Peeling device and peeling method

Abstract

To prevent a crack from occurring in a plate-like workpiece and adhesion of glue when a protective member is peeled off from the plate-like workpiece.SOLUTION: A peeling device (1) includes a holding table (12) that holds the other surface (W2) of a plate-shaped workpiece (W), and a peeling mechanism (13) that peels off a protective tape (T1) covering one surface (W1) of the plate-shaped workpiece held on the holding table from the plate-shaped workpiece. The peeling mechanism includes a roller (23) that grips the protective tape, a first horizontal movement mechanism (22) that moves the roller and the holding table relatively in a straight line in the horizontal direction, a rotation drive unit (38) that uses the roller to separate the protective tape from the holding table, an interior angle setting unit (88) that sets the interior angle (θ) between the protective tape attached to one surface of the plate-shaped workpiece and the peeled protective tape, and a control unit (90) that controls to maintain the angle set in the interior angle setting unit when peeling off the protective tape.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a stripping device and a stripping method. [Background technology]

[0002] Patent Document 1 discloses a peeling device that peels off a protective tape attached to a wafer. In this peeling device, a release sheet is attached to the outer periphery of the protective tape, and then the release sheet is gripped by a gripping unit. The gripping unit and a holding table that holds the wafer are then moved relatively in the horizontal direction, and the protective tape is bent and peeled off from the wafer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2021-132179 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when the protective tape is peeled off as described above, the bending angle of the protective tape changes during peeling, which may cause cracks in the wafer or leave adhesive from the protective tape on the wafer.

[0005] The present invention has been made in consideration of these points, and one of its objects is to provide a peeling device and a peeling method that can prevent cracks from occurring in the plate-shaped workpiece or glue from adhering to the plate-shaped workpiece when a protective member is peeled off from the plate-shaped workpiece. [Means for solving the problem]

[0006] One embodiment of the present invention provides a peeling device that peels off a protective member that protects one side of a plate-shaped workpiece from that one side, and includes a holding table that holds the other side of the plate-shaped workpiece with a holding surface, and a peeling mechanism that peels off the protective member that covers that one side of the plate-shaped workpiece held on the holding table from the plate-shaped workpiece.The peeling mechanism includes a gripping portion that grips the protective member, a horizontal movement mechanism that moves the gripping portion and the holding table relatively in a straight line in the horizontal direction, a separation mechanism that uses the gripping portion to separate the protective member from the holding table, an interior angle setting portion that sets the interior angle between the protective member attached to one side of the plate-shaped workpiece and the peeled-off protective member, and a control portion that performs control to maintain the angle set in the interior angle setting portion when peeling off the protective member.

[0007] One embodiment of the peeling method of the present invention is a peeling method for peeling a protective member that protects one side of a plate-shaped workpiece from that one side, and includes a holding step of holding the other side of the plate-shaped workpiece with a holding table, a gripping step of gripping the protective member with a gripping portion, and a peeling step of moving the gripping portion and the holding table relatively in a straight line in the horizontal direction, while separating the protective member from the holding table with the gripping portion, and peeling the protective member while maintaining a predetermined interior angle between the protective member attached to one side of the plate-shaped workpiece and the peeled protective member. [Effects of the Invention]

[0008] According to the present invention, during peeling of the protective member, the control unit controls the interior angle between the attached protective member and the peeled protective member so as to maintain the angle set in the interior angle setting unit. This makes it possible to suppress changes in the bending angle of the protective member during peeling, and to prevent cracks from occurring in the plate-shaped workpiece or glue from remaining on the plate-shaped workpiece. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic perspective view of a peeling device according to a first embodiment. [Figure 2]1 is a schematic partial cross-sectional view of a peeling device according to a first embodiment. [Figure 3] FIG. 3 is a cross-sectional view similar to FIG. 2 of a delamination device according to a second embodiment. [Figure 4] FIG. 10 is a cross-sectional view similar to FIG. 2 of a delamination device according to a third embodiment. [Figure 5] FIG. 10 is a cross-sectional view similar to FIG. 2 of a delamination device according to a fourth embodiment. [Figure 6] FIG. 10 is a cross-sectional view similar to FIG. 2 of a delamination device according to a fifth embodiment. [Figure 7] FIG. 13 is a plan view illustrating the installation positions of a load sensor and a horizontal load detection unit in the fifth embodiment. [Figure 8] 1 is a graph showing the relationship between tensile load and interior angle. [Figure 9] FIG. 10 is a cross-sectional view similar to FIG. 3 of a delamination device according to a sixth embodiment. [Figure 10] FIG. 12 is a cross-sectional view similar to FIG. 4 of a delamination device according to a seventh embodiment. [Figure 11] FIG. 13 is a cross-sectional view similar to FIG. 5 of a delamination device according to an eighth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] [First embodiment] A delamination device according to a first embodiment will be described below with reference to the accompanying drawings, in which: Figure 1 is a schematic perspective view of the delamination device according to the first embodiment;

[0011] The X-axis, Y-axis, and Z-axis directions shown in each figure are perpendicular to one another. The X-axis and Y-axis directions are approximately horizontal, and the Z-axis direction is the up-down direction (vertical direction).

[0012] The peeling device 1 shown in FIG. 1 is an example of a device that peels off a protective tape T1 (protective member) that protects one surface W1 of a plate-shaped workpiece W from the one surface W1.

[0013] The plate-shaped workpiece W shown in FIG. 1 is, for example, a semiconductor wafer with a circular outer shape made of silicon. One side W1 of the plate-shaped workpiece W is divided into a grid pattern by a plurality of perpendicularly intersecting division lines, and devices such as ICs are formed in each of the grid-shaped areas. A protective tape T1 is attached to the entire surface W1 of the plate-shaped workpiece W. The protective tape T1 is composed of, for example, a tape including a base layer made of a resin (e.g., polyolefin resin) with a certain degree of flexibility and an adhesive layer (glue layer) on the base layer. Note that the plate-shaped workpiece W may be composed of gallium arsenide, sapphire, ceramics, resin, gallium nitride, silicon carbide, or the like other than silicon, and the protective tape T1 may be a protective material other than the above-mentioned tape. The protective material may be, for example, a cured liquid resin. Furthermore, bumps may be arranged in each of the divided areas.

[0014] A dicing tape T2 having a larger diameter than the plate-shaped workpiece W is adhered to the other surface W2 (the lower surface in FIG. 1 ), which is the surface opposite to one surface W1 of the plate-shaped workpiece W. The outer periphery of the adhesive layer of the dicing tape T2 is also adhered to the annular frame R, so that the plate-shaped workpiece W is supported by the annular frame R via the dicing tape T2, and can be handled by the annular frame R.

[0015] The peeling device 1 includes a base 11, a holding table 12 provided above the base 11 and holding the other surface W2 of the plate-shaped workpiece W, and a peeling mechanism 13 that peels the protective tape T1 of the plate-shaped workpiece W held on the holding table 12 from the plate-shaped workpiece W. The base 11 is provided in the shape of a rectangular parallelepiped extending in the X-axis direction.

[0016] The holding table 12 includes an adsorption section 15 made of a porous material or the like that adsorbs the plate-shaped workpiece W, and a frame 16 that supports the adsorption section 15. The adsorption section 15 is connected to a suction source (not shown), such as a vacuum generator, and the suction force generated by the suction source is transmitted to a flat holding surface 18, which is the exposed surface of the adsorption section 15. As a result, the other surface W2 of the plate-shaped workpiece W is adsorbed and held by the holding surface 18 of the holding table 12 with the dicing tape T2 interposed therebetween.

[0017] The holding table 12 is surrounded by a frame fixing portion 20 that fixes the annular frame R. The frame fixing portion 20, which has a circular outer shape in a plan view and on which the annular frame R is placed, is configured to fix the annular frame R by suction force generated by a suction source (not shown). The frame fixing portion 20 is movable up and down in the Z-axis direction (vertical direction) by piston mechanisms 21 that are evenly arranged around the circumference. Note that instead of the frame fixing portion 20, multiple mechanical clamps that open and close using springs or the like may be arranged around the holding table 12.

[0018] The peeling mechanism 13 includes a first horizontal movement mechanism 22 that is provided on the upper part of the base 11 and moves the holding table 12 back and forth in the X-axis direction, and two rollers 23 that form a gripping section. The two rollers 23 are disposed at the same position in the Z-axis direction (height direction) and extend in the Y-axis direction.

[0019] The first horizontal movement mechanism 22 includes a ball screw 24 disposed on the base 11, a motor 25 connected to one end of the ball screw 24, a pair of guide rails 26 extending parallel to the ball screw 24, and a movable member 27 movable in the X-axis direction. The holding table 12 is disposed on the upper surface of the movable member 27 via a support portion 29. The pair of guide rails 26 are in sliding contact with the lower surface of the movable member 27, and the ball screw 24 is threadedly engaged with a nut (not shown) disposed on the lower surface of the movable member 27. When the motor 25 is driven to rotate the ball screw 24, the holding table 12 together with the movable member 27 moves along the guide rails 26 in the X-axis direction.

[0020] The first horizontal movement mechanism 22 moves the two rollers 23 and the holding table 12 relatively in the X-axis direction (horizontal direction) parallel to the holding surface 18. This moves the two rollers 23 from the outer periphery of the holding surface 18 toward the center, and after passing the center of the holding surface 18, moves the two rollers 23 in a straight line away from the center.

[0021] Fig. 2 is a partial schematic cross-sectional view of the peeling device of the first embodiment. As shown in Fig. 2, two rollers 23 extend in the Y-axis direction and are aligned in the X-axis direction, one of which is a fixed-side roller 231 and the other is a movable-side roller 232. In this embodiment, the fixed-side roller 231 is disposed on the -X side, and the movable-side roller 232 is disposed on the +X side.

[0022] The fixed-side roller 231 is supported via an angle-shaped fixed-side frame 31, and the movable-side roller 232 is supported via a movable-side frame 32 extending in the vertical direction. The movable-side frame 32 is connected to a gripping cylinder 33 that constitutes a gripping section, and the gripping cylinder 33 is configured, for example, by an air cylinder, and moves the movable-side frame 32 and the movable-side roller 232 back and forth in the X-axis direction. The fixed-side frame 31 and the fixed-side roller 231 are arranged so as not to move relative to the gripping cylinder 33. When the gripping cylinder 33 is driven, the protective tape T1 and a peeling tape T3, which will be described later, are sandwiched between the fixed-side roller 231 and the movable-side roller 232 and can be gripped.

[0023] The fixed frame 31 and the gripping cylinder 33 are supported via a connecting body 35 connected above, and the connecting body 35 is supported via a support pillar 36 on the side surface on the +X side.

[0024] The peeling mechanism 13 further includes a rotation drive unit 38 that constitutes the separation mechanism. The rotation drive unit 38 is configured, for example, by a motor provided on each of the two rollers 23, and rotates the two rollers 23 in the relative direction. This makes it possible to apply a pulling force to the protective tape T1, etc., that is sandwiched and gripped between the two rollers 23, and the protective tape T1 can be separated from the holding table 12 by the two rollers 23.

[0025] The peeling mechanism 13 further includes a tensile load measuring unit 40 that measures the tensile load acting on the protective tape T1 interposed between the two rollers 23 and the holding surface 18. The tensile load measuring unit 40 includes a vertical load detecting unit 41 and a horizontal load detecting unit 42.

[0026] The vertical load detection unit 41 is disposed at a connection portion between the fixed-side frame 31 and the gripping cylinder 33 and the connecting body 35, in a state where it is sandwiched between both members from both sides in the Z axis direction. The vertical load detection unit 41 detects a vertical tensile load acting on the protective tape T1 gripped by the two rollers 23 (hereinafter referred to as a "vertical load" in this embodiment). The horizontal load detection unit 42 is disposed at a connection portion between the connecting body 35 and the support column 36, in a state where it is sandwiched between both members from both sides in the X axis direction. The horizontal load detection unit 42 detects a horizontal tensile load acting on the protective tape T1 gripped by the two rollers 23 (hereinafter referred to as a "horizontal load" in this embodiment).

[0027] The vertical load detection unit 41 and the horizontal load detection unit 42 are configured by, for example, piezoelectric elements. Such piezoelectric elements are formed in a flat or columnar shape from materials such as barium titanate (BaTiO), lead zirconate titanate (PZT), lithium niobate (LiNbO), or lithium tantalate (LiTaO), and can convert the received load into a voltage signal and output it to the control unit 90, which will be described later.

[0028] Returning to FIG. 1 , the peeling mechanism 13 includes a peeling tape supply unit 51 that pulls out the peeling tape T3 from a tape roll T4 on which the peeling tape T3 is wound in a roll shape and supplies it to the holding table 12. The peeling mechanism 13 also includes a clamp 52 that grips the peeling tape T3 attached to the protective tape T1, a peeling tape application unit 53 that applies the peeling tape T3 to the outer periphery of the protective tape T1, and a tape cutting unit 55 that cuts the peeling tape T3 to a predetermined length. The peeling mechanism 13 also includes a second horizontal movement mechanism 56 that moves the peeling tape application unit 53 and the clamp 52 in the X-axis direction. The peeling tape supply unit 51, clamp 52, peeling tape application unit 53, tape cutting unit 55, and second horizontal movement mechanism 56 are disposed above the movement path of the holding table 12.

[0029] The peeling tape supply unit 51 includes a winding tube 58 on which the tape roll T4 is mounted, a pair of guide rollers 59 that guide the peeling tape T3 pulled out from the tape roll T4 downward, and a pair of feed-out rollers 61 that are arranged below the pair of guide rollers 59. Back tension is applied to the winding tube 58 by a rotation mechanism (not shown), and the tension is adjusted so that the peeling tape T3 pulled out from the tape roll T4 does not become loose. The pair of guide rollers 59 sandwich the peeling tape T3, turn it back while applying tension, and guide it toward the pair of feed-out rollers 61, and the pair of feed-out rollers 61 feed the peeling tape T3 toward the clamp 52.

[0030] The release tape T3 is, for example, a two-layer heat seal tape consisting of an adhesive layer and a substrate that is bonded to the outer periphery of the protective tape T1 by applying heat. The substrate is made of a resin such as polyethylene terephthalate. The adhesive layer is made of a thermosetting resin such as epoxy resin. The adhesive strength of the release tape T3 to the protective tape T1 is set stronger than the adhesive strength of the protective tape T1 to the plate-like workpiece W. The release tape T3 is wound with the adhesive layer on the inside (the lower surface when stretched) to form a tape roll T4. Note that the release tape T3 is not limited to a heat seal tape.

[0031] The clamp 52 is composed of a fixed claw 62 and a movable claw 63, which form a pair of gripping claws. The fixed claw 62 is provided in a roughly L-shape in side view. The movable claw 63 is disposed opposite the fixed claw 62 in the Z-axis direction and is provided so as to be able to move towards and away from the fixed claw 62. In the clamp 52, by bringing the movable claw 63 closer to the fixed claw 62, one end of the peeling tape T3 is gripped therebetween. On the other hand, by moving the movable claw 63 away from the fixed claw 62, the gripped state of the one end of the peeling tape T3 in the clamp 52 is released.

[0032] The clamp 52 can be moved up and down by a clamp lifting mechanism 64, which is an electric actuator consisting of a ball screw mechanism or the like. The clamp lifting mechanism 64 is attached to a support base 65, which is fixed to the side of a movable plate 83 (described later) of the second horizontal movement mechanism 56. By adjusting the position in the Z-axis direction of the clamp 52 gripping the release tape T3 by the clamp lifting mechanism 64, the release tape T3 can be positioned at a height appropriate for adhesion over the protective tape T1 of the plate-like workpiece W held on the holding table 12.

[0033] The peeling tape applying section 53 is disposed between the pair of feed rollers 61 and the clamp 52. The peeling tape applying section 53 includes a support base 67 fixed to the side of a movable plate 83 (described later) of the second horizontal movement mechanism 56, a pressure plate lifting mechanism 68 made up of an air cylinder or the like supported by the support base 67, and a pressure plate 69 that can be moved up and down by the pressure plate lifting mechanism 68.

[0034] A heater (not shown) that generates heat when an electric current is passed through it is attached to the pressing plate 69. When the pressing plate 69 is lowered by the pressing plate lifting mechanism 68 to press and adhere the release tape T3 to the outer periphery of the protective tape T1, the heater heats the pressing plate 69, thereby partially thermally welding the release tape T3 to the protective tape T1. This allows the release tape T3 to be adhered well to the protective tape T1.

[0035] The tape cutting unit 55 is disposed between the pair of feed rollers 61 and the peeling tape applying unit 53. The tape cutting unit 55 includes a mounting surface 71 on which the adhesive layer side (lower side) of the peeling tape T3 is placed, a mounting table 73 having a groove 72 that crosses the mounting surface 71 in the width direction (Y-axis direction) of the peeling tape T3, and a cutter 75 that can move within the groove 72 in the extending direction of the groove 72. The tape cutting unit 55 also includes a cutter elevating unit 76 consisting of an air cylinder or the like that raises and lowers the cutter 75 relative to the mounting surface 71, and a cutter moving unit 78 that is a ball screw mechanism that supports the cutter 75 via the cutter elevating unit 76 and moves the cutter 75 in the extending direction of the groove 72 (Y-axis direction).

[0036] The second horizontal movement mechanism 56 includes a ball screw 80 having an axis in the X-axis direction, a pair of guide rails 81 arranged parallel to the ball screw 80, and a motor 82 connected to the ball screw 80 to rotate the ball screw 80. The second horizontal movement mechanism 56 also includes a movable plate 83 having an internal nut that screws onto the ball screw 80 and a side portion that slides against the guide rails 81. In the second horizontal movement mechanism 56, when the motor 82 rotates the ball screw 80, the movable plate 83 is guided by the guide rails 81 and moves back and forth in the X-axis direction, and the peeling tape application unit 53 and the clamp 52 attached to the movable plate 83 also move back and forth in the X-axis direction.

[0037] At a position below the second horizontal movement mechanism 56 on the +X side, a collection box 85 is disposed into which the protective tape T1 gripped by the clamp 52 after peeling is dropped and collected.

[0038] The peeling apparatus 1 further includes an interior angle setting unit 88 and a control unit 90 that controls each component of the apparatus. The interior angle setting unit 88 has a function of setting the interior angle θ (see FIG. 2) between the protective tape T1 attached to one surface W1 of the plate-like workpiece W during peeling and the peeled protective tape T1. The interior angle setting unit 88 can have various configurations as long as it has the above function. For example, it can be an input device that can be operated by a user to input the interior angle θ (e.g., 10° or 30°) to the control unit 90. Furthermore, the interior angle setting unit 88 can be a computer that inputs the interior angle θ calculated using a pre-stored database, program, or table based on peeling conditions input by the user to the control unit 90. Examples of peeling conditions include the thickness of the adhesive layer of the protective tape T1, the thickness of the plate-like workpiece W, and the adhesive strength of the protective tape T1. The interior angle setting unit 88 and the control unit 90 may be configured to perform the above function in the same device.

[0039] The control unit 90 is configured to include a processor that executes various processes, as well as a storage unit (memory) that stores various parameters, programs, etc. The storage unit of the control unit 90 stores, as part of a control program, programs for controlling the operation of the holding table 12, the first horizontal movement mechanism 22, the peeling mechanism 13 including the rotation drive unit 38, etc. As an example, the control unit 90 controls the first horizontal movement mechanism 22 and the rotation drive unit 38 based on the stored programs, etc. and a detection signal output from the tensile load measurement unit 40, so as to maintain the interior angle θ (angle) set by the interior angle setting unit 88 when peeling the protective tape T1.

[0040] For example, the control unit 90 includes a ratio calculation unit 92 (see FIG. 2), which calculates the optimum ratio of the horizontal load to the vertical load so that the interior angle θ is equal to the interior angle set by the interior angle setting unit 88. The optimum value may be within the allowable range of the ratio. Regarding the operation of each part of the peeling device 1 described below, unless a control entity is specified, it is assumed that the operation is controlled by a control signal sent from the control unit 90.

[0041] Next, a description will be given of a method for peeling the protective tape T1 from the plate-like workpiece W using the peeling device 1 shown in FIG. 1 according to this embodiment.

[0042] In preparation for peeling off the protective tape T1, an optimal interior angle θ is set in advance in the interior angle setting unit 88, and this interior angle θ is stored in the control unit 90. This interior angle θ is set to an angle that minimizes the load acting on the plate-like workpiece W when the protective tape T1 is peeled off, thereby suppressing the occurrence of cracks and adhesion of glue.

[0043] Furthermore, in preparation for peeling off the protective tape T1, the ratio calculation unit 92 of the control unit 90 performs a calculation process to ensure that the interior angle θ during peeling of the protective tape T1 becomes the optimum interior angle θ set by the interior angle setting unit 88. In this calculation process, for example, a load is provisionally set in accordance with the optimum interior angle θ set by the interior angle setting unit 88, and the ratio between the horizontal load, which is the horizontal component of the load, and the vertical load, which is the vertical component, is calculated. The calculated ratio is stored in the control unit 90 as the optimum ratio for forming the interior angle θ during peeling of the protective tape T1.

[0044] First, a holding process is performed. In the holding process, the plate-shaped workpiece W integrated with the annular frame R is placed on the holding surface 18 of the holding table 12 with the protective tape T1 facing upward, and the annular frame R is placed on the frame fixing parts 20 arranged on the outer periphery of the holding table 12. Next, a suction source (not shown) is activated to suction-hold the plate-shaped workpiece W on the holding surface 18, and suction-fix the annular frame R by the frame fixing parts 20. After that, the annular frame R is lowered to a position lower than the holding surface 18.

[0045] In this state, the gripping process is carried out. In the gripping process, the pair of guide rollers 59 feeds the release tape T3 from the tape roll T4 toward the clamp 52. The adhesive layer side (inside) of the release tape T3 is placed on the mounting surface 71 of the mounting table 73 in the tape cutting unit 55. Furthermore, when one end of the release tape T3 is positioned on the upper surface of the fixed claw 62 of the clamp 52, the movable claw 63 approaches the fixed claw 62, and the clamp 52 grips one end of the release tape T3. Next, the second horizontal movement mechanism 56 moves the clamp 52 in the -X direction, and the gripped release tape T3 is pulled in the same direction. At this stage, the pressing plate 69 of the release tape adhering unit 53 and the cutter 75 of the tape cutting unit 55 are waiting above the release tape T3, and the two rollers 23 are waiting below the release tape T3.

[0046] In this state, the holding table 12 moves in the +X direction to position the outer periphery of the protective tape T1 directly below the release tape adhering portion 53. Next, the pressing plate 69 heated by a heater (not shown) descends, and the lower end of the pressing plate 69 presses the release tape T3 from above against the outer periphery of the protective tape T1, thermally welding the adhesive layer of the release tape T3 to the protective tape T1. At this time, the pressing plate 69 passes between the two rollers 23, and the release tape T3 is thermally welded below the two rollers 23.

[0047] After this thermal welding, the cutter moving unit 78 positions the cutter 75 at one end of the groove 72 in the mounting table 73 that is exposed from one side edge of the release tape T3. Furthermore, the cutter lifting unit 76 lowers the cutter 75 until the bottom end of the cutter 75 is inside the groove 72. Next, the cutter 75 advances in the -Y direction along the extension direction of the groove 72, and the release tape T3 is cut by the cutter 75. After the cutter 75 has cut the release tape T3, the cutter 75 and the pressing plate 69 rise in the +Z direction and retreat from the release tape T3.

[0048] Thereafter, the two rollers 23 are brought closer together by driving the gripping cylinder 33 shown in Fig. 2. As a result, one end of the peeling tape T3 heat-welded to the protective tape T1 is gripped by the clamp 52, and the area between the one end and the portion heat-welded to the protective tape T1 is gripped by the two rollers 23.

[0049] In this state, the peeling process is performed. In the peeling process, the first horizontal movement mechanism 22 moves the holding table 12 in the +X direction relative to the two rollers 23, whose positions in the X direction are fixed, and the two rollers 23 are moved relatively in the X direction from the end of the +X side of the plate-shaped workpiece W toward the end of the -X side. This movement pulls the protective tape T1 near the heat-welded portion of the peeling tape T3 diagonally upward (in the +Z direction and the -X direction), and peeling begins from the end of the protective tape T1 on the +X side relative to the plate-shaped workpiece W. While the protective tape T1 is being peeled, the second horizontal movement mechanism 56 moves the clamp 52 in the -X direction. Furthermore, while the protective tape T1 is being peeled, the rotation drive unit 38 is driven to rotate the two rollers 23 in the relative direction, thereby winding up the peeling tape T3 and the protective tape T1 in that order and peeling the protective tape T1. While the protective tape T1 is being wound up and peeled off by the two rollers 23, the protective tape T1 is bent so that the interior angle θ between the protective tape T1 attached to one surface W1 of the plate-like workpiece W and the peeled protective tape T1 becomes an acute angle.

[0050] A tensile load acts on the peeled protective tape T1 due to winding by the rotation drive unit 38 and movement of the holding table 12 in the +X direction, and the tensile load is measured by the tensile load measurement unit 40. More specifically, the vertical load detection unit 41 of the tensile load measurement unit 40 detects the vertical load acting on the protective tape T1 held by the two rollers 23. Furthermore, the horizontal load detection unit 42 of the tensile load measurement unit 40 detects the horizontal load acting on the protective tape T1 held by the two rollers 23. Detection by each of the load detection units 41, 42 is performed at predetermined time intervals, and detection signals of the horizontal load and the vertical load are output to the control unit 90.

[0051] While the protective tape T1 is being peeled off, the control unit 90 controls the first horizontal movement mechanism 22 and the rotation drive unit 38 to maintain the optimal value of the interior angle θ set by the interior angle setting unit 88. For example, this control is performed by inputting the detection signals of the horizontal load and the vertical load output from the load detection units 41 and 42 into the control unit 90, and calculating the ratio of the vertical load detected by the vertical load detection unit 41 to the horizontal load detected by the horizontal load detection unit 42. Furthermore, the control unit 90 compares the calculated ratio with the optimal value of the ratio calculated and stored by the ratio calculation unit 92. Based on this comparison, the control unit 90 controls the first horizontal movement mechanism 22 to adjust the movement speed of the holding table 12 and the rotation speed of the rotation drive unit 38, which rotates the two rollers 23. This control causes the ratio calculated by the control unit 90 as described above to become the same as or approach the optimal value ratio calculated by the ratio calculation unit 92, and the actual interior angle θ of the protective tape T1 during peeling becomes the same as or approach the optimal value interior angle θ set by the interior angle setting unit 88.

[0052] When the protective tape T1 is completely peeled off from one surface W1 of the plate-shaped workpiece W, the clamp 52 that grips the peeling tape T3 attached to the protective tape T1 moves to above the recovery box 85 (see FIG. 1). Then, the clamp 52 releases its grip on the peeling tape T3, and the protective tape T1 and the peeling tape T3 drop into the recovery box 85.

[0053] According to the first embodiment, the interior angle θ between the protective tape T1 attached to one surface W1 of the plate-shaped workpiece W and the peeled protective tape T1 can be maintained at an optimum value by the control of the control unit 90. This makes it possible to suppress changes in the bending angle of the protective tape T1 during peeling, and to prevent cracks and adhesive adhesion from occurring in the plate-shaped workpiece W.

[0054] Next, other embodiments of the present invention will be described. In the following description, the same reference numerals may be used to designate components that are the same as or equivalent to those in the embodiments described before the embodiment, and the description thereof may be omitted or simplified.

[0055] [Second embodiment] A second embodiment of the present invention will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view similar to Fig. 2 of a peeling device of the second embodiment. As shown in Fig. 3, the second embodiment does not include the two rollers 23 and the structure for supporting the rollers 23 of the first embodiment. Also, in the second embodiment, the gripping section is formed by a clamp 52, and the separation mechanism is formed by a clamp elevating mechanism 64 that raises and lowers the clamp 52. The clamp 52 grips the peeling tape T3 that forms the outer periphery of the protective tape T1.

[0056] In the second embodiment, in the peeling (peeling process) of the protective tape T1 shown in FIG. 3 , the first horizontal movement mechanism 22 moves the holding table 12 in the +X direction, and the second horizontal movement mechanism (horizontal movement mechanism) 56 moves the clamp 52 gripping the peeling tape T3 in the −X direction. These movements cause the clamp 52 and the holding table 12 to move relatively in a straight line in the horizontal direction, and the protective tape T1 is peeled while being subjected to a load that pulls it diagonally upward (+Z direction and −X direction). During peeling of the protective tape T1, the clamp lifting mechanism 64 moves (lifts) the clamp 52 in the +Z direction to adjust the position in the +Z axis direction. Even during peeling of the protective tape T1 in the second embodiment, the protective tape T1 is bent so that the interior angle θ between the protective tape T1 attached to one surface W1 of the plate-like workpiece W and the peeled protective tape T1 becomes an acute angle.

[0057] In the second embodiment, the load pulling the protective tape T1 during peeling acts on the mechanism supporting the clamp 52. Therefore, the tensile load measuring unit 402 in the second embodiment is different from the tensile load measuring unit 40 in the first embodiment in terms of the installation position and the measurement target. In the second embodiment, the vertical load detection unit 412 and the horizontal load detection unit 422 of the tensile load measuring unit 402 are provided on the structure or member supporting the clamp 52.

[0058] More specifically, the horizontal load detection unit 422 is disposed at the connection portion between the +X side surface of the upper part of the fixed claws 62 of the clamp 52 and the connecting body 641 facing said side surface, in a state where it is sandwiched from both sides in the X axis direction by both members. The vertical load detection unit 412 is disposed so as to form a part of the middle in the extension direction (Z axis direction) of the piston rod 642 of the clamp lifting mechanism 64 that supports the connecting body 641. In this way, the vertical load detection unit 412 detects the vertical load acting on the protective tape T1 gripped by the clamp 52, and the horizontal load detection unit 422 detects the horizontal load acting on the protective tape T1 gripped by the clamp 52.

[0059] In the second embodiment, the tensile load acting on the peeled protective tape T1 is detected by each load detection unit 412, 422, and the detection is performed at predetermined time intervals, thereby outputting detection signals of the horizontal load and the vertical load to the control unit 90.

[0060] During peeling of the protective tape T1, the control unit 90 controls the horizontal movement mechanisms 22, 56 and the clamp lifting mechanism 64 to maintain the optimal interior angle θ set by the interior angle setting unit 88. For example, the control unit 90 inputs the detection signals of the horizontal load and the vertical load output from the load detection units 412, 422 and calculates the ratio of the vertical load detected by the vertical load detection unit 412 to the horizontal load detected by the horizontal load detection unit 422. Furthermore, the control unit 90 compares the calculated ratio with the optimal ratio calculated and stored by the ratio calculation unit 92. Based on this comparison, the control unit 90 controls the horizontal movement mechanisms 22, 56 to move the holding table 12 and the clamp 52 in the X-axis direction, and the clamp lifting mechanism 64 to lift the clamp 52. This control causes the ratio calculated by the control unit 90 as described above to become the same as or approach the optimal value ratio calculated by the ratio calculation unit 92, and the actual interior angle θ of the protective tape T1 during peeling becomes the same as or approach the optimal value interior angle θ set by the interior angle setting unit 88.

[0061] [Third embodiment] A third embodiment of the present invention will be described with reference to Fig. 4. Fig. 4 is a cross-sectional view of a peeling device according to the third embodiment, similar to Fig. 2. As shown in Fig. 4, the third embodiment further includes a horizontal position detection unit 94 in addition to the components of the first embodiment. Furthermore, the third embodiment does not include the ratio calculation unit 92 of the first embodiment, and instead includes a data table 95.

[0062] The horizontal position detector 94 in the third embodiment can be exemplified by a configuration including a rotary encoder that detects the number of rotations of the motor 25 (see FIG. 1) of the first horizontal movement mechanism 22. The horizontal position detector 94 outputs the number of rotations of the motor 25 as an encoder signal to the control unit 90, and the control unit 90 recognizes the position of the holding table 12 in the X-axis direction (horizontal direction) based on the encoder signal. This allows the horizontal position detector 94 to detect the relative horizontal positions of the two rollers 23 and the holding table 12.

[0063] The rotation speed of the rotation drive unit 38 corresponding to the horizontal position detected as described above is set and stored in the data table 95. The data table 95 is a table in which the rotation speed of the rotation drive unit 38 is set according to the position of the holding table 12 in the X-axis direction so that the interior angle θ during peeling of the protective tape T1 maintains the optimum value of the interior angle θ set by the interior angle setting unit 88. The data table 95 may be stored in a device separate from the control unit 90, or may be stored in a memory unit of the control unit 90.

[0064] In the third embodiment, while the protective tape T1 is being peeled (during the peeling process), the control unit 90 controls the first horizontal movement mechanism 22 to move the holding table 12 at a constant speed in the +X direction. Also, while the protective tape T1 is being peeled, the horizontal position detection unit 94 detects the position of the holding table 12 in the X-axis direction. Furthermore, the control unit 90 controls the rotation drive unit 38 to maintain the optimal value of the interior angle θ set by the interior angle setting unit 88. For example, this control involves the control unit 90 setting the rotation speed of the rotation drive unit 38 by referring to a data table 95 at the position of the holding table 12 in the X-axis direction (horizontal direction) detected by the horizontal position detection unit 94. The control unit 90 then controls the rotation drive unit 38 to achieve the set rotation speed, thereby adjusting the rotation speeds of the two rollers 23. As a result, the actual interior angle θ of the protective tape T1 being peeled becomes equal to or close to the optimal value of the interior angle θ set by the interior angle setting unit 88.

[0065] [Fourth embodiment] A fourth embodiment of the present invention will be described with reference to Fig. 5. Fig. 5 is a cross-sectional view of a peeling device according to the fourth embodiment, similar to Fig. 2. As shown in Fig. 5, the fourth embodiment further includes a horizontal position detection unit 96 in addition to the components of the second embodiment. Furthermore, the fourth embodiment does not include the ratio calculation unit 92 of the second embodiment, and instead includes a data table 97.

[0066] The horizontal position detector 96 in the fourth embodiment has the same function as the horizontal position detector 94 in the third embodiment, but also has the function of recognizing the position of the clamp (gripping unit) 56 in the X-axis direction (horizontal direction). Therefore, the horizontal position detector 96 can be configured to include a rotary encoder that detects the number of rotations of the motor 82 (see FIG. 1) of the second horizontal movement mechanism 56. The horizontal position detector 96 outputs the number of rotations of the motor 82 as an encoder signal to the control unit 90, and the control unit 90 recognizes the position of the clamp 52 in the X-axis direction (horizontal direction) based on the encoder signal. This allows the horizontal position detector 96 to detect the relative horizontal positions of the clamp 52 and the holding table 12.

[0067] The data table 97 sets and stores the lifting speed of the clamp lifting mechanism 64 according to the horizontal position detected as described above. The data table 97 is a table that sets the lifting speed of the clamp lifting mechanism 64 according to the positions of the clamp 52 and the holding table 12 in the X-axis direction so that the interior angle θ during peeling of the protective tape T1 maintains the optimum value of the interior angle θ set by the interior angle setting unit 88. The data table 97 may be stored in a device separate from the control unit 90, or may be stored in a memory unit of the control unit 90.

[0068] In the fourth embodiment, while the protective tape T1 is being peeled (during the peeling process), the control unit 90 controls the first horizontal movement mechanism 22 to move the holding table 12 at a constant speed in the +X direction, and controls the second horizontal movement mechanism 56 to move the clamp 52 at a constant speed in the -X direction. Thus, under the control of the control unit 90, the horizontal movement mechanisms 22, 56 cause the clamp 52 and the holding table 12 to move relatively in a straight line at a constant speed. Also, while the protective tape T1 is being peeled, the horizontal position detector 96 detects the positions of the clamp 52 and the holding table 12 in the X-axis direction. Furthermore, the control unit 90 controls the clamp lifting mechanism 64 to maintain the optimal value of the interior angle θ set by the interior angle setting unit 88. For example, the control unit 90 sets the lifting speed of the clamp 52 by the clamp lifting mechanism 64 based on the positions of the clamp 52 and the holding table 12 in the X-axis direction (horizontal direction) detected by the horizontal position detector 96, with reference to a data table 97. This adjusts the vertical position of the clamp 52 while the protective tape T1 is being peeled off, so that the actual interior angle θ of the protective tape T1 being peeled off becomes the same as or approaches the optimal interior angle θ set by the interior angle setting unit 88.

[0069] [Fifth embodiment] A fifth embodiment of the present invention will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view of a peeling device according to the fifth embodiment, similar to Fig. 2. As shown in Fig. 6, in the fifth embodiment, the tensile load measuring unit 40 in the first embodiment is changed to a tensile load measuring unit 100. In the fifth embodiment, the vertical load detecting unit 110 and the horizontal load detecting unit 120 of the tensile load measuring unit 100 are arranged around the holding table 12.

[0070] In the fifth embodiment, the vertical load detection unit 110 of the tensile load measurement unit 100 is composed of three load sensors 111-113 arranged on each of the three pillar-shaped support parts 29. Each load sensor 111-113 is arranged at a connection portion between the upper surface (+Z side surface) of the movable member 27 and the lower end surface (-Z side surface) of each support part 29, in a state where it is sandwiched between both members from both sides in the Z axis direction. Therefore, the vertical load detection unit 110 (each load sensor 111-113) is arranged so as to be supported below the holding table 12.

[0071] Fig. 7 is a plan view illustrating the installation positions of the load sensors and horizontal load detection units in the fifth embodiment. As shown in Fig. 7, when viewed from above, the three support units 29 and the three load sensors 111 to 113 are disposed near the outer periphery of the holding table 12 at predetermined angular intervals (every 120° in Fig. 7) in the circumferential direction of the holding table 12.

[0072] The horizontal load detection unit 120 is disposed via a support arm 121 so as to be in contact with the -X side surface of the holding table 12, and is disposed beside the holding table 12 in the X direction, which is the peeling direction of the protective tape T1. As shown in Fig. 6, the support arm 121 extends upward with its lower region fixed to the -X side surface of the movable member 27. The support arm 121 is also provided on its upper +X side surface so as to sandwich the horizontal load detection unit 120 with the holding table 12 on both sides in the X axis direction.

[0073] The load sensors 111 to 113 and the horizontal load detection unit 120 can be configured, for example, by piezoelectric elements, similar to the load detection units 41 and 42 of the first embodiment.

[0074] When the horizontal load detection unit 120 is provided, instead of the frame fixing unit 20 (see FIG. 1), a configuration may be adopted in which a plurality of mechanical clamps that clamp the annular frame R that opens and closes using a rotary cylinder or the like are arranged around the holding table 12. With this configuration, the horizontal load detection unit 120 and the support arm 121 can be positioned so as not to come into contact with the mechanical clamps.

[0075] The vertical load detection unit 110 detects the sum of the values of the three load sensors 111-113 during peeling of the protective tape T1 as a vertical load value Fz (see FIG. 8). More specifically, during peeling of the protective tape T1, a load that tilts the holding table 12 relative to the horizontal plane is applied to each of the load sensors 111-113. Therefore, each of the load sensors 111-113 can detect both a load in the vertically upward direction (+Z direction) and a load in the vertically downward direction (-Z direction). That is, the three load sensors 111-113, which are disposed between the support unit 29 and the movable member 27, are arranged in a state where a compressive pressure is applied, and can measure loads in the +Z direction and -Z direction. During peeling of the protective tape T1, a force is applied that tilts the holding table 12 in the X-axis direction, and therefore some of the three load sensors 111-113 detect the load in the +Z direction and some detect the load in the -Z direction. Therefore, the sum of the load values detected by all of the three load sensors 111 to 113 is set to the vertical load value Fz during peeling of the protective tape T1.

[0076] The horizontal load detection unit 120 is pressed against the -X side of the holding table 12 while the protective tape T1 is being peeled off, and the detected load value is taken as the horizontal load value Fx (see FIG. 8). The horizontal load detection unit 120 may be arranged pressed against the +X side of the holding table 12 on the opposite side of the paper, and the detected load value (Fx) is detected as a negative value.

[0077] In the fifth embodiment, the tensile load acting on the peeled protective tape T1 is detected by each load detection unit 110, 120, and the detection is performed at predetermined time intervals, so that detection signals of the horizontal load and the vertical load are output to the control unit 90.

[0078] As in the first embodiment, while the protective tape T1 is being peeled off, the control unit 90 controls the first horizontal movement mechanism 22 and the rotation drive unit 38 so as to maintain the optimal value of the interior angle θ set by the interior angle setting unit 88 based on the input detection signal.

[0079] 8, the control unit 90 can calculate the interior angle θ of the tensile load F acting on the protective tape T1 with respect to the horizontal direction (X direction) from the detected vertical load value Fz and horizontal load value Fx. -1 It can be calculated using the formula (Fx / Fz). The control unit 90 can perform control by using the interior angle θ calculated using this formula as the actual interior angle θ of the protective tape T1 during peeling.

[0080] [Sixth embodiment] A sixth embodiment of the present invention will be described with reference to Fig. 9. Fig. 9 is a cross-sectional view of a peeling device of the sixth embodiment similar to Fig. 3. As shown in Fig. 9, in the sixth embodiment, the tensile load measuring unit 402 of the second embodiment is changed to the configuration of a tensile load measuring unit 100. In the sixth embodiment, the tensile load measuring unit 100 (vertical load detecting unit 110 and horizontal load detecting unit 120) similar to that of the fifth embodiment is arranged around the holding table 12, unlike the second embodiment.

[0081] In the sixth embodiment, based on the detection signals of each load detection unit 110, 120 during peeling of the protective tape T1, the control unit 90 controls each horizontal movement mechanism 22, 56 and the clamp lifting mechanism 64 to maintain the optimal value of the interior angle θ set by the interior angle setting unit 88, as in the second embodiment.

[0082] [Seventh embodiment] A seventh embodiment of the present invention will be described with reference to Fig. 10. Fig. 10 is a cross-sectional view of a peeling device of the seventh embodiment similar to Fig. 4. As shown in Fig. 10, in the seventh embodiment, the tensile load measuring unit 40 of the third embodiment is changed to a tensile load measuring unit 100. In the seventh embodiment, the tensile load measuring unit 100 (vertical load detecting unit 110 and horizontal load detecting unit 120) similar to that of the fifth embodiment is arranged around the holding table 12, unlike the third embodiment.

[0083] In the seventh embodiment, the control unit 90 controls the rotation drive unit 38 so as to maintain the optimum value of the interior angle θ set by the interior angle setting unit 88, as in the third embodiment.

[0084] [Eighth embodiment] An eighth embodiment of the present invention will be described with reference to Fig. 11. Fig. 11 is a cross-sectional view of a peeling device of the eighth embodiment, similar to Fig. 5. As shown in Fig. 11, in the eighth embodiment, the tensile load measuring unit 402 of the fourth embodiment is changed to the configuration of the tensile load measuring unit 100. In the eighth embodiment, the tensile load measuring unit 100 (vertical load detecting unit 110 and horizontal load detecting unit 120) similar to that of the fifth embodiment is arranged around the holding table 12, unlike the fourth embodiment.

[0085] In the eighth embodiment, the control unit 90 controls the clamp lifting mechanism 64 so as to maintain the optimum value of the interior angle θ set by the interior angle setting unit 88, as in the fourth embodiment.

[0086] As described above, according to the second to eighth embodiments, the interior angle θ between the protective tape T1 attached to one surface W1 of the plate-shaped workpiece W and the peeled protective tape T1 can be maintained at an optimum value by the control of the control unit 90. This makes it possible to suppress changes in the bending angle of the protective tape T1 during peeling, and to prevent cracks and adhesive adhesion from occurring in the plate-shaped workpiece W.

[0087] The present invention is not limited to the above-described embodiments, and various modifications can be made to the embodiments. In the above-described embodiments, the size and shape shown in the accompanying drawings are not limited to these, and can be modified as appropriate within the scope of the effects of the present invention. In addition, the present invention can be modified as appropriate without departing from the scope of the object of the present invention.

[0088] In the first, third, fifth, and seventh embodiments, the protective tape T1 is peeled off without moving the two rollers 23. However, for example, a horizontal movement mechanism that moves the two rollers 23 may be added, and the protective tape T1 may be peeled off while moving the two rollers 23 in the −X direction. This also makes it possible to move the two rollers 23 and the holding table 12 relatively in the X-axis direction (horizontal direction).

[0089] Furthermore, in the second, fourth, sixth, and eighth embodiments, the clamp 52 and the holding table 12 are moved by the horizontal movement mechanisms 22 and 56, respectively, to peel off the protective tape T1, but this is not limited to this. For example, the protective tape T1 may be peeled off by moving at least one of the clamp 52 and the holding table 12 in the X-axis direction. This also makes it possible to move the clamp 52 and the holding table 12 relatively in the X-axis direction (horizontal direction).

[0090] Furthermore, in the third, fourth, seventh and eighth embodiments, the tensile load measuring units 40, 402 and 100 are illustrated, but the tensile load measuring units 40, 402 and 100 may be omitted. [Industrial Applicability]

[0091] As described above, the present invention has the effect of being able to control the inner angle between the peeled protective tape and the attached protective tape so as to maintain it, thereby preventing cracks from occurring in the plate-shaped workpiece during peeling and preventing glue from remaining. [Explanation of symbols]

[0092] 1: Peeling device 12: Holding table 13: Peeling mechanism 18: Holding surface 22: 1st horizontal movement mechanism (horizontal movement mechanism) 23: Roller (gripping part) 38: Rotation drive unit (separation mechanism) 41: Vertical load detection unit 42: Horizontal load detection unit 52: Clamp (holding part) 56:Second horizontal movement mechanism (horizontal movement mechanism) 64: Clamp lifting mechanism (separation mechanism) 88: Interior angle setting section 90: Control unit 92: Percentage calculation section 94: Horizontal position detection unit 95: Data Table 96: Horizontal position detection unit 97: Data Table 110: Vertical load detection unit 120: Horizontal load detection unit 412: Vertical load detection unit 422: Horizontal load detection unit T1: Protective tape (protective material) W: Plate-shaped workpiece W1: One side W2: The other side θ: interior angle

Claims

1. A peeling device that peels off a protective member that protects one surface of a plate-shaped workpiece from the one surface, a holding table that holds the other surface of the plate-shaped workpiece by a holding surface; and a peeling mechanism that peels off the protective member covering the one surface of the plate-shaped workpiece held on the holding table from the plate-shaped workpiece, The peeling mechanism is a horizontal movement mechanism that moves the gripping unit and the holding table relatively in a horizontal line; a separation mechanism that separates the protective member from the holding table using the gripping unit; an interior angle setting unit that sets an interior angle between the protective member attached to one side of the plate-shaped workpiece and the peeled-off protective member; and a control unit that performs control to maintain the angle set in the interior angle setting unit when peeling off the protective member.

2. The gripping portion is two rollers, The separation mechanism is a rotation drive unit that rotates the two rollers in a relative direction, The peeling mechanism is a horizontal load detection unit that detects a horizontal tensile load; a vertical load detection unit that detects a tensile load in the vertical direction, The control unit a ratio calculation unit that calculates a ratio of a horizontal load to a vertical load so as to achieve the interior angle set by the interior angle setting unit, 2. The peeling device according to claim 1, wherein the horizontal movement mechanism and the separation mechanism are controlled so that the ratio between the horizontal load detected by the horizontal load detection unit and the vertical load detected by the vertical load detection unit becomes the ratio calculated by the ratio calculation unit.

3. The gripping portion is a clamp that grips an outer peripheral portion of the protection member, The separation mechanism is a clamp lifting mechanism that lifts the clamp, The peeling mechanism is a horizontal load detection unit that detects a horizontal tensile load; a vertical load detection unit that detects a tensile load in the vertical direction, The control unit a ratio calculation unit that calculates a ratio of a horizontal load to a vertical load so as to achieve the interior angle set by the interior angle setting unit, 2. The peeling device according to claim 1, wherein the horizontal movement mechanism and the separation mechanism are controlled so that the ratio between the horizontal load detected by the horizontal load detection unit and the vertical load detected by the vertical load detection unit becomes the ratio calculated by the ratio calculation unit.

4. The gripping portion is two rollers, The separation mechanism is a rotation drive unit that rotates the two rollers in a relative direction, The peeling mechanism is a horizontal position detector that detects the relative horizontal position between the gripper and the holding table; a data table in which the rotation speed of the rotary drive unit is set according to the horizontal position, The control unit The horizontal movement mechanism moves the object at a constant speed relative to the object.

2. The peeling device according to claim 1, wherein the rotation speed of the rotation drive unit is controlled by referring to the data table at the horizontal position detected by the horizontal position detection unit.

5. The gripping portion is a clamp that grips an outer peripheral portion of the protection member, The separation mechanism is a clamp lifting mechanism that lifts the clamp, The peeling mechanism is a horizontal position detector that detects the relative horizontal position of the gripper and the holding table, and a data table that sets the lifting speed of the clamp by the clamp lifting mechanism according to the horizontal position, The control unit The horizontal movement mechanism moves the object at a constant speed relative to the object.

2. The peeling apparatus according to claim 1, wherein the lifting speed of the clamp lifting mechanism is controlled by referring to the data table at the horizontal position detected by the horizontal position detection unit.

6. the vertical load detection unit is disposed so as to be supported below the holding table, 4. The peeling device according to claim 2, wherein the horizontal load detection unit is disposed beside the holding table in the peeling direction of the protective member.

7. A peeling method for peeling a protective member that protects one surface of a plate-shaped workpiece from the one surface, comprising: a holding step of holding the other surface side of the plate-shaped workpiece with a holding table; a gripping step of gripping the protective member with a gripping portion; a peeling step of moving the gripping portion and the holding table relatively in a straight line in the horizontal direction, using the gripping portion to separate the protective member from the holding table, and peeling the protective member while maintaining the interior angle between the protective member attached to one surface of the plate-shaped workpiece and the peeled-off protective member at a preset angle.

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