Transport device

Abstract

To provide a transport device allowed to prevent a positional deviation of a base material and carry it stably.SOLUTION: A transport device comprises a transport unit that carries a base material, conveyor units that aid in carrying the base material with the transport unit by moving a belt member in a state that a predetermined surface of the base material being carried by the transport unit is sucked to a sucking part formed on the belt member, and a suction unit that gives a suction force to the conveyor units. The conveyor units are provided side by side in a width direction orthogonal to a transport direction of the base material in an in-surface direction of the base material. Between the conveyor units and the suction unit, there are provided exclusive pipes connected to respective ones of the conveyor units, a collection unit joining the respective ones of the exclusive pipes together and one common pipe connecting between the collection unit and the suction unit. The exclusive pipes are configured to be set such that respective pressure losses are given equal.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a conveying device for conveying a strip-shaped substrate. [Background technology]

[0002] In a coating device used to form the positive and negative electrodes of lithium-ion batteries, a slurry of electrode material is applied to a strip-shaped substrate such as aluminum foil or copper foil to form a coating film, and the formed coating film is then dried to form the positive and negative electrodes.

[0003] Such coating devices are provided with a conveying device for conveying a substrate, and a coating film is formed on the substrate conveyed by this conveying device. The conveying device has a plurality of rolls that convey the substrate while applying a predetermined tension to it, and a conveyor unit that assists in conveying the substrate by suction and holding the substrate. The conveyor units are arranged side by side in the width direction of the substrate, and by suctioning and holding the substrate with each conveyor unit, hanging of the substrate due to the weight of the coating film and displacement of the substrate in the width direction are prevented (for example, Patent Document 1 below).

[0004] 4, such a conveying device is generally provided with a suction unit 920 that applies suction force to conveyor units 910, and this suction unit 920 applies suction force to each conveyor unit 910. Specifically, each conveyor unit 910 is connected to a dedicated pipe 931 for applying suction force to the conveyor unit 910, and the dedicated pipe 931 is connected to a single common pipe 932 that is connected to the suction unit 920 at a collecting section 933. In other words, suction force is applied from the suction unit 920 to each suction conveyor 910 through the common pipe 932, the collecting section 933, and the dedicated pipe 931. In this way, the substrate 940 is sucked and held by each conveyor unit 910. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-040467 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the above-described conveying device 900 sometimes fails to convey the substrate 940 in a stable state. Specifically, in the above-described conveying device 900, the conveyor units 910 are arranged side by side in the width direction of the substrate 940, and therefore the positions of the respective conveyor units 910 are different. As a result, the distance from each conveyor unit 910 to the collecting section 933 varies, and the pressure loss in each dedicated pipe 931 differs, which makes it easy for the suction force applied to each conveyor unit 910 to vary. When the substrate 940 is conveyed in this state, the substrate 940 may slide sideways toward the conveyor unit 910 that applies a stronger suction force, resulting in a displacement of the substrate 940.

[0007] The present invention has been made in consideration of the above problems, and aims to provide a conveying device that can prevent the substrate from shifting position and can convey the substrate stably. [Means for solving the problem]

[0008] The conveying device of the present invention that solves the above problem is a conveying device comprising: a conveying section that conveys a substrate; a conveyor unit that assists the conveying section in conveying the substrate by running the belt member while a predetermined surface of the substrate being conveyed by the conveying section is adsorbed to an adsorption section formed on the belt member; and a suction section that applies suction force to the conveyor unit, wherein the conveyor units are arranged side by side in a width direction perpendicular to the conveying direction of the substrate in the in-plane direction of the substrate, and between the conveyor unit and the suction section are provided dedicated pipes connected to each of the conveyor units, a collecting section that merges each of the dedicated pipes, and a single common pipe that connects the collecting section and the suction section, and the dedicated pipes are configured so that the pressure losses of each are equal.

[0009] According to the conveying device, the pressure loss of each dedicated pipe is set to be equal, so that the suction force applied to each conveyor unit from the suction part can be made uniform, thereby preventing the substrate from shifting position and enabling stable conveyance of the substrate.

[0010] The collecting portion has a manifold portion formed long in the width direction, The dedicated pipes may be arranged in the width direction and connected to the manifold portion.

[0011] According to this configuration, the dedicated pipes are connected to the manifold portion that is elongated in the width direction perpendicular to the conveying direction of the substrate in the in-plane direction of the substrate, so that it is easy to set the lengths of the dedicated pipes to be equal, and therefore, even when the conveyor units are arranged side by side in the width direction, it is easy to set the pressure loss of each dedicated pipe to be equal.

[0012] The dedicated pipes may be configured to have the same diameter and length.

[0013] With this configuration, the diameter and length of each dedicated pipe are set to be equal, which equalizes the pressure loss of each dedicated pipe and makes it possible to uniformize the suction force applied to each conveyor unit from the suction section, thereby preventing misalignment of the substrate and ensuring stable transport of the substrate.

[0014] In addition, a coating film may be formed on the substrate in stripes in the width direction, and the conveyor unit may be configured to adsorb a predetermined surface of the substrate to the adsorption section in a non-coated section, which is a section where no coating film is formed.

[0015] According to this configuration, the suction conveyor can assist the conveyance of the substrate by the conveying section without contacting the coating film with the suction conveyor. [Effects of the Invention]

[0016] According to the transport device of the present invention, it is possible to prevent the substrate from being displaced, and to transport the substrate stably. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a diagram schematically illustrating a coating apparatus including a conveying device according to the present invention. [Figure 2] 1A and 1B are diagrams showing a conveyor unit provided in a transport device according to an embodiment of the present invention, in which (a) is a side view of the conveyor unit, and (b) is a top view of the conveyor unit. [Figure 3] FIG. 2 is a view of a conveyor unit according to an embodiment of the present invention, viewed from the conveying direction of a substrate. [Figure 4] FIG. 1 is a diagram showing a conventional conveyor unit. DETAILED DESCRIPTION OF THE INVENTION

[0018] An embodiment of a conveying device 2 of the present invention will be described with reference to the drawings. In the following description, the three axes of a Cartesian coordinate system are designated as X, Y, and Z, the horizontal direction is referred to as the X-axis direction and the Y-axis direction, and the direction perpendicular to the XY plane (i.e., the vertical direction) is referred to as the Z-axis direction.

[0019] 1 is a diagram schematically illustrating a coating apparatus 100 including a conveying device 2 according to one embodiment of the present invention. In the following description, an example will be described in which the conveying device 2 is applied to the coating apparatus 100 for forming electrodes for lithium ion batteries, but the application is not limited to the coating apparatus 100 and can be applied to any apparatus that conveys a strip-shaped substrate 1.

[0020] 1, the coating apparatus 100 includes a conveying device 2 that continuously conveys a substrate 1, a coating mechanism 110 that applies a coating liquid to both sides of the substrate 1 to form a coating film 11 (see FIG. 3), and a drying mechanism 120 that heats and dries the coating film 11 formed on the substrate 1. The coating mechanism 110 applies the coating liquid, which is an electrode material, to both sides of the substrate 1 that is being conveyed by the conveying device 2 to form the coating film 11, and the formed coating film 11 is dried by the drying mechanism 120 to form a positive electrode or a negative electrode of a lithium ion battery.

[0021] The substrate 1 is a metal foil that will become a battery electrode plate for a lithium-ion battery, and aluminum foil or the like is used to form the positive electrode, and copper foil or the like is used to form the negative electrode. The substrate 1 is a strip-shaped sheet that is long in one direction, and is transported by a transport device 2 so that it passes through each part that constitutes the coating device 100.

[0022] The coating liquid is, for example, a slurry in which an active material, a binder, and a conductive additive are mixed in a solvent, and is used as a material for battery plates (so-called electrode material) for lithium-ion batteries. This coating liquid is applied to the substrate 1 by a coating mechanism 110, thereby forming a coating film 11. In this embodiment, the coating film 11 is formed in a striped pattern. Forming the coating film 11 in a striped pattern means forming the coating film 11 in the in-plane direction of the substrate 1 in a width direction (hereinafter referred to as the width direction) perpendicular to the transport direction of the substrate 1, so that the substrate 1 has a plurality of coated portions 12 on which the coating film 11 is formed and uncoated portions 13 between the plurality of coated portions where the coating film 11 is not formed, as shown in FIG.

[0023] The transport device 2 is for transporting the substrate 1. As shown in Fig. 1, the transport device 2 includes a transport section 3 that transports the substrate 1, a plurality of conveyor units 4 that assist the transport section 3 in transporting the substrate 1, and a suction section 51 (see Fig. 3) that applies suction force to each of the conveyor units 4.

[0024] The conveying section 3 is for continuously conveying the substrate 1 in the longitudinal direction of the substrate 1. The conveying section 3 has an unwinding roll 31, a winding roll 32, a plurality of conveying rolls 33, and an application roll 34. Each roll of the conveying section 3 is formed in a cylindrical shape and rotates around the central axis of the cylinder as the rotation axis.

[0025] The unwinding roll 31 is for unwinding the substrate 1 downstream, and its rotation is controlled by a control unit (not shown), which unwinds the substrate 1 at a predetermined speed. The control unit is, for example, configured by a general-purpose computer device, and will be treated similarly in the following description. The winding roll 32 is for winding the substrate 1, and its rotation is controlled by the control unit, similar to the unwinding roll 31, which winds the substrate 1 while applying a predetermined tension to the substrate 1. Note that the tension referred to here refers to the tension in the transport direction of the substrate 1.

[0026] The transport roll 33 is provided so that the substrate 1 unwound from the unwind roll 31 passes through it before being wound up by the winding roll 32. A plurality of transport rolls 33 are provided and arranged so that the substrate 1 passes through each component of the coating device 100. Some or all of the plurality of transport rolls 33 are driven and controlled to rotate by a control unit, similar to the unwind roll 31 and the winding roll 32, and transport the substrate 1 while applying a predetermined tension to the substrate 1.

[0027] The application roll 34 is used to guide the substrate 1 to a position where the application liquid is applied by the first application unit 111. The application roll 34 is disposed opposite the first application unit 111, and supports the substrate 1 from the back surface side of the substrate 1 at a predetermined embrace angle. This allows the substrate 1 to be transported while maintaining a constant distance from the first application unit 111.

[0028] With this configuration, the conveying section 3 conveys the substrate 1 at a predetermined speed while applying a predetermined tension to the substrate 1.

[0029] Further, a second coating section 112 that forms a coating film 11 on the back surface of the substrate 1 and a drying mechanism 120 are arranged along the transport path of the substrate 1 formed by the application roll 34 and the transport roll 33 (hereinafter referred to as the transport roll 35) through which the substrate 1 subsequently passes. That is, before the substrate 1 unwound by the unwind roll 31 reaches the transport roll 35, the coating film 11 is formed on both surfaces of the substrate 1 and the coating film 11 is dried. This prevents the rolls of the transport section 3 from coming into contact with the wet coating film 11. The conveyor unit 4 assists in the transport of the substrate 1 from the unwound by the unwind roll 31 through the application roll 34 until it reaches the transport roll 35.

[0030] The coating mechanism 110 is for applying a coating liquid to both sides of the substrate 1 to form a coating film 11. This coating mechanism 110 has a first coating unit 111 that applies the coating liquid to the front surface of the substrate 1 and a second coating unit 112 that applies the coating liquid to the back surface of the substrate 1.

[0031] The first coating unit 111 is used to apply a coating liquid to the surface of the substrate 1 to form a striped coating film 11. The first coating unit 111 is formed long in one direction and is provided so as to extend in the width direction of the substrate 1. The coating roll 34 is disposed at a predetermined distance from the first coating unit 111 so that the rotation axis direction of the coating roll 34 and the longitudinal direction of the first coating unit 111 are parallel. In the following description, the longitudinal direction of the first coating unit 111 will be referred to as the width direction.

[0032] As shown in FIG. 1 , the first coating unit 111 is configured with a manifold 114 connected to a supply channel 113 and serving as a space for storing a coating liquid that is long in the width direction, a slit 115 that is wide in the width direction and connected to the manifold 114, and a discharge port 116 that opens in the width direction and has the same length as the slit 115 and discharges the coating liquid. As a result, the coating liquid stored in the manifold 114 passes through the slit 115 and is discharged from the discharge port 116 onto the substrate 1. The discharge port 116 faces the coating roll 34 with the substrate 1 sandwiched between them. That is, the discharge port 116 faces the substrate 1 on the surface side of the substrate 1. As a result, the coating liquid can be applied to the substrate 1 while maintaining a constant distance between the discharge port 116 and the substrate 1, and a coating film 11 having a uniform thickness can be formed on the surface of the substrate 1.

[0033] The first coating mechanism 111 is further provided with a shim plate (not shown) for forming the coating film 11 on the substrate 1 in a striped pattern. The shim plate has, for example, a roughly comb-like shape and is arranged to divide the slit 115 in the width direction. When the coating liquid is applied with the slit 115 divided in the width direction by this shim plate, the coating liquid is applied from the portion where there is no shim plate and is not applied from the portion where there is a shim plate. In other words, the coating film 11 can be formed in a striped pattern.

[0034] The supply path 114 connects the manifold 114 to a tank 117 in which the coating liquid is stored. The coating liquid is supplied from the tank 117 to the manifold 114 via the supply path 113 by a pump (not shown), and is then applied to the surface of the substrate 1 from a discharge port 116 via a slit 115.

[0035] The first coating section 111 having these configurations can form the coating film 11 in a striped pattern on the surface of the substrate 1.

[0036] The second coating unit 112 has a similar configuration to the first coating unit 111, and as shown in Figure 1, the discharge port 116 of the second coating unit 112 is arranged downstream of the first coating unit 111, facing the back surface of the substrate 1. By applying a coating liquid using this second coating unit 112, a striped coating film 11 can be formed on the back surface of the substrate 1. The width of the coating film 11 formed on the back surface of the substrate 1 by the second coating unit 112 is preferably the same as the width of the coating film 11 formed on the front surface of the substrate 1 by the first coating unit 111.

[0037] The first coating unit 111 and the second coating unit 112 form stripe-shaped coating films 11 on both sides of the substrate 1 .

[0038] The drying mechanism 120 heats and dries the coating film 11 formed on both sides of the substrate 1 by the coating mechanism 110. As shown in Fig. 1, the drying mechanism 120 is provided downstream of the coating mechanism 110 on the transport path of the substrate 1, and includes a furnace body 121 and a heating nozzle (not shown).

[0039] The furnace body 121 is a box-shaped body formed long in the conveying direction of the substrate 1, and has a space inside this box through which the substrate 1 passes, and an entrance and exit for the substrate 1 to enter and exit this space. The substrate 1 on which the coating film 11 has been formed is conveyed by the conveying section 3 so as to pass through the furnace body 121.

[0040] The heating nozzle is used to heat the coating film 11 by blowing hot air onto the substrate 1. This heating nozzle is formed long in the width direction of the substrate 1, and has an opening (not shown) through which hot air is blown out toward a portion facing the front or back surface of the substrate 1. The hot air blown out from the heating nozzle creates a high-temperature environment inside the furnace body 121, and the coating film 11 is exposed to this high-temperature environment, thereby being heated and dried.

[0041] The coating film 11 formed on both sides of the substrate 1 can be dried by the drying mechanism 120 having the above configuration.

[0042] Furthermore, the substrate 1 may be displaced in the width direction as it is unwound by the unwinding roll 31, passes through the transport roll 33, and is wound onto the winding roll 32. This displacement is particularly likely to occur within the furnace body 121. This is because the furnace body 121 is located between the coating roll 34 and the transport roll 35 on the transport path of the substrate 1 by the transport unit 3, and the weight of the coating film 11 causes the substrate 1 to sag, or the hot air blown by the drying nozzle causes the substrate 1 to vibrate.

[0043] In this embodiment, the conveyor unit 4 is disposed inside the furnace body 121. That is, in order to prevent the substrate 1 from being suspended and shifted in position inside the furnace body 121, the conveyor unit 4 assists the conveyance of the substrate 1 by the conveying section 3 inside the furnace body 121.

[0044] The conveyor unit 4 assists the conveyance of the substrate 1 by the conveying section 3 by suctioning and holding the substrate 1. As shown in FIGS. 2(a) and 2(b), the conveyor unit 4 includes a circular belt member 41, two rollers 42 that rotate to move the belt member 41, a drive mechanism (not shown) for rotating the two rollers 42, and a housing section 43 having an opening 44 formed in a portion of the surface of the belt member 41 for generating suction force applied by a suction section 51. The conveyor unit 4 feeds the substrate 1 in the direction of travel of the suction section 45 by moving the belt member 41 while adsorbing a predetermined surface of the substrate 1 to an adsorption section 45 formed by applying suction force to the surface of the belt member 41.

[0045] The rollers 42 are formed in a cylindrical shape and rotate around the central axis of the cylinder as the rotation axis. The two rollers 42 are fixed at positions spaced apart from each other, and the belt member 41 is stretched across these two rollers 42. A drive mechanism for rotating each roller 42 is connected to the two rollers 42, and by operating this drive mechanism, the two rollers 42 rotate, causing the belt member 41 to run while stretched across the two rollers 42. If the belt member 41 is formed of a chain, a sprocket may be used instead of the rollers 42.

[0046] The housing 43 is a hollow housing provided between the two rollers. An opening 44 is formed in a wall of the housing 43 facing the rear surface of the belt member 41 located between the two rollers 42. A dedicated pipe 52 for applying suction force from the suction unit 51 to the conveyor unit 4 is connected to the housing 43. That is, suction force is applied to the inside of the housing 43 through the dedicated pipe 52, and the applied suction force reduces the pressure inside the housing 43 to a negative pressure relative to the outside. This generates suction force at the opening 44.

[0047] Furthermore, circular through holes 46 are formed in the belt member 41, and the through holes 46 are formed in a row around the entire circumference in the running direction of the belt member 41 at positions where the through holes 46 face the openings 44 while the belt member 41 is running. When these through holes 46 are positioned to face the openings 44 while the pressure inside the housing 43 is reduced by the suction unit 41, a suction force is generated through the openings 44. In this embodiment, each through hole 46 through which a suction force is generated serves as an adsorption unit 45. The substrate 1 adsorbed to the adsorption unit 45 is then fed in the traveling direction of the adsorption unit 45 while being adsorbed.

[0048] 3, the conveyor units 4 are arranged side by side in the width direction of the substrate 1, and each conveyor unit 4 is arranged so that the suction section 45 adsorbs the portion of the back surface of the substrate 1 where no coating film is formed, i.e., the non-coated portion 13, and both end faces 14 of the substrate 1 in the width direction. As a result, the conveyor units 4 arranged side by side in the width direction of the substrate 1 can feed the substrate 1 in the direction of travel of each suction section 45 without coming into contact with the coating film 11, and the posture of the substrate 1 transported by the transport section 3 can be maintained. In the following description, the conveyor units 4 arranged side by side in the width direction of the substrate 1 will be referred to as a set of conveyor units 4.

[0049] The suction unit 51 is for applying suction force to the conveyor units 4 and may be constituted by, for example, a blower, a pump, or an ejector. As shown in Fig. 3, between the conveyor units 4 and the suction unit 51, there are provided dedicated pipes 52 connected to each conveyor unit 4, a collecting section 53 that joins the dedicated pipes 52, and a single common pipe 54 that connects the collecting section 53 and the suction unit 51. That is, the suction force applied from the suction unit 51 through the common pipe 54 is first passed through the collecting section 53 and then applied to each conveyor unit 4 through the dedicated pipes 52. That is, the collecting section 53 and the common pipe 54 are shared so that the suction unit 51 can apply suction force to each conveyor unit 4.

[0050] Here, the dedicated pipes 52 are set so that the pressure loss of each pipe is equal. In this embodiment, the dedicated pipes 52 are set so that the diameter and length of each pipe are equal, thereby making the pressure loss of each pipe equal.

[0051] A more detailed description will be given. In this embodiment, the collecting section 53 has a cylindrical shape extending in the width direction, and has therein a manifold section 55 formed long in the width direction. This manifold section 55 is a space formed within the collecting section 53, and in this embodiment, it is formed so that the position of the end of the manifold section 55 in the width direction coincides with the position of the end of the base material 1 in the width direction. The dedicated pipes 52 are each formed to have the same diameter, and are connected to the manifold section 55 in a line in the width direction so that they are connected to the manifold section 55 over the shortest distance.

[0052] As a result, the diameter and length of each dedicated pipe 52 become equal, and the pressure loss of each dedicated pipe 52 becomes equal, making it possible to uniform the suction force applied from the suction section 51 to each conveyor unit 4. By uniforming the suction force applied from the suction section 51 to each conveyor unit 4 in this way, it is possible to prevent the substrate 1 from sliding sideways toward the conveyor unit 4 that applies a strong suction force, as in the conventional case. Therefore, it is possible to prevent the substrate 1 from shifting position, and it is possible to transport the substrate 1 stably.

[0053] In addition, multiple sets of conveyor units 4 are provided, and in this embodiment, multiple sets of conveyor units 4 are provided inside the furnace body 121 so as to be aligned along the conveying direction of the substrate 1. This makes it easier to prevent the substrate 1 from shifting position than if only one set of conveyor units 4 were to assist the conveyance of the substrate 1 by the conveying section 3.

[0054] As described above, according to the conveying device 1 of the above embodiment, the pressure loss of each dedicated pipe 52 is set to be equal, so that it is possible to equalize the suction force applied from the suction section 51 to each conveyor unit 4. Therefore, it is possible to prevent the substrate 1 from shifting in position, and to convey the substrate 1 stably.

[0055] Furthermore, since the collecting section 51 has the manifold section 55 formed to be long in the width direction, it is easy to set the lengths of the dedicated pipes 52 to be equal. As a result, even if the conveyor units 4 are arranged side by side in the width direction, it is easy to set the pressure loss of each dedicated pipe 52 to be equal.

[0056] The above describes the embodiments of the present invention in detail with reference to the drawings. However, the configurations and combinations thereof in each embodiment are merely examples, and additions, omissions, substitutions, and other modifications of the configurations are possible within the scope that does not deviate from the spirit of the present invention.

[0057] For example, in the above embodiment, the dedicated pipes 52 connected to the respective conveyor units 4 are set to have the same diameter and length, thereby making the pressure losses of the respective dedicated pipes 52 equal, but this is not limiting. For example, the dedicated pipes 52 may be provided with valves and their opening degrees adjusted to make the pressure losses of the respective dedicated pipes 52 equal. Alternatively, the dedicated pipes 52 may have different diameters and lengths, and the diameters and lengths of the respective dedicated pipes 52 may be adjusted to make the pressure losses of the respective dedicated pipes 52 equal.

[0058] In the above embodiment, the collecting portion 51 has the manifold portion 55, but it does not have to have the manifold portion 55.

[0059] Furthermore, in the above embodiment, an example was described in which the manifold portion 55 is formed so that the position of the end of the manifold portion 55 in the width direction coincides with the position of the end of the base material 1 in the width direction, but this is not limited thereto, and it is preferable that the manifold portion 55 is formed so that it is easy to set the length of each dedicated pipe 52 to be uniform.

[0060] In the above embodiment, an example in which the conveyor unit 4 is provided inside the furnace body 121 has been described, but the present invention is not limited to this. For example, the conveyor unit 4 may be provided near the second coating section 112 to assist the second coating section 112 in applying the coating liquid to the rear surface side of the substrate 1.

[0061] In the above embodiment, the conveyor unit 4 is provided on the back side of the base material 1, but it may be provided on the front side of the base material 1.

[0062] In addition, in the above embodiment, an example was described in which each conveyor unit 4 is arranged so that the non-coated portion 13 on the back surface of the substrate 1 and both end faces 14 of the substrate 1 in the width direction are adsorbed to the suction portion 45, but it is sufficient to arrange it so that at least both end faces 14 of the substrate 1 in the width direction are adsorbed to the suction portion 45. [Explanation of symbols]

[0063] 100 Coating equipment 110 Coating mechanism 111 First coating mechanism 112 Second coating mechanism 113 Supply route 114 Manifold 115 Slit 116 Discharge port 117 Tank 120 Drying mechanism 121 Furnace body 2. Conveyor equipment 3. Conveyor 31 Unwinding roll 32 Winding roll 33 Transport roll 34 Coating roll 35 Transport roll 4 conveyor units 41 Belt member 42 Laura 43 Housing 44 Aperture 45 Adsorption part 46 Through hole 51 Suction part 52 Dedicated piping 53 Gathering area 54 Common piping 55 Manifold section

Claims

1. a conveying unit that conveys the substrate; a conveyor unit that assists the conveyance of the substrate by the conveyance unit by running the belt member while a predetermined surface of the substrate conveyed by the conveyance unit is adsorbed to an adsorption portion formed on the belt member; a suction unit that applies suction force to the conveyor unit, the conveyor units are arranged side by side in a width direction perpendicular to a conveying direction of the substrate in an in-plane direction of the substrate, Between the conveyor units and the suction unit, there are provided dedicated pipes connected to each of the conveyor units, a collecting section where the dedicated pipes join together, and a single common pipe that connects the collecting section and the suction unit, A conveying device characterized in that the dedicated pipes are set so that the pressure losses of each pipe are equal.

2. the collecting portion has a manifold portion formed long in the width direction, The conveying device according to claim 1 , wherein the dedicated pipes are arranged in the width direction and connected to the manifold portion.

3. 3. The conveying device according to claim 1, wherein the dedicated pipes are set to have the same diameter and length.

4. A coating film is formed on the substrate in stripes in the width direction, The conveying device according to claim 1 or 2, characterized in that the conveyor unit is arranged so as to adsorb a predetermined surface of the substrate to the adsorption section in a non-coating section, which is a section where no coating film is formed.

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