Liquid processing system, information processing device, and information processing method

Abstract

To provide a continuous prediction of a water quality of treated water.SOLUTION: A system has: a measuring device 210 that intermittently measures the water quality of liquid at a first point as the first water quality; and an information processing device 100 that predicts continuous time-series data of the water quality of liquid at a second point based on at least one of the performance of removing impurities in a liquid treatment device, an operating status of a control device provided between the first point and the second point provided downstream of the first point, and a flow rate of the liquid between the first point and the second point.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a liquid processing system, an information processing device, and an information processing method. [Background technology]

[0002] Generally, one method for testing the quality of ultrapure water supplied from an ultrapure water production facility to a point of use (for example, a location in a semiconductor cleaning device) is to use a concentration analysis using an ion exchanger. One such concentration analysis method involves passing ultrapure water through an ion exchanger for a predetermined period of time, removing and recovering the ion exchanger, eluting impurities from the recovered ion exchanger, and measuring their concentrations to test the quality of the ultrapure water (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-153854 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-described technology, even if the test results show that the concentration of an impurity contained in the ultrapure water exceeds the standard value, ultrapure water with a concentration exceeding the standard value is already supplied to the subsequent stage. Therefore, it is desirable to continuously predict the impurity concentration of ultrapure water supplied from the ultrapure water production facility to the subsequent stage.

[0005] An object of the present invention is to provide a liquid treatment system, an information processing device, and an information processing method that are capable of continuously predicting the water quality of treated water. [Means for solving the problem]

[0006] The liquid treatment system of the present invention comprises: a first measuring device that intermittently measures the water quality of the liquid at a first point as a first water quality; and an information processing device that predicts continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point and the flow rate of the liquid between the first point and the second point, and the first water quality.

[0007] Further, the information processing device of the present invention comprises: an acquisition unit that intermittently acquires the water quality of the liquid at the first point as a first water quality; The system has a water quality prediction unit that predicts continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point and the flow rate of the liquid between the first point and the second point, and the first water quality.

[0008] Further, the information processing method of the present invention comprises: A process of intermittently acquiring a water quality of the liquid at a first point as a first water quality; and performing a process of predicting continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point, the flow rate of the liquid between the first point and the second point, and the first water quality.

[0009] The program of the present invention also includes: On the computer, Intermittently acquiring a water quality of the liquid at a first point as a first water quality; and a procedure for predicting continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point, the flow rate of the liquid between the first point and the second point, and the first water quality. [Effects of the Invention]

[0010] In the present invention, the quality of treated water can be continuously predicted. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram showing a first embodiment of a liquid treatment system of the present invention; [Figure 2] FIG. 2 is a diagram illustrating an example of the configuration of a distribution line illustrated in FIG. [Figure 3] 2 is a diagram illustrating an example of an internal configuration of the information processing device illustrated in FIG. 1. [Figure 4] 4 is a flowchart illustrating an example of an information processing method in the information processing device shown in FIG. 3. [Figure 5] FIG. 2 is a diagram showing a second embodiment of the liquid treatment system of the present invention. [Figure 6] 10 is a graph showing an example of time-series data of measurement data measured in advance, the open / closed state of a valve arranged in a distribution line, and flow velocity data in the distribution line. [Figure 7] 10 is a graph showing an example of time-series data of the analysis results of water quality, the open / closed state of a valve arranged in a distribution line, flow velocity data in the distribution line, and predicted concentration. [Figure 8] FIG. 10 is a diagram showing a third embodiment of the liquid treatment system of the present invention. [Figure 9] FIG. 10 is a diagram showing a fourth embodiment of the liquid treatment system of the present invention. [Figure 10] 10 is a diagram illustrating an example of an internal configuration of the information processing device illustrated in FIG. 9. FIG. [Figure 11]11 is a flowchart illustrating an example of an information processing method in the information processing device shown in FIG. [Figure 12] FIG. 10 is a diagram showing a fifth embodiment of the liquid treatment system of the present invention. [Figure 13] FIG. 10 is a diagram showing a sixth embodiment of the liquid treatment system of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. (First embodiment)

[0013] 1 is a diagram showing a first embodiment of a liquid treatment system according to the present invention. As shown in FIG. 1, the liquid treatment system according to this embodiment includes an information processing device 100, a measuring device 210, a pretreatment device 300, a primary pure water production facility 400, a secondary pure water production facility 500 as a subsystem, and a distribution line 600.

[0014] The pretreatment device 300 includes a sand filtration device, an activated carbon device, a softening device, and a decarbonation device. The configuration of the pretreatment device 300 is not limited to this. For example, the configuration of the pretreatment device 300 may be a configuration that does not include some of the devices described above, or a configuration that includes the above-described devices in addition to other devices. The sand filtration device uses sand as a filter medium to filter the water to be treated. The activated carbon device uses activated carbon with a porous structure to further filter the treated water from the sand filtration device. The softening device uses an ion exchange resin that removes hardness components from the water to remove hardness components from the treated water from the activated carbon device. The decarbonation device degasses (removes) carbon dioxide gas from the treated water from the softening device using, for example, a decarbonation membrane that allows gas to pass through.

[0015] The primary pure water production facility 400 includes a reverse osmosis (RO) membrane device 401 to which water to be treated is supplied, an ultraviolet oxidation device 402, an ion exchange device 403, and a membrane degassing device 404. The configuration of the primary pure water production facility 400 is not limited to this configuration. In the primary pure water production facility 400, for example, the order in which the ultraviolet oxidation device 402, the ion exchange device 403, and the membrane degassing device 404 are arranged is not particularly limited. An SB-P (multi-bed regenerative ion exchange device) is provided as the ion exchange device 403. The membrane degassing device 404 removes gas components such as oxygen from the treated water.

[0016] The secondary pure water production system 500 includes a primary pure water tank 501, a heat exchanger 502, an ultraviolet oxidation device 503, an ion exchange device 504, a membrane degassing device 505, and an ultrafiltration membrane device 506. Treated water (ultrapure water) produced by the secondary pure water production system 500 is supplied to a cleaning device (point-of-use) 700. The primary pure water tank 501 stores primary pure water produced by the primary pure water production system 400. The heat exchanger 502 adjusts the temperature of the primary pure water supplied from the primary pure water tank 501. The ultraviolet oxidation device 503 irradiates the water to be treated, the temperature of which has been adjusted by the heat exchanger 502, with ultraviolet light to decompose organic matter contained in the water. The ion exchange device 504 removes ionic components from the water to be treated that has been treated by the ultraviolet oxidation device 503. The ion exchange device 504 is a non-regenerative cartridge polisher filled with a mixed bed of cation exchange resin and anion exchange resin. The membrane degassing device 505 removes gases such as dissolved oxygen and carbon dioxide from the water to be treated that has been treated in the ion exchange device 504. The filtration membrane device 506 is an ultrafiltration membrane device (UF) that removes fine particles from the water to be treated that has been treated in the membrane degassing device 505. The configuration of the secondary pure water production system 500 is not limited to the above-described configuration. For example, a hydrogen peroxide removal device that decomposes hydrogen peroxide generated in the ultraviolet oxidation device 503 may be provided between the ultraviolet oxidation device 503 and the ion exchange device 504. Impurities removed by the secondary pure water production system 500 include metals, ions, TOC (Total Organic Carbon), urea, dissolved oxygen, hydrogen peroxide, fine particles, etc. A method for testing metals contained in the water to be treated when the impurities are metals will be described later.

[0017] The measuring instrument 210 measures the water quality and flow rate (hereinafter referred to as flow rate or flow rate) of the water to be treated supplied to the secondary pure water production facility 500 at point 200. In this embodiment, the measuring instrument 210 is the first measuring instrument. Point 200 is the inlet of the secondary pure water production facility 500 (specifically, a point between the outlet of the primary pure water production facility 400 and the secondary pure water production facility 500). Point 200 is the first point in this embodiment. Examples of water quality measured by the measuring instrument 210 include metal concentration, TOC concentration, urea concentration, pH, oxidation-reduction potential, dissolved oxygen concentration, hydrogen peroxide concentration, particulate concentration and particulate count, silica concentration, boron concentration, and specific ion concentration in the water to be treated. The measuring instrument 210 also has the functions of a flowmeter, pressure gauge, water thermometer, electrical conductivity meter, and resistivity meter, and measurements made using these functions may also be used to calculate the water quality. Meter 210 notifies information processing device 100 of the measured value. Meter 210 also notifies information processing device 100 of the measured value along with measurement date and time information indicating the date and time when the value was measured.

[0018] The distribution line 600 is a path composed of pipes, valves, etc. for supplying treated water treated in the secondary pure water production facility 500 to the cleaning device 700. The cleaning device 700 is a device that uses the treated water supplied via the distribution line 600 to clean objects such as semiconductors.

[0019] FIG. 2 is a diagram showing an example of the configuration of the distribution line 600 shown in FIG. 1. As shown in FIG. 2, the distribution line 600 shown in FIG. 1 is a path composed of piping that supplies treated water supplied from the secondary pure water production facility 500 to one or more cleaning devices (cleaning devices 700-1 to 700-4 in the example shown in FIG. 2). When multiple cleaning devices are provided, the distribution line 600 distributes the treated water supplied from the secondary pure water production facility 500 to the multiple cleaning devices. The distribution line 600 may also be provided with a path that returns treated water supplied from the secondary pure water production facility 500 (specifically, treated water supplied from the secondary pure water production facility 500 that was not used in the cleaning devices 700-1 to 700-4) to the secondary pure water production facility 500. The distribution line 600 may use valves to control distribution to each cleaning device.

[0020] The information processing device 100 is connected to the measuring device 210 wirelessly or via a wire. Fig. 3 is a diagram showing an example of the internal configuration of the information processing device 100 shown in Fig. 1. As shown in Fig. 3, the information processing device 100 shown in Fig. 1 has an acquisition unit 110, a water quality prediction unit 120, and an output unit 130. Of the components included in the information processing device 100 shown in Fig. 1, Fig. 3 shows only the main components related to this embodiment.

[0021] The acquisition unit 110 acquires the measurement values ​​(water quality values ​​and flow velocity values) and measurement date and time information at the point 200 notified by the measuring device 210. The acquisition unit 110 notifies the water quality prediction unit 120 of the acquired measurement values ​​and measurement date and time information.

[0022] The water quality prediction unit 120 continuously predicts the quality of treated water obtained by treating the water to be treated measured by the measuring instrument 210 in the secondary pure water production facility 500, based on the impurity removal performance (removal performance) of the secondary pure water production facility 500 and measurement values ​​(e.g., impurity concentrations) notified from the acquisition unit 110. This predicted continuous water quality is time-series water quality data predicted at a preset cycle. This cycle is a time period equal to or shorter than a predetermined threshold. Point 201 is a second point in this embodiment. Specifically, the water quality prediction unit 120 continuously predicts the water quality at point 201 based on the measurement values ​​(e.g., impurity concentrations) notified from the acquisition unit 110 and the removal performance of the secondary pure water production facility 500.

[0023] The water quality prediction unit 120 may also predict the water quality at point 201 after a travel time from when the measuring instrument 210 measured the water quality based on the impurity removal performance (removal performance) of the secondary pure water production system 500, the measurement values ​​and measurement date and time information notified by the acquisition unit 110, and the travel time for water passing through point 200 to arrive at point 201 located at the outlet of the secondary pure water production system 500 (specifically, between the outlet of the secondary pure water production system 500 and the distribution line 600). In this case, specifically, the water quality prediction unit 120 calculates the travel time for the water to travel from point 200 to point 201 based on the flow velocity value notified by the acquisition unit 110 and the liquid treatment time in the devices located between point 200 and point 201. The water quality prediction unit 120 may also divide the sum of the volume of the piping and the volume of the reaction tank through which the water to be treated passes from point 200 to point 201 by the flow velocity, and calculate the result as the travel time. Then, the water quality prediction unit 120 predicts the water quality at point 201 after the travel time from when the measuring instrument 210 measured the water quality based on the calculated travel time, the measurement value and measurement date and time information notified by the acquisition unit 110, and the performance of the secondary pure water manufacturing equipment 500 to remove impurities.

[0024] The impurity removal performance of the secondary pure water production system 500 can be, for example, the removal rate at which the secondary pure water production system 500 removes specific impurities from the water to be treated. The removal rate may be stored, for example, in a memory unit or the like provided in the information processing device 100. The removal rate may be a value calculated using the formula (("impurity concentration at the inlet side of the secondary pure water production system 500" - "impurity concentration at the outlet side of the secondary pure water production system 500") / "impurity concentration at the inlet side of the secondary pure water production system 500"), or may be a value set in advance depending on the device configuration of the secondary pure water production system 500. Furthermore, because the removal rate of the secondary pure water production system 500 gradually decreases as the amount of water to be treated increases, the removal rate may be reset based on the amount of water to be treated.

[0025] The travel time is measured as the time it takes for water to pass through point 200 and arrive at point 201. The measurement method may be, for example, a method of measuring based on the flow rate value notified from the acquisition unit 110, the piping length in the secondary pure water production facility 500, and the liquid treatment time in the equipment installed in the secondary pure water production facility 500. Alternatively, this measurement method may be a method of using a pre-measured value. The measured travel time may be stored in a memory unit or the like provided in the information processing device 100. It is preferable that the travel time be calculated based on values ​​measured multiple times.

[0026] Furthermore, if a degree of change indicating the degree to which the water quality changes from point 200 until it reaches point 201 is measured in advance, the water quality prediction unit 120 may also use this degree of change when predicting the water quality at point 201. The degree of change is a value measured in advance that indicates the degree to which the water quality changes as the water passes through the path from point 200 to point 201 (including the piping, valves, etc. arranged along the path), excluding the secondary pure water production equipment 500. The degree of change is preferably calculated based on values ​​measured in multiple measurements. For example, the degree of change may be measured in advance to determine how the water quality changes with elapsed time or the opening and closing of valves arranged along the path, and the relationship between the elapsed time, the opening and closing of valves, and the change in water quality. It is preferable to perform this measurement multiple times and measure the average value and trend of the measurements.

[0027] In this way, the water quality prediction unit 120 predicts what water quality value the water (liquid) that has passed through point 200 will have at point 201 after being processed in the secondary pure water production equipment 500. The water quality prediction unit 120 also predicts the date and time when the water (liquid) that has passed through point 200 will pass point 201 again. The water quality prediction unit 120 may take into account the operating status of the secondary pure water production equipment 500 when predicting the water quality. In other words, if the secondary pure water production equipment 500 is not operating, the impurity removal rate in the secondary pure water production equipment 500 may be excluded from the information used to calculate the predicted water quality.

[0028] The output unit 130 outputs information indicating the water quality predicted by the water quality prediction unit 120. At this time, the output unit 130 also outputs the date and time (timing) when the water quality is predicted to be measured at the point 201. The predicted date and time is the date and time after the travel time from the date and time indicated by the measurement date and time information acquired by the acquisition unit 110 from the measuring device 210. The output form of the output unit 130 may be display, print, or transmission to another device. Furthermore, the output unit 130 may store the information indicating the water quality predicted by the water quality prediction unit 120 in a memory unit or the like within the information processing device 100 or in a database or the like external to the information processing device 100.

[0029] The following describes an information processing method in the information processing device 100 shown in Fig. 3. Fig. 4 is a flowchart for explaining an example of an information processing method in the information processing device 100 shown in Fig. 3.

[0030] The acquisition unit 110 acquires the measurement value at point 200 measured by the measuring instrument 210 and measurement date and time information (step S1). The acquisition unit 110 also acquires the removal performance for removing impurities in the secondary pure water production equipment 500 (step S2). The acquisition unit 110 also acquires the travel time for water (liquid) that has passed through point 200 to arrive at point 201, which is provided at the outlet of the secondary pure water production equipment 500 (step S3). In the processing of steps S2 and S3, the acquisition unit 110 acquires this information from a storage unit or the like. Next, the water quality prediction unit 120 predicts the water quality at point 201 based on the water quality measurement value and measurement date and time information acquired by the acquisition unit 110, the removal performance acquired in step S2, and the travel time acquired in step S3 (step S4). The specific prediction method is as described above. Furthermore, the water quality prediction unit 120 may continuously predict the water quality of treated water obtained by treating the water to be treated measured by the measuring instrument 210 in the secondary pure water production facility 500, based on the water quality measurement value acquired by the acquisition unit 110 and the removal performance acquired in step S2. The output unit 130 outputs the water quality value predicted by the water quality prediction unit 120 (step S5). (Second embodiment)

[0031] Fig. 5 is a diagram showing a second embodiment of the liquid treatment system of the present invention. As shown in Fig. 5, the liquid treatment system in this embodiment includes an information processing device 100, a measuring device 211, a secondary pure water production facility 500, and a distribution line 600. The information processing device 100, the secondary pure water production facility 500, and the distribution line 600 are the same as those in the first embodiment.

[0032] The measuring instrument 211 measures the water quality and flow rate of the treated water treated by the secondary pure water production equipment 500 at point 201. The measuring instrument 211 is the first measuring instrument in this embodiment. Point 201 is a point at the outlet of the secondary pure water production equipment 500 (specifically, between the outlet of the secondary pure water production equipment 500 and the distribution line 600). Point 201 is the first point in this embodiment. The type of water quality measured by the measuring instrument 211 may be the same as the type of water quality measured by the measuring instrument 210 in the first embodiment. The measuring instrument 211 notifies the information processing device 100 of the measured value. The measuring instrument 211 also notifies the information processing device 100 of the measured value along with measurement date and time information indicating the date and time the value was measured.

[0033] The information processing device 100 is connected to the measuring device 211 wirelessly or via a wire. The components of the information processing device 100 are the same as those of the information processing device 100 in the first embodiment. This embodiment differs from the first embodiment in the point at which water quality is acquired or predicted.

[0034] The acquisition unit 110 acquires the values ​​(water quality value and flow velocity value) and measurement date and time information at the point 201 notified from the measuring instrument 211. The acquisition unit 110 notifies the water quality prediction unit 120 of the acquired water quality value and measurement date and time information.

[0035] The water quality prediction unit 120 predicts the water quality at point 202, which is the inlet of the cleaning device 700, based on the measurement values ​​notified by the acquisition unit 110 and a pre-measured change in the water quality as the water passes through a path from point 201 to point 202, including the distribution line 600. Point 202 is the second point in this embodiment. Changes in the water quality before and after passing through the distribution line 600 are measured in advance. For example, changes in the water quality of the water passing through the distribution line 600 in response to the opening and closing of a valve installed in the distribution line 600 may be measured in advance, and the relationship between the opening and closing of the valve and the change in water quality may be registered. It is preferable to perform this measurement multiple times and measure the average value and trend of the results. The water quality prediction unit 120 may also use the pre-registered relationship to predict the water quality at point 202. These pre-registered relationships are relationships that have been experimentally calculated in advance, such as the relationship between the opening and closing of the valve and changes in water quality, the relationship between the opening and closing of the valve and the amount of elution from the pipes or valves, and the relationship between changes in flow rate (water volume) and the amount of elution from the pipes or valves.

[0036] Furthermore, the water quality predicting unit 120 may predict the water quality at point 202, which is the entrance to the cleaning device 700, based on the measurement values ​​and measurement date and time information notified by the acquiring unit 110, the travel time taken for water to pass through point 201 and arrive at point 202, which is located at the entrance to the cleaning device 700, and a pre-measured degree of change in the quality of the water as it passes through a path from point 201 to point 202, including distribution line 600. In this case, specifically, the water quality predicting unit 120 calculates the travel time taken for the water to travel from point 201 to point 202 based on the flow velocity value notified by the acquiring unit 110. Furthermore, the water quality predicting unit 120 may divide the sum of the volume of the piping and the volume of the reaction tank through which the water to be treated passes from point 201 to point 202 by the flow velocity, and calculate the result as the travel time. Then, the water quality prediction unit 120 predicts the water quality at point 202, which is the entrance to the cleaning device 700, based on the calculated travel time, the water quality value (e.g., impurity concentration) notified by the acquisition unit 110, and the above-mentioned degree of change.

[0037] In this way, the water quality prediction unit 120 predicts what water quality value the water (liquid) that has passed through point 201 will have at point 202 as it passes through distribution line 600. The water quality prediction unit 120 also predicts the date and time when the water (liquid) that has passed point 201 will pass point 202.

[0038] FIG. 6 is a graph showing an example of time-series data of pre-measured measurement data, the open / close states of valves arranged in the distribution line 600, and flow rate data in the distribution line 600. The pre-measured measurement data is time-series data of water quality measured in advance at point 202. FIG. 6 shows an example in which the distribution line 600 is equipped with three valves, valves A to C, which are control devices. In reality, there is a transit time between the measurement data at point 202 and the open / close states and flow rate data of each valve arranged in the distribution line 600, depending on the arrangement. In FIG. 6, the transit time is omitted to make it easier to understand the correlation. As shown in FIG. 6, the timing at which the water quality changes (the amount of impurities increases) in the measurement data is, for example, when the open / close states of valves A to C are all open (more specifically, when at least one of valves A to C changes from closed to open). Furthermore, the timing at which the water quality changes further (the amount of impurities increases) in the measurement data is when the open / close states of valves A to C are all open and the flow rate becomes faster. As described above, there is a correlation between the measurement data at point 202, the open / close states of the valves arranged in distribution line 600, and the flow rate data in distribution line 600. Using this correlation (trend), it is possible to predict the water quality according to the operating conditions of distribution line 600. Specifically, the water quality prediction unit 120 acquires the amount of change in impurity concentration associated with the open / close states of valves A to C based on the flow rate values ​​(flow rate data) notified by the acquisition unit 110, the open / close states of valves A to C, and the correlation shown in FIG. 6. Then, the water quality prediction unit 120 predicts the impurity concentration at point 202 using the acquired amount of change in impurity concentration and the impurity concentration, which is the water quality value, notified by the acquisition unit 110.

[0039] 7 is a graph showing an example of time-series data of the analysis results of the treated water sampled at point 201, the open / closed state of the valves arranged in distribution line 600, flow velocity data in distribution line 600, and predicted concentrations at point 202. The analysis results are the results of analyzing the concentrations of impurities in the treated water sampled at point 201.

[0040] Typically, water quality analysis of treated water is performed by sampling the treated water in a bottle and using a specified device. In some cases, the water to be treated is passed through an ion exchanger attached to the device, and after a specified period of time, the ion exchanger is removed and collected. Impurities are eluted from the collected ion exchanger and their concentration is measured. Therefore, a certain period of time is required to obtain analysis results. For example, analysis results are obtained by extracting treated water passing through point 201 and analyzing the impurity concentration in the extracted treated water using an ICP-MS or other device that calculates the impurity concentration in the test water. Tests using such devices produce intermittent analysis results. In other words, when multiple analyses are performed in a chronological order to obtain results, the multiple analysis results are obtained at a specified time interval. Data on the open / close status of the valves arranged in the distribution line 600 and the flow rate data in the distribution line 600 are acquired at time intervals shorter than the time interval at which analysis results are obtained. Furthermore, this short time interval is a time equal to or shorter than a specified threshold, which corresponds to the continuous time described in the first embodiment.

[0041] FIG. 7 shows an example in which there is one valve, which is a control device, arranged in distribution line 600.

[0042] In reality, there is a travel time between the analysis result at point 201 and the open / closed state and flow rate data of the valves arranged in distribution line 600 depending on their arrangement. In Fig. 7, the travel time is omitted to make it easier to understand the correlation between them.

[0043] As shown in FIG. 7 , the predicted concentration changes (increases) after, for example, a change in the valve state (more specifically, after the valve state changes from open to closed or from closed to open), particularly after the valve state changes and the flow rate increases. For example, a change in the valve state can increase the impurity concentration in the treated water, and an increase in the flow rate can increase the amount of impurities eluted from the piping, thereby increasing the impurity concentration in the treated water. Thus, there is a correlation between the water quality (impurity concentration) at point 202 and the valve state of the distribution line 600 and the flow rate data in the distribution line 600. Using this correlation (trend), it is possible to predict water quality according to the operating status of the distribution line 600. In other words, by supplementing analytical results, which are only obtained intermittently, with continuously obtained data on the valve state and flow rate, continuous time-series data on the water quality can be predicted.

[0044] An example of a method for complementing the analysis results is described below. First, the analysis results (top graph in FIG. 7) obtained by analyzing the impurity concentration of the treated water at point 201 are obtained. If there is no change in the open / close state of the valves arranged in distribution line 600 or the flow rate of the treated water in distribution line 600, the analysis results at point 201 are obtained as a predicted concentration (first predicted concentration) for the period without change. On the other hand, if there is a change in the open / close state of the valves arranged in distribution line 600 or the flow rate of the treated water in distribution line 600, the amount of change is obtained from the relationship illustrated in FIG. 7, and the obtained amount of change is added to the analysis results at point 201 to obtain a predicted concentration (second predicted concentration). Thereafter, if there is no change in the open / close state of the valves arranged in distribution line 600 or the flow rate of the treated water in distribution line 600, the second predicted concentration is used as the predicted concentration for the period without change. Then, the analysis results obtained by analyzing the impurity concentration of the treated water at point 201 are obtained again. By repeating this process, the analysis results are complemented.

[0045] The water quality prediction unit 120 outputs a predicted concentration as shown in FIG. 7 based on the operating status of the distribution line 600 and the results of a pre-analysis. The water quality prediction unit 120 can predict water quality at shorter time intervals, i.e., continuously. Note that such intermittent analysis may also be performed on water passing through point 200 in the first embodiment. In this case, continuous time-series data on water quality can be predicted by complementing the intermittent analysis results with the constant removal performance of the secondary pure water production equipment 500. The obtained correlation is also saved and used as complementary data when predicting continuous water quality data from the intermittent analysis results.

[0046] The output unit 130 outputs information indicating the water quality predicted by the water quality prediction unit 120. At this time, the output unit 130 also outputs the date and time (timing) when it is predicted that the water quality will be measured at point 202. The predicted date and time is the date and time after the travel time from the date and time indicated by the measurement date and time information acquired by the acquisition unit 110 from the measuring device 211. The output mode of the output unit 130 may be the same as that of the first embodiment. (Third embodiment)

[0047] Fig. 8 is a diagram showing a third embodiment of the liquid treatment system of the present invention. As shown in Fig. 8, the liquid treatment system in this embodiment has an information processing device 100, a measuring device 210, a secondary pure water production facility 500, and a distribution line 600. The information processing device 100, the measuring device 210, the secondary pure water production facility 500, and the distribution line 600 are the same as those in the first embodiment.

[0048] The information processing device 100 is connected to the measuring device 210 wirelessly or via a wire. The components of the information processing device 100 are the same as those of the information processing device 100 in the first embodiment. This embodiment differs from the first embodiment in the point of predicting water quality.

[0049] The water quality prediction unit 120 predicts the water quality at point 202 based on the impurity removal performance (removal performance) of the secondary pure water production equipment 500, the measurement values ​​(e.g., impurity concentrations) acquired by the acquisition unit 110 from the measuring device 210, and a pre-measured degree of change in the quality of the water as it passes through the path from the inlet of the distribution line 600 to point 202. Point 200 is a first point in this embodiment. Point 202 is a second point in this embodiment. The impurity removal performance of the secondary pure water production equipment 500 is the same as in the first embodiment. The change in the quality of the water before and after passing through the distribution line 600 is the same as in the second embodiment. In this way, the water quality prediction unit 120 predicts what water quality value the measurement values ​​notified by the acquisition unit 110 will become at point 202 as the water passes through the secondary pure water production equipment 500 and the distribution line 600.

[0050] The water quality prediction unit 120 may also predict the water quality at point 202 based on the impurity removal performance (removal performance) of the secondary pure water production equipment 500, the measurement values ​​(e.g., impurity concentrations) and measurement date and time information acquired by the acquisition unit 110 from the measuring device 210, the travel time of water passing through point 200 to arrive at point 202 located at the entrance of the cleaning device 700, and a previously measured degree of change in the quality of the water as it passes through the path from the entrance of the distribution line 600 to point 202. When the water quality prediction unit 120 calculates the travel time, the calculation method may be the same as the method in the first embodiment. In this way, the water quality prediction unit 120 predicts what water quality value the water quality notified by the acquisition unit 110 will become at point 202 as it passes through the secondary pure water production equipment 500 and the distribution line 600, and what water quality value will be measured at point 202 after the travel time has elapsed from the date and time indicated by the measurement date and time information.

[0051] The output unit 130 outputs information indicating the water quality predicted by the water quality prediction unit 120. At this time, the output unit 130 also outputs the date and time (timing) when it is predicted that the water quality will be measured at point 202. The predicted date and time is the date and time after the travel time from the date and time indicated by the measurement date and time information acquired by the acquisition unit 110 from the measuring device 211. The output mode of the output unit 130 may be the same as that of the first embodiment.

[0052] As described above, in the first to third embodiments, water quality is measured at a first point, and continuous water quality data at a second point downstream from the first point is predicted based on intermittent measurements taken at the first point and changes in water quality in the equipment and piping installed between the first and second points. This allows for prediction of continuous time-series data of water quality when the water to be treated arrives at the second point from the intermittent measurements taken at the first point. Furthermore, water quality is measured at a first point, and water quality at a second point downstream from the first point is predicted based on the measurements and measurement dates and times taken at the first point, changes in water quality in the equipment and piping installed between the first and second points, and the travel time of the treated water from the first to second points. This allows for understanding the water quality when the treated water arrives at the second point when the treated water passes through the first point. For example, if the predicted quality of the water being treated at the time of passing the first point is predicted to not satisfy a predetermined condition, appropriate measures can be taken before the water is supplied to the second point. In other words, the quality of the water being supplied can be grasped in real time. Furthermore, if the device installed between the first and second points is a liquid treatment device that removes impurities from the water being treated, the impurity removal rate of the liquid treatment device can be used to predict the water quality, allowing for prediction of the water quality appropriate to the liquid treatment device. Furthermore, the correlation between the operating status of the device installed between the first and second points, for example, the on-off valves installed in the device and changes in water quality, is calculated in advance, and the water quality at the second point is predicted based on the calculated correlation. This allows for prediction of water quality appropriate to the operating status of the system. Furthermore, by complementing intermittently obtained analytical results with continuously obtained data on the valve opening / closing status, flow rate, and the operating status and performance of the device, continuous time-series data on water quality can be predicted. (Fourth embodiment)

[0053] Fig. 9 is a diagram showing a fourth embodiment of the liquid treatment system of the present invention. As shown in Fig. 9, the liquid treatment system in this embodiment has an information processing device 101, measuring devices 210 and 221, a secondary pure water production facility 500, and a distribution line 600. The measuring device 210, the secondary pure water production facility 500, and the distribution line 600 are the same as those in the first embodiment.

[0054] The measuring device 221 measures the water quality of the treated water treated by the secondary pure water production system 500 at point 201. In this embodiment, the measuring device 221 is a second measuring device. Point 201 is a point at the outlet of the secondary pure water production system 500 (specifically, a point between the outlet of the secondary pure water production system 500 and the distribution line 600). Point 201 is a second point in this embodiment. The type of water quality measured by the measuring device 221 may be the same as the type of water quality measured by the measuring device 210. However, the sensitivity of the measuring device 221 is at a level equal to or higher than the sensitivity of the measuring device 210. This sensitivity can be, for example, the resolution for identifying elements and their contents contained in the treated water. In this case, the resolution of the measuring device 221 is at a level equal to or higher than the resolution of the measuring device 210. This enables the measuring device 221 to measure concentrations lower than those of the measuring device 210. For example, the measuring instrument 210 can measure concentrations in units of ng / L (ppt) or μg / L (ppb), whereas the measuring instrument 221 can measure concentrations in units of pg / L (ppq). Also, for example, the measuring instrument 210 can measure particles of 1 μm (1000 nm) or larger in size in the treated water, whereas the measuring instrument 221 can measure particles of 50 nm or larger in size. The measuring instrument 221 notifies the information processing device 101 of the measured value. The measuring instrument 221 also notifies the information processing device 101 of the measured value along with measurement date and time information indicating the date and time when the value was measured.

[0055] The information processing device 101 is connected to the measuring devices 210 and 221 wirelessly or via a wire. FIG. 10 is a diagram showing an example of the internal configuration of the information processing device 101 shown in FIG. 9. As shown in FIG. 10, the information processing device 101 shown in FIG. 9 has an acquisition unit 110, a water quality prediction unit 121, an output unit 131, and a correction unit 141. Note that FIG. 10 shows only the main components related to this embodiment among the components included in the information processing device 101 shown in FIG. 9. The acquisition unit 110 is the same as that in the first embodiment.

[0056] The acquisition unit 110 acquires the measurement value and measurement date and time information at point 200 notified from the measuring instrument 210. The acquisition unit 110 acquires the measurement value and measurement date and time information at point 201 notified from the measuring instrument 221. The acquisition unit 110 notifies the water quality prediction unit 121 of the acquired measurement value and measurement date and time information.

[0057] 3, the water quality prediction unit 121 has a function of storing predicted water quality values. Furthermore, when the stored water quality values ​​are corrected by the correction unit 141, the water quality prediction unit 121 stores the corrected water quality values. In other words, the water quality prediction unit 121 updates the stored water quality values ​​based on the corrections made by the correction unit 141.

[0058] The correction unit 141 corrects the water quality predicted by the water quality prediction unit 121 using the water quality (second water quality) measured by the measuring instrument 221. At this time, the correction unit 141 uses the water quality (second water quality) measured by the measuring instrument 221 to correct the water quality value predicted and stored by the water quality prediction unit 121 using the water quality value measured by the measuring instrument 210 at a date and time earlier than the date and time indicated in the measurement date and time information notified by the measuring instrument 221 by the travel time. This is a process of bringing the water quality value of point 201 predicted by the water quality prediction unit 121 based on the water quality value measured by the measuring instrument 210 at point 200 closer to a more reliable value using the water quality value of point 201 actually measured by the measuring instrument 221.

[0059] Below, a specific example is given to explain the method for correcting water quality values ​​in the correction unit 141. In the following explanation, the water quality value measured by the measuring instrument 221 is denoted as A, the water quality value predicted and stored by the water quality prediction unit 121 using the water quality value measured by the measuring instrument 210 at a date and time earlier than the date and time indicated by the measurement date and time information notified from the measuring instrument 221 by the travel time is denoted as B, and the number of times that the correction unit 141 corrected the water quality value B is denoted as C.

[0060] The correction unit 141 may replace the stored water quality value B with the water quality value A. Alternatively, the correction unit 141 may replace the stored water quality value B with the average value of the water quality values ​​B and A. Alternatively, the correction unit 141 may multiply the stored water quality values ​​B and A by preset weighting coefficients, calculate the average value of the water quality values ​​B and A multiplied by the weighting coefficients, and replace the stored water quality value B with the calculated average value. In this case, the correction unit 141 may set the weighting coefficient by which the water quality value B is multiplied to be larger than the weighting coefficient by which the water quality value A is multiplied, as the value of the number of times C increases.

[0061] The output unit 131 outputs information indicating the predicted value (water quality value) corrected (updated) by the correction unit 141. At this time, the output unit 131 also outputs the date and time (timing) when it is predicted that the water quality will be measured at point 201. The predicted date and time is the date and time after the travel time from the date and time indicated by the measurement date and time information acquired by the acquisition unit 110 from the measuring device 210. The output mode of the output unit 131 may be the same as that in the first embodiment. Note that the output unit 131 does not necessarily need to output information indicating the predicted value (water quality value) corrected (updated) by the correction unit 141.

[0062] The following describes an information processing method in the information processing device shown in Fig. 10. Fig. 11 is a flowchart for explaining an example of an information processing method in the information processing device 101 shown in Fig. 10.

[0063] The acquisition unit 110 acquires the measurement value at point 200 measured by the measuring instrument 210 and date and time information (step S11). The water quality prediction unit 120 also acquires the removal performance for removing impurities in the secondary pure water production facility 500 (step S12). The water quality prediction unit 120 also acquires the travel time for water that has passed through point 200 to arrive at point 201, which is located at the outlet of the secondary pure water production facility 500 (step S13). In the processing of steps S12 and S13, the water quality prediction unit 120 acquires this information from a storage unit or the like. Next, the water quality prediction unit 120 predicts the water quality at point 201 based on the water quality measurement value acquired by the acquisition unit 110, the removal performance acquired in step S12, and the travel time acquired in step S13 (step S14). The specific prediction method is the same as the method in the first embodiment.

[0064] Thereafter, the acquisition unit 110 acquires the measured value of the water quality at the point 201 measured by the measuring instrument 221 and date and time information (step S15). The correction unit 141 corrects the water quality predicted by the water quality prediction unit 120 using the water quality at the point 201 acquired by the acquisition unit 110 (step S16). The specific correction method is as described above. The output unit 131 outputs the predicted value corrected by the correction unit 141 (step S17). (Fifth embodiment)

[0065] FIG. 12 is a diagram showing a fifth embodiment of the liquid treatment system of the present invention. As shown in FIG. 12, the liquid treatment system in this embodiment has an information processing device 101, measuring devices 211 and 222, a secondary pure water production facility 500, and a distribution line 600. The information processing device 101, the secondary pure water production facility 500, and the distribution line 600 are the same as those in the fourth embodiment. The measuring device 211 is the same as that in the second embodiment. The measuring device 211 is a first measuring device in this embodiment. The point 201 is a first point in this embodiment.

[0066] Measuring device 222 measures the water quality at point 202, which is the inlet of cleaning device 700. Measuring device 222 is a second measuring device in this embodiment. Point 202 is a second point in this embodiment. The type of water quality measured by measuring device 222 may be the same as the type of water quality measured by measuring device 211. However, the sensitivity of measuring device 222 is at the same level as or higher than the sensitivity of measuring device 211. This sensitivity can be, for example, the resolution for identifying elements contained in the treated water and their contents. In this case, the resolution of measuring device 222 is at the same level as or higher than the resolution of measuring device 211. This enables measuring device 222 to measure lower concentrations than measuring device 211. For example, while measuring device 211 can measure concentrations in units of ng / L (ppt), measuring device 222 can measure concentrations in units of pg / L (ppq). Furthermore, for example, the size of particles contained in the treatment water that can be measured by measuring instrument 211 is 50 nm or larger, whereas the size of particles that can be measured by measuring instrument 222 is 10 nm or larger. Measuring instrument 222 notifies information processing device 101 of the measured value. Measuring instrument 222 also notifies information processing device 101 of the measured value along with measurement date and time information indicating the date and time when the value was measured.

[0067] The information processing device 101 is connected wirelessly or via a wire to each of the measuring devices 211 and 222. The components of the information processing device 101 are the same as those of the information processing device 101 in the fourth embodiment. This embodiment differs from the fourth embodiment in the point at which water quality is acquired or predicted.

[0068] The acquisition unit 110 acquires the water quality measurement value and measurement date and time information at point 201 notified by the measuring instrument 211. The acquisition unit 110 acquires the water quality measurement value and measurement date and time information at point 202 notified by the measuring instrument 222. The acquisition unit 110 notifies the water quality prediction unit 121 of the acquired water quality measurement value and measurement date and time information.

[0069] The water quality prediction unit 121 predicts the water quality at point 202 based on the water quality measurement value and measurement date and time information at point 201 notified by the acquisition unit 110, the travel time of water passing through point 201 to arrive at point 202 at the entrance of the cleaning device 700, and a pre-measured change in the water quality as the water passes through the path from point 201 to point 202, including the distribution line 600. The change in the water quality from before passing through the distribution line 600 to after passing through the distribution line 600 is measured in advance. For example, it is possible to measure in advance how the water quality of the water passing through the distribution line 600 changes depending on the opening and closing of a valve installed in the distribution line 600, and register the relationship between the opening and closing of the valve and the change in water quality. It is preferable to perform this measurement multiple times and measure the average value and trend of the measurements. The water quality prediction unit 121 may also use the pre-registered relationship to predict the water quality at point 202. In this way, the water quality prediction unit 121 predicts what value the water quality measurement value notified by the acquisition unit 110 will become as it passes through the distribution line 600, and predicts the water quality value that will be measured at point 202 after the travel time has elapsed from the date and time indicated by the measurement date and time information. Furthermore, the water quality prediction unit 121 has a function for storing the predicted water quality value. Furthermore, if the stored water quality value is corrected by the correction unit 141, the water quality prediction unit 121 stores the corrected water quality value. In other words, the water quality prediction unit 121 updates the stored water quality value based on the correction made by the correction unit 141.

[0070] The correction unit 141 corrects the water quality predicted by the water quality prediction unit 121 using the water quality (second water quality) measured by the measuring instrument 222. At this time, the correction unit 141 uses the water quality (second water quality) measured by the measuring instrument 222 to correct the water quality value predicted and stored by the water quality prediction unit 121 in a state of the distribution line 600 similar to the state of the distribution line 600 (for example, the operating status of control devices such as on-off valves arranged on the distribution line 600) from a date and time earlier than the date and time indicated by the measurement date and time information notified by the measuring instrument 222 by the travel time to the date and time indicated by the measurement date and time information notified by the measuring instrument 222. Alternatively, the correction unit 141 corrects the water quality value predicted and stored by the water quality prediction unit 121 based on a change trend indicating how the water quality measured by the measuring instrument 222 changes depending on the state of the distribution line 600. For example, the correction unit 141 corrects the water quality value predicted and stored by the water quality prediction unit 121 based on the open / close state of each valve arranged in the distribution line 600 and the trend of change indicating how the water quality measured by the measuring instrument 222 changes, based on the flow rate of the treated water in the distribution line 600. This is a process in which the water quality value of point 202 predicted by the water quality prediction unit 121 based on the water quality value measured by the measuring instrument 211 at point 201 is brought closer to a more reliable value using the water quality value of point 202 actually measured by the measuring instrument 222. Specific methods for correcting the water quality value in the correction unit 141 include the examples described in the fourth embodiment. (Sixth embodiment)

[0071] FIG. 13 is a diagram showing a sixth embodiment of the liquid treatment system of the present invention. As shown in FIG. 13, the liquid treatment system in this embodiment includes an information processing device 101, measuring devices 210 and 222, a secondary pure water production facility 500, and a distribution line 600. The information processing device 101, the secondary pure water production facility 500, and the distribution line 600 are the same as those in the fourth embodiment. The measuring device 210 is the same as that in the first embodiment. The measuring device 222 is the same as that in the fifth embodiment. The measuring device 210 is the first measuring device in this embodiment. The measuring device 222 is the second measuring device in this embodiment. The point 200 is the first point in this embodiment. The point 202 is the second point in this embodiment.

[0072] The information processing device 101 is connected wirelessly or via a wire to each of the measuring devices 210 and 222. The components of the information processing device 101 are the same as those of the information processing device 101 in the fourth embodiment. This embodiment differs from the fourth embodiment in the point at which water quality is acquired or predicted.

[0073] The acquisition unit 110 acquires the measurement value and measurement date and time information at point 200 notified by the measuring instrument 210. The acquisition unit 110 acquires the measurement value and measurement date and time information at point 202 notified by the measuring instrument 222. The acquisition unit 110 notifies the water quality prediction unit 121 of the acquired water quality measurement value and measurement date and time information.

[0074] The water quality prediction unit 121 predicts the water quality at point 202 based on the impurity removal performance of the secondary pure water production equipment 500, the water quality measurement value and measurement date / time information at point 200 notified by the acquisition unit 110, the travel time of water passing through point 200 to arrive at point 202 located at the entrance of the cleaning device 700, and a previously measured degree of change in the water quality as the water passes through the path from point 201 to point 202, including the distribution line 600. When the water quality prediction unit 121 calculates the travel time, the calculation method may be the same as the calculation method performed by the water quality prediction unit 120 in the first embodiment. The change in the water quality from before passing through the distribution line 600 to after passing through it is measured in advance. For example, it is possible to previously measure how the water quality of water passing through the distribution line 600 changes depending on the opening and closing of a valve installed in the distribution line 600, and to register the relationship between the opening and closing of the valve and the change in water quality. It is preferable to perform this measurement multiple times and measure the average value and trend of the measurements. The water quality prediction unit 121 may also predict the water quality at point 202 using a pre-registered relationship. In this way, the water quality prediction unit 121 predicts what value the water quality value notified by the acquisition unit 110 will become as the water passes through the secondary pure water production equipment 500 and the distribution line 600, and predicts the water quality value that will be measured at point 202 after the travel time has elapsed from the date and time indicated by the measurement date and time information. Furthermore, the water quality prediction unit 121 has a function for storing the predicted water quality value. Furthermore, if the stored water quality value is corrected by the correction unit 141, the water quality prediction unit 121 stores the corrected water quality value. In other words, the water quality prediction unit 121 updates the stored water quality value based on the correction made by the correction unit 141.

[0075] The correction unit 141 corrects the water quality predicted by the water quality prediction unit 121 using the water quality (second water quality) measured by the measuring instrument 222. At this time, the correction unit 141 uses the water quality (second water quality) measured by the measuring instrument 222 to correct the water quality value predicted and stored by the water quality prediction unit 121 in a state of the secondary pure water production equipment 500 and the distribution line 600 similar to the state of the secondary pure water production equipment 500 and the distribution line 600 (e.g., the impurity removal rate in the secondary pure water production equipment 500 and the operating status of control devices such as on-off valves arranged in the distribution line 600) from a date and time earlier than the date and time indicated by the measurement date and time information notified by the measuring instrument 222 by the travel time to the date and time indicated by the measurement date and time information notified by the measuring instrument 222. Alternatively, the correction unit 141 corrects the water quality value predicted and stored by the water quality prediction unit 121 based on a change trend indicating how the water quality measured by the measuring instrument 222 changes depending on the state of the secondary pure water production equipment 500 and the distribution line 600. For example, the correction unit 141 corrects the water quality value predicted and stored by the water quality prediction unit 121 based on a change trend indicating how the water quality measured by the measuring instrument 222 will change, which is based on the operating status and removal rate of the secondary pure water production equipment 500, the open / close state of each valve arranged in the distribution line 600, and the flow rate of the treated water in the distribution line 600. This is a process in which the water quality value of point 202 predicted by the water quality prediction unit 121 based on the water quality value measured by the measuring instrument 210 at point 200 is brought closer to a more reliable value using the water quality value of point 202 actually measured by the measuring instrument 222. Specific methods for correcting water quality values ​​in the correction unit 141 include the examples described in the fourth embodiment.

[0076] One method for testing metals in water is analysis by a concentration method using an ion exchanger. This concentration method involves passing ultrapure water through an ion exchanger for a predetermined period of time, removing and recovering the ion exchanger after the water has passed through, eluting impurities from the recovered ion exchanger, and measuring their concentrations to test the quality of the ultrapure water (for example, as described in JP 2001-153854 A and JP 2022-120536 A).

[0077] In this way, in addition to the first to third embodiments, the fourth to sixth embodiments measure the actual water quality at the target point for water quality prediction, and use the measurement results to correct the predicted value, thereby obtaining a more reliable value.

[0078] Although the above description has been given by allocating each function (process) to each component, this allocation is not limited to the above. Furthermore, the configuration of the components is also not limited to the above-described embodiments, which are merely examples. Furthermore, each embodiment may be combined.

[0079] The processes performed by each of the information processing devices 100 and 101 described above may be performed by logic circuits manufactured for each purpose. Alternatively, a computer program (hereinafter referred to as a program) describing the process contents as procedures may be recorded on a recording medium readable by each of the information processing devices 100 and 101, and the program recorded on the recording medium may be read and executed by each of the information processing devices 100 and 101. Examples of recording media readable by each of the information processing devices 100 and 101 include removable recording media such as floppy (registered trademark) disks, magneto-optical disks, DVDs (Digital Versatile Discs), CDs (Compact Discs), Blu-ray (registered trademark) Discs, USB (Universal Serial Bus) memories, and SD cards, as well as memories such as ROMs (Read Only Memory), RAMs (Random Access Memory), and HDDs (Hard Disc Drives) built into each of the information processing devices 100 and 101. The program recorded on this recording medium is read by the CPU provided in each of the information processing devices 100 and 101, and the same processing as described above is performed under the control of the CPU. Here, the CPU operates as a computer that executes the program read from the recording medium on which the program is recorded.

[0080] A part or all of the above-described embodiments can be described as, but not limited to, the following supplementary notes. (Supplementary Note 1) A first measuring device that measures the water quality of the liquid at a first point as a first water quality; A liquid treatment system having an information processing device that predicts the water quality of the liquid at a second point based on the first water quality and the travel time of the liquid that has passed through the first point until it arrives at a second point located downstream of the first point. (Supplementary Note 2) A liquid treatment device for removing impurities from the liquid is provided between the first point and the second point, The liquid treatment system described in Appendix 1, wherein the information processing device predicts the water quality at the second point based on the impurity removal performance of the liquid treatment device, the first water quality, and the travel time. (Appendix 3) A liquid treatment system described in Appendix 1 or Appendix 2, wherein the information processing device predicts the water quality at the second point based on the operating status of a control device installed between the first point and the second point, the first water quality, and the travel time. (Supplementary Note 4) A second measuring device for measuring a second water quality of the water at the second point, The liquid treatment system according to claim 1 or 2, wherein the information processing device corrects the predicted water quality using the second water quality measured by the second measuring device. (Supplementary Note 5) The liquid processing system according to Supplementary Note 4, wherein the sensitivity of the second measuring device is higher than the sensitivity of the first measuring device. [Explanation of symbols]

[0081] 100,101 Information processing equipment 110 Acquisition Department 120,121 Water Quality Prediction Division 130,131 Output section 141 Correction unit 200-202 points 210,211,221,222 Measuring instrument 300 Pretreatment device 400 Primary pure water production equipment 401 Reverse osmosis membrane equipment 402,503 Ultraviolet oxidation equipment 403,504 Ion exchange device 404,505 Membrane degassing device 500 Secondary pure water production equipment 501 Primary pure water tank 502 Heat exchanger 506 Membrane filtration equipment 600 Distribution Line 700, 700-1 to 700-4 Cleaning equipment

Claims

1. a first measuring device that intermittently measures the water quality of the liquid at a first point as a first water quality; A liquid treatment system having an information processing device that predicts continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point, the flow rate of the liquid between the first point and the second point, and the first water quality.

2. 10. The liquid treatment system of claim 1, a liquid treatment device disposed between the first point and the second point for removing impurities from the liquid; The information processing device predicts continuous time series data of the water quality of the liquid at the second point based on at least one of the impurity removal performance of the liquid processing device, the operating status of a control device installed between the first point and the second point, the flow rate of the liquid between the first point and the second point, and the first water quality.

3. 3. The liquid treatment system according to claim 1, The information processing device is a liquid treatment system that uses the travel time of the liquid that passes through the first point to arrive at the second point to predict continuous time series data of the water quality of the liquid at the second point.

4. 3. The liquid treatment system according to claim 1, a second meter for measuring a second quality of the liquid at the second point; The information processing device corrects the continuous time series data of the predicted water quality using the second water quality measured by the second measuring device.

5. 5. The liquid treatment system of claim 4, A liquid handling system wherein the sensitivity of the second meter is greater than the sensitivity of the first meter.

6. 10. The liquid treatment system of claim 1, A liquid treatment system, wherein the first point and the second point are provided in a supply pipe that supplies the liquid from the liquid treatment system to a point of use.

7. 3. The liquid treatment system according to claim 1, the first point is located in a supply line that supplies the liquid to the liquid treatment system; A liquid treatment system, wherein the second point is provided in a supply line that supplies the liquid from the liquid treatment system to a point of use.

8. an acquisition unit that intermittently acquires the water quality of the liquid at the first point as a first water quality; An information processing device having a water quality prediction unit that predicts continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point and the flow rate of the liquid between the first point and the second point, and the first water quality.

9. A process of intermittently acquiring a water quality of the liquid at a first point as a first water quality; an information processing method that performs a process of predicting continuous time series data of the water quality of the liquid at the second point based on at least one of the operating status of a control device installed between the first point and a second point installed downstream of the first point and the flow rate of the liquid between the first point and the second point, and the first water quality.

Images