Spectrometer and light emission control method for light source unit in spectrometer

Abstract

To provide a spectrometer and a light emission control method for a light source unit in the spectrometer which can perform wavelength calibration with high accuracy in a short time.SOLUTION: A spectrometer comprises spectrometers 13, 34, emission line light source units 14, 32 that emit emission lines for wavelength calibration, and second light source units 15, 33. The second light source units 15, 33 are arranged such that direct light from the second light source units 15, 33 is irradiated onto the emission line light source units 14, 32.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a spectroscopic device such as a spectrophotometer, and a method for controlling the light emission of a light source unit in the spectroscopic device. [Background technology]

[0002] Patent Document 1 discloses a spectroscopic device equipped with a spectroscope, a line light source unit that emits a line for wavelength calibration, and a measurement light source unit, in which the line light source unit and the measurement light source unit are each covered by individual partitions.

[0003] However, the spectroscopic device described in Patent Document 1 has the following problems. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 19 / 039024 Summary of the Invention [Problem to be solved by the invention]

[0005] That is, there is a problem that the emission of the emission line light source becomes unstable at the start of wavelength calibration, resulting in a decrease in calibration accuracy.

[0006] To address this issue, averaging is performed by taking multiple measurements to improve calibration accuracy. However, this averaging process creates a new problem: it takes time to calibrate the wavelength.

[0007] An object of the present invention is to provide a spectroscopic device that can perform highly accurate wavelength calibration in a short time, and a method for controlling the light emission of a light source unit in the spectroscopic device. [Means for solving the problem]

[0008] The inventors investigated the cause of the unstable emission of the emission line light source unit at the start of wavelength calibration and discovered that it is caused by a phenomenon known as the dark effect, which is a phenomenon in which, when the emission line light source unit for wavelength calibration is placed in a dark area, it takes time for it to emit light after voltage application begins.

[0009] The present invention was made based on this finding, and the above object is achieved by the following means. (1) a spectrometer; an emission line light source unit that emits an emission line for wavelength calibration; a second light source unit; The second light source unit is disposed in a spectroscopic device such that direct light from the second light source unit is irradiated onto the emission line light source unit. (2) a spectrometer; an emission line light source unit that emits an emission line for wavelength calibration; a second light source unit; The second light source unit is a spectroscopic device that irradiates the emission line light source unit with light intensity such that the time from the start of driving of the emission line light source unit to the start of light emission is within one second. (3) The spectroscopic device according to the preceding paragraph 1 or 2, which is a spectrophotometer having a diffuse reflection surface on the inner wall. (4) The spectroscopic device according to the preceding paragraph 3, wherein the second light source unit is a light source unit for measuring an object to be measured or a light source unit for observing the surface of the object to be measured. (5) The spectroscopic device according to the preceding paragraph 4, wherein the second light source unit is adjacent to the emission line light source unit. (6) A spectroscopic device according to the preceding paragraph 3, which cites the preceding paragraph 2, wherein the second light source unit is a light source unit for measuring the object to be measured or a light source unit for observing the surface of the object to be measured, and the second light source unit irradiates light onto the emission line light source unit via the diffuse reflection surface. (7) The spectroscopic device according to the preceding paragraph 1 or 2, which is a device for measuring light source color. (8) The spectroscopic device according to the preceding paragraph 7, wherein the second light source unit is adjacent to the emission line light source unit. (9) A control unit is provided to control the illumination of the emission line light source unit and the second light source unit, 3. The spectroscopic device according to item 1 or 2, wherein the control unit turns on the second light source unit before performing wavelength calibration. (10) The spectrometer according to the above item 1 or 2, wherein wavelength calibration is performed using the emission line light source unit after white calibration. (11) A spectroscopic device including a spectroscope, an emission line light source unit that emits an emission line for wavelength calibration, and a second light source unit, A light emission control method for a light source unit in a spectroscopic device, which irradiates the emission line light source unit with direct light from the second light source unit before starting to drive the emission line light source unit. (12) A spectroscopic device including a spectroscope, an emission line light source unit that emits an emission line for wavelength calibration, and a second light source unit, A method for controlling the emission of light from a light source unit in a spectroscopic device, which irradiates light from the second light source unit onto the emission line light source unit before starting to drive the emission line light source unit, with a light intensity such that the time from starting to drive the emission line light source unit to starting to emit light is within one second. [Effects of the Invention]

[0010] One spectroscopic device according to the present invention includes a spectrometer, a line light source unit that emits a line for wavelength calibration, and a second light source unit. The second light source unit is arranged so that direct light from the second light source unit is irradiated onto the line light source unit. Therefore, the line light source unit can be irradiated with direct light from the second light source unit before wavelength calibration begins, thereby preventing the dark effect. As a result, the line light source unit can emit light stably in a short time when wavelength calibration begins, thereby improving calibration accuracy without performing averaging processing.

[0011] Another spectroscopic device according to the present invention includes a spectrometer, a line light source unit that emits a line for wavelength calibration, and a second light source unit. The second light source unit irradiates the line light source unit with light at a light intensity such that the time from the start of driving the line light source to the start of light emission is within one second before the line light source is driven. This light irradiation prevents the dark effect and enables the line light source unit to stably emit light within one second at the start of wavelength calibration, thereby improving calibration accuracy without the need for averaging processing.

[0012] In one of the light emission control methods for the light source unit in the spectroscopic device according to the present invention, the line emission light source unit is irradiated with direct light from the second light source unit before the line emission light source unit starts to be driven, thereby preventing the dark effect from occurring. As a result, the line emission light source unit can be made to emit light stably in a short time when wavelength calibration starts, thereby improving calibration accuracy without performing averaging processing.

[0013] Another method for controlling the light emission of a light source unit in a spectroscopic device according to the present invention includes irradiating the line light source unit with light from a second light source unit at a light intensity such that the time from the start of driving of the line light source to the start of light emission is within one second before the start of driving of the line light source. This light irradiation prevents the dark effect and enables the line light source unit to emit light stably within one second at the start of wavelength calibration, thereby improving calibration accuracy without performing averaging processing. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a cross-sectional view showing a schematic configuration of a spectrophotometer, which is a spectroscopic device according to a first embodiment of the present invention. [Figure 2] 2 is a flowchart showing a wavelength calibration sequence performed in the spectrophotometer of FIG. 1. [Figure 3] 3A is a waveform diagram of the driving voltage of the emission line light source unit when light from the second light source unit is not irradiated onto the emission line light source unit, and 3B is an enlarged view of the area between ba and the surrounding area in FIG. 3A. [Figure 4] 4A is a waveform diagram of the driving voltage of the emission line light source unit when light from the second light source unit is irradiated onto the emission line light source unit, and 4B is an enlarged view of the area between a and b in FIG. 4A and its surrounding area. [Figure 5] 10 is a graph showing the relationship between the time the emission line light source unit is left in a dark room and the time from the start of driving the emission line light source unit to the start of dielectric breakdown (start of light emission). [Figure 6] 6A to 6C are schematic diagrams of a spectrophotometer, which is a spectroscopic device according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [First embodiment] FIG. 1 is a cross-sectional view showing a schematic configuration of a spectrophotometer 1, which is a spectroscopic device according to one embodiment of the present invention.

[0016] This spectrophotometer 1 includes an integrating sphere 10, a condenser lens 11, an entrance slit 12, a spectroscope 13, a line light source unit 14, a measurement light source unit 15, an optical element 16, a control unit 17, and the like.

[0017] Integrating sphere 10 has a diffuse reflection surface on its inner wall. Measurement aperture 101 is formed at the bottom of integrating sphere 10, and object to be measured 2 or a measurement sample is placed facing this measurement aperture 101 for measurement. Integrating sphere 10 has through-hole 102 formed at a position offset by a predetermined angle from the central axis passing through the center of integrating sphere 10 and the center of measurement aperture 101. Collecting lens 11 is disposed outside this through-hole 102, and entrance slit 12 and spectroscope 13 are disposed further outside of collecting lens 11. Spectrometer 13 includes a dispersive element 131 such as a diffraction grating that disperses light according to wavelength, and a light-receiving sensor 132 that receives the dispersed light for each wavelength.

[0018] Light source housing section 18 is formed at the intermediate position in the height direction of integrating sphere 10, in a state in which it communicates with the interior of integrating sphere 10 via exit port 103. Light source housing section 18 houses emission line light source section 14 and measurement light source section (corresponding to second light source section) 15 adjacent to each other.

[0019] The emission line light source unit 14 is a light source used for wavelength calibration, and in this embodiment, a neon lamp is used. However, the present invention is not limited to a neon lamp, and any light source that emits an emission line of a known wavelength for wavelength calibration may be used. The measurement light source unit 15 is a light source used for measuring the object under test 2, and in this embodiment, a xenon lamp is used. However, the present invention is not limited to a xenon lamp. In the following description of the first embodiment, the emission line light source unit is also referred to as a neon lamp, and the measurement light source unit is also referred to as a xenon lamp.

[0020] The relative positions of the xenon lamp 15 and the neon lamp 14 are set so that when the xenon lamp 15 emits light, direct light from the xenon lamp 15 irradiates the neon lamp 14. Here, direct light includes light other than diffused light, and also includes specularly reflected light from the xenon lamp 15. Therefore, although not shown in the drawings, the relative positions of the xenon lamp 15 and the neon lamp 14 may be set so that light from the xenon lamp 15 is specularly reflected by a mirror or the like, and the specularly reflected light irradiates the neon lamp 14.

[0021] Optical element 16 is disposed in the vicinity of exit port 103 in light source housing 18. Therefore, light emitted from xenon lamp 15 and neon lamp 14 passes through optical element 16 and is emitted from exit port 103 into the interior of integrating sphere 10, as indicated by the bold arrows in Fig. 1. Optical element 16 is, for example, a stray light prevention filter.

[0022] The control unit 17 not only controls the entire spectrophotometer 1 but also controls the light emission of the xenon lamp 15 and the neon lamp 14 in this embodiment.

[0023] To measure the color of object 2 using spectrophotometer 1 shown in FIG. 1, xenon lamp 15 is turned on with object 2 facing measurement aperture 101 of integrating sphere 10. Light from xenon lamp 15 is emitted into integrating sphere 10 from exit aperture 103 via optical element 16. The emitted light is diffused after multiple reflections on the inner wall of integrating sphere 10. This diffused light is reflected by the surface of object 2. As shown by the thin arrows in FIG. 1, the reflected light from object 2 enters aperture 102, passes through condenser lens 11, and then enters spectroscope 13 via entrance slit 12. After entering, the light is dispersed into multiple wavelengths by dispersive element 131 of spectroscope 13. Each dispersed wavelength is received by light-receiving sensor 132. A measurement value is then calculated based on the amount of light received by light-receiving sensor 132.

[0024] Wavelength calibration is performed before measuring object 2 under test. During wavelength calibration, a white calibration plate is placed in measurement opening 101 of integrating sphere 10 as a measurement sample in place of object 2 under test. In this state, neon lamp 14 is turned on, and light from neon lamp 14 is emitted into integrating sphere 10 from exit port 103 via optical element 16. The emitted light is diffused after multiple reflections on the inner wall of integrating sphere 10. Subsequently, the diffused light reflected from the white calibration plate travels the same path as when measuring object 2 under test, enters spectroscope 13, is dispersed into predetermined wavelengths by dispersive element 131, and is received by light-receiving sensor 132. Wavelength calibration is then performed by comparing the wavelength obtained by light-receiving sensor 132 with the wavelength of the emission line emitted from neon lamp 14.

[0025] Next, a more detailed operation of the spectrophotometer 1 shown in FIG. 1 during wavelength calibration will be described with reference to the flowchart of FIG. 2 showing the wavelength calibration sequence.

[0026] The control unit 17 turns on the xenon lamp 15, which is the measurement light source (step S1), and then performs white calibration (step S2). Since the method of white calibration is well known, its explanation will be omitted. During white calibration, direct light from the xenon lamp 15 irradiates the neon lamp 14 located adjacent to it.

[0027] Next, the control unit 17 turns off the xenon lamp 15 (step S3), and then starts driving the neon lamp 14, which is an emission line light source for wavelength calibration, to light up (emit light) (step S4). After the neon lamp 14 is turned on, wavelength calibration is performed (step S5).

[0028] As described above, in this embodiment, before control unit 17 starts driving neon lamp 14 to light, direct light from xenon lamp 15 is irradiated onto neon lamp 14. The reason for irradiating neon lamp 14 with direct light from xenon lamp 15 is as follows.

[0029] That is, when the neon lamp 14 is placed in a dark area, a phenomenon known as the dark effect occurs, in which it takes time from the time when voltage is first applied to the neon lamp 14 until it starts emitting light, i.e., from the time when lighting drive begins until it starts emitting light. This dark effect causes the neon lamp 14 to emit light in an unstable manner, reducing the accuracy of wavelength calibration. Furthermore, if an averaging process based on multiple measurements is performed to compensate for the reduced accuracy of wavelength calibration, wavelength calibration takes time.

[0030] Therefore, before the control unit 17 starts driving the neon lamp 14, the xenon lamp 15 is turned on, and direct light from the xenon lamp 15 is irradiated onto the neon lamp 14. This prevents the neon lamp 14 from being driven while placed in a dark area, thereby preventing the dark effect. As a result, the light emitted by the neon lamp 14 stabilizes quickly, improving the accuracy of wavelength calibration. Furthermore, this, combined with the elimination of the need for averaging measurements taken multiple times, allows wavelength calibration to be performed in a short time.

[0031] The effect of irradiating the neon lamp 14 with direct light from the xenon lamp 15 before the control unit 17 starts driving the neon lamp 14 to light will be described with reference to FIGS. 3A, 3B, 4A, and 4B.

[0032] FIG. 3A is a waveform diagram of the drive voltage for neon lamp 14 when light from xenon lamp 15 is not irradiated onto neon lamp 14. FIG. 3B is an enlarged view of the area between a and b in FIG. 3A and its surrounding area. In these figures, the horizontal axis represents time and the vertical axis represents voltage. Line b indicates the timing when application of the drive voltage to neon lamp 14 begins, i.e., when drive begins. Line a indicates the timing when neon lamp 14 begins to light up (emit light). Furthermore, "Xe" indicates the drive voltage for xenon lamp 15, and "Ne" indicates the drive voltage for neon lamp 14.

[0033] In the example shown in Figures 3A and 3B, the neon lamp 14 was set to start operation after being left in a dark room for 10 minutes. The xenon lamp 15 was not lit. In Figures 3A and 3B, the time from timing b to timing a was 84.0 ms, the voltage difference (applied voltage) between timings b and a was 160 V, and the time for which the high voltage of 160 V was applied was 40 ms. In other words, applying a high voltage of 160 V for 40 ms initiated dielectric breakdown of the neon lamp 14, causing it to light up (emit light).

[0034] FIG. 4A is a waveform diagram of the drive voltage of neon lamp 14 when direct light from xenon lamp 15 is irradiated onto neon lamp 14. FIG. 4B is an enlarged view of the area between a and b in FIG. 4A and its surrounding area. In these figures, the horizontal axis represents time and the vertical axis represents voltage. Line b indicates the timing when application of drive voltage to neon lamp 14 begins, i.e., when drive begins. Line a indicates the timing when neon lamp 14 begins to light up (emit light). Furthermore, "Xe" indicates the drive voltage for xenon lamp 15, and "Ne" indicates the drive voltage for neon lamp 14.

[0035] In the example shown in Figures 4A and 4B, neon lamp 14 was set to start operation after being left in a dark room for two hours. Before starting operation, xenon lamp 15 was turned on for the period indicated as "Xe lighting period" in Figure 4A, and direct light from xenon lamp 15 was irradiated onto neon lamp 14. In Figures 4A and 4B, the time from timing b to timing a was 36.6 ms, and the voltage difference (applied voltage) between timings b and a was 110 V.

[0036] 3A and 3B and 4A and 4B, the following was found: By irradiating neon lamp 14 with direct light from xenon lamp 15 before the neon lamp 14 starts to operate, dielectric breakdown of neon lamp 14 is initiated stably at low voltage in a short time, and lighting (light emission) begins.

[0037] 5 is a graph showing the relationship between the time neon lamp 14 is left in the darkroom and the time from the start of operation of neon lamp 14 to the start of breakdown (start of light emission). The horizontal axis is the time left in the darkroom (Wait Time), and the vertical axis is the time from the start of operation to the start of breakdown (Break Down Start Time). The unit of time is "s" in all cases.

[0038] If the device is left in a dark room for approximately 90 minutes (5400 seconds), it takes approximately 1 second (1 second) from the start of operation until it starts emitting light, as shown by the black dot on the far right. The longer the device is left in the dark room, the longer it takes to start emitting light.

[0039] The light irradiation intensity and wavelength range of the neon lamp 14 should be set so that the time from when the neon lamp 14 starts to light emission is 1 second or less, preferably 0.1 seconds or less, and even more preferably 50 milliseconds or less when wavelength calibration is performed at a higher speed.

[0040] In this way, the control unit 17 irradiates the neon lamp 14 with light from the xenon lamp 15 to suppress the occurrence of the dark effect, and then starts driving the neon lamp 14 to light up the neon lamp 14. After lighting up, wavelength calibration is performed.

[0041] Although the spectrophotometer 1 according to one embodiment of the present invention has been described above, the configuration of the spectrophotometer 1 is not limited to the above embodiment.

[0042] For example, although the light from neon lamp 14 and xenon lamp 15 is emitted into integrating sphere 10 from the same exit port 103, different exit ports may be formed. However, light leakage due to multiple reflections within integrating sphere 10 is proportional to the area of the opening. For this reason, providing multiple exit ports for each light source increases light leakage and reduces the amount of light reaching neon lamp 14. As shown in FIG. 1, neon lamp 14 and xenon lamp 15 are placed in a single light source housing 18 and emit light from a single exit port 103. This reduces light leakage due to multiple reflections within integrating sphere 10, allowing neon lamp 14 to be efficiently irradiated with light from xenon lamp 15.

[0043] Furthermore, although the case where direct light from xenon lamp 15 is irradiated onto neon lamp 14 has been described, diffused light from xenon lamp 15 may also be irradiated onto neon lamp 14. However, irradiating neon lamp 14 with direct light from xenon lamp 15 can shorten the time until the neon lamp starts to emit light with a smaller amount of radiated light than irradiating diffused light. Note that direct light and diffused light may also be irradiated onto neon lamp 14 simultaneously.

[0044] Furthermore, the second light source unit that irradiates the neon lamp 14 with light is not limited to the measurement light source unit 15 as in the embodiment shown in FIG. 1 , but may be an observation light source unit. The observation light source unit is a light source unit that is used when a finder unit is provided in the spectrophotometer 1 and the position of the object 2 to be measured is confirmed through the finder unit. The observation light source unit may be a dedicated light source unit, or may be used in combination with the measurement light source unit 15. Furthermore, the second light source unit may be an LED lamp or the like.

[0045] Furthermore, the second light source unit may not be adjacent to the line light source unit 14, but may be located near the line light source unit 14. Alternatively, the second light source unit may be located so as to irradiate light onto the line light source unit 14 via a diffuse reflection surface. If the second light source unit is a light source with low directionality, such as a lamp, the inner wall of the light source housing unit 18 near each light source, including the vicinity of the light outlet 103, may be formed as a highly reflective diffuse reflection surface. In this case, too, the amount of light from each light source unit 14, 15 can be efficiently transmitted into the integrating sphere 10, thereby increasing the amount of light on the measurement surface of the object under test 2.

[0046] 1, the optical element 16 common to each of the light source units 14, 15 is disposed near the exit 103, and therefore the same effect of the optical element 16 can be obtained for each of the light source units 14, 15. As the optical element 16, a stray light prevention filter, an ultraviolet cut filter, a neutral density (ND) filter for adjusting the amount of light, or a diffusion plate or the like which can provide an effect of improving robustness may be used. [Second embodiment] 6A to 6C are schematic diagrams illustrating the configuration of a spectroscopic device according to a second embodiment of the present invention, namely, a spectroscopic radiance meter 3. This spectroscopic radiance meter 3 is used to measure the luminance of a light source 4 to be measured, such as a display.

[0047] The spectroradiometer 3 shown in FIGS. 6A to 6C includes a light receiving optical system 31 consisting of a plurality of lenses 311, 312 that transmit light emitted from the light source 4 to be measured, a line light source unit 32, a second light source unit 33, a spectroscope 34, a control unit 35, a reflecting member 36, etc.

[0048] Although not limited to, a neon lamp or the like is used as the bright line light source unit 32. Although not limited to, a xenon neon lamp, an LED lamp or the like is used as the second light source unit 33.

[0049] The bright line light source unit 32 and the second light source unit 33 are disposed adjacent to each other so that when the second light source unit 33 emits light, direct light from the second light source unit 33 is irradiated onto the bright line light source unit 32. Here, the direct light also includes specularly reflected light from the second light source unit 33. Therefore, although not shown in the drawings, the positional relationship between the second light source unit 33 and the bright line light source unit 32 may be set so that light from the second light source unit 33 is specularly reflected by a mirror or the like, and the specularly reflected light is irradiated onto the bright line light source unit 32. Alternatively, a configuration may be adopted in which diffused light from the second light source unit 33 is irradiated onto the bright line light source unit 32.

[0050] The spectroscope 34 includes a dispersive element 341 such as a diffraction grating that disperses light for each wavelength, and a light receiving sensor 342 that receives the dispersed light for each wavelength. An entrance slit may be provided upstream of the spectroscope 34.

[0051] The control unit 35 not only controls the entire spectroradiometer 3 , but also controls the light emission of the second light source unit 33 and the emission line light source unit 32 in this embodiment in particular.

[0052] The reflecting member 36 is driven by a driving device (not shown) at a position between the lenses 311 and 312 so as to move onto or away from the optical axis of the lenses 311 and 312. The reflecting member 36 moves away from the optical axis of the lenses 311 and 312 when measuring the color of the light source 4 under measurement. When calibrating the wavelength, the reflecting member 36 moves onto the optical axis of the lenses 311 and 312, reflects the light from the emission line light source unit 32, and guides it to the spectroscope 34.

[0053] Next, the operation of the spectroradiometer 3 shown in FIGS. 6A to 6C will be described.

[0054] 6A, when measuring the color of the light source 4 under measurement, the reflecting member 36 is retracted from the optical axis of the lenses 311 and 312. The light emitted from the light source 4 under measurement passes through the lenses 311 and 312 and enters the spectroscope 34, where it is dispersed into multiple wavelengths by the dispersive element 341 of the spectroscope 34. Each dispersed wavelength is received by the light-receiving sensor 342. A measurement value is then calculated based on the amount of light received by the light-receiving sensor 342.

[0055] Wavelength calibration is performed before measuring the light source 4 to be measured. Wavelength calibration is performed by turning on the emission line light source unit 32, but the control unit 35 turns on the second light source unit 33 before starting to drive the emission line light source unit 32, as shown in FIG. 6B. When the second light source unit 33 is turned on, direct light from the second light source unit 33 is irradiated onto the emission line light source unit 32. Irradiation of light from the second light source unit 33 prevents the dark effect that occurs when the emission line light source unit 32 is placed in a dark area.

[0056] The light irradiation intensity and wavelength range of the emission line light source unit 32 are preferably set so that the time from the start of driving of the emission line light source unit 32 to the start of light emission is 1 second or less, preferably 0.1 seconds or less, and even more preferably 50 ms or less when wavelength calibration is performed at a higher speed.

[0057] In this way, the control unit 35 irradiates the emission line light source unit 32 with light from the second light source unit 33 to suppress the occurrence of the dark effect, and then starts driving the emission line light source unit 32 to turn it on. After turning it on, wavelength calibration is performed. During wavelength calibration, as shown in FIG. 6C , the reflecting member 36 advances onto the optical axis of the lenses 311 and 312, reflects the light from the emission line light source unit 32, and guides it to the spectrometer 34. The light from the emission line light source unit 32 that enters the spectrometer 34 is dispersed into predetermined wavelengths by the dispersing element 341 and received by the light-receiving sensor 342. Then, wavelength calibration is performed by comparing the wavelength obtained by the light-receiving sensor 342 with the wavelength of the emission line emitted from the emission line light source unit 32.

[0058] In the embodiment shown in FIG. 6, the spectroscopic device is a spectroradiometer, but the spectroscopic device may be a spectrophotometer or the like that measures the illuminance of the light source 4 to be measured. [Explanation of symbols]

[0059] 1 Spectrophotometer (spectroscopy device) 10 Integrating sphere 11 Condenser lens 12 Entrance slit 13 Spectrometer 101 Measurement aperture 102 Through hole 103 Exit 131 Dispersion element 132 Light receiving sensor 14 Neon lamp (light source) 15 Xenon lamp (measurement light source, second light source) 16 Optical Elements 17 Control Unit 18 Light source housing 2 Object to be measured 3 Spectrophotometer (spectroscopy device) 31 Light receiving optical system 32 Bright line light source section 33 Second Light Source 34 Spectrometer 35 Control Unit 36 Reflective material 311, 312 lenses 341 Dispersion Element 342 Light receiving sensor 4 Light source to be measured

Claims

1. a spectrometer; an emission line light source unit that emits an emission line for wavelength calibration; a second light source unit; The second light source unit is disposed in a spectroscopic device such that direct light from the second light source unit is irradiated onto the emission line light source unit.

2. a spectrometer; an emission line light source unit that emits an emission line for wavelength calibration; a second light source unit; The second light source unit is a spectroscopic device that irradiates the emission line light source unit with light intensity such that the time from the start of driving of the emission line light source unit to the start of light emission is within one second.

3. 3. The spectroscopic device according to claim 1, wherein the spectroscopic device is a spectrophotometer having a diffuse reflection surface on an inner wall thereof.

4. 4. The spectroscopic device according to claim 3, wherein the second light source unit is a light source unit for measuring an object to be measured or a light source unit for observing a surface of the object to be measured.

5. 5. The spectroscopic device according to claim 4, wherein the second light source unit is adjacent to the emission line light source unit.

6. The spectroscopic device according to claim 3, which cites claim 2, wherein the second light source unit is a light source unit for measuring the object to be measured or a light source unit for observing the surface of the object to be measured, and the second light source unit irradiates light onto the emission line light source unit via the diffuse reflection surface.

7. 3. The spectroscopic device according to claim 1, wherein the spectroscopic device is a device for measuring a light source color.

8. The spectroscopic device according to claim 7 , wherein the second light source unit is adjacent to the emission line light source unit.

9. a control unit that controls lighting of the emission line light source unit and the second light source unit, The spectroscopic device according to claim 1 , wherein the control unit turns on the second light source unit before performing wavelength calibration.

10. 3. The spectroscopic device according to claim 1, wherein wavelength calibration is performed using the emission line light source unit after white calibration.

11. A spectroscopic device including a spectroscope, an emission line light source unit that emits an emission line for wavelength calibration, and a second light source unit, A light emission control method for a light source unit in a spectroscopic device, which irradiates the emission line light source unit with direct light from the second light source unit before starting to drive the emission line light source unit.

12. A spectroscopic device including a spectroscope, an emission line light source unit that emits an emission line for wavelength calibration, and a second light source unit, A method for controlling the emission of a light source unit in a spectroscopic device, which irradiates light from the second light source unit onto the emission line light source unit before starting to drive the emission line light source unit, with a light intensity such that the time from the start of driving of the emission line light source unit to the start of emission is within one second.

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