store the container 310, and can also be formed in a shape with an openable door installed on the side surface (e.g., Cabinet Type).

[0026] The drive module 230 serves to control the drive wheels 240 that travel along a travel path (e.g., a pair of rails 330a, 330b) installed on the ceiling 320 of the semiconductor manufacturing factory. Although not shown in FIGS. 2 and 3, the drive module 230 may include a drive motor, a drive shaft, etc. for this purpose. Here, the drive motor can serve to generate a driving force, and the drive shaft can serve to provide the driving force generated by the drive motor to the drive wheels 240.

[0027] The driving wheel (Driving Wheel; 240) is a rotating body that rotates using the driving force provided by the driving module 230, and due to such rotation, the container transport device 110 can travel on a pair of rails 330a, 330b. The driving wheels 240 can be provided in a pair 240a, 240b so as to be able to travel on the rails 330a, 330b on each side. In this case, the pair of driving wheels 240a, 240b can be respectively coupled to both side surfaces of the driving module 230.

[0028] The guide wheel (Guide Wheel; 250) serves to prevent the container transport device 110 from detaching from the rails 330a, 330b when the container transport device 110 travels on a pair of rails 330a, 330b. The guide wheels 250 can be provided in a pair 250a, 250b in the same manner as the driving wheels 240, and can be installed at both ends of the lower surface of the driving module 230 in a direction perpendicular to the driving wheels 240a, 240b.

[0029] The container transport device 110 may include a speed adjustment unit, a position adjustment unit, etc. Here, the speed adjustment unit can serve to control the rotation speed of the driving wheel 240, and the position adjustment unit can serve to correct the position of the container 310.

[0030] The position adjustment unit may include a slider and a rotator. The slider can serve to move the container 310 in the vertical and horizontal directions, and the rotator can serve to rotate the container 310 clockwise or counterclockwise.

[0031] In order to provide a moving path for the container transport device 110, a rail assembly including a pair of rails 330a, 330b and a rail support module 340 can be installed on the ceiling 320 of the semiconductor manufacturing factory. The pair of rails 330a, 330b provide a traveling path for the container transport device 110 as described above, and can be coupled to both ends of the rail support module 340 fixed to the ceiling 320 of the semiconductor manufacturing factory.

[0032] The pair of rails 330a and 330b can be configured to include various types of sections such as straight sections, curved sections, inclined sections, branching sections, and intersection sections according to the layout of the ceiling 320 in the semiconductor manufacturing factory. However, the present embodiment is not limited thereto. The pair of rails 330a and 330b can also be configured to include only one type of section among the plurality of sections.

[0033] The rail support module 340 is fixed to the ceiling 320 of the semiconductor manufacturing factory and serves to support the pair of rails 330a and 330b. When viewed from the ground, the rail support module 340 can be installed on the ceiling 320 of the semiconductor manufacturing factory so as to have a cap shape.

[0034] Referring back to FIG. 1 for description.

[0035] The container storage device 120 can store the container 310. For this purpose, the container storage device 120 may include a storage module inside thereof. The storage module can be configured in multiple stages. At least one container 310 can be stored in each stage, so that the storage module can store a plurality of containers 310. The storage module can be configured in multiple stages in the third direction D3. However, it is not limited thereto, and the storage module can also be configured in multiple stages in the first direction D1. Alternatively, the storage module can be configured in multiple stages in the second direction D2. Alternatively, the storage module can be configured in multiple stages in either one of the first direction D1 and the second direction D2 and the third direction D3. The container storage device 120 can be configured in a plurality (120a, 120b,..., 120n) in the same manner as the container transfer device 110.

[0036] The container storage device 120 can be installed in the internal space of a semiconductor manufacturing factory. The container storage device 120 can be installed on the floor of a semiconductor manufacturing factory. The container storage device 120 can be a stocker. The container storage device 120 can be installed on the ceiling of a semiconductor manufacturing factory. The container storage device 120 can be a side track buffer (STB).

[0037] The control device 130 serves to control a plurality of container transfer devices (110a, 110b, …, 110n). Such a control device 130 can independently control each container transfer device (110a, 110b, …, 110n) so that each container transfer device (110a, 110b, …, 110n) can safely transfer the container 310 to a destination (for example, various process facilities where semiconductor manufacturing processes are performed).

[0038] The control device 130 can control the travel of the container transfer device 110 by sending signals such as a start command, a stop command, an acceleration command, and a deceleration command to the container transfer device 110. Also, the control device 130 can provide necessary information (for example, the route to the destination) to the container transfer device 110 through wired / wireless communication with the container transfer device 110.

[0039] In order to serve the above role, the control device 130 can recognize the position of each container transfer device (110a, 110b, …, 110n). In this case, the control device 130 can use a number of sensors installed around a pair of rails 330a, 330b, or can also use the results obtained through wired / wireless communication with each container transfer device (110a, 110b, …, 110n).

[0040] As described above, in the former case, the control device 130 can recognize the position of each container transport device (110a, 110b, …, 110n) by using the identification information of the corresponding sensor (for example, serial number), the position information of the corresponding sensor (for example, two-dimensional coordinate information (x, y) or three-dimensional coordinate information (x, y, z)), the identification information of the container storage device 120 that has passed through the corresponding sensor, and so on. In the latter case, each container transport device (110a, 110b, …, 110n) can measure its own position, and the control device 130 can recognize the position of each container storage device (110a, 110b, …, 110n) by communicating with the corresponding container transport device (110a, 110b, …, 110n).

[0041] The control device 130 may include a processor that executes control for each component constituting the logistics processing system 100, a network that performs wired / wireless communication with each component, one or more instructions related to functions and operations for controlling each component, processing recipes including instructions, storage means for storing various data, and the like. The control device 130 may further include a user interface including an input means for the operator to perform a command input operation or the like for managing the logistics processing system 100, an output means for visualizing and displaying the operating status of the logistics processing system 100, and the like. The control device 130 can be provided as a computing device for data processing and analysis, command transmission, and the like.

[0042] Instructions can be provided in the form of computer programs or applications. A computer program can include one or more instructions and can be stored on a computer-readable recording medium. Instructions can include code generated by a compiler, code executable by an interpreter, etc. The storage means can be provided as one or more storage media selected from flash memory, HDD, SSD, card-type memory, RAM, SRAM, ROM, EEPROM, PROM, magnetic memory, magnetic disks, and optical disks.

[0043] Database 140 serves to store information necessary for control device 130 to control a plurality of container transport devices (110a, 110b, …, 110n). Database 140 can be mounted inside control device 130 or separately provided outside and connected by wire / wireless to provide the information required by control device 130.

[0044] Next, the container transport device 110 operated using a battery will be described. FIG. 4 is an exemplary diagram for explaining the power supply part in the container transport device according to the first embodiment of the present invention.

[0045] Referring to FIG. 4, the power supply part 400 of the container transport device 110 can be configured to include a first power supply part 410, a second power supply part 420, and a power charging part 430.

[0046] The first power supply part 410 can be connected to a power cable installed in a semiconductor manufacturing factory. The first power supply part 410 can supply the power provided through the power cable to elements in the container transport device 110 that require power. For example, the first power supply part 410 can supply the power provided through the power cable to the drive module 230. The first power supply part 410 can supply the power to the drive motor in the drive module 230.

[0047] The first power supply unit 410 can receive the supply of AC power through a power cable. The first power supply unit 410 can supply power to a drive motor that operates using DC power. The first power supply unit 410 may include an AC / DC converter. The first power supply unit 410 can convert AC power into DC power via the AC / DC converter and then supply it to the drive motor.

[0048] The first power supply unit 410 can receive the supply of DC power through a power cable. The first power supply unit 410 can supply power to a drive motor that operates using AC power. The first power supply unit 410 may include a DC / AC converter. The first power supply unit 410 can convert DC power into AC power via the DC / AC converter and then supply it to the drive motor.

[0049] When the first power supply unit 410 receives the supply of AC power and supplies power to a drive motor that operates using AC power, it may not include an AC / DC converter or a DC / AC converter. Even when the first power supply unit 410 receives the supply of DC power and supplies power to a drive motor that operates using DC power, it may not include an AC / DC converter or a DC / AC converter.

[0050] The second power supply unit 420 may store power in advance without receiving power supply from the outside. The second power supply unit 420 may include a single or a plurality of batteries (420a, 420b, …, 420n).

[0051] In case of emergency, the second power supply unit 420 can supply the power stored in the batteries (420a, 420b, …, 420n) to the elements that require power within the container transport device 110. For example, the second power supply unit 420 can supply power to the drive module 230. When the first power supply unit 410 cannot supply power to the drive module 230, the second power supply unit 420 can supply the power stored in the batteries (420a, 420b, …, 420n) to the drive module 230.

[0052] The power charging unit 430 can charge the batteries (420a, 420b, …, 420n). The power charging unit 430 can charge the batteries (420a, 420b, …, 420n) when the remaining amount (SoC; State of Charge) of the batteries (420a, 420b, …, 420n) is below the reference value. For example, the power charging unit 430 can charge the batteries (420a, 420b, …, 420n) when the remaining amount of the batteries (420a, 420b, …, 420n) is 20% or less.

[0053] The second power supply unit 420 may include a plurality of batteries (420a, 420b, …, 420n). The power charging unit 430 can start charging the batteries (420a, 420b, …, 420n) when the remaining amount of any one of the plurality of batteries (420a, 420b, …, 420n) is below the reference value. Alternatively, the power charging unit 430 can also start charging the batteries (420a, 420b, …, 420n) only when the remaining amounts of all the plurality of batteries (420a, 420b, …, 420n) are below the reference value.

[0054] The power charging unit 430 can charge the batteries (420a, 420b, …, 420n) when the container transport device 110 travels along the rails 330a, 330b to transport the container 310. FIG. 5 is a first exemplary diagram for explaining the power charging unit that constitutes the power supply part according to the first embodiment of the present invention. And FIG. 6 is a second exemplary diagram for explaining the power charging unit that constitutes the power supply part according to the first embodiment of the present invention.

[0055] The power charging unit 430 includes a voltage generation unit 510, and a magnetic flux generation unit 520 may be installed on the rails 330a, 330b. The voltage generation unit 510 can be installed inside the container transport device 110. The voltage generation unit 510 can be installed adjacent to the rails 330a, 330b.

[0056] Referring to FIG. 7, the voltage generation unit 510 may be adjacent to the rails 330a and 330b on the bottom surface of the drive module 230. The voltage generation unit 510 may be provided at the position where the guide wheels 250a and 250b are installed. In this case, the voltage generation unit 510 may be provided so as not to contact the rails 330a and 330b. When the voltage generation unit 510 includes a three-phase coil, the U-phase coil, the W-phase coil, and the V-phase coil may be installed in a direction parallel to the longitudinal direction of the rails 330a and 330b. The container transport device 110 may not include the guide wheels 250a and 250b.

[0057] However, without being limited thereto, the voltage generation unit 510 may also be provided on the drive shaft 260. In this case, the three-phase coils (U-phase coil, W-phase coil, and V-phase coil) may be sequentially arranged along the rotation direction of the drive shaft 260 and can be repeatedly arranged. Alternatively, the voltage generation unit 510 may be provided on the fixing member 270 that binds the drive wheels 240 and 240b to the drive shaft 260. In this case, the three-phase coils (U-phase coil, W-phase coil, and V-phase coil) may be sequentially arranged along the rotation direction of the fixing member 270 and can be repeatedly arranged. Alternatively, the voltage generation unit 510 may be provided inside the drive wheels 240a and 240b. In this case, the three-phase coils (U-phase coil, W-phase coil, and V-phase coil) may be sequentially arranged along the rotation direction of the drive wheels 240a and 240b and can be repeatedly arranged. FIG. 7 is an exemplary diagram for explaining the voltage generation unit that constitutes the power supply part according to the first embodiment of the present invention.

[0058] Referring back to FIGS. 5 and 6 for explanation.

[0059] The voltage generation unit 510 may include a main body 511 and a coil 512. The main body 511 may include a plurality of protrusions 513. The plurality of protrusions 513 may be arranged along the longitudinal direction D2 of the rails 330a, 330b. Slots 514 may be formed between the protrusions 513. The coil 512 may be formed by the plurality of protrusions 513. The coil 512 is provided as a three-phase coil including a U-phase coil 512a, a V-phase coil 512b, and a W-phase coil 512c, but the present embodiment does not necessarily have to be limited to this. The U-phase coil 512a, the V-phase coil 512b, and the W-phase coil 512c may be repeatedly formed along the longitudinal direction D2 of the rails 330a, 330b. The coil 512 may be wound in a concentrated winding method. However, it is not limited to this, and the coil 512 may also be wound in a distributed winding method. Alternatively, the coil 512 may be wound in a full-pitch winding method or a short-pitch winding method.

[0060] A magnetic flux generating unit 520 can be installed on the rails 330a and 330b. A constant interval h can be formed between the voltage generating unit 510 of the container conveying device 110 and the magnetic flux generating unit 520 on the rails 330a and 330b. The magnetic flux generating unit 520 can include a plurality of magnets 521 and 522. The plurality of magnets 521 and 522 can include a magnet 521 having a first polarity and a magnet 522 having a second polarity. The magnet 521 having the first polarity can be either a magnet having an N - pole polarity or a magnet having an S - pole polarity. The magnet 522 having the second polarity can be the other type of magnet among the magnet having an N - pole polarity and the magnet having an S - pole polarity. The magnets 521 having the first polarity can be plural. Similarly, the magnets 522 having the second polarity can be plural. The magnets 521 having the first polarity and the magnets 522 having the second polarity can be formed to intersect and can be repeatedly formed along the longitudinal direction D2 of the rails 330a and 330b. The magnet 521 having the first polarity and the magnet 522 having the second polarity can be provided as permanent magnets. However, it is not limited thereto, and the magnet 521 having the first polarity and the magnet 522 having the second polarity can also be provided as electromagnets. Or, either one type of the magnet 521 having the first polarity and the magnet 522 having the second polarity can be provided as a permanent magnet, and the other type of magnet can be provided as an electromagnet.

[0061] The magnetic flux generating unit 520 can be installed in all areas where the rails 330a and 330b are installed within the semiconductor manufacturing factory. That is, the magnetic flux generating unit 520 can be installed throughout the rails 330a and 330b in the semiconductor manufacturing factory. However, it is not limited thereto, and the magnetic flux generating unit 520 can also be installed on some of the rails 330a and 330b in the semiconductor manufacturing factory. For example, the magnetic flux generating unit 520 can be installed in a section where no power cable is laid within the semiconductor manufacturing factory.

[0062] Alternatively, the magnetic flux generating unit 520 can also be installed in a section within the semiconductor manufacturing factory where the traffic volume is relatively high. The semiconductor manufacturing factory may include a plurality of container transfer devices 110. The plurality of container transfer devices 110 may include a container transfer device (i.e., a wafer transfer device) that transfers a container storing a plurality of wafers and a container transfer device (i.e., a reticle transfer device) that transfers a container storing a plurality of reticles. Some sections within the semiconductor manufacturing factory can be used by both the wafer transfer device and the reticle transfer device. The said some sections can be a reticle zone. The reticle zone has a higher traffic volume compared to other sections. When the traffic volume is high, the power consumption of the container transfer device is relatively large, and the power cable connected to the container transfer device can be twisted. By installing the magnetic flux generating unit 520 on the rails 330a, 330b within the reticle zone, the problem of power consumption of the container transfer device can be solved, and problems such as the entanglement of power cables can also be solved.

[0063] When the voltage generating unit 510 and the magnetic flux generating unit 520 are installed in this way, when the container transfer device 110 travels along the rails 330a, 330b, the magnetic flux generated by the plurality of magnets 521, 522 can link with the coil 512, and a voltage can be generated according to Ampere’s Law and Faraday’s Law. The power charging unit 430 can charge the batteries (420a, 420b, …, 420n) with the voltage obtained by the voltage generating unit 510. The voltage generating unit 510 and the magnetic flux generating unit 520 can be provided as a linear development system capable of charging the batteries (420a, 420b, …, 420n). The power charging unit 430 may include a regulator to charge the batteries (420a, 420b, …, 420n) with the voltage generated in the coil 512. The power charging unit 430 may also include an inverter, a DC / DC converter, etc.

[0064] The voltage obtained by the interaction between the voltage generation unit 510 and the magnetic flux generation unit 520 can be used to charge the batteries (420a, 420b, …, 420n), but the present embodiment is not necessarily limited thereto. The voltage obtained by the voltage generation unit 510 can also be provided to the drive module 230. The power charging unit 430 can provide the voltage to the drive module 230 instead of using it to charge the batteries (420a, 420b, …, 420n). The container transport device 110 can use the voltage to travel along the rails 330a and 330b. Alternatively, the voltage obtained by the voltage generation unit 510 can also be provided to the sensor module. The power charging unit 430 can provide the voltage to the sensor module instead of using it to charge the batteries (420a, 420b, …, 420n). The container transport device 110 can use the voltage to acquire peripheral sensing information. Alternatively, the voltage obtained by the voltage generation unit 510 can also be provided to the communication module. The power charging unit 430 can provide the voltage to the communication module instead of using it to charge the batteries (420a, 420b, …, 420n). The container transport device 110 can use the voltage to communicate with the control device 130.

[0065] When the remaining amount of the batteries (420a, 420b, …, 420n) is equal to or higher than the reference value, the power charging unit 430 can provide the power to the drive module 230, the sensor module, the communication module, etc. without charging the batteries (420a, 420b, …, 420n). For example, when the remaining amount of the batteries (420a, 420b, …, 420n) is 80% or more, the power charging unit 430 can provide the power to the drive module 230, the sensor module, the communication module, etc. The power charging unit 430 can control the inverter to provide the power to the drive module 230, the sensor module, the communication module, etc. The power charging unit 430 can control the inverter by various control methods such as position control, speed control, and vector control to provide the power to the drive module 230, the sensor module, the communication module, etc.

[0066] Note that the power supply section 400 of the container transport device 110 may not include the first power supply unit 410, and may include only the second power supply unit 420 and the power charging unit 430. In this case, the second power supply unit 420 can provide all the power necessary for the operation of the container transport device 110. The power charging unit 430 can charge the batteries (420a, 420b, …, 420n) in the section where the power cable is laid, and the container transport device 110 can depend on the power provided by the batteries (420a, 420b, …, 420n) for all operations in the section where the power cable is not laid.

[0067] FIG. 8 is an exemplary diagram for explaining the power supply section in the container transport device according to the second embodiment of the present invention. Referring to FIG. 8, the power supply section 400 of the container transport device 110 can be configured to include a first power supply unit 410, a third power supply unit 440, a fourth power supply unit 450, and a power charging unit 430.

[0068] Hereinafter, the description of the common parts will be omitted by comparing the embodiment of FIG. 4 and the embodiment of FIG. 8, and only the differences will be described. That is, the first power supply unit 410 and the power charging unit 430 described with reference to FIGS. 4 to 7 can be similarly applied to the embodiment of FIG. 8.

[0069] The second power supply unit 420 in FIG. 4 may include the third power supply unit 440 and the fourth power supply unit 450 in FIG. 8. Alternatively, the third power supply unit 440 and the fourth power supply unit 450 in FIG. 8 may be included instead of the second power supply unit 420 in FIG. 4.

[0070] The third power supply unit 440 may include one or more main batteries (440a, 440b, …, 440n). The fourth power supply unit 450 may include one or more auxiliary batteries (450a, 450b, …, 450n).

[0071] The main batteries (440a, 440b, …, 440n) can be charged by the power charging unit 430 using a power cable. The auxiliary batteries (450a, 450b, …, 450n) can be charged by the power charging unit 430 using the voltage generation unit 510 and the magnetic flux generation unit 520. The main batteries (440a, 440b, …, 440n) and the auxiliary batteries (450a, 450b, …, 450n) are not connected. However, without being limited to this, the main batteries (440a, 440b, …, 440n) and the auxiliary batteries (450a, 450b, …, 450n) can also be connected. When the main batteries (440a, 440b, …, 440n) need to be charged, they can be charged using the auxiliary batteries (450a, 450b, …, 450n). When the auxiliary batteries (450a, 450b, …, 450n) need to be charged, they can be charged using the main batteries (440a, 440b, …, 440n).

[0072] When the container transport device 110 moves along the rails 330a, 330b, it can use the electric power stored in the main batteries (440a, 440b, …, 440n). When the container transport device 110 operates the drive module 230, it can use the electric power stored in the main batteries (440a, 440b, …, 440n). When the container transport device 110 acquires information using sensors, it can use the electric power stored in the auxiliary batteries (450a, 450b, …, 450n). When the container transport device 110 communicates with the control device 130, it can use the electric power stored in the auxiliary batteries (450a, 450b, …, 450n).

[0073] When the container transfer device 110 is driven using batteries (420a, 420b, …, 420n) in a section where no power cable is laid, the SoC (State of Charge) of the batteries (420a, 420b, …, 420n) can decrease. In the present invention, the batteries (420a, 420b, …, 420n) can be charged even in a section where no power cable is laid by a linear development system. If the SoC of the batteries (420a, 420b, …, 420n) is above a certain level, the batteries (420a, 420b, …, 420n) are not charged, and the driving force can be provided to the container transfer device 110. According to the present invention, the HID inverter and the power cable of the HID system can be further reduced in a semiconductor manufacturing factory. In addition, the number of times the container transfer device 110 moves to an area where a power cable is laid for charging the battery can be reduced, and thus the effect of increasing the work transfer amount can also be obtained.

[0074] As described above, the embodiments of the present invention have been described with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments and can be manufactured in various different forms. Those having ordinary knowledge in the technical field to which the present invention pertains can understand that the present invention can be implemented in other specific forms without changing the technical idea and essential features of the present invention. Therefore, it should be understood that the above-described embodiment is illustrative in all aspects and not restrictive.

Explanation of reference numerals

[0075] 100 Logistics processing system 110 Container transfer device 120 Container storage device 130 Control device 140 Database 310 Container 330a, 330b Rail 400 Power supply section 410 First power supply unit 420 Second power supply unit 420a, 420b, …, 420n Battery 430 Power charging unit 440 Third power supply unit 440a, 440b, …, 440n Main battery 450 Fourth power supply unit 450a, 450b, …, 450n Auxiliary battery 510 Voltage generation unit 511 Main body 512 Coil 513 Protrusion 514 Slot 520 Magnetic flux generation unit 521 Magnet with the first polarity 522 Magnet with the second polarity

Claims

1. It is installed in a semiconductor manufacturing factory, a container transfer device for transferring a first container storing a plurality of substrates; a container storage device for storing the first container; and including a control device for controlling the travel of the container transfer device, wherein the container transfer device includes a battery and charges the battery while traveling along a rail, a logistics processing system.

2. The container transfer device includes a plurality of batteries and a second power supply unit for providing power required for the operation of the container transfer device; and including a power charging unit for charging the plurality of batteries, the logistics processing system according to claim 1.

3. The container transfer device is further connected to a power cable installed in the semiconductor manufacturing factory and further includes a first power supply unit for providing power required for the operation of the container transfer device, the logistics processing system according to claim 2.

4. The second power supply unit provides power when the first power supply unit cannot provide power, the logistics processing system according to claim 3.

5. The power charging unit includes a voltage generation unit for generating a voltage using a coil, and charges the plurality of batteries using the voltage, the logistics processing system according to claim 2.

6. The rail includes a magnetic flux generation unit for generating magnetic flux using a plurality of magnets, the logistics processing system according to claim 5.

7. The magnetic flux generation unit includes a first magnet and a second magnet having different polarities, and the first magnet and the second magnet are alternately installed along the longitudinal direction of the rail, the logistics processing system according to claim 6.

8. The voltage generation unit includes a first coil, a second coil, and a third coil for generating alternating currents having different phases, and the first coil, the second coil, and the third coil are alternately installed in a direction parallel to the longitudinal direction of the rail, the logistics processing system according to claim 5.

9. The voltage generation unit a main body; a plurality of protrusions formed on the surface of the main body, arranged in one direction and spaced apart from each other; and including a coil installed by the plurality of protrusions and slots formed between two different protrusions, the logistics processing system according to claim 5.

10. The voltage generation unit and the magnetic flux generation unit do not contact each other, the logistics processing system according to claim 6.

11. The logistics processing system according to claim 6, wherein the magnetic flux generation unit is installed on a rail in a section where the container transport device is not connected to a power cable installed in the semiconductor manufacturing factory.

12. The logistics processing system further includes a container transport device for transporting a second container storing a plurality of reticles, The logistics processing system according to claim 6, wherein the magnetic flux generation unit is installed on a rail in a section commonly used by the container transport device for transporting the first container and the container transport device for transporting the second container.

13. The logistics processing system according to claim 5, wherein the power charging unit provides the voltage as power required for the operation of the container transport device.

14. The logistics processing system according to claim 13, wherein the power charging unit provides the voltage as power required for the operation of the container transport device when the remaining amount of the plurality of batteries is equal to or greater than a reference value.

15. The second power supply unit includes a third power supply unit including a plurality of main batteries; and a fourth power supply unit including a plurality of auxiliary batteries, the logistics processing system according to claim 2.

16. The logistics processing system according to claim 15, wherein the power charging unit charges the plurality of main batteries using a power cable installed in the semiconductor manufacturing factory, and charges the plurality of auxiliary batteries with the voltage obtained while traveling along the rail.

17. When the container transport device moves along the rail, the third power supply unit provides the power stored in the plurality of main batteries, The logistics processing system according to claim 15, wherein the fourth power supply unit provides the power stored in the plurality of auxiliary batteries when the container transport device performs sensing or communication.

18. It is installed in a semiconductor manufacturing factory and transports a first container storing a plurality of substrates, a gripping module for gripping the first container; a lifting module for lifting and lowering the gripping module when gripping the first container; a power supply part for providing power; and includes a drive module connected to drive wheels located on both sides and providing the driving force generated by the power to the drive wheels, The power supply part a first power supply unit connected to a power cable installed in the semiconductor manufacturing factory; a second power supply unit including a plurality of batteries; and includes a power charging unit for charging the plurality of batteries, The power charging unit is a container conveying device that charges the plurality of batteries when traveling along a rail installed in the semiconductor manufacturing factory.

19. The container conveying device according to claim 18, wherein the power charging unit includes a coil, and charges the plurality of batteries using a voltage generated when magnetic flux generated by a plurality of magnets installed on the rail links with the coil.

20. It is installed in a semiconductor manufacturing factory, a container conveying device that travels along a rail and conveys a first container in which a plurality of substrates are stored; a container storage device that stores the first container; and includes a control device that controls the travel of the container conveying device, wherein the container conveying device is connected to a power cable installed in the semiconductor manufacturing factory, and a first power supply unit that provides power required for the operation of the container conveying device; includes a plurality of batteries, and a second power supply unit that provides power required for the operation of the container conveying device; and includes a power charging unit that charges the plurality of batteries, the rail includes a magnetic flux generating unit that generates magnetic flux using a plurality of magnets, the power charging unit includes a voltage generating unit that generates a voltage using a coil, The power charging unit charges the plurality of batteries using a voltage generated when magnetic flux generated by the plurality of magnets links with the coil. A logistics processing system.

Images