Motor driving device, power supply system, stage device, lithography device, and article manufacturing method

Abstract

To provide a motor driving device that reduces energy loss in driving a motor compared to the prior art.SOLUTION: A motor driving device has a driver that is supplied with power from a power supply and supplies power to a motor; and a transmission unit that transmits, to the power supply, a command related to the voltage value of the power supply according to a voltage value required by the driver. The voltage value required by the driver is obtained on the basis of information on the drive of the motor.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a motor drive device, a power supply system, a stage device, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] Motors are used to drive stages in manufacturing processes for semiconductor devices, liquid crystal display devices, etc. Patent Document 1 discloses that when a power supply supplies power to a motor drive device that drives the motor, a capacitor is used to assist the power supply. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-369579 Summary of the Invention [Problem to be solved by the invention]

[0004] Generally, power supplies to motor drive devices operate at a constant voltage value corresponding to the motor's output at maximum load. This means that even when the motor load is not at maximum, a high voltage corresponding to maximum load is applied, resulting in unnecessary heat generation and energy loss.

[0005] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a motor drive device that causes less energy loss when driving a motor than conventional devices. [Means for solving the problem]

[0006] In order to achieve the above object, one aspect of the present invention provides a motor drive device comprising: a driver that is powered by a power source and supplies power to a motor; and a transmitting unit that transmits to the power source a command regarding the voltage value of the power source according to the voltage value required by the driver, wherein the voltage value required by the driver is obtained based on information regarding the driving of the motor.

[0007] Further objects and other aspects of the present invention will become apparent from the following description of the embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a motor drive device that has less energy loss than conventional devices. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a block diagram of a mechanism for driving a motor in the first embodiment. [Figure 2] FIG. 10 is a diagram showing a current ripple. [Figure 3] 10 shows an example of an acceleration profile and a voltage required by a driver in each operation mode (each sequence) in the first embodiment. [Figure 4] FIG. 4 is a diagram showing information relating to the driving of a motor. [Figure 5] 4 is a flowchart when driving a motor in the first embodiment. [Figure 6] 10 is an example of an acceleration profile and a voltage required by a driver in the second embodiment. [Figure 7] FIG. 10 is a schematic view showing the configuration of a substrate processing apparatus according to a third embodiment. [Figure 8] 10 is an example of the arrangement of shot areas on a substrate. [Figure 9] 11 is an example of a table in which the operation (operation mode) of each step corresponds to the output voltage value Vp of the power supply in the third embodiment. [Figure 10]13 is an example of a table in which the time in each step corresponds to the output voltage value Vp of the power supply in the third embodiment. [Figure 11] FIG. 10 is a flowchart showing a method for manufacturing an article according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and the embodiments may be combined in any manner. Furthermore, in the drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0011] In addition, in this specification and drawings, directions are basically shown using an XYZ coordinate system in which the vertical direction is the Z axis and the horizontal plane perpendicular to the vertical direction is the XY plane, with each axis being orthogonal to each other. However, if an XYZ coordinate system is shown in each drawing, that coordinate system takes precedence.

[0012] Specific configurations of each embodiment will be described below.

[0013] First Embodiment FIG. 1 is a block diagram of a mechanism for driving a motor in this embodiment. The motor 3 is driven by a motor driving device 100. The motor driving device 100 includes a driver 2 that supplies power to the motor 3, a capacitor 4, a control unit 5 that controls each unit of the motor driving device 100, a storage unit 6, a calculation unit 7, and a transmission unit 8. The driver 2 is powered by a power supply 1 and a capacitor 4. The driver 2 is first powered by the capacitor 4, and then powered by the power supply 1 after the capacitor 4 starts supplying power (while the capacitor 4 is supplying power). The driver 2 is controlled by the control unit 5 and supplies the motor 3 with the current required to drive the motor 3. Such a motor driving device 100 is applied to, for example, a stage device, a transport system (transport device), or a transport robot. Note that FIG. 1 is also a block diagram of a power supply system including the motor driving device 100, the power supply 1, and an adjustment unit 101 that adjusts the output voltage of the power supply 1.

[0014] The driver 2 is PWM (Pulse Width Modulation) controlled by the control unit 5. PWM control is a control method that adjusts (pulse width modulates) the pulse width of the positive and negative voltages output from the power supply 1, and it is possible to change the output of the driver 2 by changing the pulse time ratio (duty). The driver 2 switches the voltage from the power supply 1 between positive and negative and generates a supply current by smoothing this switching waveform. The supply current generated by the driver 2 flows to the motor 3, driving it.

[0015] For example, if driver 2 supplies current using power supplied from power supply 1, which outputs voltages of +300V and -300V, setting the duty cycle during pulses to 50% will cause the +300V and -300V voltages to cancel each other out. This results in an average current value output from driver 2 of 0. On the other hand, if the voltage required to output the desired average current value is +290V, the desired voltage can be obtained by adjusting the ratio between the time at +300V and the time at -300V. Specifically, the time at -300V is adjusted so that the +300V supplied from power supply 1 cancels out the 10V in excess of the desired voltage of +290V. In other words, the duty cycle during pulses is adjusted.

[0016] In the case of PWM control, current ripples occur at the switching period (Fpwm) of the driver 2 for the power supply 1. Figure 2 is a diagram showing the current ripple ΔI. Figure 2(a) is an example of the current ripple ΔI when the maximum + side voltage value and maximum - side voltage value output from the power supply 1 are small. Figure 2(b) is an example of the current ripple ΔI when the maximum + side voltage value and maximum - side voltage value output from the power supply 1 are large. Since the current ripple ΔI changes depending on the voltage value of the power supply 1, the current ripple ΔI when the voltage value of the power supply 1 is large as in Figure 2(b) is larger than the current ripple ΔI when the voltage value of the power supply 1 is small as in Figure 2(a).

[0017] In Figures 2(a) and 2(b), the average current value Iavg (the magnitude of the current used to drive motor 3) is the same, and the torque of motor 3 is the same. However, the current ripple ΔI increases the root-mean-square (RMS) current value Irms, which is caused by heat generation. In other words, when the voltage value output from power supply 1 is high and the current ripple ΔI is large, as in Figure 2(b), the root-mean-square (RMS) current value Irms increases, and more heat is generated than in Figure 2(a). This heat is unnecessary heat and represents a loss (energy loss) of the power supplied from power supply 1. Furthermore, the current ripple ΔI is noise, which can adversely affect the positioning accuracy of objects in stage devices, transport devices, and transport robots that transport objects using motor 3.

[0018] The relationship between the current ripple ΔI of the driver 2 and the output voltage value Vp of the power supply 1 is shown in equation (1). ΔI=Vp×D(1-D) / (L×Fpwm)---------(1) Vp: Output voltage of power supply 1 D: Duty (Power supply 1 on / off ratio) L: Inductance of the output smoothing filter of driver 2 Fpwm: Driver 2 switching period

[0019] As is clear from equation (1), there is a proportional relationship between the output voltage value Vp of the power supply 1 and the current ripple ΔI. Therefore, when the voltage value required by the driver 2 to drive the motor 3 is small (when the average current value Iavg is small), the current ripple ΔI can be reduced by reducing the output voltage value Vp of the power supply 1. Conventionally, the power supply 1 has output a voltage value corresponding to the output of the motor 3 at maximum load. Therefore, even when the load on the motor 3 is not maximum, the power supply 1 generates a large current ripple ΔI and unnecessary heat, resulting in a loss in the amount of power supplied from the power supply 1.

[0020] Specifically, a stage device that holds and transports a substrate, configured as part of an exposure apparatus that exposes the substrate, will be described as an example. Figure 3 shows examples of acceleration profiles in each operation mode (each sequence) in this embodiment and the voltage Vd required by driver 2. The exposure apparatus has operation modes that include, for example, initialization, stop, alignment, exposure, etc., and repeats these operation modes sequentially. Each operation mode drives motor 3 differently, and the sequences (operation modes) of the exposure apparatus are, in other words, operation modes of motor 3.

[0021] Here, the acceleration required for each operation mode is different, and therefore the voltage Vd and the maximum value Vd_max of the voltage Vd required by the driver 2 to drive the motor 3 also differ for each operation mode. In the example of FIG. 3 , the maximum value Vd_max is Vd1 in the initialization mode, Vd2 in the stop mode, Vd3 in the alignment mode, and Vd4 in the exposure mode. The maximum value Vd_max is Vd4, with Vd4 being the largest, followed by Vd3, Vd1, and Vd2 in descending order. Conventional power supplies 1 output a voltage value (Vd4) corresponding to the output when the motor 3 is at its maximum load (maximum value Vd_max is Vd4). As a result, even when the load on the motor 3 is not at its maximum, for example, when the initialization mode, stop mode, or alignment mode is being performed, a large current ripple ΔI is generated, resulting in unnecessary heat generation.

[0022] Therefore, in this embodiment, the voltage Vd required by the driver 2 to drive the motor 3 is calculated based on information related to the drive of the motor 3, and the output voltage value Vp of the power supply 1 is adjusted based on the calculation results. In the example of Figure 3, the voltage Vd required by the driver 2 in each operation mode is calculated, and the output voltage value Vp of the power supply 1 is adjusted to an appropriate value for each operation mode based on the calculation results. Specifically, when the initialization mode is implemented, the power supply 1 outputs an output voltage value Vp based on Vd1, and when the stop mode is implemented, the output voltage value Vp is based on Vd2. Then, when the alignment mode is implemented, the power supply 1 outputs an output voltage value Vp based on Vd3, and when the exposure mode is implemented, the output voltage value Vp is based on Vd4.

[0023] For example, the voltage Vd required by the driver 2 may differ by more than two times between exposure mode and stop mode. In such a case, in this embodiment, a command related to the voltage value of the power supply 1 is transmitted in exposure mode to limit the maximum voltage value of the power supply 1 to a first voltage value. In stop mode, a command related to the voltage value of the power supply 1 is transmitted to limit the maximum voltage value of the power supply 1 to a second voltage value that is half or less of the first voltage value. The second voltage value does not have to be half or less of the first voltage value, and may be, for example, one-third or less. Alternatively, it may be 10% or less.

[0024] As a result, only the required voltage Vd is supplied from the power supply 1, reducing the increase in unnecessary current ripple ΔI and the generation of heat. Therefore, the loss in the amount of power supplied from the power supply 1 when driving the motor 3 can be reduced, allowing the motor 3 to be driven with less power. Furthermore, because the current ripple ΔI, which is noise, can be reduced, it is possible to reduce the deterioration in the positioning accuracy of objects in stage devices, transport devices, and transport robots that transport objects using the motor 3.

[0025] In this embodiment, the calculation unit 7 calculates the voltage value required by the driver 2 to drive the motor 3 based on information related to the drive of the motor 3 stored in the storage unit 6. Then, the transmission unit 8 transmits a command (command value, output voltage value of the power supply 1) related to the voltage value of the power supply 1 to the power supply 1 or the adjustment unit 101 based on the voltage value calculated by the calculation unit 7. When the transmission unit 8 transmits a command directly to the power supply 1, the power supply 1 adjusts the output voltage based on the command from the transmission unit 8. When the transmission unit 8 transmits a command to the adjustment unit 101, the adjustment unit 101 adjusts the output voltage of the power supply 1 based on the command from the transmission unit 8. Note that, although an example in which the adjustment unit 101 is separate from the power supply 1 is shown in this embodiment, the adjustment unit 101 may be provided inside the power supply 1.

[0026] Here, the information related to the driving of the motor 3 is, for example, information on the amount of driving by the motor 3 (position profile), or information on the speed (speed profile), or information on the acceleration (acceleration profile). The information on the amount of driving by the motor 3 is, for example, information on the target position of an object moved by the driving of the motor 3. Alternatively, the information on the amount of driving by the motor 3 is information on the distance between the current position and the target position of an object moved by the driving of the motor 3. Alternatively, when the motor 3 is a linear motor and is driven from the current position to the target position, the information on the amount of driving by the motor 3 is information on the distance moved by the mover of the linear motor. In other words, the information on the amount of driving by the motor 3 is information that associates the position of an object moved by the motor 3 with time.

[0027] In this embodiment, the power supply 1 is a variable voltage power supply because the output voltage value Vp of the power supply 1 is adjusted based on the voltage value calculated by the calculation unit 7. The power supply 1 includes, for example, a flyback converter circuit.

[0028] FIG. 4 shows information related to the drive of the motor 3. FIG. 4(a) shows a position profile, FIG. 4(b) shows a velocity profile, and FIG. 4(c) shows an acceleration profile. The calculation unit 7 acquires the position profile stored in the storage unit 6 and converts the position profile into an acceleration profile by differentiating the position profile twice. Note that if an acceleration profile is stored in the storage unit 6, the calculation unit 7 may acquire the acceleration profile instead of the position profile. Alternatively, if a velocity profile is stored in the storage unit 6, the calculation unit 7 acquires the velocity profile instead of the position profile and converts the velocity profile into an acceleration profile by differentiating the velocity profile once.

[0029] Here, the acceleration Acc(t) is expressed by equation (2). Acc(t)=F / M=(I(t)×Kf) / M---------(2) F = thrust (torque) generated by motor 3 M: Load mass (mass of the object to be driven by Motor 3) I(t): Current waveform (average current value) Kf: force constant

[0030] The force constant Kf is a constant that indicates the force that the motor 3 outputs in response to the supplied current, and is determined for each motor 3.

[0031] From equation (2), the current waveform I(t) is given by equation (3), and the current waveform I(t) can be obtained by using equation (3). I(t)=(Acc(t)×M) / Kf---------(3)

[0032] The calculation unit 7 calculates the voltage Vr(t) across the coil resistance R. The voltage Vr(t) can be calculated using equation (4). Figure 4(d) is a diagram showing the voltage Vr(t). Here, the coil is, for example, a coil included in the stator or mover of the motor 3. Vr(t)=R×I(t)---------(4) R: Coil resistance

[0033] Next, the calculation unit 7 calculates the back electromotive force Eb(t). The back electromotive force Eb(t) can be calculated from equation (5). Fig. 4(e) is a diagram showing the back electromotive force Eb(t). Eb(t)=Vel(t)×Kf---------(5) Vel(t): Velocity (velocity profile)

[0034] Next, the calculation unit 7 calculates the induced voltage Ec(t). The induced voltage Ec(t) can be calculated from equation (6). Figure 4(f) is a diagram showing the induced voltage Ec(t). Ec(t)=L·dI(t) / dt---------(6) L: Inductance of motor 3

[0035] The voltage Vd (output voltage of the driver 2) required by the driver 2 to drive the motor 3 can be calculated from equation (7). FIG. Vd(t)=Vr(t)+Eb(t)+Ec(t)---------(7)

[0036] Based on the profile of the output voltage Vd of the driver 2 obtained by equation (7), the calculation unit 7 calculates the maximum value Vd_max of the output voltage Vd of the driver 2 in a predetermined section (for example, a section from the start to the end of a predetermined operation mode of the motor 3). The calculation of the maximum value Vd_max by the calculation unit 7 is performed, for example, before the motor 3 starts to be driven.

[0037] Based on the maximum value Vd_max calculated by the calculation unit 7, the transmission unit 8 transmits to the power supply 1 a command relating to the voltage value when the motor 3 is driven so that the output voltage value Vp of the power supply 1 satisfies equation (8). Vp≧Vd_max---------(8)

[0038] If the output voltage value Vp of the power supply 1 does not satisfy equation (8), that is, if the maximum value Vd_max is greater than the output voltage value Vp of the power supply 1, the voltage required to drive the motor 3 is insufficient, and the driver 2 cannot supply the desired current to the motor 3 due to the insufficient voltage. As a result, the object driven by the motor 3 cannot be moved normally. Therefore, because the motor 3 is not driven normally, a stage device, a transport device, a transport robot hand, etc. that use the motor 3 to move an object will stop due to an error. For this reason, the relationship between the output voltage value Vp of the power supply 1 and the maximum value Vd_max must satisfy equation (8).

[0039] FIG. 5 is a flowchart for driving the motor 3 in this embodiment. First, the calculation unit 7 acquires information related to the driving of the motor 3 (acquisition step, S110). Next, the calculation unit 7 calculates the output voltage Vd (maximum value Vd_max) of the driver 2 based on the driving information acquired in the acquisition step (calculation step, S120). Next, the transmission unit 8 transmits to the power supply 1 a command related to the voltage value (output voltage value Vp of the power supply 1) when the motor 3 is driven based on the result of the calculation step (transmission step, S130). The transmission step is performed before or when the operation mode of the motor 3 is switched. Note that the transmission step may be an adjustment step in which the adjustment unit 101 adjusts the output voltage value of the power supply 1 based on the result of the calculation step, or the transmission step may include an adjustment step. In other words, the adjustment by the adjustment unit 101 is also performed before or when the operation mode of the motor 3 is switched. Then, the power supply 1 performs output based on the command transmitted in the transmission step, and the driver 2 supplies power to the motor 3, thereby driving the motor 3 (driving step, S140).

[0040] The calculation by the calculation unit 7 may be performed while the operating mode immediately preceding the operating mode being calculated is being executed. In other words, the calculation of the maximum value Vd_max in the alignment mode may be performed while the stop mode is being executed. Alternatively, the maximum value Vd_max may be calculated in advance for each of a plurality of modes. Then, the transmission unit 8 transmits a command to the power supply 1 or the adjustment unit 101 so that the output voltage value Vp of the power supply 1 becomes a value based on the calculation result at the start of each operating mode. Then, based on the command from the transmission unit 8, the power supply 1 or the adjustment unit 101 adjusts (switches) the output voltage value Vp of the power supply 1 simultaneously with or before timing T1, timing T2, timing T3, or timing T4 in FIG. 3 .

[0041] In this embodiment, an example has been shown in which the output voltage value Vp of the power supply 1 is set (a command is sent, and adjustment is made) based on the voltage value required by the driver 2 to drive the motor 3. However, the output voltage value Vp of the power supply 1 may be set (a command is sent, and adjustment is made) based not only on the voltage value required by the driver 2 but also on the power supply (amount of power supply) from the capacitor 4. As described above, the driver 2 is supplied with power from the power supply 1 and the capacitor 4. Power is supplied from the capacitor 4 first, and then power is supplied from the power supply 1 after the capacitor 4 starts supplying power (while the capacitor 4 is supplying power). Therefore, when power is being supplied from the capacitor 4, the amount of power supplied from the power supply 1 may be small. Therefore, by adjusting the output voltage value Vp of the power supply 1 based on the power supply from the capacitor 4, the output voltage value Vp of the power supply 1 can be adjusted more appropriately.

[0042] In the present embodiment, an example has been shown in which the control unit 5, storage unit 6, calculation unit 7, and transmission unit 8 are separate, but these may also be performed by a single processing unit. Furthermore, in the present embodiment, an example has been shown in which the calculation unit 7 is arranged inside the motor drive device 100, but the calculation of the maximum value Vd_max may be performed by an external information processing device. Furthermore, in the present embodiment, an example has been shown in which the control unit 5 is arranged inside the motor drive device 100, but a control unit of a device in which the motor drive device 100 is installed may also control the motor drive device 100. Furthermore, in the present embodiment, an example has been shown in which the storage unit 6 is arranged inside the motor drive device 100, but the motor drive device 100 does not have to include the storage unit 6; if the storage unit 6 is not included, the calculation unit 7 obtains information regarding the drive of the motor 3 from an external storage unit or information processing device.

[0043] Here, in this embodiment, an example has been shown in which the transmitting unit 8 and the adjusting unit 101 are separately arranged, but the adjusting unit 101 may adjust the output voltage of the power supply 1 without going through the transmitting unit 8 based on the calculation results of the calculating unit 7.

[0044] The control unit 5 (information processing device) includes a processing unit, a bus, a ROM, a RAM, and a storage device, and each component functions according to a program. The processing unit is a processing device that performs control calculations according to the program and controls each component connected to the bus. This processing unit can be configured using a CPU, a PLD such as an FPGA, an ASIC, a computer with a built-in program, or a combination of all or part of these. The ROM is a memory for reading data only and stores programs and data. The RAM is a memory for reading and writing data and is used to store programs and data. The RAM is used for temporary storage of data such as the results of CPU calculations. The storage device is also used to store programs and data. The storage device is also used as a temporary storage area for the operating system (OS) program and data of the control unit 5. The storage device has slower data input / output speed than RAM, but is capable of storing large amounts of data. The storage device is preferably a non-volatile storage device that can store data as permanent data so that the data can be referenced for a long period of time. The storage device is mainly composed of a magnetic storage device (HDD), but may also be a device that reads and writes data by loading external media such as CDs, DVDs, and memory cards.

[0045] As described above, in this embodiment, the voltage Vd required by the driver 2 to drive the motor 3 is calculated based on information related to the drive of the motor 3, and the output voltage value Vp of the power supply 1 is adjusted based on the calculation result. This reduces the loss (energy loss) of power supplied from the power supply 1 when driving the motor 3, making it possible to drive the motor 3 with less power. Furthermore, since the current ripple ΔI, which is noise, can be reduced, it is possible to reduce the deterioration in the positioning accuracy of an object in a stage device, transport device, or transport robot that transports an object using the motor 3.

[0046] Second Embodiment In this embodiment, the timing for adjusting the output voltage value Vp of the power supply 1 differs from that in the first embodiment. In this embodiment, the output voltage value Vp of the power supply 1 is adjusted based on an acceleration profile. For example, when the motor 3 is the drive mechanism of a stage device, the stage device repeats acceleration, constant speed, and deceleration, and the output voltage Vd of the driver 2 differs between the acceleration state and the constant speed and deceleration states. Specifically, the maximum value Vd_max of the output voltage Vd of the driver 2 in the acceleration state is greater than the maximum value Vd_max of the output voltage Vd of the driver 2 in the constant speed and deceleration states. In other words, if constant speed and deceleration states are operated at a voltage value corresponding to the output in the acceleration state, unnecessary heat is generated, resulting in a loss of power supplied from the power supply 1.

[0047] FIG. 6 shows an example of an acceleration profile and a voltage Vd required by the driver 2 in this embodiment, in which acceleration and constant speed / deceleration are repeated. In the example of FIG. 6, the acceleration sections are the sections between timing T1 and timing T2, between timing T3 and timing T4, between timing T5 and timing T6, and between timing T7 and timing T8. The constant speed / deceleration sections are the sections between timing T2 and timing T3, between timing T4 and timing T5, between timing T6 and timing T7, and between timing T8 and timing T9. Here, the acceleration section is a section in which an object (e.g., a mover) is accelerated and moved by driving the motor 3. The deceleration section is a section in which an object (e.g., a mover) is decelerated and moved by driving the motor 3.

[0048] In this case, the maximum value Vd_max in the acceleration section is Vd1, and the maximum value Vd_max in the constant speed and deceleration sections is Vd2. Conventional power supply 1 outputs a voltage value (Vd1) that corresponds to the output in the acceleration section (maximum value Vd_max is Vd1), which is when motor 3 is at its maximum load. As a result, in the constant speed and deceleration sections, when motor 3 is not at its maximum load, unnecessary heat is generated due to a large current ripple ΔI.

[0049] Therefore, in this embodiment, the voltage Vd required by the driver 2 to drive the motor 3 is calculated based on information (acceleration profile) related to the drive of the motor 3, and the output voltage value Vp of the power supply 1 is adjusted based on the calculation results. In the example of Fig. 6, the voltage Vd required by the driver 2 in the acceleration section and the constant speed / deceleration section is calculated, and the output voltage value Vp of the power supply 1 is adjusted to an appropriate value for each section based on the calculation results. Specifically, in the acceleration section, the output voltage value Vp of the power supply 1 is adjusted based on Vd1 so as to satisfy equation (8), and in the constant speed / deceleration section, the output voltage value Vp of the power supply 1 is adjusted based on Vd2 so as to satisfy equation (8).

[0050] The calculations by the calculation unit 7 are performed in advance, for example, for the acceleration section and the constant speed / deceleration section, respectively, before the motor 3 is driven. Then, the transmission unit 8 transmits a command to the power supply 1 or the adjustment unit 101 so that the output voltage value Vp of the power supply 1 becomes a value based on the calculation result at the start of each section. This transmission is performed before or at the start of each section. Then, based on the command from the transmission unit 8, the power supply 1 or the adjustment unit 101 adjusts (switches) the output voltage value Vp of the power supply 1 simultaneously with or before each of timings T1 to T8 in FIG. 6.

[0051] As a result, power is supplied from the power supply 1 by the voltage Vd required by the driver 2 in each section, reducing the increase in unnecessary current ripple ΔI and the generation of heat. This reduces the loss of power supplied from the power supply 1 when driving the motor 3, allowing the motor 3 to be driven with less power. Furthermore, because the current ripple ΔI, which is noise, can be reduced, it is possible to reduce the deterioration in the positioning accuracy of objects in stage devices, transport devices, and transport robots that transport objects using the motor 3.

[0052] In this embodiment, the maximum value Vd_max is calculated by treating the constant speed section and the deceleration section as one section, but the constant speed section and the deceleration section may be separated and the maximum value Vd_max may be calculated for each section, and the output voltage value Vp of the power supply 1 may be adjusted appropriately for each of the constant speed section and the deceleration section.

[0053] Third Embodiment In this embodiment, the above-described embodiment is applied when exposing each shot area on a substrate 11. Fig. 7 is a schematic diagram showing the configuration of a substrate processing apparatus 200 in this embodiment. In this embodiment, the substrate processing apparatus 200 is a projection exposure apparatus that exposes the pattern of an original (mask, reticle) onto a substrate via a projection optical system using a step-and-repeat method or a step-and-scan method.

[0054] The substrate processing apparatus 200 includes an illumination optical system 21 that irradiates light, a projection optical system 24, a reticle stage 23 that holds a reticle 22, a substrate stage (holding unit) 25 that is movable in the X and Y directions while holding a substrate 11, and a control unit 20. The reticle 22 is, for example, an original in which a pattern to be transferred (e.g., a circuit pattern) is formed on the surface of quartz glass using chromium. The substrate 11 is, for example, single-crystal silicon, and when the substrate processing apparatus 200 is an exposure apparatus, the substrate 11 transported to the substrate processing apparatus 200 has a photosensitive material (resist) applied to its surface.

[0055] In the substrate processing apparatus 200, exposure light from a light source (not shown) passes through an illumination optical system 21 and illuminates a reticle 22 held on a reticle stage 23. The light that has passed through the reticle 22 passes through a projection optical system 24 and is irradiated onto the substrate 11. At this time, light from the pattern formed on the reticle 22 forms an image on the surface of the substrate 11, and the substrate 11 (photosensitive material) is exposed to the pattern image. The substrate processing apparatus 200 exposes a shot area on the substrate 11 in this manner, and performs similar exposure on each of the multiple shot areas.

[0056] During this exposure, the control unit 20 controls the drive units 3a and 3b, which respectively include the motor 3 and the motor drive device 100, to synchronize the positions of the reticle 22 and the substrate 11. The drive unit 3a moves the reticle stage 23, and the drive unit 3b moves the substrate stage 25. The drive units 3a and 3b are each powered by the power supply 1.

[0057] 8 shows an example of the arrangement of shot areas on substrate 11. In this example, 21 shot areas are arranged on substrate 11. The 21 shot areas are sequentially exposed by driving reticle stage 23 and substrate stage 25 to desired positions by driving units 3a and 3b. For example, each shot area is exposed by repeatedly driving substrate stage 25 in steps.

[0058] Here, the trajectory of the drive units 3a and 3b when exposing each shot area (the trajectory of the object moved by the drive units) is determined in advance based on the shot layout and exposure conditions. In this embodiment, a position profile (information related to the drive of the motor 3) that is the predetermined trajectory is acquired, and a maximum value Vd_max is calculated in advance according to the position profile. Then, the output voltage value Vp of the power supply 1 is adjusted based on the calculated maximum value Vd_max.

[0059] FIG. 9 is an example of a table in which the operation of each step (operation mode of the motor 3) corresponds to the output voltage value Vp of the power supply 1 in this embodiment. The calculation unit 7 calculates the voltage Vd (maximum value Vd_max) required by the driver 2 in each step. The transmission unit 8 then determines the output voltage value Vp of the power supply 1 for each step based on the maximum value Vd_max calculated by the calculation unit 7 so that the output voltage value Vp of the power supply 1 satisfies equation (8), thereby creating a table such as that shown in FIG. 9. The table created by the transmission unit 8 is stored in the storage unit 6. When exposing each shot area, the transmission unit 8 transmits a command to the power supply 1 or the adjustment unit 101 based on the table shown in FIG. 9 stored in the storage unit 6. This transmission is performed before or at the start of each step. The power supply 1 then supplies power to the drive units 3a and 3b at the output voltage value Vp based on the command from the transmission unit 8.

[0060] For example, based on the table shown in Figure 9, the output voltage of power supply 1 is set to Vp1_1 in the acceleration section for exposing the first shot area, and the output voltage of power supply 1 is set to Vp1_2 in the constant speed / deceleration section for exposing the first shot area. The acceleration section for exposing a shot area is, for example, when moving between shot areas, or when running up to the scanning speed for exposing the shot area. The constant speed section for exposing a shot area is, for example, when exposing the shot area at a constant speed. The deceleration section for exposing a shot area is, for example, when moving between shot areas.

[0061] As a result, power is supplied from the power supply 1 only by the voltage Vd required by the driver 2 at each step, reducing the increase in unnecessary current ripple ΔI and the generation of heat. This reduces the loss of power supplied from the power supply 1 when driving the motor 3, allowing the motor 3 to be driven with less power. Furthermore, because the current ripple ΔI, which is noise, can be reduced, the deterioration in the positioning accuracy of the reticle stage 23 and the substrate stage 25 can be reduced.

[0062] In this embodiment, an example has been shown in which the transmitting unit 8 creates the table shown in Fig. 9, but this table does not have to be created by the transmitting unit 8, and may be created by, for example, the control unit 5 or the calculation unit 7. Alternatively, it may be created by another processing unit.

[0063] 9, the operation of each step (operation mode of the motor 3) corresponds to the output voltage value Vp of the power supply 1, but this is not limiting. The trajectory of the drive units 3a and 3b when exposing each shot area (the trajectory of the movement of the object driven by the drive units) is determined in advance by the shot layout and exposure conditions, so the elapsed time in processing corresponds to the voltage value required by the driver 2. Therefore, a table such as that shown in FIG. 10 may be used, in which the time in each step corresponds to the output voltage value Vp of the power supply 1.

[0064] For example, based on the table shown in Fig. 10, the output voltage Vp of the power supply 1 is adjusted so that the output voltage of the power supply 1 becomes Vp1_1 when the set time T1_1 is reached, and so that the output voltage of the power supply 1 becomes Vp1_2 when the set time T1_2 is reached. By using a table such as that shown in Fig. 10 in which the time at each step corresponds to the output voltage value Vp of the power supply 1, it is possible to switch the output voltage value Vp at any timing, rather than simply switching the output voltage value Vp in response to operations such as acceleration or deceleration.

[0065] 9 and 10, an example has been shown in which information on the voltage value of the power supply 1 associated with (information on) the driving of the motor 3 is generated (calculated) within the motor driving device 100, but the present invention is not limited to this example. An external information processing device may generate (calculate) information on the voltage value of the power supply 1 associated with (information on) the driving of the motor 3, and the transmitting unit 8 may transmit a command on the voltage value of the power supply 1 to the power supply 1 based on the information on the voltage value of the power supply 1 acquired from the information processing device.

[0066] In this embodiment, the substrate processing apparatus 200 is described as a projection exposure apparatus. However, the substrate processing apparatus 200 is not limited to a projection exposure apparatus. For example, the substrate processing apparatus 200 may be a lithography apparatus that performs lithography on a substrate using an electron beam, ion beam, or the like to form a pattern on the substrate. The substrate processing apparatus 200 may also be another lithography apparatus (substrate exposure apparatus), such as an imprint apparatus that forms a pattern on the substrate by molding an imprint material on the substrate using a mold. Alternatively, the substrate processing apparatus 200 may be another apparatus for processing substrates such as semiconductor wafers and glass plates, such as an ion implantation apparatus, a development apparatus, an etching apparatus, a film formation apparatus, an annealing apparatus, a sputtering apparatus, or a deposition apparatus. The substrate processing apparatus 200 may also be a planarization apparatus that uses a flat plate to planarize a composition on a substrate.

[0067] <Fourth embodiment> This embodiment relates to a method for manufacturing an article, characterized in that the article is manufactured using the above-described substrate processing apparatus (lithography apparatus).

[0068] 11 is a flowchart showing a method for manufacturing an article according to this embodiment. A forming step (S210) is performed in which the lithography apparatus described above is used to illuminate a substrate held by a stage device and form a pattern on the substrate. The stage device has a holder that holds the substrate, a motor 3 capable of moving the holder, a driver 2 that receives power from a power supply 1 and supplies power to the motor 3, and a transmitter 8. The transmitter 8 transmits to the power supply 1 a command regarding the voltage value of the power supply 1 that corresponds to the voltage value required by the driver 2, which is obtained based on information regarding the driving of the motor 3. Then, a manufacturing step (S220) is performed in which an article is manufactured from the substrate on which the pattern was formed in the forming step.

[0069] Products manufactured by this manufacturing method include, for example, semiconductor IC elements, liquid crystal display elements, color filters, MEMS, and the like.

[0070] In the forming step, for example, a substrate (silicon wafer, glass plate, etc.) coated with a photosensitive material is exposed by an exposure apparatus (lithography apparatus) to form a pattern on the substrate.

[0071] The manufacturing process includes, for example, developing a substrate (photosensitive material) on which a pattern has been formed, etching the developed substrate, removing the resist, dicing, bonding, and packaging. This manufacturing method makes it possible to manufacture products of higher quality than conventional methods.

[0072] The disclosure of this specification includes the following motor drive apparatus, power supply system, stage apparatus, lithography apparatus, and method for manufacturing an article.

[0073] [Item 1] a driver that is powered by a power supply and supplies power to a motor; a transmitter that transmits to the power supply a command relating to a voltage value of the power supply corresponding to a voltage value required by the driver, The voltage value required by the driver is obtained based on information regarding the driving of the motor. A motor drive device characterized by:

[0074] [Item 2] 2. The motor drive device according to item 1, wherein the driver supplies the motor with a current generated by pulse-width modulating a voltage from the power supply.

[0075] [Item 3] 3. The motor drive device according to item 1 or 2, wherein the transmission unit transmits a command before or when the operation mode of the motor is switched.

[0076] [Item 4] The motor drive device according to any one of items 1 to 3, characterized in that the information relating to the drive of the motor is at least one of information associating the position and time of an object moved by the motor, speed, and acceleration.

[0077] [Item 5] The motor drive device according to any one of items 1 to 4, wherein the transmission unit changes the command to be sent to the power source between an acceleration section in which the object is accelerated and moved by driving the motor, and a deceleration section in which the object is decelerated and moved by driving the motor.

[0078] [Item 6] 6. The motor drive device according to any one of items 1 to 5, wherein the transmission unit transmits the command to the power supply based on a voltage value required by the driver obtained from an external information processing device.

[0079] [Item 7] 7. The motor drive device according to any one of items 1 to 6, wherein the command includes information on an output voltage value output by the power supply.

[0080] [Item 8] The motor drive device according to any one of items 1 to 7, characterized in that the transmission unit transmits the command that satisfies Vp≧Vd_max, where Vd_max is the maximum voltage value required by the driver and Vp is the output voltage value of the power supply.

[0081] [Item 9] The motor drive device according to any one of items 1 to 8, further comprising a calculation unit that calculates a voltage value required by the driver based on the voltage across both ends of a coil included in the motor, a back electromotive voltage, and an induced voltage.

[0082] [Item 10] a capacitor for powering the driver; 10. The motor drive device according to any one of items 1 to 9, wherein the transmission unit transmits the command to the power supply based on power supply from the capacitor.

[0083] [Item 11] a driver that is powered by a power supply and supplies power to a motor; a transmitter that transmits a command regarding the voltage value of the power supply to the power supply based on information regarding the voltage value of the power supply associated with information regarding the driving of the motor; A motor drive device comprising:

[0084] [Item 12] Item 12. The motor drive device according to item 11, characterized in that the information relating to the driving of the motor and the voltage value of the power supply associated with the information relating to the driving of the motor is information relating the operating mode of the motor and the output voltage of the power supply.

[0085] [Item 13] Item 12. The motor drive device according to item 11, wherein the information relating to the driving of the motor and the information relating to the voltage value of the power supply are information relating time to the output voltage of the power supply.

[0086] [Item 14] The motor drive device according to any one of items 11 to 13, characterized in that the instructions include an instruction to limit the maximum voltage value of the power supply to a first voltage value, and an instruction to limit the maximum voltage value of the power supply to a second voltage value that is half or less of the first voltage value.

[0087] [Item 15] Item 15. The motor drive device according to item 14, wherein the driver performs pulse width modulation on the voltage from the power supply in response to the command, and supplies the current generated by the pulse width modulation to the motor.

[0088] [Item 16] a power supply with a variable output voltage; a driver that is powered by the power supply and supplies power to a motor; an adjusting unit that adjusts the output voltage of the power supply in accordance with a voltage value required by the driver; and The voltage value required by the driver is obtained based on information regarding the driving of the motor. A power supply system characterized by:

[0089] [Item 17] a holder for holding the substrate; a motor capable of moving the holding portion; a driver that is powered by a power source and supplies power to the motor; a transmitter that transmits to the power supply a command relating to a voltage value of the power supply corresponding to a voltage value required by the driver, The voltage value required by the driver is obtained based on information regarding the driving of the motor. A stage apparatus characterized by:

[0090] [Item 18] Item 17: A stage device according to Item 17; an illumination optical system that illuminates the substrate held by the stage device; 1. A lithography apparatus comprising:

[0091] [Item 19] A forming step of forming a pattern on a substrate using the lithography apparatus according to item 18; a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process; A method for manufacturing an article, comprising:

[0092] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention.

Claims

1. a driver that is powered by a power supply and supplies power to a motor; a transmitter that transmits to the power supply a command relating to a voltage value of the power supply corresponding to a voltage value required by the driver, The voltage value required by the driver is obtained based on information regarding the driving of the motor. A motor drive device characterized by:

2. 2. The motor drive device according to claim 1, wherein the driver supplies the motor with a current generated by pulse-width modulating a voltage from the power supply.

3. 2. The motor drive device according to claim 1, wherein the transmission unit transmits the command before or when the operation mode of the motor is switched.

4. 2. The motor drive device according to claim 1, wherein the information relating to the drive of the motor is at least one of information associating a position of an object moved by the motor with time, a speed, and an acceleration.

5. 2. The motor drive device according to claim 1, wherein the transmission unit changes the command to be transmitted to the power source between an acceleration section in which the object is accelerated and moved by driving the motor and a deceleration section in which the object is decelerated and moved by driving the motor.

6. 2. The motor drive device according to claim 1, wherein the transmission unit transmits the command to the power supply based on a voltage value required by the driver obtained from an external information processing device.

7. 2. The motor drive device according to claim 1, wherein the command includes information on an output voltage value output by the power supply.

8. 2. The motor drive device according to claim 1, wherein the transmission unit transmits the command such that Vp≧Vd_max, where Vd_max is a maximum voltage value required by the driver and Vp is an output voltage value of the power supply.

9. 2. The motor drive device according to claim 1, further comprising a calculation unit that calculates a voltage value required by the driver based on the voltage across both ends of a coil included in the motor, a back electromotive voltage, and an induced voltage.

10. a capacitor for powering the driver; The motor drive device according to claim 1 , wherein the transmission unit transmits the command to the power supply based on power supplied from the capacitor.

11. a driver that is powered by a power supply and supplies power to a motor; a transmitter that transmits a command regarding the voltage value of the power supply to the power supply based on information regarding the voltage value of the power supply associated with information regarding the driving of the motor; A motor drive device comprising:

12. 12. The motor drive device according to claim 11, wherein the information relating to the voltage value of the power supply associated with the information relating to the drive of the motor is information relating an operating mode of the motor to an output voltage of the power supply.

13. 12. The motor drive device according to claim 11, wherein the information relating to the motor drive and the information relating to the voltage value of the power supply are information relating time to the output voltage of the power supply.

14. 12. The motor drive device according to claim 11, wherein the commands include a command to limit a maximum voltage value of the power supply to a first voltage value, and a command to limit a maximum voltage value of the power supply to a second voltage value that is half or less of the first voltage value.

15. 15. The motor drive device according to claim 14, wherein the driver performs pulse width modulation on the voltage from the power supply in response to the command, and supplies the current generated by the pulse width modulation to the motor.

16. a power supply with a variable output voltage; a driver that is powered by the power supply and supplies power to a motor; an adjusting unit that adjusts the output voltage of the power supply in accordance with a voltage value required by the driver; and The voltage value required by the driver is obtained based on information regarding the driving of the motor. A power supply system characterized by:

17. a holder for holding the substrate; a motor capable of moving the holding portion; a driver that is powered by a power source and supplies power to the motor; a transmitter that transmits to the power supply a command relating to a voltage value of the power supply corresponding to a voltage value required by the driver, The voltage value required by the driver is obtained based on information regarding the driving of the motor. A stage apparatus characterized by:

18. a stage device according to claim 17; an illumination optical system that illuminates the substrate held by the stage device; 1. A lithography apparatus comprising:

19. forming a pattern on a substrate using the lithographic apparatus of claim 18; a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process; A method for manufacturing an article, comprising:

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