Plenum assemblies for cooling transformer coupled plasma windows

Abstract

SOLUTION: A plenum for a dielectric window of a substrate processing system includes a first inlet port, a second inlet port, and a body. The body includes: a first recessed area configured to hold a first coil; a second recessed area configured to hold a second coil; a third recessed area configured to oppose a first area of the dielectric window, receive a first coolant from the first inlet port, and direct the first coolant across the first area to cool a first portion of the dielectric window; and a fourth recessed area configured to oppose a second area of the dielectric window, receive a second coolant from the second inlet port, and direct the second coolant across the second area to cool a second portion of the dielectric window.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Application No. 62 / 968,305, filed January 31, 2020, which is incorporated herein by reference in its entirety.

[0002] The present disclosure relates to cooling of transformer-coupled plasma windows. [Background technology]

[0003] The background description provided herein is intended to provide a general overview of the contents of the present disclosure. Work by the presently named inventors within the scope of what is described in this background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] During the manufacture of semiconductor devices, etching and deposition processes may occur in a processing chamber. An ionized gas, or plasma, is introduced into the plasma chamber to etch (or remove) material from a substrate, such as a semiconductor wafer, and to sputter or deposit material onto the substrate. Creating a plasma for use in a manufacturing or fabrication process typically begins with introducing a process gas into the processing chamber. In the processing chamber, the substrate is placed on a substrate support, such as an electrostatic chuck or pedestal.

[0005] The processing chamber may include a transformer-coupled plasma (TCP) reactor coil. A radio frequency (RF) signal generated by a power supply is supplied to the TCP reactor coil. The TCP reactor coil is driven by a transformer coupled capacitive tuning (TCCT) matching network. The TCCT matching network receives the RF signal provided by the power supply and allows for adjustment of the power supplied to the TCP reactor coil. The top surface of the processing chamber incorporates a dielectric window made of a material such as ceramic. The dielectric window allows for transmission of the RF signal from the TCP reactor coil into the processing chamber. The RF signal excites gas molecules in the processing chamber, generating plasma. Summary of the Invention

[0006] A plenum for a dielectric window of a substrate processing system is provided, the plenum including a first inlet port, a second inlet port, and a body, the body including a first recessed region configured to hold a first coil, a second recessed region configured to hold a second coil, a third recessed region facing the first region of the dielectric window and configured to receive a first coolant from the first inlet port and direct the first coolant across the first region to cool a first portion of the dielectric window, and a fourth recessed region facing the second region of the dielectric window and configured to receive a second coolant from the second inlet port and direct the second coolant across the second region to cool a second portion of the dielectric window.

[0007] In other features, the body includes a fifth recessed region facing a third region of the dielectric window and configured to receive the first coolant from the third recessed region and direct the first coolant across the third region to cool a third portion of the dielectric window. In other features, the plenum further includes a backup passage disposed in the fifth recessed region and receiving a third coolant. In other features, the third coolant is compressed dry air.

[0008] In other features, the third recessed area is circular and directs the first coolant toward an output located at a center of the plenum, and the fourth recessed area is circular and directs the second coolant toward an output along a periphery of the plenum.

[0009] In other features, the first recessed area and the second recessed area are on a top side of the plenum. The third recessed area and the fourth recessed area are on a bottom side of the plenum. In other features, the second recessed area, the third recessed area, and the fourth recessed area are each channels.

[0010] In other features, the body is circular. In other features, the body is shaped and sized to fit around an outer periphery of the dielectric window. In other features, the body includes a backup passage for cooling at least one of the third recessed region or the fifth recessed region.

[0011] In other features, the third recessed region includes a guide extending radially and directing the first coolant from the first inlet port to a centrally located output. In other features, the third recessed region includes a guide extending annularly and directing the first coolant in an annular direction.

[0012] In other features, the third recessed region includes at least one of a divider or a radially extending guide, wherein the annularly extending guide and the at least one of the divider or the radially extending guide direct the first coolant from the first inlet port to a centrally located output.

[0013] In another aspect, a system is provided, the system including the plenum and at least one coolant source supplying the first coolant to the first inlet port and the second coolant to the second inlet port. In another aspect, the first coolant is different from the second coolant. In another aspect, the first coolant differs from the second coolant in at least one of flow rate or pressure. In another aspect, the first coolant is compressed dry air and the second coolant is air at atmospheric pressure.

[0014] In other features, a system is provided, the system including the plenum, the dielectric window, and at least one of a valve or a mass flow controller configured to adjust at least one of a flow rate or a pressure of the first coolant and at least one of a flow rate or a pressure of the second coolant.

[0015] In other features, a system is provided, the system including the plenum and the dielectric window, the third recessed region forming a first channel with the dielectric window, and the fourth recessed region forming a second channel with the dielectric window.

[0016] In other features, the system further includes a temperature sensor that detects a temperature of the dielectric window or a temperature of the plenum, and a controller configured to adjust at least one of a flow rate of the first coolant or a flow rate of the second coolant based on an output of the temperature sensor.

[0017] In another feature, a plenum for a transformer-coupled plasma window is provided. The plenum includes a first inlet port, a second inlet port, a backup port, and a body having a circular recessed region, a first channel, a second channel, a third channel, and a fourth channel. The circular recessed region is configured to hold a first coil. The first channel is configured to hold a second coil. The second channel is disposed on the body opposite the circular recessed region and the first channel. The second channel faces a first region of the dielectric window and is configured to receive a first coolant from the first inlet port and direct the first coolant across the first region to cool a first portion of the dielectric window. The third channel is disposed on the body opposite the circular recessed region and the first channel and radially inward of the second channel. The third channel faces the second region of the dielectric window and is configured to receive a second coolant from the second inlet port and direct the second coolant across the second region to cool the second portion of the dielectric window. The fourth channel is disposed opposite the circular recessed region of the body and the first channel and radially inward of the third channel. The fourth channel faces the third region of the dielectric window and is configured to receive a third coolant from the backup port and direct the third coolant across the third region to cool the third portion of the dielectric window. In other features, the third channel is deeper than the fourth channel and directs the second coolant into the fourth channel.

[0018] Further scope of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.

[0019] The present disclosure will become more clearly understood from the detailed description and accompanying drawings set forth below. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 illustrates a functional block diagram of an example of a first portion of a plasma processing system incorporating a plenum cooling system having a plenum according to the present disclosure.

[0021] [Figure 2] FIG. 2 is a functional block diagram of an example second portion of the plasma processing system of FIG. 1, illustrating a gas supply system and a coolant supply system for the plenum.

[0022] [Figure 3] FIG. 3 illustrates a cross-sectional view of a portion of a processing chamber including an example plenum according to the present disclosure.

[0023] [Figure 4] FIG. 4 illustrates a top perspective view of another example plenum having a first zonal structure and a corresponding first flow pattern in accordance with the present disclosure.

[0024] [Figure 5] FIG. 5 shows a bottom perspective view of the plenum of FIG.

[0025] [Figure 6] FIG. 6 shows a cutaway perspective view of a portion of the plenum of FIG.

[0026] [Figure 7] FIG. 7 shows a thermal diagram of example air temperatures above the corresponding dielectric window and below the plenum of FIG.

[0027] [Figure 8] FIG. 8 illustrates a top perspective view of another example plenum having a second zonal structure and a corresponding second flow pattern in accordance with the present disclosure.

[0028] [Figure 9] FIG. 9 shows a bottom perspective view of the plenum of FIG.

[0029] [Figure 10] FIG. 10 is a top view of another example plenum showing example supply lines for corresponding cooling zones according to the present disclosure.

[0030] [Figure 11] FIG. 11 illustrates a top perspective view of another example plenum having a third zonal structure and a corresponding third flow pattern in accordance with the present disclosure.

[0031] [Figure 12] FIG. 12 shows a bottom perspective view of the plenum of FIG.

[0032] [Figure 13] FIG. 13 shows a quarter cross-sectional side view of the plenum of FIG. 11 above a dielectric window.

[0033] [Figure 14] FIG. 14 illustrates a top perspective view of another example plenum having a fourth zonal structure and a corresponding fourth flow pattern in accordance with the present disclosure.

[0034] [Figure 15] FIG. 15 shows a bottom perspective view of the plenum of FIG. 14 above the dielectric window.

[0035] [Figure 16] FIG. 16 shows a quarter cross-sectional side view of the plenum of FIG.

[0036] In the drawings, reference numbers may be reused to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0037] A plenum assembly can be incorporated into the TCP window to cool it. A coolant (e.g., a cooling gas) passes through the plenum assembly and over the TCP window, cooling it. The plenum assembly can include a plenum with a cooling zone through which the coolant passes. The plenum is positioned between the TCP reactor coil and the TCP window. A plenum with a single cooling zone can experience overheating at or near the center and / or outer edge of the plenum during processes such as center-hot or edge-hot. This overheating can limit the process power delivered to, for example, the TCP reactor coil. As a result, the process power is limited to prevent thermal stress and / or cracking of the TCP window.

[0038] The examples described herein include plenums with banded structures for improved and efficient cooling of TCP windows. These plenums have different structural patterns and corresponding coolant flow patterns. These plenums enable increased throughput and overall system performance. These plenums offer a wide range of solutions for cooling TCP windows, extending the etch tool's ability to operate at higher power levels and minimizing temperature gradients across the TCP window to prevent TCP window cracking. These plenums are applicable to different TCP reactor coils and edge-hot and center-hot processes, covering a wide spectrum of processing powers. These plenums are applicable to a variety of different etch tools with TCP windows and can be used in a variety of different plasma processes. These plenums also improve temperature control and help prevent overheating and overcooling.

[0039] In some examples, the plenum cools the entire TCP window, covering the entire upper surface area of ​​the TCP window. Each plenum can include multiple zones (e.g., two or more separate cooling zones) and can also include a backup zone. As an example, the azimuthal temperature uniformity achieved by the plenum can be ±5°C, and the corresponding tool power capacity can be 6 kilowatts (kW). Azimuthal temperature uniformity refers to the maximum temperature difference across the TCP window at any point during processing. Large temperature variations across the TCP window increase thermal stress on the TCP window. Minimizing the maximum temperature difference across the TCP window can improve throughput. Adding a backup cooling zone can further improve throughput by adding additional cooling capacity. The backup cooling zone prevents the TCP window from exceeding 150°C, thereby preventing damage to the TCP window. For example, temperatures above 150°C can cause the TCP window coating to peel off.

[0040] FIG. 1 illustrates a first portion 100 of a plasma processing system, including a plenum cooling system, a plasma processing chamber 112, and a TCP reactor coil 114. A portion of the plenum cooling system is illustrated in FIG. 1. An example of the remaining portion of the plasma cooling system is illustrated in FIG. 2. The plenum cooling system includes a plenum 115 disposed between the TCP reactor coil 114 and a dielectric (or TCP) window 116. The plenum 115 receives a coolant via an inlet line 118 (e.g., a pipe). The coolant circulates and / or passes through the portion between the plenum 115 and the dielectric window 116. The plenum 115 and other plenums disclosed herein may be formed from, for example, polyphenesulfane (PPSU), polyetheretherketone (PEEK), polyamideimide, polyimide-based plastic, and / or polytetrafluoroethylene (PTFE), and / or other materials having suitable electrical properties and meeting dissipation factor, loss factor, and permittivity requirements. In one embodiment, one or more of the plenums are injection molded. Plenums are easy to access, install, or at least maintain. Examples of plenums are shown in Figures 3-5 and 8-16.

[0041] The plenum 115 may include a plurality of circular recessed regions (or channels) 120 in which the TCP reactor coils 114 (e.g., inner and outer coils) are disposed. The TCP reactor coils 114 are disposed above at least a portion of the plenum 115. A first power source 121 provides a first RF source signal to a TCCT matching network 122. The TCCT (or first) matching network 122 is included between the first power source 121 and the TCP reactor coils 114. The TCCT matching network 122 allows for adjustment of the power provided to the TCP reactor coils 114.

[0042] The dielectric window 116 is disposed adjacent to the plenum 115 and above the pinnacle 119, enabling efficient transmission of a first RF source signal for plasma generation into the plasma processing chamber 112. The pinnacle refers to the upper liner of the processing chamber and may be configured to support the dielectric window. A substrate support 123, such as an electrostatic chuck, pedestal, or other suitable substrate support, is disposed at the bottom of the plasma processing chamber 112. The substrate support 123 supports a substrate 125. When the substrate support 123 is an electrostatic chuck, the substrate support 123 includes conductive portions 124 and 126 that are electrically insulated from each other. The substrate support 123 is surrounded by an insulator 128 and is capacitively coupled to the substrate 125. Applying a DC voltage to the conductive portions 124 and 126 generates capacitive coupling between the conductive portions 124 and 126 and the substrate 125. This capacitive coupling attracts the substrate 125 toward the substrate support 123.

[0043] The plasma processing system further includes a bias RF power source 130 connected to a bias (or second) matching network 132. The second matching network 132 is connected between the bias RF power source 130 and the substrate support 123. The second matching network 132 matches the impedance (e.g., 50 Ω) of the bias RF power source 130 to the impedance of the substrate support 123 and plasma 134 in the plasma processing chamber 112 as seen by the second matching network 132.

[0044] The plasma processing system further includes a voltage control interface (VCI) 140. The VCI 140 may include a pickup device 142, a voltage sensor 144, a controller 146, and circuitry between the voltage sensor 144 and the controller 146. The pickup device 142 extends to the substrate support 123. The pickup device 142 is connected to the voltage sensor 144 via electrical leads 148 and is used to generate an RF voltage signal.

[0045] The operation of voltage sensor 144 may be monitored, manually controlled, and / or controlled via controller 146. Controller 146 may display the output voltage of the channel of voltage sensor 144 on display 150. Display 150 is shown as separate from controller 146, but may be included within controller 146. A system operator may provide input signals indicating (i) whether to switch channels, (ii) which of one or more channels to activate, and / or (ii) which of one or more channels to deactivate.

[0046] In operation, an ionizable gas flows into the plasma processing chamber 112 through the gas inlet 156 and exits the plasma processing chamber 112 through the gas outlet 158. A first RF signal is generated by the RF power source 121 and transmitted to the TCP reactor coil 114. The first RF signal is emitted from the TCP reactor coil 114 through the dielectric window 116 into the plasma processing chamber 112. This ionizes the gas within the plasma processing chamber 112, forming a plasma 134. The plasma 134 generates a sheath 160 along the walls of the plasma processing chamber 112. The plasma 134 contains electrons and positively charged ions. Because electrons are much lighter and more mobile than positively charged ions, a DC bias voltage and a DC sheath potential are generated on the inner surfaces of the plasma processing chamber 112. The average DC bias voltage and DC sheath potential of the substrate 125 affect the energy with which the positively charged ions impact the substrate 125. This energy affects process characteristics such as etching and deposition rates.

[0047] The controller 146 can adjust the bias RF signal generated by the RF power source 130 to vary the amount of DC bias and / or DC sheath potential at the substrate 125. The controller 146 can compare the channel outputs of the voltage sensor 144 and / or a representative value derived based on the channel outputs with one or more setpoints. The setpoint values ​​may be preset and stored in the memory 162 of the controller 146. The bias RF signal can be adjusted based on a difference between (i) the output and / or representative value of the voltage sensor 144 and (ii) the one or more setpoints. The bias RF signal passes through a second matching network 132. The output provided by the second matching network 132 (referred to as a matched signal) is then sent to the substrate support 123. The bias RF signal is then sent to the substrate 125 via an insulator 128.

[0048] 2 shows a second portion 200 of the plasma processing system, which includes a gas supply system 202 for a gas injector 204 and a coolant supply system 206 for the plenum 115. The TCP reactor coil 114 is disposed in a channel of the plenum 115 and receives an RF signal from a power supply 121 via a TCCT matching network 122.

[0049] The gas delivery system 202 includes a controller 46 and a gas delivery assembly 230 including one or more gas sources 232-1, 232-2, ..., and 232-N (collectively referred to as gas sources 232), where N is an integer greater than 0. The gas sources 232 supply one or more gases (e.g., etching gas, carrier gas, purge gas, etc.) and mixtures thereof. The gas sources 232 may also supply a purge gas. The gas sources 232 are connected to a manifold 240 via valves 234-1, 234-2, ..., 234-N (collectively referred to as valves 234) and mass flow controllers 236-1, 236-2, ..., 236-N (collectively referred to as mass flow controllers 236). The output of the manifold 240 is supplied to the plasma processing chamber 112 of FIG. 1. By way of example only, the output of the manifold 240 is an injector 204. The controller 46 may also control the operation of the valve 234 and the mass flow controller 236 .

[0050] The coolant supply system 206 includes a controller 46, two or more coolant sources (shown as coolant sources 250-1 and 250-2), two or more valves (shown as valves 252-1 and 252-2), and two or more mass flow controllers (shown as mass flow controllers 254-1 and 254-2). The controller 46 controls the operation of valve 252 and mass flow controller 254. Coolant is supplied from the coolant source 250 to the inlet line 118 via valve 252 and mass flow controller 254. Although two coolant sources, two valves, and two mass flow controllers are shown, additional coolant sources, valves for the two cooling zones, additional coolant sources, mass flow controllers, and valves may be included. In one embodiment, each of the two cooling zones and a central backup cooling zone is equipped with its own coolant source, valve, and mass flow controller.

[0051] As an example, a set of sources including a coolant supply, a valve, and a mass flow controller may be provided for each inlet port and / or backup passageway of the plenum described below. In one embodiment, a set of sources including a coolant supply, a valve, and a mass flow controller is provided for each pair of inlet ports and / or backup passageways. For example, a first set of sources is provided for the middle recessed region, a second set of sources is provided for the outer recessed regions, and a third set of sources is provided for the pair of backup passageways supplying the central recessed region.

[0052] The controller 46 may provide cooling via the first and second sets of sources while operating in the first mode, and via the first, second, and third sets of sources while operating in the second mode. The second mode is used to provide additional cooling. The controller 46 may also adjust the flow rate of coolant during the first and second modes based on the temperature of the dielectric window 116. The temperature can be detected via the temperature sensor 260. In one embodiment, the temperature sensor is located in the region of the dielectric window at a predetermined point where the dielectric window is hottest during processing. Any number of temperature sensors 260 may be included. One or more temperature sensors may be included in each cooling zone, channel, passage, recessed region, etc. The temperature sensor may be mounted in or on the plenum 115 and / or on the dielectric window 116. The flow rate of coolant to one or more regions of the plenum 115 may be adjusted based on one or more temperatures in the same one or more regions of the plenum 115 and / or one or more temperatures in one or more other regions of the plenum 115.

[0053] In one embodiment, the set of sources is configured to (i) supply compressed, dry air to one or more central zones of the plenum 115 and (ii) supply atmospheric air to one or more intermediate zones and / or one or more outer zones of the plenum 115. Examples of the central, intermediate, and outer zones are shown in FIGS. 4-16. In one embodiment, the air supplied to the one or more intermediate zones and / or one or more outer zones is amplified air supplied through one or more air amplifiers. The one or more mass flow controllers may include an air amplifier. The air amplifier increases the amount of air supplied within a given period of time.

[0054] FIG. 3 shows a processing chamber 300 including (i) a dielectric window 304 and (ii) a plenum 302 disposed between a TCP reactor coil 306 and an alignment member 308. The plenum 302 may be disposed within an outer ring 310, which is disposed on a pinnacle 312. The alignment member 308 is disposed on an inner shelf of the outer ring 310 and aligns the plenum 302 over the dielectric window 304. In the illustrated example, two TCP reactor coils 306 are shown, disposed in inner and outer channels 320 and 322 (referred to as coil channels) on the top side of the plenum 302. The plenum 302 also includes two lower (or coolant) channels 324 and 326 for circulating and / or passing a coolant. The coolant may be supplied to the channels 324 and 326 via a passageway (or pipe) 330. The plenum may include a third channel, which may also be referred to as a central (or most central) channel and / or a backup channel. 4 to 16 show examples of the center channel and / or the backup channel.

[0055] The TCP reactor coil 306 can receive power via line 332 and return power via line 334. An injector 340 can extend through the alignment member 308, the plenum 302, and the dielectric window 304 and be secured above the dielectric window 304. The injector 340 injects gas toward a substrate 350 disposed on a substrate support 352.

[0056] 4-6 illustrate a plenum 400 having a first zonal structure and a corresponding first flow pattern. The plenum 400 can replace one of the plenums described above and includes a body 402 having a first central recessed region 404, a raised middle portion 406, an outer channel 408, and a raised outer shelf 410. The first central recessed region 404 is configured for an inner TCP reactor coil and is located above second and third central recessed regions 411, 412 located on the bottom side of the plenum 400. The plenum 400 can include a backup passage 413 for supplying coolant to the second and third central recessed regions 411, 412. The backup passage 413 is located along an outer wall edge 416 of the first central recessed region 404 on the top side of the plenum 400 and can be used to supply gas to the second and third central recessed regions 411, 412 on the bottom side of the plenum 400.

[0057] The raised intermediate portion 406 may include a guide pair 420. A portion of an alignment member (e.g., alignment member 308 in FIG. 3 ) is disposed between the guide pair 420. The raised intermediate portion 406 is the region between the inner TCP reactor coil disposed in the first central recessed region 404 and the outer TCP reactor coil disposed in the outer channel 408, and corresponds to the intermediate recessed regions 417, 418 on the bottom side of the plenum 400. The raised intermediate portion 406 includes two inlet ports 430. The inlet ports 430 are used to supply coolant to the intermediate recessed regions 417, 418. The intermediate recessed regions 417, 418 guide the coolant in a circular direction toward the inlets 429, 431 of the second and third central recessed regions 411, 412.

[0058] The second and third central recessed regions 411, 412 are used to direct the coolant received from the port 430 in a circular fashion toward and out of the central opening 414. The coolant can be discharged from the central opening 414 into a gap between the inner edge of the plenum 400 and an injector (e.g., injector 340 in FIG. 3 ), which is disposed in the central opening 414. As such, the second and third central recessed regions 411, 412 and the intermediate recessed regions 417, 418 effectively function as channels, having sidewalls for directing the coolant to corresponding regions for cooling the respective portions of the dielectric window (e.g., the dielectric window in FIG. 2 ) facing the central recessed regions 411, 412 and the intermediate recessed regions 417, 418.

[0059] The outer channel 408 is configured to hold the outer TCP reactor coil and corresponds to an outer ridge 432 on the bottom side of the plenum 400. The raised outer shelf 410 includes two inlet ports 434 that supply coolant to outer channels 440 on the bottom side of the plenum 400. The coolant is supplied to the outer channels 440 from the ports 434 and exits at openings 442 in the outermost wall 444 of the plenum 400. The outer channels 440 thus direct the coolant to corresponding regions to cool the respective portions of the dielectric window (e.g., the dielectric window of FIG. 2) facing the outer channels 440.

[0060] The structure of the plenum 400 causes the coolant to flow in a pattern through the passages formed by the plenum 400 and the corresponding dielectric windows. Portions of the passages are provided by the recessed regions 411, 412, 417, 418 and the outer channel 440, and opposing portions of the passages are provided by the top surfaces of the corresponding dielectric windows. In one embodiment, no seal exists between the plenum 400 and the dielectric windows. The coolant flows in a pattern across the dielectric windows. The recessed regions 411, 412 are deeper than the recessed regions 417, 418. The outer channel (or recessed region) 440 may have the same depth as the recessed regions 417, 418.

[0061] 7 is a thermal diagram 700 illustrating an example of the air temperature above a corresponding dielectric window and below a plenum 400. The plenum 400 includes recessed regions 411, 412, 417, 418, a central opening 414, and an outer channel 440. A temperature bar key 702 is labeled with the lowest temperature at the bottom of the temperature bar key 702 and the highest temperature at the top of the temperature bar key 702. The hottest area is labeled 710 and the coolest area is labeled 712.

[0062] 8-9 show a plenum 800 having a second zonal structure and a corresponding second flow pattern. The plenum 800 can replace one of the plenums described above and includes a body 802 having a first central recessed region 804, a raised middle portion 806, an outer channel 808, and a raised outer shelf 810. The first central recessed region 804 is configured for an inner TCP reactor coil and is located above second and third central recessed regions 811, 812 located on the bottom side of the plenum 800. The plenum 800 can include a backup passage 813 for supplying coolant to the second and third central recessed regions 811, 812. The backup passage 813 is located along the edge of the outer wall 816 of the first central recessed region 804 on the top side of the plenum 800 and can be used to supply gas to the second and third central recessed regions 811, 812 on the bottom side of the plenum 800.

[0063] The raised middle section 806 is the region between the inner TCP reactor coils located in the first central recessed region 804 and the outer TCP reactor coils located in the outer channel 808, and corresponds to a circular middle recessed region 817 on the bottom side of the plenum 800. The raised middle section 806 includes two inlet ports 830. The inlet ports 830 are used to supply coolant to the middle recessed region 817. The inlet ports 830 and the middle recessed region 817 direct and guide the coolant in a circular direction toward the inlets 829, 831 of the second and third central recessed regions 811, 812, respectively.

[0064] The second and third central recessed regions 811, 812 are used to guide the coolant received from the port 830 in a circular manner toward and out of the central opening 814. The coolant can be discharged from the central opening 814 into a gap between the inner edge of the plenum 800 and an injector (e.g., injector 340 in FIG. 3 ). The injector is disposed in the central opening 814. The second and third central recessed regions 811, 812 and the intermediate recessed region 817 are configured as channels having sidewalls for directing the coolant to corresponding regions to cool the respective portions of the dielectric window (e.g., the dielectric window in FIG. 2 ) facing the second and third central recessed regions 811, 812 and the intermediate recessed region 817.

[0065] Outer channel 808 is configured to hold the outer TCP reactor coil and corresponds to an outer ridge 832 on the bottom side of plenum 800. Raised outer shelf 810 includes two inlet ports 834 that supply coolant to outer channel 840 on the bottom side of plenum 800. Coolant is supplied to outer channel 840 from ports 834 and exits at openings 842 in the outermost wall 844 of plenum 800. Outer channel 840 thus directs the coolant to corresponding regions to cool respective portions of the dielectric window (e.g., the dielectric window of FIG. 2) facing outer channel 840.

[0066] The structure of plenum 800 causes coolant to flow in a pattern through the passages formed by plenum 800 and the corresponding dielectric windows. Portions of the passages are provided by recessed areas 811, 812, 817 and outer channel 840, and opposing portions of the passages are provided by the top surfaces of the corresponding dielectric windows. In one embodiment, there is no seal between plenum 800 and the dielectric windows. The coolant flows in a pattern across the dielectric windows.

[0067] Plenum 800 is similar to plenum 400. Backup port 813 is in a different location and has a different shape than backup port 413. Central recessed areas 811, 812 are differently shaped and have larger inlets than central recessed areas 411, 412. Plenum 800 includes a single intermediate recessed area (or channel) 817 in which inlet port 830 is located, while intermediate recessed areas 417, 418 in FIG. 5 extend from port 430.

[0068] FIG. 10 shows a plenum 1000 that is similar to, but has a different structure than, plenums 400 and 800 of FIGS. 4 and 8. Plenum 1000 is shown as an example to illustrate coolant supply lines 1002 for corresponding cooling zones. Coolant supply lines 1002 supply coolant to ports 1004. Plenums 400 and 800 of FIGS. 4 and 8 may have similar supply lines. Plenum 1000 includes a central recessed area 1010 with an output 1012, a middle channel 1014, and an outer channel 1016. Central recessed area 1010 includes a backup passage (or port) 1018.

[0069] 11-12 show a plenum 1100 having a third zonal structure and a corresponding third flow pattern. On its top side, the plenum 1100 includes a central recessed region 1102, an intermediate ridge 1104, and an outer recessed region 1106. The central recessed region 1102 and the outer recessed region 1106 are configured to hold TCP reactor coils. The central recessed region 1102 includes a backup passage 1110 and an output 1112.

[0070] The intermediate ridge 1104 includes an inlet port 1114. The intermediate ridge 1104 provides a recessed region 1120 on the bottom side of the plenum 1100. Opposite the central recessed region 1102 is a central recessed region 1122 having an outer circular edge 1124 and an inner radially extending guide 1126. The outer circular edge 1124 is the bottom of a sidewall 1128 of the central recessed region 1102. The backup passage 1110 has an output channel 1130 that extends annularly circumferentially along the inner side of the outer circular edge 1124. The radially extending guide 1126 guides the coolant received from the annularly extending output channel 1130 toward the output 1112.

[0071] Figure 13 shows a quarter cross-sectional side view of the plenum 1100 over a dielectric window 1300. The plenum 1100 includes a central recessed area 1102, a middle ridge 1104, and an outer recessed area 1106. The middle ridge 1104 includes inlet ports (one shown in Figure 13). One of the backup passages 1110 is also shown. The dielectric window 1300 is shown over the pinnacle 1302.

[0072] 14-15 show a plenum 1400 having a fourth zonal configuration and a corresponding fourth flow pattern. On its top side, the plenum 1400 includes a central recessed region 1402, an intermediate ridge 1404, and an outer recessed region 1406. The central recessed region 1402 and the outer recessed region 1406 are configured to hold TCP reactor coils. The central recessed region 1402 includes a backup passage 1410 and an output 1412.

[0073] The intermediate ridge 1404 includes an inlet port 1414. The intermediate ridge 1404 provides a recessed region 1420 on the bottom side of the plenum 1400. Opposite the central recessed region 1402 is a central recessed region 1422 having an outer circular edge 1424 and a divider 1426 that provides a half section 1428 to an inner annularly extending guide 1430 and a radially extending guide 1432. The outer circular edge 1424 is the bottom of a sidewall 1438 of the central recessed region 1402. The backup passage 1410 has an output channel 1440 that extends annularly in a circumferential direction along the inside of the outer circular edge 1424. The annularly extending guide 1430 guides the coolant received from the annularly extending output channel 1440 toward the output 1412. Divider 1426 , annular guide 1430 , and radial guide 1432 provide a channel having an output 1442 that directs coolant from annular output channel 1440 to output 1412 .

[0074] Figure 16 shows a quarter cross-sectional side view of the plenum 1400 over a dielectric window 1600. The plenum 1400 includes a central recessed area 1402, a middle ridge 1404, and an outer recessed area 1406. The middle ridge 1404 includes inlet ports (one shown in Figure 16). One of the backup passages 1410 is also shown. The dielectric window 1600 is shown over the pinnacle 1602.

[0075] The above example minimizes the temperature difference across the dielectric window. As an example, the embodiment of Figures 4-6 may exhibit a maximum temperature difference of 8°C during processing. The maximum temperature difference is the difference between the minimum and maximum temperatures at each location on the plenum at any time during processing. This prevents thermal stress on the dielectric window.

[0076] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses. The broad teachings of the present disclosure may be implemented in a variety of forms. Accordingly, other modifications of the present disclosure will be apparent with reference to the drawings, the specification, and the following claims. While the present disclosure includes specific examples, the true scope of the present disclosure is not limited to such specific examples. In a method, one or more steps can be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Also, although each embodiment is described as having specific features, one or more features described with respect to each embodiment of the present disclosure can be implemented with and / or combined with any feature of any other embodiment, even if that combination is not explicitly described. In other words, the above-described embodiments are not mutually exclusive, and each permutation of combining one or more embodiments with each other is within the scope of the present disclosure.

[0077] The spatial and functional relationships of each element (e.g., module, circuit element, semiconductor layer, etc.) are described using various terms, such as "connected," "engaged," "coupled," "adjacent," "next to," "on top of," "above," "below," "disposed," etc. Also, when a relationship between a first and second element is described in the above disclosure, unless expressly described as "direct," the relationship may be a direct relationship, where no other intervening element exists between the first and second elements, or an indirect relationship, where one or more intervening elements (spatial or functional) exist between the first and second elements. As used herein, the phrase at least one of A, B, and C should be interpreted to mean a logical (A or B or C) using a non-exclusive logical OR, and not as "at least one of A, at least one of B, and at least one of C."

[0078] In some implementations, the controller is part of a system, such as those described above. Such systems can include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (such as wafer pedestals and gas flow systems). These systems can be integrated with electronics for controlling their operation before, during, and after semiconductor wafer or substrate processing. The electronics can also be referred to as a "controller," enabling control of various components or subparts of one or more systems. Depending on the processing requirements and / or type of system, the controller can be programmed to control any of the processes disclosed herein, including process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer transfer into and out of tools and other transfer tools and / or load locks connected to or interfaced with the particular system.

[0079] Generally, a controller can be defined as an electronic device having various integrated circuits, logic, memory, and / or software to receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in firmware format that store program instructions, digital signal processors (DSPs), chips defined as application-specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or in connection with a semiconductor wafer or system. In some embodiments, the operational parameters may be part of a recipe defined by a process engineer to accomplish one or more processing steps during the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of a wafer.

[0080] In some implementations, the controller may be part of or coupled to a computer that is integrated with, coupled to, or otherwise networked to the system, or a combination thereof. For example, the controller may perform wafer processing remotely in the “cloud” or as all or part of a fab host computer system. The computer may enable remote access to the system to monitor the current progress of a manufacturing operation, examine the history of past manufacturing operations, examine trends or performance criteria from multiple manufacturing operations, modify parameters of a current process, set processing steps to follow a current process, or initiate a new process. In some examples, a remote computer (e.g., a server) can provide process recipes to the system over a network, which may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data, which specify parameters for each of the processing steps to be performed during one or more operations. The parameters can be specific to the type of process being performed and the type of tool the controller is configured to interface with or control. Thus, as noted above, a controller may be distributed, such as by including one or more discrete controllers that are networked together and operate for a common purpose, such as the processing and control described herein. One example of a distributed controller for such purposes is one or more integrated circuits on the chamber that communicate with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) and coupled to control a process on the chamber.

[0081] Example systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a clean chamber or module, a beveled edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing system related to or usable in the fabrication and / or manufacturing of semiconductor wafers.

[0082] As noted above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, neighboring tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to and from tool locations and / or load ports of wafers within a semiconductor manufacturing factory.

Claims

1. 1. A plenum for a dielectric window of a substrate processing system, comprising: a first inlet port; a second inlet port; and a main body; The body includes: a first recessed area configured to hold a first coil; a second recessed area configured to hold a second coil; a third recessed region facing the first region of the dielectric window and configured to receive a first coolant from the first inlet port and direct the first coolant across the first region to cool a first portion of the dielectric window; a fourth recessed region facing the second region of the dielectric window and configured to receive a second coolant from the second inlet port and direct the second coolant across the second region to cool a second portion of the dielectric window.

2. 10. The plenum of claim 1, wherein the body includes a fifth recessed region facing a third region of the dielectric window and configured to receive the first coolant from the third recessed region and direct the first coolant across the third region to cool a third portion of the dielectric window.

3. The plenum of claim 2 further comprising a backup passageway disposed in the fifth recessed area and receiving a third coolant.

4. 4. The plenum of claim 3, wherein the third coolant is compressed dry air.

5. 10. The plenum of claim 1, the third recessed area is circular and directs the first coolant toward a centrally located output of the plenum; The fourth recessed area is circular and directs the second coolant along a periphery of the plenum to an output.

6. 10. The plenum of claim 1, the first recessed area and the second recessed area are on a top side of the plenum; The third recessed area and the fourth recessed area are on a bottom side of the plenum.

7. The plenum of claim 1 , wherein the second recessed region, the third recessed region, and the fourth recessed region are each channels.

8. The plenum of claim 1 wherein the body is circular.

9. 10. The plenum of claim 1, wherein the body is shaped and sized to fit around a periphery of the dielectric window.

10. The plenum of claim 1 , wherein the body includes a backup passage for cooling at least one of the third recessed region and the fifth recessed region.

11. 2. The plenum of claim 1, wherein the third recessed region includes a guide extending radially and guiding the first coolant from the first inlet port to a centrally located output.

12. The plenum of claim 1 , wherein the third recessed area includes a guide that extends annularly and directs the first coolant in an annular direction.

13. 13. The plenum of claim 12, the third recessed region includes at least one of a divider or a radially extending guide; a plenum, wherein the at least one of the annularly extending guide and the divider or the radially extending guide directs the first coolant from the first inlet port to a centrally located output.

14. 10. A system including the plenum of claim 1, comprising at least one coolant source supplying the first coolant to the first inlet port and the second coolant to the second inlet port.

15. 15. The system of claim 14, wherein the first coolant is different from the second coolant.

16. 15. The system of claim 14, wherein the first coolant differs from the second coolant in at least one of flow rate or pressure.

17. 15. The system of claim 14, wherein the first coolant is compressed dry air and the second coolant is air at atmospheric pressure.

18. 10. A system including the plenum of claim 1, the dielectric window; and at least one of a valve or mass flow controller configured to adjust at least one of a flow rate or pressure of the first coolant and at least one of a flow rate or pressure of the second coolant.

19. 10. A system including the plenum of claim 1 and the dielectric window, comprising: the third recessed region forms a first channel with the dielectric window; The fourth recessed region forms a second channel with the dielectric window.

20. 20. The system of claim 19, a temperature sensor for detecting a temperature of the dielectric window or a temperature of the plenum; a controller configured to adjust at least one of the flow rate of the first coolant or the flow rate of the second coolant based on an output of the temperature sensor.

21. 1. A plenum for a transformer coupled plasma window, comprising: a first inlet port; a second inlet port; and A backup port, a main body; The body includes: a circular recessed area configured to hold a first coil; a first channel configured to hold a second coil; a second channel disposed on the body opposite the circular recessed region and the first channel, facing a first region of the dielectric window, the second channel configured to receive a first coolant from the first inlet port and direct the first coolant across the first region to cool a first portion of the dielectric window; a third channel disposed opposite the circular recessed region of the body and the first channel, radially inward of the second channel, facing a second region of the dielectric window, the third channel configured to receive a second coolant from the second inlet port and direct the second coolant across the second region to cool a second portion of the dielectric window; a fourth channel disposed opposite the circular recessed region and the first channel of the body and radially inward of the third channel, facing a third region of the dielectric window, the fourth channel configured to receive a third coolant from the backup port and to direct the third coolant across the third region to cool a third portion of the dielectric window.

22. 22. The plenum of claim 21, wherein the third channel is deeper than the fourth channel and directs the second coolant to the fourth channel.

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