Conveyance vehicle and conveyance facility with conveyance vehicle

Abstract

To achieve flexible operation of a conveyance vehicle according to a situation.SOLUTION: A coupling mechanism 3 is configured to be switchable between a coupled state in which a traveling unit 1 and a holding unit 2 are coupled to each other and a separated state in which the traveling unit 1 and the holding unit 2 are separated from each other. The traveling unit 1 executes both a coupled traveling mode in which the traveling unit travels in a state of being coupled to the holding unit 2 via the coupling mechanism 3 and a separated traveling mode in which the traveling unit travels alone in a state of being separated from the holding unit 2.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a transport vehicle and a transport facility equipped with the transport vehicle. [Background technology]

[0002] For example, Japanese Patent Application Laid-Open No. 2022-177495 (Patent Document 1) discloses a transport vehicle (1) that transports an object (200) to be transported between processes.

[0003] The transport vehicle (1) is configured to travel along the track (20) while holding the object (200) to be transported. In other words, the transport vehicle (1) has both the function of traveling along a route and the function of holding the object (200) to be transported. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-177495 Summary of the Invention [Problem to be solved by the invention]

[0005] In such technical fields, for example, when a malfunction occurs in a transport vehicle while transporting an object, the transport vehicle may be forced to head to a maintenance station while holding the object. Alternatively, in a configuration in which the transport vehicle is powered by an onboard power storage device, when the remaining power runs low, the transport vehicle may be forced to head to a charging station or the like while holding the object. In such situations, the transport of the object is interrupted, which disrupts normal operation of the transport vehicle.

[0006] In view of the above situation, there is a need for a technology that enables flexible operation of transport vehicles according to the situation. [Means for solving the problem]

[0007] a traveling unit that travels along a rail; a holding unit that holds the object to be conveyed; A transport vehicle equipped with The holding unit is connected to the traveling unit via a connecting mechanism, the coupling mechanism is configured to be changeable between a coupled state in which the traveling unit and the holding unit are coupled and a separated state in which the traveling unit and the holding unit are separated, The traveling unit operates in both a connected traveling mode in which it travels while connected to the holding unit via the connecting mechanism, and a separate traveling mode in which it travels independently while separated from the holding unit.

[0008] According to this configuration, the traveling unit can operate in the coupled traveling mode to properly transport the transported object. Furthermore, the traveling unit can operate in the separate traveling mode to travel independently while separated from the holding unit. This allows the traveling unit to perform a different task in a location separate from the holding unit while the separate traveling mode is running. Furthermore, for example, if a malfunction occurs only in the traveling unit, the traveling unit can independently take measures to resolve the malfunction, without the holding unit being involved. As described above, this configuration enables flexible operation of the transport vehicle according to the situation.

[0009] Further features and advantages of the techniques according to the present disclosure will become more apparent from the following description of exemplary and non-limiting embodiments, which proceeds with reference to the drawings. [Brief explanation of the drawings]

[0010] [Figure 1] Schematic plan view of the transport facility [Figure 2] Side view of the transport vehicle [Figure 3] FIG. 10 is a diagram illustrating an example of replacement processing; [Figure 4] A diagram showing modified example 1 [Figure 5] A diagram showing modified example 1 [Figure 6] FIG. 2 shows modified example 2 [Figure 7] A diagram showing modified example 3 [Figure 8] A diagram showing modified example 4 DETAILED DESCRIPTION OF THE INVENTION

[0011] The transport vehicle and transport facility equipped with the transport vehicle according to the present disclosure can be used, for example, in a semiconductor manufacturing factory. In this case, the objects to be transported by the transport vehicle are substrate containers (so-called FOUPs: Front Opening Unified Pods) that store substrates (wafers, panels, etc.), reticle containers (so-called reticle pods) that store reticles, etc. Hereinafter, embodiments of the transport vehicle and transport facility equipped with the transport vehicle according to the present disclosure will be described with reference to the drawings.

[0012] As shown in FIG. 1, the conveyance facility 100 includes a conveyance vehicle V that travels on a travel route 9, and a control system C that controls the conveyance vehicle V. In this embodiment, the conveyance facility 100 includes a plurality of conveyance vehicles V. The control system C is configured using a host control device that manages the conveyance facility 100. However, the control system C may also be configured to include a control device provided in each conveyance vehicle V.

[0013] The travel path 9 is configured using rails 90 (see FIG. 2). That is, the transport facility 100 is equipped with rails 90. The transport vehicle V is configured as a so-called ceiling transport vehicle that travels along the rails 90 installed near the ceiling.

[0014] In this embodiment, the transport vehicle V is configured to travel along the travel route 9 in a predetermined direction. In other words, the travel route 9 is configured to allow the transport vehicle V to travel only in one direction. However, the travel route 9 may allow the transport vehicle V to travel temporarily backward.

[0015] As shown in FIG. 2, the transport vehicle V includes a traveling unit 1 that travels along a rail 90, and a holding unit 2 that holds an object W to be transported. The holding unit 2 is connected to the traveling unit 1 via a connecting mechanism 3. The movement trajectory of the traveling unit 1 traveling along the rail 90 and the movement trajectory of the holding unit 2 connected to the traveling unit 1 are configured not to overlap with each other. In this example, the traveling unit 1 is configured to travel above the rail 90. The holding unit 2 is configured to travel below the rail 90.

[0016] The connecting mechanism 3 is configured to be able to change its state between a connected state in which the traveling unit 1 and the holding unit 2 are connected, and a separated state in which the traveling unit 1 and the holding unit 2 are separated.

[0017] The connecting mechanism 3 includes a traveling unit side connecting portion 31 provided on the traveling unit 1 and a holding unit side connecting portion 32 provided on the holding unit 2. At least one of the traveling unit side connecting portion 31 and the holding unit side connecting portion 32 is provided with a connecting drive portion for changing the state of the connecting mechanism 3 between a connected state and a separated state. In this embodiment, the connecting drive portion is provided on the traveling unit side connecting portion 31. However, a configuration in which the connecting drive portion is provided on the holding unit side connecting portion 32 may also be adopted.

[0018] In this embodiment, the traveling unit side connecting section 31 includes a gripping mechanism 31a that grips the holding unit 2 and a lifting mechanism 31b that raises and lowers the gripping mechanism 31a. The gripping mechanism 31a constitutes at least a part of the above-mentioned connecting drive section. For example, the gripping mechanism 31a includes a pair of claws that move toward and away from each other, and a motor (not shown) that operates the pair of claws.

[0019] In this embodiment, the holding unit side connecting portion 32 is a gripped portion that is gripped by the gripping mechanism 31a when the coupling mechanism 3 is in a coupled state. The holding unit side connecting portion 32 has a shape corresponding to the gripping mechanism 31a. In this example, the holding unit side connecting portion 32 is formed in a flange shape so that it can be appropriately gripped by a pair of claws of the gripping mechanism 31a.

[0020] The traveling unit 1 is configured to be able to operate in a coupled traveling mode in which it travels while coupled to the holding unit 2 via the coupling mechanism 3, and a separate traveling mode in which it travels independently while separated from the holding unit 2. In Fig. 2, the traveling unit 1 operating in the coupled traveling mode is shown by a solid line, and the traveling unit 1 operating in the separate traveling mode is shown by a virtual line.

[0021] In this embodiment, the propulsion unit 1 includes a propulsion drive unit 1b and a power storage device 1a (hereinafter referred to as "propulsion unit side power storage device 1a") that serves as the drive source for the propulsion drive unit 1b. The propulsion drive unit 1b is configured to be driven by the power stored in the propulsion unit side power storage device 1a. The propulsion drive unit 1b includes wheels and a motor (not shown). However, the propulsion drive unit 1b can also be configured using a linear motor. The propulsion unit side power storage device 1a is configured using a battery or a capacitor, or both.

[0022] The holding unit 2 is configured to move along the travel path 9 while connected to the traveling unit 1. In other words, the holding unit 2 is configured not to be able to travel on its own when separated from the traveling unit 1.

[0023] The holding unit 2 is configured to hold the transport object W. The holding unit 2 can hold the transport object W in various ways, such as a chuck type, a fork type, a conveyor type, or a placement type.

[0024] In this embodiment, the holding unit 2 includes a transfer section 20 that transfers the transport target object W between the transfer target location (not shown). The transfer target location includes a load port, a buffer, or an inlet conveyor for bringing the transport target object W into the automated warehouse or an outlet conveyor for taking the transport target object W out of the warehouse.

[0025] In this embodiment, the transfer unit 20 includes a transfer gripper 20a that grips the transport target object W, and a transfer lifting unit 20b that lifts and lowers the transfer gripper 20a. As a result, the transfer unit 20 is configured to transfer the transport target object W to and from the transfer target location.

[0026] In this embodiment, the holding unit 2 is equipped with a power storage device 2a (hereinafter referred to as "holding unit side power storage device 2a"). The above-mentioned transfer unit 20 is configured to be driven by power stored in the holding unit side power storage device 2a, at least when the holding unit 2 is separated from the traveling unit 1. When the holding unit 2 is connected to the traveling unit 1, the transfer unit 20 may be driven by power supplied from the traveling unit 1.

[0027] As shown in FIG. 1, in this embodiment, the conveying equipment 100 includes a plurality of traveling units 1. The conveying equipment 100 also includes a plurality of holding units 2. In this example, the number of traveling units 1 present in the conveying equipment 100 is greater than the number of holding units 2. However, the number of traveling units 1 and the number of holding units 2 may be the same. Note that the triangle symbols in FIGS. 1 and 3 represent the conveying vehicles V, and in particular, a shaded triangle represents a traveling unit 1 connected to a holding unit 2, and a hollow triangle represents a standalone traveling unit 1 separated from the holding unit 2.

[0028] The transport facility 100 includes a support area 6 where the holding unit 2 separated from the traveling unit 1 is supported, and a power replenishment area 8 where the traveling unit side power storage device 1a is charged and / or replaced. The power replenishment area 8 is provided along a rail 90.

[0029] The power replenishment area 8 is equipped with at least one of an exchange device and a charging device. The exchange device is a device for exchanging the propulsion unit side power storage device 1a mounted on the propulsion unit 1. In this case, the propulsion unit 1 that has completed the exchange of its propulsion unit side power storage device 1a in the power replenishment area 8 can leave the power replenishment area 8 early. The charging device is a device for charging the propulsion unit side power storage device 1a mounted on the propulsion unit 1. In this case, the propulsion unit 1 waits in the power replenishment area 8 until charging of the propulsion unit side power storage device 1a is complete. When multiple propulsion units 1 are replenishing power in the power replenishment area 8, the propulsion unit 1 that has completed replenishment with power leaves the power replenishment area 8 first.

[0030] In this embodiment, a transport device 60 that transports the holding unit 2 is provided in the support area 6. In this example, the transport device 60 is configured using a conveyor that transports the holding unit 2 while supporting it from below. However, the transport device 60 may also be an AGV, a forklift, a crane, or the like.

[0031] The conveying device 60 is configured to convey the holding unit 2 between a receiving position 61, which is positioned corresponding to a first position 91 on the traveling path 9 of the traveling unit 1 along the rail 90 and receives the holding unit 2 from the traveling unit 1, and a delivery position 62, which is positioned corresponding to a second position 92 on the traveling path 9 and delivers the holding unit 2 to the traveling unit 1.

[0032] In this embodiment, the receiving position 61 is located directly below the first position 91 on the traveling path 9. The delivery position 62 is located directly below the second position 92 on the traveling path 9. That is, the transport device 60 receives the holding unit 2 from the traveling unit 1 at the receiving position 61 when the traveling unit 1 is at the first position 91. The transport device 60 delivers the holding unit 2 to the traveling unit 1 at the delivery position 62 when the traveling unit 1 is at the second position 92. That is, the separation and connection of the traveling unit 1 and the holding unit 2 is performed in the support area 6. Note that the positional relationship between the first position 91 and the receiving position 61 and the positional relationship between the second position 92 and the delivery position 62 are not limited to the above-described positional relationship. These positional relationships may be any relationship that allows the traveling unit 1 and the holding unit 2 to be separated and connected.

[0033] In this embodiment, the first position 91 is located upstream of the power replenishment area 8 along the travel route 9. The second position 92 is located downstream of the power replenishment area 8 along the travel route 9.

[0034] In this embodiment, the travel path 9 includes a transport path 9a along which the travel unit 1 travels to transport the transport object W, and a replenishment path 9b, which is a dedicated path along which the travel unit 1 travels to replenish power. The above-mentioned power replenishment area 8 is provided on the replenishment path 9b. The replenishment path 9b is configured to branch off from the transport path 9a and merge back into the transport path 9a. In this example, the branching point where the replenishment path 9b branches off from the transport path 9a is located downstream of the first position 91. The merging point where the replenishment path 9b merges with the transport path 9a is located upstream of the second position 92.

[0035] As shown in FIG. 3 , in this embodiment, when the control system C determines that the power stored in the traveling unit-side power storage device 1a has fallen below a predetermined threshold, the control system C places the connecting mechanism 3 in a separated state while the transport vehicle V is in a position corresponding to the support area 6 (first position 91 in this example), causing the holding unit 2 to be supported on the support area 6, and causes the traveling unit 1 to travel to the power replenishment area 8 in separated travel mode. This allows the traveling unit 1 to travel independently to the power replenishment area 8 while separated from the holding unit 2. Then, in the power replenishment area 8, the traveling unit-side power storage device 1a is replaced or charged. Note that the threshold can be determined based on a ratio of the maximum capacity of the traveling unit-side power storage device 1a, or can be determined as an absolute value unrelated to the maximum capacity of the traveling unit-side power storage device 1a.

[0036] In this embodiment, the control system C sets the coupling mechanism 3 to the separated state when the transport vehicle V is at the first position 91, and causes the transport device 60 to support the holding unit 2 at the receiving position 61. The control system C causes the transport device 60 to transport the holding unit 2 from the receiving position 61 to the delivery position 62. This makes it possible to transport the holding unit 2, for example, by utilizing a period when the traveling unit 1 is heading independently toward the power replenishment area 8. The control system C sets the coupling mechanism 3 to the coupled state when the traveling unit 1 is at the second position 92, and couples the holding unit 2 at the delivery position 62 to the traveling unit 1. The traveling unit 1 to which the holding unit 2 at the delivery position 62 is to be coupled may be the traveling unit 1 that was previously separated from the holding unit 2 at the first position 91, or it may be a different traveling unit 1.

[0037] The multiple traveling units 1 include a first traveling unit 11 and a second traveling unit 12 that is a traveling unit 1 different from the first traveling unit 11. In FIG. 3(a), the traveling unit 1 that is executing the coupled traveling mode is referred to as the first traveling unit 11, and the other traveling unit 1 that is preceding the first traveling unit 11 is referred to as the second traveling unit 12.

[0038] 3(a), the traveling unit 1 in the coupled traveling mode, i.e., the first traveling unit 11 coupled to the holding unit 2, stops at a first position 91 on the traveling path 9. In the illustrated example, the preceding second traveling unit 12 is replenishing power in the power replenishing area 8.

[0039] As shown in FIG. 3(b), the first traveling unit 11 separates from the holding unit 2 and starts the separate traveling mode. The first traveling unit 11 enters the replenishment path 9b and heads toward the power replenishment area 8. The transport device 60 receives the holding unit 2 from the first traveling unit 11 at a receiving position 61 and transports the holding unit 2 toward a delivery position 62. In the illustrated example, the second traveling unit 12 has finished replenishment with power and has exited the power replenishment area 8.

[0040] 3(c), the holding unit 2 transported by the transport device 60 arrives at the delivery position 62. The first traveling unit 11 separates from the holding unit 2 and heads toward the power replenishment area 8, where it replenishes power. The second traveling unit 12 travels near a second position 92 on the travel path 9.

[0041] 3(d), the conveying device 60, at the delivery position 62, hands over the holding unit 2 to the second traveling unit 12, which is at the second position 92 on the traveling path 9. The second traveling unit 12 couples with the holding unit 2 and starts the coupled traveling mode.

[0042] 3, the holding unit 2, which was initially connected to the first traveling unit 11, is connected to the second traveling unit 12 after being separated from the first traveling unit 11. As described above, in this embodiment, the control system C is configured to be able to execute a replacement process that switches the connection target of the holding unit 2 from the first traveling unit 11 to the second traveling unit 12. In the example shown in FIG. 3, the replacement process involves the transport of the holding unit 2 by the transport device 60.

[0043] However, the replacement process is possible even if the conveying device 60 does not transport the holding unit 2. In this case, the control system C may couple the holding unit 2, which has separated from the first traveling unit 11 at the first position 91 and is supported at the receiving position 61, to the second traveling unit 12 that has stopped at the first position 91 after the first traveling unit 11 has retreated from the first position 91. If the second traveling unit 12 is behind the first traveling unit 11, the second traveling unit 12 continues to move forward to the first position 91 and couples with the holding unit 2 supported in the support area 6. On the other hand, if the second traveling unit 12 is ahead of the first traveling unit 11, after separating from the holding unit 2, the first traveling unit 11 moves backward to retreat from the first position 91, and the second traveling unit 12 moves backward to couple with the holding unit 2 at the first position 91.

[0044] In addition, if the replacement process is not performed, the first traveling unit 11, which has separated from the holding unit 2 at the first position, heads to the second position 92 after completing power replenishment in the power replenishment area 8, and connects with the holding unit 2 at the second position 92.

[0045] Furthermore, if the remaining power of the traveling unit side power storage device 1a mounted on the first traveling unit 11 is sufficient, the first traveling unit 11 does not head to the power replenishment area 8, but instead passes through the first position 91 and the second position 92 along the transport path 9a.

[0046] [Variation 1] Next, a modified example (1) will be described with reference to FIGS.

[0047] 4 and 5, in the modified example (1), the connecting mechanism 3 includes a drive roller 31c and a roller support portion 31d that rotatably supports the drive roller 31c. In this example, the plurality of drive rollers 31c and the roller support portion 31d (two roller support portions 31d in the illustrated example) are included in the traveling unit side connecting portion 31.

[0048] In this example, the multiple drive rollers 31c are arranged side by side along the travel path 9. The multiple drive rollers 31c are supported by the roller support portion 31d in a state in which the rotation axis of each of the multiple drive rollers 31c extends in a direction perpendicular to the travel path 9 when viewed in the up-down direction.

[0049] The roller support portion 31d protrudes downward from the main body of the traveling unit 1. The plurality of drive rollers 31c are supported below the rail 90 by the roller support portion 31d.

[0050] The holding unit side connecting portion 32 is supported by the plurality of drive rollers 31c when the connecting mechanism 3 is in a connected state. In this example, the holding unit side connecting portion 32 protrudes upward from the main body of the holding unit 2, and contacts the plurality of drive rollers 31c from above when the connecting mechanism 3 is in a connected state. That is, in this example, the holding unit side connecting portion 32 is configured to be supported from below by the plurality of drive rollers 31c when the connecting mechanism 3 is in a connected state.

[0051] The plurality of drive rollers 31c are controlled so as to be fixed (not to rotate) when supporting the holding unit side connecting portion 32.

[0052] In this example, in the replacement process for switching the connection target of the holding unit 2, the holding unit 2 is handed over between the running unit side coupling part 31 provided on the first running unit 11 and the running unit side coupling part 31 provided on the second running unit 12. In other words, the holding unit 2 is handed over directly between the first running unit 11 and the second running unit 12 without first supporting the holding unit 2 on the support area 6 or the like. This type of replacement process can also be called a "direct replacement process."

[0053] In the direct replacement process, the control system C positions the first traveling unit 11, which is operating in the connected traveling mode and connected to the holding unit 2, and the second traveling unit 12, which is operating in the separate traveling mode, adjacent to each other on the traveling path 9.

[0054] The control system C gradually transitions the connected state of the connecting mechanism 3 of the first traveling unit 11 to a separated state, and gradually transitions the separated state of the connecting mechanism 3 of the second traveling unit 12 to a connected state. The control system C realizes the transition of the state of the connecting mechanism 3 by driving the drive roller 31c of each traveling unit 1 to rotate.

[0055] When the control system C causes both the connecting mechanism 3 of the first traveling unit 11 and the connecting mechanism 3 of the second traveling unit 12 to undergo a state transition, it causes the first traveling unit 11 and the second traveling unit 12 to travel in the same direction. For example, when the first traveling unit 11 is in front and the second traveling unit 12 is behind it, it causes both the first traveling unit 11 and the second traveling unit 12 to move forward.

[0056] During state transitions, if there is an element of a "connected state" in both the state of the coupling mechanism 3 of the first traveling unit 11 and the state of the coupling mechanism 3 of the second traveling unit 12, the holding unit side coupling portion 32 will be supported by both the first traveling unit 11 and the second traveling unit 12 (the state shown in FIG. 4). From here, the state transition of the coupling mechanism 3 of both the first traveling unit 11 and the second traveling unit 12 will progress further, and eventually the connected state of the coupling mechanism 3 of the second traveling unit 12 will become dominant. When the coupling mechanism 3 of the first traveling unit 11 is completely disconnected and the coupling mechanism 3 of the second traveling unit 12 is completely connected, the direct swapping process is complete.

[0057] In the above, an example has been described in which the direct replacement process is executed by moving the first traveling unit 11 and the second traveling unit 12 forward, but the direct replacement process may also be executed by moving both units backward.

[0058] Furthermore, although the above describes an example in which the direct replacement process is performed by moving the first traveling unit 11 and the second traveling unit 12 forward or backward, the direct replacement process may also be performed while the first traveling unit 11 and the second traveling unit 12 are stopped. In this case, only the drive rollers 31c of the first traveling unit 11 and the second traveling unit 12 are rotated. As a result, only the holding unit 2 moves between the first traveling unit 11 and the second traveling unit 12, which are stopped.

[0059] [Variation 2] Next, a modified example (2) will be described with reference to FIG.

[0060] As shown in FIG. 6 , in variant example (2), in the direct replacement process, the control system C arranges the first traveling unit 11 operating in the coupled traveling mode and the second traveling unit 12 operating in the separated traveling mode side-by-side on separate traveling paths 9 arranged adjacent to each other in parallel. In other words, the first traveling unit 11 and the second traveling unit 12 are arranged adjacent to each other along a direction perpendicular to the traveling path 9 when viewed from above. The control system C then transitions the coupled state of the coupling mechanism 3 of the first traveling unit 11 to a separated state, and transitions the separated state of the coupling mechanism 3 of the second traveling unit 12 to a coupled state.

[0061] In the direct replacement process in this example, the positions of the first traveling unit 11 and the second traveling unit 12 are maintained, and only the holding unit 2 moves from a position corresponding to the first traveling unit 11 to a position corresponding to the second traveling unit 12. As a result, the holding unit 2 changes from being connected to the first traveling unit 11 to being connected to the second traveling unit 12, and the direct replacement process is completed.

[0062] Although detailed illustration is omitted, in this example, the traveling unit side connecting portion 31 of the second traveling unit 12 includes a plurality of drive rollers 31c and a roller support portion 31d that rotatably supports the plurality of drive rollers 31c, similar to the above-described modified example (1). However, in this example, the plurality of drive rollers 31c are arranged side by side in a direction perpendicular to the traveling path 9 when viewed in the vertical direction. Furthermore, the plurality of drive rollers 31c are supported by the roller support portion 31d with the rotation axis of each of the plurality of drive rollers 31c extending in the extension direction of the traveling path 9. This makes it possible to move the holding unit 2 in the direction perpendicular to the traveling path 9 when viewed in the vertical direction.

[0063] [Variation 3] Next, a modified example (3) will be described with reference to FIG.

[0064] 7, in the modified example (3), the traveling unit side connecting part 31 has a hook 31e that engages with the holding unit side connecting part 32. The hook 31e is configured to be raised and lowered by a lifting mechanism 31b.

[0065] In this example, the holding unit side connecting portion 32 is an engaged portion that is engaged with the hook 31e in the connected state of the connecting mechanism 3. The holding unit side connecting portion 32 has a shape corresponding to the hook 31e.

[0066] In this example, the connection and disconnection states of the connection mechanism 3 are realized by combining the lifting and lowering of the hook 31e by the lifting mechanism 31b and the forward and backward movement of the hook 31e by the forward and backward movement of the traveling unit 1.

[0067] [Variation 4] Next, a modification (4) will be described with reference to FIG.

[0068] In this example, the holding unit 2 is configured to be able to execute both a connected transfer mode in which the holding unit 2 is connected to the traveling unit 1 and transfers the transport object W between the transfer target location 7, and a separated transfer mode in which the holding unit 2 is separated from the traveling unit 1 and supported on the support area 6 and transfers the transport object W between the transfer target location 7. Figure 8 shows the holding unit 2 executing the separated transfer mode. As described above, the transfer target location 7 may be a load port, a buffer, an inbound conveyor, an outbound conveyor, or the like.

[0069] The support area 6 includes a support portion 63 that supports the holding unit 2. In this example, the support portion 63 is configured using a support base that supports the holding unit 2 from below.

[0070] In this example, the support portion 63 is provided with an opening 63a through which the transport target object W can pass in the vertical direction. The opening 63a may be a hole or a notch. Alternatively, if the support portion 63 is configured using a plurality of discontinuous members, for example, a pair of plate members arranged at a distance from each other, the opening 63a may be formed between the pair of plate members.

[0071] In this example, the holding unit 2 executes the separation transfer mode while being supported by the support part 63. The holding unit 2 executes the separation transfer mode using the holding unit side power storage device 2a as the power source of the transfer part 20. In the separation transfer mode, the holding unit 2 transfers the transport target object W to and from the transfer target location 7 located directly below the support part 63 by raising and lowering the transfer gripper 20a using the transfer lifting part 20b. The transfer gripper 20a passes through the opening 63a in the vertical direction, thereby raising and lowering the range from above the support part 63 to below the support part 63.

[0072] In the above, an example has been described in which the transfer target location 7 is located directly below the support part 63. However, without being limited to this example, the transfer target location 7 and the support part 63 may be located in positions where they do not at least partially overlap each other in a plan view. In this case, the transfer part 20 may be equipped with a slide mechanism that moves the transport target W in the horizontal direction, a turning mechanism that changes the direction of movement of the transport target W by the slide mechanism, or the like. For example, the slide mechanism may be equipped with an arm, a fork, or the like.

[0073] In the above, an example has been described in which the transfer unit 20 is powered by the electricity stored in the holding unit side power storage device 2a. However, the present invention is not limited to this example, and for example, a power supply device may be installed on the support unit 63, and the transfer unit 20 may be configured to operate by receiving a supply of electricity from the power supply device.

[0074] In the above, an example has been described in which the support portion 63 is configured to support the holding unit 2 from below. However, without being limited to such an example, the support portion 63 may be configured, for example, to support the holding unit 2 by suspending it from above. In this case, the support portion 63 does not need to be provided with the opening 63a described above.

[0075] [Other Modifications] In the above, examples have been described in which the connecting mechanism 3 is of the gripping type, roller type (Variations 2 and 3), and hook type (Variation 4). However, other types of connecting mechanism 3 can also be used. For example, the connecting mechanism 3 may be of a magnetic type. In this case, the traveling unit side connecting portion 31 and the holding unit side connecting portion 32 are connected by the magnetic force of the magnet. When the connecting mechanism 3 is of the magnetic type, it is preferable to use an electromagnet. In this way, by controlling the current flow state of the electromagnet, the connecting mechanism 3 can be appropriately transitioned between the separated state and the connected state. The connecting mechanism 3 may be configured by combining some or all of the above types.

[0076] The configurations disclosed in the above-described embodiments can be applied in combination with configurations disclosed in other embodiments as long as no contradictions arise. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate within the scope of the present disclosure.

[0077] [Summary of this embodiment] The summary of this embodiment will be described below.

[0078] a traveling unit that travels along a rail; a holding unit that holds the object to be conveyed; A transport vehicle equipped with The holding unit is connected to the traveling unit via a connecting mechanism, the coupling mechanism is configured to be changeable between a coupled state in which the traveling unit and the holding unit are coupled and a separated state in which the traveling unit and the holding unit are separated, The traveling unit operates in both a connected traveling mode in which it travels while connected to the holding unit via the connecting mechanism, and a separate traveling mode in which it travels independently while separated from the holding unit.

[0079] According to this configuration, the traveling unit can operate in the coupled traveling mode to properly transport the transported object. Furthermore, the traveling unit can operate in the separate traveling mode to travel independently while separated from the holding unit. This allows the traveling unit to perform a different task in a location separate from the holding unit while the separate traveling mode is running. Furthermore, for example, if a malfunction occurs only in the traveling unit, the traveling unit can independently take measures to resolve the malfunction, without the holding unit being involved. As described above, this configuration enables flexible operation of the transport vehicle according to the situation.

[0080] It is preferable that the movement locus of the traveling unit traveling along the rail and the movement locus of the holding unit in a state connected to the traveling unit do not overlap each other.

[0081] According to this configuration, the traveling unit and the holding unit can be prevented from interfering with each other.

[0082] A conveying facility including the conveying vehicle, The rail; a support area on which the holding unit separated from the traveling unit is supported; a control system for controlling the transport vehicle; Equipped with The traveling unit includes a traveling drive unit and a power storage device that is a drive source for the traveling drive unit, It is preferable that a power replenishment area where the power storage device is at least one of charged and replaced is provided along the rail.

[0083] According to this configuration, for example, when the power stored in the storage device falls below a predetermined threshold, the holding unit separated from the traveling unit can be properly supported in the support area, while the traveling unit separated from the holding unit can be driven to a power replenishment area, and at least one of charging and replacing the storage device can be properly performed.

[0084] a transport device that transports the holding unit is provided in the support area; the transport device is configured to transport the holding unit between a receiving position that is disposed corresponding to a first position in a travel path of the traveling unit along the rail and receives the holding unit from the traveling unit, and a delivery position that is disposed corresponding to a second position in the travel path and delivers the holding unit to the traveling unit, The control system includes: With the transport vehicle at the first position, the coupling mechanism is set to the disconnected state, and the holding unit is supported by the transport device at the receiving position; The conveying device conveys the holding unit from the receiving position to the delivery position; It is preferable that, with the traveling unit in the second position, the coupling mechanism be in the coupled state to couple the holding unit in the delivery position to the traveling unit.

[0085] With this configuration, when the holding unit is connected to the traveling unit, it can move along the traveling path of the traveling unit, and when separated from the traveling unit, it can be moved along a path different from the traveling path of the traveling unit by the conveying device. Therefore, with this configuration, it is easy to increase the flexibility of facility operation.

[0086] the transport vehicle is configured to travel along the travel path in a predetermined direction; the first location is located upstream of the power replenishment area along the travel path; Preferably, the second location is located downstream of the power replenishment area along the travel path.

[0087] This configuration makes it easy to separate the holding unit from the traveling unit before the traveling unit heads toward the power replenishment area, and to connect the holding unit to the traveling unit after the traveling unit leaves the power replenishment area. This also simplifies the traveling path of the traveling unit.

[0088] a control system for controlling the transport vehicle; a plurality of the traveling units; The plurality of propulsion units include a first propulsion unit and a second propulsion unit that is a propulsion unit different from the first propulsion unit, Preferably, the control system is configured to be able to execute a switching process for switching the connection target of the holding unit from the first traveling unit to the second traveling unit.

[0089] According to this configuration, the same holding unit can be transported by separate traveling units, which makes it easier to increase the flexibility of facility operation.

[0090] the connecting mechanism includes a traveling unit side connecting portion provided on the traveling unit and a holding unit side connecting portion provided on the holding unit, In the replacement process, it is preferable that the holding unit is handed over between the running unit side connecting portion provided on the first running unit and the running unit side connecting portion provided on the second running unit.

[0091] According to this configuration, the holding unit can be handed over between different transport vehicles on the travel route without first being supported on a support area or the like.

[0092] a support area on which the holding unit separated from the traveling unit is supported; The holding unit includes a transfer unit that transfers the object to be transported between the holding unit and a transfer target location, It is preferable that the holding unit executes both a connected transfer mode in which the object to be transported is transferred between the transfer target location while connected to the running unit, and a separated transfer mode in which the object to be transported is transferred between the transfer target location while separated from the running unit and supported on the support area.

[0093] According to this configuration, the holding unit can transfer the object to be transported even when separated from the traveling unit by executing the separation transfer mode. [Industrial Applicability]

[0094] The technology disclosed herein can be used in transport vehicles and transport facilities equipped with transport vehicles. [Explanation of symbols]

[0095] 100:Transportation equipment 1: Travel unit 11: First traveling unit 12: Second traveling unit 1a: Travel unit side power storage device (power storage device) 1b: Travel drive unit 2: Holding unit 20: Transfer section 3:Connection mechanism 31: Travel unit side connection part 32: Holding unit side connection part 6: Support area 60:Transportation device 61: Receiving position 62: Delivery position 7: Transfer location 8: Power replenishment area 9: Driving route 90: Rail 91 :1st position 92: 2nd position C: Control system V: Transport vehicle W: Object to be conveyed

Claims

1. a traveling unit that travels along a rail; a holding unit that holds the object to be conveyed; A transport vehicle equipped with The holding unit is connected to the traveling unit via a connecting mechanism, the coupling mechanism is configured to be changeable between a coupled state in which the traveling unit and the holding unit are coupled and a separated state in which the traveling unit and the holding unit are separated, The travel unit of the transport vehicle operates in both a connected travel mode in which it travels while connected to the holding unit via the connection mechanism, and a separate travel mode in which it travels independently while separated from the holding unit.

2. The transport vehicle according to claim 1 , wherein a movement path of the traveling unit traveling along the rail and a movement path of the support unit coupled to the traveling unit do not overlap each other.

3. A transport facility including the transport vehicle according to claim 1 or 2, The rail; a support area on which the holding unit separated from the traveling unit is supported; a control system for controlling the transport vehicle; Equipped with The traveling unit includes a traveling drive unit and a power storage device that is a drive source for the traveling drive unit, a power replenishment area where the power storage device is at least one of charged and replaced is provided along the rail.

4. a transport device that transports the holding unit is provided in the support area; the transport device is configured to transport the holding unit between a receiving position that is disposed corresponding to a first position in a travel path of the traveling unit along the rail and receives the holding unit from the traveling unit, and a delivery position that is disposed corresponding to a second position in the travel path and delivers the holding unit to the traveling unit, The control system includes: With the transport vehicle at the first position, the coupling mechanism is set in the disconnected state, and the holding unit is supported by the transport device at the receiving position; The conveying device conveys the holding unit from the receiving position to the delivery position; The conveyance facility according to claim 3 , wherein the coupling mechanism is in the coupled state when the traveling unit is in the second position, thereby coupling the holding unit in the delivery position to the traveling unit.

5. the transport vehicle is configured to travel along the travel path in a predetermined direction; the first location is located upstream of the power replenishment area along the travel path; The transport facility according to claim 4 , wherein the second location is located downstream of the power replenishment area along the travel path.

6. A transport facility including the transport vehicle according to claim 1 or 2, a control system for controlling the transport vehicle; a plurality of the traveling units; The plurality of propulsion units include a first propulsion unit and a second propulsion unit that is a propulsion unit other than the first propulsion unit, the control system is configured to be able to execute a switching process of switching the connection target of the holding unit from the first traveling unit to the second traveling unit.

7. the connecting mechanism includes a traveling unit side connecting portion provided on the traveling unit and a holding unit side connecting portion provided on the holding unit, 7. The conveying equipment according to claim 6, wherein in the replacement process, the holding unit is transferred between the running unit side coupling portion provided on the first running unit and the running unit side coupling portion provided on the second running unit.

8. A transport facility including the transport vehicle according to claim 1 or 2, a support area on which the holding unit separated from the traveling unit is supported; The holding unit includes a transfer unit that transfers the object to be transported between the holding unit and a transfer target location, The conveying equipment performs both a connected transfer mode in which the holding unit is connected to the running unit and transfers the object to be transported between the transfer target location, and a separated transfer mode in which the holding unit is separated from the running unit and supported on the support area and transfers the object to be transported between the transfer target location.

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