Mirror member

Abstract

To provide a mirror member which has high reliability and can be easily manufactured.SOLUTION: The mirror member comprises a body frame, a mirror, an inner edge of the body frame, and a plurality of support parts for connecting the mirror in a radial form. The support parts include: a first support rod connected to the mirror and extended in a radial direction to the inner edge side from the pivoting center of the mirror; a second support rod connected to the first support rod and extended on a first circumferential direction side to the pivoting center; a third support rod connected to the second support rod and extended on a second circumferential direction side opposite the first circumferential direction side on the outer diameter side of the pivoting center to the second support rod; a fourth support rod connected to the third support rod and extended on the first circumferential direction side on the outside of the pivoting center to the third support rod; and a fifth support rod extended in the radial direction from the fourth support rod and connected to the fourth support rod and the inner edge.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a mirror member. [Background technology]

[0002] Conventionally, scanner devices have been proposed that include a mirror that reflects light and is supported to be able to swing, enabling optical scanning. For example, Patent Document 1 discloses a scanner device (mirror scanner) that includes a mirror having a first surface that reflects light and that is able to swing around a swing axis, a permanent magnet disposed on a second surface of the mirror that is opposite to the first surface, and a yoke provided on the second surface side of the mirror. This scanner device includes a support plate, a pair of torsion bars extending from the support plate along the swing axis, and a mirror that is supported to be able to swing by the support plate and the torsion bars. Patent Document 1 also describes that the mirror member (mirror main body) consisting of the support plate, the torsion bars, and the mirror is integrally formed by processing a semiconductor wafer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2024-19458 Summary of the Invention [Problem to be solved by the invention]

[0004] The scanner device of Patent Document 1 is formed by processing a semiconductor wafer, so it requires careful handling and may be expensive to manufacture. Also, if a scanner device is provided with three or more support parts (for example, the torsion bar of Patent Document 1) to move the mirror along two axes, it may be difficult to ensure drive precision or durability, and it is desirable to ensure reliability in these areas.

[0005] An object of the present disclosure is to provide a mirror member that is highly reliable and easily manufacturable. [Means for solving the problem]

[0006] The mirror member according to the present disclosure comprises a main body frame, a mirror, and a plurality of support parts radially connecting the inner edge of the main body frame and the mirror, and the support parts comprise: a first support rod connected to the mirror and extending radially from the rotation center of the mirror toward the inner edge; a second support rod connected to the first support rod and extending in a first circumferential direction relative to the rotation center; a third support rod connected to the second support rod and extending in a second circumferential direction opposite to the first circumferential direction on the outer diameter side of the rotation center relative to the second support rod; a fourth support rod connected to the third support rod and extending in the first circumferential direction outside the rotation center relative to the third support rod; and a fifth support rod extending in the radial direction from the fourth support rod and connected to the fourth support rod and the inner edge. [Effects of the Invention]

[0007] The mirror member according to the present disclosure using the above means is highly reliable and can be easily manufactured. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a configuration diagram of a light source device according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a perspective view of a part of the configuration of the scanner device. [Figure 3] FIG. [Figure 4] FIG. [Figure 5] 5 is an enlarged view of the AA' and BB' portions of the mirror support member in FIG. 4. [Figure 6] FIG. [Figure 7] FIG. [Figure 8] 3A and 3B are a plan view and a bottom view of a mirror member. [Figure 9] FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. FIG. 1 is a configuration diagram of a light source device 1. The light source device 1 has a function of emitting laser light into space. The light source device 1 is used, for example, as a light source for a laser distance measuring device or a LiDAR (Light Detection and Ranging) sensor. The light source device 1 includes a control unit 11, a distance measuring optical system 12, an optical system driving circuit 13, and a scanner device 2.

[0010] The control unit 11 controls the operations of the optical system drive circuit 13, the scanner device drive circuit 14, the angle sensor circuit 15, etc. The control unit 11 executes functions and / or methods realized by codes or instructions included in a program stored in a storage unit (not shown). The control unit 11 may be implemented, for example, by a central processing unit (CPU), a microprocessing unit (MPU), a graphics processing unit (GPU), a microcontroller unit (MCU), a processor core, a multiprocessor, an ASIC, an FPGA, etc., and each process disclosed in each embodiment may be realized by a logic circuit or a dedicated circuit formed in an integrated circuit, etc. Furthermore, these circuits may be realized by one or more integrated circuits, and multiple processes shown in each embodiment may be realized by a single integrated circuit.

[0011] The storage unit (not shown) of the light source device 1 has the function of storing various necessary programs and data. It is also capable of storing acquired information such as measured signals. The storage unit is realized by various storage media such as an HDD, SSD, or flash memory.

[0012] The distance measurement optical system 12 includes a light-emitting element that emits laser light, optical elements including lenses or mirrors that guide the laser light emitted from the laser light-emitting element, and a light-receiving element that detects the laser light. These optical elements may include a diffuser, a light tunnel, a microlens array, a condenser lens, or a filter that adjusts the beam width or luminance distribution. The light-receiving element can receive return light emitted by the laser light-emitting element and reflected by an object outside the light source device 1. The distance measurement optical system 12 emits laser light L1, which is distance measurement light (also referred to as "scanning light"), to a mirror 6 (deflecting member) of the scanner device 2.

[0013] The optical system driving circuit 13 controls the light emission of the light emitting element of the distance measurement optical system 12. The optical system driving circuit 13 also detects the light received by the light receiving element of the distance measurement optical system 12, converts it into an electrical signal, and transmits the information to the control unit 11.

[0014] The scanner device 2 reflects the laser light L1 emitted by the distance measurement optical system 12 in a direction and angle selected from a predetermined solid angle range and emits the reflected light outside the light source device 1. The scanner device 2 can reflect the laser light L1 in different directions, such as laser light L11 or laser light L12, by controlling the angle of the mirror 6. The scanner device 2 also guides light incident from outside the light source device 1 to the distance measurement optical system 12. The light incident from outside the light source device 1 is reflected light L3 reflected by an object outside the light source device 1. Depending on the configuration of the light source device 1, the laser light L1 emitted from the light source device 1 may be guided to another optical system within the light source device 1.

[0015] The scanner device 2 includes a deflection control device 3 and an inclination detection device 4. The deflection control device 3 of this embodiment includes a yoke member 5, a mirror 6, and a scanner device drive circuit 14. The inclination detection device 4 of this embodiment includes a light source 41 that emits laser light L2, a first lens 42, a detection circuit board 43, a beam splitter 44, a second lens 46, and an angle sensor circuit 15. The inclination detection device 4 uses the laser light L2 as detection light for detecting the inclination of the mirror 6. The mirror 6 also functions as a part of the inclination detection device 4.

[0016] 2 is a perspective view of a portion of the configuration of the deflection control device 3 and the tilt detection device 4 of the scanner device 2. In the description of the scanner device 2, the mirror 6 side is defined as the upper side of the scanner device 2, and the base member 55 side of the yoke member 5 is defined as the lower side.

[0017] The yoke member 5 includes a first yoke 51 and a second yoke 52 that is different from the first yoke 51 and is arranged in a rotationally symmetrical position about the axis P of the scanner device 2. The first yoke 51 includes a pair of first arm members 53, 53 having first end portions 532 a, 532 a, respectively, and a base member 55 connected to portions of the first arm members 53, 53 opposite the first end portions 532 a, 532 a. The second yoke 52 includes a pair of second arm members 54, 54 having second end portions 542 a, 542 a, respectively, and a base member 55 connected to portions of the second arm members 54, 54 opposite the second end portions 542 a, 542 a.

[0018] First yoke 51 and second yoke 52 have magnetic properties. First arm member 53 and second arm member 54 have body portions 531, 541 that are substantially quadrangular prisms with rectangular cross sections, and protrusions 532, 542 that extend and bend in a substantially L-shape on one side of body portions 531, 541. Protrusions 532, 542 have planar first end portion 532a and second end portion 542a, respectively, at their tips.

[0019] The trunk 531 of the first arm member 53 has a yoke coil 533 wound around its outer periphery (see FIG. 1). The yoke coils 533 of the pair of first arm members 53 are connected to each other in series. In addition, the trunk 541 of the second arm member 54 has a yoke coil 543 wound around its outer periphery (FIG. 1 shows only one second arm member 54 and its yoke coil 543). The yoke coils 543 of the pair of second arm members 54 are also connected to each other in series. Therefore, the yoke member 5 and the yoke coils 533, 543 form an electromagnet. The scanner device drive circuit 14 controls the angle of the mirror 6 by driving the electromagnet according to instructions from the control unit 11.

[0020] The base member 55 is a member having magnetic properties. The base member 55 includes a disk-shaped first base member 55-1 and a disk-shaped second base member 55-2, each having cutouts 551 on two pairs of opposing side edges 55a. The outer diameter of the first base member 55-1 and the outer diameter of the second base member 55-2 are substantially the same (see FIG. 2). The first base member 55-1 has the cutouts 551 that are substantially rectangular in plan view (details not shown), and a circular opening 553 that penetrates the first base member 55-1 in the thickness direction. As shown in the assembled yoke member 5 in FIG. 2, the opening 553 is located on an axis P that passes through a gap G (magnetic gap) provided between the pair of first end portions 532a and the pair of second end portions 542a.

[0021] The second base member 55-2 has approximately the same thickness as the first base member 55-1. The second base member 55-2 also has a circular opening 554 penetrating through it in the thickness direction (see FIG. 1). The opening 554 is also positioned on the axis P passing through the gap G when the yoke member 5 is assembled as shown in FIG. 2. Therefore, the opening 554 is positioned coaxially with the opening 553. The inner diameter of the opening 554 is approximately the same as the inner diameter of the opening 553.

[0022] The first arm member 53 and the second arm member 54 are each housed in a cutout 551 and connected to the first base member 55-1. The first arm member 53 is housed in the cutout 551 with its face abutting against the inner surface 551a of the first base member 55-1 toward the center and its end 531a substantially abutting against the upper surface of the second base member 55-2. Similarly, the second arm member 54 is housed in the cutout 551 with its face abutting against the inner surface 551a of the first base member 55-1 toward the center and its end 541a substantially abutting against the upper surface of the second base member 55-2. Therefore, the second base member 55-2 is disposed overlapping the first base member 55-1 so as to cover from below the ends 531a and 541a of the first arm member 53 and the second arm member 54 housed in the cutout 551.

[0023] FIG. 3 is a perspective view showing the mirror 6. The mirror 6 is an optical member disposed between the pair of first end portions 532a and between the pair of second end portions 542a in a plan view of the scanner device 2 (see FIGS. 1 and 2). The mirror 6 includes a permanent magnet 61 and a reflecting member 62 fixed to the yoke member 5. As shown in the exploded perspective view of FIG. 3, the mirror 6 has a circular flat plate shape and includes a reflecting portion 6a which is a functional surface that reflects the laser light L1 (see FIG. 2). The reflecting portion 6a includes a metal reflecting film formed by a method such as vapor deposition.

[0024] The permanent magnet 61 is fixed to the mirror 6 and is an annular (disk-shaped) magnet with an opening penetrating in the direction of the axis P in Fig. 2. The control unit 11 applies an external force to the mirror 6 via the yoke member 5 and the permanent magnet 61 by passing a current through the yoke coils 533, 543, thereby controlling the tilt direction and tilt angle of the mirror 6.

[0025] The permanent magnet 61 has a generally circular disk shape that is rotationally symmetric about the axis P along which the mirror 6 does not tilt. The permanent magnet 61 has one of the south and north magnetic poles at one end in the thickness direction (direction of the axis P), and the other of the south and north magnetic poles at the other end.

[0026] The reflecting member 62 has a reflecting surface that reflects the laser light L2 emitted from the light source 41 in a direction and at an angle corresponding to the reflection angle of the mirror 6. One or more reflecting surfaces may be provided, and may be flat or spherical (e.g., concavely curved) (details not shown). Therefore, the control unit 11 (angle sensor circuit 15) can detect the tilt direction and tilt angle of the mirror 6 corresponding to the light-receiving position by detecting the light-receiving position of the reflected light of the laser light L2 irradiated onto the reflecting member 62 using the detection unit 431 of the detection circuit board 43.

[0027] The reflecting surface of the reflecting member 62 may be formed by cutting or may be formed by, for example, resin molding. When the reflecting surface is formed by resin molding, the reflecting surface may be formed by mirror-finishing the surface of a flat reflecting member and fixing the back surface of the reflecting surface formed on the reflecting member 62 to the surface of the mirror 6 opposite to the functional part (reflecting part 6a) by adhesive or the like.

[0028] The light source 41 is a laser light emitting element that emits laser light L2 as detection light. The first lens 42 is a condensing lens that condenses the laser light L2 emitted from the light source 41. The laser light L2 condensed by the first lens 42 is irradiated onto the beam splitter 44.

[0029] The detection unit 431, which is a light receiving unit provided on the detection circuit board 43, is a two-dimensional sensor. The detection unit 431 can be, for example, a profile sensor which is a collection of pixels, a CCD, a CMOS sensor, a position sensitive detector (PSD), a quadrant photodetector, or the like.

[0030] The beam splitter 44 in this embodiment is a half mirror. The beam splitter 44 transmits a portion of the laser light L2 emitted from the first lens 42 along the axis P to the reflecting surface of the reflecting member 62. The beam splitter 44 also reflects a portion of the laser light L2 reflected by the reflecting member 62 and guides the reflected portion to the detecting unit 431. A second lens 46 is disposed between the beam splitter 44 and the detecting unit 431. The second lens 46 is a condensing lens that condenses the laser light L2 reflected by the beam splitter 44.

[0031] Next, the mirror member 7 will be described. FIG. 3 is an exploded perspective view of the mirror member 7. The mirror member 7 includes a mirror support member 8 and a mirror 6. FIG. 4 is a front view of the mirror support member 8. FIG. 5 is an enlarged view of the A-A' and B-B' portions of the mirror support member 8 in FIG. 4. FIG. 6 is a front view of the mirror member 7. FIG. 7 is a rear view of the mirror member 7. FIG. 8 is a plan view (7-1) and a bottom view (7-2) of the mirror member 7. FIG. 9 is a left side view of the mirror member 7. Note that the right side view of the mirror member 7 is omitted because it is bilaterally symmetrical to the left side view.

[0032] The mirror support member 8 of this embodiment is made of metal (for example, stainless steel). By being made of metal, the mirror support member 8 has workability, high strength, high spring limit stress, and material availability. The mirror support member 8 includes a main body frame 81, a mirror support part 82 provided in approximately the center of the main body frame 81, and a plurality of support parts 83 that support the mirror 6. The support parts 83 radially connect the inner edge 811a of the main body frame 81 to the mirror 6 fixed to the mirror support part 82.

[0033] Main body frame 81 is formed in the shape of a substantially square flat plate. Main body frame 81 has a substantially circular opening 811 on the inside. Positioning holes 812, 813 are provided at both end edges of main body frame 81 for positioning relative to yoke member 5. One positioning hole 812 is an elongated hole, and the other positioning hole 813 is a circular hole. In addition, fixing holes 814 are provided at each of the four corners of main body frame 81 for fixing relative to yoke member 5.

[0034] The mirror support portion 82 is a flat region formed in a circular shape on a flat plate. The mirror support portion 82 has a first annular portion 821, a second annular portion 822, and a third annular portion 823, which are coaxial with the axis P. The first annular portion 821 is disposed inside the second annular portion 822. The third annular portion 823 is disposed outside the second annular portion 822. The annular portions 821 to 823 are connected by a plurality of (eight in this embodiment) radial support rods 824 extending in a radial direction D1 from a rotation center Q on the axis P (see also the enlarged view of FIG. 8 ) toward the inner edge 811a of the opening 811. The radial support rods 824 are disposed radially at equal intervals around the rotation center Q.

[0035] 5, the support portion 83 includes a first support rod 831, a second support rod 832, a third support rod 833, a fourth support rod 834, and a fifth support rod 835, which are formed in this order from the mirror support portion 82 toward the inner edge 811a of the main body frame 81. Each of the support rods 831 to 835 is formed in a planar shape with approximately the same width. The mirror 6 is supported by the multiple support portions 83 so as to be rotatable (or tiltable) mainly around two axes.

[0036] The first support rod 831 is connected to the mirror 6 and extends in the radial direction D1 from the rotation center Q of the mirror 6 toward the inner edge 811a in a front view. The first support rod 831 is disposed on an extension line of the radial support rod 824, which is wider than the first support rod 831.

[0037] The second support rod 832 is connected to the first support rod 831 and extends in a first circumferential direction D21 (clockwise when viewed from the front in FIG. 5) relative to the rotation center Q. The third support rod 833 is connected to the second support rod 832 and extends in a second circumferential direction D22 (counterclockwise when viewed from the front in FIG. 5) opposite to the first circumferential direction D21, on the outer diameter side of the rotation center Q relative to the second support rod 832. The fourth support rod 834 is connected to the third support rod 833 and extends in the first circumferential direction D21 relative to the third support rod 833, on the outer side of the rotation center Q. The fifth support rod 835 extends in the radial direction D1 from the fourth support rod 834 and is connected to the fourth support rod 834 and the inner edge 811a of the opening 811.

[0038] The first support rod 831 is disposed closer to the second circumferential direction D22 than the fifth support rod 835. The second support rod 832 and the third support rod 833 are disposed substantially parallel to each other. The first support rod 831 and the second support rod 832 are connected via a first bent portion 836 having a substantially right-angled arc shape. The angular difference θ1 between the first support rod 831 and the fifth support rod 835 relative to the rotation center Q is smaller than the angular difference between the first support rods 831 of the support portions 83 adjacent to each other around the rotation center Q (or the angular difference between the fifth support rods 835 of the support portions 83 adjacent to each other around the rotation center Q).

[0039] The second support rod 832 and the third support rod 833 are connected via a substantially arc-shaped first folded portion 837 that is wider than the width W1 of the outer edges of the second support rod 832 and the third support rod 833. The first folded portion 837 has a bulging portion 837a on the second support rod 832 side that protrudes more than a bulging portion 837b on the third support rod 833 side, and is formed so that the first folded portion 837 bulges outward toward the rotation center Q relative to the inner edge 811a. The second support rod 832 extends from the first support rod 831 side toward the third support rod 833 side (i.e., toward the first circumferential direction D21) so that its diameter gradually decreases toward the rotation center Q.

[0040] The third support rod 833 is formed longer than the second support rod 832. The third support rod 833 and the fourth support rod 834 are arranged approximately parallel to each other. The third support rod 833 and the fourth support rod 834 are connected via a substantially arc-shaped second folded portion 838 that is wider than the width W2 of the outer edges of the third support rod 833 and the fourth support rod 834. The second folded portion 838 is formed in a substantially arc-shaped shape with a larger diameter than the first folded portion 837. The second folded portion 838 has a bulging portion 838b on the fourth support rod 834 side that protrudes more than the bulging portion 838a on the third support rod 833 side, and is formed so that the second folded portion 838 as a whole bulges toward the inner edge 811a with respect to the rotation center Q on the inner edge 811a side. The second folded portion 838 is arranged so as to overlap the first folded portion 837 of the adjacent support portion 83 in the radial direction D1.

[0041] The fourth support rod 834 and the fifth support rod 835 are connected via a second bent portion 839 having a substantially right-angled arc shape. In this embodiment, a circumferential spring radius r2 from the rotation center Q to the outer edge of the fourth support rod 834 is set to be equal to or less than twice the radius of the mirror support portion 82 (i.e., the mirror radius r1 from the rotation center Q to the outer edge of the mirror support portion 82). In addition, the circumferential spring radius r2 is set to be equal to or greater than the length of the fifth support rod 835. Therefore, the fifth support rod 835 is formed longer than the distance from the mirror 6 to the outer edge 834a of the fourth support rod 834.

[0042] The scanner device drive circuit 14 shown in FIG. 1 includes yoke coils 533 and 543 as load circuits and a driver circuit (or switching circuit), not shown. The control unit 11 controls the scanner device drive circuit 14 to supply excitation current to the yoke coils 533 and 543. This generates magnetic fields in the first magnetic path C1 of the first yoke 51 and the second magnetic path C2 of the second yoke 52, generating magnetic fields in the direction between the first ends 532a of the first yoke 51 and the direction between the second ends 542a of the second yoke 52 with intensities specified by the control unit 11. The permanent magnet 61 is subjected to attractive or repulsive forces by the magnetic fields in the direction between the first ends 532a of the first yoke 51 and the direction between the second ends 542a of the second yoke 52. Depending on the intensities and intensity ratios of these magnetic fields, the mirror 6 is controlled to tilt in a predetermined direction and at a predetermined angle around the rotation center Q in accordance with the control instructions.

[0043] In addition, when the mirror 6 is in an unloaded state where the magnetic field from the electromagnet is not acting, the mirror 6 is resiliently biased by the restoring force (resilient force) of the support portion 83 to a reference position (the state of the mirror 6 in Figure 1) where the axis P of the yoke member 5 and the reflecting portion 6a are approximately perpendicular.

[0044] The control unit 11 determines the tilt (tilt direction and tilt angle) of the mirror 6 based on the light receiving position of the laser light L2 received by the detection unit 431. The control unit 11 can calculate the position of the optical axis of the laser light L2 irradiated to the detection unit 431 and determine the tilt of the mirror 6. The control unit 11 may determine the correspondence between the position of the optical axis with respect to a reference point on the light receiving surface of the detection unit 431 and the tilt of the mirror 6 by calculation, or may determine it in advance by referring to a correspondence table.

[0045] In the present embodiment, the mirror member 7 including the main body frame 81, the mirror 6, and the inner edge 811a of the main body frame 81 and the plurality of support parts 83 that connect the mirror 6 radially has been described. In this mirror member 7, the support portion 83 includes a first support rod 831 connected to the mirror 6 and extending in the radial direction D1 from the rotation center Q of the mirror 6 toward the inner edge 811a, a second support rod 832 connected to the first support rod 831 and extending in the first circumferential direction D21 toward the rotation center Q, a third support rod 833 connected to the second support rod 832 and extending in the second circumferential direction D22 opposite to the first circumferential direction D21 on the outer diameter side of the rotation center Q relative to the second support rod 832, a fourth support rod 834 connected to the third support rod 833 and extending in the first circumferential direction D21 toward the outside of the rotation center Q relative to the third support rod 833, and a fifth support rod 835 extending in the radial direction D1 from the fourth support rod 834 and connected to the fourth support rod 834 and the inner edge 811a.

[0046] This allows the support portion 83 to be arranged long in the limited space inside the main body frame 81, and the operating range of the mirror support portion 82 that supports the mirror 6 in the direction of the axis P can be widened. Also, by making the support portion 83 a reciprocating spring shape and offsetting the connection position on the mirror 6 side from the connection position on the main body frame 81 side in the angular direction relative to the rotation center Q, it is possible to improve the linearity of the light scanning (linear drive) of the mirror 6 in the primary direction and the movement performance in the secondary direction, such as circular movement. With this configuration, it is possible to configure a mirror member 7 that is highly reliable and can be easily manufactured.

[0047] Furthermore, by forming the third support rod 833 longer than the second support rod 832, the total length of the support portion 83 can be made longer, and the driving range of the mirror 6 (for example, the tilt angle range) can be made wider.

[0048] Furthermore, when a metal material is used for the mirror support member 8, as opposed to a MEMS mirror made using a silicon process, such as a conventional small oscillating mirror that is available on the market, material, processing, and development costs can be kept lower than in the past, and since it is not as brittle as silicon MEMS, it is easy to handle, and manufacturing costs can be reduced.

[0049] Furthermore, the closer the trajectory of the laser light L1 reflected by the mirror 6 (in other words, the drive trajectory of the mirror 6) is to the input signal (for example, the more linear it is with respect to the input signal), the easier it is to control the tilt angle and tilt direction of the mirror 6.

[0050] For example, to improve the drive trajectory, it is preferable to consider the following, focusing on the mode ratio of the resonant frequencies. When the frequency ratio between the first and second modes approaches an integer multiple, the resonant frequencies of the first and second modes tend to overlap. Therefore, to prevent or reduce significant drive trajectory disturbance, simulation results show that there is a nearly linear correlation between the radius ratio a of the circumferential spring radius r2 to the mirror radius r1 and the resonant frequency ratio f of the second resonant frequency to the first resonant frequency. Therefore, by reducing the radius ratio a, the resonant frequency ratio f can be moved away from an integer multiple. Specifically, to fix the mirror radius r1 and reduce the radius ratio a, the circumferential spring radius r2 must be reduced.

[0051] In one configuration example of the mirror member 7 of this embodiment, the fifth support rod 835 is formed to be longer than the distance from the mirror 6 to the outer edge of the fourth support rod 834, thereby making it possible to reduce the radius ratio a of the circumferential spring radius r2 to the mirror radius r1. This makes it possible to prevent or reduce trajectory disturbances caused by vibration of the mirror 6.

[0052] Also, a configuration has been described in which the first folded portion 837 bulges out toward the rotation center Q from the inner edge 811a, and the second folded portion 838 bulges out toward the inner edge 811a from the rotation center Q. This makes it possible to make the circumferential spring radius r2 of the fourth support rod 834 smaller and closer to the mirror radius r1 while increasing the curvature radius R of each folded portion 837, 838.

[0053] Moreover, since the first turning portion 837 and the second turning portion 838 are locations where stress is concentrated due to the mirror rocking displacement, it is preferable to make the radius of curvature R as large as possible in order to alleviate the stress concentration.

[0054] In one example configuration of the mirror member 7 of this embodiment, the second support rod 832 and the third support rod 833 are connected via a circular arc-shaped first folded portion 837 whose width is wider than the width W1 of the outer edges of the second support rod 832 and the third support rod 833, and the third support rod 833 and the fourth support rod 834 are connected via a circular arc-shaped second folded portion 838 whose width is wider than the width W2 of the outer edges of the third support rod 833 and the fourth support rod 834. By providing a hump-shaped bulge at the folded portion in this manner, a small radius ratio a and a large folded radius of curvature R can be achieved, and the maximum von Mises stress can be reduced (for example, by -30%). This shape allows the mirror support member 8 to reduce stress concentration and achieve both a wider scanning angle and high fracture resistance.

[0055] Additionally, the second support rod 832 extends from the first support rod 831 side toward the third support rod 833 side so as to narrow its diameter toward the rotation center Q. This allows the second folded portion 838 to be disposed radially outward of the first folded portion 837 in the radial direction D1, thereby increasing the radius of curvature R and lengthening the entire support portion 83.

[0056] Furthermore, in one configuration example of the mirror member 7 of this embodiment, the first support rod 831 is disposed closer to the second circumferential direction D22 than the fifth support rod 835. In this way, by providing an angle difference between the first support rod 831 drawn out from the mirror support portion 82, which is the mounting frame of the mirror 6, and the fifth support rod 835 connected to the main body frame 81, it is possible to improve the linearity of the light scanning (linear drive) of the mirror 6 in the primary direction. The angle can be optimized by simulation; for example, θ1 in this embodiment is 21°.

[0057] This concludes the description of the embodiment of the present disclosure, but the aspects of the present disclosure are not limited to this embodiment.

[0058] For example, the circumferential direction (first circumferential direction D21, second circumferential direction D22) includes a direction substantially parallel to the circumferential direction with respect to the rotation center Q, and is not limited to strictly the circumferential direction. Moreover, the radial direction D1 includes a direction substantially parallel to the outer diameter direction from the rotation center Q toward the inner edge 811a of the main body frame 81, and is not limited to strictly the radial direction.

[0059] Furthermore, it is preferable that the first support rod 831 and the fifth support rod 835 are arranged at different angles to provide a step so that they are non-coaxial, but this is not limiting, and they may also be arranged parallel to each other and non-coaxial to provide a step. Even when the first support rod 831 and the fifth support rod 835 are arranged parallel to each other, it is possible to improve the linearity of the light reflection direction when the mirror 6 is tilted in one direction.

[0060] The support portion 83 may be formed so that the first folded portion 837 and the second folded portion 838 are wider than the first support rod 831 to the fifth support rod 835 .

[0061] Furthermore, the distance measurement optical system 12 of the present disclosure may be used to guide light used for purposes other than distance measurement.

[0062] Furthermore, the distance measurement optical system 12 of the present disclosure may be used to guide light for purposes other than distance measurement. The mirror support member 8 is not limited to a deflection member, and may support other optical members that have the function of rotating around the rotation center Q. The mirror 6 may be other optical members or members other than optical members instead of a deflection member.

[0063] The configuration of the present disclosure is exemplified as follows. [1] a main body frame; a mirror; and a plurality of support portions that radially connect an inner edge of the main body frame and the mirror; The support portion is a first support rod connected to the mirror and extending radially from a rotation center of the mirror toward the inner edge; a second support rod connected to the first support rod and extending toward a first circumferential direction side with respect to the rotation center; a third support rod connected to the second support rod and extending from the second support rod on a second circumferential direction side opposite to the first circumferential direction on an outer diameter side of the rotation center; a fourth support rod connected to the third support rod and extending toward the first circumferential direction outside the rotation center relative to the third support rod; a fifth support rod extending from the fourth support rod in the radial direction and connected to the fourth support rod and the inner edge; A mirror member comprising: [2] The mirror member according to [1], wherein the first support rod is disposed on the second circumferential direction side of the fifth support rod. [3] The second support rod and the third support rod are connected via a first folded portion having an arc shape whose width is wider than the width of the outer edges of the second support rod and the third support rod, The third support rod and the fourth support rod are connected via an arc-shaped second folded portion that is wider than the width of the outer edges of the third support rod and the fourth support rod. [1] The mirror member according to [1]. [4] the first folded portion bulges out toward the rotation center more than the inner edge, The second folded portion bulges out toward the inner edge side from the rotation center. The mirror member according to [3]. [5] The mirror member according to [1], wherein the third support rod is formed to be longer than the second support rod. [6] The mirror member according to [1], wherein the second support rod extends from the first support rod side toward the third support rod side so as to narrow in diameter toward the rotation center side. [7] The fifth support rod is formed to be longer than the distance from the mirror to the outer edge of the fourth support rod. [8] The second support rod and the third support rod are connected via a first folded portion having an arc shape whose width is wider than the width of the outer edges of the second support rod and the third support rod, The third support rod and the fourth support rod are connected via an arc-shaped second folded portion that is wider than the width of the outer edges of the third support rod and the fourth support rod, the first folded portion bulges out toward the rotation center more than the inner edge, the second folded portion bulges outward from the rotation center toward the inner edge, The third support rod is formed longer than the second support rod, The second support rod extends from the first support rod side toward the third support rod side so as to decrease in diameter toward the rotation center side, the fifth support rod is formed to be longer than the distance from the mirror to the outer edge of the fourth support rod; The mirror member according to [2]. [Explanation of symbols]

[0064] 1 Light source device 2. Scanner device 3 Deflection control device 4. Tilt detection device 5 Yoke member 6. Mirror 6a Reflector 7 Mirror material 8 Mirror support member 11 Control section 12 Distance measuring optical system 13 Optical system driver circuit 14 Scanner device driver circuit 15 Angle sensor circuit 41 Light source 42 First Lens 43 Detection circuit board 44 Beam Splitter 46 Second Lens 51 First York 52 Second York 53 First arm member 54 Second arm member 55 Base member 55-1 First base member 55-2 Second base member 55a Side edge 61 Permanent Magnets 62 Reflective material 81 Main frame 82 Mirror support 83 Support part 431 Detection unit 531 Torso 531a End 532 Protrusion 532a First end 533 York Coil 541 Torso 541a End 542 Protrusion 542a Second end 543 Yoke Coil 551 Notch 551a Inner surface 553,554 opening 811 Opening 811a Common-law marriage 812,813 Positioning holes 814 Fixing hole 821 Annular part 821 First Ring 822 Second Ring 823 Third Ring 824 Radial support rod 831 First support rod 832 Second support rod 833 Third support rod 834 Fourth support rod 834a Outer edge 835 Fifth support rod 836 First bending part 837 First folding-back part 837a, 837b Bulging part 838 Second folding-back part 838a, 838b Bulging part 839 Second bending part C1 First magnetic circuit C2 Second magnetic circuit D1 Radial direction D21 First circumferential direction D22 Second circumferential direction G Gap L1 (L11, L12), L2 Laser beam L3 Reflected light P Axis Q Rotation center R Radius of curvature a Radius ratio f Resonance frequency ratio r1 Mirror radius r2 Circumferential spring radius θ1 Angle difference

Claims

1. a main body frame; a mirror; and a plurality of support portions that radially connect an inner edge of the main body frame and the mirror; The support portion is a first support rod connected to the mirror and extending radially from a rotation center of the mirror toward the inner edge; a second support rod connected to the first support rod and extending toward a first circumferential direction side with respect to the rotation center; a third support rod connected to the second support rod and extending from the second support rod on a second circumferential direction side opposite to the first circumferential direction on an outer diameter side of the rotation center; a fourth support rod connected to the third support rod and extending toward the first circumferential direction outside the rotation center relative to the third support rod; a fifth support rod extending from the fourth support rod in the radial direction and connected to the fourth support rod and the inner edge; A mirror member comprising:

2. The mirror member according to claim 1 , wherein the first support rod is disposed closer to the second circumferential direction than the fifth support rod.

3. The second support rod and the third support rod are connected via an arc-shaped first folded portion that is wider than the width of the outer edges of the second support rod and the third support rod, The third support rod and the fourth support rod are connected via an arc-shaped second folded portion that is wider than the width of the outer edges of the third support rod and the fourth support rod. The mirror member according to claim 1 .

4. the first folded portion bulges out toward the rotation center more than the inner edge, The second folded portion bulges out toward the inner edge side from the rotation center. The mirror member according to claim 3 .

5. The mirror member according to claim 1 , wherein the third support rod is formed to be longer than the second support rod.

6. The mirror member according to claim 1 , wherein the second support rod extends from the first support rod side toward the third support rod side so as to decrease in diameter toward the rotation center side.

7. 7. The mirror member according to claim 1, wherein the fifth support rod is formed to be longer than the distance from the mirror to an outer edge of the fourth support rod.

8. The second support rod and the third support rod are connected via an arc-shaped first folded portion that is wider than the width of the outer edges of the second support rod and the third support rod, The third support rod and the fourth support rod are connected via an arc-shaped second folded portion that is wider than the width of the outer edges of the third support rod and the fourth support rod, the first folded portion bulges out toward the rotation center more than the inner edge, the second folded portion bulges outward from the rotation center toward the inner edge, The third support rod is formed longer than the second support rod, The second support rod extends from the first support rod side toward the third support rod side so as to decrease in diameter toward the rotation center side, the fifth support rod is formed to be longer than the distance from the mirror to the outer edge of the fourth support rod; The mirror member according to claim 2 .

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