Switching device

Abstract

To maintain stable and highly accurate measurement even in a long-term use in a switching device.SOLUTION: A switching device includes a first DUT terminal, a first DC terminal, a first RF terminal, a first low pass filter, a first RF switch, and a first DC switch. The first low pass filter is connected to the first DUT terminal and the first DC terminal. The first RF switch is connected to the first DUT terminal and the first RF terminal. The first RF switch electrically connects the first DUT terminal and the first RF terminal in an ON state. The first RF switch electrically disconnects the first DUT terminal from the first RF terminal in an OFF state. The first DC switch is connected to the first low pass filter and the first DC terminal. The first DC switch electrically connects the first low pass filter and the first DC terminal in an ON state. The first DC switch electrically disconnects the first low pass filter from the first DC terminal in an OFF state.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a switching device for switching between an RF test for inspecting high-frequency characteristics of a device under test and a DC test for inspecting DC characteristics of the device under test.

Background Art

[0002] In a test apparatus such as a semiconductor test apparatus, a switching device is used to switch between a test of high-frequency characteristics of a device under test (hereinafter referred to as an RF test) and a test of DC characteristics such as an input voltage or an output voltage of a direct current (hereinafter referred to as a DC test). The switching device includes, for example, a C-contact type relay. When performing an RF test, the switching device connects a circuit for RF testing of the test apparatus and the device under test. When performing a DC test, the switching device connects a circuit for DC testing of the test apparatus and the device under test.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above switching device, when the number of switching times between the circuit for RF testing and the circuit for DC testing increases due to long-term use, the accuracy of the test may decrease due to wear of the switching device. For example, when the switching device includes a C-contact type relay, the contact resistance of the relay contacts may increase due to an increase in the number of opening and closing operations of the contacts. In that case, the accuracy of the DC test will decrease. An object of the present invention is to maintain stable and highly accurate measurement even during long-term use in a switching device.

Means for Solving the Problems

[0005] A switching device according to an aspect of the present invention is a switching device for switching between an RF test and a DC test. The switching device includes a first DUT terminal, a first DC terminal, a first RF terminal, a first low-pass filter, a first RF switch, and a first DC switch. The first DUT terminal is a terminal for a device under test. The first DC terminal is a terminal for DC testing. The first RF terminal is a terminal for RF testing. The first low-pass filter is connected between the first DUT terminal and the first DC terminal. The first RF switch is connected between the first DUT terminal and the first RF terminal. The first RF switch is switchable between an on state and an off state. In the on state, the first RF switch electrically connects the first DUT terminal and the first RF terminal. In the off state, the first RF switch electrically disconnects the first DUT terminal and the first RF terminal. The first DC switch is connected between the first low-pass filter and the first DC terminal. The first DC switch is switchable between an on state and an off state. In the on state, the first DC switch electrically connects the first low-pass filter and the first DC terminal. In the off state, the first DC switch electrically disconnects the first low-pass filter and the first DC terminal.

[0006] In the switching device according to this aspect, in the on state, the first RF switch electrically connects the first DUT terminal and the first RF terminal. In this state, a signal for RF testing (hereinafter referred to as an RF signal) is detected by a testing device through the first DUT terminal and the first RF terminal. On the other hand, since the RF signal is cut off by the low-pass filter, the RF signal is prevented from flowing to the first DC terminal.

[0007] Also, the first RF switch electrically disconnects the first DUT terminal and the first RF terminal in the off state. In this state, a signal for DC inspection (hereinafter referred to as a DC signal) is prevented from flowing into the first RF terminal. The DC signal is detected by the inspection device through the first DUT terminal, the low-pass filter, and the first DC terminal. Therefore, the DC signal is detected by the inspection device without passing through the first RF switch. Thereby, even if the first RF switch is consumed, stable and highly accurate measurement of the DC signal becomes possible. From the above, in the switching device according to this aspect, stable and highly accurate measurement is maintained even during long-term use.

[0008] Also, as described above, when the first RF switch is in the on state, the RF signal is cut in the low-pass filter, but there is a concern that the RF signal may deteriorate due to the stray capacitance of the inspection device connected to the first DC terminal. However, in the switching device according to this aspect, when the first RF switch is in the on state and the first DC switch is in the off state, the influence of the stray capacitance from the first DC terminal is reduced. Thereby, the deterioration of the RF signal due to the stray capacitance of the inspection device is suppressed.

Advantages of the Invention

[0009] According to the present invention, in a switching device, stable and highly accurate measurement is maintained even during long-term use. Also, the deterioration of the RF signal due to the stray capacitance of the inspection device is suppressed.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0011] Hereinafter, a switching device according to an embodiment will be described with reference to the drawings. FIG. 1 is a diagram showing the configuration of a switching device 1A according to the first embodiment. The switching device 1A is a device for switching between RF inspection and DC inspection for a device under test (hereinafter referred to as DUT (Device Under Test)). The DUT is an electronic component such as a semiconductor, for example. The switching device 1A connects the DUT and an ATE (Automated Test Equipment) such as a semiconductor test device.

[0012] As shown in FIG. 1, the switching device 1A includes a base 2, a first DUT terminal 3A, a first DC terminal 4A, a first RF terminal 5A, a first low-pass filter 6A, a first RF switch 7A, a first DC switch 8A, an RF drive unit 9, a first DC drive unit 10A, a first drive terminal 11, a second drive terminal 12, and a third drive terminal 13. The base 2 includes, for example, a substrate, a lead frame, or a resin molded product provided with a transmission line.

[0013] The first DUT terminal 3A, the first DC terminal 4A, the first RF terminal 5A, the first low-pass filter 6A, the first RF switch 7A, the first DC switch 8A, the RF drive unit 9, the first DC drive unit 10A, the first drive terminal 11, the second drive terminal 12, and the third drive terminal 13 are arranged on the base 2. The switching device 1A is integrally modularized as a relay module 30A by arranging the first DUT terminal 3A, the first DC terminal 4A, the first RF terminal 5A, the first low-pass filter 6A, the first RF switch 7A, the first DC switch 8A, the RF drive unit 9, the first DC drive unit 10A, the first drive terminal 11, the second drive terminal 12, and the third drive terminal 13 on a common base 2.

[0014] The first DUT terminal 3A is a terminal for the DUT. The first DUT terminal 3A is connected to the DUT. The first DC terminal 4A is a terminal for DC inspection. The first DC terminal 4A is connected to the DC inspection terminal of the ATE. The first RF terminal 5A is a terminal for RF inspection. The first RF terminal 5A is connected to the RF inspection terminal of the ATE.

[0015] The first low-pass filter 6A is connected to the first DUT terminal 3A and the first DC terminal 4A. The first low-pass filter 6A includes an inductor 61A. The lower limit of the frequency to be cut is set so that the first low-pass filter 6A passes DC signals but cuts RF signals. For example, the first low-pass filter 6A cuts high-frequency signals of 100 kHz or higher.

[0016] The first RF switch 7A is connected to the first DUT terminal 3A and the first RF terminal 5A. The first RF switch 7A is switchable between an on state and an off state. In the on state, the first RF switch 7A electrically conducts the first DUT terminal 3A and the first RF terminal 5A. In the off state, the first RF switch 7A electrically disconnects the first DUT terminal 3A and the first RF terminal 5A.

[0017] The RF driving unit 9 switches the first RF switch 7A between the on state and the off state. The RF driving unit 9 is connected to the first driving terminal 11 and the third driving terminal 13. When current flows through the RF driving unit 9 via the first driving terminal 11 and the third driving terminal 13, the RF driving unit 9 switches the first RF switch 7A from the off state to the on state. When the current to the RF driving unit 9 is cut off, the RF driving unit 9 switches the first RF switch 7A from the on state to the off state. Alternatively, conversely, when current flows through the RF driving unit 9 via the first driving terminal 11 and the third driving terminal 13, the RF driving unit 9 may switch the first RF switch 7A from the on state to the off state.

[0018] The first RF switch 7A and the RF driving unit 9 are, for example, mechanical relays. The first RF switch 7A includes a first fixed contact 14A and a first movable contact 15A. The RF driving unit 9 includes a coil 16. When the first movable contact 15A contacts the first fixed contact 14A, the first RF switch 7A is turned on. When the first movable contact 15A separates from the first fixed contact 14A, the first RF switch 7A is turned off.

[0019] The first DC switch 8A is connected to the first low-pass filter 6A and the first DC terminal 4A. The first DC switch 8A is switchable between an on state and an off state. When the first DC switch 8A is in the on state, it electrically connects the first low-pass filter 6A and the first DC terminal 4A. When the first DC switch 8A is in the off state, it electrically disconnects the first low-pass filter 6A and the first DC terminal 4A.

[0020] The first DC driving unit 10A switches the first DC switch 8A between an on state and an off state. The first DC driving unit 10A is connected to a second driving terminal 12 and a third driving terminal 13. The third driving terminal 13 is shared as a negative input terminal of the RF driving unit 9 and the first DC driving unit 10A.

[0021] When a current flows through the first DC driving unit 10A via the second driving terminal 12 and the third driving terminal 13, the first DC driving unit 10A switches the first DC switch 8A from the off state to the on state. When the current to the first DC driving unit 10A is cut off, the first DC driving unit 10A switches the first DC switch 8A from the on state to the off state. The first DC switch 8A is in the off state when the first RF switch is in the on state. The first DC switch 8A is in the on state when the first RF switch is in the off state.

[0022] The first DC switch 8A is a non-contact relay. The first DC switch 8A and the first DC driving unit 10A are, for example, MOS-FET relays. The first DC switch 8A includes a first MOS-FET 17A. The first DC driving unit 10A includes a first light-emitting diode 18A.

[0023] In the switching device 1A according to the first embodiment, during the RF inspection, the first RF switch 7A is turned on and the first DC switch 8A is turned off. As a result, the first DUT terminal 3A and the first RF terminal 5A are electrically connected to each other. Also, the first low-pass filter 6A and the first DC terminal 4A are electrically disconnected. In this state, the RF signal is detected by the ATE through the first DUT terminal 3A and the first RF terminal 5A. On the other hand, since the RF signal is cut off in the first low-pass filter 6A, the RF signal is prevented from flowing to the first DC terminal 4A. Also, since the first DC switch 8A is in the off state, the deterioration of the RF signal due to the stray capacitance of the ATE is suppressed.

[0024] During the DC inspection, the first RF switch 7A is turned off and the first DC switch 8A is turned on. As a result, the first DUT terminal 3A and the first RF terminal 5A are electrically disconnected from each other. Also, the first low-pass filter 6A and the first DC terminal 4A are electrically connected. In this state, the DC signal is prevented from flowing to the first RF terminal 5A. The DC signal is detected by the ATE through the first DUT terminal 3A, the first low-pass filter 6A, and the first DC terminal 4A. Therefore, the DC signal is detected by the ATE without passing through the first RF switch 7A. As a result, even if the first RF switch 7A is consumed, stable and highly accurate measurement is possible. For example, stable and highly accurate measurement is possible regardless of the wear of the contacts 14, 15 of the first RF switch 7A or the change in contact resistance.

[0025] The base 2 includes a first RF line 20A and a first DC line 21A. The first RF line 20A and the first DC line 21A are transmission paths through which signals flow. An RF signal flows through the first RF line 20A. A DC signal flows through the first DC line 21A. The first RF line 20A extends from the first DUT terminal 3A to the first RF terminal 5A. The first RF switch 7A is connected to the first RF line 20A. The first DC line 21A extends from the first DUT terminal 3A to the first DC terminal 4A. The first low-pass filter 6A and the first DC switch 8A are connected to the first DC line 21A.

[0026] The base 2 includes a first drive line 22, a second drive line 23, a third drive line 24A, and a fourth drive line 25A. The first drive line 22 extends from the RF drive unit 9 to the first drive terminal 11. The second drive line 23 extends from the RF drive unit 9 to the third drive terminal 13. The third drive line 24A extends from the first DC drive unit 10A to the second drive terminal 12. The fourth drive line 25A extends from the first DC drive unit 10A to the third drive terminal 13. The fourth drive line 25A is connected to the second drive line 23. A resistor 26A is connected to the fourth drive line 25A. Note that the arrangement of each terminal and each line is not limited to the above and may be changed.

[0027] FIG. 2 is a diagram showing a switching device 1B according to a modification of the first embodiment. As shown in FIG. 2, the switching device 1B includes a first DC intermediate terminal 27A and a first drive intermediate terminal 28A. The first DC intermediate terminal 27A is connected to the first low-pass filter 6A. The first drive intermediate terminal 28A is connected to the RF drive unit 9.

[0028] The first DUT terminal 3A, the first DC intermediate terminal 27A, the first RF terminal 5A, the first drive terminal 11, the first drive intermediate terminal 28A, the first low-pass filter 6A, and the first RF switch 7A are mounted on a common base 2 and are integrally modularized as a relay module 30B.

[0029] The first DC switch 8A and the first DC driving unit 10A are arranged outside the relay module 30B. The first DC switch 8A is connected to the first DC intermediate terminal 27A. The first DC driving unit 10A is connected to the first driving intermediate terminal 28A.

[0030] As described above, the first DC switch 8A and the first DC driving unit 10A may be externally attached to the relay module 30B. For example, the first DC switch 8A and the first DC driving unit 10A may be connected to the relay module 30B as an external relay 29A.

[0031] Next, the switching device 1C according to the second embodiment will be described. FIG. 2 is a diagram showing the configuration of the switching device 1C according to the second embodiment. As shown in FIG. 2, the switching device 1C further includes a second DUT terminal 3B, a second DC terminal 4B, a second RF terminal 5B, a second low-pass filter 6B, a second RF switch 7B, a second DC switch 8B, and a second DC driving unit 10B in addition to the configuration of the switching device 1A according to the first embodiment.

[0032] The first and second DUT terminals 3A, 3B, the first and second DC terminals 4A, 4B, the first and second RF terminals 5A, 5B, the first and second low-pass filters 6A, 6B, the first and second RF switches 7A, 7B, the first and second DC switches 8A, 8B, the RF driving unit 9, the first and second DC driving units 10A, 10B, and the first to third driving terminals 12 - 13 are arranged on the base 2. By arranging the first and second DUT terminals 3A, 3B, the first and second DC terminals 4A, 4B, the first and second RF terminals 5A, 5B, the first and second low-pass filters 6A, 6B, the first and second RF switches 7A, 7B, the first and second DC switches 8A, 8B, the RF driving unit 9, the first and second DC driving units 10A, 10B, and the first to third driving terminals 12 - 13 on the common base 2, the switching device 1C is integrally modularized as the relay module 30C.

[0033] The configurations of the second DUT terminal 3B, the second DC terminal 4B, and the second RF terminal 5B are the same as those of the first DUT terminal 3A, the first DC terminal 4A, and the first RF terminal 5A, respectively. The second low-pass filter 6B is connected to the second DUT terminal 3B and the second DC terminal 4B. The second low-pass filter 6B includes an inductor 61B. The lower limit of the frequency to be cut is set for the second low-pass filter 6B so that it allows DC signals to pass through but cuts RF signals. Other configurations of the second low-pass filter 6B are the same as those of the first low-pass filter 6A.

[0034] The second RF switch 7B is connected to the second DUT terminal 3B and the second RF terminal 5B. The second RF switch 7B is switchable between an on state and an off state. The RF drive unit 9, together with the first RF switch 7A, switches the second RF switch 7B between the on state and the off state. The second RF switch 7B electrically conducts the second DUT terminal 3B and the second RF terminal 5B in the on state. The second RF switch 7B electrically cuts off the second DUT terminal 3B and the second RF terminal 5B in the off state. The RF drive unit 9 switches the first and second RF switches 7A, 7B between the on state and the off state. The second RF switch 7B includes a second fixed contact 14B and a second movable contact 15B. The configuration of the second RF switch 7B is the same as that of the first RF switch 7A.

[0035] The second DC switch 8B is connected to the second low-pass filter 6B and the second DC terminal 4B. The second DC switch 8B is switchable between an on state and an off state. The second DC switch 8B electrically conducts the second low-pass filter 6B and the second DC terminal 4B in the on state. The second DC switch 8B electrically cuts off the second low-pass filter 6B and the second DC terminal 4B in the off state.

[0036] The second DC driving unit 10B switches the second DC switch 8B between an on state and an off state. The second DC driving unit 10B is connected to a second driving terminal 12 and a third driving terminal 13. The third driving terminal 13 is shared as a negative input terminal of the RF driving unit 9, the first DC driving unit 10A, and the second DC driving unit 10B.

[0037] When current flows through the second DC driving unit 10B via the second driving terminal 12 and the third driving terminal 13, the second DC driving unit 10B switches the second DC switch 8B from an off state to an on state. When the current to the second DC driving unit 10B is cut off, the second DC driving unit 10B switches the second DC switch 8B from an on state to an off state. The first and second DC switches 8A and 8B are in an off state when the first and second RF switches 7A and 7B are in an on state. The first and second DC switches 8A and 8B are in an on state when the first and second RF switches 7A and 7B are in an off state.

[0038] The configuration of the second DC switch 8B is the same as that of the first DC switch 8A. The second DC switch 8B includes a second MOS-FET 17B. The second DC driving unit 10B includes a second light-emitting diode 18B.

[0039] In the switching device 1C according to the second embodiment, during RF inspection, the first and second RF switches 7A and 7B are in an on state, and the first and second DC switches 8A and 8B are in an off state. Thereby, the first DUT terminal 3A and the first RF terminal 5A are electrically conductive to each other. The second DUT terminal 3B and the second RF terminal 5B are electrically conductive to each other. Also, the first low-pass filter 6A and the first DC terminal 4A are electrically disconnected. The second low-pass filter 6B and the second DC terminal 4B are electrically disconnected.

[0040] In this state, the RF signal is detected by the ATE through the first DUT terminal 3A and the first RF terminal 5A. Also, the RF signal is detected by the ATE through the second DUT terminal 3B and the second RF terminal 5B. On the other hand, since the RF signal is cut off in the first and second low-pass filters 6A and 6B respectively, the RF signal is prevented from flowing to the first and second DC terminals 4A and 4B. Also, since the first and second DC switches 8A and 8B are in the off state, the deterioration of the RF signal due to the stray capacitance of the ATE is suppressed.

[0041] During the DC inspection, the first and second RF switches 7A and 7B are turned off, and the first and second DC switches 8A and 8B are turned on. Thereby, the first DUT terminal 3A and the first RF terminal 5A are electrically disconnected from each other. The second DUT terminal 3B and the second RF terminal 5B are electrically disconnected from each other. Also, the first low-pass filter 6A and the first DC terminal 4A are electrically conductive. The second low-pass filter 6B and the second DC terminal 4B are electrically conductive.

[0042] In this state, the DC signal is prevented from flowing to the first RF terminal 5A and the second RF terminal 5B. The DC signal is detected by the ATE through the first DUT terminal 3A, the first low-pass filter 6A, and the first DC terminal 4A. Also, the DC signal is detected by the ATE through the second DUT terminal 3B, the second low-pass filter 6B, and the second DC terminal 4B. Therefore, the DC signal is detected by the ATE without passing through the first and second RF switches 7A and 7B. Thereby, even if the first and second RF switches 7A and 7B are consumed, stable and highly accurate measurement is possible.

[0043] Base 2 further includes a second RF line 20B and a second DC line 21B in addition to the configuration of the first embodiment. The second RF line 20B extends from the second DUT terminal 3B to the second RF terminal 5B. The second RF line 20B is arranged in parallel with the first RF line 20A on the base 2. The second RF switch 7B is connected to the second RF line 20B. The second DC line 21B extends from the second DUT terminal 3B to the second DC terminal 4B. The second low-pass filter 6B and the second DC switch 8B are connected to the second DC line 21B.

[0044] Base 2 includes a fifth drive line 24B and a sixth drive line 25B. The fifth drive line 24B extends from the second DC drive unit 10B to the second drive terminal 12. The sixth drive line 25B extends from the second DC drive unit 10B to the third drive terminal 13. The fifth drive line 24B is connected to the third drive line 24A. The sixth drive line 25B is connected to the fourth drive line 25A. A resistor 26B is connected to the sixth drive line 25B. Note that the arrangement of each terminal and each line is not limited to the above and may be changed.

[0045] Other configurations of the switching device 1C according to the second embodiment are the same as those of the switching device 1A according to the first embodiment. With the arrangement of the first and second DUT terminals 3A, 3B and the first and second RF terminals 5A, 5B as described above, signal loss during differential transmission is reduced.

[0046] FIG. 4 is a diagram showing a switching device 1D according to a modified example of the second embodiment. As shown in FIG. 4, the switching device 1D includes a first DC intermediate terminal 27A, a first drive intermediate terminal 28A, a second DC intermediate terminal 27B, and a second drive intermediate terminal 28B. The first DC intermediate terminal 27A is connected to the first low-pass filter 6A. The second DC intermediate terminal 27B is connected to the second low-pass filter 6B. The first drive intermediate terminal 28A and the second drive intermediate terminal 28B are connected to the RF drive unit 9.

[0047] The first DUT terminal 3A, the first DC intermediate terminal 27A, the first RF terminal 5A, the first low-pass filter 6A, the first RF switch 7A, the second DUT terminal 3B, the second DC intermediate terminal 27B, the second RF terminal 5B, the second low-pass filter 6B, the second RF switch 7B, the first drive intermediate terminal 28A, and the second drive intermediate terminal 28B are mounted on a common base 2 and are integrally modularized as a relay module 30D.

[0048] The first DC switch 8A and the first DC drive unit 10A are arranged outside the relay module 30D. The first DC switch 8A is connected to the first DC intermediate terminal 27A. The first DC drive unit 10A is connected to the second drive terminal 12 and the third drive terminal 13. The second DC switch 8B and the second DC drive unit 10B are arranged outside the relay module 30D. The second DC switch 8B is connected to the second DC intermediate terminal 27B. The second DC drive unit 10B is connected to the second drive terminal 12 and the third drive terminal 13.

[0049] As described above, the first DC switch 8A and the first DC drive unit 10A may be externally attached to the relay module 30D. For example, the first DC switch 8A and the first DC drive unit 10A may be connected to the relay module 30D as an external relay 29A. The second DC switch 8B and the second DC drive unit 10B may be externally attached to the relay module 30D. For example, the second DC switch 8B and the second DC drive unit 10B may be connected to the relay module 30D as an external relay 29B.

[0050] As described above, one embodiment of the present invention has been described. However, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the gist of the invention.

[0051] The switching device may be connected not only to the ATE but also to other inspection devices. The configuration of the switching device is not limited to that of the above-described embodiment and may be changed. For example, the configuration of the low-pass filter may be changed. A plurality of inductors may be provided in the low-pass filter. A resistor may be provided instead of the inductor. The low-pass filter may further include a capacitor. A plurality of capacitors may be provided in the low-pass filter. A plurality of resistors may be provided in the low-pass filter. The low-pass filter may be a lumped-constant circuit or a distributed-constant circuit using a wiring pattern on a substrate.

[0052] The RF switch is not limited to a mechanical relay including contacts. The RF switch may be another type of switch such as a reed relay, a mechanical switch, a MOSFET relay, a photocoupler, a semiconductor RF switch, or a MEMS switch. The RF switch may be manually switched between the on state and the off state.

[0053] The DC switch is not limited to a MOSFET relay. The DC switch may be another type of switch such as a mechanical relay including contacts, a reed relay, a mechanical switch, a photocoupler, a semiconductor DC switch, or a MEMS switch. The DC switch may be manually switched between the on state and the off state.

[0054] The switching device may have a normally open or normally closed configuration. The switching device may have a structure that can maintain the operating states of the RF switch and / or the DC switch even when the control signal is lost. The configuration of the RF driving unit is not limited to that of the above-described embodiment and may be changed. The configuration of the DC driving unit is not limited to that of the above-described embodiment and may be changed.

Industrial Applicability

[0055] According to the present invention, in a switching device, stable and highly accurate measurement can be maintained even during long-term use. Further, deterioration of RF signals due to the stray capacitance of the inspection device can be suppressed.

Explanation of Signs

[0056] 1A-1B: Switching device, 3A: First DUT terminal, 3B: Second DUT terminal, 4A: First DC terminal, 4B: Second DC terminal, 5A: First RF terminal, 5B: Second RF terminal, 6A: First low-pass filter, 6B: Second low-pass filter, 7A: First RF switch, 7B: Second RF switch, 8A: First DC switch, 8B: Second DC switch, 9: RF drive unit, 11: First drive terminal, 12: Second drive terminal, 13: Third drive terminal, 27A: First DC intermediate terminal, 27B: Second DC intermediate terminal

Claims

1. A switching device for switching between an RF test for inspecting high-frequency characteristics of a device under test and a DC test for inspecting DC characteristics of the device under test, comprising: a first DUT terminal for the device under test; a first DC terminal for the DC test; a first RF terminal for the RF test; a first low-pass filter connected between the first DUT terminal and the first DC terminal; a first RF switch connected between the first DUT terminal and the first RF terminal, switchable between an on state in which the first DUT terminal and the first RF terminal are electrically connected and an off state in which the first DUT terminal and the first RF terminal are electrically disconnected; a first DC switch connected between the first low-pass filter and the first DC terminal, switchable between an on state in which the first low-pass filter and the first DC terminal are electrically connected and an off state in which the first low-pass filter and the first DC terminal are electrically disconnected; The switching device comprising the above components.

2. The first DC switch is a non-contact relay. The switching device according to claim 1.

3. The first DUT terminal, the first DC terminal, the first RF terminal, the first low-pass filter, the first DC switch, and the first RF switch are integrally modularized. The switching device according to claim 1.

4. Further comprising a first DC intermediate terminal connected to the first low-pass filter, wherein the first DUT terminal, the first DC intermediate terminal, the first RF terminal, the first low-pass filter, and the first RF switch are integrally modularized as a relay module, and the first DC switch is disposed outside the relay module and connected to the first DC intermediate terminal. The switching device according to claim 1.

5. An RF drive unit for switching the first RF switch between an on state and an off state; a first DC drive unit for switching the first DC switch between an on state and an off state; a first drive terminal connected to the RF drive unit; a second drive terminal connected to the first DC drive unit; and a third drive terminal connected to the RF drive unit and the first DC drive unit. The switching device according to claim 1.

6. When the first RF switch is in the on state, the first DC switch is in the off state. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ When the first RF switch is in the off state, the first DC switch is in the on state. The switching device according to claim 1. **Claim 7** The second DUT terminal for the object to be measured, The second DC terminal for DC inspection, The second RF terminal for RF inspection, A second low-pass filter connected to the second DUT terminal and the second DC terminal, A second RF switch connected to the second DUT terminal and the second RF terminal, capable of switching between an on state in which the second DUT terminal and the second RF terminal are electrically connected and an off state in which the second DUT terminal and the second RF terminal are electrically disconnected, A second DC switch connected to the second low-pass filter and the second DC terminal, capable of switching between an on state in which the second low-pass filter and the second DC terminal are electrically connected and an off state in which the second low-pass filter and the second DC terminal are electrically disconnected, The switching device according to claim 1, further comprising the above. **Claim 8** The first DC switch and the second DC switch are non-contact relays. The switching device according to claim 7. **Claim 9** The first DUT terminal, the first DC terminal, the first RF terminal, the first low-pass filter, the first DC switch, the first RF switch, the second DUT terminal, the second DC terminal, the second RF terminal, the second low-pass filter, the second DC switch, and the second RF switch are integrally modularized. The switching device according to claim 7. **Claim 10** A first DC intermediate terminal connected to the first low-pass filter, A second DC intermediate terminal connected to the second low-pass filter, Further comprising: The first DUT terminal, the first DC intermediate terminal, the first RF terminal, the first low-pass filter, the first RF switch, the second DUT terminal, the second DC intermediate terminal, the second RF terminal, the second low-pass filter, and the second RF switch are integrally modularized as a relay module. The first DC switch is disposed outside the relay module and connected to the first DC intermediate terminal. The second DC switch is disposed outside the relay module and connected to the second DC intermediate terminal. The switching device according to claim 7. **Claim 11** an RF driving unit configured to switch the first RF switch between an on state and an off state and switch the second RF switch between an on state and an off state; a first DC driving unit configured to switch the first DC switch between an on state and an off state; a second DC driving unit configured to switch the second DC switch between an on state and an off state; a first driving terminal connected to the RF driving unit; a second driving terminal connected to the first DC driving unit and the second DC driving unit; a third driving terminal connected to the RF driving unit, the first DC driving unit, and the second DC driving unit; The switching device according to claim 7, comprising the above.

12. wherein the first RF switch and the second RF switch are in an on state, and the first DC switch and the second DC switch are in an off state; wherein the first RF switch and the second RF switch are in an off state, and the first DC switch and the second DC switch are in an on state; The switching device according to claim 7.

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