Measuring device

Abstract

To enable correction of a movement range of an electromagnetic wave after a measuring device that emits the electromagnetic wave is mounted in a mobile object.SOLUTION: An electromagnetic wave irradiated by an irradiator (10) is incident on and reflected by a movable reflection section (20). A control section (30) controls the irradiator (10) and the movable reflection section (20). A sensor (40) is disposed at a position through which the electromagnetic wave passes when an irradiation direction of the electromagnetic wave is moved in a first direction. Then, the control section (30) executes the following processing in setting a movement range of the movable reflection section (20). First, a detection value (first detection value) of the sensor (40) when light is irradiated at a first position Sa positioned ahead of the sensor (40) in the first direction is recognized. Next, a detection value (second detection value) of the sensor (40) when light is irradiated at a second position Sb positioned behind the sensor (40) in the first direction is recognized. Then, the movement range of the movable reflection section (20) is set using the first detection value and the second detection value.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a measuring device.

Background Art

[0002] In recent years, electromagnetic wave sensors have been provided on moving objects such as vehicles, and the moving object may be controlled using the detection results of these sensors. In sensors for such applications, the emitted electromagnetic waves are moved using devices such as MEMS (Micro Electro Mechanical Systems).

[0003] An example of a device for moving an electromagnetic wave is described in Patent Document 1. The device described in Patent Document 1 has a movable reflecting mirror. This reflecting mirror vibrates by the electrostatic force generated on the electrode. This electrostatic force is controlled by the voltage applied to the electrode.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The moving range of the electromagnetic wave of the sensor may shift due to various factors even after being mounted on the moving object. Therefore, even after the measuring device having the sensor is mounted on the moving object, it is necessary to be able to correct the moving range of the electromagnetic wave.

[0006] As an example of the problem to be solved by the present invention, it is possible to correct the moving range of the electromagnetic wave after the measuring device that emits the electromagnetic wave is mounted on the moving object.

Means for Solving the Problems

[0007] The invention according to claim 1 includes an irradiator that irradiates electromagnetic waves, a movable reflector that reflects the electromagnetic waves, a control unit that moves the electromagnetic waves along a first direction by controlling the irradiator and the movable reflector, a sensor capable of receiving the electromagnetic waves, and is provided with the sensor is disposed at a position where the electromagnetic waves pass when the electromagnetic waves move in the first direction, the control unit a first detection value which is a detection value of the sensor when the electromagnetic waves are irradiated at a first position located in front of the sensor in the first direction, and a second detection value which is a detection value of the sensor when the electromagnetic waves are irradiated at a second position located behind the sensor in the first direction, and uses these to set a movement range of the movable reflector, and is a measuring device.

[0008] An example of the present invention is a control method used by a measuring device including an irradiator that irradiates electromagnetic waves, a movable reflector that reflects the electromagnetic waves, a control unit that moves the electromagnetic waves along a first direction by controlling the irradiator and the movable reflector, and a sensor capable of receiving the electromagnetic waves, the sensor is disposed at a position where the electromagnetic waves pass when the electromagnetic waves move in the first direction, and includes a setting step of setting a movement range of the movable reflector using a first detection value which is a detection value of the sensor when the electromagnetic waves are irradiated at a first position located in front of the sensor in the first direction, and a second detection value which is a detection value of the sensor when the electromagnetic waves are irradiated at a second position located behind the sensor in the first direction, and is a control method.

[0009] An example of the present invention is a program for causing a computer to function as a control unit that controls a measuring device, the measuring device includes an irradiator that irradiates electromagnetic waves, a movable reflector that reflects the electromagnetic waves, A sensor capable of receiving the electromagnetic wave, comprises The sensor is disposed at a position through which the electromagnetic wave passes when the electromagnetic wave moves in a first direction, The computer, By controlling the irradiator and the movable reflector, a function of moving the electromagnetic wave along the first direction, A first detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a first position located in front of the sensor in the first direction, and a second detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a second position located behind the sensor in the first direction, and using the two values to set a moving range of the movable reflector, is a program having these functions.

[0010] An example of the present invention is a storage medium storing the above-described program.

Brief Description of the Drawings

[0011] The above-described object, as well as other objects, features, and advantages, will become more apparent from the following preferred embodiments and the accompanying drawings described below.

[0012]

Figure 1

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Figure 10

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Mode for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and the description will be omitted as appropriate.

[0014] (Embodiment) FIG. 1 is a diagram showing the configuration of a measuring device 1 according to an embodiment. The measuring device 1 includes an irradiator 10, a movable reflector 20, a control unit 30, and a sensor 40. The irradiator 10 irradiates electromagnetic waves, for example, light. The electromagnetic waves irradiated by the irradiator 10 are incident on the movable reflector 20 and reflected. The movable reflector 20 changes the traveling direction of the electromagnetic waves irradiated by the irradiator 10, for example, by swinging. The control unit 30 controls the irradiator 10 and the movable reflector 20. The sensor 40 can receive electromagnetic waves. The sensor 40 is disposed, for example, behind the movable reflector 20 in the traveling direction of the electromagnetic waves. Further, the sensor 40 is disposed at a position where the electromagnetic waves pass when the irradiation direction of the electromagnetic waves moves in the first direction. Then, when setting the movement range of the movable reflector 20 (setting step), the control unit 30 performs the following processing. First, the detection value of the sensor 40 (hereinafter referred to as the first detection value) when light is irradiated to a first position Sa located in front of the sensor 40 in the first direction is recognized. Next, the detection value of the sensor 40 (hereinafter referred to as the second detection value) when light is irradiated to a second position Sb located behind the sensor 40 in the first direction is recognized. Then, the movement range of the movable reflector 20 is set using the first detection value and the second detection value. Hereinafter, the measuring device 1 will be described in detail. In the following description, it is assumed that the electromagnetic waves are light.

[0015] The measuring device 1 is mounted on a moving body such as a vehicle, for example. In this case, the measuring device 1 is, for example, a LIDAR (LIght Detection And Ranging), and detects the relative position of an object located around the moving body with respect to the moving body. In this case, the measuring device 1 also includes a light receiver.

[0016] The irradiator 10 is a semiconductor laser such as a laser diode, for example, and emits a laser when electric energy is input. The control unit 30 controls the light emission timing and light emission intensity of the irradiator 10 by controlling the power input to the irradiator 10.

[0017] The movable reflection unit 20 includes at least one movable mirror and can two-dimensionally change the irradiation direction of the light emitted by the irradiator 10. For example, the movable reflection unit 20 periodically moves the irradiation direction of the light in the above-described first direction and simultaneously periodically moves it in a second direction different from the first direction. When the movable reflection unit 20 has one movable mirror, the inclination of this movable mirror can be changed around each of two axes orthogonal to each other. When the movable reflection unit 20 has two movable mirrors, the axes of the two movable mirrors are orthogonal to each other.

[0018] The inclination of the movable mirror included in the movable reflection unit 20 can be controlled, for example, by a voltage input to the movable reflection unit 20. This voltage is controlled by the control unit 30. Specifically, the voltage input to the movable reflection unit 20 changes periodically. This voltage is, for example, a sine wave. In this case, the reflection direction of the light by the movable reflection unit 20 changes periodically, for example, sinusoidally.

[0019] The control unit 30 is realized, for example, using an integrated circuit. This integrated circuit has, for example, a bus, a processor, a memory, a storage device, an input / output interface, and a network interface. The bus is a data transmission path for the processor, the memory, the storage device, the input / output interface, and the network interface to transmit and receive data to and from each other. However, the method of connecting the processor and the like to each other is not limited to bus connection. The processor is an arithmetic processing device realized using a microprocessor or the like. The memory is a memory realized using a RAM (Random Access Memory) or the like. The storage device is a storage device realized using a ROM (Read Only Memory), a flash memory, or the like.

[0020] The input / output interface is an interface for connecting the integrated circuit to peripheral devices. The peripheral devices are, for example, the irradiator 10 and the movable reflection unit 20.

[0021] The network interface is an interface for connecting an integrated circuit to a communication network. This communication network is, for example, a CAN (Controller Area Network) communication network. Note that the method by which the network interface connects to the communication network may be a wireless connection or a wired connection.

[0022] The storage device stores program modules for realizing the functions of the control unit 30. The processor realizes the functions of the control unit 30 by reading out and executing these program modules in the memory. Note that the program modules may be stored in the memory. In this case, the integrated circuit may not include a storage device.

[0023] The sensor 40 has a photoelectric conversion element and detects the intensity of light incident on the sensor 40. The signal from the sensor 40 is input to the control unit 30. The control unit 30 sets the movement range of the movable mirror of the movable reflection unit 20 using the detection value of the sensor 40. Specifically, the control unit 30 sets the signal input to the movable reflection unit 20 using the detection value of the sensor 40. Note that when the irradiator 10 emits electromagnetic waves other than light, the sensor 40 has an element that detects electromagnetic waves of that wavelength.

[0024] Figure 2 is a diagram for explaining the light irradiation range by the movable reflection unit 20 and the position of the sensor 40, and corresponds to the A-A cross section of Figure 1. As described above, the movable reflection unit 20 moves the light from the irradiator 10. If the range where light can be irradiated by the movable reflection unit 20 is defined as the movable range α1, the range used for the measurement by the measuring device 1 is a part of the movable range α1 (hereinafter referred to as the measurement range α2). Specifically, the control unit 30 causes the irradiator 10 to emit light at the timing when the movable reflection unit 20 reflects light toward the measurement range α2, and does not cause the irradiator 10 to emit light at the timing when the movable reflection unit 20 reflects light outside the measurement range α2. Therefore, even if the sensor 40 is provided, it does not affect the measurement by the measuring device 1.

[0025] Also, in the example shown in FIG. 2, the control unit 30 moves the light periodically in the first direction (H direction) and at the same time also moves it periodically in the second direction (V direction) orthogonal to the first direction. The first direction corresponds to the first rotation axis of the movable reflecting part 20, and the second direction corresponds to the second rotation axis of the movable reflecting part 20. And the movement period in the first direction is shorter than the movement period in the second direction. For example, among the signals input to the movable reflecting part 20, the control unit 30 uses a sine wave for the control signal for controlling the movement in the first direction (H direction), and for the control signal for controlling the movement in the second direction (V direction), a signal with a longer period than the above-mentioned sine wave (for example, a sawtooth wave) is used. For this reason, as shown in FIG. 2, the light moves periodically in the H direction (horizontal direction) in FIG. 2 and gradually moves in the V direction (horizontal direction). As a result, the movable range α1 becomes substantially rectangular.

[0026] Also, in the example shown in FIG. 2, the sensor 40 is a line sensor. And the direction in which the sensor 40 extends, that is, the longitudinal direction of the sensor 40, is the second direction. The length of the sensor 40 is shorter than the side in the second direction of the measurement range α2 in the plane including the sensor 40. However, the length of the sensor 40 is not limited to this.

[0027] Note that a plurality of sensors 40 may be provided. In the example shown in this figure, the sensors 40 are provided along each of the two sides extending in the second direction of the measurement range α2 shown in FIG. 2. When the sensor 40 is shorter than the side of the measurement range α2, it is preferable that the two sensors 40 are provided at diagonal positions.

[0028] FIG. 3 is a diagram for explaining a method of setting the movement range of the movable reflecting part 20 by the control unit 30. Specifically, FIG. 3(A) is a diagram showing the relative positions of the light from the irradiator 10 and the sensor 40 in the plane including the sensor 40, and FIG. 3(B) is a diagram showing an example of the output from the sensor 40. In FIG. 3(B), the horizontal axis indicates the inclination of the movable mirror of the movable reflecting part 20.

[0029] The control unit 30 causes the irradiator 10 to emit light intermittently at regular intervals. For this reason, as shown in Fig. 3(A), the position S of the center of the light irradiated from the irradiator 10 gradually moves in the first direction (H direction). Here, the regular interval may be an interval in time or an interval (distance) in space.

[0030] The light from the irradiator 10 has a certain spread when passing through the plane including the sensor 40. For this reason, the output of the sensor 40 has a certain magnitude even when the position S does not overlap with the sensor 40. Specifically, as shown in Fig. 3(B), when the position S overlaps with the sensor 40, the output of the sensor 40 becomes the largest, and as the position S moves away from the sensor 40, the output of the sensor 40 rapidly decreases.

[0031] Here, the amplitude of the movable reflection unit 20 may change due to various factors even when the drive signal is not changed. For this reason, even after the measuring device 1 is mounted on the moving body, it is necessary to be able to correct the amplitude of the movable reflection unit 20.

[0032] In the present embodiment, the amplitude of the movable reflection unit 20 is corrected using the detection value of the sensor 40 when the light is irradiated to the first position Sa located in front of the sensor 40 in the first direction, that is, the first detection value, and the detection value of the sensor 40 when the light is irradiated to the second position Sb located behind the sensor 40 in the first direction, that is, the second detection value. For example, the light emission timing of the irradiator 10 is determined in advance with reference to the case where the movable reflection unit 20 is at the reference position, for example, the inclination angle is 0°. Specifically, the light emission timing of the irradiator 10 is determined for each of the timing when it should be at the first position Sa and the timing when it should be at the position of the second position Sb. This timing is determined in advance, for example, before the measuring device 1 is mounted on the moving body, and is stored in the storage medium of the control unit 30 in advance. Then, the amplitude of the movable reflection unit 20 is corrected so that the detection values (the first detection value and the second detection value) of the sensor 40 at each timing satisfy the reference.

[0033] The criteria here may be, for example, that the magnitude of the first detection value is within the reference range and the magnitude of the second detection value is also within the reference range, or that the difference between the first detection value and the second detection value is within the reference range (for example, not exceeding the reference value). In the former case, the reference range of the first detection value may be the same as or different from the reference range of the second detection value.

[0034] A specific example of this amplitude correction will be specifically described with reference to FIGS. 4 and 5. In these figures, the left side is the center side of the movable range α1, and the right side is the edge side of the movable range α1. As shown in FIG. 4, the positions of the first position Sa and the second position Sb are defined to be opposite to each other with respect to the sensor 40 when the amplitude of the movable reflecting portion 20 is normal. And when the amplitude of the movable reflecting portion 20 is normal, the first detection value and the second detection value are the same.

[0035] Here, as shown in FIG. 5(A), consider the case where the amplitude of the movable reflecting portion 20 becomes larger than the setting. Generally, since the time required for one cycle of the movable reflecting portion 20 is constant even when the amplitude of the movable reflecting portion 20 changes, when the amplitude of the movable reflecting portion 20 increases, both the first position Sa and the second position Sb move outward (the right side in FIG. 5). For this reason, the first detection value becomes larger than the reference, and the second detection value becomes smaller than the reference. Also, the value obtained by subtracting the second detection value from the first detection value is a positive value and is larger than the reference. When the first detection value and the second detection value become like this, the control unit 30 reduces the moving range of the movable reflecting portion 20, for example, the amplitude.

[0036] Next, as shown in FIG. 5(B), consider the case where the amplitude of the movable reflecting portion 20 becomes smaller than the setting. In this case, both the first position Sa and the second position Sb move inward (the left side in FIG. 6). For this reason, the first detection value becomes smaller than the reference, and the second detection value becomes larger than the reference. Also, the value obtained by subtracting the second detection value from the first detection value is negative and is larger than the reference. When the first detection value and the second detection value become like this, the control unit 30 increases the moving range of the movable reflecting portion 20, for example, the amplitude.

[0037] FIG. 6 is a diagram showing a modified example of the processing of the output of the sensor 40 by the control unit 30. In the example shown in this figure, measurements are made at the first position Sa and the second position Sb in each of a plurality of cycles. By doing so, a plurality of first measurement values and a plurality of second measurement values are obtained. The control unit 30 integrates these plurality of first measurement values and also integrates the plurality of second measurement values. Then, the movement range of the movable reflection unit 20, for example, the amplitude, is controlled so that the difference between these integrated values satisfies the above-described reference. By doing so, since the measurement error of the sensor 40 is reduced by integration, the amplitude of the movable reflection unit 20 can be corrected with high accuracy. Note that the integration of the first measurement value and the integration of the second measurement value may be performed by a circuit different from the control unit 30.

[0038] FIG. 7 is a diagram showing a modified example of the first position Sa and the second position Sb. As described above, the control unit 30 periodically moves the light in the first direction (H direction) and at the same time periodically moves it in the second direction (V direction) orthogonal to the first direction. Therefore, it is preferable that the correction of the amplitude of the movable reflection unit 20 is performed in each of the first direction and the second direction.

[0039] In the first example, when correcting the amplitude in the first direction (H direction) in FIG. 7, S2 is used as the first position Sa and S4 is used as the second position Sb. In this case, in the width direction of the sensor 40, that is, in the first direction, the first position Sa, the center of the sensor 40, and the second position Sb are arranged in this order. In this case, the control unit 30 corrects the amplitude of the movable reflection unit 20 in the H direction so that the difference between the first detection value and the second detection value is equal to or less than the reference value.

[0040] Also, when correcting the amplitude in the second direction (V direction) in FIG. 7, S1 is used as the first position Sa and S3 is used as the second position Sb. In other words, the first position Sa is outside the sensor 40 in the direction (V direction) in which the sensor 40 extends and overlaps the sensor 40 in the width direction (H direction) of the sensor 40. Also, the second position Sb overlaps the sensor 40 in each of the V direction and the H direction. In this case, the control unit 30 corrects the amplitude in the V direction of the control unit 30 so that the second detection value is greater than or equal to the reference value more than the first detection value (second detection value >> first detection value).

[0041] Note that the sensors 40 are provided along each of two opposing sides of the measurement range α2. And the above-described correction is performed for each of the two sensors 40.

[0042] In the second example, S1 provided above one of the sensors 40 in the V direction is used as the first position Sa, and S5' provided below the other sensor 40 in the V direction is used as the second position Sb. In other words, the first position Sa and the second position Sb are located on the diagonal of the measurement range α2. In this case, the control unit 30 corrects the amplitude in the H direction and the amplitude in the V direction of the movable reflection unit 20 so that the difference between the first detection value and the second detection value becomes equal to or less than the reference value.

[0043] As described above, according to the present embodiment, the measuring device 1 has the sensor 40. The control unit 30 sets the swing range of the movable reflection unit 20 using the detection value (first detection value) of the sensor 40 when irradiating light on the first position Sa located in front of the sensor 40 in the first direction and the detection value (second detection value) of the sensor 40 when irradiating light on the second position Sb located behind the sensor 40 in the first direction. Thereby, even after the measuring device 1 is mounted on the moving body, the control unit 30 can correct the amplitude of the movable reflection unit 20.

[0044] (Modification 1) In the above-described embodiment, the timings at which the irradiator 10 should emit light, that is, the timings at which the irradiation direction of the movable reflecting portion 20 becomes the first position Sa and the second position Sb, are stored in the control unit 30 in advance. In this modification, a method for determining this timing will be described with reference to FIGS. 8(A) and 8(B).

[0045] The timings at which the first position Sa and the second position Sb are reached are determined using an external sensor 100 that is separate from the measuring device 1. Specifically, first, as shown in FIG. 8(A), with the movable reflecting portion 20 at the reference position, for example, with an inclination angle of 0°, light is emitted from the measuring device 1. In this state, the light from the measuring device 1 is made to enter the external sensor 100.

[0046] Next, the external sensor 100 is moved from the above-described position by a predetermined angle θ (for example, 10°) around the measuring device 1. Then, the signal input to the movable reflecting portion 20 is gradually changed. As a result, the angle of the movable reflecting portion 20 gradually changes, and accordingly, the direction of the light emitted from the measuring device 1 changes. The input signal to the movable reflecting portion 20 when light enters the external sensor 100 is treated as the signal when the light is directed at the above-described predetermined angle θ. The external writing device uses this signal to calculate the input signal to the movable reflecting portion 20 when the light emission direction of the measuring device 1 is at each angle, and writes information indicating the calculated signal into the storage medium of the control unit 30 of 1.

[0047] Note that the above-described processing is performed for each of the first direction (H direction) and the second direction (V direction).

[0048] Then, the control unit 30 changes the tilt direction of the movable reflection unit 20 by using the information written in the storage medium of the control unit 30, and detects the orientation of the movable reflection unit 20 when light is incident on the sensor 40. Thereby, the exact position of the sensor 40, that is, the tilt of the movable reflection unit 20 when light is incident, is specified. Then, the control unit 30 sets the timing to become the first position Sa and the timing to become the second position Sb based on this orientation. For example, the timing a predetermined time before the output of the sensor 40 becomes maximum is set as the timing to become the first position Sa, and the timing a predetermined time after the output of the sensor 40 becomes maximum is set as the timing to become the second position Sb.

[0049] There are errors in the position of the sensor 40 inside the measuring device 1, for example, due to installation. Also, even when the same signal is input to a plurality of measuring devices 1, variations occur in the tilt angle of the movable reflection unit 20 due to individual differences in the measuring devices 1. For this reason, it is difficult to accurately recognize the position of the sensor 40. In contrast, in this modification example, a signal for controlling the tilt angle of the movable reflection unit 20 is set using the external sensor 100. For this reason, the position of the sensor 40 can be accurately detected, and as a result, the first position Sa and the second position Sb can be set at appropriate positions.

[0050] (Modification Example 2) The amplitude of the movable reflection unit 20 may change over time. In this case, the control unit 30 of the measuring device 1 needs to reset the first position Sa and the second position Sb. In this modification example, a method for resetting the first position Sa and the second position Sb will be described.

[0051] FIG. 9 is a flowchart showing a first example of a method for resetting the first position Sa and the second position Sb. First, the control unit 30 causes the irradiator 10 to emit light at each of the provisional first position Sa and the second position Sb (for example, the first position Sa and the second position Sb set at that time) (step S10). Then, the output of the sensor 40 when the irradiator 10 emits light at the first position Sa and the output of the sensor 40 when the irradiator 10 emits light at the second position Sb are each measured (step S20). If both of the two outputs are within the reference range (step S30: Yes), the control unit 30 ends the process.

[0052] On the other hand, when at least one of the first position Sa and the second position Sb is outside the reference range, the position of the one that is outside among the first position Sa and the second position Sb is corrected (step S40). Specifically, when the output of the sensor 40 at the first position Sa is greater than the reference range, the first position Sa is moved away from the second position Sb. When the output of the sensor 40 at the first position Sa is less than the reference range, the first position Sa is moved closer to the second position Sb. Similarly, when the output of the sensor 40 at the second position Sb is greater than the reference range, the second position Sb is moved away from the first position Sa. When the output of the sensor 40 at the second position Sb is less than the reference range, the second position Sb is moved closer to the first position Sa. Thereafter, the process shown in step S30 is performed again.

[0053] FIG. 10 is a flowchart showing a second example of a method for resetting the first position Sa and the second position Sb. FIG. 11 is a diagram for schematically explaining the method shown in FIG. 10. First, the control unit 30 causes the irradiator 10 to emit light at each of the provisional first position Sa and the second position Sb (for example, the first position Sa and the second position Sb set at that time) (step S110). Then, the output of the sensor 40 when the irradiator 10 emits light at the first position Sa and the output of the sensor 40 when the irradiator 10 emits light at the second position Sb are each measured (step S120).

[0054] And when the difference is equal to or less than the second reference value (step S130: No), as shown in FIG. 11(A), there is a high possibility that both the first position Sa and the second position Sb are located on the measurement range α2 side with respect to the sensor 40. Therefore, the control unit 30 increases the amplitude of the movable reflecting unit 20 (step S140), and then returns to step S120.

[0055] On the other hand, when the difference is equal to or greater than the reference value (step S130: Yes), as shown in FIG. 11(B), there is a high possibility that the first position Sa and the second position Sb sandwich the sensor 40. Therefore, the same processing as steps S20 to S40 in FIG. 9 is performed. Specifically, when both of the two outputs are within the reference range (step S150: Yes), the control unit 30 ends the processing. On the other hand, when at least one of the first position Sa and the second position Sb is out of the reference range, the position that is out of the range among the first position Sa and the second position Sb is corrected (step S160). A specific example of this correction is the same as step S40 in FIG. 9. After that, each of the output of the sensor 40 when the irradiator 10 emits light at the first position Sa and the output of the sensor 40 when the irradiator 10 emits light at the second position Sb is measured (step S170), and the process returns to step S150.

[0056] As described above, according to this modification example, the control unit 30 can reset the first position Sa and the second position Sb even if the amplitude of the movable reflecting unit 20 changes over time. Therefore, the control unit 30 can accurately correct the amplitude of the movable reflecting unit 20.

[0057] As described above, the embodiments and examples have been described with reference to the drawings, but these are examples of the present invention, and various configurations other than the above can also be adopted.

[0058] This application claims priority based on Japanese Patent Application No. 2018-029827 filed on February 22, 2018, and incorporates the entire disclosure thereof herein.

Explanation of Reference Numerals

[0059] 1 Measuring device 10 Irradiator 20 movable reflecting part 30 control unit 40 sensor 100 external sensor

Claims

1. A measuring device for detecting the relative position of an object located around a moving body with respect to the moving body, comprising: An irradiator that irradiates electromagnetic waves that are light; A movable reflector that can change its inclination around an axis and reflects the electromagnetic waves; A control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic waves along a first direction; A sensor capable of receiving the electromagnetic waves; wherein: The sensor is disposed at a position through which the electromagnetic waves pass when the electromagnetic waves move in the first direction; The control unit: Sets the amplitude of the inclination of the movable reflector such that a first detection value, which is the detection value of the sensor when the electromagnetic waves are irradiated at a first timing, and a second detection value, which is the detection value of the sensor when the electromagnetic waves are irradiated at a second timing, satisfy a criterion; The first timing and the second timing are timings defined with reference to a time when the inclination of the movable reflector is in a reference state; The first timing is defined such that the center of the irradiation range of the electromagnetic waves is located in front of the sensor in the moving direction of the electromagnetic waves along the first direction, and a part of the irradiation range of the electromagnetic waves overlaps with the sensor; The second timing is defined such that the center of the irradiation range of the electromagnetic waves is located behind the sensor in the moving direction of the electromagnetic waves along the first direction, and a part of the irradiation range of the electromagnetic waves overlaps with the sensor. Measuring device.

2. A measuring device for detecting the relative position of an object located around a moving body with respect to the moving body, comprising: An irradiator that irradiates electromagnetic waves that are light; A movable reflector that can change its inclination around an axis and reflects the electromagnetic waves; A control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic waves along a first direction; A sensor capable of receiving the electromagnetic waves; wherein: The electromagnetic waves are pulsed light; The sensor is disposed at a position through which the electromagnetic waves pass when the electromagnetic waves move in the first direction; The control unit: Sets the amplitude of the inclination of the movable reflector using a first detection value, which is the detection value of the sensor when the electromagnetic waves are irradiated at a first timing, and a second detection value, which is the detection value of the sensor when the electromagnetic waves are irradiated at a second timing. The first timing and the second timing are timings defined with reference to the time when the inclination of the movable reflecting part is in a reference state. The first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. Measuring device.

3. In the measuring device according to claim 1 or 2, The control unit controls the movable reflecting part to periodically move the electromagnetic wave in the first direction, and at the same time, also periodically move it in a second direction different from the first direction. The period of the electromagnetic wave in the first direction is shorter than the period of the electromagnetic wave in the second direction. The sensor is a line sensor and extends in the second direction. In the first direction, the center of the irradiation range of the electromagnetic wave at the first timing, the sensor, and the center of the irradiation range of the electromagnetic wave at the second timing are arranged in this order. Measuring device.

4. A measuring device for detecting the relative position of an object located around a moving body with respect to the moving body, An irradiator that irradiates an electromagnetic wave that is light; A movable reflecting part that can change its inclination around an axis and reflects the electromagnetic wave; A control unit that controls the irradiator and periodically changes the inclination of the movable reflecting part to move the electromagnetic wave along the first direction; A sensor capable of receiving the electromagnetic wave; Comprising: The sensor is arranged at a position where the electromagnetic wave passes when the electromagnetic wave moves in the first direction. The control unit sets the amplitude of the inclination of the movable reflecting part using a first detection value that is the detection value of the sensor when the electromagnetic wave is irradiated at the first timing and a second detection value that is the detection value of the sensor when the electromagnetic wave is irradiated at the second timing. The first timing and the second timing are timings defined with reference to the time when the inclination of the movable reflecting part is in a reference state. The first timing is determined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is determined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The control unit controls the movable reflector to periodically move the electromagnetic wave in the first direction and at the same time periodically move it in a second direction different from the first direction. The period of the electromagnetic wave in the first direction is shorter than the period of the electromagnetic wave in the second direction. The sensor is a line sensor and extends in the second direction. The center of the irradiation range of the electromagnetic wave at the first timing is located outside the sensor in the second direction and overlaps with the sensor in the first direction. A measuring device in which the center of the irradiation range of the electromagnetic wave at the second timing overlaps with the sensor in each of the first direction and the second direction.

5. In the measuring device according to any one of claims 1 to 4, During measurement, the control unit moves the electromagnetic wave within a measurement range narrower than the movable range of the electromagnetic wave by the movable reflector. A measuring device in which the sensor is located within the movable range and outside the measurement range.

6. A measuring device for detecting the relative position of an object located around the moving body with respect to the moving body, An irradiator that irradiates an electromagnetic wave that is light, A movable reflector that can change its inclination around an axis and reflects the electromagnetic wave, A control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic wave along the first direction, A sensor capable of receiving the electromagnetic wave, Comprising The sensor is arranged at a position through which the electromagnetic wave passes when the electromagnetic wave moves in the first direction. The control unit sets the amplitude of the inclination of the movable reflector using a first detection value that is the detection value of the sensor when the electromagnetic wave is irradiated at a first timing and a second detection value that is the detection value of the sensor when the electromagnetic wave is irradiated at a second timing. The first timing and the second timing are timings defined with reference to the time when the inclination of the movable reflecting part is in a reference state, the first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor, the second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor, the control unit is a measuring device that, when setting the amplitude of the inclination of the movable reflecting part, makes the difference between the first detection value and the second detection value be equal to or less than a first reference value.

7. In the measuring device according to claim 6, when the control unit sets the amplitude of the inclination of the movable reflecting part, it expands the amplitude of the movable reflecting part so that the difference between the first detection value and the second detection value is equal to or greater than a second reference value, and then determines the first timing and the second timing so that the first detection value and the second detection value satisfy the criteria. Measuring device.

8. In the measuring device according to any one of claims 1 to 7, the first timing and the second timing are changeable. Measuring device.

9. An irradiator that irradiates electromagnetic waves that are light, a movable reflecting part that can change its inclination around an axis and reflects the electromagnetic waves, a control unit that controls the irradiator and periodically changes the inclination of the movable reflecting part to move the electromagnetic waves along a first direction, and a sensor that can receive the electromagnetic waves. A control method used by a measuring device, the measuring device detects the relative position of an object located around the moving body when the moving body is used as a reference, the sensor is arranged at a position through which the electromagnetic wave passes when the electromagnetic wave moves in the first direction, including a setting step of setting the amplitude of the inclination of the movable reflecting part so that a first detection value, which is the detection value of the sensor when the electromagnetic wave is irradiated at a first timing, and a second detection value, which is the detection value of the sensor when the electromagnetic wave is irradiated at a second timing, satisfy a criterion, the first timing and the second timing are timings defined with reference to the time when the inclination of the movable reflecting part is in a reference state. The first timing is determined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is determined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. A control method. **Claim 10** A control method used by a measuring device including an irradiator that irradiates electromagnetic waves that are light, a movable reflector that can change its inclination around an axis and reflects the electromagnetic waves, a control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic waves along a first direction, and a sensor that can receive the electromagnetic waves, wherein the measuring device detects the relative position of an object located around the moving body when the moving body is used as a reference. The electromagnetic wave is pulsed light. The sensor is disposed at a position through which the electromagnetic wave passes when the electromagnetic wave moves in the first direction. The method includes a setting step of setting the amplitude of the inclination of the movable reflector using a first detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing and a second detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing. The first timing and the second timing are timings determined based on the state where the inclination of the movable reflector is in a reference state. The first timing is determined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is determined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. A control method. **Claim 11** An irradiator that irradiates electromagnetic waves that are light, a movable reflector that can change its inclination about an axis and reflects the electromagnetic waves, a control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic waves along a first direction, and a sensor that can receive the electromagnetic waves. A control method used by a measuring device comprising: The measuring device detects the relative position of an object located around the moving body when the moving body is used as a reference. The sensor is disposed at a position through which the electromagnetic wave passes when the electromagnetic wave moves in the first direction. A setting step of setting the amplitude of the inclination of the movable reflector using a first detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing and a second detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing. The first timing and the second timing are timings determined based on when the inclination of the movable reflector is in a reference state. The first timing is determined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction of the electromagnetic wave along the first direction, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is determined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction of the electromagnetic wave along the first direction, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. By controlling the movable reflector, the electromagnetic wave is periodically moved in the first direction and at the same time is also periodically moved in a second direction different from the first direction. The period of the electromagnetic wave in the first direction is shorter than the period of the electromagnetic wave in the second direction. The sensor is a line sensor and extends in the second direction. The center of the irradiation range of the electromagnetic wave at the first timing is located outside the sensor in the second direction and overlaps with the sensor in the first direction. A control method in which the center of the irradiation range of the electromagnetic wave at the second timing overlaps with the sensor in each of the first direction and the second direction. Claim 12 An irradiator that irradiates electromagnetic waves that are light, a movable reflector that can change its inclination about an axis and reflects the electromagnetic waves, a control unit that controls the irradiator and periodically changes the inclination of the movable reflector to move the electromagnetic waves along a first direction, and a sensor that can receive the electromagnetic waves, a control method used by a measuring device including: The measuring device detects the relative position of an object located around the moving body when the moving body is used as a reference. The sensor is disposed at a position through which the electromagnetic waves pass when the electromagnetic waves move in the first direction. A setting step of setting the amplitude of the inclination of the movable reflector using a first detection value that is a detection value of the sensor when the electromagnetic waves are irradiated at a first timing and a second detection value that is a detection value of the sensor when the electromagnetic waves are irradiated at a second timing. The first timing and the second timing are timings determined based on when the inclination of the movable reflector is in a reference state. The first timing is determined such that the center of the irradiation range of the electromagnetic waves is located in front of the sensor in the moving direction of the electromagnetic waves along the first direction, and a part of the irradiation range of the electromagnetic waves overlaps with the sensor. The second timing is determined such that the center of the irradiation range of the electromagnetic waves is located behind the sensor in the moving direction of the electromagnetic waves along the first direction, and a part of the irradiation range of the electromagnetic waves overlaps with the sensor. A control method in which, when setting the amplitude of the inclination of the movable reflector, the difference between the first detection value and the second detection value is made to be equal to or less than a first reference value.

13. A program for causing a computer to function as a control unit that controls a measuring device, The measuring device detects the relative position of an object located around the moving body when the moving body is used as a reference, an irradiator that irradiates electromagnetic waves that are light, a movable reflector that can change its inclination about an axis and reflects the electromagnetic waves, a sensor that can receive the electromagnetic waves, and includes The sensor is disposed at a position through which the electromagnetic waves pass when the electromagnetic waves move in a first direction. The computer has a function of controlling the irradiator and periodically changing the inclination of the movable reflector to move the electromagnetic waves along a first direction. A function of setting the amplitude of the inclination of the movable reflection part so that a first detection value, which is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing, and a second detection value, which is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing, satisfy a standard. To provide. The first timing and the second timing are timings defined based on the state where the inclination of the movable reflection part is in a reference state. The first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. A program.

14. A program for causing a computer to function as a control unit for controlling a measuring device, The measuring device Detects the relative position of an object located around the moving body with respect to the moving body. An irradiator that irradiates an electromagnetic wave that is light. A movable reflection part that can change its inclination around an axis and reflects the electromagnetic wave. A sensor capable of receiving the electromagnetic wave. Comprising The electromagnetic wave is pulsed light. The sensor is arranged at a position where the electromagnetic wave passes when the electromagnetic wave moves in a first direction. In the computer, A function of moving the electromagnetic wave along the first direction by controlling the irradiator and periodically changing the inclination of the movable reflection part. A function of setting the amplitude of the inclination of the movable reflection part using a first detection value, which is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing, and a second detection value, which is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing. To provide. The first timing and the second timing are timings defined based on the state where the inclination of the movable reflection part is in a reference state. The first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. The second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor. Program. [

15. ] A program for causing a computer to function as a control unit for controlling a measuring device, The measuring device is detects the relative position of an object located around the moving body when the moving body is used as a reference, an irradiator that can change its inclination about an axis and irradiates an electromagnetic wave that is light, a movable reflecting portion that reflects the electromagnetic wave, a sensor that can receive the electromagnetic wave, and includes The sensor is disposed at a position where the electromagnetic wave passes when the electromagnetic wave moves in a first direction, In the computer, a function of moving the electromagnetic wave along the first direction by controlling the irradiator and periodically changing the inclination of the movable reflecting portion; a function of setting the amplitude of the inclination of the movable reflecting portion using a first detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing and a second detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing; a function of periodically moving the electromagnetic wave in the first direction and simultaneously periodically moving the electromagnetic wave in a second direction different from the first direction by controlling the movable reflecting portion; is provided with The first timing and the second timing are timings defined based on the state where the inclination of the movable reflecting portion is in a reference state, The first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor, The second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction along the first direction of the electromagnetic wave, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor, In the measuring device, The sensor is a line sensor and extends in the second direction, The center of the irradiation range of the electromagnetic wave at the first timing is located outside the sensor in the second direction and overlaps with the sensor in the first direction. The center of the irradiation range of the electromagnetic wave at the second timing overlaps with the sensor in each of the first direction and the second direction. A program in which the period of the electromagnetic wave in the first direction is shorter than the period of the electromagnetic wave in the second direction.

16. A program for causing a computer to function as a control unit that controls a measuring device, The measuring device detects the relative position of an object located around the moving body with respect to the moving body, an irradiator that irradiates an electromagnetic wave that is light, a movable reflector that can change its inclination around an axis and reflects the electromagnetic wave, a sensor capable of receiving the electromagnetic wave, and includes The sensor is disposed at a position where the electromagnetic wave passes when the electromagnetic wave moves in a first direction, In the computer, a function of moving the electromagnetic wave along the first direction by controlling the irradiator and periodically changing the inclination of the movable reflector; a function of setting the amplitude of the inclination of the movable reflector using a first detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a first timing and a second detection value that is a detection value of the sensor when the electromagnetic wave is irradiated at a second timing; a function of making the difference between the first detection value and the second detection value be equal to or less than a first reference value when setting the amplitude of the inclination of the movable reflector; and has The first timing and the second timing are timings defined with reference to when the inclination of the movable reflector is in a reference state, The first timing is defined such that the center of the irradiation range of the electromagnetic wave is located in front of the sensor in the moving direction of the electromagnetic wave along the first direction, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor, A program in which the second timing is defined such that the center of the irradiation range of the electromagnetic wave is located behind the sensor in the moving direction of the electromagnetic wave along the first direction, and a part of the irradiation range of the electromagnetic wave overlaps with the sensor.

17. A storage medium storing the program according to any one of claims 13 to 16.

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