Transport mechanism and transport method

Abstract

To provide a transport mechanism and a transport method, each enabling reduction of amount of air consumption.SOLUTION: A transport mechanism is provided, which transports an adhered member by suction-holding it with a suction pad 13, and includes: the suction pad 13 for suction-holding the adhered member; a vacuum generation unit 30 for generating negative pressure in the adhered member via the suction pad 13; and a moving unit that moves the adhered member suction-held by the suction pad 13 in a predetermined direction. The vacuum generation unit 30 includes: a housing 31; a partition member 34 that partitions the inside of the housing 31 into a first space 35 communicating with the suction pad 13 and a second space 36; and a drive unit that moves the partition member 34. The vacuum generation unit depressurizes a space between the suction pad 13 and the adhered member by causing the drive unit to move the partition member 34 in such a manner that a volume of the first space 35 becomes large in a state where the suction pad 13 is made to be in contact with the adhered member to suction-hold the adhered member.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a transport mechanism and a transport method. [Background technology]

[0002] In a processing device for processing workpieces such as semiconductor wafers, in order to facilitate the transport of the workpiece within the device, a frame unit is formed by attaching the workpiece to tape whose outer periphery is attached to a ring frame, and a ring frame transport mechanism suction-holds the ring frame in the form of this frame unit to transport it (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-057618 Summary of the Invention [Problem to be solved by the invention]

[0004] In such a transport mechanism, the ring frame is usually held by a vacuum pump or ejector as a suction source, but this poses the problem of high air consumption.

[0005] The present invention has been made in view of the above problems, and an object of the present invention is to provide a conveying mechanism and a conveying method that can reduce the amount of air consumed. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the transport mechanism of the present invention is a transport mechanism that transports an adsorbed member by suction and holding it with a suction pad, and includes: a suction pad that suction-holds the adsorbed member; a vacuum generating unit that generates negative pressure on the adsorbed member via the suction pad; and a moving unit that moves the adsorbed member that is suction-held by the suction pad in a predetermined direction.The vacuum generating unit has a housing, a partition member that divides the interior of the housing into a first space that communicates with the suction pad and a second space, and a drive unit that moves the partition member.With the suction pad in contact with the adsorbed member, the drive unit moves the partition member so that the volume of the first space increases, thereby reducing the pressure in the space between the suction pad and the adsorbed member and adsorbing and holding the adsorbed member.

[0007] The conveying mechanism of the present invention preferably further comprises a check valve arranged on a communication passage connecting the suction pad and the vacuum generating unit, a branch section formed on the communication passage between the vacuum generating unit and the check valve, and an exhaust unit arranged on a branch communication passage branching from the branch section and configured to be openable and closable, and performs a compression operation in which, while the suction pad is holding the suction target member by suction, the exhaust unit is opened and the partition member is moved to compress the first space of the vacuum generating unit, and after performing the compression operation, an expansion operation in which the exhaust unit is closed and the partition member is moved to expand the first space of the vacuum generating unit.

[0008] The conveying mechanism of the present invention may further include a measuring device between the suction pad and the check valve that measures the suction holding force of the suction pad on the member to be adsorbed, and if the value measured by the measuring device falls outside a predetermined range, the partition member may be moved to perform the compression operation and the expansion operation.

[0009] In the transfer mechanism of the present invention, the vacuum generating unit may include a rotary cylinder.

[0010] In addition, the transport method of the present invention is a transport method in which the adsorbed member is adsorbed and held by the suction pad in a transport mechanism comprising an suction pad that adsorbs and holds the adsorbed member, a vacuum generating unit that generates negative pressure on the adsorbed member via the suction pad, and a moving unit that moves the adsorbed member adsorbed and held by the suction pad in a predetermined direction, the vacuum generating unit having a housing, a partition member that divides the interior of the housing into a first space that communicates with the suction pad and a second space, and a drive unit that moves the partition member, and is characterized in that, while the suction pad is in contact with the adsorbed member, the drive unit moves the partition member so that the volume of the first space increases, thereby reducing the pressure in the space between the suction pad and the adsorbed member and adsorbing and holding the adsorbed member. [Effects of the Invention]

[0011] The present invention can reduce the amount of air consumed. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a transport mechanism according to the first embodiment. [Figure 2] FIG. 2 is a schematic side view of the transport mechanism according to the first embodiment. [Figure 3] FIG. 3 is a schematic cross-sectional view of a vacuum generating unit and a communication passage according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view of a vacuum generating unit and a communication passage according to the first embodiment. [Figure 5] FIG. 5 is a schematic side view of a transport mechanism according to the second embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view of a vacuum generating unit and a communication passage according to the second embodiment. [Figure 7] FIG. 7 is a schematic side view of a transport mechanism according to the second embodiment. [Figure 8] FIG. 8 is a schematic cross-sectional view of a vacuum generating unit and a communication passage according to the second embodiment. [Figure 9] FIG. 9 is a schematic side view of a transport mechanism according to the third embodiment. [Figure 10] FIG. 10 is a schematic side view of a transport mechanism according to the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0014] First Embodiment First, the configuration and transport method of the transport mechanism 1 according to the first embodiment will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of the transport mechanism 1 according to the first embodiment. Fig. 2 is a schematic side view of the transport mechanism 1 according to the first embodiment. Figs. 3 and 4 are schematic cross-sectional views of the vacuum generating unit 30 and the communication passage 50 according to the first embodiment.

[0015] The transport mechanism 1 of the first embodiment includes a transport unit 10, a moving unit 20, a vacuum generating unit 30, and a communication path 50. The transport mechanism 1 is a mechanism that transports a member to be attracted by suction using the transport unit 10. In this embodiment, the member to be attracted is an annular frame 102 that constitutes a frame unit 100. The frame unit 100 is configured to include a workpiece 101, an annular frame 102, and a protective sheet 103.

[0016] The workpiece 101 is, for example, a disk-shaped semiconductor wafer, an optical device wafer, or other wafer having a substrate made of silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), or the like. The workpiece 101 has a plurality of planned division lines set in a grid pattern and devices formed on the surface of each region partitioned by the planned division lines. The devices are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integration), image sensors such as CCDs (Charge Coupled Devices) or CMOSs ​​(Complementary Metal Oxide Semiconductors), or MEMS (Micro Electro Mechanical Systems). The workpiece 101 is divided along the planned division lines to be singulated into individual device chips.

[0017] The annular frame 102 is a ring-shaped plate member having an opening larger than the outer diameter of the workpiece 101. The annular frame 102 is made of a material such as metal or resin. The protective sheet 103 is a circular sheet member having an outer diameter larger than the opening of the annular frame 102. The protective sheet 103 includes a base layer made of, for example, a synthetic resin, and an adhesive layer laminated on at least one of the front and back surfaces of the base layer. The outer periphery of the protective sheet 103 is attached to the back surface of the annular frame 102. The workpiece 101 is positioned at a predetermined position in the opening of the annular frame 102, and is fixed to the annular frame 102 and the protective sheet 103 by having its back surface attached to the protective sheet 103.

[0018] In this way, the frame unit 100 is formed by integrating the annular frame 102 and the protective sheet 103. The protective sheet 103 may be attached to the front surface side of the workpiece 101. The conveying mechanism 1 of the first embodiment conveys the annular frame 102 in the form of the workpiece 101 and the frame unit 100, but it can also convey the annular frame 102 alone.

[0019] The transport unit 10 is a unit that sucks and holds an annular frame 102, which is a member to be attracted, so that the annular frame 102 can be transported while maintaining a horizontal position. The transport unit 10 has a transport plate 11, a shaft 12, and a suction pad 13.

[0020] The transport plate 11 has a plate shape extending horizontally, is supported by the moving unit 20 via a shaft 12, and supports the suction pad 13. The transport plate 11 of this embodiment is formed in a substantially H-shape when viewed from above. The shaft 12 is an axial member extending vertically. The shaft 12 is connected to the center of the transport plate 11.

[0021] The suction pads 13 suck and hold the member to be sucked (annular frame 102). In the first embodiment, the transport unit 10 has four suction pads 13. The suction pads 13 are arranged on the underside of the four ends of the approximately H-shaped transport plate 11. The number of suction pads 13 is not limited to four, and one, two, three, five or more suction pads may be provided as long as the member to be sucked can be transported stably.

[0022] The moving unit 20 is a unit that moves the member to be sucked (annular frame 102) that is sucked and held by the suction pad 13 in a predetermined direction. The moving unit 20 supports the transport unit 10 via the shaft 12. The moving unit 20 rotates the transport unit 10 around the axis of the shaft 12 and moves the transport unit 10 in horizontal and vertical directions.

[0023] The vacuum generating unit 30 generates negative pressure on the member to be attracted (annular frame 102) via the suction pad 13. The vacuum generating unit 30 of the first embodiment is realized by a rotary cylinder. The vacuum generating unit 30 has a housing 31, a partition wall 32, a shaft 33, a partition member 34, and a drive unit 40.

[0024] The housing 31 is formed in a cylindrical shape and houses a partition wall 32, a shaft 33, and a partition member 34. The partition wall 32, the shaft 33, and the partition member 34 divide the interior of the housing 31 into a first space 35 and a second space 36. The partition wall 32 extends radially from the center to the inner circumferential surface when viewed in the axial direction of the cylindrical housing 31. The shaft 33 is an axial member whose axis coincides with the axis of the housing 31, and is provided at the end of the partition wall 32 on the center side.

[0025] The partitioning member 34 extends radially from the center to the inner peripheral surface when viewed in the axial direction of the cylindrical shape. The partitioning member 34 has an end portion on the center side supported by the shaft 33 and is supported so as to be rotatable about the axis of the shaft 33. For example, as shown in Figures 3 and 4, when viewed in the axial direction of the housing 31, the partitioning member 34 is rotatable about the axis of the shaft 33 between a state in which it faces the 3 o'clock direction (the state shown in Figure 3) and a state in which it faces the 9 o'clock direction (the state shown in Figure 4) with respect to the partition wall 32 facing the 12 o'clock direction.

[0026] A first port 37 and a second port 38 are formed in the housing 31. The first port 37 is an opening formed in the housing 31 on the first space 35 side, and connects the first space 35 to the suction pad 13 via a communication passage 50 described below. The second port 38 is an opening formed in the housing 31 on the second space 36 side, and opens the second space 36 to the atmosphere.

[0027] The drive unit 40 is a unit that moves the partition member 34. When the vacuum generating unit 30 is a rotary cylinder, the drive unit 40 includes, for example, a motor that rotates the shaft 33 about its axis, or an electromagnetic device including a piezoelectric element. The drive unit 40 may also include a rotary cylinder or a piston cylinder connected to the partition member 34. When the drive unit 40 is realized by a rotary cylinder, the partition member 34 and the partition member of the drive unit 40 are connected, and air is supplied to the drive unit 40 to move the partition member 34 of the vacuum generating unit 30.

[0028] The drive unit 40 may also include an air supply source that supplies air to the inside of the second space 36. In this case, the second port 38 is connected to the air supply source. The air supply source may include, for example, a rotary cylinder, a piston cylinder, a compressor, etc. The volumes of the first space 35 and the second space 36 may also be controlled by connecting the air supply source, such as a compressor, to each of the first space 35 and the second space 36 via a communication passage and providing an electromagnetic valve or the like in each of the communication passages.

[0029] The communication passage 50 connects the suction pad 13 and the first space 35 of the vacuum generating unit 30. One end of the communication passage 50 is connected to the interior of the suction pad 13, and the other end is connected to the first port 37. The communication passage 50 is provided so that the paths join from one end connected to each of the plurality of suction pads 13 to the other end connected to one vacuum generating unit 30. Note that one vacuum generating unit 30 may be provided for one suction pad 13, and in this case, one communication passage 50 may be provided for each set of suction pads 13 and vacuum generating unit 30.

[0030] The partitioning member 34 can be rotated about the axis of the shaft 33 to change the volumes of the first space 35 and the second space 36. That is, by moving the partitioning member 34 from the state shown in Fig. 3 to the state shown in Fig. 4, the volume of the first space 35 can be increased. Also, by moving the partitioning member 34 from the state shown in Fig. 4 to the state shown in Fig. 3, the volume of the first space 35 can be decreased.

[0031] When the suction pad 13 is in contact with the member to be suctioned (annular frame 102), the suction pad 13, a communication path 50 (described later), and the first space 35 form a sealed space. In this state, the partition member 34 is moved so that the volume of the first space 35 increases, thereby reducing the pressure in the suction pad 13, the communication path 50, and the first space 35. The sealed space including the first space 35 is preferably reduced in pressure to, for example, -70 kPa or less.

[0032] The space between the suction pad 13 and the member to be suctioned is decompressed due to volume expansion, and the member to be suctioned is then held by the suction pad 13. To release the suction hold by the suction pad 13, the partition member 34 is moved so that the volume of the first space 35 decreases. Note that the second space 36 is open to the atmosphere via the second port 38, and therefore the internal pressure does not change due to an increase or decrease in volume.

[0033] Second Embodiment Next, the configuration of a transfer mechanism 2 according to a second embodiment will be described with reference to the drawings. Figures 5 and 7 are schematic side views of the transfer mechanism 2 according to the second embodiment. Figures 6 and 8 are schematic cross-sectional views of a vacuum generating unit 30 and a communication passage 50 according to the second embodiment.

[0034] In the transfer mechanism 2 of the second embodiment, the same components as those in the transfer mechanism 1 of the first embodiment are denoted by the same reference numerals and will not be described. The transfer mechanism 2 of the second embodiment differs from the transfer mechanism 1 of the first embodiment in that it further includes a check valve 51, a branching section 52, a branched communication passage 53, an exhaust unit 60, and a measuring instrument 70.

[0035] The check valve 51 is disposed on the communication passage 50 that connects the suction pad 13 and the vacuum generation unit 30. The check valve 51 is a valve body that allows air to flow in the communication passage 50 only in the direction from the suction pad 13 to the vacuum generation unit 30 and blocks air from flowing from the vacuum generation unit 30 to the suction pad 13.

[0036] The branch portion 52 is formed on the communication passage 50 between the vacuum generation unit 30 and the check valve 51. At the branch portion 52, a branch communication passage 53 branches off from the communication passage 50. In the communication passage 50, the check valve 51 blocks the air flow from the vacuum generation unit 30 toward the suction pad 13, so that air flowing from the vacuum generation unit 30 toward the check valve 51 flows through the branch portion 52 into the branch communication passage 53. The end of the branch communication passage 53 opposite the branch portion 52 is open to the atmosphere.

[0037] An exhaust unit 60 is disposed on the branch communication passage 53. The exhaust unit 60 is configured to be able to open and close the branch communication passage 53. The exhaust unit 60 of the second embodiment is realized by a check valve that allows air to flow only in a direction from the branch portion 52 to the outside and blocks air from flowing from the outside toward the branch portion 52. The exhaust unit 60 may be realized by, for example, a solenoid valve or an air-operated valve. When the exhaust unit 60 includes an air-operated valve, for example, the drive unit 40 and the air-operated valve may be synchronized to change the volume so as to compress the first space 35 and open the air-operated valve.

[0038] The measuring device 70 measures the suction holding force of the suction pad 13 on the member to be sucked (annular frame 102). The measuring device 70 is provided to measure the pressure in the space between the suction pad 13 and the check valve 51 in the communication passage 50.

[0039] In the transfer mechanism 2 of the second embodiment, when the suction holding force of the suction pad 13 is reduced due to a leak or the like, the suction holding force can be restored while the suction pad 13 continues to hold the suction target member (annular frame 102) by suction. Specifically, as shown in FIGS. 5 and 6 , with the suction pad 13 holding the suction target member by suction, the exhaust unit 60 is opened and the partition member 34 is moved, thereby performing a compression operation to compress the first space 35 of the vacuum generating unit 30. At this time, the check valve 51 blocks the flow of air from the vacuum generating unit 30 toward the suction pad 13, so that the suction holding of the suction target member by the suction pad 13 is maintained. As the volume of the first space 35 is compressed, air is exhausted from the exhaust unit 60.

[0040] After the compression operation, as shown in Figures 7 and 8, the exhaust unit 60 is closed and the partition member 34 is moved, thereby performing an expansion operation to expand the first space 35 of the vacuum generating unit 30. As the volume of the first space 35 expands, the pressure in the first space 35, the communicating passage 50, and the suction pad 13 is reduced again. By performing the compression operation and the expansion operation in this order, it is possible to increase the suction holding force compared to before the compression operation while the suction pad 13 continues to suction-hold the member to be attracted.

[0041] In the transfer mechanism 2 of the second embodiment, for example, the pressure in the space between the suction pad 13 and the check valve 51 is constantly measured and monitored by the measuring device 70. When the value measured by the measuring device 70 falls outside a predetermined range, the partition member 34 is moved by the drive unit 40 and the exhaust unit 60 is opened and closed to perform the compression operation and the expansion operation. Note that the timing of performing the compression operation and the expansion operation is not limited to being based on the value measured by the measuring device 70, and may be, for example, at predetermined time intervals.

[0042] Third Embodiment Next, the configuration of the transport mechanism 3 according to the third embodiment will be described with reference to the drawings. Figures 9 and 10 are schematic side views of the transport mechanism 3 according to the third embodiment.

[0043] In the transfer mechanism 3 of the third embodiment, the same components as those in the transfer mechanism 2 of the second embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Compared with the transfer mechanism 2 of the second embodiment, the transfer mechanism 3 of the third embodiment has a branch portion 54, a branch communication passage 55, an electromagnetic valve 80, and an air supply source 90. It differs in that it further comprises:

[0044] The branch portion 54 is formed on the communication passage 50 between the suction pad 13 and the check valve 51. At the branch portion 54, a branch communication passage 55 branches off from the communication passage 50. A solenoid valve 80 is disposed on the branch communication passage 55. The solenoid valve 80 is configured to be able to open and close the branch communication passage 55. An air supply source 90 is disposed at the end of the branch communication passage 55 opposite the branch portion 54. The air supply source 90 supplies air toward the communication passage 50 when the solenoid valve 80 is open.

[0045] 9, in the transfer mechanism 3 of the third embodiment, when the exhaust unit 60 and the solenoid valve 80 are closed, the partition member 34 is moved by the drive unit 40 to expand the volume of the first space 35, thereby suction-holding the member to be attracted (annular frame 102) that is in contact with the suction pad 13. Also, as shown in FIG. 10, when the exhaust unit 60 is closed and the position of the partition member 34 is fixed by the drive unit 40, the solenoid valve 80 is opened to pressurize the space between the check valve 51 and the suction pad 13, thereby releasing the suction-holding of the member to be attracted by the suction pad 13.

[0046] As described above, the conveying mechanisms 1, 2, and 3 and the conveying method of the embodiments expand the volume of the first space 35 communicating with the suction pad 13 inside the housing 31 of the vacuum generating unit 30, thereby reducing the pressure in the space between the suction pad 13 and the first space 35 and suction-holding the member to be sucked (annular frame 102). The change in the volume of the first space 35 is achieved by moving the partition member 34 that separates the first space 35 from the second space 36. Therefore, air consumption can be reduced compared to conventional configurations that reduce the pressure in the suction pad 13 using a suction source such as a vacuum pump or an ejector.

[0047] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0048] 1, 2, 3 Transfer mechanism 10 Transport unit 13 Suction pad 20 Mobile Units 30 Vacuum generation unit 31 Case 34 Partition members 35 First space 36 Second space 40 Drive Unit 50 communication path 51 Check valve 52,54 Branch 53,55 Branching passage 60 Exhaust unit 70 Measuring instruments 80 Solenoid valve 90 Air supply source 102 Annular frame (adsorbed member)

Claims

1. A conveying mechanism that conveys a member to be attracted by suction and holding it with a suction pad, a suction pad that suction-holds the member to be attracted; a vacuum generating unit that generates a negative pressure on the member to be attracted via the suction pad; a moving unit that moves the member to be attracted and held by the suction pad in a predetermined direction; Equipped with The vacuum generating unit comprises: The housing and a partition member that partitions the interior of the housing into a first space that communicates with the suction pad and a second space; a drive unit that moves the partition member; and With the suction pad in contact with the member to be attracted, the drive unit moves the partition member so that the volume of the first space increases, thereby reducing the pressure in the space between the suction pad and the member to be attracted and holding the member to be attracted. A transport mechanism characterized by:

2. a check valve disposed on a communication passage connecting the suction pad and the vacuum generating unit; a branch portion formed on the communication passage between the vacuum generating unit and the check valve; an exhaust unit disposed on a branch communication passage branched from the branch portion and configured to be openable and closable; Further provided with a compressing operation in which, while the suction pad is suction-holding the suction target member, the exhaust unit is opened and the partition member is moved to compress the first space of the vacuum generating unit; an expansion operation in which, after the compression operation, the exhaust unit is closed and the partition member is moved to expand the first space of the vacuum generating unit; To carry out 2. The transport mechanism according to claim 1, wherein:

3. A measuring device for measuring the suction holding force of the suction pad on the member to be attracted is disposed between the suction pad and the check valve. Further provided with When the measurement value by the measuring device is outside a predetermined range, the partition member is moved to perform the compression operation and the expansion operation.

3. The transport mechanism according to claim 2, wherein:

4. The vacuum generating unit includes a rotary cylinder.

4. The transport mechanism according to claim 1, wherein the transport mechanism comprises: a first transport member;

5. a suction pad that suction-holds the member to be suctioned; a vacuum generating unit that generates a negative pressure on the member to be attracted via the suction pad; a moving unit that moves the member to be attracted and held by the suction pad in a predetermined direction; Equipped with The vacuum generating unit comprises: The housing and a partition member that partitions the interior of the housing into a first space that communicates with the suction pad and a second space; a drive unit that moves the partition member; having A conveying method in which the attracted member is suction-held by a suction pad and conveyed in a conveying mechanism, With the suction pad in contact with the member to be attracted, the drive unit moves the partition member so that the volume of the first space increases, thereby reducing the pressure in the space between the suction pad and the member to be attracted and holding the member to be attracted. A transport method comprising:

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