Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having good resolution can be produced.SOLUTION: The resist composition contains a compound represented by formula (I) and an acid generator and does not contain a resin containing a structural unit having an acid-labile group. [In the formula, L1 represents a hydrocarbon group having an I atom, the hydrocarbon group may have a substituent other than an iodine atom, and -CH2- contained in the group may be substituted with -O-, -S-, -SO2- or -CO-; R1 represents -R10, -CO-R10, -CO-O-R10 or the like; R2 represents -R10, -OH, -O-R10, -O-CO-R10, -O-CO-O-R10 or the like; R10 represents a group represented by formula (IC); m2 represents an integer of 1-7; RA represents a saturated hydrocarbon group; u1 represents an integer of 0-2; and L12 represents a single bond or a substituted / unsubstituted hydrocarbon group.]SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition and a method for producing a resist pattern using the resist composition, etc.

Background Art

[0002] Patent Document 1 describes a resist composition containing the following compound and an acid generator. TIFF2025105566000001.tif4570

[0003] Patent Document 2 describes a resist composition containing the following compound, an acid generator, and a resin having an acid-labile group. TIFF2025105566000002.tif3935

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide a resist composition that forms a resist pattern with better resolution than the resist pattern formed from the above resist composition.

Means for Solving the Problems

[0006] The present invention includes the following inventions. [1] A resist composition containing a compound represented by formula (I) and an acid generator, and not containing a resin having a structural unit having an acid-labile group. TIFF2025105566000003.tif877[In formula (I), L1 represents a (m2 + 1)-valent hydrocarbon group having 1 to 48 carbon atoms and having an iodine atom, the hydrocarbon group may have a substituent other than the iodine atom, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 1 is *-R 10 、*-CO-R 10 、*-CO-O-R 10 、*-L 2 -CO-O-R 10 or *-CO-O-L 2 -CO-O-R 10 represents, and * represents the bonding site with -O-. R 2 is *-R 10 、*-OH、*-O-R 10 、*-O-CO-R 10 、*-O-CO-O-R 10 、*-O-L 2 -CO-O-R 10 or *-O-CO-O-L 2 -CO-O-R 10 represents, and * represents the bonding site with 1 L. L 2 represents an alkanediyl group having 1 to 6 carbon atoms which may have a substituent, and two or more 2 Ls may be the same as or different from each other. R 10 represents a group represented by formula (IC). m2 represents any integer from 1 to 7, and when m2 is 2 or more, a plurality of 2 Rs may be the same as or different from each other. TIFF2025105566000004.tif1575[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2, and when u1 is 2, a plurality of A Rs are the same or different. L 12represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * represents a bonding site with -O- or -CO-.] [2]L 1 The resist composition according to [1], wherein 1 is a group represented by formula (L1-A). TIFF2025105566000005.tif65145[In formula (L1-A), L 13A , L 13B , L 13C and 13D each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -SO2- or -CO-. W 1A and W 1B each independently represents a cyclic hydrocarbon group having 3 to 18 carbon atoms. L 14A and L 14B each independently has a single bond, an alkanediyl group having 1 to 6 carbon atoms or a group combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 5 to 18 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -SO2- or -CO-, and the cyclic hydrocarbon group may have a substituent. L 15 represents a methylene group, a methanetriyl group or a methanetetrayl group. m20 represents any integer from 0 to 7, and when m20 is 2 or more, the groups within two or more parentheses may be the same as or different from each other. m21 represents 0 or 1, and satisfies 1 ≦ m20 + m21. m22 represents any integer from 0 to 3, and when m22 is 2 or more, the groups within two or more parentheses may be the same as or different from each other. m23 represents any integer from 0 to 3, and when m23 is 2 or more, the groups within two or more parentheses may be the same as or different from each other, and satisfies 1 ≦ m20 + m22 + m23 ≦ 7. m24 represents any integer from 0 to 7. When m24 is 2 or more, the groups within the parentheses of 2 or more may be the same as or different from each other. R 3A and R 3B each independently represents a halogen atom or an alkyl group having 1 to 3 carbon atoms. The alkyl group may have a halogen atom, and -CH2- contained in the alkyl group may be replaced by -O-, -S-, -SO2- or -CO-. m3A and m3B each independently represent any integer from 0 to 3, at least one of m3A and m3B is an integer of 1 or more. When m3A is 2 or more, two or more R 3A may be the same as or different from each other. When m3B is 2 or more, two or more R 3B may be the same as or different from each other, and at least one of R 3A and R 3B is an iodine atom. R 4 represents an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O-, -S-, -SO2- or -CO-. m4 represents any integer from 0 to 3. When m4 is 2 or more, two or more R 4 may be the same as or different from each other, and 1 ≤ m22 + m23 + m4 ≤ 3 is satisfied. In the formula (L1-A), the total number of carbon atoms of all groups does not exceed 48. * and ** each represent a bonding site. * represents a bonding site with an oxygen atom, and ** represents a bonding site with R 2 and represents a bonding site with R. [3] The resist composition according to [1] or [2], wherein the acid generator contains a salt represented by the formula (B1-A3). TIFF2025105566000006.tif1299 [In the formula (B1-A3), A 1 represents a nitrogen atom or a carbon atom. nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom. When nb5 is 3, A 1 represents a carbon atom. L b2 ’ represents a hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 ’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Two or more groups in parentheses may be the same as or different from each other, and two groups in parentheses may combine to form a ring. Z1 + represents an organic cation. [4](1) A step of applying the resist composition according to any one of [1] to [3] on a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for producing a resist pattern including the above steps.

Effect of the Invention

[0007] By using the resist composition of the present invention, a resist pattern can be produced with good resolution.

Embodiments for Carrying Out the Invention

[0008] In this specification, the “(meth)acrylic monomer” means “at least one of an acrylic monomer and a methacrylic monomer”. Expressions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either of them. -CH2- contained in a hydrocarbon group or the like is -O-, -S-, -CO-, -SO-, -NR XWhen replaced by -(X is any sign) or -SO2-, the same examples apply to each group, and the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group or the like. The "combined group" means a group formed by combining two or more of the exemplified groups, and the valence of these groups may be appropriately changed depending on the bonding form. "Derived from" or "derived" means that the polymerizable C=C bond contained in the molecule becomes a single bond (-C-C-) by polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents and the like, any position and number of hydrogen atoms contained in each group may be replaced by a bond. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituent. The "acid-labile group" means a group that forms a hydrophilic group (such as a hydroxy group or a carboxy group) when a leaving group is eliminated upon contact with an acid (e.g., trifluoromethanesulfonic acid or the like). The base-labile group means a group that forms a hydrophilic group (such as a carboxy group or a hydroxy group) when a leaving group is eliminated upon contact with a base (e.g., trimethylamine, tetramethylammonium hydroxide, or the like). In this specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0009] 〔Resist Composition〕 The resist composition of the present invention contains a compound represented by the formula (I) (hereinafter sometimes referred to as "compound (I)") and an acid generator (hereinafter sometimes referred to as "acid generator (B)"), and does not contain a resin containing a structural unit having an acid-labile group. The resist composition of the present invention preferably contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid having a lower acidity than the acid generated from the basic compound and the acid generator, and preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0010] <Compound (I)> TIFF2025105566000007.tif877[In the formula (I), all symbols have the same meanings as described above.]

[0011] L 1 Examples of the (m2 + 1)-valent hydrocarbon group in L include a 2- to 8-valent hydrocarbon group depending on m2. For example, an aliphatic hydrocarbon group (a linear or branched chain hydrocarbon group such as an alkanediyl group, an alkenediyl group, an alkynediyl group, and a monocyclic or polycyclic alicyclic hydrocarbon group), an aromatic hydrocarbon group, etc. may be mentioned, and a hydrocarbon group formed by combining two or more of these groups may also be used. L 1 -CH2- contained in the hydrocarbon group in L may be replaced by -O-, -S-, -CO- or -SO2-. The number of carbon atoms of the hydrocarbon group is preferably 1 to 42, more preferably 1 to 36, and still more preferably 1 to 30.

[0012] Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group; branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group. Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, a nonynediyl group, etc. Examples also include a group in which one or more of the hydrogen atoms of the above-described base are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 30, more preferably 1 to 24, still more preferably 1 to 18, even more preferably 1 to 12, still even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and particularly preferably 1 to 3.

[0013] Examples of the group in which -CH2- contained in the alkanediyl group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an alkanediyl-oxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanediyl-oxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediyl-carbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediyl-carbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediyl-thio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -S-), an alkanediyl-sulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-), and the like. Examples of the alkoxy group include alkoxy groups having 1 to 47 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group may be 1 to 35, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 47 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group and the like. The number of carbon atoms of the alkylthio group may be 1 to 35, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 47 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. The number of carbon atoms of the alkoxycarbonyl group may be 2 to 35, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 48 carbon atoms, such as acetyl group, propionyl group, butyryl group and the like. The number of carbon atoms of the alkylcarbonyl group may be 2 to 36, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 47 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 46 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms of the alkylcarbonyloxy group may be 2 to 35, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group may be 2 to 34, preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 47 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, and a propylsulfonyl group. The number of carbon atoms of the alkylsulfonyl group may be 1 to 35, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 47 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyl-oxy group, a butanediyl-oxy group, a pentanediyl-oxy group, a hexanediyl-oxy group, an octanediyl-oxy group, a 2-ethylhexanediyl-oxy group, a nonanediyl-oxy group, a decanediyl-oxy group, an undecanediyl-oxy group. The number of carbon atoms of the alkanedioxy group may be 1 to 35, preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 47 carbon atoms, such as methylene oxycarbonyl group, ethylene oxycarbonyl group, propanediyl oxycarbonyl group, butanediyl oxycarbonyl group, pentanediyl oxycarbonyl group, hexanediyl oxycarbonyl group, octanediyl oxycarbonyl group, 2-ethylhexanediyl oxycarbonyl group, nonanediyl oxycarbonyl group, decanediyl oxycarbonyl group, undecanediyl oxycarbonyl group, and the like. The number of carbon atoms in the alkanediyl oxycarbonyl group may be 2 to 35, preferably 2 to 17, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 48 carbon atoms, such as methylene carbonyl group, ethylene carbonyl group, propanediyl carbonyl group, butanediyl carbonyl group, pentanediyl carbonyl group, hexanediyl carbonyl group, octanediyl carbonyl group, 2-ethylhexanediyl carbonyl group, nonanediyl carbonyl group, decanediyl carbonyl group, undecanediyl carbonyl group, and the like. The number of carbon atoms in the alkanediyl carbonyl group may be 2 to 36, preferably 2 to 18, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediylcarbonyl-oxy group include alkanediylcarbonyl-oxy groups having 2 to 47 carbon atoms, such as methylenecarbonyl-oxy group, ethylenecarbonyl-oxy group, propanediylcarbonyl-oxy group, butanediylcarbonyl-oxy group, pentanediylcarbonyl-oxy group, hexanediylcarbonyl-oxy group, octanediylcarbonyl-oxy group, 2-ethylhexanediylcarbonyl-oxy group, nonanediylcarbonyl-oxy group, decanediylcarbonyl-oxy group, undecanediylcarbonyl-oxy group, etc. The number of carbon atoms in the alkanediylcarbonyl-oxy group may be 2 to 35, preferably 2 to 17, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 47 carbon atoms, such as methylenethio group, ethylenethio group, propanediylthio group, butanediylthio group, pentanediylthio group, hexanediylthio group, heptanediylthio group, octanediylthio group, nonanediylthio group, decanediylthio group, undecanediylthio group, dodecanediylthio group, 2-methylpropanediylthio group, etc. The number of carbon atoms in the alkanediylthio group may be 1 to 35, preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 47 carbon atoms, such as methylenesulfonyl group, ethylenesulfonyl group, propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group may be 1 to 35, preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced by bonding sites. In addition, in the alkenediyl group and the alkynediyl group, the replacement can be those containing a carbon-carbon double bond or a carbon-carbon triple bond at any position in the examples of the replacement in the above-described alkanediyl group.

[0014] Examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, cyclooctane-1,5-diyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc., cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, etc., and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group respectively. For example, the following groups etc. can be mentioned. The bonding site can be at any position. TIFF2025105566000008.tif46168 Also, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by a bonding site etc. can be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 30, more preferably 3 to 24, still more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Also, as a group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, an ether ring structure, a ketone ring structure, a lactone ring structure, a sultone ring structure, or an acetal ring structure may be formed, and groups represented below and groups in which -O- of the groups represented below is replaced by -S- etc. can be mentioned. The bonding site can be at any position. TIFF2025105566000009.tif46168

[0015] Examples of the aromatic hydrocarbon group include phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. Also, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by a bonding site etc. can be mentioned. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 30, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10. Examples of the group in which -CH2- contained in the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. The bonding site can be at any position. TIFF2025105566000010.tif26164 When -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is defined as the total number of carbon atoms in the hydrocarbon group. Also, the number may be one or two or more. Examples of the hydrocarbon group combined with two or more types include a group combining a chain hydrocarbon group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. For example, -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-chain hydrocarbon group-, etc. are included. Any group may be bonded to the oxygen atom or R 2 and may be bonded.

[0016] L 1 Examples of the substituent other than the iodine atom in the hydrocarbon group of L include a halogen atom other than the iodine atom, a cyano group, a nitro group, etc. Examples of the halogen atom other than the iodine atom include a fluorine atom, a chlorine atom, and a bromine atom. L 1 Due to the group in which -CH2- contained in the hydrocarbon group of L is replaced by -O-, -CO-, -S- or -SO2- or the like, L 1 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group, etc. L 1 The hydrocarbon group in may have one substituent or a plurality of substituents.

[0017] L 1 is a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), a cyclic hydrocarbon group having 3 to 24 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 24 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), preferably a chain hydrocarbon group having 1 to 6 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), more preferably a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-).

[0018] L 1 represents, for example, an (m2 + 1)-valent group represented by the formula (L1-A). TIFF2025105566000011.tif65145[wherein all the symbols have the same meanings as described above.] L 13A L 13B L 13C and L 13D The alkane diyl groups of and are within the range allowed by the upper limit of the number of carbon atoms, L 1Groups similar to the alkanediyl groups mentioned in the description of the hydrocarbon group are exemplified. L 13A , L 13B , L 13C and L 13D are each independently preferably a single bond or an alkanediyl group having 1 to 5 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), more preferably a single bond, a carbonyl group (-CO-), or - an alkanediyl group having 1 to 4 carbon atoms -CO- ** (** represents the bonding site with R 2 ). W 1A and W 1B The cyclic hydrocarbon groups of are, within the range allowed by the upper limit of the number of carbon atoms, groups similar to the cyclic hydrocarbon groups mentioned in the description of the hydrocarbon group of L 1 . W 1A and W 1B are each independently preferably a cyclic hydrocarbon group having 5 to 18 carbon atoms, more preferably a group obtained by removing a desired number of hydrogen atoms from one kind of ring selected from a cyclopentane ring, a cyclohexane ring, an adamantane ring, and a benzene ring. L 14A and L 14B The alkanediyl groups and the groups combining an alkanediyl group and a cyclic hydrocarbon group of are, within the range allowed by the upper limit of the number of carbon atoms, groups similar to the alkanediyl groups and the groups combining an alkanediyl group and a cyclic hydrocarbon group mentioned in the description of the hydrocarbon group of L 1 . L 14A is preferably a single bond, an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), or a group combining an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-) and a phenylene group. L 14B is preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). R 3A and R 3B Examples of the halogen atom of R and R include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. R 3A and R 3B Examples of the alkyl group having 1 to 3 carbon atoms of R and R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and the like. Examples of the group in which -CH2- contained in the alkyl group is replaced by -O-, -S-, -SO2- or -CO- include the same groups as the replaced groups mentioned in the description of the hydrocarbon group of L within the range where the upper limit of the number of carbon atoms permits. 1 R 3A and R 3B Examples of the alkyl group having 1 to 3 carbon atoms and having a halogen atom of R and R include haloalkyl groups having 1 to 3 carbon atoms such as alkyl fluoride groups having 1 to 3 carbon atoms, alkyl chloride groups having 1 to 3 carbon atoms, alkyl bromide groups having 1 to 3 carbon atoms, and alkyl iodide groups having 1 to 3 carbon atoms. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 3 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. R 3A and R 3B R and R are each independently preferably a fluorine atom, an iodine atom, an alkyl fluoride group having 1 to 3 carbon atoms or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferably, at least one of one or more Rs is an iodine atom. Even more preferably, two of two or more Rs are iodine atoms. Preferably, at least one of one or more Rs is an iodine atom. More preferably, two of two or more Rs are iodine atoms. 3A 3A 3A 3B 3B 3B m3A and m3B are each independently preferably any integer from 1 to 3. When m21 is 0, m20 is preferably any integer from 1 to 5, more preferably any integer from 1 to 4, still more preferably any integer from 1 to 3, and m3A is preferably any integer from 1 to 3, and more preferably 1 or 2. When m21 is 1, m20 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, m3A is preferably 1 or 2, m22 + m23 is preferably 2 or 3, m24 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and m3B is preferably 1 or 2. m4 is preferably any integer from 0 to 2.

[0019] R 1 and R 2 In the L 2 As the alkanediyl group of, within the range permitted by the upper limit of the number of carbon atoms, the alkanediyl group of L 1 The same groups as the alkanediyl group of can be mentioned. Also, as the substituent of the alkanediyl group of L 2 The same groups as the substituents such as the alkanediyl group of L 1 can be mentioned. R 1 and R 2 In the R 10 In the formula (IC) of, as the saturated hydrocarbon group of R A Chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups combining two or more of these can be mentioned. R A As the alkyl group of, alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group can be mentioned. The number of carbon atoms of the chain saturated hydrocarbon group is preferably from 1 to 9, more preferably from 1 to 6, still more preferably from 1 to 4, and even more preferably from 1 to 3. The alicyclic saturated hydrocarbon group may be monocyclic, polycyclic or spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc., and polycyclic cycloalkyl groups such as norbornyl group, adamantyl group, etc. The number of carbon atoms of the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and still more preferably 3 to 6. The combined group may be a group formed by combining one chain saturated hydrocarbon group such as the above-mentioned alkyl group and one alicyclic saturated hydrocarbon group, or a group formed by combining two or more of either or both of them.

[0020] L in formula (IC) 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms for L include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, alkynediyl groups and monocyclic or polycyclic alicyclic hydrocarbon groups), aromatic hydrocarbon groups, etc., and a hydrocarbon group formed by combining two or more of these groups may also be used. L 12 The -CH2- contained in the hydrocarbon group in L may be replaced by -O-, -S-, -CO- or -SO2-. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc.; branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. are included. Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, a nonynediyl group, and the like. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 24, more preferably from 1 to 18, still more preferably from 1 to 12, even more preferably from 1 to 9, still even more preferably from 1 to 6, even still more preferably from 1 to 4, and even still more preferably from 1 to 3.

[0021] Examples of groups in which -CH2- contained in the alkanediyl group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanediyl-oxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanediyl-oxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediyl-carbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediyl-carbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediyl-thio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -S-),Examples thereof include an alkanediylsulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), etc. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl group, propionyl group and butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 34 carbon atoms, such as butoxycarbonyloxy group. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group may be 2 to 11, preferably 2 to 8, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 35 carbon atoms, such as a methylene-oxy group, an ethylene-oxy group, a propane-diyl-oxy group, a butane-diyl-oxy group, a pentane-diyl-oxy group, a hexane-diyl-oxy group, an octane-diyl-oxy group, a 2-ethylhexane-diyl-oxy group, a nonane-diyl-oxy group, a decane-diyl-oxy group, an undecane-diyl-oxy group, and the like. The number of carbon atoms of the alkanediyl-oxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 35 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propane-diyl-oxycarbonyl group, a butane-diyl-oxycarbonyl group, a pentane-diyl-oxycarbonyl group, a hexane-diyl-oxycarbonyl group, an octane-diyl-oxycarbonyl group, a 2-ethylhexane-diyl-oxycarbonyl group, a nonane-diyl-oxycarbonyl group, a decane-diyl-oxycarbonyl group, an undecane-diyl-oxycarbonyl group, and the like. The number of carbon atoms of the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 36 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propane-diyl-carbonyl group, a butane-diyl-carbonyl group, a pentane-diyl-carbonyl group, a hexane-diyl-carbonyl group, an octane-diyl-carbonyl group, a 2-ethylhexane-diyl-carbonyl group, a nonane-diyl-carbonyl group, a decane-diyl-carbonyl group, an undecane-diyl-carbonyl group, and the like. The number of carbon atoms of the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, a butanediylcarbonyloxy group, a pentanediylcarbonyloxy group, a hexanediylcarbonyloxy group, an octanediylcarbonyloxy group, a 2-ethylhexanediylcarbonyloxy group, a nonanediylcarbonyloxy group, a decanediylcarbonyloxy group, an undecanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, a pentanediylthio group, a hexanediylthio group, a heptanediylthio group, an octanediylthio group, a nonanediylthio group, a decanediylthio group, an undecanediylthio group, a dodecanediylthio group, a 2-methylpropanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. In addition, substitution in the alkenediyl group and the alkynediyl group can be those containing a carbon-carbon double bond or a carbon-carbon triple bond at any position in the exemplified substitution in the above-described alkanediyl group.

[0022] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025105566000012.tif46168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, cyclooctane-1,5-diyl group, etc., and examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the groups represented below. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- are also included. The bonding site can be at any position. TIFF2025105566000013.tif47169Examples of the aromatic hydrocarbon group include phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10. When -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is defined as the total number of carbon atoms in the hydrocarbon group. Also, the number may be one or two or more.

[0023] Examples of the hydrocarbon group formed by combining two or more groups include groups formed by combining a chain hydrocarbon group such as an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. For example, -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc. Any of these groups may be bonded to an oxygen atom.

[0024] L 12 Examples of the substituent of the hydrocarbon group of L include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, etc. L 12 Due to the group in which -CH2- contained in the hydrocarbon group of L is replaced by -O- or -CO- etc., L 12 may substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, etc. L 12 The hydrocarbon group in L may have one substituent or a plurality of substituents.

[0025] L 12is preferably a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); more preferably an alkanediyl group having 1 to 6 carbon atoms or a group combining an alkanediyl group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (wherein -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); even more preferably an alkanediyl group having 1 to 3 carbon atoms or a group combining an alkanediyl group having 1 to 5 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (wherein -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-); and even more preferably a methylene group, -adamantanediyl group -O-CO-O-CH2-, -norbornanelactonediyl group -CO-O-CH2- or -cyclohexanediyl group -O-CO-O-CH2-.

[0026] Compound (I) includes compounds represented by the following formulae. TIFF2025105566000014.tif170163

[0027] TIFF2025105566000015.tif65160

[0028] Compound (I) may be used alone or in combination of two or more. The content of compound (I) is 10 to 95% by mass, preferably 20 to 90% by mass, more preferably 30 to 85% by mass based on the solid content of the resist composition. Compound (I) can be synthesized by various methods and is a compound available on the market.

[0029] In addition to compound (I), the resist composition of the present invention may contain a compound (I') that does not contain an iodine atom. TIFF2025105566000016.tif879[In formula (I'), L 1’ represents a (m2 + 1)-valent hydrocarbon group having 1 to 48 carbon atoms which may have substituents other than an iodine atom, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 1 、R 2 and m2 have the same meanings as in formula (I).] L 1’ represents the same group as L 1 except that it does not have an iodine atom. L 1 ’ is preferably a hydrocarbon group in which R 3A and R 3B are not iodine atoms in formula (L1 - A).

[0030] Examples of the compound (I') include compounds represented by the following formula. TIFF2025105566000017.tif126162

[0031] TIFF2025105566000018.tif88164

[0032] TIFF2025105566000019.tif248155

[0033] TIFF2025105566000020.tif233164

[0034] TIFF2025105566000021.tif250165

[0035] TIFF2025105566000022.tif250160

[0036] TIFF2025105566000023.tif249157

[0037] TIFF2025105566000024.tif141163

[0038] Compound (I') may be used alone or in combination of two or more. The content of compound (I') may be 1 to 50% by mass based on the solid content of the resist composition. It is preferable that the content of compound (I) is larger than that of compound (I'), and the content ratio of compound (I) to compound (I') is preferably 20:1 to 5:1. Compound (I') can be synthesized by various methods and is a compound available on the market.

[0039] The resist composition of the present invention may contain compound (II) in addition to compound (I). TIFF2025105566000025.tif879[In formula (II), L 3 represents a (m4 + 1)-valent hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 3 represents *-R 11 、*-CO-R 11 、*-CO-O-R 11 、*-L 4 -CO-O-R 11 or *-CO-O-L 4 -CO-O-R 11 and * represents the bonding site with -O-. R 4 represents *-R 11 、*-OH、*-O-R 11 、*-O-CO-R 11 、*-O-CO-O-R 11 、*-O-L 4 -CO-O-R 11 or *-O-CO-O-L 4 -CO-O-R11 represents, and * represents the bonding site with L 3 and. m4 represents any integer from 0 to 7. When m4 is 2 or more, a plurality of R 4 may be the same as or different from each other. L 4 represents an alkanediyl group having 1 to 6 carbon atoms which may have a substituent. R 11 represents a group represented by formula (IIC).] TIFF2025105566000026.tif2882 [In formula (IIC), R B represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u2 represents any integer from 0 to 2. When u2 is 2, a plurality of R B are the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 2. L 32 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * represents the bonding site with -O- or -CO-.]

[0040] L 3 Examples of the (m4 + 1)-valent hydrocarbon group in L 1 include the same hydrocarbon groups as the hydrocarbon group of L in formula (I).

[0041] L 3is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), a cyclic hydrocarbon group having 3 to 24 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 24 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); more preferably a chain hydrocarbon group having 1 to 6 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); still more preferably a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-). Further, L 3 In the group represented by the formula (L1-A), examples of the hydrocarbon group in which m3A and m3B may both be 0 are given.

[0042] R 3 and R 4 For the alkandiyl group of L 4 in R 1 Examples of the alkandiyl group of L 4 include the same groups as those of the alkandiyl group of L 1 within the range allowed by the upper limit of the number of carbon atoms. Further, examples of the substituent of the alkandiyl group of L R 3 and R 4 For R 11 in the formula (IIC) of RB Examples of the saturated hydrocarbon group of R A include the same groups as the saturated hydrocarbon group of

[0043] L 32 Examples of the hydrocarbon group having 1 to 36 carbon atoms of L in formula (IC) 12 include the same hydrocarbon groups as the hydrocarbon group of L 32 Examples of the substituent of the hydrocarbon group of L 12 include the same groups as the substituent of the hydrocarbon group of

[0044] L 32 L is preferably a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); more preferably an alkanediyl group having 1 to 6 carbon atoms or a group combining an alkanediyl group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (wherein -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); even more preferably an alkanediyl group having 1 to 3 carbon atoms or a group combining an alkanediyl group having 1 to 5 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (wherein -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-); and even more preferably a methylene group, an -adamantanediyl group -O-CO-O-CH2-, a -norbornanelactonediyl group -CO-O-CH2- or a -cyclohexanediyl group -O-CO-O-CH2-.

[0045] Examples of compound (II) include compounds represented by the following formula. TIFF2025105566000027.tif228165

[0046] TIFF2025105566000028.tif240167

[0047] TIFF2025105566000029.tif248162

[0048] TIFF2025105566000030.tif240155

[0049] TIFF2025105566000031.tif245167

[0050] TIFF2025105566000032.tif114156

[0051] TIFF2025105566000033.tif117162

[0052] TIFF2025105566000034.tif243167

[0053] TIFF2025105566000035.tif221168

[0054] TIFF2025105566000036.tif250165

[0055] TIFF2025105566000037.tif204167

[0056] Compound (II) may be used alone or in combination of two or more. The content rate of compound (II) may be 1 to 50 mass% based on the solid content of the resist composition. It is preferable that the content rate of compound (I) is larger than that of compound (II), and the content ratio of compound (I) to compound (II) is preferably 20:1 to 5:1. Compound (II) can be synthesized by various methods and is a compound available on the market.

[0057] <Acid generator (B)> As the acid generator (B), either a nonionic compound or an ionic compound may be used. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Representative examples of ionic compounds include onium salts containing an onium cation (e.g., diazonium salt, phosphonium salt, sulfonium salt, iodonium salt). Examples of anions of onium salts include sulfonic acid anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, etc.

[0058] As the acid generator (B), compounds that generate acid upon irradiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Also, compounds produced by known methods may be used. The acid generator (B) may be used alone or in combination of two or more. Further, the acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure serving as an acid-labile group, and the acid-labile group preferably includes the group (1) or group (2) exemplified in this specification.

[0059] As a preferred form of the acid generator (B), salts containing a sulfonylimide anion or a sulfonylmethide anion can be mentioned, and salts containing a sulfonylimide anion or a sulfonylmethide anion represented by the formula (B1-A3) (hereinafter, the anion part may be referred to as "anion (B1-A3)").) (hereinafter, may be referred to as "salt (B1-A3)" or "acid generator (B1-A3)"). TIFF2025105566000038.tif1299[In the formula (B1-A3), all the symbols have the same meanings as described above.] L b2’ As the hydrocarbon group of, a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups, one hydrogen atom is removed, and SO2 or Y b1’ And a divalent group bonded to The number of carbon atoms of the hydrocarbon group is preferably 1 to 20, more preferably 1 to 18. Examples of the chain hydrocarbon group include a group obtained by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. are mentioned. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 20, more preferably 1 to 18, still more preferably 1 to 16, even more preferably 1 to 12, still even more preferably 1 to 9, even still more preferably 1 to 6, even still even more preferably 1 to 4, and particularly preferably 1 to 3. Examples of the alicyclic hydrocarbon group include a group obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025105566000039.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and still even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing one hydrogen atom from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. TIFF2025105566000040.tif1285 The number of carbon atoms of the aromatic hydrocarbon group is preferably 4 to 20, more preferably 4 to 18, still more preferably 4 to 16, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10. L b2 When -CH2- contained in the hydrocarbon group of L’ is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L b2Among the hydrocarbon groups of ', the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- includes a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -O-CO-), an alkanedioylcarbonyl group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -CO-), an alkanedioylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -CO-O-), and the like. As these replaced groups, groups similar to those exemplified in this specification are included within the range where the upper limit of the number of carbon atoms permits. L b2 Among the hydrocarbon groups of ', the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- includes groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters ( sultones), and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas are included. The bonding positions of the alicyclic hydrocarbon groups listed in the following formulas can be at any position. TIFF2025105566000041.tif48165Lb2 Among the hydrocarbon groups of ’, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. As a group combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples include a group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, a group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, a group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. Examples of the group in which -CH2- contained in the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -S-, -CO-, or -SO2- also include the following groups, etc. The bonding site can be at any position. TIFF2025105566000043.tif26164L b2 Examples of the substituent that the hydrocarbon group of ’ may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b2 When ’ is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L b2 By replacing -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of ’ with -O-, -CO-, -S-, or -SO2-, the hydrocarbon group of L b2 ’ can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, etc.

[0060] Y b1 Examples of the cyclic hydrocarbon group of 'include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 Examples of the alicyclic hydrocarbon group and the aromatic hydrocarbon group of 'are the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b2 ', and when having no substituent, they may be a monovalent alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 Examples of the substituent that the methyl group of'may have include a halogen atom, a cyano group, a hydroxy group, a nitro group, etc. Y b1 Examples of the substituent that the cyclic hydrocarbon group of'may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group. The -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 The carbon number of the hydrocarbon group that the cyclic hydrocarbon group of'may have is not included in the carbon number of the cyclic hydrocarbon group of Y b1 '. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of'may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of a group combining two or more of a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and these groups are, within the range allowed by the upper limit of the carbon number, L b2 ', and the same groups as the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by L b1 '. Also, examples of a group in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of'may have as a substituent is replaced by -O-, -S-, -CO- or -SO2- are, within the range allowed by the upper limit of the carbon number, L b2Examples of the group in which -CH2- contained in the hydrocarbon group of '' is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified above. Y b1’ Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1’ may have as a substituent include a protecting group or a leaving group (an acid-labile group or a base-labile group) that may generally be used in the art. In formula (B1-A3), L b2’ is a single bond, *-L b23 -, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may have a fluorine atom, X 2 and X 3 each independently represent -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-, W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.). Y b1’ is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-). More preferably, it is a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is more preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms among the substituents that the cyclic hydrocarbon group of Y b1 may have, and R Yc represents a hydrogen atom or Y b1represents a substituent that the cyclic hydrocarbon group may have, and * is L b2 represents the bonding site with. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have other substituents although not particularly illustrated in the following formula. TIFF2025105566000044.tif83159In formula (B1-A3), two -SO2-L b2’ -Y b1’ together form a ring containing A 1 Examples of the anion include anions represented by formula (B1-A3’). TIFF2025105566000045.tif21122[In formula (B1-A3’), A 1 , Y b1’ , L b2’ and nb5 have the same meanings as in formula (B1-A3). W b4 represents a disulfonylimide ring or disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring of W preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced by a fluorine atom.

[0061] Examples of the anion of the salt represented by formula (B1-A3) include the following. Among them, anions represented by formula (B1-a3-1) and formula (B1-a3-2) are preferred. TIFF2025105566000046.tif189164

[0062] Z1 +Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, organic phosphonium cations, and the like. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryliodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter may be referred to as "cation (b2-1)" etc. according to the formula number) can be mentioned. TIFF2025105566000047.tif84161[In formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of any of 0 to 5. When m2 is 2 or more, a plurality of Rb7 may be the same or different, and when n2 is 2 or more, a plurality of Rs b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted by an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted by an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may combine with each other to form a ring including the -CH-CO- to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may combine with each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer from 0 to 5. q2 and r2 each independently represent an integer from 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, the plurality of R b13 are the same or different, when p2 is 2 or more, the plurality of R b14 are the same or different, when q2 is 2 or more, the plurality of R b15 are the same or different, when r2 is 2 or more, the plurality of R b16 are the same or different, when s2 is 2 or more, the plurality of R b17 are the same or different, when t2 is 2 or more, the plurality of R b18 are the same or different. u3 represents an integer from 1 to 3 and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represent an integer from 0 to 3 and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. o21, p22, q23, r24, t25, and s26 each independently represent an integer from 0 to 4. When u3, u4, and u5 are each 2 or more, the groups within the plurality of parentheses are each the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, the plurality of R b21 ~R b26 are each the same or different. When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and at least one of R b13 ~R b16 is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and R b13 ~Rb18 It is preferable that at least one of them is a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0063] The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group, and 2-ethylhexyl group. In particular, the chain hydrocarbon group of R b9 ~R b12 is preferably 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group, and the following groups. TIFF2025105566000048.tif11157In particular, the alicyclic hydrocarbon group of R b9 ~R b12 is preferably 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms.

[0064] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group, isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms with a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, and a perfluorobutyl group. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.

[0065] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples of the aromatic hydrocarbon group having a chain hydrocarbon group include a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, a p-tert-butylphenyl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group, and examples of the aromatic hydrocarbon group having an alicyclic hydrocarbon group include a p-cyclohexylphenyl group and a p-adamantylphenyl group. When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include a p-methoxyphenyl group. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, and a naphthylethyl group.

[0066] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, 2-ethylhexylcarbonyloxy group and the like.

[0067] R b4 and R b5 The ring formed by the combination of R and R together with the sulfur atom to which they are attached may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, preferably rings having 4 to 18 carbon atoms. Further, examples of the ring containing a sulfur atom include 3- to 12-membered rings, preferably 3- to 7-membered rings, and examples thereof include the following rings. * represents a bonding site. TIFF2025105566000049.tif24142

[0068] R b9 and R b10 The ring formed by R and R together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3- to 12-membered rings, preferably 3- to 7-membered rings. Examples thereof include thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring and the like. R b11 and R b12 The ring formed by R and R together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3- to 12-membered rings, preferably 3- to 7-membered rings. Examples thereof include oxocycloheptane ring, oxocyclohexane ring, oxonorbornane ring, oxoadamantane ring and the like. R b27 ~R b29 Examples of the group containing an acid-labile group of R~R include -R c30 , -CO-O-R c30 or -L c10-CO-O-R c30 The group (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid-labile group.) and the like can be mentioned. R b27 、R b28 and R b29 Examples of the acid-labile groups include groups represented by formula (1) or formula (2) described later.

[0069] Among the cations (b2-1) to (b2-5), preferably, the cation is (b2-1), (b2-4) or (b2-5). Examples of the cation (b2-1) include the following cations. TIFF2025105566000050.tif149164 Examples of the cation (b2-2) include the following cations. TIFF2025105566000051.tif18150 Examples of the cation (b2-3) include the following cations. TIFF2025105566000052.tif26140 Examples of the cation (b2-4) include the following cations. TIFF2025105566000053.tif123164 Examples of the cation (b2-5) include the following cations. TIFF2025105566000054.tif115157

[0070] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. Examples of the acid generator (B) include any anion represented by any of formula (B1-3a-1) to formula (B1-3a-3) or formula (B1-3a-11) to formula (B1-3a-14), and a combination with the cation (b2-1), the cation (b2-2), the cation (b2-3), the cation (b2-4) or the cation (b2-5).

[0071] As the acid generator (B), those represented by formula (B3-1) to formula (B3-30) are preferably mentioned. TIFF2025105566000055.tif221161

[0072] TIFF2025105566000056.tif149161

[0073] In another form of the acid generator (B), salts in which the anion of the salt represented by formula (B1-A3) is replaced with a sulfonic acid anion, a benzenesulfonyl anion, etc. are also preferably used as the acid generator (B). As another form of the acid generator (B), a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)" or "acid generator (B1)") is mentioned. TIFF2025105566000057.tif1492[In formula (B1), L b1 represents a single bond or an (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] In formula (B1), L b1As the (nb1 + 1)-valent hydrocarbon group, nb1 hydrogen atoms are removed from a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, and a group that binds to 1 or more L b2 can be mentioned. The number of carbon atoms of the hydrocarbon group is preferably from 1 to 48, more preferably from 1 to 42, still more preferably from 1 to 36, even more preferably from 1 to 30, and even still more preferably from 1 to 24. Examples of the chain hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. can be mentioned. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 24, still more preferably from 1 to 20, even more preferably from 1 to 18, even still more preferably from 1 to 12, and even still more preferably from 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. Further, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025105566000058.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even still more preferably 3 to 10, and even still more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even still more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing one hydrogen atom from an aryl group of nb1. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. For the number of carbon atoms in the aromatic hydrocarbon group of TIFF2025105566000059.tif1085, it is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and still even more preferably 6 to 10. L b1 When -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -O-CO-), an alkanedioylcarbonyl group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -CO-), an alkanedioylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -CO-O-), and the like. Examples of these replaced groups include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon group mentioned in the following formulas can be any position. TIFF2025105566000060.tif48165L b1 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025105566000061.tif1325Examples of the group formed by combining two or more of the linear hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group include a group formed by combining the above linear hydrocarbon group and the above alicyclic hydrocarbon group, a group formed by combining the above linear hydrocarbon group and the above aromatic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group formed by combining the above linear hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group formed by combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. Examples of the group in which -CH2- contained in the group formed by combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L b2 Examples of the divalent hydrocarbon group include a divalent linear hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups, and a group obtained by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 and bonding groups. L b2The divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group formed by combining two or more of these groups, each within the range allowed by the upper limit of the number of carbon atoms, is L in the anion of formula (B1-A3). b2 Examples of the group obtained by removing one hydrogen atom from the monovalent chain hydrocarbon group, monovalent alicyclic hydrocarbon group, monovalent aromatic hydrocarbon group, and monovalent group formed by combining two or more of these, exemplified by L L b1 and L b2 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. L b1 and L b2 When L b1 and L b2 are a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or aromatic hydrocarbon group has. Also, when the -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of L b1 and L b2 is replaced by -O-, -CO-, -S-, or -SO2-, the hydrocarbon group of L Y b1 Examples of the cyclic hydrocarbon group of include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrocarbon group and aromatic hydrocarbon group of Y b1 are the same as the alicyclic hydrocarbon group and aromatic hydrocarbon group exemplified by Y b2 ' and L Y b1Examples of the substituent that the methyl group may have include a halogen atom, a cyano group, a hydroxy group, a nitro group, and the like. Y b1 Examples of the substituent that the cyclic hydrocarbon group of b1 may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms which may have a halogen atom, a cyano group or a nitro group (in the hydrocarbon group, -CH2- contained therein may be replaced by -O-, -S-, -CO- or -SO2-). Y b1 The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of b1 may have is b1 not included in the number of carbon atoms of the cyclic hydrocarbon group of b1 . Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1 may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range permitted by the upper limit of the number of carbon atoms, Y in the anion of formula (B1-A3) b1 ’ and L b2 ’ and the same groups as those exemplified for a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining two or more of these groups. Further, examples of the group in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1 may have as a substituent is replaced by -O-, -S-, -CO- or -SO2- include, within the range permitted by the upper limit of the number of carbon atoms, Y in the anion of formula (B1-A3) b1 ’ and L b1 ’ and the same groups as those exemplified for the group in which -CH2- contained in the hydrocarbon group of b2 is replaced by -O-, -S-, -CO- or -SO2-. Further, the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1 may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art. b2 ’ and the same groups as those exemplified for the group in which -CH2- contained in the hydrocarbon group of b2 is replaced by -O-, -S-, -CO- or -SO2-. Further, the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1 may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art. b1 The hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of b1 may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art.

[0074] The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). TIFF2025105566000062.tif31125[In formula (B1-A1), L b2 and Y b1 have the same meaning as in formula (B1). Q b1 、Q b2 、Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a C1-C6 perfluoroalkyl group or a C1-C6 alkyl group. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups in multiple parentheses may be the same or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb2 represents any integer from 1 to 3. When nb2 is 2 or more, the groups in multiple parentheses may be the same or different from each other.] Q b1 、Q b2 、Q b3 and Q b4 Examples of the alkyl group of Q b1 、Q b2 、Q b3 and Q b4 ​Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, and the like. Q b1 and Q b2 is Q b1 and Q b2 It is preferable that at least one of Q and Q contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each independently preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, and more preferably 0, 1, or 2. X 1 is preferably -O-CO- or -CO-O-.

[0075] L b3 Examples of the hydrocarbon group in L include the same hydrocarbon groups as those exemplified for L of formula (B1) within the range allowed by the upper limit of the number of carbon atoms. b1 are the same as those exemplified for L of formula (B1). In formula (B1-A1), L b3is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an optionally substituted aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group formed by combining two or more of these groups, and is preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). When -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO-, the number thereof is preferably 1 to 4, and preferably, one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. JPEG2025105566000063.jpg1582[In the formula (Lb3-1), nb2 represents the same meaning as the formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 and represents the bonding site with.] In the formula (Lb3-1), the chain hydrocarbon group of L b31 as long as the upper limit of the number of carbon atoms permits, L b1Examples thereof include the same groups as the chain hydrocarbon groups exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of, as long as the upper limit of the number of carbon atoms permits, are the same groups as the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified by L b1 Examples thereof include the same groups as the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified above. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of may have and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group of may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b1 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, as the alicyclic hydrocarbon group and aromatic hydrocarbon group of W b3 the alicyclic hydrocarbon groups and aromatic hydrocarbon groups represented below are preferred. In the alicyclic hydrocarbon groups and aromatic hydrocarbon groups represented below, * and ** represent bonding sites, * represents the bonding site with X 1 or L b31 and ** represents a hydrogen atom, a substituent or the bonding site with L b2 and at least one ** represents the bonding site with L b2 In addition, in the alicyclic hydrocarbon groups represented below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, it preferably forms an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring ( sultone) or an acetal ring. TIFF2025105566000064.tif36168 In formula (B1-A1), L b2is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 One of them represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 represents the bonding site with Y. However, L b21 X 2 and L b22 The total carbon number of is 12 or less.) is more preferable. In formula (B1-A1), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), and is more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and is even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is more preferably a group represented by the above-mentioned formula (Y1) to formula (Y36).

[0076] As the anion represented by formula (B1-A1), anions represented by formula (B1-A1-1) to formula (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] are preferable, and an anion represented by any of formula (B1-A1-1) to formula (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to formula (B1-A1-33), formula (B1-A1-36) to formula (B1-A1-40), and formula (B1-A1-47) to formula (B1-A1-85) is more preferable. TIFF2025105566000065.tif216160

[0077] TIFF2025105566000066.tif249151

[0078] TIFF2025105566000067.tif254163

[0079] Here, R i2 ~R i7 are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0080] Preferable anions represented by formula (B1-A1) include anions respectively represented by formula (B1a-1) to formula (B1a-70). TIFF2025105566000068.tif185163

[0081] TIFF2025105566000069.tif252166

[0082] TIFF2025105566000070.tif71167

[0083] Among them, anions represented by any of Formula (B1a-1) to Formula (B1a-4), Formula (B1a-7) to Formula (B1a-11), Formula (B1a-14) to Formula (B1a-30), and Formula (B1a-35) to Formula (B1a-70) are preferred.

[0084] The anion represented by Formula (B1-A2) is represented by the following formula. TIFF2025105566000071.tif23100[In Formula (B1-A2), L b2 and Y b1 have the same meaning as in Formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, the groups in multiple parentheses may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, multiple Rs b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.]

[0085] In Formula (B1-A2), examples of the hydrocarbon group of L b2 and examples of the cyclic hydrocarbon group of Y b1 are the same as the examples of the hydrocarbon group of L b2 in Formula (B1) and the examples of the cyclic hydrocarbon group of Y b1 within the range allowed by the upper limit of the number of carbon atoms. Examples of the hydrocarbon group of L b2 , the methyl group of Y b1 and the substituents that the cyclic hydrocarbon group may have are also the same as those of L b2The hydrocarbon group, Y b1 Examples of the substituents which the methyl group and the cyclic hydrocarbon group of b1 may have are the same as those exemplified above. These hydrocarbon groups, methyl group and cyclic hydrocarbon group may have one substituent or a plurality of substituents. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), more preferably *-CO-O-L b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site to the benzene ring to which SO3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.). More preferably, it is *-CO-O-. Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y of formula (B1-A1) b1 or L b1 is more preferably an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by. Specifically, it is preferably a group represented by the above-described formulas (Y1) to (Y36), and more preferably a group represented by the above-described formulas (Y1) to (Y19).

[0086] In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1The bonding position of - is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of TIFF2025105566000072.tif28107[In the above formula, L b2 , Y b1 , R b1 , and nb3 have the same meanings as in formula (B1-A2).] In formula (B1-A2), when nb4 is 2 or more, the plurality of L b2 and Y b1 are preferably the same group as each other.

[0087] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3. Examples of the halogen atom for R b1 include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the group in which -CH2- contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, and carbonyl group. These replaced groups include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms allows. R b1 is each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, one of R b1 is preferably a halogen atom and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms. One of R b1 is more preferably a fluorine atom or an iodine atom and the other is more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms.

[0088] Examples of the anion represented by the formula (B1-A2) include the following anions. Among them, the anions represented by the formulas (B2a-1) to (B2a-20) are preferable, and the anions represented by the formulas (B2a-1) to (B2a-11), (B2a-16) to (B2a-20) are more preferable. In the following anions, some of R b1 are omitted and may include substituents not shown. TIFF2025105566000073.tif94161

[0089] In another form of the acid generator (B), a salt obtained by replacing the anion in the salt represented by the formula (B1) with a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the carboxylic acid anion include the following. TIFF2025105566000074.tif41155

[0090] As the acid generator (B1), a combination of an anion preferably represented by any of formula (B1a-1) to formula (B1a-4), formula (B1a-7) to formula (B1a-11), formula (B1a-14) to formula (B1a-30), formula (B1a-35) to formula (B1a-70), formula (B2a-1) to formula (B2a-11), and formula (B2a-16) to formula (B2a-20) and a cation (b2-1), cation (b2-2), cation (b2-3), cation (b2-4), or cation (b2-5) is exemplified. As the acid generator (B1), those preferably represented by formula (B1-1) to formula (B1-105) and formula (B2-1) to formula (B2-20) are exemplified. Among them, those containing an arylsulfonium cation are preferred, and those represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), and formula (B2-1) to formula (B2-20) are particularly preferred. TIFF2025105566000075.tif247168

[0091] TIFF2025105566000076.tif242160

[0092] TIFF2025105566000077.tif254165

[0093] TIFF2025105566000078.tif254160

[0094] TIFF2025105566000079.tif249163

[0095] TIFF2025105566000080.tif132163

[0096] In the resist composition of the present invention, the content of the acid generator (B) is 1% by mass or more and 90% by mass or less, preferably 3% by mass or more and 45% by mass or less, more preferably 5% by mass or more and 40% by mass or less, still more preferably 10% by mass or more and 35% by mass or less, based on the solid content of the resist composition.

[0097] <Resin Containing Structural Unit Having Acid-Labile Group> Examples of the acid-labile group include a group represented by the formula (1) (hereinafter also referred to as group (1)) and / or a group represented by the formula (2) (hereinafter also referred to as group (2)). TIFF2025105566000081.tif2298[In the formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025105566000082.tif2278[In the formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom and X to which they are bonded, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a binding site. These groups include similar groups within the scope described in the present specification. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following groups. * represents the binding site to -O-. TIFF2025105566000083.tif27139R a2’ and R a3’ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ includes the following groups. * represents the binding site. TIFF2025105566000084.tif19124 Group (1) specifically includes the following groups. * represents the binding site. TIFF2025105566000085.tif151162 Specific examples of Group (2) include the following groups. * represents the binding site. TIFF2025105566000086.tif55153

[0098] Therefore, the resin containing a structural unit having an acid-labile group means a resin containing a structural unit in which the above-described acid-labile group and a monomer having, for example, an ethylenically unsaturated bond, more specifically, a polymerizable C=C bond such as a (meth)acrylic monomer having an acid-labile group has become a -C-C- group (single bond), and the resist composition in the present invention means that it does not contain such a resin. The weight average molecular weight of the resin containing a structural unit having an acid-labile group is, for example, 3,500 or more (more specifically, 4,000 or more, 4,500 or more, 5,000 or more), and 50,000 or less (more specifically, 30,000 or less, 15,000 or less). In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the examples.

[0099] <Compound (L)> The resist composition of the present invention preferably further contains, as the compound (L), a compound having a phenolic hydroxy group or a benzoic acid carboxy group and / or a compound in which the hydroxy group of the phenolic hydroxy group or the carboxy group of the benzoic acid carboxy group is protected with an acid-labile group. The compound (L) contains one or more structures represented by the formula (L0) as partial structures. TIFF2025105566000087.tif2470[In the formula (L0), Ar lk represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms which may have a substituent. X lk represents a single bond or a carbonyl group. R lk represents a hydrogen atom or an acid-labile group. lk represents an integer of 1 or more, and when lk is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. * represents a bonding site. lo represents an integer of 1 or more.] Ar lk Examples of the aromatic hydrocarbon ring of Ar include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and the like. Ar lk Examples of the substituent that the aromatic hydrocarbon ring of Ar may have include the same groups as the groups exemplified by R lk11 and R lk22 and the like. Ar lkis preferably a benzene ring or a naphthalene ring which may have a substituent, and more preferably a benzene ring which may have a substituent. R lk Examples of the acid-labile group of lk include a group represented by the formula (1a) (hereinafter, sometimes referred to as "acid-labile group (1a)") and a group represented by the formula (2a) (hereinafter, sometimes referred to as "acid-labile group (2a)"). Among them, the group represented by the formula (2a) is preferable. TIFF2025105566000088.tif2156[In the formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. * represents a bonding site.] TIFF2025105566000089.tif2160[In the formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the -C-X a - to which they are bonded, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * represents a bonding site.]

[0100] R aa1 、R aa2 and R aa3Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, and the like. R aa1 R aa2 and R aa3 The alkyl group of R R aa1 R aa2 and R aa3 Examples of the alkenyl group of R R aa1 R aa2 and R aa3 The alicyclic hydrocarbon group of R aa1 R aa2 and R aa3 The carbon number of the alicyclic hydrocarbon group of R TIFF2025105566000090.tif9159R aa1 R aa2 and R aa3 Examples of the aromatic hydrocarbon group of R aa1 R aa2 and R aa3 The carbon number of the aromatic hydrocarbon group of R Examples of the combined group include a group combining the above-described alkyl group and alicyclic hydrocarbon group (e.g., an alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), an aralkyl group such as benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), an aryl-cycloalkyl group such as phenylcyclohexyl group, and the like.

[0101] R aa1 and R aa2 When -C(R aa1 )(R aa2 )(R aa3 ) forms an alicyclic hydrocarbon group together with the carbon atoms to which they are attached, the following groups can be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. * represents the bonding site with -O-. TIFF2025105566000091.tif27138

[0102] Examples of the group represented by formula (1a) include a 1,1,1-trialkyl group (a group in which R aa1 , R aa2 and R aa3 in formula (1a) are alkyl groups, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atom to which they are attached form an adamantyl group, and R aa3 is an alkyl group), and a 1-(adamantan-1-yl)-1,1-dialkyl group (in formula (1a), R aa1 and R aa2 are alkyl groups, and R aa3is an adamantyl group).

[0103] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups are R aa1 , R aa2 and R aa3 Examples of the groups include the same groups as those listed in the above. R aa2' and R aa3' are bonded to each other and the carbon atom to which they are bonded and X a When forming a heterocyclic group together with -C(R aa1' )(R aa2' )-X a -(R aa3' ) includes the following groups. * represents a bonding site. The heterocyclic group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. TIFF2025105566000092.tif21143R aa1 , R aa2 , R aa3 , R aa1' , R aa2' and R aa3' The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R aa1' and R aa2' At least one of these is preferably a hydrogen atom.

[0104] Specific examples of the acid labile group (1a) include the following groups, where * represents a bonding site. TIFF2025105566000093.tif60162Specific examples of the acid labile group (2a) include the following groups: * represents a binding site. TIFF2025105566000094.tif58148

[0105] lk may be any integer of 2 or more. Further, lk may be, for example, any integer of 13 or less. Among them, lk is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, yet more preferably any integer of 1 to 5, and even yet more preferably any integer of 1 to 4. lo may be any integer of 2 or more. Further, lo may be, for example, any integer of 13 or less. Among them, lo is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, yet more preferably any integer of 1 to 5, and even yet more preferably any integer of 1 to 4.

[0106] Examples of the compound (L0) include a compound represented by the formula (LX) (hereinafter sometimes referred to as "compound (LX)"). TIFF2025105566000095.tif23130[In the formula (LX), Ar k1 and Ar k2 each independently represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms. X lk1 and X lk2 each independently represents a single bond or a carbonyl group. R lk1 and R lk2 each independently represents a hydrogen atom or an acid-labile group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R lk11 and R lk22each independently represents a hydrocarbon group having 1 to 20 carbon atoms which may have a halogen atom or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-, R lk11 and R lk22 , R lk11 and Lx or R lk22 and Lx may each be bonded to form a ring, the ring may have a substituent, and -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. lx2 represents any integer from 1 to 6, and when lx2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk1’ represents any integer from 1 to 13, and when lk1’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11’ represents any integer from 0 to 12, and when lk11’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2’ represents any integer from 1 to 13, and when lk2’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22’ represents any integer from 0 to 12, and when lk22’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] Ar k1 and Ar k2 Examples of the aromatic hydrocarbon rings of Ar lk include the same groups as those exemplified for the groups of the aromatic hydrocarbon rings of Ar R lk1 and R lk2 Examples of the acid-labile groups of R lk include the same groups as those exemplified for the acid-labile groups of R Examples of the hydrocarbon group for Lx include a chain hydrocarbon group, an alicyclic hydrocarbon group which is monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and an aromatic hydrocarbon group. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. The hydrocarbon group of Lx is a (lx2 + 1)-valent hydrocarbon group, and depending on lx2, it can be a 2- to 7-valent hydrocarbon group. The number of carbon atoms in the hydrocarbon group is preferably from 1 to 72, more preferably from 1 to 60, still more preferably from 1 to 48, yet more preferably from 1 to 36, even more preferably from 1 to 24. Examples of the chain hydrocarbon group include an alkanediyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Note that the terminal of the branched alkanediyl group may be a methyl group. In addition, examples of the chain hydrocarbon group also include a group in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 10, yet more preferably from 1 to 9, even more preferably from 1 to 8, still more preferably from 1 to 6, and even more preferably from 1 to 4. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclic alicyclic hydrocarbon groups such as spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3′-cyclopentane group, and spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group by spiro bond respectively. In addition, examples of the alicyclic hydrocarbon group include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. Examples of the alicyclic hydrocarbon group include the following groups etc. The bonding site can be at any position. TIFF2025105566000096.tif44163 The number of carbon atoms of the alicyclic hydrocarbon group is, for example, 3 to 72, may be 3 to 60, preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, and the like. In addition, examples of the aromatic hydrocarbon group include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. The number of carbon atoms of the aromatic hydrocarbon group is, for example, 6 to 72, may be 6 to 60, preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10. Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to Ar k1 or Ar k2 . Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, etc. Examples of the group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group include, for example, -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-, etc. Examples of the group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc. In addition, examples of the combined group also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. -CH2- contained in the hydrocarbon group of Lx may be replaced by -O-, -S-, -SO2- or -CO-. As the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO-, as described above, there are a hydroxy group, a carboxy group, a thiol group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms permits. In addition, as the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, the same groups as those exemplified in the present specification are included within the range where the upper limit of the number of carbon atoms permits. As the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO-, there is also a group in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. Examples of the substituent that Lx may have include a halogen atom, a cyano group, and the like. When Lx is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. By replacing -CH2- contained in the chain hydrocarbon group such as an alkyl group contained in Lx with -O-, -CO-, -S- or -SO2-, Lx can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. Examples of the substituent that Lx may have include R described below lk11 and Rlk22 Groups similar to the groups exemplified by etc. are also included.

[0107] R lk11 and R lk22 Examples of the halogen atom of R and R include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. R lk11 and R lk22 Examples of the hydrocarbon group of R and R include chain hydrocarbon groups such as an alkyl group and an alkanediyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkanediyl group is a linear or branched alkanediyl group, and examples thereof include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 12, more preferably from 1 to 9, still more preferably from 1 to 6, even more preferably from 1 to 4, and even more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the alicyclic hydrocarbon group include the groups represented below. The bonding site can be at any position. TIFF2025105566000097.tif43163Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, etc. Examples of the spirocyclic alicyclic hydrocarbon group include cycloalkyl groups such as spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3’-cyclopentane group, etc., and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group respectively. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10. Examples of groups formed by combining two or more groups include groups formed by combining an aromatic hydrocarbon group and an aliphatic hydrocarbon group (e.g., aromatic hydrocarbon group - alkanediyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkanediyl group - *, where the -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), groups formed by combining an alicyclic hydrocarbon group and an aliphatic hydrocarbon group (e.g., alicyclic hydrocarbon group - alkanediyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkanediyl group - *, where the -CH2- contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), and groups formed by combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, where the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkanediyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkanediyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may each be combined with two or more kinds. Further, any of the groups may be bonded to the benzene ring. R lk11 and R lk22 When -CH2- contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -S- or -SO2-, the carbon number before replacement is defined as the total carbon number of the hydrocarbon group. Further, the number may be one or two or more. Examples of the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include the same groups as those exemplified by Lx within the range where the upper limit of the carbon number allows. R lk11 and R lk22 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group, and the like. R lk11 and R lk22 When is a hydrocarbon group having a halogen atom, lk11 and R lk22 Examples of the hydrocarbon group having a halogen atom of include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. The haloalkyl group represents an alkyl group having a halogen atom, and examples of the haloalkyl group include haloalkyl groups having 1 to 12 carbon atoms such as alkyl fluoride groups having 1 to 12 carbon atoms, alkyl chloride groups having 1 to 12 carbon atoms, alkyl bromide groups having 1 to 12 carbon atoms, and alkyl iodide groups having 1 to 12 carbon atoms. Specific examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, etc. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH2- contained in the haloalkyl group may be replaced by -O- or -CO- or the like, and examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. are included. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms are included. The hydrocarbon group may have one substituent or a plurality of substituents.

[0108] Examples of the compound (LX) include a compound represented by the formula (LX-0) (hereinafter sometimes referred to as "compound (LX-0)"). As the compound (LX-0), a compound represented by the formula (LX-1) (hereinafter sometimes referred to as "compound (LX-1)") is preferable. TIFF2025105566000098.tif23125[In the formula (LX-0), symbols other than the following have the same meanings as described above. lk1 represents any integer from 1 to 5, and when lk1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11 represents any integer from 0 to 4, satisfies 1 ≦ lk1 + lk11 ≦ 5, and when lk11 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2 represents any integer from 1 to 5, and when lk2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22 represents any integer from 0 to 4, satisfies 1 ≦ lk2 + lk22 ≦ 5, and when lk22 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. TIFF2025105566000099.tif41147 [In formula (LX-1), symbols other than the following represent the same meaning as described above. X lk3 represents a single bond or a carbonyl group. R lk3 represents a hydrogen atom or an acid-labile group. Lx1 and Lx2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R lk33 represents a halogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. lx3 represents any integer from 0 to 6, and when lx3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk3 represents any integer from 1 to 4, and when lk3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk33 represents any integer from 0 to 3, satisfies 1 ≦ lk3 + lk33 ≦ 4, and when lk33 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. The hydrocarbon group which may have substituents of Lx1 and Lx2 (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) includes, within the range permitted by the upper limit of the number of carbon atoms and the like, hydrocarbon groups which may have substituents exemplified by Lx (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), and the like. R lk33 The halogen atom or the hydrocarbon group which may have substituents of lk33 (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) includes, within the range permitted by the upper limit of the number of carbon atoms and the like, hydrocarbon groups which may have substituents exemplified by R lk11 and R lk22 and the like, which may have substituents exemplified by lk22 (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-). R lk11 and Lx1, or R lk22 and Lx2 may each be bonded to each other to form a ring. In this case, the ring may be a condensed ring condensed with the benzene ring or a spiro ring spiro-bonded to the benzene ring because R lk11 and R lk22 are each bonded to the benzene ring. Examples of the condensed ring or spiro ring include those having a total carbon number of 3 to 28, which may be 3 to 24, and preferably 3 to 20. The condensed ring or spiro ring may be a ring containing one or more of -O-, -CO-, -S- or -SO2-. In the benzene ring (-R lk11 )-Lx1- or the benzene ring (-R lk22 )-Lx2-, examples of the ring formed by the bonding of R lk11 and Lx1 or R lk22 and Lx2 include, for example, the following groups and the like. Although the description is omitted below, at least one R lk1 -O-X lk1 - or R lk2 -O-X lk2 - is present, and other R lk11 or R lk22 may also be present. * represents the bonding site with the benzene ring. TIFF2025105566000100.tif20123R lk11 and R lk22 may be bonded to each other to form a ring. Examples of the ring in this case include a ring having a structure represented by the formula (LX-13) described later.

[0109] As the compound (LX-1), compounds represented by the formula (LX-11), the formula (LX-12) and the formula (LX-13) (hereinafter sometimes referred to as "compound (LX-11)", "compound (LX-12)" and "compound (LX-13)", respectively) are preferable. TIFF2025105566000101.tif142158[In the formula (LX-11), the formula (LX-12) and the formula (LX-13), symbols other than the following represent the same meanings as described above. Ly represents a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. Examples of the hydrocarbon group which may have a substituent of Ly (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) include hydrocarbon groups which may have substituents exemplified by Lx within the range permitted by the upper limit of the number of carbon atoms, etc. (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-). lk1 and lk2 are each independently preferably any integer from 1 to 4, more preferably any integer from 1 to 3, and still more preferably 1 or 2. lk11 and lk22 are each independently preferably any integer from 0 to 3, and more preferably any integer from 0 to 2. lk3 is preferably any integer from 1 to 3, and more preferably 1 or 2. lk33 is preferably any integer from 0 to 2. lx2 is preferably an integer of 1 to 5, more preferably an integer of 1 to 4, even more preferably an integer of 1 to 3, and even more preferably 1 or 2. lx3 is preferably an integer of 0 to 5, more preferably an integer of 0 to 4, even more preferably an integer of 0 to 3, and even more preferably an integer of 0 to 2. R lk11 , R lk22 and R lk33 are each independently preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group or the alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), even more preferably an iodine atom, a fluorine atom, a fluorinated alkyl group having 1 to 3 carbon atoms, a hydroxy group, a carboxy group, an alkoxy group having 1 to 3 carbon atoms, a hydroxyalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a hydroxy group, a carboxy group, a methoxy group, or a methyl group. Lx1, Lx2, and Ly are each independently a linear hydrocarbon group having 1 to 10 carbon atoms (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), or a group combining a linear hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the linear hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O- or -CO-). Preferably, it is a linear hydrocarbon group having 1 to 8 carbon atoms (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), or a group combining a linear hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 16 carbon atoms (wherein -CH2- contained in the linear hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O- or -CO-). More preferably, it is a linear hydrocarbon group having 1 to 6 carbon atoms or a group combining a linear hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms. Also, R lk11 and Lx1 or R lk22 and Lx2 each preferably combine to form a ring, and R lk11 and R lk22 also preferably combine to form a ring.

[0110] Compound (L) may be either a low molecular weight compound or a resin. However, in the case of a resin, it does not have an acid-labile group. Examples of the low molecular weight compound include compounds having a weight average molecular weight of less than 3,500. When compound (L) is a low molecular weight compound, the weight average molecular weight is preferably 3,000 or less, more preferably 2,500 or less, further preferably 2,000 or less, still more preferably 1,500 or less, and even more preferably 1,000 or less. Also, it is preferably 100 or more, more preferably 120 or more, further preferably 150 or more, still more preferably 200 or more, and even more preferably 300 or more.

[0111] Among compounds (L), a low molecular weight compound (X) having a phenolic hydroxy group lkis a single bond, and R lk is a hydrogen atom) include compounds represented by the following formula. TIFF2025105566000102.tif181164Among the compounds (L), low molecular weight compounds (X) having a benzoic acid carboxy group lk is a carbonyl group, and R lk is a hydrogen atom) include compounds in which the hydroxy group of the above compound is replaced with a carboxy group. In the compound (L), both a hydroxy group and a carboxy group may be present.

[0112] Among the compounds (L), low molecular weight compounds in which the hydroxy group of the phenolic hydroxy group is protected with an acid-labile group include compounds represented by the following formula. TIFF2025105566000103.tif205165Among the compounds (L), low molecular weight compounds in which the carboxy group of the benzoic acid carboxy group is protected with an acid-labile group include compounds in which the ethoxyethoxy group of the above compound is replaced with an ethoxyethoxycarbonyl group. In the compound (L), both an ethoxyethoxy group and an ethoxyethoxycarbonyl group may be present.

[0113] In the resist composition of the present invention, when the compound (L0) is included, the content of the compound (L0) is 0.1% by mass or more, preferably 0.3% by mass or more, more preferably 0.5% by mass or more, still more preferably 1% by mass or more, based on the solid content of the resist composition. Further, 90% by mass or less is mentioned, preferably 70% by mass or less, more preferably 60% by mass or less, still more preferably 50% by mass or less. Specifically, 0.1% by mass or more and 90% by mass or less are mentioned, preferably 0.3% by mass or more and 70% by mass or less, more preferably 0.5% by mass or more and 60% by mass or less, still more preferably 1% by mass or more and 50% by mass or less.

[0114] When the compound (L) is a resin, it is preferably a resin containing a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "resin (AX)"). TIFF2025105566000104.tif30128 In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, the plurality of R a27 may be the same as or different from each other. mc represents any integer from 0 to 2.] R a2 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a2Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0115] A a21 Examples of the alkanediyl group of A include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and still more preferably 1 or 2. R a28Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 When -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a28 -, the number of carbon atoms before replacement is defined as the number of carbon atoms of the alkanediyl group. A a21 Examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a28 - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group, and the like. These replaced groups include those similar to the groups exemplified in this specification as long as the upper limit of the number of carbon atoms permits. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, and an octylamino group. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, and a propyleneamino group. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Among them, when -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO-, or -NR a21 Examples of the group - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a28 -CO-O-, *-O-CO-A a22 -CO-O-, *-O-CO-Aa22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - is exemplified. Among them, *-CO-O-, *-CO-O-A a22 -CO-O- or *-O-A a22 -CO-O-, *-CO-NR a28 - is preferred. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 includes the same alkanediyl group as A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is a single bond, *-CO-O- or *-CO-O-A a22 -CO-O- is preferred, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0116] R a27 As the halogen atom of and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom, those similar to R a2 are exemplified. R a27 Examples of the alkoxy group of include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably methoxy group or ethoxy group, and still more preferably methoxy group. R a27Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a21 and, among them, it is preferable that at least one is bonded to the m-position or p-position, and more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A a21 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a21 is at the 2nd position, it may be bonded to any of the 1st, 3rd to 8th positions. Among them, when the bonding position of A a21 is at the 1st position, it is preferable that at least one is bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a21 is at the 2nd position, it is preferable that it is bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0117] Examples of the structural unit (a2-A) include structural units derived from the monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include the structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), and the structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), in which the methyl group corresponding to R a2 in the structural unit (a2-A) is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025105566000105.tif107170

[0118] When the resin contains the structural unit (a2-A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing a compound that induces the structural unit (a2-A) (for example, a compound (a2-A') in which the -CH2-C(-R a2 )- is in the state of CH2=C(-R a2 ) of the double bond before cleavage). Also, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin by treatment with an acid such as p-toluenesulfonic acid. Further, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin by treatment with an alkali such as tetramethylammonium hydroxide.

[0119] When the resist composition of the present invention contains a resin, the resin may contain structural units other than the structural unit represented by the formula (a2-A). Examples of structural units other than the structural unit represented by formula (a2-A) include structural units having no acid-labile group other than the structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit(s)"), structural units other than structural unit(s) (for example, structural units having a halogen atom described later (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-leaving hydrocarbon group described later (hereinafter sometimes referred to as "structural unit (a5)"), and structural units derived from other monomers known in the art).

[0120] 〈Structural unit(s)〉 Structural unit(s) is derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer that leads to structural unit(s), a monomer having no acid-labile group known in the resist field can be used. Structural unit(s) preferably has a hydroxy group, a carboxy group, or a lactone ring. A resin containing a structural unit having a hydroxy group or a carboxy group and having no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and having no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, whereby the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, structural unit(s) also includes a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)").

[0121] 〈Structural unit (a2)〉 Structural unit (a2) is a structural unit represented by formula (a2) excluding structural units other than structural unit (a2-A), and has an alcoholic hydroxy group or a carboxy group. TIFF2025105566000107.tif4094[In formula (a2), Ra2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, or -SO2-. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is 2 or more, a plurality of L a22 may be the same as or different from each other. R a2 、A a21 and R a28 are the same as those in the above formula (a2-A).

[0122] L a21 The hydrocarbon group in is a (na2 + 1)-valent hydrocarbon group, and examples include a linear or branched chain hydrocarbon group, a monocyclic or polycyclic (including spiro ring, condensed ring, bridged ring, etc.) alicyclic hydrocarbon group, and a cyclic hydrocarbon group such as an aromatic hydrocarbon group. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanepentayl group, and an alkanhexayl group. Examples of the alkanediyl group include, for example, A a21Examples of the same alkanediyl group include. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, a heptadecanetriyl group, and the like. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, a heptadecanetetrayl group, and the like. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025105566000108.tif46168 For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentayl group, a cycloalkanhexayl group, and the like. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, etc. and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group, etc. can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site, etc. can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in L include divalent to hexavalent aromatic hydrocarbon groups such as arylene group, arenetriyl group, arenetetrayl group, arenepentayl group, arenexayl group, etc. Specifically, phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalenetriyl group, anthracenetriyl group, biphenylenetriyl group, phenanthrenetriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, etc. can be mentioned. In addition, groups in which one or more of the hydrogen atoms of the above-described group are replaced with binding sites can also be mentioned. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Further, any group may be A a21 and L a22 and may be bonded thereto. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group,Examples include an aromatic hydrocarbon group-carbonyl oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group formed by combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups are replaced at the bonding site. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0123] Examples of groups in which -CH2- contained in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. Also included are groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- among the groups represented below. The bonding site can be at any position. Examples of groups in which -CH2- contained in the combined group is replaced by -O-, -S-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025105566000110.tif26164L a21 The hydrocarbon group in [group name] may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21In the hydrocarbon group, by having a halogen atom as a substituent, it can substantially have substituents such as a haloalkyl group. Examples of the haloalkyl group include an alkyl fluoride group, an alkyl chloride group, an alkyl bromide group, an alkyl iodide group, etc. For example, a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluorobutyl group, etc. can be mentioned. The number of carbon atoms of the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group of a21 can substantially have substituents such as an alkyl group by including a branched structure. a21 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still even more preferably 1 to 4, and even more preferably 1 to 3. L a21 When the -CH2- contained in the hydrocarbon group of a21 is replaced by a group such as -O- or -CO-, a21 L can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, a methacryloyloxy group, etc. Such groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L a21Examples of the substituent that the hydrocarbon group in [compound name] may have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). A halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable. A halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms is even more preferable. A fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxy methoxy group is still more preferable. A fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group is even still more preferable. Also, when a21 the alkanediyl group of L a23 is replaced by -O- or -CO- etc., for example, *-L a21 -X a23 (where L represents an alkanediyl group having 1 to 8 carbon atoms, X represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents the bonding site with A a21 ).) is also preferable. a21 L a21is preferably a group formed by combining a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); more preferably, it is a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-).

[0124] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO- include those similar to those exemplified in the present specification as long as the upper limit of the number of carbon atoms permits. L a22 The fluorine atom(s) that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units (hereinafter sometimes referred to as "structural units (a2-e)"). Among the following structural units, the structural units in which the methyl group corresponding to R is replaced by a hydrogen atom or the like are also suitable structural units of the structural units (a2-e) in the same manner as the following structural units. a2 The structural units in which the methyl group corresponding to R is replaced by a hydrogen atom or the like are also suitable structural units of the structural units (a2-e) in the same manner as the following structural units. When the resin contains the structural unit (a2-e), its content is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0125] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the above-described structural unit (a2-A). Also, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-C) described later. The structural unit (a2) may be contained alone or in two or more kinds.

[0126] In the structural unit (a2), L a21 In the case where is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include the structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), the structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and the structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). In formulas (a2-B) and (a2-C), R a2 represents the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). L a25 represents -O- or *-O-(CH2) k2 -CO-O-, k2 represents an integer from 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer from 1 to 5. When nB2 is 2 or more, the plurality of X a2 may be the same as or different from each other. nB22 represents an integer from 0 to 8. When nB22 is 2 or more, the plurality of R a27 may be the same as or different from each other. nC22 represents an integer from 0 to 10. When nC22 is 2 or more, the plurality of R a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH2) f1 -CO-O- (where f1 represents an integer from 1 to 4), more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0127] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and methyl groups or hydrogen atoms corresponding to R in the following structural units replaced by hydrogen atoms, halogen atoms, haloalkyl groups or other alkyl groups. Among them, structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferred. a2 When the resin contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin. Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%. TIFF2025105566000113.tif80164 When the resin contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin. Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%.

[0128] TIFF2025105566000114.tif51106[in formula (a2-D), R a2 and A a21 each represent the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). R a21 and R a22 each independently represent an alkyl fluoride group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, the multiple a27 R may be the same as or different from each other. R a21 and R a22 As the alkyl fluoride groups of, each independently, a trifluoromethyl group, 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 As the alkanediyl group of, a methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, etc. may be mentioned. L a24 is preferably a single bond or a methylene group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, still more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, and even more preferably 0.

[0129] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)") is more preferable. TIFF2025105566000115.tif51107[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meanings as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0130] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025105566000116.tif62167

[0131] In the structural units represented by formulas (a2-D-1) to (a2-D-8), R a2In the structural units represented by formulae (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, the structural units represented by formulae (a2-D-1) to (a2-D-8) are preferred, the structural units represented by formulae (a2-D-1) to (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0132] When the resin contains the structural unit (a2-D), the content thereof is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0133] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)). The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), (a3-2), (a3-3) or (a3-4). One of these may be contained alone, or two or more of them may be contained. TIFF2025105566000117.tif51164 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6Each independently represents a group represented by -O- or *-O-(CH2) k3 -CO-O- (where k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 R a19 R a20 and R a24 each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer from 0 to 5. q1 represents an integer from 0 to 3. r1 represents an integer from 0 to 3. w1 represents an integer from 0 to 8. When p1, q1, r1, and / or w1 is 2 or more, the plurality of Rs a21 R a22 R a23 and / or R a25 may be the same as or different from each other.]

[0134] R a21 R a22 Ra23 and R a25 Examples of the aliphatic hydrocarbon group in a25 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, and tert-butyl group. R a18 、R a19 、R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in a24 include the same as those exemplified by R in formula (a1-0). a01 and the like. L a8 and L a9 Examples of the alkanediyl group in a9 include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. L a4 ~L a6 are each independently preferably -O- or, in *-O-(CH2) k3 -CO-O-, a group in which k3 is any integer from 1 to 4, more preferably -O- and, *-O-CH2-CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 、R a19 、R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 、R a23 and Ra25 is, independently of each other, preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are, independently of each other, preferably any integer from 0 to 2, more preferably 0 or 1. w1 is preferably any integer from 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)’. TIFF2025105566000118.tif4051 (wherein R a24 , L a7 represents the same meaning as described above.)

[0135] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2) and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 are replaced by hydrogen atoms are preferred. When the resin contains the structural unit (a3), the total content rate is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and still more preferably 10 mol% or more with respect to all the structural units of the resin. Also, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and still even more preferably 10 to 60 mol%. Also, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and still more preferably 10 mol% or more with respect to all the structural units of the resin. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 60 mol% is more preferable, 3 to 55 mol% is still more preferable, 5 to 55 mol% is still more preferably, 5 to 50 mol% is even more preferable, and 10 to 50 mol% is still even more preferable.

[0136] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025105566000120.tif2870[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R42 represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-.

[0137] R 42 The aliphatic hydrocarbon group represented by R includes a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, and a group formed by combining these, etc. Examples of the chain hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group; polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group and the following group (* represents the bonding site). Examples of the group formed by the combination include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group - alicyclic hydrocarbon group, -alicyclic hydrocarbon group - alkyl group, -alkanediyl group - alicyclic hydrocarbon group - alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group and hexane-1,6-diyl group; branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group and 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R42 Examples of the halogen atom in the aliphatic hydrocarbon group contained in R 42 Examples of the group in which -CH2- of the aliphatic hydrocarbon group contained in

[0138] Examples of the structural unit (a4) include R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) in which is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025105566000122.tif3092[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms having a fluorine atom. R 42frepresents a hydrogen atom or a fluorine atom.

[0139] L 41 Examples of the alkanediyl group in L include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in L include linear alkanediyl groups having a fluorine atom such as methylene group having a fluorine atom, ethylene group having a fluorine atom, propane-1,3-diyl group having a fluorine atom, butane-1,4-diyl group having a fluorine atom, pentane-1,5-diyl group having a fluorine atom, hexane-1,6-diyl group having a fluorine atom, heptane-1,7-diyl group having a fluorine atom, octane-1,8-diyl group having a fluorine atom; branched alkanediyl groups having a fluorine atom such as ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42fExamples of the cycloalkanediyl group having a fluorine atom in L include monocyclic cycloalkanediyl groups having a fluorine atom such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom. Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group having a fluorine atom and the cycloalkanediyl group in L may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group having a fluorine atom and the cycloalkanediyl group in L are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0140] L 42fExamples of the perfluoroalkanediyl group in [the compound of formula (a4-1)] include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkanediyl group in [the compound of formula (a4-1)] include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0141] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group, and still more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and still more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0142] Examples of the structural unit (a4-1) include the structural units shown below and R in the structural unit (a4-1) in the following structural units 41Examples include structural units in which a methyl group corresponding thereto is replaced with a hydrogen atom. TIFF2025105566000123.tif55167 The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025105566000124.tif33102 [In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 43f and R 43f is 21.]

[0143] L 43f and R 43f Examples of the aliphatic hydrocarbon group in include linear or branched chain hydrocarbon groups and monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these, etc. Examples of the aliphatic hydrocarbon group in L 43f and R 43f include, as long as the upper limit of the total number of carbon atoms of L 43f and R 43f allows, groups similar to the aliphatic hydrocarbon group of R 42 exemplified as the aliphatic hydrocarbon group in formula (a4).

[0144] L 43f As the aliphatic hydrocarbon group of, an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1) is preferable. TIFF2025105566000125.tif13119 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, the total carbon number of L 45f , L 46f , L 47f , X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f .

[0145] In the group represented by formula (L43f-1), examples of the divalent aliphatic hydrocarbon group represented by L 45f , L 46f and L 47f include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a divalent aliphatic hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specifically, examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. s is preferably 0.

[0146] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f . TIFF2025105566000126.tif47140

[0147] R43f An aliphatic hydrocarbon group having a fluorine atom is preferred. The structural unit represented by the formula (a4-2) in this case includes, for example, the structural units represented by the formula (a4-2A) or (formula a4-2B). TIFF2025105566000127.tif41157 [In the formula (a4-2A) and the formula (a4-2B), R 41 and L 43f represent the same as those in the formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f R 43fB represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in the formula (a4-2A), the total number of carbon atoms of L 43f and R 43fA is 21 or less, and in the formula (a4-2B), the total number of carbon atoms of L 43f , A 43f , X 43 and R 43fB is 21 or less, and among A 43f and R 43fB at least one has at least one fluorine atom. R 43fA The aliphatic hydrocarbon group of R 42 includes the same aliphatic hydrocarbon groups as those exemplified for R R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and having a fluorine atom, or a combination thereof, *-(CF2) n43f -R 42’ ​(* represents the bonding site with the carbonyl group. n43f represents an integer from 1 to 6. R 42’ is more preferably a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms. A 43f and R 43fB 's aliphatic hydrocarbon group, as long as the upper limit of the number of carbon atoms permits, is the same as the aliphatic hydrocarbon group exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably a divalent chain hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fB 's aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group, an alicyclic hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and even more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group and a perfluorooctyl group and other fluoroalkyl groups, a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, a perfluoroadamantylmethyl group, etc.

[0148] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025105566000128.tif15170

[0149] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the methyl group corresponding to R in the structural unit represented by formula (a4-2A) in the following structural units 41 where the methyl group is replaced by a hydrogen atom. TIFF2025105566000129.tif99167

[0150] Examples of the structural unit represented by formula (a4-2B) include the following structural units and the methyl group corresponding to R in the structural unit represented by formula (a4-2B) in the following structural units 41 where the methyl group is replaced by a hydrogen atom. TIFF2025105566000130.tif111163

[0151] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025105566000131.tif3689[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of 44f L 44f and R 44f has a fluorine atom, and L44f The upper limit of the total carbon number is 21.

[0152] L 44f and R 44f Examples of the aliphatic hydrocarbon group in L 44f and R 44f include linear or branched chain aliphatic hydrocarbon groups, monocyclic or polycyclic alicyclic aliphatic hydrocarbon groups, and groups formed by combining these, etc. 44f and R 44f As long as the upper limit of the total carbon number of L 42 and R permits, examples of the aliphatic hydrocarbon group of R in formula (a4) include the same groups as the aliphatic hydrocarbon groups exemplified. L 44f is preferably an alkanediyl group having 1 to 14 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, still more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0153] Examples of the structural unit represented by formula (a4-3) include structural units represented by the following structural units and the following formulas, in which the methyl group corresponding to R in structural unit (a4-3) is replaced by a hydrogen atom. 41 include structural units in which the methyl group corresponding to R in structural unit (a4-3) is replaced by a hydrogen atom. TIFF2025105566000132.tif86170

[0154] Examples of structural unit (a4) also include structural units represented by formula (a4-A). TIFF2025105566000133.tif3686[In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents the bonding site with the carbon atom to which R 1 is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group may combine with L 1 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-. mi represents any integer from 1 to 4. When mi is 2 or more, the groups in multiple parentheses may be the same as or different from each other.]

[0155] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1Examples of the halogen atom in [compound] include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. R 1 Examples of the C1-C6 alkyl group having a halogen atom in [compound] include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, a dibromomethyl group, and the like. R 1 R is preferably a hydrogen atom or a C1-C4 alkyl group, more preferably a hydrogen atom or a C1-C3 alkyl group, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0156] L 1 Examples of the aliphatic hydrocarbon group in [compound] include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include a C2-C5 chain hydrocarbon group such as an alkanediyl group, an alkanetriyl group, an alkane tetrayl group, an alkanepentayl group, and the like. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group and the like. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0157] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025105566000134.tif45164For example, divalent to pentavalent alicyclic hydrocarbon groups such as cycloalkanediyl group, cycloalkanetriyl group, cycloalkanetetrayl group, cycloalkanepentayl group and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group and the like, and Examples of the polycyclic alicyclic hydrocarbon group include a spiro ring having a cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a decahydronaphthalenediyl group, a bicyclo[3.3.0]octanediyl group, a spirocyclohexane-1,2'-cyclopentane-diyl group, a spiroadamantane-2,3'-cyclopentane-diyl group, etc., a norbornanediyl group or an adamantanediyl group, and a cycloalkanediyl group spiro-bonded thereto respectively. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0158] Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, the alicyclic hydrocarbon group and the chain hydrocarbon group may each be combined with two or more of them. Also, any of the groups may be bonded to X 11 . Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), and the like. * represents the bonding site with X. 11 In addition, examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site.

[0159] L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L, -CH2- may be replaced with -O-, -S-, -SO2- or -CO-. L 1 When -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L is replaced with -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site, and the like. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0160] L 1 The aliphatic hydrocarbon group in L may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group, etc., and polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, etc. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, still more preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, still more preferably 6 to 10. When -CH2- contained in an alkyl group is replaced by -O- or -CO-, the total number of carbon atoms before replacement is defined as the total carbon number of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the carbon number. In addition, examples of the group in which -CH2- contained in an alicyclic hydrocarbon group is replaced by -O- or -CO- include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the carbon number. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). A fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group is even more preferable. L 1 is R 3When not forming an alkyl fluoride group and an alicyclic hydrocarbon group, it is preferably a linear hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). More preferably, it is a linear hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-). Even more preferably, it is a linear hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms, a linear hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-).

[0161] R 2Examples of the alkyl fluoride group having 1 to 8 carbon atoms include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 6, more preferably 1 to 5, still more preferably 1 to 4, and even more preferably 1 to 3. R 3 The alkyl fluoride group having 1 to 6 carbon atoms in 2 is, as long as the upper limit of the number of carbon atoms permits, the same as the alkyl fluoride group having 1 to 6 carbon atoms exemplified in the examples of the alkyl fluoride group of R. R 2 is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group when R 3 is an alkyl fluoride group having 1 to 6 carbon atoms. R2 is R 3 When R is a hydrogen atom, it is preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is L 1 When combining with L to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 3 is L 1 Examples of the group formed by the combination with L include groups represented by the following formulas. In the following formulas, * and ** represent bonding sites, and the two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 2 L 1A is L 1 is a part of the hydrocarbon group of L and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. R 3 is L 1 The number of carbon atoms of the alicyclic hydrocarbon group formed by the combination with L is preferably 3 to 10, more preferably 3 to 8, and still more preferably 3 to 6. TIFF2025105566000135.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0162] Examples of the structural unit (a4-A) include the following structural units. In the following structural units, structural units in which the methyl group corresponding to R 1 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and structural units in which the hydrogen atom corresponding to R 1 is replaced with a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025105566000136.tif192167

[0163] When the resin contains the structural unit (a4), its content is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin.

[0164] 〈Structural unit (a5)〉 Examples of the non-detachable hydrocarbon group contained in the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by the formula (a5-1). TIFF2025105566000137.tif3971[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0165] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group. L 55 Examples of the divalent saturated hydrocarbon group in include divalent chain saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as methylene group, ethylene group, propane diyl group, butane diyl group and pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as cyclopentane diyl group and cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantane diyl group and norbornane diyl group.

[0166] L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced by -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025105566000138.tif18165[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms in L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms in L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms in L x8 , L x9 and W x1 is 15 or less.

[0167] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0168] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025105566000139.tif36147 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025105566000140.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025105566000141.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025105566000142.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0169] Examples of the structural unit (a5-1) include the following structural units and the structural units in which the methyl group corresponding to R in the following structural units of the structural unit (a5-1) is replaced by a hydrogen atom. 51 are mentioned. When the resin contains the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and still more preferably 3 to 15 mol% based on all the structural units of the resin.

[0170] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0171] Examples of the sultone ring include the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may further contain a heteroatom in addition to -SO2-O- as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the heteroatom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025105566000144.tif2977

[0172] The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc.

[0173] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or fewer carbon atoms, and more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. From the viewpoint of ease of producing the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferred.

[0174] As the sultone ring, a ring represented by the following formula (T1') is preferred. TIFF2025105566000145.tif2666[In the formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 includes the same groups as the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, and more preferably 0.

[0175] Examples of the ring represented by formula (T1’) include the following rings. The bonding site can be at any position. Among them, the bonding site is preferably at the 1-position or 3-position. TIFF2025105566000146.tif44148

[0176] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group, and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0177] The structural unit (a6) is preferably a structural unit represented by formula (a6-0). TIFF2025105566000147.tif4076[In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same group as above. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0178] R x Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R x Examples of the alkyl group of R include, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, etc. Preferably, it is an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R x Examples of the alkyl group having a halogen atom of R include, for example, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, etc. R x R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and those obtained by combining two or more of these groups may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups that are cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; Polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. can be mentioned. A x The bonding position to the sultone ring of can be any position, but the one at the 1-position is preferred.

[0179] Examples of the structural unit (a6-0) include the following structural units. TIFF2025105566000148.tif93150

[0180] Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8), and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7), and (a6-8) are more preferred. When the resin contains the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and even more preferably 3 to 30 mol% based on all the structural units of the resin.

[0181] <Structural unit (a7)> The resin may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0182] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by the formula (a7-A). TIFF2025105566000149.tif28122[In the formula (a7-A), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR a71 -*, *-NR a71 -CO-O-*, *-O-CO-NR a71 -* or *-Ax-Ph-Ay-*. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and La72 independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** represents L a71 and represents the bonding site with. na7 represents any integer from 0 to 2. When na7 is 2, the groups in multiple parentheses may be the same or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation. R a7 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R are the same as those exemplified by R of formula (a1-0). a01 and the like can be mentioned. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a71 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0183] X a71 When X is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025105566000150.tif3351[In formula (X10), Ax represents the bonding species that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay represents L a71 and represents a bonding species that binds to, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a C1-C6 perfluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other.] When either Ax or Ay is a single bond, it is preferable that the other is one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 As, for example, a single bond, the following formula (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025105566000151.tif43162[In formula (X 10 -1) to formula (X 10 -10), all symbols represent the same meaning as above.] Specific examples of the group represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025105566000152.tif87163 Among them, X a71 is preferably a single bond or a group represented by formula (X 10 -1’) and formula (X 10 -3’) to formula (X 10 -10’), more preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -10’), and even more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’) or a group represented by formula (X 10 -6’).

[0184] L a71 The hydrocarbon group of is a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a71 and X a72 . Also, the hydrocarbon group of L a72 is a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a72 and RA - . L a71 and L a72Examples of the chain hydrocarbon group include a group obtained by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, and the like. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group, and the like. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 20, more preferably from 1 to 18, and even more preferably from 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. Further, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025105566000153.tif28158When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 12, and still more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 6 to 18, and more preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of and L include a group obtained by removing one hydrogen atom from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms of the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and still more preferably 6 to 10. L a71 and L a72 When -CH2- included in the hydrocarbon group of and L is replaced by -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group and the like. These replaced groups include those similar to the groups exemplified herein, as long as the upper limit of the number of carbon atoms permits. L a71 and L a72 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a group containing a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sulfonic acid ester (sultone) structure and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon group mentioned in the following formulas can be at any position. TIFF2025105566000154.tif46146L a71 and L a72 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. L a71 and L a72 Examples of the group formed by combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group include a group formed by combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, a group formed by combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group formed by combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The group formed by combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. La71 and L a72 Examples of the substituent that the hydrocarbon group of L may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a71 and L a72 When L and L are a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 When -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of L and L is replaced by -O-, -CO-, -S-, or -SO2-, the hydrocarbon group of L a71 and L a72 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. na7 is preferably 0 or 1. ZA in formula (a7-A) + is the same as the cation in the salt represented by formula (B1) etc.

[0185] In formula (a7-A), when the hydrocarbon groups of L a71 and L a72 are saturated hydrocarbon groups, in formula (a7-B) described later, A b7 may contain a group similar to the group exemplified as the divalent linking group. Examples of the structural unit represented by formula (a7-A) include the structural unit represented by formula (a7-A1). TIFF2025105566000155.tif30138 [In formula (a7-A1), R a7 、X a71 、L a71 、X a72 、na7、RA - and ZA + represent the same meaning as above. z7 represents any integer from 0 to 6. Qa7 , Q b7 , R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 , Q b7 , R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in Q a7 include the same groups as those exemplified by R

[0186] Examples of the structural unit represented by the formula (a7-A) include, for example, the following structural units, R a7 a group corresponding to the methyl group of which is replaced by a hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.), and the structural units described in International Publication No. 2012 / 050015. ZA + represents an organic cation. TIFF2025105566000156.tif131157

[0187] TIFF2025105566000157.tif244163

[0188] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by the formula (a7-B). TIFF2025105566000158.tif28104[In the formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion. R a7 Examples of the halogen atom of R and the alkyl group which may have a halogen atom include the same halogen atom and the alkyl group which may have a halogen atom as those in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R include a phenylene group, a naphthylene group and the like. R b72 and R b73 Examples of the hydrocarbon group represented by R and R include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A b7 Examples of the divalent linking group represented by A include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include a divalent chain saturated hydrocarbon group such as a linear or branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof may also be used. Examples of the divalent saturated hydrocarbon group include a linear or branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. can be mentioned. Examples of those in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- include the following divalent groups. However, the number of carbon atoms before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- is 17 or less, respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R b71 and represents the bonding site with R. TIFF2025105566000159.tif123161[wherein, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0189] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and a group corresponding to the methyl group of R a7 and structural units in which the group corresponding to the methyl group of R is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.). TIFF2025105566000160.tif75163

[0190] A - Examples of the organic anion represented by A include a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion, and a carboxylate anion. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably the same as the anion exemplified by the acid generator (B). Examples of the sulfonylimide anion, the sulfonylmethide anion, and the carboxylate anion are the same as the anions exemplified by the acid generator (B).

[0191] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below. TIFF2025105566000161.tif95157

[0192] When the resin contains the structural unit (a7), the structural unit (a7) may be contained alone or in two or more kinds. The content of the total structural unit (a7) is preferably 1 to 30 mol%, more preferably 2 to 25 mol%, still more preferably 3 to 20 mol%, and even more preferably 3 to 15 mol% with respect to all the structural units of the resin.

[0193] The resin is preferably a resin containing the structural unit (a2-A). Each structural unit constituting the resin may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomer that leads to these structural units. The content of each structural unit of the resin can be adjusted by the amount of the monomer used in the polymerization. The weight average molecular weight of the resin is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more), and 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less). In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the examples. In the resist composition of the present invention, when containing a resin, the total content of the resin is preferably 1% by mass or more and 80% by mass or less, more preferably 3% by mass or more and 60% by mass or less, still more preferably 5% by mass or more and 50% by mass or less with respect to the solid content of the resist composition.

[0194] <Other resins> The resist composition of the present invention may contain a resin other than the resin containing the structural unit (a2-A). Examples of the resin other than the resin containing the structural unit (a2-A) include resins containing the structural unit (a4) and / or the structural unit (a5) (hereinafter sometimes referred to as resin (X)).

[0195] Among them, the resin containing the structural unit (a4) is preferred as the resin (X). That is, it is preferably a resin containing a structural unit having a fluorine atom. Examples of the structural units that the resin (X) may further have include the structural unit (a3), the structural unit (a6), the structural unit (a7), and structural units derived from other known monomers. Among them, the resin (X) is preferably a resin composed only of the structural unit (a4) and / or the structural unit (a5), and more preferably a resin composed only of the structural unit (a4). When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and still more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and still more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and still more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and still more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and even more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and even more preferably 80 to 100 mol%.The content rate of other structural units (such as structural unit (a2)) that may further be contained is 1 to 45 mol%, preferably 2 to 30 mol%, and more preferably 2 to 20 mol% with respect to the total of all the structural units of resin (X).

[0196] Each of the structural units constituting resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using monomers that induce these structural units. The content rate of each structural unit possessed by resin (X) can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less). The measuring means of the weight average molecular weight of resin (X) is the same as that in the case of resin. When the resist composition contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 2 to 30 parts by mass, and even more preferably 2 to 8 parts by mass with respect to 100 parts by mass of the resin.

[0197] The content rate of resin (AX) in the resist composition is preferably 0 mass% or more and 60 mass% or less, more preferably 0 mass% or more and 50 mass% or less with respect to the solid content of the resist composition. When containing a resin other than resin (AX), the total content rate of resin (AX) and the resin other than resin (AX) is preferably 0 mass% or more and 80 mass% or less, more preferably 0 mass% or more and 60 mass% or less with respect to the solid content of the resist composition. The solid content of the resist composition and the content rate of the resin with respect thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0198] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by known analysis means such as liquid chromatography or gas chromatography. Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; cyclic esters such as γ-butyrolactone; and the like. One kind of the solvent (E) may be used alone, or two or more kinds may be used.

[0199] <Quencher (C)> Examples of the quencher (C) include basic nitrogen-containing organic compounds or salts that generate an acid with a lower acidity than the acid generated from the acid generator (acid generator (B)). When the resist composition contains the quencher (C), the content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, further preferably about 0.1 to 8% by mass, and even more preferably about 0.1 to 7% by mass based on the solid content of the resist composition. Examples of the basic nitrogen-containing organic compounds include amines and ammonium salts. Examples of the amines include aliphatic amines and aromatic amines. Examples of the aliphatic amines include primary amines, secondary amines, and tertiary amines. Examples of the amine include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridylsulfide, 4,4'-dipyridyldisulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, etc. Aromatic amines such as diisopropylaniline are preferable, and 2,6-diisopropylaniline is more preferable. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, and the like.

[0200] The acidity of a salt that generates an acid with a lower acidity than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). A salt that generates an acid with a lower acidity than the acid generated from the acid generator is a salt having an acid dissociation constant of the acid generated from the salt usually of -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator include a salt represented by the following formula, a salt represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator is preferably a salt that generates a carboxylic acid with a lower acidity than the acid generated from the acid generator (a salt having a carboxylic acid anion), more preferably a weak acid inner salt (D), and even more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid inner salts (D). TIFF2025105566000162.tif97153

[0201] The weak acid inner salt (D) is preferably a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylic acid anion substituted for at least one of the two phenyl groups bonded to the iodonium cation, and specifically, salts represented by the following formulas are included.

[0202] TIFF2025105566000163.tif1695[In formula (D), R D1 and R D2 each independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group or a halogen atom. m’ and n’ each independently represent any integer from 0 to 4. When m’ is 2 or more, the plurality of R D1 may be the same or different, and when n’ is 2 or more, the plurality of R D2 may be the same or different.] R D1 and R D2 Examples of the hydrocarbon group include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, nonyl group and the like. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may be saturated or unsaturated. Examples include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclononyl group, cyclododecyl group, norbornyl group, adamantyl group and the like. Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group and the like. Examples of the group formed by combining these include an alkyl-cycloalkyl group, a cycloalkyl-alkyl group, an aralkyl group (e.g., a phenylmethyl group, a 1-phenylethyl group, a 2-phenylethyl group, a 1-phenyl-1-propyl group, a 1-phenyl-2-propyl group, a 2-phenyl-2-propyl group, a 3-phenyl-1-propyl group, a 4-phenyl-1-butyl group, a 5-phenyl-1-pentyl group, a 6-phenyl-1-hexyl group, etc.). Examples of the alkoxy group include a methoxy group, an ethoxy group, etc. Examples of the acyl group include an acetyl group, a propanoyl group, a benzoyl group, a cyclohexanecarbonyl group, etc. Examples of the acyloxy group include a group in which an oxy group (-O-) is bonded to the above acyl group, etc. Examples of the alkoxycarbonyl group include a group in which a carbonyl group (-CO-) is bonded to the above alkoxy group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, etc. R D1 and R D2 are each independently preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group or a halogen atom. m' and n' are each independently preferably any integer from 0 to 2, more preferably 0. When m' is 2 or more, the plurality of R D1 may be the same or different, and when n' is 2 or more, the plurality of R D2 may be the same or different.

[0203] More specifically, the following salts can be mentioned. TIFF2025105566000164.tif72165

[0204] 〈Other components〉 The resist composition of the present invention may contain, if necessary, components other than the above-described components (hereinafter sometimes referred to as "other components (F)"). There is no particular limitation on the other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc. can be used.

[0205] 〈Preparation of Resist Composition〉 The resist composition of the present invention can be prepared by mixing compound (I), acid generator (B), and, if necessary, compound (I'), compound (II), a compound having a phenolic hydroxyl group, etc., a resin other than the resin containing a structural unit having an acid-labile group, solvent (E), quencher (C), and other components (F). The mixing order is arbitrary and is not particularly limited. The temperature during mixing can be appropriately selected from 10 to 40 °C according to the type of resin, etc. and the solubility of the resin, etc. in the solvent (E). The mixing time can be appropriately selected from 0.5 to 24 hours according to the mixing temperature. In addition, the mixing means is also not particularly limited, and stirring and mixing, etc. can be used. After mixing the respective components, it is preferable to filter using a filter having a pore size of about 0.003 to 0.2 μm.

[0206] 〈Method for Producing Resist Pattern〉 The method for producing a resist pattern of the present invention (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer. To apply the resist composition onto a substrate, it can be carried out by a commonly used apparatus such as a spin coater. Examples of the substrate include inorganic substrates such as silicon wafers and organic substrates having a resist film formed on the surface. Before applying the resist composition, the substrate may be washed, or an antireflection film, etc. may be formed on the substrate. By drying the coated composition, the solvent is removed to form a composition layer. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-bake), or by using a decompression device. The heating temperature is preferably 50 to 200 °C, and the heating time is preferably 10 to 180 seconds. Also, the pressure during vacuum drying is preferably about 1 to 1.0×10 5 Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. As the exposure light source, those that emit laser light in the ultraviolet region such as a KrF excimer laser (wavelength 248 nm), an ArF excimer laser (wavelength 193 nm), and an F2 excimer laser (wavelength 157 nm), those that convert the laser light from a solid laser light source (such as a YAG or semiconductor laser) into harmonic laser light in the far ultraviolet region or vacuum ultraviolet region and emit it, those that irradiate electron beams, extreme ultraviolet light (EUV), etc., various ones can be used. In this specification, irradiating these radiations may be collectively referred to as "exposure". During exposure, usually, exposure is performed through a mask corresponding to the required pattern. When the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The exposed composition layer is heat-treated (so-called post-exposure bake) to promote the deprotection reaction in the acid-labile group. The heating temperature is usually about 50 to 200 °C, preferably about 70 to 150 °C. Chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. Also, before development, the steps of coating, drying, exposing, and heating the resist composition may be repeated on the exposed composition layer. The heated composition layer is usually developed using a developing solution with a developing device. Examples of the developing method include the dip method, paddle method, spray method, dynamic dispense method, etc. The developing temperature is preferably, for example, 5 to 60 °C, and the developing time is preferably, for example, 5 to 300 seconds. By selecting the type of developing solution as follows, a posit...

Claims

1. A resist composition comprising a compound represented by formula (I) and an acid generator, and not containing a resin having a structural unit having an acid-labile group. [In formula (I), L 1 represents a (m2 + 1)-valent hydrocarbon group having 1 to 48 carbon atoms and having an iodine atom, and the hydrocarbon group may have a substituent other than an iodine atom, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. R １ represents *-R １０ , *-CO-R １０ , *-CO-O-R １０ , *-L ２ -CO-O-R １０ or *-CO-O-L ２ -CO-O-R １０ , where * represents the bonding site with -O. R ２ represents *-R １０ , *-OH, *-O-R １０ , *-O-CO-R １０ , *-O-CO-O-R １０ , *-O-L ２ -CO-O-R １０ or *-O-CO-O-L ２ -CO-O-R １０ where * represents the bonding site with L 1 . L ２ represents an alkanediyl group having 1 to 6 carbon atoms which may have substituents, and two or more Ls ２ may be the same as or different from each other. R １０ represents a group represented by the formula (IC). m2 represents any integer from 1 to 7, and when m2 is 2 or more, the plurality of Rs ２ may be the same as or different from each other.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of Rs Ａ are either identical or different. L １２ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO ２ -. * represents a bonding site with -O- or -CO-. ]

2. L １ The resist composition according to claim 1, wherein L is a group represented by formula (L1-A). [In formula (L1-A), L １３Ａ 、 L １３Ｂ 、 L １３Ｃ and １３Ｄ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -S-, -SO ２ - or -CO-. W １Ａ and W １Ｂ each independently represents a cyclic hydrocarbon group having 3 to 18 carbon atoms. L １４Ａ and L １４Ｂ each independently has a single bond, an alkanediyl group having 1 to 6 carbon atoms, or a group combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 5 to 18 carbon atoms, and the -CH ２ - included in the alkanediyl group may be replaced by -O-, -S-, -SO ２ - or -CO-, and the cyclic hydrocarbon group may have a substituent. L １５ represents a methylene group, a methanetriyl group or a methanetetrayl group. m20 represents any integer from 0 to 7, and when m20 is 2 or more, the groups within two or more parentheses may be the same as or different from each other. m21 represents 0 or 1, and satisfies 1 ≤ m20 + m21. m22 represents any integer from 0 to 3, and when m22 is 2 or more, the groups within two or more parentheses may be the same as or different from each other. m23 represents any integer from 0 to 3, and when m23 is 2 or more, the groups within two or more parentheses may be the same as or different from each other, and satisfies 1 ≤ m20 + m22 + m23 ≤ 7. m24 represents any integer from 0 to 7, and when m24 is 2 or more, the groups within two or more parentheses may be the same as or different from each other. R ３Ａ and R ３Ｂ each independently represents a halogen atom or an alkyl group having 1 to 3 carbon atoms, the alkyl group may have a halogen atom, and -CH ２ - in the alkyl group may be replaced by -O-, -S-, -SO ２ - or -CO-. m3A and m3B each independently represent any integer from 0 to 3, at least one of m3A and m3B is an integer of 1 or more, and when m3A is 2 or more, two or more Rs ３Ａ may be the same as or different from each other, and when m3B is 2 or more, two or more Rs ３Ｂ may be the same as or different from each other, and R ３Ａ and R ３Ｂ at least one of which is an iodine atom. R ４ represents an alkyl group having 1 to 6 carbon atoms, and -CH ２ - in the alkyl group may be replaced by -O-, -S-, -SO ２ - or -CO-. m4 represents any integer from 0 to 3, and when m4 is 2 or more, R of 2 or more ４ may be the same as or different from each other, and satisfies 1 ≤ m22 + m23 + m4 ≤ 3. In formula (L1-A), the total number of carbon atoms of all the groups does not exceed 48. * and ** each represent a binding site, * represents a binding site with an oxygen atom, and ** represents a binding site with R ２ .

3. The resist composition according to claim 1, wherein the acid generator contains a salt represented by formula (B1-A3). [In formula (B1-A3), A １ represents a nitrogen atom or a carbon atom. nb5 represents 2 or 3. When nb5 is 2, A １ represents a nitrogen atom. When nb5 is 3, A １ represents a carbon atom. L ｂ２ ' represents a hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -S-, -CO- or -SO 2 - and may be replaced. Y ｂ１ ' represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH contained in the cyclic hydrocarbon group 2 - is -O-, -S-, -CO- or -SO 2 - may be replaced by. The groups within two or more parentheses may be the same as or different from each other, and the groups within two parentheses may form a ring together. Z1 ＋ represents an organic cation.]

4. (1) A step of applying the resist composition according to any one of claims 1 to 3 on a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern including these steps.

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