Lightweight gear of pad dresser using water jet and manufacturing method

Abstract

To provide a lightweight gear of a pad dresser using a water jet capable of achieving weight saving and long service life, and a manufacturing method.SOLUTION: Manufacturing of a pad dresser for a polishing device includes a step S100 for processing a gear to gear thickness to make flatness maintain gear thickness t during water jet processing, a step S200 for processing a water jet processing hole of the gear by water jet cutting, a step S300 for joining a first segment and a second segment together to manufacture a segment having segment plate thickness T, a step S400 bonding the segment to the water jet processing hole by an epoxy adhesive, and a step S500 for completing the manufacturing of the gear that enables double side dressing while maintaining flatness.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a gear for a pad dresser, and in particular to a lightweight gear for a pad dresser using a water jet, which can be combined with a thin gear and a segment by using a water jet and epoxy adhesive, and which can be further lightened by forming holes in the thinned gear and segment through the combination with the segment, and a method for manufacturing the lightweight gear. [Background technology]

[0002] Generally, the wafer polishing process of a semiconductor polishing device is a chemical mechanical polishing process that combines mechanical removal processing and chemical removal processing into one processing method, and includes wafer polishing with a polishing pad and dressing with a pad dresser.

[0003] As an example, the pad dresser is composed of a combination of a gear and a segment, the gear meshing with and rotating between the inner and outer rotating gears of the polishing device, and the segment is attached to the gear (e.g., bonded or fixed) and faces the surface of the polishing pad to remove glazing on the surface of the polishing pad.

[0004] For this purpose, the pad dresser is manufactured in the following steps: 1) a gear (e.g., made of SUS or PVC material) is processed to a thickness (e.g., a thickness of 9 to 15T cross section) (in mm units), and the segment mounting portion is CNC machined → 2) the segment is separately manufactured (e.g., a thickness of 6T cross section) → 3) the segment is screwed onto the processed gear and assembled.

[0005] Therefore, the dressing of the pad dresser prevents a decrease in the polishing rate by removing glazing that occurs on the polishing pad during the polishing process and restoring the polishing pad to its original state. In this case, glazing is a phenomenon in which pad residues, wafer abrasive residues, and slurry particles that are generated by friction between the polishing pad and the wafer adhere to the pad surface.

[0006] In particular, the pad dresser is called a diamond dresser because diamonds are used in the segments.

[0007] Typically, the gear has a large size (e.g., outer diameter 432 mm, inner diameter 365 mm, thickness 10 to 18 mm) and a heavy weight (e.g., about 5 kg), which is unavoidable in that the gear must have a thickness of at least 9T to prevent distortion of flatness due to material deformation during CNC processing.

[0008] However, in industrial settings, the weight of the gears is inevitably a major issue affecting the ease of operation during the pad dresser replacement process. Summary of the Invention [Problem to be solved by the invention]

[0009] In consideration of the above points, the present invention aims to provide a lightweight gear for a pad dresser using a water jet, and a manufacturing method thereof, in which segment bonding holes are formed in the gear by water jet processing, which causes little deformation of the material, and segments with a double-sided diamond structure located in the segment bonding holes are fixed to the gear by epoxy bonding, so that the segments can be combined with a lightweight, thin gear; in particular, the double-sided diamond structure of the segments extends the gear's lifespan compared to a single-sided structure, and further weight reduction is possible by forming multiple rings in a concentric structure through multiple holes formed in the thin, lightweight gear. [Means for solving the problem]

[0010] In order to achieve the above-mentioned object, the manufacturing method of the lightweight pad dresser using a water jet of the present invention may be characterized by including the steps of processing a gear to a gear thickness that maintains flatness during water jet processing, processing a water jet processed hole in the gear by water jet cutting, joining a first segment and a second segment to form a segment having the thickness of a segment plate, bonding the segment to the water jet processed hole by epoxy bonding, and completing the manufacturing of a gear that can be double-sided dressed while maintaining the flatness.

[0011] Preferably, the thickness of the gear is set to 1 / 3 of the thickness required for CNC machining.

[0012] Preferably, the water jet machined holes are machined to penetrate the gear and are formed in plurality along the circumference of the gear. The segment plate thickness is the sum of the segment plate thickness of the first segment and the segment plate thickness of the second segment, and the segment plate thickness of the first segment and the segment plate thickness of the second segment are the same. Each of the first segment and the second segment has one side coated with diamonds and the other side without diamonds bonded with an adhesive.

[0013] Preferably, the epoxy bond is applied along the edges of the segment bond holes.

[0014] Preferably, the flatness is within 100 μm.

[0015] Furthermore, a lightweight pad dresser using a water jet according to the present invention for achieving the above-mentioned object may include a gear having a plurality of water jet-machined holes of a predetermined size formed along its circumference and a flatness of within 100 μm, and segments fixed to the water jet-machined holes with epoxy adhesive and having diamonds exposed on both sides, wherein the segments have a structure in which a first segment has the diamond applied to one side and a second segment is bonded to the other side with an adhesive.

[0016] Preferably, the gear is formed in a circular shape from SUS or PVC material, and the water jet processed holes are formed by a water jet on the gear edge width formed by the difference between the inner diameter and the outer diameter, and a plurality of the water jet processed holes are formed along the circumference with a structure that penetrates the gear.

[0017] Preferably, the segment plate thickness of the first segment and the segment plate thickness of the second segment are the same as each other, and each of the segment plate thicknesses may be greater than or equal to the thickness of the gear.

[0018] In addition, to achieve the above object, the lightweight gear of the pad dresser using a water jet of the present invention may include a gear plate having first, second, and third inner rings formed in water jet-machined holes inside the gear ring, a segment fixing part that integrates the first inner ring with the gear ring at a predetermined third angle, and a ring joint part that integrates the second and third inner rings with the first inner ring at a predetermined second angle, wherein the second angle is formed at an angle greater than the third angle.

[0019] Preferably, the ring joint portion and the segment fixing portion are linear, the third angle halves the second angle, and the number of the segment fixing portions is twice the number of the ring joint portions.

[0020] In addition, to achieve the above object, the lightweight gear of the pad dresser using a water jet of the present invention may include a gear plate having first, second, and third inner rings formed in water jet-machined holes inside the gear ring, a segment fixing part that integrates the first inner ring with the gear ring at a predetermined fourth angle, and a ring joint part that integrates the second and third inner rings with the first inner ring at a predetermined fifth angle, wherein the fourth angle is formed at an angle greater than the fifth angle.

[0021] Preferably, the ring joint portion is wedge-shaped with a "V"-shaped tip and a "U"-shaped base, the segment fixing portions are straight, the segment fixing portions and the ring joint portions are equal in number, the tip portions coincide with the fourth angle, and the base portions form the fifth angle.

[0022] Preferably, the gear is coupled with a carrier to form a first exposed space and a second exposed space, the first exposed space being the water jet machined hole in the gear plate, and the second exposed space being a space for positioning the wafer at the center point of the gear plate.

[0023] In addition, to achieve the above object, the lightweight gear of the pad dresser using a water jet of the present invention may include a gear plate having first, second, and third inner rings formed in water jet-machined holes inside the gear ring, a segment fixing part that integrates the first inner ring with the gear ring at a predetermined sixth angle, and a ring joint part that integrates the second and third inner rings with the first inner ring at a predetermined seventh angle, wherein the sixth angle is formed at an angle greater than the seventh angle.

[0024] Preferably, the ring joint portion is wedge-shaped with a "V"-shaped tip portion and a "U"-shaped base portion, the segment fixing portions are straight, the number of the segment fixing portions is twice the number of the ring joint portions, and they are located between the ring joint portions, the tip portion coincides with the sixth angle, and the base portion forms the seventh angle.

[0025] Preferably, the first, second and third inner rings form a concentric structure with the center point of the gear plate inside the gear ring, and the ring joint portion and the segment fixing portion form a radial arrangement in the circumferential direction with respect to the gear center point of the gear plate.

[0026] Preferably, the water jet machined holes are divided into outer machined holes that form the segment fixing portions in the gear ring and the first inner ring, and inner machined holes that form the ring joint portions in the second inner ring and the third inner ring. [Effects of the Invention]

[0027] The lightweight gear for a pad dresser using water jet machining and the manufacturing method of the present invention have a thickness that is approximately 1 / 3T and a weight that is approximately 1 / 3 of the thickness of a conventional gear of the same gear size (e.g., outer diameter 432 mm / inner diameter 365 mm), making them easier to handle and easier to replace. In particular, by combining a double-sided segment with a gear, the lifespan can be doubled compared to a combination of a single-sided segment and a gear.

[0028] Furthermore, the lightweight gear and manufacturing method for a pad dresser using water jet processing of the present invention are thinner and lighter than conventional gears, making them easier to handle and replace. In particular, since multiple rings are arranged in a concentric structure via multiple holes formed in the thin and lightweight gear, further weight reduction is possible. [Brief explanation of the drawings]

[0029] [Figure 1]1 is a flowchart illustrating a method for manufacturing a gear of a lightweight pad dresser using a water jet according to the present invention. [Figure 2] 1 shows an example of a gear structure and water jet processing in a manufacturing method of a lightweight pad dresser according to the present invention. [Figure 3] 1 is an example of manufacturing a gear into a lightweight gear through multiple gear rings and holes according to the present invention. [Figure 4] This is an example in which the durability of the lightweight gear according to the present invention is enhanced by changing the number of gear ring fixing parts. [Figure 5] This is an example in which the durability of the lightweight gear according to the present invention is enhanced by adjusting the width of the gear ring fixing portion. [Figure 6] 10 is an example of a method for manufacturing a lightweight pad dresser according to the present invention, in which a double-sided segment and a gear are bonded with epoxy. [Figure 7] 1 shows a state in which a pad dresser made by combining a gear and a segment according to the present invention is manufactured as a double-sided diamond dresser. [Figure 8] 1 shows a state in which a double-sided diamond dresser according to the present invention is applied to a polishing apparatus. DETAILED DESCRIPTION OF THE INVENTION

[0030] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying exemplary drawings. However, these embodiments are merely examples, and those skilled in the art will recognize that the present invention can be embodied in various different forms, and therefore, the present invention is not limited to the embodiments described herein.

[0031] Referring to FIG. 1, the method for manufacturing a lightweight gear for a pad dresser using a water jet includes a gear preparation step S100, a water jet machining step S200, a segment preparation step S300, an epoxy bonding step S400, and a pad dresser fabrication step S500.

[0032] Therefore, since the manufacturing method of the lightweight pad dresser is a manufacturing method of the lightweight pad dresser using water jet processing and epoxy bonding, the advantages of water jet processing enable the weight of the pad dresser as well as the gear to be reduced, and in particular, the pad dresser may be characterized as being a double-sided diamond dresser.

[0033] The gear preparation (S100) is performed by machining a gear 200 having a minimum thickness that allows flatness to be maintained.

[0034] The water jet machining (S200) can further reduce the weight of the gear by forming a concentric structure on the thin gear 200 using multiple water jet machining holes 230, as in S210, by forming segment bonding holes in the gear using water jet machining, and the water jet machining is performed while maintaining the flatness of the gear as in S220.

[0035] Referring to FIG. 2, the gear 200 is made of SUS or PVC material and comprises a ring-shaped gear plate 210 having a gear edge width W and a gear thickness t. The gear plate 210 forms a gear ring 200A on the outer edge of its outer diameter, thereby circumscribing each of the inner and outer rotating gears 30 and 40 (see FIG. 8) of the polishing device 10.

[0036] As an example, the gear edge width W is defined by the radial difference (Dd) between the inner diameter d and the outer diameter D of a circular ring to form the waterjet machined hole 230 to which the segment 300 (see FIG. 6) is bonded, and the waterjet machined hole 230 is formed to the same size over the entire circumference by dividing the 360° circumference of the gear 200 by an acute first angle θ. In this case, the outer diameter D is about 432 mm, the inner diameter d is about 365 mm, and the first angle θ is set to 15°, but may be set to a smaller or larger angle as needed.

[0037] Although the water jet machined hole 230 is depicted as a rectangle, it is actually formed as an arc corresponding to a first angle θ of approximately 15° around a 360° circle, and this is also true for the segment 300 (see FIG. 6) having the first angle θ.

[0038] In particular, the water jet machined holes 230 are located close to the inner diameter d and biased toward the inside of the gear relative to the center line KK of the gear edge width W, thereby improving the durability of the gear ring 200A on the outer diameter D side that rotates in mesh with the rotating gears 30 and 40.

[0039] As an example, the gear thickness t (unit: mm) is set to a thickness that maintains the flatness of the gear plate 210 without distortion even when the water jet machined holes 230 are machined, and since the water jet machined holes 230 are machined using water jet cutting technology, which causes less material deformation than CNC (Computerized Numerical Control) machining, the thickness of the water jet machined can be thinner than the thickness required for CNC machining.

[0040] In particular, the gear 200 forms a flatness (e.g., xxx μm) that ensures high process accuracy and uniform thickness for the wafer 90, and the set value of the flatness (e.g., xxx μm) may be within about 100 μm or may be the same.

[0041] Therefore, when the thickness of the CNC machined gear is 100%, the gear thickness t is applied at a rate of about 30 to 40%, preferably about 1 / 3 of the thickness. In this case, the thickness of the CNC machined gear can be exemplified as about 9 to 15T, and the thickness of the water jet machined gear can be exemplified as about 3 to 5T.

[0042] Furthermore, by forming holes in the gear 200, which has been thinned by combining it with the segment 300, it is possible to manufacture a lightweight gear that is even lighter in weight.

[0043] Referring to the lightweight gear of FIG. 3, the gear 200 is made of SUS or PVC material and includes a gear plate 210 in which a gear ring 200A and three inner rings 213, 214, and 215 of different sizes are formed in a concentric structure via a plurality of water jet machining holes 230.

[0044] The gear ring 200A has gear teeth formed on its outer circular edge that circumscribe the inner / outer rotating gears 30, 40 (see Figure 5) of the polishing device 10, respectively, and a gap is provided between the group of the gear ring 200A and the first inner ring 213 and the group of the second inner ring 214 and the third inner ring 215.

[0045] The first, second and third inner rings 213, 214 and 215 are three rings of different sizes, and form a concentric structure in the inner space of the gear ring 200A with the gear ring 200A as the outermost ring.

[0046] Therefore, the gear plate 210 includes a ring joint portion 211 and a segment fixing portion 212 that integrate the gear ring 200A and the first, second, and third inner rings 213, 214, and 215, and the ring joint portion 211 forms the spacing of the inner machined hole 230B among the water jet machined holes 230 to integrate the first, second, and third inner rings 213, 214, and 215 with the gear ring 200A, and the segment fixing portion 212 forms the spacing of the outer machined hole 230A among the water jet machined holes 230 to divide the ring joint portion 211 in half and integrate the first inner ring 213 with the gear ring 200A.

[0047] That is, the ring joint portions 211 and the segment fixing portions 212 are arranged radially in the circumferential direction with respect to the gear center point O of the gear plate 210, and the ring joint portions 211 form a predetermined second angle α with respect to the gear center point O, and the segment fixing portions 212 are located between two adjacent ring joint portions 211 at a predetermined third angle β with respect to the gear center point O, thereby dividing the second angle α into two equal parts. In this case, the second angle α is set to about 45°, and therefore the third angle β can be set to about 22.5°.

[0048] Furthermore, the outer machined holes 230A of the water jet machined holes 230 are used as segment bonding holes to bond the segments 300, and the inner machined holes 230B are machined as additional lightening holes to reduce the weight of the gear 200, but may also be used as segment bonding holes to bond the segments 300 if necessary.

[0049] In addition, the gear 200 defines a gear edge width W of the gear ring 200A and the first inner ring 213 by the diameter difference (Dd) between the outer diameter D of the gear ring 200A and the inner diameter d of the first inner ring 213, and a gear edge width of the second and third inner rings 214, 215 by the diameter difference between the outer diameter of the second inner ring 214 and the inner diameter of the third inner ring 215.

[0050] Therefore, the gear edge width W allows the outer machined hole 230A and the inner machined hole 230B of the water jet machined hole 230 to be formed in an arc shape, and the outer machined hole 230A is biased toward the inside of the gear with respect to the center line KK of the gear edge width W and is close to the inner diameter d, thereby improving the durability of the gear teeth on the outer diameter D side that rotate in mesh with the inner / external rotating gears 30, 40 (see Figure 6).

[0051] In addition, the gear 200 is set to a gear thickness t that maintains the flatness of the gear plate 210 without distortion even when the water jet machining holes 230 are machined. The gear thickness t can be thinner than the thickness required for CNC machining because the water jet machining holes 230, to which the segments 300 are attached, are machined using a water jet cutting (Water Jet Cutting) 400 technology that causes less material deformation than CNC (Computerized Numerical Control) machining. The flatness can be set to a flatness (e.g., xxx μm) that ensures process accuracy for the wafer 90 and high quality of uniform thickness.

[0052] On the other hand, the lightweight gear of FIG. 3 can strengthen the durability weakened by the first, second, and third inner rings 213, 214, and 215 of the gear 200 by the modified structure of the ring joint portion 211, as shown in FIGS. 4 and 5.

[0053] Referring to the lightweight gear with enhanced durability shown in FIG. 4, the gear 200 has a structure in which the gear plate 210 is formed by first, second, and third inner rings 213, 214, and 215, which are concentric with the gear ring 200A, a ring joint portion 211, and a segment fixing portion 212, as compared to the case shown in FIG. 3, but the shape and number of the ring joint portion 211 are different from those shown in FIG. 3, thereby enhancing the durability of the gear 200.

[0054] That is, the ring joint portions 211 are in a one-to-one match with the segment fixing portions 212, are positioned at the same positions as the segment fixing portions 212, form a fourth angle ε, and have a wedge shape with a width wider than the uniform linear width of the segment fixing portions 212. In this case, the fourth angle ε may be equal to the third angle β.

[0055] The wedge shape is divided into a pointed tip portion 211A and a flat base portion 211B, and the pointed shape of the tip portion 211A gradually narrows to match the formation point of the segment fixing portion 212, and the space portion 71 between the first inner ring 213 and the second inner ring 214 is ``V'' shaped to expose the carrier, and the flat ``U'' shape of the base portion 211B occupies the space between the second inner ring 214 and the third inner ring 215 (i.e., the inner machined hole 230B) with a certain width size.

[0056] Therefore, the ring joint portion 211 forms overlap angles (ε, γ) of a fourth angle ε and a fifth angle γ with respect to the gear center point O of the gear plate 210, and the fourth angle ε is the angle formed by the tip portion 211A of the ring joint portion 211 that coincides with the segment fixing portion 212, and the fifth angle γ is the angle formed by two adjacent base portions 211B at an angle smaller than the fourth angle ε depending on the width size of the base portions 211B.

[0057] Therefore, the fifth angle γ is smaller in size than the fourth angle ε.

[0058] Referring to the lightweight gear with enhanced durability shown in FIG. 5, the gear 200 has a structure in which the gear plate 210 is formed by first, second, and third inner rings 213, 214, and 215, which are concentric with the gear ring 200A, a ring joint portion 211, and a segment fixing portion 212, as compared to the case shown in FIG. 3. However, the ring joint portion 211 maintains a wedge shape formed by a tip portion 211A and a base portion 211B, but the number of ring joint portions 211 is reduced compared to the case shown in FIG. 4, and the difference is that ease of manufacture is emphasized over the durability of the gear 200.

[0059] That is, the number of the ring joint portions 211 is matched with the segment fixing portions 212 in a 2:1 ratio, and the number is reduced to half (i.e., 1 / 2) of that in Fig. 4, and the ring joint portions 211 form an overlapping angle (ζ, δ) of a sixth angle ζ and a seventh angle δ with respect to the gear center point O of the gear plate 210. In this case, the sixth angle ζ may be the same as the second angle α.

[0060] Therefore, the sixth angle ζ is the angle formed by the tip portion 211A of the ring joint portion 211 that coincides with the segment fixing portion 212, and the seventh angle δ is the angle formed by two adjacent base portions 211B at an angle smaller than the sixth angle ζ depending on the width size of the base portions 211B.

[0061] Therefore, the seventh angle δ is smaller in size than the sixth angle ζ.

[0062] Therefore, in Figures 2 to 5, the magnitude relationship among the first angle θ, the second angle α, the third angle β, the fourth angle ε, the fifth angle γ, the sixth angle ζ, and the seventh angle δ decreases from α and ζ to θ, such that "α, ζ>δ>β, ε>γ>θ".

[0063] Again, in the segment preparation (S300) of Figure 1, the segment fabrication (S310) is performed by confirming the double-sided dressing structure of the segment (S320), and the epoxy bonding (S400) is performed by bonding the segment 300 to the gear 200 with epoxy.

[0064] Referring to FIG. 6, the segment 300 forms a pair of first and second segments 300A and 300B bonded by an adhesive 350, and each of the first and second segments 300A and 300B may be characterized as a double-sided diamond segment that is sized and shaped to match the outer machining hole 230A of the water jet machining hole 230 and simultaneously polishes the upper and lower polishing pads 50 and 60.

[0065] The first and second segments 300A and 300B are composed of a first segment 300A and a second segment 300B bonded together via an adhesive 350, and each of the first segment 300A and the second segment 300B is a segment plate 310 having one surface coated with diamonds 330 as abrasive particles and the other surface coated with adhesive 350, forming a segment plate thickness T (unit: mm).

[0066] Therefore, the segment plate thickness T is formed by the sum (T1 + T2) of the segment plate thickness T1 of the first segment 300A and the segment plate thickness T2 of the second segment 300B, and the adhesive between the upper and lower segments. The thickness (T1) of the first segment 300A and the thickness (T2) of the second segment 300B are each larger than the gear thickness t, but may be applied to be the same thickness.

[0067] Next, the segment 300 is fixed in place in the segment bonding hole 230 of the gear 200 with epoxy adhesive 500, and the epoxy adhesive 500 is applied along the edge of the segment bonding hole 230. In this case, when the epoxy adhesive 500 is applied, care should be taken to ensure that the diamonds 330 of the first segment 300A and the diamonds 330 of the second segment 300B of the segment 300 protrude evenly from the gear thickness t of the gear 200.

[0068] Finally, the pad dresser fabrication (S500) is a process for completing the fabrication of a gear that can be double-sided dressed while maintaining the final flatness.

[0069] Referring to FIG. 7, the gear 200 has a double-sided dressing structure in which the diamonds 330 of the first and second segments 300A and 300B protrude from the upper and lower surfaces at a gear thickness t that is thinner than the segment plate thickness T of the segment 300. Such a double-sided dressing structure may be characterized in that the pad dresser 100 is a double-sided diamond dresser.

[0070] In particular, the pad dresser 100 completes the manufacturing process while maintaining the flatness (e.g., xxx μm) of the gear 200 within or equal to the set value of the final flatness (e.g., yyy μm), which is about 100 μm, thereby ensuring process precision and high quality of uniform thickness for the wafer 90. In this case, the set value of the flatness, "yyy μm," can be set to the same as "xxx μm."

[0071] Furthermore, the bonding force between the segment 300 and the gear 200 is greater than or equal to the bonding force between the first and second segments 300A, 300B, which are inserted and installed into the water jet machined hole 230 during polishing and therefore maintain polishing even when removed, because the polishing function is lost when the entire first and second segments 300A, 300B are removed from the water jet machined hole 230.

[0072] Meanwhile, referring to FIG. 8, the polishing apparatus 10 includes rotating gears (inner / outer gears) 30, 40, polishing pads 50, 60, and a pad dresser 100 combined with a carrier 70 on which a wafer 90 is positioned.

[0073] That is, the polishing apparatus 10 is composed of an internal rotary gear 30 that rotates the upper polishing pad 50 clockwise by motor power, an external rotary gear 40 that rotates the lower polishing pad 60 counterclockwise by motor power, and a carrier 70 that positions the wafer 90 to be polished through counter-rotation and friction between the upper and lower polishing pads 50, 60. These components 30, 40, 50, 60, and 70 are well-known components of the polishing apparatus 10, so detailed description thereof will be omitted.

[0074] However, the polishing apparatus 10 may also be configured with a pad dresser 100 .

[0075] The pad dresser 100 of FIG. 2 is composed of a combination of a gear 200 and a segment 300. The gear 200 is annular and is located between the inner rotary gear 30 and the outer rotary gear 40. The gear 200 rotates by meshing with the rotary gears 30 and 40 via an outer gear ring 200A. A plurality of segments 300 of a predetermined size are arranged around the 360° circumference of the gear 200.

[0076] The pad dresser 100 of Figures 3 to 5 allows for further weight reduction of the gear plate 21 because the water jet machined holes 230 formed in the gear plate 21 for joining the gear 200 and the segment 300 form both outer machined holes 230A and inner machined holes 230B.

[0077] In addition, the gear 200 is coupled to the carrier 70 to form a first exposed space 71 and a second exposed space 73, the first exposed space 71 being a water jet machined hole 230 in the gear plate 210, and the second exposed space 73 being a space for positioning the wafer 90 at the center point of the gear plate 210.

[0078] Therefore, the water jet machined holes 230 are divided into water jet machined holes 230A in the gear ring 200A and the first inner ring 213, and water jet machined holes 230B in the second inner ring 214 and the third inner ring 215, which allows for further weight reduction of the gear plate 21 and is formed in the first exposed space 71.

[0079] As a result, each of the pad dressers 100 in Figures 2 and 3 to 5 removes pad glazing, which is pad residue, wafer abrasives, residue, and slurry particles that adhere to the upper and lower polishing pads 50 and 60 during the polishing process of the wafer 90, and restores the pads to their original state so that the polishing rate is maintained, allowing the wafer 90 to have flatness that is closely related to wafer efficiency and process stability.

[0080] Furthermore, the pad dresser 100 is a double-sided pad dresser manufactured by a lightweight pad dresser manufacturing method using water jet processing and epoxy bonding, and is composed of a pair of first and second segments 300A and 300B (see Figure 6), each having a row of diamond 330 particles, thereby enabling simultaneous pad glazing removal from the upper polishing pad 50 of the first segment 300A and the lower polishing pad 60 of the second segment 300B.

[0081] Therefore, the pad dresser 100 performs simultaneous double-sided polishing using the structural features of a double-sided pad dresser, thereby eliminating fine damage caused by scratches or particles generated by pad glazing and providing excellent flatness to the wafer 90, thereby ensuring high process precision and uniform thickness. This is particularly suitable for ultra-thin silicon wafers and MEMS devices, for which double-sided polishing is essential.

[0082] As described above, the lightweight gear 200 of the pad dresser using a water jet according to this embodiment can be divided into 360° circumferences of the gear 200 by the water jet machined holes 230 at an acute first angle θ, or the lightweight gear 200 can be formed by the water jet machined holes 230, which form a concentric structure with the gear ring 200A, forming a ring joint that integrates the first, second, and third inner rings 213, 214, and 215. The second angle α of the ring joint portion 211 includes the third angle β of the segment fixing portion 212 that integrates the first inner ring 213 with the gear ring 200A, or the fourth angle ε includes the fifth angle γ due to the wedge shape of the ring joint portion 211, or the sixth angle ζ includes the seventh angle δ due to the wedge shape of the ring joint portion 211, and by combining the segments 300, the thin gear 200 is made into a concentric structure by the water jet machined holes 230, thereby further reducing its weight. [Explanation of symbols]

[0083] 10: Polishing equipment 30, 40: Inner / Outer Gear 50, 60: Upper / lower polishing pad 70: Career 71: 1st exposure space 73:Second exposure space 90: Wafer 100: Pad Dresser 200: Gear 200A: Gearing 210: Gear plate 211: Ring joint part 211A: Tip 211B: Basal part 212: Segment fixing part 213, 214, 215: 1st, 2nd, 3rd inner rings 230: Water jet drilled holes 230A: Outside machined hole 230B: Inner machined hole 300: Segment 300A, 300B: 1st and 2nd segments 310: Segment plate 330: Diamond 350: Adhesive 400: Water jet processing 500: Epoxy adhesive

Claims

1. In the manufacture of pad dressers for polishing equipment, machining the gear to a gear thickness t that maintains flatness during water jet machining; machining a water jet hole in the gear by water jet cutting; joining the first segment and the second segment to form a segment having a segment plate thickness T; gluing the segments into the waterjet drilled holes with epoxy; and completing the production of a gear that can be double-sided dressed while maintaining the flatness.

2. The segment plate thickness T is 2. The method for manufacturing a lightweight pad dresser using a water jet according to claim 1, wherein the sum of the segment plate thickness of the first segment and the segment plate thickness of the second segment is greater than the gear thickness t of the gear.

3. The water jet machined holes are 2. The method for manufacturing a lightweight pad dresser using a water jet according to claim 1, wherein a plurality of water jets are formed along the circumference of the gear and machined so as to penetrate the gear.

4. Each of the first segment and the second segment includes:

2. The method for manufacturing a lightweight pad dresser using a water jet according to claim 1, wherein one side of the pad dresser is coated with diamonds.

5. The epoxy adhesive is The method for manufacturing a lightweight pad dresser using a water jet according to claim 1, characterized in that the water jet is applied along the edge of the water jet machined hole.

6. In a pad dresser for a polishing device, A gear having a plurality of water jet processed holes formed along its circumference; a segment having diamonds exposed on both sides while fixed in the water jet machined hole, The segment is A lightweight pad dresser using a water jet, characterized in that it has a joint structure of a first segment and a second segment, each having the diamond coated on one side thereof.

7. The gear is It is made of SUS or PVC material and has a circular shape.

7. The lightweight pad dresser using a water jet according to claim 6, wherein the water jet processed holes are processed by a water jet in a gear edge width formed by a diameter difference between an inner diameter and an outer diameter.

8. The water jet machined holes are 8. The lightweight pad dresser using a water jet according to claim 7, wherein a plurality of the gears are formed along the circumference with a structure penetrating the gear.

9. The gear is a gear ring formed in a circular ring shape and made of SUS or PVC material; a gear plate having first, second, and third inner rings formed in the water jet machined holes; a segment fixing portion that unites the gear ring and the first inner ring; 7. The lightweight pad dresser using a water jet according to claim 6, further comprising a ring joint portion that joins the first inner ring with the second inner ring and the third inner ring.

10. The first, second, and third inner rings comprise: forming a concentric structure with the center point of the gear plate; The ring joint portion and the segment fixing portion are 10. The lightweight pad dresser using a water jet according to claim 9, wherein the gears are arranged radially in a circumferential direction relative to a gear center point of the gear plate.

11. the gear is coupled with the carrier to form a first exposed space and a second exposed space; 10. The lightweight pad dresser using a water jet as claimed in claim 9, wherein the first exposed space is the water jet machined hole in the gear plate, and the second exposed space positions the wafer at the center point of the gear plate.

12. The water jet machined holes are 12. The lightweight pad dresser using a water jet according to claim 11, wherein the holes are divided into the holes formed in the gear ring and the first inner ring, and the holes formed in the second inner ring and the third inner ring.

13. The first segment and the second segment are 7. The lightweight pad dresser using a water jet as described in claim 6, wherein the adhesive force bonding the first segment and the second segment to the water jet machined hole is greater than the adhesive force bonding the surface not coated with diamond.

14. In the gear of the pad dresser for polishing equipment, a gear ring formed in a circular ring shape and made of SUS or PVC material; a gear plate having first, second, and third inner rings formed in water jet machined holes; a segment fixing portion that unites the gear ring and the first inner ring; A lightweight gear for a pad dresser using a water jet, comprising a tip portion and a base portion that integrate a first inner ring, a second inner ring, and a third inner ring.

15. the tip and base portions form a wedge shape; The lightweight gear for a pad dresser using a water jet according to claim 14, wherein the segment fixing portion is formed in a linear shape.

16. The tip is "V" shaped; the base is "U" shaped; 16. The lightweight gear of a pad dresser using a water jet according to claim 15, wherein the "V" shape and the "U" shape are combined to form a wedge shape.

17. the tip portion and the base portion form a ring joint portion; The lightweight gear for a pad dresser using a water jet according to claim 14, wherein the ring joint portion and the segment fixing portion are connected to each other.

18. the tip portion and the base portion form a ring joint portion; The lightweight gear for a pad dresser using a water jet according to claim 14, wherein the number of the segment fixing portions is twice the number of the ring joint portions.

19. the first, second, and third inner rings form a concentric structure with a center point of the gear plate; The lightweight gear of a pad dresser using a water jet according to claim 14, wherein the tip portion, the base portion and the segment fixing portion form a radial arrangement in a circumferential direction with respect to a gear center point of the gear plate.

20. The water jet machined holes are 15. The lightweight gear of a pad dresser using a water jet according to claim 14, wherein the machined holes are divided into the gear ring and the first inner ring, and the second inner ring and the third inner ring.

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