Laser irradiation apparatus

Abstract

To provide a laser irradiation apparatus that can perform high-definition irradiation with a laser beam.SOLUTION: A laser irradiation apparatus includes: a first head in which a plurality of first laser elements for each emitting a laser beam in a first direction toward an irradiation object is arrayed along a second direction intersecting the first direction; a movement mechanism for changing a relative position between the first head and the irradiation object along a third direction intersecting the first and second directions; and a first rotation mechanism for rotating the first head about a first rotation axis along the first direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a laser irradiation device. [Background technology]

[0002] 2. Description of the Related Art Processing devices that irradiate a laser beam to process an object to be processed and recording devices that perform recording, such as printing, on an object to be recorded are known.

[0003] For example, Patent Document 1 describes a three-dimensional printer device having a printer head configured with a light-emitting element array in which laser elements are arranged, a liquid tank that contains a photocurable liquid that hardens when exposed to light emitted from the printer head, and a stage section on which a molded product formed by hardening when exposed to light is attached. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-154714 Summary of the Invention [Problem to be solved by the invention]

[0005] In the laser irradiation device for irradiating the above-mentioned laser light, it is desired to perform high-definition laser irradiation. [Means for solving the problem]

[0006] One aspect of the laser irradiation device according to the present invention is a first head in which a plurality of first laser elements, each of which emits laser light in a first direction toward an irradiation target, are arranged along a second direction intersecting the first direction; a movement mechanism that changes the relative position of the first head and the irradiation object along a third direction that intersects with the first direction and the second direction; a first rotation mechanism that rotates the first head around a first rotation axis along the first direction; It has. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view schematically showing a laser irradiation device according to a first embodiment. [Figure 2] FIG. 1 is a cross-sectional view schematically showing a laser irradiation device according to a first embodiment. [Figure 3] FIG. 2 is a bottom view schematically showing the laser irradiation device according to the first embodiment. [Figure 4] FIG. 2 is a bottom view schematically showing the laser irradiation device according to the first embodiment. [Figure 5] 5 is a flowchart for explaining the processing of a control unit of the laser irradiation device according to the first embodiment. [Figure 6] FIG. 10 is a perspective view schematically showing a laser irradiation device according to a modified example of the first embodiment. [Figure 7] FIG. 10 is a cross-sectional view schematically showing a laser irradiation device according to a second embodiment. [Figure 8] FIG. 10 is a bottom view schematically showing the laser irradiation device according to the second embodiment. [Figure 9] FIG. 10 is a bottom view schematically showing the laser irradiation device according to the second embodiment. [Figure 10] FIG. 10 is a bottom view schematically showing a laser irradiation device according to a first modified example of the second embodiment. [Figure 11] FIG. 10 is a bottom view schematically showing a laser irradiation device according to a second modified example of the second embodiment. [Figure 12] FIG. 10 is a bottom view schematically showing a laser irradiation device according to a second modified example of the second embodiment. [Figure 13] FIG. 10 is a perspective view schematically showing a laser irradiation device according to a third embodiment. [Figure 14] FIG. 10 is a cross-sectional view schematically showing a laser irradiation device according to a third embodiment. [Figure 15] 10 is a flowchart for explaining the processing of a control unit of a laser irradiation device according to the second embodiment. [Figure 16]FIG. 11 is a perspective view schematically showing a laser irradiation device according to a modified example of the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the content of the present invention as defined in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0009] 1. First embodiment 1.1. Laser irradiation device Configuration First, a laser irradiation device according to the first embodiment will be described with reference to the drawings. Fig. 1 is a perspective view that schematically shows the laser irradiation device 100 according to the first embodiment. Fig. 2 is a cross-sectional view that schematically shows the laser irradiation device 100 according to the first embodiment. Note that Figs. 1 and 2 illustrate an X-axis, a Y-axis, and a Z-axis as three mutually orthogonal axes. The X-axis direction and the Y-axis direction are, for example, horizontal directions. The Z-axis direction is, for example, vertical directions.

[0010] 1 and 2, the laser irradiation device 100 includes, for example, a head 10, a rotation mechanism 20, a movement mechanism 30, an optical element 40, a stage 50, and a control unit 60. The laser irradiation device 100 is, for example, a laser processing device. The laser irradiation device 100 is, for example, a metal 3D printer that uses selective laser melting (SLM).

[0011] 2, the head 10 has, for example, a substrate 12 and a laser element array 14. Here, FIG.

[0012] For the sake of simplicity, Fig. 3 does not show any components other than the head 10, the shaft member 22 of the rotation mechanism 20, and the irradiation object 2 placed on the stage 50. In Fig. 3, the shaft member 22 and the irradiation object 2 are indicated by dashed lines. This also applies to Fig. 4 and Figs. 8 to 12, which will be described later.

[0013] The substrate 12 supports the laser element array 14. The material of the substrate 12 is not particularly limited. The substrate 12 has, for example, a shape extending in the Y-axis direction. The substrate 12 determines, for example, the size of the head 10. As shown in FIG. 3, the size W1 of the head 10 in the Y-axis direction is, for example, larger than the size W2 of the irradiation target 2 in the Y-axis direction. In the illustrated example, the size of the substrate 12 in the Y-axis direction is the size W1 of the head 10 in the Y-axis direction.

[0014] 2, the laser element array 14 is provided below the substrate 12. The laser element array 14 has a shape extending in the Y-axis direction, for example. The size of the laser element array 14 in the Y-axis direction is larger than the size W2 of the irradiation object 2 in the Y-axis direction, for example.

[0015] The laser element array 14 has laser elements 16. As shown in FIG. 2, the laser elements 16 irradiate the irradiation object 2 with laser light L in a first direction D1. In the illustrated example, the first direction D1 is the -Z-axis direction. In the example shown in FIG. 3, the shape of the laser elements 16 is quadrangular. The laser elements 16 are, for example, photonic crystal surface emitting lasers (PCSELs) that utilize the photonic crystal effect. The laser light L emitted from the laser elements 16, which are PCSELs, has a narrow radiation angle and high optical output.

[0016] A plurality of laser elements 16 are provided. The number of the plurality of laser elements 16 is not particularly limited. The plurality of laser elements 16 are arranged along a second direction D2 that intersects with the first direction D1. In the illustrated example, the second direction D2 is the +Y-axis direction. The length of the row of the plurality of laser elements 16 in the Y-axis direction is, for example, greater than the size W2 of the irradiation object 2 in the Y-axis direction.

[0017] As shown in FIG. 2, the rotation mechanism 20 supports the substrate 12. Here, FIG. 4 is a bottom view schematically showing the laser irradiation device 100. As shown in FIGS. 3 and 4, the rotation mechanism 20 rotates the head 10 around a rotation axis R along the Z axis. The rotation axis R is, for example, parallel to the Z axis. When viewed from the Z axis direction, the center of the laser element array 14 overlaps with the rotation axis R, for example. The rotation mechanism 20 has, for example, a shaft member 22, a holding member 24, and a motor (not shown).

[0018] The shaft member 22 supports the substrate 12. As shown in FIG. 2, the shaft member 22 is provided between the substrate 12 and the holding member 24. The shaft member 22 is connected to, for example, a motor. The motor is controlled by the control unit 60. The shaft member 22 rotates when driven by the motor. As the shaft member 22 rotates, the head 10 rotates.

[0019] The holding member 24 is supported by a rail 32 of the movement mechanism 30. The holding member 24 is provided between the shaft member 22 and the rail 32. The holding member 24 holds the shaft member 22 rotatably.

[0020] The movement mechanism 30 uses a motor (not shown) to change the relative position between the head 10 and the stage 50 along a third direction D3 that intersects with the first direction D1 and the second direction D2. This changes the relative position between the head 10 and the irradiation target 2. In the example shown in FIG. 3, the second direction D2 and the third direction D3 are perpendicular to each other. In the example shown in FIG. 4, the second direction D2 is inclined with respect to the third direction D3. When viewed from the first direction D1, the pitch P of the multiple laser elements 16 in the direction perpendicular to the third direction D3 is smaller when the second direction D2 is inclined with respect to the third direction D3 as shown in FIG. 4 than when the second direction D2 and the third direction D3 are perpendicular to each other as shown in FIG. 3.

[0021] The "pitch P of the laser elements 16" is the distance between the centers of adjacent laser elements 16 in the Y-axis direction. If the planar shape of the laser elements 16 is circular, the "center of the laser elements 16" refers to the center of the circle; if the planar shape of the laser elements 16 is not circular, the "center of the laser elements 16" refers to the center of the smallest encompassing circle. For example, if the planar shape of the laser elements 16 is polygonal, the center of the laser elements 16 is the center of the smallest circle that contains the polygon; if the planar shape of the laser elements 16 is elliptical, the center of the smallest circle that contains the ellipse.

[0022] The head angle θ, which is the intersection angle between the second direction D2 and the third direction D3, is larger when the second direction D2 is inclined with respect to the third direction D3 as shown in Fig. 4 than when the second direction D2 and the third direction D3 are perpendicular to each other as shown in Fig. 3. In the example shown in Fig. 4, the size of the head 10 in the Y-axis direction is larger than the size of the irradiation target 2 in the Y-axis direction.

[0023] The "head angle θ" refers to the angle between an axis along the arrangement direction of the multiple laser elements 16 and an axis along the relative movement direction of the head 10 and the object to be irradiated 2 by the movement mechanism 30, and is greater than or equal to 90° and less than 180°.

[0024] The movement mechanism 30 has, for example, a rail 32 and a motor (not shown). The motor is controlled by the control unit 60. In the illustrated example, the movement mechanism 30 moves the head 10 along the −X-axis direction. The movement mechanism 30 does not move the stage 50.

[0025] As shown in FIG. 2, the rail 32 supports the holding member 24. The rail 32 has a shape that extends, for example, in the X-axis direction. The movement mechanism 30 moves the head 10 along the rail 32. Specifically, the movement mechanism 30 moves the holding member 24 to move the head 10. The movement mechanism 30 may further include an encoder (not shown).

[0026] The laser light L emitted from the laser element 16 is incident on the optical element 40. The optical element 40 is provided between the head 10 and the irradiation object 2. The optical element 40, for example, focuses the laser light L from the laser element 16. The optical element 40 is, for example, a lens array. It is preferable that the focal point of the lens constituting the optical element 40 is positioned on the irradiation object 2. This can shorten the irradiation time of the irradiation object 2. A plurality of lenses constituting the optical element 40 are provided, for example, corresponding to the number of laser elements 16.

[0027] The irradiation object 2 is supplied and placed on the stage 50. The irradiation object 2 is provided between the head 10 and the stage 50. The irradiation object 2 is, for example, an object to be processed by the laser light L from the laser element 16. The irradiation object 2 is, for example, a metal powder that can be melted by the laser light L. The irradiation object 2 is supplied by a supply machine (not shown).

[0028] The stage 50 includes, for example, a stage base 52, an elevator mechanism 54, and a housing 56 that houses the stage base 52 and the elevator mechanism 54.

[0029] An irradiation object 2 is provided on the stage base 52. The head 10 irradiates the irradiation object 2 on the stage base 52 with laser light L, forming a molten portion 2a and a non-melted portion 2b in the irradiation object 2. The molten portion 2a is melted by irradiation with the laser light L, and then cooled and solidified. The non-melted portion 2b is not irradiated with the laser light L. Therefore, the non-melted portion 2b is not solidified and remains as metal powder.

[0030] The elevator mechanism 54 supports the stage base 52. In the illustrated example, the elevator mechanism 54 moves the stage base 52 in the -Z-axis direction. As the stage base 52 moves, the irradiation object 2 moves. After the stage base 52 has moved in the -Z-axis direction, the supply machine again supplies the irradiation object 2 for the second layer. The irradiation object 2 for the second layer is supplied on top of the irradiation object 2 for the first layer. Then, the head 10 irradiates the laser light L onto the irradiation object 2 for the second layer.

[0031] As described above, by repeating the series of steps of supplying irradiation objects 2 by the supply device, irradiating the laser light L by the head 10, and moving the stage base 52 by the elevator mechanism 54, a laminate consisting of multiple layers of irradiation objects 2 can be formed. Then, the unmelted portions 2b of the laminate are removed by a removal device (not shown), thereby forming a three-dimensional object of a predetermined shape. Examples of the removal device include an air blower and a brush.

[0032] The control unit 60 is configured, for example, by a computer having a processor, a main memory device, and an input / output interface for inputting and outputting signals from and to the outside. The control unit 60 performs various functions, for example, by the processor executing a program loaded into the main memory device. Specifically, the control unit 60 controls the laser element 16, the rotation mechanism 20, the movement mechanism 30, and the elevator mechanism 54. Note that the control unit 60 may be configured not by a computer but by a combination of multiple circuits.

[0033] 1, the laser irradiation device 100 may have a calibration device 70. The calibration device 70 may have a light receiving element that receives the laser light L. If the calibration device 70 is provided, even if the characteristics of the laser element 16 deviate from the design values, the deviation can be detected by the calibration device 70 and fed back to the processing.

[0034] 1.1.2. Operation Next, the operation of the laser irradiation device 100 according to the first embodiment will be described with reference to the drawings. Specifically, the processing of the control unit 60 of the laser irradiation device 100 according to the first embodiment will be described with reference to the drawings. Fig. 5 is a flowchart for explaining the processing of the control unit 60.

[0035] For example, the user operates an operation unit (not shown) to output a processing start signal for starting processing to the control unit 60. The operation unit is configured with, for example, a mouse, keyboard, touch panel, etc. The control unit 60 starts processing when it receives the processing start signal.

[0036] First, as shown in FIG. 5, the control unit 60 performs a data acquisition process to acquire modeling data for forming a three-dimensional object (step S1).

[0037] The modeling data includes information regarding, for example, the material of the metal powder that constitutes the irradiation object 2, the number of layers of the irradiation object 2, the moving speed of the head 10, the on / off state of the plurality of laser elements 16, and the like.

[0038] The modeling data is created, for example, by loading shape data into slicer software installed on a computer connected to the laser irradiation device 100. The shape data is data representing the target shape of a three-dimensional object created using three-dimensional CAD (Computer Aided Design) software, three-dimensional CG (Computer Graphics) software, or the like. As the shape data, for example, data in STL (Standard Triangulated Language) format or AMF (Additive Manufacturing File Format) is used. The slicer software divides the target shape of the three-dimensional object into layers of a predetermined thickness and creates modeling data for each layer. The modeling data is expressed in G-code, M-code, or the like. The control unit 60 acquires the modeling data from a computer connected to the laser irradiation device 100 or a recording medium such as a USB (Universal Serial Bus) memory.

[0039] Next, the control unit 60 performs a head angle determination process to determine the head angle θ in the second direction D2 with respect to the third direction D3 based on the acquired modeling data (step S2).

[0040] Specifically, the control unit 60 determines the pitch P of the multiple laser elements 16 from the modeling data, and determines the head angle θ based on the determined pitch P. For example, if the determined pitch P is equal to or greater than a predetermined value, the control unit 60 controls the rotation mechanism 20 to set the head angle θ to 90°, as shown in FIG. 3. On the other hand, if the determined pitch P is less than the predetermined value, the control unit 60 controls the rotation mechanism 20 to set the head angle θ to greater than 90°, as shown in FIG. 4. If the determined pitch P is less than the predetermined value, the control unit 60 increases the head angle θ as the pitch P decreases. The predetermined value may be stored in a storage unit (not shown).

[0041] Next, the control unit 60 controls the laser element 16 and the moving mechanism 30 to perform a processing process in which the relative positions of the laser element 16 and the irradiation object 2 are changed while irradiating the irradiation object 2 with the laser light L (step S3).

[0042] Specifically, the control unit 60 drives the motor of the movement mechanism 30 to move the laser element 16 in the −X-axis direction while causing the laser element 16 to irradiate the laser light L based on the modeling data. This allows the irradiation object 2 to be processed. As shown in FIG. 2, a melted portion 2a and a non-melted portion 2b are formed in the irradiation object 2.

[0043] Next, as shown in FIG. 5, the control unit 60 performs a determination process to determine whether or not formation of all layers of the irradiation target 2 has been completed based on the modeling data (step S4).

[0044] If it is determined that the formation of all layers of the irradiation object 2 has not been completed ("NO" in step S4), the control unit 60 returns the process to step S2. The control unit 60 repeats steps S2 to S4 until it determines in step S4 that the formation of all layers of the irradiation object 2 has been completed.

[0045] On the other hand, if the control unit 60 determines that the formation of all layers of the irradiation object 2 has been completed ("YES" in step S4), the control unit 60 performs a non-melted portion removal process in which the removal device removes the non-melted portion 2b of the layered body made up of the irradiation object 2 (step S5). This forms a three-dimensional object. Then, the control unit 60 ends the process.

[0046] The unmelted portion 2b may be removed manually by the user. In this case, the control unit 60 ends the process after determining that the formation of all layers of the irradiation object 2 has been completed.

[0047] 1.1.3. Effects The laser irradiation device 100 includes a head 10 in which a plurality of laser elements 16, each of which irradiates laser light L in a first direction D1 toward an irradiation object 2, are arranged along a second direction D2 intersecting with the first direction D1, a moving mechanism 30 which changes the relative position between the head 10 and the irradiation object 2 along a third direction D3 which intersects with the first direction D1 and the second direction D2, and a rotation mechanism 20 which rotates the head 10 around a rotation axis R along the first direction D1.

[0048] Therefore, in the laser irradiation device 100, it is possible to change the pitch P of the multiple laser elements 16 in the direction perpendicular to the third direction D3 when viewed from the first direction D1, thereby enabling high-definition laser irradiation.

[0049] In the laser irradiation device 100, when the second direction D2 and the third direction D3 are perpendicular to each other, the size W1 of the head 10 in the second direction D2 is larger than the size W2 of the irradiation object 2 in the second direction D2. Therefore, the laser irradiation device 100 can irradiate the entire surface of the irradiation object 2 with the laser.

[0050] In the laser irradiation device 100, the irradiation object 2 is an object to be processed by the laser light L from the laser element 16. Therefore, the laser irradiation device 100 can process the irradiation object 2 with high precision.

[0051] In the laser irradiation device 100, the laser element 16 is a PCSEL. Therefore, in the laser irradiation device 100, the radiation angle of the laser light L from the laser element 16 can be narrowed. This allows the irradiation time of the irradiation object 2 to be shortened.

[0052] 1.2. Modified laser irradiation device Next, a laser irradiation device according to a modification of the first embodiment will be described with reference to the drawings. Fig. 6 is a cross-sectional view that schematically shows a laser irradiation device 110 according to a modification of the first embodiment.

[0053] Hereinafter, in the laser irradiation device 110 relating to a modified example of the first embodiment, components having the same functions as the components of the laser irradiation device 100 relating to the first embodiment described above will be given the same symbols, and detailed explanations thereof will be omitted.

[0054] In the above-described laser irradiation device 100, as shown in FIG. 1, the head 10 was moved in the +X-axis direction during the processing.

[0055] 6, in the laser irradiation device 110, the head 10 is fixed to a fixed portion 112. The laser irradiation device 110 has, for example, the fixed portion 112 and a base 114.

[0056] The fixed portion 112 is provided across the rail 32. The head 10 does not move during processing. The head 10 is spaced apart from the moving mechanism 30 and is positioned above the moving mechanism 30.

[0057] The base 114 supports the rails 32 of the movement mechanism 30. The rails 32 are provided on the base 114. In the laser irradiation device 110, the stage 50 is provided on the rails 32. In the processing, the control unit 60 controls the movement mechanism 30 to move the stage 50 in the +X-axis direction. As the stage 50 moves, the irradiation object 2 moves in the +X-axis direction. This changes the relative position between the laser element 16 and the irradiation object 2.

[0058] 2. Second embodiment 2.1. Laser irradiation device Next, a laser irradiation device according to a second embodiment will be described with reference to the drawings. Fig. 7 is a cross-sectional view schematically showing a laser irradiation device 200 according to the second embodiment. Figs. 8 and 9 are bottom views schematically showing the laser irradiation device 200 according to the second embodiment. For convenience, Fig. 7 omits illustration of members other than the head 10, the rotation mechanism 20, the movement mechanism 30, and the support 202. Furthermore, Figs. 8 and 9 and Figs. 10 to 12, which will be described later, omit illustration of the substrate 12.

[0059] Hereinafter, in the laser irradiation device 200 according to the second embodiment, components having the same functions as the components of the laser irradiation device 100 according to the first embodiment described above will be given the same reference numerals, and detailed explanations thereof will be omitted.

[0060] In the above-described laser irradiation device 100, as shown in FIGS. 2 to 4, one head 10 is provided.

[0061] In contrast, the laser irradiation device 200 is provided with a plurality of heads 10, as shown in Figures 7 to 9. In the illustrated example, four heads 10 are provided, but the number is not particularly limited. In the illustrated example, the plurality of heads 10 are arranged along the Y-axis direction.

[0062] The heads 10 have a rectangular shape with chamfered corners when viewed in the Z-axis direction. This reduces the possibility of adjacent heads 10 colliding with each other when the heads 10 are rotated. In the illustrated example, the adjacent heads 10 are spaced apart from each other.

[0063] The first head 10a and the second head 10b are adjacent to each other among the multiple heads 10. In the illustrated example, the first head 10a is located furthest from the multiple heads 10 in the −Y axis direction.

[0064] A plurality of rotation mechanisms 20 are provided corresponding to the plurality of heads 10. The number of the plurality of heads 10 is the same as the number of the plurality of rotation mechanisms 20. The rotation axes R of the plurality of heads 10 are arranged along the Y-axis direction.

[0065] The first head 10a has a first laser element 16a as the laser element 16 and a first rotation mechanism 20a as the rotation mechanism 20. The first rotation mechanism 20a rotates the first head 10a around a first rotation axis Ra as the rotation axis R.

[0066] The second head 10b has a second laser element 16b as the laser element 16 and a second rotation mechanism 20b as the rotation mechanism 20. The multiple second laser elements 16b are arranged along a direction intersecting the first direction D1 and the third direction D3. The second rotation mechanism 20b rotates the second head 10b around a second rotation axis Rb as the rotation axis R.

[0067] The laser irradiation device 200 has a support 202. The support 202 is connected to a rail 32. The support 202 supports a plurality of rotation mechanisms 20. The support 202 supports a plurality of heads 10 via the plurality of rotation mechanisms 20. The support 202 is provided between the plurality of rotation mechanisms 20 and the rail 32. In the illustrated example, the support 202 has a shape that extends in the Y-axis direction.

[0068] The movement mechanism 30 changes the relative position between the support 202 and the irradiation object 2. In the illustrated example, the movement mechanism 30 moves the support 202 along the +X-axis direction. This changes the relative position between the head 10 and the irradiation object 2. The movement mechanism 30 moves the multiple heads 10 simultaneously in the +X-axis direction.

[0069] In the example shown in FIG. 8, the head angle θ is 90° in each of the multiple heads 10. The second direction D2, which is the arrangement direction of the laser elements 16, is the same as each other and is the +Y-axis direction. The second direction D2 and the third direction D3 are perpendicular to each other. The multiple heads 10 are arranged along the second direction D2. The size of the multiple heads 10 in the second direction D2 is smaller than the size of the irradiation object 2. The first head 10a and the second head 10b are lined up along the second direction D2. The size W1a of the first head 10a in the second direction D2 and the size W1b of the second head 10b in the second direction D2 shown in FIG. 7 are smaller than the size W2 of the irradiation object 2 in the second direction D2 shown in FIG. 8.

[0070] In the example shown in FIG. 9, the head angle θ is greater than 90° in each of the multiple heads 10. The arrangement direction of the first laser elements 16a in the first head 10a and the arrangement direction of the second laser elements 16b in the second head 10b are different from each other. The head angles θ are different from each other in the first head 10a and the second head 10b. The arrangement directions of the laser elements 16 in the multiple heads 10 may be different from each other. When viewed from the third direction D3, the first head 10a and the second head 10b do not overlap.

[0071] The laser irradiation device 200 includes a second head 10b in which a plurality of second laser elements 16b, each of which irradiates a laser beam L in a first direction D1 toward an irradiation target 2, are arranged along a direction intersecting the first direction D1 and the third direction D3; a second rotation mechanism 20b that rotates the second head 10b around a second rotation axis Rb along the first direction D1; and a support 202 that supports the first head 10a via the first rotation mechanism 20a and the second head 10b via the second rotation mechanism 20b. The movement mechanism 30 changes the relative position between the support 202 and the irradiation target 2. Therefore, the laser irradiation device 200 can change the arrangement direction of the laser elements 16 in the first head 10a and the second head 10b. This allows the pitch P of the plurality of laser elements 16 to be changed between the portion of the irradiation target 2 irradiated by the first head 10a and the portion of the irradiation target 2 irradiated by the second head 10b. For example, a portion requiring more precise laser irradiation can be irradiated with a head 10 having a smaller pitch P.

[0072] In the laser irradiation device 200, when the second direction D2 and the third direction D3 are orthogonal to each other, the multiple second laser elements 16b are arranged along the second direction D2, the first head 10a and the second head 10b are lined up along the second direction D2, and the size W1a of the first head 10a in the second direction D2 and the size W1b of the second head 10b in the second direction D2 are smaller than the size W2 of the irradiation target 2 in the second direction D2. Therefore, in the laser irradiation device 200, the first head 10a and the second head 10b can be arranged so as not to collide with each other.

[0073] 2.2. Modified laser irradiation device 2.2.1. First variant Next, a laser irradiation device according to a first modified example of the second embodiment will be described with reference to the drawings. Fig. 10 is a bottom view schematically showing a laser irradiation device 210 according to the first modified example of the second embodiment.

[0074] Hereinafter, in the laser irradiation device 210 according to the first modified example of the second embodiment, components having the same functions as the components of the laser irradiation device 200 according to the second embodiment described above will be denoted by the same reference numerals, and detailed description thereof will be omitted. This also applies to the laser irradiation device according to the second modified example of the second embodiment described later.

[0075] In the above-described laser irradiation device 200, as shown in FIG. 9, the first head 10a and the second head 10b do not overlap when viewed from the third direction D3.

[0076] 10, in the laser irradiation device 210, the first head 10a and the second head 10b overlap when viewed from the third direction D3. When viewed from the third direction D3, a portion of the laser element array 14 of the first head 10a and a portion of the laser element array 14 of the second head 10b overlap. Adjacent heads 10 of the multiple heads 10 overlap each other when viewed from the third direction.

[0077] In the laser irradiation device 210, the first head 10a and the second head 10b overlap when viewed from the third direction D3. Therefore, in the laser irradiation device 210, it is possible to eliminate a gap between the first head 10a and the second head 10b when viewed from the third direction D3.

[0078] 2.2.2. Second variant Next, a laser irradiation device according to a second modified example of the second embodiment will be described with reference to the drawings. Figures 11 and 12 are bottom views schematically showing a laser irradiation device 220 according to the second modified example of the second embodiment.

[0079] In the above-described laser irradiation device 200, as shown in FIGS. 8 and 9, the plurality of heads 10 are arranged along the Y-axis direction.

[0080] In contrast, in the laser irradiation device 220, as shown in FIGS. 11 and 12, the multiple heads 10 are arranged in a direction inclined with respect to the X-axis and Y-axis. The rotation axes R of the multiple heads 10 are arranged in a direction inclined with respect to the X-axis and Y-axis. In the example shown in FIG. 11, the multiple heads 10 are arranged in a second direction D2. The support 202 extends in a direction inclined with respect to the X-axis and Y-axis. In the example shown in FIG. 11, adjacent heads 10 are in contact with each other. In the example shown in FIG. 12, adjacent heads 10 are spaced apart from each other.

[0081] When viewed from the Z-axis direction, the first rotation axis Ra of the first head 10a and the second rotation axis Rb of the second head 10b are aligned in a direction inclined with respect to the third direction D3. That is, when viewed from the Z-axis direction, the first rotation axis Ra and the second rotation axis Rb are not aligned along the third direction D3, and are not aligned along a direction perpendicular to the third direction D3. The multiple rotation axes R are arranged in a direction inclined with respect to the third direction D3.

[0082] In the laser irradiation device 220, the first rotation axis Ra and the second rotation axis Rb are aligned along a direction inclined with respect to the third direction D3 when viewed from the first direction D1. Therefore, in the laser irradiation device 220, the first head 10a and the second head 10b can be aligned along a direction inclined with respect to the third direction D3.

[0083] 3. Third embodiment 3.1. Laser irradiation device Next, a laser irradiation device according to a third embodiment will be described with reference to the drawings. Fig. 13 is a perspective view schematically showing a laser irradiation device 300 according to the third embodiment. Fig. 14 is a cross-sectional view taken along line XIV-XIV in Fig. 13, schematically showing the laser irradiation device 300 according to the third embodiment. For convenience, Fig. 14 shows a simplified representation of the head 10.

[0084] Hereinafter, in the laser irradiation device 300 according to the third embodiment, components having the same functions as the components of the laser irradiation device 100 according to the first embodiment described above will be given the same reference numerals, and detailed explanations thereof will be omitted.

[0085] In the above-described laser irradiation device 100, the irradiation object 2 is an object to be processed by the laser light L from the laser element 16, as shown in FIGS.

[0086] 13 and 14, in the laser irradiation device 300, the irradiation object 2 is a recording object on which recording is performed by the laser light L from the laser element 16. The laser irradiation device 300 is a recording device.

[0087] The laser irradiation device 300 has, for example, a support rod 302. In the illustrated example, the support rod 302 has a shape that extends in the X-axis direction. The head 10 is supported by the support rod 302. The head 10 is fixed to the support rod 302.

[0088] The movement mechanism 30 is spaced apart from the head 10. The movement mechanism 30 is located on the −Z axis direction of the head 10. The movement mechanism 30 has, for example, a transport unit 34 and a support unit 36.

[0089] The transport unit 34 transports the irradiation object 2 toward the support unit 36. In the illustrated example, the transport unit 34 transports the irradiation object 2 in the -X axis direction. The irradiation object 2 is wrapped around the transport unit 34. The transport unit 34 is, for example, a roller that supplies the irradiation object 2 to the support unit 36. The shape of the irradiation object 2 is, for example, a sheet.

[0090] The support unit 36 is provided, for example, in the -X axis direction of the transport unit 34. The support unit 36 supports the irradiation object 2 transported from the transport unit 34 when recording on the irradiation object 2. The support unit 36 is, for example, a platen roller. In the illustrated example, the transport unit 34 and the support unit 36 rotate around the Y axis. The rotation of the transport unit 34 and the support unit 36 is controlled, for example, by the control unit 60. By rotating the transport unit 34 and the support unit 36, the movement mechanism 30 moves the irradiation object 2 in the -X axis direction.

[0091] During recording on the irradiation target 2, the irradiation target 2 is positioned between the head 10 and the support 36. The irradiation target 2 includes, for example, a recording sheet 4 and an ink ribbon 6 provided on the recording sheet 4. As shown in FIG. 14, the ink ribbon 6 includes, for example, an ink layer 7 made of heat-melting ink and a base 8 provided on the ink layer 7. The base 8 is, for example, transparent. When laser light L is irradiated from the head 10, the irradiated portion of the ink layer 7 melts and is transferred to the recording sheet 4. This allows recording, such as printing, on the recording sheet 4. The laser irradiation device 300 is, for example, a thermal transfer thermal printer. For ease of explanation, the recording sheet 4 and the ink ribbon 6 are shown separated from each other in FIG. 14, but the recording sheet 4 and the ink ribbon 6 are usually in contact with each other.

[0092] 15 is a flowchart for explaining the processing of the control unit 60 of the laser irradiation device 300. For example, the user operates an operation unit (not shown) to output a processing start signal for starting processing to the control unit 60. The control unit 60 starts processing when it receives the processing start signal.

[0093] First, as shown in FIG. 15, the control unit 60 performs a data acquisition process to acquire print data generated by a user (step S11).

[0094] Next, the control unit 60 performs a head angle determination process (step S12). The head angle determination process is basically the same as the head angle determination process of the laser irradiation device 100 described above.

[0095] Next, the control unit 60 controls the laser element 16 and the moving mechanism 30 to perform a recording process in which the relative positions of the laser element 16 and the irradiation object 2 are changed while irradiating the irradiation object 2 with the laser light L (step S15).

[0096] Specifically, the control unit 60 drives the conveying unit 34 of the movement mechanism 30 to move the irradiation object 2 in the -X-axis direction while causing the laser element 16 to irradiate the laser light L based on the print data. This allows recording on the irradiation object 2.

[0097] Then, the control unit 60 ends the process.

[0098] In the laser irradiation device 300, the object 2 is a recording object on which recording is performed by the laser light L from the laser element 16. Therefore, the laser irradiation device 300 can record on the object 2 with high precision.

[0099] 3.2. Modified laser irradiation device Next, a laser irradiation device according to a modification of the third embodiment will be described with reference to the drawings. Figure 16 is a perspective view that schematically shows a laser irradiation device 310 according to a modification of the third embodiment.

[0100] Hereinafter, in the laser irradiation device 310 according to a modified example of the third embodiment, components having the same functions as the components of the laser irradiation device 300 according to the third embodiment described above will be given the same symbols, and detailed descriptions thereof will be omitted.

[0101] The laser irradiation device 310 differs from the above-described laser irradiation device 300 in that it is a receipt printer. The laser irradiation device 310 is installed at the checkout counter of a store such as a supermarket, convenience store, or restaurant. The laser irradiation device 310 prints an image on the irradiation object 2 in accordance with the transaction performed at the checkout counter and issues a receipt. The irradiation object 2 is made of paper, for example. The irradiation object 2 may also be made of polyethylene (PE), polyethylene terephthalate (PET), or polypropylene (PP).

[0102] As shown in FIG. 16, the laser irradiation device 310 includes, for example, a storage section 320 and a cutter 330.

[0103] The storage unit 320 stores the irradiation target 2 wound in a roll, the head 10, the rotation mechanism 20, the movement mechanism 30, the support rod 302, and the cutter 330. As shown in FIG. 16 , the storage unit 320 has an openable cover 322. The cover 322 is opened when the user presses down a lever 324. With the cover 322 open, the user can replenish or replace the irradiation target 2 wound in a roll. The cover 322 has an outlet 326 for discharging the irradiation target 2 after printing. Furthermore, the storage unit 320 has a power switch 328 for switching the power of the laser irradiation device 310 on and off.

[0104] Cutter 330 is provided at a position corresponding to outlet 326. Cutter 330 cuts the printed irradiation object 2. In this way, a receipt is produced. The shape of cutter 330 is not particularly limited as long as it can cut irradiation object 2.

[0105] The use of the laser irradiation device according to the present invention is not particularly limited, and may be, for example, a laser cleaner that removes rust and the like from metal using laser light, or a laser annealing device that heats the surface of metal or resin using laser light.

[0106] The material of the object to be irradiated is not particularly limited, and may be, for example, a resin such as a photocurable resin, wood, glass, paper, leather, or a mineral.

[0107] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiments and modifications can be combined as appropriate.

[0108] The present invention includes configurations that are substantially the same as the configurations described in the embodiments, for example, configurations with the same functions, methods, and results, or configurations with the same purpose and effects. The present invention also includes configurations that replace non-essential parts of the configurations described in the embodiments. The present invention also includes configurations that achieve the same effects or purposes as the configurations described in the embodiments. The present invention also includes configurations that add publicly known technology to the configurations described in the embodiments.

[0109] The following can be derived from the above-described embodiment and modifications.

[0110] One aspect of the laser irradiation device is a first head in which a plurality of first laser elements, each of which emits laser light in a first direction toward an irradiation target, are arranged along a second direction intersecting the first direction; a movement mechanism that changes the relative position of the first head and the irradiation object along a third direction that intersects with the first direction and the second direction; a first rotation mechanism that rotates the first head around a first rotation axis along the first direction; It has.

[0111] This laser irradiation device can perform high-definition laser irradiation.

[0112] In one embodiment of the laser irradiation device, When the second direction and the third direction are orthogonal to each other, the size of the first head in the second direction may be larger than the size of the irradiation object in the second direction.

[0113] This laser irradiation device can irradiate the entire surface of the irradiation object with laser.

[0114] In one embodiment of the laser irradiation device, a second head in which a plurality of second laser elements, each of which irradiates a laser beam in the first direction toward the irradiation object, are arranged along a direction intersecting the first direction and the third direction; a second rotation mechanism that rotates the second head around a second rotation axis along the first direction; a support that supports the first head via the first rotation mechanism and supports the second head via the second rotation mechanism; and The movement mechanism may change the relative position between the support and the irradiation object.

[0115] According to this laser irradiation device, the pitch of the plurality of laser elements can be changed between the portion of the irradiation object irradiated by the first head and the portion of the irradiation object irradiated by the second head.

[0116] In one embodiment of the laser irradiation device, When the second direction and the third direction are perpendicular to each other, The plurality of second laser elements are arranged along the second direction, the first head and the second head are aligned along the second direction, The size of the first head in the second direction and the size of the second head in the second direction may be smaller than the size of the irradiation object in the second direction.

[0117] According to this laser irradiation device, the first head and the second head can be arranged so as not to collide with each other.

[0118] In one embodiment of the laser irradiation device, When viewed from the third direction, the first head and the second head may overlap.

[0119] According to this laser irradiation device, it is possible to eliminate the gap between the first head and the second head.

[0120] In one embodiment of the laser irradiation device, When viewed from the first direction, the first rotation axis and the second rotation axis may be aligned along a direction inclined with respect to the third direction.

[0121] According to this laser irradiation device, the first head and the second head can be aligned along a direction inclined with respect to the third direction.

[0122] In one embodiment of the laser irradiation device, The object to be irradiated may be an object to be processed by the laser light from the first laser element.

[0123] This laser irradiation device can process the object to be irradiated with high precision.

[0124] In one embodiment of the laser irradiation device, The irradiation object may be a recording object on which recording is performed by the laser light from the first laser element.

[0125] This laser irradiation device allows accurate recording on the irradiation target.

[0126] In one embodiment of the laser irradiation device, The first laser element may be a photonic crystal surface emitting laser.

[0127] According to this laser irradiation device, the radiation angle of the laser light from the laser element can be narrowed. [Explanation of symbols]

[0128] 2...irradiation object, 2a...melted portion, 2b...non-melted portion, 4...recording sheet, 6...ink ribbon, 7...ink layer, 8...base, 10...head, 10a...first head, 10b...second head, 12...substrate, 14...laser element array, 16...laser element, 16a...first laser element, 16b...second laser element, 20...rotation mechanism, 20a...first rotation mechanism, 20b...second rotation mechanism, 22...shaft member, 30...movement mechanism, 32...rail, 34...Transport unit, 36...Support unit, 40...Optical element, 50...Stage, 52...Stage base, 54...Elevator mechanism, 56...Housing, 60...Control unit, 70...Calibration device, 100, 110...Laser irradiation device, 112...Fixing unit, 114...Base, 200, 210, 220, 300 Laser irradiation device, 302...Support rod, 320...Storage unit, 322...Cover, 324...Lever, 326...Discharge port, 328...Power switch, 330...Cutter

Claims

1. a first head in which a plurality of first laser elements, each of which emits laser light in a first direction toward an irradiation target, are arranged along a second direction intersecting the first direction; a movement mechanism that changes a relative position between the first head and the irradiation object along a third direction that intersects with the first direction and the second direction; a first rotation mechanism that rotates the first head around a first rotation axis along the first direction; A laser irradiation device having:

2. In claim 1, A laser irradiation device, wherein when the second direction and the third direction are perpendicular to each other, the size of the first head in the second direction is larger than the size of the irradiation object in the second direction.

3. In claim 1, a second head in which a plurality of second laser elements, each of which irradiates a laser beam in the first direction toward the irradiation object, are arranged along a direction intersecting the first direction and the third direction; a second rotation mechanism that rotates the second head around a second rotation axis along the first direction; a support that supports the first head via the first rotation mechanism and supports the second head via the second rotation mechanism; and The moving mechanism changes the relative position between the support and the object to be irradiated.

4. In claim 3, When the second direction and the third direction are perpendicular to each other, The plurality of second laser elements are arranged along the second direction, the first head and the second head are aligned along the second direction, A laser irradiation device, wherein the size of the first head in the second direction and the size of the second head in the second direction are smaller than the size of the irradiation object in the second direction.

5. In claim 3, The laser irradiation device, wherein the first head and the second head overlap when viewed from the third direction.

6. In claim 3, When viewed from the first direction, the first rotation axis and the second rotation axis are aligned along a direction inclined with respect to the third direction.

7. In claim 1, A laser irradiation device, wherein the irradiation object is an object to be processed by the laser light from the first laser element.

8. In claim 1, A laser irradiation device, wherein the irradiation object is a recording object on which recording is performed by the laser light from the first laser element.

9. In any one of claims 1 to 8, The laser irradiation device, wherein the first laser element is a photonic crystal surface-emitting laser.

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